TW202030554A - Photosensitive resin composition, method for producing patterned cured film, and patterned cured film wherein the patterned cured film has an excellent straightness and adhesion to a substrate, and has a good cross-sectional shape - Google Patents

Photosensitive resin composition, method for producing patterned cured film, and patterned cured film wherein the patterned cured film has an excellent straightness and adhesion to a substrate, and has a good cross-sectional shape Download PDF

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TW202030554A
TW202030554A TW108139902A TW108139902A TW202030554A TW 202030554 A TW202030554 A TW 202030554A TW 108139902 A TW108139902 A TW 108139902A TW 108139902 A TW108139902 A TW 108139902A TW 202030554 A TW202030554 A TW 202030554A
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田所恵典
佐藤梓実
山地晃大
塩田大
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日商東京應化工業股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2012Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor

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Abstract

The present invention provides a photosensitive resin composition capable of forming a patterned cured film having excellent straightness and adhesion to a substrate and having a good cross-sectional shape, a method for producing a patterned cured film by using the photosensitive resin composition, and a patterned cured film that can be produced by the production method. In the photosensitive resin composition of the present invention that contains an alkali-soluble resin (A), a photo-polymerizable monomer (B) and a photo-polymerization initiator (C), the oxime ester compound having a nitrated specific structure containing a carbazole ring, i.e. the photo-polymerization initiator (C-I), and the photo-polymerization initiator (C-II) other than the photo-polymerization initiator (C-I) are used in combination.

Description

感光性樹脂組合物、經圖案化之硬化膜的製造方法、及經圖案化之硬化膜Photosensitive resin composition, method for producing patterned cured film, and patterned cured film

本發明係關於一種感光性樹脂組合物、經圖案化之硬化膜的製造方法、及經圖案化之硬化膜。The present invention relates to a photosensitive resin composition, a method for producing a patterned cured film, and a patterned cured film.

例如,於如液晶顯示裝置之顯示裝置中,大多使用絕緣膜、或如間隔件之透光性之構件、或如黑矩陣之遮光性之構件。此種構件以經圖案化之膜之形式形成之情況居多。為了形成經圖案化之膜,廣泛使用藉由曝光而提供硬化膜之感光性樹脂組合物。藉由對此種感光性樹脂組合物進行區域選擇性曝光之後使其顯影,能夠形成經圖案化之硬化膜。For example, in display devices such as liquid crystal display devices, insulating films, or light-transmitting members such as spacers, or light-shielding members such as black matrixes are mostly used. This kind of member is mostly formed in the form of a patterned film. In order to form a patterned film, a photosensitive resin composition that provides a cured film by exposure is widely used. By subjecting this photosensitive resin composition to regioselective exposure and then developing it, a patterned cured film can be formed.

例如,作為能夠形成透明之硬化膜之感光性樹脂組合物,揭示有包含樹脂、聚合性化合物、特定之結構之聚合起始劑、及溶劑之組合物(專利文獻1)。具體而言,於專利文獻1之實施例中,揭示一種感光性樹脂組合物,其包含甲基丙烯酸與具有脂環式環氧基之丙烯酸酯之共聚物、二季戊四醇六丙烯酸酯、下述式之任一者所表示之聚合起始劑、及含有3-甲氧基-1-丁醇、丙二醇單甲醚乙酸酯、3-乙氧基丙酸乙酯、及乙酸3-甲氧基丁酯之混合溶劑。For example, as a photosensitive resin composition capable of forming a transparent cured film, a composition containing a resin, a polymerizable compound, a polymerization initiator of a specific structure, and a solvent is disclosed (Patent Document 1). Specifically, in the Examples of Patent Document 1, a photosensitive resin composition is disclosed, which comprises a copolymer of methacrylic acid and an acrylate having an alicyclic epoxy group, dipentaerythritol hexaacrylate, and the following formula Any one of the polymerization initiator, and containing 3-methoxy-1-butanol, propylene glycol monomethyl ether acetate, 3-ethoxy ethyl propionate, and 3-methoxy acetate Mixed solvent of butyl ester.

[化1]

Figure 02_image001
[先前技術文獻] [專利文獻][化1]
Figure 02_image001
[Prior Art Document] [Patent Document]

[專利文獻1]日本專利特開2012-58728號公報[Patent Document 1] Japanese Patent Laid-Open No. 2012-58728

[發明所欲解決之問題][The problem to be solved by the invention]

且說,關於感光性樹脂組合物總體,大多要求能夠形成直進性及對基板之密接性優異,且截面之形狀良好之經圖案化之硬化膜。但是,於使用專利文獻1中所記載之感光性樹脂組合物等以往已知之感光性樹脂組合物之情形時,經常無法形成直進性及對基板之密接性優異,且截面之形狀良好之經圖案化之硬化膜。In addition, with regard to the entire photosensitive resin composition, it is often required to form a patterned cured film having excellent linearity and adhesion to a substrate, and having a good cross-sectional shape. However, when using conventionally known photosensitive resin compositions such as the photosensitive resin composition described in Patent Document 1, it is often impossible to form a pattern with excellent straightness and adhesion to the substrate, and a good cross-sectional shape. The hardened film.

本發明係鑒於上述課題而完成者,其目的在於提供一種能夠形成直進性及對基板之密接性優異,且截面之形狀良好之經圖案化之硬化膜之感光性樹脂組合物、使用該感光性樹脂組合物之經圖案化之硬化膜的製造方法、及能夠利用該製造方法製造之經圖案化之硬化膜。 [解決問題之技術手段]The present invention was accomplished in view of the above-mentioned problems, and its object is to provide a photosensitive resin composition capable of forming a patterned cured film having excellent linearity and adhesion to a substrate, and having a good cross-sectional shape, and using the photosensitive resin composition The manufacturing method of the patterned cured film of a resin composition, and the patterned cured film which can be manufactured by this manufacturing method. [Technical means to solve the problem]

本發明者等人發現可藉由在包含鹼可溶性樹脂(A)、光聚合性單體(B)、及光聚合起始劑(C)之感光性樹脂組合物中,將經硝基化之包含咔唑環之特定之結構的肟酯化合物即光聚合起始劑(C-I)與光聚合起始劑(C-II)以外之其他光聚合起始劑(C-II)組合使用而解決上述課題,從而完成本發明。更具體而言,本發明提供以下者。The inventors of the present invention have discovered that it is possible to nitrate a photosensitive resin composition containing an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C). The oxime ester compound containing the specific structure of the carbazole ring, that is, the photopolymerization initiator (CI), and the photopolymerization initiator (C-II) other than the photopolymerization initiator (C-II) are used in combination to solve the above The problem is to complete the present invention. More specifically, the present invention provides the following.

本發明之第1態樣係一種感光性樹脂組合物,其係包含鹼可溶性樹脂(A)、光聚合性單體(B)、及光聚合起始劑(C)者,且 光聚合起始劑(C)包含下述式(C1)所表示之光聚合起始劑(C-I)、及光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II), [化2]

Figure 02_image003
(式(C1)中,X01 係於下述式(C1-1)所表示之結構中,將鍵結於芳香族環上之氫原子中之t2+t3個氫原子去除後之基,X02 及X03 分別獨立為一價有機基,X04 及X05 分別獨立為氫原子、可具有取代基之碳原子數1以上11以下之烷基、或可具有取代基之芳基,t0~t3分別獨立為0或1,t2及t3之至少一者為1, [化3]
Figure 02_image005
式(C1-1)中,X06 係以C-N鍵鍵結於咔唑環中之氮原子之一價有機基,t4及t5分別獨立為0或1,t4及t5之至少一者為1) 光聚合起始劑(C)之質量中之上述光聚合起始劑(C-I)之質量比率為20質量%以上95質量%以下。The first aspect of the present invention is a photosensitive resin composition comprising an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), and the photopolymerization is initiated The agent (C) includes the photopolymerization initiator (CI) represented by the following formula (C1) and other photopolymerization initiators (C-II) other than the photopolymerization initiator (CI), [化2]
Figure 02_image003
(In formula (C1), X 01 is in the structure represented by the following formula (C1-1), the group obtained by removing t2+t3 hydrogen atoms from the hydrogen atoms bonded to the aromatic ring, X 02 and X 03 is each independently a monovalent organic group, X 04 and X 05 are each independently a hydrogen atom, an optionally substituted alkyl group having 1 to 11 carbon atoms, or an optionally substituted aryl group, t0 to t3, respectively Independent is 0 or 1, at least one of t2 and t3 is 1, [化3]
Figure 02_image005
In the formula (C1-1), X 06 is a monovalent organic group bonded to the nitrogen atom in the carbazole ring by a CN bond, t4 and t5 are independently 0 or 1, and at least one of t4 and t5 is 1) The mass ratio of the photopolymerization initiator (CI) in the mass of the photopolymerization initiator (C) is 20% by mass to 95% by mass.

本發明之第2態樣係一種經圖案化之硬化膜的製造方法,其包括以下步驟: 將第1態樣之感光性樹脂組合物塗佈於基板上而形成塗佈膜; 對塗佈膜進行區域選擇性曝光;及 使曝光後之塗佈膜顯影。The second aspect of the present invention is a method for manufacturing a patterned cured film, which includes the following steps: Coating the photosensitive resin composition of the first aspect on a substrate to form a coating film; Area selective exposure of the coated film; and Develop the coated film after exposure.

本發明之第3態樣係一種經圖案化之硬化膜,其包含第1態樣之感光性樹脂組合物之硬化物。 [發明之效果]The third aspect of the present invention is a patterned cured film comprising the cured product of the photosensitive resin composition of the first aspect. [Effects of Invention]

根據本發明,可提供一種能夠形成直進性及對基板之密接性優異,且截面之形狀良好之經圖案化之硬化膜的感光性樹脂組合物、使用該感光性樹脂組合物之經圖案化之硬化膜的製造方法、及能夠利用該製造方法製造之經圖案化之硬化膜。According to the present invention, it is possible to provide a photosensitive resin composition capable of forming a patterned cured film having excellent linearity and adhesion to a substrate, and a good cross-sectional shape, and a patterned cured film using the photosensitive resin composition The manufacturing method of a cured film, and the patterned cured film which can be manufactured by this manufacturing method.

≪感光性樹脂組合物≫ 感光性樹脂組合物包含鹼可溶性樹脂(A)、光聚合性單體(B)、及光聚合起始劑(C)。 感光性樹脂組合物將下述式(C1)所表示之光聚合起始劑(C-I)與光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II)組合而包含,作為光聚合起始劑(C)。光聚合起始劑(C)之質量中之光聚合起始劑(C-I)之質量比率為20質量%以上95質量%以下。 藉由感光性樹脂組合物係將特定量之光聚合起始劑(C-I)與光聚合起始劑(C-II)組合而包含,能夠使用感光性樹脂組合物形成直進性及對基板之密接性優異,且截面之形狀良好之經圖案化之硬化膜。≪Photosensitive resin composition≫ The photosensitive resin composition contains an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C). The photosensitive resin composition contains a photopolymerization initiator (CI) represented by the following formula (C1) and a photopolymerization initiator (C-II) other than the photopolymerization initiator (CI) in combination, as Photopolymerization initiator (C). The mass ratio of the photopolymerization initiator (C-I) in the mass of the photopolymerization initiator (C) is 20% by mass to 95% by mass. The photosensitive resin composition contains a specific amount of photopolymerization initiator (CI) and photopolymerization initiator (C-II) in combination, and the photosensitive resin composition can be used to form straightness and adhesion to the substrate A patterned cured film with excellent performance and good cross-sectional shape.

以下,對感光性樹脂組合物中所包含之必需或任意之成分進行說明。Hereinafter, the essential or optional components contained in the photosensitive resin composition will be described.

<鹼可溶性樹脂(A)> 感光性樹脂組合物包含鹼可溶性樹脂(A)。作為鹼可溶性樹脂(A),並無特別限定,可自以往各種感光性樹脂組合物中所調配之鹼可溶性樹脂中適當進行選擇。 此處,於本說明書中,鹼可溶性樹脂(A)係指於分子內具備具有鹼可溶性之官能基(例如,酚性羥基、羧基、磺酸基等)之樹脂。<Alkali-soluble resin (A)> The photosensitive resin composition contains alkali-soluble resin (A). There are no particular limitations on the alkali-soluble resin (A), and it can be appropriately selected from alkali-soluble resins prepared in various conventional photosensitive resin compositions. Here, in this specification, the alkali-soluble resin (A) refers to a resin having an alkali-soluble functional group (for example, a phenolic hydroxyl group, a carboxyl group, a sulfonic acid group, etc.) in the molecule.

關於適宜作為鹼可溶性樹脂(A)之樹脂,可列舉具有Cardo結構之樹脂(a-1)(以下,亦記為「Cardo樹脂(a-1)」)。 於使用Cardo樹脂(a-1)作為鹼可溶性樹脂之情形時,容易獲得解像性優異之感光性樹脂組合物,從而使用感光性樹脂組合物容易形成不易因加熱而過度流動之硬化膜。因此,容易形成形狀良好之硬化膜。Regarding the resin suitable as the alkali-soluble resin (A), a resin (a-1) having a Cardo structure (hereinafter, also referred to as "Cardo resin (a-1)") is mentioned. When the Cardo resin (a-1) is used as the alkali-soluble resin, it is easy to obtain a photosensitive resin composition with excellent resolution, and the photosensitive resin composition is used to easily form a cured film that is not easy to flow excessively due to heating. Therefore, it is easy to form a cured film with a good shape.

〔具有Cardo結構之樹脂(a-1)〕 作為Cardo樹脂(a-1),可使用於其結構中具有Cardo骨架,且具有特定之鹼可溶性之樹脂。Cardo骨架係指於構成第1環狀結構之1個環碳原子上鍵結有第2環狀結構與第3環狀結構之骨架。再者,第2環狀結構與第3環狀結構可為相同之結構,亦可為不同之結構。 作為Cardo骨架之代表性之例,可列舉於茀環之9位碳原子上鍵結有2個芳香環(例如苯環)之骨架。〔Resin with Cardo structure (a-1)〕 As Cardo resin (a-1), it can be used for resins that have a Cardo skeleton in their structure and have specific alkali solubility. Cardo skeleton refers to a skeleton in which a second ring structure and a third ring structure are bonded to one ring carbon atom constituting the first ring structure. Furthermore, the second cyclic structure and the third cyclic structure may be the same structure or different structures. As a representative example of the Cardo skeleton, a skeleton in which two aromatic rings (for example, a benzene ring) are bonded to the 9-position carbon atom of the chrysanthemum ring can be cited.

作為Cardo樹脂(a-1),並無特別限定,可使用以往公知之樹脂。其中,較佳為下述式(a-1)所表示之樹脂。 [化4]

Figure 02_image007
The Cardo resin (a-1) is not particularly limited, and conventionally known resins can be used. Among them, a resin represented by the following formula (a-1) is preferred. [化4]
Figure 02_image007

式(a-1)中,Xa 表示下述式(a-2)所表示之基。m1表示0以上20以下之整數。 [化5]

Figure 02_image009
In the formula (a-1), X a represents a group represented by the following formula (a-2). m1 represents an integer of 0 to 20. [化5]
Figure 02_image009

上述式(a-2)中,Ra1 分別獨立表示氫原子、碳原子數1以上6以下之烴基或鹵素原子,Ra2 分別獨立表示氫原子或甲基,Ra3 分別獨立表示直鏈或支鏈之伸烷基,m2表示0或1,Wa 表示下述式(a-3)所表示之基。In the above formula (a-2), R a1 each independently represents a hydrogen atom, a hydrocarbon group with 1 to 6 carbon atoms or a halogen atom, R a2 each independently represents a hydrogen atom or a methyl group, and R a3 each independently represents a linear or branched In the alkylene group of the chain, m2 represents 0 or 1, and Wa represents a group represented by the following formula (a-3).

[化6]

Figure 02_image011
[化6]
Figure 02_image011

式(a-2)中,作為Ra3 ,較佳為碳原子數1以上20以下之伸烷基,更佳為碳原子數1以上10以下之伸烷基,尤佳為碳原子數1以上6以下之伸烷基,最佳為乙烷-1,2-二基、丙烷-1,2-二基、及丙烷1,3-二基。In the formula (a-2), Ra3 is preferably an alkylene having 1 to 20 carbon atoms, more preferably an alkylene having 1 to 10 carbon atoms, and particularly preferably 1 or more carbon atoms Alkylene groups below 6 are most preferably ethane-1,2-diyl, propane-1,2-diyl, and propane 1,3-diyl.

式(a-3)中之環A表示可與芳香族環縮合且亦可具有取代基之脂肪族環。脂肪族環可為脂肪族烴環,亦可為脂肪族雜環。 作為脂肪族環,可列舉:單環烷烴、雙環烷烴、三環烷烴、四環烷烴等。 具體而言,可列舉:環戊烷、環己烷、環庚烷、環辛烷等單環烷烴、或金剛烷、降𦯉烷、異𦯉烷、三環癸烷、四環十二烷。 可與脂肪族環縮合之芳香族環可為芳香族烴環,亦可為芳香族雜環,較佳為芳香族烴環。具體而言,較佳為苯環、及萘環。Ring A in the formula (a-3) represents an aliphatic ring which may be condensed with an aromatic ring and may also have a substituent. The aliphatic ring may be an aliphatic hydrocarbon ring or an aliphatic heterocyclic ring. Examples of the aliphatic ring include monocycloalkanes, bicycloalkanes, tricycloalkanes, and tetracycloalkanes. Specifically, examples include monocyclic alkanes such as cyclopentane, cyclohexane, cycloheptane, and cyclooctane, or adamantane, nordecane, isodecane, tricyclodecane, and tetracyclododecane. The aromatic ring that can be condensed with the aliphatic ring may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring, and is preferably an aromatic hydrocarbon ring. Specifically, a benzene ring and a naphthalene ring are preferable.

作為式(a-3)所表示之二價基之較佳之例,可列舉下述基。 [化7]

Figure 02_image013
As a preferable example of the divalent group represented by formula (a-3), the following groups can be mentioned. [化7]
Figure 02_image013

式(a-1)中之二價基Xa 係藉由使提供殘基Za 之四羧酸二酐與下式(a-2a)所表示之二醇化合物發生反應而導入至Cardo樹脂(a-1)中。 [化8]

Figure 02_image015
The divalent group X a in the formula (a-1) is introduced into the Cardo resin by reacting the tetracarboxylic dianhydride providing the residue Z a with the diol compound represented by the following formula (a-2a) ( a-1). [化8]
Figure 02_image015

式(a-2a)中,Ra1 、Ra2 、Ra3 、及m2如對式(a-2)所說明。關於式(a-2a)中之環A,如對式(a-3)所說明。In the formula (a-2a), R a1 , R a2 , R a3 , and m2 are as described for the formula (a-2). Regarding the ring A in the formula (a-2a), as described for the formula (a-3).

式(a-2a)所表示之二醇化合物例如可藉由以下方法進行製造。 首先,視需要按照慣例將下述式(a-2b)所表示之二醇化合物所具有之酚性羥基中之氫原子取代為-Ra3 -OH所表示的基,之後使用表氯醇等進行縮水甘油化而獲得下述式(a-2c)所表示之環氧化合物。 繼而,藉由使式(a-2c)所表示之環氧化合物與丙烯酸或甲基丙烯酸發生反應而獲得式(a-2a)所表示之二醇化合物。 式(a-2b)及式(a-2c)中,Ra1 、Ra3 、及m2如對式(a-2)所說明。關於式(a-2b)及式(a-2c)中之環A,如對式(a-3)所說明。 再者,式(a-2a)所表示之二醇化合物之製造方法並不限定於上述方法。 [化9]

Figure 02_image017
The diol compound represented by formula (a-2a) can be produced by the following method, for example. First, if necessary, replace the hydrogen atom in the phenolic hydroxyl group of the diol compound represented by the following formula (a-2b) with the group represented by -R a3 -OH according to the convention, and then use epichlorohydrin or the like Glycidization is performed to obtain an epoxy compound represented by the following formula (a-2c). Then, the diol compound represented by the formula (a-2a) is obtained by reacting the epoxy compound represented by the formula (a-2c) with acrylic acid or methacrylic acid. In formula (a-2b) and formula (a-2c), R a1 , R a3 , and m2 are as described for formula (a-2). Regarding the ring A in the formula (a-2b) and the formula (a-2c), as described for the formula (a-3). In addition, the manufacturing method of the diol compound represented by Formula (a-2a) is not limited to the said method. [化9]
Figure 02_image017

作為式(a-2b)所表示之二醇化合物之較佳之例,可列舉以下二醇化合物。 [化10]

Figure 02_image019
As a preferable example of the diol compound represented by formula (a-2b), the following diol compounds can be mentioned. [化10]
Figure 02_image019

上述式(a-1)中,Ra0 係氫原子或由-CO-Ya -COOH所表示之基。此處,Ya 表示自二羧酸酐將酸酐基(-CO-O-CO-)去除後之殘基。作為二羧酸酐之例,可列舉:順丁烯二酸酐、琥珀酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、甲基內亞甲基四氫鄰苯二甲酸酐、氯橋酸酐、甲基四氫鄰苯二甲酸酐、戊二酸酐等。In the above formula (a-1), R a0 is a hydrogen atom or a group represented by -CO-Y a -COOH. Here, Y a represents the residue after the acid anhydride group (-CO-O-CO-) is removed from the dicarboxylic anhydride. Examples of dicarboxylic acid anhydrides include: maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyl endomethine Tetrahydrophthalic anhydride, chloro-bridged anhydride, methyltetrahydrophthalic anhydride, glutaric anhydride, etc.

又,上述式(a-1)中,Za 表示自四羧酸二酐將2個酸酐基去除後之殘基。作為四羧酸二酐之例,可列舉:下述式(a-4)所表示之四羧酸二酐、均苯四甲酸二酐、二苯甲酮四羧酸二酐、聯苯四羧酸二酐、聯苯醚四羧酸二酐等。 又,上述式(a-1)中,m表示0以上20以下之整數。In addition, in the above formula (a-1), Za represents a residue obtained by removing two acid anhydride groups from tetracarboxylic dianhydride. Examples of tetracarboxylic dianhydrides include: tetracarboxylic dianhydride, pyromellitic dianhydride, benzophenone tetracarboxylic dianhydride, and biphenyl tetracarboxylic acid represented by the following formula (a-4) Acid dianhydride, diphenyl ether tetracarboxylic dianhydride, etc. In addition, in the above formula (a-1), m represents an integer of 0 or more and 20 or less.

[化11]

Figure 02_image021
(式(a-4)中,Ra4 、Ra5 、及Ra6 分別獨立表示選自由氫原子、碳原子數1以上10以下之烷基及氟原子所組成之群中之1種,m3表示0以上12以下之整數)[化11]
Figure 02_image021
(In formula (a-4), R a4 , R a5 , and R a6 each independently represent one selected from the group consisting of a hydrogen atom, an alkyl group having 1 to 10 carbon atoms and a fluorine atom, and m3 represents Integer from 0 to 12)

可選作式(a-4)中之Ra4 之烷基係碳原子數為1以上10以下之烷基。藉由將烷基所具備之碳原子數設定於該範圍,能夠進一步提高所獲得之羧酸酯之耐熱性。於Ra4 為烷基之情形時,就容易獲得耐熱性優異之Cardo樹脂之方面而言,其碳原子數較佳為1以上6以下,更佳為1以上5以下,進而較佳為1以上4以下,尤佳為1以上3以下。 於Ra4 為烷基之情形時,該烷基可為直鏈狀,亦可為支鏈狀。The alkyl group of Ra4 in formula (a-4) may be an alkyl group having 1 to 10 carbon atoms. By setting the number of carbon atoms of the alkyl group to this range, the heat resistance of the obtained carboxylic acid ester can be further improved. When Ra4 is an alkyl group, the number of carbon atoms is preferably 1 or more and 6 or less, more preferably 1 or more and 5 or less, and more preferably 1 or more in terms of easily obtaining a Cardo resin with excellent heat resistance 4 or less, more preferably 1 or more and 3 or less. When Ra4 is an alkyl group, the alkyl group may be linear or branched.

作為式(a-4)中之Ra4 ,就容易獲得耐熱性優異之Cardo樹脂之方面而言,更佳為分別獨立為氫原子或碳原子數1以上10以下之烷基。式(a-4)中之Ra4 更佳為氫原子、甲基、乙基、正丙基或異丙基,尤佳為氫原子或甲基。 就容易製備高純度之四羧酸二酐之方面而言,式(a-4)中之複數個Ra4 較佳為同一基。Formula R a4 (a4) in the, it is easy to obtain in terms of excellent heat resistance Cardo resin, more preferably each independently a hydrogen atom or an alkyl group of 10 or less carbon atoms or more. R a4 in the formula (a-4) is more preferably a hydrogen atom, methyl, ethyl, n-propyl or isopropyl group, and particularly preferably a hydrogen atom or a methyl group. In terms of easy preparation of high-purity tetracarboxylic dianhydride, the plural Ra4 in formula (a-4) are preferably the same group.

式(a-4)中之m3表示0以上12以下之整數。藉由m3之值為12以下,而容易進行四羧酸二酐之純化。 就容易進行四羧酸二酐之純化之方面而言,m3之上限較佳為5,更佳為3。 就四羧酸二酐之化學穩定性之方面而言,m3之下限較佳為1,更佳為2。 式(a-4)中之m3尤佳為2或3。M3 in the formula (a-4) represents an integer of 0 to 12. Since the value of m3 is 12 or less, purification of tetracarboxylic dianhydride is easy. In terms of easy purification of tetracarboxylic dianhydride, the upper limit of m3 is preferably 5, more preferably 3. In terms of the chemical stability of tetracarboxylic dianhydride, the lower limit of m3 is preferably 1, and more preferably 2. In formula (a-4), m3 is particularly preferably 2 or 3.

可選作式(a-4)中之Ra5 、及Ra6 之碳原子數1以上10以下之烷基與可選作Ra4 之碳原子數1以上10以下的烷基相同。 就容易進行四羧酸二酐之純化之方面而言,Ra5 、及Ra6 較佳為氫原子或碳原子數1以上10以下之烷基,尤佳為氫原子或甲基。作為Ra5 、及Ra6 之烷基之碳原子數更佳為1以上6以下,進而較佳為1以上5以下,進而更佳為1以上4以下,尤佳為1以上3以下。The alkyl group with 1 to 10 carbon atoms that can be selected as Ra5 and Ra6 in formula (a-4) is the same as the alkyl group with 1 to 10 carbon atoms that can be selected as Ra4 . In terms of easy purification of the tetracarboxylic dianhydride, R a5 and R a6 are preferably a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and particularly preferably a hydrogen atom or a methyl group. The number of carbon atoms of the alkyl group as Ra5 and Ra6 is more preferably 1 or more and 6 or less, still more preferably 1 or more and 5 or less, still more preferably 1 or more and 4 or less, and particularly preferably 1 or more and 3 or less.

作為式(a-4)所表示之四羧酸二酐,例如可列舉:降𦯉烷-2-螺-α-環戊酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐(別名「降𦯉烷-2-螺-2'-環戊酮-5'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐」)、甲基降𦯉烷-2-螺-α-環戊酮-α'-螺-2"-(甲基降𦯉烷)-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環己酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐(別名「降𦯉烷-2-螺-2'-環己酮-6'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐」)、甲基降𦯉烷-2-螺-α-環己酮-α'-螺-2"-(甲基降𦯉烷)-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環丙酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環丁酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環庚酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環辛酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環壬酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環癸酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環十一酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環十二酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環十三酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環十四酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-環十五酮-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-(甲基環戊酮)-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐、降𦯉烷-2-螺-α-(甲基環己酮)-α'-螺-2"-降𦯉烷-5,5",6,6"-四羧酸二酐等。As the tetracarboxylic dianhydride represented by the formula (a-4), for example, norran-2-spiro-α-cyclopentanone-α'-spiro-2"-norranan-5,5" ,6,6"-Tetracarboxylic dianhydride (alias "norman-2-spiro-2'-cyclopentanone-5'-spiro-2"-normanthane-5,5",6,6" -Tetracarboxylic dianhydride”), methylnorman-2-spiro-α-cyclopentanone-α'-spiro-2"-(methylnormangan)-5,5",6,6" -Tetracarboxylic dianhydride, norrsine-2-spiro-α-cyclohexanone-α'-spiro-2"-normanthane-5,5",6,6"-tetracarboxylic dianhydride (alias "Norphalan-2-spiro-2'-cyclohexanone-6'-spiro-2"-normantane-5,5",6,6"-tetracarboxylic dianhydride"), methylnormethane Alkyl-2-spiro-α-cyclohexanone-α'-spiro-2"-(methylnormanthane)-5,5",6,6"-tetracarboxylic dianhydride, normanthane-2- Spiro-α-cycloacetone-α'-spiro-2"-norman-5,5",6,6"-tetracarboxylic dianhydride, norman-2-spiro-α-cyclobutanone-α '-Spiro-2"-Norphine-5,5",6,6"-tetracarboxylic dianhydride, norerane-2-spiro-α-cycloheptanone-α'-spiro-2"-Nor 𦯉alkane-5,5",6,6"-tetracarboxylic dianhydride, norrsan-2-spiro-α-cyclooctanone-α'-spiro-2"-normanthane-5,5", 6,6"-Tetracarboxylic dianhydride, norrsine-2-spiro-α-cyclononanone-α'-spiro-2"-normanthane-5,5",6,6"-tetracarboxylic acid Dianhydride, nordoxane-2-spiro-α-cyclodecanone-α'-spiro-2"-nordane-5,5",6,6"-tetracarboxylic dianhydride, nordoxane-2 -Spiro-α-Cycloundecanone-α'-Spiro-2"-Norkane-5,5",6,6"-tetracarboxylic dianhydride, Normane-2-Spiro-α-Cycloten Diketone-α'-spiro-2"-norphine-5,5",6,6"-tetracarboxylic dianhydride, noranthane-2-spiro-α-cyclotridecone-α'-spiro -2"-Norkane-5,5",6,6"-tetracarboxylic dianhydride, noreran-2-spiro-α-cyclotetradecone-α'-spiro-2"-normanthane -5,5",6,6"-Tetracarboxylic dianhydride, norrsan-2-spiro-α-cyclopentadecone-α'-spiro-2"-norrsan-5,5",6 ,6"-Tetracarboxylic dianhydride, norrsine-2-spiro-α-(methylcyclopentanone)-α'-spiro-2"-norrsine-5,5",6,6"- Tetracarboxylic dianhydride, norrsine-2-spiro-α-(methylcyclohexanone)-α'-spiro-2"-normanthane-5,5",6,6"-tetracarboxylic acid two Anhydride etc.

Cardo樹脂(a-1)之重量平均分子量較佳為1000以上40000以下,更佳為1500以上30000以下,進而較佳為2000以上10000以下。藉由設為上述範圍,能夠獲得良好之顯影性,並且對於使用感光性樹脂組合物形成之硬化膜獲得充分之耐熱性、及機械強度。The weight average molecular weight of the Cardo resin (a-1) is preferably 1,000 or more and 40,000 or less, more preferably 1,500 or more and 30,000 or less, and still more preferably 2,000 or more and 10,000 or less. By setting it as the said range, good developability can be obtained, and sufficient heat resistance and mechanical strength can be obtained for the cured film formed using the photosensitive resin composition.

〔酚醛清漆樹脂(a-2)〕 就容易形成不易因加熱而過度流動之硬化膜之方面而言,較佳亦為鹼可溶性樹脂(A)包含酚醛清漆樹脂(a-2)。 作為酚醛清漆樹脂(a-2),可使用以往感光性樹脂組合物中所調配之各種酚醛清漆樹脂。作為酚醛清漆樹脂(a-2),較佳為使具有酚性羥基之芳香族化合物(以下,簡稱為「酚類」)與醛類於酸觸媒下加成縮合而獲得者。〔Novolac resin (a-2)〕 It is also preferable that the alkali-soluble resin (A) also contains the novolak resin (a-2) in terms of easy formation of a cured film that does not flow excessively due to heating. As the novolak resin (a-2), various novolak resins prepared in conventional photosensitive resin compositions can be used. The novolak resin (a-2) is preferably one obtained by addition condensation of an aromatic compound having a phenolic hydroxyl group (hereinafter referred to as "phenols") and aldehydes under an acid catalyst.

(酚類) 作為製作酚醛清漆樹脂(a-2)時所使用之酚類,例如可列舉:酚;鄰甲酚、間甲酚、對甲酚等甲酚類;2,3-二甲苯酚、2,4-二甲苯酚、2,5-二甲苯酚、2,6-二甲苯酚、3,4-二甲苯酚、3,5-二甲苯酚等二甲苯酚類;鄰乙基苯酚、間乙基苯酚、對乙基苯酚等乙基酚類;2-異丙基苯酚、3-異丙基苯酚、4-異丙基苯酚、鄰丁基苯酚、間丁基苯酚、對丁基苯酚、及對第三丁基苯酚等烷基酚類;2,3,5-三甲基苯酚、及3,4,5-三甲基苯酚等三烷基酚類;間苯二酚、兒茶酚、對苯二酚、對苯二酚單甲醚、鄰苯三酚、及間苯三酚等多元酚類;烷基間苯二酚、烷基兒茶酚、及烷基對苯二酚等烷基多元酚類(任一烷基均為碳原子數1以上4以下);α-萘酚;β-萘酚;羥聯苯;以及雙酚A等。該等酚類可單獨使用,亦可將2種以上組合使用。(Phenols) Examples of phenols used when preparing the novolak resin (a-2) include: phenol; cresols such as o-cresol, m-cresol, and p-cresol; 2,3-xylenol, 2,4 -Xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, 3,5-xylenol and other xylenols; o-ethylphenol, m-ethyl Ethyl phenols such as phenol and p-ethylphenol; 2-isopropylphenol, 3-isopropylphenol, 4-isopropylphenol, o-butylphenol, m-butylphenol, p-butylphenol, and p-butylphenol Alkylphenols such as tertiary butylphenol; trialkylphenols such as 2,3,5-trimethylphenol and 3,4,5-trimethylphenol; resorcinol, catechol, p- Polyphenols such as hydroquinone, hydroquinone monomethyl ether, pyrogallol, and phloroglucinol; alkyl resorcinol, alkyl catechol, and alkyl hydroquinone Polyphenols (any alkyl group has 1 to 4 carbon atoms); α-naphthol; β-naphthol; hydroxybiphenyl; and bisphenol A, etc. These phenols may be used alone or in combination of two or more kinds.

該等酚類中,較佳為間甲酚及對甲酚,更佳為併用間甲酚與對甲酚。於該情形時,藉由調整兩者之調配比率,能夠調節使用感光性樹脂組合物形成之硬化膜之耐熱性等各特性。 間甲酚與對甲酚之調配比率並無特別限定,但以間甲酚/對甲酚之莫耳比計,較佳為3/7以上8/2以下。藉由按該範圍之比率使用間甲酚及對甲酚,而容易獲得能夠形成耐熱性優異之硬化膜之感光性樹脂組合物。Among these phenols, m-cresol and p-cresol are preferred, and the combined use of m-cresol and p-cresol is more preferred. In this case, by adjusting the blending ratio of the two, it is possible to adjust various characteristics such as heat resistance of the cured film formed using the photosensitive resin composition. The blending ratio of m-cresol and p-cresol is not particularly limited, but it is preferably 3/7 or more and 8/2 or less in terms of the molar ratio of m-cresol/p-cresol. By using m-cresol and p-cresol in a ratio in this range, it is easy to obtain a photosensitive resin composition capable of forming a cured film having excellent heat resistance.

又,較佳亦為併用間甲酚與2,3,5-三甲基苯酚而製造之酚醛清漆樹脂。於使用該酚醛清漆樹脂之情形時,特別容易獲得能夠形成耐熱性優異之硬化膜之感光性樹脂組合物。 間甲酚與2,3,5-三甲基苯酚之調配比率並無特別限定,但以間甲酚/2,3,5-三甲基苯酚之莫耳比計,較佳為70/30以上95/5以下。Moreover, it is also preferable that it is a novolak resin manufactured by using m-cresol and 2,3,5-trimethylphenol in combination. When this novolak resin is used, it is particularly easy to obtain a photosensitive resin composition capable of forming a cured film having excellent heat resistance. The mixing ratio of m-cresol and 2,3,5-trimethylphenol is not particularly limited, but in terms of the molar ratio of m-cresol/2,3,5-trimethylphenol, it is preferably 70/30 Above 95/5.

(醛類) 製作酚醛清漆樹脂(a-2)時所使用之醛類,例如可列舉:甲醛、多聚甲醛、糠醛、苯甲醛、硝基苯甲醛、及乙醛等。該等醛類可單獨使用,亦可將2種以上組合使用。(Aldehydes) Examples of aldehydes used when producing the novolak resin (a-2) include formaldehyde, paraformaldehyde, furfural, benzaldehyde, nitrobenzaldehyde, and acetaldehyde. These aldehydes can be used alone or in combination of two or more kinds.

(酸觸媒) 製作酚醛清漆樹脂(a-2)時所使用之酸觸媒,例如可列舉:鹽酸、硫酸、硝酸、磷酸、及亞磷酸等無機酸類;甲酸、草酸、乙酸、二乙基硫酸、及對甲苯磺酸等有機酸類;以及乙酸鋅等金屬鹽類等。該等酸觸媒可單獨使用,亦可將2種以上組合使用。(Acid catalyst) The acid catalyst used in the production of novolac resin (a-2) includes, for example, inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid, and phosphorous acid; formic acid, oxalic acid, acetic acid, diethyl sulfuric acid, and p-toluene Organic acids such as sulfonic acid; and metal salts such as zinc acetate. These acid catalysts can be used alone or in combination of two or more kinds.

(分子量) 關於酚醛清漆樹脂(a-2)之聚苯乙烯換算之重量平均分子量(Mw;以下,亦簡稱為「重量平均分子量」),就使用感光性樹脂組合物形成之硬化膜之耐熱性之觀點而言,作為下限值,較佳為2000,更佳為5000,尤佳為10000,進而較佳為15000,最佳為20000,作為上限值,較佳為50000,更佳為45000,進而較佳為40000,最佳為35000。(Molecular weight) Regarding the weight average molecular weight (Mw; hereafter, also referred to as "weight average molecular weight") in terms of polystyrene of the novolak resin (a-2), from the viewpoint of the heat resistance of the cured film formed using the photosensitive resin composition In other words, as the lower limit value, it is preferably 2000, more preferably 5000, particularly preferably 10000, further preferably 15000, most preferably 20000, and as the upper limit value, it is preferably 50000, more preferably 45000, and more The best is 40,000, and the best is 35,000.

作為酚醛清漆樹脂(a-2),可將至少2種聚苯乙烯換算之重量平均分子量不同者組合使用。藉由將重量平均分子量不同者大小組合使用,能夠取得感光性樹脂組合物之顯影性與使用感光性樹脂組合物形成之硬化膜之耐熱性的平衡。As the novolak resin (a-2), at least two types of polystyrene-converted weight average molecular weights can be used in combination. By combining sizes with different weight average molecular weights, the developability of the photosensitive resin composition and the heat resistance of the cured film formed using the photosensitive resin composition can be balanced.

〔改性環氧樹脂(a-3)〕 鹼可溶性樹脂(A)亦可包含環氧化合物(a-3a)與含有不飽和基之羧酸(a-3b)之反應物的多元酸酐(a-3c)加成物(a-3)。對該加成物亦記為「改性環氧樹脂(a-3)」。 再者,於本申請案之說明書及申請專利範圍中,將屬於上述定義之化合物,且不屬於上述具有Cardo結構之樹脂(a-1)之化合物設為改性環氧樹脂(a-3)。〔Modified epoxy resin (a-3)〕 The alkali-soluble resin (A) may also include the polybasic acid anhydride (a-3c) adduct (a-3) of the reaction product of the epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b). This adduct is also referred to as "modified epoxy resin (a-3)". Furthermore, in the specification and the scope of the patent application of this application, the compound that belongs to the above definition and does not belong to the above resin (a-1) with the Cardo structure is referred to as modified epoxy resin (a-3) .

以下,對環氧化合物(a-3a)、含有不飽和基之羧酸(a-3b)、及多元酸酐(a-3c)進行說明。Hereinafter, the epoxy compound (a-3a), the unsaturated group-containing carboxylic acid (a-3b), and the polybasic acid anhydride (a-3c) will be described.

<環氧化合物(a-3a)> 環氧化合物(a-3a)只要為具有環氧基之化合物,則並無特別限定,可為具有芳香族基之芳香族環氧化合物,亦可為不包含芳香族基之脂肪族環氧化合物,較佳為具有芳香族基之芳香族環氧化合物。 環氧化合物(a-3a)可為單官能環氧化合物,亦可為2官能以上之多官能環氧化合物,較佳為多官能環氧化合物。<Epoxy compound (a-3a)> The epoxy compound (a-3a) is not particularly limited as long as it is a compound having an epoxy group, and it may be an aromatic epoxy compound having an aromatic group or an aliphatic epoxy compound that does not contain an aromatic group. , Preferably an aromatic epoxy compound having an aromatic group. The epoxy compound (a-3a) may be a monofunctional epoxy compound or a multifunctional epoxy compound having two or more functions, and a multifunctional epoxy compound is preferred.

作為環氧化合物(a-3a)之具體例,可列舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AD型環氧樹脂、萘型環氧樹脂、及聯苯型環氧樹脂等2官能環氧樹脂;二聚酸縮水甘油酯、及三縮水甘油酯等縮水甘油酯型環氧樹脂;四縮水甘油基胺基二苯甲烷、三縮水甘油基-對胺基苯酚、四縮水甘油基間苯二甲胺、及四縮水甘油基雙胺基甲基環己烷等縮水甘油胺型環氧樹脂;三縮水甘油基異氰尿酸酯等雜環式環氧樹脂;間苯三酚三縮水甘油醚、三羥基聯苯三縮水甘油醚、三羥基苯基甲烷三縮水甘油醚、甘油三縮水甘油醚、2-[4-(2,3-環氧丙氧基)苯基]-2-[4-[1,1-雙[4-(2,3-環氧丙氧基)苯基]乙基]苯基]丙烷、及1,3-雙[4-[1-[4-(2,3-環氧丙氧基)苯基]-1-[4-[1-[4-(2,3-環氧丙氧基)苯基]-1-甲基乙基]苯基]乙基]苯氧基]-2-丙醇等3官能型環氧樹脂;四羥基苯基乙烷四縮水甘油醚、四縮水甘油基二苯甲酮、雙間苯二酚四縮水甘油醚、及四縮水甘油氧基聯苯等4官能型環氧樹脂。Specific examples of the epoxy compound (a-3a) include: bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin, naphthalene type Epoxy resins and biphenyl type epoxy resins and other bifunctional epoxy resins; dimer acid glycidyl esters and triglycidyl esters and other glycidyl ester type epoxy resins; tetraglycidylamino diphenylmethane, triglycidyl Glycidyl-p-aminophenol, tetraglycidyl metaxylylenediamine, and tetraglycidyl diaminomethyl cyclohexane and other glycidylamine epoxy resins; triglycidyl isocyanurate Heterocyclic epoxy resins; phloroglucinol triglycidyl ether, trihydroxybiphenyl triglycidyl ether, trihydroxyphenylmethane triglycidyl ether, glycerol triglycidyl ether, 2-[4-(2, 3-glycidoxy)phenyl]-2-[4-[1,1-bis[4-(2,3-glycidoxy)phenyl]ethyl]phenyl]propane, and 1 ,3-Bis[4-[1-[4-(2,3-epoxypropoxy)phenyl]-1-[4-[1-[4-(2,3-epoxypropoxy) Phenyl]-1-methylethyl]phenyl]ethyl]phenoxy]-2-propanol and other trifunctional epoxy resins; tetrahydroxyphenylethane tetraglycidyl ether, tetraglycidyl two Four functional epoxy resins such as benzophenone, bisresorcinol tetraglycidyl ether, and tetraglycidoxybiphenyl.

又,作為環氧化合物(a-3a),較佳為具有聯苯骨架之環氧化合物。 具有聯苯骨架之環氧化合物較佳為於主鏈至少具有1個以上之下述式(a-3a-1)所表示之聯苯骨架。 具有聯苯骨架之環氧化合物較佳為具有2個以上之環氧基之多官能環氧化合物。 藉由使用具有聯苯骨架之環氧化合物,而容易獲得能夠形成感度與顯影性之平衡優異且對基板之密接性優異之硬化膜的感光性樹脂組合物。Moreover, as an epoxy compound (a-3a), the epoxy compound which has a biphenyl skeleton is preferable. The epoxy compound having a biphenyl skeleton preferably has at least one biphenyl skeleton represented by the following formula (a-3a-1) in the main chain. The epoxy compound having a biphenyl skeleton is preferably a polyfunctional epoxy compound having two or more epoxy groups. By using an epoxy compound having a biphenyl skeleton, it is easy to obtain a photosensitive resin composition capable of forming a cured film having an excellent balance between sensitivity and developability and excellent adhesion to a substrate.

[化12]

Figure 02_image023
(式(a-3a-1)中,Ra7 分別獨立為氫原子、碳原子數1以上12以下之烷基、鹵素原子或可具有取代基之苯基。j為1以上4以下之整數)[化12]
Figure 02_image023
(In formula (a-3a-1), Ra7 is each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, a halogen atom, or a phenyl group which may have a substituent. j is an integer of 1 to 4)

於Ra7 為碳原子數1以上12以下之烷基之情形時,作為烷基之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基、異癸基、正十一烷基、及正十二烷基。When Ra7 is an alkyl group having 1 to 12 carbon atoms, specific examples of the alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, Second butyl, third butyl, n-pentyl, isopentyl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third Octyl, n-nonyl, isononyl, n-decyl, isodecyl, n-undecyl, and n-dodecyl.

於Ra7 為鹵素原子之情形時,作為鹵素原子之具體例,可列舉:氟原子、氯原子、溴原子、及碘原子。When Ra7 is a halogen atom, specific examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

於Ra7 為可具有取代基之苯基之情形時,苯基上之取代基之數量並無特別限定。苯基上之取代基之數量為0以上5以下,較佳為0或1。 作為取代基之例,可列舉:碳原子數1以上4以下之烷基、碳原子數1以上4以下之烷氧基、碳原子數2以上4以下之脂肪族醯基、鹵素原子、氰基、及硝基。When Ra7 is a phenyl group which may have a substituent, the number of substituents on the phenyl group is not particularly limited. The number of substituents on the phenyl group is 0 or more and 5 or less, preferably 0 or 1. Examples of substituents include: alkyl groups having 1 to 4 carbon atoms, alkoxy groups having 1 to 4 carbon atoms, aliphatic acyl groups having 2 to 4 carbon atoms, halogen atoms, and cyano groups , And nitro.

作為具有上述式(a-3a-1)所表示之聯苯骨架之環氧化合物(a-3a),並無特別限定,例如可列舉下述式(a-3a-2)所表示之環氧化合物。 [化13]

Figure 02_image025
(式(a-3a-2)中,Ra7 及j與式(a-3a-1)相同。k為括弧內之結構單元之平均重複數,為0以上10以下)The epoxy compound (a-3a) having a biphenyl skeleton represented by the above formula (a-3a-1) is not particularly limited, and for example, the epoxy compound represented by the following formula (a-3a-2) Compound. [化13]
Figure 02_image025
(In formula (a-3a-2), Ra7 and j are the same as formula (a-3a-1). k is the average repeating number of structural units in parentheses, and is 0 or more and 10 or less)

式(a-3a-2)所表示之環氧化合物中,就特別容易獲得感度與顯影性之平衡優異之感光性樹脂組合物之方面而言,較佳為下述式(a-3a-3)所表示之化合物。 [化14]

Figure 02_image027
(式(a-3a-3)中,k與式(a-3a-2)相同)Among the epoxy compounds represented by the formula (a-3a-2), the following formula (a-3a-3) is particularly preferred in terms of easily obtaining a photosensitive resin composition having an excellent balance of sensitivity and developability ) Represented by the compound. [化14]
Figure 02_image027
(In formula (a-3a-3), k is the same as formula (a-3a-2))

(含有不飽和基之羧酸(a-3b)) 與改性環氧化合物(a-3)進行製備時,使環氧化合物(a-3a)與含有不飽和基之羧酸(a-3b)反應。 作為含有不飽和基之羧酸(a-3b),較佳為於分子中含有丙烯醯基或甲基丙烯醯基等之反應性不飽和雙鍵之單羧酸。作為此種含有不飽和基之羧酸,例如可列舉:丙烯酸、甲基丙烯酸、β-苯乙烯基丙烯酸、β-糠基丙烯酸、α-氰基桂皮酸、桂皮酸等。又,含有不飽和基之羧酸(a-3b)可單獨使用,或將2種以上組合使用。(Carboxylic acid containing unsaturated group (a-3b)) When preparing the modified epoxy compound (a-3), the epoxy compound (a-3a) is reacted with the unsaturated group-containing carboxylic acid (a-3b). The unsaturated group-containing carboxylic acid (a-3b) is preferably a monocarboxylic acid containing a reactive unsaturated double bond such as an acrylic group or a methacrylic group in the molecule. Examples of such unsaturated group-containing carboxylic acids include acrylic acid, methacrylic acid, β-styryl acrylic acid, β-furfuryl acrylic acid, α-cyanocinnamic acid, and cinnamic acid. In addition, the unsaturated group-containing carboxylic acid (a-3b) can be used alone or in combination of two or more kinds.

環氧化合物(a-3a)與含有不飽和基之羧酸(a-3b)可藉由公知之方法進行反應。作為較佳之反應方法,例如可列舉如下方法,即,將三乙基胺、及苄基乙基胺等三級胺、十二烷基三甲基氯化銨、四甲基氯化銨、四乙基氯化銨、及苄基三乙基氯化銨等四級銨鹽、吡啶或三苯基膦等作為觸媒,使環氧化合物(a-3a)與含有不飽和基之羧酸(a-3b)於有機溶劑中以反應溫度50℃以上150℃以上反應數小時以上且數十小時以下之時間。The epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b) can be reacted by a known method. As a preferable reaction method, for example, the following method can be cited, that is, triethylamine and tertiary amines such as benzylethylamine, dodecyltrimethylammonium chloride, tetramethylammonium chloride, tetramethylammonium chloride Ethyl ammonium chloride, quaternary ammonium salts such as benzyl triethyl ammonium chloride, pyridine or triphenyl phosphine, etc. are used as catalysts to make epoxy compound (a-3a) and unsaturated group-containing carboxylic acid ( a-3b) React in an organic solvent at a reaction temperature of 50°C or higher and 150°C or higher for several hours or longer and several tens of hours or shorter.

關於環氧化合物(a-3a)與含有不飽和基之羧酸(a-3b)之反應中之兩者之使用量的比率,以環氧化合物(a-3a)之環氧當量與含有不飽和基之羧酸(a-3b)之羧酸當量之比計,通常較佳為1:0.5~1:2,更佳為1:0.8~1:1.25,尤佳為1:0.9~1:1.1。 若環氧化合物(a-3a)之使用量與含有不飽和基之羧酸(a-3b)之使用量的比率以上述當量比計為1:0.5~1:2,則有交聯效率提高之傾向,故較佳。Regarding the ratio of the two amounts used in the reaction of the epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b), the epoxy equivalent of the epoxy compound (a-3a) and the The ratio of the carboxylic acid equivalent of the saturated carboxylic acid (a-3b) is usually 1:0.5-1:2, more preferably 1:0.8-1:1.25, and particularly preferably 1:0.9-1: 1.1. If the ratio of the use amount of epoxy compound (a-3a) to the use amount of unsaturated group-containing carboxylic acid (a-3b) is 1:0.5 to 1:2 based on the above equivalent ratio, the crosslinking efficiency will be improved The tendency is better.

(多元酸酐(a-3c)) 多元酸酐(a-3c)係具有2個以上羧基之羧酸之酸酐。 作為多元酸酐(a-3c),並無特別限定,例如可列舉:順丁烯二酸酐、琥珀酸酐、伊康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、偏苯三甲酸酐、均苯四甲酸二酐、二苯甲酮四羧酸二酐、3-甲基六氫鄰苯二甲酸酐、4-甲基六氫鄰苯二甲酸酐、3-乙基六氫鄰苯二甲酸酐、4-乙基六氫鄰苯二甲酸酐、四氫鄰苯二甲酸酐、3-甲基四氫鄰苯二甲酸酐、4-甲基四氫鄰苯二甲酸酐、3-乙基四氫鄰苯二甲酸酐、4-乙基四氫鄰苯二甲酸酐、下述式(a-3c-1)所表示之化合物、及下述式(a-3c-2)所表示之化合物。又,多元酸酐(a-3c)可單獨使用,或將2種以上組合使用。(Polyacid anhydride (a-3c)) The polybasic acid anhydride (a-3c) is an anhydride of a carboxylic acid having two or more carboxyl groups. The polybasic acid anhydride (a-3c) is not particularly limited, and examples include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, and hexahydrophthalic anhydride. Formic anhydride, methylhexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic dianhydride, benzophenonetetracarboxylic dianhydride, 3-methylhexa Hydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, 3-ethylhexahydrophthalic anhydride, 4-ethylhexahydrophthalic anhydride, tetrahydrophthalic anhydride , 3-methyltetrahydrophthalic anhydride, 4-methyltetrahydrophthalic anhydride, 3-ethyltetrahydrophthalic anhydride, 4-ethyltetrahydrophthalic anhydride, The compound represented by the formula (a-3c-1) and the compound represented by the following formula (a-3c-2) are described. Moreover, polybasic acid anhydride (a-3c) can be used individually or in combination of 2 or more types.

[化15]

Figure 02_image029
(式(a-3c-2)中,Ra8 表示碳原子數1以上10以下之可具有取代基之伸烷基)[化15]
Figure 02_image029
(In the formula (a-3c-2), R a8 represents an alkylene group having 1 to 10 carbon atoms that may have a substituent)

作為多元酸酐(a-3c),就容易獲得感度與顯影性之平衡優異之感光性樹脂組合物之方面而言,較佳為具有2個以上之苯環之化合物。又,多元酸酐(a-3c)更佳為包含上述式(a-3c-1)所表示之化合物、及上述式(a-3c-2)所表示之化合物之至少一種。The polybasic acid anhydride (a-3c) is preferably a compound having two or more benzene rings in terms of easily obtaining a photosensitive resin composition having an excellent balance between sensitivity and developability. Moreover, the polybasic acid anhydride (a-3c) more preferably contains at least one of the compound represented by the above formula (a-3c-1) and the compound represented by the above formula (a-3c-2).

使環氧化合物(a-3a)與含有不飽和基之羧酸(a-3b)發生反應之後使多元酸酐(a-3c)發生反應之方法可自公知的方法中適當進行選擇。 又,使用量比以環氧化合物(a-3a)和含有不飽和基之羧酸(a-3b)反應後之成分中之OH基之莫耳數與多元酸酐(a-3c)的酸酐基之當量比計,通常為1:1~1:0.1,較佳為1:0.8~1:0.2。藉由設為上述範圍,容易獲得顯影性良好之感光性樹脂組合物。The method of reacting the epoxy compound (a-3a) with the unsaturated group-containing carboxylic acid (a-3b) and then reacting the polybasic acid anhydride (a-3c) can be appropriately selected from known methods. In addition, the usage ratio is based on the molar number of the OH group in the component after the reaction between the epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b) and the acid anhydride group of the polybasic acid anhydride (a-3c) The equivalent ratio is usually 1:1 to 1:0.1, preferably 1:0.8 to 1:0.2. By setting it as the said range, it becomes easy to obtain the photosensitive resin composition with good developability.

又,改性環氧樹脂(a-3)之酸值以樹脂固形物成分計,較佳為10 mgKOH/g以上150 mgKOH/g以下,更佳為70 mgKOH/g以上110 mgKOH/g以下。藉由使樹脂之酸值為10 mgKOH/g以上,而獲得對顯影液之充分之溶解性,又,藉由使酸值為150 mgKOH/g以下,能夠獲得充分之硬化性,且能夠使表面性良好。In addition, the acid value of the modified epoxy resin (a-3) is preferably 10 mgKOH/g or more and 150 mgKOH/g or less, and more preferably 70 mgKOH/g or more and 110 mgKOH/g or less in terms of resin solid content. By setting the acid value of the resin to 10 mgKOH/g or more, sufficient solubility to the developer can be obtained. Moreover, by setting the acid value of 150 mgKOH/g or less, sufficient curability can be obtained and the surface can be improved. Good sex.

又,改性環氧樹脂(a-3)之重量平均分子量較佳為1000以上40000以下,更佳為2000以上30000以下。藉由重量平均分子量為1000以上,而容易形成耐熱性及強度優異之硬化膜。又,藉由為40000以下,而容易獲得展現對顯影液之充分之溶解性之感光性樹脂組合物。In addition, the weight average molecular weight of the modified epoxy resin (a-3) is preferably 1,000 or more and 40,000 or less, more preferably 2,000 or more and 30,000 or less. With a weight average molecular weight of 1000 or more, it is easy to form a cured film with excellent heat resistance and strength. In addition, by being 40,000 or less, it is easy to obtain a photosensitive resin composition exhibiting sufficient solubility in the developer.

〔丙烯酸系樹脂(a-4)〕 又,丙烯酸系樹脂(a-4)亦較佳地作為構成鹼可溶性樹脂(A)之成分。 作為丙烯酸系樹脂(a-4),可使用包含源自(甲基)丙烯酸之結構單元、及/或源自(甲基)丙烯酸酯等其他單體之結構單元者。(甲基)丙烯酸為丙烯酸或甲基丙烯酸。(甲基)丙烯酸酯係下述式(a-4-1)所表示之者,只要不妨礙本發明之目的,則並無特別限定。〔Acrylic resin (a-4)〕 Moreover, acrylic resin (a-4) is also preferable as a component which comprises alkali-soluble resin (A). As the acrylic resin (a-4), a structural unit derived from (meth)acrylic acid and/or a structural unit derived from other monomers such as (meth)acrylate can be used. (Meth)acrylic acid is acrylic acid or methacrylic acid. The (meth)acrylate is represented by the following formula (a-4-1) and is not particularly limited as long as it does not interfere with the purpose of the present invention.

[化16]

Figure 02_image031
[化16]
Figure 02_image031

上述式(a-4-1)中,Ra9 為氫原子或甲基,Ra10 為一價有機基。該有機基亦可於該有機基中包含雜原子等烴基以外之鍵或取代基。又,該有機基亦可為直鏈狀、支鏈狀、環狀之任一種。In the above formula (a-4-1), R a9 is a hydrogen atom or a methyl group, and R a10 is a monovalent organic group. The organic group may include a bond or substituent other than a hydrocarbon group such as a hetero atom in the organic group. In addition, the organic group may be any of linear, branched, and cyclic.

作為Ra10 之有機基中之烴基以外之取代基,只要不損害本發明之效果,則並無特別限定,可列舉:鹵素原子、羥基、巰基、硫基、氰基、異氰基、氰酸基、異氰酸基、硫氰酸基、異硫氰酸基、矽烷基、矽烷醇基、烷氧基、烷氧基羰基、胺甲醯基、胺硫甲醯基、硝基、亞硝基、羧基、羧酸酯基、醯基、醯氧基、亞磺酸基、磺基、磺酸酯基、膦基、氧膦基、膦酸基、膦醯基、羥基亞胺基、烷基醚基、烷基硫醚基、芳基醚基、芳基硫醚基、胺基(-NH2 、-NHR、-NRR':R及R'分別獨立表示烴基)等。上述取代基中所包含之氫原子亦可由烴基取代。又,上述取代基中所包含之烴基亦可為直鏈狀、支鏈狀、及環狀之任一種。Substituents other than the hydrocarbon group in the organic group of Ra10 are not particularly limited as long as they do not impair the effect of the present invention. Examples include halogen atoms, hydroxyl groups, mercapto groups, thio groups, cyano groups, isocyano groups, and cyanic acid. Group, isocyanate group, thiocyanate group, isothiocyanate group, silyl group, silanol group, alkoxy group, alkoxycarbonyl group, aminomethanyl group, aminothiomethanyl group, nitro group, nitroso group Group, carboxyl group, carboxylate group, acyl group, acyloxy group, sulfinic acid group, sulfo group, sulfonate group, phosphine group, phosphinyl group, phosphonic acid group, phosphinyl group, hydroxyimine group, alkyl Base ether group, alkyl sulfide group, aryl ether group, aryl sulfide group, amine group (-NH 2 , -NHR, -NRR': R and R'each independently represent a hydrocarbon group), etc. The hydrogen atom contained in the above substituent may be substituted by a hydrocarbon group. Moreover, the hydrocarbon group contained in the said substituent may be any of linear, branched, and cyclic.

又,作為Ra10 之有機基亦可具有丙烯醯氧基、甲基丙烯醯氧基、環氧基、氧雜環丁基等反應性官能基。 丙烯醯氧基或甲基丙烯醯氧基等具有不飽和雙鍵等之醯基例如可藉由使丙烯酸或甲基丙烯酸等不飽和羧酸與包含具有環氧基之結構單元之丙烯酸系樹脂(a-4)中之環氧基的至少一部分發生反應而製造。In addition, the organic group as R a10 may have Bingxi Xi group, Bing Xixi methyl group, an epoxy group, an oxetanyl group and other reactive functional groups. Acrylic acid groups such as acryloxy group or methacryloxy group having unsaturated double bonds and the like can be obtained, for example, by combining an unsaturated carboxylic acid such as acrylic acid or methacrylic acid with an acrylic resin containing a structural unit having an epoxy group ( At least a part of the epoxy group in a-4) is produced by reacting.

作為Ra10 ,較佳為烷基、芳基、芳烷基或雜環基,該等基亦可由鹵素原子、羥基、烷基或雜環基取代。又,於該等基包含伸烷基部分之情形時,伸烷基部分亦可由醚鍵、硫醚鍵、酯鍵中斷。R a10 is preferably an alkyl group, an aryl group, an aralkyl group, or a heterocyclic group, and these groups may be substituted with a halogen atom, a hydroxyl group, an alkyl group, or a heterocyclic group. In addition, when these groups include alkylene moieties, the alkylene moieties may be interrupted by ether bonds, thioether bonds, and ester bonds.

於烷基為直鏈狀或支鏈狀者之情形時,其碳原子數較佳為1以上20以下,更佳為1以上15以下,尤佳為1以上10以下。作為較佳之烷基之例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基、異癸基等。When the alkyl group is linear or branched, the number of carbon atoms is preferably 1 or more and 20 or less, more preferably 1 or more and 15 or less, and particularly preferably 1 or more and 10 or less. Examples of preferable alkyl groups include: methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, second butyl, tertiary butyl, n-pentyl, isopentyl , Second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-nonyl, isononyl, n-decyl, isodecyl Base etc.

於烷基為包含脂環式基或脂環式基之基之情形時,作為烷基中所包含之較佳之脂環式基,可列舉:環戊基、及環己基等單環之脂環式基;或金剛烷基、降𦯉基、異𦯉基、三環壬基、三環癸基、及四環十二烷基等多環之脂環式基。When the alkyl group contains an alicyclic group or an alicyclic group, the preferred alicyclic group contained in the alkyl group includes monocyclic alicyclic groups such as cyclopentyl and cyclohexyl Formula group; or polycyclic alicyclic group such as adamantyl group, nor 𦯉 group, iso 𦯉 group, tricyclononyl, tricyclodecyl, and tetracyclododecyl.

式(a-4-1)所表示之化合物具備具有環氧基之鏈狀之基作為Ra10 之情形時的式(a-4-1)所表示之化合物之具體例,可列舉:(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2-甲基縮水甘油酯、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸6,7-環氧庚酯等(甲基)丙烯酸環氧烷基酯類。In the case where the compound represented by the formula (a-4-1) has a chain-like group having an epoxy group as R a10 , specific examples of the compound represented by the formula (a-4-1) include: (A Base) glycidyl acrylate, 2-methyl glycidyl (meth)acrylate, 3,4-epoxybutyl (meth)acrylate, 6,7-epoxyheptyl (meth)acrylate, etc. Base) epoxy alkyl acrylates.

又,式(a-4-1)所表示之化合物亦可為含有脂環式環氧基之(甲基)丙烯酸酯。構成脂環式環氧基之脂環式基可為單環,亦可為多環。作為單環之脂環式基,可列舉環戊基、環己基等。又,作為多環之脂環式基,可列舉:降𦯉基、異𦯉基、三環壬基、三環癸基、四環十二烷基等。In addition, the compound represented by the formula (a-4-1) may be an alicyclic epoxy group-containing (meth)acrylate. The alicyclic group constituting the alicyclic epoxy group may be monocyclic or polycyclic. Examples of monocyclic alicyclic groups include cyclopentyl and cyclohexyl. In addition, examples of polycyclic alicyclic groups include nordoxy, isooxy, tricyclononyl, tricyclodecyl, tetracyclododecyl, and the like.

作為式(a-4-1)所表示之化合物為含有脂環式環氧基之(甲基)丙烯酸酯之情形時的具體例,例如可列舉下述式(a-4-1a)~(a-4-1o)所表示之化合物。該等之中,為了使顯影性適度,較佳為下述式(a-4-1a)~(a-4-1e)所表示之化合物,更佳為下述式(a-4-1a)~(a-4-1c)所表示之化合物。As a specific example when the compound represented by the formula (a-4-1) is an alicyclic epoxy group-containing (meth)acrylate, for example, the following formulas (a-4-1a) to ( a-4-1o) the compound represented. Among them, in order to make the developability moderate, the compound represented by the following formula (a-4-1a) to (a-4-1e) is preferable, and the following formula (a-4-1a) is more preferable ~(a-4-1c) The compound represented.

[化17]

Figure 02_image033
[化17]
Figure 02_image033

[化18]

Figure 02_image035
[化18]
Figure 02_image035

[化19]

Figure 02_image037
[化19]
Figure 02_image037

上述式中,Ra20 表示氫原子或甲基,Ra21 表示碳原子數1以上6以下之二價脂肪族飽和烴基,Ra22 表示碳原子數1以上10以下之二價烴基,t表示0以上10以下之整數。作為Ra21 ,較佳為直鏈狀或支鏈狀之伸烷基,例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基。作為Ra22 ,例如較佳為亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基、伸苯基、伸環己基、-CH2 -Ph-CH2 -。Ph表示伸苯基。In the above formula, R a20 represents a hydrogen atom or a methyl group, R a21 represents a divalent saturated aliphatic hydrocarbon group with 1 to 6 carbon atoms, R a22 represents a divalent hydrocarbon group with 1 to 10 carbon atoms, and t represents 0 or more An integer below 10. R a21 is preferably a linear or branched alkylene group, such as methylene, ethylene, propylene, tetramethylene, ethylethylene, pentamethylene, hexamethylene base. As R a22 , for example, methylene, ethylene, propylene, tetramethylene, ethylethylene, pentamethylene, hexamethylene, phenylene, cyclohexylene, -CH are preferred. 2 -Ph-CH 2 -. Ph represents phenylene.

又,丙烯酸系樹脂(a-4)亦可為使(甲基)丙烯酸酯以外之單體聚合而得者。作為此種單體,可列舉:(甲基)丙烯醯胺類、不飽和羧酸類、烯丙基化合物、乙烯醚類、乙烯酯類、苯乙烯類等。該等單體可單獨使用,或將2種以上組合使用。In addition, the acrylic resin (a-4) may be obtained by polymerizing a monomer other than (meth)acrylate. Examples of such monomers include (meth)acrylamides, unsaturated carboxylic acids, allyl compounds, vinyl ethers, vinyl esters, and styrenes. These monomers can be used alone or in combination of two or more kinds.

作為(甲基)丙烯醯胺類,可列舉:(甲基)丙烯醯胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N-甲基-N-苯基(甲基)丙烯醯胺、N-羥基乙基-N-甲基(甲基)丙烯醯胺等。Examples of (meth)acrylamides include (meth)acrylamide, N-alkyl (meth)acrylamide, N-aryl(meth)acrylamide, N,N-di Alkyl(meth)acrylamide, N,N-aryl(meth)acrylamide, N-methyl-N-phenyl(meth)acrylamide, N-hydroxyethyl-N-methyl Group (meth)acrylamide and the like.

作為不飽和羧酸類,可列舉:丁烯酸等單羧酸;順丁烯二酸、反丁烯二酸、檸康酸、中康酸、伊康酸等二羧酸;該等二羧酸之酸酐等。Examples of unsaturated carboxylic acids include monocarboxylic acids such as crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid; these dicarboxylic acids The acid anhydride and so on.

作為烯丙基化合物,可列舉:乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙醯乙酸烯丙酯、乳酸烯丙酯等烯丙酯類;烯丙氧基乙醇等。Examples of allyl compounds include allyl acetate, allyl hexanoate, allyl octoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, Allyl esters such as allyl acetate and allyl lactate; allyloxyethanol, etc.

作為乙烯醚類,可列舉:己基乙烯醚、辛基乙烯醚、癸基乙烯醚、乙基己基乙烯醚、甲氧基乙基乙烯醚、乙氧基乙基乙烯醚、氯乙基乙烯醚、1-甲基-2,2-二甲基丙基乙烯醚、2-乙基丁基乙烯醚、羥基乙基乙烯醚、二乙二醇乙烯醚、二甲基胺基乙基乙烯醚、二乙基胺基乙基乙烯醚、丁基胺基乙基乙烯醚、苄基乙烯醚、四氫糠基乙烯醚等烷基乙烯醚;乙烯基苯基醚、乙烯基甲苯基醚、乙烯基氯苯基醚、乙烯基-2,4-二氯苯基醚、乙烯基萘基醚、乙烯基蒽基醚等乙烯基芳基醚等。Examples of vinyl ethers include hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, ethylhexyl vinyl ether, methoxyethyl vinyl ether, ethoxyethyl vinyl ether, chloroethyl vinyl ether, 1-methyl-2,2-dimethyl propyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, dimethylamino ethyl vinyl ether, two Ethylamino ethyl vinyl ether, butylamino ethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl ether and other alkyl vinyl ethers; vinyl phenyl ether, vinyl tolyl ether, vinyl chloride Vinyl aryl ethers such as phenyl ether, vinyl-2,4-dichlorophenyl ether, vinyl naphthyl ether, vinyl anthryl ether, etc.

作為乙烯酯類,可列舉:丁酸乙烯酯、異丁酸乙烯酯、三甲基乙酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯、己酸乙烯酯、氯乙酸乙烯酯、二氯乙酸乙烯酯、甲氧基乙酸乙烯酯、丁氧基乙酸乙烯酯、苯基乙酸乙烯酯、乙醯乙酸乙烯酯、乳酸乙烯酯、β-苯基丁酸乙烯酯、苯甲酸乙烯酯、水楊酸乙烯酯、氯苯甲酸乙烯酯、四氯苯甲酸乙烯酯、萘甲酸乙烯酯等。Examples of vinyl esters include: vinyl butyrate, vinyl isobutyrate, trimethyl vinyl acetate, diethyl vinyl acetate, vinyl valerate, vinyl caproate, vinyl chloroacetate, dichloro Vinyl acetate, methoxy vinyl acetate, butoxy vinyl acetate, phenyl vinyl acetate, vinyl acetyl acetate, vinyl lactate, vinyl β-phenyl butyrate, vinyl benzoate, salicylic acid Vinyl acid, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthoate, etc.

作為苯乙烯類,可列舉:苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等鹵苯乙烯等。Examples of styrenes include: styrene; methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, Hexylstyrene, cyclohexylstyrene, decylstyrene, benzylstyrene, chloromethylstyrene, trifluoromethylstyrene, ethoxymethylstyrene, acetoxymethylstyrene, etc. Alkoxystyrenes such as methoxystyrene, 4-methoxy-3-methylstyrene, and dimethoxystyrene; chlorostyrene, dichlorostyrene, trichlorostyrene, Tetrachlorostyrene, Pentachlorostyrene, Bromostyrene, Dibromostyrene, Iodostyrene, Fluorostyrene, Trifluorostyrene, 2-Bromo-4-trifluoromethylstyrene, 4-Fluoro-3 -Halogenated styrenes such as trifluoromethyl styrene, etc.

丙烯酸系樹脂(a-4)中之源自(甲基)丙烯酸之結構單元之量與源自其他單體之結構單元的量於不妨礙本發明之目的之範圍內並無特別限定。丙烯酸系樹脂(a-4)中之源自(甲基)丙烯酸之結構單元之量相對於丙烯酸系樹脂(a-4)之質量,較佳為5質量%以上50質量%以下,更佳為10質量%以上30質量%以下。The amount of structural units derived from (meth)acrylic acid and the amount of structural units derived from other monomers in the acrylic resin (a-4) are not particularly limited within a range that does not hinder the purpose of the present invention. The amount of the structural unit derived from (meth)acrylic acid in the acrylic resin (a-4) relative to the mass of the acrylic resin (a-4) is preferably 5% by mass or more and 50% by mass or less, more preferably 10% by mass or more and 30% by mass or less.

於丙烯酸系樹脂(a-4)具備具有不飽和雙鍵之結構單元之情形時,丙烯酸系樹脂(a-4)中之具有不飽和雙鍵之結構單元之量較佳為1質量%以上50質量%以下,更佳為1質量%以上30質量%以上,尤佳為1質量%以上20質量%以下。 藉由丙烯酸系樹脂(a-4)包含具有上述範圍內之量之不飽和雙鍵之結構單元,而將丙烯酸系樹脂引入至抗蝕膜內之交聯反應中實現均勻化,因此,對硬化物之耐熱性、機械特性之提高有效。When the acrylic resin (a-4) has a structural unit having an unsaturated double bond, the amount of the structural unit having an unsaturated double bond in the acrylic resin (a-4) is preferably 1% by mass or more. Mass% or less, more preferably 1 mass% or more and 30 mass% or more, and particularly preferably 1 mass% or more and 20 mass% or less. Acrylic resin (a-4) contains structural units with unsaturated double bonds in the above-mentioned range, and the acrylic resin is introduced into the crosslinking reaction in the resist film to achieve homogenization. It is effective to improve the heat resistance and mechanical properties of materials.

丙烯酸系樹脂(a-4)之重量平均分子量較佳為2000以上50000以下,更佳為3000以上30000以下。藉由設為上述範圍,有容易取得感光性樹脂組合物之膜形成能與曝光後之顯影性之平衡的傾向。The weight average molecular weight of the acrylic resin (a-4) is preferably 2,000 or more and 50,000 or less, more preferably 3,000 or more and 30,000 or less. By setting it as the said range, there exists a tendency for the film formation ability of a photosensitive resin composition to be easily balanced with the developability after exposure.

鹼可溶性樹脂(A)之含量相對於將下述有機溶劑(S)之質量去除後之感光性樹脂組合物之質量(固形物成分整體),較佳為20質量%以上85質量%以下,更佳為25質量%以上75質量%以下。藉由為上述範圍,而容易獲得顯影性優異之感光性樹脂組合物。The content of the alkali-soluble resin (A) is preferably 20% by mass or more and 85% by mass or less relative to the mass of the photosensitive resin composition after removing the mass of the following organic solvent (S) (total solid content). Preferably it is 25 mass% or more and 75 mass% or less. By being in the above range, it is easy to obtain a photosensitive resin composition having excellent developability.

<光聚合性單體(B)> 作為光聚合性單體(B),可較佳地使用具有乙烯性不飽和基之單體。於該具有乙烯性不飽和基之單體中有單官能單體及多官能單體。<Photopolymerizable monomer (B)> As the photopolymerizable monomer (B), a monomer having an ethylenically unsaturated group can be preferably used. Monofunctional monomers and multifunctional monomers are included in the monomers having ethylenic unsaturated groups.

作為單官能單體,可列舉:(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、反丁烯二酸、順丁烯二酸、順丁烯二酸酐、伊康酸、伊康酸酐、檸康酸、無水檸康酸、丁烯酸、2-丙烯醯胺-2-甲基丙磺酸、第三丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基-2-羥基丙酯、甘油單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、鄰苯二甲酸衍生物之半(甲基)丙烯酸酯等。該等單官能單體可單獨使用,或將2種以上組合使用。Examples of monofunctional monomers include (meth)acrylamide, methylol (meth)acrylamide, methoxymethyl (meth)acrylamide, and ethoxymethyl (methyl) Acrylamide, propoxymethyl(meth)acrylamide, butoxymethoxymethyl(meth)acrylamide, N-methylol(meth)acrylamide, N-hydroxymethyl Base (meth)acrylamide, (meth)acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, anhydrous citraconic acid, Crotonic acid, 2-acrylamide-2-methylpropanesulfonic acid, tertiary butylacrylamide sulfonic acid, methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate Ester, 2-ethylhexyl (meth)acrylate, cyclohexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, (meth)acrylic acid 2-hydroxybutyl ester, 2-phenoxy-2-hydroxypropyl (meth)acrylate, 2-(meth)acryloxy-2-hydroxypropyl phthalate, glycerol mono(methyl) Acrylate, tetrahydrofurfuryl (meth)acrylate, dimethylaminoethyl (meth)acrylate, glycidyl (meth)acrylate, 2,2,2-trifluoroethyl (meth)acrylate , (Meth)acrylic acid 2,2,3,3-tetrafluoropropyl ester, phthalic acid derivative half (meth)acrylate, etc. These monofunctional monomers can be used alone or in combination of two or more kinds.

另一方面,作為多官能單體,可列舉:乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、(甲基)丙烯酸2-羥基-3-(甲基)丙烯醯氧基丙酯、乙二醇二縮水甘油醚二(甲基)丙烯酸酯、二乙二醇二縮水甘油醚二(甲基)丙烯酸酯、鄰苯二甲酸二縮水甘油酯二(甲基)丙烯酸酯、甘油三丙烯酸酯、甘油聚縮水甘油醚聚(甲基)丙烯酸酯、胺甲酸乙酯(甲基)丙烯酸酯(即,甲苯二異氰酸酯、三甲基六亞甲基二異氰酸酯、或六亞甲基二異氰酸酯等與(甲基)丙烯酸2-羥基乙酯之反應物)、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等多官能單體、或三丙烯醯基縮甲醛等。該等多官能單體可單獨使用,或將2種以上組合使用。On the other hand, as multifunctional monomers, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, and propylene glycol di(meth)acrylate can be cited. (Meth)acrylate, polypropylene glycol di(meth)acrylate, butanediol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate Base) acrylate, trimethylolpropane tri(meth)acrylate, glycerol di(meth)acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol Di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 2,2- Bis(4-(meth)acryloyloxydiethoxyphenyl)propane, 2,2-bis(4-(meth)acryloyloxypolyethoxyphenyl)propane, (methyl) Acrylic acid 2-hydroxy-3-(meth)acryloxy propyl ester, ethylene glycol diglycidyl ether di(meth)acrylate, diethylene glycol diglycidyl ether di(meth)acrylate, ortho Diglycidyl phthalate di(meth)acrylate, glycerol triacrylate, glycerol polyglycidyl ether poly(meth)acrylate, urethane (meth)acrylate (ie, toluene diisocyanate, Trimethylhexamethylene diisocyanate, or hexamethylene diisocyanate, etc. and the reaction product of 2-hydroxyethyl (meth)acrylate), methylene bis(meth)acrylamide, (meth) Multifunctional monomers such as acrylamide methylene ether, polyol and N-methylol (meth)acrylamide condensation products, or triacrylamide formal, etc. These polyfunctional monomers can be used alone or in combination of two or more kinds.

該等具有乙烯性不飽和基之單體中,就有提高感光性樹脂組合物對基板之密接性、感光性樹脂組合物之硬化後之強度之傾向的方面而言,較佳為3官能以上之多官能單體,更佳為4官能以上之多官能單體,進而較佳為5官能以上之多官能單體。Among the monomers having ethylenically unsaturated groups, in terms of the tendency to improve the adhesion of the photosensitive resin composition to the substrate and the strength of the photosensitive resin composition after curing, it is preferably trifunctional or higher The multifunctional monomer is more preferably a multifunctional monomer with more than 4 functions, and more preferably a multifunctional monomer with more than 5 functions.

光聚合性單體(B)之感光性樹脂組合物中之含量相對於將下述有機溶劑(S)之質量去除後之感光性樹脂組合物的質量(固形物成分整體),較佳為1質量%以上50質量%以下,更佳為5質量%以上40質量%以下。藉由設為上述範圍,有容易取得感度、顯影性、解像性之平衡之傾向。The content in the photosensitive resin composition of the photopolymerizable monomer (B) is preferably 1 relative to the mass of the photosensitive resin composition after the mass of the following organic solvent (S) is removed (the total solid content) Mass% or more and 50 mass% or less, more preferably 5 mass% or more and 40 mass% or less. By setting it in the above range, it tends to be easy to balance sensitivity, developability, and resolution.

<光聚合起始劑(C)> 感光性樹脂組合物包含下述式(C1)所表示之光聚合起始劑(C-I)、及光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II)作為光聚合起始劑(C)。光聚合起始劑(C)之質量中之光聚合起始劑(C-I)之質量比率為20質量%以上95質量%以下。 如上所述,藉由感光性樹脂組合物將上述特定範圍內之量之光聚合起始劑(C-I)與光聚合起始劑(C-II)組合而包含,能夠使用感光性樹脂組合物形成直進性及對基板之密接性優異,且截面之形狀良好之經圖案化之硬化膜。 光聚合起始劑(C)之質量中之光聚合起始劑(C-I)之質量比率更佳為25質量%以上90質量%以下,進而較佳為30質量%以上85質量%以下。<Photopolymerization initiator (C)> The photosensitive resin composition contains a photopolymerization initiator (CI) represented by the following formula (C1) and a photopolymerization initiator (C-II) other than the photopolymerization initiator (CI) as the photopolymerization initiator Starter (C). The mass ratio of the photopolymerization initiator (C-I) in the mass of the photopolymerization initiator (C) is 20% by mass to 95% by mass. As described above, by combining the photopolymerization initiator (CI) and the photopolymerization initiator (C-II) in an amount within the above-mentioned specific range from the photosensitive resin composition, it can be formed using the photosensitive resin composition A patterned cured film with excellent straightness and adhesion to the substrate, and a good cross-sectional shape. The mass ratio of the photopolymerization initiator (C-I) in the mass of the photopolymerization initiator (C) is more preferably 25% by mass or more and 90% by mass or less, and more preferably 30% by mass or more and 85% by mass or less.

〔光聚合起始劑(C-I)〕 光聚合起始劑(C-I)係下述式(C1)所表示之肟酯化合物。 [化20]

Figure 02_image039
[Photopolymerization initiator (CI)] The photopolymerization initiator (CI) is an oxime ester compound represented by the following formula (C1). [化20]
Figure 02_image039

式(C1)中,X01 係於下述式(C1-1)所表示之結構中,將鍵結於芳香族環上之氫原子中之t2+t3個氫原子去除後之基。X02 及X03 分別獨立為一價有機基。X04 及X05 分別獨立為氫原子、可具有取代基之碳原子數1以上11以下之烷基、或可具有取代基之芳基。t0~t3分別獨立為0或1。t2及t3之至少一者為1。 [化21]

Figure 02_image041
式(C1-1)中,X06 係以C-N鍵鍵結於咔唑環中之氮原子之一價有機基。t4及t5分別獨立為0或1,t4及t5之至少一者為1。In the formula (C1), X 01 is a group in the structure represented by the following formula (C1-1) by removing t2 + t3 hydrogen atoms from the hydrogen atoms bonded to the aromatic ring. X 02 and X 03 are each independently a monovalent organic group. X 04 and X 05 are each independently a hydrogen atom, an optionally substituted alkyl group having 1 to 11 carbon atoms, or an optionally substituted aryl group. t0 to t3 are independently 0 or 1, respectively. At least one of t2 and t3 is 1. [化21]
Figure 02_image041
In the formula (C1-1), X 06 is a monovalent organic group bonded to the nitrogen atom in the carbazole ring with a CN bond. t4 and t5 are independently 0 or 1, respectively, and at least one of t4 and t5 is 1.

作為X06 之一價有機基亦可包含O、S、N、P、Si、及鹵素原子等雜原子。作為X06 之有機基之碳原子數並無特別限定。作為X06 之有機基之碳原子數例如較佳為1以上50以下,更佳為1以上30以下,尤佳為1以上20以下。The X 06 monovalent organic group may also include heteroatoms such as O, S, N, P, Si, and halogen atoms. The number of carbon atoms of the organic group of X 06 is not particularly limited. The number of carbon atoms of the organic group of X 06 is , for example, preferably 1 or more and 50 or less, more preferably 1 or more and 30 or less, and particularly preferably 1 or more and 20 or less.

關於作為X06 之有機基之較佳之例,可列舉:烷基、烯基、炔基、脂肪族環式烴基、芳基、脂肪族雜環基、雜芳基、脂肪族醯基、芳香族醯基、及該等基之組合。作為該等基之組合之較佳之例,可列舉:芳烷基、及環烷基烷基等。Preferable examples of the organic group as X 06 include: alkyl, alkenyl, alkynyl, aliphatic cyclic hydrocarbon group, aryl, aliphatic heterocyclic group, heteroaryl, aliphatic acyl, aromatic醯基, and combinations of these bases. As a preferable example of the combination of these groups, an aralkyl group, a cycloalkylalkyl group, etc. are mentioned.

於作為X06 之有機基為烷基、烯基或炔基之情形時,該等基可為直鏈狀,亦可為支鏈狀。於作為X06 之有機基為脂肪族醯基之情形時,該脂肪族醯基中之羰基以外之部分可為直鏈狀,可為支鏈狀,可為環狀,亦可為該等結構之組合。When the organic group as X 06 is an alkyl group, an alkenyl group, or an alkynyl group, these groups may be linear or branched. When the organic group as X 06 is an aliphatic acyl group, the part other than the carbonyl group in the aliphatic acyl group may be linear, branched, cyclic, or these structures的组合。 The combination.

作為X06 之有機基亦可具有取代基。關於作為X06 之有機基可具有之取代基之例,可列舉:碳原子數1以上20以下之烷基、碳原子數1以上20以下之烷氧基、碳原子數3以上10以下之環烷基、碳原子數3以上10以下之環烷氧基、碳原子數2以上20以下之飽和脂肪族醯基、碳原子數2以上20以下之烷氧基羰基、碳原子數2以上20以下之飽和脂肪族醯氧基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯硫基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之碳原子數11以上20以下之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環基羰基、胺基、經1個或2個有機基取代之胺基、𠰌啉-1-基、及哌𠯤-1-基、鹵素、硝基、及氰基等。The organic group as X 06 may have a substituent. Examples of substituents that may be possessed as the organic group of X 06 include: alkyl groups with 1 to 20 carbon atoms, alkoxy groups with 1 to 20 carbon atoms, and rings with 3 to 10 carbon atoms. Alkyl groups, cycloalkoxy groups with 3 to 10 carbon atoms, saturated aliphatic acyl groups with 2 to 20 carbon atoms, alkoxycarbonyl groups with 2 to 20 carbon atoms, and 2 to 20 carbon atoms The saturated aliphatic acyloxy group, the phenyl group which may have a substituent, the phenoxy group which may have a substituent group, the thiophenyl group which may have a substituent group, the benzyl group which may have a substituent group, the benzene which may have a substituent group An oxycarbonyl group, a benzyloxy group that may have a substituent, a phenylalkyl group that may have a substituent and a phenylalkyl group having 7 to 20 carbon atoms, a naphthyl group that may have a substituent, a naphthyloxy group that may have a substituent, The naphthyl group which may have a substituent, the naphthyloxycarbonyl group which may have a substituent, the naphthyloxycarbonyl group which may have a substituent, the naphthylalkyl group with a carbon number of 11 to 20 which may have a substituent, Substituent heterocyclic group, optionally substituted heterocyclic carbonyl group, amino group, amino group substituted by one or two organic groups, linolin-1-yl, piper-1-yl, halogen , Nitro, and cyano, etc.

作為X06 之上述基中,就光聚合起始劑(C-I)之合成及獲取之容易性等而言,較佳為烷基、芳基、及芳烷基。 Among the above groups of X 06 , an alkyl group, an aryl group, and an aralkyl group are preferable in terms of the ease of synthesis and acquisition of the photopolymerization initiator (CI).

作為X06 為烷基之情形時之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、新戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、2-乙基己基、正壬基、正癸基、正十一烷基、正十二烷基、正十三烷基、正十四烷基、正十五烷基、正十六烷基、正十七烷基、正十八烷基、正十九烷基、及正二十烷基。Specific examples when X 06 is an alkyl group include: methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, second butyl, tertiary butyl, n-pentyl Base, neopentyl, isopentyl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, 2-ethylhexyl, n-nonyl, n-decyl, n-undecyl , N-dodecyl, n-tridecyl, n-tetradecyl, n-pentadecyl, n-hexadecyl, n-heptadecyl, n-octadecyl, n-nonadecyl, and N-eicosyl.

作為X06 為芳基之情形時之較佳之例,可列舉:苯基、萘-1-基、萘-2-基、2-聯苯基、3-聯苯基、及4-聯苯基。Preferable examples when X 06 is an aryl group include phenyl, naphth-1-yl, naphth-2-yl, 2-biphenyl, 3-biphenyl, and 4-biphenyl .

作為X06 為芳烷基之情形時之較佳之例,可列舉:苄基、苯乙基、3-苯基-正丙基、4-苯基-正丁基、萘-1-基甲基、及萘-2-基甲基。Preferred examples when X 06 is an aralkyl group include benzyl, phenethyl, 3-phenyl-n-propyl, 4-phenyl-n-butyl, naphth-1-ylmethyl , And naphth-2-ylmethyl.

以上所說明之X06 之具體例中,較佳為甲基、乙基、苯基、萘-1-基、及萘-2-基,更佳為乙基、及苯基。Among the specific examples of X 06 described above, methyl, ethyl, phenyl, naphth-1-yl, and naphth-2-yl are preferred, and ethyl and phenyl are more preferred.

X01 只要為於上述式(C1-1)所表示之結構中,將鍵結於芳香族環上之氫原子中之t2+t3個氫原子去除後之基,則並無特別限定。作為上述式(C1-1)所表示之基,較佳為下述式(C1-1a)~式(C1-1c)所表示之一價或二價基。 [化22]

Figure 02_image043
X 01 is not particularly limited as long as it is a group obtained by removing t2+t3 hydrogen atoms from the hydrogen atoms bonded to the aromatic ring in the structure represented by the above formula (C1-1). The group represented by the above formula (C1-1) is preferably a monovalent or divalent group represented by the following formulas (C1-1a) to (C1-1c). [化22]
Figure 02_image043

於式(C1-1a)~式(C1-c)中,t4、t5、及X06 與式(C1-1)相同。X07 係以C-N鍵鍵結於咔唑環中之氮原子之二價有機基。X07 為包含芳香族環之二價有機基。X07 所具有之2個鍵結鍵中,於式(C1-1a)及式(C1-1c)中鍵結於咔唑環之鍵結鍵之另一鍵結鍵係鍵結於X07 中的芳香族環。 再者,X07 相當於自包含上述作為X06 之芳香族環之一價有機基中將鍵結於芳香族環上之1個氫原子去除後之二價基。In formula (C1-1a) to formula (C1-c), t4, t5, and X 06 are the same as formula (C1-1). X 07 is a divalent organic group bonded to the nitrogen atom in the carbazole ring by CN bond. X 07 is a divalent organic group containing an aromatic ring. Among the two bonding bonds that X 07 has, the other bonding bond that bonds to the carbazole ring in formula (C1-1a) and formula (C1-1c) is bonded to X 07 Aromatic ring. In addition, X 07 corresponds to a divalent group obtained by removing one hydrogen atom bonded to the aromatic ring from the monovalent organic group including the aromatic ring as X 06 described above.

將式(C1-1a)作為一例,以下記述X07 之較佳之具體例。下述結構中之相當於X07 之二價基亦較佳地作為式(C1-1c)中之X07 。 [化23]

Figure 02_image045
Figure 02_image047
Taking the formula (C1-1a) as an example, a preferable specific example of X 07 is described below. The divalent group equivalent to X 07 in the following structure is also preferably used as X 07 in formula (C1-1c). [化23]
Figure 02_image045
Figure 02_image047

於式(C1-1a)~式(C1-1c)中,咔唑環上之硝基之鍵結位置並無特別限定。 就容易進行式(C1)所表示之化合物之合成及獲取之方面等而言,作為式(C1-1a)所表示之基、(C1-1b)所表示之基、及式(C1-1c)所表示之基之較佳之例,可分別列舉:式(C1-1aa)所表示之基、式(C1-1ba)所表示之基、及式(C1-1ca)所表示之基。 [化24]

Figure 02_image049
In formulas (C1-1a) to (C1-1c), the bonding position of the nitro group on the carbazole ring is not particularly limited. In terms of ease of synthesis and acquisition of the compound represented by formula (C1), etc., as the group represented by formula (C1-1a), the group represented by (C1-1b), and formula (C1-1c) Preferable examples of the group represented include the group represented by the formula (C1-1aa), the group represented by the formula (C1-1ba), and the group represented by the formula (C1-1ca), respectively. [化24]
Figure 02_image049

式(C1)中,X02 及X03 分別獨立為一價有機基。關於作為X02 及X03 之較佳之有機基之例,可列舉:烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、烷氧基羰基、飽和脂肪族醯氧基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環基羰基、經1個或2個有機基取代之胺基、𠰌啉-1-基、及哌𠯤-1-基等。In formula (C1), X 02 and X 03 are each independently a monovalent organic group. Examples of preferable organic groups for X 02 and X 03 include alkyl groups, alkoxy groups, cycloalkyl groups, cycloalkoxy groups, saturated aliphatic acyl groups, alkoxycarbonyl groups, and saturated aliphatic acyloxy groups. Group, optionally substituted phenyl group, optionally substituted phenoxy group, optionally substituted benzyl group, optionally substituted phenoxycarbonyl group, optionally substituted benzyloxy group, Phenylalkyl which may have substituents, naphthyl which may have substituents, naphthyloxy which may have substituents, naphthyloxy which may have substituents, naphthyloxycarbonyl which may have substituents, which may be substituted The naphthyloxy group of the group, the naphthylalkyl group which may have a substituent, the heterocyclic group which may have a substituent, the heterocyclic carbonyl group which may have a substituent, the amine group substituted by one or two organic groups, 𠰌line-1-yl, piper-1-yl, etc.

於X02 及X03 為烷基之情形時,烷基之碳原子數較佳為1以上20以下,更佳為1以上6以下。於X02 及X03 為烷基之情形時,可為直鏈,亦可為支鏈。作為X02 及X03 為烷基之情形時之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基、及異癸基等。於X02 及X03 為烷基之情形時,烷基亦可於碳鏈中包含醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷基之例,可列舉:甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧基乙基、及甲氧基丙基等。When X 02 and X 03 are alkyl groups, the number of carbon atoms of the alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. When X 02 and X 03 are alkyl groups, they may be linear or branched. Specific examples when X 02 and X 03 are alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, second butyl, and tertiary butyl. , N-pentyl, isopentyl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-nonyl, isononyl Base, n-decyl, and isodecyl, etc. When X 02 and X 03 are alkyl groups, the alkyl groups may also include ether bonds (-O-) in the carbon chain. Examples of alkyl groups having ether bonds in the carbon chain include: methoxyethyl, ethoxyethyl, methoxyethoxyethyl, ethoxyethoxyethyl, and propoxy Ethoxyethyl, and methoxypropyl, etc.

於X02 及X03 為烷氧基之情形時,烷氧基之碳原子數較佳為1以上20以下,更佳為1以上6以下。於X02 及X03 為烷氧基之情形時,可為直鏈,亦可為支鏈。作為X02 及X03 為烷氧基之情形時之具體例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第二丁氧基、第三丁氧基、正戊氧基、異戊氧基、第二戊氧基、第三戊氧基、正己氧基、正庚氧基、正辛氧基、異辛氧基、第二辛氧基、第三辛氧基、正壬氧基、異壬氧基、正癸氧基、及異癸氧基等。於X02 及X03 為烷氧基之情形時,烷氧基亦可於碳鏈中包含醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷氧基之例,可列舉:甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙氧基乙氧基乙氧基、及甲氧基丙氧基等。When X 02 and X 03 are alkoxy groups, the number of carbon atoms of the alkoxy group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. When X 02 and X 03 are alkoxy groups, they may be linear or branched. Specific examples when X 02 and X 03 are alkoxy groups include: methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, second Butoxy, tertiary butoxy, n-pentyloxy, isopentyloxy, second pentyloxy, third pentyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, isooctyloxy , The second octyloxy group, the third octyloxy group, n-nonyloxy group, isononyloxy group, n-decyloxy group, and isodecyloxy group. When X 02 and X 03 are alkoxy groups, the alkoxy group may also include an ether bond (-O-) in the carbon chain. Examples of alkoxy groups having ether bonds in the carbon chain include: methoxyethoxy, ethoxyethoxy, methoxyethoxyethoxy, and ethoxyethoxyethoxy Group, propoxyethoxyethoxy, and methoxypropoxy, etc.

於X02 及X03 為環烷基或環烷氧基之情形時,環烷基或環烷氧基之碳原子數較佳為3以上10以下,更佳為3以上6以下。作為X02 及X03 為環烷基之情形時之具體例,可列舉:環丙基、環丁基、環戊基、環己基、環庚基、及環辛基等。作為X02 及X03 為環烷氧基之情形時之具體例,可列舉:環丙氧基、環丁氧基、環戊氧基、環己氧基、環庚氧基、及環辛氧基等。When X 02 and X 03 are cycloalkyl or cycloalkoxy, the number of carbon atoms of the cycloalkyl or cycloalkoxy is preferably 3 or more and 10 or less, more preferably 3 or more and 6 or less. Specific examples when X 02 and X 03 are cycloalkyl groups include cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Specific examples when X 02 and X 03 are cycloalkoxy groups include cyclopropoxy, cyclobutoxy, cyclopentyloxy, cyclohexyloxy, cycloheptyloxy, and cyclooctyloxy Base etc.

於X02 及X03 為飽和脂肪族醯基或飽和脂肪族醯氧基之情形時,飽和脂肪族醯基或飽和脂肪族醯氧基之碳原子數較佳為2以上21以下,更佳為2以上7以下。作為Rc7 為飽和脂肪族醯基之情形時之具體例,可列舉:乙醯基、丙醯基、正丁醯基、2-甲基丙醯基、正戊醯基、2,2-二甲基丙醯基、正己醯基、正庚醯基、正辛醯基、正壬醯氧基、正癸醯基、正十一碳醯基、正十二碳醯基、正十三碳醯基、正十四碳醯基、正十五碳醯基、及正十六碳醯基等。作為X02 及X03 為飽和脂肪族醯氧基之情形時之具體例,可列舉:乙醯氧基、乙醯氧基、正丁醯氧基、2-甲基乙醯氧基、正戊醯氧基、2,2-二甲基乙醯氧基、正己醯氧基、正庚醯氧基、正辛醯氧基、正壬醯氧基、正癸醯氧基、正十一碳醯氧基、正十二碳醯氧基、正十三碳醯氧基、正十四碳醯氧基、正十五碳醯氧基、及正十六碳醯氧基等。When X 02 and X 03 are saturated aliphatic acyl groups or saturated aliphatic acyloxy groups, the number of carbon atoms of the saturated aliphatic acyl groups or saturated aliphatic acyloxy groups is preferably from 2 to 21, more preferably 2 above 7 below. Specific examples when R c7 is a saturated aliphatic aliphatic group include: acetyl group, propionyl group, n-butyryl group, 2-methylpropionyl group, n-pentanyl group, 2,2-dimethyl Propyl, n-hexyl, n-heptanyl, n-octyl, n-nonanyloxy, n-decanoyl, n-undecanoyl, n-dodecanoyl, n-tridecanoyl, n-decyl Four-carbon acyl group, pentadecyl acyl group, and hexadecyl acyl group, etc. Specific examples when X 02 and X 03 are saturated aliphatic oxy groups include: acetoxy, acetoxy, n-butoxy, 2-methylacetoxy, n-pentyl Acetyloxy, 2,2-dimethylacetoxy, n-hexyloxy, n-heptanoyloxy, n-octyloxy, n-nonanoyloxy, n-decanoyloxy, n-undecanoyloxy Oxy, n-dodecanoyloxy, n-tridecanoyloxy, n-tetradecanoyloxy, n-pentadecanoyloxy, and n-hexadecanoyloxy.

於X02 及X03 為烷氧基羰基之情形時,烷氧基羰基之碳原子數較佳為2以上20以下,更佳為2以上7以下。作為X02 及X03 為烷氧基羰基之情形時之具體例,可列舉:甲氧基羰基、乙氧基羰基、正丙氧基羰基、異丙氧基羰基、正丁氧基羰基、異丁氧基羰基、第二丁氧基羰基、第三丁氧基羰基、正戊氧基羰基、異戊氧基羰基、第二戊氧基羰基、第三戊氧基羰基、正己氧基羰基、正庚氧基羰基、正辛氧基羰基、異辛氧基羰基、第二辛氧基羰基、第三辛氧基羰基、正壬氧基羰基、異壬氧基羰基、正癸氧基羰基、及異癸氧基羰基等。When X 02 and X 03 are alkoxycarbonyl groups, the number of carbon atoms of the alkoxycarbonyl group is preferably 2 or more and 20 or less, more preferably 2 or more and 7 or less. Specific examples when X 02 and X 03 are alkoxycarbonyl groups include: methoxycarbonyl, ethoxycarbonyl, n-propoxycarbonyl, isopropoxycarbonyl, n-butoxycarbonyl, iso Butoxycarbonyl, second butoxycarbonyl, third butoxycarbonyl, n-pentoxycarbonyl, isopentoxycarbonyl, second pentoxycarbonyl, third pentoxycarbonyl, n-hexoxycarbonyl, N-heptyloxycarbonyl, n-octyloxycarbonyl, isooctyloxycarbonyl, second octyloxycarbonyl, third octyloxycarbonyl, n-nonyloxycarbonyl, isononyloxycarbonyl, n-decyloxycarbonyl, And isodecyloxycarbonyl and so on.

於X02 及X03 為苯基烷基之情形時,苯基烷基之碳原子數較佳為7以上20以下,更佳為7以上10以下。於X02 及X03 為萘基烷基之情形時,萘基烷基之碳原子數較佳為11以上20以下,更佳為11以上14以下。作為X02 及X03 為苯基烷基之情形時之具體例,可列舉:苄基、2-苯基乙基、3-苯基丙基、及4-苯基丁基。作為X02 及X03 為萘基烷基之情形時之具體例,可列舉:α-萘基甲基、β-萘基甲基、2-(α-萘基)乙基、及2-(β-萘基)乙基。於X02 及X03 為苯基烷基或萘基烷基之情形時,Rc7 亦可進而於苯基或萘基上具有取代基。When X 02 and X 03 are phenylalkyl groups, the number of carbon atoms of the phenylalkyl group is preferably 7 or more and 20 or less, more preferably 7 or more and 10 or less. When X 02 and X 03 are naphthyl alkyl groups, the number of carbon atoms of the naphthyl alkyl group is preferably 11 or more and 20 or less, more preferably 11 or more and 14 or less. Specific examples when X 02 and X 03 are phenylalkyl groups include benzyl, 2-phenylethyl, 3-phenylpropyl, and 4-phenylbutyl. Specific examples when X 02 and X 03 are naphthylalkyl groups include α-naphthylmethyl, β-naphthylmethyl, 2-(α-naphthyl)ethyl, and 2-( β-naphthyl) ethyl. When X 02 and X 03 are phenylalkyl or naphthylalkyl, R c7 may further have a substituent on the phenyl or naphthyl group.

於X02 及X03 為雜環基之情形時,雜環基為包含1個以上之N、S、O之五元或六元單環、或者該單環彼此或該單環與苯環縮合而成之雜環基。於雜環基為縮合環之情形時,構成該縮合環之單環之數量設為3以內。雜環基可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可列舉:呋喃、噻吩、吡咯、㗁唑、異㗁唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡𠯤、嘧啶、嗒𠯤、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲哚𠯤、苯并咪唑、苯并三唑、苯并㗁唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、酞𠯤、㖕啉、喹㗁啉、哌啶、哌𠯤、𠰌啉、四氫吡喃、及四氫呋喃等。於Rc7 為雜環基之情形時,雜環基亦可進而具有取代基。When X 02 and X 03 are heterocyclic groups, the heterocyclic group is a five-membered or six-membered monocyclic ring containing more than one N, S, O, or the monocyclic rings are condensed with each other or the monocyclic ring and benzene ring From the heterocyclic group. When the heterocyclic group is a condensed ring, the number of monocyclic rings constituting the condensed ring is set to 3 or less. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isooxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridine, pyrimidine, Da, benzofuran, benzothiophene, indole, isoindole, indole, benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, purine, quinoline, isoquine Phytoline, quinazoline, phthaloline, quinazoline, quinoline, piperidine, piperidine, tetrahydropyran, tetrahydrofuran, etc. When R c7 is a heterocyclic group, the heterocyclic group may further have a substituent.

於X02 及X03 為雜環基羰基之情形時,雜環基羰基中所包含之雜環基與X02 及X03 為雜環基之情形相同。In the case where X 02 and X 03 are heterocyclic carbonyl groups, the heterocyclic group contained in the heterocyclic carbonyl group is the same as the case where X 02 and X 03 are heterocyclic groups.

於X02 及X03 為經1個或2個有機基取代之胺基之情形時,有機基之較佳之例可列舉:碳原子數1以上20以下之烷基、碳原子數3以上10以下之環烷基、碳原子數2以上21以下之飽和脂肪族醯基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之碳原子數11以上20以下之萘基烷基、及雜環基等。該等較佳之有機基之具體例與X02 及X03 相同。作為經1個或2個有機基取代之胺基之具體例,可列舉:甲基胺基、乙基胺基、二乙基胺基、正丙基胺基、二-正丙基胺基、異丙基胺基、正丁基胺基、二-正丁基胺基、正戊基胺基、正己基胺基、正庚基胺基、正辛基胺基、正壬基胺基、正癸基胺基、苯基胺基、萘基胺基、乙醯基胺基、丙醯基胺基、正丁醯基胺基、正戊醯基胺基、正己醯基胺基、正庚醯基胺基、正辛醯基胺基、正癸醯基胺基、苯甲醯基胺基、α-萘甲醯基胺基、及β-萘甲醯基胺基等。When X 02 and X 03 are amino groups substituted with 1 or 2 organic groups, preferable examples of the organic groups include: alkyl groups with 1 to 20 carbon atoms, and 3 to 10 carbon atoms Cycloalkyl groups, saturated aliphatic acyl groups with 2 to 21 carbon atoms, substituted phenyl groups, substituted benzyl groups, substituted groups with 7 to 20 carbon atoms Phenylalkyl, optionally substituted naphthyl, optionally substituted naphthylalkyl, optionally substituted naphthylalkyl having 11 to 20 carbon atoms, heterocyclic group, and the like. The specific examples of these preferred organic groups are the same as X 02 and X 03 . Specific examples of the amino group substituted with one or two organic groups include: methylamino, ethylamino, diethylamino, n-propylamino, di-n-propylamino, Isopropylamino, n-butylamino, di-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-nonylamino, n- Decylamino, phenylamino, naphthylamino, acetylamino, propionylamino, n-butyrylamino, n-pentylamino, n-hexylamino, n-heptanylamine Group, n-octylamino group, n-decanoylamino group, benzylamino group, α-naphthoylamino group, β-naphthoylamino group, etc.

作為X02 及X03 中所包含之苯基、萘基、及雜環基進而具有取代基之情形時之取代基,可列舉:碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基、碳原子數2以上7以下之飽和脂肪族醯基、碳原子數2以上7以下之烷氧基羰基、碳原子數2以上7以下之飽和脂肪族醯氧基、具有碳原子數1以上6以下之烷基之單烷基胺基、具有碳原子數1以上6以下之烷基之二烷基胺基、𠰌啉-1-基、哌𠯤-1-基、鹵素、硝基、及氰基等。Examples of the substituents when the phenyl, naphthyl, and heterocyclic groups contained in X 02 and X 03 further have substituents include: alkyl groups with 1 to 6 carbon atoms, and 1 or more carbon atoms Alkoxy groups with 6 or less, saturated aliphatic acyl groups with 2 to 7 carbon atoms, alkoxycarbonyl groups with 2 to 7 carbon atoms, saturated aliphatic acyloxy groups with 2 to 7 carbon atoms, Monoalkylamino groups of alkyl groups with 1 to 6 carbon atoms, dialkylamino groups with alkyl groups with 1 to 6 carbon atoms, linolin-1-yl, piperidine-1-yl, halogen , Nitro, and cyano, etc.

於該等取代基為碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基、碳原子數2以上7以下之飽和脂肪族醯基、碳原子數2以上7以下之烷氧基羰基、碳原子數2以上7以下之飽和脂肪族醯氧基、具有碳原子數1以上6以下之烷基之單烷基胺基、及具有碳原子數1以上6以下之烷基之二烷基胺基之情形時,亦可於該等取代基中之碳鏈中包含醚鍵(-O-)。Where the substituents are alkyl groups with 1 to 6 carbon atoms, alkoxy groups with 1 to 6 carbon atoms, saturated aliphatic aliphatic groups with 2 to 7 carbon atoms, and 2 to 7 carbon atoms Alkoxycarbonyl group, saturated aliphatic oxy group with carbon number 2 or more and 7 or less, monoalkylamino group having alkyl group with 1 or more and 6 carbon atoms, and alkyl group with 1 or more and 6 carbon atoms In the case of the dialkylamino group of the group, an ether bond (-O-) may be included in the carbon chain of the substituents.

於X02 及X03 中所包含之苯基、萘基、及雜環基進而具有取代基之情形時,該取代基之數量於不妨礙本發明之目的之範圍內並無限定,但較佳為1以上4以下。於X02 及X03 中所包含之苯基、萘基、及雜環基具有複數個取代基之情形時,複數個取代基可相同,亦可不同。When the phenyl, naphthyl, and heterocyclic groups contained in X 02 and X 03 further have substituents, the number of the substituents is not limited within a range that does not hinder the purpose of the present invention, but preferably It is 1 or more and 4 or less. When the phenyl group, the naphthyl group, and the heterocyclic group contained in X 02 and X 03 have a plurality of substituents, the plurality of substituents may be the same or different.

作為X02 及X03 ,較佳亦為環烷基烷基、可於芳香環上具有取代基之苯氧基烷基、可於芳香環上具有取代基之苯硫基烷基。苯氧基烷基、及苯硫基烷基可具有之取代基如以上作為苯基可具有之取代基所述。X 02 and X 03 are preferably cycloalkylalkyl, phenoxyalkyl which may have a substituent on the aromatic ring, and phenylthioalkyl which may have a substituent on the aromatic ring. The substituents that the phenoxyalkyl group and the phenylthioalkyl group may have are as described above as the substituents that the phenyl group may have.

有機基中,作為X02 及X03 ,較佳為烷基、環烷基、可具有取代基之苯基、或環烷基烷基、可於芳香環上具有取代基之苯硫基烷基。作為烷基,較佳為碳原子數1以上20以下之烷基,更佳為碳原子數1以上8以下之烷基,尤佳為碳原子數1以上4以下之烷基,最佳為甲基。可具有取代基之苯基中,較佳為甲基苯基,更佳為2-甲基苯基。環烷基烷基中所包含之環烷基之碳原子數較佳為5以上10以下,更佳為5以上8以下,尤佳為5或6。環烷基烷基中所包含之伸烷基之碳原子數較佳為1以上8以下,更佳為1以上4以下,尤佳為2。環烷基烷基中,較佳為環戊基乙基。可於芳香環上具有取代基之苯硫基烷基中所包含之伸烷基之碳原子數較佳為1以上8以下,更佳為1以上4以下,尤佳為2。可於芳香環上具有取代基之苯硫基烷基中,較佳為2-(4-氯苯硫基)乙基。Among the organic groups, X 02 and X 03 are preferably alkyl, cycloalkyl, optionally substituted phenyl, or cycloalkylalkyl, or phenylthioalkyl optionally substituted on the aromatic ring . The alkyl group is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 8 carbon atoms, particularly preferably an alkyl group having 1 to 4 carbon atoms, and most preferably methyl base. Among the phenyl groups that may have a substituent, methylphenyl is preferred, and 2-methylphenyl is more preferred. The number of carbon atoms of the cycloalkyl group contained in the cycloalkylalkyl group is preferably 5 or more and 10 or less, more preferably 5 or more and 8 or less, and particularly preferably 5 or 6. The number of carbon atoms of the alkylene group contained in the cycloalkylalkyl group is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among cycloalkylalkyls, cyclopentylethyl is preferred. The number of carbon atoms of the alkylene group contained in the phenylthioalkyl group which may have a substituent on the aromatic ring is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among the phenylthioalkyl groups which may have a substituent on the aromatic ring, 2-(4-chlorophenylthio)ethyl is preferred.

作為X02 及X03 ,較佳亦為由-A1 -CO-O-A2 所表示之基。A1 為二價有機基,較佳為二價烴基,較佳為伸烷基。A2 為一價有機基,較佳為一價烴基。X 02 and X 03 are preferably groups represented by -A 1 -CO-OA 2 . A 1 is a divalent organic group, preferably a divalent hydrocarbon group, preferably an alkylene group. A 2 is a monovalent organic group, preferably a monovalent hydrocarbon group.

於A1 為伸烷基之情形時,伸烷基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。於A1 為伸烷基之情形時,伸烷基之碳原子數較佳為1以上10以下,更佳為1以上6以下,尤佳為1以上4以下。When A 1 is an alkylene group, the alkylene group may be linear or branched, and is preferably linear. When A 1 is an alkylene group, the number of carbon atoms of the alkylene group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less, and particularly preferably 1 or more and 4 or less.

作為A2 之較佳之例,可列舉:碳原子數1以上10以下之烷基、碳原子數7以上20以下之芳烷基、及碳原子數6以上20以下之芳香族烴基。作為A4 之較佳之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、苯基、萘基、苄基、苯乙基、α-萘基甲基、及β-萘基甲基等。Preferred examples of A 2 include an alkyl group having 1 to 10 carbon atoms, an aralkyl group having 7 to 20 carbon atoms, and an aromatic hydrocarbon group having 6 to 20 carbon atoms. Preferred specific examples of A 4 include: methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, second butyl, tertiary butyl, n-pentyl, n-hexyl , Phenyl, naphthyl, benzyl, phenethyl, α-naphthylmethyl, and β-naphthylmethyl.

作為由-A1 -CO-O-A2 所表示之基之較佳之具體例,可列舉:2-甲氧基羰基乙基、2-乙氧基羰基乙基、2-正丙氧基羰基乙基、2-正丁氧基羰基乙基、2-正戊氧基羰基乙基、2-正己氧基羰基乙基、2-苄氧基羰基乙基、2-苯氧基羰基乙基、3-甲氧基羰基-正丙基、3-乙氧基羰基-正丙基、3-正丙氧基羰基-正丙基、3-正丁氧基羰基-正丙基、3-正戊氧基羰基-正丙基、3-正己氧基羰基-正丙基、3-苄氧基羰基-正丙基、及3-苯氧基羰基-正丙基等。Preferred specific examples of the group represented by -A 1 -CO-OA 2 include: 2-methoxycarbonylethyl, 2-ethoxycarbonylethyl, 2-n-propoxycarbonylethyl , 2-n-butoxycarbonylethyl, 2-n-pentoxycarbonylethyl, 2-n-hexoxycarbonylethyl, 2-benzyloxycarbonylethyl, 2-phenoxycarbonylethyl, 3- Methoxycarbonyl-n-propyl, 3-ethoxycarbonyl-n-propyl, 3-n-propoxycarbonyl-n-propyl, 3-n-butoxycarbonyl-n-propyl, 3-n-pentoxy Carbonyl-n-propyl, 3-n-hexyloxycarbonyl-n-propyl, 3-benzyloxycarbonyl-n-propyl, 3-phenoxycarbonyl-n-propyl, etc.

以上,對X02 及X03 進行了說明,但作為X02 及X03 ,較佳為下述式(C1a)或(C1b)所表示之基。 [化25]

Figure 02_image051
式(C1a)及(C1b)中,X08 及X09 分別為有機基。t6為0以上4以下之整數。於X08 與X09 存在於苯環上之相鄰之位置之情形時,X08 及X09 亦可相互鍵結而形成環。t7為1以上8以下之整數。t8為1以上5以下之整數。t9為0以上(t8+3)以下之整數。X010 為有機基。In the above, X 02 and X 03 have been described, but X 02 and X 03 are preferably groups represented by the following formula (C1a) or (C1b). [化25]
Figure 02_image051
In formulas (C1a) and (C1b), X 08 and X 09 are each an organic group. t6 is an integer of 0 or more and 4 or less. When X 08 and X 09 exist in adjacent positions on the benzene ring, X 08 and X 09 may also be bonded to each other to form a ring. t7 is an integer of 1 or more and 8 or less. t8 is an integer of 1 to 5. t9 is an integer of 0 or more (t8+3). X 010 is an organic base.

與式(C1a)中之X08 及X09 相關之有機基之例與X02 及X03 相同。作為X08 ,較佳為烷基或苯基。於X08 為烷基之情形時,其碳原子數較佳為1以上10以下,更佳為1以上5以下,尤佳為1以上3以下,最佳為1。即,X08 最佳為甲基。於X08 及X09 鍵結而形成環之情形時,該環可為芳香族環,亦可為脂肪族環。作為式(C1a)所表示且X08 及X09 形成環之基之較佳之例,可列舉:萘-1-基、或1,2,3,4-四氫化萘-5-基等。上述式(C1a)中,t6為0以上4以下之整數,較佳為0或1,更佳為0。Examples of organic groups related to X 08 and X 09 in formula (C1a) are the same as X 02 and X 03 . X 08 is preferably an alkyl group or a phenyl group. When X 08 is an alkyl group, the number of carbon atoms is preferably 1 to 10, more preferably 1 to 5, particularly preferably 1 to 3, and most preferably 1. That is, X 08 is most preferably a methyl group. When X 08 and X 09 are bonded to form a ring, the ring may be an aromatic ring or an aliphatic ring. Preferred examples of the group represented by the formula (C1a) and X 08 and X 09 form a ring include naphth-1-yl, 1,2,3,4-tetralin-5-yl, and the like. In the above formula (C1a), t6 is an integer of 0 or more and 4 or less, preferably 0 or 1, and more preferably 0.

上述式(C1b)中,X010 為有機基。作為有機基,可列舉與對X02 及X03 所說明之有機基相同之基。有機基中,較佳為烷基。烷基可為直鏈狀,亦可為支鏈狀。烷基之碳原子數較佳為1以上10以下,更佳為1以上5以下,尤佳為1以上3以下。作為X010 ,較佳地例示甲基、乙基、丙基、異丙基、丁基等,該等之中,更佳為甲基。In the above formula (C1b), X 010 is an organic group. Examples of the organic group include the same groups as the organic groups described for X 02 and X 03 . Among the organic groups, an alkyl group is preferred. The alkyl group may be linear or branched. The number of carbon atoms of the alkyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, and particularly preferably 1 or more and 3 or less. As X 010 , methyl, ethyl, propyl, isopropyl, butyl, etc. are preferably exemplified, and among these, methyl is more preferred.

上述式(C1b)中,t8為1以上5以下之整數,較佳為1以上3以下之整數,更佳為1或2。上述式(C1b)中,t9為0以上(t8+3)以下,較佳為0以上3以下之整數,更佳為0以上2以下之整數,尤佳為0。上述式(C1b)中,t7為1以上8以下之整數,較佳為1以上5以下之整數,更佳為1以上3以下之整數,尤佳為1或2。In the above formula (C1b), t8 is an integer of 1 to 5, preferably an integer of 1 to 3, and more preferably 1 or 2. In the above formula (C1b), t9 is 0 or more (t8+3) or less, preferably an integer of 0 or more and 3 or less, more preferably an integer of 0 or more and 2 or less, and particularly preferably 0. In the above formula (C1b), t7 is an integer of 1 or more and 8 or less, preferably an integer of 1 or more and 5 or less, more preferably an integer of 1 or more and 3 or less, and particularly preferably 1 or 2.

式(C1)中,X04 及X05 分別獨立為氫原子、可具有取代基之碳原子數1以上11以下之烷基、或可具有取代基之芳基。於X04 及X05 為烷基之情形時,作為X04 及X05 可具有之取代基,較佳地例示苯基、萘基等。於X04 及X05 為芳基之情形時,作為X04 及X05 可具有之取代基,較佳地例示碳原子數1以上5以下之烷基、碳原子數1以上5以下之烷氧基、及鹵素原子等。In formula (C1), X 04 and X 05 are each independently a hydrogen atom, an optionally substituted alkyl group having 1 to 11 carbon atoms, or an optionally substituted aryl group. When X 04 and X 05 are alkyl groups, the substituents that X 04 and X 05 may have are preferably exemplified by phenyl and naphthyl. When X 04 and X 05 are aryl groups, as substituents that X 04 and X 05 may have, preferred examples include alkyl groups having 1 to 5 carbon atoms, and alkoxy groups having 1 to 5 carbon atoms. Radicals, halogen atoms, etc.

式(C1)中,作為X04 及X05 ,較佳地例示氫原子、甲基、乙基、正丙基、異丙基、正丁基、苯基、苄基、甲基苯基、萘基等,該等之中,更佳為甲基或苯基。In formula (C1), as X 04 and X 05 , hydrogen atom, methyl, ethyl, n-propyl, isopropyl, n-butyl, phenyl, benzyl, methylphenyl, naphthalene are preferably exemplified Among them, a methyl group or a phenyl group is more preferable.

如上所述,作為X01 ,較佳為式(C1-1aa)所表示之基、式(C1-1ba)所表示之基、及式(C1-1ca)所表示之基。 作為X01 為式(C1-1aa)所表示之基之情形時之式(C1)所表示之肟酯化合物之較佳的具體例,可列舉以下化合物。 [化26]

Figure 02_image053
As described above, X 01 is preferably a group represented by formula (C1-1aa), a group represented by formula (C1-1ba), and a group represented by formula (C1-1ca). Preferred specific examples of the oxime ester compound represented by formula (C1) when X 01 is a group represented by formula (C1-1aa) include the following compounds. [化26]
Figure 02_image053

[化27]

Figure 02_image055
[化27]
Figure 02_image055

[化28]

Figure 02_image057
[化28]
Figure 02_image057

[化29]

Figure 02_image059
[化29]
Figure 02_image059

作為X01 為式(C1-1ba)所表示之基之情形時之式(C1)所表示之肟酯化合物之較佳的具體例,可列舉以下化合物。 [化30]

Figure 02_image061
Preferred specific examples of the oxime ester compound represented by formula (C1) when X 01 is a group represented by formula (C1-1ba) include the following compounds. [化30]
Figure 02_image061

[化31]

Figure 02_image063
[化31]
Figure 02_image063

作為X01 為式(C1-1ca)所表示之基之情形時之式(C1)所表示之肟酯化合物之較佳的具體例,可列舉以下化合物。 [化32]

Figure 02_image065
Preferred specific examples of the oxime ester compound represented by formula (C1) when X 01 is a group represented by formula (C1-1ca) include the following compounds. [化32]
Figure 02_image065

[化33]

Figure 02_image067
[化33]
Figure 02_image067

[化34]

Figure 02_image069
[化34]
Figure 02_image069

[化35]

Figure 02_image071
[化35]
Figure 02_image071

<光聚合起始劑(C-II)> 感光性樹脂組合物與上述光聚合起始劑(C-II)一併包含光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II)作為光聚合起始劑(C)。 作為其他光聚合起始劑(C-II),只要為不屬於光聚合起始劑(C-I)之光聚合起始劑,則並無特別限定。<Photopolymerization initiator (C-II)> The photosensitive resin composition and the above-mentioned photopolymerization initiator (C-II) contain other photopolymerization initiators (C-II) other than the photopolymerization initiator (CI) as the photopolymerization initiator (C) . The other photopolymerization initiator (C-II) is not particularly limited as long as it is a photopolymerization initiator that is not a photopolymerization initiator (C-I).

作為光聚合起始劑(C-II)之較佳之例,可例示:具有不屬於上述式(C1)之結構之肟酯化合物;2-苄基-2-二甲基胺基-1-(4-𠰌啉基苯基)丁烷-1酮、2-甲基-1-[4-(甲硫基)苯基]-2-𠰌啉基丙烷-1酮、2-苄基-2-二甲基胺基-1-(4-二甲基胺基苯基)丁烷-1酮、2-(4-甲基苄基)-2-二乙基胺基-1-(4-𠰌啉基苯基)丁烷-1酮、2-甲基-1-苯基-2-𠰌啉基丙烷-1酮、2-甲基-1-[4-(己基)苯基]-2-𠰌啉基丙烷-1酮、2-乙基-2-二甲基胺基-1-(4-𠰌啉基苯基)丁烷-1酮等α-胺酮系化合物;1-苯基-2-羥基-2-甲基丙烷-1酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1酮、4-(2-羥基乙氧基)苯基-(2-羥基-2-丙基)酮、1-羥基環己基苯基酮等α-羥基酮系光聚合起始劑;安息香、安息香甲醚、安息香乙醚、安息香丙醚、聯苯醯縮二甲醇等安息香系光聚合起始劑;二苯甲酮、苯甲醯苯甲酸、苯甲醯苯甲酸甲酯、4-苯基二苯甲酮、羥基二苯甲酮、丙烯基化二苯甲酮、4-苯甲醯基、4'-甲基二苯硫醚、4,4'-雙二乙基胺基二苯甲酮等二苯甲酮系光聚合起始劑;9-氧硫𠮿

Figure 108139902-A0304-12-01
、2-氯9-氧硫𠮿
Figure 108139902-A0304-12-01
、2-甲硫基𠮿酮、異丙基9-氧硫𠮿
Figure 108139902-A0304-12-01
、2,4-二異丙基9-氧硫𠮿
Figure 108139902-A0304-12-01
等9-氧硫𠮿
Figure 108139902-A0304-12-01
系光聚合起始劑;2,4,6-三氯-s-三𠯤、2-苯基-4,6-雙(三氯甲基)-s-三𠯤、2-(對甲氧基苯基)-4,6-雙(三氯甲基)-s-三𠯤、2-(對甲苯基)-4,6-雙(三氯甲基)-s-三𠯤、2-向日葵基-4,6-雙(三氯甲基)-s-三𠯤、2,4-雙(三氯甲基)-6-苯乙烯基-s-三𠯤、2-(萘并-1-基)-4,6-雙(三氯甲基)-s-三𠯤、2-(4-甲氧基-萘并-1-基)-4,6-雙(三氯甲基)-s-三𠯤、2,4-三氯甲基-(向日葵基)-6-三𠯤、2,4-三氯甲基-(4'-甲氧基苯乙烯基)-6-三𠯤、2-[4-(4-甲氧基苯乙烯基)苯基]-4,6-雙(三氯甲基)-1,3,5-三𠯤等三𠯤系光聚合起始劑;咔唑系光聚合起始劑;2,2'-雙(2-氯苯基)-4,4',5,5'-四(4-乙氧基羰基苯基)-1,2'-聯咪唑、2,2'-雙(2-溴苯基)-4,4',5,5'-四(4-乙氧基羰基苯基)-1,2'-聯咪唑、2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2-溴苯基)-4,4,5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二溴苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4,6-三溴苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑等聯咪唑系光聚合起始劑;如下述式所表示之苯并咪唑啉系光聚合起始劑等。 [化36]
Figure 02_image073
As a preferable example of the photopolymerization initiator (C-II), there can be exemplified: an oxime ester compound having a structure not belonging to the above formula (C1); 2-benzyl-2-dimethylamino-1-( 4-olinylphenyl)butan-1-one, 2-methyl-1-[4-(methylthio)phenyl]-2-𠰌linepropan-1one, 2-benzyl-2- Dimethylamino-1-(4-dimethylaminophenyl)butan-1-one, 2-(4-methylbenzyl)-2-diethylamino-1-(4-𠰌) (Hydroxyphenyl)butane-1one, 2-Methyl-1-phenyl-2-(hydroxypropane-1one), 2-Methyl-1-[4-(hexyl)phenyl]-2- Α-amino ketone compounds such as 𠰌line propane-1 ketone, 2-ethyl-2-dimethylamino-1-(4-𠰌line phenyl) butane-1 one; 1-phenyl- 2-Hydroxy-2-methylpropane-1one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropane-1one, 4-(2-hydroxyethoxy)phenyl -(2-hydroxy-2-propyl)ketone, 1-hydroxycyclohexyl phenyl ketone and other α-hydroxy ketone photopolymerization initiators; benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, biphenyl acetone Benzoin-based photopolymerization initiators such as dimethanol; benzophenone, benzophenone benzoic acid, methyl benzophenone benzoate, 4-phenylbenzophenone, hydroxybenzophenone, propenylated benzophenone Benzophenone-based photopolymerization initiators such as ketone, 4-benzyl, 4'-methyldiphenyl sulfide, 4,4'-bisdiethylaminobenzophenone, etc.; 9-oxygen Sulfur 𠮿
Figure 108139902-A0304-12-01
, 2-Chloro 9-oxysulfur 𠮿
Figure 108139902-A0304-12-01
, 2-methylthio ketone, isopropyl 9-oxythio 𠮿
Figure 108139902-A0304-12-01
, 2,4-Diisopropyl 9-oxysulfur 𠮿
Figure 108139902-A0304-12-01
Wait 9-oxysulfur 𠮿
Figure 108139902-A0304-12-01
System photopolymerization initiator; 2,4,6-trichloro-s-tris, 2-phenyl-4,6-bis(trichloromethyl)-s-tris, 2-(p-methoxy (Phenyl)-4,6-bis(trichloromethyl)-s-tris, 2-(p-tolyl)-4,6-bis(trichloromethyl)-s-tris, 2-sunflower -4,6-bis(trichloromethyl)-s-tris, 2,4-bis(trichloromethyl)-6-styryl-s-tris, 2-(naphtho-1-yl )-4,6-bis(trichloromethyl)-s-tris, 2-(4-methoxy-naphth-1-yl)-4,6-bis(trichloromethyl)-s- Trichloromethyl, 2,4-trichloromethyl-(sunflower)-6-tris, 2,4-trichloromethyl-(4'-methoxystyryl)-6-tris, 2- [4-(4-Methoxystyryl)phenyl]-4,6-bis(trichloromethyl)-1,3,5-tris, and other three-based photopolymerization initiators; carbazole-based Photopolymerization initiator; 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetra(4-ethoxycarbonylphenyl)-1,2'-biimidazole, 2,2'-Bis(2-bromophenyl)-4,4',5,5'-tetra(4-ethoxycarbonylphenyl)-1,2'-biimidazole, 2,2'-bis (2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4 ',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-trichlorophenyl)-4,4',5,5'-tetraphenyl -1,2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4,5,5'-tetraphenyl-1,2'-biimidazole, 2,2'- Bis(2,4-dibromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-tribromobenzene Group) -4,4',5,5'-tetraphenyl-1,2'-biimidazole and other biimidazole-based photopolymerization initiators; benzimidazoline-based photopolymerization initiators represented by the following formula Wait. [化36]
Figure 02_image073

就容易獲得所期望之效果之方面而言,較佳為感光性樹脂組合物包含肟酯化合物、及/或α-胺酮系化合物作為光聚合起始劑(C-II),更佳為將肟酯化合物與α-胺酮系化合物組合而包含。In terms of easily obtaining the desired effect, the photosensitive resin composition preferably contains an oxime ester compound and/or an α-amine ketone compound as the photopolymerization initiator (C-II), and more preferably The oxime ester compound and the α-amine ketone compound are included in combination.

關於作為光聚合起始劑(C-II)之肟酯化合物,尤佳為下述式(C2)所表示之肟酯化合物。 [化37]

Figure 02_image075
Regarding the oxime ester compound as the photopolymerization initiator (C-II), the oxime ester compound represented by the following formula (C2) is particularly preferred. [化37]
Figure 02_image075

式(C2)中,Rc1 為一價有機基。Rc2 係下述式(C2-1)~(C2-3)之任一者所表示之基。Rc3 為氫原子、可具有取代基之碳原子數1以上11以下之烷基、或可具有取代基之芳基。 [化38]

Figure 02_image077
式(C2-1)中,Rc4 為選自由一價有機基、胺基、鹵素、硝基、及氰基所組成之群中之基。A為S或O。n2為0以上4以下之整數。 式(C2-2)中,Rc5 及Rc6 分別獨立為一價有機基。 式(C2-3)中,Rc7 為氫原子、硝基或一價有機基。Rc8 及Rc9 分別為可具有取代基之鏈狀烷基、可具有取代基之環狀有機基或氫原子。Rc8 與Rc9 亦可相互鍵結而形成環。n3為0以上4以下之整數。In formula (C2), R c1 is a monovalent organic group. R c2 is a group represented by any one of the following formulas (C2-1) to (C2-3). R c3 is a hydrogen atom, an optionally substituted alkyl group having 1 to 11 carbon atoms, or an optionally substituted aryl group. [化38]
Figure 02_image077
In the formula (C2-1), R c4 is a group selected from the group consisting of a monovalent organic group, an amine group, a halogen, a nitro group, and a cyano group. A is S or O. n2 is an integer of 0 or more and 4 or less. In formula (C2-2), R c5 and R c6 are each independently a monovalent organic group. In the formula (C2-3), R c7 is a hydrogen atom, a nitro group or a monovalent organic group. R c8 and R c9 are each a linear alkyl group which may have a substituent, a cyclic organic group which may have a substituent, or a hydrogen atom. R c8 and R c9 may be bonded to each other to form a ring. n3 is an integer of 0 or more and 4 or less.

作為式(C2)中之Rc1 之一價有機基與以上對式(C1)中之X02 及X03 所述之一價有機基相同。 作為Rc1 之一價有機基較佳為下述式(C2a)或(C2b)所表示之基。 [化39]

Figure 02_image079
The R c1 monovalent organic group in the formula (C2) is the same as the monovalent organic group described above for X 02 and X 03 in the formula (C1). The R c1 monovalent organic group is preferably a group represented by the following formula (C2a) or (C2b). [化39]
Figure 02_image079

式(C2a)及(C2b)中,Rc10 及Rc11 分別為一價有機基。n4為0以上4以下之整數。於Rc10 與Rc11 存在於苯環上之相鄰之位置之情形時,Rc10 與Rc11 亦可相互鍵結而形成環。n5為1以下8以下之整數。n6為1以上5以下之整數。n7為0以上(n6+3)以下之整數。Rc12 為一價有機基。In formulas (C2a) and (C2b), R c10 and R c11 are each a monovalent organic group. n4 is an integer of 0 or more and 4 or less. When R c10 and R c11 exist in adjacent positions on the benzene ring, R c10 and R c11 may also be bonded to each other to form a ring. n5 is an integer of 1 or less and 8 or less. n6 is an integer of 1 to 5. n7 is an integer of 0 or more (n6+3). R c12 is a monovalent organic group.

式(C2a)中之Rc10 、Rc11 、及n4分別與以上對式(C1)所述之式(C1a)中之X08 、X09 、及t6相同。式(C2b)中之Rc12 、n5、n6、及n7分別與以上對式(C1)所述之式(C1b)中之X010 、t7、t8、及t9相同。R c10 , R c11 , and n4 in formula (C2a) are the same as X 08 , X 09 , and t6 in formula (C1a) described in formula (C1) above, respectively. R c12 , n5, n6, and n7 in formula (C2b) are the same as X 010 , t7, t8 and t9 in formula (C1b) described in formula (C1) above, respectively.

以下,關於Rc2 ,分別對式(C2-1)所表示之基、式(C2-2)所表示之基、及式(C2-3)所表示之基進行說明。Hereinafter, regarding R c2 , the group represented by the formula (C2-1), the group represented by the formula (C2-2), and the group represented by the formula (C2-3) will be described respectively.

式(C2-1)所表示之基為下述結構之一價有機基。 [化40]

Figure 02_image081
The group represented by the formula (C2-1) is a monovalent organic group with the following structure. [化40]
Figure 02_image081

於式(C2-1)中之Rc4 為有機基之情形時,可於不妨礙本發明之目的之範圍內自各種有機基中進行選擇。作為於式(C2-1)中Rc4 為有機基之情形時之較佳之例,可列舉:碳原子數1以上6以下之烷基;碳原子數1以上6以下之烷氧基;碳原子數2以上7以下之飽和脂肪族醯基;碳原子數2以上7以下之烷氧基羰基;碳原子數2以上7以下之飽和脂肪族醯氧基;苯基;萘基;苯甲醯基;萘甲醯基;經選自由碳原子數1以上6以下之烷基、𠰌啉-1-基、哌𠯤-1-基、及苯基所組成之群中之基取代之苯甲醯基;具有碳原子數1以上6以下之烷基之單烷基胺基;具有碳原子數1以上6以下之烷基之二烷基胺基;𠰌啉-1-基;哌𠯤-1-基;鹵素;硝基;氰基。When R c4 in the formula (C2-1) is an organic group, it can be selected from various organic groups within a range that does not hinder the purpose of the present invention. As a preferable example when R c4 is an organic group in the formula (C2-1), an alkyl group having 1 to 6 carbon atoms; an alkoxy group having 1 to 6 carbon atoms; a carbon atom Saturated aliphatic acyl group with 2 to 7 and less than 7; alkoxycarbonyl group with 2 to 7 carbon atoms; saturated aliphatic acyloxy with 2 to 7 carbon atoms; phenyl group; naphthyl group; benzyl group ; Naphthyl; benzyl substituted with a group selected from the group consisting of alkyl having 1 to 6 carbon atoms, linolin-1-yl, piperid-1-yl, and phenyl ; A monoalkylamino group with an alkyl group having 1 to 6 carbon atoms; a dialkylamino group with an alkyl group having 1 to 6 carbon atoms; 𠰌line-1-yl; piper𠯤-1-yl ; Halogen; Nitro; Cyano.

Rc4 中,較佳為苯甲醯基;萘甲醯基;經選自由碳原子數1以上6以下之烷基、𠰌啉-1-基、哌𠯤-1-基、及苯基所組成之群中之基取代之苯甲醯基;硝基;更佳為苯甲醯基;萘甲醯基;2-甲基苯基羰基;4-(哌𠯤-1-基)苯基羰基;4-(苯基)苯基羰基。In R c4 , preferably benzyl; naphthyl; selected from alkyl groups with 1 to 6 carbon atoms, linolin-1-yl, piper-1-yl, and phenyl group Benzyl; nitro; more preferably benzyl; naphthyl; 2-methylphenylcarbonyl; 4-(piperid-1-yl)phenylcarbonyl; 4-(phenyl)phenylcarbonyl.

又,於式(C2-1)中,n2較佳為0以上3以下之整數,更佳為0以上2以下之整數,尤佳為0或1。於n2為1之情形時,Rc4 之鍵結之位置較佳為相對於Rc4 所鍵結之苯基與氧原子或硫原子鍵結之鍵結鍵為對位。Moreover, in the formula (C2-1), n2 is preferably an integer of 0 or more and 3 or less, more preferably an integer of 0 or more and 2 or less, and particularly preferably 0 or 1. In the case when n2 is 1, the position of bonding of R c4 is preferably bonded with respect to the R c4 phenyl group or a sulfur atom and an oxygen atom bonded to the bonding position for the key.

式(C2-2)所表示之基為下述結構之一價有機基。 [化41]

Figure 02_image083
The group represented by the formula (C2-2) is a monovalent organic group with the following structure. [化41]
Figure 02_image083

式(C2-2)中之Rc5 可於不妨礙本發明之目的之範圍內自各種有機基中進行選擇。作為Rc5 之較佳之例,可列舉:碳原子數1以上20以下之烷基、碳原子數3以上10以下之環烷基、碳原子數2以上20以下之飽和脂肪族醯基、碳原子數2以上20以下之烷氧基羰基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之碳原子數11以上20以下之萘基烷基、可具有取代基之雜環基、及可具有取代基之雜環基羰基等。R c5 in formula (C2-2) can be selected from various organic groups within a range that does not hinder the purpose of the present invention. Preferable examples of R c5 include: alkyl groups with 1 to 20 carbon atoms, cycloalkyls with 3 to 10 carbon atoms, saturated aliphatic acyl groups with 2 to 20 carbon atoms, and carbon atoms Alkoxycarbonyl groups having a number of 2 or more and 20 or less, a phenyl group that may have a substituent, a benzyl group that may have a substituent, a phenoxycarbonyl group that may have a substituent, and a carbon atom number of 7 or more that may have a substituent 20 The following phenylalkyl groups, naphthyl groups that may have substituents, naphthyl groups that may have substituents, naphthyloxycarbonyl groups that may have substituents, and naphthyl groups with 11 to 20 carbon atoms that may have substituents An alkyl group, a heterocyclic group which may have a substituent, a heterocyclic carbonyl group which may have a substituent, and the like.

Rc5 中,較佳為碳原子數1以上20以下之烷基,更佳為碳原子數1以上6以下之烷基,尤佳為乙基。In R c5 , an alkyl group having 1 to 20 carbon atoms is preferred, an alkyl group having 1 to 6 carbon atoms is more preferred, and an ethyl group is particularly preferred.

式(C2-2)中之Rc6 於不妨礙本發明之目的之範圍內並無特別限定,可自各種有機基中進行選擇。關於適宜作為Rc6 之基之具體例,可列舉:碳原子數1以上20以下之烷基、可具有取代基之苯基、可具有取代基之萘基、及可具有取代基之雜環基。作為Rc6 ,於該等基中,更佳為可具有取代基之苯基,尤佳為2-甲基苯基。R c6 in the formula (C2-2) is not particularly limited within a range that does not interfere with the purpose of the present invention, and can be selected from various organic groups. Specific examples of groups suitable as R c6 include: alkyl groups having 1 to 20 carbon atoms, phenyl groups which may have substituents, naphthyl groups which may have substituents, and heterocyclic groups which may have substituents . As R c6 , among these groups, a phenyl group which may have a substituent is more preferable, and a 2-methylphenyl group is particularly preferable.

作為Rc5 或Rc6 中所包含之苯基、萘基、及雜環基進而具有取代基之情形時之取代基,可列舉:碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基、碳原子數2以上7以下之飽和脂肪族醯基、碳原子數2以上7以下之烷氧基羰基、碳原子數2以上7以下之飽和脂肪族醯氧基、具有碳原子數1以上6以下之烷基之單烷基胺基、具有碳原子數1以上6以下之烷基之二烷基胺基、𠰌啉-1-基、哌𠯤-1-基、鹵素、硝基、及氰基等。於Rc5 或Rc6 中所包含之苯基、萘基、及雜環基進而具有取代基之情形時,其取代基之數量於不阻礙本發明之目的之範圍內並無限定,但較佳為1以上4以下。於Rc5 或Rc6 中所包含之苯基、萘基、及雜環基具有複數個取代基之情形時,複數個取代基可相同,亦可不同。Examples of the substituent when the phenyl, naphthyl, and heterocyclic group contained in R c5 or R c6 further have a substituent include: an alkyl group having 1 to 6 carbon atoms and 1 or more carbon atoms Alkoxy groups with 6 or less, saturated aliphatic acyl groups with 2 to 7 carbon atoms, alkoxycarbonyl groups with 2 to 7 carbon atoms, saturated aliphatic acyloxy groups with 2 to 7 carbon atoms, Monoalkylamino groups of alkyl groups with 1 to 6 carbon atoms, dialkylamino groups with alkyl groups with 1 to 6 carbon atoms, linolin-1-yl, piperidine-1-yl, halogen , Nitro, and cyano, etc. When the phenyl, naphthyl, and heterocyclic groups contained in R c5 or R c6 further have substituents, the number of substituents is not limited within a range that does not hinder the purpose of the present invention, but it is preferred It is 1 or more and 4 or less. When the phenyl group, naphthyl group, and heterocyclic group contained in R c5 or R c6 have a plurality of substituents, the plurality of substituents may be the same or different.

式(C2-3)所表示之基為下述結構之一價有機基。 [化42]

Figure 02_image085
The group represented by the formula (C2-3) is a monovalent organic group with the following structure. [化42]
Figure 02_image085

式(C2-3)中,Rc7 為氫原子、硝基或一價有機基。Rc8 及Rc9 分別為可具有取代基之鏈狀烷基、可具有取代基之環狀有機基、或氫原子。Rc8 與Rc9 亦可相互鍵結而形成環。n3為0以上4以下之整數。In the formula (C2-3), R c7 is a hydrogen atom, a nitro group or a monovalent organic group. R c8 and R c9 are each a linear alkyl group which may have a substituent, a cyclic organic group which may have a substituent, or a hydrogen atom. R c8 and R c9 may be bonded to each other to form a ring. n3 is an integer of 0 or more and 4 or less.

式(C2-3)中,Rc7 為氫原子、硝基或一價有機基。Rc7 於式(C2-3)中之茀環上鍵結於與和-(CO)n1 -所表示之基鍵結之六元芳香環不同之六元芳香環上。式(C2-3)中,Rc7 對茀環之鍵結位置並無特別限定。於式(C2-3)所表示之化合物具有1個以上之Rc7 之情形時,就容易合成式(C2-3)所表示之化合物之方面等而言,較佳為1個以上之Rc7 中之1個鍵結於茀環中之2位。於Rc7 為複數個之情形時,複數個Rc7 可相同,亦可不同。In the formula (C2-3), R c7 is a hydrogen atom, a nitro group or a monovalent organic group. R c7 is bonded to the six-membered aromatic ring different from the six-membered aromatic ring bonded to the group represented by -(CO) n1 -on the sulphur ring in the formula (C2-3). In the formula (C2-3), R c7 has no particular limitation on the bonding position of the chrysanthemum ring. When the compound represented by formula (C2-3) has one or more R c7 , in terms of easy synthesis of the compound represented by formula (C2-3), etc., preferably one or more R c7 One of the bonds is in the second position of the tea ring. When R c7 is plural, the plural R c7 may be the same or different.

於Rc7 為有機基之情形時,Rc7 於不阻礙本發明之目的之範圍內並無特別限定,自各種有機基中適當進行選擇。作為Rc7 為有機基之情形時之較佳之例,可列舉:烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、飽和脂肪族醯氧基、烷氧基羰基、可具有取代基之苯基、可具有取代基之苯氧基、可具有取代基之苯甲醯基、可具有取代基之苯氧基羰基、可具有取代基之苯甲醯氧基、可具有取代基之苯基烷基、可具有取代基之萘基、可具有取代基之萘氧基、可具有取代基之萘甲醯基、可具有取代基之萘氧基羰基、可具有取代基之萘甲醯氧基、可具有取代基之萘基烷基、可具有取代基之雜環基、可具有取代基之雜環基羰基、經1個或2個有機基取代之胺基、𠰌啉-1-基、及哌𠯤-1-基等。When R c7 is an organic group, R c7 is not particularly limited within a range that does not hinder the purpose of the present invention, and is appropriately selected from various organic groups. Preferable examples when R c7 is an organic group include: alkyl, alkoxy, cycloalkyl, cycloalkoxy, saturated aliphatic acyl group, saturated aliphatic acyloxy group, and alkoxycarbonyl group. , Phenyl which may have substituents, phenoxy which may have substituents, benzyloxy which may have substituents, phenoxycarbonyl which may have substituents, benzyloxy which may have substituents, A substituted phenylalkyl group, a substituted naphthyl group, a substituted naphthyloxy group, a substituted naphthyloxy group, a substituted naphthoxycarbonyl group, a substituted naphthyl group The naphthyloxy group, the naphthyl alkyl group that may have substituents, the heterocyclic group that may have substituents, the heterocyclic carbonyl group that may have substituents, the amino group substituted by 1 or 2 organic groups, 𠰌 Lin-1-yl, piper-1-yl, etc.

於Rc7 為烷基之情形時,烷基之碳原子數較佳為1以上20以下,更佳為1以上6以下。又,於Rc7 為烷基之情形時,可為直鏈,亦可為支鏈。作為Rc7 為烷基之情形時之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基、及異癸基等。又,於Rc7 為烷基之情形時,烷基亦可於碳鏈中包含醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷基之例,可列舉:甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧基乙基、及甲氧基丙基等。When R c7 is an alkyl group, the number of carbon atoms of the alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 6 or less. In addition, when R c7 is an alkyl group, it may be a straight chain or a branched chain. Specific examples when R c7 is an alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, second butyl, tertiary butyl, n-pentyl Base, isopentyl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-nonyl, isononyl, n Decyl, and isodecyl, etc. In addition, when R c7 is an alkyl group, the alkyl group may include an ether bond (-O-) in the carbon chain. Examples of alkyl groups having ether bonds in the carbon chain include: methoxyethyl, ethoxyethyl, methoxyethoxyethyl, ethoxyethoxyethyl, and propoxy Ethoxyethyl, and methoxypropyl, etc.

於Rc7 為烷氧基之情形時,烷氧基之碳原子數較佳為1以上20以下,更佳為1以上6以下。又,於Rc7 為烷氧基之情形時,可為直鏈,亦可為支鏈。作為Rc7 為烷氧基之情形時之具體例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第二丁氧基、第三丁氧基、正戊氧基、異戊氧基、第二戊氧基、第三戊氧基、正己氧基、正庚氧基、正辛氧基、異辛氧基、第二辛氧基、第三辛氧基、正壬氧基、異壬氧基、正癸氧基、及異癸氧基等。又,於Rc7 為烷氧基之情形時,烷氧基亦可於碳鏈中包含醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷氧基之例,可列舉:甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙氧基乙氧基乙氧基、及甲氧基丙氧基等。When R c7 is an alkoxy group, the number of carbon atoms of the alkoxy group is preferably 1 or more and 20 or less, and more preferably 1 or more and 6 or less. In addition, when R c7 is an alkoxy group, it may be linear or branched. Specific examples when R c7 is an alkoxy group include: methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, and second butoxy , Tertiary butoxy, n-pentyloxy, isopentyloxy, second pentyloxy, third pentyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, isooctyloxy, second Octyloxy, tertiary octyloxy, n-nonyloxy, isononyloxy, n-decyloxy, and isodecyloxy, etc. In addition, when R c7 is an alkoxy group, the alkoxy group may include an ether bond (-O-) in the carbon chain. Examples of alkoxy groups having ether bonds in the carbon chain include: methoxyethoxy, ethoxyethoxy, methoxyethoxyethoxy, and ethoxyethoxyethoxy Group, propoxyethoxyethoxy, and methoxypropoxy, etc.

於Rc7 為環烷基或環烷氧基之情形時,環烷基或環烷氧基之碳原子數較佳為3以上10以下,更佳為3以上6以下。作為Rc7 為環烷基之情形時之具體例,可列舉:環丙基、環丁基、環戊基、環己基、環庚基、及環辛基等。作為Rc7 為環烷氧基之情形時之具體例,可列舉:環丙氧基、環丁氧基、環戊氧基、環己氧基、環庚氧基、及環辛氧基等。When R c7 is a cycloalkyl group or a cycloalkoxy group, the number of carbon atoms of the cycloalkyl group or a cycloalkoxy group is preferably 3 or more and 10 or less, more preferably 3 or more and 6 or less. Specific examples when R c7 is a cycloalkyl group include cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Specific examples when R c7 is a cycloalkoxy group include cyclopropoxy, cyclobutoxy, cyclopentyloxy, cyclohexyloxy, cycloheptyloxy, and cyclooctyloxy.

於Rc7 為飽和脂肪族醯基或飽和脂肪族醯氧基之情形時,飽和脂肪族醯基或飽和脂肪族醯氧基之碳原子數較佳為2以上21以下,更佳為2以上7以下。作為Rc7 為飽和脂肪族醯基之情形時之具體例,可列舉:乙醯基、丙醯基、正丁醯基、2-甲基丙醯基、正戊醯基、2,2-二甲基丙醯基、正己醯基、正庚醯基、正辛醯基、正壬醯氧基、正癸醯基、正十一碳醯基、正十二碳醯基、正十三碳醯基、正十四碳醯基、正十五碳醯基、及正十六碳醯基等。作為Rc7 為飽和脂肪族醯氧基之情形時之具體例,可列舉:乙醯氧基、乙醯氧基、正丁醯氧基、2-甲基乙醯氧基、正戊醯氧基、2,2-二甲基乙醯氧基、正己醯氧基、正庚醯氧基、正辛醯氧基、正壬醯氧基、正癸醯氧基、正十一碳醯氧基、正十二碳醯氧基、正十三碳醯氧基、正十四碳醯氧基、正十五碳醯氧基、及正十六碳醯氧基等。When R c7 is a saturated aliphatic acyl group or a saturated aliphatic acyloxy group, the number of carbon atoms of the saturated aliphatic acyl group or saturated aliphatic acyloxy group is preferably from 2 to 21, more preferably from 2 to 7 the following. Specific examples when R c7 is a saturated aliphatic aliphatic group include: acetyl group, propionyl group, n-butyryl group, 2-methylpropionyl group, n-pentanyl group, 2,2-dimethyl Propyl, n-hexyl, n-heptanyl, n-octyl, n-nonanyloxy, n-decanoyl, n-undecanoyl, n-dodecanoyl, n-tridecanoyl, n-decyl Four-carbon acyl group, pentadecyl acyl group, and hexadecyl acyl group, etc. Specific examples of the case where R c7 is a saturated aliphatic oxy group include: acetoxy group, acetoxy group, n-butoxy group, 2-methyl acetoxy group, n-pentoxy group , 2,2-Dimethylacetoxy, n-hexyloxy, n-heptyloxy, n-octyloxy, n-nonyloxy, n-decanoyloxy, n-undecanoyloxy, N-dodecanoyloxy, n-tridecanoyloxy, n-tetradecanoyloxy, n-pentadecanoyloxy, and n-hexadecanoyloxy.

於Rc7 為烷氧基羰基之情形時,烷氧基羰基之碳原子數較佳為2以上20以下,更佳為2以上7以下。作為Rc7 為烷氧基羰基之情形時之具體例,可列舉:甲氧基羰基、乙氧基羰基、正丙氧基羰基、異丙氧基羰基、正丁氧基羰基、異丁氧基羰基、第二丁氧基羰基、第三丁氧基羰基、正戊氧基羰基、異戊氧基羰基、第二戊氧基羰基、第三戊氧基羰基、正己氧基羰基、正庚氧基羰基、正辛氧基羰基、異辛氧基羰基、第二辛氧基羰基、第三辛氧基羰基、正壬氧基羰基、異壬氧基羰基、正癸氧基羰基、及異癸氧基羰基等。When R c7 is an alkoxycarbonyl group, the number of carbon atoms of the alkoxycarbonyl group is preferably 2 or more and 20 or less, more preferably 2 or more and 7 or less. Specific examples when R c7 is an alkoxycarbonyl group include: methoxycarbonyl, ethoxycarbonyl, n-propoxycarbonyl, isopropoxycarbonyl, n-butoxycarbonyl, and isobutoxy Carbonyl, second butoxycarbonyl, third butoxycarbonyl, n-pentoxycarbonyl, isopentoxycarbonyl, second pentoxycarbonyl, third pentoxycarbonyl, n-hexoxycarbonyl, n-heptoxy Carbonyl, n-octyloxycarbonyl, isooctyloxycarbonyl, second octyloxycarbonyl, third octyloxycarbonyl, n-nonyloxycarbonyl, isononyloxycarbonyl, n-decyloxycarbonyl, and isodecyl Oxycarbonyl and so on.

於Rc7 為苯基烷基之情形時,苯基烷基之碳原子數較佳為7以上20以下,更佳為7以上10以下。又,於Rc7 為萘基烷基之情形時,萘基烷基之碳原子數較佳為11以上20以下,更佳為11以上14以下。作為Rc7 為苯基烷基之情形時之具體例,可列舉:苄基、2-苯基乙基、3-苯基丙基、及4-苯基丁基。作為Rc7 為萘基烷基之情形時之具體例,可列舉:α-萘基甲基、β-萘基甲基、2-(α-萘基)乙基、及2-(β-萘基)乙基。於Rc7 為苯基烷基或萘基烷基之情形時,Rc7 亦可進而於苯基或萘基上具有取代基。When R c7 is a phenylalkyl group, the number of carbon atoms of the phenylalkyl group is preferably 7 or more and 20 or less, more preferably 7 or more and 10 or less. Furthermore , when R c7 is a naphthylalkyl group, the number of carbon atoms of the naphthylalkyl group is preferably 11 or more and 20 or less, more preferably 11 or more and 14 or less. Specific examples when R c7 is a phenylalkyl group include benzyl, 2-phenylethyl, 3-phenylpropyl, and 4-phenylbutyl. Specific examples when R c7 is naphthylalkyl include α-naphthylmethyl, β-naphthylmethyl, 2-(α-naphthyl)ethyl, and 2-(β-naphthalene基)ethyl. When R c7 is phenylalkyl or naphthylalkyl, R c7 may further have a substituent on the phenyl or naphthyl group.

於Rc7 為雜環基之情形時,雜環基為包含1個以上之N、S、O之五元或六元單環、或者該單環彼此或該單環與苯環縮合而成之雜環基。於雜環基為縮合環之情形時,環數至多為3。雜環基可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可列舉:呋喃、噻吩、吡咯、㗁唑、異㗁唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡𠯤、嘧啶、嗒𠯤、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲哚𠯤、苯并咪唑、苯并三唑、苯并㗁唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、酞𠯤、㖕啉、喹㗁啉、哌啶、哌𠯤、𠰌啉、哌啶、四氫吡喃、及四氫呋喃等。於Rc7 為雜環基之情形時,雜環基亦可進而具有取代基。When R c7 is a heterocyclic group, the heterocyclic group is a five-membered or six-membered monocyclic ring containing more than one N, S, O, or a condensation of the monocyclic rings or the monocyclic ring with a benzene ring Heterocyclic group. When the heterocyclic group is a condensed ring, the number of rings is 3 at most. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isooxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridine, pyrimidine, Da, benzofuran, benzothiophene, indole, isoindole, indole, benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, purine, quinoline, isoquine Phytoline, quinazoline, phthaloline, quinazoline, quinoline, piperidine, piperidine, quinoline, piperidine, tetrahydropyran, and tetrahydrofuran, etc. When R c7 is a heterocyclic group, the heterocyclic group may further have a substituent.

於Rc7 為雜環基羰基之情形時,雜環基羰基中所包含之雜環基與Rc7 為雜環基之情形相同。When R c7 is a heterocyclic carbonyl group, the heterocyclic group contained in the heterocyclic carbonyl group is the same as the case where R c7 is a heterocyclic group.

於Rc7 為經1個或2個有機基取代之胺基之情形時,有機基之較佳之例可列舉:碳原子數1以上20以下之烷基、碳原子數3以上10以下之環烷基、碳原子數2以上21以下之飽和脂肪族醯基、可具有取代基之苯基、可具有取代基之苯甲醯基、可具有取代基之碳原子數7以上20以下之苯基烷基、可具有取代基之萘基、可具有取代基之萘甲醯基、可具有取代基之碳原子數11以上20以下之萘基烷基、及雜環基等。該等較佳之有機基之具體例與Rc7 相同。作為經1個或2個有機基取代之胺基之具體例,可列舉:甲基胺基、乙基胺基、二乙基胺基、正丙基胺基、二-正丙基胺基、異丙基胺基、正丁基胺基、二-正丁基胺基、正戊基胺基、正己基胺基、正庚基胺基、正辛基胺基、正壬基胺基、正癸基胺基、苯基胺基、萘基胺基、乙醯基胺基、丙醯基胺基、正丁醯基胺基、正戊醯基胺基、正己醯基胺基、正庚醯基胺基、正辛醯基胺基、正癸醯基胺基、苯甲醯基胺基、α-萘甲醯基胺基、及β-萘甲醯基胺基等。When R c7 is an amine group substituted with one or two organic groups, preferable examples of the organic group include: alkyl groups with 1 to 20 carbon atoms, and cycloalkanes with 3 to 10 carbon atoms. Groups, saturated aliphatic acyl groups with 2 to 21 carbon atoms, phenyl groups that may have substituents, benzoyl groups that may have substituents, phenylalkanes with 7 to 20 carbon atoms that may have substituents Group, optionally substituted naphthyl group, optionally substituted naphthylmethyl group, optionally substituted naphthylalkyl group having 11 to 20 carbon atoms, heterocyclic group, etc. The specific examples of these preferable organic groups are the same as R c7 . Specific examples of the amino group substituted with one or two organic groups include: methylamino, ethylamino, diethylamino, n-propylamino, di-n-propylamino, Isopropylamino, n-butylamino, di-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-nonylamino, n- Decylamino, phenylamino, naphthylamino, acetylamino, propionylamino, n-butyrylamino, n-pentylamino, n-hexylamino, n-heptanylamine Group, n-octylamino group, n-decanoylamino group, benzylamino group, α-naphthoylamino group, β-naphthoylamino group, etc.

作為Rc7 中所包含之苯基、萘基、及雜環基進而具有取代基之情形時之取代基,可列舉:碳原子數1以上6以下之烷基、碳原子數1以上6以下之烷氧基、碳原子數2以上7以下之飽和脂肪族醯基、碳原子數2以上7以下之烷氧基羰基、碳原子數2以上7以下之飽和脂肪族醯氧基、具有碳原子數1以上6以下之烷基之單烷基胺基、具有碳原子數1以上6以下之烷基之二烷基胺基、𠰌啉-1-基、哌𠯤-1-基、鹵素、硝基、及氰基等。於Rc7 中所包含之苯基、萘基、及雜環基進而具有取代基之情形時,其取代基之數量於不妨礙本發明之目的之範圍內並無限定,但較佳為1以上4以下。於Rc7 中所包含之苯基、萘基、及雜環基具有複數個取代基之情形時,複數個取代基可相同,亦可不同。Examples of the substituent when the phenyl, naphthyl, and heterocyclic group contained in R c7 further have a substituent include: an alkyl group having 1 to 6 carbon atoms, and an alkyl group having 1 to 6 carbon atoms Alkoxy groups, saturated aliphatic acyl groups with 2 to 7 carbon atoms, alkoxycarbonyl groups with 2 to 7 carbon atoms, saturated aliphatic oxy groups with 2 to 7 carbon atoms, and carbon atoms A monoalkylamino group of an alkyl group of 1 to 6 or less, a dialkylamino group of an alkyl group of 1 to 6 carbon atoms, linolin-1-yl, piperidine-1-yl, halogen, nitro , And cyano etc. When the phenyl, naphthyl, and heterocyclic groups contained in R c7 further have substituents, the number of substituents is not limited within a range that does not interfere with the purpose of the present invention, but it is preferably 1 or more 4 or less. When the phenyl group, the naphthyl group, and the heterocyclic group contained in R c7 have a plurality of substituents, the plurality of substituents may be the same or different.

以上所說明之基中,作為Rc7 ,若為由硝基或Rc12 -CO-所表示之基,則有感度提高之傾向。Rc12 於不妨礙本發明之目的之範圍內並無特別限定,可自各種有機基中進行選擇。關於適宜作為Rc12 之基之例,可列舉:碳原子數1以上20以下之烷基、可具有取代基之苯基、可具有取代基之萘基、及可具有取代基之雜環基。作為Rc12 ,於該等基中,尤佳為2-甲基苯基、噻吩-2-基、及α-萘基。Among the groups described above, if R c7 is a group represented by a nitro group or R c12 -CO-, the sensitivity tends to increase. R c12 is not particularly limited within a range that does not interfere with the purpose of the present invention, and it can be selected from various organic groups. Examples of groups suitable as R c12 include alkyl groups having 1 to 20 carbon atoms, phenyl groups which may have substituents, naphthyl groups which may have substituents, and heterocyclic groups which may have substituents. As R c12 , among these groups, 2-methylphenyl, thiophen-2-yl, and α-naphthyl are particularly preferred.

式(C2-3)中,Rc8 及Rc9 分別為可具有取代基之鏈狀烷基、可具有取代基之環狀有機基、或氫原子。Rc8 與Rc9 亦可相互鍵結而形成環。該等基中,作為Rc8 及Rc9 ,較佳為可具有取代基之鏈狀烷基。於Rc8 及Rc9 為可具有取代基之鏈狀烷基之情形時,鏈狀烷基可為直鏈烷基,亦可為支鏈烷基。In the formula (C2-3), R c8 and R c9 are each a linear alkyl group which may have a substituent, a cyclic organic group which may have a substituent, or a hydrogen atom. R c8 and R c9 may be bonded to each other to form a ring. Among these groups, R c8 and R c9 are preferably a chain alkyl group which may have a substituent. When R c8 and R c9 are a chain alkyl group which may have a substituent, the chain alkyl group may be a straight chain alkyl group or a branched chain alkyl group.

於Rc8 及Rc9 為不具有取代基之鏈狀烷基之情形時,鏈狀烷基之碳原子數較佳為1以上20以下,更佳為1以上10以下,尤佳為1以上6以下。作為Rc8 及Rc9 為鏈狀烷基之情形時之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、異戊基、第二戊基、第三戊基、正己基、正庚基、正辛基、異辛基、第二辛基、第三辛基、正壬基、異壬基、正癸基、及異癸基等。又,於Rc8 及Rc9 為烷基之情形時,烷基亦可於碳鏈中包含醚鍵(-O-)。作為於碳鏈中具有醚鍵之烷基之例,可列舉:甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧基乙基、及甲氧基丙基等。When R c8 and R c9 are chain alkyl groups without substituents, the number of carbon atoms of the chain alkyl group is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less, and particularly preferably 1 or more and 6 the following. Specific examples when R c8 and R c9 are chain alkyl groups include: methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, second butyl, and third Butyl, n-pentyl, isopentyl, second pentyl, third pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, second octyl, third octyl, n-nonyl, Isononyl, n-decyl, and isodecyl, etc. In addition, when R c8 and R c9 are an alkyl group, the alkyl group may include an ether bond (-O-) in the carbon chain. Examples of alkyl groups having ether bonds in the carbon chain include: methoxyethyl, ethoxyethyl, methoxyethoxyethyl, ethoxyethoxyethyl, and propoxy Ethoxyethyl, and methoxypropyl, etc.

於Rc8 及Rc9 為具有取代基之鏈狀烷基之情形時,鏈狀烷基之碳原子數較佳為1以上20以下,更佳為1以上10以下,尤佳為1以上6以下。於該情形時,取代基之碳原子數不包含於鏈狀烷基之碳原子數。具有取代基之鏈狀烷基較佳為直鏈狀。 烷基可具有之取代基於不妨礙本發明之目的之範圍內並無特別限定。作為取代基之較佳之例,可列舉:氰基、鹵素原子、環狀有機基、及烷氧基羰基。作為鹵素原子,可列舉:氟原子、氯原子、溴原子、碘原子。該等之中,較佳為氟原子、氯原子、溴原子。作為環狀有機基,可列舉:環烷基、芳香族烴基、雜環基。作為環烷基之具體例,與Rc7 為環烷基之情形時之較佳之例相同。作為芳香族烴基之具體例,可列舉:苯基、萘基、聯苯基、蒽基、及菲基等。作為雜環基之具體例,與Rc7 為雜環基之情形時之較佳之例相同。於取代基為烷氧基羰基之情形時,烷氧基羰基中所包含之烷氧基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。烷氧基羰基中所包含之烷氧基之碳原子數較佳為1以上10以下,更佳為1以上6以下。When R c8 and R c9 are chain alkyl groups with substituents, the number of carbon atoms of the chain alkyl group is preferably from 1 to 20, more preferably from 1 to 10, and particularly preferably from 1 to 6 . In this case, the number of carbon atoms of the substituent is not included in the number of carbon atoms of the chain alkyl group. The chain alkyl group having a substituent is preferably linear. The substitution that the alkyl group may have is not particularly limited as long as it does not interfere with the purpose of the present invention. Preferred examples of the substituent include a cyano group, a halogen atom, a cyclic organic group, and an alkoxycarbonyl group. Examples of halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms. Among these, a fluorine atom, a chlorine atom, and a bromine atom are preferable. Examples of the cyclic organic group include cycloalkyl groups, aromatic hydrocarbon groups, and heterocyclic groups. The specific examples of the cycloalkyl group are the same as the preferred examples when R c7 is a cycloalkyl group. Specific examples of aromatic hydrocarbon groups include phenyl, naphthyl, biphenyl, anthracenyl, and phenanthryl. The specific examples of the heterocyclic group are the same as the preferable examples when R c7 is a heterocyclic group. When the substituent is an alkoxycarbonyl group, the alkoxy group contained in the alkoxycarbonyl group may be linear or branched, and is preferably linear. The number of carbon atoms of the alkoxy group contained in the alkoxycarbonyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less.

於鏈狀烷基具有取代基之情形時,取代基之數量並無特別限定。較佳之取代基之數量根據鏈狀烷基之碳原子數而改變。取代基之數量典型為1以上20以下,較佳為1以上10以下,更佳為1以上6以下。When the chain alkyl group has a substituent, the number of substituents is not particularly limited. The number of preferred substituents varies according to the number of carbon atoms of the chain alkyl group. The number of substituents is typically 1 or more and 20 or less, preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less.

於Rc8 及Rc9 為環狀有機基之情形時,環狀有機基可為脂環式基,亦可為芳香族基。作為環狀有機基,可列舉:脂肪族環狀烴基、芳香族烴基、雜環基。於Rc8 及Rc9 為環狀有機基之情形時,環狀有機基可具有之取代基與Rc8 及Rc9 為鏈狀烷基之情形相同。When R c8 and R c9 are cyclic organic groups, the cyclic organic group may be an alicyclic group or an aromatic group. Examples of the cyclic organic group include an aliphatic cyclic hydrocarbon group, an aromatic hydrocarbon group, and a heterocyclic group. When R c8 and R c9 are cyclic organic groups, the substituents that the cyclic organic group may have are the same as when R c8 and R c9 are chain alkyl groups.

於Rc8 及Rc9 為芳香族烴基之情形時,芳香族烴基較佳為苯基、或複數個苯環經由碳-碳鍵鍵結而形成之基、或複數個苯環縮合而形成之基。於芳香族烴基為苯基、或複數個苯環鍵結或縮合而形成之基之情形時,芳香族烴基中所包含之苯環之環數並無特別限定,較佳為3以下,更佳為2以下,尤佳為1。作為芳香族烴基之較佳之具體例,可列舉:苯基、萘基、聯苯基、蒽基、及菲基等。When R c8 and R c9 are aromatic hydrocarbon groups, the aromatic hydrocarbon group is preferably a phenyl group, or a group formed by bonding multiple benzene rings via carbon-carbon bonds, or a group formed by condensation of multiple benzene rings . When the aromatic hydrocarbon group is a phenyl group or a group formed by bonding or condensation of a plurality of benzene rings, the number of benzene rings contained in the aromatic hydrocarbon group is not particularly limited, and it is preferably 3 or less, more preferably It is 2 or less, particularly preferably 1. Preferable specific examples of the aromatic hydrocarbon group include phenyl, naphthyl, biphenyl, anthracenyl, and phenanthryl.

於Rc8 及Rc9 為脂肪族環狀烴基之情形時,脂肪族環狀烴基可為單環式,亦可為多環式。脂肪族環狀烴基之碳原子數並無特別限定,但較佳為3以上20以下,更佳為3以上10以下。作為單環式之環狀烴基之例,可列舉:環丙基、環丁基、環戊基、環己基、環庚基、環辛基、降𦯉基、異𦯉基、三環壬基、三環癸基、四環十二烷基、及金剛烷基等。When R c8 and R c9 are an aliphatic cyclic hydrocarbon group, the aliphatic cyclic hydrocarbon group may be monocyclic or polycyclic. The number of carbon atoms of the aliphatic cyclic hydrocarbon group is not particularly limited, but it is preferably 3 or more and 20 or less, and more preferably 3 or more and 10 or less. Examples of monocyclic cyclic hydrocarbon groups include: cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, nordoxyl, isooxyl, tricyclononyl, Tricyclodecyl, tetracyclododecyl, adamantyl, etc.

於Rc8 及Rc9 為雜環基之情形時,雜環基為包含1個以上之N、S、O之五元或六元單環、或者該單環彼此或該單環與苯環縮合而成之雜環基。於雜環基為縮合環之情形時,環數至多為3。雜環基可為芳香族基(雜芳基),亦可為非芳香族基。作為構成該雜環基之雜環,可列舉:呋喃、噻吩、吡咯、㗁唑、異㗁唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡𠯤、嘧啶、嗒𠯤、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲哚𠯤、苯并咪唑、苯并三唑、苯并㗁唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、酞𠯤、㖕啉、喹㗁啉、哌啶、哌𠯤、𠰌啉、哌啶、四氫吡喃、及四氫呋喃等。When R c8 and R c9 are heterocyclic groups, the heterocyclic group is a five-membered or six-membered monocyclic ring containing more than one N, S, O, or the monocyclic rings are condensed with each other or the monocyclic ring and benzene ring From the heterocyclic group. When the heterocyclic group is a condensed ring, the number of rings is 3 at most. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. Examples of the heterocyclic ring constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isooxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridine, pyrimidine, Da, benzofuran, benzothiophene, indole, isoindole, indole, benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, purine, quinoline, isoquine Phytoline, quinazoline, phthaloline, quinazoline, quinoline, piperidine, piperidine, quinoline, piperidine, tetrahydropyran, and tetrahydrofuran, etc.

Rc8 與Rc9 亦可相互鍵結而形成環。包含Rc8 與Rc9 所形成之環之基較佳為亞環烷基。於Rc8 與Rc9 鍵結而形成亞環烷基之情形時,構成亞環烷基之環較佳為五元環~六元環,更佳為五元環。R c8 and R c9 may be bonded to each other to form a ring. The group including the ring formed by R c8 and R c9 is preferably a cycloalkylene group. When R c8 and R c9 are bonded to form a cycloalkylene group, the ring constituting the cycloalkylene group is preferably a five-membered ring to a six-membered ring, and more preferably a five-membered ring.

於Rc8 與Rc9 鍵結而形成之基為亞環烷基之情形時,亞環烷基亦可與1個以上之其他環縮合。作為可與亞環烷基縮合之環之例,可列舉:苯環、萘環、環丁烷環、環戊烷環、環己烷環、環庚烷環、環辛烷環、呋喃環、噻吩環、吡咯環、吡啶環、吡𠯤環、及嘧啶環等。When the group formed by the bonding of R c8 and R c9 is a cycloalkylene group, the cycloalkylene group may be condensed with one or more other rings. Examples of the ring that can be condensed with the cycloalkylene ring include benzene ring, naphthalene ring, cyclobutane ring, cyclopentane ring, cyclohexane ring, cycloheptane ring, cyclooctane ring, furan ring, Thiophene ring, pyrrole ring, pyridine ring, pyridine ring, and pyrimidine ring, etc.

以上所說明之Rc8 及Rc9 中,作為較佳之基之例,可列舉式-A01 -A02 所表示之基。式中,A01 為直鏈伸烷基,A02 可列舉:烷氧基、氰基、鹵素原子、鹵化烷基、環狀有機基、或烷氧基羰基。Among R c8 and R c9 described above, examples of preferable groups include groups represented by the formula -A 01 -A 02 . In the formula, A 01 is a linear alkylene group, and A 02 can be exemplified by an alkoxy group, a cyano group, a halogen atom, a halogenated alkyl group, a cyclic organic group, or an alkoxycarbonyl group.

A01 之直鏈伸烷基之碳原子數較佳為1以上10以下,更佳為1以上6以下。於A02 為烷氧基之情形時,烷氧基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。烷氧基之碳原子數較佳為1以上10以下,更佳為1以上6以下。於A02 為鹵素原子之情形時,較佳為氟原子、氯原子、溴原子、碘原子,更佳為氟原子、氯原子、溴原子。於A02 為鹵化烷基之情形時,鹵化烷基中所包含之鹵素原子較佳為氟原子、氯原子、溴原子、碘原子,更佳為氟原子、氯原子、溴原子。鹵化烷基可為直鏈狀,亦可為支鏈狀,較佳為直鏈狀。於A02 為環狀有機基之情形時,環狀有機基之例與Rc8 及Rc9 之作為取代基而具有之環狀有機基相同。於A02 為烷氧基羰基之情形時,烷氧基羰基之例與Rc8 及Rc9 之作為取代基而具有之烷氧基羰基相同。The number of carbon atoms of the linear alkylene group of A 01 is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less. When A 02 is an alkoxy group, the alkoxy group may be linear or branched, preferably linear. The number of carbon atoms of the alkoxy group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less. When A 02 is a halogen atom, it is preferably a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom, and more preferably a fluorine atom, a chlorine atom, or a bromine atom. When A 02 is a halogenated alkyl group, the halogen atom contained in the halogenated alkyl group is preferably a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom, and more preferably a fluorine atom, a chlorine atom, or a bromine atom. The halogenated alkyl group may be linear or branched, and is preferably linear. When A 02 is a cyclic organic group, examples of the cyclic organic group are the same as the cyclic organic groups that R c8 and R c9 have as substituents. When A 02 is an alkoxycarbonyl group, examples of the alkoxycarbonyl group are the same as the alkoxycarbonyl group that R c8 and R c9 have as substituents.

作為Rc8 及Rc9 之較佳之具體例,可列舉:乙基、正丙基、正丁基、正己基、正庚基、及正辛基等烷基;2-甲氧基乙基、3-甲氧基-正丙基、4-甲氧基-正丁基、5-甲氧基-正戊基、6-甲氧基-正己基、7-甲氧基-正庚基、8-甲氧基-正辛基、2-乙氧基乙基、3-乙氧基-正丙基、4-乙氧基-正丁基、5-乙氧基-正戊基、6-乙氧基-正己基、7-乙氧基-正庚基、及8-乙氧基-正辛基等烷氧基烷基;2-氰基乙基、3-氰基-正丙基、4-氰基-正丁基、5-氰基-正戊基、6-氰基-正己基、7-氰基-正庚基、及8-氰基-正辛基等氰基烷基;2-苯基乙基、3-苯基-正丙基、4-苯基-正丁基、5-苯基-正戊基、6-苯基-正己基、7-苯基-正庚基、及8-苯基-正辛基等苯基烷基;2-環己基乙基、3-環己基-正丙基、4-環己基-正丁基、5-環己基-正戊基、6-環己基-正己基、7-環己基-正庚基、8-環己基-正辛基、2-環戊基乙基、3-環戊基-正丙基、4-環戊基-正丁基、5-環戊基-正戊基、6-環戊基-正己基、7-環戊基-正庚基、及8-環戊基-正辛基等環烷基烷基;2-甲氧基羰基乙基、3-甲氧基羰基-正丙基、4-甲氧基羰基-正丁基、5-甲氧基羰基-正戊基、6-甲氧基羰基-正己基、7-甲氧基羰基-正庚基、8-甲氧基羰基-正辛基、2-乙氧基羰基乙基、3-乙氧基羰基-正丙基、4-乙氧基羰基-正丁基、5-乙氧基羰基-正戊基、6-乙氧基羰基-正己基、7-乙氧基羰基-正庚基、及8-乙氧基羰基-正辛基等烷氧基羰基烷基;2-氯乙基、3-氯-正丙基、4-氯-正丁基、5-氯-正戊基、6-氯-正己基、7-氯-正庚基、8-氯-正辛基、2-溴乙基、3-溴-正丙基、4-溴-正丁基、5-溴-正戊基、6-溴-正己基、7-溴-正庚基、8-溴-正辛基、3,3,3-三氟丙基、及3,3,4,4,5,5,5-七氟-正戊基等鹵化烷基。Preferred specific examples of R c8 and R c9 include alkyl groups such as ethyl, n-propyl, n-butyl, n-hexyl, n-heptyl, and n-octyl; 2-methoxyethyl, 3 -Methoxy-n-propyl, 4-methoxy-n-butyl, 5-methoxy-n-pentyl, 6-methoxy-n-hexyl, 7-methoxy-n-heptyl, 8- Methoxy-n-octyl, 2-ethoxyethyl, 3-ethoxy-n-propyl, 4-ethoxy-n-butyl, 5-ethoxy-n-pentyl, 6-ethoxy Alkyl-n-hexyl, 7-ethoxy-n-heptyl, and 8-ethoxy-n-octyl and other alkoxyalkyl groups; 2-cyanoethyl, 3-cyano-n-propyl, 4- Cyanoalkyl groups such as cyano-n-butyl, 5-cyano-n-pentyl, 6-cyano-n-hexyl, 7-cyano-n-heptyl, and 8-cyano-n-octyl; 2- Phenylethyl, 3-phenyl-n-propyl, 4-phenyl-n-butyl, 5-phenyl-n-pentyl, 6-phenyl-n-hexyl, 7-phenyl-n-heptyl, and Phenylalkyl such as 8-phenyl-n-octyl; 2-cyclohexylethyl, 3-cyclohexyl-n-propyl, 4-cyclohexyl-n-butyl, 5-cyclohexyl-n-pentyl, 6- Cyclohexyl-n-hexyl, 7-cyclohexyl-n-heptyl, 8-cyclohexyl-n-octyl, 2-cyclopentylethyl, 3-cyclopentyl-n-propyl, 4-cyclopentyl-n-butyl Cycloalkylalkyl groups such as 5-cyclopentyl-n-pentyl, 6-cyclopentyl-n-hexyl, 7-cyclopentyl-n-heptyl, and 8-cyclopentyl-n-octyl; 2- Methoxycarbonylethyl, 3-methoxycarbonyl-n-propyl, 4-methoxycarbonyl-n-butyl, 5-methoxycarbonyl-n-pentyl, 6-methoxycarbonyl-n-hexyl, 7-Methoxycarbonyl-n-heptyl, 8-methoxycarbonyl-n-octyl, 2-ethoxycarbonylethyl, 3-ethoxycarbonyl-n-propyl, 4-ethoxycarbonyl-n Alkoxy groups such as butyl, 5-ethoxycarbonyl-n-pentyl, 6-ethoxycarbonyl-n-hexyl, 7-ethoxycarbonyl-n-heptyl, and 8-ethoxycarbonyl-n-octyl Carbonyl alkyl; 2-chloroethyl, 3-chloro-n-propyl, 4-chloro-n-butyl, 5-chloro-n-pentyl, 6-chloro-n-hexyl, 7-chloro-n-heptyl, 8 -Chloro-n-octyl, 2-bromoethyl, 3-bromo-n-propyl, 4-bromo-n-butyl, 5-bromo-n-pentyl, 6-bromo-n-hexyl, 7-bromo-n-heptyl Alkyl, 8-bromo-n-octyl, 3,3,3-trifluoropropyl, and 3,3,4,4,5,5,5-heptafluoro-n-pentyl and other halogenated alkyl groups.

作為Rc8 及Rc9 ,於上述中,較佳之基為乙基、正丙基、正丁基、正戊基、2-甲氧基乙基、2-氰基乙基、2-苯基乙基、2-環己基乙基、2-甲氧基羰基乙基、2-氯乙基、2-溴乙基、3,3,3-三氟丙基、及3,3,4,4,5,5,5-七氟-正戊基。As R c8 and R c9 , among the above, preferred groups are ethyl, n-propyl, n-butyl, n-pentyl, 2-methoxyethyl, 2-cyanoethyl, 2-phenylethyl Group, 2-cyclohexylethyl, 2-methoxycarbonylethyl, 2-chloroethyl, 2-bromoethyl, 3,3,3-trifluoropropyl, and 3,3,4,4, 5,5,5-Heptafluoro-n-pentyl.

式(C2)所表示之肟酯化合物中,較佳為Rc1 係式(C2a)所表示之基,且Rc10 為甲基,Rc2 係式(C2-1)所表示之基之化合物。此種肟酯化合物具體係下述式(C2-I)所表示之化合物。 [化43]

Figure 02_image087
Among the oxime ester compounds represented by the formula (C2), R c1 is preferably a compound represented by the formula (C2a), R c10 is a methyl group, and R c2 is a compound represented by the formula (C2-1). The oxime ester compound is specifically a compound represented by the following formula (C2-I). [化43]
Figure 02_image087

式(C2-I)中,Rc3 與式(C2)中之Rc3 相同。式(C2-II)中,Rc4 、A、及n2與式(C2-1)中之Rc4 、A、及n2相同。式(C2-I)中,Rc11 及n4與式(C2a)中之Rc11 及n4相同。In the formula (C2-I), R c3 and the same as the formula (C2) R c3. In the formula (C2-II), R c4 , in the A, and n2 in the formula (C2-1) R c4, the same as A, and n2. In the formula (C2-I), the same as R c11 and R c11 n4 and n4 in the formula (C2a).

又,式(C2)所表示之肟酯化合物中,較佳亦為Rc3 係式(C2-3)所表示之化合物。此種肟酯化合物具體為下述式(C2-II)所表示之化合物。 [化44]

Figure 02_image089
Moreover, among the oxime ester compounds represented by formula (C2), it is preferable that R c3 is also a compound represented by formula (C2-3). The oxime ester compound is specifically a compound represented by the following formula (C2-II). [化44]
Figure 02_image089

式(C2-II)中,Rc1 及Rc3 與式(C2)中之Rc1 及Rc3 相同。式(C2-II)中,Rc7 及Rc 與式(C2)中之Rc1 及Rc3 相同。Of formula (C2-II), the same as R c1 and R c3 of the formula (C2) R c1 and R c3. In formula (C2-II), R c7 and R c are the same as R c1 and R c3 in formula (C2).

作為式(C2-I)所表示之肟酯化合物之較佳之具體例,可列舉下述化合物。Preferred specific examples of the oxime ester compound represented by the formula (C2-I) include the following compounds.

[化45]

Figure 02_image091
[化45]
Figure 02_image091

[化46]

Figure 02_image093
[化46]
Figure 02_image093

[化47]

Figure 02_image095
[化47]
Figure 02_image095

[化48]

Figure 02_image097
[化48]
Figure 02_image097

[化49]

Figure 02_image099
[化49]
Figure 02_image099

[化50]

Figure 02_image101
[化50]
Figure 02_image101

作為式(C2-II)所表示之肟酯化合物之較佳之具體例,可列舉下述化合物。Preferred specific examples of the oxime ester compound represented by formula (C2-II) include the following compounds.

[化51]

Figure 02_image103
[化51]
Figure 02_image103

[化52]

Figure 02_image105
[化52]
Figure 02_image105

光聚合起始劑(C)之含量相對於感光性樹脂組合物之固形物成分整體之質量,較佳為0.1質量%以上30質量%以下,更佳為0.5質量%以上20質量%以下。藉由將光聚合起始劑(C)之含量設為上述範圍,能夠獲得硬化性良好,且不易產生圖案形狀之不良之感光性樹脂組合物。The content of the photopolymerization initiator (C) is preferably 0.1% by mass or more and 30% by mass or less, and more preferably 0.5% by mass or more and 20% by mass or less with respect to the total mass of the solid components of the photosensitive resin composition. By setting the content of the photopolymerization initiator (C) in the above range, it is possible to obtain a photosensitive resin composition having good curability and less likely to cause defects in the pattern shape.

如上所述,感光性樹脂組合物包含下述式(C1)所表示之光聚合起始劑(C-I)、及光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II)作為光聚合起始劑(C)。光聚合起始劑(C)之質量中之光聚合起始劑(C-I)之質量比率為20質量%以上95質量%以下,更佳為25質量%以上90質量%以下,進而較佳為30質量%以上85質量%以下。As described above, the photosensitive resin composition contains the photopolymerization initiator (CI) represented by the following formula (C1) and the photopolymerization initiator (C-II) other than the photopolymerization initiator (CI) As a photopolymerization initiator (C). The mass ratio of the photopolymerization initiator (CI) in the mass of the photopolymerization initiator (C) is 20% by mass to 95% by mass, more preferably 25% by mass to 90% by mass, and more preferably 30 The mass% is above 85% by mass.

於光聚合起始劑(C-II)包含α-胺酮系化合物之情形時,光聚合起始劑(C-II)之質量中之α-胺酮系化合物之質量比率並無特別限定。於光聚合起始劑(C-II)包含α-胺酮系化合物之情形時,光聚合起始劑(C-II)之質量中之α-胺酮系化合物之質量比率較佳為5質量%以上100質量%以下,更佳為10質量%以上50質量%以下,進而較佳為20質量%以上40質量%以下。When the photopolymerization initiator (C-II) contains an α-aminoketone compound, the mass ratio of the α-aminoketone compound in the mass of the photopolymerization initiator (C-II) is not particularly limited. When the photopolymerization initiator (C-II) contains an α-aminoketone compound, the mass ratio of the α-aminoketone compound in the mass of the photopolymerization initiator (C-II) is preferably 5 mass % Or more and 100 mass% or less, more preferably 10 mass% or more and 50 mass% or less, and still more preferably 20 mass% or more and 40 mass% or less.

於光聚合起始劑(C-II)將光聚合起始劑(C-I)以外之肟酯化合物與α-胺酮系化合物組合而包含之情形時,光聚合起始劑(C-II)之質量中之肟酯化合物之質量與α-胺酮系化合物之質量的合計之比率並無特別限定。光聚合起始劑(C-II)之質量中之肟酯化合物之質量與α-胺酮系化合物之質量的合計之比率較佳為50質量%以上,更佳為70質量%以上,進而較佳為80質量%以上,進而更佳為90質量%以上,尤佳為100質量%。When the photopolymerization initiator (C-II) is a combination of an oxime ester compound other than the photopolymerization initiator (CI) and an α-amine ketone compound, the photopolymerization initiator (C-II) The ratio of the total mass of the oxime ester compound to the mass of the α-amine ketone compound in the mass is not particularly limited. The total ratio of the mass of the oxime ester compound to the mass of the α-aminoketone compound in the mass of the photopolymerization initiator (C-II) is preferably 50% by mass or more, more preferably 70% by mass or more, and more It is preferably 80% by mass or more, more preferably 90% by mass or more, and particularly preferably 100% by mass.

於光聚合起始劑(C-II)將光聚合起始劑(C-I)以外之肟酯化合物與α-胺酮系化合物組合而包含之情形時,α-胺酮系化合物之質量相對於肟酯化合物之質量與α-胺酮系化合物之質量的合計之比率較佳為5質量%以上50質量%以下,更佳為10質量%以上45質量%以下,尤佳為20質量%以上40質量%以下。When the photopolymerization initiator (C-II) combines an oxime ester compound other than the photopolymerization initiator (CI) and an α-aminoketone-based compound to include, the mass of the α-aminoketone-based compound is relative to the oxime The ratio of the total mass of the ester compound to the mass of the α-amine ketone compound is preferably 5% by mass to 50% by mass, more preferably 10% by mass to 45% by mass, and particularly preferably 20% by mass to 40% by mass %the following.

<著色劑(D)> 感光性樹脂組合物亦可進而包含著色劑(D)。感光性樹脂組合物藉由包含著色劑(D),例如較佳地用於液晶顯示器之彩色濾光片形成用途。又,感光性樹脂組合物藉由包含遮光劑(D1)作為著色劑(D),例如較佳地用於顯示裝置之彩色濾光片中之黑矩陣形成用途。<Colorant (D)> The photosensitive resin composition may further contain a coloring agent (D). By containing the colorant (D), the photosensitive resin composition is preferably used for forming a color filter of a liquid crystal display, for example. In addition, the photosensitive resin composition contains a light-shielding agent (D1) as a coloring agent (D), for example, it is preferably used for the purpose of forming a black matrix in a color filter of a display device.

作為感光性樹脂組合物中所含有之著色劑(D),並無特別限定,例如較佳為使用於染料索引(C.I.;The Society of Dyers and Colourists公司發行)中被分類為顏料(Pigment)之化合物,具體為標註如下所述之染料索引(C.I.)編號者。The coloring agent (D) contained in the photosensitive resin composition is not particularly limited. For example, it is preferably used in the dye index (CI; issued by The Society of Dyers and Colourists) and is classified as a pigment (Pigment) Compounds are specifically those marked with the following dye index (CI) numbers.

作為可適當使用之黃色顏料之例,可列舉:C.I.顏料黃1(以下,「C.I.顏料黃」相同,僅記載編號)、3、11、12、13、14、15、16、17、20、24、31、53、55、60、61、65、71、73,74、81、83、86、93、95、97、98、99、100、101、104、106、108、109、110、113、114、116、117、119、120、125、126、127、128、129、137、138、139、147、148、150、151、152、153、154、155、156、166、167、168、175、180、及185。Examples of yellow pigments that can be used appropriately include: CI Pigment Yellow 1 (hereinafter, "CI Pigment Yellow" is the same, and only the numbers are described), 3, 11, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113, 114, 116, 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168, 175, 180, and 185.

作為可適當使用之橙色顏料之例,可列舉:C.I.顏料橙1(以下,「C.I.顏料橙」相同,僅記載編號)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、及73。Examples of orange pigments that can be suitably used include: CI Pigment Orange 1 (hereinafter, "CI Pigment Orange" is the same, and only the numbers are described), 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 55, 59, 61, 63, 64, 71, and 73.

作為可適當使用之紫色顏料之例,可列舉:C.I.顏料紫1(以下,「C.I.顏料紫」相同,僅記載編號)、19、23、29、30、32、36、37、38、39、40、及50。Examples of purple pigments that can be suitably used include: CI Pigment Violet 1 (hereinafter, "CI Pigment Violet" is the same, and only the numbers are described), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, and 50.

作為可適當使用之紅色顏料之例,可列舉:C.I.顏料紅1(以下,「C.I.顏料紅」相同,僅記載編號)2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、53:1、57、57:1、57:2、58:2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、及265。Examples of red pigments that can be used appropriately include: CI Pigment Red 1 (hereinafter, "CI Pigment Red" is the same, only the numbers are described) 2, 3, 4, 5, 6, 7, 8, 9, 10, 11 , 12, 14, 15, 16, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42, 48: 1, 48: 2, 48: 3, 48 : 4, 49:1, 49:2, 50:1, 52:1, 53:1, 57, 57:1, 57:2, 58:2, 58:4, 60:1, 63:1, 63 : 2, 64:1, 81:1, 83, 88, 90:1, 97, 101, 102, 104, 105, 106, 108, 112, 113, 114, 122, 123, 144, 146, 149, 150 , 151, 155, 166, 168, 170, 171, 172, 174, 175, 176, 177, 178, 179, 180, 185, 187, 188, 190, 192, 193, 194, 202, 206, 207, 208 , 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, and 265.

作為可適當使用之藍色顏料之例,可列舉:C.I.顏料藍1(以下,「C.I.顏料藍」相同,僅記載編號)、2、15、15:3、15:4、15:6、16、22、60、64、及66。Examples of blue pigments that can be suitably used include: CI Pigment Blue 1 (hereinafter, "CI Pigment Blue" is the same, and only the numbers are described), 2, 15, 15: 3, 15: 4, 15: 6, 16 , 22, 60, 64, and 66.

作為可適當使用之上述以外之其他色相之顏料的例,可列舉:C.I.顏料綠7、C.I.顏料綠36、C.I.顏料綠37等綠色顏料、C.I.顏料棕23、C.I.顏料棕25、C.I.顏料棕26、C.I.顏料棕28等棕色顏料、C.I.顏料黑1、C.I.顏料黑7等黑色顏料。Examples of pigments of other hue than the above that can be suitably used include: CI Pigment Green 7, CI Pigment Green 36, CI Pigment Green 37 and other green pigments, CI Pigment Brown 23, CI Pigment Brown 25, CI Pigment Brown 26 , CI Pigment Brown 28 and other brown pigments, CI Pigment Black 1, CI Pigment Black 7 and other black pigments.

又,於對感光性樹脂組合物賦予遮光性之情形時,較佳為感光性樹脂組合物包含黑色顏料作為遮光劑(D1)。包含黑色顏料之感光性樹脂組合物適宜用於液晶顯示器中之黑矩陣或黑色柱狀間隔件之形成、或有機EL(Electroluminescence,電致發光)元件中之發光層之劃分用之觸排的形成。Moreover, when providing light-shielding property to a photosensitive resin composition, it is preferable that the photosensitive resin composition contains a black pigment as a light-shielding agent (D1). The photosensitive resin composition containing black pigment is suitable for the formation of black matrix or black columnar spacers in liquid crystal displays, or the formation of contact rows for dividing the light-emitting layer in organic EL (Electroluminescence) devices .

作為黑色顏料之例,可列舉:碳黑、苝系顏料、內醯胺系顏料、鈦黑、銅、鐵、錳、鈷、鉻、鎳、鋅、鈣、銀等之金屬氧化物、複合氧化物、金屬硫化物、金屬硫酸鹽或金屬碳酸鹽等無關於有機物、無機物之各種顏料。該等黑色顏料中,就容易獲取之方面、或者容易形成遮光性優異且電阻較高之硬化膜之方面而言,較佳為碳黑。 再者,黑色顏料之色相並不限定於色彩論上之非彩色即黑色,亦可為略帶紫之黑色、或略帶藍之黑色、或略帶紅之黑色。Examples of black pigments include carbon black, perylene pigments, internal amine pigments, titanium black, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, silver and other metal oxides, composite oxides Pigments that are not related to organic or inorganic substances, such as metal sulfides, metal sulfates, or metal carbonates. Among these black pigments, carbon black is preferable in terms of easy availability or easy formation of a cured film having excellent light-shielding properties and high electrical resistance. Furthermore, the hue of the black pigment is not limited to achromatic achromatic color in the color theory, that is, black. It can also be a purplish black, a bluish black, or a reddish black.

作為碳黑,可使用煙囪黑、爐黑、熱碳黑、燈黑等公知之碳黑,但較佳為遮光性優異之煙囪黑。又,亦可使用樹脂被覆碳黑。As the carbon black, well-known carbon blacks such as chimney black, furnace black, thermal black, and lamp black can be used, but chimney black having excellent light-shielding properties is preferred. In addition, resin-coated carbon black can also be used.

樹脂被覆碳黑與無樹脂被覆之碳黑相比,導電性較低,因此,於用作如液晶顯示器之液晶顯示元件之黑矩陣之情形時,能夠製造電流之洩漏較少且可靠性較高之低耗電之顯示器。Resin-coated carbon black has lower conductivity than carbon black without resin coating. Therefore, when used as the black matrix of liquid crystal display elements such as liquid crystal displays, it can produce less current leakage and higher reliability. The low power consumption display.

作為碳黑,較佳亦為實施導入酸性基之處理後之碳黑。導入至碳黑之酸性基係表示根據布忍斯特之定義之酸性之官能基。作為酸性基之具體例,可列舉:羧基、磺酸基、磷酸基等。導入至碳黑之酸性基亦可形成鹽。與酸性基形成鹽之陽離子於不妨礙本發明之目的之範圍內並無特別限定。作為陽離子之例,可列舉各種金屬離子、含氮化合物之陽離子、銨離子等,較佳為鈉離子、鉀離子、鋰離子等鹼金屬離子、或銨離子。As carbon black, it is also preferable to carry out the treatment of introducing acidic groups. The acidic group introduced into the carbon black means an acidic functional group according to Brunst's definition. As a specific example of an acidic group, a carboxyl group, a sulfonic acid group, a phosphoric acid group, etc. are mentioned. The acidic groups introduced into carbon black can also form salts. The cation forming a salt with an acidic group is not particularly limited within a range that does not interfere with the purpose of the present invention. Examples of cations include various metal ions, cations of nitrogen-containing compounds, ammonium ions, etc., and alkali metal ions such as sodium ions, potassium ions, and lithium ions, or ammonium ions are preferred.

於實施導入以上所說明之酸性基之處理後之碳黑中,於達到使用感光性樹脂組合物形成之遮光性之硬化膜之高電阻的觀點上,較佳為具有選自由羧酸基、羧酸鹽基、磺酸基、及磺酸鹽基所組成之群中之1種以上之官能基之碳黑。In the carbon black after the treatment of introducing the acidic group described above, it is preferable to have a high resistance selected from the group consisting of carboxylic acid group and carboxylic acid group from the viewpoint of achieving high resistance of a light-shielding cured film formed using a photosensitive resin composition. Carbon black with one or more functional groups in the group consisting of acid salt groups, sulfonic acid groups, and sulfonate groups.

將酸性基導入至碳黑之方法並無特別限定。作為導入酸性基之方法,例如可列舉以下方法。 方法1)藉由使用濃硫酸、發煙硫酸、氯磺酸等之直接取代法、或使用亞硫酸鹽、亞硫酸氫鹽等之間接取代法將磺酸基導入至碳黑。 方法2)使具有胺基及酸性基之有機化合物與碳黑重氮偶合。 方法3)藉由威廉姆遜之醚化法使具有鹵素原子及酸性基之有機化合物與具有羥基之碳黑發生反應。 方法4)使具有鹵代羰基及由保護基所保護之酸性基之有機化合物與具有羥基之碳黑發生反應。 方法5)使用具有鹵代羰基及由保護基所保護之酸性基之有機化合物對碳黑進行傅里德-克拉夫茨反應,之後進行去保護。The method of introducing acidic groups into carbon black is not particularly limited. As a method of introducing an acidic group, for example, the following methods can be cited. Method 1) The sulfonic acid group is introduced into the carbon black by a direct substitution method using concentrated sulfuric acid, oleum, chlorosulfonic acid, etc., or an indirect substitution method using sulfite, bisulfite, etc. Method 2) Diazo coupling of an organic compound with an amine group and an acid group and carbon black. Method 3) The organic compound with halogen atom and acidic group is reacted with carbon black with hydroxyl group by Williamson's etherification method. Method 4) Reacting an organic compound having a halogenated carbonyl group and an acidic group protected by a protecting group with a carbon black having a hydroxyl group. Method 5) Use an organic compound with a halogenated carbonyl group and an acidic group protected by a protecting group to perform the Friedel-Crafts reaction on carbon black, and then deprotect it.

該等方法中,就酸性基之導入處理容易且安全之方面而言,較佳為方法2)。作為方法2)中所使用之具有胺基及酸性基之有機化合物,較佳為於芳香族基上鍵結有胺基及酸性基之化合物。作為此種化合物之例,可列舉:如磺胺酸之胺基苯磺酸、或如4-胺基苯甲酸之胺基苯甲酸。Among these methods, in terms of easy and safe introduction of acidic groups, method 2) is preferred. The organic compound having an amine group and an acidic group used in the method 2) is preferably a compound having an amine group and an acidic group bonded to an aromatic group. Examples of such compounds include aminobenzenesulfonic acid such as sulfanilic acid, or aminobenzoic acid such as 4-aminobenzoic acid.

導入至碳黑之酸性基之莫耳數於不妨礙本發明之目的之範圍內並無特別限定。導入至碳黑之酸性基之莫耳數相對於碳黑100 g,較佳為1 mmol以上200 mmol以下,更佳為5 mmol以上100 mmol以下。The number of moles of acidic groups introduced into carbon black is not particularly limited within a range that does not hinder the purpose of the present invention. The number of moles of acidic groups introduced into the carbon black is preferably 1 mmol or more and 200 mmol or less, and more preferably 5 mmol or more and 100 mmol or less relative to 100 g of carbon black.

導入有酸性基之碳黑亦可實施樹脂之被覆處理。 於使用包含由樹脂被覆之碳黑之感光性樹脂組合物之情形時,容易形成遮光性及絕緣性優異且表面反射率較低之遮光性之硬化膜。再者,藉由樹脂之被覆處理,不特別產生對使用感光性樹脂組合物形成之遮光性之硬化膜之介電常數的不良影響。作為可用於碳黑之被覆之樹脂之例,可列舉:酚系樹脂、三聚氰胺樹脂、二甲苯樹脂、鄰苯二甲酸二烯丙酯樹脂、甘酞樹脂、環氧樹脂、烷基苯樹脂等熱硬化性樹脂、或聚苯乙烯、聚碳酸酯、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、改性聚苯醚、聚碸、聚對苯二甲醯對苯二胺、聚醯胺醯亞胺、聚醯亞胺、聚胺基雙馬來醯亞胺、聚醚磺基聚亞苯基碸、聚芳酯、聚醚醚酮等熱塑性樹脂。樹脂對碳黑之被覆量相對於碳黑之質量與樹脂之質量的合計,較佳為1質量%以上30質量%以下。Carbon black with acidic groups can also be coated with resin. When a photosensitive resin composition containing carbon black coated with a resin is used, it is easy to form a light-shielding cured film with excellent light-shielding and insulating properties and low surface reflectance. Furthermore, the coating process of the resin does not have an adverse effect on the dielectric constant of the light-shielding cured film formed using the photosensitive resin composition. Examples of resins that can be used for the coating of carbon black include: phenol resins, melamine resins, xylene resins, diallyl phthalate resins, glycolphthalein resins, epoxy resins, alkylbenzene resins and other thermal resins. Curable resin, or polystyrene, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, modified polyphenylene ether, polysulfide, poly(terephthalamide), and poly(p-phenylene diamine) , Polyamide imide, polyimide, polyamino bismaleimide, polyether sulfopolyphenylene oxide, polyarylate, polyether ether ketone and other thermoplastic resins. The amount of resin coating carbon black relative to the total of the mass of carbon black and the mass of the resin is preferably 1% by mass to 30% by mass.

又,作為黑色顏料,亦可較佳地使用苝系顏料。作為苝系顏料之具體例,可列舉:下述式(d-1)所表示之苝系顏料、下述式(d-2)所表示之苝系顏料、及下述式(d-3)所表示之苝系顏料。市售品中,可將BASF公司製造之製品名K0084、及K0086、或顏料黑21、30、31、32、33、及34等較佳地用作苝系顏料。Moreover, as a black pigment, a perylene-based pigment can also be preferably used. Specific examples of perylene pigments include: a perylene pigment represented by the following formula (d-1), a perylene pigment represented by the following formula (d-2), and the following formula (d-3) The indicated perylene pigments. Among the commercially available products, the product names K0084 and K0086 manufactured by BASF Corporation, or pigment black 21, 30, 31, 32, 33, and 34, etc. can be preferably used as perylene pigments.

[化53]

Figure 02_image107
式(d-1)中,Rd1 及Rd2 分別獨立表示碳原子數1以上3以下之伸烷基,Rd3 及Rd4 分別獨立表示氫原子、羥基、甲氧基、或乙醯基。[化53]
Figure 02_image107
In the formula (d1), R d1 and R d2 each independently represent or more carbon atoms, alkylene of 1 to 3, R d3 and R d4 each independently represent a hydrogen atom, a hydroxyl group, a methoxy group, or acetyl group.

[化54]

Figure 02_image109
式(d-2)中,Rd5 及Rd6 分別獨立表示碳原子數1以上7以下之伸烷基。[化54]
Figure 02_image109
In the formula (d-2), R d5 and R d6 each independently represent an alkylene group having 1 to 7 carbon atoms.

[化55]

Figure 02_image111
式(d-3)中,Rd7 及Rd8 分別獨立為氫原子、碳原子數1以上22以下之烷基,亦可包含N、O、S、或P之雜原子。於Rd7 及Rd8 為烷基之情形時,該烷基可為直鏈狀,亦可為支鏈狀。[化55]
Figure 02_image111
In formula (d-3), Rd7 and Rd8 are each independently a hydrogen atom, an alkyl group having 1 to 22 carbon atoms, and may include N, O, S, or P heteroatoms. When R d7 and R d8 are alkyl groups, the alkyl group may be linear or branched.

上述式(d-1)所表示之化合物、式(d-2)所表示之化合物、及式(d-3)所表示之化合物例如可使用日本專利特開昭62-1753號公報、日本專利特公昭63-26784號公報中所記載之方法合成。即,以苝-3,5,9,10-四羧酸或其二酸酐及胺類為原料,於水或有機溶劑中進行加熱反應。然後,使所獲得之粗製物於硫酸中再沈澱,或者於水、有機溶劑或該等之混合溶劑中再結晶,藉此能夠獲得目標物。The compound represented by the above formula (d-1), the compound represented by the formula (d-2), and the compound represented by the formula (d-3) can be used, for example, Japanese Patent Laid-Open No. 62-1753 and Japanese Patent It was synthesized by the method described in JP 63-26784. That is, using perylene-3,5,9,10-tetracarboxylic acid or its dianhydride and amines as raw materials, the heating reaction is carried out in water or an organic solvent. Then, the obtained crude product is reprecipitated in sulfuric acid, or recrystallized in water, an organic solvent, or a mixed solvent of these, thereby obtaining the target product.

為了於感光性樹脂組合物中使苝系顏料良好地分散,苝系顏料之平均粒徑較佳為10 nm以上1000 nm以下。In order to disperse the perylene-based pigment well in the photosensitive resin composition, the average particle diameter of the perylene-based pigment is preferably 10 nm or more and 1000 nm or less.

又,作為遮光劑,亦可包含內醯胺系顏料。作為內醯胺系顏料,例如可列舉下述式(d-4)所表示之化合物。In addition, as a light-shielding agent, internal amide-based pigments may also be included. As an internal amine type pigment, the compound represented by following formula (d-4) is mentioned, for example.

[化56]

Figure 02_image113
[化56]
Figure 02_image113

式(d-4)中,Xd 表示雙鍵,作為幾何異構物,分別獨立為E體或Z體,Rd9 分別獨立表示氫原子、甲基、硝基、甲氧基、溴原子、氯原子、氟原子、羧基、或磺基,Rd10 分別獨立表示氫原子、甲基、或苯基,Rd11 分別獨立表示氫原子、甲基、或氯原子。 式(d-4)所表示之化合物可單獨使用,或將2種以上組合使用。 就容易製造式(d-4)所表示之化合物之方面而言,Rd9 較佳為鍵結於二氫吲哚環之6位,Rd11 較佳為鍵結於二氫吲哚環之4位。就相同之觀點而言,Rd9 、Rd10 及Rd11 較佳為氫原子。 式(d-4)所表示之化合物作為幾何異構物而具有EE體、ZZ體、EZ體,可為該等之任一單一化合物,亦可為該等幾何異構物之混合物。 式(d-4)所表示之化合物例如可藉由國際公開第2000/24736號、及國際公開第2010/081624號中所記載之方法進行製造。In the formula (d-4), X d represents a double bond, and as geometric isomers, each independently represents an E form or a Z form, and R d9 independently represents a hydrogen atom, a methyl group, a nitro group, a methoxy group, a bromine atom, A chlorine atom, a fluorine atom, a carboxyl group, or a sulfo group, R d10 each independently represents a hydrogen atom, a methyl group, or a phenyl group, and R d11 each independently represents a hydrogen atom, a methyl group, or a chlorine atom. The compound represented by formula (d-4) can be used alone or in combination of two or more kinds. In terms of easy production of the compound represented by formula (d-4), R d9 is preferably bonded to the 6-position of the indoline ring, and R d11 is preferably bonded to the 4 of the indoline ring. Bit. From the same viewpoint, R d9 , R d10 and R d11 are preferably hydrogen atoms. The compound represented by formula (d-4) has EE form, ZZ form, and EZ form as geometric isomers, and may be any single compound of these, or a mixture of these geometric isomers. The compound represented by formula (d-4) can be produced, for example, by the method described in International Publication No. 2000/24736 and International Publication No. 2010/081624.

為了於感光性樹脂組合物中使內醯胺系顏料良好地分散,內醯胺系顏料之平均粒徑較佳為10 nm以上1000 nm以下。In order to disperse the internal amine-based pigment well in the photosensitive resin composition, the average particle diameter of the internal amine-based pigment is preferably 10 nm or more and 1000 nm or less.

進而,以銀錫(AgSn)合金為主成分之微粒子(以下,稱為「AgSn合金微粒子」)亦較佳地用作黑色顏料。該AgSn合金微粒子只要是AgSn合金為主成分即可,作為其他金屬成分,例如亦可包含Ni、Pd、Au等。 該AgSn合金微粒子之平均粒徑較佳為1 nm以上300 nm以下。Furthermore, fine particles mainly composed of silver tin (AgSn) alloy (hereinafter referred to as "AgSn alloy fine particles") are also preferably used as black pigments. The AgSn alloy fine particles may have an AgSn alloy as a main component, and other metal components may include, for example, Ni, Pd, Au, and the like. The average particle size of the AgSn alloy particles is preferably 1 nm or more and 300 nm or less.

於AgSn合金由化學式AgxSn表示之情形時,獲得化學性穩定之AgSn合金之x之範圍為1≦x≦10,同時獲得化學穩定性與黑色度之x之範圍為3≦x≦4。 此處,若於上述x之範圍內求出AgSn合金中之Ag之質量比,則 於x=1之情形時,Ag/AgSn=0.4762; 於x=3之情形時,3・Ag/Ag3Sn=0.7317; 於x=4之情形時,4・Ag/Ag4Sn=0.7843; 於x=10之情形時,10・Ag/Ag10Sn=0.9008。 因此,該AgSn合金於含有47.6質量%以上90質量%以下之Ag之情形時成為化學性穩定者,於含有73.17質量%以上78.43質量%以下之Ag之情形時,可相對於Ag量有效獲得化學安定性與黑色度。When the AgSn alloy is represented by the chemical formula AgxSn, the range of x for obtaining a chemically stable AgSn alloy is 1≦x≦10, and the range of x for obtaining chemical stability and blackness is 3≦x≦4. Here, if the mass ratio of Ag in the AgSn alloy is obtained within the range of x, then When x = 1, Ag/AgSn = 0.4762; In the case of x=3, 3·Ag/Ag3Sn=0.7317; In the case of x=4, 4·Ag/Ag4Sn=0.7843; In the case of x = 10, 10·Ag/Ag10Sn = 0.9008. Therefore, the AgSn alloy becomes chemically stable when it contains Ag of 47.6 mass% to 90 mass%, and when it contains Ag of 73.17 mass% to 78.43 mass%, it can effectively obtain a chemical effect relative to the amount of Ag. Stability and blackness.

該AgSn合金微粒子可使用通常之微粒子合成法進行製作。作為微粒子合成法,可列舉:氣相反應法、噴霧熱分解法、霧化法、液相反應法、冷凍乾燥法、水熱合成法等。The AgSn alloy fine particles can be produced using a normal fine particle synthesis method. The fine particle synthesis method includes a gas phase reaction method, a spray thermal decomposition method, an atomization method, a liquid phase reaction method, a freeze drying method, a hydrothermal synthesis method, and the like.

AgSn合金微粒子為絕緣性較高者,但根據感光性樹脂組合物之用途,為了進一步提高絕緣性,亦可由絕緣膜覆蓋表面。作為此種絕緣膜之材料,適宜為金屬氧化物或有機高分子化合物。 作為金屬氧化物,適宜使用具有絕緣性之金屬氧化物,例如氧化矽(矽土)、氧化鋁(礬土)、氧化鋯(鋯土)、氧化釔(釔土)、氧化鈦(鈦氧)等。 又,作為有機高分子化合物,適宜使用具有絕緣性之樹脂,例如聚醯亞胺、聚醚、聚丙烯酸酯、聚胺化合物等。The AgSn alloy fine particles have high insulating properties, but depending on the application of the photosensitive resin composition, in order to further improve the insulating properties, the surface may be covered with an insulating film. As the material of such an insulating film, a metal oxide or an organic polymer compound is suitable. As the metal oxide, metal oxides with insulating properties are suitably used, such as silica (silica), alumina (alumina), zirconia (zircon), yttria (yttrium), and titanium oxide (titanium oxide) Wait. In addition, as the organic polymer compound, resins having insulating properties, such as polyimide, polyether, polyacrylate, and polyamine compounds, are suitably used.

為了充分提高AgSn合金微粒子之表面之絕緣性,絕緣膜之膜厚較佳為1 nm以上100 nm以下之厚度,更佳為5 nm以上50 nm以下。 絕緣膜可藉由表面改質技術或表面塗佈技術容易地形成。尤其是若使用四乙氧基矽烷、三乙醇鋁等烷氧化物,則能夠於相對低溫下形成膜厚均勻之絕緣膜,故較佳。In order to sufficiently improve the insulation of the surface of the AgSn alloy particles, the thickness of the insulating film is preferably 1 nm or more and 100 nm or less, and more preferably 5 nm or more and 50 nm or less. The insulating film can be easily formed by surface modification technology or surface coating technology. In particular, if an alkoxide such as tetraethoxysilane or aluminum triethoxide is used, it is possible to form an insulating film with a uniform film thickness at a relatively low temperature, which is preferable.

作為黑色顏料,上述苝系顏料、內醯胺系顏料、AgSn合金微粒子可單獨使用,亦可將該等組合使用。 此外,黑色顏料亦可根據調整色調之目的等,包含紅、藍、綠、黃等色相之色素。黑色顏料以外之其他色相之色素可自公知之色素中適當進行選擇。例如,作為黑色顏料以外之其他色相之色素,可使用上述各種顏料。黑色顏料以外之其他色相之色素之使用量相對於黑色顏料之總質量較佳為15質量%以下,更佳為10質量%以下。As the black pigment, the above-mentioned perylene-based pigments, internal amine-based pigments, and AgSn alloy fine particles may be used alone or in combination. In addition, the black pigment may also include pigments of red, blue, green, and yellow hue according to the purpose of adjusting the color tone. Pigments of other hues other than black pigments can be appropriately selected from known pigments. For example, as pigments of other hue than black pigments, the above-mentioned various pigments can be used. The usage amount of pigments of other hues other than the black pigment is preferably 15% by mass or less, and more preferably 10% by mass or less relative to the total mass of the black pigment.

可與以上所說明之黑色顏料一併使用將2種以上之黑色或彩色之顏料及/或染料組合而包含之黑色組合物,或使用該黑色組合物代替黑色顏料。 黑色組合物中之碳黑之含量較佳為3質量%以下。藉由使用碳黑之含量為3質量%以下之黑色組合物,而容易抑制顯影後之懸浮固體或顯影殘渣之產生。 黑色組合物中之碳黑之含量更佳為2質量%以下,進而較佳為1質量%以下,尤佳為0質量%。A black composition containing two or more black or colored pigments and/or dyes can be used together with the black pigment described above, or the black composition can be used instead of the black pigment. The content of carbon black in the black composition is preferably 3% by mass or less. By using a black composition with a carbon black content of 3% by mass or less, it is easy to suppress the generation of suspended solids or development residues after development. The content of carbon black in the black composition is more preferably 2% by mass or less, still more preferably 1% by mass or less, and particularly preferably 0% by mass.

黑色組合物中所包含之顏料及染料之色相並無特別限定。黑色組合物亦可包含黑色之顏料及/或染料。黑色組合物亦可為複數種黑色之著色劑之組合。於該情形時,作為黑色之著色劑,例如可使用苝黑、苯胺黑、及黑色偶氮化合物等。 於黑色組合物中,亦可將2種以上之黑色以外之色相之顏料及/或染料組合而調配,以使組合物呈黑色。The hue of the pigment and dye contained in the black composition is not particularly limited. The black composition may also include black pigments and/or dyes. The black composition can also be a combination of a plurality of black coloring agents. In this case, as a black coloring agent, for example, perylene black, aniline black, and black azo compounds can be used. In the black composition, two or more kinds of pigments and/or dyes of hues other than black can also be combined to make the composition appear black.

就能夠微妙地調整黑色之色相之方面、或者容易抑制顯影後之懸浮固體或顯影殘渣之產生之方面而言,黑色組合物相較於由單一種類之著色劑所構成之著色劑,較佳為複數種彩色著色劑之組合。In terms of being able to subtly adjust the hue of black, or easily suppressing the generation of suspended solids or development residues after development, the black composition is better than a coloring agent composed of a single type of coloring agent A combination of multiple color colorants.

黑色組合物例如較佳為選自藍色、紫色、黃色、紅色、橙色之5種顏色之有機顏料中之2種以上之有機顏料的組合。 藉由自上述5種顏色之有機顏料中將2種顏色以上之有機顏料組合,能夠展現經擬黑色化之色相。此處,「擬黑色」係理想中色彩學之黑色,但只要為於使用黑色組合物形成之黑色膜之用途中所容許之色相即可。The black composition is preferably, for example, a combination of two or more organic pigments selected from organic pigments of five colors of blue, purple, yellow, red, and orange. By combining two or more organic pigments from the above five organic pigments, it is possible to display a pseudo-black hue. Here, "pseudo-black" is black in ideal chromatology, but it only needs to be a hue that is allowed in the use of a black film formed using a black composition.

呈擬黑色之黑色組合物中之各色相之有機顏料的比率(質量比)較佳為(藍色有機顏料)/(黃色有機顏料+橙色有機顏料)/(紅色有機顏料+紫色有機顏料)=(30質量%以上60質量%以下)/(0質量%以上50質量%以下)/(5質量%以上70質量%以下)。The ratio (mass ratio) of the organic pigments of each hue in the pseudo-black black composition is preferably (blue organic pigment)/(yellow organic pigment + orange organic pigment)/(red organic pigment + purple organic pigment) = (30 mass% to 60 mass%)/(0 mass% to 50 mass%)/(5 mass% to 70 mass%).

作為上述5種顏色之有機顏料,可使用以往所使用之公知者。 作為藍色有機顏料,可列舉:C.I.顏料藍15:3、C.I.顏料藍15:4、C.I.顏料藍15:6、及C.I.顏料藍60。 作為紫色有機顏料,可列舉:C.I.顏料紫19、及C.I.顏料紫23。 作為黃色有機顏料,可列舉:C.I.顏料黃83、C.I.顏料黃110、C.I.顏料黃128、C.I.顏料黃138、C.I.顏料黃139、C.I.顏料黃150、C.I.顏料黃151、C.I.顏料黃154、C.I.顏料黃155、C.I.顏料黃180、及C.I.顏料黃181。 作為橙色有機顏料,可列舉:C.I.顏料橙38、C.I.顏料橙43、C.I.顏料橙64、C.I.顏料橙69、C.I.顏料橙71、及C.I.顏料橙73。 作為紅色有機顏料,可列舉:C.I.顏料紅122、C.I.顏料紅166、C.I.顏料紅177、C.I.顏料紅179、C.I.顏料紅242、C.I.顏料紅224、C.I.顏料紅254、C.I.顏料紅256、C.I.顏料紅264、及C.I.顏料紅272。As the organic pigments of the above five colors, known ones used in the past can be used. Examples of blue organic pigments include C.I. Pigment Blue 15:3, C.I. Pigment Blue 15:4, C.I. Pigment Blue 15:6, and C.I. Pigment Blue 60. Examples of the purple organic pigments include C.I. Pigment Violet 19 and C.I. Pigment Violet 23. Examples of yellow organic pigments include CI Pigment Yellow 83, CI Pigment Yellow 110, CI Pigment Yellow 128, CI Pigment Yellow 138, CI Pigment Yellow 139, CI Pigment Yellow 150, CI Pigment Yellow 151, CI Pigment Yellow 154, CI Pigment Yellow 155, CI Pigment Yellow 180, and CI Pigment Yellow 181. As orange organic pigments, C.I. Pigment Orange 38, C.I. Pigment Orange 43, C.I. Pigment Orange 64, C.I. Pigment Orange 69, C.I. Pigment Orange 71, and C.I. Pigment Orange 73 can be mentioned. Examples of red organic pigments include CI Pigment Red 122, CI Pigment Red 166, CI Pigment Red 177, CI Pigment Red 179, CI Pigment Red 242, CI Pigment Red 224, CI Pigment Red 254, CI Pigment Red 256, CI Pigment Red 264, and CI Pigment Red 272.

其中,較佳為,藍色有機顏料係選自由C.I.顏料藍15:3、C.I.顏料藍15:4、及C.I.顏料藍15:6所組成之群中之至少1種,紫色有機顏料為C.I.顏料紫23,黃色有機顏料為C.I.顏料黃83及/或C.I.顏料黃139,橙色有機顏料為C.I.顏料橙43及/或C.I.顏料橙64,紅色有機顏料為C.I.顏料紅254及/或C.I.顏料紅256。 藉由將該等有機顏料組合使用,而容易形成黑色之色相良好且光學密度(OD值)優異之黑色之硬化膜。Among them, preferably, the blue organic pigment is at least one selected from the group consisting of CI Pigment Blue 15:3, CI Pigment Blue 15:4, and CI Pigment Blue 15:6, and the purple organic pigment is CI pigment Violet 23, the yellow organic pigment is CI Pigment Yellow 83 and/or CI Pigment Yellow 139, the orange organic pigment is CI Pigment Orange 43 and/or CI Pigment Orange 64, the red organic pigment is CI Pigment Red 254 and/or CI Pigment Red 256 . By using these organic pigments in combination, it is easy to form a black cured film with good black hue and excellent optical density (OD value).

為了獲得擬黑色之黑色組合物,較佳為將選自藍色之有機顏料、黃色之有機顏料、及橙色之有機顏料中之至少1種組合,更佳為進一步將該等有機顏料與選自紅色之有機顏料及紫色之有機顏料中之至少1種有機顏料組合。 作為具體之屬於各顏色之有機顏料之顏料的組合,例如較佳為以下組合等, ・C.I.顏料藍15:4、C.I.顏料黃139及C.I.顏料紅254之組合、 ・C.I.顏料藍15:6、C.I.顏料橙64及C.I.顏料紫23之組合、 ・C.I.顏料藍15:4或15:3、C.I.顏料黃83、C.I.顏料紫23及C.I.顏料紅254之組合、及 ・C.I.顏料藍15:6、C.I.顏料紫23及C.I.顏料紅256之組合。In order to obtain a pseudo-black black composition, it is preferable to combine at least one selected from blue organic pigments, yellow organic pigments, and orange organic pigments, and it is more preferable to further combine these organic pigments with those selected from A combination of at least one organic pigment among red organic pigments and purple organic pigments. As specific combinations of pigments belonging to organic pigments of each color, for example, the following combinations are preferred, ・The combination of C.I. Pigment Blue 15:4, C.I. Pigment Yellow 139 and C.I. Pigment Red 254, ・Combination of C.I. Pigment Blue 15: 6, C.I. Pigment Orange 64 and C.I. Pigment Violet 23, ・The combination of C.I. Pigment Blue 15:4 or 15:3, C.I. Pigment Yellow 83, C.I. Pigment Violet 23 and C.I. Pigment Red 254, and ・The combination of C.I. Pigment Blue 15: 6, C.I. Pigment Violet 23 and C.I. Pigment Red 256.

為了使上述著色劑(D)於感光性樹脂組合物中均勻地分散,亦可進而使用分散劑。作為此種分散劑,較佳為使用聚伸乙基亞胺系、聚胺酯樹脂系、丙烯酸樹脂系高分子分散劑。尤其是於使用碳黑作為著色劑(D)之情形時,較佳為使用丙烯酸樹脂系分散劑作為分散劑。 再者,亦存在自硬化膜產生因分散劑所產生之腐蝕性之氣體之情況。因此,顏料不使用分散劑而進行分散處理亦為較佳之態樣之一例。In order to uniformly disperse the said coloring agent (D) in the photosensitive resin composition, you may use further a dispersing agent. As such a dispersant, it is preferable to use a polyethyleneimine-based, polyurethane resin-based, or acrylic resin-based polymer dispersant. Especially in the case of using carbon black as the colorant (D), it is preferable to use an acrylic resin-based dispersant as the dispersant. Furthermore, there are cases where corrosive gas generated by the dispersant is generated from the cured film. Therefore, it is also an example of a preferable aspect that the pigment does not use a dispersant but performs a dispersion treatment.

再者,於感光性樹脂組合物中,亦可將顏料與染料組合使用。該染料只要自公知之材料中適當進行選擇即可。 作為可應用於感光性樹脂組合物之染料,例如可列舉:偶氮染料、金屬錯鹽偶氮染料、蒽醌染料、三苯基甲烷染料、𠮿

Figure 108139902-A0304-12-01
染料、花青染料、萘醌染料、醌亞胺染料、次甲基染料、酞菁染料等。 又,關於該等染料,藉由進行色澱化(成鹽化)能夠使其分散於有機溶劑等,從而將其用作著色劑(D)。 該等染料以外,例如亦可較佳地使用日本專利特開2013-225132號公報、日本專利特開2014-178477號公報、日本專利特開2013-137543號公報、日本專利特開2011-38085號公報、日本專利特開2014-197206號公報等中記載之染料等。Furthermore, in the photosensitive resin composition, a pigment and a dye may be used in combination. The dye may be appropriately selected from known materials. Examples of dyes that can be applied to the photosensitive resin composition include azo dyes, metal complex salt azo dyes, anthraquinone dyes, triphenylmethane dyes, 𠮿
Figure 108139902-A0304-12-01
Dyes, cyanine dyes, naphthoquinone dyes, quinoneimine dyes, methine dyes, phthalocyanine dyes, etc. In addition, these dyes can be dispersed in an organic solvent or the like by being laked (salted), and can be used as a colorant (D). In addition to these dyes, for example, Japanese Patent Application Publication No. 2013-225132, Japanese Patent Application Publication No. 2014-178477, Japanese Patent Application Publication No. 2013-137543, Japanese Patent Application Publication No. 2011-38085 may also be preferably used. Dyes and the like described in gazettes, Japanese Patent Laid-Open No. 2014-197206 etc.

感光性樹脂組合物中之著色劑(D)之使用量可於妨礙本發明之目的之範圍內適當進行選擇。典型而言,著色劑(D)之使用量相對於感光性樹脂組合物之固形物成分整體之質量,較佳為2質量%以上75質量%以下,更佳為3質量%以上70質量%以下。The amount of the coloring agent (D) used in the photosensitive resin composition can be appropriately selected within a range that hinders the purpose of the present invention. Typically, the amount of the colorant (D) used is preferably 2% by mass or more and 75% by mass or less, more preferably 3% by mass or more and 70% by mass relative to the total mass of the solid components of the photosensitive resin composition .

尤其是,於使用感光性樹脂組合物形成黑矩陣之情形時,較佳為以黑矩陣之每1 μm之被膜之OD值成為4以上的方式調整感光性樹脂組合物中之遮光劑之量。若黑矩陣中之每1 μm被膜之OD值為4以上,則在用於液晶顯示器之黑矩陣之情形時,能夠獲得充分之顯示對比度。In particular, when a photosensitive resin composition is used to form a black matrix, it is preferable to adjust the amount of the light-shielding agent in the photosensitive resin composition so that the OD value of the film per 1 μm of the black matrix becomes 4 or more. If the OD value of the film per 1 μm in the black matrix is 4 or more, when used in the case of the black matrix of a liquid crystal display, sufficient display contrast can be obtained.

於使用顏料作為著色劑(D)之情形時,較佳為顏料於在分散劑之存在下或不存在下製成以適當之濃度分散的分散液之後,添加至感光性樹脂組合物。 再者,於本說明書中,關於上述顏料之使用量,可設為其所存在之分散劑亦包含在內之值而定義。When a pigment is used as the colorant (D), it is preferable that the pigment be added to the photosensitive resin composition after making it into a dispersion liquid dispersed at an appropriate concentration in the presence or absence of a dispersant. Furthermore, in this specification, the use amount of the above-mentioned pigment can be defined as a value that includes the dispersant present.

<增感劑(E)> 感光性樹脂組合物亦可與上述光聚合起始劑一併含有增感劑(E)。藉由感光性樹脂組合物含有增感劑(E),即便使用LED(Light Emitting Diode,發光二極體)曝光等照射能量較低之光源亦被良好地硬化。<Sensitizer (E)> The photosensitive resin composition may contain a sensitizer (E) together with the above-mentioned photopolymerization initiator. Since the photosensitive resin composition contains the sensitizer (E), even if it is exposed to a light source with low irradiating energy such as LED (Light Emitting Diode), it is cured well.

作為增感劑(E),可無特別限制地使用以往於感光性樹脂組合物中以光聚合起始劑之增感為目的而使用之化合物。As the sensitizer (E), a compound conventionally used for the purpose of sensitization of a photopolymerization initiator in a photosensitive resin composition can be used without particular limitation.

作為增感劑(E),較佳為具有選自由烷氧基、取代羰氧基、及側氧基(=O)所組成之群中之1種以上作為取代基之化合物。作為具有該取代基之化合物,較佳為縮合多環式芳香族烴化合物、或縮合多環式芳香族雜環化合物。 縮合多環式芳香族烴化合物、或縮合多環式芳香族雜環化合物亦可具有烷氧基、取代羰氧基、及側氧基(=O)以外之取代基。作為該取代基之例,可列舉:碳原子數1以上20以下之烷基、碳原子數1以上20以下之鹵化烷基、碳原子數2以上20以下之烷氧基烷基、碳原子數2以上20以下之脂肪族醯基、碳原子數7以上11以下之芳香族醯基(芳醯基)、氰基、硝基、亞硝基、鹵素原子、羥基、及巰基等。The sensitizer (E) is preferably a compound having one or more substituents selected from the group consisting of an alkoxy group, a substituted carbonyloxy group, and a pendant oxy group (=O). The compound having the substituent is preferably a condensed polycyclic aromatic hydrocarbon compound or a condensed polycyclic aromatic heterocyclic compound. The condensed polycyclic aromatic hydrocarbon compound or the condensed polycyclic aromatic heterocyclic compound may have a substituent other than an alkoxy group, a substituted carbonyloxy group, and a pendant oxy group (=O). Examples of the substituent include: alkyl groups with 1 to 20 carbon atoms, halogenated alkyl groups with 1 to 20 carbon atoms, alkoxyalkyl groups with 2 to 20 carbon atoms, and carbon atoms. 2 aliphatic acyl groups of more than 20 and less than 20, aromatic acyl groups (aryl groups) of 7 to 11 carbon atoms, cyano groups, nitro groups, nitroso groups, halogen atoms, hydroxyl groups, and mercapto groups, etc.

烷氧基可為直鏈狀,亦可為支鏈狀。烷氧基之碳原子數並無特別限定,但較佳為1以上20以下,更佳為1以上12以下,尤佳為1以上6以下。 作為烷氧基之較佳之例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第三丁氧基、正戊氧基、正己氧基、正庚氧基、正辛氧基、2-乙基己基、正壬氧基、及正癸氧基等。The alkoxy group may be linear or branched. The number of carbon atoms of the alkoxy group is not particularly limited, but is preferably 1 or more and 20 or less, more preferably 1 or more and 12 or less, and particularly preferably 1 or more and 6 or less. Preferred examples of alkoxy groups include: methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, tert-butoxy, n-pentoxy , N-hexyloxy, n-heptyloxy, n-octyloxy, 2-ethylhexyl, n-nonyloxy, and n-decyloxy, etc.

取代羰氧基係由-O-CO-Ae 所表示之基。Ae 只要具有增感劑(E)所需之增感作用,則並無特別限定,亦可為各種有機基。作為A,較佳為碳原子數1以上20以下之烷基、碳原子數6以上10以下之芳基、碳原子數1以上20以下之烷氧基、碳原子數6以上10以下之芳氧基。The substituted carbonyloxy group is a group represented by -O-CO-A e . A e is not particularly limited as long as it has the sensitizing effect required by the sensitizer (E), and it may be various organic groups. A is preferably an alkyl group with 1 to 20 carbon atoms, an aryl group with 6 to 10 carbon atoms, an alkoxy group with 1 to 20 carbon atoms, and an aryloxy group with 6 to 10 carbon atoms. base.

芳基或芳氧基亦可具有1個或複數個取代基。取代基之種類只要不妨礙本發明之目的,則並無特別限定。於芳基或芳氧基具有複數個取代基之情形時,複數個取代基可相同,亦可不同。 作為取代基之較佳之例,可列舉:碳原子數1以上6以下之烷氧基、碳原子數6以上10以下之芳氧基、碳原子數2以上7以下之脂肪族醯基、碳原子數7以上11以下之芳香族醯基(芳醯基)、氰基、硝基、亞硝基、鹵素原子、羥基、及巰基等。The aryl group or aryloxy group may have one or more substituents. The type of substituent is not particularly limited as long as it does not interfere with the purpose of the present invention. When the aryl group or the aryloxy group has a plurality of substituents, the plurality of substituents may be the same or different. Preferable examples of substituents include: alkoxy groups having 1 to 6 carbon atoms, aryloxy groups having 6 to 10 carbon atoms, aliphatic acyl groups having 2 to 7 carbon atoms, and carbon atoms Aromatic acyl groups (aryl acyl groups), cyano groups, nitro groups, nitroso groups, halogen atoms, hydroxyl groups, and mercapto groups having the number 7 to 11.

於Ae 為烷基或烷氧基之情形時,該等基可為直鏈狀,亦可為支鏈狀。 作為烷基之較佳之例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第三丁基、正戊基、正己基、正庚基、正辛基、及2-乙基己基等。 作為芳基之較佳之例,可列舉:苯基、鄰甲苯基、間甲苯基、對甲苯基、α-萘基、β-萘基等。 作為烷氧基之較佳之例,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第三丁氧基、正戊氧基、正己氧基、正庚氧基、正辛氧基、及2-乙基己氧基等。When A e is an alkyl group or an alkoxy group, these groups may be linear or branched. Preferable examples of alkyl groups include: methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tertiary butyl, n-pentyl, n-hexyl, n-heptyl, n- Octyl, and 2-ethylhexyl, etc. Preferable examples of aryl groups include phenyl, o-tolyl, m-tolyl, p-tolyl, α-naphthyl, β-naphthyl, and the like. Preferred examples of alkoxy groups include: methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, tert-butoxy, n-pentoxy , N-hexyloxy, n-heptyloxy, n-octyloxy, and 2-ethylhexyloxy, etc.

於經選自由烷氧基、取代羰氧基、及側氧基(=O)所組成之群中之1種以上取代之縮合多環式芳香族烴化合物、或縮合多環式芳香族雜環化合物中,構成縮合環之環數只要獲得所期望之增感作用,則並無特別限定。環數較佳為2以上,更佳為3以上,尤佳為3以上6以下,最佳為3或4。 再者,只要縮合多環式芳香族烴化合物、或縮合多環式芳香族雜環化合物具有芳香族性,則形成縮合多環之單環亦可不必為芳香環。Condensed polycyclic aromatic hydrocarbon compound, or condensed polycyclic aromatic heterocyclic ring substituted by one or more selected from the group consisting of alkoxy, substituted carbonyloxy, and pendant oxy (=O) In the compound, the number of rings constituting the condensed ring is not particularly limited as long as the desired sensitization effect is obtained. The number of rings is preferably 2 or more, more preferably 3 or more, particularly preferably 3 or more and 6 or less, and most preferably 3 or 4. Furthermore, as long as the condensed polycyclic aromatic hydrocarbon compound or the condensed polycyclic aromatic heterocyclic compound has aromaticity, the monocyclic ring forming the condensed polycyclic ring may not necessarily be an aromatic ring.

作為縮合多環式芳香族烴化合物、或縮合多環式芳香族雜環化合物中所包含之縮合多環之較佳之例,可列舉:苊環、菲環、蒽環、稠四苯環、𠮿

Figure 108139902-A0304-12-01
環、及硫𠮿
Figure 108139902-A0304-12-01
環。該等環中,較佳為蒽環、稠四苯環、及硫𠮿
Figure 108139902-A0304-12-01
環。Preferable examples of the condensed polycyclic ring contained in the condensed polycyclic aromatic hydrocarbon compound or the condensed polycyclic aromatic heterocyclic compound include: acenaphthene ring, phenanthrene ring, anthracene ring, fused tetraphenyl ring, 𠮿
Figure 108139902-A0304-12-01
Ring, and sulfur 𠮿
Figure 108139902-A0304-12-01
ring. Among these rings, anthracene ring, fused tetraphenyl ring, and sulfur are preferred.
Figure 108139902-A0304-12-01
ring.

作為包含蒽環且適宜用作增感劑(E)之化合物之具體例,可列舉:9,10-雙(乙醯氧基)蒽、9,10-雙(丙醯氧基)蒽、9,10-雙(正丙基羰氧基)蒽、9,10-雙(異丙基羰氧基)蒽、9,10-雙(正丁基羰氧基)蒽、9,10-雙(異丁基羰氧基)蒽、9,10-雙(正戊基羰氧基)蒽、9,10-雙(正己基羰氧基)蒽、9,10-雙(正庚基羰氧基)蒽、9,10-雙(2-乙基己醯氧基)蒽、9,10-雙(正辛基羰氧基)蒽、9,10-雙(正壬基羰氧基)蒽、9,10-雙(正癸基羰氧基)蒽、9,10-雙(苯甲醯氧基)蒽、9,10-雙(4-甲基苯甲醯氧基)蒽、9,10-雙(2-萘甲醯氧基)蒽、2-甲基-9,10-雙(乙醯氧基)蒽、2-甲基-9,10-雙(丙醯氧基)蒽、2-甲基-9,10-雙(正丙基羰氧基)蒽、2-甲基-9,10-雙(異丙基羰氧基)蒽、2-甲基-9,10-雙(正丁基羰氧基)蒽、2-甲基-9,10-雙(異丁基羰氧基)蒽、2-甲基-9,10-雙(正戊基羰氧基)蒽、2-甲基-9,10-雙(正己基羰氧基)蒽、2-甲基-9,10-雙(苯甲醯氧基)蒽、2-甲基-9,10-雙(4-甲基苯甲醯氧基)蒽、2-甲基-9,10-雙(2-萘甲醯氧基)蒽、1-甲基-9,10-雙(乙醯氧基)蒽、1-甲基-9,10-雙(丙醯氧基)蒽、1-甲基-9,10-雙(正丙基羰氧基)蒽、1-甲基-9,10-雙(異丙基羰氧基)蒽、1-甲基-9,10-雙(正丁基羰氧基)蒽、1-甲基-9,10-雙(異丁基羰氧基)蒽、1-甲基-9,10-雙(正戊基羰氧基)蒽、1-甲基-9,10-雙(正己基羰氧基)蒽、1-甲基-9,10-雙(苯甲醯氧基)蒽、1-甲基-9,10-雙(4-甲基苯甲醯氧基)蒽、1-甲基-9,10-雙(2-萘甲醯氧基)蒽、2-乙基-9,10-雙(乙醯氧基)蒽、2-乙基-9,10-雙(丙醯氧基)蒽、2-乙基-9,10-雙(正丙基羰氧基)蒽、2-乙基-9,10-雙(異丁基羰氧基)蒽、2-乙基-9,10-雙(正丁基羰氧基)蒽、2-乙基-9,10-雙(異丁基羰氧基)蒽、2-乙基-9,10-雙(正戊基羰氧基)蒽、2-乙基-9,10-雙(正己基羰氧基)蒽、2-乙基-9,10-雙(苯甲醯氧基)蒽、2-乙基-9,10-雙(4-乙基-苯甲醯氧基)蒽、2-乙基-9,10-雙(2-萘甲醯氧基)蒽、1-乙基-9,10-雙(乙醯氧基)蒽、1-乙基-9,10-雙(丙醯氧基)蒽、1-乙基-9,10-雙(正丙基羰氧基)蒽、1-乙基-9,10-雙(異丙基羰氧基)蒽、1-乙基-9,10-雙(正丁基羰氧基)蒽、1-乙基-9,10-雙(異丁基羰氧基)蒽、1-乙基-9,10-雙(正戊基羰氧基)蒽、1-乙基-9,10-雙(正己基羰氧基)蒽、1-乙基-9,10-雙(苯甲醯氧基)蒽、1-乙基-9,10-雙(4-乙基-苯甲醯氧基)蒽、1-乙基-9,10-雙(2-萘甲醯氧基)蒽、1-(第三丁基)-9,10-雙(正丙基羰氧基)蒽、1-(第三丁基)-9,10-雙(異丙基羰氧基)蒽、1-(第三丁基)-9,10-雙(正丁基羰氧基)蒽、1-(第三丁基)-9,10-雙(異丁基羰氧基)蒽、1-(第三丁基)-9,10-雙(正戊基羰氧基)蒽、1-(第三丁基)-9,10-雙(正己基羰氧基)蒽、1-(第三丁基)-9,10-雙(苯甲醯氧基)蒽、1-(第三丁基)-9,10-雙(4-(第三丁基)-苯甲醯氧基)蒽、1-(第三丁基)-9,10-雙(2-萘甲醯氧基)蒽、2-(第三丁基)-9,10-雙(正丙基羰氧基)蒽、2-(第三丁基)-9,10-雙(異丙基羰氧基)蒽、2-(第三丁基)-9,10-雙(正丁基羰氧基)蒽、2-(第三丁基)-9,10-雙(異丁基羰氧基)蒽、2-(第三丁基)-9,10-雙(正戊基羰氧基)蒽、2-(第三丁基)-9,10-雙(正己基羰氧基)蒽、2-(第三丁基)-9,10-雙(苯甲醯氧基)蒽、2-(第三丁基)-9,10-雙(4-(第三丁基)-苯甲醯氧基)蒽、2-(第三丁基)-9,10-雙(2-萘甲醯氧基)蒽、2-戊基-9,10-雙(正丙基羰氧基)蒽、2-戊基-9,10-雙(異丙基羰氧基)蒽、2-戊基-9,10-雙(正丁基羰氧基)蒽、2-戊基-9,10-雙(異丁基羰氧基)蒽、2-戊基-9,10-雙(正戊基羰氧基)蒽、2-戊基-9,10-雙(正己基羰氧基)蒽、2-戊基-9,10-雙(苯甲醯氧基)蒽、2-戊基-9,10-雙(4-(第三丁基)-苯甲醯氧基)蒽、及2-戊基-9,10-雙(2-萘甲醯氧基)蒽等。Specific examples of compounds containing anthracene rings and suitable as sensitizers (E) include 9,10-bis(acetoxy)anthracene, 9,10-bis(propionoxy)anthracene, 9 ,10-bis(n-propylcarbonyloxy)anthracene, 9,10-bis(isopropylcarbonyloxy)anthracene, 9,10-bis(n-butylcarbonyloxy)anthracene, 9,10-bis( Isobutylcarbonyloxy)anthracene, 9,10-bis(n-pentylcarbonyloxy)anthracene, 9,10-bis(n-hexylcarbonyloxy)anthracene, 9,10-bis(n-heptylcarbonyloxy) )Anthracene, 9,10-bis(2-ethylhexyloxy)anthracene, 9,10-bis(n-octylcarbonyloxy)anthracene, 9,10-bis(n-nonylcarbonyloxy)anthracene, 9,10-bis(n-decylcarbonyloxy)anthracene, 9,10-bis(benzyloxy)anthracene, 9,10-bis(4-methylbenzyloxy)anthracene, 9,10 -Bis(2-naphthyloxy)anthracene, 2-methyl-9,10-bis(acetoxy)anthracene, 2-methyl-9,10-bis(propionyloxy)anthracene, 2 -Methyl-9,10-bis(n-propylcarbonyloxy)anthracene, 2-methyl-9,10-bis(isopropylcarbonyloxy)anthracene, 2-methyl-9,10-bis( N-butylcarbonyloxy)anthracene, 2-methyl-9,10-bis(isobutylcarbonyloxy)anthracene, 2-methyl-9,10-bis(n-pentylcarbonyloxy)anthracene, 2 -Methyl-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-methyl-9,10-bis(benzyloxy)anthracene, 2-methyl-9,10-bis(4- Methylbenzyloxy)anthracene, 2-methyl-9,10-bis(2-naphthyloxy)anthracene, 1-methyl-9,10-bis(acetoxy)anthracene, 1 -Methyl-9,10-bis(propionyloxy)anthracene, 1-methyl-9,10-bis(n-propylcarbonyloxy)anthracene, 1-methyl-9,10-bis(isopropyl) Carbonyloxy)anthracene, 1-methyl-9,10-bis(n-butylcarbonyloxy)anthracene, 1-methyl-9,10-bis(isobutylcarbonyloxy)anthracene, 1-methyl -9,10-bis(n-pentylcarbonyloxy)anthracene, 1-methyl-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-methyl-9,10-bis(benzyl Oxy)anthracene, 1-methyl-9,10-bis(4-methylbenzyloxy)anthracene, 1-methyl-9,10-bis(2-naphthyloxy)anthracene, 2 -Ethyl-9,10-bis(acetoxy)anthracene, 2-ethyl-9,10-bis(propionoxy)anthracene, 2-ethyl-9,10-bis(n-propylcarbonyl) Oxy)anthracene, 2-ethyl-9,10-bis(isobutylcarbonyloxy)anthracene, 2-ethyl-9,10-bis(n-butylcarbonyloxy)anthracene, 2-ethyl- 9,10-bis(isobutylcarbonyloxy)anthracene, 2-ethyl-9,10-bis(n-pentylcarbonyloxy)anthracene, 2-ethyl-9,10-bis(n-hexylcarbonyloxy) Yl)anthracene, 2-ethyl-9,10-bis(benzyloxy)anthracene, 2-ethyl-9,10-bis(4-ethyl-benzyloxy)anthracene, 2-ethyl Base-9,10-bis(2-naphthyloxy)anthracene, 1-ethyl-9,10-bis(acetoxy)anthracene, 1-ethyl -9,10-bis(propionyloxy)anthracene, 1-ethyl-9,10-bis(n-propylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(isopropylcarbonyl) Oxy)anthracene, 1-ethyl-9,10-bis(n-butylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(isobutylcarbonyloxy)anthracene, 1-ethyl- 9,10-bis(n-pentylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(benzyloxy) )Anthracene, 1-ethyl-9,10-bis(4-ethyl-benzyloxy)anthracene, 1-ethyl-9,10-bis(2-naphthyloxy)anthracene, 1- (Tertiary butyl)-9,10-bis(n-propylcarbonyloxy)anthracene, 1-(tertiary butyl)-9,10-bis(isopropylcarbonyloxy)anthracene, 1-(th Tributyl)-9,10-bis(n-butylcarbonyloxy)anthracene, 1-(tert-butyl)-9,10-bis(isobutylcarbonyloxy)anthracene, 1-(tert-butyl) Base)-9,10-bis(n-pentylcarbonyloxy)anthracene, 1-(tertiary butyl)-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-(tertiarybutyl)- 9,10-bis(benzyloxy)anthracene, 1-(tert-butyl)-9,10-bis(4-(tert-butyl)-benzyloxy)anthracene, 1-(th Tributyl)-9,10-bis(2-naphthoxy)anthracene, 2-(tertiary butyl)-9,10-bis(n-propylcarbonyloxy)anthracene, 2-(third Butyl)-9,10-bis(isopropylcarbonyloxy)anthracene, 2-(tert-butyl)-9,10-bis(n-butylcarbonyloxy)anthracene, 2-(tert-butyl) )-9,10-bis(isobutylcarbonyloxy)anthracene, 2-(tert-butyl)-9,10-bis(n-pentylcarbonyloxy)anthracene, 2-(tert-butyl)- 9,10-bis(n-hexylcarbonyloxy)anthracene, 2-(tertiary butyl)-9,10-bis(benzyloxy)anthracene, 2-(tertiary butyl)-9,10- Bis(4-(tert-butyl)-benzyloxy)anthracene, 2-(tert-butyl)-9,10-bis(2-naphthyloxy)anthracene, 2-pentyl-9 ,10-bis(n-propylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(isopropylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(n-butylcarbonyloxy) Yl)anthracene, 2-pentyl-9,10-bis(isobutylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(n-pentylcarbonyloxy)anthracene, 2-pentyl-9 , 10-bis(n-hexylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(benzyloxy)anthracene, 2-pentyl-9,10-bis(4-(tertiary butyl) )-Benzyloxy)anthracene, and 2-pentyl-9,10-bis(2-naphthyloxy)anthracene.

經鹵素原子取代之蒽化合物亦較佳地作為增感劑(E)。作為鹵素原子,可列舉:氟原子、氯原子、溴原子、或碘原子。Anthracene compounds substituted with halogen atoms are also preferred as sensitizers (E). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom.

作為經鹵素原子取代之蒽化合物且較佳地作為增感劑(E)之化合物之具體例,可列舉:2-氯-9,10-雙(乙醯氧基)蒽、2-氯-9,10-雙(丙醯氧基)蒽、2-氯-9,10-雙(正丙基羰氧基)蒽、2-氯-9,10-雙(異丙基羰氧基)蒽、2-氯-9,10-雙(正丁基羰氧基)蒽、2-氯-9,10-雙(異丁基羰氧基)蒽、2-氯-9,10-雙(正戊基羰氧基)蒽、2-氯-9,10-雙(正己基羰氧基)蒽、2-氯-9,10-雙(苯甲醯氧基)蒽、2-氯-9,10-雙(4-甲基苯甲醯氧基)蒽、2-氯-9,10-雙(2-萘甲醯氧基)蒽、1-氯-9,10-雙(乙醯氧基)蒽、1-氯-9,10-雙(丙醯氧基)蒽、1-氯-9,10-雙(正丙基羰氧基)蒽、1-氯-9,10-雙(異丙基羰氧基)蒽、1-氯-9,10-雙(正丁基羰氧基)蒽、1-氯-9,10-雙(異丁基羰氧基)蒽、1-氯-9,10-雙(正戊基羰氧基)蒽、1-氯-9,10-雙(正己基羰氧基)蒽、1-氯-9,10-雙(苯甲醯氧基)蒽、1-氯-9,10-雙(4-甲基苯甲醯氧基)蒽、1-氯-9,10-雙(2-萘甲醯氧基)蒽、2-氟-9,10-雙(乙醯氧基)蒽、2-氟-9,10-雙(丙醯氧基)蒽、2-氟-9,10-雙(正丙基羰氧基)蒽、2-氟-9,10-雙(異丙基羰氧基)蒽、2-氟-9,10-雙(正丁基羰氧基)蒽、2-氟-9,10-雙(異丁基羰氧基)蒽、2-氟-9,10-雙(正戊基羰氧基)蒽、2-氟-9,10-雙(正己基羰氧基)蒽、2-氟-9,10-雙(苯甲醯氧基)蒽、2-氟-9,10-雙(4-甲基苯甲醯氧基)蒽、2-氟-9,10-雙(2-萘甲醯氧基)蒽、1-氟-9,10-雙(乙醯氧基)蒽、1-氟-9,10-雙(丙醯氧基)蒽、1-氟-9,10-雙(正丙基羰氧基)蒽、1-氟-9,10-雙(異丙基羰氧基)蒽、1-氟-9,10-雙(正丁基羰氧基)蒽、1-氟-9,10-雙(異丁基羰氧基)蒽、1-氟-9,10-雙(正戊基羰氧基)蒽、1-氟-9,10-雙(正己基羰氧基)蒽、1-氟-9,10-雙(苯甲醯氧基)蒽、1-氟-9,10-雙(4-甲基苯甲醯氧基)蒽、1-氟-9,10-雙(2-萘甲醯氧基)蒽、2-溴-9,10-雙(乙醯氧基)蒽、2-溴-9,10-雙(丙醯氧基)蒽、2-溴-9,10-雙(正丙基羰氧基)蒽、2-溴-9,10-雙(異丙基羰氧基)蒽、2-溴-9,10-雙(正丁基羰氧基)蒽、2-溴-9,10-雙(異丁基羰氧基)蒽、2-溴-9,10-雙(正戊基羰氧基)蒽、2-溴-9,10-雙(正己基羰氧基)蒽、2-溴-9,10-雙(苯甲醯氧基)蒽、2-溴-9,10-雙(4-甲基苯甲醯氧基)蒽、2-溴-9,10-雙(2-萘甲醯氧基)蒽、1-溴-9,10-雙(乙醯氧基)蒽、1-溴-9,10-雙(丙醯氧基)蒽、1-溴-9,10-雙(正丙基羰氧基)蒽、1-溴-9,10-雙(異丙基羰氧基)蒽、1-溴-9,10-雙(正丁基羰氧基)蒽、1-溴-9,10-雙(異丁基羰氧基)蒽、1-溴-9,10-雙(正戊基羰氧基)蒽、1-溴-9,10-雙(正己基羰氧基)蒽、1-溴-9,10-雙(苯甲醯氧基)蒽、1-溴-9,10-雙(4-甲基苯甲醯氧基)蒽、及1-溴-9,10-雙(2-萘甲醯氧基)蒽等。Specific examples of anthracene compounds substituted by halogen atoms and preferably used as sensitizers (E) include: 2-chloro-9,10-bis(acetoxy)anthracene, 2-chloro-9 , 10-bis(propionyloxy)anthracene, 2-chloro-9,10-bis(n-propylcarbonyloxy)anthracene, 2-chloro-9,10-bis(isopropylcarbonyloxy)anthracene, 2-chloro-9,10-bis(n-butylcarbonyloxy)anthracene, 2-chloro-9,10-bis(isobutylcarbonyloxy)anthracene, 2-chloro-9,10-bis(n-pentyl Carbonyloxy)anthracene, 2-chloro-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-chloro-9,10-bis(benzyloxy)anthracene, 2-chloro-9,10 -Bis(4-methylbenzyloxy)anthracene, 2-chloro-9,10-bis(2-naphthyloxy)anthracene, 1-chloro-9,10-bis(acetoxy) Anthracene, 1-chloro-9,10-bis(propionyloxy)anthracene, 1-chloro-9,10-bis(n-propylcarbonyloxy)anthracene, 1-chloro-9,10-bis(isopropyl) Carbonyloxy)anthracene, 1-chloro-9,10-bis(n-butylcarbonyloxy)anthracene, 1-chloro-9,10-bis(isobutylcarbonyloxy)anthracene, 1-chloro-9 , 10-bis(n-pentylcarbonyloxy)anthracene, 1-chloro-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-chloro-9,10-bis(benzyloxy)anthracene, 1-chloro-9,10-bis(4-methylbenzyloxy)anthracene, 1-chloro-9,10-bis(2-naphthyloxy)anthracene, 2-fluoro-9,10- Bis(acetoxy)anthracene, 2-fluoro-9,10-bis(propionoxy)anthracene, 2-fluoro-9,10-bis(n-propylcarbonyloxy)anthracene, 2-fluoro-9 , 10-bis(isopropylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(n-butylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(isobutylcarbonyloxy) Anthracene, 2-fluoro-9,10-bis(n-pentylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(benzene Formyloxy)anthracene, 2-fluoro-9,10-bis(4-methylbenzyloxy)anthracene, 2-fluoro-9,10-bis(2-naphthyloxy)anthracene, 1 -Fluoro-9,10-bis(acetoxy)anthracene, 1-fluoro-9,10-bis(propionyloxy)anthracene, 1-fluoro-9,10-bis(n-propylcarbonyloxy) Anthracene, 1-fluoro-9,10-bis(isopropylcarbonyloxy)anthracene, 1-fluoro-9,10-bis(n-butylcarbonyloxy)anthracene, 1-fluoro-9,10-bis( Isobutylcarbonyloxy)anthracene, 1-fluoro-9,10-bis(n-pentylcarbonyloxy)anthracene, 1-fluoro-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-fluoro- 9,10-bis(benzyloxy)anthracene, 1-fluoro-9,10-bis(4-methylbenzyloxy)anthracene, 1-fluoro-9,10-bis(2-naphthylmethyl) Acetyloxy)anthracene, 2-bromo-9,10-bis(acetoxy)anthracene, 2-bromo-9,10-bis(propionyloxy)anthracene, 2-bromo-9,10-bis( N-Propylcarbonyloxy)anthracene, 2-bromo-9,10-bis(isopropylcarbonyloxy)anthracene, 2-bromo-9,10- Bis(n-butylcarbonyloxy)anthracene, 2-bromo-9,10-bis(isobutylcarbonyloxy)anthracene, 2-bromo-9,10-bis(n-pentylcarbonyloxy)anthracene, 2 -Bromo-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-bromo-9,10-bis(benzyloxy)anthracene, 2-bromo-9,10-bis(4-methylbenzene) Formyloxy)anthracene, 2-bromo-9,10-bis(2-naphthyloxy)anthracene, 1-bromo-9,10-bis(acetoxy)anthracene, 1-bromo-9, 10-bis(propionyloxy)anthracene, 1-bromo-9,10-bis(n-propylcarbonyloxy)anthracene, 1-bromo-9,10-bis(isopropylcarbonyloxy)anthracene, 1 -Bromo-9,10-bis(n-butylcarbonyloxy)anthracene, 1-bromo-9,10-bis(isobutylcarbonyloxy)anthracene, 1-bromo-9,10-bis(n-pentyl) Carbonyloxy)anthracene, 1-bromo-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-bromo-9,10-bis(benzyloxy)anthracene, 1-bromo-9,10- Bis(4-methylbenzyloxy)anthracene, 1-bromo-9,10-bis(2-naphthyloxy)anthracene, etc.

經烷氧基取代之蒽化合物亦較佳地作為增感劑(E)。 作為經烷氧基取代之蒽化合物且較佳地作為增感劑(E)之化合物之具體例,可列舉:9,10-二甲氧基蒽、9,10-二乙氧基蒽、9,10-雙(正丙氧基)蒽、9,10-雙(正丁氧基)蒽、9,10-雙(正戊氧基)蒽、9,10-雙(異戊氧基)蒽、9,10-雙(正己氧基)蒽、9,10-雙(正庚氧基)蒽、9,10-雙(正辛氧基)蒽、9,10-雙(2-乙基己氧基)蒽、9-甲氧基蒽、9-乙氧基蒽、9-(正丙氧基)蒽、9-(正丁氧基)蒽、9-(正戊氧基)蒽、9-(異戊氧基)蒽、9-(正己氧基)蒽、9-(正庚氧基)蒽、9-(正辛氧基)蒽、9-(2-乙基己氧基)蒽、2-甲基-9,10-二甲氧基蒽、2-甲基-9,10-二乙氧基蒽、2-甲基-9,10-雙(正丙氧基)蒽、2-甲基-9,10-雙(正丁氧基)蒽、2-甲基-9,10-雙(正戊氧基)蒽、2-甲基-9,10-雙(異戊氧基)蒽、2-甲基-9,10-雙(正己氧基)蒽、2-甲基-9,10-雙(正庚氧基)蒽、2-甲基-9,10-雙(正辛氧基)蒽、2-甲基-9,10-雙(2-乙基己氧基)蒽、2-乙基-9,10-二甲氧基蒽、2-乙基-9,10-二乙氧基蒽、2-乙基-9,10-雙(正丙氧基)蒽、2-乙基-9,10-雙(正丁氧基)蒽、2-乙基-9,10-雙(正戊氧基)蒽、2-乙基-9,10-雙(異戊氧基)蒽、2-乙基-9,10-雙(正己氧基)蒽、2-乙基-9,10-雙(正庚氧基)蒽、2-乙基-9,10-雙(正辛氧基)蒽、2-乙基-9,10-雙(2-乙基己氧基)蒽、2-甲基-9-甲氧基蒽、2-甲基-9-乙氧基蒽、2-甲基-9-(正丙氧基)蒽、2-甲基-9-(正丁氧基)蒽、2-甲基-9-(正戊氧基)蒽、2-甲基-9-(異戊氧基)蒽、2-甲基-9-(正己氧基)蒽、2-甲基-9-(正庚氧基)蒽、2-甲基-9-(正辛氧基)蒽、2-甲基-9-(2-乙基己氧基)蒽、2-乙基-9-甲氧基蒽、2-乙基-9-乙氧基蒽、2-乙基-9-(正丙氧基)蒽、2-乙基-9-(正丁氧基)蒽、2-乙基-9-(正戊氧基)蒽、2-乙基-9-(異戊氧基)蒽、2-乙基-9-(正己氧基)蒽、2-乙基-9-(正庚氧基)蒽、2-乙基-9-(正辛氧基)蒽、2-乙基-9-(2-乙基己氧基)蒽、2-氯-9,10-二甲氧基蒽、2-氯-9,10-二乙氧基蒽、2-氯-9,10-雙(正丙氧基)蒽、2-氯-9,10-雙(正丁氧基)蒽、2-氯-9,10-雙(正戊氧基)蒽、2-氯-9,10-雙(異戊氧基)蒽、2-氯-9,10-雙(正己氧基)蒽、2-氯-9,10-雙(正庚氧基)蒽、2-氯-9,10-雙(正辛氧基)蒽、2-氯-9,10-雙(2-乙基己氧基)蒽、2-溴-9,10-二甲氧基蒽、2-溴-9,10-二乙氧基蒽、2-溴-9,10-雙(正丙氧基)蒽、2-溴-9,10-雙(正丁氧基)蒽、2-溴-9,10-雙(正戊氧基)蒽、2-溴-9,10-雙(異戊氧基)蒽、2-溴-9,10-雙(正己氧基)蒽、2-溴-9,10-雙(正庚氧基)蒽、2-溴-9,10-雙(正辛氧基)蒽、2-溴-9,10-雙(2-乙基己氧基)蒽、2-氯-9-甲氧基蒽、2-氯-9-乙氧基蒽、2-氯-9-(正丙氧基)蒽、2-氯-9-(正丁氧基)蒽、2-氯-9-(正戊氧基)蒽、2-氯-9-(異戊氧基)蒽、2-氯-9-(正己氧基)蒽、2-氯-9-(正庚氧基)蒽、2-氯-9-(正辛氧基)蒽、2-氯-9-(2-乙基己氧基)蒽、2-溴-9-甲氧基蒽、2-溴-9-乙氧基蒽、2-溴-9-(正丙氧基)蒽、2-溴-9-(正丁氧基)蒽、2-溴-9-(正戊氧基)蒽、2-乙基-9-(異戊氧基)蒽、2-溴-9-(正己氧基)蒽、2-溴-9-(正庚氧基)蒽、2-溴-9-(正辛氧基)蒽、及2-溴-9-(2-乙基己氧基)蒽等。Anthracene compounds substituted with alkoxy groups are also preferred as sensitizers (E). Specific examples of anthracene compounds substituted with alkoxy groups and preferably as sensitizer (E) include: 9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 9 ,10-bis(n-propoxy)anthracene, 9,10-bis(n-butoxy)anthracene, 9,10-bis(n-pentoxy)anthracene, 9,10-bis(isopentoxy)anthracene , 9,10-bis(n-hexyloxy)anthracene, 9,10-bis(n-heptyloxy)anthracene, 9,10-bis(n-octyloxy)anthracene, 9,10-bis(2-ethylhexyl) Oxy)anthracene, 9-methoxyanthracene, 9-ethoxyanthracene, 9-(n-propoxy)anthracene, 9-(n-butoxy)anthracene, 9-(n-pentoxy)anthracene, 9 -(Isopentyloxy)anthracene, 9-(n-hexyloxy)anthracene, 9-(n-heptyloxy)anthracene, 9-(n-octyloxy)anthracene, 9-(2-ethylhexyloxy)anthracene , 2-methyl-9,10-dimethoxyanthracene, 2-methyl-9,10-diethoxyanthracene, 2-methyl-9,10-bis(n-propoxy)anthracene, 2 -Methyl-9,10-bis(n-butoxy)anthracene, 2-methyl-9,10-bis(n-pentoxy)anthracene, 2-methyl-9,10-bis(isopentoxy) )Anthracene, 2-methyl-9,10-bis(n-hexyloxy)anthracene, 2-methyl-9,10-bis(n-heptyloxy)anthracene, 2-methyl-9,10-bis(n Octyloxy)anthracene, 2-methyl-9,10-bis(2-ethylhexyloxy)anthracene, 2-ethyl-9,10-dimethoxyanthracene, 2-ethyl-9,10 -Diethoxyanthracene, 2-ethyl-9,10-bis(n-propoxy)anthracene, 2-ethyl-9,10-bis(n-butoxy)anthracene, 2-ethyl-9, 10-bis(n-pentyloxy)anthracene, 2-ethyl-9,10-bis(isopentyloxy)anthracene, 2-ethyl-9,10-bis(n-hexyloxy)anthracene, 2-ethyl -9,10-bis(n-heptyloxy)anthracene, 2-ethyl-9,10-bis(n-octyloxy)anthracene, 2-ethyl-9,10-bis(2-ethylhexyloxy) )Anthracene, 2-methyl-9-methoxyanthracene, 2-methyl-9-ethoxyanthracene, 2-methyl-9-(n-propoxy)anthracene, 2-methyl-9-( N-Butoxy)anthracene, 2-methyl-9-(n-pentyloxy)anthracene, 2-methyl-9-(isopentyloxy)anthracene, 2-methyl-9-(n-hexyloxy)anthracene , 2-methyl-9-(n-heptyloxy)anthracene, 2-methyl-9-(n-octyloxy)anthracene, 2-methyl-9-(2-ethylhexyloxy)anthracene, 2 -Ethyl-9-methoxyanthracene, 2-ethyl-9-ethoxyanthracene, 2-ethyl-9-(n-propoxy)anthracene, 2-ethyl-9-(n-butoxy) )Anthracene, 2-ethyl-9-(n-pentyloxy)anthracene, 2-ethyl-9-(isopentyloxy)anthracene, 2-ethyl-9-(n-hexyloxy)anthracene, 2-ethyl Base-9-(n-heptyloxy)anthracene, 2-ethyl-9-(n-octyloxy)anthracene, 2-ethyl-9-(2-ethylhexyloxy)anthracene, 2-chloro-9 ,10-Dimethoxyanthracene, 2-chloro-9,10-diethoxyanthracene, 2-chloro-9,10-bis(n-propoxy)anthracene, 2-chloro-9,10-bis( positive Butoxy)anthracene, 2-chloro-9,10-bis(n-pentyloxy)anthracene, 2-chloro-9,10-bis(isopentyloxy)anthracene, 2-chloro-9,10-bis( N-hexyloxy)anthracene, 2-chloro-9,10-bis(n-heptyloxy)anthracene, 2-chloro-9,10-bis(n-octyloxy)anthracene, 2-chloro-9,10-bis( 2-ethylhexyloxy)anthracene, 2-bromo-9,10-dimethoxyanthracene, 2-bromo-9,10-diethoxyanthracene, 2-bromo-9,10-bis(n-propyl Oxy)anthracene, 2-bromo-9,10-bis(n-butoxy)anthracene, 2-bromo-9,10-bis(n-pentoxy)anthracene, 2-bromo-9,10-bis(iso Pentyloxy)anthracene, 2-bromo-9,10-bis(n-hexyloxy)anthracene, 2-bromo-9,10-bis(n-heptyloxy)anthracene, 2-bromo-9,10-bis(n Octyloxy)anthracene, 2-bromo-9,10-bis(2-ethylhexyloxy)anthracene, 2-chloro-9-methoxyanthracene, 2-chloro-9-ethoxyanthracene, 2- Chloro-9-(n-propoxy)anthracene, 2-chloro-9-(n-butoxy)anthracene, 2-chloro-9-(n-pentoxy)anthracene, 2-chloro-9-(isopentoxy) Yl)anthracene, 2-chloro-9-(n-hexyloxy)anthracene, 2-chloro-9-(n-heptyloxy)anthracene, 2-chloro-9-(n-octyloxy)anthracene, 2-chloro-9 -(2-Ethylhexyloxy)anthracene, 2-bromo-9-methoxyanthracene, 2-bromo-9-ethoxyanthracene, 2-bromo-9-(n-propoxy)anthracene, 2- Bromo-9-(n-butoxy)anthracene, 2-bromo-9-(n-pentyloxy)anthracene, 2-ethyl-9-(isopentyloxy)anthracene, 2-bromo-9-(n-hexyloxy) Yl)anthracene, 2-bromo-9-(n-heptyloxy)anthracene, 2-bromo-9-(n-octyloxy)anthracene, and 2-bromo-9-(2-ethylhexyloxy)anthracene, etc. .

以上所說明之蒽化合物中,就製造之容易度及作為增感劑(E)之性能之方面而言,較佳為9,10-雙(乙醯氧基)蒽、9,10-雙(丙醯氧基)蒽、9,10-雙(正丙基羰氧基)蒽、9,10-雙(異丙基羰氧基)蒽、9,10-雙(正丁基羰氧基)蒽、9,10-雙(異丁基羰氧基)蒽、9,10-雙(正己醯氧基)蒽、9,10-雙(正庚醯氧基)蒽、9,10-雙(正辛醯基氧基)蒽、9,10-雙(2-乙基己醯氧基)蒽、9,10-雙(正壬醯氧基)蒽、9,10-二乙氧基蒽、9,10-二丙氧基蒽、及9,10-二丁氧基蒽。Among the anthracene compounds described above, in terms of ease of production and performance as a sensitizer (E), 9,10-bis(acetoxy)anthracene, 9,10-bis( Propyloxy)anthracene, 9,10-bis(n-propylcarbonyloxy)anthracene, 9,10-bis(isopropylcarbonyloxy)anthracene, 9,10-bis(n-butylcarbonyloxy) Anthracene, 9,10-bis(isobutylcarbonyloxy)anthracene, 9,10-bis(n-hexyloxy)anthracene, 9,10-bis(n-heptanyloxy)anthracene, 9,10-bis( N-octyloxy)anthracene, 9,10-bis(2-ethylhexyloxy)anthracene, 9,10-bis(n-nonanoyloxy)anthracene, 9,10-diethoxyanthracene, 9,10 10-dipropoxyanthracene, and 9,10-dibutoxyanthracene.

作為包含稠四苯環且適宜用作增感劑(E)之化合物之具體例,可列舉: 2-甲基-5,11-二側氧基-6,12-雙(乙醯氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(丙醯氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正丙基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(異丙基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正丁基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(異丁基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正戊基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正己基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正庚基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(乙醯氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(丙醯氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正丙基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(異丙基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正丁基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(異丁基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正戊基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正己基羰氧基)稠四苯、及2-乙基-5,11-二側氧基-6,12-雙(正庚基羰氧基)稠四苯等烷基羰氧基取代稠四苯化合物; 2-甲基-5,11-二側氧基-6,12-雙(苯甲醯氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(鄰甲苯醯氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(間甲苯醯氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(對甲苯醯氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(α-萘甲醯氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(β-萘甲醯氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(苯甲醯氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(鄰甲苯醯氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(間甲苯醯氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(對甲苯醯氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(α-萘甲醯氧基)稠四苯、及2-乙基-5,11-二側氧基-6,12-雙(β-萘甲醯氧基)稠四苯等芳醯氧基取代稠四苯化合物; 2-甲基-5,11-二側氧基-6,12-雙(甲氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(乙氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正丙氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(異丙氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正丁氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(異丁氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正戊氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正己氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正庚氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(正辛氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(甲氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(乙氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正丙氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(異丙氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正丁氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(異丁氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正戊氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正己氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(正庚氧基羰氧基)稠四苯、及2-乙基-5,11-二側氧基-6,12-雙(正辛氧基羰氧基)稠四苯等烷氧基羰氧基取代稠四苯化合物;以及 2-甲基-5,11-二側氧基-6,12-雙(苯氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(鄰甲苯氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(間甲苯氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(對甲苯氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(α-萘氧基羰氧基)稠四苯、2-甲基-5,11-二側氧基-6,12-雙(β-萘氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(苯氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(鄰甲苯氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(間甲苯氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(對甲苯氧基羰氧基)稠四苯、2-乙基-5,11-二側氧基-6,12-雙(α-萘氧基羰氧基)稠四苯、及2-乙基-5,11-二側氧基-6,12-雙(β-萘氧基羰氧基)稠四苯等之芳醯氧基羰氧基取代稠四苯化合物。Specific examples of compounds containing fused tetraphenyl ring and suitable for use as sensitizer (E) include: 2-methyl-5,11-di-side oxy-6,12-bis(acetoxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(propyl (Oxy) fused tetrabenzene, 2-methyl-5,11-dilateral oxy-6,12-bis(n-propylcarbonyloxy) fused tetrabenzene, 2-methyl-5,11-dilateral Oxy-6,12-bis(isopropylcarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(n-butylcarbonyloxy) fused tetrabenzene , 2-methyl-5,11-di-side oxy-6,12-bis(isobutylcarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12- Bis(n-pentylcarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(n-hexylcarbonyloxy) fused tetrabenzene, 2-methyl-5, 11-dilateral oxy-6,12-bis(n-heptylcarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-dilateral oxy-6,12-bis(acetoxy) fused Tetrabenzene, 2-Ethyl-5,11-di-side oxy-6,12-bis(propionyloxy) fused tetraphenyl, 2-ethyl-5,11-di-side oxy-6,12- Bis(n-propylcarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(isopropylcarbonyloxy) fused tetrabenzene, 2-ethyl-5 ,11-Di-side oxy-6,12-bis(n-butylcarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(isobutylcarbonyloxy) Group) fused tetrabenzene, 2-ethyl-5,11-dilateral oxy-6,12-bis(n-pentylcarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-dilateral oxy -6,12-bis(n-hexylcarbonyloxy) fused tetrabenzene, and 2-ethyl-5,11-di-side oxy-6,12-bis(n-heptylcarbonyloxy) fused tetrabenzene and other alkanes Carbonyloxy substituted fused tetraphenyl compound; 2-methyl-5,11-dilateral oxy-6,12-bis(benzyloxy) fused tetrabenzene, 2-methyl-5,11-dilateral oxy-6,12-bis( O-toluene oxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis (m-toluene oxy) fused tetrabenzene, 2-methyl-5,11-bis Pendant oxy-6,12-bis(p-tolueneoxy) fused tetrabenzene, 2-methyl-5,11-diside oxy-6,12-bis(α-naphthoxy) fused tetrabenzene Benzene, 2-methyl-5,11-di-oxy-6,12-bis(β-naphthoxy) fused tetrabenzene, 2-ethyl-5,11-di-oxy-6, 12-bis(benzyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(o-tolueneoxy) fused tetrabenzene, 2-ethyl-5 ,11-Di-side oxy-6,12-bis(m-tolyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(p-tolueneoxy) Condensed tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(α-naphthyloxy) fused tetrabenzene, and 2-ethyl-5,11-di-side oxy -6,12-bis(β-naphthoxy) fused tetrabenzene and other aryloxy substituted fused tetrabenzene compounds; 2-methyl-5,11-di-side oxy-6,12-bis(methoxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis (Ethoxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(n-propoxycarbonyloxy) fused tetrabenzene, 2-methyl-5 ,11-Di-side oxy-6,12-bis(isopropoxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(n-butoxy) Carbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(isobutoxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di Pendant oxy-6,12-bis(n-pentyloxycarbonyloxy) condensed tetrabenzene, 2-methyl-5,11-dilateral oxy-6,12-bis(n-hexyloxycarbonyloxy) condensed Tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(n-heptyloxycarbonyloxy) fused tetraphenyl, 2-methyl-5,11-di-side oxy-6 ,12-bis(n-octyloxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(methoxycarbonyloxy) fused tetrabenzene, 2- Ethyl-5,11-di-side oxy-6,12-bis(ethoxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(normal Propoxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(isopropoxycarbonyloxy) fused tetrabenzene, 2-ethyl-5, 11-dilateral oxy-6,12-bis(n-butoxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-dilateral oxy-6,12-bis(isobutoxycarbonyl) Oxy) fused tetrabenzene, 2-ethyl-5,11-dilateral oxy-6,12-bis(n-pentyloxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-dilateral Oxy-6,12-bis(n-hexyloxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(n-heptyloxycarbonyloxy) fused tetrabenzene Benzene, and 2-ethyl-5,11-di-side oxy-6,12-bis(n-octyloxycarbonyloxy) fused tetrabenzene and other alkoxycarbonyloxy substituted fused tetrabenzene compounds; and 2-methyl-5,11-di-side oxy-6,12-bis(phenoxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis (O-tolyloxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(m-tolyloxycarbonyloxy) fused tetrabenzene, 2-methyl- 5,11-Di-side oxy-6,12-bis(p-tolyloxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(α-naphthalene Oxycarbonyloxy) fused tetrabenzene, 2-methyl-5,11-di-side oxy-6,12-bis(β-naphthyloxycarbonyloxy) fused tetrabenzene, 2-ethyl-5, 11-dilateral oxy-6,12-bis(phenoxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-dilateral oxy-6,12-bis(o-tolyloxycarbonyloxy) Group) fused tetrabenzene, 2-ethyl-5,11-dioxo-6,12-bis(m-tolyloxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-dioxo Group-6,12-bis(p-tolyloxycarbonyloxy) fused tetrabenzene, 2-ethyl-5,11-di-side oxy-6,12-bis(α-naphthyloxycarbonyloxy) fused Tetrabenzene, and 2-ethyl-5,11-di-side oxy-6,12-bis(β-naphthyloxycarbonyloxy) fused tetrabenzene and other aryloxycarbonyloxy substituted fused tetrabenzene compounds .

上述包含稠四苯環之化合物中,較佳為5,11-二側氧基-6,12-雙(甲氧基羰氧基)稠四苯、5,11-二側氧基-6,12-雙(乙氧基羰氧基)稠四苯、5,11-二側氧基-6,12-雙(異丙氧基羰氧基)稠四苯、5,11-二側氧基-6,12-雙(異丁氧基羰氧基)稠四苯、5,11-二側氧基-6,12-雙(正丁基羰氧基)稠四苯、5,11-二側氧基-6,12-雙(正戊基羰氧基)稠四苯、5,11-二側氧基-6,12-雙(正庚醯氧基)稠四苯。Among the above-mentioned compounds containing fused tetraphenyl ring, 5,11-dilateral oxy-6,12-bis(methoxycarbonyloxy) fused tetrabenzene, 5,11-dilateral oxy-6, 12-bis(ethoxycarbonyloxy) fused tetrabenzene, 5,11-di-side oxy-6,12-bis(isopropoxycarbonyloxy) fused tetrabenzene, 5,11-di-side oxy -6,12-bis(isobutoxycarbonyloxy) fused tetrabenzene, 5,11-di-side oxy-6,12-bis(n-butylcarbonyloxy) fused tetrabenzene, 5,11-di Pendant oxy-6,12-bis(n-pentylcarbonyloxy) fused tetrabenzene, 5,11-dipened oxy-6,12-bis(n-heptanoyloxy) fused tetrabenzene.

作為適宜用作增感劑(E)之包含硫𠮿

Figure 108139902-A0304-12-01
環之化合物之具體例,可列舉:硫𠮿
Figure 108139902-A0304-12-01
-9酮、2-甲基-9H-硫𠮿
Figure 108139902-A0304-12-01
-9酮、2-異丙基-9H-硫𠮿
Figure 108139902-A0304-12-01
-9酮、1,4-二甲硫基𠮿
Figure 108139902-A0304-12-01
-9酮、及3-甲基-9-側氧基-9H-硫𠮿
Figure 108139902-A0304-12-01
-2-基乙酸酯。Containing sulfur as suitable as a sensitizer (E)
Figure 108139902-A0304-12-01
Specific examples of ring compounds include: sulfur 𠮿
Figure 108139902-A0304-12-01
-9 ketone, 2-methyl-9H-sulfur 𠮿
Figure 108139902-A0304-12-01
-9 Ketone, 2-isopropyl-9H-sulfur𠮿
Figure 108139902-A0304-12-01
-9 Ketone, 1,4-Dimethylthio 𠮿
Figure 108139902-A0304-12-01
-9 ketone, and 3-methyl-9-side oxy-9H-sulfur 𠮿
Figure 108139902-A0304-12-01
-2-yl acetate.

增感劑(E)之含量相對於感光性樹脂組合物中之光聚合起始劑(C)100質量份較佳為5質量份以上60質量份以下,更佳為15質量份以上50質量份以下。若感光性樹脂組合物於上述範圍內含有增感劑,則尤其是利用曝光之硬化反應均勻地進行,容易形成邊緣之角度尤為良好之經圖案化之硬化膜。The content of the sensitizer (E) relative to 100 parts by mass of the photopolymerization initiator (C) in the photosensitive resin composition is preferably from 5 parts by mass to 60 parts by mass, more preferably from 15 parts by mass to 50 parts by mass the following. If the photosensitive resin composition contains a sensitizer within the above-mentioned range, the curing reaction by exposure proceeds uniformly, and it is easy to form a patterned cured film with a particularly good edge angle.

<有機溶劑(S)> 感光性樹脂組合物典型而言,亦可根據調整塗佈性之目的等包含有機溶劑(S)。作為有機溶劑(S),例如可列舉:乙二醇單甲醚、乙二醇單乙醚、乙二醇-正丙醚、乙二醇單-正丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單-正丙醚、二乙二醇單-正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單-正丙醚、丙二醇單-正丁醚、二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單-正丙醚、二丙二醇單-正丁醚、三丙二醇單甲醚、三丙二醇單乙醚等(聚)伸烷基二醇單烷基醚類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等(聚)伸烷基二醇單烷基醚乙酸酯類;二乙二醇二甲醚、二乙二醇甲基乙醚、二乙二醇二乙醚、四氫呋喃等其他醚類;甲基乙基酮、環己酮、2-庚酮、3-庚酮等酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等乳酸烷基酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁烷酸甲酯、乙酸3-甲氧基丁酯、3-甲基-乙酸3-甲氧基丁酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、2-側氧基丁烷酸乙酯等其他酯類;甲苯、二甲苯等芳香族烴類;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等醯胺類等。該等溶劑可單獨使用,亦可將2種以上組合使用。<Organic solvent (S)> The photosensitive resin composition may typically contain an organic solvent (S) according to the purpose of adjusting coatability. As the organic solvent (S), for example, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, two Ethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, Propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol mono (Poly) alkylene glycol monoalkyl ethers such as ether; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol Monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate and other (poly)alkylene glycol monoalkyl ether acetates; diethylene glycol dimethyl ether, diethylene glycol methyl Methyl ethyl ether, diethylene glycol diethyl ether, tetrahydrofuran and other ethers; methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone and other ketones; 2-hydroxypropionic acid methyl ester, 2-hydroxyl Alkyl lactate such as ethyl propionate; ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, 3-ethoxypropionate Methyl ester, ethyl 3-ethoxypropionate, ethyl ethoxy acetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methoxybutyl acetate, 3 -Methyl-acetate 3-methoxybutyl ester, 3-methyl-3-methoxybutyl propionate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isoacetate Butyl ester, n-pentyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate Ester, n-propyl pyruvate, methyl acetylacetate, ethyl acetacetate, ethyl 2-oxobutanoate and other esters; aromatic hydrocarbons such as toluene and xylene; N-methylpyrrole Amines such as pyridone, N,N-dimethylformamide, and N,N-dimethylacetamide. These solvents may be used alone or in combination of two or more kinds.

有機溶劑(S)之使用量可根據感光性樹脂組合物之用途適當決定。作為有機溶劑(S)之使用量,作為一例可列舉感光性樹脂組合物之固形物成分濃度為1質量%以上50質量%以下之範圍的量。The use amount of the organic solvent (S) can be appropriately determined according to the use of the photosensitive resin composition. As an example of the usage amount of the organic solvent (S), the solid content concentration of the photosensitive resin composition is in the range of 1% by mass to 50% by mass.

<其他成分> 感光性樹脂組合物亦可視需要包含除此以外之其他各種添加劑。具體而言,可例示:分散助劑、填充劑、填料、密接促進劑、抗氧化劑、紫外線吸收劑、抗凝聚劑、熱聚合抑制劑、消泡劑、界面活性劑等。<Other ingredients> The photosensitive resin composition may also contain various other additives as needed. Specifically, examples thereof include dispersion aids, fillers, fillers, adhesion promoters, antioxidants, ultraviolet absorbers, anti-agglomeration agents, thermal polymerization inhibitors, defoamers, surfactants, and the like.

作為用於感光性樹脂組合物之熱聚合抑制劑,例如可列舉:對苯二酚、對苯二酚單乙醚等。又,作為消泡劑,可例示:聚矽氧系、氟系等化合物,作為界面活性劑,可例示:陰離子系、陽離子系、非離子等化合物。As a thermal polymerization inhibitor used for a photosensitive resin composition, hydroquinone, hydroquinone monoethyl ether, etc. are mentioned, for example. In addition, examples of the defoaming agent include compounds such as silicone-based and fluorine-based compounds, and examples of surfactants include compounds such as anionic, cationic, and nonionic compounds.

<感光性樹脂組合物之製備方法> 感光性樹脂組合物係藉由將分別所需之量之上述各成分均勻地混合而製備。再者,於所製備之感光性樹脂組合物不包含顏料等不溶性之成分之情形時,亦可使用過濾器進行過濾以使感光性樹脂組合物變得均勻。<Method for preparing photosensitive resin composition> The photosensitive resin composition is prepared by uniformly mixing the above-mentioned components in respective required amounts. Furthermore, when the prepared photosensitive resin composition does not contain insoluble components such as pigments, it is also possible to perform filtration with a filter to make the photosensitive resin composition uniform.

≪經圖案化之硬化膜的製造方法≫ 藉由使用以上所說明之感光性樹脂組合物,能夠形成直進性及對基板之密接性優異,且截面之形狀良好之經圖案化之硬化膜。 具體而言,藉由包括以下步驟之方法製造經圖案化之硬化膜: 將上述感光性樹脂組合物塗佈於基板上而形成塗佈膜; 對塗佈膜進行區域選擇性曝光;及 使曝光後之上述塗佈膜顯影。≪Method of manufacturing patterned cured film≫ By using the photosensitive resin composition described above, it is possible to form a patterned cured film having excellent linearity and adhesion to a substrate, and having a good cross-sectional shape. Specifically, a patterned hardened film is manufactured by a method including the following steps: Coating the above-mentioned photosensitive resin composition on a substrate to form a coating film; Area selective exposure of the coated film; and The above-mentioned coating film after exposure is developed.

將感光性樹脂組合物塗佈於基板上之方法並無特別限定。典型而言,使用輥式塗佈機、反向塗佈機、棒式塗佈機等接觸轉印型塗佈裝置或旋轉器(旋轉式塗佈裝置)、淋幕式平面塗裝機等非接觸型塗佈裝置,將感光性樹脂組合物塗佈於基板上。The method of applying the photosensitive resin composition on the substrate is not particularly limited. Typically, roller coaters, reverse coaters, bar coaters and other contact transfer coating devices or spinners (rotary coating devices), curtain-type flat coating machines, etc. are used. The contact type coating device coats the photosensitive resin composition on the substrate.

然後,視需要使塗佈膜乾燥。乾燥方法並無特別限定。作為乾燥方法,例如可列舉以下方法等:(1)利用加熱板於80℃以上120℃以下,較佳為90℃以上100℃以下之溫度下使其乾燥60秒以上120秒以下之時間;(2)於室溫下放置數小時至數天;(3)放入至熱風加熱器或紅外線加熱器中數十分鐘至數小時而將溶劑去除。Then, the coating film is dried if necessary. The drying method is not particularly limited. Examples of the drying method include the following methods: (1) Using a hot plate to dry at a temperature of 80°C or more and 120°C or less, preferably 90°C or more and 100°C or less, for a time of 60 seconds or more and 120 seconds or less; 2) Place it at room temperature for several hours to several days; (3) Put it into a hot air heater or an infrared heater for tens of minutes to several hours to remove the solvent.

然後,針對塗佈膜,與硬化膜之圖案形狀相應地進行區域選擇性曝光。典型而言,藉由介隔負型遮罩照射紫外線、準分子雷射光等活性能量線,將塗佈膜局部地曝光。所要照射之能量線量亦根據感光性樹脂組合物之組成而不同,但例如較佳為10 mJ/cm2 以上2000 mJ/cm2 以下左右。Then, with respect to the coated film, area selective exposure is performed according to the pattern shape of the cured film. Typically, the coating film is partially exposed by irradiating active energy rays such as ultraviolet rays and excimer laser light through a negative mask. The amount of energy rays to be irradiated also depends on the composition of the photosensitive resin composition, but for example, it is preferably 10 mJ/cm 2 or more and 2000 mJ/cm 2 or less.

然後,藉由利用顯影液使曝光後之塗佈膜顯影,而形成經圖案化之硬化膜。顯影方法並無特別限定,例如可使用浸漬法、噴霧法等。作為顯影液,可列舉:單乙醇胺、二乙醇胺、三乙醇胺等有機系顯影液、或氫氧化鈉、氫氧化鉀、碳酸鈉、氨、四級銨鹽等之水溶液。Then, the exposed coating film is developed with a developer to form a patterned cured film. The development method is not particularly limited, and for example, a dipping method, a spray method, etc. can be used. Examples of the developing solution include organic developing solutions such as monoethanolamine, diethanolamine, and triethanolamine, or aqueous solutions of sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, and quaternary ammonium salts.

顯影後,亦可視需要對經圖案化之硬化膜於200℃以上250℃以下左右之溫度下進行後烘烤。 [實施例]After development, the patterned cured film can be post-baked at a temperature above 200°C and below 250°C as needed. [Example]

以下,藉由實施例對本發明更詳細地進行說明,但本發明並不限定於該等實施例。Hereinafter, the present invention will be described in more detail through examples, but the present invention is not limited to these examples.

〔實施例1~28、及比較例1~13〕 於實施例及比較例中,作為鹼可溶性樹脂(A)((A)成分),使用按照以下方法所合成之Cardo樹脂。 首先,向500 mL四口燒瓶中裝入235 g之雙酚茀型環氧樹脂(環氧當量235)、110 mg之四甲基氯化銨、100 mg之2,6-二-第三丁基-4-甲基苯酚、及72.0 g之丙烯酸,一面以25 mL/分鐘之速度向其吹送空氣一面於90~100℃下加熱溶解。繼而,維持溶液白濁之狀態逐漸升溫,加熱至120℃使其完全溶解。此時,溶液逐漸變得透明黏稠,但繼續於該狀態下攪拌。其間,測定酸值,持續進行加熱攪拌直至未達1.0 mgKOH/g。酸值達到目標值為止需要12小時。然後,冷卻至室溫,獲得無色透明且固體狀之下述式所表示之雙酚茀型環氧丙烯酸酯。[Examples 1-28, and Comparative Examples 1-13] In the Examples and Comparative Examples, as the alkali-soluble resin (A) ((A) component), the Cardo resin synthesized by the following method was used. First, a 500 mL four-necked flask was charged with 235 g of bisphenol phenol epoxy resin (epoxy equivalent 235), 110 mg of tetramethylammonium chloride, and 100 mg of 2,6-di-tert-butyl 4-methylphenol and 72.0 g of acrylic acid were heated and dissolved at 90-100°C while blowing air at a rate of 25 mL/min. Then, maintain the white turbid state of the solution and gradually increase the temperature, and heat to 120°C to completely dissolve it. At this time, the solution gradually became transparent and viscous, but continued to stir in this state. In the meantime, the acid value was measured, and heating and stirring were continued until it did not reach 1.0 mgKOH/g. It takes 12 hours until the acid value reaches the target value. Then, it was cooled to room temperature, and a colorless, transparent, and solid bisphenol-type epoxy acrylate represented by the following formula was obtained.

[化57]

Figure 02_image115
[化57]
Figure 02_image115

然後,向以如上方式獲得之307.0 g之上述雙酚茀型環氧丙烯酸酯加入600 g之乙酸3-甲氧基丁酯進行溶解,之後將80.5 g之聯苯四羧酸二酐及1 g之四乙基溴化銨混合,並逐漸升溫,於110~115℃下反應4小時。確認酸酐基消失之後,將38.0 g之1,2,3,6-四氫鄰苯二甲酸酐混合,於90℃下反應6小時而獲得Cardo樹脂。酸酐基之消失係藉由IR光譜確認。Then, 600 g of 3-methoxybutyl acetate was added to 307.0 g of the above-mentioned bisphenol phenol epoxy acrylate obtained in the above manner to dissolve, and then 80.5 g of biphenyltetracarboxylic dianhydride and 1 g Mix the tetraethylammonium bromide and gradually increase the temperature, and react at 110-115°C for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90°C for 6 hours to obtain a Cardo resin. The disappearance of the acid anhydride group was confirmed by IR spectroscopy.

於實施例及比較例中,使用二季戊四醇六丙烯酸酯作為光聚合性單體(B)((B)成分)。In the Examples and Comparative Examples, dipentaerythritol hexaacrylate was used as the photopolymerizable monomer (B) ((B) component).

於實施例及比較例中,使用以下所說明之化合物作為光聚合起始劑(C)((C)成分)。於實施例及比較例中,使用下述CI1及CI2作為上述式(C1)所表示之肟酯化合物之光聚合起始劑(C-I)。 [化58]

Figure 02_image117
In the Examples and Comparative Examples, the compounds described below are used as the photopolymerization initiator (C) ((C) component). In the Examples and Comparative Examples, the following CI1 and CI2 were used as the photopolymerization initiator (CI) of the oxime ester compound represented by the above formula (C1). [化58]
Figure 02_image117

於實施例及比較例中,將下述CII1~CII5用作作為光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II)之肟酯化合物。 [化59]

Figure 02_image119
In the Examples and Comparative Examples, the following CII1 to CII5 were used as oxime ester compounds as photopolymerization initiators (C-II) other than the photopolymerization initiator (CI). [化59]
Figure 02_image119

於實施例及比較例中,將以下之CII6用作作為光聚合起始劑(C-II)之胺酮系化合物。 CII6:2-苄基-2-二甲基胺基-1-(4-𠰌啉基苯基)丁烷-1酮In the Examples and Comparative Examples, the following CII6 was used as the amine ketone compound as the photopolymerization initiator (C-II). CII6: 2-benzyl-2-dimethylamino-1-(4-𠰌olinylphenyl)butan-1-one

於實施例及比較例中,使用下述D1及D2作為著色劑(D)((D)成分)。再者,下述表1中所記載之著色劑(D)之量係分散液中之固形物成分量(顏料及分散劑之量),而非分散液之量。 D1:碳黑分散液(碳黑含量20質量%、分散劑含量5質量%) D2:有機顏料混合分散液(C.I.顏料藍15:6/C.I.顏料紫23/C.I.顏料紅256=40質量%/20質量%/40質量%、固形物成分濃度15質量%)In the Examples and Comparative Examples, the following D1 and D2 were used as the colorant (D) ((D) component). In addition, the amount of the coloring agent (D) described in the following Table 1 refers to the amount of solid content (amount of pigment and dispersant) in the dispersion, not the amount of the dispersion. D1: Carbon black dispersion (carbon black content 20% by mass, dispersant content 5% by mass) D2: Organic pigment mixed dispersion (C.I. Pigment Blue 15: 6/C.I. Pigment Violet 23/C.I. Pigment Red 256=40% by mass/20% by mass/40% by mass, solid content concentration 15% by mass)

分別將表1中記載之量之鹼可溶性樹脂(A)、光聚合性單體(B)、表1中記載之種類之光聚合起始劑(C)、及表1中記載之種類之著色劑(D)、0.2質量份之矽烷偶合劑((3-苯基胺基丙基)三甲氧基矽烷)、及0.5質量份之界面活性劑以固形物成分濃度成為15質量%之方式均勻地溶解、分散於有機溶劑(S)中,而獲得各實施例及比較例之感光性樹脂組合物。作為有機溶劑(S),使用包含15質量%之乙酸3-甲氧基丁酯與85質量%之丙二醇單甲醚乙酸酯之混合溶劑。The alkali-soluble resin (A), the photopolymerizable monomer (B), the photopolymerization initiator (C) of the type described in Table 1 and the type of the type described in Table 1 are respectively colored Agent (D), 0.2 parts by mass of silane coupling agent ((3-phenylaminopropyl)trimethoxysilane), and 0.5 parts by mass of surfactant are uniformly distributed so that the solid content concentration becomes 15% by mass It was dissolved and dispersed in the organic solvent (S) to obtain the photosensitive resin composition of each Example and Comparative Example. As the organic solvent (S), a mixed solvent containing 15% by mass of 3-methoxybutyl acetate and 85% by mass of propylene glycol monomethyl ether acetate was used.

使用旋轉塗佈機將各實施例及比較例之感光性樹脂組合物塗佈於玻璃基板(100 mm×100 mm)上,於90℃下進行預烘烤120秒而形成膜厚1.0 μm之塗膜。然後,使用接近式曝光裝置(製品名:TME-150RTO,TOPCON股份有限公司製造),將曝光間距設為50 μm,經由形成有寬度6 μm之線圖案之負型遮罩對塗膜照射紫外線。曝光量設為20、40、60 mJ/cm2 之3個階段。將曝光後之塗膜於26℃之0.04質量%KOH水溶液中顯影40秒後,於230℃下進行後烘烤30分鐘,藉此形成線圖案。The photosensitive resin composition of each Example and Comparative Example was coated on a glass substrate (100 mm×100 mm) using a spin coater, and prebaked at 90°C for 120 seconds to form a coating with a thickness of 1.0 μm. membrane. Then, using a proximity exposure device (product name: TME-150RTO, manufactured by TOPCON Co., Ltd.), the exposure pitch was set to 50 μm, and the coating film was irradiated with ultraviolet rays through a negative mask formed with a line pattern with a width of 6 μm. The exposure level is set to 3 stages of 20, 40, and 60 mJ/cm 2 . After the exposed coating film was developed in a 0.04% by mass KOH aqueous solution at 26°C for 40 seconds, post-baking was performed at 230°C for 30 minutes, thereby forming a line pattern.

<直進性評價> 利用光學顯微鏡觀察所形成之線圖案之邊緣之齒隙,對圖案直進性進行評價。將無齒隙之情況設為「○」,將存在齒隙之情況設為「不良」而評價。<Straightforward evaluation> The tooth gap at the edge of the formed line pattern was observed with an optical microscope to evaluate the straightness of the pattern. The case where there is no backlash is set to "○", and the case where there is backlash is set to "bad" for evaluation.

<密接性評價> 利用光學顯微鏡觀察所形成之線圖案之剝離之有無,對圖案密接性進行評價。將未觀察到剝離之情況設為「○」,將觀察到剝離之情況設為「×」而評價。<Adhesion evaluation> The presence or absence of peeling of the formed line pattern was observed with an optical microscope, and the pattern adhesion was evaluated. The case where peeling was not observed was set to "○", and the case where peeling was observed was set to "×" for evaluation.

<錐角> 於藉由40 mJ/cm2 之曝光形成之線圖案中之線部10之寬度方向的截面中,測量如圖1所示基板90a與線部10之側面所成之角度θ,對錐角進行評價。 再者,於如圖1所示之梯形形狀之情形時,θ超過0度且未達90度,為正錐形狀。又,於如圖2所示之倒梯形形狀之情形時,θ超過90度且未達180度,為倒錐形狀。 於圖1及圖2中,將基板90a與感光性樹脂組合物硬化物圖案之線部10相接之面作為基準面,將基準面之平行線與線側面所成之角度設為θ而表示,但其與上述θ相同。 關於錐角(圖案截面形狀),按照以下基準進行評價。 ◎:測定角度θ為70度以上85度以下 ○:測定角度θ為86度以上90度以下 △:測定角度θ為91度以上100度以下 ×:測定角度θ為101度以上 ××:測定角度θ為69度以下<Taper angle> In the cross section in the width direction of the line portion 10 in the line pattern formed by exposure of 40 mJ/cm 2 , the angle θ formed by the substrate 90a and the side surface of the line portion 10 as shown in FIG. 1 is measured, The cone angle is evaluated. Furthermore, in the case of the trapezoidal shape as shown in FIG. 1, θ exceeds 0 degrees and does not reach 90 degrees, which is a forward cone shape. Moreover, in the case of the inverted trapezoid shape as shown in FIG. 2, θ exceeds 90 degrees and does not reach 180 degrees, which is an inverted cone shape. In FIGS. 1 and 2, the surface of the substrate 90a and the line portion 10 of the cured photosensitive resin composition pattern is taken as the reference plane, and the angle between the parallel line of the reference plane and the side surface of the line is represented by θ , But it is the same as the above θ. The taper angle (the cross-sectional shape of the pattern) was evaluated based on the following criteria. ◎: The measurement angle θ is 70 degrees or more and 85 degrees or less ○: The measurement angle θ is 86 degrees or more and 90 degrees or less △: The measurement angle θ is 91 degrees or more and 100 degrees or less ×: The measurement angle θ is 101 degrees or more × ×: The measurement angle θ is 69 degrees or less

以下,對錐角θ之技術意義進行補充。錐角θ係確保對遮罩圖案之忠實性之含義,理想的是90度。 於將使用感光性樹脂組合物形成之黑矩陣組裝於圖像顯示面板之情形時,存在與黑矩陣相接而配置液晶之情況。液晶之分子配向係由電壓進行控制。藉由該分子配向之控制,於包含偏光板之光學系統中,光線透過率急遽變化。其結果為,於圖像顯示面板顯示文字、圖像等。 於與黑矩陣相接而配置液晶之情形時,於黑矩陣之圖案邊界部中,受到邊界階差之影響,液晶配向行為表現與圖案平坦部(相當於上述線部或間隔部)不同之行為。其作為光學現象,即便於圖案平坦部中光線透過率為0%,於圖案邊界部中光線亦會透過,以圖案境界部處之滲光或漏光之形式被觀察到,不適合作為圖像顯示面板及圖像顯示裝置。 該滲光現象於黑矩陣圖案之錐角θ超過90度時較為明顯,藉由使線錐角θ為90度以下而減輕。若作為圖像顯示面板及圖像顯示裝置而進行驅動試驗,則作為錐角θ,85度以下尤為適合。再者,若未達70度,則光透過區域變窄(於圖1中,相當於線部10以外之間隔部變窄),光量減少,因此,不適合作為圖像顯示面板及圖像顯示裝置。 因此,作為液晶顯示面板及液晶顯示裝置,線錐角θ理想的是90度以下,最理想的是70度以上85度以下。In the following, the technical significance of the taper angle θ will be supplemented. The cone angle θ is the meaning of ensuring the fidelity to the mask pattern, and the ideal is 90 degrees. When assembling a black matrix formed using a photosensitive resin composition in an image display panel, there is a case where liquid crystal is arranged in contact with the black matrix. The molecular alignment of the liquid crystal is controlled by voltage. With the control of the molecular alignment, the light transmittance changes rapidly in the optical system including the polarizer. As a result, characters, images, etc. are displayed on the image display panel. When the liquid crystal is arranged in contact with the black matrix, the pattern boundary of the black matrix is affected by the boundary step, and the alignment behavior of the liquid crystal is different from that of the flat portion of the pattern (equivalent to the above-mentioned line or space) . As an optical phenomenon, even if the light transmittance in the flat part of the pattern is 0%, the light will pass through the border of the pattern. It is observed in the form of light leakage or light leakage at the border of the pattern. It is not suitable for image display panels. And image display device. This bleed phenomenon is more obvious when the taper angle θ of the black matrix pattern exceeds 90 degrees, and is reduced by making the line taper angle θ less than 90 degrees. If a drive test is performed as an image display panel and an image display device, it is particularly suitable as the taper angle θ of 85 degrees or less. Furthermore, if it is less than 70 degrees, the light transmission area becomes narrower (in FIG. 1, the space outside the line 10 becomes narrower) and the amount of light decreases. Therefore, it is not suitable for image display panels and image display devices. . Therefore, as a liquid crystal display panel and a liquid crystal display device, the line taper angle θ is desirably 90 degrees or less, and most desirably 70 degrees or more and 85 degrees or less.

[表1]    (A) 成分 (B) 成分 (C)成分 (D) 成分 直進性 密接性 錐角 (C-I) (C-II) 曝光量 (mJ/cm2 ) 曝光量 (mJ/cm2 ) 質量份 質量份 種類 質量份 種類 質量份 種類 質量份 20 40 60 20 40 60 評價 實施例1 28 17 CI1 4 CII5 1 D1 50 89 實施例2 28 17 CI2 4 CII5 1 D1 50 88 實施例3 28 17 CI1 3 CII1 2 D1 50 85 實施例4 28 17 CI1 3 CII2 2 D1 50 86 實施例5 28 17 CI1 3 CII3 2 D1 50 87 實施例6 28 17 CI1 3 CII4 2 D1 50 89 實施例7 28 17 CI1 3 CII5 2 D1 50 87 實施例8 28 17 CI2 3 CII1 2 D1 50 87 實施例9 28 17 CI2 3 CII2 2 D1 50 87 實施例10 28 17 CI2 3 CII3 2 D1 50 88 實施例11 28 17 CI2 3 CII4 2 D1 50 89 實施例12 28 17 CI2 3 CII5 2 D1 50 88 實施例13 28 17 CI1 2 CII1/CII6 2/1 D1 50 75 實施例14 28 17 CI1 2 CII2/CII6 2/1 D1 50 77 實施例15 28 17 CI1 2 CII3/CII6 2/1 D1 50 79 實施例16 28 17 CI1 2 CII4/CII6 2/1 D1 50 76 實施例17 28 17 CI1 2 CII5/CII6 2/1 D1 50 77 實施例18 28 17 CI2 2 CII1/CII6 2/1 D1 50 82 實施例19 28 17 CI2 2 CII2/CII6 2/1 D1 50 81 實施例20 28 17 CI2 2 CII3/CII6 2/1 D1 50 83 實施例21 28 17 CI2 2 CII4/CII6 2/1 D1 50 84 實施例22 28 17 CI2 2 CII4/CII6 2/1 D1 50 83 實施例23 20.8 9.2 CI1 2 CII1/CII6 2/1 D2 65 80 實施例24 20.8 9.2 CI2 2 CII1/CII6 2/1 D2 65 81 實施例25 61.5 33.5 CI1 2 CII1/CII6 2/1 - - 77 實施例26 61.5 33.5 CI2 2 CII1/CII6 2/1 - - 79 實施例27 28 17 CI1 1 CII1/CI/6 3/1 D1 50 87 實施例28 28 17 CI2 1 CII1/CI/6 3/1 D1 50 86 實施例29 28 17 CI1 4.75 CII6 0.25 D1 50 89 實施例30 28 17 CI2 4.75 CII6 0.25 D1 50 89 比較例1 28 17 CI1 5 - - D1 50 × × × × >100 比較例2 28 17 CI2 5 - - D1 50 × × × × >100 比較例3 28 17 - - CII1 5 D1 50 × × 92 比較例4 28 17 - - CII2 5 D1 50 × × 95 比較例5 28 17 - - CII3 5 D1 50 × × × × × >100 比較例6 28 17 - - CII4 5 D1 50 × × × × × × × >100 比較例7 28 17 - - CII5 5 D1 50 × × 91 比較例8 20.8 9.2 CI1 5 - - D2 65 × × × ×× <60 比較例9 20.8 9.2 CI2 5 - - D2 65 × × × ×× <60 比較例10 61.5 33.5 CI1 5 - - - - × × × ×× <60 比較例11 61.5 33.5 CI2 5 - - - - × × × ×× <60 比較例12 28 17 CI1 0.5 CII1 4.5 D1 50 × 91 比較例13 28 17 CI2 0.5 CII1 4.5 D1 50 × 92 [Table 1] (A) Ingredients (B) Ingredients (C) Ingredients (D) Ingredients Straightforwardness Adhesion Cone angle (CI) (C-II) Exposure (mJ/cm 2 ) Exposure (mJ/cm 2 ) Mass parts Mass parts species Mass parts species Mass parts species Mass parts 20 40 60 20 40 60 Evaluation degree Example 1 28 17 CI1 4 CII5 1 D1 50 89 Example 2 28 17 CI2 4 CII5 1 D1 50 88 Example 3 28 17 CI1 3 CII1 2 D1 50 85 Example 4 28 17 CI1 3 CII2 2 D1 50 86 Example 5 28 17 CI1 3 CII3 2 D1 50 87 Example 6 28 17 CI1 3 CII4 2 D1 50 89 Example 7 28 17 CI1 3 CII5 2 D1 50 87 Example 8 28 17 CI2 3 CII1 2 D1 50 87 Example 9 28 17 CI2 3 CII2 2 D1 50 87 Example 10 28 17 CI2 3 CII3 2 D1 50 88 Example 11 28 17 CI2 3 CII4 2 D1 50 89 Example 12 28 17 CI2 3 CII5 2 D1 50 88 Example 13 28 17 CI1 2 CII1/CII6 2/1 D1 50 75 Example 14 28 17 CI1 2 CII2/CII6 2/1 D1 50 77 Example 15 28 17 CI1 2 CII3/CII6 2/1 D1 50 79 Example 16 28 17 CI1 2 CII4/CII6 2/1 D1 50 76 Example 17 28 17 CI1 2 CII5/CII6 2/1 D1 50 77 Example 18 28 17 CI2 2 CII1/CII6 2/1 D1 50 82 Example 19 28 17 CI2 2 CII2/CII6 2/1 D1 50 81 Example 20 28 17 CI2 2 CII3/CII6 2/1 D1 50 83 Example 21 28 17 CI2 2 CII4/CII6 2/1 D1 50 84 Example 22 28 17 CI2 2 CII4/CII6 2/1 D1 50 83 Example 23 20.8 9.2 CI1 2 CII1/CII6 2/1 D2 65 80 Example 24 20.8 9.2 CI2 2 CII1/CII6 2/1 D2 65 81 Example 25 61.5 33.5 CI1 2 CII1/CII6 2/1 - - 77 Example 26 61.5 33.5 CI2 2 CII1/CII6 2/1 - - 79 Example 27 28 17 CI1 1 CII1/CI/6 3/1 D1 50 87 Example 28 28 17 CI2 1 CII1/CI/6 3/1 D1 50 86 Example 29 28 17 CI1 4.75 CII6 0.25 D1 50 89 Example 30 28 17 CI2 4.75 CII6 0.25 D1 50 89 Comparative example 1 28 17 CI1 5 - - D1 50 × × × × >100 Comparative example 2 28 17 CI2 5 - - D1 50 × × × × >100 Comparative example 3 28 17 - - CII1 5 D1 50 × × 92 Comparative example 4 28 17 - - CII2 5 D1 50 × × 95 Comparative example 5 28 17 - - CII3 5 D1 50 × × × × × >100 Comparative example 6 28 17 - - CII4 5 D1 50 × × × × × × × >100 Comparative example 7 28 17 - - CII5 5 D1 50 × × 91 Comparative example 8 20.8 9.2 CI1 5 - - D2 65 × × × ×× <60 Comparative example 9 20.8 9.2 CI2 5 - - D2 65 × × × ×× <60 Comparative example 10 61.5 33.5 CI1 5 - - - - × × × ×× <60 Comparative example 11 61.5 33.5 CI2 5 - - - - × × × ×× <60 Comparative example 12 28 17 CI1 0.5 CII1 4.5 D1 50 × 91 Comparative example 13 28 17 CI2 0.5 CII1 4.5 D1 50 × 92

根據表1可知,使用實施例之感光性樹脂組合物形成之經圖案化之硬化膜的直進性及對基板之密接性優異,且截面形狀亦良好,該實施例之感光性樹脂組合物分別按特定之比率包含鹼可溶性樹脂(A)、光聚合性單體(B)、上述式(C1)所表示之結構之肟酯化合物即光聚合起始劑(C-I)、及光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II)。 另一方面,使用比較例之感光性樹脂組合物形成之經圖案化之硬化膜無法兼具良好之直進性與良好的對基板之密接性,且截面形狀亦不良,該比較例之感光性樹脂組合物僅包含光聚合起始劑(C-I)與光聚合起始劑(C-II)之任一種,或者不按各自特定之比率包含光聚合起始劑(C-I)與光聚合起始劑(C-II)。According to Table 1, it can be seen that the patterned cured film formed using the photosensitive resin composition of the example has excellent straightness and adhesion to the substrate, and the cross-sectional shape is also good. The photosensitive resin composition of the example is The specific ratio includes the alkali-soluble resin (A), the photopolymerizable monomer (B), the oxime ester compound represented by the above formula (C1), that is, the photopolymerization initiator (CI), and the photopolymerization initiator ( Other photopolymerization initiators (C-II) other than CI). On the other hand, the patterned cured film formed using the photosensitive resin composition of the comparative example cannot have both good straightness and good adhesion to the substrate, and the cross-sectional shape is also poor. The photosensitive resin of the comparative example The composition contains only any one of the photopolymerization initiator (CI) and the photopolymerization initiator (C-II), or does not contain the photopolymerization initiator (CI) and the photopolymerization initiator ( C-II).

10:線部 90a:基板 10: Line 90a: substrate

圖1係模式性地表示具備正錐之截面形狀之使用感光性樹脂組合物形成之硬化膜的圖案寬度方向截面形狀之圖。 圖2係模式性地表示具備倒錐之截面形狀之使用感光性樹脂組合物形成之硬化膜的圖案寬度方向截面形狀之圖。1 is a diagram schematically showing the cross-sectional shape in the pattern width direction of a cured film formed using a photosensitive resin composition having a cross-sectional shape of a positive cone. 2 is a diagram schematically showing the cross-sectional shape in the pattern width direction of a cured film formed using a photosensitive resin composition having an inverted cone cross-sectional shape.

Claims (9)

一種感光性樹脂組合物,其係包含鹼可溶性樹脂(A)、光聚合性單體(B)、及光聚合起始劑(C)者,且 上述光聚合起始劑(C)包含下述式(C1)所表示之光聚合起始劑(C-I)、及上述光聚合起始劑(C-I)以外之其他光聚合起始劑(C-II), [化1]
Figure 03_image121
(式(C1)中,X01 係於下述式(C1-1)所表示之結構中,將鍵結於芳香族環上之氫原子中之t2+t3個氫原子去除後之基,X02 及X03 分別獨立為一價有機基,X04 及X05 分別獨立為氫原子、可具有取代基之碳原子數1以上11以下之烷基、或可具有取代基之芳基,t0~t3分別獨立為0或1,t2及t3之至少一者為1, [化2]
Figure 03_image123
式(C1-1)中,X06 係以C-N鍵鍵結於咔唑環中之氮原子之一價有機基,t4及t5分別獨立為0或1,t4及t5之至少一者為1) 上述光聚合起始劑(C)之質量中之上述光聚合起始劑(C-I)之質量比率為20質量%以上95質量%以下。
A photosensitive resin composition containing an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), and the photopolymerization initiator (C) includes the following The photopolymerization initiator (CI) represented by the formula (C1), and other photopolymerization initiators (C-II) other than the above-mentioned photopolymerization initiator (CI), [化1]
Figure 03_image121
(In formula (C1), X 01 is in the structure represented by the following formula (C1-1), the group obtained by removing t2+t3 hydrogen atoms from the hydrogen atoms bonded to the aromatic ring, X 02 and X 03 is each independently a monovalent organic group, X 04 and X 05 are each independently a hydrogen atom, an optionally substituted alkyl group having 1 to 11 carbon atoms, or an optionally substituted aryl group, t0 to t3, respectively Independent is 0 or 1, at least one of t2 and t3 is 1, [化2]
Figure 03_image123
In the formula (C1-1), X 06 is a monovalent organic group bonded to the nitrogen atom in the carbazole ring by a CN bond, t4 and t5 are independently 0 or 1, and at least one of t4 and t5 is 1) The mass ratio of the photopolymerization initiator (CI) in the mass of the photopolymerization initiator (C) is 20% by mass or more and 95% by mass or less.
如請求項1之感光性樹脂組合物,其中上述光聚合起始劑(C-II)為肟酯化合物、及/或胺酮系化合物。The photosensitive resin composition according to claim 1, wherein the photopolymerization initiator (C-II) is an oxime ester compound and/or an amine ketone compound. 如請求項2之感光性樹脂組合物,其中上述光聚合起始劑(C)包含上述肟酯化合物及上述胺酮系化合物作為上述光聚合起始劑(C-II)。The photosensitive resin composition according to claim 2, wherein the photopolymerization initiator (C) contains the oxime ester compound and the amine ketone compound as the photopolymerization initiator (C-II). 如請求項2或3之感光性樹脂組合物,其中作為上述光聚合起始劑(C-II)之上述肟酯化合物係下述式(C2)所表示之化合物, [化3]
Figure 03_image125
(式(C2)中,Rc1 為一價有機基,Rc2 係下述式(C2-1)~(C2-3)之任一者所表示之基,Rc3 為氫原子、可具有取代基之碳原子數1以上11以下之烷基、或可具有取代基之芳基, [化4]
Figure 03_image127
式(C2-1)中,Rc4 為選自由一價有機基、胺基、鹵素、硝基、及氰基所組成之群中之基,A為S或O,n2為0以上4以下之整數, 式(C2-2)中,Rc5 及Rc6 分別獨立為一價有機基, 式(C2-3)中,Rc7 為氫原子、硝基或一價有機基,Rc8 及Rc9 分別為可具有取代基之鏈狀烷基、可具有取代基之環狀有機基、或氫原子,Rc8 與Rc9 亦可相互鍵結而形成環,n3為0以上4以下之整數)。
The photosensitive resin composition of claim 2 or 3, wherein the oxime ester compound as the photopolymerization initiator (C-II) is a compound represented by the following formula (C2), [化3]
Figure 03_image125
(In formula (C2), R c1 is a monovalent organic group, R c2 is a group represented by any of the following formulas (C2-1) to (C2-3), R c3 is a hydrogen atom, which may be substituted An alkyl group having 1 to 11 carbon atoms or an aryl group that may have a substituent, [formation 4]
Figure 03_image127
In formula (C2-1), R c4 is a group selected from the group consisting of monovalent organic groups, amine groups, halogens, nitro groups, and cyano groups, A is S or O, and n2 is 0 or more and 4 or less Integer, in formula (C2-2), R c5 and R c6 are each independently a monovalent organic group, in formula (C2-3), R c7 is a hydrogen atom, a nitro group or a monovalent organic group, R c8 and R c9 Each is a chain alkyl group which may have a substituent, a cyclic organic group which may have a substituent, or a hydrogen atom. R c8 and R c9 may be bonded to each other to form a ring, and n3 is an integer of 0 to 4).
如請求項4之感光性樹脂組合物,其中上述Rc1 係下述式(C2a)或(C2b)所表示之基, [化5]
Figure 03_image129
(式(C2a)及(C2b)中,Rc10 及Rc11 分別為一價有機基,n4為0以上4以下之整數,於Rc10 與Rc11 存在於苯環上之相鄰之位置之情形時,Rc10 與Rc11 亦可相互鍵結而形成環,n5為1以下8以下之整數,n6為1以上5以下之整數,n7為0以上(n6+3)以下之整數,Rc12 為一價有機基)。
The photosensitive resin composition according to claim 4, wherein said R c1 is a group represented by the following formula (C2a) or (C2b), [化5]
Figure 03_image129
(In formulas (C2a) and (C2b), R c10 and R c11 are respectively a monovalent organic group, n4 is an integer from 0 to 4, when R c10 and R c11 exist at adjacent positions on the benzene ring When R c10 and R c11 can also be bonded to each other to form a ring, n5 is an integer of 1 and less than 8; n6 is an integer of 1 to 5; n7 is an integer of 0 or more (n6+3); R c12 is a monovalent Organic base).
如請求項1至3中任一項之感光性樹脂組合物,其進而包含著色劑(D)。The photosensitive resin composition according to any one of claims 1 to 3, which further contains a colorant (D). 如請求項6之感光性樹脂組合物,其中上述著色劑(D)為遮光劑(D1)。The photosensitive resin composition according to claim 6, wherein the colorant (D) is a sunscreen (D1). 一種經圖案化之硬化膜的製造方法,其包括以下步驟: 將如請求項1至7中任一項之感光性樹脂組合物塗佈於基板上而形成塗佈膜; 對上述塗佈膜進行區域選擇性曝光;及 使曝光後之上述塗佈膜顯影。A method for manufacturing a patterned hardened film, which includes the following steps: Coating the photosensitive resin composition according to any one of claims 1 to 7 on a substrate to form a coating film; Regioselective exposure of the above-mentioned coated film; and The above-mentioned coating film after exposure is developed. 一種經圖案化之硬化膜,其包含如請求項1至7中任一項之感光性樹脂組合物之硬化物。A patterned cured film comprising the cured product of the photosensitive resin composition according to any one of claims 1 to 7.
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