JP2024502870A - Flow guide tube for single crystal furnace, processing method for single crystal furnace and flow guide tube - Google Patents

Abstract

A method for processing a flow guide tube (1) for a single crystal furnace (100), a single crystal furnace (100), and a flow guide tube (1), wherein the inner contour line of the flow guide tube (1) is vertically An extending first straight line segment (11), a second straight line segment (13) whose one end is connected to the first straight line segment (11) and whose other end is inclined and extends upward, and a group of line segments (14) and the angle α≧45° between the second straight line segment (13) and the vertical direction, and the line segment group (14) includes a plurality of straight line segments connected in sequence and having different inclination angles, and the crystal rod ( 5) onto the group of line segments (14) toward the water cooling jacket (3).

Description

Cross-reference of related applications

This application has application number 202110320307. X, filed based on a Chinese patent application with a filing date of March 25, 2021, claims priority to the Chinese patent application, and the entire content of the Chinese patent application is incorporated herein by reference. be incorporated into.

The present application relates to the technical field of single crystal furnaces, and particularly relates to a flow guide tube for a single crystal furnace, a method for processing a single crystal furnace, and a flow guide tube.

When a silicon crystal grows, crystal latent heat is generated near the solid-liquid interface. Generally, a guide tube around the crystal rod is provided above the crystal, and the gas is guided along the inside of the guide tube to the pulling area near the crystal rod. This region is purged to remove the latent heat of crystallization. As the diameter of a single crystal silicon rod increases, the temperature difference between the center and the outer periphery of the crystal rod increases, which not only makes it difficult to increase the crystallization rate but also causes excessive thermal stress inside the crystal rod. This causes defects such as holes and dislocation defects inside the crystal rod, which affects the processing quality of the crystal rod.

The present application provides a flow guide tube for a single crystal furnace that can improve the processing quality of a crystal rod.

The present application further provides a single crystal furnace including the above-described flow guide tube for a single crystal furnace.

The present application further provides a method for processing a flow guide tube, and uses the processing method to process the flow guide tube for a single crystal furnace.

The guide tube for a single crystal furnace according to the embodiment of the present application includes a guide tube, a furnace body, a water cooling jacket, and a crucible, and the guide tube, water cooling jacket, and crucible are all provided in the furnace body. a crystal rod is formed in the crucible, the flow guide tube and the water cooling jacket are both disposed around the crystal rod, and the water cooling jacket is located above the flow guide tube, and the water cooling jacket is located above the flow guide tube, The plane on which the axial cross section of the rod is located is defined as a reference plane, the guide tube is cut at the reference plane to form a cut plane, and the inner contour line located on the crystal rod side of the cut plane is vertical. a first straight line segment extending in the direction, one end of which is adjacent to the liquid level of the crucible is spaced apart from the liquid level; and one end of the first straight line segment is separated from the crucible. a second straight line connected to one end of the crystal rod, the other end of which extends upward while being inclined in a direction away from the crystal rod, the angle formed with the vertical direction being α, and α≧45°; and a plurality of straight line segments connected in order and having different inclination angles, one end of which is connected to the other end of the second straight line segment, and the other end is inclined in a direction away from the crystal rod. A group of line segments extending upward, the heat transferred from the crystal rod to the group of line segments is transferred toward the water cooling jacket, and the heat is transferred reversely to the crystal rod using the water cooling jacket. a group of line segments configured to prevent

According to the flow guide tube for a single crystal furnace according to the embodiment of the present application, by setting the second straight line segment, when the heat on the crystal rod is incident on the second straight line segment along the radial direction of the crystal rod, the second straight line segment is set. Since the angle between the two straight lines and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle, the second straight line is The angle between the heat reflected by the straight line and the incident heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod or in a direction away from the outer wall surface of the crystal rod. It is possible to avoid being turned back into a crystal rod. By setting a group of line segments, the heat transferred from the crystal rod to the group of line segments can be reflected by the group of line segments and then transferred to the water cooling jacket. prevent it from being transmitted to Therefore, the cooling of the crystal rod can be accelerated, which is advantageous in reducing the thermal stress inside the crystal rod, and the generation of holes and dislocation defects inside the crystal rod can be avoided, which improves the production quality of the crystal rod. can be improved.

In some embodiments of the present application, in the radial direction of the crystal rod, one end of the second straight line separating from the crystal rod is flush with the outer edge of the water cooling jacket, or the outer edge of the water cooling jacket located outside of.

In some embodiments of the present application, the α satisfies 50°≧α≧45°.

In some embodiments of the present application, both ends of the straight line segment are defined as end A and end B, respectively, the orthographic projection of end A onto the crystal rod is defined as C, and the radial direction of the water cooling jacket is defined as end A and end B, respectively. If the outer edge is defined as D and the inner edge in the radial direction of the water cooling jacket is defined as E, line segment AB is perpendicular to the angle bisector of ∠EAC, and line segment AE is set parallel to line segment BD. The A end is one end of the straight line adjacent to the crystal rod.

In some embodiments of the present application, the number of straight line segments included in the group of line segments is X, and satisfies 30≧X≧10.

In some embodiments of the present application, in the axial direction of the crystal rod, the distance between one end of the first straight line adjacent to the liquid surface and the liquid surface is L, and satisfies 50 mm≧L≧20 mm. .

In some embodiments of the present application, the distance between the bottom surface of the flow guide tube and the liquid level gradually decreases from the inside to the outside in the radial direction of the furnace body, and the distance between the bottom surface of the flow guide tube and the liquid surface gradually decreases. The angle formed with the liquid level is β, and satisfies 8°≧β≧1°.

In some embodiments of the present application, the liquid level forms a first arc surface with the inner peripheral wall of the crucible, and the connection point between the bottom wall of the flow guide tube and the outer peripheral wall of the flow guide tube is the A second arc surface is formed parallel to the first arc surface.

In some embodiments of the present application, the liquid level forms a third arc surface with the outer circumferential wall of the crystal rod, and the connection point between the bottom wall of the guide tube and the inner circumferential wall of the guide tube is A fourth arc surface is formed parallel to the third arc surface.

According to the single crystal furnace of the embodiment of the present application, a furnace body, a crucible provided in the furnace body and having a storage space in which a crystal rod is formed, a water cooling jacket, and the single crystal furnace The flow guide tube and the water cooling jacket are both provided within the furnace body, and the water cooling jacket is located above the flow guide tube.

According to the single crystal furnace of the embodiment of the present application, by setting the second straight line segment, when the heat on the crystal rod is incident on the second straight line segment along the radial direction of the crystal rod, the second straight line segment and the perpendicular Since the angle with the direction is 45° or more, the incident angle of the heat in this part to the second straight line segment is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle, it is reflected at the second straight line segment. The angle between the generated heat and the incident heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod or in a direction away from the outer wall surface of the crystal rod. It is possible to avoid being turned back into a crystal rod. By setting a group of line segments, the heat transferred from the crystal rod to the group of line segments can be reflected by the group of line segments and then transferred to the water cooling jacket. prevent it from being transmitted to Therefore, the cooling of the crystal rod can be accelerated, which is advantageous in reducing the thermal stress inside the crystal rod, and the generation of holes and dislocation defects inside the crystal rod can be avoided, which improves the production quality of the crystal rod. can be improved.

In some embodiments of the present application, the water cooling jacket is provided around the crystal rod and includes a first connecting portion extending in the axial direction of the crystal rod, and a first connecting portion adjacent to the liquid surface of the first connecting portion. a second connecting part connected to one end and extending in the radial direction of the crystal rod.

In some embodiments of the present application, a surface of the second connecting portion adjacent to the liquid surface is formed into a first curved surface that is concave toward the first connecting portion.

In some embodiments of the present application, a surface of the second connecting portion adjacent to the crystal rod is formed into a second curved surface that is concave in a direction away from the crystal rod.

According to the method for processing a flow guide tube according to the embodiment of the present application, the flow guide tube is the flow guide tube for a single crystal furnace, and the group of line segments is formed from a plurality of straight line segments connected in order and having different inclination angles. including a straight line segment N, the outer edge in the radial direction of the water cooling jacket is defined as D, and the inner edge in the radial direction of the water cooling jacket is defined as E, the step of processing the first straight line segment, and the second straight line segment. The starting point of the second straight line is the upper end point of the first straight line, the end point of the second straight line is a point A1, and the A1 point is a point D of the water cooling jacket. and the step of becoming flush with the radial direction of the crystal rod;
Processing the straight line segment, the starting point of the straight line segment is A1, the end point of the straight line segment is B1, and the orthographic projection of the A1 point onto the crystal rod is C1 point. The first reference line is to create a first reference line that is perpendicular to the angle bisector of ∠EA1C1 and diagonally upward, starting from the point A1, and to translate EA1 to the position of the D point to create the first reference line. forming an intersection point B1 with the straight line, and making A1B1 the straight line segment;
The step of processing the straight line segment 2, the starting point of the straight line segment 2 is A2, which overlaps the B1 point of the straight line segment 1, the end point of the straight line segment 2 is B2, and the point of the A2 point is The orthogonal projection onto the crystal rod is point C2, and starting from point A2, create a second reference line that is perpendicular to the angle bisector of ∠EA2C2 and pointing obliquely upward, and point EA2 to point D. translating to a position to form an intersection B2 with the second reference line, and making A2B2 the straight line segment;
The step of processing the straight line segment 3, the starting point of the straight line segment 3 is A3, which overlaps the B2 point of the straight line segment 2, the end point of the straight line segment 3 is B3, and the point of the straight line segment 3 is The orthographic projection onto the crystal rod is point C3, and starting from point A3, create a third reference line that is perpendicular to the angle bisector of ∠EA3C3 and pointing obliquely upward, and EA3 is set as point D. translating to a position to form an intersection B3 with the third reference line, and making A3B3 the straight line segment 3;
In this way, the last step is to process the straight line segment N, the starting point of the straight line segment N is An, the ending point of the straight line segment N is Bn, and the process is carried out on the crystal rod at the point An. The orthogonal projection of is point Cn, and starting from the point An, create an Nth reference line perpendicular to the angle bisector of ∠EAnCn and pointing diagonally upward, and translate EAn to the position of point D. forming an intersection point Bn with the Nth reference line, and setting AnBn to the straight line segment N. Here, the N satisfies N>3.

According to the method for processing a flow guide tube according to the embodiment of the present application, by setting the second straight line segment, when the heat on the crystal rod is incident on the second straight line segment along the radial direction of the crystal rod, the second straight line segment is set. Since the angle between the straight line and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle, the second straight line The angle between the reflected heat and the incident heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod or in a direction away from the outer wall surface of the crystal rod. It is possible to avoid being turned back into a crystal rod. By setting a group of line segments, the heat transferred from the crystal rod to the group of line segments can be reflected by the group of line segments and then transferred to the water cooling jacket. prevent it from being transmitted to Therefore, the cooling of the crystal rod can be accelerated, which is advantageous in reducing the thermal stress inside the crystal rod, and the generation of holes and dislocation defects inside the crystal rod can be avoided, which improves the production quality of the crystal rod. can be improved.

Additional aspects and advantages of the present application will be set forth in part in the following description, and in part will be apparent from the description or may be learned from practice of the application.

1 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present application. 1 is a partial structural schematic diagram of a single crystal furnace according to an embodiment of the present application. It is an enlarged view of M in FIG. 2. 1 is a partial structural schematic diagram of a single crystal furnace according to an embodiment of the present application. 1 is a partial structural schematic diagram of a single crystal furnace according to an embodiment of the present application.

Single crystal furnace 100,
Flow guide tube 1, first straight line segment 11, second straight line segment 13,
Line segment group 14, line segment 1 141, line segment 2 142, line segment 3 143, line segment 4 144, line segment 5 145,
second arc surface 15, fourth arc surface 16,
Furnace body 2, water cooling jacket 3, first connecting part 31, second connecting part 32,
A first curved surface 321, a second curved surface 322, a third curved surface 323,
Crucible 4, first arc surface 41, third arc surface 42,
Crystal rod 5.

Hereinafter, the embodiments of the present application will be described in detail, and examples of the embodiments are shown in the accompanying drawings, and the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. show. The examples described below with reference to the drawings are illustrative and are intended to be used to illustrate the present application and should not be construed as limiting the present application.

The following disclosure provides a number of different implementations or examples for implementing different configurations of the present application. Hereinafter, specific example components and settings will be described to simplify the disclosure of the present application. Of course, these are merely examples and do not limit the present application. Note that this application may repeat references to numbers and/or alphabets in different instances. Such repetition is for simplicity and clarity and does not itself indicate a relationship between the various embodiments and/or settings discussed. It should be noted that although this application provides examples of various specific processes and materials, those skilled in the art will recognize the applicability of other processes and/or the use of other materials.

Hereinafter, a guide tube 1 for a single crystal furnace 100 according to an embodiment of the present application will be described with reference to the drawings, and the single crystal furnace 100 includes a guide tube 1, a furnace body 2, a water cooling jacket 3, and a crucible 4. The guide tube 1, the water cooling jacket 3, and the crucible 4 are all provided in the furnace body 2, and the crystal rod 5 is formed in the crucible 4. The water cooling jacket 3 is disposed around the rod 5 and is located above the flow guide tube 1.

For example, in one example of the present application, the crucible 4 has a storage space, a silicon raw material for heating and melting is placed in the storage space, a heater for heating the crucible 4 is provided in the furnace body 2, and the heater heats the crucible 4. The silicon raw material in the storage space can be melted into silicon liquid. Furnace body 2 is further provided with a flow guide tube 1 and an argon gas pipe, and the argon gas tube passes through the top of the furnace body 2 and enters the furnace body 2. The argon gas passes through the formed path and promotes the growth of crystal rods. A water cooling jacket 3 is further provided within the furnace body 2 . The water cooling jacket 3 is disposed around the crystal rod 5 and is located above the flow guide tube 1, and is configured to absorb heat radiated outward from the crystal rod 5 and transmit it to the outside. The heat dissipation efficiency of the crystal rod 5 is improved.

As shown in FIGS. 1 and 2, the plane on which the axial cross section of the crystal rod 5 is located is defined as a reference plane, and the guide tube 1 is cut at the reference plane to form a cut plane, and the crystal rod 5 at the cut plane The inner contour line located on the side includes a first straight line segment 11, a second straight line segment 13, and a line segment group 14.

Specifically, as shown in FIG. 1, the first straight line segment 11 extends in the vertical direction, and one end of the first straight line segment 11 adjacent to the liquid level of the crucible 4 is spaced apart from the liquid level. . As a result, an air flow path for argon can be formed between the bottom end of the first straight line segment 11 and the surface of the silicone liquid, and since the first straight line segment 11 is a straight line segment having a certain distance, , the region close to the liquid surface can maintain a stable temperature gradient, which is advantageous for the growth of crystal rods. Note that the length of the first straight line segment 11 should be equal to or greater than the height of the shoulder ring regarding the growth diameter of the crystal rod 5. For example, in some embodiments of the present application, when an 8-inch crystal rod is grown, the length of the shoulder ring will be about 90 mm, but the length of the first straight line segment 11 should be more than 90 mm. , 12 inch crystal rod is grown, the length of its shoulder ring is about 160 mm, but the length of the first straight line segment 11 should be 160 mm or more.

As shown in FIGS. 2 and 3, one end of the second straight line segment 13 is connected to one end of the first straight line segment 11 that is away from the crucible 4, and the other end is inclined upward in a direction that is away from the crystal rod 5. The angle between the second straight line segment 13 and the vertical direction is α (α shown in FIG. 3), and α≧45° is satisfied. By setting the second straight line segment 13, when the heat on the crystal rod 5 is incident on the second straight line segment 13 along the radial direction of the crystal rod 5, the angle between the second straight line segment 13 and the vertical direction is Since the angle of incidence is 45° or more, the incident angle of the heat in this part to the second straight line segment 13 is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle, the heat reflected by the second straight line segment 13 and the incident The angle formed with the heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

Specifically, in some embodiments of the present application, the angle between the second straight line segment 13 and the vertical direction may be 45°, 48°, 50°, 55°, 60°, etc. Specifically, the angle between the second straight line segment 13 and the vertical direction can be selected and set depending on the model number and size of the single crystal furnace 100.

For example, in one example of the present application, the angle between the second straight line segment 13 and the vertical direction is 45°, and the heat on the crystal rod 5 is incident on the second straight line segment 13 along the radial direction of the crystal rod 5. At this time, the incident angle of heat formed on the second straight line segment 13 is 45°, and according to the principle that the reflection angle is equal to the incident angle, the reflection angle is also 45°, and the second straight line segment 13 is inclined upward. Since the reflected heat is set vertically upward, that is, the reflected heat is transmitted along a direction parallel to the outer wall surface of the crystal rod 5, and the heat of this part is reflected to the crystal rod. 5 can be avoided.

Further, for example, in another example of the present application, the angle between the second straight line segment 13 and the vertical direction is 60°, and the heat on the crystal rod 5 is transferred to the second straight line segment along the radial direction of the crystal rod 5. 13, the incident angle formed on the second straight line segment 13 is 60°, and according to the principle that the reflection angle is equal to the incident angle, the reflection angle is also 60°, and the second straight line segment 13 is Since it is set to be inclined upward, the reflected heat is inclined upward and is transmitted in a direction away from the crystal rod 5, that is, the reflected heat is transmitted upward along the direction away from the crystal rod 5. It is possible to prevent the heat from being transmitted obliquely and being reflected back to the crystal rod 5 in this portion.

As shown in FIGS. 2 and 3, the line segment group 14 includes a plurality of straight lines connected in order and having different inclination angles, one end of which is connected to the other end of the second straight line segment 13, and the other end is a crystal rod. 5 and extends upwardly. As can be understood, the line segment group 14 includes a plurality of straight line segments connected in sequence, and each straight line segment extends upward while being inclined in a direction away from the crystal rod 5. For example, the line segment group 14 includes five straight line segments, the first straight line segment is connected to the second straight line segment 13, the second straight line segment is connected to the first straight line segment, and the third straight line segment is connected to the second straight line segment 13. The straight line segment of the book is connected to the second straight line segment, the fourth straight line segment is connected to the third straight line segment, and the fifth straight line segment is connected to the fourth straight line segment.

As shown in FIGS. 1 to 3, the line segment group 14 is configured to transfer the heat transferred from the crystal rod 5 to the line segment group 14 toward the water cooling jacket 3, and the heat is transferred using the water cooling jacket 3. On the contrary, it is prevented from being transmitted to the crystal rod 5. As can be seen, the heat transferred from the crystal rod 5 to the group of line segments 14 is reflected by the group of line segments 14 and then transferred to the water cooling jacket 3, and the heat is transferred back to the crystal rod 5 using the water cooling jacket 3. transmission can be prevented. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved. In addition, by setting the second straight line segment 13 and the line segment group 14, cooling of the crystal rod 5 can be accelerated, so that the time during the heat dissipation stage of the crystal rod 5 in the manufacturing process can be shortened, and the crystal rod 5 can be cooled quickly. The production efficiency of the rod 5 can be increased.

According to the flow guide tube 1 for the single crystal furnace 100 of the embodiment of the present application, by setting the second straight line segment 13, the heat on the crystal rod 5 is transferred to the second straight line segment 13 along the radial direction of the crystal rod 5. Since the angle between the second straight line segment 13 and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line segment 13 is also 45° or more, and the reflection angle is According to the principle of angle equality, the angle between the heat reflected by the second straight line segment 13 and the incident heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Note that by setting the line segment group 14, the heat transferred from the crystal rod 5 to the line segment group 14 can be transferred to the water cooling jacket 3 after being reflected by the line segment group 14. This prevents heat from being reversely transferred to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

In some embodiments of the present application, as shown in FIGS. 1 to 3, one end of the second straight line segment 13 that is separated from the crystal rod 5 is flush with the outer edge of the water cooling jacket 3 in the radial direction of the crystal rod 5. or located outside the outer edge of the water cooling jacket 3. In other words, in the radial direction of the crystal rod 5, one end of the second straight line segment 13 that is separated from the crystal rod 5 (i.e., the upper end of the second straight line segment 13) may be flush with the outer edge of the water cooling jacket 3. Alternatively, in the radial direction of the crystal rod 5, one end of the second straight line segment 13 that is separated from the crystal rod 5 is located outside the outer edge of the water cooling jacket 3. Thereby, the heat reflected by the second straight line segment 13 can be reflected to the outer edge of the water cooling jacket 3 or to the outside of the water cooling jacket 3. For example, in one specific example of the present application, in the radial direction of the crystal rod 5, one end of the second straight line segment 13 that is separated from the crystal rod 5 is flush with the outer edge of the water cooling jacket 3.

In some embodiments of the present application, α satisfies 50°≧α≧45°, as shown in FIGS. 1-3. As can be understood, by setting the angle between the second straight line segment 13 and the vertical direction between 45° and 50°, the second straight line segment The radius of the upper end of the flow guide tube 13 can be reduced, thereby reducing the size of the flow guide tube 1 and the space occupied by the flow guide tube 1. For example, in some examples of the present application, the angle between the second straight line segment 13 and the vertical direction may be 45°, 46°, 47°, 48°, 49°, or 50°.

In some embodiments of the present application, both ends of the straight line segment are defined as end A and end B, respectively, the orthographic projection of end A onto crystal rod 5 is defined as C, and the outer edge of the water cooling jacket 3 in the radial direction is defined as D. When the inner edge of the water cooling jacket 3 in the radial direction is defined as E, the line segment AE is set to be perpendicular to the angle bisector of the line segment AB and ∠EAC, and the line segment AE is parallel to the line segment BD. Here, the A end is one end adjacent to the crystal rod 5 of the straight line.

As can be understood, each straight line segment in the line segment group 14 satisfies the above-mentioned situation, and due to the above settings, the heat incident on the straight line segment from the crystal rod 5 passes through the reflection of the straight line segment and is transferred to the water cooling jacket. 3 can be reflected to E of the inner edge of the crystal rod 5, so that the water cooling jacket 3 can be used to realize the prevention of heat and effectively prevent the heat from returning to the crystal rod 5.

For example, regarding the heat at point C of the crystal rod 5, the heat of this portion can be transferred to the A end of the straight line, and after being reflected at the A end, it can be transferred to the E point of the water cooling jacket 3. That is, since CA is considered to be the incident path of heat in this part, the normal to the incident surface AB is the angle bisector of ∠EAC. Therefore, the transmission path reflected by the line segment is AE, and the reflected heat is transmitted to the inner edge of the water cooling jacket 3, so it is possible to effectively prevent the heat from returning to the crystal rod 5. Since each straight line segment has the same characteristics, the heat reflected by each straight line segment is transferred to the inner edge E of the water cooling jacket 3.

Specifically, in one specific example of the present application, the second straight line segment 13 and the straight line segment 1 141 of the line segment group 14, the straight line segment 2 142, the straight line segment 3 143, the straight line segment 4 144, ..., straight line The processing process for N is as follows.

1st step: Machining the second straight line segment 13, the starting point of the second straight line segment 13 is the upper end point of the first straight line segment 11, the end point of the second straight line segment 13 is the A1 point, and the A1 point is the water cooling jacket The point D of No. 3 is flush with the crystal rod 5 in the radial direction. Here, the second straight line segment 13 extends diagonally outward along the direction of the inclination angle of 45°.

Second step: Process the straight line segment 141. The starting point of the straight line segment 141 is A1, the end point is B1, and the orthographic projection of the A1 point onto the crystal rod 5 is the C1 point. Specifically, first find the angle bisector of ∠EA1C1, use point A1 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA1C1 and face diagonally upward, and then move EA1 to point D. Translate to the position to form an intersection B1 with the wall surface, and make A1B1 a straight line segment 141.

3rd step: Process the straight line segment 2 142, the starting point of the straight line segment 2 142 is A2, which overlaps the B1 point in the straight line segment 141, the end point of the straight line segment 2 142 is B2, and the crystal of the A2 point The orthographic projection onto rod 5 is point C2. Specifically, first find the angle bisector of ∠EA2C2, use point A2 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA2C2 and face diagonally upward, and then move EA2 to point D. Translate to the position to form an intersection B2 with the wall surface, and make A2B2 a straight line segment 2142.

Fourth step: Process the straight line segment 3 143, the starting point of the straight line segment 3 143 is A3, which overlaps the B2 point in the straight line segment 2 142, the end point of the straight line segment 3 143 is B3, and the crystal of the A3 point The orthographic projection onto rod 5 is point C3. Specifically, first find the angle bisector of ∠EA3C3, use point A3 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA3C3 and face diagonally upward, and then move EA3 to point D. Translate to the position to form an intersection B3 with the wall surface, and make A3B3 a straight line segment 3143.

Fifth step: Process the straight line segment 4 144, the starting point of the straight line segment 4 144 is A4, which overlaps the B3 point in the straight line segment 3 143, the end point of the straight line segment 4 144 is B4, and the crystal of the A4 point The orthographic projection onto rod 5 is point C4. Specifically, first find the angle bisector of ∠EA4C4, use point A4 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA4C4 and face diagonally upward, and then move EA4 to point D. Translate to the position to form an intersection B4 with the wall surface, and make A4B4 a straight line segment 4144.

6th step: Process the straight line segment 5 145, the starting point of the straight line segment 5 145 is A5 which overlaps the B4 point in the straight line segment 4 144, the end point of the straight line segment 5 145 is B5, and the crystal of the A5 point The orthographic projection onto rod 5 is point C5. Specifically, first find the angle bisector of ∠EA5C5, use point A5 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA5C5 and face diagonally upward, and then move EA5 to point D. Translate to the position to form an intersection B5 with the wall surface, and make A5B5 a straight line segment 5145.

7th step: Process the straight line segment 6, the starting point of the straight line segment 6 is A6 which overlaps with the B5 point in the straight line segment 5 145, the end point of the straight line segment 6 is B6, and the point on the crystal rod 5 of the A6 point The orthographic projection onto is point C6. Specifically, first find the angle bisector of ∠EA6C6, use point A6 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA6C6 and face diagonally upward, and then move EA6 to point D. Translate to the position to form an intersection B6 with the wall surface, and make A6B6 a straight line.

As described above, assuming that the line segment group 14 includes 24 straight lines, the processing steps for the 24 straight lines are as follows.

The starting point of straight line segment 24 is A24, which overlaps point B23 in straight line segment 23, the end point of straight line segment 24 is B24, and the orthographic projection of point A24 onto crystal rod 5 is C24. It is a point. Specifically, first find the angle bisector of ∠EA24C24, use point A24 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA24C24 and face diagonally upward, and then move EA24 to point D. Translate to the position to form an intersection B24 with the wall surface, and make A24B24 a straight line segment 24.

In some embodiments of the present application, as shown in FIGS. 1 to 3, the number of straight line segments included in the line segment group 14 is X, and satisfies 30≧X≧10. As can be understood, the number of straight line segments is related to the size of the guide tube 1, the relative position of the guide tube 1 and the water cooling jacket 3, and the relative position of the guide tube 1 and the crystal rod 5. As a matter of fact, by setting the number of straight line segments between 10 and 30, the number requirements in many cases can be met, and the needs of users can be better met. For example, in one example of the present application, the number of straight lines included in the line segment group 14 is 10, 12, 14, 16, 18, 20, 22, 24, 26, 28, or There are 30 pieces.

In some embodiments of the present application, as shown in FIGS. 1 and 4, in the axial direction of the crystal rod 5, the distance between one end of the first straight line segment 11 adjacent to the liquid surface and the liquid surface is L (FIG. L) shown in and satisfies 50mm≧L≧20mm. As can be understood, the problem that the seed crystal is likely to break when shouldering can be solved by setting the distance between one end of the first straight line segment 11 adjacent to the liquid level and the liquid level between 20 and 50 mm. , it is possible to ensure that the temperature gradient at the position of this part does not change and that the airflow does not change much, so the problem of wire breakage can be avoided.

For example, in one example of the present application, the processing process of the crystal rod 5 is as follows. A high-purity polycrystalline silicon raw material is placed in the crucible 4 of the single crystal furnace 100 and heated and melted under the protection of a low vacuum flowing inert gas to produce one single crystal silicon (also called a seed crystal) with a specific growth direction. Place the seed crystal in the seed crystal gripping device, bring the seed crystal into contact with the silicon solution, and adjust the temperature of the molten silicon solution to approach the melting point temperature. When the seed crystal is gradually pulled up, the seed crystal enters the growth of the cone, and when the diameter of the cone approaches the target diameter, the seed crystal is pulled up to prevent the diameter of the single crystal silicon from increasing further. The pulling speed of the seed crystal is increased and the crystal enters the middle growth stage, and when the growth of single crystal silicon approaches the end, the pulling speed of the seed crystal is increased again and the single crystal silicon gradually separates from the molten silicon and forms the lower cone. form and finish growing.

Specifically, in some examples of the present application, the distance between one end of the first straight line segment 11 adjacent to the liquid surface and the liquid surface in the axial direction of the crystal rod 5 is 20 mm, 25 mm, 30 mm, 35 mm, 40 mm. , 45mm, or 50mm.

In some embodiments of the present application, as shown in FIGS. 1 and 4, the distance between the bottom surface of the flow guide tube 1 and the liquid level gradually decreases from the inside to the outside in the radial direction of the furnace body 2. , and the angle between the bottom surface of the flow guiding tube 1 and the liquid level is β (β shown in FIG. 4), and satisfies 8°≧β≧1°. As can be understood, the temperature of the free liquid surface of the silicon liquid gradually increases as the distance from the crucible 4 wall becomes smaller, and as the temperature difference increases, the temperature of the free liquid surface increases as well. and accelerates the transport of oxygen from the inner wall of the crucible 4 to the solid-liquid interface, which affects the production quality of the crystal rod 5. In the present application, the distance between the bottom surface of the flow guide tube 1 and the liquid level is gradually reduced from the inside to the outside in the radial direction of the furnace body 2, so that the argon gas can be brought between the bottom surface of the flow guide tube 1 and the liquid surface. As it flows through the passages between the crucibles, the flow rate of the argon gas is gradually increased, thereby lowering the temperature near the crucible 4 wall and weakening heat convection and oxygen transport.

In some embodiments of the present application, as shown in FIG. The connection point with the first arc surface 41 forms a second arc surface 15 that is set parallel to the first arc surface 41 . As can be understood, by setting the second arc surface 15 parallel to the first arc surface 41 at the connection point between the bottom wall of the flow guide tube 1 and the outer peripheral wall of the flow guide tube 1, the flow of argon gas can be controlled. The resistance can be reduced, thereby increasing the flow rate of argon gas and weakening heat convection and oxygen transport.

In some embodiments of the present application, as shown in FIG. The connection point with the peripheral wall forms a fourth arc surface 16 that is set parallel to the third arc surface 42 . As can be understood, by setting the fourth arc surface 16 parallel to the third arc surface 42 at the connection point between the bottom wall of the flow guide tube 1 and the inner peripheral wall of the flow guide tube 1, the flow of argon gas can be controlled. The resistance can be reduced, thereby increasing the flow rate of argon gas and scavenging more oxygen.

Hereinafter, a single crystal furnace 100 according to an embodiment of the present application will be described with reference to the drawings.

As shown in FIG. 1, a single crystal furnace 100 according to an embodiment of the present application includes a furnace body 2, a crucible 4, a water cooling jacket 3, and a flow guide tube 1, the crucible 4 is provided inside the furnace body 2, and the crucible 4 is housed in a housing. The crystal rod 5 is formed in the storage space, and the flow guide tube 1 and the water cooling jacket 3 are both provided inside the furnace body 2, and the water cooling jacket 3 is provided above the flow guide tube 1. To position.

According to the single crystal furnace 100 according to the embodiment of the present application, by setting the second straight line segment 13, when the heat on the crystal rod 5 enters the second straight line segment 13 along the radial direction of the crystal rod 5, Since the angle between the second straight line segment 13 and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line segment 13 is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle. , the angle between the heat reflected by the second straight line segment 13 and the incident heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Note that by setting the line segment group 14, the heat transferred from the crystal rod 5 to the line segment group 14 can be transferred to the water cooling jacket 3 after being reflected by the line segment group 14. This prevents heat from being reversely transferred to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

In some embodiments of the present application, as shown in FIG. The second connecting part 32 extends in the axial direction of the crystal rod 5, and is connected to one end of the first connecting part 31 adjacent to the liquid surface, and also extends in the radial direction of the crystal rod 5. As can be understood, the horizontal cut surface of the water cooling jacket 3 located on the crystal rod 5 side is formed into an inverted T-shape, and with the above design, the width of the lower edge of the water cooling jacket 3 can be increased, and the water cooling jacket More heat can be blocked by the lower edge of No. 3.

In some embodiments of the present application, as shown in FIG. 5, the surface of the second connecting portion 32 adjacent to the liquid level is formed into a first curved surface 321 that is concave toward the first connecting portion 31. As can be understood, the bottom surface of the second connecting part 32 is set to be a curved surface that is concave toward the first connecting part 31, and since the curved surface has an advantage of having a larger area than a flat surface, it can block and block more reflected heat. The heat dissipation efficiency of the crystal rod 5 can be further improved.

In some embodiments of the present application, as shown in FIG. 5, the surface of the second connecting portion 32 adjacent to the crystal rod 5 is formed into a second curved surface 322 that is concave in a direction away from the crystal rod 5. be done. As can be understood, the surface of the second connecting portion 32 adjacent to the crystal rod 5 is set as a curved surface that is concave in the direction away from the crystal rod 5, and the curved surface has the advantage that it has a larger area than a flat surface. As a result, more heat can be radiated from the crystal rod 5 to the second curved surface 322, and more heat can be absorbed using the water cooling jacket 3, further improving the heat dissipation efficiency of the crystal rod 5. can be done. Specifically, in another example of the present application, the surface of the second connecting portion 32 on the side away from the crystal rod 5 is formed into a third curved surface 323 that is concave toward the crystal rod 5. Of course, the present application is not limited to this, and the surface of the second connecting portion 32 on the side away from the crystal rod 5 may be a flat surface.

Hereinafter, a method of machining the flow guide tube 1 according to an embodiment of the present application will be described with reference to the drawings.

According to the method for processing the flow guide tube 1 according to the embodiment of the present application, the flow guide tube 1 is the flow guide tube 1 for the single crystal furnace 100 described above. Here, the line segment group 14 includes a plurality of straight line segments from straight line segment 141 to straight line segment N that are connected in order and have different inclination angles, the outer edge of the water cooling jacket 3 in the radial direction is defined as D, and the outer edge of the water cooling jacket 3 in the radial direction is defined as D. If the inner edge in the radial direction is defined as E, the method of machining the flow guiding tube 1 includes the steps of machining the first straight line segment 11 and the step of machining the second straight line segment 13, the starting point of the second straight line segment 13 being is the upper end point of the first straight line segment 11, the end point of the second straight line segment 13 is point A1, and point A1 is flush with point D of the water cooling jacket 3 in the radial direction of the crystal rod 5;
In the step of processing the straight line segment 141, the starting point of the straight line segment 141 is A1, the end point of the straight line segment 141 is B1, and the orthographic projection of the A1 point onto the crystal rod 5 is the C1 point. , starting from point A1, create a first reference line that is perpendicular to the angle bisector of ∠EA1C1 and pointing diagonally upward, and translate EA1 to the position of point D to intersect with the first reference line B1. and forming A1B1 into a straight line segment 141;
In the step of processing the straight line segment 2 142, the starting point of the straight line segment 2 142 is A2, which overlaps the B1 point of the straight line segment 141, the end point of the straight line segment 2 142 is B2, and the crystal rod at the A2 point is The orthographic projection onto 5 is point C2, starting from point A2, creating a second reference line perpendicular to the angle bisector of ∠EA2C2 and pointing diagonally upward, and moving EA2 to the position of point D. translating to form an intersection point B2 with a second reference line, making A2B2 a straight line segment 2 142;
The step of processing the straight line segment 3 143, the starting point of the straight line segment 3 143 is A3, which overlaps the B2 point of the straight line segment 2 142, the end point of the straight line segment 3 143 is B3, and the crystal rod at the A3 point The orthographic projection onto 5 is point C3, and starting from point A3, create a third reference line that is perpendicular to the angle bisector of ∠EA3C3 and diagonally upward, and move EA3 to the position of point D. translating to form an intersection B3 with a third reference line, making A3B3 a straight line;
In this way, the final step is to process the straight line segment N, the starting point of the straight line segment N is An, the ending point of the straight line segment N is Bn, and the orthographic projection of the An point onto the crystal rod is Cn. Starting from point An, create an Nth reference line that is perpendicular to the angle bisector of ∠EAnCn and pointing diagonally upward, and translate EAn to the position of point D to create the Nth reference line. forming an intersection point Bn of and making AnBn a straight line segment N. Here, N satisfies N>3.

For example, in one specific embodiment of the present application, the method for manufacturing the flow guide tube 1 includes the following steps.

First step: Processing the first straight line segment 11, the first straight line segment 11 extends in the vertical direction, and one end of the first straight line segment 11 adjacent to the liquid level of the crucible 4 is spaced apart from the liquid level. There is.

Second step: Machining the second straight line segment 13, the starting point of the second straight line segment 13 is the upper end point of the first straight line segment 11, the end point of the second straight line segment 13 is point A1, and point A1 is water-cooled. Point D of the jacket 3 is flush with the crystal rod 5 in the radial direction. Here, the second straight line segment 13 extends diagonally outward along the direction of the inclination angle of 45°.

Third step: Process the straight line segment 141. The starting point of the straight line segment 141 is A1, the end point is B1, and the orthographic projection of the A1 point onto the crystal rod 5 is the C1 point. Specifically, first find the angle bisector of ∠EA1C1, use point A1 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA1C1 and face diagonally upward, and then move EA1 to point D. Translate to the position to form an intersection B1 with the wall surface, and make A1B1 a straight line segment 141.

Fourth step: Process the straight line segment 2 142, the starting point of the straight line segment 2 142 is A2, which overlaps the B1 point in the straight line segment 141, the end point of the straight line segment 2 142 is B2, and the crystal of the A2 point The orthographic projection onto rod 5 is point C2. Specifically, first find the angle bisector of ∠EA2C2, use point A2 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA2C2 and face diagonally upward, and then move EA2 to point D. Translate to the position to form an intersection B2 with the wall surface, and make A2B2 a straight line segment 2142.

Fifth step: Process the straight line segment 3 143, the starting point of the straight line segment 3 143 is A3, which overlaps the B2 point in the straight line segment 2 142, the end point of the straight line segment 3 143 is B3, and the crystal of the A3 point The orthographic projection onto rod 5 is point C3. Specifically, first find the angle bisector of ∠EA3C3, use point A3 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA3C3 and face diagonally upward, and then move EA3 to point D. Translate to the position to form an intersection B3 with the wall surface, and make A3B3 a straight line segment 3143.

6th step: Process the straight line segment 4 144, the starting point of the straight line segment 4 144 is A4, which overlaps the B3 point in the straight line segment 3 143, the end point of the straight line segment 4 144 is B4, and the crystal of the A4 point The orthographic projection onto rod 5 is point C4. Specifically, first find the angle bisector of ∠EA4C4, use point A4 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA4C4 and face diagonally upward, and then move EA4 to point D. Translate to the position to form an intersection B4 with the wall surface, and make A4B4 a straight line segment 4144.

7th step: Process the straight line segment 5 145, the starting point of the straight line segment 5 145 is A5 which overlaps the B4 point in the straight line segment 4 144, the end point of the straight line segment 5 145 is B5, and the crystal of the A5 point The orthographic projection onto rod 5 is point C5. Specifically, first find the angle bisector of ∠EA5C5, use point A5 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA5C5 and face diagonally upward, and then move EA5 to point D. Translate to the position to form an intersection B5 with the wall surface, and make A5B5 a straight line segment 5145.

8th step: Process the straight line segment 6, the starting point of the straight line segment 6 is A6 which overlaps with the B5 point in the straight line segment 5 145, the end point of the straight line segment 6 is B6, and the point on the crystal rod 5 of the A6 point The orthographic projection onto is point C6. Specifically, first find the angle bisector of ∠EA6C6, use point A6 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA6C6 and face diagonally upward, and then move EA6 to point D. Translate to the position to form an intersection B6 with the wall surface, and make A6B6 a straight line.

As described above, assuming that the line segment group 14 includes 24 straight lines, the processing steps for the 24 straight lines are as follows.

The starting point of straight line segment 24 is A24, which overlaps point B23 in straight line segment 23, the end point of straight line segment 24 is B24, and the orthographic projection of point A24 onto crystal rod 5 is C24. It is a point. Specifically, first find the angle bisector of ∠EA24C24, use point A24 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA24C24 and face diagonally upward, and then move EA24 to point D. Translate to the position to form an intersection B24 with the wall surface, and make A24B24 a straight line segment 24.

According to the method of processing the flow guiding tube 1 according to the embodiment of the present application, by setting the second straight line segment 13, the heat on the crystal rod 5 is incident on the second straight line segment 13 along the radial direction of the crystal rod 5. When the angle between the second straight line segment 13 and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line segment 13 is also 45° or more, and the reflection angle is equal to the incident angle. Based on the principle of equality, the angle between the heat reflected by the second straight line segment 13 and the incident heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Note that by setting the line segment group 14, the heat transferred from the crystal rod 5 to the line segment group 14 can be transferred to the water cooling jacket 3 after being reflected by the line segment group 14. This prevents heat from being reversely transferred to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

In this specification, terms such as "implementation", "connection", "coupling", "fixation", etc. should be understood in a broad sense, and for example, unless there are express provisions and limitations, It may be a removable connection, an integral connection, a direct connection, or an indirect connection via an intermediate medium. , internal communication between two elements, or interaction between two elements. For those skilled in the art, the specific meanings of the above terms in this application can be understood depending on the context.

In the description of this specification, descriptions that refer to terms such as "one embodiment," "some examples," "exemplary," "specific examples," or "some illustrations" refer to the Any specific feature, structure, material, or characteristic described in conjunction with an embodiment or example is meant to be included in at least one embodiment or example of the present application. As used herein, the schematic representations of the above terms do not necessarily refer to the same embodiment or illustration. Moreover, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or illustrations. Note that those skilled in the art can combine and combine different embodiments or examples described herein, as well as features of different embodiments or examples, without contradicting each other.

Although the embodiments of the present application have been illustrated and described, those skilled in the art can make various changes, modifications, substitutions, and modifications to these embodiments without departing from the principle and spirit of the present application, and the scope of the present application does not exceed the scope of the present application. It is to be understood that the scope of the invention is limited by the claims and their equivalents.

Cross-reference of related applications

This application has application number 202110320307. X, filed based on a Chinese patent application with a filing date of March 25, 2021, claims priority to the Chinese patent application, and the entire content of the Chinese patent application is incorporated herein by reference. be incorporated into.

The present application relates to the technical field of single crystal furnaces, and particularly relates to a flow guide tube for a single crystal furnace, a method for processing a single crystal furnace, and a flow guide tube.

When a silicon crystal grows, crystal latent heat is generated near the solid-liquid interface. Generally, a guide tube around the crystal rod is provided above the crystal, and the gas is guided along the inside of the guide tube to the pulling area near the crystal rod. This region is purged to remove the latent heat of crystallization. As the diameter of a single crystal silicon rod increases, the temperature difference between the center and the outer periphery of the crystal rod increases, which not only makes it difficult to increase the crystallization rate but also causes excessive thermal stress inside the crystal rod. This causes defects such as holes and dislocation defects inside the crystal rod, which affects the processing quality of the crystal rod.

The present application provides a flow guide tube for a single crystal furnace that can improve the processing quality of a crystal rod.

The present application further provides a single crystal furnace including the above-described flow guide tube for a single crystal furnace.

The present application further provides a method for processing a flow guide tube, and uses the processing method to process the flow guide tube for a single crystal furnace.

The guide tube for a single crystal furnace according to the embodiment of the present application includes a guide tube, a furnace body, a water cooling jacket, and a crucible, and the guide tube, water cooling jacket, and crucible are all provided in the furnace body. a crystal rod is formed in the crucible, the flow guide tube and the water cooling jacket are both disposed around the crystal rod, and the water cooling jacket is located above the flow guide tube, and the water cooling jacket is located above the flow guide tube, The plane on which the axial cross section of the rod is located is defined as a reference plane, the guide tube is cut at the reference plane to form a cut plane, and the inner contour line located on the crystal rod side of the cut plane is vertical. a first straight line segment extending in the direction, one end of which is adjacent to the liquid level of the crucible is spaced apart from the liquid level; and one end of the first straight line segment is separated from the crucible. a second straight line connected to one end of the crystal rod, the other end of which extends upward while being inclined in a direction away from the crystal rod, the angle formed with the vertical direction being α, and α≧45°; and a plurality of straight line segments connected in order and having different inclination angles, one end of which is connected to the other end of the second straight line segment, and the other end is inclined in a direction away from the crystal rod. A group of line segments extending upward, the heat transferred from the crystal rod to the group of line segments is transferred toward the water cooling jacket, and the heat is transferred reversely to the crystal rod using the water cooling jacket. a group of line segments configured to prevent

According to the flow guide tube for a single crystal furnace according to the embodiment of the present application, by setting the second straight line segment, when the heat on the crystal rod is incident on the second straight line segment along the radial direction of the crystal rod, the second straight line segment is set. Since the angle between the two straight lines and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle, the second straight line is The angle between the direction of reflection of the heat reflected by the straight line and the direction of incidence of the heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod or in a direction away from the outer wall surface of the crystal rod. It is possible to avoid being turned back into a crystal rod. By setting a group of line segments, the heat transferred from the crystal rod to the group of line segments can be reflected by the group of line segments and then transferred to the water cooling jacket. prevent it from being transmitted to Therefore, the cooling of the crystal rod can be accelerated, which is advantageous in reducing the thermal stress inside the crystal rod, and the generation of holes and dislocation defects inside the crystal rod can be avoided, which improves the production quality of the crystal rod. can be improved.

In some embodiments of the present application, in the radial direction of the crystal rod, one end of the second straight line separating from the crystal rod is flush with the outer edge of the water cooling jacket, or the outer edge of the water cooling jacket located outside of.

In some embodiments of the present application, the α satisfies 50°≧α≧45°.

In some embodiments of the present application, both ends of the straight line segment are defined as end A and end B, respectively, the orthographic projection of end A onto the crystal rod is defined as C, and the radial direction of the water cooling jacket is defined as end A and end B, respectively. If the outer edge is defined as D and the inner edge in the radial direction of the water cooling jacket is defined as E, line segment AB is perpendicular to the angle bisector of ∠EAC, and line segment AE is set parallel to line segment BD. The A end is one end of the straight line adjacent to the crystal rod.

In some embodiments of the present application, the number of straight line segments included in the group of line segments is X, and satisfies 30≧X≧10.

In some embodiments of the present application, in the axial direction of the crystal rod, the distance between one end of the first straight line adjacent to the liquid surface and the liquid surface is L, and satisfies 50 mm≧L≧20 mm. .

In some embodiments of the present application, the distance between the bottom surface of the flow guide tube and the liquid level gradually decreases from the inside to the outside in the radial direction of the furnace body, and the distance between the bottom surface of the flow guide tube and the liquid surface gradually decreases. The angle formed with the liquid level is β, and satisfies 8°≧β≧1°.

In some embodiments of the present application, the liquid level forms a first arc surface with the inner peripheral wall of the crucible, and the connection point between the bottom wall of the flow guide tube and the outer peripheral wall of the flow guide tube is the A second arc surface is formed parallel to the first arc surface.

In some embodiments of the present application, the liquid level forms a third arc surface with the outer circumferential wall of the crystal rod, and the connection point between the bottom wall of the guide tube and the inner circumferential wall of the guide tube is A fourth arc surface is formed parallel to the third arc surface.

According to the single crystal furnace of the embodiment of the present application, a furnace body, a crucible provided in the furnace body and having a storage space in which a crystal rod is formed, a water cooling jacket, and the single crystal furnace The flow guide tube and the water cooling jacket are both provided within the furnace body, and the water cooling jacket is located above the flow guide tube.

According to the single crystal furnace of the embodiment of the present application, by setting the second straight line segment, when the heat on the crystal rod is incident on the second straight line segment along the radial direction of the crystal rod, the second straight line segment and the perpendicular Since the angle with the direction is 45° or more, the incident angle of the heat in this part to the second straight line segment is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle, it is reflected at the second straight line segment. The angle between the direction of reflection of the heat and the direction of incidence of the heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod or in a direction away from the outer wall surface of the crystal rod. It is possible to avoid being turned back into a crystal rod. By setting a group of line segments, the heat transferred from the crystal rod to the group of line segments can be reflected by the group of line segments and then transferred to the water cooling jacket. prevent it from being transmitted to Therefore, the cooling of the crystal rod can be accelerated, which is advantageous in reducing the thermal stress inside the crystal rod, and the generation of holes and dislocation defects inside the crystal rod can be avoided, which improves the production quality of the crystal rod. can be improved.

In some embodiments of the present application, the water cooling jacket is provided around the crystal rod and includes a first connecting portion extending in the axial direction of the crystal rod, and a first connecting portion adjacent to the liquid surface of the first connecting portion. a second connecting part connected to one end and extending in the radial direction of the crystal rod.

In some embodiments of the present application, a surface of the second connecting portion adjacent to the liquid surface is formed into a first curved surface that is concave toward the first connecting portion.

In some embodiments of the present application, a surface of the second connecting portion adjacent to the crystal rod is formed into a second curved surface that is concave in a direction away from the crystal rod.

According to the method for processing a flow guide tube according to the embodiment of the present application, the flow guide tube is the flow guide tube for a single crystal furnace, and the group of line segments is formed from a plurality of straight line segments connected in order and having different inclination angles. including a straight line segment N, the outer edge in the radial direction of the water cooling jacket is defined as D, and the inner edge in the radial direction of the water cooling jacket is defined as E, the step of processing the first straight line segment, and the second straight line segment. The starting point of the second straight line is the upper end point of the first straight line, the end point of the second straight line is a point A1, and the A1 point is a point D of the water cooling jacket. and the step of becoming flush with the radial direction of the crystal rod;
Processing the straight line segment, the starting point of the straight line segment is A1, the end point of the straight line segment is B1, and the orthographic projection of the A1 point onto the crystal rod is C1 point. The first reference line is to create a first reference line that is perpendicular to the angle bisector of ∠EA1C1 and diagonally upward, starting from the point A1, and to translate EA1 to the position of the D point to create the first reference line. forming an intersection point B1 with the straight line, and making A1B1 the straight line segment;
The step of processing the straight line segment 2, the starting point of the straight line segment 2 is A2, which overlaps the B1 point of the straight line segment 1, the end point of the straight line segment 2 is B2, and the point of the A2 point is The orthogonal projection onto the crystal rod is point C2, and starting from point A2, create a second reference line that is perpendicular to the angle bisector of ∠EA2C2 and pointing obliquely upward, and point EA2 to point D. translating to a position to form an intersection B2 with the second reference line, and making A2B2 the straight line segment;
The step of processing the straight line segment 3, the starting point of the straight line segment 3 is A3, which overlaps the B2 point of the straight line segment 2, the end point of the straight line segment 3 is B3, and the point of the straight line segment 3 is The orthographic projection onto the crystal rod is point C3, and starting from point A3, create a third reference line that is perpendicular to the angle bisector of ∠EA3C3 and pointing obliquely upward, and EA3 is set as point D. translating to a position to form an intersection B3 with the third reference line, and making A3B3 the straight line segment 3;
In this way, the last step is to process the straight line segment N, the starting point of the straight line segment N is An, the ending point of the straight line segment N is Bn, and the process is carried out on the crystal rod at the point An. The orthogonal projection of is point Cn, and starting from the point An, create an Nth reference line perpendicular to the angle bisector of ∠EAnCn and pointing diagonally upward, and translate EAn to the position of point D. forming an intersection point Bn with the Nth reference line, and setting AnBn to the straight line segment N. Here, the N satisfies N>3.

According to the method for processing a flow guide tube according to the embodiment of the present application, by setting the second straight line segment, when the heat on the crystal rod is incident on the second straight line segment along the radial direction of the crystal rod, the second straight line segment is set. Since the angle between the straight line and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle, the second straight line The angle between the direction of the reflected heat and the direction of incidence of the heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod or in a direction away from the outer wall surface of the crystal rod. It is possible to avoid being turned back into a crystal rod. By setting a group of line segments, the heat transferred from the crystal rod to the group of line segments can be reflected by the group of line segments and then transferred to the water cooling jacket. prevent it from being transmitted to Therefore, the cooling of the crystal rod can be accelerated, which is advantageous in reducing the thermal stress inside the crystal rod, and the generation of holes and dislocation defects inside the crystal rod can be avoided, which improves the production quality of the crystal rod. can be improved.

Additional aspects and advantages of the present application will be set forth in part in the following description, and in part will be apparent from the description or may be learned from practice of the application.

1 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present application. 1 is a partial structural schematic diagram of a single crystal furnace according to an embodiment of the present application. It is an enlarged view of M in FIG. 2. 1 is a partial structural schematic diagram of a single crystal furnace according to an embodiment of the present application. 1 is a partial structural schematic diagram of a single crystal furnace according to an embodiment of the present application.

Single crystal furnace 100,
Flow guide tube 1, first straight line segment 11, second straight line segment 13,
Line segment group 14, line segment 1 141, line segment 2 142, line segment 3 143, line segment 4 144, line segment 5 145,
second arc surface 15, fourth arc surface 16,
Furnace body 2, water cooling jacket 3, first connecting part 31, second connecting part 32,
A first curved surface 321, a second curved surface 322, a third curved surface 323,
Crucible 4, first arc surface 41, third arc surface 42,
Crystal rod 5.

Hereinafter, embodiments of the present application will be described in detail, and examples of the embodiments are shown in the accompanying drawings, and the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. show. The examples described below with reference to the drawings are illustrative and are intended to be used to explain the present application and should not be construed as limiting the present application.

The following disclosure provides a number of different implementations or examples for implementing different configurations of the present application. Hereinafter, specific example components and settings will be described to simplify the disclosure of the present application. Of course, these are merely examples and do not limit the present application. Note that this application may repeat references to numbers and/or alphabets in different instances. Such repetition is for simplicity and clarity and does not itself indicate a relationship between the various embodiments and/or settings discussed. It should be noted that although this application provides examples of various specific processes and materials, those skilled in the art will recognize the applicability of other processes and/or the use of other materials.

Hereinafter, a guide tube 1 for a single crystal furnace 100 according to an embodiment of the present application will be described with reference to the drawings, and the single crystal furnace 100 includes a guide tube 1, a furnace body 2, a water cooling jacket 3, and a crucible 4. The guide tube 1, the water cooling jacket 3, and the crucible 4 are all provided in the furnace body 2, and the crystal rod 5 is formed in the crucible 4. The water cooling jacket 3 is disposed around the rod 5 and is located above the flow guide tube 1.

For example, in one example of the present application, the crucible 4 has a storage space, a silicon raw material for heating and melting is placed in the storage space, a heater for heating the crucible 4 is provided in the furnace body 2, and the heater heats the crucible 4. The silicon raw material in the storage space can be melted into silicon liquid. Furnace body 2 is further provided with a flow guide tube 1 and an argon gas pipe, and the argon gas tube passes through the top of the furnace body 2 and enters the furnace body 2. The argon gas passes through the formed path and promotes the growth of crystal rods. A water cooling jacket 3 is further provided within the furnace body 2 . The water cooling jacket 3 is disposed around the crystal rod 5 and is located above the flow guide tube 1, and is configured to absorb heat radiated outward from the crystal rod 5 and transmit it to the outside. The heat dissipation efficiency of the crystal rod 5 is improved.

As shown in FIGS. 1 and 2, the plane on which the axial cross section of the crystal rod 5 is located is defined as a reference plane, and the guide tube 1 is cut at the reference plane to form a cut plane, and the crystal rod 5 at the cut plane The inner contour line located on the side includes a first straight line segment 11, a second straight line segment 13, and a line segment group 14.

Specifically, as shown in FIG. 1, the first straight line segment 11 extends in the vertical direction, and one end of the first straight line segment 11 adjacent to the liquid level of the crucible 4 is spaced apart from the liquid level. . As a result, an air flow path for argon can be formed between the bottom end of the first straight line segment 11 and the surface of the silicone liquid, and since the first straight line segment 11 is a straight line segment having a certain distance, , the region close to the liquid surface can maintain a stable temperature gradient, which is advantageous for the growth of crystal rods. Note that the length of the first straight line segment 11 should be equal to or greater than the height of the shoulder ring regarding the growth diameter of the crystal rod 5. For example, in some embodiments of the present application, when an 8-inch crystal rod is grown, the height of its shoulder ring will be about 90 mm, but the length of the first straight line segment 11 should be more than 90 mm. , when a 12-inch crystal bar is grown, the height of its shoulder ring will be about 160 mm, and the length of the first straight line segment 11 should be at least 160 mm.

As shown in FIGS. 2 and 3, one end of the second straight line segment 13 is connected to one end of the first straight line segment 11 that is away from the crucible 4, and the other end is inclined upward in a direction that is away from the crystal rod 5. The angle between the second straight line segment 13 and the vertical direction is α (α shown in FIG. 3), and α≧45° is satisfied. By setting the second straight line segment 13, when the heat on the crystal rod 5 is incident on the second straight line segment 13 along the radial direction of the crystal rod 5, the angle between the second straight line segment 13 and the vertical direction is Since the angle of incidence of the heat in this part is 45° or more, the angle of incidence on the second straight line segment 13 is also 45° or more, and based on the principle that the angle of reflection is equal to the angle of incidence, the heat reflected on the second straight line segment 13 is reflected. The angle between the direction and the direction of heat incidence is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

Specifically, in some embodiments of the present application, the angle between the second straight line segment 13 and the vertical direction may be 45°, 48°, 50°, 55°, 60°, etc. Specifically, the angle between the second straight line segment 13 and the vertical direction can be selected and set depending on the model number and size of the single crystal furnace 100.

For example, in one example of the present application, the angle between the second straight line segment 13 and the vertical direction is 45°, and the heat on the crystal rod 5 is incident on the second straight line segment 13 along the radial direction of the crystal rod 5. At this time, the incident angle of heat formed on the second straight line segment 13 is 45°, and according to the principle that the reflection angle is equal to the incident angle, the reflection angle is also 45°, and the second straight line segment 13 is inclined upward. Since the reflected heat is set vertically upward, that is, the reflected heat is transmitted along a direction parallel to the outer wall surface of the crystal rod 5, and the heat of this part is reflected to the crystal rod. 5 can be avoided.

Further, for example, in another example of the present application, the angle between the second straight line segment 13 and the vertical direction is 60°, and the heat on the crystal rod 5 is transferred to the second straight line segment along the radial direction of the crystal rod 5. 13, the incident angle formed on the second straight line segment 13 is 60°, and according to the principle that the reflection angle is equal to the incident angle, the reflection angle is also 60°, and the second straight line segment 13 is Since it is set to be inclined upward, the reflected heat is inclined upward and is transmitted in a direction away from the crystal rod 5, that is, the reflected heat is transmitted upward along the direction away from the crystal rod 5. It is possible to prevent the heat from being transmitted obliquely and being reflected back to the crystal rod 5 in this portion.

As shown in FIGS. 2 and 3, the line segment group 14 includes a plurality of straight lines connected in order and having different inclination angles, one end of which is connected to the other end of the second straight line segment 13, and the other end is a crystal rod. 5 and extends upwardly. As can be understood, the line segment group 14 includes a plurality of straight line segments connected in sequence, and each straight line segment extends upward while being inclined in a direction away from the crystal rod 5. For example, the line segment group 14 includes five straight line segments, the first straight line segment is connected to the second straight line segment 13, the second straight line segment is connected to the first straight line segment, and the third straight line segment is connected to the second straight line segment 13. The straight line segment of the book is connected to the second straight line segment, the fourth straight line segment is connected to the third straight line segment, and the fifth straight line segment is connected to the fourth straight line segment.

As shown in FIGS. 1 to 3, the line segment group 14 is configured to transfer the heat transferred from the crystal rod 5 to the line segment group 14 toward the water cooling jacket 3, and the heat is transferred using the water cooling jacket 3. On the contrary, it is prevented from being transmitted to the crystal rod 5. As can be seen, the heat transferred from the crystal rod 5 to the group of line segments 14 is reflected by the group of line segments 14 and then transferred to the water cooling jacket 3, and the heat is transferred back to the crystal rod 5 using the water cooling jacket 3. transmission can be prevented. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved. In addition, by setting the second straight line segment 13 and the line segment group 14, cooling of the crystal rod 5 can be accelerated, so that the time during the heat dissipation stage of the crystal rod 5 in the manufacturing process can be shortened, and the crystal rod 5 can be cooled quickly. The production efficiency of the rod 5 can be increased.

According to the flow guide tube 1 for the single crystal furnace 100 of the embodiment of the present application, by setting the second straight line segment 13, the heat on the crystal rod 5 is transferred to the second straight line segment 13 along the radial direction of the crystal rod 5. Since the angle between the second straight line segment 13 and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line segment 13 is also 45° or more, and the reflection angle is According to the principle of equal angle, the angle between the direction of the heat reflected by the second straight line segment 13 and the direction of incidence of the heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Note that by setting the line segment group 14, the heat transferred from the crystal rod 5 to the line segment group 14 can be transferred to the water cooling jacket 3 after being reflected by the line segment group 14. This prevents heat from being reversely transferred to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

In some embodiments of the present application, as shown in FIGS. 1 to 3, one end of the second straight line segment 13 that is separated from the crystal rod 5 is flush with the outer edge of the water cooling jacket 3 in the radial direction of the crystal rod 5. or located outside the outer edge of the water cooling jacket 3. In other words, in the radial direction of the crystal rod 5, one end of the second straight line segment 13 that is separated from the crystal rod 5 (i.e., the upper end of the second straight line segment 13) may be flush with the outer edge of the water cooling jacket 3. Alternatively, in the radial direction of the crystal rod 5, one end of the second straight line segment 13 that is separated from the crystal rod 5 is located outside the outer edge of the water cooling jacket 3. Thereby, the heat reflected by the second straight line segment 13 can be reflected to the outer edge of the water cooling jacket 3 or to the outside of the water cooling jacket 3. For example, in one specific example of the present application, in the radial direction of the crystal rod 5, one end of the second straight line segment 13 that is separated from the crystal rod 5 is flush with the outer edge of the water cooling jacket 3.

In some embodiments of the present application, α satisfies 50°≧α≧45°, as shown in FIGS. 1-3. As can be understood, by setting the angle between the second straight line segment 13 and the vertical direction between 45° and 50°, the second straight line segment The radius of the upper end of the flow guide tube 13 can be reduced, thereby reducing the size of the flow guide tube 1 and the space occupied by the flow guide tube 1. For example, in some examples of the present application, the angle between the second straight line segment 13 and the vertical direction may be 45°, 46°, 47°, 48°, 49°, or 50°.

In some embodiments of the present application, both ends of the straight line segment are defined as end A and end B, respectively, the orthographic projection of end A onto crystal rod 5 is defined as C, and the outer edge of the water cooling jacket 3 in the radial direction is defined as D. When the inner edge of the water cooling jacket 3 in the radial direction is defined as E, the line segment AE is set to be perpendicular to the angle bisector of the line segment AB and ∠EAC, and the line segment AE is parallel to the line segment BD. Here, the A end is one end adjacent to the crystal rod 5 of the straight line.

As can be understood, each straight line segment in the line segment group 14 satisfies the above-mentioned situation, and due to the above settings, the heat incident on the straight line segment from the crystal rod 5 passes through the reflection of the straight line segment and is transferred to the water cooling jacket. 3 can be reflected to E of the inner edge of the crystal rod 5, so that the water cooling jacket 3 can be used to realize the prevention of heat and effectively prevent the heat from returning to the crystal rod 5.

For example, regarding the heat at point C of the crystal rod 5, the heat of this portion can be transferred to the A end of the straight line, and after being reflected at the A end, it can be transferred to the E point of the water cooling jacket 3. That is, since CA is considered to be the incident path of heat in this part, the normal to the incident surface AB is the angle bisector of ∠EAC. Therefore, the transmission path reflected by the line segment is AE, and the reflected heat is transmitted to the inner edge of the water cooling jacket 3, so it is possible to effectively prevent the heat from returning to the crystal rod 5. Since each straight line segment has the same characteristics, the heat reflected by each straight line segment is transferred to the inner edge E of the water cooling jacket 3.

Specifically, in one specific example of the present application, the second straight line segment 13 and the straight line segment 1 141, straight line segment 2 142, straight line segment 3 143, straight line segment 4 144, ..., straight line of the line segment group 14 The processing process for N is as follows.

1st step: Machining the second straight line segment 13, the starting point of the second straight line segment 13 is the upper end point of the first straight line segment 11, the end point of the second straight line segment 13 is the A1 point, and the A1 point is the water cooling jacket The point D of No. 3 is flush with the crystal rod 5 in the radial direction. Here, the second straight line segment 13 extends diagonally outward along the direction of the inclination angle of 45°.

Second step: Process the straight line segment 141. The starting point of the straight line segment 141 is A1, the end point is B1, and the orthographic projection of the A1 point onto the crystal rod 5 is the C1 point. Specifically, first find the angle bisector of ∠EA1C1, use point A1 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA1C1 and face diagonally upward, and then move EA1 to point D. Translate to the position to form an intersection B1 with the wall surface, and make A1B1 a straight line segment 141.

3rd step: Process the straight line segment 2 142, the starting point of the straight line segment 2 142 is A2, which overlaps the B1 point in the straight line segment 141, the end point of the straight line segment 2 142 is B2, and the crystal of the A2 point The orthographic projection onto rod 5 is point C2. Specifically, first find the angle bisector of ∠EA2C2, use point A2 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA2C2 and face diagonally upward, and then move EA2 to point D. Translate to the position to form an intersection B2 with the wall surface, and make A2B2 a straight line segment 2142.

Fourth step: Process the straight line segment 3 143, the starting point of the straight line segment 3 143 is A3, which overlaps the B2 point in the straight line segment 2 142, the end point of the straight line segment 3 143 is B3, and the crystal of the A3 point The orthographic projection onto rod 5 is point C3. Specifically, first find the angle bisector of ∠EA3C3, use point A3 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA3C3 and face diagonally upward, and then move EA3 to point D. Translate to the position to form an intersection B3 with the wall surface, and make A3B3 a straight line segment 3143.

Fifth step: Process the straight line segment 4 144, the starting point of the straight line segment 4 144 is A4, which overlaps the B3 point in the straight line segment 3 143, the end point of the straight line segment 4 144 is B4, and the crystal of the A4 point The orthographic projection onto rod 5 is point C4. Specifically, first find the angle bisector of ∠EA4C4, use point A4 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA4C4 and face diagonally upward, and then move EA4 to point D. Translate to the position to form an intersection B4 with the wall surface, and make A4B4 a straight line segment 4144.

6th step: Process the straight line segment 5 145, the starting point of the straight line segment 5 145 is A5 which overlaps the B4 point in the straight line segment 4 144, the end point of the straight line segment 5 145 is B5, and the crystal of the A5 point The orthographic projection onto rod 5 is point C5. Specifically, first find the angle bisector of ∠EA5C5, use point A5 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA5C5 and face diagonally upward, and then move EA5 to point D. Translate to the position to form an intersection B5 with the wall surface, and make A5B5 a straight line segment 5145.

7th step: Process the straight line segment 6, the starting point of the straight line segment 6 is A6 which overlaps with the B5 point in the straight line segment 5 145, the end point of the straight line segment 6 is B6, and the point on the crystal rod 5 of the A6 point The orthographic projection onto is point C6. Specifically, first find the angle bisector of ∠EA6C6, use point A6 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA6C6 and face diagonally upward, and then move EA6 to point D. Translate to the position to form an intersection B6 with the wall surface, and make A6B6 a straight line.

As described above, assuming that the line segment group 14 includes 24 straight lines, the processing steps for the 24 straight lines are as follows.

The starting point of straight line segment 24 is A24, which overlaps point B23 in straight line segment 23, the end point of straight line segment 24 is B24, and the orthographic projection of point A24 onto crystal rod 5 is C24. It is a point. Specifically, first find the angle bisector of ∠EA24C24, use point A24 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA24C24 and face diagonally upward, and then move EA24 to point D. Translate to the position to form an intersection B24 with the wall surface, and make A24B24 a straight line segment 24.

In some embodiments of the present application, as shown in FIGS. 1 to 3, the number of straight line segments included in the line segment group 14 is X, and satisfies 30≧X≧10. As can be understood, the number of straight line segments is related to the size of the guide tube 1, the relative position of the guide tube 1 and the water cooling jacket 3, and the relative position of the guide tube 1 and the crystal rod 5. As a matter of fact, by setting the number of straight line segments between 10 and 30, the number requirements in many cases can be met, and the needs of users can be better met. For example, in one example of the present application, the number of straight lines included in the line segment group 14 is 10, 12, 14, 16, 18, 20, 22, 24, 26, 28, or There are 30 pieces.

In some embodiments of the present application, as shown in FIGS. 1 and 4, in the axial direction of the crystal rod 5, the distance between one end of the first straight line segment 11 adjacent to the liquid surface and the liquid surface is L (FIG. L) shown in and satisfies 50mm≧L≧20mm. As can be understood, the problem that the seed crystal is likely to break when shouldering can be solved by setting the distance between one end of the first straight line segment 11 adjacent to the liquid level and the liquid level between 20 and 50 mm. , it is possible to ensure that the temperature gradient at the position of this part does not change and that the airflow does not change much, so the problem of wire breakage can be avoided.

For example, in one example of the present application, the processing process of the crystal rod 5 is as follows. A high-purity polycrystalline silicon raw material is placed in the crucible 4 of the single crystal furnace 100 and heated and melted under the protection of a low vacuum flowing inert gas to produce one single crystal silicon (also called a seed crystal) with a specific growth direction. Place the seed crystal in the seed crystal gripping device, bring the seed crystal into contact with the silicon solution, and adjust the temperature of the molten silicon solution to approach the melting point temperature. When the seed crystal is gradually pulled up, the seed crystal enters the growth of the cone, and when the diameter of the cone approaches the target diameter, the seed crystal is pulled up to prevent the diameter of the single crystal silicon from increasing further. The pulling speed of the seed crystal is increased and the crystal enters the middle growth stage, and when the growth of single crystal silicon approaches the end, the pulling speed of the seed crystal is increased again and the single crystal silicon gradually separates from the molten silicon and forms the lower cone. form and finish growing.

Specifically, in some examples of the present application, the distance between one end of the first straight line segment 11 adjacent to the liquid surface and the liquid surface in the axial direction of the crystal rod 5 is 20 mm, 25 mm, 30 mm, 35 mm, 40 mm. , 45mm, or 50mm.

In some embodiments of the present application, as shown in FIGS. 1 and 4, the distance between the bottom surface of the flow guide tube 1 and the liquid level gradually decreases from the inside to the outside in the radial direction of the furnace body 2. , and the angle between the bottom surface of the flow guiding tube 1 and the liquid level is β (β shown in FIG. 4), and satisfies 8°≧β≧1°. As can be understood, the temperature of the free liquid surface of the silicon liquid gradually increases as the distance from the crucible 4 wall becomes smaller, and as the temperature difference increases, the temperature of the free liquid surface increases as well. and accelerates the transport of oxygen from the inner wall of the crucible 4 to the solid-liquid interface, which affects the production quality of the crystal rod 5. In the present application, the distance between the bottom surface of the flow guide tube 1 and the liquid level is gradually reduced from the inside to the outside in the radial direction of the furnace body 2, so that the argon gas can be brought between the bottom surface of the flow guide tube 1 and the liquid surface. As it flows through the passages between the crucibles, the flow rate of the argon gas is gradually increased, thereby lowering the temperature near the crucible 4 wall and weakening heat convection and oxygen transport.

In some embodiments of the present application, as shown in FIG. The connection point with the first arc surface 41 forms a second arc surface 15 that is set parallel to the first arc surface 41 . As can be understood, by setting the second arc surface 15 parallel to the first arc surface 41 at the connection point between the bottom wall of the flow guide tube 1 and the outer peripheral wall of the flow guide tube 1, the flow of argon gas can be controlled. The resistance can be reduced, thereby increasing the flow rate of argon gas and weakening heat convection and oxygen transport.

In some embodiments of the present application, as shown in FIG. The connection point with the peripheral wall forms a fourth arc surface 16 that is set parallel to the third arc surface 42 . As can be understood, by setting the fourth arc surface 16 parallel to the third arc surface 42 at the connection point between the bottom wall of the flow guide tube 1 and the inner peripheral wall of the flow guide tube 1, the flow of argon gas can be controlled. The resistance can be reduced, thereby increasing the flow rate of argon gas and scavenging more oxygen.

Hereinafter, a single crystal furnace 100 according to an embodiment of the present application will be described with reference to the drawings.

As shown in FIG. 1, a single crystal furnace 100 according to an embodiment of the present application includes a furnace body 2, a crucible 4, a water cooling jacket 3, and a flow guide tube 1, the crucible 4 is provided inside the furnace body 2, and the crucible 4 is housed in a housing. The crystal rod 5 is formed in the storage space, and the flow guide tube 1 and the water cooling jacket 3 are both provided inside the furnace body 2, and the water cooling jacket 3 is provided above the flow guide tube 1. To position.

According to the single crystal furnace 100 according to the embodiment of the present application, by setting the second straight line segment 13, when the heat on the crystal rod 5 enters the second straight line segment 13 along the radial direction of the crystal rod 5, Since the angle between the second straight line segment 13 and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line segment 13 is also 45° or more, and based on the principle that the reflection angle is equal to the incident angle. , the angle between the direction of reflection of the heat reflected by the second straight line segment 13 and the direction of incidence of the heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Note that by setting the line segment group 14, the heat transferred from the crystal rod 5 to the line segment group 14 can be transferred to the water cooling jacket 3 after being reflected by the line segment group 14. This prevents heat from being reversely transferred to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

In some embodiments of the present application, as shown in FIG. The second connecting part 32 extends in the axial direction of the crystal rod 5, and is connected to one end of the first connecting part 31 adjacent to the liquid surface, and also extends in the radial direction of the crystal rod 5. As can be understood, the horizontal cut surface of the water cooling jacket 3 located on the crystal rod 5 side is formed into an inverted T-shape, and with the above design, the width of the lower edge of the water cooling jacket 3 can be increased, and the water cooling jacket More heat can be blocked by the lower edge of No. 3.

In some embodiments of the present application, as shown in FIG. 5, the surface of the second connecting portion 32 adjacent to the liquid level is formed into a first curved surface 321 that is concave toward the first connecting portion 31. As can be understood, the bottom surface of the second connecting part 32 is set as a curved surface that is concave toward the first connecting part 31, and since the curved surface has the advantage of having a larger area than a flat surface, it can block and block more reflected heat. The heat dissipation efficiency of the crystal rod 5 can be further improved.

In some embodiments of the present application, as shown in FIG. 5, the surface of the second connecting portion 32 adjacent to the crystal rod 5 is formed into a second curved surface 322 that is concave in a direction away from the crystal rod 5. be done. As can be understood, the surface of the second connecting portion 32 adjacent to the crystal rod 5 is set as a curved surface that is concave in the direction away from the crystal rod 5, and the curved surface has the advantage that it has a larger area than a flat surface. As a result, more heat can be radiated from the crystal rod 5 to the second curved surface 322, and more heat can be absorbed using the water cooling jacket 3, further improving the heat dissipation efficiency of the crystal rod 5. can be done. Specifically, in another example of the present application, the surface of the second connecting portion 32 on the side away from the crystal rod 5 is formed into a third curved surface 323 that is concave toward the crystal rod 5. Of course, the present application is not limited to this, and the surface of the second connecting portion 32 on the side away from the crystal rod 5 may be a flat surface.

Hereinafter, a method of machining the flow guide tube 1 according to an embodiment of the present application will be described with reference to the drawings.

According to the method for processing the flow guide tube 1 according to the embodiment of the present application, the flow guide tube 1 is the flow guide tube 1 for the single crystal furnace 100 described above. Here, the line segment group 14 includes a plurality of straight line segments from straight line segment 141 to straight line segment N that are connected in order and have different inclination angles, the outer edge of the water cooling jacket 3 in the radial direction is defined as D, and the outer edge of the water cooling jacket 3 in the radial direction is defined as D. If the inner edge in the radial direction is defined as E, the method of machining the flow guiding tube 1 includes the steps of machining the first straight line segment 11 and the step of machining the second straight line segment 13, the starting point of the second straight line segment 13 being is the upper end point of the first straight line segment 11, the end point of the second straight line segment 13 is point A1, and point A1 is flush with point D of the water cooling jacket 3 in the radial direction of the crystal rod 5;
In the step of processing the straight line segment 141, the starting point of the straight line segment 141 is A1, the end point of the straight line segment 141 is B1, and the orthographic projection of the A1 point onto the crystal rod 5 is the C1 point. , starting from point A1, create a first reference line that is perpendicular to the angle bisector of ∠EA1C1 and pointing diagonally upward, and translate EA1 to the position of point D to intersect with the first reference line B1. and forming A1B1 into a straight line segment 141;
In the step of processing the straight line segment 2 142, the starting point of the straight line segment 2 142 is A2, which overlaps the B1 point of the straight line segment 141, the end point of the straight line segment 2 142 is B2, and the crystal rod at the A2 point is The orthographic projection onto 5 is point C2, starting from point A2, creating a second reference line perpendicular to the angle bisector of ∠EA2C2 and pointing diagonally upward, and moving EA2 to the position of point D. translating to form an intersection point B2 with a second reference line, making A2B2 a straight line segment 2 142;
The step of processing the straight line segment 3 143, the starting point of the straight line segment 3 143 is A3, which overlaps the B2 point of the straight line segment 2 142, the end point of the straight line segment 3 143 is B3, and the crystal rod at the A3 point The orthographic projection onto 5 is point C3, and starting from point A3, create a third reference line that is perpendicular to the angle bisector of ∠EA3C3 and diagonally upward, and move EA3 to the position of point D. translating to form an intersection B3 with a third reference line, making A3B3 a straight line;
In this way, the final step is to process the straight line segment N, the starting point of the straight line segment N is An, the ending point of the straight line segment N is Bn, and the orthographic projection of the An point onto the crystal rod is Cn. Starting from point An, create an Nth reference line that is perpendicular to the angle bisector of ∠EAnCn and pointing diagonally upward, and translate EAn to the position of point D to create the Nth reference line. forming an intersection point Bn of and making AnBn a straight line segment N. Here, N satisfies N>3.

For example, in one specific embodiment of the present application, the method for manufacturing the flow guide tube 1 includes the following steps.

First step: Processing the first straight line segment 11, the first straight line segment 11 extends in the vertical direction, and one end of the first straight line segment 11 adjacent to the liquid level of the crucible 4 is spaced apart from the liquid level. There is.

Second step: Machining the second straight line segment 13, the starting point of the second straight line segment 13 is the upper end point of the first straight line segment 11, the end point of the second straight line segment 13 is point A1, and point A1 is water-cooled. Point D of the jacket 3 is flush with the crystal rod 5 in the radial direction. Here, the second straight line segment 13 extends diagonally outward along the direction of the inclination angle of 45°.

Third step: Process the straight line segment 141. The starting point of the straight line segment 141 is A1, the end point is B1, and the orthographic projection of the A1 point onto the crystal rod 5 is the C1 point. Specifically, first find the angle bisector of ∠EA1C1, use point A1 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA1C1 and face diagonally upward, and then move EA1 to point D. Translate to the position to form an intersection B1 with the wall surface, and make A1B1 a straight line segment 141.

Fourth step: Process the straight line segment 2 142, the starting point of the straight line segment 2 142 is A2, which overlaps the B1 point in the straight line segment 141, the end point of the straight line segment 2 142 is B2, and the crystal of the A2 point The orthographic projection onto rod 5 is point C2. Specifically, first find the angle bisector of ∠EA2C2, use point A2 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA2C2 and face diagonally upward, and then move EA2 to point D. Translate to the position to form an intersection B2 with the wall surface, and make A2B2 a straight line segment 2142.

Fifth step: Process the straight line segment 3 143, the starting point of the straight line segment 3 143 is A3, which overlaps the B2 point in the straight line segment 2 142, the end point of the straight line segment 3 143 is B3, and the crystal of the A3 point The orthographic projection onto rod 5 is point C3. Specifically, first find the angle bisector of ∠EA3C3, use point A3 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA3C3 and face diagonally upward, and then move EA3 to point D. Translate to the position to form an intersection B3 with the wall surface, and make A3B3 a straight line segment 3143.

6th step: Process the straight line segment 4 144, the starting point of the straight line segment 4 144 is A4, which overlaps the B3 point in the straight line segment 3 143, the end point of the straight line segment 4 144 is B4, and the crystal of the A4 point The orthographic projection onto rod 5 is point C4. Specifically, first find the angle bisector of ∠EA4C4, use point A4 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA4C4 and face diagonally upward, and then move EA4 to point D. Translate to the position to form an intersection B4 with the wall surface, and make A4B4 a straight line segment 4144.

7th step: Process the straight line segment 5 145, the starting point of the straight line segment 5 145 is A5 which overlaps the B4 point in the straight line segment 4 144, the end point of the straight line segment 5 145 is B5, and the crystal of the A5 point The orthographic projection onto rod 5 is point C5. Specifically, first find the angle bisector of ∠EA5C5, use point A5 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA5C5 and face diagonally upward, and then move EA5 to point D. Translate to the position to form an intersection B5 with the wall surface, and make A5B5 a straight line segment 5145.

8th step: Process the straight line segment 6, the starting point of the straight line segment 6 is A6 which overlaps with the B5 point in the straight line segment 5 145, the end point of the straight line segment 6 is B6, and the point on the crystal rod 5 of the A6 point The orthographic projection onto is point C6. Specifically, first find the angle bisector of ∠EA6C6, use point A6 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA6C6 and face diagonally upward, and then move EA6 to point D. Translate to the position to form an intersection B6 with the wall surface, and make A6B6 a straight line.

As described above, assuming that the line segment group 14 includes 24 straight lines, the processing steps for the 24 straight lines are as follows.

The starting point of straight line segment 24 is A24, which overlaps point B23 in straight line segment 23, the end point of straight line segment 24 is B24, and the orthographic projection of point A24 onto crystal rod 5 is C24. It is a point. Specifically, first find the angle bisector of ∠EA24C24, use point A24 as the starting point, create a wall that is perpendicular to the angle bisector of ∠EA24C24 and face diagonally upward, and then move EA24 to point D. Translate to the position to form an intersection point B24 with the wall surface, and make A24B24 a straight line segment 24.

According to the method of processing the flow guiding tube 1 according to the embodiment of the present application, by setting the second straight line segment 13, the heat on the crystal rod 5 is incident on the second straight line segment 13 along the radial direction of the crystal rod 5. When the angle between the second straight line segment 13 and the vertical direction is 45° or more, the incident angle of the heat from this part to the second straight line segment 13 is also 45° or more, and the reflection angle is equal to the incident angle. Based on the same principle, the angle between the direction of reflection of the heat reflected by the second straight line segment 13 and the direction of incidence of the heat is 90° or more. Therefore, after being reflected, the heat in this part can be transmitted in a direction parallel to the outer wall surface of the crystal rod 5 or in a direction away from the outer wall surface of the crystal rod 5, and the heat in this part can be reflected. It is possible to avoid returning to the crystal rod 5. Note that by setting the line segment group 14, the heat transferred from the crystal rod 5 to the line segment group 14 can be transferred to the water cooling jacket 3 after being reflected by the line segment group 14. This prevents heat from being reversely transferred to the crystal rod 5. Therefore, the cooling of the crystal rod 5 can be accelerated, which is advantageous in reducing the thermal stress within the crystal rod 5, and the generation of holes and dislocation defects inside the crystal rod 5 can be avoided. 5 production quality can be improved.

In this specification, terms such as "implementation", "connection", "coupling", "fixation", etc. should be understood in a broad sense, and for example, unless there are express provisions and limitations, It may be a removable connection, an integral connection, a direct connection, or an indirect connection via an intermediate medium. , internal communication between two elements, or interaction between two elements. For those skilled in the art, the specific meanings of the above terms in this application can be understood depending on the context.

In the description of this specification, descriptions that refer to terms such as "one embodiment," "some examples," "exemplary," "specific examples," or "some illustrations" refer to the Any specific feature, structure, material, or characteristic described in conjunction with an embodiment or example is meant to be included in at least one embodiment or example of the present application. As used herein, the schematic representations of the above terms do not necessarily refer to the same embodiment or illustration. Moreover, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or illustrations. Note that those skilled in the art can combine and combine different embodiments or examples described herein, as well as features of different embodiments or examples, without contradicting each other.

Although the embodiments of the present application have been illustrated and described, those skilled in the art can make various changes, modifications, substitutions, and modifications to these embodiments without departing from the principle and spirit of the present application, and the scope of the present application does not exceed the scope of the present application. It is to be understood that the scope of the invention is limited by the claims and their equivalents.

Claims (13)

A guide tube for a single crystal furnace, wherein the single crystal furnace includes a guide tube, a furnace body, a water cooling jacket, and a crucible, and the guide tube, water cooling jacket, and crucible are all inside the furnace body. a crystal rod is formed in the crucible, the flow guide tube and the water cooling jacket are both provided around the crystal rod, and the water cooling jacket is located above the flow guide tube; A plane on which the axial cross section of the crystal rod is located is defined as a reference plane, and the guide tube is cut at the reference plane to form a cut plane,
The inner contour line located on the crystal rod side of the cut surface is
a first straight line segment extending in the vertical direction, the first straight line segment having one end adjacent to the liquid level of the crucible spaced apart from the liquid level;
a second straight line segment, one end of which is connected to one end of the first straight line segment that is away from the crucible, and the other end of which extends upward while being inclined in a direction away from the crystal rod; A second straight line segment whose angle is α and satisfies α≧45°,
A group of line segments that include a plurality of straight line segments that are connected in order and have different inclination angles, one end of which is connected to the other end of the second straight line segment, and the other end of which extends upward while being inclined in a direction away from the crystal rod. The heat transferred from the crystal rod to the group of line segments is transferred toward the water cooling jacket, and the water cooling jacket is used to prevent the heat from being transferred to the crystal rod. A flow guide tube for a single crystal furnace, including a group of line segments configured. In the radial direction of the crystal rod, one end of the second straight line that separates from the crystal rod is flush with the outer edge of the water cooling jacket, or is located outside the outer edge of the water cooling jacket. A flow guide tube for a single crystal furnace described in . The flow guide tube for a single crystal furnace according to claim 1, wherein the α satisfies 50°≧α≧45°. Both ends of the straight line segment are defined as A end and B end, respectively, the orthographic projection of the A end onto the crystal rod is defined as C, the radial outer edge of the water cooling jacket is defined as D, and the water cooling If the inner edge of the jacket in the radial direction is defined as E, the line segment AB is perpendicular to the angle bisector of ∠EAC, and the line segment AE is set parallel to the line segment BD. , one end of the straight line adjacent to the crystal rod, the flow guide tube for a single crystal furnace according to claim 2. The flow guide tube for a single crystal furnace according to claim 2, wherein the number of the straight line segments included in the group of line segments is X, and satisfies 30≧X≧10. Any one of claims 1 to 5, wherein in the axial direction of the crystal rod, the distance between one end of the first straight line adjacent to the liquid surface and the liquid level is L, and satisfies 50 mm≧L≧20 mm. The flow guide tube for a single crystal furnace according to item 1. The distance between the bottom surface of the flow guide tube and the liquid surface gradually decreases from the inside to the outside in the radial direction of the furnace body, and the angle between the bottom surface of the flow guide tube and the liquid surface is β. The flow guide tube for a single crystal furnace according to any one of claims 1 to 6, which satisfies 8°≧β≧1°. The liquid level forms a first arc surface with the inner peripheral wall of the crucible, and a connection point between the bottom wall of the flow guide tube and the outer peripheral wall of the flow guide tube is set parallel to the first arc surface. The flow guide tube for a single crystal furnace according to any one of claims 1 to 7, which forms a second arc surface. The liquid level forms a third arc surface with the outer peripheral wall of the crystal rod, and a connection point between the bottom wall of the flow guide tube and the inner peripheral wall of the flow guide tube is set parallel to the third arc surface. The flow guide tube for a single crystal furnace according to any one of claims 1 to 7, which forms a fourth arc surface. Furnace body,
a crucible provided in the furnace body, the crucible having a storage space in which a crystal rod is formed;
water cooling jacket,
A flow guide tube for a single crystal furnace according to any one of claims 1 to 9,
A single crystal furnace, wherein both the guide tube and the water-cooling jacket are provided within the furnace body, and the water-cooling jacket is located above the guide tube. The water cooling jacket is
a first connecting portion provided around the crystal rod and extending in the axial direction of the crystal rod;
The single crystal furnace according to claim 10, further comprising a second connecting portion connected to one end of the first connecting portion adjacent to the liquid surface and extending in a radial direction of the crystal rod. The surface of the second connecting portion adjacent to the liquid level is formed into a first curved surface concave toward the first connecting portion, or the surface of the second connecting portion adjacent to the crystal rod is formed as a first curved surface that is concave toward the first connecting portion. 12. The single crystal furnace according to claim 11, wherein is formed as a second curved surface that is concave in a direction away from the crystal rod. A method for processing a flow guide tube, which is a flow guide tube for a single crystal furnace according to any one of claims 1 to 9,
The line segment group includes a plurality of straight line segments from line segment 1 to line segment N that are connected in order and have different inclination angles, the outer edge of the water cooling jacket in the radial direction is defined as D, and the inner edge of the water cooling jacket in the radial direction If we define E as
processing the first straight line;
processing the second straight line segment, the starting point of the second straight line segment being the upper end point of the first straight line segment, the end point of the second straight line segment being the A1 point, and the A1 point being the a step of becoming flush with point D of the water cooling jacket in the radial direction of the crystal rod;
Processing the straight line segment, the starting point of the straight line segment is A1, the end point of the straight line segment is B1, and the orthographic projection of the A1 point onto the crystal rod is C1 point. can be,
Starting from the point A1, creating a first reference line perpendicular to the angle bisector of ∠EA1C1 and pointing diagonally upward;
Translating EA1 to the position of the point D to form an intersection B1 with the first reference line, and making A1B1 the straight line segment;
The step of processing the straight line segment 2, the starting point of the straight line segment 2 is A2, which overlaps the B1 point of the straight line segment 1, the end point of the straight line segment 2 is B2, and the point of the A2 point is The orthographic projection onto the crystal rod is point C2,
Starting from the point A2, creating a second reference line perpendicular to the angle bisector of ∠EA2C2 and pointing diagonally upward;
translating EA2 to the position of point D to form an intersection point B2 with the second reference line, and making A2B2 the straight line segment;
The step of processing the straight line segment 3, the starting point of the straight line segment 3 is A3, which overlaps the B2 point of the straight line segment 2, the end point of the straight line segment 3 is B3, and the point of the straight line segment 3 is The orthographic projection onto the crystal rod is point C3,
Starting from the point A3, creating a third reference line perpendicular to the angle bisector of ∠EA3C3 and pointing diagonally upward;
Translating EA3 to the position of point D to form an intersection point B3 with the third reference line, and making A3B3 the straight line segment 3;
in this way,
Finally, the step of processing the straight line N, the starting point of the straight line N is An, the ending point of the straight line N is Bn, and the orthographic projection of the An point onto the crystal rod is Cn point,
Creating an Nth reference line that is perpendicular to the angle bisector of ∠EAnCn and diagonally upward, starting from the An point;
translating EAn to the position of point D to form an intersection point Bn with the Nth reference line, where AnBn is the straight line segment N, and the N satisfies N>3. How to process a flow tube.

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