TW202033311A - Grinding machine - Google Patents

Abstract

A grinding machine comprises: a base; a first grinding unit installed in the base; a second grinding unit installed in the base and neighbored to the first grinding unit; a first table unit installed in the base and below the first grinding unit; and a second table unit installed in the base, below the second grinding unit and neighbored to the first table unit.

Description

Grinding machine

A grinding machine, especially a grinding machine that can perform rough grinding and fine grinding at the same time, thereby improving efficiency and reducing time and cost.

In the existing semiconductor manufacturing process, polishing semiconductor is one of the unavoidable processes. However, with the development of electronic products, the semiconductor system is developing in a thinner direction, so the polishing of semiconductors is more important.

The existing semiconductor polishing device adopts a dual system design, one is a rough polishing system and the other is a fine polishing system. The workpiece to be ground, such as a strip of semiconductor, is sent to the rough grinding system for grinding, which is the rough grinding process. After the rough grinding is completed, the rough ground workpiece is sent to the fine grinding system for fine grinding of the workpiece.

The rough grinding system and the fine grinding system are two different systems. Therefore, semiconductor manufacturers will collect the rough grinding workpieces to a certain amount, and then send them to the fine grinding system for the fine grinding process. Therefore, the time cost in the grinding process and the problem of poor results are virtually increased.

In view of the aforementioned problems in the prior art, the creative purpose of the present invention is to provide a grinding machine, which can reduce the time cost in the grinding process and improve the efficiency.

In order to achieve the above creative purpose, the present invention proposes a grinder, which includes: A base A first grinding unit, which is arranged on the base; A second grinding unit, which is arranged on the base and adjacent to the first grinding unit; A first stage unit, which is arranged on the base and below the first grinding unit; and A second stage unit is arranged on the base, below the second grinding unit and adjacent to the first stage unit.

In one embodiment, the base further has a gantry; the first grinding unit has a first displacement module, and the first displacement module is disposed on one side of the gantry; the second grinding unit has a second The displacement module, the second displacement module is arranged on the other side of the gantry.

In one embodiment, the first grinding unit further has a first grinding wheel dressing module, a first fine grinding module and a first thickness measuring module, the first grinding wheel dressing module and the first fine grinding module The grinding module and the first thickness measurement module are arranged in the first displacement module; the second grinding unit further has a second grinding wheel dressing module, a second rough grinding module and a second thickness measurement The measuring module, the second grinding wheel dressing module, the second rough grinding module and the second thickness measuring module are arranged in the second displacement module.

In one embodiment, the first platform unit has a first slide rail and a first platform, the first slide rail is attached to the base, and the first platform is attached to the first slide rail; The second platform unit has a second slide rail and a second platform, the second slide rail is attached to the base, and the second platform is attached to the second slide rail.

In one embodiment, an uploading unit is provided on the base and adjacent to the first grinding unit; a downloading unit is provided on the base and adjacent to the uploading unit; and a reclaiming unit is provided on the The base is adjacent to the download unit; a feeding unit is located on the base and adjacent to the reclaiming unit; a drying unit is located on the base and located between the reclaiming unit and the download unit A feeding unit is installed on the base; a carrier cleaning module is installed on the feeding unit.

In summary, the grinding machine of the present invention is provided with a first grinding unit and a second grinding unit in the same base. The first grinding unit can perform fine grinding, and the second grinding unit can perform rough grinding. Therefore, the present invention can perform rough grinding and fine grinding at the same time, which reduces the time cost in the grinding process and improves efficiency.

Please refer to Fig. 1. The present invention is a grinder, which includes a base 1, a first grinding unit 2, a first stage unit 3, a second grinding unit 4 and a second stage Unit 5.

The base 1 has an uploading unit 10, a downloading unit 11, a stage cleaning module 12, a feeding unit 13, a drying unit 14, a feeding unit 15, a reclaiming unit 16 and a gantry 17.

The loading unit 10 is located on one side of the base 1, and the loading unit 10 is used for setting the storage box or storage box of the workpiece to be ground. For example, the workpiece may be a strip semiconductor.

The download unit 11 is located on one side of the base 1 and adjacent to the upload unit 10. The download unit 11 is used for the storage box or storage box for storing the polished workpiece.

The feeding unit 13 is located at one end of the base 1. The feeding unit 13 can be a combination of a mechanical arm, a picking fork and a linear slide, and a vacuum adsorption device. The adsorption technology of the feeding unit 13 is a commonly used technical means for picking and placing workpieces in the industry, so it will not be repeated here.

Please refer to FIG. 2 and FIG. 1. In one embodiment, the feeding unit 13 has a long rail 134, a side moving module 130, a setting frame 131, at least one longitudinal moving module 132, and at least one Pick and place module 133. The side moving module 130 is movably installed on the long rail 134. The installation frame 131 is installed on the side moving module 130. The longitudinal movement module 132 is movably installed on the mounting frame 131. The pick-and-place module 133 is installed in the longitudinal movement module 132.

The stage cleaning module 12 is a cleaning roller. The stage cleaning module 12 is installed in the above-mentioned longitudinal movement module 132 or the pick-and-place module 133. The side movement module 130 and the vertical movement module 132 adjust the position of the stage cleaning module 12 relative to the first stage 31 or the second stage 51 described below, so that the stage cleaning module 12 can clean the following The position of the first stage 31 or the second stage 51, or the workpiece on the first stage 31 or the second stage 51, so as to avoid the grinding debris left by the machining that affects the adsorption/pick-up of the workpiece.

Taking Figure 2 as an example, the stage cleaning module 12 is installed on the vertical movement module 132, and the stage cleaning module 12 is located on the side of the pick-and-place module 133. Before placing the workpiece to be ground on the second stage 51, the longitudinal movement module 132 adjusts the position of the stage cleaning module 12 relative to the second stage 51 and cleans it; and when the workpiece to be ground is placed on After the second stage 51, the stage cleaning module 12 can also be controlled to clean the workpiece on the second stage 51 to be ground.

The drying unit 14 is located on the base 1 and adjacent to the download unit 11. The drying unit 14 is used to dry the ground workpiece.

The feeding unit 15 is located on the base 1 and between the drying unit 14 and the downloading unit 11.

The reclaiming unit 16 is located at the other end of the base 1 and adjacent to the feeding unit 15. The feeding unit 15 and the reclaiming unit 16 can be a combination of a robotic arm, a picking fork and a linear slide, and a vacuum suction device. The pushing or adsorbing technology of the feeding unit 15 and the reclaiming unit 16 is a common technical means for picking and placing workpieces in the industry, so it will not be repeated here. The gantry 17 is located on the base 1.

The first stage unit 3 is located on the base 1 and below the gantry 17. The first stage unit 3 has a first slide rail 30 and a first stage 31. The first slide rail 30 is located on the base 1. The first carrier 31 is installed on the first slide rail 30, and the first carrier 31 is reciprocated on the first slide rail 30.

The first grinding unit 2 has a first displacement module 20, a first fine grinding group 21, a first thickness measurement module 22 and a first grinding wheel dressing module 23.

The first displacement module 20 is arranged on one side of the gantry 17. The first fine grinding group 21 and the first thickness measurement module 22 are provided in the first displacement module 20. The first grinding wheel dressing module 23 is installed on the first carrier 31.

The second stage unit 5 is set on the base 1 and located below the gantry 17 and adjacent to the first stage unit 3. The second stage unit 5 has a second slide rail 50 and a second stage 51. The second slide rail 50 is located on the base 1 and adjacent to the first slide rail 30. The second carrier 51 is set on the first slide rail 50, and the second carrier 51 is reciprocated on the second slide rail 50.

The second grinding unit 4 has a second displacement module 40, a second rough grinding module 41, a second thickness measuring module 42 and a second grinding wheel dressing module 43.

The second displacement module 40 is arranged on the other side of the gantry 17. The second rough grinding module 41 and the second thickness measurement module 42 are provided in the second displacement module 40. The second grinding wheel dressing module 43 is installed on the second carrier 51.

Please refer to Figure 1 again. The upload unit 10 is provided with a discharge rod 100. The discharge rod 100 can move the workpiece to be ground from the storage box or the storage box of the upload unit 10, and then the workpiece is transferred by the feeding unit 13 Placed on the second carrier 51. The second rough grinding module 41 performs rough grinding on the workpiece. The second displacement module 40 moves the position of the second rough grinding module 41 relative to the workpiece relative to the gantry 17, so that the workpiece can be uniformly ground. If the storage box or the workpiece in the storage box has been reduced to a set number or there is no more workpiece, the storage box or storage box with the workpiece can be replaced with the original storage box or storage box.

If discussed further, the discharging rod 100 moves the workpiece to be polished from the storage box or storage box of the loading unit 10, the lateral movement module 130 moves relative to the long rail 134, and the longitudinal movement module 132 relative to the setting frame 131 Move to adjust the position of the pick-and-place module 133 relative to the workpiece located on the discharge rod 100, so that the pick-and-place module 133 can remove the workpiece from the discharge rod 100. The lateral movement module 130 and the longitudinal movement module 132 adjust the position of the workpiece located in the pick and place module 133 relative to the second stage 51 so that the pick and place module 133 can place the workpiece on the second stage 51.

The aforementioned feeding unit 13 places the workpiece on the second stage 51. If discussed further, the second stage 51 is moved toward the feeding unit 13 so that the feeding unit 13 can place the workpiece on the second stage 51. After the workpiece is placed on the second stage 51, the second stage 51 is moved toward the second grinding unit 4, so that the workpiece is roughly ground.

During or after rough grinding, the second thickness measuring module 42 measures the thickness of the workpiece. The second thickness measurement module 42 uploads the measured thickness to a control system.

If during the rough grinding process, before or after rough grinding, the grinding wheel of the second rough grinding module 41 can be adjusted or corrected by the second grinding wheel dressing module 43 or the first grinding wheel dressing module 23.

After the rough grinding of the workpiece is completed, the second stage 51 transfers the rough-grinded work to the other side of the gantry 17 (the left side of the gantry 17 in Fig. 1), and the first displacement module 20 transfers the first fine grinding group 21 to the upper side of the second stage 51, and can perform fine grinding operations on the work after rough grinding. The unloaded first carrier 31 is moved to one side of the gantry 17 (the right side of the gantry 17 in Fig. 1). .

The feeding unit 13 moves the workpiece to be ground above the first stage 31, and places the workpiece on the first stage 31, and the second displacement module 40 transfers the second grinding unit 4 to the first stage 31 Above it for rough grinding operations. The first displacement module 20 transfers the first fine grinding module 21 to above the second stage 51 for fine grinding operations.

For the workpiece located on the second stage 51, the first fine-grinding module 21 grinds the workpiece. The first displacement module 20 moves relative to the position of the workpiece relative to the gantry 17 so that the workpiece can be uniformly ground.

If during the fine grinding process, before or after the fine grinding, the grinding wheel of the first fine grinding module 21 can be adjusted or corrected by the first grinding wheel dressing module 23 or the second grinding wheel dressing module 43.

During or after the fine grinding, the first thickness measuring module 22 measures the thickness of the workpiece. The first thickness measurement module 22 uploads the measured thickness to the control system.

After the workpiece is finely ground, the reclaiming unit 16 removes the workpiece from the second carrier 51 and sends it to a cleaning unit 60 for cleaning. After the cleaning unit finishes washing the workpiece, the reclaiming unit 16 continues to transport the workpiece to the feeding unit 15. Of course, the reclaiming unit 16 is provided with a mechanism similar in function to the longitudinal movement module 132 and the picking and placing module 133 described above, and the workpiece can be removed from the second stage 51 or the first stage 31.

The feeding unit 15 conveys the workpiece to the drying unit 14 so that the drying unit 14 can dry the workpiece. After the workpiece is dried, the feeding unit 15 continues to transport the workpiece to the storage box or storage box located in the download unit 11. After the storage box or storage box has reached a set number of workpieces, the storage box or storage box can be taken out from the download unit 11 and sent to the next process.

In summary, the grinding machine of the present invention is provided with a first grinding unit 2 and a second grinding unit 4 in the same base 1. The first grinding unit 2 can perform fine grinding, and the second grinding unit 4 can perform rough grinding. That is, the first grinding unit 2 and the second grinding unit 4 are respectively arranged on two sides of the gantry 17, and the first stage The unit 3 and the second stage unit 5 are relatively movable on the two sides of the gantry 17 respectively, and the first stage unit 3 and the second stage unit 5 can be controlled to perform grinding operations on the two sides of the gantry 17 respectively. That is, the second stage 51 carries the workpiece first on the right side of the gantry 17, and the second grinding unit 4 performs rough grinding, and then the second stage 51 moves to the left side of the gantry 17, and then it is transferred to the first grinding unit 2. Perform fine grinding. When the workpiece on the second stage 51 is on the right side of the gantry 17, after rough grinding is completed by the second grinding unit 4, the second stage 51 is transferred to the left side of the gantry 17, and the first grinding unit 2 The workpiece on the second stage 51 performs fine grinding operation; when the first grinding unit 2 performs fine grinding operation on the workpiece on the second stage 51, the empty first stage 31 moves to the gantry On the right side of 17, after the feeding unit 13 places another workpiece to be ground on the first stage 31, then the second grinding unit 4 on the other workpiece to be ground on the first stage 31 Perform rough grinding.

Therefore, the present invention can control the feeding unit 13 to place the workpieces to be ground on the first stage 31 and the second stage 51 in turn, and then through the first grinding unit 2 and the second grinding unit 4 respectively to the first stage 31 and the second stage 31 The workpieces on the two stages 51 are ground, so that the grinder of the present invention can perform rough grinding and fine grinding at the same time, which reduces the time cost in the grinding process and improves the efficiency.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the relevant technical field can make slight changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to those defined by the attached patent scope.

1: base 10: upload unit 100: discharge rod 11: Download unit 12: Stage cleaning module 13: Feeding unit 130: Side movement module 131: set rack 132: Vertical movement module 133: Pick and Place Module 134: Long Track 14: Drying unit 15: feeding unit 16: Reclaiming unit 17: Dragon Gate 2: The first grinding unit 20: The first displacement module 21: The first fine grinding group 22: The first thickness measurement module 23: The first grinding wheel refurbishment module 3: The first stage unit 30: The first slide and 31: First stage 4: The second grinding unit 40: The second displacement module 41: The second rough grinding module 42: The second thickness measurement module 43: The second grinding wheel repair module 5: The second stage unit 50: second slide 51: Second stage 60: Cleaning unit

Figure 1 is a schematic diagram of a grinding machine of the present invention. Figure 2 is a schematic diagram of a stage cleaning module.

1: base

10: upload unit

100: discharge rod

11: Download unit

12: Stage cleaning module

13: Feeding unit

130: Side movement module

131: set rack

132: Vertical movement module

134: Long Track

14: Drying unit

15: feeding unit

16: Reclaiming unit

17: Dragon Gate

2: The first grinding unit

20: The first displacement module

21: The first fine grinding group

22: The first thickness measurement module

23: The first grinding wheel refurbishment module

3: The first stage unit

30: The first slide and

31: First stage

4: The second grinding unit

40: The second displacement module

41: The second rough grinding module

42: The second thickness measurement module

43: The second grinding wheel repair module

5: The second stage unit

50: second slide

51: Second stage

60: Cleaning unit

Claims (10)

A grinding machine, which contains: A base A first grinding unit, which is arranged on the base; A second grinding unit, which is arranged on the base and adjacent to the first grinding unit; A first stage unit, which is arranged on the base and below the first grinding unit; and A second stage unit is arranged on the base, below the second grinding unit and adjacent to the first stage unit. For the grinder described in claim 1, wherein the base further has a gantry; the first grinding unit has a first displacement module, and the first displacement module is arranged on one side of the gantry; The second grinding unit has a second displacement module, and the second displacement module is arranged on the other side of the gantry. For the grinding machine described in claim 2, wherein the first grinding unit further has a first grinding wheel dressing module, a first fine grinding module and a first thickness measurement module, the first grinding wheel The refurbishment module, the first fine grinding module and the first thickness measurement module are arranged in the first displacement module; the second grinding unit further has a second grinding wheel refurbishing module and a second rough grinding module The module and a second thickness measurement module, the second grinding wheel dressing module, the second rough grinding module and the second thickness measurement module are arranged in the second displacement module. The grinder described in claim 1, wherein the first stage unit has a first slide rail and a first stage, the first slide rail is attached to the base, and the first stage Is attached to the first slide rail; the second platform unit has a second slide rail and a second platform, the second slide rail is attached to the base, and the second platform is attached to the first Two slide rails. For the grinding machine described in item 1 of the scope of patent application, it further has a loading unit which is arranged on the base and adjacent to the first grinding unit. For example, the grinder described in item 5 of the scope of patent application has a download unit, and the download unit is arranged on the base and adjacent to the upload unit. For example, the grinder described in item 6 of the scope of patent application further has a reclaiming unit which is arranged on the base and adjacent to the downloading unit. For example, the grinder described in item 7 of the scope of patent application further has a feeding unit, and the feeding unit is arranged on the base and adjacent to the reclaiming unit. For example, the grinder described in item 7 of the scope of patent application further has a drying unit, and the drying unit is arranged on the base and located between the reclaiming unit and the downloading unit. For example, the grinder described in item 7 of the scope of patent application has a feeding unit and a stage cleaning module. The feeding unit is arranged on the base and the stage cleaning module is arranged on the inlet.料unit.

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