CN102731134A - Straight pulling single crystal furnace and processing method of carbon-carbon composite material for straight pulling single crystal furnace - Google Patents
Straight pulling single crystal furnace and processing method of carbon-carbon composite material for straight pulling single crystal furnace Download PDFInfo
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- CN102731134A CN102731134A CN2012102417710A CN201210241771A CN102731134A CN 102731134 A CN102731134 A CN 102731134A CN 2012102417710 A CN2012102417710 A CN 2012102417710A CN 201210241771 A CN201210241771 A CN 201210241771A CN 102731134 A CN102731134 A CN 102731134A
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Abstract
The invention discloses a processing method of carbon-carbon composite material for a straight pulling single crystal furnace. The method comprises the steps of processing carbon fiber into a prefabricated body, then heating the prefabricated body in a chemical deposition furnace to 1050-1150 DEG C, and introducing propane gas, wherein the propane gas is decomposed at high temperature to generate carbon and the carbon is deposited in the prefabricated body; placing the compacted prefabricated body in a graphitization furnace; heating to 2300-2800 DEG C, and maintaining the temperature for 2-4 hours and cooling to form the carbon-carbon composite material. The invention further discloses the straight pulling single crystal furnace which comprises a heater processed by the carbon-carbon composite material. Density of the heater is greater than or equal to 1.8g/cm<3>. The processing method of the carbon-carbon composite material provided by the invention replaces a method of repeated impregnation by carrying out compacting treatment to the prefabricated body by using the chemical vapor deposition furnace, so that not only is the process simple, but also more impurities do not be doped in the compacting treatment process, and high temperature purification is not needed, thereby greatly simplifying the processing method.
Description
Technical field
The present invention relates to the photovoltaic field, particularly a kind of working method and a kind of czochralski crystal growing furnace that is used for the manufacture order crystal silicon that is used for the carbon-carbon composite of czochralski crystal growing furnace.
Background technology
Czochralski crystal growing furnace is mainly used in the fusing of polycrystalline materials such as polysilicon, adopts the equipment of Grown by CZ Method dislocation-free monocrystalline, in the course of processing, needs suitable thermal field, the whole hot system that promptly keeps monocrystalline under the certain temperature gradient, to grow.If thermal field does not meet the single crystal growing condition, the monocrystalline of growth is second-rate, dislocation and other textural defect are arranged, or make monocrystalline become polycrystalline easily, even can't seeding.Therefore, the configuration of the thermal field of czochralski crystal growing furnace is very important pulling of crystals Technology.
At present, czochralski crystal growing furnace commonly used generally adopts high purity graphite to process, for example; Parts such as well heater, crucible and guide shell; Simultaneously, czochralski crystal growing furnace also comprises various insulations and sealing equipment, to guarantee the elevated-temperature seal state in single crystal growth process.Along with application and the super large development of integrated circuits of silicon single-crystal in the photovoltaic industry, czochralski crystal growing furnace just develops towards the direction that maximizes, and the maximization czochralski crystal growing furnace is an important design objective.
When adopting large size high purity graphite starting material machining large czochralski crystal growing furnace; Its moulding is difficulty comparatively; And increase along with size; Its tooling cost approximately is progression and increases, and for example, the expense of processing the well heater on 28 inches the czochralski crystal growing furnace is about more than three times of well heater of 22 inches czochralski crystal growing furnace; Simultaneously; Because the fragility of graphite is bigger, intensity is relatively low, when the thermal field of czochralski crystal growing furnace big more; The parts that adopt high purity graphite to process are easy to generate crackle and lost efficacy under repeated stress, had a strong impact on the quality of work-ing life, charging capacity and the silicon rod of czochralski crystal growing furnace.
In addition; Because at present domestic still do not have independently to produce czochralski crystal growing furnace with large size high purity graphite producer, required graphite is most of to rely on external import, and external graphite quantity, specification to Chinese exports has strict restriction; Make that the supply of domestic graphite material is relatively more nervous always; This has restricted the development of China's monocrystalline industry to a great extent, therefore, needs badly and adopts suitable novel material to replace graphite material processing and manufacturing single crystal growing furnace.
A kind of working method that is used to produce the carbon carbon heater is disclosed in the patent No. is the patent document of 200610043185.X; The starting material that adopt are thomel; At first combine and process full charcoal fiber three way structure well heater precast body with needled carbon cloth and no latitude cloth; The method of dipping repeatedly through the charing of bituminizing charing and acetone-furfural resin dipping combines is carried out densification to the well heater precast body, reaches 1.6kg/cm in the density of well heater precast body
3After, this well heater precast body is carried out high temperature purification treatment, form the well heater goods, after mechanical workout can make the well heater that is used for czochralski crystal growing furnace.
Under this working method, not only tooling cost is relatively low, and the resistivity of the well heater processed than graphite material of the resistivity of the well heater of processing is low, and the intensity of well heater increases, and helps to prolong its work-ing life, reduces the turnover rate of well heater.But because above-mentioned working method adopts the method that pitch and resin flood repeatedly that the well heater precast body is carried out densification; In this process, need dipping repeatedly, make working method comparatively loaded down with trivial details; And can be doped into more impurity in the well heater precast body; Need carry out high temperature purification treatment, and the high temperature purification treatment relative complex, this has increased the difficulty of working method to a certain extent.At present this working method still is in the short run experimental stage, and that is that all right is ripe for utilisation technology.
Therefore, choosing effective working method processing carbon-carbon composite, improve the work-ing life and the charging capacity of czochralski crystal growing furnace, is present those skilled in the art's technical issues that need to address.
Summary of the invention
The purpose of this invention is to provide a kind of working method that is used for the carbon-carbon composite of czochralski crystal growing furnace, this working method is simple relatively.Another object of the present invention provides a kind of czochralski crystal growing furnace that adopts above-mentioned carbon-carbon composite system to process, and improves its work-ing life.
The working method of carbon-carbon composite provided by the present invention may further comprise the steps:
Steps A: utilize thomel to be processed into precast body;
Step B: said precast body is placed on is heated to 1050 ° of C-1150 ° of C in the chemical vapor deposition stove;
Step C: in said chemical vapor deposition stove, feed propane gas, said propane gas is at high temperature decomposed generation carbon, and said carbon laydown is in said precast body, to improve the density of said precast body;
Step D: the said precast body after the densification is placed in the graphitizing furnace, is heated to 2300 ° of C-2800 ° of C, keep this temperature after 2-4 hour, cool off, form carbon-carbon composite.
Preferably, steps A is specially: resin is coated on the thomel, carry out thermosetting after, adopt the 3D knitting skill that said carbon fiber knit is become said precast body.
Preferably, said thomel is the 12K thomel.
The present invention also provides a kind of czochralski crystal growing furnace, comprises the well heater that is made by the carbon-carbon composite that adopts above-mentioned working method to process, the density>=1.8g/cm of said well heater
3
Preferably, said czochralski crystal growing furnace further comprises the crucible that is positioned at said well heater inside, and said crucible is made by the carbon-carbon composite that adopts above-mentioned working method to process, and the density of said crucible is 1.6-1.8g/cm
3
Preferably, below said crucible, be provided with the collet and the pressure pin that support said crucible, said collet and said pressure pin are made by the carbon-carbon composite that adopts above-mentioned working method to process.
Preferably, above said crucible, be provided with the guide shell that makes by the carbon-carbon composite that adopts above-mentioned working method to process, the density>=1.5g/cm of said guide shell
3
Preferably, said czochralski crystal growing furnace further comprises the heat-preservation cylinder that is made by the carbon-carbon composite that adopts above-mentioned working method to process, and the density of said heat-preservation cylinder is 0.2-0.3g/cm
3
Preferably, said czochralski crystal growing furnace further comprise the lagging material that makes by the carbon-carbon composite that adopts above-mentioned working method to process, the density of said lagging material is 0.2-0.3g/cm
3
Preferably, said well heater is connected with web plate through electrode bolts, and said electrode bolts and said web plate are made by the carbon-carbon composite that adopts above-mentioned working method to process.
The mode of passing through carbon laydown of the carbon-carbon composite of the working method processing of carbon-carbon composite provided by the present invention is carried out densification to precast body and has been replaced dipping repeatedly of the prior art; Its method is simple relatively; And the material after the densification is impure less; Do not need high temperature purification treatment, simplified the working method of carbon-carbon composite.
Czochralski crystal growing furnace provided by the present invention is processed by the carbon-carbon composite that adopts above-mentioned working method to process, and has replaced traditional graphite material, and the intensity of carbon-carbon composite is big than the intensity of graphite material, helps to improve the work-ing life of czochralski crystal growing furnace; In addition, under the same intensity condition, can also reduce the thickness of parts such as heat-preservation cylinder, help to improve the charging capacity of czochralski crystal growing furnace, improve output.
Description of drawings
Fig. 1 is the schema of a kind of embodiment of working method of carbon-carbon composite provided by the present invention;
Fig. 2 is the structural representation of a kind of embodiment of czochralski crystal growing furnace provided by the present invention.
Embodiment
Core of the present invention provides a kind of working method that is used for the carbon-carbon composite of czochralski crystal growing furnace, and this working method is simple relatively.Another core of the present invention provides a kind of czochralski crystal growing furnace that adopts above-mentioned carbon-carbon composite system to process, and improves its work-ing life.
In order to make those skilled in the art person understand the present invention program better, the present invention is done further detailed description below in conjunction with accompanying drawing and embodiment.
Please refer to Fig. 1, Fig. 1 is the schema of a kind of embodiment of working method of carbon-carbon composite provided by the present invention.
In a kind of embodiment, the starting material that the working method that is used for the carbon-carbon composite of czochralski crystal growing furnace provided by the present invention adopts are thomel, and concrete working method may further comprise the steps:
Step S11: thomel is processed into precast body.
The method of processing precast body is more, for example, can on thomel, coat resin in advance uniformly, carries out thermosetting, so that the fixed carbon fiber form adopts the 3D knitting skill again, carbon fiber knit is become precast body.
Because the density of the precast body that forms is less relatively, does not reach the density of expection, need carry out densification to it, this densification is carried out in chemical vapor deposition stove.
Step S12: precast body is placed on is heated to 1050 ° of C-1150 ° of C in the chemical vapor deposition stove, when precast body is heated, preferably be heated to 1100 ° of C substantially, to improve its densification effect.
Step S13: in above-mentioned chemical vapor deposition stove, feed propane gas, propane gas is decomposed generation carbon under hot conditions, and the carbon laydown of generation is in precast body, so that improve the density of precast body.
After densification finishes, need carry out graphitization processing to precast body, can further stablize the internal structure of precast body on the one hand, on the other hand can the purifying precast body.
Step S14: the precast body after the densification is placed in the graphitizing furnace, is heated to 2300 ° of C-2800 ° of C, keep this temperature about 2-4 hour; After the cooling, finally form carbon-carbon composite, when heating; Preferably be heated to 2500 ° of C substantially, its graphitization processing effect is better.
Need to prove; In order to obtain the different carbon-carbon composite of density, can realize through changing the treatment time of precast body in chemical vapor deposition stove, big more like the density and the intensity of the carbon-carbon composite of need processing; The time of in chemical vapor deposition stove, handling so is long more; For example, the precast body of the well heater on the czochralski crystal growing furnace needs to handle about 100 hours in chemical vapor deposition stove, and heat-preservation cylinder only needs several hrs to get final product.
Further, can not increase substantially on the basis of production cost, can adopt the starting material of 12K thomel for processing.
The working method of processing carbon-carbon composite provided by the present invention adopts the 3D knitting skill to form precast body; This method is simple relatively, adopts chemical vapor deposition stove that precast body is carried out densification simultaneously, has replaced dipping repeatedly of the prior art; Compaction process is also simple relatively; And in densified, can in precast body, not be doped into more impurity, the purity of the carbon-carbon composite of final processing is higher relatively; Therefore need not carry out high temperature purification treatment, simplify the complete processing of carbon-carbon composite greatly the precast body after the densification.
When adopting above-mentioned carbon-carbon composite processing to be used for the parts of czochralski crystal growing furnace, need confirm that material parameter such as proper density confirms in the time of the precast body of each parts being carried out densification with its function according to the performance of each parts; At last the carbon-carbon composite that processes is carried out mechanical workout, finally form the parts of desired design.
Please refer to Fig. 2, Fig. 2 is the structural representation of a kind of embodiment of czochralski crystal growing furnace provided by the present invention.
The present invention also provides a kind of czochralski crystal growing furnace that adopts above-mentioned carbon-carbon composite to process; In a kind of embodiment; Czochralski crystal growing furnace provided by the present invention comprises the well heater 21 that adopts above-mentioned carbon-carbon composite to process; This well heater 21 can be monobloc(k)type, and the circumferential direction of well heater 21 is provided with equally distributed equidistant slots; When in the electroless plating stove, the well heater precast body being carried out densification, density requirements reaches 1.8g/cm at least
3, tensile strength reaches 80MPa at least, and layer is cut intensity and is reached 10MPa at least, and the scope of high temperature resistance value is 0.023 Ω-0.025 Ω, and in addition, the overall height of well heater 21 is roughly 400-450mm, and wall thickness is roughly 4-10mm.
Below well heater 21, be provided with two web plates 18, well heater 21 is connected with web plate 18 through electrode bolts 11, and electrode bolts 11 all adopts carbon-carbon composite to process with web plate 18; This web plate 18 is a L-square; Its thickness is roughly 10-30mm; Electrode bolts 11 is arranged on the horizontal plane of web plate 18, on the vertical direction of web plate 18, also is provided with the joint bolt 19 that is connected with the sidewall of well heater 21, to increase strength of joint between the two.
The heat-preservation cylinder of czochralski crystal growing furnace provided by the present invention can be divided into heat-preservation cylinder 10, middle heat-preservation cylinder 7 and last heat-preservation cylinder 4 down; Be used for the insulation of well heater 21 inner thermal fields; Three heat-preservation cylinders all adopt carbon-carbon composite to process, and density is 0.2-0.3g/cm
3
Below well heater 21, also be provided with the compressing tablet 15 that adopts carbon-carbon composite to process; Upper and lower sides at compressing tablet 15 is separately installed with the soft carbon felt 13 of insulation; Compressing tablet 15 is provided with locating slot with the soft carbon felt 13 of insulation; Following heat-preservation cylinder 10 is installed in the locating slot place, and also is provided with the soft carbon felt 12 of insulation that following heat-preservation cylinder 10 is wrapped in the periphery of following heat-preservation cylinder 10; Bottom at following heat-preservation cylinder 10 has aiutage; This aiutage runs through the sidewall of following heat-preservation cylinder 10, and the heat-preservation cylinder 10 outside soft carbon felts 12 of insulation are connected with extraction line with being positioned at down, at aiutage and following heat-preservation cylinder 10 and be incubated and be provided with the aiutage sheath 16 that the employing carbon-carbon composite processes between the soft carbon felt 12.
After mechanical workout, the internal diameter of following heat-preservation cylinder 10 is roughly 750-760mm, and thickness is roughly 4-8mm.
Be positioned at web plate 18 below compressing tablet 15 and the soft carbon felt 13 of insulation on have the through hole of two vertical directions; The inwall of through hole is provided with the electrode sheath 17 that adopts above-mentioned carbon-carbon composite to process; And electrode bolts 11 is installed in this electrode sheath 17, and the distance between the medullary ray of two electrode sheaths 17 is roughly 529-531mm.
In addition; All have the through hole of identical size and dead in line at the middle part of compressing tablet 15 and the middle part of the soft carbon felt 13 of two-layer insulation that is positioned at compressing tablet 15 upper and lower sides; Pressure pin 20 runs through this through hole and vertically is provided with, and the inwall of through hole is provided with pressure pin sheath 14 to reduce the wearing and tearing between pressure pin 20 and the compressing tablet 15; The cross-sectional area of the upper end of pressure pin 20 increases gradually, and the top of pressure pin 20 is provided with groove; Above pressure pin 20, being provided with collet 22, matches with the upper surface of pressure pin 20 in the lower surface of this collet 22, so that position relation is between the two positioned, above collet 22, is provided with groove equally; Pressure pin 20 all adopts above-mentioned carbon-carbon composite to process with collet 22, and its density need reach 1.6g/cm
3
The crucible 6 that is processed by carbon-carbon composite is installed above collet 22; Bottom at crucible 6 is provided with boss, and the groove on the top of this boss and collet 22 matches, to realize location between the two; The height of boss is roughly 8-12mm, and angle is roughly 66 °; When the precast body to crucible 6 carried out densification, requiring its density was 1.6-1.8g/cm
3, after mechanical workout, the height of crucible 6 is roughly 400-450mm, and side thickness is roughly 4-10mm, and the thickness of bottom is roughly 10-30mm.
Be provided with back up pad 9 at following heat-preservation cylinder 10 with above being positioned at the soft carbon felt 12 of its outside insulation; Middle heat-preservation cylinder 7 is installed in the top of back up pad 9, the outside of crucible 6; And the top of heat-preservation cylinder 7 during upward heat-preservation cylinder 4 is installed in; Last heat-preservation cylinder 4 is provided with locating slot to realize location between the two in the junction, be wrapped with soft carbon felt 8 of insulation and the soft carbon felt 5 of insulation respectively in the outside of middle heat-preservation cylinder 7 and last heat-preservation cylinder 4, to reduce the loss of heat.
For middle heat-preservation cylinder 7, internal diameter is roughly 715-725mm, and thickness is roughly 4-8mm; For last heat-preservation cylinder 4, internal diameter is roughly 680-690mm, and thickness is roughly 4-8mm.
Outside at following heat-preservation cylinder 10, middle heat-preservation cylinder 7 and last heat-preservation cylinder 4 all further is provided with the lagging material that is processed by carbon-carbon composite, is used to prevent the loss of heat; Requiring the density of lagging material is 0.2-0.3g/cm
3, compressive strength reaches 0.5MPa at least, and thermal conductivity can not be higher than 0.3W/m.k.
Above last heat-preservation cylinder 4, be provided with the insulation cover 3 that adopts carbon-carbon composite to process, from the top of insulation cover 3 guide shell be installed, guide shell can comprise inner draft tube 24 and external flow guiding cylinder 23; In order to realize both location; Above insulation cover 3, be provided with locating slot, the upper end of guide shell is stuck in the locating slot and positions, in addition; Also be provided with the soft carbon felt of insulation between inner draft tube 24 and the external flow guiding cylinder 23, to strengthen the heat insulation effect of guide shell; When the precast body to guide shell carried out densification, its density will reach 1.5g/cm at least
3
Locating slot place on insulation cover 3 also is provided with the soft carbon felt of insulation; And will be incubated soft carbon felt with the gland 1 that the employing carbon-carbon composite processes and seal; And insulation cover is provided with the envelope compression ring 2 that adopts carbon-carbon composite to process, to reduce the loss of the argon gas in the thermal field.
Most of parts of czochralski crystal growing furnace provided by the invention all are to adopt carbon-carbon composite to process, and this carbon-carbon composite is to adopt above-mentioned working method to process; Because the intensity of the intensity graphite material more of the prior art of carbon-carbon composite is big; In operation process, be not easy to occur fatigue failure or crackle; Can not cause these parts to rupture at once yet or lost efficacy even crack, help to improve the work-ing life and the service efficiency of czochralski crystal growing furnace; Simultaneously, because the intensity of carbon-carbon composite is relatively large, can reduce the size of some parts in the czochralski crystal growing furnace; Like thickness of three heat-preservation cylinders etc.; So just, the increase well heater 21 that can be suitable and the size of crucible 6 help to improve the charging capacity of each production, and then improve output; At last, the tooling cost of carbon-carbon composite is low than the cost of graphite material, and this helps to reduce production costs to a certain extent.
More than the working method of the carbon-carbon composite that is used for czochralski crystal growing furnace provided by the present invention and the czochralski crystal growing furnace that adopts above-mentioned carbon-carbon composite to process have been carried out detailed introduction.Used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof.Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection domain of claim of the present invention.
Claims (10)
1. a working method that is used for the carbon-carbon composite of czochralski crystal growing furnace is characterized in that, may further comprise the steps:
A, utilize thomel to be processed into precast body;
B, said precast body is placed on is heated to 1050 ° of C-1150 ° of C in the chemical vapor deposition stove;
C, in said chemical vapor deposition stove, feed propane gas, said propane gas is at high temperature decomposed generation carbon, and said carbon laydown is in said precast body, to improve the density of said precast body;
D, the said precast body after the densification is placed in the graphitizing furnace, is heated to 2300 ° of C-2800 ° of C, keep this temperature after 2-4 hour, cool off, form carbon-carbon composite.
2. working method according to claim 1 is characterized in that steps A is specially: resin is coated on the said thomel, carry out thermosetting after, adopt the 3D knitting skill that said carbon fiber knit is become said precast body.
3. working method according to claim 1 is characterized in that, said thomel is the 12K thomel.
4. a czochralski crystal growing furnace is characterized in that, comprises the well heater that is made by the carbon-carbon composite that adopts any described working method of claim 1 to 3 to process, the density>=1.8g/cm of said well heater
3
5. czochralski crystal growing furnace according to claim 4; It is characterized in that; Said czochralski crystal growing furnace further comprises the crucible that is positioned at said well heater inside; Said crucible is made by the carbon-carbon composite that adopts any described working method of claim 1 to 3 to process, and the density of said crucible is 1.6-1.8g/cm
3
6. czochralski crystal growing furnace according to claim 5; It is characterized in that; Below said crucible, be provided with the collet and the pressure pin that support said crucible, said collet and said pressure pin are made by the carbon-carbon composite that adopts any described working method of claim 1 to 3 to process.
7. czochralski crystal growing furnace according to claim 5; It is characterized in that; Above said crucible, be provided with the guide shell that makes by the carbon-carbon composite that adopts any described working method of claim 1 to 3 to process, the density>=1.5g/cm of said guide shell
3
8. czochralski crystal growing furnace according to claim 4; It is characterized in that; Said czochralski crystal growing furnace further comprises the heat-preservation cylinder that is made by the carbon-carbon composite that adopts any described working method of claim 1 to 3 to process, and the density of said heat-preservation cylinder is 0.2-0.3g/cm
3
9. czochralski crystal growing furnace according to claim 4; It is characterized in that; Said czochralski crystal growing furnace further comprise the lagging material that makes by the carbon-carbon composite that adopts any described working method of claim 1 to 3 to process, the density of said lagging material is 0.2-0.3g/cm
3
10. czochralski crystal growing furnace according to claim 4; It is characterized in that; Said well heater is connected with web plate through electrode bolts, and said electrode bolts and said web plate are made by the carbon-carbon composite that adopts any described working method of claim 1 to 3 to process.
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| CN103334153A (en) * | 2013-06-26 | 2013-10-02 | 英利能源（中国）有限公司 | Single crystal furnace |
| CN104211401A (en) * | 2014-09-11 | 2014-12-17 | 荣成炭谷有限公司 | Manufacturing method of carbon/ceramic material manufacturing device |
| CN105695954A (en) * | 2016-01-22 | 2016-06-22 | 山东国晶新材料有限公司 | Method for strengthening mechanical properties of single crystal furnace thermal field material |
| CN107963896A (en) * | 2017-11-27 | 2018-04-27 | 江西德义半导体科技有限公司 | A kind of semiconductor crystal stove insulating layer reparation high temperature resistant cement |
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| WO2023280024A1 (en) * | 2021-07-06 | 2023-01-12 | 隆基绿能科技股份有限公司 | Heat shield outer container, heat shield, and crystal pulling thermal field |
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| CN105695954B (en) * | 2016-01-22 | 2018-07-24 | 山东国晶新材料有限公司 | A method of enhancing thermal field of single crystal furnace material mechanical performance |
| CN105695954A (en) * | 2016-01-22 | 2016-06-22 | 山东国晶新材料有限公司 | Method for strengthening mechanical properties of single crystal furnace thermal field material |
| CN107963896A (en) * | 2017-11-27 | 2018-04-27 | 江西德义半导体科技有限公司 | A kind of semiconductor crystal stove insulating layer reparation high temperature resistant cement |
| CN109942309A (en) * | 2017-12-21 | 2019-06-28 | 宜兴市宜泰碳纤维织造有限公司 | A kind of gas-phase deposition enhancing carbon fibre composite |
| CN108046820A (en) * | 2017-12-26 | 2018-05-18 | 宜兴市天宇世纪高新科技有限公司 | A kind of gas-phase deposition for enhancing carbon fibre composite |
| WO2023280024A1 (en) * | 2021-07-06 | 2023-01-12 | 隆基绿能科技股份有限公司 | Heat shield outer container, heat shield, and crystal pulling thermal field |
| CN113845369A (en) * | 2021-10-29 | 2021-12-28 | 西安美兰德新材料有限责任公司 | Production process of plate for carbon spliced heat-insulation cylinder |
| CN115141029A (en) * | 2022-08-31 | 2022-10-04 | 浙江德鸿碳纤维复合材料有限公司 | Preparation method of carbon/carbon crucible supporting rod |
| CN115141029B (en) * | 2022-08-31 | 2022-11-11 | 浙江德鸿碳纤维复合材料有限公司 | Preparation method of carbon/carbon crucible support rod |
| CN115974571A (en) * | 2022-12-28 | 2023-04-18 | 湖南金博碳基材料研究院有限公司 | Heating cylinder device and preparation method thereof |
| CN115974571B (en) * | 2022-12-28 | 2023-11-24 | 湖南金博碳基材料研究院有限公司 | Heating tube device and preparation method thereof |
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Application publication date: 20121017 |