TW202038372A - Carrier of vertical continuous vacuum process equipment - Google Patents

Abstract

A carrier of continuous vacuum process equipment is applied for clamping a substrate, which has an upper end and a lower end. The carrier includes a main body, a first clamp, a movable seat, and a second clamp. The main body has a hollow portion passing therethrough. The first clamp is pivotally disposed on the main body to pivotally sway open or close with respect to the main body, so as to clamp the upper end of the substrate. The movable seat is able to be vertically disposed on the main body. The second clamp is pivotally disposed on the movable seat for clamping the lower end of the substrate. Therefore, in the open status, the substrate is held on the hollow portion. In the close status, the substrate is pulled to maintain the flatness thereof, preventing deformation from occurring during etching operation.

Description

Carrier for vertical continuous vacuum process equipment

The present invention relates to a carrier, in particular to a carrier of a vertical continuous vacuum process equipment.

For example, the Taiwan patent I584706 invention patent, which discloses a plasma etching device for printed circuit boards, mainly adopts an airflow adsorption plate to adsorb the printed circuit board on it, and then etch one of the printed circuit boards in a vertical manner through the plasma surface.

However, in the foregoing, the fixing component is arranged between the plasma etching electrode and the airflow adsorption board to be fixed to the printed circuit board correspondingly. The fixing component includes a back plate and a clamping part, and the clamping part is frame-shaped. The printed circuit board is clamped and fixed to the back plate, and then the air flow is used to adsorb the printed circuit board.

However, the inventor of this case upholds the spirit of excellence, researches on the fixing method of fixing the printed circuit board, and pioneered a vertical continuous vacuum process equipment carrier, with a more stable fixed structure, for use by related industries.

In order to solve the above problems, the present invention discloses a carrier for a vertical continuous vacuum process equipment, which uses a first clamp and a second clamp to clamp the upper end and the lower end of the substrate respectively, and when the clamp is fixed, the substrate is pulled down and supported , Its clamping effect is good and it can ensure the flatness of the substrate, and avoid bending deformation during etching operation.

To achieve the above objective, an embodiment of the present invention provides a carrier for a vertical continuous vacuum process equipment, which is used to clamp a substrate. The substrate has an upper end and a lower end. The carrier includes a body, a first clamp, and a Movable seat and a second fixture. The system is an upright frame. The main body has an upper part, a lower part, a first side surface and a second side surface located on both sides of the upper part and the lower part, and a hollow part penetrates between the first side surface and the second side surface; It can be pivotally arranged on the upper part to be opened or closed relative to the main body for clamping on the upper end of the substrate; the movable seat can be vertically arranged on the lower part; the second clamp is pivotally arranged on the movable seat for clamping on the lower end of the substrate; Thereby, when the first clamp and the second clamp are in the unfolded state, the hollow part can receive the substrate, and when the first clamp and the second clamp are in the closed state, the substrate is pulled downward.

Thereby, when the first clamp and the second clamp are closed synchronously, the substrate is pulled downward to maintain the flatness of the substrate to avoid bending and deformation due to etching operations.

The exemplary embodiments of the present invention are described in detail below with reference to the drawings, and are not intended to limit the technical principles of the present invention to specific disclosed embodiments, and the scope of the present invention is only limited by the scope of the patent application, covering alternatives, modifications and Equivalent.

Please refer to FIGS. 1 to 6. The carrier 100 of the present invention is a vertical continuous vacuum process equipment, which includes a body 10, a first clamp 20, a movable seat 30 and a second clamp 40. Wherein, the carrier 100 is used to carry a substrate 1 and is etched in the chamber of a vertical continuous etching machine. The substrate 1 referred to in the present invention may be a printed circuit board, a glass plate or other composite material board, etc., and the substrate 1 has an upper end 1a, a lower end 1b, and a side end 1c located between the upper end 1a and the lower end 1b.

The main body 10 is an upright frame. The main body 10 has an upper portion 11, a lower portion 12, a first side surface 13 and a second side surface 14 on both sides of the upper portion 11 and the lower portion 12, and the first side surface 13 and the second side surface 14 is provided with a hollow portion 15 therethrough.

The first clamp 20 is pivotally arranged on the upper part 11 such that it can be opened or closed relative to the main body 10 to clamp the upper end 1a of the base plate 1. In the embodiment of the present invention, the first side surface 13 of the main body 10 is provided with a first mounting groove 16, and the first clamp 20 includes a first clamping member 21, a first fixing member 22 and a first torsion spring 23. The first fixing member 22 is arranged on the upper part 11 and is accommodated in the first mounting groove 16. The first clamping member 21 is pivoted to the first fixing member 22 by a first pivot 24. The first torsion spring 23 The number is two and is penetrated by the first pivot 24 and arranged between the first clamping member 21 and the first fixing member 22 so that the first clamping member 21 is normally closed with respect to the main body 10. Wherein, the first mounting groove 16 extends toward the hollow portion 15 with a first receiving edge 161 for receiving the upper end 1a of the substrate 1. In the embodiment of the present invention, the number of the first clamp 20 is plural, as shown in the figure. The four revealed by the face.

In addition, the first mounting slot 16 has a first driving hole 17 corresponding to the first clamping member 21, and the first driving hole 17 is opened by the second side surface 14. It is further explained that the first jig 20 is actuated by a jig driving device 2 of the vertical continuous etching machine. The jig driving device 2 is actuated by pneumatic or oil pressure, and includes a device corresponding to the first drive The first thimble 2a of the hole 14, and the end of the first thimble 2a has a bevel, the first thimble 2a is inserted into the first driving hole 14 to support the first clamping member 21 so that it is opposite to the first fixing member 22 Pivotally swing, so that the first clamping member 21 can be expanded relative to the main body 10 so that the hollow portion 15 is inserted into the base plate 1. When the first thimble 2a is reset, the first clamping member 21 swings back and clamps The upper end 1a of the substrate 1.

The movable seat 30 can be vertically arranged on the lower part 12. In the embodiment of the present invention, an elastic member 50 is provided between the lower part 12 and the movable seat 30, which is a tension spring, and is used to make the movable seat 30 normally away from the upper part 11 and toward the lower part 12. Wherein, one side of the lower part 12 and the hollow 15 is provided with a connecting edge 151, and the movable seat 30 abuts against the connecting edge 151 under normal conditions, and the present invention further includes a connecting rod 51 through which the movable seat 30 is locked. Set at the connecting edge 151. Further, the movable seat 30 has a spring groove 31, the connecting rod 51 has a screw portion 511 and a head 512, the screw portion 511 passes through the spring groove 31 and is locked on the connecting edge 151, and the elastic member 50 is arranged on the spring The groove 31 has one end arranged at the head 512 and the other end arranged at the bottom of the spring groove 31, so that the elastic member 50 is arranged between the movable seat 30 and the connecting rod 51, and the movable seat 30 is kept normally abutting against the connecting edge 151.

In addition, the spring groove 31 of the movable seat 30 is provided on one side, and a second installation groove 32 is provided on the same side. The second installation groove 32 has a second driving hole 33 corresponding to the hollow portion 15, and the second installation groove 32 A second receiving edge 321 extends toward the hollow portion 15 for receiving the lower end 1 b of the substrate 1. The movable seat 30 is provided with a first guide portion 34 on the side opposite to the second mounting groove 32, and the inner edge of the hollow portion 15 and adjacent to the connecting edge 151 is provided with a second guide portion 18, the second guide portion 18 is provided for the sliding cooperation of the first guiding part 34, for example, a matching structure of a sliding rail and a sliding groove.

The structure of the second clamp 40 is substantially similar to that of the first clamp 20, and the second clamp 40 and the first clamp 20 are pivotally arranged on the movable seat 30 for clamping the lower end 1b of the substrate 1. In this creative embodiment, the second clamp 40 can be synchronously linked with the first clamp 20 and pivotally arranged on the movable seat 30. The second clamp 40 includes a second clamp 41, a second fixing part 42 and The second torsion spring 43 between the second clamping member 41 and the second fixing member 42. The second fixing member 42 is received in the second mounting groove 32, the second clamping member 42 is pivoted to the second fixing member 42 by a second pivot 44 and corresponds to the second driving hole 33, and the second torsion spring The number 43 is two and is penetrated by the second pivot 44 and arranged between the second clamping member 41 and the second fixing member 42 so that the second clamping member 41 is normally closed relative to the main body 10. In the embodiment of the present invention, the number of the second clamp 40 is also four.

It should be noted that the clamp driving device 2 further includes a second thimble 2b corresponding to the second driving hole 33, and the second thimble 2b and the first thimble 2a act in synchronization with a bevel at the end. When the second thimble 2b is inserted into the second driving hole 33, it is used to support the second clamping member 41 to pivot relative to the second fixing member 42, so that the second clamping member 41 can be expanded relative to the main body 10 The substrate 1 is inserted into the hollow portion 15. When the second thimble 2 b is reset, the second clamping member 42 swings back to clamp the lower end 1 b of the substrate 1. Furthermore, since the end of the second thimble 2b has an oblique angle, and the height of the second thimble 2b is slightly higher than the second driving hole 33, the second thimble 2b can be pushed up synchronously when inserted into the second driving hole 33 The movable seat 30 is slightly translated toward the upper part 11, and when the second thimble 2b is retracted and the second clamping member 41 is closed, the movable seat 30 is reset in the direction away from the upper part 11 to pull the substrate 1 downwards and maintain the substrate 1 Straightness, in order to facilitate subsequent processing operations.

Furthermore, the present invention further includes a third clamp 60 which is disposed on the first side surface 13 of the main body 10 and located on both sides of the hollow portion 15. The third clamp 60 is also actuated by the clamp driving device 2. In this embodiment, the third clamp 60 is clamped on both sides of the substrate 1 after the first clamp 20 and the second clamp 40 simultaneously clamp the substrate 1 , That is, the action of the third clamp 60 is not synchronized with the first clamp 20 and the second clamp 40. On the contrary, during the unfolding action, the third clamp 60 is deployed earlier than the first clamp 20 and the second clamp 40, and then The first clamp 20 and the second clamp 40 are unfolded to remove the substrate 1 from the body 10. In the embodiment of the present invention, the structure of the third clamp 60 is substantially the same as that of the first clamp 20 and the second clamp 40 and is plural.

As shown in Figures 3 to 7, the present invention uses the first ejector pin 2a and the second ejector pin 2b of the fixture driving device 2 to support the first fixture 20 and the second fixture 40, so that the first fixture 20 and the second fixture 40 In the expanded state, the movable seat 30 is simultaneously lifted by the second ejector pin 2b, so that the hollow portion 15 can receive the substrate 1. After the substrate 1 is accommodated in the hollow portion 15, the first ejector pin of the clamp driving device 2 is driven 2a and the second thimble 2b are retracted, the first clamp 20 and the second clamp 40 are closed and clamped on the upper end 1a and the lower end 1b of the substrate 1, and then the substrate 1 is pulled downward, so that the substrate 1 is firmly clamped on The main body 10 can maintain the flatness and avoid bending and deformation caused by the etching operation.

In summary, this case has the following characteristics:

1. In the present invention, when the second clamp 40 is expanded and closed, the movable seat 30 is synchronously driven to move, so that after the second clamp 40 is closed and clamped on the substrate 1, the substrate 1 can be pulled down to maintain straightness. Avoid bending and deformation due to etching.

2. The first clamp 20, the second clamp 40 and the movable seat 30 of the present invention act synchronously only through the support of the first ejector pin 2a and the second ejector pin 2b of the clamp driving device 2. The structure is simple and does not require a complicated power device Come to reach.

Above, although the present invention is described in a preferred embodiment, those skilled in the art can make various changes in various forms without departing from the spirit and scope of the present invention. The foregoing embodiments are only used to illustrate the present invention, and not to limit the scope of the present invention. Any modification or change that does not violate the spirit of the present invention falls within the scope of the patent application of the present invention.

100: Carrier for vertical continuous vacuum process equipment 11: Upper 13: First side 15: Hollow part 16: first installation slot 17: The first drive hole 20: First fixture 22: The second fixing part 24: first pivot 31: spring groove 321: Second Continuation 34: The first guide 41: The second clamping piece 43: second torsion spring 50: Elastic member 511: Snail 60: Third fixture 1a: upper end 1c: side end 2a: The first thimble 10: body 12: lower part 14: second side 151: Link Edge 161: The First Continuation 18: The second guide 21: The first clamping piece 23: The first torsion spring 30: movable seat 32: The second installation slot 33: second drive hole 40: second fixture 42: The second fixing part 44: second pivot 51: connecting rod 512: head 1: substrate 1b: bottom 2: Fixture drive device 2b: second thimble

[Figure 1] is a schematic diagram of the appearance of the carrier of the vertical continuous vacuum process equipment of the present invention. [Figure 2] is an exploded schematic diagram of a part of the structure of the carrier of the vertical continuous vacuum process equipment of the present invention. [Fig. 3] is a schematic diagram of the carrier of the vertical continuous vacuum process equipment of the present invention supporting the substrate. [Figure 4] is a schematic view showing the expansion of the first fixture and the second fixture of the carrier of the vertical continuous vacuum process equipment of the present invention. [Figure 5] is a schematic diagram of the lifting action of the movable seat of the carrier of the vertical continuous vacuum process equipment of the present invention. [Figure 6] is a closed schematic diagram of the first clamp and the second clamp of the carrier of the vertical continuous vacuum process equipment of the present invention. [Fig. 7] is a schematic diagram of the carrier of the vertical continuous vacuum process equipment of the present invention completing the substrate receiving.

10: body

11: Upper

12: lower part

13: First side

14: second side

15: Hollow part

151: Link Edge

16: first installation slot

161: The First Continuation

17: The first drive hole

18: The second guide

20: First fixture

21: The first clamping piece

22: The second fixing part

23: The first torsion spring

24: first pivot

30: movable seat

32: The second installation slot

321: Second Continuation

33: second drive hole

34: The first guide

40: second fixture

41: The second clamping piece

42: The second fixing part

43: second torsion spring

44: second pivot

60: Third fixture

Claims (11)

A carrier for vertical continuous vacuum process equipment, which is used to clamp a substrate. The substrate has an upper end and a lower end. The carrier includes: 　　 a body, which is a vertical frame, the body has an upper part and a lower part And a first side surface and a second side surface located on both sides of the upper part and the lower part, a hollow part penetrates between the first side surface and the second side surface; a first clamp can be opened or closed relative to the body The ground is pivotally arranged on the upper part for clamping on the upper end of the base plate; a movable seat is vertically and translationally arranged on the lower part; and a second clamp is pivotally arranged on the movable seat for clamping At the lower end of the substrate; thereby, when the first clamp and the second clamp are in the unfolded state, the hollow portion can receive the substrate, and when the first clamp and the second clamp are in the closed state, the substrate moves toward Pulled down. The carrier of a vertical continuous vacuum process equipment according to claim 1, wherein an elastic member is provided between the lower part and the movable seat to make the movable seat normally away from the upper direction and toward the lower part. The carrier of the vertical continuous vacuum process equipment according to claim 2, further comprising a connecting rod, the lower part and one side of the hollow part are provided with a connecting edge, and the connecting rod penetrates the movable seat and is locked to the For the connecting side, the elastic member is arranged between the movable seat and the connecting rod. The carrier of a vertical continuous vacuum process equipment according to claim 3, wherein the connecting rod has a screw portion and a head, the screw portion is locked on the connecting side, the movable seat has a spring groove, the One end of the elastic member is arranged on the head, and the other end is arranged on the bottom of the spring groove. The carrier for a vertical continuous vacuum process equipment according to claim 4, wherein the elastic member is a tension spring; one side of the movable seat is provided with a first guiding part, and the inner edge of the hollow part is adjacent to the connection A second guiding part is provided on the side, and the second guiding part is used for sliding cooperation with the first guiding part. The carrier of a vertical continuous vacuum process equipment according to claim 2, wherein the first clamp includes a first clamping member, a first fixing member, and a first clamping member and a first fixing member. A first torsion spring between the fixing parts, the first fixing part is arranged on the upper part, and the first clamping part is pivotally arranged on the first fixing part and is normally closed relative to the body. The carrier for a vertical continuous vacuum process equipment according to claim 6, wherein the first side surface has a first mounting slot for the first fixing member to accommodate, and the first mounting slot has a first drive The hole corresponds to the first clamping member, and the first driving hole is opened from the second side surface. The carrier for a vertical continuous vacuum process equipment according to claim 7, wherein the second clamp and the first clamp are arranged in the movable seat in synchronization with each other, and the second clamp includes a second clamp, a A second fixing member and a second torsion spring disposed between the second clamping member and the second fixing member, the second fixing member is disposed on the movable seat, and the second clamping member is pivoted to the second The fixing part is normally closed relative to the body. The carrier for a vertical continuous vacuum process equipment according to claim 8, wherein the movable seat has a second mounting groove for the second fixing member to accommodate, and the second mounting groove has a second driving hole Corresponding to the second clamping member and the hollow part. The carrier of a vertical continuous vacuum process equipment according to claim 9, wherein the first mounting groove extends toward the hollow portion with a first receiving edge for receiving the upper end of the substrate, and the second mounting groove faces the The hollow portion extends with a second receiving edge for receiving the lower end of the substrate; the number of the first clamp and the second clamp is plural. The carrier of the vertical continuous vacuum process equipment according to claim 1, further comprising a third clamp, which is arranged on the first side surface of the main body and located on both sides of the hollow part. A clamp and the second clamp clamp the substrate synchronously, and then clamp it on both sides of the substrate.

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