TW202022172A - A split draft tube - Google Patents

Abstract

The present invention provides draft tube with heater, the draft tube comprises top housing with a top channel connecting top portion and bottom portion of the top housing; bottom housing with a bottom channel connecting top portion and bottom portion of the bottom housing, wherein the top portion of the bottom housing detachably connected with the bottom portion of the top housing form a draft channel. The split draft tube of the present invention can easily change the bottom housing according to different type of crystal growth or when bottom housing is dirty, therefore, it can reduce the maintenance time and cost. Besides, it also can enhance the production yield.

Description

Split guide tube

The present invention relates to the field of semiconductor crystal growth, in particular to a split flow guide tube.

In the process of using a crystal pulling furnace to grow a semiconductor single crystal by the Czochralski method, the flow guide cylinder is an important part of the crystal pulling furnace to control the thermal field, and can play a role in guiding the argon gas flow and controlling the temperature gradient of the thermal field. At present, the existing guide tube structure can no longer meet the requirements of the continuous development of new single crystal growth processes for more and more precise control of the thermal field distribution. In addition, during the Czochralski method of growing single crystals, the bottom of the guide tube is often contaminated by the molten material in the crucible. In order to avoid affecting the quality of single crystal growth, when the material contamination reaches a certain level, it will generally affect the entire The guide tube is replaced, which will increase the maintenance cost and time of the equipment.

Therefore, it is necessary to propose a new split guide tube to solve the above problems.

In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a split flow guide tube to solve the problem of low productivity caused by frequent replacement of the flow guide tube in the prior art.

In order to achieve the above-mentioned objects and other related objects, the present invention provides a split-type deflector, including: The upper cylinder includes an upper through hole that connects the top and bottom of the upper cylinder; The lower cylinder includes a lower through hole that connects the top and bottom of the lower cylinder, and the top of the lower cylinder is detachably connected to the bottom of the upper cylinder, so that the upper through hole and the lower The through holes communicate with each other and together constitute a flow-through hole.

As an optional solution of the present invention, the connecting portion between the top inner surface of the lower cylinder and the bottom inner surface of the upper cylinder is a straight curved surface.

As an optional solution of the present invention, the top of the lower cylinder is connected to the bottom of the upper cylinder through a rotary tripping structure.

As an optional solution of the present invention, the top of the lower cylinder is connected to the bottom of the upper cylinder through a pin connection structure.

As an optional solution of the present invention, the radial size of the flow-conducting hole gradually decreases from top to bottom.

As an optional solution of the present invention, the height of the lower cylinder occupies one quarter to one half of the height of the upper cylinder.

As an optional solution of the present invention, the radial dimension of the outer wall of the split guide tube gradually decreases from top to bottom.

As an optional solution of the present invention, the constituent material of the upper cylinder and the lower cylinder includes graphite.

As an optional solution of the present invention, there are a plurality of the lower cylinders, each having a different lower bottom surface structure, and is optionally connected to the bottom of the upper cylinder.

As an optional solution of the present invention, the lower bottom surface of the lower cylinder includes a flat surface.

As an optional solution of the present invention, a groove is formed on the lower bottom surface of the lower cylinder.

As an optional solution of the present invention, the groove includes an annular groove structure, and the center of the annular groove structure is located on the axis of the guide flow hole.

As mentioned above, the present invention provides a split-type deflector cylinder. By introducing a detachable upper cylinder body and a lower cylinder body, the lower cylinder body of different structure is replaced for the growth of different types of semiconductor single crystals; materials appear in the lower cylinder body. When contaminated, only the lower cylinder needs to be replaced, which reduces maintenance costs and time, and avoids the problem of reducing equipment productivity due to frequent replacement of the entire deflector.

The following describes the implementation of the present invention through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

Please refer to Figure 1 to Figure 18. It should be noted that the illustrations provided in this embodiment only illustrate the basic idea of the invention in a schematic way, although the illustrations only show components related to the invention instead of the number, shape, and shape of the components in actual implementation. For the size drawing, the shape, number, and ratio of each element can be changed at will during actual implementation, and the element layout form may be more complicated. Example one

Please refer to Figures 1 to 3, the present invention provides a split-type deflector 10, including:

The upper cylinder 101 includes upper through holes 103a that connect the top and bottom of the upper cylinder 101; the lower cylinder 102 includes lower through holes 103b that connect the top and bottom of the lower cylinder 102. The lower cylinder The top of the body 102 is detachably connected to the bottom of the upper cylinder 101, so that the upper through hole 103a and the lower through hole 103b are connected to form a flow-through hole 103 together.

The split guide tube 10 provided by the present invention is composed of an upper tube body 101 and a lower tube body 102. The top of the lower tube body 102 is connected to the bottom of the upper tube body 101, and this connection is detachable Yes, that is, the lower cylinder 102 can be detached from the upper cylinder 101. The upper cylinder 101 includes an upper through hole 103a that communicates with its top and bottom, and the lower cylinder 102 includes a lower through hole 103b that communicates with its top and bottom. The upper through hole 103a and the lower through hole 103b are common Constitutive flow hole 103. As shown in FIG. 1, it is a schematic cross-sectional view of the split guide tube 10 provided by an embodiment of the present invention. FIG. 2 is a top view thereof, and FIG. 3 is a bottom view thereof.

As an example, please refer to FIGS. 1 and 4 to 6, the top of the lower cylinder 102 is connected to the bottom of the upper cylinder 101 through a rotary tripping structure 104. In this embodiment, the detachable connection between the upper cylinder 101 and the lower cylinder 102 is realized by the rotary tripping structure 104. As shown in Figure 1, on both sides of the top of the lower cylinder 102 are provided with buckles 104a in pairs, the top of which is provided with a protrusion protruding toward the axial direction of the split guide tube 10, the protrusion It is embedded and fixed on the upper cylinder 101. Specifically, as shown in FIGS. 4 to 6, it is a process in which the lower cylinder 102 is connected to the upper cylinder 101 through the rotation trip structure 104. A buckle 104a is provided on the top of the lower cylinder 102, and the top end of the buckle 104a is provided with a protrusion protruding in the axial direction of the split-type deflector 10, and at the bottom of the upper cylinder 101 A card slot 104b is provided at the corresponding position. The card slot 104b is divided into an embedding groove on the left and a fixing groove on the right. The depth of the embedding groove can accommodate the buckle 104a including the protrusion to enter the embedding. In the groove, the depth of the fixing groove at its top end can accommodate the embedding of the protrusion of the buckle 104a, while the depth of other parts is much smaller than the embedding depth of the protrusion. In FIG. 4, the upper cylinder 101 and the lower cylinder 102 are aligned and fitted together, wherein the buckle 104a is aligned with the embedding groove of the clamping groove 104b. In FIG. 5, the buckle 104a enters the embedding groove of the groove 104b upward, and rotates the lower cylinder 102 counterclockwise from a top view. In FIG. 6, by rotating the lower cylinder 102, the buckle 104a moves from the embedding groove to the fixing groove. The depth of the fixing groove at the top end of the buckle 104a can accommodate the The protruding part is embedded, and the depth of other parts is much smaller than the embedding depth of the protruding part. The buckle 104a is fixed in the fixing groove through the protruding part, thereby realizing the lower cylinder 102 and the upper Removable connection of the cylinder 101. When the lower cylinder 102 needs to be disassembled, the lower cylinder 102 can be moved down and disassembled by rotating the lower cylinder 102 clockwise into the embedding groove from a top view. It should be pointed out that the rotary tripping structure in this embodiment is provided in pairs on opposite sides of the split deflector 10, while in other embodiments of the present invention, the rotary tripping structure The number can also be greater than two, and they are distributed around the junction of the upper cylinder 101 and the lower cylinder 102 at equal intervals. The rotary trip structure is not limited to the outer wall of the split guide tube 10 described in this embodiment, and in other embodiments, it can also be provided on the inner wall of the split guide tube 10. In addition, in addition to the rotary trip structure adopted in this embodiment, in other embodiments of the present invention, the detachable connection between the upper cylinder 101 and the lower cylinder 102 can also be pinned or threaded. Connection, direct buckle (non-rotating) and other possible connection methods.

As an example, as shown in FIG. 1, the connecting portion between the top inner surface of the lower cylinder 102 and the bottom inner surface of the upper cylinder 101 is a straight curved surface. The ruled curved surface is defined as a curved surface that can be formed by a straight line through continuous movement, that is, the ruled curved surface is smooth and does not appear tortuous. In this embodiment, the connecting part between the top inner surface of the lower cylinder 102 and the bottom inner surface of the upper cylinder 101 adopts a straight curved surface, that is to say, the topography of the connecting part is smooth. Disturbance will be caused to the air flow in the guide holes 103, which ensures that the argon air flow will not be turbulent during the crystal growth process and the crystals can grow stably.

As an example, as shown in FIG. 1, the radial size of the flow-conducting hole 103 gradually decreases from top to bottom. In the present invention, the radial dimension of the flow guide hole 103 gradually decreases from top to bottom, which means that the shape of the inner wall of the flow guide cylinder forming the flow guide hole 103 is smooth and gradual, and from top to bottom. slowing shrieking. The flow-through hole 103 is formed by the upper through hole 103a and the lower through hole 103b. In the process of growing single crystals in the crystal pulling furnace, argon as a protective gas is generally introduced from above the furnace body. Through the funnel-shaped design with the radial size gradually decreasing from top to bottom, the argon gas flow can be concentrated on the single crystal. Near the growth interface, while protecting the growth of the single crystal, cooling can also be used to increase the temperature gradient near the growth interface and speed up the growth of the single crystal. In addition, considering that the presence of protruding structures on the inner wall of the guide tube may cause turbulence and cause crystal growth instability, the introduction of smooth and gradual inner wall morphology also ensures that the argon gas flow is stable without turbulence. Optionally, the guide flow hole is in the shape of a rounded truncated cone with a wide top and a narrow bottom. By introducing a gradual smooth side wall with a rounded truncated cone shape, the turbulence that may be generated when the guide tube guides the argon gas flow is avoided. Make the argon gas flow to the crystal growth interface smoothly and controllly, so as to improve the quality of single crystal growth.

As an example, as shown in FIG. 1, the height of the lower cylinder 102 occupies one quarter to one half of the height of the upper cylinder 101. Optionally, the height of the lower cylinder 102 accounts for one third of the height of the upper cylinder 101. When designing the proportion of the lower cylinder 102 to the entire split guide tube 10, on the one hand, it is desirable to reduce the proportion of the lower cylinder 102 as much as possible, so as to reduce the maintenance cost of parts caused by the replacement of the lower cylinder. On the other hand, the distribution range of material contamination should also be considered, and the part contaminated by the material should be designed into the range occupied by the lower cylinder 102 as much as possible, so that only by replacing the lower cylinder 102 can remove the material contamination on the cylinder. In this embodiment, the height of the lower cylinder 102 is selected to account for one third of the height of the upper cylinder 101.

As an example, as shown in FIG. 1, the radial dimension of the outer wall of the split guide tube 10 gradually decreases from top to bottom. Although the thermal field factors affecting the growth of single crystals are mainly determined by the internal structure of the split guide tube 10, the morphology of the outer wall of the split guide tube 10 also has a certain influence on the convection conditions in the furnace body. In this embodiment, the radial dimension of the outer wall of the split guide tube 10 gradually decreases from top to bottom. Optionally, the difference between the radial dimensions of the inner wall and the outer wall of the split guide tube 10 at the same height is fixed, that is, the wall thickness of the split guide tube 10 is the same everywhere.

As an example, the constituent materials of the upper cylinder 101 and the lower cylinder 102 include graphite. Graphite has the characteristics of high temperature resistance, strong thermal conductivity, good corrosion resistance and long service life. It is an ideal material for high-temperature furnace parts. In other embodiments of the present invention, the constituent material further includes other high temperature resistant materials such as silicon carbide, ceramics, or quartz.

As an example, as shown in Figs. 1 to 3, a pair of hook structures 101a are also provided at opposite positions on both sides of the top of the outer wall of the upper cylinder 101. The hook structure 101a can be used to connect a lifting guide rod, and the lifting guide rod can fix the split guide tube 10 through the hook structure 101a and control the lift of the split guide tube 10 to adjust the split guide tube 10 The relative position of the integrated baffle tube 10 in the furnace body.

As an example, the lower bottom surface of the lower cylinder 102 includes a flat surface. As shown in FIG. 7, it is a schematic diagram of the split guide tube 10 with a flat bottom surface during single crystal growth. When growing single crystal silicon for epitaxial substrates, it is generally required to strengthen the heat dissipation near the single crystal growth interface. Therefore, the lower bottom surface of the lower cylinder 102 is designed as a plane structure to facilitate convective heat dissipation. In FIG. 7, the argon gas flow introduced from above flows downward under the guidance of the split guide tube 10, and the material liquid level in the crucible 001 will generate upward thermal convection due to heating. It meets near the growth interface of the crystal ingot 002 and diffuses toward the periphery of the split guide tube 10, that is, the argon gas flow will take away part of the heat convection from the liquid surface of the material. When the lower bottom surface of the lower cylinder 102 is designed as a planar structure, the argon gas flow is more likely to diffuse from the lower bottom surface of the lower cylinder 102 to the periphery of the split guide tube 10, which strengthens the thermal field The heat dissipation, thereby increasing the temperature gradient near the growth interface, facilitates the growth of monocrystalline silicon used for epitaxial substrates. Example 2

As shown in Figures 8 and 9, the split guide tube 20 provided by this embodiment is composed of an upper tube body 201 and a lower tube body 202. The top of the lower tube body 202 is connected to The bottom of the upper cylinder 201. The upper through hole 203a and the lower through hole 203b are in communication and together constitute a flow-through hole 203. The difference between the solution in this embodiment and the first embodiment is that a groove 202a with a heat storage function is formed on the lower bottom surface of the lower cylinder 202. The groove 202 includes an annular groove structure, and the center of the annular groove structure is located on the axis of the guide hole 203. FIG. 8 is a schematic cross-sectional view of the split guide tube 20, and FIG. 9 is a bottom view thereof.

As shown in FIG. 10, it is a schematic diagram of the split guide tube 10 with a groove 202 a formed on the bottom surface during single crystal growth. When growing single crystal silicon for polishing wafers, it is necessary to reduce the heat dissipation near the single crystal growth interface. Therefore, a groove 202a is formed on the bottom surface of the lower cylinder 202 to store heat through the groove structure, thereby reducing Heat dissipation. In FIG. 10, the argon gas flow introduced from above flows downward under the guidance of the split guide tube 20, and the material liquid level in the crucible 001 will generate upward thermal convection due to heating. Meet near the growth interface of the ingot 002, and diffuse along the bottom of the split guide tube 20 to the periphery, that is, the argon gas flow will take away part of the heat convection from the liquid surface of the material, and pass through the A groove 202a is formed on the bottom surface of the lower cylinder 202, and part of the heat of the airflow passing through the groove 202a will stay and be stored in the groove 202a, which reduces the heat dissipation of the entire system and makes the crystal More heat can be retained near the growth interface to facilitate the growth of monocrystalline silicon used for polishing wafers. In this embodiment, the groove 202a includes a ring-shaped groove structure. In other embodiments of the present invention, the groove 202a may also adopt multiple ring-shaped groove structures with the same center, or A groove structure arranged on the lower bottom surface of the lower cylinder 202 in any other possible geometric pattern is adopted. Example Three

As an example, there are a plurality of lower cylinders, each having a different lower bottom surface structure, and optionally connected to the bottom of the upper cylinder. In the actual production process, it may happen that according to different crystal growth requirements, the guide tube with a different bottom surface structure may be replaced. The difference between the scheme implemented in this embodiment and the first and second embodiments is that, in a set of the split guide tube according to the present invention, an upper tube body is provided with a plurality of lower tube bodies corresponding to each other. The barrel is correspondingly arranged according to different types of single crystals to be grown in the crystal pulling furnace. For example, the growth of monocrystalline silicon used for epitaxial wafers is correspondingly set up as described in the first embodiment. The lower bottom surface is a flat structure of the lower cylinder, and the growth of monocrystalline silicon used for polishing wafers is correspondingly set up as the second embodiment. The bottom surface of the lower cylinder has an annular groove structure. When the crystal pulling furnace grows different types of single crystals, the corresponding lower cylinder is replaced by disassembly; a plurality of lower cylinders of the same type are set, and the material contaminated on the lower cylinder reaches a certain level. After that, the lower cylinder can also be replaced in time. This embodiment not only reduces the component cost and maintenance time of the cylinder body replacement, but also reduces the time consumed by the re-machine measures such as baking the cylinder body after the replacement. Example four

As shown in Figures 11 to 12, there is a split guide tube 30 provided in this embodiment, wherein Figure 11 is a cross-sectional schematic view of a split guide tube 30 provided in this embodiment, and Figure 12 is Fig. 11 is a schematic cross-sectional view at AA'. The difference between this embodiment and the first embodiment is that the split guide tube 30 is connected by a pin connection, and the top of the lower cylinder 302 is connected to the bottom of the upper cylinder 301 through a pin connection structure 305. Specifically, the bottom of the upper cylinder 301 is nested on the periphery of the top of the lower cylinder 302, and the pin connection structure 305 is provided with a plurality of pin holes passing through the upper cylinder 301 and the lower cylinder 302. The cylindrical pin 305a is inserted into the pin hole and fixes the upper cylinder 301 and the lower cylinder 302. As shown in Fig. 12, in this embodiment, two cylindrical pins 305a are provided in pairs. Of course, in other embodiments of the present invention, the number and layout of the cylindrical pins 305a can be flexibly changed according to actual needs. As shown in FIGS. 13 to 14, it is the pinning process of the upper cylinder 301 and the lower cylinder 302 in this embodiment. In Figure 13, the top of the lower cylinder 302 is provided with a number of blind holes 305b, and the bottom of the upper cylinder 301 is provided with a number of through holes 305c corresponding to the number and positions of the blind holes 305b, and The bottom of the upper cylinder 301 may be closely nested outside the top of the lower cylinder 302. In FIG. 14, the bottom of the upper cylinder 301 is nested on the top of the lower cylinder 302, and the blind hole 305b communicates with the through hole 305c, and forms a pin hole together. The cylindrical pin 305a is inserted into the pin hole to form a stable pin connection structure 305, as shown in FIG. 11. It should be pointed out that in this embodiment, the top of the lower cylinder 302 is provided with the blind hole 305b. In other embodiments of the present invention, it can also be changed to a through hole, which does not affect the pin. The implementation of the connection structure 305. Example five

As shown in Figures 15 to 16, it is a split type guide tube 40 provided by this embodiment, wherein, FIG. 15 is a cross-sectional schematic view of a split type guide tube 40 provided in this embodiment, and FIG. 16 is The schematic cross-sectional view at AA′ in FIG. 15. The difference between this embodiment and the first embodiment is that the split guide tube 40 is connected by a pin connection, and the top of the lower cylinder 402 is connected to the bottom of the upper cylinder 401 through the pin connection structure 405; The difference of Example 4 is that, in this embodiment, the top of the lower cylinder 402 is nested on the periphery of the bottom of the upper cylinder 401. The pin connection structure 405 is provided with a plurality of pin holes penetrating the upper cylinder 401 and the lower cylinder 402. The cylindrical pin 405a is inserted in the pin hole and fixes the upper cylinder 401 and the lower cylinder 402. As shown in Fig. 12, in this embodiment, two cylindrical pins 405a are provided in pairs. Of course, in other embodiments of the present invention, the number and layout of the cylindrical pins 405a can be flexibly changed according to actual needs. As shown in Figures 17 to 18, it is the pinning process of the upper cylinder 401 and the lower cylinder 402 in this embodiment. In Figure 17, the top of the lower cylinder 402 is provided with a plurality of through holes 405c, and the bottom of the upper cylinder 401 is provided with a plurality of blind holes 405b corresponding to the number and positions of the through holes 405c, and The top of the lower cylinder 402 may be closely nested outside the bottom of the upper cylinder 401. In FIG. 18, the bottom of the upper cylinder 401 is nested on the top of the lower cylinder 402, and the blind hole 405b communicates with the through hole 405c and forms a pin hole together. Insert the cylindrical pin 405a into the pin hole to form a stable pin connection structure 405, as shown in FIG. 15. It should be pointed out that in this embodiment, the bottom of the upper cylinder 401 is provided with the blind hole 305b. In other embodiments of the present invention, it can also be changed to a through hole, which does not affect the pin. The implementation of the connection structure 305.

In summary, the present invention provides a split diversion tube, including: an upper tube body, including upper through holes that communicate with the top and bottom of the upper tube body; There are lower through holes at the top and bottom, and the top of the lower cylinder is detachably connected to the bottom of the upper cylinder, so that the upper through hole and the lower through hole are connected to form a flow-through hole. The split diversion tube provided by the present invention introduces a detachable upper tube body and a lower tube body to replace the lower tube body with different structures for different types of semiconductor single crystals; when the lower tube body is contaminated with materials, only The lower cylinder needs to be replaced, reducing maintenance costs and time, and avoiding the problem of reducing equipment productivity due to frequent replacement of the entire deflector.

The present invention has been described using the above-mentioned embodiments, but it should be understood that the above-mentioned embodiments are only for the purpose of illustration and description, and are not intended to limit the present invention to the scope of the described embodiments. In addition, those skilled in the art can understand that the present invention is not limited to the above-mentioned embodiments, and more variations and modifications can be made according to the teachings of the present invention, and these variations and modifications fall under the protection of the present invention. Within the range. The scope of protection of the present invention is defined by the scope of the attached patent application and its equivalent scope.

001: Crucible 002: Crystal Ingot 10, 20, 30, 40: Split guide tube 101, 201, 301, 401: upper cylinder 101a: hook structure 102, 202, 302, 402: lower cylinder 103, 203: guide hole 103a, 203a: upper through hole 103b, 203b: lower through hole 104, 204: transfer trip structure 104a: buckle 104b: card slot 202a: groove 305, 405: Pin connection structure 305a, 405a: cylindrical pin 305b, 405b: blind hole 305c, 405c: through hole

The following drawings of the present invention are used here as a part of the present invention for understanding the present invention. The accompanying drawings show the embodiments of the present invention and the description thereof to explain the principle of the present invention. In the attached picture:

Figure 1 shows a schematic cross-sectional view of a split guide tube provided in the first embodiment of the present invention.

FIG. 2 shows a top view of the split guide tube provided in the first embodiment of the present invention.

Figure 3 shows a bottom view of the split guide tube provided in the first embodiment of the present invention.

4 to 6 are schematic diagrams showing the process of connecting the lower cylinder body and the upper cylinder body of the split guide tube provided in the first embodiment of the present invention through a rotary tripping structure.

FIG. 7 is a schematic diagram of the split guide tube provided in the first embodiment of the present invention during single crystal growth.

FIG. 8 is a schematic cross-sectional view of the split guide tube provided in the second embodiment of the present invention.

Fig. 9 shows a bottom view of the split guide tube provided in the second embodiment of the present invention.

FIG. 10 is a schematic diagram of the split guide tube provided in the second embodiment of the present invention during single crystal growth.

Figure 11 is a schematic cross-sectional view of the split guide tube provided in the third embodiment of the present invention.

Fig. 12 is a schematic cross-sectional view of the split guide tube provided in the third embodiment of the present invention at AA' in Fig. 11.

13 to 14 are schematic diagrams showing the process of connecting the lower cylinder body and the upper cylinder body of the split guide tube provided in the third embodiment of the present invention through a pin connection structure.

Figure 15 is a schematic cross-sectional view of the split guide tube provided in the fourth embodiment of the present invention.

Fig. 16 is a schematic cross-sectional view of the split guide tube provided in the fourth embodiment of the present invention at AA' in Fig. 15.

FIGS. 17 to 18 are schematic diagrams showing the process of connecting the lower cylinder body and the upper cylinder body of the split guide tube provided in the fourth embodiment of the present invention through a pin connection structure.

10: Split guide tube

101: Upper cylinder

101a: hook structure

102: lower cylinder

103: Guiding through holes

103a: upper through hole

103b: Lower through hole

104: Turn trip structure

104a: buckle

Claims (12)

A split diversion tube, including: The upper cylinder includes an upper through hole that connects the top and bottom of the upper cylinder; The lower cylinder includes a lower through hole that connects the top and bottom of the lower cylinder, and the top of the lower cylinder is detachably connected to the bottom of the upper cylinder, so that the upper through hole and the lower The through holes communicate with each other and together constitute a flow-through hole. The split diversion tube according to claim 1, wherein the connecting part of the top inner surface of the lower tube body and the bottom inner surface of the upper tube body is a straight curved surface. The split guide tube according to claim 1, wherein the top of the lower tube is connected to the bottom of the upper tube by a rotary tripping structure. The split diversion cylinder according to claim 1, wherein the top of the lower cylinder is connected to the bottom of the upper cylinder by a pin connection structure. The split flow guide tube according to claim 1, wherein the radial size of the flow guide hole gradually decreases from top to bottom. The split guide tube according to claim 1, wherein the height of the lower tube body occupies one quarter to one half of the height of the upper tube body. The split guide tube according to claim 1, wherein the radial dimension of the outer wall of the split guide tube gradually decreases from top to bottom. The split diversion cylinder according to claim 1, wherein the constituent material of the upper cylinder and the lower cylinder includes graphite. The split diversion cylinder according to claim 1, wherein the lower cylinder has a plurality of different lower bottom surface structures, and is optionally connected to the bottom of the upper cylinder. The split guide tube according to claim 1, wherein the lower bottom surface of the lower tube body includes a flat surface. The split flow guide tube according to claim 1, wherein a groove is formed on the lower bottom surface of the lower tube body. The split flow guide tube according to claim 11, wherein the groove includes a ring-shaped groove structure, and the center of the ring-shaped groove structure is located on the axis of the guide flow hole.

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