CN203923446U - Heat shield for single crystal furnace - Google Patents
Heat shield for single crystal furnace Download PDFInfo
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- CN203923446U CN203923446U CN201420323003.4U CN201420323003U CN203923446U CN 203923446 U CN203923446 U CN 203923446U CN 201420323003 U CN201420323003 U CN 201420323003U CN 203923446 U CN203923446 U CN 203923446U
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- inner core
- single crystal
- heat shield
- ligand
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Abstract
The disclosed heat shield for single crystal furnace of the utility model, comprises at least one main body, and cylinder main body is spliced by a plurality of splicing blocks.Heat shield for single crystal furnace of the present utility model is splicing construction, material without bulk also can process, tooling cost is low and difficulty of processing is little, when being damaged, only need to change the part being damaged, further reduced use cost, and its installing/dismounting step is simple, be connected firmly, dependable performance.
Description
Technical field
The utility model belongs to single crystal growing furnace producing apparatus technical field, relates to a kind of heat shield for single crystal furnace.
Background technology
Along with the development of world economy, modernization construction constantly increases high efficient energy sources demand.Photovoltaic generation is a kind of as the main energy sources of green energy resource and human kind sustainable development, is day by day subject to the attention of countries in the world and is greatly developed.Monocrystalline silicon piece is a kind of as the base mateiral of photovoltaic generation, has the market requirement widely.In the pulling process of silicon single crystal rod, heat shielding is as important composition parts of thermal field, for guide argon gas stream to, be formed with the temperature gradient distribution that is beneficial to single crystal growing.A kind of heat shielding of generally using is to be formed through machining manufacture by graphite.Along with the increase of thermal field of single crystal furnace size, the size of heat shielding is corresponding increase also, directly causes manufacturing cost high.And, once be damaged, need integral replacing, be unfavorable for reducing use cost.
Utility model content
The purpose of this utility model is to provide a kind of heat shield for single crystal furnace, once thereby be damaged and need to all change and cause the problem that use cost is high to solve existing heat shielding.
The technical scheme that the utility model adopts is, heat shield for single crystal furnace, comprises at least one main body, and a cylinder main body is spliced by a plurality of splicing blocks.
Feature of the present utility model is also,
Cylinder main body comprises a connecting cylinder, or comprises at least two connecting cylinders and the support ring corresponding with connecting cylinder number, and support ring is connected between two adjacent connecting cylinders.
Cylinder main body comprises inner barrel and the outer cylinder body cooperatively interacting, and inner barrel comprises edge in the inner core main body and first of coaxial connection, and outer cylinder body comprises edge in the urceolus main body and second of coaxial connection.
The diameter of inner core body openings is greater than the diameter of its bottom, and urceolus main body is identical with inner core body shape or be round shape.
Inner core main body comprises a plurality of splicing bars that connect successively, splicing bar near on first along the width at place be greater than away from first along the width at place, inner core main body has lower fitting projection along place on first.
Inner barrel also comprise be coaxially connected in inner core main body away from first along the inner core ligand at place, inner core ligand has upper cooperation draw-in groove, the upper cooperation draw-in groove of inner core ligand matches with the lower fitting projection of inner core main body.
Inner core ligand also has the lower cooperation draw-in groove away from upper cooperation draw-in groove, outer cylinder body also comprise be coaxially connected in urceolus main body away from second along the urceolus ligand at place, urceolus ligand has cooperation snap ring, and the cooperation snap ring of urceolus ligand matches with the lower cooperation draw-in groove of inner core ligand.
Inner core ligand and urceolus ligand are all formed in one.
Inner barrel also comprises the first shack and a plurality of interior mounting block, the first shack be connected on inner core main body and first along between, the first shack has a plurality of the first fixed orificess, on first along having and a plurality of the first fixed orificess a plurality of the second fixed orificess one to one, a plurality of interior mounting blocks are corresponding with the first fixed orifices and the second fixed orifices, and in each, mounting block all inserts in corresponding second fixed orifices and the first fixed orifices successively.
Inner core main body has upper fitting projection along place on first, and inner barrel also comprises the first shack, and the first shack has connection matching piece, and the upper fitting projection of inner core main body is placed in connection matching piece.
The utlity model has following beneficial effect:
1, heat shield for single crystal furnace of the present utility model is splicing construction, and the cost of material is low.While being damaged, only need to change the part being damaged, further reduced use cost.
2, heat shield for single crystal furnace installing/dismounting step of the present utility model is simple, be connected firmly, and dependable performance.
Accompanying drawing explanation
Fig. 1 is the structural representation of heat shield for single crystal furnace of the present utility model;
Fig. 2 is the decomposing schematic representation of heat shield for single crystal furnace of the present utility model;
Fig. 3 is the sectional view of heat shield for single crystal furnace of the present utility model;
Fig. 4 is the decomposing schematic representation of the inner barrel of heat shield for single crystal furnace of the present utility model;
Fig. 5 is the decomposing schematic representation of the outer cylinder body of heat shield for single crystal furnace of the present utility model.
In figure, 100. heat shield for single crystal furnace, 101. lower end, 102. upper end, 10. inner barrel, 11. inner core ligands, on 110., coordinate draw-in groove, coordinate draw-in groove 111. times, 112. first mating holes, 12. inner core main bodys, 120. times fitting projections, fitting projection on 121., 122. second mating holes, 123. first connecting holes, 124. splicing bars, 125. lower protruding block, 126. upper protruding block, 13. first shacks, 130. first connect splicing block, 131. connect matching piece, 132. second connecting holes, 133. first fixed orificess, edge on 14. first, on 140. first along splicing block, 141. second fixed orificess, 150. interior mating partss, 151. interconnecting piece, 152. interior mounting blocks, 20. outer cylinder bodies, 21. urceolus ligands, 210. coordinate snap ring, 211. inserting groove, 212. first fit on holes, 22. urceolus main bodys, peg graft for 220. times and encircle, on 221., peg graft and encircle, 222. second fit on holes, 223. first outer connecting holes, 224. outer connecting cylinders, 225. outer support rings, 226. support cooperation ring, 227. support matching piece, 228. contiguous block, 229. support splicing block, 2290. tumbler pin, 23. second shacks, 230. second connect splicing block, 231. connect inserting groove, 232. second outer connecting holes, 233. first outer fixed orificess, edge on 24. second, on 240. second along splicing block, 241. second outer fixed orificess, 250. fit on parts, 251. outer connector, 252. outer mounting blocks.
Embodiment
Below in conjunction with drawings and Examples, the utility model is elaborated.
The utility model provides a kind of heat shield for single crystal furnace, comprises at least one cylindrical shell, and described cylindrical shell comprises cylinder main body and the upper edge of coaxial connection, and described cylinder main body is spliced by a plurality of splicing blocks.As depicted in figs. 1 and 2, in the present embodiment, heat shield for single crystal furnace 100 comprises inner barrel 10 and is sheathed on the outer cylinder body 20 outside inner barrel 10.Heat shielding 100 has the lower end 101 of close single crystal growing furnace furnace bottom and away from the upper end 102 of single crystal growing furnace furnace bottom.
The bore that inner barrel 10 is positioned at upper end 102 is greater than the bore of lower end 101, and in the present embodiment, inner barrel 10 is roughly reverse frustoconic.As shown in Figure 4, in the present embodiment, inner barrel 10 is spliced by a plurality of splicing blocks.Particularly, from 101Wang upper end, lower end 102, inner barrel 10 comprises successively on the inner core ligand 11 that connects, inner core main body 12, the first shack 13, first along 14 and interior fixed mechanism.Wherein, on inner core main body 12, the first shack 13 and first, along 14, by a plurality of splicing blocks, be spliced respectively.
Inner core ligand 11 is roughly reverse frustoconic, is preferably one-body molded.Inner core ligand 11 has upper cooperation draw-in groove 110, lower cooperation draw-in groove 111 and a plurality of the first mating holes 112.Wherein, upper cooperation draw-in groove 110 and lower cooperation draw-in groove 111 are the annular blind slot of offering from the outside surface direction of internal surface of inner core ligand 11, upper cooperation draw-in groove 110 is near 102 places, upper end, coordinate with inner core main body 12, and lower cooperation draw-in groove 111 is near 101 places, lower end, coordinate with outer cylinder body 20.Each first mating holes 112 is all connected with upper cooperation draw-in groove 110 and is through to the outside surface of inner barrel 10.Preferably, a plurality of the first mating holes 112 distribute with respect to the central axis equal angles of heat shielding 100.
Inner core main body 12 is less than the diameter near upper end 102 near the diameter of lower end 101, is roughly reverse frustoconic.Inner core main body 12 has the lower fitting projection 120 of close lower end 101 and the upper fitting projection 121 of close upper end 102.Lower fitting projection 120 offers a plurality of the second mating holes 122.Upper fitting projection 121 offers a plurality of the first connecting holes 123.Preferably, a plurality of the second mating holes 122 and a plurality of the first connecting hole 123 distribute with respect to the central axis equal angles of heat shielding 100 respectively.Lower fitting projection 120 is accommodating and be matched with the upper cooperation draw-in groove 110 of inner core ligand 11, a plurality of the first mating holes 112 corresponding connection one by one of a plurality of second mating holes 122 of lower fitting projection 120 and upper cooperation draw-in groove 110.Inner core main body 12 can be the single layer structure that only comprises an interior connecting cylinder, or is to comprise a plurality of interior connecting cylinders and one or more multilayered structure that is connected in the inside support ring between two adjacent interior connecting cylinders.In the present embodiment, inner core main body 12 is the single layer structure that comprises an interior connecting cylinder, by a plurality of splicing bars 124 that connect successively, is enclosed and is formed.Splicing bar 124 is greater than the width near lower end 101 near the width of upper end 102, and has the lower protruding block 125 of close lower end 101 and the upper protruding block 126 of close upper end 102.Lower fitting projection 120 consists of jointly the lower protruding block 125 of a plurality of splicing bars 124.Upper fitting projection 121 consists of jointly the upper protruding block 126 of a plurality of splicing bars 124.In the present embodiment, each second mating holes 122 all runs through the lower protruding block 125 of a splicing bar 124, and each first connecting hole 123 all runs through the upper protruding block 126 of a splicing bar 124.
The first shack 13 is enclosed and is formed by a plurality of the first connection splicing blocks 130 that connect successively.The first shack 13 has matching piece 131, a plurality of the second connecting hole 132 and a plurality of first fixed orifices 133 of connection.Connect matching piece 131 near inner core main body 12, the blind slot of offering for the outside surface direction of the internal surface from the first shack 13.Each the second connecting hole 132 is all through to the outside surface of the first shack 13, and be connected matching piece 131 and be connected.Each first fixed orifices 133 is the blind hole of offering to the lower surface direction away from upper end 102 from the upper surface of the close upper end 102 of the first shack 13.Preferably, a plurality of the second connecting holes 132 and a plurality of the first fixed orifices 133 distribute with respect to the central axis equal angles of heat shielding 100 respectively.Connect the shape size of matching piece 131 and the shape size of upper fitting projection 121 and match, upper fitting projection 121 is placed in and connects in matching piece 131.A plurality of first connecting holes 124 of upper fitting projection 121 and the second connecting hole 132 corresponding connection one by one.The first shack 13 can be the single layer structure that only comprises a ring, or is to comprise that a plurality of rings stack gradually the multilayered structure forming.The first shack 13 is multilayered structure, and first in two adjacent rings connect the setting of staggering of seam between splicing block 130, and all has distribution in all rings of comprising at the first shack 13 of the first fixed orifices 133.In the present embodiment, the first shack 13 is to comprise that two rings stack gradually the multilayered structure forming, and the seam in top loop and bottom ring staggers, and each first fixed orifices 133 all runs through top loop and extends to bottom ring.
On first along 14 by a plurality of connect successively first on along splicing block 140, enclose and form.On first, along 14, have and a plurality of the first fixed orificess 133 a plurality of the second fixed orificess 141 one to one.
Interior fixed mechanism comprises a plurality of interior mating partss 150, a plurality of interconnecting piece 151 and a plurality of interior mounting block 152.The quantity of interior mating parts 150 and shape size are all corresponding with the first mating holes 112 or the second mating holes 122.In each, mating parts 150 inserts in the first mating holes 112 and the second mating holes 122 successively, realizes fixing between inner core ligand 11 and inner core main body 12.The quantity of interconnecting piece 151 and shape size are all corresponding with the first connecting hole 123 or the second connecting hole 132.Each interconnecting piece 151 inserts in the second connecting hole 132 and the first connecting hole 123 successively, realizes fixing between the first shack 13 and inner core main body 12.The quantity of a plurality of interior mounting blocks 152 and shape size are all corresponding with the first fixed orifices 133 and the second fixed orifices 141, in each, mounting block 152 inserts in the second fixed orifices 141 and the first fixed orifices 133 successively, realizes on first along fixing between the 14 and first shack 13.
Outer cylinder body 20 can be identical with inner barrel 10 shapes, or be cylindric.As shown in Figure 5, in the present embodiment, outer cylinder body 20 is cylindric, also by a plurality of splicing blocks, is spliced.Particularly, from 101Wang upper end, lower end 102, outer cylinder body 20 comprises successively on the urceolus ligand 21 that connects, urceolus main body 22, the second shack 23, second along 24 and outer fixed mechanism.Wherein, on urceolus main body 22, the second shack 23 and second, along 24, by a plurality of splicing blocks, be spliced respectively.
As shown in Figure 3 and Figure 5, urceolus ligand 21 is annular, is preferably one-body molded.Urceolus ligand 21 is connected between inner core ligand 11 and urceolus main body 22.Urceolus ligand 21 has snap ring 210, inserting groove 211 and a plurality of first fit on hole 212 of cooperation.Coordinate snap ring 210 to match with the lower cooperation draw-in groove 111 of inner core ligand 11.Inserting groove 211 is near urceolus main body 22, for from urceolus ligand 21 near the end face of upper end 102 to lower end 101 blind slots of offering.Each first fit on hole 212 is all connected with inserting groove 211, and is divided into the first hole section of outside surface and the second hole section of close internal surface near urceolus ligand 21 by inserting groove 211.In the present embodiment, a plurality of the first fit on holes 212 distribute with respect to the central axis equal angles of heat shielding 100.
Urceolus main body 22 is tubular, has the lower grafting ring 220 of close lower end 101 and the upper grafting ring 221 of close upper end 102.Lower grafting ring 220 matches with inserting groove 211.On lower grafting ring 220, offer a plurality of the second fit on holes 222.When inserting groove 211 matches with lower grafting ring 220, the second fit on hole 222 is connected with the first fit on hole 212, and each second fit on hole 222 is all connected between the first hole section and the second hole section in the first fit on hole 212.On upper grafting ring 221, offer a plurality of the first outer connecting holes 223.Preferably, a plurality of the second fit on holes 222 and a plurality of the first outer connecting hole 223 distribute with respect to the central axis equal angles of heat shielding 100 respectively.Urceolus main body 22 can be the single layer structure that only comprises an outer connecting cylinder, or is to comprise a plurality of outer connecting cylinders and one or more multilayered structure that is connected in the outer support ring between two adjacent outer connecting cylinders.In the present embodiment, urceolus main body 22 is the multilayered structure that comprises two outer connecting cylinders 224 and an outer support ring 225.Lower grafting ring 220 and upper grafting ring 221 lay respectively at two outer connecting cylinders 224 away from the end of outer support ring 225.Two outer connecting cylinders 224 all have to support near the end of outer support ring 225 and coordinate ring 226.Support ring 225 offers with two and supports the cooperation ring 226 support matching pieces 227 that match.Particularly, connecting cylinder 224 is connected to enclose successively by a plurality of contiguous blocks 228 and forms.Support ring 225 is enclosed and is formed by a plurality of support splicing blocks 229 connections, and in the present embodiment, support ring 225 is the multilayered structure that a plurality of rings stack gradually formation, the setting of staggering of seam between adjacent support splicing block 229 in two-layer, and adjacent interlayer is fixing by the tumbler pin 2290 axially arranging along heat shield for single crystal furnace 100.In the present embodiment, compared to the outside surface of support ring 225, support the internal surface setting of the more close support ring 225 of matching piece 227, contiguous block 228 is plugged in and supports in matching piece 227, and the outside surface of contiguous block 228 is concordant with the outside surface of support ring 225.
The second shack 23 is enclosed and is formed by a plurality of the second connection splicing blocks 230 that connect successively.The second shack 23 has inserting groove 231, a plurality of the second outer connecting hole 232 and a plurality of first outer fixed orifices 233 of connection.Connecting inserting groove 231 near urceolus main body 22, is the blind slot of inwardly offering near the end face of lower end 101 from the second shack 23.Each the second outer connecting hole 232 all runs through internal surface and the outside surface of the second shack 23, and be connected inserting groove 231 and be connected.Each first outer fixed orifices 233 is the blind hole of offering to the lower surface direction away from upper end 102 from the upper surface of the close upper end 102 of the second shack 23.Preferably, a plurality of the second outer connecting holes 232 and a plurality of the first outer fixed orifices 233 distribute with respect to the central axis equal angles of heat shielding 100 respectively.Connect the shape size of inserting groove 231 and the shape size of upper grafting ring 221 and match, upper grafting ring 221 is placed in and connects in inserting groove 231.A plurality of first outer connecting holes 223 of upper grafting ring 221 and the second outer connecting hole 232 corresponding connection one by one.The second shack 23 can be the single layer structure that only comprises a ring, or is to comprise that a plurality of rings stack gradually the multilayered structure forming.The second shack 23 is multilayered structure, and second in two adjacent rings connect the setting of staggering of seam between splicing block 230, and all has distribution in all rings of comprising at the second shack 23 of the first outer fixed orifices 233.In the present embodiment, the second shack 23 is to comprise that two rings stack gradually the multilayered structure forming, and the seam in top loop and bottom ring staggers, and each first outer fixed orifices 233 all runs through top loop and extends to bottom ring.
On second along 24 by a plurality of connect successively second on along splicing block 240, enclose and form.On second, along 24, have and a plurality of the first outer fixed orificess 233 a plurality of the second outer fixed orificess 241 one to one.
Outer fixed mechanism comprises a plurality of fit on parts 250, a plurality of outer connector 251 and a plurality of outer mounting block 252.The quantity of fit on part 250 and shape size are all corresponding with the first fit on hole 212 or the second fit on hole 222.Each fit on part 250 inserts in the first mating holes 112 and the second mating holes 123 successively, realizes fixing between inner core ligand 11 and inner core main body 12.The quantity of interconnecting piece 151 and shape size are all corresponding with the first connecting hole 124 or the second connecting hole 132.Each interconnecting piece 151 inserts in the second connecting hole 132 and the first connecting hole 124 successively, realizes fixing between the first shack 13 and inner core main body 12.The quantity of a plurality of interior mounting blocks 152 and shape size are all corresponding with the first fixed orifices 133 and the second fixed orifices 141, in each, mounting block 152 inserts in the second fixed orifices 141 and the first fixed orifices 133 successively, realizes on first along fixing between the 14 and first shack 13.
In the present embodiment, inner barrel 10 and outer cylinder body 20 coordinates, along having a determining deviation on 14 and second between 24, certain on first, according to thermal field practical structures needs, also can make along 14, to be carried on second along on 24 on first.
Heat shield for single crystal furnace 100 of the present utility model is splicing construction, without the material of bulk, also can process, and cost is low.While being damaged, only need to change the part being damaged, further reduced use cost.And installing/dismounting step is simple, is connected firmly, dependable performance.
Claims (10)
1. heat shield for single crystal furnace, comprises at least one main body, and described cylinder main body is spliced by a plurality of splicing blocks.
2. heat shield for single crystal furnace as claimed in claim 1, it is characterized in that: described cylinder main body comprises a connecting cylinder, or comprise at least two described connecting cylinders and the support ring corresponding with described connecting cylinder number, described support ring is connected between two adjacent connecting cylinders.
3. heat shield for single crystal furnace as claimed in claim 1 or 2, it is characterized in that: described cylinder main body comprises inner barrel and the outer cylinder body cooperatively interacting, described inner barrel comprises edge in the inner core main body and first of coaxial connection, and described outer cylinder body comprises edge in the urceolus main body and second of coaxial connection.
4. heat shield for single crystal furnace as claimed in claim 3, is characterized in that: the diameter of described inner core body openings is greater than the diameter of its bottom, and described urceolus main body is identical with described inner core body shape or be round shape.
5. heat shield for single crystal furnace as claimed in claim 4, it is characterized in that: described inner core main body comprises a plurality of splicing bars that connect successively, described splicing bar near on described first along the width at place be greater than away from first along the width at place, described inner core main body has lower fitting projection along place on described first.
6. heat shield for single crystal furnace as claimed in claim 5, it is characterized in that: described inner barrel also comprise be coaxially connected in described inner core main body away from described first along the inner core ligand at place, described inner core ligand has upper cooperation draw-in groove, and the upper cooperation draw-in groove of described inner core ligand matches with the lower fitting projection of described inner core main body.
7. heat shield for single crystal furnace as claimed in claim 6, it is characterized in that: described inner core ligand also has the lower cooperation draw-in groove away from upper cooperation draw-in groove, described outer cylinder body also comprise be coaxially connected in described urceolus main body away from described second along the urceolus ligand at place, described urceolus ligand has cooperation snap ring, and the cooperation snap ring of described urceolus ligand matches with the lower cooperation draw-in groove of described inner core ligand.
8. heat shield for single crystal furnace as claimed in claim 7, is characterized in that: described inner core ligand and described urceolus ligand are all formed in one.
9. heat shield for single crystal furnace as claimed in claim 5, it is characterized in that: described inner barrel also comprises the first shack and a plurality of interior mounting block, described the first shack be connected on described inner core main body and described first along between, described the first shack has a plurality of the first fixed orificess, on described first along having and a plurality of the first fixed orificess a plurality of the second fixed orificess one to one, described a plurality of interior mounting block is corresponding with the first fixed orifices and the second fixed orifices, and in each, mounting block all inserts in corresponding second fixed orifices and the first fixed orifices successively.
10. heat shield for single crystal furnace as claimed in claim 5, it is characterized in that: described inner core main body has upper fitting projection along place on described first, described inner barrel also comprises the first shack, described the first shack has connection matching piece, and the upper fitting projection of described inner core main body is placed in described connection matching piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420323003.4U CN203923446U (en) | 2014-06-17 | 2014-06-17 | Heat shield for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420323003.4U CN203923446U (en) | 2014-06-17 | 2014-06-17 | Heat shield for single crystal furnace |
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| Publication Number | Publication Date |
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| CN203923446U true CN203923446U (en) | 2014-11-05 |
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| CN201420323003.4U Active CN203923446U (en) | 2014-06-17 | 2014-06-17 | Heat shield for single crystal furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103567A (en) * | 2017-12-21 | 2018-06-01 | 上海骐杰碳素材料有限公司 | A kind of guide shell and preparation method thereof and material |
| CN111321457A (en) * | 2018-12-13 | 2020-06-23 | 上海新昇半导体科技有限公司 | Split type draft tube |
-
2014
- 2014-06-17 CN CN201420323003.4U patent/CN203923446U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103567A (en) * | 2017-12-21 | 2018-06-01 | 上海骐杰碳素材料有限公司 | A kind of guide shell and preparation method thereof and material |
| CN111321457A (en) * | 2018-12-13 | 2020-06-23 | 上海新昇半导体科技有限公司 | Split type draft tube |
| TWI730528B (en) * | 2018-12-13 | 2021-06-11 | 大陸商上海新昇半導體科技有限公司 | A split draft tube |
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| C14 | Grant of patent or utility model | ||
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Address after: 710100 Changan District, Shaanxi Province, aerospace Road, No. 388, No. Patentee after: Longji green energy Polytron Technologies Inc Address before: 710100 Changan District, Shaanxi Province, aerospace Road, No. 388, No. Patentee before: Xi'an Longji-Silicon Co., LTD. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191231 Address after: 674800 clean energy carrying Industrial Park in Shilong Ba Town, Huaping County, Lijiang, Yunnan Patentee after: Huaping Longji silicon material Co., Ltd Address before: 710100 No. 388, middle route, Xi'an, Shaanxi, Changan District Patentee before: Longji green energy Polytron Technologies Inc |