TWI430027B - Radiation sensitive composition for forming a colored layer, color filter and color liquid crystal display device - Google Patents

Radiation sensitive composition for forming a colored layer, color filter and color liquid crystal display device Download PDF

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TWI430027B
TWI430027B TW096124938A TW96124938A TWI430027B TW I430027 B TWI430027 B TW I430027B TW 096124938 A TW096124938 A TW 096124938A TW 96124938 A TW96124938 A TW 96124938A TW I430027 B TWI430027 B TW I430027B
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Taiwan
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observed
substrate
group
acid
liquid composition
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TW096124938A
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TW200811598A (en
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Kaori Shirato
Tsuyoshi Hirai
Takahiro Iijima
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Jsr Corp
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B11/00Diaryl- or thriarylmethane dyes
    • C09B11/04Diaryl- or thriarylmethane dyes derived from triarylmethanes, i.e. central C-atom is substituted by amino, cyano, alkyl
    • C09B11/10Amino derivatives of triarylmethanes
    • C09B11/24Phthaleins containing amino groups ; Phthalanes; Fluoranes; Phthalides; Rhodamine dyes; Phthaleins having heterocyclic aryl rings; Lactone or lactame forms of triarylmethane dyes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B19/00Oxazine dyes
    • C09B19/02Bisoxazines prepared from aminoquinones
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition

Description

用於形成染色層之輻射敏感組成物,彩色濾光片及彩色液晶顯示裝置Radiation-sensitive composition for forming a dyed layer, color filter and color liquid crystal display device

本發明係有關一種用於形成染色層之輻射敏感組成物、彩色濾光片及彩色液晶顯示裝置。詳言之,其係有關一種用以形成染色層之輻射敏感組成物,該染色層可用於製造供透射及反射型彩色液晶顯示器及彩色及彩色攝影裝置使用之彩色濾光片,有關具有自該輻射敏感組成物製得之染色層的彩色濾光片及包含該彩色濾光片之彩色液晶顯示裝置。The present invention relates to a radiation-sensitive composition, a color filter, and a color liquid crystal display device for forming a dye layer. In particular, it relates to a radiation-sensitive composition for forming a dyed layer which can be used for the manufacture of color filters for use in transmissive and reflective color liquid crystal displays and color and color imaging devices. A color filter of a dye layer prepared by the radiation sensitive composition and a color liquid crystal display device comprising the color filter.

作為使用彩色輻射敏感組成物製造彩色濾光片之方式,已知有將彩色輻射敏感組成物施加於基材或包含具有所需圖案之遮光層的基材,乾燥,之後使乾燥之塗膜暴露於所需圖案之輻射(以下稱為「曝光」)且顯影以得到彩色像素之方法(參考JP-A 2-144502及JP-A 3-53201)。As a method of manufacturing a color filter using a color radiation-sensitive composition, a substrate in which a color radiation-sensitive composition is applied to a substrate or a light-shielding layer having a desired pattern is known, dried, and then the dried coating film is exposed. A method of irradiating a desired pattern (hereinafter referred to as "exposure") and developing to obtain a color pixel (refer to JP-A 2-144502 and JP-A 3-53201).

在彩色濾光片之技術領域中,膠黏時間目前通常藉由降低曝光量而縮短,且極需要形成較精細之圖案,反映液晶顯示裝置之較高明晰度。然而,當膠黏時間縮短時,因為顯影期間易產生圖案邊緣部分缺失或側蝕,故難以自先前技術之彩色輻射敏感組成物得到令人滿意之像素圖案及黑色基質圖案。先前技術之輻射敏感組成物形成極精細圖案之能力無法稱之令人滿意。In the technical field of color filters, the adhesive time is currently shortened by reducing the exposure amount, and it is highly desirable to form a finer pattern to reflect the higher definition of the liquid crystal display device. However, when the adhesive time is shortened, it is difficult to obtain a satisfactory pixel pattern and a black matrix pattern from the color radiation-sensitive composition of the prior art because the edge portion of the pattern is easily lost or undercut during development. The ability of prior art radiation-sensitive compositions to form extremely fine patterns is not satisfactory.

本發明之目的係提供一種具有優異顯影性之用於形成染色層的輻射敏感組成物,尤其是一種新穎之用於形成染色層的輻射敏感組成物,其不會在顯影時殘留不溶產物或在圖案邊緣產生浮膜,提供即使曝光量低時亦無圖案邊緣部分缺失或側蝕之像素及黑色基質,且可形成精細圖案。It is an object of the present invention to provide a radiation-sensitive composition for forming a dyed layer having excellent developability, and more particularly a novel radiation-sensitive composition for forming a dyed layer which does not leave insoluble products during development or The edge of the pattern creates a floating film, providing a pixel and a black matrix with no missing or side etching of the edge portion of the pattern even when the amount of exposure is low, and a fine pattern can be formed.

本發明另一目的係供一種具有染色層之彩色濾光片及一種包含該彩色濾光片之彩色液晶顯示裝置。Another object of the present invention is to provide a color filter having a dyed layer and a color liquid crystal display device including the color filter.

由以下描述可明瞭本發明之其他目的及優點。Other objects and advantages of the invention will be apparent from the description.

根據本發明,首先可藉由一種輻射敏感組成物達成前述目的及優點,該組成物係包含(A)著色劑、(B)鹼可溶性樹脂、(C)多官能性單體及(D)感光自由基產生劑,其中該鹼可溶性樹脂(B)係包含主鏈中具有脂環族烴骨架且側鏈中具有可聚合之不飽和鍵的聚酯,且該輻射敏感組成物係用以形成染色層。According to the present invention, the foregoing objects and advantages are first attained by a radiation-sensitive composition comprising (A) a colorant, (B) an alkali-soluble resin, (C) a polyfunctional monomer, and (D) a photosensitive film. a radical generating agent, wherein the alkali-soluble resin (B) comprises a polyester having an alicyclic hydrocarbon skeleton in a main chain and a polymerizable unsaturated bond in a side chain, and the radiation-sensitive composition is used for dyeing Floor.

本發明所使用之術語「染色層」係表示由像素及/或黑色基質所構成之使用於彩色濾光片的薄層。The term "dyed layer" as used in the present invention means a thin layer composed of a pixel and/or a black matrix for use in a color filter.

根據本發明,其次,前述本發明目的及優點係由具有自前述輻射敏感組成物製得的染色層之彩色濾光片達成。In accordance with the present invention, secondly, the foregoing objects and advantages of the present invention are achieved by a color filter having a dyed layer prepared from the aforementioned radiation-sensitive composition.

根據本發明,第三,前述本發明目的及優點係由包含前述彩色濾光片之彩色液晶顯示裝置達成。According to the present invention, third, the above objects and advantages of the present invention are achieved by a color liquid crystal display device including the above-described color filter.

下文詳細描述本發明。The invention is described in detail below.

較佳具體實施態樣之詳述Detailed description of preferred embodiments 輻射敏感組成物Radiation sensitive composition -組份(A)--Component (A)-

作為著色劑之組份(A)不限於特定顏色,係根據所製得之彩色濾光片的應用目的而適當地選擇。其可為顏料、染料或天然著色物質。The component (A) as the colorant is not limited to a specific color, and is appropriately selected depending on the application purpose of the produced color filter. It can be a pigment, a dye or a natural coloring matter.

因為高清晰度色彩之顯色及耐熱性係彩色濾光片所需,故具有高度顯色性及高耐熱性之著色劑,尤其是具有高耐熱分解性之著色劑,係為本發明之較佳著色劑。因此,較佳係使用有機顏料或無機顏料,使用有機顏料或碳黑尤佳。Because the color development and heat resistance of high-definition color are required for color filters, coloring agents having high color rendering properties and high heat resistance, especially those having high heat decomposition resistance, are compared to the present invention. Good coloring agent. Therefore, it is preferred to use an organic pigment or an inorganic pigment, and it is particularly preferable to use an organic pigment or carbon black.

前述有機顏料之實例有根據比色指數(C.I.;The Society of Dyers and Colourists所公佈)歸類為一組顏料的化合物,尤其是具有以下比色指數(C.I.)編號之化合物:C.I.顏料黃1、C.I.顏料黃3、C.I.顏料黃12、C.I.顏料黃13、C.I.顏料黃14、C.I.顏料黃15、C.I.顏料黃16、C.I.顏料黃17、C.I.顏料黃20、C.I.顏料黃24、C.I.顏料黃31、C.I.顏料黃55、C.I.顏料黃60、C.I.顏料黃61、C.I.顏料黃65、C.I.顏料黃71、C.I.顏料黃73、C.I.顏料黃74、C.I.顏料黃81、C.I.顏料黃83、C.I.顏料黃93、C.I.顏料黃95、C.I.顏料黃97、C.I.顏料黃98、C.I.顏料黃100、C.I.顏料黃101、C.I.顏料黃104、C.I.顏料黃106、C.I.顏料黃108、C.I.顏料黃109、C.I.顏料黃110、C.I.顏料黃113、C.I.顏料黃114、C.I.顏料黃116、C.I.顏料黃117、C.I.顏料黃119、C.I.顏料黃120、C.I.顏料黃126、C.I.顏料黃127、C.I.顏料黃128、C.I.顏料黃129、C.I.顏料黃138、C.I.顏料黃139、C.I.顏料黃150、C.I.顏料黃151、C.I.顏料黃152、C.I.顏料黃153、C.I.顏料黃154、C.I.顏料黃155、C.I.顏料黃156、C.I.顏料黃166、C.I.顏料黃168、C.I.顏料黃175、C.I.顏料黃180及C.I.顏料黃185;C.I.顏料橙1、C.I.顏料橙5、C.I.顏料橙13、C.I.顏料橙14、C.I.顏料橙16、C.I.顏料橙17、C.I.顏料橙24、C.I.顏料橙34、C.I.顏料橙36、C.I.顏料橙38、C.I.顏料橙40、C.I.顏料橙43、C.I.顏料橙46、C.I.顏料橙49、C.I.顏料橙51、C.I.顏料橙61、C.I.顏料橙63、C.I.顏料橙64、C.I.顏料橙71及C.I.顏料橙73;C.I.顏料紫1、C.I.顏料紫19、C.I.顏料紫23、C.I.顏料紫29、C.I.顏料紫32、C.I.顏料紫36及C.I.顏料紫38;C.I.顏料紅1、C.I.顏料紅2、C.I.顏料紅3、C.I.顏料紅4、C.I.顏料紅5、C.I.顏料紅6、C.I.顏料紅7、C.I.顏料紅8、C.I.顏料紅9、C.I.顏料紅10、C.I.顏料紅11、C.I.顏料紅12、C.I.顏料紅14、C.I.顏料紅15、C.I.顏料紅16、C.I.顏料紅17、C.I.顏料紅18、C.I.顏料紅19、C.I.顏料紅21、C.I.顏料紅22、C.I.顏料紅23、C.I.顏料紅30、C.I.顏料紅31、C.I.顏料紅32、C.I.顏料紅37、C.I.顏料紅38、C.I.顏料紅40、C.I.顏料紅41、C.I.顏料紅42、C.I.顏料紅48:1、C.I.顏料紅48:2、C.I.顏料紅48:3,C.1.顏料紅48:4、C.I.顏料紅49:1、C.I.顏料紅49:2、C.I.顏料紅50:1、C.I.顏料紅52:1、C.I.顏料紅53:1、C.I.顏料紅57、C.I.顏料紅57:1、C.I.顏料紅57:2、C.I.顏料紅58:2、C.I.顏料紅58:4、C.I.顏料紅60:1、C.I.顏料紅63:1、C.I.顏料紅63:2、C.I.顏料紅64:1、C.I.顏料紅81:1、C.I.顏料紅83、C.I.顏料紅88、C.I.顏料紅90:1、C.I.顏料紅97、C.I.顏料紅101、C.I.顏料紅102,C.1.顏料紅104、C.I.顏料紅105、C.I.顏料紅106、C.I.顏料紅108、C.I.顏料紅112、C.I.顏料紅113、C.I.顏料紅114、C.I.顏料紅122、C.I.顏料紅123、C.I.顏料紅144、C.I.顏料紅146、C.I.顏料紅149、C.I.顏料紅150、C.I.顏料紅151、C.I.顏料紅166、C.I.顏料紅168、C.I.顏料紅170、C.I.顏料紅171、C.I.顏料紅172、C.I.顏料紅174、C.I.顏料紅175、C.I.顏料紅176、C.I.顏料紅177、C.I.顏料紅178、C.I.顏料紅179、C.I.顏料紅180、C.I.顏料紅185、C.I.顏料紅187、C.I.顏料紅188、C.I.顏料紅190、C.I.顏料紅193、C.I.顏料紅194、C.I.顏料紅202、C.I.顏料紅206、C.I.顏料紅207、C.I.顏料紅208、C.I.顏料紅209、C.I.顏料紅215、C.I.顏料紅216、C.I.顏料紅220、C.I.顏料紅224、C.I.顏料紅226、C.I.顏料紅242、C.I.顏料紅243、C.I.顏料紅245、C.I.顏料紅254、C.I.顏料紅255、C.I.顏料紅264及C.I.顏料紅265;C.I.顏料藍15、C.I.顏料藍15:3、C.I.顏料藍15:4、C.I.顏料藍15:6及C.I.顏料藍60;C.I.顏料綠7及C.I.顏料綠36;C.I.顏料棕23及C.I.顏料棕25;及C.I.顏料黑1及C.I.顏料黑7。Examples of the foregoing organic pigments are compounds classified as a group of pigments according to a colorimetric index (CI; published by The Society of Dyers and Colourists), especially a compound having the following color index (CI) number: CI Pigment Yellow 1, CI Pigment Yellow 3, CI Pigment Yellow 12, CI Pigment Yellow 13, CI Pigment Yellow 14, CI Pigment Yellow 15, CI Pigment Yellow 16, CI Pigment Yellow 17, CI Pigment Yellow 20, CI Pigment Yellow 24, CI Pigment Yellow 31, CI Pigment Yellow 55, CI Pigment Yellow 60, CI Pigment Yellow 61, CI Pigment Yellow 65, CI Pigment Yellow 71, CI Pigment Yellow 73, CI Pigment Yellow 74, CI Pigment Yellow 81, CI Pigment Yellow 83, CI Pigment Yellow 93, CI Pigment Yellow 95, CI Pigment Yellow 97, CI Pigment Yellow 98, CI Pigment Yellow 100, CI Pigment Yellow 101, CI Pigment Yellow 104, CI Pigment Yellow 106, CI Pigment Yellow 108, CI Pigment Yellow 109, CI Pigment Yellow 110, CI Pigment Yellow 113, CI Pigment Yellow 114, CI Pigment Yellow 116, CI Pigment Yellow 117, CI Pigment Yellow 119, CI Pigment Yellow 120, CI Pigment Yellow 126, CI Pigment Yellow 127, CI Pigment Yellow 128, CI Pigment Yellow 129, CI Pigment Yellow 138, CI Pigment Yellow 139, CI Pigment 150, CI Pigment Yellow 151, CI Pigment Yellow 152, CI Pigment Yellow 153, CI Pigment Yellow 154, CI Pigment Yellow 155, CI Pigment Yellow 156, CI Pigment Yellow 166, CI Pigment Yellow 168, CI Pigment Yellow 175, CI Pigment Yellow 180 and CI Pigment Yellow 185; CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI Pigment Orange 16, CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36. CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI Pigment Orange 51, CI Pigment Orange 61, CI Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71 and CI pigment orange 73; CI pigment violet 1, CI pigment violet 19, CI pigment violet 23, CI pigment violet 29, CI pigment violet 32, CI pigment violet 36 and CI pigment violet 38; CI pigment red 1, CI pigment red 2. CI Pigment Red 3, CI Pigment Red 4, CI Pigment Red 5, CI Pigment Red 6, CI Pigment Red 7, CI Pigment Red 8, CI Pigment Red 9, CI Pigment Red 10, CI Pigment Red 11, CI Pigment Red 12, CI Pigment Red 14, CI Pigment Red 15, CI Pigment Red 16, CI Pigment Red 17, CI Pigment Red 18, CI Pigment Red 19, CI Pigment Red 21, CI Pigment Red 22, CI Pigment Red 23, CI Pigment Red 30, CI Pigment Red 31, CI Pigment Red 32, CI Pigment Red 37, CI Pigment Red 38, CI Pigment Red 40, CI Pigment Red 41, CI Pigment Red 42, CI Pigment Red 48:1, CI Pigment Red 48:2, CI Pigment Red 48:3, C.1. Pigment Red 48:4, CI Pigment Red 49:1, CI Pigment Red 49:2, CI Pigment Red 50:1, CI Pigment Red 52:1, CI Pigment Red 53:1, CI Pigment Red 57, CI Pigment Red 57:1, CI Pigment Red 57:2, CI Pigment Red 58:2 , CI Pigment Red 58:4, CI Pigment Red 60:1, CI Pigment Red 63:1, CI Pigment Red 63:2, CI Pigment Red 64:1, CI Pigment Red 81:1, CI Pigment Red 83, CI Pigment Red 88, CI Pigment Red 90:1, CI Pigment Red 97, CI Pigment Red 101, CI Pigment Red 102, C.1. Pigment Red 104, CI Pigment Red 105, CI Pigment Red 106, CI Pigment Red 108, CI Pigment Red 112, CI Pigment Red 113, CI Pigment Red 114, CI Pigment Red 122, CI Pigment Red 123, CI Pigment Red 144, CI Pigment Red 146, CI Pigment Red 149, CI Pigment Red 150, CI Pigment Red 151 CI Pigment Red 166, CI Pigment Red 168, CI Pigment Red 170, CI Pigment Red 171, CI Pigment Red 172, CI Pigment Red 174, CI Pigment Red 175, CI Pigment Red 176, CI Pigment Red 177, CI Pigment Red 178, CI Pigment Red 179, CI Pigment Red 180, CI Pigment Red 185, CI Pigment Red 187, CI Pigment Red 188, CI Pigment Red 190, CI Pigment Red 193, CI Pigment Red 194, CI Pigment Red 202, CI Pigment Red 206, CI Pigment Red 207, CI Pigment Red 208, CI Pigment Red 209, CI Pigment Red 215, CI Pigment Red 216, CI Pigment Red 220, CI Pigment Red 224, CI Pigment Red 226, CI Pigment Red 242, CI Pigment Red 243, CI Pigment Red 245, CI Pigment Red 254, CI Pigment Red 255, CI Pigment Red 264 and CI Pigment Red 265; CI Pigment Blue 15, CI Pigment Blue 15:3, CI Pigment Blue 15:4, CI Pigment Blue 15:6 And CI Pigment Blue 60; CI Pigment Green 7 and CI Pigment Green 36; CI Pigment Brown 23 and CI Pigment Brown 25; and CI Pigment Black 1 and CI Pigment Black 7.

此等有機顏料可藉由硫酸再結晶、溶劑清洗或其組合在使用前進行純化。These organic pigments can be purified by recrystallization of sulfuric acid, solvent washing or a combination thereof before use.

前述無機顏料之實例係包括氧化鈦、硫酸鋇、碳酸鈣、鋅白、硫酸鉛、黃鉛、鋅黃、紅色氧化鐵(紅色氧化鐵(III))、鎘紅、群青、普魯士藍、氧化鉻綠、鈷錄、琥珀、鈦黑、合成鐵黑及碳黑。Examples of the foregoing inorganic pigments include titanium oxide, barium sulfate, calcium carbonate, zinc white, lead sulfate, yellow lead, zinc yellow, red iron oxide (red iron oxide (III)), cadmium red, ultramarine blue, Prussian blue, chromium oxide. Green, cobalt, amber, titanium black, synthetic iron black and carbon black.

本發明中,前述顏料可單獨使用或二或更多種組合使用,或可組合使用有機顏料及無機顏料。例如,較佳係使用一或多種有機顏料形成像素,且較佳係使用二或更多種有機顏料及/或碳黑形成黑色基質。In the present invention, the aforementioned pigments may be used singly or in combination of two or more kinds, or an organic pigment and an inorganic pigment may be used in combination. For example, it is preferred to form a pixel using one or more organic pigments, and it is preferred to form a black matrix using two or more organic pigments and/or carbon black.

本發明中,顏料之粒子的表面可在使用之前視情況以聚合物加以修飾。用以修飾顏料粒子表面之聚合物的實例係包括JP-A 8-259876所揭示之聚合物及市售使用於分散顏料的聚合物及寡聚物。In the present invention, the surface of the particles of the pigment may be modified with a polymer as appropriate before use. Examples of the polymer for modifying the surface of the pigment particles include polymers disclosed in JP-A 8-259876 and polymers and oligomers commercially available for dispersing pigments.

本發明中,著色劑可視情況與分散劑結合使用。前述分散劑係為例如陽離子性、陰離子性、非離子性、兩性、以聚矽氧為底質或以氟為底質之界面活性劑。In the present invention, the colorant may optionally be used in combination with a dispersing agent. The dispersant is, for example, a cationic, anionic, nonionic, amphoteric, or a surfactant based on polyfluorene as a substrate or a fluorine-based substrate.

前述界面活性劑之實例係包括聚環氧乙烷烷基醚,諸如聚環氧乙烷月桂基醚、聚環氧乙烷硬脂基醚及聚環氧乙烷油基醚;聚環氧乙烷烷基苯基醚,諸如聚環氧乙烷正辛基苯基醚及聚環氧乙烷正壬基苯基醚;聚乙二醇二酯,諸如聚乙二醇二月桂酸酯及聚乙二醇二硬脂酸酯;山梨聚糖脂肪酸酯;經脂肪酸修飾之聚酯;經三級胺修飾之聚胺基甲酸乙酯;及聚伸乙基亞胺。此等界面活性劑之市售商標為KP(Shin-Etsu Chemical,Co.,Ltd.)、Polyflow(Kyoeisha Kagaku Co.,Ltd.)、F Top(Tokem Products Co.,Ltd.)、Megafac(Dainippon Ink and Chemicals,Inc.)、Florade(Sumitomo 3M Limited)、Asahi Guard及Surflon(Asahi Glass Co.,Ltd.)、BYK及Disperbyk(BYK Chemie Japan Co.,Ltd.)、Solsperse(Seneca Co.,Ltd.)及EFKA(EFKA Chemicals BV)。Examples of the foregoing surfactant include polyethylene oxide alkyl ethers such as polyethylene oxide lauryl ether, polyethylene oxide stearyl ether, and polyethylene oxide oleyl ether; polyethylene oxide Alkyl phenyl ethers such as polyethylene oxide n-octyl phenyl ether and polyethylene oxide n-decyl phenyl ether; polyethylene glycol diesters such as polyethylene glycol dilaurate and poly Ethylene glycol distearate; sorbitan fatty acid ester; polyester modified with fatty acid; polyurethane modified with tertiary amine; and polyethylenimine. Commercially available trademarks of such surfactants are KP (Shin-Etsu Chemical, Co., Ltd.), Polyflow (Kyoeisha Kagaku Co., Ltd.), F Top (Tokem Products Co., Ltd.), Megafac (Dainippon). Ink and Chemicals, Inc.), Florade (Sumitomo 3M Limited), Asahi Guard and Surflon (Asahi Glass Co., Ltd.), BYK and Disperbyk (BYK Chemie Japan Co., Ltd.), Solsperse (Seneca Co., Ltd) .) and EFKA (EFKA Chemicals BV).

此等界面活性劑可單獨使用或二或更多種組合使用。These surfactants may be used singly or in combination of two or more.

該界面活性劑之量以100重量份數著色劑計較佳係為50重量份數或較低,更佳係為0至30重量份數。The amount of the surfactant is preferably 50 parts by weight or less, more preferably 0 to 30 parts by weight, based on 100 parts by weight of the coloring agent.

本發明中,該輻射敏感樹脂組成物可藉適當之方法製備。使用顏料作為著色劑時,較佳係於分散劑存在下視情況連同鹼可溶性樹脂(B)與溶劑混合且分散於其中,同時藉珠磨機或輥磨機碾磨,以製備顏料分散物,此分散物隨之與下文所述之組份(B)、(C)及(D)混合。In the present invention, the radiation-sensitive resin composition can be produced by a suitable method. When a pigment is used as the colorant, it is preferably mixed with an alkali-soluble resin (B) and a solvent in the presence of a dispersing agent, and dispersed therein, while being milled by a bead mill or a roll mill to prepare a pigment dispersion, This dispersion is then mixed with the components (B), (C) and (D) described below.

用以製備前述顏料分散物之分散劑的量以100重量份數顏料計較佳係為100重量份數或更低,更佳0.5至100重量份數,再更佳1至70重量份數,特佳係10至50重量份數。當分散劑之量大於100重量份數時,顯影性可能受損。The amount of the dispersant used to prepare the aforementioned pigment dispersion is preferably 100 parts by weight or less, more preferably 0.5 to 100 parts by weight, still more preferably 1 to 70 parts by weight, based on 100 parts by weight of the pigment. It is preferably 10 to 50 parts by weight. When the amount of the dispersant is more than 100 parts by weight, the developability may be impaired.

用以製備前述顏料分散物之溶劑可如同用以下文所述之製備液體輻射敏感樹脂組成物的溶劑。The solvent used to prepare the aforementioned pigment dispersion can be used as a solvent for preparing a liquid radiation-sensitive resin composition as described below.

用以製備顏料分散物之溶劑的量以100重量份數顏料計較佳係為500至1,000重量份數,更佳700至900重量份數。The amount of the solvent used to prepare the pigment dispersion is preferably from 500 to 1,000 parts by weight, more preferably from 700 to 900 parts by weight, based on 100 parts by weight of the pigment.

使用珠磨機製備顏料分散物時,在(較佳)以冷卻水或諸如此類者冷卻之情況下,使用直徑約0.5至10毫米之玻璃珠粒或二氧化鈦珠粒混合且分散混合有顏料之溶液,該溶液係包含顏料、溶劑及分散劑。When a pigment dispersion is prepared using a bead mill, a glass pigment or a titanium oxide bead having a diameter of about 0.5 to 10 mm is mixed and dispersed with a pigment solution, preferably, with cooling water or the like. The solution contains a pigment, a solvent, and a dispersing agent.

此情況下,珠粒之填充率較佳係為磨機容量之50至80體積%,混合有顏料之溶液的注射量較佳係為磨機容量之約20至50體積%。處理時間較佳係為2至50小時,更佳2至25小時。In this case, the filling rate of the beads is preferably from 50 to 80% by volume of the mill capacity, and the injection amount of the solution in which the pigment is mixed is preferably from about 20 to 50% by volume of the mill capacity. The treatment time is preferably from 2 to 50 hours, more preferably from 2 to 25 hours.

使用輥磨機製備顏料分散物,三輥磨機或雙輥磨機混合且分散該混合有顏料之溶液,較佳係同時以冷卻水或諸如此類者冷卻。The pigment dispersion is prepared using a roll mill, and the three-roll mill or the two-roll mill mixes and disperses the pigment-mixed solution, preferably while cooling with cooling water or the like.

輥間之間隔較佳係為10微米或更小,且剪切力較佳係為約108 達因/秒。處理時間較佳係為2至50小時,更佳2至25小時。The spacing between the rolls is preferably 10 microns or less, and the shear force is preferably about 10 8 dynes/second. The treatment time is preferably from 2 to 50 hours, more preferably from 2 to 25 hours.

-組份(B)--Component (B)-

本發明中組份(B)係為含有主鏈中具有脂環族烴骨架且側鏈中具有可聚合不飽和鍵之聚酯的鹼可溶性樹脂(以下稱為 (B)鹼可溶性樹脂」),組份(B)係為作為著色劑(A)之黏合劑,在使用於製造染色層之顯影步驟中的鹼顯影劑中具有溶解度。In the present invention, the component (B) is an alkali-soluble resin containing a polyester having an alicyclic hydrocarbon skeleton in its main chain and having a polymerizable unsaturated bond in its side chain (hereinafter referred to as " (B) alkali-soluble resin"). The component (B) is a binder as the colorant (A) and has solubility in an alkali developer used in a developing step for producing a dye layer.

側鏈不飽和脂環族聚酯中脂環族烴骨架之實例係包括自以下具有4至8員碳環之烴衍生之骨架:環戊烷、甲基環戊烷、乙基環戊烷、正丙基環戊烷、異丙基環戊烷、1-甲基-3-異丙基環戊烷、環戊烯、環己烯、甲基環己烷、乙基環己烷、正丙基環己烷、異丙基環己烷、1-甲基-3-異丙基環己烷、1-甲基-4-異丙基環己烷、環己烯、環庚烷、甲基環庚烷、乙基環庚烷、正丙基環庚烷、異丙基環庚烷、1-甲基-3-異丙基環庚烷、1-甲基-4-異丙基環庚烷、環庚烯、環辛烷及環辛烯。Examples of the alicyclic hydrocarbon skeleton in the side chain unsaturated alicyclic polyester include a skeleton derived from a hydrocarbon having 4 to 8 membered carbon rings: cyclopentane, methylcyclopentane, ethylcyclopentane, N-propylcyclopentane, isopropylcyclopentane, 1-methyl-3-isopropylcyclopentane, cyclopentene, cyclohexene, methylcyclohexane, ethylcyclohexane, n-propyl Cyclohexane, isopropylcyclohexane, 1-methyl-3-isopropylcyclohexane, 1-methyl-4-isopropylcyclohexane, cyclohexene, cycloheptane, methyl Cycloheptane, ethylcycloheptane, n-propylcycloheptane, isopropylcycloheptane, 1-methyl-3-isopropylcycloheptane, 1-methyl-4-isopropylcycloheptane Alkane, cycloheptene, cyclooctane and cyclooctene.

此等脂環族烴骨架中,具有環己烷環之骨架較佳,而自1-甲基-3-異丙基環己烷及1-甲基-4-異丙基環己烷衍生之骨架特佳。Among these alicyclic hydrocarbon skeletons, a skeleton having a cyclohexane ring is preferred, and is derived from 1-methyl-3-isopropylcyclohexane and 1-methyl-4-isopropylcyclohexane. The skeleton is especially good.

側鏈不飽和脂環族聚酯中,該脂環族烴骨架可形成主鏈酯結構,用以使聚酯之結構單元直接或經由二價鍵基團互連。In the side chain unsaturated alicyclic polyester, the alicyclic hydrocarbon skeleton may form a main chain ester structure for interconnecting the structural units of the polyester directly or via a divalent bond group.

前述二價鍵基團之實例係包括伸甲基及具有1至6個主鏈碳原子之直鏈或支鏈伸烷基,諸如伸甲基、伸乙基、伸丙基、三伸甲基及四伸丁基;具有4至8員碳環之伸環烷基,諸如伸環丁基、伸環戊基及伸環己基;具有鍵結於具有4至8員碳環之伸環烷基而具有含1至6個主鏈碳原子之二價烴鏈(諸如伸甲基、伸乙基或伸丙基)的基團,諸如伸環戊基伸甲基、伸環戊基伸乙基、伸環戊基伸丙基、伸環己基伸甲基、伸環己基伸乙基及伸環己基伸丙基;具有6至10個碳原子之伸芳基,諸如1,3-伸苯基、1,4-伸苯基及1,4-萘基;具有鍵結於前述具有6至10員碳原子之伸芳基而具有含1至6個主鏈碳原子之二價烴鏈(諸如伸甲基、伸乙基或伸丙基)的基團;具有6至10個碳原子之伸芳基氧基,諸如間-伸苯基氧基(-m-C6 H4 -O-)或對-伸苯基氧基(-p-C6 H4 -O-);及具有鍵結於前述伸芳基氧基中之氧基而含1至6個主鏈碳原子的二價烴鏈(諸如伸甲基、伸乙基或伸丙基)的基團。Examples of the aforementioned divalent bond group include a methyl group and a linear or branched alkyl group having 1 to 6 main chain carbon atoms, such as a methyl group, an ethyl group, a propyl group, and a trimethyl group. And a tetra-butyl group; a cycloalkyl group having a carbon ring of 4 to 8 members, such as a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group; and a cycloalkyl group having a carbon ring of 4 to 8 members a group having a divalent hydrocarbon chain having 1 to 6 main chain carbon atoms (such as a methyl group, an ethyl group or a propyl group), such as a methyl group, a methyl group, a cyclopentyl group, and an exo a cyclopentyl propyl group, a cyclohexyl group methyl group, a cyclohexyl group ethyl group, and a cyclohexyl group propyl group; an extended aryl group having 6 to 10 carbon atoms, such as 1,3-phenylene group, 1, 4-phenylene and 1,4-naphthyl; having a divalent hydrocarbon chain (such as a methyl group) bonded to the aforementioned aryl group having 6 to 10 membered carbon atoms and having 1 to 6 main chain carbon atoms a group having an ethyl group or a propyl group; a aryloxy group having 6 to 10 carbon atoms, such as m-phenyleneoxy (-m-C 6 H 4 -O-) or p- phenylene group (-p-C 6 H 4 -O- ); and having bonded to the front Extending in the aryloxy group and having from 1 to 6 carbon atoms in the main chain divalent hydrocarbon chain (such as methyl stretch, elongation or stretch ethyl propyl) group.

此等二價鍵基團中,具有6至10個碳原子之伸芳基氧基較佳,而對-伸苯基氧基特佳。Among these divalent bond groups, an extended aryloxy group having 6 to 10 carbon atoms is preferred, and a p-phenyleneoxy group is particularly preferred.

側鏈不飽和脂環族聚酯之側鏈中的可聚合不飽和鍵不特別限制,其限制條件為其在欲製得用以形成染色層之輻射敏感組成物時可與下文所述之多官能性單體(C)及視情況使用之單官能性單體共聚。然而,就合成該側鏈不飽和脂環族聚酯之簡易性的觀點而言,較佳係為自可聚合不飽和羧酸(諸如(甲基)丙烯酸、巴豆酸、順丁烯二酸、反丁烯二酸或依康酸)衍生之不飽和鍵,尤其是自(甲基)丙烯酸衍生之不飽和鍵。The polymerizable unsaturated bond in the side chain of the side chain unsaturated alicyclic polyester is not particularly limited, and is limited in that it is as described below when a radiation-sensitive composition for forming a dye layer is to be produced. The functional monomer (C) and optionally a monofunctional monomer are copolymerized. However, from the viewpoint of the ease of synthesizing the side chain unsaturated alicyclic polyester, it is preferably a self-polymerizable unsaturated carboxylic acid (such as (meth)acrylic acid, crotonic acid, maleic acid, An unsaturated bond derived from fumaric acid or isaconic acid, especially an unsaturated bond derived from (meth)acrylic acid.

本發明側鏈不飽和脂環族聚酯特佳係為下式(1)所示之聚酯(以下稱為「聚酯(1)」)。The side chain unsaturated alicyclic polyester of the present invention is particularly preferably a polyester represented by the following formula (1) (hereinafter referred to as "polyester (1)").

[式(1)中,X各係獨立地為下式(2)或(3)所示之二價基團,Y各係獨立地為藉由自有機四羧酸去除四個羧基所得之殘基,R1 各獨立地為氫原子或甲基,R2 各獨立地為氫原子或羧基封端劑之殘基,且n係為1至40之整數。] [In the formula (1), each of the X groups is independently a divalent group represented by the following formula (2) or (3), and each of the Y groups is independently a residue obtained by removing four carboxyl groups from the organic tetracarboxylic acid. Further, R 1 is each independently a hydrogen atom or a methyl group, and R 2 is each independently a hydrogen atom or a residue of a carboxyl terminal blocking agent, and n is an integer of 1 to 40. ]

側鏈不飽和脂環族聚酯可藉著合成在主鏈中具有脂環族烴骨架且側鏈中具有可聚合不飽和鍵之二醇化合物,在該二醇化合物與具有2或更多個羧基之酸酐(較佳2至4個羧基,特佳係四羧酸酐)進行酯化反應而製得。The side chain unsaturated alicyclic polyester can be synthesized by synthesizing a diol compound having an alicyclic hydrocarbon skeleton in a main chain and having a polymerizable unsaturated bond in a side chain, and having two or more diol compounds An acid anhydride of a carboxyl group (preferably 2 to 4 carboxyl groups, particularly preferably a tetracarboxylic anhydride) is obtained by an esterification reaction.

聚酯(1)可自下式(6)或(7)之含二(甲基)丙烯醯基之二醇化合物及下式(8)所示而稱為「四羧酸二酐(8)之四羧酸二酐之間的酯化反應製得。The polyester (1) can be referred to as "tetracarboxylic dianhydride (8) from the diol compound containing a bis(meth) acrylonitrile group of the following formula (6) or (7) and represented by the following formula (8). The esterification reaction between the tetracarboxylic dianhydrides is obtained.

[式(6)中,R1 係如式(1)中所定義。] [In the formula (6), R 1 is as defined in the formula (1). ]

[式(7)中,R1 係如式(1)中所定義。] [In the formula (7), R 1 is as defined in the formula (1). ]

[式(8)中,Y係如前述式(1)中所定義。] In the formula (8), Y is as defined in the above formula (1). ]

下文主要針對聚酯(1)說明製造側鏈不飽和脂環族聚酯的方法。The method for producing a side chain unsaturated alicyclic polyester is mainly described below for polyester (1).

含二(甲基)丙烯醯基之二醇化合物可藉著將下式(9)所示之二酚(以下稱為「二酚(9)」)及或下式(10)所示之二酚(以下稱為「二酚(10)」)二縮水甘油醚化,合成下式(11)或(12)所示之二縮水甘油醚化產物,使丙烯酸及/或甲基丙烯酸與位於該二縮水甘油醚化產物之兩末端之環氧基進行加成反應而製得。The diol compound containing a bis(meth) acrylonitrile group can be obtained by using a diphenol represented by the following formula (9) (hereinafter referred to as "diphenol (9)") or a formula (10) A phenol (hereinafter referred to as "diphenol (10)") diglycidyl ether is etherified to synthesize a diglycidyl etherified product represented by the following formula (11) or (12) so that acrylic acid and/or methacrylic acid are located therein. The epoxy group at both ends of the diglycidyl etherification product is subjected to an addition reaction.

較佳係前述所製得含二(甲基)丙烯醯基之二醇化合物具有低於10毫克KOH/克之酸值及10,000至20,000之環氧當量。Preferably, the diol compound containing the bis(meth)acrylonitrile group prepared as described above has an acid value of less than 10 mgKOH/g and an epoxy equivalent of 10,000 to 20,000.

合成該含二(甲基)丙烯醯基之二醇化合物時,期望使用重量比較佳為80至60:20至40之二酚(9)及二酚(10),唯二酚可單獨使用或二或更多種組合使用。When synthesizing the bis(meth)acrylonitrile-containing diol compound, it is desirable to use a weight ratio of preferably 80 to 60:20 to 40 bisphenol (9) and diphenol (10), which can be used alone or Two or more combinations are used.

用以合成含二(甲基)丙烯醯基之二醇化合物的二酚間之二縮水甘油醚化反應可根據一般合成環氧樹脂之方法進行。例如,該含二(甲基)丙烯醯基之二醇化合物可藉二酚與表氯醇於鹼性觸媒存在下進行反應而合成。The diglycidyl etherification reaction between diphenols for synthesizing a diol compound containing a bis(meth)acryl fluorenyl group can be carried out according to a method of synthesizing an epoxy resin in general. For example, the bis(meth)acrylonitrile-containing diol compound can be synthesized by reacting diphenol with epichlorohydrin in the presence of a basic catalyst.

如前述般製得之二縮水甘油醚化產物係具有260至300之環氧當量。The diglycidyl etherified product obtained as described above has an epoxy equivalent of from 260 to 300.

四羧酸二酐(8)不特別限制,但較佳係為下式(8-1)所之化合物、下式(8-2)所示之化合物或下式(8-3)所示之化合物。The tetracarboxylic dianhydride (8) is not particularly limited, but is preferably a compound of the following formula (8-1), a compound represented by the following formula (8-2) or a formula (8-3): Compound.

進行用以製造聚酯(1)之含二(甲基)丙烯醯基之二醇化合物與四羧酸二酐(8)間之酯化反應的方法不特別限制。例如,聚酯(1)可藉著於加熱下將含二(甲基)丙烯醯基之二醇化合物溶解於有機溶劑中,將四羧酸二酐(8)添加於形成之溶液中,於攪拌下使其彼此反應而製得。The method for carrying out the esterification reaction between the diol compound containing the di(meth)acrylonitrile group of the polyester (1) and the tetracarboxylic dianhydride (8) is not particularly limited. For example, the polyester (1) can be dissolved in an organic solvent by heating a di(meth)acrylonitrile group-containing diol compound, and a tetracarboxylic dianhydride (8) can be added to the formed solution. It is prepared by reacting with each other with stirring.

前述酯化反應所製得之聚酯(1)中,式(1)中之R2 皆為氫原子,四羧酸二酐(8)之殘基具有二或三個羧基,使得聚酯(1)於鹼水溶液中展現優異溶解度。In the polyester (1) obtained by the above esterification reaction, R 2 in the formula (1) is a hydrogen atom, and the residue of the tetracarboxylic dianhydride (8) has two or three carboxyl groups, so that the polyester ( 1) Excellent solubility in an aqueous alkali solution.

本發明中,藉酯化反應製得之聚酯(1)中至少部分游離羧基可在使用之前以羧基封端劑加以封端。藉由改變經封端羧基之比例,調整聚酯(1)之酸值,以控制鹼溶解度。In the present invention, at least a part of the free carboxyl groups in the polyester (1) obtained by the esterification reaction may be blocked with a carboxyl blocking agent before use. The acid value of the polyester (1) is adjusted by changing the ratio of the blocked carboxyl group to control the alkali solubility.

前述羧基封端劑不特別限制,可使用已知封端劑,諸如縮水甘油醚或碳化二亞胺。例如,苯基縮水甘油醚、4-正丁基苯基縮水甘油醚及間苯二酚縮水甘油醚較佳。The aforementioned carboxyl terminal blocking agent is not particularly limited, and a known blocking agent such as glycidyl ether or carbodiimide can be used. For example, phenyl glycidyl ether, 4-n-butylphenyl glycidyl ether, and resorcinol glycidyl ether are preferred.

本發明中,聚酯(1)之酸值較佳係為20至80毫克KOH/克,更佳為30至70毫克KOH/克。視四羧酸二酐(8)之類型而定,合宜地聚酯(1)中所有R2 總量之較佳50莫耳%或更高,更佳70莫耳%或更高應由氫原子組成,以確定高度鹼顯影性。In the present invention, the acid value of the polyester (1) is preferably from 20 to 80 mgKOH/g, more preferably from 30 to 70 mgKOH/g. Depending on the type of the tetracarboxylic dianhydride (8), it is preferred that the total amount of all R 2 in the polyester (1) is preferably 50 mol% or more, more preferably 70 mol% or more, of hydrogen. Atomic composition to determine high alkali developability.

以羧基封端劑封端後之聚酯(1)的環氧基當量較佳係為60,000或更高。The epoxy group equivalent of the polyester (1) after capping with a carboxyl blocking agent is preferably 60,000 or more.

因為聚酯(1)具有複數個具有聚合能力之丙烯醯基或甲基丙烯醯基,故其因曝光而固化,變成難溶於鹼水溶液。同時,因其未固化時可溶於鹼水溶液中,故其以光阻膜形式曝光,留下固化之部分,未固化之部分具有鹼顯影性,可溶解於鹼水溶液中並移除。聚酯(1)對於各種基材具有高度黏著性、低固化收縮率及優異之耐熱性且具高玻璃轉化溫度(Tg),可形成具有高度硬度之光阻膜。此外,當分子主鏈中所含之脂環族烴骨架形成相對柔軟之結構時,聚酯(1)具有高可撓性。Since the polyester (1) has a plurality of propylene groups or methacryl groups having a polymerization ability, it is cured by exposure to become insoluble in an aqueous alkali solution. At the same time, since it is soluble in the aqueous alkali solution when it is not cured, it is exposed in the form of a photoresist film, leaving a solidified portion, and the uncured portion has alkali developability, can be dissolved in the aqueous alkali solution and removed. The polyester (1) has high adhesion to various substrates, low curing shrinkage and excellent heat resistance, and has a high glass transition temperature (Tg), and can form a photoresist film having a high hardness. Further, when the alicyclic hydrocarbon skeleton contained in the molecular main chain forms a relatively soft structure, the polyester (1) has high flexibility.

本發明中,側鏈不飽和脂環族聚酯藉凝膠滲透層析(GPC)(溶離溶劑:四氫呋喃)測量以聚苯乙烯計之重量平均分子量(以下稱為「Mw」)較佳係為3,000至100,000,更佳為5,000至25,000。當Mw低於前述範圍時,可撓性或黏著性可能降低,當Mw超過前述範圍時,可能降低感光固化性或未固化狀態之鹼溶解度。若為聚酯(1),則Mw可藉著改變有機溶劑及反應原料於前述酯化反應中之量加以調整。In the present invention, the side chain unsaturated alicyclic polyester is measured by gel permeation chromatography (GPC) (dissolved solvent: tetrahydrofuran) to measure the weight average molecular weight in terms of polystyrene (hereinafter referred to as "Mw"). 3,000 to 100,000, more preferably 5,000 to 25,000. When Mw is lower than the above range, flexibility or adhesiveness may be lowered, and when Mw exceeds the above range, alkali solubility in a photosensitive curable or uncured state may be lowered. In the case of the polyester (1), Mw can be adjusted by changing the amount of the organic solvent and the reaction raw material in the aforementioned esterification reaction.

側鏈不飽和脂環族聚酯藉凝膠滲透層析(GPC)(溶離溶劑:四氫呋喃)測量以聚苯乙烯計之數量平均分子量(以下稱為「Mn」)較佳係為1,000至60,000,更佳為2,000至25,000。The side chain unsaturated alicyclic polyester is measured by gel permeation chromatography (GPC) (dissolved solvent: tetrahydrofuran), and the number average molecular weight (hereinafter referred to as "Mn") in terms of polystyrene is preferably 1,000 to 60,000. More preferably 2,000 to 25,000.

側鏈不飽和脂環族聚酯較佳係具有60至70毫克KOH/克之酸值,以確定於未固化狀態之高度鹼溶解度。The side chain unsaturated alicyclic polyester preferably has an acid value of from 60 to 70 mg KOH/g to determine the high alkali solubility in the uncured state.

本發明中,側鏈不飽和脂環族聚酯可單獨使用或二或更多種組合使用。In the present invention, the side chain unsaturated alicyclic polyester may be used singly or in combination of two or more.

本發明中,另一種鹼可溶性樹脂可與該側鏈不飽和脂環族聚酯結合使用作為鹼可溶性樹脂。In the present invention, another alkali-soluble resin may be used in combination with the side chain unsaturated alicyclic polyester as the alkali-soluble resin.

該另一種鹼可溶性樹脂係為例如具有酸官能基(諸如羧基)、酚羥基或磺酸基之可聚合不飽和單體及另一種異於前述單體之可共聚不飽和單體(以下稱為「可共聚不飽和單體」)的共聚物。The other alkali-soluble resin is, for example, a polymerizable unsaturated monomer having an acid functional group (such as a carboxyl group), a phenolic hydroxyl group or a sulfonic acid group, and another copolymerizable unsaturated monomer different from the aforementioned monomer (hereinafter referred to as Copolymer of "copolymerizable unsaturated monomer").

該具有羧基之可聚合不飽和單體(以下稱為「含羧基不飽和單體」)的實例係包括不飽和單羧酸,諸如(甲基)丙烯酸、巴豆酸、α-氯丙烯酸及肉桂酸;不飽和二羧酸及其酐,諸如順丁烯二酸、順丁烯二酸酐、反丁烯二酸、依康酸、依康酸酐、檸康酸、檸康酸酐及中康酸;具有三或更多個羧基之不飽和多羧酸及其酐;具有二或更多個羧基之多羧酸的單[(甲基)丙烯醯氧基烷基]酯,諸如琥珀酸單[2-(甲基)丙烯醯氧基乙基]酯及苯二甲酸單[2-(甲基)丙烯醯氧基乙基]酯;及在兩末端上具有羧基及羥基之聚合物的單(甲基)丙烯酸酯,諸如ω-羧基聚己內酯單(甲基)丙烯酸酯。Examples of the carboxyl group-containing polymerizable unsaturated monomer (hereinafter referred to as "carboxy group-containing unsaturated monomer") include unsaturated monocarboxylic acids such as (meth)acrylic acid, crotonic acid, α-chloroacrylic acid, and cinnamic acid. An unsaturated dicarboxylic acid and an anhydride thereof, such as maleic acid, maleic anhydride, fumaric acid, isaconic acid, isaconic anhydride, citraconic acid, citraconic anhydride, and mesaconic acid; Three or more carboxyl groups of unsaturated polycarboxylic acids and anhydrides thereof; mono[(meth)acryloxyalkylalkyl]esters of polycarboxylic acids having two or more carboxyl groups, such as succinic acid mono[2- (meth)acryloyloxyethyl]ester and mono [2-(methyl)propenyloxyethyl] phthalic acid ester; and mono(methyl) polymer having a carboxyl group and a hydroxyl group at both terminals An acrylate such as ω-carboxypolycaprolactone mono(meth)acrylate.

前述含羧基不飽和單體可單獨使用或二或更多種組合使用。The aforementioned carboxyl group-containing unsaturated monomers may be used singly or in combination of two or more.

前述具有酚羥基之可聚合不飽和單體的實例係包括鄰-羥基苯乙烯、間-羥基苯乙烯、對-羥基苯乙烯、鄰-α-甲基羥基苯乙烯、間-α-甲基羥基苯乙烯、對-α-甲基羥基苯乙烯、N-鄰-羥基苯基順丁烯二醯亞胺、N-間-羥基苯基順丁烯二醯亞胺及N-對-羥基苯基順丁烯二醯亞胺。Examples of the aforementioned polymerizable unsaturated monomer having a phenolic hydroxyl group include o-hydroxystyrene, m-hydroxystyrene, p-hydroxystyrene, o-α-methylhydroxystyrene, and m-α-methylhydroxyl group. Styrene, p-α-methylhydroxystyrene, N-o-hydroxyphenyl maleimide, N-m-hydroxyphenyl maleimide and N-p-hydroxyphenyl Maleic acid imine.

此等具有酚羥基之可聚合不飽和單體可單獨使用或者二或更多種組合使用。These polymerizable unsaturated monomers having a phenolic hydroxyl group may be used singly or in combination of two or more.

具有磺酸基之可聚合不飽和單體的實例係包括異戊間二烯磺酸及對-苯乙烯磺酸。Examples of the polymerizable unsaturated monomer having a sulfonic acid group include isoprene disulfonic acid and p-styrenesulfonic acid.

此等具有磺酸基之可聚合不飽和單體可單獨使用或者二或更多種組合使用。These polymerizable unsaturated monomers having a sulfonic acid group may be used singly or in combination of two or more.

可共聚不飽和單體之實例係包括聚合物鏈末端具有單(甲基)丙烯醯基之巨單體(以下簡稱為「巨單體」),諸如聚苯乙烯、聚(甲基)丙烯酸甲酯、聚(甲基)丙烯酸正丁酯及聚矽氧烷;N-芳基順丁烯二醯亞胺,諸如N-苯基順丁烯二醯亞胺、N-鄰-羥基苯基順丁烯二醯亞胺、N-間-羥基苯基順丁烯二醯亞胺、N-對-羥基苯基順丁烯二醯亞胺、N-鄰-甲基苯基順丁烯二醯亞胺、N-間-甲基苯基順丁烯二醯亞胺、N-對-甲基苯基順丁烯二醯亞胺、N-鄰-甲氧基苯基順丁烯二醯亞胺、N-間-甲氧基苯基順丁烯二醯亞胺、N-對-甲氧基苯基順丁烯二醯亞胺及N-經取代順丁烯二醯亞胺,諸如N-環己基順丁烯二醯亞胺;芳族乙烯基化合物,諸如苯乙烯、α-甲基苯乙烯、鄰-乙烯基甲苯、間-乙烯基甲苯、對-乙烯基甲苯、對-氯苯乙烯、鄰-甲氧基苯乙烯、間-甲氧基苯乙烯、對-甲氧基苯乙烯、鄰-乙烯基苄基甲基醚、間-乙烯基苄基甲基醚、對-乙烯基苄基甲基醚、鄰-乙烯基苄基縮水甘油基醚、間-乙烯基苄基縮水甘油基醚及對-乙烯基苄基縮水甘油基醚;茚,諸如茚及1-甲基茚;不飽和羧酸酯,諸如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸第二丁酯、(甲基)丙烯酸第三丁酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸3-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸3-羥基丁酯、(甲基)丙烯酸4-羥基丁酯、(甲基)丙烯酸烯丙酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸2-甲氧基乙酯、(甲基)丙烯酸2-苯氧基乙酯、甲氧基雙乙二醇(甲基)丙烯酸酯、甲氧基參乙二醇(甲基)丙烯酸酯、甲氧基丙二醇(甲基)丙烯酸酯、甲氧基雙丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸異酯、(甲基)丙烯酸二環戊二烯酯、(甲基)丙烯酸2-羥基-3-苯氧基丙酯及甘油單(甲基)丙烯酸酯;不飽和羧酸胺基烷酯,諸如(甲基)丙烯酸2-胺基乙酯、(甲基)丙烯酸2-二甲基胺基乙酯、(甲基)丙烯酸2-胺基丙酯、(甲基)丙烯酸2-二甲基胺基丙酯、(甲基)丙烯酸3-胺基丙酯及(甲基)丙烯酸3-二甲基胺基丙酯;不飽和縮水甘油基羧酸酯,諸如(甲基)丙烯酸縮水甘油酯;乙烯基羧酸酯,諸如乙酸乙烯酯、丙酸乙烯酯、丁酸乙烯酯及苯甲酸乙烯酯;不飽和醚,諸如乙烯基甲基醚、乙烯基乙基醚及烯丙基縮水甘油基醚;乙烯基氰化合物,諸如(甲基)丙烯腈,α-氯丙烯腈及亞乙烯基氰;不飽和醯胺,諸如(甲基)丙烯醯胺、α-氯丙烯醯胺及N-2-羥基乙基(甲基)丙烯醯胺;脂族共軛二烯,諸如1,3-丁二烯、異戊間二烯及氯丁二烯。Examples of the copolymerizable unsaturated monomer include a macromonomer having a mono(meth)acrylonitrile group at the end of the polymer chain (hereinafter referred to as "macromonomer"), such as polystyrene, poly(meth)acrylic acid. Ester, n-butyl poly(meth)acrylate and polyoxyalkylene; N-aryl maleimide, such as N-phenyl maleimide, N-o-hydroxyphenyl cis Butylene diimide, N-m-hydroxyphenyl maleimide, N-p-hydroxyphenyl maleimide, N-o-methylphenyl maleic acid Imine, N-m-methylphenyl maleimide, N-p-methylphenyl maleimide, N-o-methoxyphenyl-butylene Amine, N-m-methoxyphenyl maleimide, N-p-methoxyphenyl maleimide, and N-substituted maleimide, such as N - cyclohexyl maleimide; an aromatic vinyl compound such as styrene, α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorobenzene Ethylene, o-methoxy styrene, -methoxystyrene, p-methoxystyrene, o-vinylbenzyl methyl ether, m-vinylbenzyl methyl ether, p-vinylbenzyl methyl ether, o-vinyl benzyl Glycidyl ether, m-vinylbenzyl glycidyl ether and p-vinylbenzyl glycidyl ether; hydrazine, such as hydrazine and 1-methyl hydrazine; unsaturated carboxylic acid esters such as (methyl) Methyl acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, (A) Base) butyl acrylate, tert-butyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate , 2-hydroxybutyl (meth)acrylate, 3-hydroxybutyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, allyl (meth)acrylate, benzyl (meth)acrylate , cyclohexyl (meth)acrylate, phenyl (meth)acrylate, 2-methoxyethyl (meth)acrylate, 2-phenoxyethyl (meth)acrylate, methoxybisethylene Alcohol ) Acrylate, methoxy reference glycol (meth) acrylate, propylene glycol methoxy (meth) acrylate, methoxy dipropylene glycol (meth) acrylate, (meth) acrylate Ester, dicyclopentadienyl (meth)acrylate, 2-hydroxy-3-phenoxypropyl (meth)acrylate and glycerol mono(meth)acrylate; unsaturated alkyl amide of carboxylic acid, such as 2-Aminoethyl (meth)acrylate, 2-dimethylaminoethyl (meth)acrylate, 2-aminopropyl (meth)acrylate, 2-dimethylamine (meth)acrylate Propyl propyl ester, 3-aminopropyl (meth) acrylate and 3-dimethylaminopropyl (meth) acrylate; unsaturated glycidyl carboxylate such as glycidyl (meth)acrylate; Vinyl carboxylates such as vinyl acetate, vinyl propionate, vinyl butyrate and vinyl benzoate; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether and allyl glycidyl ether Vinyl cyanide compounds such as (meth)acrylonitrile, α-chloroacrylonitrile and vinylidene cyanide; unsaturated decylamines such as (meth) acrylamide, α-chloropropenylamine and N-2- Hydroxyethyl (meth) acrylamide; aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene.

本發明中,前述另一種鹼可溶性樹脂較佳係為含羧基不飽和單體及可共聚不飽和單體之共聚物(以下簡稱為「含羧基共聚物」),更佳係為以下之單體混合物的共聚物:(a)含有(甲基)丙烯酸之含羧基不飽和單體及(b)至少一種選自聚苯乙烯巨單體、聚甲基丙烯酸甲酯巨單體、N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸苄酯及甘油(甲基)丙烯酸酯者及視情況存在之(c)至少一種選自苯乙烯、α-甲基苯乙烯、(甲基)丙烯酸甲酯、(甲基)丙烯酸烯丙酯及(甲基)丙烯酸苯酯者。In the present invention, the other alkali-soluble resin is preferably a copolymer of a carboxyl group-containing unsaturated monomer and a copolymerizable unsaturated monomer (hereinafter referred to as a "carboxy group-containing copolymer"), and more preferably a monomer below. Copolymer of the mixture: (a) a carboxyl group-containing unsaturated monomer containing (meth)acrylic acid and (b) at least one selected from the group consisting of polystyrene macromonomers, polymethylmethacrylate macromonomers, N-phenyl groups Maleimide, N-cyclohexylmethyleneimine, 2-hydroxyethyl (meth)acrylate, benzyl (meth)acrylate, and glycerol (meth)acrylate, and optionally (c) at least one selected from the group consisting of styrene, α-methylstyrene, methyl (meth)acrylate, allyl (meth)acrylate, and phenyl (meth)acrylate.

該另一種鹼可溶性樹脂之Mw較佳係為2,000至300,000,更佳係為3,000至100,000。Mn較佳為1,000至60,000,更佳為2,000至25,000。The Mw of the other alkali-soluble resin is preferably from 2,000 to 300,000, more preferably from 3,000 to 100,000. Mn is preferably from 1,000 to 60,000, more preferably from 2,000 to 25,000.

本發明中,前述鹼可溶性樹脂可單獨使用或二或更多種組合使用。In the present invention, the aforementioned alkali-soluble resins may be used singly or in combination of two or more.

本發明中,該鹼可溶性樹脂之總量以100重量份數著色劑(A)計較佳係為10至1,000重量份數,更佳20至500重量份數。當該鹼可溶性樹脂之總量低於10重量份數時,鹼顯影性可能降低,或未曝光部分之基材或遮光層上可能產生沾染或薄膜殘留物。當總量高於1,000重量份數時,著色劑之濃度變成相對低,而可能難以達到薄膜之目標色彩密度。In the present invention, the total amount of the alkali-soluble resin is preferably from 10 to 1,000 parts by weight, more preferably from 20 to 500 parts by weight, per 100 parts by weight of the coloring agent (A). When the total amount of the alkali-soluble resin is less than 10 parts by weight, alkali developability may be lowered, or contamination or film residue may be generated on the substrate or the light-shielding layer of the unexposed portion. When the total amount is more than 1,000 parts by weight, the concentration of the colorant becomes relatively low, and it may be difficult to achieve the target color density of the film.

該鹼可溶性樹脂中側鏈不飽和脂環族聚酯之量較佳係為10至100重量%,更佳20至100重量%。當側鏈不飽和脂環族聚酯之量低於10重量%時,可能損及本發明所要達成之效果。The amount of the side chain unsaturated alicyclic polyester in the alkali-soluble resin is preferably from 10 to 100% by weight, more preferably from 20 to 100% by weight. When the amount of the side chain unsaturated alicyclic polyester is less than 10% by weight, the effects to be achieved by the present invention may be impaired.

-組份(C)--Component (C)-

本發明組份(C)係為分子中具有二或更多個可聚合之不飽和鍵之多官能性單體。The component (C) of the present invention is a polyfunctional monomer having two or more polymerizable unsaturated bonds in the molecule.

該多官能性單體之實例係包括烷二醇,諸如乙二醇及丙二醇之二(甲基)丙烯酸酯;聚烷二醇,諸如聚乙二醇及聚丙二醇之二(甲基)丙烯酸酯;具有3或更多個羥基之多羥基醇及其經二羧酸修飾之產物諸如甘油、三羥甲基丙烷、異戊四醇及二異戊四醇的聚(甲基)丙烯酸酯;寡(甲基)丙烯酸酯,諸如聚酯、環氧樹脂、胺基甲酸酯樹脂、醇酸樹脂、聚矽氧樹脂及螺烷樹脂;於兩末端皆具有羥基之聚合物諸如於兩末端皆具有羥基之聚-1,3-丁二烯、於兩末端皆具有羥基之聚異戊間二烯及於兩末端皆具有羥基之聚己內酯的二(甲基)丙烯酸酯;及磷酸三[2-(甲基)丙烯醯氧基乙基]酯。Examples of the polyfunctional monomer include alkanediols such as di(meth)acrylates of ethylene glycol and propylene glycol; polyalkylene glycols such as di(meth)acrylates of polyethylene glycol and polypropylene glycol a poly(meth) acrylate having a polyhydric alcohol having 3 or more hydroxyl groups and a dicarboxylic acid-modified product thereof such as glycerin, trimethylolpropane, isovaerythritol and diisopentaerythritol; (Meth) acrylates, such as polyesters, epoxies, urethane resins, alkyds, polyoxyxides, and spiro resins; polymers having hydroxyl groups at both ends, such as at both ends Hydroxy poly-1,3-butadiene, polyisoprene with hydroxyl groups at both ends, and di(meth)acrylate of polycaprolactone having hydroxyl groups at both ends; and phosphoric acid tri[ 2-(Methyl)propenyloxyethyl]ester.

此等多官能性單體中,具有3或更多個羥基之多羥基醇及其經二羧酸修飾之產物的多(甲基)丙烯酸酯較佳,實例有三羥甲基丙烷三丙烯酸酯、三羥甲基丙烷三甲基丙烯酸酯、異戊四醇三丙烯酸酯、異戊四醇三甲基丙烯酸酯、異戊四醇四丙烯酸酯、異戊四醇四甲基丙烯酸酯、二異戊四醇五丙烯酸酯、二異戊四醇五甲基丙烯酸酯、二異戊四醇六丙烯酸酯、二異戊四醇六甲基丙烯酸酯及由以下式(13)及(14)所示之化合物。Among these polyfunctional monomers, polyhydric alcohols having 3 or more hydroxyl groups and poly(meth)acrylates thereof modified by dicarboxylic acid are preferred, and examples thereof include trimethylolpropane triacrylate. Trimethylolpropane trimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, diisoamyl Tetraol pentaacrylate, diisopentyl alcohol pentamethacrylate, diisopentyl alcohol hexaacrylate, diisopentyl alcohol hexamethacrylate, and represented by the following formulas (13) and (14) Compound.

此等化合物中,三羥甲基丙烷三丙烯酸酯、異戊四醇三丙烯酸酯及二異戊四醇六丙烯酸酯特佳,因其提供具有優異之強度及表面光滑性,且極少於未曝光部分之基材或遮光層上產生沾染或薄膜殘留物的染色層。Among these compounds, trimethylolpropane triacrylate, pentaerythritol triacrylate and diisopentyl alcohol hexaacrylate are particularly preferred because they provide excellent strength and surface smoothness, and are extremely less than unexposed. A dyed layer of stained or film residue is formed on a portion of the substrate or light-shielding layer.

前述多官能性單體可單獨使用或二或更多種組合使用。The aforementioned polyfunctional monomers may be used singly or in combination of two or more.

本發明多官能性單體之量以100重量份數該鹼可溶性樹脂(B)計較佳係為5至500重量份數,更佳係為20至300重量份數。當該多官能性單體之量低於5重量份數時,染色層之強度及表面光滑性可能降低,而當該量高於500重量份數時,鹼顯影性可能降低,或未曝光部分之基材或遮光層上可能產生沾染或薄膜殘留物。The amount of the polyfunctional monomer of the present invention is preferably from 5 to 500 parts by weight, more preferably from 20 to 300 parts by weight, per 100 parts by weight of the alkali-soluble resin (B). When the amount of the polyfunctional monomer is less than 5 parts by weight, the strength and surface smoothness of the dye layer may be lowered, and when the amount is more than 500 parts by weight, the alkali developability may be lowered, or the unexposed portion may be Contamination or film residue may form on the substrate or light-shielding layer.

本發明中,多官能性單體可與分子中具有一個可聚合不飽和鍵之單官能性單體組合使用。In the present invention, the polyfunctional monomer can be used in combination with a monofunctional monomer having a polymerizable unsaturated bond in the molecule.

前述單官能性單體之實例係包括前述其他鹼可溶性樹脂中之含羧基不飽和單體及可共聚不飽和單體所列示之化合物、N-(甲基)丙烯醯基嗎啉、N-乙烯基吡咯啉酮、N-乙烯基-ε-己內醯胺及市售M-5600(Toagosei Chemical Industry Co.,Ltd.之商標)。Examples of the aforementioned monofunctional monomer include the carboxyl group-containing unsaturated monomer and the compound represented by the copolymerizable unsaturated monomer in the other alkali-soluble resin, N-(methyl)propenylmorpholine, N- Vinylpyrrolidone, N-vinyl-ε-caprolactam, and commercially available M-5600 (trademark of Toagosei Chemical Industry Co., Ltd.).

此等單官能性單體可單獨使用或二或更多種組合使用。These monofunctional monomers may be used singly or in combination of two or more.

該單官能性單體之量以多官能性單體及單官能性單體之總量計較佳係為90重量%或更低,更佳50重量%或更低。當該單官能性單體之量高於90重量%時,所得之染色層的強度及表面光滑性可能變成無法令人滿意。The amount of the monofunctional monomer is preferably 90% by weight or less, more preferably 50% by weight or less based on the total of the polyfunctional monomer and the monofunctional monomer. When the amount of the monofunctional monomer is more than 90% by weight, the strength and surface smoothness of the resulting dyed layer may become unsatisfactory.

本發明中多官能性單體及單官能性單體之總量以100重量份數該鹼可溶性樹脂(B)計較佳係為5至500重量份數,更佳20至300重量份數。當總量低於5重量份數時,染色層之強度及表面光滑性可能降低,而當總量高於500重量份數時,鹼顯影性可能降低,或未曝光部分之基材或遮光層上可能產生沾染或薄膜殘留物。The total amount of the polyfunctional monomer and the monofunctional monomer in the present invention is preferably from 5 to 500 parts by weight, more preferably from 20 to 300 parts by weight, per 100 parts by weight of the alkali-soluble resin (B). When the total amount is less than 5 parts by weight, the strength and surface smoothness of the dye layer may be lowered, and when the total amount is more than 500 parts by weight, the alkali developability may be lowered, or the unexposed portion of the substrate or the light shielding layer may be Contamination or film residue may form on the surface.

-(D)感光自由基產生劑-- (D) Photosensitive free radical generator -

本發明感光自由基產生劑(D)係為在曝照諸如可見光輻射、紫外線輻射、遠紫外線輻射、帶電粒子輻射或X-輻射之輻射時形成自由基的化合物,該自由基可起始前述多官能性單體(C)及視情況使用之單官能性單體的聚合。The photoactive radical generating agent (D) of the present invention is a compound which forms a radical upon exposure to radiation such as visible light radiation, ultraviolet radiation, far ultraviolet radiation, charged particle radiation or X-radiation, and the radical can initiate the aforementioned multiple Polymerization of a functional monomer (C) and optionally a monofunctional monomer.

本發明感光自由基產生劑較佳為下式(4)或(5)所示之化合物(以下稱為「以咔唑為主之化合物(D1)」)。The photoactive radical generator of the present invention is preferably a compound represented by the following formula (4) or (5) (hereinafter referred to as "carbazole-based compound (D1)").

[式(4)及(5)中,各R3 係獨立地為具有1至12個碳原子之直鏈、支鏈或環狀烷基或苯基,各R4 係獨立地為氫原子、具有1至12個碳原子之直鏈、支鏈或環狀烷基或苯基,R5 係為氫原子或具有1至12個碳原子之直鏈、支鏈或環狀烷基,且各R6 、R7 及R8 係獨立地為氫原子或具有1至6個碳原子之直鏈、支鏈或環狀烷基,其限制條件為由各R3 、R4 、R5 、R6 、R7 及R8 所表示之烷基可經選自具有1至6個碳原子之直鏈、支鏈或環狀烷氧基、苯基及鹵原子之取代基所取代,而由各R3 及R4 所表示之苯基可經選自具有1至6個碳原子之直鏈、支鏈或環狀烷基、具有1至6個碳原子之直鏈、支鏈或環狀烷氧基及鹵原子之取代基所取代。] [In the formulae (4) and (5), each R 3 is independently a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms or a phenyl group, and each R 4 is independently a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms or a phenyl group, and R 5 is a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms, and each R 6 , R 7 and R 8 are independently a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, which is limited by each of R 3 , R 4 , R 5 , R 6. The alkyl group represented by R 7 and R 8 may be substituted by a substituent selected from a linear, branched or cyclic alkoxy group having 1 to 6 carbon atoms, a phenyl group and a halogen atom. The phenyl group represented by R 3 and R 4 may be a linear, branched or cyclic alkane having from 1 to 6 carbon atoms selected from a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms. The substituents of the oxy group and the halogen atom are substituted. ]

式(4)及(5)中,由R3 、R4 及R5 所表示之具有1至12個碳原子之直鏈、支鏈或環狀烷基的實例係包括甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、正庚基、正辛基、正壬基、正癸基、正十一碳基、正十二碳基、環戊基及環己基。In the formulae (4) and (5), examples of the linear, branched or cyclic alkyl group having 1 to 12 carbon atoms represented by R 3 , R 4 and R 5 include a methyl group, an ethyl group, and the like. N-propyl, isopropyl, n-butyl, isobutyl, t-butyl, tert-butyl, n-pentyl, n-hexyl, n-heptyl, n-octyl, n-decyl, n-decyl, positive Eleven carbon, n-dodecyl, cyclopentyl and cyclohexyl.

由R6 、R7 及R8 所表示之具有1至6個碳原子之直鏈、支鏈或環狀烷基的實例係包括甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、環戊基及環己基。Examples of the linear, branched or cyclic alkyl group having 1 to 6 carbon atoms represented by R 6 , R 7 and R 8 include methyl, ethyl, n-propyl, isopropyl, n-butyl Base, isobutyl, t-butyl, tert-butyl, n-pentyl, n-hexyl, cyclopentyl and cyclohexyl.

位於由R3 、R4 、R5 、R6 、R7 及R8 所表示之烷基上及位於由R3 及R4 所表示之苯基上的取代基中,具有1至6個碳原子之直鏈、支鏈或環狀烷氧基係包括例如甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基及第三丁氧基,而鹵原子係包括例如氟原子及氯原子。And having 1 to 6 carbons in the alkyl group represented by R 3 , R 4 , R 5 , R 6 , R 7 and R 8 and the substituent on the phenyl group represented by R 3 and R 4 The linear, branched or cyclic alkoxy group of the atom includes, for example, a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group and a third butoxy group, and the halogen atom system includes For example, a fluorine atom and a chlorine atom.

位於由R3 及R4 所表示之苯基上的取代基中,具有1至6個碳原子之直鏈、支鏈或環狀烷基係包括例如甲基、乙基、正丙基、異丙基、正丁基及第三丁基。該烷基及苯基上各可存在一或多個相同或不同類之取代基。Among the substituents on the phenyl group represented by R 3 and R 4 , a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms includes, for example, a methyl group, an ethyl group, a n-propyl group or a different alkyl group. Propyl, n-butyl and tert-butyl. One or more substituents of the same or different type may be present on the alkyl group and the phenyl group.

式(4)及(5)中,R3 較佳係為甲基、乙基、正丙基、異丙基、正丁基或苯基,R4 較佳係為氫原子、甲基、乙基、正丙基、異丙基、正丁基、正戊基、正己基、正庚基或正辛基,R5 較佳係為氫原子、甲基、乙基、正丙基、異丙基或正丁基,且R6 、R7 及R8 各較佳係為氫原子、甲基、乙基、正丙基、異丙基或正丁基。In the formulae (4) and (5), R 3 is preferably methyl, ethyl, n-propyl, isopropyl, n-butyl or phenyl, and R 4 is preferably a hydrogen atom, a methyl group or a methyl group. Base, n-propyl, isopropyl, n-butyl, n-pentyl, n-hexyl, n-heptyl or n-octyl, R 5 is preferably a hydrogen atom, methyl, ethyl, n-propyl, isopropyl Or a n-butyl group, and each of R 6 , R 7 and R 8 is preferably a hydrogen atom, a methyl group, an ethyl group, a n-propyl group, an isopropyl group or an n-butyl group.

以咔唑為底質之化合物(D1)之較佳實例係包括1-[9-乙基-6-苯甲醯-9.H.-咔唑-3-基]-壬烷-1,2-壬烷-2-肟-O-苯甲酸酯、1-[9-乙基-6-苯甲醯-9.H.-咔唑-3-基]-壬烷-1,2-壬烷-2-肟-O-乙酸酯、1-[9-乙基-6-苯甲醯-9.H.-咔唑-3-基]-戊烷-1,2-戊烷-2-肟-O-乙酸酯、1-[9-乙基-6-苯甲醯-9.H.-咔唑-3-基]-辛烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(1,3,5-三甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-苯甲酸酯及1-[9-正丁基-6-(2-乙基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-苯甲酸酯。Preferred examples of the carbazole-based compound (D1) include 1-[9-ethyl-6-benzamide-9.H.-oxazol-3-yl]-decane-1,2 -decane-2-indole-O-benzoate, 1-[9-ethyl-6-benzoguanidine-9.H.-oxazol-3-yl]-nonane-1,2-anthracene Alkan-2-indole-O-acetate, 1-[9-ethyl-6-benzamide-9.H.-oxazol-3-yl]-pentane-1,2-pentane-2 -肟-O-acetate, 1-[9-ethyl-6-benzamide-9.H.-oxazol-3-yl]-octane-1-one oxime-O-acetate, 1-[9-ethyl-6-(2-methylbenzhydrazide)-9.H.-oxazol-3-yl]-ethane-1-one oxime-O-benzoate, 1- [9-Ethyl-6-(2-methylbenzhydrazide)-9.H.-carbazol-3-yl]-ethane-1-one oxime-O-acetate, 1-[9- Ethyl-6-(1,3,5-trimethylbenzhydrazide)-9.H.-oxazol-3-yl]-ethane-1-one oxime-O-benzoate and 1- [9-n-Butyl-6-(2-ethylbenzhydrazide)-9.H.-oxazol-3-yl]-ethane-1-one oxime-O-benzoate.

此等以咔唑為底質之化合物(D1)中,1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯特佳。1-[9-ethyl-6-(2-methylbenzhydrazide)-9.H.-oxazol-3-yl]-ethane in the carbazole-based compound (D1) 1- Ketone oxime-O-acetate is particularly preferred.

本發明中,該以咔唑為底質之化合物(D1)可單獨使用或二或更多種組合使用。In the present invention, the carbazole-based compound (D1) may be used singly or in combination of two or more.

本發明中,可使用除以咔唑為底質之化合物(D1)以外之感光自由基產生劑(以下稱為「另一種感光自由基產生劑」)。該另一種感光自由基產生劑係為例如以聯咪唑為底質之化合物,以安息香為底質之化合物,以乙醯苯為底質之化合物,以二苯甲酮為底質之化合物,以α-二酮為底質之化合物,以多環醌為底質之化合物,以呫噸酮為底質之化合物,以膦為底質之化合物或以三為底質之化合物,其具有至少-個由下式(15-1)、(15-2)或(15-3)所示之主要骨架。In the present invention, a photoradical generating agent other than the carbazole-based compound (D1) (hereinafter referred to as "another photoradical generating agent") can be used. The other photoactive radical generating agent is, for example, a compound based on biimidazole, a compound based on benzoin, a compound based on acetophenone, and a compound based on benzophenone. A compound of α-diketone as a substrate, a compound having a polycyclic oxime as a substrate, a compound having a xanthone as a substrate, a compound having a phosphine as a substrate or a compound A compound which is a substrate having at least one main skeleton represented by the following formula (15-1), (15-2) or (15-3).

前述以聯咪唑為底質之化合物之實例係包括2,2'-雙(2-氯苯基)-4,4',5,5'-四(4-乙氧基羰基苯基)-1,2'-聯咪唑、2,2'-雙(2-溴苯基)-4,4',5,5'-四(4乙氧基羰基苯基)-1,2'-聯咪唑、2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'聯咪唑、2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'聯咪唑、2,2'-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基1,2'-聯咪唑、2,2'-雙(2-溴苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二溴苯基)-4,4',5,5'-四苯基-1,2'聯咪唑及2,2'-雙(2,4,6-三溴苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑。Examples of the aforementioned biimidazole-based compound include 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(4-ethoxycarbonylphenyl)-1. , 2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetrakis(4ethoxycarbonylphenyl)-1,2'-biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'biimidazole, 2,2'-bis(2,4-dichlorophenyl) )-4,4',5,5'-tetraphenyl-1,2'biimidazole, 2,2'-bis(2,4,6-trichlorophenyl)-4,4',5,5 '-Tetraphenyl 1,2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2 , 2'-bis(2,4-dibromophenyl)-4,4',5,5'-tetraphenyl-1,2'biimidazole and 2,2'-bis(2,4,6- Tribromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole.

此等以聯咪唑為底質之化合物中,2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'聯咪唑、2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'聯咪唑及2,2'-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑較佳,且2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑特佳。Among these compounds which are based on biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'biimidazole, 2,2 '-Bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyl-1,2'biimidazole and 2,2'-bis(2,4,6-trichloro Phenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole is preferred, and 2,2'-bis(2-chlorophenyl)-4,4',5, 5'-Tetraphenyl-1,2'-biimidazole is preferred.

-氫供體-- Hydrogen donor -

當使用以聯咪唑為底質之化合物作為本發明感光自由基產生劑時,其較佳係與以下氫供體組合使用,以進一步改善敏感性。When a biimidazole-based compound is used as the photoradical generating agent of the present invention, it is preferably used in combination with the following hydrogen donor to further improve the sensitivity.

本發明所使用之術語「氫供體」係表示可在曝光時提供氫原子給自該以聯咪唑為底質之化合物所形成之自由基的化合物。The term "hydrogen donor" as used in the present invention means a compound which can provide a radical in which a hydrogen atom is supplied from the biimidazole-based compound upon exposure.

該氫供體較佳係為下文所定義之以硫醇為底質之化合物或以胺為底質之化合物。The hydrogen donor is preferably a thiol-based compound or an amine-based compound as defined below.

前述以硫醇為底質之化合物係為具有作為母核之苯環或雜環及1或多個,較佳1至3個,更佳1或2個直接鍵結於母核之氫硫基的化合物(以下稱為「以硫醇為底質之氫供體」)。The above-mentioned thiol-based compound is a benzene ring or a heterocyclic ring as a mother nucleus and one or more, preferably 1 to 3, more preferably 1 or 2 thiol groups directly bonded to the mother nucleus. Compound (hereinafter referred to as "thiol-based hydrogen donor").

前述以胺為底質之化合物係為具有作為母核之苯環或雜環及1或多個,較佳1至3個,更佳1或2個直接鍵結於母核之胺基的化合物(以下稱為「以胺為底質之氫供體」)。The above amine-based compound is a compound having a benzene ring or a heterocyclic ring as a mother nucleus and one or more, preferably 1 to 3, more preferably 1 or 2 amine groups directly bonded to the mother nucleus. (hereinafter referred to as "amine-based hydrogen donor").

此等氫供體可同時具有氫硫基及胺基。These hydrogen donors may have both a thiol group and an amine group.

以下詳細描述此等氫供體。These hydrogen donors are described in detail below.

以硫醇為底質之氫供體可具有至少一個苯環或雜環或兩者。當其具有二或更多個該等環時,可形成稠合環。The thiol-based hydrogen donor may have at least one benzene ring or heterocyclic ring or both. When it has two or more of such rings, a fused ring can be formed.

當該以硫醇為底質之氫供體具有二或更多個氫硫基時,只要保留至少一個游離氫硫基,則其他氫硫基中至少一個可經烷基、芳烷基或芳基所取代。此外,只要保留至少一個游離氫硫基,該以硫醇為底質之氫供體可具有其中兩硫原子係藉二價有機基團(諸如伸烷基)鍵合之結構單元或其中兩硫原子係以二硫醚形式鍵合之結構單元。When the thiol-based hydrogen donor has two or more thiol groups, at least one of the other thio groups may be alkyl, aralkyl or aryl as long as at least one free thiol group is retained. Substituted by the base. Further, as long as at least one free thiol group is retained, the thiol-based hydrogen donor may have a structural unit in which two sulfur atoms are bonded via a divalent organic group (such as an alkylene group) or two of them A structural unit in which an atom is bonded in the form of a disulfide.

此外,該以硫醇為底質之氫供體在氫硫基(等)以外之位置上可經以下基團所取代:羧基、經取代或未經取代之烷氧羰基、經取代或未經取代之苯氧基羰基或腈基。Further, the thiol-based hydrogen donor may be substituted at a position other than the thiol group (etc.) by a carboxy group, a substituted or unsubstituted alkoxycarbonyl group, substituted or unsubstituted. Substituted phenoxycarbonyl or nitrile group.

此等以硫醇為底質之氫供體之實例係包括2-氫硫基苯並噻唑、2-氫硫基苯並噁唑、2-氫硫基苯並咪唑、2,5-二氫硫基-1,3,4-噻二唑及2-氫硫基-2,5-二甲基胺基吡啶。Examples of such thiol-based hydrogen donors include 2-hydrothiobenzothiazole, 2-hydrothiobenzoxazole, 2-hydrothiobenzimidazole, 2,5-dihydrogen. Thio-1,3,4-thiadiazole and 2-hydrothio-2,5-dimethylaminopyridine.

此等以硫醇為底質之氫供體中2-氫硫基苯並噻唑及2-氫硫基苯並噁唑較佳,且2-氫硫基苯並噻唑特佳。Among these hydrogen donors having a thiol as a substrate, 2-hydrothiobenzothiazole and 2-hydrothiobenzoxazole are preferred, and 2-hydrothiobenzothiazole is particularly preferred.

以胺為底質之氫供體可具有至少一個苯環或雜環或兩者。當其具有二或更多個該等環時,可形成稠合環。The amine-based hydrogen donor may have at least one benzene ring or heterocyclic ring or both. When it has two or more of such rings, a fused ring can be formed.

該以胺為底質之氫供體之至少一個胺基可經烷基或經取代之烷基所取代。該以胺為底質之氫供體在除胺基(等)以外之位置上可經以下基團所取代:羧基、經取代或未經取代之烷氧羰基、經取代或未經取代之苯氧基羰基或腈基。At least one amine group of the amine-based hydrogen donor may be substituted with an alkyl group or a substituted alkyl group. The amine-based hydrogen donor may be substituted at a position other than the amine group (etc.) by a carboxyl group, a substituted or unsubstituted alkoxycarbonyl group, a substituted or unsubstituted benzene group. Oxycarbonyl or nitrile group.

前述以胺為底質之氫供體之實例係包括4,4'-雙(二甲基胺基)二苯甲酮、4,4'-雙(二乙基胺基)二苯甲酮、4-二乙基胺基乙醯基苯、4-二甲基胺基丙醯基苯、乙基-4-二甲基胺基苯甲酸酯、4-二甲基胺基苯甲酸異戊酯、4-二甲基胺基苯甲酸及4-二甲基胺基苄腈。Examples of the aforementioned amine-based hydrogen donor include 4,4'-bis(dimethylamino)benzophenone and 4,4'-bis(diethylamino)benzophenone. 4-Diethylaminoethenylbenzene, 4-dimethylaminopropyl phenyl benzene, ethyl-4-dimethylamino benzoate, 4-dimethylaminobenzoic acid isoprene Ester, 4-dimethylaminobenzoic acid and 4-dimethylaminobenzonitrile.

此等以胺為底質之氫供體中,4,4'-雙(二甲基胺基)二苯甲酮及4,4'-雙(二乙基胺基)二苯甲酮較佳,且4,4'-雙(二乙基胺基)二苯甲酮特佳。4,4'-雙(二甲基胺基)二苯甲酮及4,4'-雙(二乙基胺基)二苯甲酮可單獨用作光自由基產生劑,既使當雙咪唑為底質之化合物不存在時。Among these amine-based hydrogen donors, 4,4'-bis(dimethylamino)benzophenone and 4,4'-bis(diethylamino)benzophenone are preferred. And 4,4'-bis(diethylamino)benzophenone is particularly preferred. 4,4'-bis(dimethylamino)benzophenone and 4,4'-bis(diethylamino)benzophenone can be used alone as a photoradical generator, even when bi-imidazole When the compound as a substrate is not present.

本發明中,前述氫供體可單獨使用或二或更多種組合使用。較佳係使用至少一種以硫醇為底質之氫供體及至少一種以胺為底質之氫供體之組合物,因為所形成之染色層在顯影期間幾乎不會自基材脫落且具有高強度及敏感性。In the present invention, the aforementioned hydrogen donors may be used singly or in combination of two or more. It is preferred to use at least one thiol-based hydrogen donor and at least one amine-based hydrogen donor composition because the resulting dyed layer hardly detaches from the substrate during development and has High strength and sensitivity.

該以硫醇為底質之氫供體及該以胺為底質之氫供體之組合物的較佳實例係包括2-氫硫基苯並噻唑及4,4'-雙(二甲基胺基)二苯甲酮之組合物、2-氫硫基苯並噻唑及4,4'-雙(二乙基胺基)二苯甲酮之組合物、2-氫硫基苯並噁唑及4,4'-雙(二甲基胺基)二苯甲酮之組合物及2-氫硫基苯並噁唑及4,4'-雙(二乙基胺基)二苯甲酮之組合物。此等組合物中,2-氫硫基苯並噻唑及4,4'-雙(二乙基胺基)二苯甲酮之組合物及2-氫硫基苯並噁唑及4,4'雙(二乙基胺基)二苯甲酮之化合物較佳,且2-氫硫基苯並噻唑及4,4'-雙(二乙基胺基)二苯甲酮之組合物特佳。Preferred examples of the composition of the thiol-based hydrogen donor and the amine-based hydrogen donor include 2-hydrothiobenzothiazole and 4,4'-bis(dimethyl Composition of amino)benzophenone, composition of 2-hydrothiobenzothiazole and 4,4'-bis(diethylamino)benzophenone, 2-hydrothiobenzoxazole And a composition of 4,4'-bis(dimethylamino)benzophenone and 2-hydrothiobenzoxazole and 4,4'-bis(diethylamino)benzophenone combination. Compositions of 2-hydrothiobenzothiazole and 4,4'-bis(diethylamino)benzophenone and 2-hydrothiobenzoxazole and 4,4' in such compositions A compound of bis(diethylamino)benzophenone is preferred, and a combination of 2-hydrothiobenzothiazole and 4,4'-bis(diethylamino)benzophenone is particularly preferred.

該以硫醇為底質之氫供體及該以胺為底質之氫供體之組合物中,以硫醇為底質之氫供體相對於以胺為底質之氫供體之重量比較佳係為1:1至1:4,更佳1:1至1:3。In the composition of the thiol-based hydrogen donor and the amine-based hydrogen donor, the weight of the thiol-based hydrogen donor relative to the amine-based hydrogen donor The preferred system is 1:1 to 1:4, preferably 1:1 to 1:3.

前述以安息香為底質化合物之實例係包括安息香、安息香甲基醚、安息香乙基醚、安息香異丙基醚、安息香丁基醚及甲基2-安息香苯甲酸酯。Examples of the aforementioned benzoin-based compound include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin butyl ether, and methyl 2-benzoin benzoate.

前述以乙醯基苯為底質化合物之實例係包括2,2-二甲氧基乙醯苯、2,2-二乙氧基乙醯苯、2,2-二甲氧-2-苯基基乙醯苯、2-羥基-2-甲基-1-苯基丙-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙-1-酮、2-甲基-(4-甲硫基苯基-2-嗎啉-1-丙-1-酮、4-(2-羥基乙氧基)苯基-2-(羥基-2-丙基)酮、2-苄基-2-二甲基胺基-1-(4-嗎啉苯基)丁-1-酮、1-羥基環己基苯基酮及2,2-二甲氧基-1,2-二苯基乙-1-酮。Examples of the above-mentioned acetophenone-based compound include 2,2-dimethoxyacetamidine, 2,2-diethoxyethyl benzene, and 2,2-dimethoxy-2-phenyl. Ethyl benzene, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 2-methyl-(4-methylthiophenyl-2-morpholine-1-propan-1-one, 4-(2-hydroxyethoxy)phenyl-2-(hydroxy-2-propyl) Ketone, 2-benzyl-2-dimethylamino-1-(4-morpholinyl)butan-1-one, 1-hydroxycyclohexyl phenyl ketone and 2,2-dimethoxy-1 , 2-diphenylethan-1-one.

前述以二苯基甲酮為底質化合物之實例係包括4,4'-雙(二甲基胺基)二苯基甲酮及4,4'-雙(二乙基胺基)二苯基甲酮。Examples of the aforementioned diphenyl ketone as a substrate compound include 4,4'-bis(dimethylamino)diphenyl ketone and 4,4'-bis(diethylamino)diphenyl. Ketone.

前述以α-二酮為底質化合物之實例係包括二乙醯基、二苯甲醯基及甲基苯甲醯基甲酸酯。Examples of the aforementioned α-diketone as a substrate compound include diethyl fluorenyl, diphenylmethyl decyl and methyl benzhydrylcarboxylate.

前述以多環醌為底質化合物之實例係包括蒽醌、2-乙基蒽醌、2-第三丁基蒽醌及1,4-萘醌。Examples of the above-mentioned polycyclic guanidine as a substrate compound include hydrazine, 2-ethyl hydrazine, 2-tert-butyl fluorene, and 1,4-naphthoquinone.

前述以呫噸酮為底質化合物之實例係包括呫噸酮、噻噸酮及2-氯呫噸酮。Examples of the aforementioned xanthone as a substrate compound include xanthone, thioxanthone, and 2-chloroxanthone.

前述以膦為底質化合物之實例係包括氧化雙(2,4,6-三甲基苯甲醯基)苯基膦及氧化2,4,6-三甲基苯甲醯基二苯基膦。Examples of the aforementioned phosphine-based compound include bis(2,4,6-trimethylbenzylidene)phenylphosphine oxide and 2,4,6-trimethylbenzhydryldiphenylphosphine oxide. .

前述以三為底質化合物之實例係包括具有鹵甲基之三化合物,諸如2,4,6-三(三氯甲基)-s-三、2-甲基-4,6-雙(三氯甲基)-s-三、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s三、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三、2-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三、2-[2-(3,4-二甲氧基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-s-三、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三、2-(4-正丁氧基苯基)-4,6-雙(三氯甲基)-s-三、下式(16)及(17)之化合物。The aforementioned three Examples of the substrate compound include a halogenated methyl group a compound such as 2,4,6-tris(trichloromethyl)-s-three 2-methyl-4,6-bis(trichloromethyl)-s-three ,2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)-s ,2-[2-(5-methylfuran-2-yl)vinyl]-4,6-bis(trichloromethyl)-s-three 2-[2-(4-Diethylamino-2-methylphenyl)vinyl]-4,6-bis(trichloromethyl)-s-three ,2-[2-(3,4-dimethoxyphenyl)vinyl]-4,6-bis(trichloromethyl)-s-three , 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-s-three , 2-(4-ethoxystyryl)-4,6-bis(trichloromethyl)-s-three ,2-(4-n-butoxyphenyl)-4,6-bis(trichloromethyl)-s-three A compound of the following formulas (16) and (17).

本發明中,該感光自由基產生劑可單獨使用或二或更多種組合使用。In the present invention, the photoradical generating agent may be used singly or in combination of two or more.

在本發明中,前述感光自由基產生劑可視需要與至少一種敏化劑、固化促進劑及聚合物感光交聯/敏化劑一起使用。In the present invention, the photo-sensitive radical generating agent may be used together with at least one sensitizer, a curing accelerator, and a polymer photocrosslinking/sensitizer as needed.

本發明中,該感光自由基產生劑之量以100重量份數之多官能性單體(C)或多官能性單體及單官能性單體之總量計較佳係為0.01至200重量份數,更佳1至120重量份數,尤其是1至100重量份數。當該感光自由基產生劑之量低於0.01重量份數時,藉由曝光進行之固化不完全,可能難以得到具有預定像素圖案或黑色基質圖案的圖案陣列。而當該量高於200重量份數時,所形成之染色層易在顯影時脫離基材或易在未曝光部分之基材或遮光層上產生基材沾污或殘留薄膜等。In the present invention, the amount of the photoradical generating agent is preferably 0.01 to 200 parts by weight based on 100 parts by weight of the polyfunctional monomer (C) or the total of the polyfunctional monomer and the monofunctional monomer. The number is more preferably from 1 to 120 parts by weight, particularly from 1 to 100 parts by weight. When the amount of the photoradical generating agent is less than 0.01 parts by weight, the curing by exposure is incomplete, and it may be difficult to obtain a pattern array having a predetermined pixel pattern or a black matrix pattern. When the amount is more than 200 parts by weight, the formed dye layer is liable to be detached from the substrate during development or to cause substrate contamination or residual film or the like on the substrate or the light-shielding layer of the unexposed portion.

當以咔唑為底質之化合物(D1)及另一種感光自由基產生劑於本發明中組合作為感光自由基產生劑時,該另一種感光自由基產生劑之量以該以咔唑為底質之化合物(D1)及另一種感光自由基產生劑之總量計較佳係為50重量%或更低,更佳係為30重量%或更低。When the carbazole-based compound (D1) and another photoradical generating agent are combined as a photoradical generating agent in the present invention, the amount of the other photoradical generating agent is based on the carbazole The total amount of the compound (D1) and the other photoradical generating agent is preferably 50% by weight or less, more preferably 30% by weight or less.

-添加劑--additive-

本發明用於形成本發明染色層之輻射敏感組成物可視需要含有各種添加劑。The radiation-sensitive composition of the present invention for forming the dyed layer of the present invention may optionally contain various additives.

前述添加劑係包括有機酸或有機胺基化合物(不包括前述氫供體),用以進一步改善輻射敏感組成物於鹼顯影劑中之溶解度且進一步抑制在顯影之後殘留之不溶解產物的產生。The aforementioned additives include organic acids or organic amine-based compounds (excluding the aforementioned hydrogen donors) to further improve the solubility of the radiation-sensitive composition in the alkali developer and further suppress the generation of insoluble products remaining after development.

前述有機酸較佳係為分子中具有至少一個羧基之脂族羧酸或含苯基之羧酸。The above organic acid is preferably an aliphatic carboxylic acid having at least one carboxyl group in the molecule or a carboxylic acid having a phenyl group.

前述脂族羧酸之實例係包括單羧酸,諸如甲酸、乙酸、丙酸、丁酸、戊酸、特戊酸、己酸、二乙基乙酸、庚酸及辛酸;二羧酸,諸如草酸、丙二酸、琥珀酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、巴西基酸、甲基丙二酸、乙基丙二酸、二甲基丙二酸、甲基琥珀酸、四甲基琥珀酸、環己烷二甲酸、依康酸、檸康酸、順丁烯二酸、反丁烯二酸及中康酸;及三羧酸,諸如丙三甲酸、烏頭酸及樟腦酮酸。Examples of the aforementioned aliphatic carboxylic acid include monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, diethyl acetic acid, heptanoic acid, and octanoic acid; dicarboxylic acids such as oxalic acid. , malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, azelaic acid, basic acid, methylmalonic acid, ethylmalonic acid, dimethyl Malonic acid, methyl succinic acid, tetramethyl succinic acid, cyclohexane dicarboxylic acid, isaconic acid, citraconic acid, maleic acid, fumaric acid and mesaconic acid; and tricarboxylic acid Such as glycerol tricarboxylic acid, aconitic acid and camphorone acid.

前述含苯基之羧酸係為例如具有直接鍵結於苯基之羧基的化合物或具有經由碳鏈鍵結於苯基的羧酸。The phenyl group-containing carboxylic acid is, for example, a compound having a carboxyl group directly bonded to a phenyl group or a carboxylic acid having a phenyl group bonded via a carbon chain.

該含苯基之羧酸的實例係包括芳族單羧酸,諸如苯甲酸、甲苯酸、枯茗酸、苯連三酸及二甲基苯甲酸;芳族二羧酸,諸如苯二甲酸、異苯二甲酸及對苯二甲酸;具有3或更多個羧基之芳族多羧酸,諸如苯偏三酸、苯三甲酸、苯偏四酸及苯四甲酸;及苯基乙酸、氫化阿托酸、氫化肉桂酸、扁桃酸、苯基琥珀酸、阿托酸、肉桂酸、肉桂亞酸、香豆酸及繖形酸。Examples of the phenyl group-containing carboxylic acid include aromatic monocarboxylic acids such as benzoic acid, toluic acid, lauric acid, benzotricarboxylic acid, and dimethylbenzoic acid; aromatic dicarboxylic acids such as phthalic acid, Isophthalic acid and terephthalic acid; aromatic polycarboxylic acids having 3 or more carboxyl groups, such as trimellitic acid, trimellitic acid, pyromellitic acid and pyromellitic acid; and phenylacetic acid, hydrogenated Oleic acid, hydrogenated cinnamic acid, mandelic acid, phenyl succinic acid, atropic acid, cinnamic acid, cinnamic acid, coumaric acid and umbrella acid.

此等有機酸中,而就鹼溶解度、在下文所述溶劑中之溶解度、及防止未曝光部分之基材或遮光層上之沾染及薄膜殘留物的觀點而言,脂族二羧酸較佳,而丙二酸、己二酸、依康酸、檸康酸、反丁烯二酸及中康酸係為特佳之脂族羧酸。芳族二羧酸較佳,而苯二甲酸係為特佳之含苯基之羧酸。Among these organic acids, the aliphatic dicarboxylic acid is preferred from the viewpoints of alkali solubility, solubility in a solvent described below, and prevention of contamination and film residue on a substrate or a light-shielding layer of an unexposed portion. And malonic acid, adipic acid, isaconic acid, citraconic acid, fumaric acid and mesaconic acid are particularly preferred aliphatic carboxylic acids. The aromatic dicarboxylic acid is preferred, and the phthalic acid is a particularly preferred phenyl group-containing carboxylic acid.

前述有機酸可單獨使用或二或更多種組合使用。The aforementioned organic acids may be used singly or in combination of two or more.

該有機酸之量以整體輻射敏感組成物計較佳係為15重量%或更低,更佳10重量%或更低。當該有機酸之量高於15重量%時,所形成之染色層對基材之黏著性可能降低。The amount of the organic acid is preferably 15% by weight or less, more preferably 10% by weight or less, based on the total radiation-sensitive composition. When the amount of the organic acid is more than 15% by weight, the adhesion of the formed dye layer to the substrate may be lowered.

前述有機胺基化合物較佳係為分子中具有至少一個胺基之脂族胺或含苯基之胺。The aforementioned organic amine-based compound is preferably an aliphatic amine or a phenyl group-containing amine having at least one amine group in the molecule.

前述脂族胺之實例係包括單(環)烷基胺,諸如正丙基胺、異丙基胺、正丁基胺、異丁基胺、第二丁基胺、第三丁基胺、正戊基胺、正己基胺、正庚基胺、正辛基胺、正壬基胺、正癸基胺、正十一碳基胺、正十二碳基胺、環己基胺、2-甲基環己基胺、3-甲基環己基胺、4-甲基環己基胺、2-乙基環己基胺、3-乙基環己基胺及4-乙基環己基胺;二(環)烷基胺,諸如甲基.乙基胺、二乙基胺、甲基.正丙基胺、乙基.正丙基胺、二-正丙基胺、二-異丙基胺、二-正丁基胺、二-異丁基胺、二-第二丁基胺、二-第三丁基胺、二-正戊基胺、d-正己基胺、甲基環己基胺、乙基環己基胺及二環己基胺;三(環)烷基胺,諸如二甲基.乙基胺、甲基.二乙基胺、三乙基胺、二甲基.正丙基胺、二乙基.正丙基胺、甲基.二-正丙基胺、乙基.二-正丙基胺、三-正丙基胺、三-異丙基胺、三-正丁基胺、三-異丁基胺、三-第二丁基胺、三-第三丁基胺、三-正戊基胺、三-正己基胺、二甲基環己基胺、二乙基環己基胺、甲基二環己基胺、乙基二環己基胺及三環己基胺;單(環)烷醇胺,諸如2-胺基乙醇、3-胺基-1-丙醇、1-胺基-2-丙醇、4-胺基-1-丁醇、5-胺基-1-戊醇、6-胺基-1-己醇及4-胺基-1-環己醇;二(環)烷醇胺,諸如二乙醇胺、二-正丙醇胺、二-異丙醇胺、二-正丁醇胺、二-異丁醇胺、二-正戊醇胺、二-正己醇胺及二(4-環己醇)胺;三(環)烷醇胺,諸如三乙醇胺、三-正丙醇胺、三-異丙醇胺、三-正丁醇胺、三-異丁醇胺、三-正戊醇胺、三-正己醇胺及三(4-環己醇)胺;胺基(環)烷二醇,諸如3-胺基-1,2-丙烷二醇、2-胺基-1,3-丙烷二醇、4-胺基-1,2-丁烷二醇、4-胺基-1,3-丁烷二醇、4-胺基-1,2-環己烷二醇、4-胺基-1,3-環己烷二醇、3-二甲基胺基-1,2-丙烷二醇、3-二乙基胺基-1,2-丙烷二醇、2-二甲基胺基-1,3-丙烷二醇及2-二乙基胺基-1,3-丙烷二醇;含胺基之環烷甲醇,諸如1-胺基環戊烷甲醇、4-胺基環戊烷甲醇、1-胺基環己烷甲醇、4-胺基環己烷甲醇、4-二甲基胺基環戊烷甲醇、4-二乙基胺基環戊烷甲醇、4-二甲基胺基環己烷甲醇及4-二乙基胺基環己烷甲醇;及胺基羧酸,諸如β-丙胺酸、2-胺基丁酸、3-胺基丁酸、4-胺基丁酸、2-胺基異丁酸、3-胺基異丁酸、2-胺基戊酸、5-胺基戊酸、6-胺基己酸、1-胺基環丙烷甲酸、1-胺基環己烷甲酸及4-胺基環己烷甲酸。Examples of the aforementioned aliphatic amines include mono(cyclo)alkylamines such as n-propylamine, isopropylamine, n-butylamine, isobutylamine, second butylamine, tert-butylamine, positive Amylamine, n-hexylamine, n-heptylamine, n-octylamine, n-decylamine, n-decylamine, n-undecylamine, n-dodecylamine, cyclohexylamine, 2-methyl Cyclohexylamine, 3-methylcyclohexylamine, 4-methylcyclohexylamine, 2-ethylcyclohexylamine, 3-ethylcyclohexylamine, and 4-ethylcyclohexylamine; di(cyclo)alkyl An amine such as a methyl group. Ethylamine, diethylamine, methyl. N-propylamine, ethyl. N-propylamine, di-n-propylamine, di-isopropylamine, di-n-butylamine, di-isobutylamine, di-secondbutylamine, di-t-butylamine, two - n-pentylamine, d-n-hexylamine, methylcyclohexylamine, ethylcyclohexylamine and dicyclohexylamine; tri(cyclo)alkylamines such as dimethyl. Ethylamine, methyl. Diethylamine, triethylamine, dimethyl. N-propylamine, diethyl. N-propylamine, methyl. Di-n-propylamine, ethyl. Di-n-propylamine, tri-n-propylamine, tri-isopropylamine, tri-n-butylamine, tri-isobutylamine, tri-tert-butylamine, tri-tert-butylamine , tri-n-pentylamine, tri-n-hexylamine, dimethylcyclohexylamine, diethylcyclohexylamine, methyldicyclohexylamine, ethyldicyclohexylamine, and tricyclohexylamine; Alkanolamines, such as 2-aminoethanol, 3-amino-1-propanol, 1-amino-2-propanol, 4-amino-1-butanol, 5-amino-1-pentane Alcohol, 6-amino-1-hexanol and 4-amino-1-cyclohexanol; di(cyclo)alkanolamines, such as diethanolamine, di-n-propanolamine, di-isopropanolamine, two - n-butanolamine, di-isobutanolamine, di-n-pentanolamine, di-n-hexanolamine and bis(4-cyclohexanol)amine; tri(cyclo)alkanolamines, such as triethanolamine, tri- N-propanolamine, tri-isopropanolamine, tri-n-butanolamine, tri-isobutanolamine, tri-n-pentanolamine, tri-n-hexanolamine and tris(4-cyclohexanol)amine; amine Alkane (cyclo)alkane, such as 3-amino-1,2-propanediol, 2-amino-1,3-propanediol, 4-amine -1,2-butanediol, 4-amino-1,3-butanediol, 4-amino-1,2-cyclohexanediol, 4-amino-1,3-cyclohexane Alkanediol, 3-dimethylamino-1,2-propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino-1,3-propane Alcohol and 2-diethylamino-1,3-propanediol; amine-containing cycloalkane methanol, such as 1-aminocyclopentane methanol, 4-aminocyclopentane methanol, 1-amino ring Hexane methanol, 4-aminocyclohexane methanol, 4-dimethylaminocyclopentane methanol, 4-diethylaminocyclopentane methanol, 4-dimethylaminocyclohexane methanol and 4 - diethylaminocyclohexane methanol; and an aminocarboxylic acid such as β-alanine, 2-aminobutyric acid, 3-aminobutyric acid, 4-aminobutyric acid, 2-aminoisobutylene Acid, 3-aminoisobutyric acid, 2-aminopentanoic acid, 5-aminopentanoic acid, 6-aminohexanoic acid, 1-aminocyclopropanecarboxylic acid, 1-aminocyclohexanecarboxylic acid and 4- Aminocyclohexanecarboxylic acid.

前述含苯基之胺係為例如具有直接鍵結於苯基之胺基的化合物或具有經由碳鏈鍵結於苯基之胺基的化合物。The phenyl group-containing amine is, for example, a compound having an amine group directly bonded to a phenyl group or a compound having an amine group bonded to a phenyl group via a carbon chain.

該含苯基之胺的實例係包括芳族胺,諸如苯胺、2-甲基苯胺、3-甲基苯胺、4-甲基苯胺、4-乙基苯胺、4-正丙基苯胺、4-異丙基苯胺、4-正丁基苯胺、4-第三丁基苯胺、1-萘基胺、2-萘基胺、N,N-二甲基苯胺、N,N-二乙基苯胺及4-甲基-N,N-二甲基苯胺;胺基苄基醇,諸如2-胺基苄基醇、3-胺基苄基醇、4-胺基苄基醇、4-二甲基胺基苄基醇及4-二乙基胺基苄基醇;及胺基酚,諸如2-胺基酚、3-胺基酚、4-胺基酚、4-二甲基胺基酚及4-二乙基胺基酚。Examples of the phenyl group-containing amine include aromatic amines such as aniline, 2-methylaniline, 3-methylaniline, 4-methylaniline, 4-ethylaniline, 4-n-propylaniline, 4- Isopropylaniline, 4-n-butylaniline, 4-tert-butylaniline, 1-naphthylamine, 2-naphthylamine, N,N-dimethylaniline, N,N-diethylaniline and 4-methyl-N,N-dimethylaniline; aminobenzyl alcohol such as 2-aminobenzyl alcohol, 3-aminobenzyl alcohol, 4-aminobenzyl alcohol, 4-dimethyl Aminobenzyl alcohol and 4-diethylaminobenzyl alcohol; and aminophenols such as 2-aminophenol, 3-aminophenol, 4-aminophenol, 4-dimethylaminophenol and 4-Diethylaminophenol.

此等有機胺基化合物中,就於下文所述之溶劑中的溶解度及防止未曝光部分之基材或遮光層上的沾染或薄膜殘留物的觀點而言,單(環)烷醇胺及胺基(環)烷二醇較佳,而2-胺基乙醇、3-胺基-1-丙醇、5-胺基-1-戊醇、3-胺基-1,2-丙烷二醇、2-胺基-1,3-丙烷二醇及4-胺基-1,2-丁烷二醇係為特佳之脂族胺。胺基酚較佳,而2-胺基酚、3-胺基酚及4-胺基酚係為特佳含苯基之胺。Among these organic amine-based compounds, mono(cyclo)alkanolamines and amines from the viewpoints of solubility in a solvent described below and prevention of contamination or film residue on a substrate or a light-shielding layer of an unexposed portion Alkyl (cyclo)alkane is preferred, and 2-aminoethanol, 3-amino-1-propanol, 5-amino-1-pentanol, 3-amino-1,2-propanediol, 2-Amino-1,3-propanediol and 4-amino-1,2-butanediol are particularly preferred aliphatic amines. Aminophenol is preferred, and 2-aminophenol, 3-aminophenol and 4-aminophenol are particularly preferred phenylamine-containing amines.

前述有機胺基化合物可單獨使用或二或更多種組合使用。The aforementioned organic amine-based compounds may be used singly or in combination of two or more.

該有機胺基化合物之量以整體輻射敏感組成物計較佳係為15重量%或更低,更佳10重量%或更低。當有機胺基化合物之量高於15重量%時,所形成之染色層對基材之黏著性可能降低。The amount of the organic amine-based compound is preferably 15% by weight or less, more preferably 10% by weight or less, based on the total radiation-sensitive composition. When the amount of the organic amine-based compound is more than 15% by weight, the adhesion of the formed dye layer to the substrate may be lowered.

除前述有機酸及有機胺基化合物以外之添加劑係包括分散助劑,諸如藍色顏料衍生物或黃色顏料衍生物,例如銅酞花青衍生物;填充劑,諸如玻璃或氧化鋁;聚合物化合物,諸如聚乙烯基醇、聚乙二醇單烷基醚或聚(氟烷基丙烯酸酯);非離子性、陽離子性或陰離子性界面活性劑;黏著加速劑,諸如乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基三(2-甲氧基乙氧基)矽烷、N-(2-胺基乙基)-3-胺基丙基.甲基.二甲氧基矽烷、N-(2-胺基乙基)-3-胺基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、3-縮水甘油氧基丙基三甲氧基矽烷、3-縮水甘油氧基丙基.甲基.二甲氧基矽烷、2-(3,4-環氧基環己基)乙基三甲氧基矽烷、3-氯丙基.甲基.二甲氧基矽烷、3-氯丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷或3-氫硫基丙基三甲氧基矽烷;抗氧化劑,諸如2,2'-硫代雙(4-甲基-6-第三丁基酚)或2,6-二-第三丁基酚;紫外光吸收劑,諸如2-(3-第三丁基-5-甲基-2-羥基苯基)-5-氯苯並三唑或烷氧基二苯甲酮;黏合抑制劑,諸如聚丙烯酸鈉;及熱自由基產生劑,諸如1,1'-偶氮基雙(環己烷-1-腈)或2-苯基偶氮基-4-甲氧基-2,4-二甲基戊腈。The additives other than the aforementioned organic acid and organic amine-based compound include a dispersing aid such as a blue pigment derivative or a yellow pigment derivative such as a copper phthalocyanine derivative; a filler such as glass or alumina; a polymer compound , such as polyvinyl alcohol, polyethylene glycol monoalkyl ether or poly(fluoroalkyl acrylate); nonionic, cationic or anionic surfactant; adhesion accelerators, such as vinyl trimethoxy decane, Vinyl triethoxy decane, vinyl tris(2-methoxyethoxy)decane, N-(2-aminoethyl)-3-aminopropyl. methyl. Dimethoxydecane, N-(2-aminoethyl)-3-aminopropyltrimethoxydecane, 3-aminopropyltriethoxydecane, 3-glycidoxypropyltrimethoxy Baseline, 3-glycidoxypropyl. methyl. Dimethoxydecane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxydecane, 3-chloropropyl. methyl. Dimethoxydecane, 3-chloropropyltrimethoxydecane, 3-methylpropenyloxypropyltrimethoxydecane or 3-hydrothiopropyltrimethoxynonane; antioxidants such as 2,2 '-Thiobis(4-methyl-6-tert-butylphenol) or 2,6-di-t-butylphenol; UV absorbers such as 2-(3-tert-butyl-5- Methyl-2-hydroxyphenyl)-5-chlorobenzotriazole or alkoxybenzophenone; adhesion inhibitors such as sodium polyacrylate; and thermal radical generators such as 1,1'-azo Bis(cyclohexane-1-carbonitrile) or 2-phenylazo-4-methoxy-2,4-dimethylvaleronitrile.

溶劑Solvent

本發明用以形成染色層之輻射敏感組成物係包含前述組份(A)至(D)作為基本組份及視情況包含之前述添加劑,通常與溶劑混合,以製備成液體組成物。The radiation-sensitive composition for forming a dye layer of the present invention comprises the above components (A) to (D) as a basic component and optionally the aforementioned additives, usually mixed with a solvent to prepare a liquid composition.

可選擇且使用適當之溶劑,只要其分散或溶解構成輻射敏感組成物之組份(A)至(D)及添加劑,而不與此等組份反應,且具有適當之揮發性。A suitable solvent may be selected and used as long as it disperses or dissolves the components (A) to (D) and additives constituting the radiation-sensitive composition, does not react with such components, and has appropriate volatility.

溶劑之實例係包括(聚)烷二醇單烷基醚,諸如乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單-正丙基醚、乙二醇單-正丁基醚、雙乙二醇單甲基醚、雙乙二醇單乙基醚、雙乙二醇單-正丙基醚、雙乙二醇單-正丁基醚、參乙二醇單甲基醚、參乙二醇單乙基醚、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單-正丙基醚、丙二醇單-正丁基醚、雙丙二醇單甲基醚、雙丙二醇單乙基醚、雙丙二醇單-正丙基醚、雙丙二醇單-正丁基醚、三丙二醇單甲基醚及三丙二醇單乙基醚;(聚)烷二醇單烷基醚乙酸酯,諸如乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、雙乙二醇單甲基醚乙酸酯、雙乙二醇單乙基醚乙酸酯、丙二醇單甲基醚乙酸酯及丙二醇單乙基醚乙酸酯;其他醚,諸如雙乙二醇二甲基醚、雙乙二醇甲基乙基醚、雙乙二醇二乙基醚及四氫呋喃;酮,諸如甲基乙基酮、環己酮、2-庚酮及3-庚酮;乳酸烷酯,諸如乳酸甲酯及乳酸乙酯;其他酯,諸如2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯基乙酸甲酯、乙醯基乙酸乙酯及2-合氧基丁酸乙酯;芳族烴,諸如甲苯及二甲苯;及醯胺和內醯胺,諸如N,N-二甲基甲醯胺、N,N-二甲基乙醯胺及N-甲基吡咯啉酮。Examples of the solvent include (poly)alkylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl Ether, bisethylene glycol monomethyl ether, bisethylene glycol monoethyl ether, bisethylene glycol mono-n-propyl ether, bisethylene glycol mono-n-butyl ether, ginseng ethylene monomethyl Ether, propylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol single B Ethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether and tripropylene glycol monoethyl ether; (poly)alkylene glycol monoalkyl ether acetate, such as Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, bisethylene glycol monomethyl ether acetate, bisethylene glycol monoethyl ether acetate, propylene glycol monomethyl Ether acetate and propylene glycol monoethyl ether acetate; other ethers such as bisglycol dimethyl ether, bisethylene glycol methyl ethyl ether, diethylene glycol diethyl ether and tetrahydrofuran; ketone, Such as Methyl ethyl ketone, cyclohexanone, 2-heptanone and 3-heptanone; alkyl lactate such as methyl lactate and ethyl lactate; other esters such as ethyl 2-hydroxy-2-methylpropionate, Methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl glycol Ester, methyl 2-hydroxy-3-methylbutanoate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropionate, ethyl acetate , n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, butyric acid Isopropyl ester, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoxyacetate, ethyl acetoxyacetate and ethyl 2-oxybutyrate; Aromatic hydrocarbons such as toluene and xylene; and decylamine and decylamine such as N,N-dimethylformamide, N,N-dimethylacetamide and N-methylpyrrolidinone.

就溶解度、顏料分散性及塗覆性之觀點而言,此等溶劑中,以丙二醇單甲基醚、乙二醇單甲基醚乙酸酯、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、雙乙二醇二甲基醚、雙乙二醇甲基乙基醚、環己酮、2-庚酮、3-庚酮、乳酸乙酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸異丙酯、丁酸正丁酯及丙酮酸乙酯特佳。From the viewpoints of solubility, pigment dispersibility, and coatability, among these solvents, propylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl Ethyl acetate, diethylene glycol dimethyl ether, bisethylene glycol methyl ethyl ether, cyclohexanone, 2-heptanone, 3-heptanone, ethyl lactate, 3-methoxypropionic acid Ethyl ester, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, 3-methyl-3-methoxybutylpropionate, n-butyl acetate, isobutyl acetate, formic acid N-amyl ester, isoamyl acetate, n-butyl propionate, ethyl butyrate, isopropyl butyrate, n-butyl butyrate and ethyl pyruvate are particularly preferred.

前述溶劑可單獨使用或二或更多種組合使用。The foregoing solvents may be used singly or in combination of two or more.

此外,高沸點溶劑,諸如苄基乙基醚、二-正己基醚、丙酮基丙酮、異佛爾酮、己酸、辛酸、1-辛醇、1-壬醇、苄基醇、苄基乙酸酯、乙基苯甲酸酯、草酸二乙酯、順丁烯二酸二乙酯、γ-丁內酯、碳酸伸乙酯、碳酸伸丙酯或乙二醇單苯基醚乙酸酯可與前述溶劑結合使用。In addition, high boiling solvents such as benzyl ethyl ether, di-n-hexyl ether, acetone acetone, isophorone, caproic acid, octanoic acid, 1-octanol, 1-nonanol, benzyl alcohol, benzyl b Acid ester, ethyl benzoate, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethyl carbonate, propyl carbonate or ethylene glycol monophenyl ether acetate It can be used in combination with the aforementioned solvent.

此等高沸點溶劑可單獨使用或二或更多種組合使用。These high boiling solvents may be used singly or in combination of two or more.

該溶劑之量不特別限制,但就所得之輻射敏感組成物的塗覆性及安定性之觀點而言,期望其值確定該組成物除溶劑以外之所有組份的總量變成較佳5至50重量%,特佳係10至40重量%。The amount of the solvent is not particularly limited, but from the viewpoint of the coatability and stability of the resulting radiation-sensitive composition, it is desirable to determine the total amount of all components except the solvent of the composition to be preferably 5 to 50% by weight, particularly preferably 10 to 40% by weight.

彩色濾光片Color filter

本發明彩色濾光片具有自本發明用以形成染色層之輻射敏感組成物形成之染色層。The color filter of the present invention has a dyed layer formed from the radiation-sensitive composition of the present invention for forming a dyed layer.

以下描述形成本發明彩色濾光片中之染色層的方法。A method of forming a dyed layer in the color filter of the present invention is described below.

視情況於基材表面上形成遮光層以界定用以形成像素之部分,將液體輻射敏感組成物(其包含例如分散於其中之紅色顏料)施加於該基材上,預先烘烤以蒸發溶劑,而形成塗膜。此塗膜隨後經由光罩曝照輻射,以鹼顯影劑加以顯影,溶解並移除塗膜未曝光之部分,且後烘烤以形成具有預定之紅色像素圖案的像素陣列。Forming a light-shielding layer on the surface of the substrate as appropriate to define a portion for forming a pixel, applying a liquid radiation-sensitive composition (including, for example, a red pigment dispersed therein) to the substrate, pre-baking to evaporate the solvent, A coating film is formed. The coating film is then exposed to radiation via a reticle, developed with an alkali developer, dissolved and removed from the unexposed portions of the coating film, and post-baked to form a pixel array having a predetermined red pixel pattern.

之後,同法進行包含分散於其中之綠色及藍色顏料之液體輻射敏感組成物的施加、預先烘烤、曝光、顯影及後烘烤,以依序於相同基材上形成綠色像素陣列及藍色像素陣列,以得到在基材上具有紅色、綠色及藍色像素陣列之彩色濾光片。本發明形成彩色像素之順序不限於前述者。Thereafter, the same method is applied to apply, pre-baking, exposing, developing, and post-baking the liquid radiation-sensitive composition containing the green and blue pigment dispersed therein to form a green pixel array and blue on the same substrate in sequence. The color pixel array is used to obtain a color filter having an array of red, green, and blue pixels on the substrate. The order in which the present invention forms a color pixel is not limited to the foregoing.

黑色基質可同樣使用液體輻射敏感組成物(其包含例如分散於其中之黑色顏料)形成。The black matrix can likewise be formed using a liquid radiation-sensitive composition comprising, for example, a black pigment dispersed therein.

用以形成像素及/或黑色基質之基材係由玻璃、矽、聚碳酸酯、聚酯、芳族聚醯胺、聚醯胺-醯亞胺或聚醯亞胺製得。The substrate used to form the pixel and/or black matrix is made of glass, ruthenium, polycarbonate, polyester, aromatic polyamine, polyamido-imine or polyimine.

該基材可視情況進行適當之預先處理,諸如使用矽烷偶合劑之化學處理、電漿處理、離子電鍍、濺鍍、氣相反應或真空沈積。The substrate may optionally be pretreated, such as by chemical treatment with a decane coupling agent, plasma treatment, ion plating, sputtering, gas phase reaction or vacuum deposition.

將液體輻射敏感組成物施加於基材時,可採用適當之塗覆技術,諸如噴塗法、輥塗法、旋轉塗覆法(旋塗法)、狹縫擠壓塗覆、桿塗法或噴墨塗覆法。此等方法中,旋塗法及狹縫擠壓塗覆法較佳。When the liquid radiation-sensitive composition is applied to the substrate, a suitable coating technique such as spraying, roll coating, spin coating (spin coating), slit extrusion coating, bar coating or spraying may be employed. Ink coating method. Among these methods, a spin coating method and a slit extrusion coating method are preferred.

塗膜於乾燥後之厚度較佳係為0.1至10微米,更佳0.2至8.0微米,特佳係0.2至6.0微米。The thickness of the coating film after drying is preferably from 0.1 to 10 μm, more preferably from 0.2 to 8.0 μm, particularly preferably from 0.2 to 6.0 μm.

用以形成像素及/或黑色基質之輻射係選自可見光輻射、紫外線輻射、遠紫外線輻射、電子束及X-射線。此等輻射中,具有190至450奈米波長之輻射較佳。The radiation used to form the pixel and/or black matrix is selected from the group consisting of visible radiation, ultraviolet radiation, far ultraviolet radiation, electron beams, and X-rays. Among such radiations, radiation having a wavelength of 190 to 450 nm is preferred.

輻射劑量較佳為10至10,000 J/m2The radiation dose is preferably from 10 to 10,000 J/m 2 .

前述鹼顯影劑較佳為碳酸鈉、氫氧化鈉、氫氧化鉀、氫氧化四甲基銨、膽鹼、1,8-二氮雜雙環-[5.4.0]-7-十一碳烯或1,5-二氮雜雙環-[4.3.0]-5-壬烯之水溶液。The alkali developer is preferably sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, choline, 1,8-diazabicyclo-[5.4.0]-7-undecene or An aqueous solution of 1,5-diazabicyclo-[4.3.0]-5-pinene.

適量之水溶性有機溶劑,諸如甲醇或乙醇、或界面活性劑可添加於前述鹼顯影劑中。該塗膜較佳係在鹼顯影後以水潤洗。A suitable amount of a water-soluble organic solvent such as methanol or ethanol, or a surfactant may be added to the aforementioned alkali developer. The coating film is preferably washed with water after alkali development.

可採用噴淋式顯影、噴霧式顯影、浸漬(浸泡)式顯影或攪煉顯影。作為顯影條件,塗膜較佳係於常溫顯影5至300秒。Spray development, spray development, dip (immersion) development or retort development can be employed. As the developing conditions, the coating film is preferably developed at room temperature for 5 to 300 seconds.

所得之本發明彩色濾光片可極有效地使用於透射型及反射型彩色液晶顯示裝置、彩色攝影裝置、彩色感測器等。The obtained color filter of the present invention can be extremely effectively used for a transmissive and reflective type color liquid crystal display device, a color photographing device, a color sensor, and the like.

彩色液晶顯示裝置Color liquid crystal display device

本發明彩色液晶顯示裝置係包含本發明彩色濾光片。The color liquid crystal display device of the present invention comprises the color filter of the present invention.

作為本發明彩色液晶顯示裝置之實例,可如前文所述地使用本發明用以形成染色層之輻射敏感組成物於薄膜電晶體基材陣列上形成像素及/或黑色基質,製造具有優異特性之彩色液晶顯示裝置。As an example of the color liquid crystal display device of the present invention, a radiation-sensitive composition for forming a dye layer of the present invention can be used to form a pixel and/or a black matrix on a thin film transistor substrate array as described above to produce an excellent characteristic. Color liquid crystal display device.

本發明用以形成染色層之輻射敏感組成物係包含前述組份(A)至(D)作為基本組份。組成物之特佳實例(i)至(iv)係描述於下文。The radiation-sensitive composition for forming a dye layer of the present invention comprises the aforementioned components (A) to (D) as a basic component. Particularly preferred examples of compositions (i) through (iv) are described below.

(i)用於形成染色層之輻射敏感組成物,其包含自含二(甲基)丙烯醯基之二醇化合物與四羧酸二酐(8)間之酯化反應製得且具有3,000至100,000之Mw的聚酯(1)作為鹼可溶性樹脂(B)(ii)用以形成染色層之輻射敏感組成物(i),其係包含選自三羥甲基丙烷三丙烯酸酯、異戊四醇三丙烯酸酯及二異戊四醇六丙烯酸酯者作為多官能性單體(C)(iii)用以形成染色層之射敏感組成物(i)或(ii),其係包含1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯作為以咔唑為底質之化合物(D1),其係為感光自由基產生劑(D)(iv)用以形成染色層之輻射敏感組成物(i)、(ii)或(iii),其係包含有機顏料及/或碳黑作為著色劑(A)。(i) a radiation-sensitive composition for forming a dye layer comprising an esterification reaction between a diol compound containing a di(meth)acrylonitrile group and a tetracarboxylic dianhydride (8) and having 3,000 to 100,000 Mw of polyester (1) as alkali-soluble resin (B) (ii) radiation-sensitive composition (i) for forming a dye layer, which comprises a solvent selected from trimethylolpropane triacrylate, isoprene Alcohol triacrylate and diisopentaerythritol hexaacrylate as the polyfunctional monomer (C) (iii) used to form the dye-sensitive layer of the radiation-sensitive composition (i) or (ii), which comprises 1-[ 9-ethyl-6-(2-methylbenzhydrazide)-9.H.-oxazol-3-yl]-ethane-1-one oxime-O-acetate as a substrate with carbazole a compound (D1) which is a photo-sensitive radical generating agent (D) (iv) for forming a dye-sensitive layer of the radiation-sensitive composition (i), (ii) or (iii), which comprises an organic pigment and/or Carbon black as a coloring agent (A).

較佳本發明彩色濾光片(v)具有自用以形成染色層之輻射敏感組成物(i)、(ii)、(iii)或(iv)製得之像素及/或黑色基質。Preferably, the color filter (v) of the present invention has a pixel and/or a black matrix prepared from the radiation-sensitive composition (i), (ii), (iii) or (iv) used to form the dye layer.

較佳本發明彩色液晶顯示裝置(vi)包含前述彩色濾光片(v),且更佳之本發明彩色液晶顯示裝置(vii)係包含位於薄膜電晶體基材陣列上之前述彩色濾光片(v)。Preferably, the color liquid crystal display device (vi) of the present invention comprises the aforementioned color filter (v), and more preferably, the color liquid crystal display device (vii) of the present invention comprises the aforementioned color filter (on the thin film transistor substrate array) ( v).

如前文所述,本發明用以形成染色層之輻射敏感組成物即使包含高濃度顏料時,仍可在低曝光劑量下形成優異之像素圖案及黑色基質圖案,而不會在顯影時於未曝光部分之基材或遮光層上留下不溶產物及於像素圖案及黑色基質圖案邊緣產生浮膜。As described above, the radiation-sensitive composition for forming a dyed layer of the present invention can form an excellent pixel pattern and a black matrix pattern at a low exposure dose even when a high-concentration pigment is contained, without being exposed at the time of development. A portion of the substrate or the light-shielding layer leaves an insoluble product and a floating film is formed on the edge of the pixel pattern and the black matrix pattern.

此外,本發明用以形成染色層之輻射敏感組成物所製得之像素及黑色基質具有高度表面光滑性且對基材之黏著性優異。Further, the pixel and the black matrix obtained by the radiation-sensitive composition for forming a dye layer of the present invention have high surface smoothness and are excellent in adhesion to a substrate.

因此,本發明用以形成染色層之輻射敏感組成物極有利於製造各種類型之彩色濾光片,諸如電子工業領域中供彩色液晶顯示裝置使用之彩色濾光片。Accordingly, the radiation-sensitive composition of the present invention for forming a dyed layer is highly advantageous for the manufacture of various types of color filters, such as color filters for use in color liquid crystal display devices in the electronics industry.

實施例Example

以下實施例係用以進一步說明本發明,但不構成限制。本發明所使用之「份數」係表示重量份數。The following examples are intended to further illustrate the invention but are not to be construed as limiting. The "parts" used in the present invention means parts by weight.

<鹼可溶性樹脂之製造><Manufacture of alkali soluble resin> 合成例1(二酚之二縮水甘油醚化產物的合成)Synthesis Example 1 (Synthesis of diglycidyl etherified product of diphenol)

將1,070克二酚(9)及二酚(10)於重量比70:30之混合物(商標:YP-90,Yasuhara Chemical Co.,Ltd.製造)、1,520克表氯醇及1,700克二甲基亞碸送入裝置有冷卻管及攪拌器之燒瓶內,在攪動下於50℃加熱至溶解,添加290克苛性鈉以於65至90℃進行反應10小時。反應之進行及結束係藉由測量環氧基當量而確認。在環氧基當量達到目標值後,在90至100℃於減壓下餾除溶劑。之後,於50至70℃再次將反應產物溶解於甲苯中,添加蒸餾水以潤洗反應產物,進行放置分離,之後於減壓下自有機層移除溶劑,得到1,260克反應產物。所得反應產物具有260環氧基當量。1,070 g of diphenol (9) and diphenol (10) in a weight ratio of 70:30 (trademark: YP-90, manufactured by Yasuhara Chemical Co., Ltd.), 1,520 g of epichlorohydrin, and 1,700 g of dimethyl The argon feed device was placed in a flask equipped with a cooling tube and a stirrer, heated to dissolve at 50 ° C under agitation, and 290 g of caustic soda was added to carry out a reaction at 65 to 90 ° C for 10 hours. The progress and the end of the reaction were confirmed by measuring the epoxy equivalent. After the epoxy equivalent reached the target value, the solvent was distilled off under reduced pressure at 90 to 100 °C. Thereafter, the reaction product was again dissolved in toluene at 50 to 70 ° C, distilled water was added to rinse the reaction product, and the mixture was separated, and then the solvent was removed from the organic layer under reduced pressure to obtain 1,260 g of a reaction product. The resulting reaction product had 260 epoxy equivalents.

測量反應產物之1 H-NMR光譜(溶劑:CDCl3 ,基於四甲基矽烷,以下亦同)時,於以下化學位移發現波峰:δ(ppm)6.8至7.3(自鍵結於環己烷骨架之苯環所衍生;8H),3.3及3.9至4.2(自環氧基衍生;6H)及0.7至0.9(自鍵結於環己基骨架之異丙基中的兩甲基衍生)。When the 1 H-NMR spectrum of the reaction product (solvent: CDCl 3 , based on tetramethylnonane, the same applies hereinafter), the peak was found at the following chemical shift: δ (ppm) 6.8 to 7.3 (self-bonded to the cyclohexane skeleton) Derivatized by a benzene ring; 8H), 3.3 and 3.9 to 4.2 (derived from an epoxy group; 6H) and 0.7 to 0.9 (derived from a bis group bonded to an isopropyl group of a cyclohexyl skeleton).

測量紅外線吸收光譜(IR)時,於以下發現吸收:1,241 cm-1 (自芳族醚結構及環氧基衍生)及1,036及828 cm-1 (自芳族醚結構衍生)。When the infrared absorption spectrum (IR) was measured, the absorption was found to be 1,241 cm -1 (derived from an aromatic ether structure and an epoxy group) and 1,036 and 828 cm -1 (derived from an aromatic ether structure).

由前述結果確認此反應產物係為前式(11)所示之二縮水甘油醚化產物及前式(12)所示之二縮水甘油醚化產物的混合物。From the foregoing results, it was confirmed that the reaction product was a mixture of the diglycidyl etherification product represented by the above formula (11) and the diglycidyl etherification product represented by the above formula (12).

合成例2(含二甲基丙烯醯基之二醇化合物的合成)Synthesis Example 2 (Synthesis of a diol compound containing a dimethyl methacrylate group)

將1,000克合成例1所製得之二縮水甘油醚化產物的混合物、1,350克甲基丙烯酸及1.0克氫醌單甲基醚送入裝置有冷卻管及攪拌器之燒瓶內,在攪動下於60℃加熱至溶解,添加8克溴化四乙基銨以於70至90℃在攪拌下進行反應,直至反應產物之酸值及環氧基當量各變成8毫克KOH/克及17,000。15小時後,以酸值及環氧基當量確認反應結束,之後藉冷卻至室溫得到1,300克反應產物。所得之反應產物具有8毫克KOH/克之酸值,165毫克KOH/克之羥基值及17,000之環氧基當量。1,000 g of a mixture of the diglycidyl etherified product obtained in Synthesis Example 1, 1,350 g of methacrylic acid and 1.0 g of hydroquinone monomethyl ether were fed into a flask equipped with a cooling tube and a stirrer under agitation After heating to dissolve at 60 ° C, 8 g of tetraethylammonium bromide was added to carry out the reaction at 70 to 90 ° C with stirring until the acid value and epoxy equivalent of the reaction product became 8 mg KOH / gram and 17,000 each. Thereafter, the end of the reaction was confirmed by the acid value and the epoxy group equivalent, and then cooled to room temperature to obtain 1,300 g of a reaction product. The resulting reaction product had an acid value of 8 mg KOH/g, a hydroxyl value of 165 mg KOH/g and an epoxy equivalent of 17,000.

測量反應產物之1 H-NMR光譜時,於以下化學位移發現波峰:δ(ppm)5.6及6.1(自甲基丙烯酸之雙鍵衍生;4H),及3.9至4.4(二縮水甘油醚化產物的混合物位於3.3及3.9至4.2之波峰因為環氧基之開環而位移;10H)。When the 1 H-NMR spectrum of the reaction product was measured, peaks were found at the following chemical shifts: δ (ppm) 5.6 and 6.1 (derived from a double bond of methacrylic acid; 4H), and 3.9 to 4.4 (diglycidyl etherified product) The peaks of the mixture at 3.3 and 3.9 to 4.2 are displaced by the ring opening of the epoxy group; 10H).

測量紅外線吸收光譜(IR)時,於以下發現吸收:1,720 cm-1 (自脂族酯結構衍生)。When the infrared absorption spectrum (IR) was measured, the absorption was found below: 1,720 cm -1 (derived from an aliphatic ester structure).

由前述結果確認此反應產物係為下式(6-1)所示之含二甲基丙烯醯基之二醇化合物及下式(7-1)所示之含二甲基丙烯醯基之二醇化合物的混合物。From the above results, it was confirmed that the reaction product was a dimethyl propylene group-containing diol compound represented by the following formula (6-1) and a dimethyl methacrylate group represented by the following formula (7-1). a mixture of alcohol compounds.

合成例3(含二丙烯醯基之二醇化合物的合成)Synthesis Example 3 (Synthesis of a diol compound containing a dipropylene fluorenyl group)

1,200克下式(6-2)所示含二丙烯醯基之二醇化合物及下式(7-2)所示含二丙烯醯基之二醇化合物的混合物係依如同合成例2之方式製得,不同處係使用293克丙烯酸取代甲基丙烯酸。所得混合物具有6毫克KOH/克之酸值,171毫克KOH/克之羥基值及16,500之環氧基當量。1,200 g of a mixture of a diol compound containing a dipropylene fluorenyl group represented by the following formula (6-2) and a diol compound containing a dipropylene fluorenyl group represented by the following formula (7-2) is produced in the same manner as in Synthesis Example 2. In this case, 293 g of acrylic acid was used instead of methacrylic acid. The resulting mixture had an acid value of 6 mg KOH/g, a hydroxyl value of 171 mg KOH/g and an epoxy equivalent of 16,500.

合成例4(聚酯(1)之製造)Synthesis Example 4 (Manufacture of Polyester (1))

670克合成例2製得之含二甲基丙烯醯基二醇化合物混合物及1,300克甲基異丁基酮送入裝置有冷卻管及攪拌器之燒瓶內,於60℃攪拌下加熱至溶解,添加220克前式(8-1)所示之苯四甲酸酐(Daicel Chemical Industries,Ltd.製造),以於80℃在攪拌下進行反應,直至所得反應產物之平均酸值變成67.9毫克KOH/克且酸值之變化幅度變成2毫克KOH/克或更小。反應結束後,添加蒸餾水於反應溶液以進行潤洗,進行放置分離,之後於50至70℃在減壓下自有機層餾除溶劑,得到860克樹脂。所得樹脂具有18,000之Mw及61.2毫克KOH/克之酸值。670 g of the mixture containing the dimethyl propylene decyl diol compound prepared in Synthesis Example 2 and 1,300 g of methyl isobutyl ketone were fed into a flask equipped with a cooling tube and a stirrer, and heated to dissolve at 60 ° C with stirring. 220 g of benzenetetracarboxylic anhydride (manufactured by Daicel Chemical Industries, Ltd.) represented by the above formula (8-1) was added, and the reaction was carried out under stirring at 80 ° C until the average acid value of the obtained reaction product became 67.9 mg KOH / The change in acid value is changed to 2 mg KOH/g or less. After the completion of the reaction, distilled water was added to the reaction solution to carry out rinsing, and the mixture was allowed to stand for separation. Then, the solvent was distilled off from the organic layer under reduced pressure at 50 to 70 ° C to obtain 860 g of a resin. The obtained resin had an acid value of 18,000 Mw and 61.2 mg KOH/g.

測量此樹脂之1 H-NMR光譜時,於以下化學位移發現波峰:δ(ppm)6.9至7.6(自鍵結於環己烷骨架之苯環及苯四甲酸之苯環所衍生),5.8及6.2(自甲基丙烯酸之雙鍵衍生),1.1至2.2(自環己烷骨架衍生)及0.7至0.9(自鍵結於環己基骨架之2,2-伸丙基中的兩甲基衍生:6H)。When the 1 H-NMR spectrum of the resin was measured, the peak was found at the following chemical shift: δ (ppm) 6.9 to 7.6 (derived from a benzene ring bonded to a benzene ring of a cyclohexane skeleton and a benzenetetracarboxylic acid), 5.8 and 6.2 (derived from the double bond of methacrylic acid), 1.1 to 2.2 (derived from the cyclohexane skeleton) and 0.7 to 0.9 (derived from the dimethyl group bonded to the 2,2-propanyl group of the cyclohexyl skeleton: 6H).

測量紅外線吸收光譜(IR)時,於以下發現吸收:1,735 cm-1 (自脂族酯結構衍生)及1,735 cm-1 ,1,241 cm-1 及1,102 cm-1 (自芳族酯結構衍生)。When the infrared absorption spectrum (IR) was measured, the absorption was found to be 1,735 cm -1 (derived from an aliphatic ester structure) and 1,735 cm -1 , 1,241 cm -1 and 1,102 cm -1 (derived from an aromatic ester structure).

由前述結果確認此樹脂係為下式(1-1)所示之聚酯(1)。From the above results, it was confirmed that the resin was the polyester (1) represented by the following formula (1-1).

此聚酯(1)稱為鹼可溶性樹脂(B-1)。This polyester (1) is referred to as an alkali-soluble resin (B-1).

[式(1-1)中,X係如前式(1)所定義。] [In the formula (1-1), the X system is as defined in the above formula (1). ]

合成例5(聚酯(1)之製造)Synthesis Example 5 (manufacture of polyester (1))

840克下式(1-2)所示之聚酯(1)係依合成例4之方式製得,不同處係使用合成例3所製得之含二丙烯醯基之二醇化合物的混合物取代合成例2所製得之含甲基丙烯醯基之二醇化合物的混合物。所得聚酯(1)具有15,000之Mw及60.9毫克KOH/克之酸值。840 g of the polyester (1) represented by the following formula (1-2) was obtained in the same manner as in Synthesis Example 4, except that a mixture of a dipropylene-based diol compound obtained in Synthesis Example 3 was used. A mixture of the methacryl oxime group-containing diol compound obtained in Synthesis Example 2. The obtained polyester (1) had an Mw of 15,000 and an acid value of 60.9 mgKOH/g.

此聚酯(1)稱為鹼可溶性樹脂(B-2)。This polyester (1) is referred to as an alkali-soluble resin (B-2).

[式(1-2)中,X係如前式(1)所定義。] [In the formula (1-2), the X system is as defined in the above formula (1). ]

合成例6(羧基經封端之聚酯(1)的製造)Synthesis Example 6 (Manufacture of carboxyl terminated polyester (1))

275克合成例4所製得之聚酯(1)及275克丙二醇單甲基醚乙酸酯置入裝置有冷卻管及攪拌器之燒瓶中,於60℃在攪拌下加熱至溶解,添加1.5克溴化四乙基銨及30克苯基縮水甘油醚(Epiol P,NOF Corporation)(作為羧基封端劑)以於80至90℃在攪拌下進行反應,直至酸值變化幅度變成2毫克KOH/克或更小。反應結束後,將反應產物冷卻至室溫以得到300克樹脂。所得之樹脂具有21,000之Mw及52.1毫克KOH/克之酸值。275 g of the polyester (1) obtained in Synthesis Example 4 and 275 g of propylene glycol monomethyl ether acetate were placed in a flask equipped with a cooling tube and a stirrer, and heated to dissolve at 60 ° C with stirring, and 1.5 was added. Tetraethylammonium bromide and 30 g of phenyl glycidyl ether (Epiol P, NOF Corporation) (as a carboxyl endcapping agent) were reacted at 80 to 90 ° C with stirring until the acid value changed to 2 mg KOH. / gram or less. After the reaction was completed, the reaction product was cooled to room temperature to obtain 300 g of a resin. The resulting resin had an acid value of 21,000 Mw and 52.1 mg KOH/g.

測量此樹脂之1 H-NMR光譜時,除了合成例4所製得之聚酯(1)的波峰外,亦於以下化學位移發現波峰:δ(ppm)6.9至7.6(自苯基縮水甘油醚之苯環衍生)。When the 1 H-NMR spectrum of this resin was measured, in addition to the peak of the polyester (1) obtained in Synthesis Example 4, the peak was found at the following chemical shift: δ (ppm) 6.9 to 7.6 (from phenyl glycidyl ether) Benzene ring derived).

測量紅外線吸收光譜(IR)時,於以下發現吸收:1,047 cm-1 (自芳族酯結構衍生)。此吸收因為羧基之封端而較合成例4所製得之聚酯(1)強。When the infrared absorption spectrum (IR) was measured, the absorption was found below: 1,047 cm -1 (derived from an aromatic ester structure). This absorption was stronger than the polyester (1) obtained in Synthesis Example 4 because of the blocking of the carboxyl group.

由前述結果確認此樹脂係為聚酯(1),其結構係前式(1-1)中羧基的78%氫原子被封端殘基(-CH2 CH(OH)CH2 OC6 H5 )所取代。From the foregoing results, it was confirmed that the resin was a polyester (1) having a structure in which 78% of hydrogen atoms of a carboxyl group in the above formula (1-1) were blocked (-CH 2 CH(OH)CH 2 OC 6 H 5 ) replaced.

此聚酯(1)稱為鹼可溶性樹脂(B-3)。This polyester (1) is referred to as an alkali-soluble resin (B-3).

合成例7(羧基經封端之聚酯(1)的製造)Synthesis Example 7 (Production of Carboxyl terminated polyester (1))

340克樹脂係依如同合成例6之方式製得,不同處係使用300克合成例5製得之聚酯(1)取代合成例4所製得之聚酯(1)。所得之樹脂所得之樹脂具有25,000之Mw及50.0毫克KOH/克之酸值。340 g of the resin was obtained in the same manner as in Synthesis Example 6, except that 300 g of the polyester (1) obtained in Synthesis Example 5 was used instead of the polyester (1) obtained in Synthesis Example 4. The resin obtained from the obtained resin had an acid value of 25,000 Mw and 50.0 mg KOH/g.

此聚酯(1)稱為鹼可溶性樹脂(B-4)。This polyester (1) is referred to as an alkali-soluble resin (B-4).

合成例8(聚酯(1)之製造)Synthesis Example 8 (manufacture of polyester (1))

670克合成例2製得之含二甲基丙烯醯基二醇化合物混合物及1,470克甲基異丁基酮送入裝置有冷卻管及攪拌器之燒瓶內,於60℃攪拌下加熱至溶解,添加313克前式(8-2)所示之二苯基醚四甲酸酐(Manac Co.,Ltd.製造),以於80℃在攪拌下進行反應,直至酸值變成53.3毫克KOH/克或更低。反應結束後,添加蒸餾水於反應溶液以進行潤洗,進行放置分離,之後於50至70℃在減壓下自有機層餾除溶劑,得到800克樹脂。所得樹脂具有18,000之Mw及61.2毫克KOH/克之酸值。670 g of the mixture containing the dimethyl propylene decyl diol compound prepared in Synthesis Example 2 and 1,470 g of methyl isobutyl ketone were fed into a flask equipped with a cooling tube and a stirrer, and heated to dissolve at 60 ° C with stirring. 313 g of diphenyl ether tetracarboxylic anhydride (manac Co., Ltd.) represented by the above formula (8-2) was added, and the reaction was carried out under stirring at 80 ° C until the acid value became 53.3 mg KOH / g or Lower. After the completion of the reaction, distilled water was added to the reaction solution to carry out rinsing, and the mixture was allowed to stand for separation. Thereafter, the solvent was distilled off from the organic layer under reduced pressure at 50 to 70 ° C to obtain 800 g of a resin. The obtained resin had an acid value of 18,000 Mw and 61.2 mg KOH/g.

此聚酯(1)稱為鹼可溶性樹脂(B-5)。This polyester (1) is referred to as an alkali-soluble resin (B-5).

[式(1-3)中,X係如前式(1)所定義,而Y1 係為自二苯基醚四甲酸移除4個羧基所得之殘基。] [In the formula (1-3), X is as defined in the above formula (1), and Y 1 is a residue obtained by removing four carboxyl groups from diphenyl ether tetracarboxylic acid. ]

合成例9(聚酯(1)之製造)Synthesis Example 9 (manufacture of polyester (1))

670克合成例2製得之含二甲基丙烯醯基二醇化合物混合物及1,660克甲基異丁基酮送入裝置有冷卻管及攪拌器之燒瓶內,於60℃攪拌下加熱至溶解,添加434克前式(8-3)所示之乙二醇雙(苯偏三酸酯)二酐(Nippon Rika Co.,Ltd.製造),以於80℃在攪拌下進行反應,直至酸值變成46.2毫克KOH/克。反應結束後,添加蒸餾水於反應溶液以進行潤洗,進行放置分離,之後於50至70℃在減壓下自有機層餾除溶劑,得到900克樹脂。所得樹脂具有13,000之Mw,係為下式(1-4)所示之聚酯(1)。670 g of the mixture containing the dimethyl propylene decyl diol compound prepared in Synthesis Example 2 and 1,660 g of methyl isobutyl ketone were fed into a flask equipped with a cooling tube and a stirrer, and heated to dissolve at 60 ° C with stirring. 434 g of ethylene glycol bis(trimellitic acid ester) dianhydride (manufactured by Nippon Rika Co., Ltd.) represented by the above formula (8-3) was added, and the reaction was carried out at 80 ° C with stirring until the acid value It became 46.2 mg KOH/g. After the completion of the reaction, distilled water was added to the reaction solution for rinsing, and the mixture was allowed to stand for separation. Then, the solvent was distilled off from the organic layer under reduced pressure at 50 to 70 ° C to obtain 900 g of a resin. The obtained resin had a Mw of 13,000 and was a polyester (1) represented by the following formula (1-4).

此聚酯(1)稱為鹼可溶性樹脂(B-6)。This polyester (1) is referred to as an alkali-soluble resin (B-6).

[式(1-4)中,X係如前式(1)所定義,而Y2 係為自乙二醇雙(苯偏三酸酯)移除4個羧基所得之殘基。] [In the formula (1-4), X is as defined in the above formula (1), and Y 2 is a residue obtained by removing four carboxyl groups from ethylene glycol bis(trimellitic acid ester). ]

合成例10(對照鹼可溶性樹脂之製造)Synthesis Example 10 (Production of Control Alkali Soluble Resin)

4份2,2'-偶氮基雙(2,4-二甲基戊腈)及200份丙二醇單甲基醚乙酸酯送入裝置有冷卻管及攪拌器之燒瓶內,於燒瓶內送入12份甲基丙烯酸、18份苯乙烯、24份甲基丙烯酸苄酯、30份N-苯基順丁烯二醯亞胺、16份甲基丙烯酸2-羥基乙酯及6.5份α-甲基苯乙烯二聚物(作為鏈轉移劑),燒瓶內部以氮換氣,溫和攪拌混合物,所得之反應溶液於80℃加熱,保持該溫度進行聚合3小時。聚合結束後,反應溶液於100℃加熱,添加0.5份2,2'-偶氮基雙(2,4-二甲基戊腈),再進行聚合1小時,得到鹼可溶性樹脂之溶液(固體含量33.2重量%)。4 parts of 2,2'-azobis(2,4-dimethylvaleronitrile) and 200 parts of propylene glycol monomethyl ether acetate were fed into a flask equipped with a cooling tube and a stirrer, and sent to the flask. 12 parts of methacrylic acid, 18 parts of styrene, 24 parts of benzyl methacrylate, 30 parts of N-phenyl maleimide, 16 parts of 2-hydroxyethyl methacrylate and 6.5 parts of α-A The styrene dimer (as a chain transfer agent) was internally purged with nitrogen, and the mixture was gently stirred, and the resulting reaction solution was heated at 80 ° C, and the temperature was maintained for 3 hours. After the completion of the polymerization, the reaction solution was heated at 100 ° C, 0.5 part of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, and polymerization was further carried out for 1 hour to obtain a solution of an alkali-soluble resin (solid content). 33.2% by weight).

所得之鹼可溶性樹脂具有8,500之MW及4,500之Mn。The resulting alkali-soluble resin had a MW of 8,500 and an Mn of 4,500.

該鹼可溶性樹脂稱為鹼可溶性樹脂(B-7)。This alkali-soluble resin is called an alkali-soluble resin (B-7).

合成例11(對照鹼可溶性樹脂之製造)Synthesis Example 11 (Production of Control Alkali Soluble Resin)

2份2,2'-偶氮基雙(2,4-二甲基戊腈)及200份丙二醇單甲基醚乙酸酯送入裝置有冷卻管及攪拌器之燒瓶內,於燒瓶內送入10份甲基丙烯酸、15份苯乙烯、30份甲基丙烯酸苄酯、25份N-苯基順丁烯二醯亞胺、20份ω-羧基聚己內酯單(甲基)丙烯酸酯及2份α-甲基苯乙烯二聚物(作為鏈轉移劑),燒瓶內部以氮換氣,溫和攪拌混合物,所得之反應溶液於80℃加熱,保持該溫度進行聚合3小時。聚合結束後,反應溶液於100℃加熱,添加0.5份2,2'-偶氮基雙(2,4-二甲基戊腈),再進行聚合1小時,得到鹼可溶性樹脂之溶液(固體含量33.1重量%)。2 parts of 2,2'-azobis(2,4-dimethylvaleronitrile) and 200 parts of propylene glycol monomethyl ether acetate were fed into a flask equipped with a cooling tube and a stirrer, and sent in a flask. 10 parts of methacrylic acid, 15 parts of styrene, 30 parts of benzyl methacrylate, 25 parts of N-phenyl maleimide, 20 parts of ω-carboxypolycaprolactone mono(meth)acrylate And 2 parts of α-methylstyrene dimer (as a chain transfer agent), the inside of the flask was purged with nitrogen, and the mixture was gently stirred, and the resulting reaction solution was heated at 80 ° C, and the temperature was maintained for 3 hours. After the completion of the polymerization, the reaction solution was heated at 100 ° C, 0.5 part of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, and polymerization was further carried out for 1 hour to obtain a solution of an alkali-soluble resin (solid content). 33.1% by weight).

所得之鹼可溶性樹脂具有20,000之Mw及9,000之Mn。The resulting alkali-soluble resin had a Mw of 20,000 and an Mn of 9,000.

該鹼可溶性樹脂稱為鹼可溶性樹脂(B-8)。This alkali-soluble resin is called an alkali-soluble resin (B-8).

合成例12(對照鹼可溶性樹脂之製造)Synthesis Example 12 (Production of Control Alkali Soluble Resin)

4份2,2'-偶氮基雙(2,4-二甲基戊腈)及200份丙二醇單甲基醚乙酸酯送入裝置有冷卻管及攪拌器之燒瓶內,於燒瓶內送入10份甲基丙烯酸、15份苯乙烯、40份甲基丙烯酸苄酯、25份N-苯基順丁烯二醯亞胺、10份甲基丙烯酸2-羥基乙酯及6.5份α-甲基苯乙烯二聚物(作為鏈轉移劑),燒瓶內部以氮換氣,溫和攪拌混合物,所得之反應溶液於80℃加熱,保持該溫度進行聚合3小時。聚合結束後,反應溶液於100℃加熱,添加0.5份2,2'-偶氮基雙(2,4-二甲基戊腈),再進行聚合1小時,得到鹼可溶性樹脂之溶液(固體含量33.3重量%)。4 parts of 2,2'-azobis(2,4-dimethylvaleronitrile) and 200 parts of propylene glycol monomethyl ether acetate were fed into a flask equipped with a cooling tube and a stirrer, and sent to the flask. 10 parts of methacrylic acid, 15 parts of styrene, 40 parts of benzyl methacrylate, 25 parts of N-phenyl maleimide, 10 parts of 2-hydroxyethyl methacrylate and 6.5 parts of α-A The styrene dimer (as a chain transfer agent) was internally purged with nitrogen, and the mixture was gently stirred, and the resulting reaction solution was heated at 80 ° C, and the temperature was maintained for 3 hours. After the completion of the polymerization, the reaction solution was heated at 100 ° C, 0.5 part of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, and polymerization was further carried out for 1 hour to obtain a solution of an alkali-soluble resin (solid content). 33.3% by weight).

所得之鹼可溶性樹脂具有7,800之Mw及4,500之Mn。The resulting alkali-soluble resin had a Mw of 7,800 and an Mn of 4,500.

該鹼可溶性樹脂稱為鹼可溶性樹脂(B-9)。This alkali-soluble resin is called an alkali-soluble resin (B-9).

實施例1Example 1

<液體組成物之製備>8份C.I.顏料紅254及C.I.顏料紅177於重量比80:20之混合物(作為著色劑(A))、4份(固體含量)EFKA-46(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 8 parts of CI Pigment Red 254 and CI Pigment Red 177 in a weight ratio of 80:20 (as coloring agent (A)), 4 parts (solid content) of EFKA-46 (as a dispersing agent), and 75 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed by a bead mill to prepare a pigment dispersion.

87份所得之顏料分散物、8份鹼可溶性樹脂(B-1)(作為鹼可溶性樹脂)、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(商標:CGI-242,Chiba Specialty Chemicals Holding Inc.,以下亦同)(作為感光自由基產生劑(D))及70份乙酸甲氧基丁酯及96份乙基-3-乙氧基丙酸酯(作為溶劑)混合以製備液體組成物(R1)。87 parts of the obtained pigment dispersion, 8 parts of the alkali-soluble resin (B-1) (as an alkali-soluble resin), 2 parts of diisopentyltetraol hexaacrylate, and 4 parts of isopenic alcohol tetraacrylate (as polyfunctionality) Monomer (C)), 3 parts of 1-[9-ethyl-6-(2-methylbenzhydrazide)-9.H.-oxazol-3-yl]-ethane-1-one oxime- O-acetate (trademark: CGI-242, Chiba Specialty Chemicals Holding Inc., hereinafter the same) (as photo-sensitive radical generator (D)) and 70 parts of methoxybutyl acetate and 96 parts of ethyl-3 Ethoxypropionate (as a solvent) is mixed to prepare a liquid composition (R1).

<染色層之形成>液體組成物(R1)以旋塗機施加於鈉鈣玻璃表面上(此表面具有二氧化矽(SiO2 )薄膜以防止表面上之鈉離子溶離),於90℃熱板上預烘烤2分鐘,形成1.2微米厚之塗膜。<Formation of Dye Layer> The liquid composition (R1) was applied to the surface of soda lime glass by a spin coater (this surface has a film of cerium oxide (SiO 2 ) to prevent dissolution of sodium ions on the surface), and a hot plate at 90 ° C The film was prebaked for 2 minutes to form a 1.2 μm thick coating film.

之後,基材冷卻至室溫,塗膜以高壓汞燈經由光罩(狹縫寬度30微米)曝照具有365奈米、405奈米及436奈米波長之紫外線輻射。此時曝光量係為100 J/m2 。基材隨之於23℃浸入0.04重量%氫氧化鉀水溶液中45秒以顯影,以超純水潤洗並風乾。塗膜隨之於230℃清淨爐中後烘烤30分鐘,以於基材上形成紅色條狀像素圖案。Thereafter, the substrate was cooled to room temperature, and the coating film was exposed to ultraviolet radiation having a wavelength of 365 nm, 405 nm, and 436 nm through a reticle (slit width: 30 μm) with a high pressure mercury lamp. The exposure amount at this time was 100 J/m 2 . The substrate was then immersed in a 0.04% by weight aqueous potassium hydroxide solution at 23 ° C for 45 seconds to develop, rinsed with ultrapure water and air dried. The coating film was then baked in a 230 ° C clean oven for 30 minutes to form a red strip-shaped pixel pattern on the substrate.

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表1-1。The foregoing results are shown in Table 1-1.

實施例2至5Examples 2 to 5

<液體組成物之製備及染色層之形成>液體組成物(R2)至(R5)係依如同實施例1之方式製備,不同處係如表1-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (R2) to (R5) were prepared in the same manner as in Example 1, except that the dispersant was changed as shown in Table 1-1.

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R2)至(R5)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (R2) to (R5) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬8或6微米之圖案。When the cross section of each pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 8 or 6 μm was formed.

前述結果顯示於表1-1。The foregoing results are shown in Table 1-1.

實施例6Example 6

<液體組成物之製備及染色層之形成>液體組成物(R6)係依如同實施例1之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-2)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (R6) was prepared in the same manner as in Example 1, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-2).

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R6)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (R6) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表1-1。The foregoing results are shown in Table 1-1.

實施例7至10Examples 7 to 10

<液體組成物之製備及染色層之形成>液體組成物(R7)至(R10)係依如同實施例6之方式製備,不同處係如表1-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (R7) to (R10) were prepared in the same manner as in Example 6, except that the dispersant was changed as shown in Table 1-1.

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R7)至(R10)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (R1) to (R10) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米、8微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm, 8 μm or 6 μm was formed.

前述結果顯示於表1-1。The foregoing results are shown in Table 1-1.

實施例11Example 11

<液體組成物之製備及染色層之形成>液體組成物(R11)係依如同實施例1之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-3)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (R11) was prepared in the same manner as in Example 1, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-3).

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R11)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (R11) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表1-2。The foregoing results are shown in Table 1-2.

實施例12至15Examples 12 to 15

<液體組成物之製備及染色層之形成>液體組成物(R12)至(R15)係依如同實施例11之方式製備,不同處係如表1-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (R12) to (R15) were prepared in the same manner as in Example 11 except that the dispersant was changed as shown in Table 1-2.

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R12)至(R15)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (R12) to (R15) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬6微米或8微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm or 8 μm was formed.

前述結果顯示於表1-2。The foregoing results are shown in Table 1-2.

實施例16Example 16

<液體組成物之製備及染色層之形成>液體組成物(R16)係依如同實施例1之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-4)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (R16) was prepared in the same manner as in Example 1, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-4).

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R16)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (R16) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表1-2。The foregoing results are shown in Table 1-2.

實施例17至20Examples 17 to 20

<液體組成物之製備及染色層之形成>液體組成物(R17)至(R20)係依如同實施例16之方式製備,不同處係如表1-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (R17) to (R20) were prepared in the same manner as in Example 16 except that the dispersing agent was changed as shown in Table 1-2.

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R17)至(R20)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (R17) to (R20) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米、8微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm, 8 μm or 6 μm was formed.

前述結果顯示於表1-2。The foregoing results are shown in Table 1-2.

實施例21Example 21

<液體組成物之製備及染色層之形成>液體組成物(R21)係依如同實施例1之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-5)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (R21) was prepared in the same manner as in Example 1, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-5).

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R21)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (R1) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬8微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 8 μm was formed.

前述結果顯示於表1-3。The foregoing results are shown in Tables 1-3.

實施例22至25Examples 22 to 25

<液體組成物之製備及染色層之形成>液體組成物(R22)至(R25)係依如同實施例21之方式製備,不同處係如表1-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (R22) to (R25) were prepared in the same manner as in Example 21 except that the dispersing agent was changed as shown in Table 1-3.

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R22)至(R25)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (R22) to (R25) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米、8微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm, 8 μm or 6 μm was formed.

前述結果顯示於表1-3。The foregoing results are shown in Tables 1-3.

實施例26Example 26

<液體組成物之製備及染色層之形成>液體組成物(R26)係依如同實施例1之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-6)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (R26) was prepared in the same manner as in Example 1, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-6).

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R26)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (R26) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表1-3。The foregoing results are shown in Tables 1-3.

實施例27至30Examples 27 to 30

<液體組成物之製備及染色層之形成>液體組成物(R27)至(R30)係依如同實施例26之方式製備,不同處係如表1-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (R27) to (R30) were prepared in the same manner as in Example 26 except that the dispersing agent was changed as shown in Table 1-3.

之後,依實施例1方式於基材上形成紅色條狀像素圖案,不同處係使用液體組成物(R27)至(R30)取代液體組成物(R1)。Thereafter, a red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (R27) to (R30) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米、8微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm, 8 μm or 6 μm was formed.

前述結果顯示於表1-3。The foregoing results are shown in Tables 1-3.

實施例31Example 31

<液體組成物之製備>11份C.I.顏料綠36及C.I.顏料黃150於重量比60:40之混合物(作為著色劑(A))、4份(固體含量)EFKA-46(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 11 parts of a mixture of CI Pigment Green 36 and CI Pigment Yellow 150 in a weight ratio of 60:40 (as a coloring agent (A)), 4 parts (solid content) EFKA-46 (as a dispersing agent), and 75 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed by a bead mill to prepare a pigment dispersion.

90份所得之顏料分散物、8份鹼可溶性樹脂(B-1)(作為鹼可溶性樹脂(B))、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(作為感光自由基產生劑(D))及70份乙酸甲氧基丁酯及96份乙基-3-乙氧基丙酸酯(作為溶劑)混合以製備液體組成物(G1)。90 parts of the obtained pigment dispersion, 8 parts of an alkali-soluble resin (B-1) (as an alkali-soluble resin (B)), 2 parts of diisoamyltetraol hexaacrylate, and 4 parts of isopenic alcohol tetraacrylate (as Polyfunctional monomer (C)), 3 parts of 1-[9-ethyl-6-(2-methylbenzhydrazide)-9.H.-carbazol-3-yl]-ethane-1- Ketone oxime-O-acetate (as photo-sensitive radical generator (D)) and 70 parts of methoxybutyl acetate and 96 parts of ethyl-3-ethoxypropionate (as solvent) to prepare a liquid Composition (G1).

<染色層之形成>依實施例1之方式於基材上形成綠色條狀像素圖案,不同處係以液體組成物(G-1)取代液體組成(R1)。<Formation of Dye Layer> A green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (R1) was replaced by the liquid composition (G-1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表2-1。The foregoing results are shown in Table 2-1.

實施例32至35Examples 32 to 35

<液體組成物之製備及染色層之形成>液體組成物(G2)至(G5)係依如同實施例31之方式製備,不同處係如表2-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (G2) to (G5) were prepared in the same manner as in Example 31 except that the dispersing agent was changed as shown in Table 2-1.

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G2)至(G5)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (G2) to (G5) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬8微米或6微米之圖案。When the cross section of each pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 8 μm or 6 μm was formed.

前述結果顯示於表2-1。The foregoing results are shown in Table 2-1.

實施例36Example 36

<液體組成物之製備及染色層之形成>液體組成物(G6)係依如同實施例31之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-2)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (G6) was prepared in the same manner as in Example 31, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-2).

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G6)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (G6) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表2-1。The foregoing results are shown in Table 2-1.

實施例37至40Examples 37 to 40

<液體組成物之製備及染色層之形成>液體組成物(G7)至(G10)係依如同實施例36之方式製備,不同處係如表2-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (G7) to (G10) were prepared in the same manner as in Example 36 except that the dispersing agent was changed as shown in Table 2-1.

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G7)至(G10)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (G7) to (G10) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬6微米、8微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), side etching was not observed, and a pattern having a line width of 6 μm, 8 μm or 5 μm was formed.

前述結果顯示於表2-1。The foregoing results are shown in Table 2-1.

實施例41Example 41

<液體組成物之製備及染色層之形成>液體組成物(G11)係依如同實施例31之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-3)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (G11) was prepared in the same manner as in Example 31, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-3).

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G11)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (G11) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表2-2。The foregoing results are shown in Table 2-2.

實施例42至45Examples 42 to 45

<液體組成物之製備及染色層之形成>液體組成物(G12)至(G15)係依如同實施例41之方式製備,不同處係如表2-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (G12) to (G15) were prepared in the same manner as in Example 41 except that the dispersing agent was changed as shown in Table 2-2.

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G12)至(G15)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (G12) to (G15) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm or 6 μm was formed.

前述結果顯示於表2-2。The foregoing results are shown in Table 2-2.

實施例46Example 46

<液體組成物之製備及染色層之形成>液體組成物(G16)係依如同實施例31之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-4)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (G16) was prepared in the same manner as in Example 31, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-4).

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G16)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (G16) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表2-2。The foregoing results are shown in Table 2-2.

實施例47至50Examples 47 to 50

<液體組成物之製備及染色層之形成>液體組成物(G17)至(G20)係依如同實施例46之方式製備,不同處係如表2-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (G17) to (G20) were prepared in the same manner as in Example 46 except that the dispersing agent was changed as shown in Table 2-2.

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G17)至(G20)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (G17) to (G20) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬6微米、5微米或8微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm, 5 μm or 8 μm was formed.

前述結果顯示於表2-2。The foregoing results are shown in Table 2-2.

實施例51Example 51

<液體組成物之製備及染色層之形成>液體組成物(G21)係依如同實施例31之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-5)。<Preparation of Liquid Composition and Formation of Dyeing Layer> The liquid composition (G21) was prepared in the same manner as in Example 31 except that the alkali-soluble resin (B) became an alkali-soluble resin (B-5).

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G21)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (G21) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表2-3。The foregoing results are shown in Table 2-3.

實施例52至55Examples 52 to 55

<液體組成物之製備及染色層之形成>液體組成物(G22)至(G25)係依如同實施例51之方式製備,不同處係如表2-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (G22) to (G25) were prepared in the same manner as in Example 51 except that the dispersing agent was changed as shown in Table 2-3.

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G22)至(G25)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (G22) to (G25) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬6微米、8微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), side etching was not observed, and a pattern having a line width of 6 μm, 8 μm or 5 μm was formed.

前述結果顯示於表2-3。The foregoing results are shown in Table 2-3.

實施例56Example 56

<液體組成物之製備及染色層之形成>液體組成物(G26)係依如同實施例31之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-6)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (G26) was prepared in the same manner as in Example 31, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-6).

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G26)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (G26) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表2-3。The foregoing results are shown in Table 2-3.

實施例57至60Examples 57 to 60

<液體組成物之製備及染色層之形成>液體組成物(G27)至(G30)係依如同實施例56之方式製備,不同處係如表2-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (G27) to (G30) were prepared in the same manner as in Example 56 except that the dispersing agent was changed as shown in Table 2-3.

之後,依實施例1方式於基材上形成綠色條狀像素圖案,不同處係使用液體組成物(G27)至(G30)取代液體組成物(R1)。Thereafter, a green strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (G27) to (G30) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米、6微米或8微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm, 6 μm or 8 μm was formed.

前述結果顯示於表2-3。The foregoing results are shown in Table 2-3.

實施例61Example 61

<液體組成物之製備>9份C.I.顏料藍15:6及C.I.顏料紫23於重量比95:5之混合物(作為著色劑(A))、4份(固體含量)EFKA-46(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 9 parts of CI Pigment Blue 15:6 and CI Pigment Violet 23 in a weight ratio of 95:5 (as coloring agent (A)), 4 parts (solid content) EFKA-46 (as a dispersing agent) And 75 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed by a bead mill to prepare a pigment dispersion.

88份所得之顏料分散物、8份鹼可溶性樹脂(B-1)(作為鹼可溶性樹脂(B))、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(作為感光自由基產生劑(D))及70份乙酸甲氧基丁酯及96份乙基-3-乙氧基丙酸酯(作為溶劑)混合以製備液體組成物(B1)。88 parts of the obtained pigment dispersion, 8 parts of an alkali-soluble resin (B-1) (as an alkali-soluble resin (B)), 2 parts of diisopentyltetraol hexaacrylate, and 4 parts of isopentaerythritol tetraacrylate (as Polyfunctional monomer (C)), 3 parts of 1-[9-ethyl-6-(2-methylbenzhydrazide)-9.H.-carbazol-3-yl]-ethane-1- Ketone oxime-O-acetate (as photo-sensitive radical generator (D)) and 70 parts of methoxybutyl acetate and 96 parts of ethyl-3-ethoxypropionate (as solvent) to prepare a liquid Composition (B1).

<染色層之形成>依實施例1之方式於基材上形成藍色條狀像素圖案,不同處係以液體組成物(B-1)取代液體組成(R1)。<Formation of Dye Layer> A blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B1) was substituted for the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表3-1。The foregoing results are shown in Table 3-1.

實施例62至65Examples 62 to 65

<液體組成物之製備及染色層之形成>液體組成物(B2)至(B5)係依如同實施例61之方式製備,不同處係如表3-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (B2) to (B5) were prepared in the same manner as in Example 61 except that the dispersing agent was changed as shown in Table 3-1.

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B2)至(B5)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B1) to (B5) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm or 6 μm was formed.

前述結果顯示於表3-1。The foregoing results are shown in Table 3-1.

實施例66Example 66

<液體組成物之製備及染色層之形成>液體組成物(B6)係依如同實施例61之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-2)。<Preparation of Liquid Composition and Formation of Dyeing Layer> The liquid composition (B6) was prepared in the same manner as in Example 61, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-2).

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B6)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B6) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表3-1。The foregoing results are shown in Table 3-1.

實施例67至70Examples 67 to 70

<液體組成物之製備及染色層之形成>液體組成物(B7)至(B10)係依如同實施例66之方式製備,不同處係如表3-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (B7) to (B10) were prepared in the same manner as in Example 66 except that the dispersing agent was changed as shown in Table 3-1.

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B7)至(B10)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B1) to (B10) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬8微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), side etching was not observed, and a pattern having a line width of 8 μm or 5 μm was formed.

前述結果顯示於表3-1。The foregoing results are shown in Table 3-1.

實施例71Example 71

<液體組成物之製備及染色層之形成>液體組成物(B11)係依如同實施例61之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-3)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (B11) was prepared in the same manner as in Example 61, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-3).

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B11)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B11) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表3-2。The foregoing results are shown in Table 3-2.

實施例72至75Examples 72 to 75

<液體組成物之製備及染色層之形成>液體組成物(B12)至(B15)係依如同實施例71之方式製備,不同處係如表3-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (B12) to (B15) were prepared in the same manner as in Example 71 except that the dispersant was changed as shown in Table 3-2.

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B12)至(B15)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B12) to (B15) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米、6微米或8微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm, 6 μm or 8 μm was formed.

前述結果顯示於表3-2。The foregoing results are shown in Table 3-2.

實施例76Example 76

<液體組成物之製備及染色層之形成>液體組成物(B16)係依如同實施例61之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-4)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (B16) was prepared in the same manner as in Example 61 except that the alkali-soluble resin (B) became an alkali-soluble resin (B-4).

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B16)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B16) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表3-2。The foregoing results are shown in Table 3-2.

實施例77至80Examples 77 to 80

<液體組成物之製備及染色層之形成>液體組成物(B17)至(B20)係依如同實施例76之方式製備,不同處係如表3-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (B17) to (B20) were prepared in the same manner as in Example 76 except that the dispersant was changed as shown in Table 3-2.

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B17)至(B20)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B17) to (B20) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米或8微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm or 8 μm was formed.

前述結果顯示於表3-2。The foregoing results are shown in Table 3-2.

實施例81Example 81

<液體組成物之製備及染色層之形成>液體組成物(B21)係依如同實施例61之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-5)。<Preparation of Liquid Composition and Formation of Dyeing Layer> The liquid composition (B21) was prepared in the same manner as in Example 61, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-5).

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B21)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B21) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表3-3。The above results are shown in Table 3-3.

實施例82至85Examples 82 to 85

<液體組成物之製備及染色層之形成>液體組成物(B22)至(B25)係依如同實施例81之方式製備,不同處係如表3-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (B22) to (B25) were prepared in the same manner as in Example 81 except that the dispersing agent was changed as shown in Table 3-3.

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B22)至(B25)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B1) to (B25) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米或8微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm or 8 μm was formed.

前述結果顯示於表3-3。The above results are shown in Table 3-3.

實施例86Example 86

<液體組成物之製備及染色層之形成>液體組成物(B26)係依如同實施例61之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-6)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (B26) was prepared in the same manner as in Example 61, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-6).

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B26)取代液體組成物(R1)。Thereafter, a blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B26) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬8微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 8 μm was formed.

前述結果顯示於表3-3。The above results are shown in Table 3-3.

實施例87至90Examples 87 to 90

<液體組成物之製備及染色層之形成>液體組成物(B27)至(B30)係依如同實施例86之方式製備,不同處係如表3-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (B27) to (B30) were prepared in the same manner as in Example 86 except that the dispersing agent was changed as shown in Table 3-3.

之後,依實施例1方式於基材上形成藍色條狀像素圖案,不同處係使用液體組成物(B27)至(B30)取代液體組成物(R1)。Thereafter, a blue strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B27) to (B30) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬8微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), side etching was not observed, and a pattern having a line width of 8 μm or 5 μm was formed.

前述結果顯示於表3-3。The above results are shown in Table 3-3.

實施例91Example 91

<液體組成物之製備>20份碳黑(作為著色劑(A))、4份(固體含量)EFKA-46(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 20 parts of carbon black (as coloring agent (A)), 4 parts (solid content) of EFKA-46 (as a dispersing agent), and 75 parts of propylene glycol monomethyl ether acetate (as a solvent) A bead mill was mixed to prepare a pigment dispersion.

99份所得之顏料分散物、8份鹼可溶性樹脂(B-1)(作為鹼可溶性樹脂(B))、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(作為感光自由基產生劑(D))及150份丙二醇單甲基醚乙酸酯(作為溶劑)混合以製備液體組成物(BK1)。99 parts of the obtained pigment dispersion, 8 parts of an alkali-soluble resin (B-1) (as an alkali-soluble resin (B)), 2 parts of diisoamyltetraol hexaacrylate, and 4 parts of isopenic alcohol tetraacrylate (as Polyfunctional monomer (C)), 3 parts of 1-[9-ethyl-6-(2-methylbenzhydrazide)-9.H.-carbazol-3-yl]-ethane-1- Ketone oxime-O-acetate (as a photoradical radical generator (D)) and 150 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed to prepare a liquid composition (BK1).

<染色層之形成>依實施例1之方式於基材上形成黑色條狀像素圖案,不同處係以液體組成物(BK1)取代液體組成(R1)。<Formation of Dye Layer> A black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B1) was substituted for the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬8微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 8 μm was formed.

前述結果顯示於表4-1。The foregoing results are shown in Table 4-1.

實施例92至95Examples 92 to 95

<液體組成物之製備及染色層之形成>液體組成物(BK2)至(BK5)係依如同實施例91之方式製備,不同處係如表4-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (BK2) to (BK5) were prepared in the same manner as in Example 91 except that the dispersant was changed as shown in Table 4-1.

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK2)至(BK5)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B1) to (BK5) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm or 6 μm was formed.

前述結果顯示於表4-1。The foregoing results are shown in Table 4-1.

實施例96Example 96

<液體組成物之製備及染色層之形成>液體組成物(BK6)係依如同實施例91之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-2)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (BK6) was prepared in the same manner as in Example 91, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-2).

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK6)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B1) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表4-1。The foregoing results are shown in Table 4-1.

實施例97至100Examples 97 to 100

<液體組成物之製備及染色層之形成>液體組成物(BK7)至(BK10)係依如同實施例96之方式製備,不同處係如表4-1所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (BK7) to (BK10) were prepared in the same manner as in Example 96 except that the dispersing agent was changed as shown in Table 4-1.

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK7)至(BK10)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B1) to (BK10) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬6微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm or 5 μm was formed.

前述結果顯示於表4-1。The foregoing results are shown in Table 4-1.

實施例101Example 101

<液體組成物之製備及染色層之形成>液體組成物(BK11)係依如同實施例91之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-3)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (BK11) was prepared in the same manner as in Example 91, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-3).

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK11)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B1) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表4-2。The foregoing results are shown in Table 4-2.

實施例102至105Examples 102 to 105

<液體組成物之製備及染色層之形成>液體組成物(BK12)至(BK15)係依如同實施例101之方式製備,不同處係如表4-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (BK12) to (BK15) were prepared in the same manner as in Example 101 except that the dispersant was changed as shown in Table 4-2.

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK12)至(BK15)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (BK12) to (BK15) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬5微米、8微米或6微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm, 8 μm or 6 μm was formed.

前述結果顯示於表4-2。The foregoing results are shown in Table 4-2.

實施例106Example 106

<液體組成物之製備及染色層之形成>液體組成物(BK16)係依如同實施例91之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-4)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (BK16) was prepared in the same manner as in Example 91, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-4).

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK16)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B1) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬8微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 8 μm was formed.

前述結果顯示於表4-2。The foregoing results are shown in Table 4-2.

實施例107至110Examples 107 to 110

<液體組成物之製備及染色層之形成>液體組成物(BK17)至(BK20)係依如同實施例106之方式製備,不同處係如表4-2所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dyeing Layer> Liquid compositions (BK17) to (BK20) were prepared in the same manner as in Example 106 except that the dispersing agent was changed as shown in Table 4-2.

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK17)至(BK20)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid compositions (B1) to (BK20) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬6微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm or 5 μm was formed.

前述結果顯示於表4-2。The foregoing results are shown in Table 4-2.

實施例111Example 111

<液體組成物之製備及染色層之形成>液體組成物(BK21)係依如同實施例91之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-5)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (BK21) was prepared in the same manner as in Example 91, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-5).

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK21)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B1) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬6微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 6 μm was formed.

前述結果顯示於表4-3。The foregoing results are shown in Table 4-3.

實施例112至115Examples 112 to 115

<液體組成物之製備及染色層之形成>液體組成物(BK22)至(BK25)係依如同實施例111之方式製備,不同處係如表4-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (BK22) to (BK25) were prepared in the same manner as in Example 111 except that the dispersant was changed as shown in Table 4-3.

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK22)至(BK25)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (BK22) to (BK25) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬8微米、6微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 8 μm, 6 μm or 5 μm was formed.

前述結果顯示於表4-3。The foregoing results are shown in Table 4-3.

實施例116Example 116

<液體組成物之製備及染色層之形成>液體組成物(BK26)係依如同實施例91之方式製備,不同處係鹼可溶性樹脂(B)變成鹼可溶性樹脂(B-6)。<Preparation of Liquid Composition and Formation of Dye Layer> The liquid composition (BK26) was prepared in the same manner as in Example 91, except that the alkali-soluble resin (B) became an alkali-soluble resin (B-6).

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK26)取代液體組成物(R1)。Thereafter, a black strip-shaped pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (B1) was used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,未發現側蝕,且可形成線寬5微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), no side etching was observed, and a pattern having a line width of 5 μm was formed.

前述結果顯示於表4-3。The foregoing results are shown in Table 4-3.

實施例117至120Examples 117 to 120

<液體組成物之製備及染色層之形成>液體組成物(BK27)至(BK30)係依如同實施例116之方式製備,不同處係如表4-3所示般地改變分散劑。<Preparation of Liquid Composition and Formation of Dye Layer> Liquid compositions (BK27) to (BK30) were prepared in the same manner as in Example 116 except that the dispersant was changed as shown in Table 4-3.

之後,依實施例1方式於基材上形成黑色條狀像素圖案,不同處係使用液體組成物(BK27)至(BK30)取代液體組成物(R1)。Thereafter, a black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (BK27) to (BK30) were used instead of the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之各像素陣列時,未曝光部分之基材上未發現顯影殘留物,未發現像素圖案邊緣部分缺失。<Evaluation> When each pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion, and no edge portion of the pixel pattern was found to be missing.

經由掃描式電子顯微鏡(SEM)觀察各像素圖案之剖面時,未發現側蝕,且可形成線寬8微米或5微米之圖案。When the cross section of each pixel pattern was observed by a scanning electron microscope (SEM), side etching was not observed, and a pattern having a line width of 8 μm or 5 μm was formed.

前述結果顯示於表4-3。The foregoing results are shown in Table 4-3.

對照例1Comparative Example 1

<液體組成物之製備>8份C.I.顏料紅254及C.I.顏料紅177於重量比80:20之混合物(作為著色劑(A))、4份(固體含量)EFKA-46(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 8 parts of CI Pigment Red 254 and CI Pigment Red 177 in a weight ratio of 80:20 (as coloring agent (A)), 4 parts (solid content) of EFKA-46 (as a dispersing agent), and 75 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed by a bead mill to prepare a pigment dispersion.

87份所得之顏料分散物、2份鹼可溶性樹脂(B-7)、3份鹼可溶性樹脂(B-8)及4份鹼可溶性樹脂(B-9)之混合物(作為鹼可溶性樹脂(B))、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(作為感光自由基產生劑(D))及70份乙酸甲氧基丁酯及96份乙基-3-乙氧基丙酸酯(作為溶劑)混合以製備液體組成物(CR1)。a mixture of 87 parts of the obtained pigment dispersion, 2 parts of an alkali-soluble resin (B-7), 3 parts of an alkali-soluble resin (B-8), and 4 parts of an alkali-soluble resin (B-9) (as an alkali-soluble resin (B) ), 2 parts of diisopentyl alcohol hexaacrylate and 4 parts of pentaerythritol tetraacrylate (as polyfunctional monomer (C)), 3 parts of 1-[9-ethyl-6-(2-A) Benzobenzamide-9.H.-carbazol-3-yl]-ethane-1-one oxime-O-acetate (as photo-sensitizing agent (D)) and 70 parts of methoxyacetate Butyl ester and 96 parts of ethyl-3-ethoxypropionate (as a solvent) were mixed to prepare a liquid composition (CR1).

<染色層之形成>依實施例1之方式於基材上形成紅色條狀像素圖案,不同處係以液體組成物(CR-1)取代液體組成(R1)。<Formation of Dye Layer> A red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (R1) was replaced by the liquid composition (CR-1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上發現顯影殘留物。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, development residue was found on the unexposed portion of the substrate.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,發現側蝕,且僅可形成線寬35微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), side etching was observed, and only a pattern having a line width of 35 μm was formed.

前述結果顯示於表5。The foregoing results are shown in Table 5.

對照例2Comparative Example 2

<液體組成物之製備>11份C.I.顏料綠36及C.I.顏料黃150於重量比60:40之混合物(作為著色劑(A))、4份(固體含量)BYK-2000(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 11 parts of a mixture of CI Pigment Green 36 and CI Pigment Yellow 150 in a weight ratio of 60:40 (as a coloring agent (A)), 4 parts (solid content) BYK-2000 (as a dispersing agent), and 75 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed by a bead mill to prepare a pigment dispersion.

90份所得之顏料分散物、2份鹼可溶性樹脂(B-7)、3份鹼可溶性樹脂(B-8)及4份鹼可溶性樹脂(B-9)之混合物(作為鹼可溶性樹脂(B))、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(作為感光自由基產生劑(D))及70份乙酸甲氧基丁酯及96份乙基-3-乙氧基丙酸酯(作為溶劑)混合以製備液體組成物(CG1)。a mixture of 90 parts of the obtained pigment dispersion, 2 parts of an alkali-soluble resin (B-7), 3 parts of an alkali-soluble resin (B-8), and 4 parts of an alkali-soluble resin (B-9) (as an alkali-soluble resin (B) ), 2 parts of diisopentyl alcohol hexaacrylate and 4 parts of pentaerythritol tetraacrylate (as polyfunctional monomer (C)), 3 parts of 1-[9-ethyl-6-(2-A) Benzobenzamide-9.H.-carbazol-3-yl]-ethane-1-one oxime-O-acetate (as photo-sensitizing agent (D)) and 70 parts of methoxyacetate Butyl ester and 96 parts of ethyl-3-ethoxypropionate (as a solvent) were mixed to prepare a liquid composition (CG1).

<染色層之形成>依實施例1之方式於基材上形成綠色條狀像素圖案,不同處係以液體組成物(CG1)取代液體組成(R1)。<Formation of Dye Layer> A green stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (CG1) was substituted for the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物。然而,經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,發現側蝕,且僅可形成線寬45微米之圖案。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion. However, when the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), side etching was found, and only a pattern having a line width of 45 μm was formed.

前述結果顯示於表5。The foregoing results are shown in Table 5.

對照例3Comparative Example 3

<液體組成物之製備>9份C.I.顏料藍15:6及C.I.顏料紫23於重量比95:5之混合物(作為著色劑(A))、4份(固體含量)BYK-2001(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 9 parts of CI Pigment Blue 15:6 and CI Pigment Violet 23 in a weight ratio of 95:5 (as coloring agent (A)), 4 parts (solid content) BYK-2001 (as a dispersing agent) And 75 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed by a bead mill to prepare a pigment dispersion.

88份所得之顏料分散物、2份鹼可溶性樹脂(B-7)、3份鹼可溶性樹脂(B-8)及4份鹼可溶性樹脂(B-9)之混合物(作為鹼可溶性樹脂(B))、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(作為感光自由基產生劑(D))及70份乙酸甲氧基丁酯及96份乙基-3-乙氧基丙酸酯(作為溶劑)混合以製備液體組成物(CB1)。a mixture of 88 parts of the obtained pigment dispersion, 2 parts of an alkali-soluble resin (B-7), 3 parts of an alkali-soluble resin (B-8), and 4 parts of an alkali-soluble resin (B-9) (as an alkali-soluble resin (B) ), 2 parts of diisopentyl alcohol hexaacrylate and 4 parts of pentaerythritol tetraacrylate (as polyfunctional monomer (C)), 3 parts of 1-[9-ethyl-6-(2-A) Benzobenzamide-9.H.-carbazol-3-yl]-ethane-1-one oxime-O-acetate (as photo-sensitizing agent (D)) and 70 parts of methoxyacetate Butyl ester and 96 parts of ethyl-3-ethoxypropionate (as a solvent) were mixed to prepare a liquid composition (CB1).

<染色層之形成>依實施例1之方式於基材上形成藍色條狀像素圖案,不同處係以液體組成物(CB1)取代液體組成(R1)。<Formation of Dye Layer> A blue stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (C1) was substituted for the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上未發現顯影殘留物。然而,經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,發現側蝕,且僅可形成線寬40微米之圖案。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, no development residue was observed on the substrate of the unexposed portion. However, when the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), side etching was found, and only a pattern having a line width of 40 μm was formed.

前述結果顯示於表5。The foregoing results are shown in Table 5.

對照例4Comparative Example 4

<液體組成物之製備>20份碳黑(作為著色劑(A))、4份(固體含量)BYK-164(作為分散劑)及75份丙二醇單甲基醚乙酸酯(作為溶劑)藉珠磨機混合製備顏料分散物。<Preparation of liquid composition> 20 parts of carbon black (as coloring agent (A)), 4 parts (solid content) BYK-164 (as a dispersing agent), and 75 parts of propylene glycol monomethyl ether acetate (as a solvent) A bead mill was mixed to prepare a pigment dispersion.

99份所得之顏料分散物、8份鹼可溶性樹脂(B-1)(作為鹼可溶性樹脂(B))、2份二異戊四醇六丙烯酸酯及4份異戊四醇四丙烯酸酯(作為多官能性單體(C))、3份1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯(作為感光自由基產生劑(D))及150份丙二醇單甲基醚乙酸酯(作為溶劑)混合以製備液體組成物(CBK1)。99 parts of the obtained pigment dispersion, 8 parts of an alkali-soluble resin (B-1) (as an alkali-soluble resin (B)), 2 parts of diisoamyltetraol hexaacrylate, and 4 parts of isopenic alcohol tetraacrylate (as Polyfunctional monomer (C)), 3 parts of 1-[9-ethyl-6-(2-methylbenzhydrazide)-9.H.-carbazol-3-yl]-ethane-1- Ketone oxime-O-acetate (as a photoradical generator (D)) and 150 parts of propylene glycol monomethyl ether acetate (as a solvent) were mixed to prepare a liquid composition (CBK1).

<染色層之形成>依實施例1之方式於基材上形成黑色條狀像素圖案,不同處係以液體組成物(CBK-1)取代液體組成(R1)。<Formation of Dye Layer> A black stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (C1K-1) was substituted for the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上發現顯影殘留物。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, development residue was found on the unexposed portion of the substrate.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,發現側蝕,且僅可形成線寬50微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), side etching was observed, and only a pattern having a line width of 50 μm was formed.

前述結果顯示於表5。The foregoing results are shown in Table 5.

對照例5Comparative Example 5

<液體組成物之製備及染色層之形成>依對照例1之方式製備液體組成物(CR2),不同處係將分散劑變成BYK-182。<Preparation of Liquid Composition and Formation of Dye Layer> A liquid composition (CR2) was prepared in the same manner as in Comparative Example 1, except that the dispersant was changed to BYK-182.

<染色層之形成>依實施例1方式於基材上形成紅色條狀像素圖案,不同處係以液體組成物(CR2)取代液體組成(R1)。<Formation of Dye Layer> A red stripe pixel pattern was formed on the substrate in the same manner as in Example 1, except that the liquid composition (CR2) was substituted for the liquid composition (R1).

<評估>經由光學顯微鏡觀察基材上之像素陣列時,未曝光部分之基材上發現顯影殘留物。<Evaluation> When the pixel array on the substrate was observed through an optical microscope, development residue was found on the unexposed portion of the substrate.

經由掃描式電子顯微鏡(SEM)觀察像素圖案之剖面時,發現側蝕,且僅可形成線寬45微米之圖案。When the cross section of the pixel pattern was observed through a scanning electron microscope (SEM), side etching was observed, and only a pattern having a line width of 45 μm was formed.

前述結果顯示於表5。The foregoing results are shown in Table 5.

Claims (4)

一種輻射敏感組成物,其包含(A)著色劑、(B)鹼可溶性樹脂、(C)多官能性單體及(D)感光自由基產生劑,其中該鹼可溶性樹脂(B)係包含主鏈中具有脂環族烴骨架且側鏈中具有可聚合之不飽和鍵的聚酯,且該輻射敏感組成物係用以形成染色層,其中該組份(B)係下式(1)所示之聚酯: 其中,X各係獨立地為下式(2)或(3)所示之二價基團,Y各係獨立地為藉由自有機四羧酸去除四個羧基所得之殘基,R1 各係獨立地為氫原子或甲基,R2 各係獨立地為氫原子或羧基封端劑之殘基,且n係為1至40之整數, A radiation-sensitive composition comprising (A) a colorant, (B) an alkali-soluble resin, (C) a polyfunctional monomer, and (D) a photoradical generating agent, wherein the alkali-soluble resin (B) comprises a main a polyester having an alicyclic hydrocarbon skeleton in the chain and a polymerizable unsaturated bond in the side chain, and the radiation-sensitive composition is used to form a dye layer, wherein the component (B) is a formula (1) Show the polyester: Wherein each of X is independently a divalent group represented by the following formula (2) or (3), and each of Y is independently a residue obtained by removing four carboxyl groups from the organic tetracarboxylic acid, each of R 1 Is independently a hydrogen atom or a methyl group, and each of R 2 is independently a residue of a hydrogen atom or a carboxyl blocking agent, and n is an integer of 1 to 40, 如申請專利範圍第1項之輻射敏感組成物,其中該感光自由基產生劑(D)係為下式(4)或(5)所示之化合物: 其中,各R3 係獨立地為具有1至12個碳原子之直鏈、支鏈或環狀烷基或者苯基,各R4 係獨立地為氫原子、具有1至12個碳原子之直鏈、支鏈或環狀烷基或者苯基,各R5 係獨立地為氫原子或具有1至12個碳原子之直鏈、支鏈或環狀烷基,且各R6 、R7 及R8 係獨立地為氫原子或具有1至6個碳原子之直鏈、支鏈或環狀烷基,其 限制條件為各R3 、R4 、R5 、R6 、R7 及R8 所表示之烷基可經選自具有1至6個碳原子之直鏈、支鏈或環狀烷氧基、苯基及鹵原子之取代基所取代,而R3 及R4 所表示之苯基可經選自具有1至6個碳原子之直鏈、支鏈或環狀烷基、具有1至6個碳原子之直鏈、支鏈或環狀烷氧基、苯基及鹵原子之取代基所取代。The radiation-sensitive composition of claim 1, wherein the photo-radical generating agent (D) is a compound represented by the following formula (4) or (5): Wherein each R 3 is independently a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms or a phenyl group, and each R 4 is independently a hydrogen atom and has a straight 1 to 12 carbon atoms. chain, branched or cyclic alkyl group or a phenyl group, each R 5 is independently a hydrogen atom lines or straight chain from 1 to 12 carbon atoms, branched or cyclic alkyl group, and each R 6, R 7, and R 8 is independently a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, and is limited to each of R 3 , R 4 , R 5 , R 6 , R 7 and R 8 . The alkyl group represented may be substituted with a substituent selected from a linear, branched or cyclic alkoxy group having 1 to 6 carbon atoms, a phenyl group and a halogen atom, and benzene represented by R 3 and R 4 The group may be selected from a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, a linear, branched or cyclic alkoxy group having 1 to 6 carbon atoms, a phenyl group and a halogen atom. Substituted by a substituent. 一種彩色濾光片,其具有自如申請專利範圍第1或2項之輻射敏感組成物製得的染色層。 A color filter having a dyed layer obtained from the radiation-sensitive composition of claim 1 or 2. 一種彩色液晶顯示裝置,其包含如申請專利範圍第3項之彩色濾光片。A color liquid crystal display device comprising the color filter of item 3 of the patent application.
TW096124938A 2006-07-10 2007-07-09 Radiation sensitive composition for forming a colored layer, color filter and color liquid crystal display device TWI430027B (en)

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