CN103193498B - Narrow flow induction coupling chemical vapor deposition (CVD) densification method for rapidly preparing carbon/carbon composite material crucible - Google Patents
Narrow flow induction coupling chemical vapor deposition (CVD) densification method for rapidly preparing carbon/carbon composite material crucible Download PDFInfo
- Publication number
- CN103193498B CN103193498B CN201310118348.6A CN201310118348A CN103193498B CN 103193498 B CN103193498 B CN 103193498B CN 201310118348 A CN201310118348 A CN 201310118348A CN 103193498 B CN103193498 B CN 103193498B
- Authority
- CN
- China
- Prior art keywords
- carbon
- crucible
- composite material
- precast body
- frock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Carbon And Carbon Compounds (AREA)
- Ceramic Products (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention relates to a narrow flow induction coupling chemical vapor deposition (CVD) densification method for rapidly preparing a carbon/carbon composite material crucible. The method comprises the steps of: adopting a chemical vapor deposition technology, under the synergistic effect of narrow slit airflow and inductive coupling, leading mixed gas of small-molecule hydrocarbon and N2 gas to a high-temperature reaction chamber, adsorbing the small-molecule hydrocarbon at the surface of an inner hole of a carbon fiber crucible precast body or a low-density carbon/carbon composite material crucible billet body, and releasing pyrolytic carbon at a high temperature, depositing the pyrolytic carbon at the surface of a hot carbon fiber, continuously improving the density of the billet body, and rapidly obtaining the compact carbon/carbon composite material crucible. By adopting the method disclosed by the invention, the crusting phenomenon of the surface is effectively restrained under the synergistic effect of narrow slit airflow and inductive coupling measures; high deposition temperature and reaction gas furnace pressure are permitted; inner and outer balanced densification is more rapidly carried out; the quality is improved; the cycle is shortened; and the cost is also reduced.
Description
Technical field
The narrow influenza that the present invention relates to a kind of preparing carbon/carbon composite material crucible CVD densifying method that should be coupled, belongs to chemical vapour deposition field.
Technical background
Carbon fiber reinforced carbon matrix matrix material (be called for short carbon/carbon, C/C) is that carbon or graphite are the material that matrix is composited take carbon or graphite fibre as reinforcement.It has the properties such as high temperature resistant, thermal conductivity good, high strength under heat shock resistance, ablation rate low and high temperature, certain unreactiveness, is desirable thermal structure, high temperature friction, high-temperature electric conduction heating and anti-ablator.In recent years, along with the reduction of carbon fiber starting material and manufacturing cost, the application of C/C matrix material progresses into industrial circle by aerospace field, extensively replaces other material.The demand of high-tech industry makes it develop rapidly in the application of industrial circle, has been widely used in the fields such as semi-conductor industry, metallurgy, chemical industry, nuclear industry and biotechnology.
C/C densification process process is exactly matrix carbon forming process, is to fill up fiber space around with high-quality carbon, to obtain the good C/C matrix material of properity.Conventional have two kinds of techniques: chemical vapour deposition (being called for short CVD) and liquid impregnation method (abbreviation PIP).The precursor that forms carbon base body with chemical Vapor deposition process has methane, propylene, Sweet natural gas etc.; Material for liquid impregnation has thermosetting resin, and resol, furfuryl resin etc., and thermoplasticity pitch, as coal-tar pitch, petroleum pitch.The report of charcoal/charcoal crucible is prepared in the charing densification of in addition chemical vapor infiltration being combined with resin impregnation in recent years, relate to a kind of preparation method of thermal field charcoal/charcoal crucible referring to CN1907914A (CN200610043186.4), the method adopts the accurate three way structure precast body of needled carbon cloth; The densification technique combining by the dipping charing of chemical vapour deposition and acetone-furfural resin and the charing of hot isostatic pressing bituminizing, repeatedly densified for several times, extrudate density>=1.83g/cm
3time densification technique finish, under the condition that passes into chlorine and freonll-11, goods are carried out to high temperature purification treatment, after mechanical workout, can make monocrystalline silicon draw machines thermal field charcoal/charcoal crucible.As monocrystalline silicon draw machines thermal field charcoal/charcoal crucible, improve the intensity of charcoal/charcoal crucible.
In existing densifying method, adopt CVD technique to prepare C/C matrix material, have high temperature resistant, mechanical property is excellent, stable chemical nature, do not pollute the outstanding advantages such as high-purity semiconductor material.Chemical vapor deposition (CVD) technique is a kind of C/C compounding technology adopting the earliest, carbon fibre fabric preform blank is put into special CVD stove, be heated to temperature requiredly, pass into hydrocarbon gas, these decomposing gas are also deposited on carbon fibre fabric around and deposit carbon in space.The significant parameter of controlling has carbon-source gas kind, flow, depositing temperature, pressure and time.Depositing temperature is generally 800～1500 ℃, and deposition pressure is that 0.1MPa is to several thousand Pa.CVD deposition method has isothermal method, temperature differential method, pressure differential method, pulsating pressure method and plasma fortified method.But, there is the deficiency that efficiency of densification is lower, preparation cycle is grown in existing CVD technology, or single stove can only be processed single products, cause manufacturing cost high, limit the large-scale application of CVD in the time preparing carbon/carbon compound material, particularly the application in the time preparing pulling single crystal silicon, polycrystalline silicon purifying melting and ingot casting carbon/carbon composite material crucible.
Summary of the invention
For the deficiencies in the prior art, the narrow influenza that the object of the invention the is to provide a kind of preparing carbon/carbon composite material crucible CVD densifying method that should be coupled.
Term explanation:
Carbon/carbon composite material crucible, be in the carbon fiber stereo fabric precast body hole by the moulding of crucible shape, adopt chemical vapour deposition (being CVD technique) or/and liquid impregnation technique (being PIP technique) fill carbon base body and carbon fiber reinforced carbon matrix composite element.
Chemical vapor deposition method (CVD), is that carbon fiber stereo fabric precast body is put into special CVD stove, is heated to temperature required, pass into hydrocarbon gas, these decomposing gas form RESEARCH OF PYROCARBON and are deposited on around carbon fibre fabric and in space, thereby realize densification, obtain carbon/carbon compound material.
Carbon fiber crucible precast body: be the carbon fiber stereo fabric precast body by the moulding of crucible shape.
Technical scheme of the present invention is as follows:
The narrow influenza of the preparing carbon/carbon composite material crucible CVD densifying method that should be coupled, comprises that step is as follows:
(1) shove charge
Carbon fiber crucible precast body is linked in induction coupling frock, cover again overdraught frock, be placed in the reaction chamber of vacuum inductive chemical vapor deposition stove, described precast body and induction coupling frock, air-flow frock are suitable, to form gas flow in thin gap passage and inductive electromagnetic coupling;
(2) preheating
Close chemical vapor deposition stove bell, intensification vacuumizes, and in the time that temperature reaches 800～1500 ℃, vacuum tightness is under 100～6000Pa condition, insulation 5～60min;
(3) RESEARCH OF PYROCARBON matrix is prepared in vapour deposition
Pass into nitrogen as protection diluent gas, small molecule hydrocarbon gas is as carbon source, by small molecule hydrocarbon: N
2=(1～4): the volume ratio of (1～4) is by small molecule hydrocarbon and N
2mixed gas pass in reaction chamber, N
2airshed 100～3000ml/min, ventilation permeable reactive 20～240h, gas is by the flow in thin gap passage forming between precast body and the air-flow frock product surface of flowing through, original position pyrolytic deposition formation carbon base body;
(4), after cooling down, obtain the carbon/carbon composite material crucible base substrate that density improves;
(5) repeat above-mentioned steps (2), (3), (4), carbon/carbon composite material crucible blank density is improved constantly, densified is for several times to density>=1.25g/cm repeatedly
3, obtain fine and close carbon/carbon composite material crucible goods.
Preferred according to the present invention, described carbon fiber crucible precast body is selected from carbon fiber knit crucible precast body, carbon fiber arrange net acupuncture crucible precast body, carbon cloth lamination crucible precast body or carbon fiber winding crucible precast body.Carbon fiber crucible precast body is all by prior art.
Preferred according to the present invention, described air-flow frock, induction coupling frock are selected electrode graphite material;
Preferred according to the present invention, described induction coupling frock is coupling graphite core.
Described small molecule hydrocarbon is carbon source, selects propylene, propane, methane or liquefied petroleum gas (LPG);
Preferred according to the present invention, described vacuum inductive chemical vapor deposition stove is selected Medium frequency induction chemical vapor deposition stove.
Preferred according to the present invention, in step (1), when shove charge, controlling gas flow in thin gap passage width is 5～60mm, and precast body internal surface is 5～100% with the coupling fitting area of induction coupling frock.Take precast body internal surface as radix, lower same.
Further preferred, crucible precast body internal surface is 50～90% with the coupling fitting area of induction coupling frock.
Further preferred, controlling gas flow in thin gap passage width is 10～50mm.
Preferred according to the present invention, when step (2) reaction chamber and product preheating, temperature is 950～1250 ℃, and vacuum tightness is 1000～4000Pa, and soaking time is 20～30min.
Preferred according to the present invention, when step (3) is prepared RESEARCH OF PYROCARBON matrix, small molecule hydrocarbon: N
2volume ratio be 1:2, N
2airshed 1000～3000ml/min, the ventilatory response time is 100～200h.
Preferred according to the present invention, the number of times that step (2) (3) (4) loops is 1～6 time, and the carbon/carbon composite material crucible volume density of acquisition is 1.25～1.85g/cm
3.
The present invention is placed in carbon fiber crucible precast body in the reaction chamber of vacuum inductive chemical vapor deposition stove, under heating hot conditions, take nitrogen as dilution shielding gas, small molecule hydrocarbon gas is passed in stove, air inlet on one side, extract out on one side, make maintenance low-voltage vacuum state in stove, small molecule hydrocarbon carbon fiber crucible precast body or carry out re-treatment discharge RESEARCH OF PYROCARBON compared with low density carbon/carbon composite material crucible base substrate internal holes wall surface absorption high temperature, RESEARCH OF PYROCARBON deposits at hot carbon fiber surface, along with the carrying out of deposition process, carbon fiber crucible precast body internal void reduces gradually, blank density improves constantly, the fine and close carbon/carbon composite material crucible of final acquisition.
Technical characterstic of the present invention and excellent results:
Utilize chemical gaseous phase depositing process to prepare on the basis of carbon/carbon composite material crucible, the present invention has increased the measure of narrow slit air-flow, force reactant gases to flow via precast body or low density billet surface gas exchange layer district, improve the new and old replacing velocity of precast body or low density billet surface gas exchange layer district gas, accelerate that precast body or low density base substrate internal-response gas infiltrate and waste gas oozes out, reduced goods top layer and inner sedimentation velocity poor; The present invention has also increased induction coupling measure, has improved goods top layer and inner sedimentation velocity, has further reduced goods top layer and inner sedimentation velocity poor; Both combinations, while taking the measure of narrow slit air-flow and induction coupling measure, effectively suppress the surface phenomenon that first crusts simultaneously, allow to adopt higher depositing temperature and reactant gases furnace pressure, internal and external equilibrium densification faster, realizes the comprehensive object that improves quality, shortens preparation cycle, reduces costs.
Method of the present invention is suitable for making pulling single crystal silicon, polycrystalline silicon purifying melting and ingot casting carbon/carbon composite material crucible, is also suitable for the carbon/carbon compound material member of other purposes.
Accompanying drawing explanation
Fig. 1 is should the be coupled device schematic diagram (section) of CVD densification of narrow influenza of the present invention.Wherein, the 1st, alternation magnetic line of force, the 2nd, graphite heater, the 3rd, ruhmkorff coil, the 4th, vacuum induction furnace, the 5th, reacting gas flow, the 6th, restriction air-flow frock, the 7th, carbon/carbon crucible, the 8th, induction coupling frock (coupling graphite core).The 9th, strut member, the 10th, air distribution plate.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention will be further described, but be not limited to this.
Embodiment 1
Preparation draws the carbon/carbon composite material crucible of silicon single crystal material, crucible size Φ 500 × 450mm.
(1) carbon fiber knit crucible precast body and induction coupling frock, air-flow frock are placed in the reaction chamber of vacuum induction cvd furnace, crucible precast body is linked in induction coupling frock, cover again overdraught frock, precast body mates with induction coupling frock, air-flow frock, forms the full internal surface induction of the wide gas flow channel of 50mm and crucible precast body cylinder section coupling;
Induction coupling frock is coupling graphite core, and air-flow frock is that electrode graphite material is made.
(2) heat up and vacuumize, in the time that temperature reaches 950 ℃, vacuum tightness is under 1000Pa condition, insulation 20min;
(3) then using nitrogen as protection diluent gas, by propylene: N
2the volume ratio of=1:1 is by propylene and N
2gas passes in the reaction chamber of step (1), N
2airshed 2000ml/min, ventilation permeable reactive 120h, original position pyrolytic deposition forms carbon base body;
(4), after cooling down, obtain the carbon/carbon composite material crucible base substrate that density improves;
(5) above-mentioned (2) (3) (4) step is carried out 2 times repeatedly, obtains volume density to be>=1.50g/cm
3carbon/carbon composite material crucible.
The carbon/carbon composite material crucible of embodiment 2, preparation purification melting polysilicon, crucible size Φ 600 × 600mm.
(1) carbon fiber is arranged net acupuncture crucible precast body and frock is placed in the reaction chamber of vacuum induction cvd furnace, and precast body mate with induction coupling frock, air-flow frock, forms the full internal surface induction of the wide gas flow channel of 30mm and crucible tube section and is coupled;
(2) heat up and vacuumize, in the time that temperature reaches 1250 ℃, vacuum tightness is under 2000Pa condition, insulation 30min;
(3) then using nitrogen as protection diluent gas, by methane: N
2the volume ratio of=2:1 is by methane and N
2gas passes in the reaction chamber of step (1), N
2airshed 1000ml/min, ventilation permeable reactive 120h, original position pyrolytic deposition forms carbon base body;
(4), after cooling down, obtain the carbon/carbon composite material crucible base substrate that density improves;
(5) above-mentioned (2) (3) (4) step is carried out 3 times repeatedly, obtains volume density to be>=1.65g/cm
3carbon/carbon composite material crucible.
Embodiment 3, prepare the carbon/carbon composite material crucible of polycrystalline silicon ingot casting, crucible size 800 × 800 × 600mm.
(1) carbon cloth lamination crucible precast body and frock are placed in the reaction chamber of vacuum induction cvd furnace, precast body mates with induction coupling frock, air-flow frock, forms the full internal surface induction of the wide gas flow channel of 10mm and crucible tube section coupling;
(2) heat up and vacuumize, in the time that temperature reaches 1150 ℃, vacuum tightness is under 4000Pa condition, insulation 30min;
(3) then using nitrogen as protection diluent gas, by liquefied petroleum gas (LPG): N
2the volume ratio of=1:2 is by liquefied petroleum gas (LPG) and N
2gas passes in the reaction chamber of step (1), N
2airshed 3000ml/min, ventilation permeable reactive 180h, original position pyrolytic deposition forms carbon base body;
(4), after cooling down, obtain the carbon/carbon composite material crucible base substrate that density improves;
(5) above-mentioned (2) (3) (4) step is carried out 3 times repeatedly, obtains volume density to be>=1.60g/cm
3carbon/carbon composite material crucible.
Claims (8)
1.
?the narrow influenza of the preparing carbon/carbon composite material crucible CVD densifying method that should be coupled, comprises that step is as follows:
(1) shove charge
Carbon fiber crucible precast body is linked in induction coupling frock, cover again overdraught frock, be placed in the reaction chamber of vacuum inductive chemical vapor deposition stove, described precast body and induction coupling frock, air-flow frock are suitable, to form gas flow in thin gap passage and inductive electromagnetic coupling;
Described induction coupling frock is coupling graphite core;
Controlling gas flow in thin gap passage width is 10～50mm;
(2) preheating
Close chemical vapor deposition stove bell, intensification vacuumizes, and in the time that temperature reaches 800～1500 ℃, vacuum tightness is under 100～6000Pa condition, insulation 5～60min;
(3) RESEARCH OF PYROCARBON matrix is prepared in vapour deposition
Pass into nitrogen as protection diluent gas, small molecule hydrocarbon gas is as carbon source, by small molecule hydrocarbon: N
2=(1～4): the volume ratio of (1～4) is by small molecule hydrocarbon and N
2mixed gas pass in reaction chamber, N
2airshed 100～3000ml/min, ventilation permeable reactive 20～240h, gas is by the flow in thin gap passage forming between precast body and the air-flow frock product surface of flowing through, original position pyrolytic deposition formation carbon base body;
(4), after cooling down, obtain the carbon/carbon composite material crucible base substrate that density improves;
(5) repeat above-mentioned steps (2), (3), (4), carbon/carbon composite material crucible blank density is improved constantly, densified is for several times to density>=1.25g/cm repeatedly
3, obtain fine and close carbon/carbon composite material crucible goods.
2. densifying method as claimed in claim 1, is characterized in that described carbon fiber crucible precast body is selected from carbon fiber knit crucible precast body, carbon fiber arrange net acupuncture crucible precast body, carbon cloth lamination crucible precast body or carbon fiber winding crucible precast body.
3. densifying method as claimed in claim 1, is characterized in that described small molecule hydrocarbon selects propylene, propane, methane or liquefied petroleum gas (LPG).
4. densifying method as claimed in claim 1, is characterized in that described vacuum inductive chemical vapor deposition stove selects Medium frequency induction chemical vapor deposition stove.
5. densifying method as claimed in claim 1, is characterized in that in step (1), and when shove charge, controlling gas flow in thin gap passage width is 10～50mm, and precast body internal surface is 5～100% with the coupling fitting area of induction coupling frock.
6. densifying method as claimed in claim 1, while it is characterized in that step (2) reaction chamber and product preheating, temperature is 950～1250 ℃, and vacuum tightness is 1000～4000Pa, and soaking time is 20～30min.
7. densifying method as claimed in claim 1, while it is characterized in that step (3) is prepared RESEARCH OF PYROCARBON matrix, small molecule hydrocarbon: N
2volume ratio be 1:2, N
2airshed 1000～3000ml/min, the ventilatory response time is 100～200h.
8. densifying method as claimed in claim 1, is characterized in that the described number of times looping of step (5) is 1～6 time, and obtaining carbon/carbon composite material crucible volume density is 1.25～1.85g/cm
3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310118348.6A CN103193498B (en) | 2013-04-07 | 2013-04-07 | Narrow flow induction coupling chemical vapor deposition (CVD) densification method for rapidly preparing carbon/carbon composite material crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310118348.6A CN103193498B (en) | 2013-04-07 | 2013-04-07 | Narrow flow induction coupling chemical vapor deposition (CVD) densification method for rapidly preparing carbon/carbon composite material crucible |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103193498A CN103193498A (en) | 2013-07-10 |
| CN103193498B true CN103193498B (en) | 2014-06-18 |
Family
ID=48716340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310118348.6A Active CN103193498B (en) | 2013-04-07 | 2013-04-07 | Narrow flow induction coupling chemical vapor deposition (CVD) densification method for rapidly preparing carbon/carbon composite material crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103193498B (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109942309A (en) * | 2017-12-21 | 2019-06-28 | 宜兴市宜泰碳纤维织造有限公司 | A kind of gas-phase deposition enhancing carbon fibre composite |
| CN108046820A (en) * | 2017-12-26 | 2018-05-18 | 宜兴市天宇世纪高新科技有限公司 | A kind of gas-phase deposition for enhancing carbon fibre composite |
| CN108218461A (en) * | 2018-01-24 | 2018-06-29 | 航天睿特碳材料有限公司 | A kind of quick CVD method for densifying of single crystal growing furnace carbon/carbon thermal field structure product |
| CN108220913B (en) * | 2018-01-24 | 2020-01-14 | 航天睿特碳材料有限公司 | Rapid low-cost CVD (chemical vapor deposition) densification method for carbon/carbon composite material |
| CN109354508B (en) * | 2018-12-13 | 2021-03-02 | 上海康碳复合材料科技有限公司 | CVI (chemical vapor infiltration) process method for rapidly preparing carbon/carbon composite crucible side in batches |
| CN109503188B (en) * | 2018-12-14 | 2021-03-02 | 上海康碳复合材料科技有限公司 | CVI (chemical vapor infiltration) process method for preparing carbon/carbon crucible based on flow field optimization |
| CN110963815B (en) * | 2019-10-10 | 2022-01-28 | 福建康碳复合材料科技有限公司 | Process for preparing large-size carbon/carbon heating body |
| CN111875401B (en) * | 2020-07-24 | 2022-05-13 | 西安超码科技有限公司 | Preparation method of high-strength and high-purity carbon/carbon composite material revolving body formed by winding |
| CN112457038A (en) * | 2020-11-13 | 2021-03-09 | 甘肃新西北碳素科技有限公司 | Preparation method of carbon/carbon composite material thin-wall cylinder |
| CN112553604A (en) * | 2020-12-18 | 2021-03-26 | 上海骐杰碳素材料有限公司 | Continuous chemical vapor deposition furnace and working method thereof |
| CN114249601B (en) * | 2021-11-15 | 2022-10-28 | 西安航空制动科技有限公司 | Densification method of brake disc made of carbon/carbon composite material |
| CN113912408B (en) * | 2021-11-30 | 2023-04-25 | 甘肃新西北碳素科技有限公司 | Quick preparation method of aircraft brake disc |
| CN114716236B (en) * | 2022-06-08 | 2022-08-19 | 佛山市中柔材料科技有限公司 | Carbon-coated silicon dioxide micro-nanofiber material and preparation method and application thereof |
| CN115231939A (en) * | 2022-07-22 | 2022-10-25 | 青岛晶易新材料科技股份有限公司 | Carbon crucible support and preparation method thereof |
| CN115745646B (en) * | 2022-11-28 | 2024-03-08 | 湖南博云新材料股份有限公司 | Preparation method of carbon/carbon composite material |
| CN117699799B (en) * | 2024-02-06 | 2024-06-07 | 玖贰伍碳源科技（天津）有限公司 | Sieving type carbon and preparation method and application thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1544686A (en) * | 2003-11-24 | 2004-11-10 | 西安航天复合材料研究所 | Carbon brake disc negative pressure directional flow outward thermal gradient chemical gas phase penetration process and apparatus |
| CN101157565A (en) * | 2007-09-13 | 2008-04-09 | 北京航空航天大学 | Novel process for preparing charcoal/charcoal component by rapid chemical liquid-phase vaporization osmosis method |
| CN101705476A (en) * | 2009-11-20 | 2010-05-12 | 中南大学 | Method for rapidly preparing high density isotropic carbon by CVD hot plate method |
| CN102660768A (en) * | 2012-05-26 | 2012-09-12 | 保定顺天新材料股份有限公司 | Preparation technology of carbon/carbon composite material crucible for monocrystalline silicon furnace |
-
2013
- 2013-04-07 CN CN201310118348.6A patent/CN103193498B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1544686A (en) * | 2003-11-24 | 2004-11-10 | 西安航天复合材料研究所 | Carbon brake disc negative pressure directional flow outward thermal gradient chemical gas phase penetration process and apparatus |
| CN101157565A (en) * | 2007-09-13 | 2008-04-09 | 北京航空航天大学 | Novel process for preparing charcoal/charcoal component by rapid chemical liquid-phase vaporization osmosis method |
| CN101705476A (en) * | 2009-11-20 | 2010-05-12 | 中南大学 | Method for rapidly preparing high density isotropic carbon by CVD hot plate method |
| CN102660768A (en) * | 2012-05-26 | 2012-09-12 | 保定顺天新材料股份有限公司 | Preparation technology of carbon/carbon composite material crucible for monocrystalline silicon furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103193498A (en) | 2013-07-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103193498B (en) | Narrow flow induction coupling chemical vapor deposition (CVD) densification method for rapidly preparing carbon/carbon composite material crucible | |
| CN103193497B (en) | Sticky product with silicon erosion resistance of carbon/carbon composite material and preparation method thereof | |
| CN109354508B (en) | CVI (chemical vapor infiltration) process method for rapidly preparing carbon/carbon composite crucible side in batches | |
| CN103553692B (en) | Carbon/silicon carbide composite material crucible preparation method | |
| CN108975922B (en) | Carbon/carbon composite material heating body with pyrolytic carbon coating on surface and preparation method thereof | |
| CN111635242A (en) | Rapid preparation method and application of high-density revolving body carbon/carbon composite material | |
| CN103449428B (en) | A kind of method of graphene growth device and growing graphene thereof | |
| CN103044056B (en) | Technology and equipment for preparing C/C composite | |
| CN104446585B (en) | The method that batch quickly prepares high-density carbon/carbon composite material | |
| CN104030716A (en) | Method for in-situ synthesis of SiC nanowires modified carbon/carbon composite preform by sol-gel method | |
| CN102276279A (en) | Preparation method of silicon carbide fiber reinforced silicon carbide composite material | |
| CN108046819A (en) | A kind of structure-function integration C/C-SiC friction materials and preparation method | |
| CN103496997A (en) | Preparation method for carbon/carbon composite material thermal-insulation hard felt | |
| CN102795871A (en) | Method for quickly preparing C/SiC ceramic matrix composite material | |
| CN203461974U (en) | Homogenization fast device of CVI (Chemical Vapor Infiltration) compact carbon/carbon crucible | |
| CN110137446B (en) | Production device and production process of nano silicon-carbon negative electrode material | |
| CN102731134A (en) | Straight pulling single crystal furnace and processing method of carbon-carbon composite material for straight pulling single crystal furnace | |
| CN107265416A (en) | The preparation method of pyrolytic boron nitride material | |
| CN113293356A (en) | Device for preparing carbon-carbon composite material | |
| CN203200177U (en) | Narrow inductive coupling CVD (Chemical Vapor Deposition) densifying tool for preparing crucible made of carbon/carbon composite material and chemical vapor deposition furnace | |
| CN204490989U (en) | A kind of chemical vapor depsotition equipment based on plasmaassisted growing graphene | |
| CN101671189B (en) | Method for using domestic carbon fiber to prepare high-performance carbon-based composite material through rapid directional infiltration | |
| CN106966745A (en) | A kind of method that pressure sintering prepares thermostructural composite | |
| CN108218461A (en) | A kind of quick CVD method for densifying of single crystal growing furnace carbon/carbon thermal field structure product | |
| CN106966746B (en) | Plasma enhancing microwave-heating prepares the method and device of ceramic matric composite |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190125 Address after: No. 90 Nanhuan East Road, Yucheng National High-tech Industrial Development Zone, Dezhou City, Shandong Province, 251200 Patentee after: Shandong Daopuan Brake Material Co., Ltd. Address before: No. 88 Nanhuan Road, Yucheng City, Dezhou City, Shandong Province, 251200 Patentee before: Shandong Guojing New Materials Co., Ltd. |
|
| TR01 | Transfer of patent right |