TW202034563A - Copper foil and lithium ion battery negative electrode current collector including said copper foil, and manufacturing method thereof - Google Patents

Copper foil and lithium ion battery negative electrode current collector including said copper foil, and manufacturing method thereof Download PDF

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TW202034563A
TW202034563A TW109101546A TW109101546A TW202034563A TW 202034563 A TW202034563 A TW 202034563A TW 109101546 A TW109101546 A TW 109101546A TW 109101546 A TW109101546 A TW 109101546A TW 202034563 A TW202034563 A TW 202034563A
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copper foil
negative electrode
copper
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TWI821504B (en
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佐藤牧子
大久保賢
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日商納美仕有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/66Selection of materials
    • H01M4/661Metal or alloys, e.g. alloy coatings
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/32Alkaline compositions
    • C23F1/34Alkaline compositions for etching copper or alloys thereof
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34Pretreatment of metallic surfaces to be electroplated
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    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/66Selection of materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/66Selection of materials
    • H01M4/665Composites
    • H01M4/667Composites in the form of layers, e.g. coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • H01M10/0525Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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Abstract

The purpose of the present invention is to provide: a novel copper foil and a lithium ion battery negative electrode current collector including said copper foil; and a manufacturing method thereof. According to one embodiment, produced is a copper foil having a 5 nm-tall protruding part on at least a portion of a surface thereof, where the density of the protruding part is 15 to 100 per 3.8 [mu]m. Also, a negative electrode current collector is produced using this copper foil.

Description

銅箔、包含該銅箔的鋰離子電池之負極集電體及該負極集電體之製造方法Copper foil, negative electrode current collector of lithium ion battery containing the copper foil, and manufacturing method of the negative electrode current collector

本發明係關於一種銅箔、包含該銅箔的鋰離子電池之負極集電體及該負極集電體之製造方法。The present invention relates to a copper foil, a negative electrode current collector of a lithium ion battery containing the copper foil, and a method for manufacturing the negative electrode current collector.

鋰離子電池(LIB)的負極集電體中,若為了高輸出、高能量密度化而採用大容量之活性物質,則充電時及放電時的活性物質之體積膨脹率增大。因此,重複充放電後,結合活性物質及集電體之黏著材料會破裂,黏著材料由活性物質界面及集電體界面剝離等,使循環特性劣化。為了防止劣化,已有揭示使銅箔側之黏著材料用量增加,以提升銅箔與負極配合劑層之密著性之發明(日本特開平10-284059號公報)。又,另有揭示在銅箔板表面形成鬚狀銅氧化物使表面積增加,以提升銅箔與活性物質之密著性的發明(日本特開平11-307102號公報)。In the negative electrode current collector of a lithium ion battery (LIB), if a large-capacity active material is used for high output and high energy density, the volume expansion rate of the active material during charging and discharging increases. Therefore, after repeated charging and discharging, the adhesive material that binds the active material and the current collector will be broken, and the adhesive material will be peeled off from the interface of the active material and the current collector, which degrades the cycle characteristics. In order to prevent deterioration, an invention that increases the amount of adhesive material on the copper foil side to improve the adhesion between the copper foil and the negative electrode compound layer has been disclosed (Japanese Patent Laid-Open No. 10-284059). In addition, another invention discloses an invention in which whisker-like copper oxide is formed on the surface of a copper foil plate to increase the surface area to improve the adhesion between the copper foil and the active material (Japanese Patent Laid-Open No. 11-307102).

本發明的目的是提供一種新穎的銅箔、包含該銅箔的鋰離子電池之負極集電體及該負極集電體之製造方法。The object of the present invention is to provide a novel copper foil, a negative electrode current collector of a lithium ion battery containing the copper foil, and a method for manufacturing the negative electrode current collector.

本發明之一實施形態的銅箔,係在至少表面的一部分有高度為5nm以上之凸部,該一部分中,該凸部的密度為每3.8μm中平均15個以上且100個以下。該表面可被鍍敷處理。該一部分中,該凸部的密度可為每3.8μm中平均20個以上且62個以下。又,該一部分的表面粗度Rz之三點標準差σ可為0.5以下,亦可為0.3以下。又,該一部分的表面粗度Rz平均可為2μm以下,亦可為1.54μm以下。每4μm2 中以二值化處理之電流數量的計算個數可為平均200個以上或500個以上。每4μm2 之電流總面積可為平均100000nm2 以上或300000nm2 以上。以X射線光電子能譜測定時,在由表面往深度方向5nm之氧量可為50%以下或25%以下。表面的至少一部分可形成有銅以外之金屬層。該金屬層的厚度可為15nm以上且200nm以下。The copper foil of one embodiment of the present invention has protrusions with a height of 5 nm or more on at least a part of the surface, and the density of the protrusions in this part is 15 or more and 100 or less per 3.8 μm on average. The surface can be plated. In this part, the density of the convex portions may be 20 or more and 62 or less on average per 3.8 μm. In addition, the three-point standard deviation σ of the surface roughness Rz of the part may be 0.5 or less, or 0.3 or less. In addition, the surface roughness Rz of this part may be 2 μm or less on average, or may be 1.54 μm or less. The calculated number of currents to be binarized per 4μm 2 can be an average of 200 or more or 500 or more. The total current area per 4μm 2 can be an average of 100000nm 2 or more or 300,000nm 2 or more. When measured by X-ray photoelectron spectroscopy, the amount of oxygen at 5nm from the surface to the depth direction can be 50% or less or 25% or less. At least a part of the surface may be formed with a metal layer other than copper. The thickness of the metal layer may be 15 nm or more and 200 nm or less.

本發明之其他實施形態係一種鋰離子電池之負極集電體,包含上述任一個銅箔。Another embodiment of the present invention is a negative electrode current collector of a lithium ion battery, which includes any of the above-mentioned copper foils.

本發明之又一實施形態係鋰離子電池之負極集電體的製造方法,該鋰離子電池之負極集電體包含上述任一個銅箔,該製造方法包含:以選自亞氯酸鈉、次氯酸鈉、氯酸鉀及過氯酸鉀中的一種以上之氧化劑氧化銅箔的銅表面,形成凸部之第一步驟;對氧化之該銅表面進行鍍敷處理之第二步驟;及使用將該銅表面鍍敷處理後之該銅箔,製造負極集電體之第三步驟。在該第二步驟前,可另包含將於該第一步驟氧化的該銅表面溶解之步驟及/或還原之第四步驟。Another embodiment of the present invention is a method for manufacturing a negative electrode current collector of a lithium ion battery. The negative electrode current collector of the lithium ion battery includes any of the above-mentioned copper foils. The manufacturing method includes: a method selected from sodium chlorite and sodium hypochlorite The first step of oxidizing the copper surface of copper foil with more than one of potassium chlorate and potassium perchlorate to form protrusions; the second step of plating the oxidized copper surface; and using the copper surface plating treatment Then the copper foil is the third step of manufacturing the negative electrode current collector. Before the second step, it may further include a step of dissolving the copper surface oxidized in the first step and/or a fourth step of reducing.

又,本說明書中,平均值係測定隨機之數個點,例如三點測定時的平均。In addition, in this specification, the average value is measured at a random number of points, for example, the average of the three-point measurement.

本發明之功效:根據本發明,可以提供一種新穎的銅箔、包含該銅箔的鋰離子電池之負極集電體及該負極集電體之製造方法。Effect of the present invention: According to the present invention, it is possible to provide a novel copper foil, a negative electrode collector of a lithium ion battery containing the copper foil, and a method for manufacturing the negative electrode collector.

以下列舉實施例詳細地說明本發明的實施形態。又,本發明之目的、特徵、優點及其構思係發明所屬技術領域中具有通常知識者可藉由本說明書之記載瞭解,只要是發明所屬技術領域中具有通常知識者即可由本說明書之記載容易地再現本發明。以下記載之發明的實施形態及具體的實施例等,係表示本發明的較佳實施態樣,用於例示及說明,本發明並不限制於該等態樣。發明所屬技術領域中具有通常知識者瞭解,在本說明書揭示之本發明的意圖及其範圍內,可根據本說明書之記載進行各種修飾。The following examples illustrate the embodiments of the present invention in detail. In addition, the purpose, features, advantages and concept of the present invention can be understood by those with ordinary knowledge in the technical field of the invention from the description of this specification, and those with ordinary knowledge in the technical field of the invention can easily be understood from the description of this specification. Reproduce the invention. The embodiments and specific examples of the invention described below represent preferred embodiments of the present invention for illustration and description, and the present invention is not limited to these aspects. Those with ordinary knowledge in the technical field to which the invention pertains will understand that various modifications can be made based on the description of this specification within the intent and scope of the invention disclosed in this specification.

<銅箔>本說明書揭示之銅箔可為壓延銅箔、電解銅箔或銅合金箔。銅含量或純度越高越好,較佳為50%以上,更佳為60%以上,又較佳為70%以上,又更佳為80%以上,另較佳為90%以上,另更佳為95%以上,再較佳為98%以上,再更佳為99.5%以上。銅箔的厚度不特別限制,較佳係作為鋰離子電池之負極集電體使用之厚度,舉例如5μm~100μm,可由此範圍依照用途選擇銅箔的厚度。又,銅箔的表面粗度亦不特別限制,可使用任何粗度的銅箔,惟表面粗度過大則拉伸強度降低,負極材料無法填充至凹凸的底部而使密著力降低。此外,表面粗度大且凸部少時,電流會集中於凸部,會發生活性物質剝離使電池特性劣化,故表面粗度較佳為2μm以下。<Copper foil> The copper foil disclosed in this specification may be rolled copper foil, electrolytic copper foil or copper alloy foil. The higher the copper content or purity, the better, preferably more than 50%, more preferably more than 60%, more preferably more than 70%, more preferably more than 80%, more preferably more than 90%, and more preferably It is 95% or more, more preferably 98% or more, and still more preferably 99.5% or more. The thickness of the copper foil is not particularly limited, and it is preferably a thickness used as a negative electrode current collector of a lithium ion battery, for example, 5 μm to 100 μm, and the thickness of the copper foil can be selected from this range according to the application. In addition, the surface roughness of the copper foil is not particularly limited, and copper foil of any thickness can be used. However, if the surface roughness is too large, the tensile strength decreases, and the negative electrode material cannot be filled to the bottom of the unevenness, which reduces the adhesion. In addition, when the surface roughness is large and there are few convex parts, current will be concentrated on the convex parts, and active material peeling may occur and the battery characteristics will deteriorate. Therefore, the surface roughness is preferably 2 μm or less.

此銅箔係在掃描式電子顯微鏡的拍攝影像中,至少在表面的一部分有高度5nm以上之凸部,凸部的密度係在與表面平行之方向測定時,較佳為每3.8μm中平均15個以上且100個以下,更佳為平均20個以上且62個以下。凸部的數量係在掃描式電子顯微鏡的拍攝影像中,相對於連接凸部兩端之凹部的極小點之線段垂直延伸之長度為5nm以上時作為凸部來計算其個數。凸部的高度係使用掃描式電子顯微鏡,特別是共軛焦掃描式電子顯微鏡,根據JIS B 0601:2001規定之Rz來算出。This copper foil has convex parts with a height of 5nm or more on at least a part of the surface in the image taken by the scanning electron microscope. The density of the convex parts is measured in a direction parallel to the surface, preferably an average of 15 per 3.8μm More than one and 100 or less, more preferably 20 or more and 62 or less on average. The number of convex parts is calculated as convex parts when the length of the line segment connecting the minimum points of the concave parts at both ends of the convex part is more than 5nm in the image taken by the scanning electron microscope. The height of the convex portion is calculated using a scanning electron microscope, especially a conjugate focus scanning electron microscope, based on Rz specified in JIS B 0601:2001.

具有高度為5nm以上之凸部的表面的一部分,其表面粗度Rz的三點標準差σ較佳為0.5以下,更佳為0.3以下。Rz的三點標準差σ越小,則凹凸越平均。此外,平均Rz較佳為2μm以下,更佳為1.54μm以下。平均Rz越小,則凹凸越小。The three-point standard deviation σ of the surface roughness Rz of a part of the surface having a convex portion with a height of 5 nm or more is preferably 0.5 or less, more preferably 0.3 or less. The smaller the three-point standard deviation σ of Rz, the more average the unevenness. In addition, the average Rz is preferably 2 μm or less, more preferably 1.54 μm or less. The smaller the average Rz, the smaller the unevenness.

該等性質係在將銅箔用於負極集電體時的較佳構造。原理不特別限定,由於凸部的個數少時,銅箔的表面積減小,故銅箔對負極之密著性惡化,結果使維持電容量降低。凸部的個數少時,為了增加表面積,需要增大Rz,Rz增大時,電流集中於凸部,故銅箔與活性物質容易剝離,使電容量維持率減小。又,表面粗度Rz的三點標準差即偏差大的情況下,用於負極集電體時亦容易發生電流集中,結果使電容量維持率降低。These properties are a better structure when copper foil is used as a negative electrode current collector. The principle is not particularly limited. When the number of protrusions is small, the surface area of the copper foil is reduced, so the adhesion of the copper foil to the negative electrode is deteriorated, and as a result, the maintained capacitance is reduced. When the number of convex parts is small, Rz needs to be increased in order to increase the surface area. When Rz is increased, current is concentrated on the convex parts, so the copper foil and the active material are easily peeled off, reducing the capacity retention rate. In addition, when the three-point standard deviation of the surface roughness Rz, that is, the deviation is large, current concentration is likely to occur when used in a negative electrode current collector, and as a result, the capacity retention rate is reduced.

負極集電體係例如電流分散數量越多則越能抑制電流集中,不容易產生負極材料的剝離。因此,高速充放電特性(C-rate)之電容量維持率優異。於每4μm2 銅箔之電流分散數量的平均個數較佳為200個以上,更佳為400個以上,又較佳為500個以上。亦即,電流分散數量的密度較佳為50個/μm2 以上,更佳為100個/μm2 以上,又較佳為125個/μm2 以上。又,將特定電流量以上作為閾值時之電流流經的面積越大,則電容易流通,集電力優異。其於每4μm2 銅箔之平均總面積較佳為100000nm2 以上,更佳為200000nm2 以上,又較佳為300000nm2 以上。亦即,將特定電流量以上作為閾值時之電流流經的面積之比例,較佳為2.5%以上,更佳為5.0%以上,又較佳為7.5以上。特定電流量例如較佳係-1nA以上,更佳為-30nA以上,又較佳為-60nA以上。此外,該等數值可利用習知方法,例如實施例記載之方法來測定。For example, the larger the number of current dispersion of the negative electrode current collector system, the more the current concentration can be suppressed, and the separation of the negative electrode material is less likely to occur. Therefore, the high-speed charge and discharge characteristics (C-rate) have excellent capacitance retention. The average number of current dispersions per 4 μm 2 copper foil is preferably 200 or more, more preferably 400 or more, and still more preferably 500 or more. That is, the density of the current dispersion number is preferably 50 pieces/μm 2 or more, more preferably 100 pieces/μm 2 or more, and still more preferably 125 pieces/μm 2 or more. In addition, the larger the area through which the current flows when the specific current amount or more is used as the threshold value, the easier the electricity flows, and the power collection is excellent. The average total area per 4 μm 2 of copper foil is preferably 100,000 nm 2 or more, more preferably 200,000 nm 2 or more, and still more preferably 300,000 nm 2 or more. That is, the ratio of the area through which the current flows when the specific current amount or more is used as the threshold value is preferably 2.5% or more, more preferably 5.0% or more, and still more preferably 7.5 or more. The specific current amount is preferably -1 nA or more, more preferably -30 nA or more, and still more preferably -60 nA or more. In addition, these values can be measured using conventional methods, such as the methods described in the examples.

若包含於負極材料氧量多則電阻增大,使電流不易流通。因此,為了使電流流經的面積為10000nm2 以上,負極材料所包含之氧量越少越好,具體而言,於深度5nm之氧量較佳為50%以下,更佳為40%以下,又較佳為35%以下,又更佳為25%以下。此外,此氧量可用X射線光電子能譜(XPS)測定。If the amount of oxygen contained in the negative electrode material is large, the resistance increases, making it difficult for current to flow. Therefore, in order to make the area through which the current flows is 10000nm 2 or more, the lower the amount of oxygen contained in the negative electrode material, the better. Specifically, the amount of oxygen at a depth of 5nm is preferably 50% or less, and more preferably 40% or less. It is more preferably 35% or less, and more preferably 25% or less. In addition, this amount of oxygen can be measured by X-ray photoelectron spectroscopy (XPS).

又,藉由在表面形成銅以外的金屬層,可以使電流分散性良好,電流容易流通,且防止表面氧化,故與水之接觸角在長時間後不易發生變化。因此,較佳在表面形成金屬層。銅以外的金屬可使用錫、銀、鋅、鋁、鈦、鉍、鉻、鐵、鈷、鎳、鈀、金、鉑或各種合金。形成此金屬層係例如使用鍍敷處理。金屬層的厚度較佳為15nm以上且200nm以下,更佳為30nm以上且200nm以下。若未滿15nm,則容易在長時間後發生變化,若超過200nm,則因整平作用(leveling)填補凹凸,故電流分散數量減少,容易產生電流集中。In addition, by forming a metal layer other than copper on the surface, current dispersibility can be improved, current can flow easily, and surface oxidation can be prevented, so the contact angle with water is unlikely to change over a long period of time. Therefore, it is preferable to form a metal layer on the surface. For metals other than copper, tin, silver, zinc, aluminum, titanium, bismuth, chromium, iron, cobalt, nickel, palladium, gold, platinum, or various alloys can be used. The metal layer is formed by, for example, plating. The thickness of the metal layer is preferably 15 nm or more and 200 nm or less, more preferably 30 nm or more and 200 nm or less. If it is less than 15nm, it is likely to change over a long period of time, and if it exceeds 200nm, the unevenness will be filled by leveling, so the amount of current dispersion is reduced and current concentration is likely to occur.

<銅箔及鋰離子電池之負極集電體的製造方法>本說明書揭示之銅箔的製造方法,包含將銅箔的銅表面氧化以形成微細凸部之第一步驟、進一步調整氧化之銅箔表面所形成的凸部之第二步驟、使用銅表面的凸部經調整之銅箔以製造鋰離子電池之負極集電體的第三步驟。又,第二步驟係包含將氧化之銅表面進行鍍敷處理、還原處理或溶解處理中至少一個步驟。以下詳細說明各步驟。<The manufacturing method of copper foil and negative electrode current collector of lithium ion battery> The manufacturing method of copper foil disclosed in this specification includes the first step of oxidizing the copper surface of the copper foil to form fine protrusions, and further adjusting the oxidized copper foil The second step of the protrusions formed on the surface, the third step of using the copper foil with the adjusted protrusions on the copper surface to manufacture the negative electrode current collector of the lithium ion battery. In addition, the second step includes at least one step of subjecting the oxidized copper surface to plating treatment, reduction treatment or dissolution treatment. The steps are described in detail below.

(1)第一步驟(氧化步驟):第一步驟中,首先使用氧化劑氧化銅箔的銅表面,形成包含氧化銅之層,且於表面形成凸部。氧化劑不特別限制,例如可使用亞氯酸鈉、次氯酸鈉、氯酸鉀、過氯酸鉀、過硫酸鉀等水溶液或緩衝液,較佳使用包含亞氯酸鈉或次氯酸鈉之水溶液。使用該等可形成較佳的表面形狀。氧化劑中可添加各種添加劑(例如磷酸三鈉十二水合物這樣的磷酸鹽或表面活性分子)。表面活性分子可舉例如紫質、紫質大環、擴張紫質、縮環紫質、紫質直鏈聚合物、紫質夾心配位錯合物、紫質陣列、矽烷、四有機基-矽烷、胺基乙基-胺基丙基-三甲氧基矽烷、(3-胺基丙基)三甲氧基矽烷、(1-[3-(三甲氧基矽基)丙基]尿素)(l-[3-(Trimethoxysilyl) propyl]urea)、(3-胺基丙基)三乙氧基矽烷、(3-環氧丙基氧丙基)三甲氧基矽烷、(3-氯丙基)三甲氧基矽烷、(3-環氧丙基氧丙基)三甲氧基矽烷、二甲基二氯矽烷、3-(三甲氧基矽基)丙基甲基丙烯酸酯、乙基三乙醯氧基矽烷、三乙氧基(異丁基)矽烷、三乙氧基(辛基)矽烷、參(2-甲氧基乙氧基)(乙烯基)矽烷、氯三甲基矽烷、甲基三氯矽烷、四氯化矽、四乙氧基矽烷、苯基三甲氧基矽烷、氯三乙氧基矽烷、乙烯基-三甲氧基矽烷、胺、糖等。又,除了氧化劑以外亦可含有氫氧化鈉、氫氧化鉀等鹼性化合物。(1) First step (oxidation step): In the first step, the copper surface of the copper foil is first oxidized with an oxidizing agent to form a layer containing copper oxide, and to form protrusions on the surface. The oxidizing agent is not particularly limited. For example, aqueous solutions or buffers such as sodium chlorite, sodium hypochlorite, potassium chlorate, potassium perchlorate, potassium persulfate, etc. can be used, and aqueous solutions containing sodium chlorite or sodium hypochlorite are preferably used. Use these to form a better surface shape. Various additives (such as phosphate such as trisodium phosphate dodecahydrate or surface active molecules) can be added to the oxidizing agent. Surface-active molecules include, for example, porphyrin, porphyrin macrocycles, expanded porphyrin, condensed porphyrin, porphyrin linear polymer, porphyrin-sandwich coordination complex, porphyrin array, silane, tetraorgano-silane , Aminoethyl-aminopropyl-trimethoxysilane, (3-aminopropyl)trimethoxysilane, (1-[3-(trimethoxysilyl)propyl]urea) (l- [3-(Trimethoxysilyl) propyl]urea), (3-aminopropyl)triethoxysilane, (3-epoxypropyloxypropyl)trimethoxysilane, (3-chloropropyl)trimethoxy Silane, (3-epoxypropyloxypropyl)trimethoxysilane, dimethyldichlorosilane, 3-(trimethoxysilyl)propyl methacrylate, ethyltriethoxysilane , Triethoxy (isobutyl) silane, triethoxy (octyl) silane, ginseng (2-methoxyethoxy) (vinyl) silane, chlorotrimethylsilane, methyltrichlorosilane , Silicon tetrachloride, tetraethoxysilane, phenyltrimethoxysilane, chlorotriethoxysilane, vinyl-trimethoxysilane, amine, sugar, etc. Furthermore, in addition to the oxidizing agent, alkaline compounds such as sodium hydroxide and potassium hydroxide may be contained.

此氧化步驟中使用的添加劑較佳係使用適度地抑制氧化造成之表面凸部形成的添加劑,如包含矽化合物之矽烷耦合劑,藉此,表面的凹凸變得更微細,凸部的高度變得更均一。藉由使用表面凸部的高度均一之銅箔來製造鋰離子電池之負極集電體,可以減少負極材料對於凹凸之塗佈量的部分不均。藉此,電流的流動方式不會產生不均,電池特性亦提升。並且生產性亦提升。The additive used in this oxidation step is preferably an additive that moderately inhibits the formation of surface protrusions caused by oxidation, such as a silane coupling agent containing a silicon compound, whereby the surface unevenness becomes finer and the height of the protrusions becomes More uniform. By using a copper foil with a uniform height of the surface protrusions to manufacture the negative electrode current collector of the lithium ion battery, the partial unevenness of the coating amount of the negative electrode material to the unevenness can be reduced. In this way, there is no unevenness in the flow of current, and the battery characteristics are also improved. And productivity is also improved.

氧化反應條件不特別限制,氧化劑的液溫較佳為40~95℃,更佳為45~80℃。反應時間較佳為0.5~30分,更佳為1~10分。The oxidation reaction conditions are not particularly limited, and the liquid temperature of the oxidizing agent is preferably 40 to 95°C, more preferably 45 to 80°C. The reaction time is preferably 0.5 to 30 minutes, more preferably 1 to 10 minutes.

此外,此氧化步驟之前,可以進行藉由鹼處理之脫脂或藉由酸處理之清洗作為前處理。鹼處理或酸處理的具體方法不特別限制,鹼處理例如較佳使用30~50g/L之鹼性水溶液,更佳為40g/L之鹼性水溶液,例如可用氫氧化鈉水溶液於30~50℃處理約0.5~2分鐘後水洗來進行。又,酸處理可例如將銅表面浸漬於液溫20~50℃、5~20重量%之硫酸中1~5分鐘後水洗來進行。酸處理後可進一步進行弱鹼處理,以減少處理不均,並防止用於清洗處理之酸的氧化劑混入。此鹼處理不特別限制,較佳可用0.1~10g/L之鹼性水溶液,更佳可用1~2g/L之鹼性水溶液,鹼性水溶液例如可用氫氧化鈉水溶液,於30~50℃處理約0.5~2分鐘來進行。又,可以藉由蝕刻等進行對銅表面物理性地粗化之前處理,惟此時形成於銅表面之凸部的形狀一般而言係與處理對象即銅的結晶性有關,故僅有物理性的粗化處理不會形成微細凹凸,為了得到具有微細凹凸之銅箔,需要經過實際的氧化步驟。In addition, before this oxidation step, degreasing by alkali treatment or cleaning by acid treatment may be performed as pretreatment. The specific method of alkali treatment or acid treatment is not particularly limited. For alkali treatment, for example, 30-50g/L alkaline aqueous solution is preferably used, more preferably 40g/L alkaline aqueous solution, for example, sodium hydroxide aqueous solution can be used at 30-50°C. After processing for about 0.5 to 2 minutes, wash with water. In addition, the acid treatment can be carried out by immersing the copper surface in sulfuric acid at a liquid temperature of 20 to 50°C and 5 to 20% by weight for 1 to 5 minutes and then washing with water. After acid treatment, a weak alkali treatment can be further carried out to reduce uneven treatment and prevent mixing of acid and oxidant used for cleaning treatment. The alkali treatment is not particularly limited, preferably 0.1-10g/L alkaline aqueous solution, more preferably 1-2g/L alkaline aqueous solution, alkaline aqueous solution, for example, sodium hydroxide aqueous solution, treated at 30-50℃ It takes 0.5 to 2 minutes. In addition, the copper surface can be physically roughened by etching, etc., but the shape of the convex portion formed on the copper surface at this time is generally related to the crystallinity of the copper to be processed, so only physical The roughening treatment does not form fine unevenness. In order to obtain a copper foil with fine unevenness, an actual oxidation step is required.

(2)第二步驟:第二步驟中,至少包含(2-1)鍍敷處理步驟、(2-2)還原處理步驟及(2-3)溶解處理步驟中的至少一個步驟。鍍敷處理步驟可在還原處理步驟後進行,亦可在溶解處理後進行。藉由第一步驟中的氧化處理,銅表面係被粗化而具有微細的凸部,藉由本發明的第二步驟,係進一步調整形成於銅表面之凸部。第二步驟的各個處理係說明如下。(2) Second step: The second step includes at least one of (2-1) a plating treatment step, (2-2) a reduction treatment step, and (2-3) a dissolution treatment step. The plating treatment step may be performed after the reduction treatment step, or may be performed after the dissolution treatment. Through the oxidation treatment in the first step, the copper surface is roughened to have fine protrusions. Through the second step of the present invention, the protrusions formed on the copper surface are further adjusted. Each processing system of the second step is described below.

(2-1)鍍敷處理步驟:本步驟中,將氧化之銅表面以銅以外的金屬進行鍍敷處理,調整氧化之銅表面的凸部。鍍敷處理方法可以使用習知技術,銅以外之金屬例如可使用錫、銀、鋅、鋁、鈦、鉍、鉻、鐵、鈷、鎳、鈀、金、鉑或各種合金。鍍敷方法亦不特別限制,可藉由電解電鍍、無電解電鍍、真空蒸鍍或化成處理等來鍍敷。較佳係使用電解電鍍,其與無電解電鍍相較,可容易還原至金屬銅,集電力優異。(2-1) Plating treatment step: In this step, the oxidized copper surface is plated with a metal other than copper to adjust the protrusions on the oxidized copper surface. Conventional techniques can be used for the plating treatment. For metals other than copper, tin, silver, zinc, aluminum, titanium, bismuth, chromium, iron, cobalt, nickel, palladium, gold, platinum or various alloys can be used. The plating method is also not particularly limited, and plating can be performed by electrolytic plating, electroless plating, vacuum evaporation, chemical conversion treatment, or the like. Preferably, electrolytic plating is used. Compared with electroless plating, it can be easily reduced to metallic copper and has excellent power collection.

在無電解電鍍鎳的情況下,較佳使用觸媒進行處理。觸媒可使用鐵、鈷、鎳、釕、銠、鈀、鋨、銥及該等之鹽。在無電解電鍍鎳的情況下所使用之還原劑,較佳為使用銅或氧化銅不具有觸媒活性之還原劑。銅或氧化銅不具有觸媒活性之還原劑可舉例如次磷酸鈉等次磷酸鹽。In the case of electroless nickel plating, it is preferable to use a catalyst for treatment. The catalyst can use iron, cobalt, nickel, ruthenium, rhodium, palladium, osmium, iridium and these salts. The reducing agent used in the case of electroless nickel plating is preferably a reducing agent with no catalytic activity of copper or copper oxide. Examples of reducing agents in which copper or copper oxide does not have catalytic activity include hypophosphites such as sodium hypophosphite.

如此,得到維持有在第一步驟形成之微細凹凸的金屬層,藉此表面被保護,提升複合銅箔的長時間穩定性。鍍敷的厚度不特別限制,惟若太厚則因整平作用使凸部的數量減少,使RSm減少,表面積減少,且集電力降低,導致電池特性惡化,故較佳為1μm以下。In this way, a metal layer maintaining the fine unevenness formed in the first step is obtained, whereby the surface is protected, and the long-term stability of the composite copper foil is improved. The thickness of the plating is not particularly limited, but if it is too thick, the number of protrusions will be reduced due to the leveling effect, resulting in a reduction in RSm, a reduction in surface area, and a reduction in power collection, resulting in deterioration of battery characteristics, so it is preferably 1 μm or less.

鍍敷處理步驟中,若不提升銅的純度,則難以使鍍敷均一形成,較佳使用純銅。因此,一般而言係去除表面的氧化膜來進行鍍敷處理。本發明揭示的方法,係藉由氧化膜形成較佳形狀,之後進行鍍敷處理,藉此可得到製造鋰離子電池之集電體時需要的密著性及電池特性。In the plating treatment step, unless the purity of copper is improved, it is difficult to uniformly form plating, and pure copper is preferably used. Therefore, generally, the oxide film on the surface is removed and the plating process is performed. In the method disclosed in the present invention, an oxide film is used to form a better shape, and then a plating process is performed to obtain the adhesion and battery characteristics required for the production of the current collector of the lithium ion battery.

(2-2)還原處理步驟:本步驟中,使用含有還原劑之藥液(還原用藥液)使形成於銅箔之氧化銅還原,以調整凹凸的數量或長度。還原劑可使用DMAB(二甲基氨硼烷)、乙硼烷、硼氫化鈉、聯氨等。又,還原用藥液係包含還原劑、鹼性化合物(氫氧化鈉、氫氧化鉀等)及溶劑(純水等)之液體。(2-2) Reduction treatment step: In this step, a chemical solution containing a reducing agent (reduction chemical solution) is used to reduce the copper oxide formed on the copper foil to adjust the number or length of the bumps. The reducing agent can be DMAB (dimethylaminoborane), diborane, sodium borohydride, hydrazine, etc. In addition, the reduction chemical liquid is a liquid containing a reducing agent, an alkaline compound (sodium hydroxide, potassium hydroxide, etc.), and a solvent (pure water, etc.).

(2-3)溶解處理步驟:本步驟中,用溶解劑溶解氧化之銅表面,調整氧化之銅表面的凸部。本步驟中使用之溶解劑不特別限制,可舉例如螯合劑、生物分解性螯合劑等。具體而言,有EDTA(乙二胺四乙酸)、DHEG(二羥乙基甘胺酸)、GLDA(L-麩胺酸二乙酸四鈉)、EDDS(乙二胺-N,N’-二琥珀酸)、HIDS(3-羥基-2,2’-亞胺基二琥珀酸鈉)、MGDA(甲基甘胺酸二乙酸三鈉)、ASDA(天門冬胺酸二乙酸四鈉)、HIDA(N-2-羥基乙基亞胺基二乙酸二鈉鹽)、葡萄糖酸鈉、羥基乙叉二膦酸等。(2-3) Dissolution treatment step: In this step, dissolve the oxidized copper surface with a solvent to adjust the convexity of the oxidized copper surface. The dissolving agent used in this step is not particularly limited, and examples thereof include chelating agents and biodegradable chelating agents. Specifically, there are EDTA (ethylenediaminetetraacetic acid), DHEG (dihydroxyethylglycine), GLDA (tetrasodium L-glutamic acid diacetate), EDDS (ethylenediamine-N,N'-di Succinic acid), HIDS (sodium 3-hydroxy-2,2'-imino disuccinate), MGDA (trisodium methylglycine diacetate), ASDA (tetrasodium aspartate diacetate), HIDA (N-2-Hydroxyethyliminodiacetic acid disodium salt), sodium gluconate, hydroxyethylidene diphosphonic acid, etc.

溶解劑的pH值不特別限制,惟由於在酸性之溶解度大,處理的控制困難,容易產生處理不均,故較佳為鹼性,更佳為pH9.0~14.0,又較佳為pH9.0~10.5,又更佳為pH9.8~10.2。The pH value of the dissolving agent is not particularly limited, but due to its high solubility in acidity, it is difficult to control the treatment and easy to produce uneven treatment. Therefore, it is preferably alkaline, more preferably pH 9.0 to 14.0, and preferably pH 9. 0 to 10.5, and more preferably pH 9.8 to 10.2.

此步驟中,氧化銅的溶解率為35~99%,較佳為50~99%,且處理銅表面至氧化銅的厚度為4~300nm,較佳為8~200nm。此外,此處氧化銅的厚度可用連續電化學還原法(SERA)測定。在此條件下,表面凹凸的數量及長度較佳,減少處理不均,故較佳係先進行前導測試,設定溫度、時間等條件以得到這樣的氧化銅層。又,溶解率係指銅表面之氧化銅中,溶解而由銅表面被去除之氧化銅的比例。In this step, the dissolution rate of copper oxide is 35-99%, preferably 50-99%, and the copper surface is treated until the thickness of the copper oxide is 4-300 nm, preferably 8-200 nm. In addition, the thickness of the copper oxide can be measured by the continuous electrochemical reduction method (SERA). Under this condition, the number and length of the surface bumps are better to reduce uneven processing. Therefore, it is better to conduct a pilot test first and set conditions such as temperature and time to obtain such a copper oxide layer. In addition, the dissolution rate refers to the ratio of the copper oxide on the copper surface that is dissolved and removed from the copper surface.

藉由如此對銅箔進行第二步驟,可以製造表面凸部經調整的複合銅箔,其適合用於鋰離子電池之負極集電體。By performing the second step on the copper foil in this way, a composite copper foil with adjusted surface protrusions can be manufactured, which is suitable for the negative electrode current collector of a lithium ion battery.

對於該等在第二步驟製造之銅箔,可以進行使用矽烷耦合劑等之耦合處理或鉻酸鹽皮膜處理、使用苯并三唑類等之防鏽處理。The copper foil manufactured in the second step can be subjected to coupling treatment using silane coupling agent, chromate coating treatment, and anti-rust treatment using benzotriazoles.

(3)第三步驟(負極集電體的製造步驟):可以使用如上述處理之銅箔,依照習知方法製造鋰離子電池之負極集電體並製造負極。例如,調製含有碳系活性物質之負極材料,使其分散於溶劑或水形成活性物質漿料。將此活性物質漿料塗佈於銅箔後,使溶劑或水蒸發而乾燥。之後壓製,再度乾燥後將負極集電體成形為所需形狀。此外,負極材料亦可包含理論容量比碳系活性物質大之矽或矽化合物、鍺、錫或鉛等。又,電解質係除了將鋰鹽溶解於有機溶劑之有機電解液以外,亦可使用由聚乙二醇或聚偏二氟乙烯等形成之聚合物。除了鋰離子電池以外,亦可適用於鋰離子聚合物電池。(3) The third step (the manufacturing step of the negative electrode current collector): the copper foil processed as above can be used to manufacture the negative electrode current collector of the lithium ion battery and the negative electrode according to the conventional method. For example, a negative electrode material containing a carbon-based active material is prepared and dispersed in a solvent or water to form an active material slurry. After coating this active material slurry on copper foil, the solvent or water is evaporated and dried. After pressing and drying again, the negative electrode current collector is formed into a desired shape. In addition, the negative electrode material may also include silicon or silicon compound, germanium, tin, or lead, which has a larger theoretical capacity than the carbon-based active material. Moreover, in addition to the organic electrolyte solution in which lithium salt is dissolved in an organic solvent, the electrolyte system may also use a polymer formed of polyethylene glycol or polyvinylidene fluoride. In addition to lithium ion batteries, it can also be applied to lithium ion polymer batteries.

實施例:[評估銅箔及銅箔表面的粗化處理]使用以下的銅箔作為實施例及比較例,進行所記載之處理。Examples: [Evaluation of roughening treatment of copper foil and copper foil surface] The following copper foils were used as examples and comparative examples, and the treatment described was performed.

實施例1~3中,去除市售銅箔(Targray製B-Foil)霧面的表面處理層,施加各種表面處理。實施例4~7中,去除市售銅箔(古河電氣工業股份有限公司製NC-WS)的表面處理層,施加後述之表面處理。比較例1使用市售銅箔(Targray製B-Foil)的霧面,比較例2使用市售銅箔(古河電氣工業股份有限公司製NC-WS),比較例3使用市售銅箔(Targray製B-Foil)的亮面(陽極接觸面)。In Examples 1 to 3, the matte surface treatment layer of a commercially available copper foil (B-Foil manufactured by Targray) was removed, and various surface treatments were applied. In Examples 4 to 7, the surface treatment layer of a commercially available copper foil (NC-WS manufactured by Furukawa Electric Co., Ltd.) was removed, and the surface treatment described later was applied. Comparative Example 1 used a matte surface of a commercially available copper foil (B-Foil manufactured by Targray), Comparative Example 2 used a commercially available copper foil (NC-WS manufactured by Furukawa Electric Co., Ltd.), and Comparative Example 3 used a commercially available copper foil (Targray B-Foil) bright surface (anode contact surface).

又,第一步驟及第二步驟的處理條件整理於第1圖的表。在實施例及比較例的前處理條件及負極材料的塗佈條件係相同條件。In addition, the processing conditions of the first step and the second step are organized in the table of FIG. 1. The pretreatment conditions and the coating conditions of the negative electrode material in the examples and comparative examples are the same.

(1)前處理:[鹼脫脂處理]將銅箔浸漬於液溫50℃、40g/L之氫氧化鈉水溶液中1分鐘後,進行水洗。(1) Pretreatment: [Alkaline degreasing treatment] After immersing the copper foil in a 40g/L sodium hydroxide aqueous solution at a liquid temperature of 50°C for 1 minute, it is washed with water.

[酸洗處理]將經過鹼脫脂處理之銅箔浸漬於液溫25℃、10重量%之硫酸水溶液中2分鐘後,進行水洗。[Pickling treatment] The copper foil subjected to alkali degreasing treatment was immersed in a 10% by weight sulfuric acid aqueous solution at a liquid temperature of 25°C for 2 minutes, and then washed with water.

[預浸處理]將經過酸洗處理之銅箔浸漬於液溫40℃、氫氧化鈉1.2g/L之預浸用藥液中1分鐘。[Pre-dip treatment] The pickled copper foil is immersed in a prepreg chemical solution with a liquid temperature of 40°C and 1.2 g/L of sodium hydroxide for 1 minute.

(2)第一步驟(氧化處理):首先,第一步驟係對實施例1、實施例2、實施例3、實施例4、實施例5及實施例7之銅箔,以鹼性水溶液(20g/L氫氧化鈉、60g/L亞氯酸鈉、2g/L 3-環氧丙基氧丙基三甲氧基矽烷)進行氧化處理。處理溫度及處理時間在實施例1為45℃及1分鐘,在實施例2、3、4、7為73℃及2分鐘,在實施例5為73℃及3分鐘。(2) The first step (oxidation treatment): First, the first step is to apply alkaline aqueous solution to the copper foils of Example 1, Example 2, Example 3, Example 4, Example 5 and Example 7 ( 20g/L sodium hydroxide, 60g/L sodium chlorite, 2g/L 3-epoxypropyloxypropyltrimethoxysilane) for oxidation treatment. The treatment temperature and treatment time were 45°C and 1 minute in Example 1, 73°C and 2 minutes in Examples 2, 3, 4, and 7, and 73°C and 3 minutes in Example 5.

對實施例6之銅箔,以鹼性水溶液(20g/L氫氧化鈉、60g/L亞氯酸鈉)於73℃進行氧化處理8分鐘。又,未對比較例1~比較例3之銅箔進行本發明的氧化處理等表面處理。The copper foil of Example 6 was subjected to oxidation treatment with an alkaline aqueous solution (20 g/L sodium hydroxide, 60 g/L sodium chlorite) at 73°C for 8 minutes. In addition, the copper foils of Comparative Examples 1 to 3 were not subjected to surface treatment such as oxidation treatment of the present invention.

(3)第二步驟:接著,第二步驟係對經過第一步驟之氧化處理的銅箔分別進行一種以上的(3-1)溶解處理、(3-2)鍍敷處理及(3-3)還原處理。(3) Second step: Next, the second step is to perform more than one (3-1) dissolution treatment, (3-2) plating treatment and (3-3) on the copper foil that has undergone the oxidation treatment in the first step. ) Reduction processing.

(3-1)溶解處理:對於實施例2、實施例3、實施例7之銅箔,在(2)之氧化處理後,使用溶劑L-麩胺酸二乙酸四鈉(38g/L),於55℃進行溶解處理。處理時間在實施例2為1分,在實施例3為2分,在實施例7為3分。(3-1) Dissolution treatment: For the copper foils of Example 2, Example 3, and Example 7, after the oxidation treatment in (2), use the solvent L-glutamic acid tetrasodium diacetate (38g/L), Dissolve treatment at 55°C. The processing time is 1 minute in Example 2, 2 minutes in Example 3, and 3 minutes in Example 7.

(3-2)鍍敷處理:對於實施例1、實施例4之銅箔,在(2)之氧化處理後,對於實施例2、實施例3之銅箔,在(3-1)之溶解處理後,使用鍍鎳用電解液(450g/L氨基磺酸鎳、40g/L硼酸)施加電解鍍。電流密度為1Å/dm2 、時間為15秒來進行。對其他銅箔未進行鍍敷處理。(3-2) Plating treatment: For the copper foil of Example 1 and Example 4, after the oxidation treatment of (2), for the copper foil of Example 2 and Example 3, dissolve in (3-1) After the treatment, electrolytic plating was applied using an electrolyte for nickel plating (450g/L nickel sulfamate, 40g/L boric acid). The current density is 1Å/dm 2 and the time is 15 seconds. The other copper foils were not plated.

(3-3)對於實施例5、實施例6之銅箔,在(2)之氧化處理後,使用溶劑(5g/L二甲基氨硼烷、5g/L氫氧化鈉)於室溫靜置3分鐘以進行還原處理。(3-3) For the copper foils of Example 5 and Example 6, after the oxidation treatment of (2), use a solvent (5g/L dimethylaminoborane, 5g/L sodium hydroxide) at room temperature Leave for 3 minutes for reduction treatment.

(4)凸部的高度及數量,以及表面粗度的測定:對於經(1)~(3)之處理後的銅箔,以掃描式電子顯微鏡(SEM)觀察得到第2圖(A)、(B)之照片。使用此拍攝影像測定截面的凸部數量。凸部的數量係在掃描式電子顯微鏡的拍攝影像中,相對於連接凸部兩端之凹部的極小點之線段垂直延伸之長度為5nm以上時作為凸部來計算其個數。計算方法之一例(計算實施例5者)如第2圖(C)所示。(4) Measurement of the height and number of protrusions, and the surface roughness: For the copper foil processed by (1) to (3), observe the second figure (A) with a scanning electron microscope (SEM). (B) Photo. Use this captured image to determine the number of protrusions in the cross section. The number of convex parts is calculated as convex parts when the length of the line segment connecting the minimum points of the concave parts at both ends of the convex part is more than 5nm in the image taken by the scanning electron microscope. An example of the calculation method (calculation example 5) is shown in Figure 2 (C).

又,表面粗度Rz係使用共軛焦掃描式電子顯微鏡OPTELICS H1200(Lasertec股份有限公司製)測定,根據JIS B 0601:2001規定之Rz來算出。測定條件設定係掃描寬度為100μm、掃描類型為Area、光源為藍光、Cut-off值為1/5。接物鏡x100、目鏡x14、數位變焦x1、Z間距設為10nm,取得3個位置之資料,計算標準差。又,Rz為3個位置之平均值。In addition, the surface roughness Rz was measured using a conjugate focus scanning electron microscope OPTELICS H1200 (manufactured by Lasertec Co., Ltd.), and calculated based on Rz specified in JIS B 0601:2001. The measurement condition setting system is that the scan width is 100μm, the scan type is Area, the light source is blue light, and the cut-off value is 1/5. Attach objective lens x100, eyepiece x14, digital zoom x1, and set the Z pitch to 10nm, obtain data at 3 positions, and calculate the standard deviation. Also, Rz is the average of 3 positions.

第1表   實施例 比較例 1 2 3 4 5 6 7 1 2 3 凸部 個數 56 20 41 62 58 49 36 2 4 7 Rz n=1(μm) 0.58 0.48 1.45 0.33 0.33 0.78 0.48 0.52 0.34 3.35 n=2(μm) 0.46 0.44 1.82 0.35 0.38 0.98 0.53 0.59 0.29 2.60 n=3(μm) 0.50 0.43 1.36 0.42 0.30 0.75 0.67 0.63 0.30 2.19 平均(μm) 0.51 0.45 1.54 0.36 0.33 0.84 0.56 0.58 0.31 2.71 標準差 0.06 0.02 0.25 0.05 0.04 0.13 0.10 0.05 0.02 0.59 Table 1 Example Comparative example 1 2 3 4 5 6 7 1 2 3 Convex Number 56 20 41 62 58 49 36 2 4 7 Rz n=1(μm) 0.58 0.48 1.45 0.33 0.33 0.78 0.48 0.52 0.34 3.35 n=2(μm) 0.46 0.44 1.82 0.35 0.38 0.98 0.53 0.59 0.29 2.60 n=3(μm) 0.50 0.43 1.36 0.42 0.30 0.75 0.67 0.63 0.30 2.19 Average (μm) 0.51 0.45 1.54 0.36 0.33 0.84 0.56 0.58 0.31 2.71 Standard deviation 0.06 0.02 0.25 0.05 0.04 0.13 0.10 0.05 0.02 0.59

像這樣,實施例的任一個樣品中,高度為5nm以上之凸部於每3.8μm中平均有10個以上,平均Rz為2.00μm以下,其標準差為0.3以下。In this way, in any sample of the example, there are an average of 10 or more convex portions per 3.8 μm in height of 5 nm or more, the average Rz is 2.00 μm or less, and the standard deviation is 0.3 or less.

(5)負極材料之塗佈:(5-1)水系負極材料之塗佈:此評估係使用實施例1、實施例2、實施例3及比較例1之銅箔。將石墨(MTI製EQ-Lib-MCMB)、乙炔黑(Denka製Li-400)、CMC(羧基甲基纖維素,Daicel FineChem製CMC DAICEL 2200)、SBR(丁苯橡膠,日本ZEON製BM-400B)、矽(Tekna Advanced Materials製)秤量成規定配比(石墨:86.5重量%、乙炔黑:1.5重量%、CMC:5.0重量%、SBR:2.5重量%、矽:4.5重量%),以純水調整黏度。(5) Coating of negative electrode material: (5-1) Coating of water-based negative electrode material: This evaluation uses the copper foils of Example 1, Example 2, Example 3 and Comparative Example 1. Graphite (EQ-Lib-MCMB manufactured by MTI), acetylene black (Li-400 manufactured by Denka), CMC (carboxymethyl cellulose, CMC DAICEL 2200 manufactured by Daicel FineChem), SBR (styrene butadiene rubber, BM-400B manufactured by ZEON, Japan) ), silicon (manufactured by Tekna Advanced Materials) weighed into the specified ratio (graphite: 86.5 wt%, acetylene black: 1.5 wt%, CMC: 5.0 wt%, SBR: 2.5 wt%, silicon: 4.5 wt%), with pure water Adjust the viscosity.

之後,於行星攪拌裝置將石墨、乙炔黑、CMC、矽攪拌至均勻,最後添加SBR溶液,再進行攪拌。以塗佈棒(bar coater)設定塗佈厚度為150μm塗佈於銅箔。塗佈後,於70℃乾燥2小時以去除水分,使用輥壓進行壓製使負極材料的厚度為30μm且使銅箔與負極材料密著。之後,在真空減壓乾燥機於70℃進行乾燥12小時。After that, stir graphite, acetylene black, CMC, and silicon in a planetary stirring device until uniform, and finally add the SBR solution, and then stir. A bar coater (bar coater) was used to set the coating thickness to 150 μm to coat the copper foil. After coating, it was dried at 70°C for 2 hours to remove moisture, and pressed using roll pressing so that the thickness of the negative electrode material was 30 μm and the copper foil and the negative electrode material were closely adhered. After that, drying was performed in a vacuum decompression dryer at 70°C for 12 hours.

(5-2)溶劑系負極材料之塗佈:此評估係使用實施例4、實施例5、實施例6、比較例1、比較例2及比較例3之銅箔。使用石墨(日本黑鉛製)、乙炔黑(Denka製Li-400)、PVDF(聚偏二氟乙烯,KUREHA製L#1120),秤量成規定配比(石墨:85重量%、乙炔黑:5重量%、PVDF:10重量%)。使用NMP作為溶劑來調整黏度。(5-2) Coating of solvent-based negative electrode material: This evaluation uses the copper foils of Example 4, Example 5, Example 6, Comparative Example 1, Comparative Example 2, and Comparative Example 3. Use graphite (made by Japanese black lead), acetylene black (Li-400 manufactured by Denka), PVDF (polyvinylidene fluoride, L#1120 manufactured by KUREHA), weighed to the specified ratio (graphite: 85% by weight, acetylene black: 5 Wt%, PVDF: 10 wt%). Use NMP as a solvent to adjust the viscosity.

之後,於行星攪拌裝置將石墨、乙炔黑、PVDF攪拌至均勻,以塗佈棒設定塗佈厚度為150μm塗佈於銅箔。塗佈後,於80℃乾燥2小時以去除溶劑,使用輥壓進行壓製使負極材料的厚度為30μm且使銅箔與負極材料密著。之後,在真空減壓乾燥機於120℃進行乾燥12小時。After that, graphite, acetylene black, and PVDF are stirred until uniform in a planetary stirring device, and the coating thickness is set to 150 μm to be coated on the copper foil with a coating bar. After coating, it was dried at 80° C. for 2 hours to remove the solvent, and it was pressed using roll pressing so that the thickness of the negative electrode material was 30 μm and the copper foil and the negative electrode material were closely adhered. After that, it was dried in a vacuum decompression dryer at 120°C for 12 hours.

第3圖係顯示溶劑系負極材料之塗佈穩定性的圖。第3圖左為實施例4之結果,由於凸部多故密著性良好,且藉由毛細現象使負極劑被均一地塗佈。另一方面,第3圖右為比較例1之結果,由於由於凸部少故無法得到密著性及毛細現象,因此在多處產生部分剝離。Figure 3 is a graph showing the coating stability of the solvent-based negative electrode material. The left of Figure 3 is the result of Example 4. The adhesion is good due to the large number of convexities, and the negative electrode agent is uniformly coated due to the capillary phenomenon. On the other hand, the right of Fig. 3 is the result of Comparative Example 1. Since there are few protrusions, adhesion and capillarity cannot be obtained, so partial peeling occurs in many places.

(6)製作鈕扣電池:鈕扣電池之製作,負極使用(5)負極材料之塗佈中製作之樣品。使用1M之LiPF6/EC-DEC(1:1)作為電解液,以負極、分隔材、鋰箔製作鈕扣電池。(6) Production of button batteries: the production of button batteries, the negative electrode is used (5) The samples made in the coating of negative electrode materials. Use 1M LiPF6/EC-DEC (1:1) as electrolyte, and use negative electrode, separator and lithium foil to make button battery.

(7)充放電特性之測定:於0.2C、1次循環使電解液還原分解,藉此製作形成於負極表面上之薄膜即SEI(Solid Electrolyte Interphase)後,放電係CC-CV(電壓10mV、電流0.1C為止)模式,充電係CC(電壓1500mV為止)模式,於30℃分別重複1C⇒3C⇒5C⇒1C各3次循環後,於50℃同樣地分別重複1C⇒3C⇒5C⇒1C各3次循環,評估於50℃之5C的第三次循環的特性。(7) Measurement of charge and discharge characteristics: After the electrolyte is reduced and decomposed at 0.2C, 1 cycle, the thin film formed on the surface of the negative electrode, namely SEI (Solid Electrolyte Interphase), is discharged after CC-CV (voltage 10mV, (Current up to 0.1C) mode, charging system CC (up to voltage 1500mV) mode. After repeating 1C⇒3C⇒5C⇒1C at 30°C for 3 times, repeat 1C⇒3C⇒5C⇒1C at 50°C. Three cycles, the characteristics of the third cycle at 5C at 50°C were evaluated.

(8)負極材料殘留率之測定:使用(5)之塗佈負極材料後的銅箔算出負極材料殘留率作為密著性之評估。首先,測定塗佈有負極材料之銅箔的重量。之後,在用於固定之板貼上雙面膠帶,在其上貼合透明膠帶且使透明膠帶的黏著面能接觸負極材料,之後,將塗佈有負極材料之銅箔的負極材料面貼合以接觸透明膠帶,施加5kN/inch2 之壓力後,用剝離強度測試機(Imada製)以90°剝離強度測試條件(JIS 0237:2009)剝離,測定殘留於銅箔之負極材料量。測試方法如第4圖。(8) Measurement of the residual rate of negative electrode material: Use the copper foil coated with negative electrode material in (5) to calculate the residual rate of negative electrode material as an evaluation of adhesion. First, the weight of the copper foil coated with the negative electrode material is measured. After that, stick double-sided tape on the board for fixing, stick scotch tape on it and make the adhesive surface of the scotch tape contact the negative electrode material, and then stick the negative electrode material surface of the copper foil coated with the negative electrode material After contacting the cellophane tape and applying a pressure of 5kN/inch 2 , it was peeled with a peel strength tester (manufactured by Imada) under 90° peel strength test conditions (JIS 0237:2009) to measure the amount of negative electrode material remaining on the copper foil. The test method is shown in Figure 4.

負極材料殘留率係使用下式算出。 負極材料殘留率[%]=(測試後總重量-銅箔重量)/(測試前總重量-銅箔重量)×100The residual rate of negative electrode material was calculated using the following formula. Residual rate of negative electrode material [%] = (total weight after test-weight of copper foil) / (total weight before test-weight of copper foil) × 100

水系負極材料的評估結果如第2表所示。溶劑系負極材料的評估結果如第3表所示。The evaluation results of the water-based negative electrode material are shown in Table 2. The evaluation results of the solvent-based negative electrode materials are shown in Table 3.

第2表   實施例1 實施例2 實施例3 實施例4 負極材料殘留率(%) 35% 32% 31% 28% 電容量維持率(%) 70.8 68.9 70.6 65.9 Table 2 Example 1 Example 2 Example 3 Example 4 Residual rate of anode material (%) 35% 32% 31% 28% Capacity maintenance rate (%) 70.8 68.9 70.6 65.9

第3表   實施例4 實施例5 實施例6 實施例7 比較例1 比較例2 比較例3 負極材料殘留率(%) 25% 25% 26% 16% 剝離 11% 12% 電容量維持率(%) 88.3 89.5 86.5 86.3 剝離 82.3 85.4 Table 3 Example 4 Example 5 Example 6 Example 7 Comparative example 1 Comparative example 2 Comparative example 3 Residual rate of anode material (%) 25% 25% 26% 16% Peel off 11% 12% Capacity maintenance rate (%) 88.3 89.5 86.5 86.3 Peel off 82.3 85.4

像這樣,使用在至少表面的一部分有高度為5nm以上之凸部,且凸部的密度為每3.8μm中平均15個以上且100個以下的銅箔,製造鋰離子電池之負極集電體,藉此可改善銅箔與負極之密著性及電容量維持率。In this way, a copper foil with protrusions with a height of 5 nm or more on at least a part of the surface and an average density of 15 or more and 100 or less protrusions per 3.8 μm is used to produce a negative electrode current collector for a lithium ion battery. This can improve the adhesion between the copper foil and the negative electrode and the capacity retention rate.

(9)電流分散數量及面積之測定:作為實施例,樣品銅箔係使用除了上述實施例3~6以外,另用與實施例1相同條件,僅將鍍敷處理時間延長,調整鍍敷時之庫侖量使鍍敷厚度為100nm(實施例8)、200nm(實施例9)之銅箔,作為比較例,係使用除了上述比較例1~3以外,另用對市售銅箔(古河電氣工業股份有限公司製NC-WS)僅施加與實施例1相同氧化處理者(無鍍敷處理)(比較例4)以及與實施例1相同條件,僅將鍍敷處理時間縮短使鍍敷厚度為10nm者(比較例5)。又,此處的鍍敷厚度係鍍敷之垂直方向的平均厚度。換言之,將銅箔溶解於12%硝酸,用ICP發射光譜裝置5100 SVDV ICP-OES(Agilent Technologies公司製)分析溶解液,測定用於鍍敷之金屬的濃度,考量金屬的密度及金屬層的表面積,算出形成層狀時之金屬層的平均厚度,作為鍍敷厚度。(9) Measurement of the amount and area of current dispersion: As an example, the sample copper foil was used in addition to the above examples 3 to 6, and the same conditions as in Example 1, except that the plating treatment time was extended, and the plating time was adjusted The amount of coulomb is such that copper foil with a plating thickness of 100nm (Example 8) and 200nm (Example 9) is used as a comparative example. In addition to the above-mentioned comparative examples 1 to 3, a commercially available copper foil (Furukawa Electric NC-WS manufactured by Industrial Co., Ltd.) only the same oxidation treatment (no plating treatment) as in Example 1 (Comparative Example 4) and the same conditions as in Example 1 were applied. Only the plating treatment time was shortened so that the plating thickness was 10nm (Comparative Example 5). In addition, the plating thickness here is the average thickness in the vertical direction of plating. In other words, the copper foil is dissolved in 12% nitric acid, and the solution is analyzed with an ICP emission spectrometer 5100 SVDV ICP-OES (manufactured by Agilent Technologies) to measure the concentration of the metal used for plating, considering the density of the metal and the surface area of the metal layer Calculate the average thickness of the metal layer when the layer is formed as the plating thickness.

對該等樣品銅箔使用原子力顯微鏡(AFM)用下述設定條件得到第5圖的電流影像。由所得之電流影像,調整為僅顯示電流值-60nA以下。又,本測定中為了去除銅箔表面之氧化對電流影像的影響,將偏壓設為負值。因此,電流值若越小,則表示電阻小,電流更容易流通。Using an atomic force microscope (AFM) on these sample copper foils, the current image in Figure 5 was obtained under the following setting conditions. The current image obtained is adjusted to only display the current value below -60nA. In addition, in this measurement, in order to remove the influence of the oxidation of the copper foil surface on the current image, the bias voltage was set to a negative value. Therefore, the smaller the current value, the smaller the resistance and the easier current flow.

裝置:日立High-Tech Science製 probe station AFM5000II 連接機種:AFM5300E 懸臂:SI-DF3-R 使用AFM5000II之自動設定機能來設定 (振幅衰減率、掃描頻率、I gain、P gain、A gain、S gain) 掃描區域:2μm見方 畫素數:512x512 測定模式:Current(nano) 測定視野:2μm SIS模式:使用 掃描器:20μm掃描器 偏壓:-0.5V 測定氣氛:真空Device: Hitachi High-Tech Science system probe station AFM5000II Connected model: AFM5300E Cantilever: SI-DF3-R Use the automatic setting function of AFM5000II to set (Amplitude attenuation rate, scanning frequency, I gain, P gain, A gain, S gain) Scanning area: 2μm square Number of pixels: 512x512 Measurement mode: Current (nano) Measuring field of view: 2μm SIS mode: use Scanner: 20μm scanner Bias voltage: -0.5V Measuring atmosphere: vacuum

使用影像處理軟體(三谷商事股份有限公司製WINROOF 2018)將所得之電流影像轉換成黑白影像後進行二值化處理,測量每4μm2 銅箔之電流部(綠色部分)的個數、總面積。Use image processing software (WINROOF 2018 manufactured by Mitani Corporation) to convert the obtained current image into a black and white image and then perform binarization processing, and measure the number and total area of the current portion (green portion) per 4μm 2 copper foil.

(10)於深度5nm之氧比例:以X射線光電子能譜(XPS)測定由負極體之表面至深度5nm之氧比例。測定裝置使用Quantera SXM(ULVAC-PHI公司製)及使用單色化AlKα(1486.6eV)作為激發X光。對用Survey Spectrum偵測到之所有元素取得窄譜。於深度方向,以2.5分鐘間隔進行Ar濺射12次,重複測定及濺射來取得資料。又,各測定係用下述條件進行。 <Survey Spectrum> X射線束直徑:100μm(25w15kV) Pass energy:280eV, 1eV step 線分析:φ100μm*1200um 累計次數 6次 <Narrow spectrum> X射線束直徑:100μm(25w15kV) Pass energy:112eV, 0.1eV step 線分析:φ100μm*1200um <Ar濺射條件> 加速電壓 1kV 照射面積 2x2mm 濺射速度 2.29nm/min(SiO2 換算)(10) Oxygen ratio at a depth of 5nm: X-ray photoelectron spectroscopy (XPS) is used to measure the oxygen ratio from the surface of the negative electrode body to a depth of 5nm. The measuring device used Quantera SXM (manufactured by ULVAC-PHI) and monochromatic AlKα (1486.6 eV) as excitation X-rays. Obtain a narrow spectrum for all elements detected by Survey Spectrum. In the depth direction, Ar sputtering was performed 12 times at 2.5 minute intervals, and the measurement and sputtering were repeated to obtain data. In addition, each measurement system was performed under the following conditions. <Survey Spectrum> X-ray beam diameter: 100μm (25w15kV) Pass energy: 280eV, 1eV step Line analysis: φ100μm*1200um cumulative number of times 6 times <Narrow spectrum> X-ray beam diameter: 100μm (25w15kV) Pass energy: 112eV, 0.1eV step line analysis: φ100μm*1200um <Ar sputtering conditions> Accelerating voltage 1kV Irradiated area 2x2mm Sputtering speed 2.29nm/min (Calculated by SiO 2 )

每4μm2 銅箔之電流分散數量及總面積、於深度5nm之氧的含量的結果如第4表所示。The results of the amount of current dispersion per 4μm 2 copper foil, the total area, and the oxygen content at a depth of 5nm are shown in Table 4.

第4表   實施例 銅箔種類 3 4 5 6 8 9 電流分散 分散數量 1448 827 953 1166 847 510 總面積[nm2 ] 399871 1307973 1254892 981925 877900 2305761 氧量[atom%] 16 17 18 23 7 5   比較例 銅箔種類 1 2 3 4 5 電流分散 分散數量 0 2 105 0 12 總面積[nm2 ] 0 122 78644 0 1586 氧量[atom%] 42 40 25 37 26 Table 4 Example Types of Copper Foil 3 4 5 6 8 9 Current dispersion Scattered number 1448 827 953 1166 847 510 Total area [nm 2 ] 399871 1307973 1254892 981925 877900 2305761 Oxygen amount [atom%] 16 17 18 twenty three 7 5 Comparative example Types of Copper Foil 1 2 3 4 5 Current dispersion Scattered number 0 2 105 0 12 Total area [nm 2 ] 0 122 78644 0 1586 Oxygen amount [atom%] 42 40 25 37 26

像這樣,實施例的銅箔係每4μm2 銅箔之電流分散數量為200以上,電流流經之總面積為100000nm2 以上。又,任一個實施例之氧量均為25%以下,係較佳的數值。比較例1、2、4、5的情況下,由於氧量多,故電流流經之總面積小。電流流經之總面積小即表示電流不易流通,集電力差。比較例3的情況下,雖然氧量為25%以下,惟電流分散數量少,電流集中使負極材料剝離,高速充放電特性差。In this way, the copper foil system of the example has a current dispersion number of 200 or more per 4 μm 2 copper foil, and the total area through which current flows is 100,000 nm 2 or more. In addition, the oxygen content in any embodiment is 25% or less, which is a preferable value. In the case of Comparative Examples 1, 2, 4, and 5, since the amount of oxygen is large, the total area through which the current flows is small. The small total area through which the current flows means that the current is not easy to flow and the power collection is poor. In the case of Comparative Example 3, although the oxygen content was 25% or less, the amount of current dispersion was small, and the current concentration caused the negative electrode material to peel off, resulting in poor high-speed charge and discharge characteristics.

[第1圖] 本發明之實施例1~實施例7及比較例1~比較例3中第一步驟及第二步驟的處理條件統整表。 [第2圖] 本發明之(A)實施例1~7、(B)比較例1~3中,顯示各銅箔之截面的掃描式電子顯微鏡(SEM)影像。(C)為計算(A)及(B)中的凸部之方法的例示圖。一個箭頭表示一個凸部。又,(C)內的擴大圖表示「相對於連接兩端之凹部的極小點之線段垂直延伸之長度」測量方法之一例。 [第3圖] 本發明之實施例中,顯示溶劑系負極材料之塗佈穩定性的圖。 [第4圖] 本發明之實施例的負極材料殘留率的測定方法之概略圖。 [第5圖] 本發明之實施例中,使用原子力顯微鏡(AFM)所得之電流影像。[Figure 1] A comprehensive table of the processing conditions of the first step and the second step in Example 1 to Example 7 and Comparative Example 1 to Comparative Example 3 of the present invention. [Second Figure] In (A) Examples 1 to 7 and (B) Comparative Examples 1 to 3 of the present invention, scanning electron microscope (SEM) images of the cross section of each copper foil are displayed. (C) is an illustration of the method of calculating the convex part in (A) and (B). An arrow indicates a convex part. In addition, the enlarged diagram in (C) shows an example of the method of measuring "the length of the line segment that extends perpendicular to the minimum point of the concave portion connecting both ends". [Figure 3] In an example of the present invention, a graph showing the coating stability of the solvent-based negative electrode material. [Figure 4] A schematic diagram of a method for measuring the residual rate of negative electrode material in an example of the present invention. [Figure 5] In the embodiment of the present invention, the current image obtained by the atomic force microscope (AFM) is used.

Claims (19)

一種銅箔,係在至少表面的一部分有高度為5nm以上之凸部,該一部分中,該凸部的密度為每3.8μm中平均15個以上且100個以下。A copper foil having protrusions with a height of 5 nm or more on at least a part of the surface, and the density of the protrusions in this part is 15 or more and 100 or less per 3.8 μm on average. 如請求項1之銅箔,其中,該表面被鍍敷處理。Such as the copper foil of claim 1, wherein the surface is plated. 如請求項1或2之銅箔,其中,該一部分中,該凸部的密度為每3.8μm中平均20個以上且62個以下。The copper foil of claim 1 or 2, wherein the density of the protrusions in the part is 20 or more and 62 or less on average per 3.8 μm. 如請求項1至3中任一項之銅箔,其中,該一部分的表面粗度Rz之三點標準差σ為0.5以下。The copper foil of any one of claims 1 to 3, wherein the three-point standard deviation σ of the surface roughness Rz of the part is 0.5 or less. 如請求項1至3中任一項之銅箔,其中,該一部分的表面粗度Rz之三點標準差σ為0.3以下。The copper foil of any one of claims 1 to 3, wherein the three-point standard deviation σ of the surface roughness Rz of the part is 0.3 or less. 如請求項1至4中任一項之銅箔,其中,該一部分的表面粗度Rz平均為2μm以下。The copper foil according to any one of claims 1 to 4, wherein the surface roughness Rz of the part is 2 μm or less on average. 如請求項1至4中任一項之銅箔,其中,該一部分的表面粗度Rz平均為1.54μm以下。The copper foil of any one of claims 1 to 4, wherein the surface roughness Rz of the part is 1.54 μm or less on average. 如請求項1至7中任一項之銅箔,其中,每4μm2 中以二值化處理之電流數量的計算個數為平均200個以上。Such as the copper foil of any one of claims 1 to 7, wherein the calculated number of currents per 4 μm 2 by binarization treatment is an average of 200 or more. 如請求項1至7中任一項之銅箔,其中,每4μm2 中以二值化處理之電流數量的計算個數為平均500個以上。Such as the copper foil of any one of Claims 1 to 7, wherein the calculated number of currents to be binarized per 4 μm 2 is an average of 500 or more. 如請求項1至9中任一項之銅箔,其中,每4μm2 之電流總面積為平均100000nm2 以上。Such as the copper foil of any one of claims 1 to 9, wherein the total area of current per 4 μm 2 is an average of 100,000 nm 2 or more. 如請求項1至9中任一項之銅箔,其中,每4μm2 之電流總面積為平均300000nm2 以上。Such as the copper foil of any one of claims 1 to 9, wherein the total current area per 4 μm 2 is an average of 300,000 nm 2 or more. 如請求項1至11中任一項之銅箔,其中,以X射線光電子能譜測定時,在由表面往深度方向5nm之氧量為50%以下。The copper foil of any one of claims 1 to 11, wherein, when measured by X-ray photoelectron spectroscopy, the oxygen content at 5 nm from the surface in the depth direction is 50% or less. 如請求項1至11中任一項之銅箔,其中,以X射線光電子能譜測定時,在由表面往深度方向5nm之氧量為25%以下。The copper foil according to any one of claims 1 to 11, wherein, when measured by X-ray photoelectron spectroscopy, the oxygen content at 5 nm from the surface in the depth direction is 25% or less. 如請求項1至13中任一項之銅箔,其中,表面的至少一部分形成有銅以外之金屬層。The copper foil according to any one of claims 1 to 13, wherein at least a part of the surface is formed with a metal layer other than copper. 如請求項14之負極集電體,其中,該金屬層的厚度為15nm以上且200nm以下。Such as the negative electrode current collector of claim 14, wherein the thickness of the metal layer is 15 nm or more and 200 nm or less. 一種鋰離子電池之負極集電體,具有如請求項1~7中任一項所述之銅箔。A negative electrode current collector of a lithium ion battery, comprising the copper foil according to any one of claims 1 to 7. 一種鋰離子電池之負極集電體,具有如請求項8~15中任一項所述之銅箔。A negative electrode current collector of a lithium ion battery, comprising the copper foil according to any one of Claims 8-15. 一種鋰離子電池之負極集電體的製造方法,係請求項7所述之鋰離子電池之負極集電體的製造方法,包含:以選自亞氯酸鈉、次氯酸鈉、氯酸鉀及過氯酸鉀中的一種以上之氧化劑氧化銅箔的銅表面,形成凸部之第一步驟; 對氧化之該銅表面進行鍍敷處理之第二步驟;及 使用將該銅表面鍍敷處理後之該銅箔,製造負極集電體之第三步驟。A method for manufacturing a negative electrode current collector of a lithium ion battery, which is the method for manufacturing a negative electrode current collector of a lithium ion battery as described in claim 7, comprising: a method selected from sodium chlorite, sodium hypochlorite, potassium chlorate and potassium perchlorate The first step of oxidizing the copper surface of the copper foil with more than one oxidant to form protrusions; The second step of plating the oxidized copper surface; and The third step of manufacturing a negative electrode current collector using the copper foil after the copper surface is plated. 如請求項18所述之鋰離子電池之負極集電體的製造方法,其中,在該第二步驟前,另包含將於該第一步驟氧化的該銅表面溶解之步驟及/或還原之第四步驟。The method for manufacturing a negative electrode current collector of a lithium ion battery according to claim 18, wherein, before the second step, it further includes a step of dissolving the copper surface oxidized in the first step and/or a second step of reducing Four steps.
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