CN203461974U - Homogenization fast device of CVI (Chemical Vapor Infiltration) compact carbon/carbon crucible - Google Patents
Homogenization fast device of CVI (Chemical Vapor Infiltration) compact carbon/carbon crucible Download PDFInfo
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- CN203461974U CN203461974U CN201320521614.5U CN201320521614U CN203461974U CN 203461974 U CN203461974 U CN 203461974U CN 201320521614 U CN201320521614 U CN 201320521614U CN 203461974 U CN203461974 U CN 203461974U
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Abstract
The utility model discloses a homogenization fast device of a CVI (Chemical Vapor Infiltration) compact carbon/carbon crucible. The homogenization fast device comprises a chemical vapor deposition furnace, a bottom plate, a furnace cover and multiple layers of horizontal baffles, wherein the chemical vapor deposition furnace is composed of a furnace outer tank and a furnace inner tank, the multiple layers of horizontal baffles are arranged from bottom to top, a gas sealing plate is arranged above the horizontal baffle at the topmost layer, and deposition chambers are formed between the adjacent upper and lower layers of horizontal baffles, between the gas sealing plate and the horizontal baffle at the topmost layer and between the bottom plate and the horizontal baffle at the bottommost layer respectively; a vertical gas inlet pipe joint is arranged in the middle of the inner side of each deposition chamber located below the top deposition chamber, and the multiple vertical gas inlet pipe joints are distributed on the central axis of the furnace inner tank from top to bottom; vertical through holes are formed in the middle of the bottom plate and the middles of the horizontal baffles below the horizontal baffle plate at the top layer. The homogenization fast device is simple in structure, reasonable in design, simple in feed, easy and simple to use and operate, has a good using effect and can be used for improving the compact uniformity of prepared products and the charge bath and shortening the preparation period.
Description
Technical field
The utility model belongs to monocrystaline silicon stove charcoal/charcoal crucible technical field of material, especially relates to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing.
Background technology
During monocrystaline silicon stove pulling monocrystal silicon rod, the quartz crucible of the raw materials such as splendid attire polysilicon block is put into the plumbago crucible on being positioned at the bottom of crucible, heat fused in a vacuum, regulation and control are after technological temperature, seed crystal inserts in melting polysilicon liquid through guide shell, seed crystal and plumbago crucible are done retrograde rotation and are upwards promoted, and make polysilicon liquid become silicon single crystal rod by the Siliciumatom of the seed crystal crystallization and freezing that puts in order.In silicon single crystal rod pulling process, temperature is 1460 ℃～1600 ℃ in stove, now quartz crucible deliquescing, plumbago crucible support that be outside.Plumbago crucible uses in hot environment, support quartz crucible and raw-material quality, and in rotating state.On the low side because of the mechanical property of graphite material, under the effect of external force, easily to ftracture, its work-ing life is short.
Within on 02 07th, 2007, the disclosed patent No. is ZL200610043186.4, and name is called the preparation method who discloses a kind of charcoal/charcoal crucible in the patent application document of " preparation method of thermal field charcoal/charcoal crucible monocrystalline silicon draw machines for ", in order to alternative plumbago crucible.On December 10th, 2008, the disclosed patent No. was ZL200810031364.0, name is called in the patent application document of " carbon/carbon composite material crucible and production technique " and discloses a kind of carbon/carbon composite material crucible, and this crucible is made through base, density, purifying, machining by charcoal fiber.In above-mentioned two application for a patent for invention files, in disclosed charcoal/charcoal crucible preparation technology, all device used in CVI compaction process is not described, and has that batch is few, equipment capacity is low, production efficiency is low, intake method is limited, gas flow is little, deposition effect is poor and institute's production crucible transverse and longitudinal difference of densities is very large, defect and the deficiencies such as little, fine and close efficiency is low increase weight.
Within on 05 02nd, 2012, the disclosed patent No. is 201110433814.0, name is called the device that discloses the fine and close charcoal/charcoal crucible of a kind of CVI of many sediment chambers in the patent application document of " device and method of the fine and close charcoal/charcoal crucible of a kind of CVI of many sediment chambers ", but this device is difficult to guarantee the gas uniform in each deposition chamber interior diametric(al), the inside of charcoal/charcoal crucible base substrate is difficult to air inlet, and forerunner's carbon-source gas is not incubated to processing, is difficult to realize integral hoisting yet simultaneously.
Utility model content
Technical problem to be solved in the utility model is for above-mentioned deficiency of the prior art, the quick CVI of a kind of homogenizing device of fine and close charcoal/charcoal crucible is provided, it is simple in structure, reasonable in design, shove charge simple and it is easy and simple to handle to use, result of use good, fine and close homogeneity and the batch of prepared product can be effectively improved, and preparation cycle can be shortened.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is: the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing, comprise the chemical vapor deposition stove being formed by stove outer tank and stove inner canister, it is characterized in that: also comprise that level is arranged on the base plate of pot bottom in stove, bell and multilayer that sealing is arranged on stove inner canister top are laid in the horizontal baffle in stove inner canister from the bottom to top, described in multilayer, horizontal baffle is laid between base plate and horizontal baffle, the horizontal baffle top that is positioned at top layer is provided with one and is horizontal direction gas sealing plate, between neighbouring two-layer described horizontal baffle, gas sealing plate and all separating to the graphite pillar stiffener of laying by a plurality of being vertically between the horizontal baffle of top layer and between described base plate and the horizontal baffle at the lowest layer, described horizontal baffle and base plate are graphite septum, between neighbouring two-layer described horizontal baffle, gas sealing plate and between the horizontal baffle of top layer and all form an independently sediment chamber between described base plate and the horizontal baffle at the lowest layer, the quantity of described sediment chamber is a plurality of, a plurality of described sediment chambers from top to bottom lay and the quantity of described sediment chamber is N+1, the quantity that wherein N is described horizontal baffle, the internal height of a plurality of described sediment chambers is all greater than the vertical height that needs fine and close charcoal/charcoal crucible base substrate, the sediment chamber that is positioned at top in a plurality of described sediment chambers is sediment chamber, top, the middle inside that is positioned at each sediment chamber of sediment chamber, described top below is all provided with a vertical air inlet tube coupling, all has to the production well that passes into carbon-source gas in sediment chamber of living in described in each on vertical air inlet tube coupling, the quantity of described vertical air inlet tube coupling is a plurality of, and a plurality of described vertical air inlet tube couplings are from top to bottom laid on the central axis of stove inner canister, the horizontal baffle that is positioned at top layer is top layer dividing plate, and described base plate middle part and each horizontal baffle middle part that is positioned at described top layer dividing plate below all have one by neighbouring two vertical through holes that described vertical air inlet tube coupling is communicated with, the vertical air inlet tube coupling of a plurality of described vertical air inlet tube coupling metas in bottom is bottom tube coupling, and described bottom tube coupling is arranged on base plate middle part, and in described stove, pot bottom is provided with bottom inflow pipe, and described bottom inflow pipe inserts in the tube coupling of described bottom from the bottom to top, the middle part of described bell has air outlet.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, is characterized in that: the middle inside of sediment chamber, described top is provided with a described vertical air inlet tube coupling, and described top layer dividing plate middle part has a described vertical through holes.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, it is characterized in that: all vertical air inlet tube coupling of installing in described stove inner canister connects as one and form the vertical inlet pipe that is laid in stove inner canister middle inside the open holes of described vertical through holes for installing for vertical inlet pipe.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, it is characterized in that: the vertical height of a plurality of described sediment chambers is all identical, the vertical air inlet tube coupling of a plurality of described vertical air inlet tube coupling metas in top is top tube coupling, the height of described top tube coupling is less than the vertical height of described sediment chamber, and the production well of opening on the tube coupling of described top is the upper port of described top tube coupling; The production well that a plurality of described vertical air inlet tube coupling metas are opened on the vertical air inlet tube coupling of described top tube coupling below is all laid on the sidewall of described vertical air inlet tube coupling.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, is characterized in that: the outside of described vertical air inlet tube coupling and bottom inflow pipe is all enclosed with one layer of heat preservation layer.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, is characterized in that: the graphite gasket ring that is provided with the fine and close charcoal/charcoal crucible precast body of a plurality of supply and demand respectively horizontal positioned on described base plate and horizontal baffle.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, is characterized in that: the bottom of described base plate is provided with mast-up, the inside bottom of described stove inner canister is provided with graphite annulus or the support for mast-up horizontal positioned.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, is characterized in that: on described base plate and horizontal baffle, all have a plurality of air inlet ports, a plurality of described air inlet ports are laid in respectively the middle part of a plurality of described graphite gasket rings.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, is characterized in that: described in described base plate, multilayer, horizontal baffle and gas sealing plate are all coaxial laying with stove inner canister; Described bottom inflow pipe is vertically to laying, and in described stove, pot bottom has the open holes of installing for bottom inflow pipe.
The device of the fine and close charcoal/charcoal crucible of the quick CVI of above-mentioned a kind of homogenizing, is characterized in that: described stove inner canister is high temperature steel inner canister; Between the inner side-wall of described base plate and horizontal baffle and stove inner canister, the width of the air cleft gap that reserves is 100mm～300mm, and the thickness of described base plate and horizontal baffle is 30mm～80mm; The diameter of described graphite pillar stiffener is that 100mm～300mm and its are highly 400mm～700mm.
The utility model compared with prior art has the following advantages:
1, simple in structure, reasonable in design, easy to assembly and use easy and simple to handle, result of use good, can be by lifting by the fine and close charcoal/charcoal crucible base substrate of all need together with base plate and the graphite septum integral hoisting stove inner canister of coming in and going out.
2, on vertical inlet pipe and bottom inflow pipe, be provided with thermal insulation layer, thereby can be effectively incubated forerunner's carbon-source gas, reduced the abortive response amount of forerunner's carbon-source gas in inlet pipe.Meanwhile, realize the air inlet of many sediment chambers of single channel and utilization, the live gas by the reaction residual gas in next sediment chamber and vertical inlet pipe discharge through preheating mixes, and imports and needs fine and close charcoal/charcoal crucible base substrate inside, to increase gas effciency.And, can realize the homogenizing of carbon-source gas, in next sediment chamber, the recycling of reaction residual gas and the installation position of vertical inlet pipe at stove inner canister middle part have all improved the homogenizing of carbon-source gas.The Flow Field Distribution of carbon-source gas is reasonable, carbon-source gas is first imported and needs fine and close charcoal/charcoal crucible base substrate inner, carrying out the infiltration of base substrate internal-response or edge needs fine and close charcoal/charcoal crucible base substrate Nell wall to flow out outside, increased the path of carbon-source gas, reduce gas hold-up, and improved the effective rate of utilization of carbon-source gas.
3, carbon-source gas is introduced respectively in a plurality of sediment chambers, can effectively be guaranteed to need the inside and outside wall of fine and close charcoal/charcoal crucible base substrate and upper and lower position all can touch fresh carbon-source gas, improved the fine and close efficiency of CVI and horizontal, the longitudinal homogeneity of crucible blank density.
4, adopt and in many sediment chambers, lay respectively the vertical inlet pipe tube coupling of carbon-source gas, thereby the flow of carbon-source gas is large, can effectively guarantee that CVI densification technique has enough carbon-source gas, a stove charcoal/charcoal crucible product total augment weight can reach 50kg～700kg pyrolytic carbon, can realize quick CVI fine and close.
5, practical value is high and production efficiency is high, batch is large, due to the fresh carbon-source gas all passing in each sediment chamber through insulation, and because graphite septum can conduct heat along central axial direction, thereby can effectively guarantee upper and lower in cvd furnace, left and right four sides each need temperature, the density uniformity of fine and close charcoal/charcoal crucible base substrate, sedimentation effect is high and equipment capacity is large.
6, applied widely, be not only applicable to the production of carbon/carbon composite material crucible for monocrystaline silicon stove or other equipment, the densification and the coating that are applicable to other carbon/carbon composites, charcoal/ceramic composite material are processed simultaneously.
In sum, the utility model is simple in structure, reasonable in design and shove charge simple, it is easy and simple to handle to use, result of use good, can effectively improve fine and close homogeneity and the batch of prepared product, and can shorten preparation cycle.
Below by drawings and Examples, the technical solution of the utility model is described in further detail.
Accompanying drawing explanation
Fig. 1 is use state reference map of the present utility model.
Description of reference numerals:
1-stove inner canister; 2-base plate; 3-bell;
4-horizontal baffle; 5-graphite pillar stiffener; 6-vertical inlet pipe;
7-bottom inflow pipe; 8-gas sealing plate;
The fine and close charcoal/charcoal crucible base substrate of 9-need; 10-air outlet; 11-graphite gasket ring;
12-mast-up; 13-support; 14-envelope compression ring.
Embodiment
As shown in Figure 1, the utility model comprises the chemical vapor deposition stove being comprised of stove outer tank and stove inner canister 1, also comprise that level is arranged on the base plate 2 of stove inner canister 1 bottom, bell 3 and multilayer that sealing is arranged on stove inner canister 1 top are laid in the horizontal baffle 4 in stove inner canister 1 from the bottom to top, described in multilayer, horizontal baffle 4 is laid between base plate 2 and horizontal baffle 4, horizontal baffle 4 tops that are positioned at top layer are provided with one and are horizontal direction gas sealing plate 8, between neighbouring two-layer described horizontal baffle 4, gas sealing plate 8 and all separating to the graphite pillar stiffener 5 of laying by a plurality of being vertically between the horizontal baffle 4 of top layer and between described base plate 2 and the horizontal baffle 4 at the lowest layer, described horizontal baffle 4 and base plate 2 are graphite septum.Between neighbouring two-layer described horizontal baffle 4, gas sealing plate 8 and between the horizontal baffle 4 of top layer and all form an independently sediment chamber between described base plate 2 and the horizontal baffle 4 at the lowest layer, the quantity of described sediment chamber is a plurality of, a plurality of described sediment chambers from top to bottom lay and the quantity of described sediment chamber is N+1, and wherein N is the quantity of described horizontal baffle 4.The internal height of a plurality of described sediment chambers is all greater than the vertical height that needs fine and close charcoal/charcoal crucible base substrate 9.The sediment chamber that is positioned at top in a plurality of described sediment chambers is sediment chamber, top, the middle inside that is positioned at each sediment chamber of sediment chamber, described top below is all provided with a vertical air inlet tube coupling, all has to the production well that passes into carbon-source gas in sediment chamber of living in described in each on vertical air inlet tube coupling.The quantity of described vertical air inlet tube coupling is a plurality of, and a plurality of described vertical air inlet tube couplings are from top to bottom laid on the central axis of stove inner canister 1.The horizontal baffle 4 that is positioned at top layer is top layer dividing plate, and described base plate 2 middle parts and each horizontal baffle 4 middle parts that are positioned at described top layer dividing plate below all have one by neighbouring two vertical through holes that described vertical air inlet tube coupling is communicated with.The vertical air inlet tube coupling of a plurality of described vertical air inlet tube coupling metas in bottom is bottom tube coupling, and described bottom tube coupling is arranged on base plate 2 middle parts, and described stove inner canister 1 bottom is provided with bottom inflow pipe 7, and described bottom inflow pipe 7 inserts in the tube coupling of described bottom from the bottom to top; The middle part of described bell 3 has air outlet 10.
In the present embodiment, interior the installed all vertical air inlet tube coupling of described stove inner canister 1 connects as one and forms the vertical inlet pipe 6 that is laid in stove inner canister 1 middle inside, the open holes of described vertical through holes for installing for vertical inlet pipe 6.
During actual installation, between described vertical inlet pipe 6 and its base plate of installing 2 and horizontal baffle 4, be and be tightly connected.Described vertical inlet pipe 6 bottoms are fixed on base plate 2.
In the present embodiment, the middle inside of sediment chamber, described top is not installed described vertical air inlet tube coupling.
During actual use, also can a described vertical air inlet tube coupling be installed in the middle inside of sediment chamber, described top, and described top layer dividing plate middle part has a described vertical through holes.
In the present embodiment, the vertical height of a plurality of described sediment chambers is all identical, the vertical air inlet tube coupling of a plurality of described vertical air inlet tube coupling metas in top is top tube coupling, the height of described top tube coupling is less than the vertical height of described sediment chamber, and the production well of opening on the tube coupling of described top is the upper port of described top tube coupling.The production well that a plurality of described vertical air inlet tube coupling metas are opened on the vertical air inlet tube coupling of described top tube coupling below is all laid on the sidewall of described vertical air inlet tube coupling.
In the present embodiment, the outside of described vertical air inlet tube coupling and bottom inflow pipe 7 is all enclosed with one layer of heat preservation layer.
During actual processing and fabricating, described vertical inlet pipe 6 and bottom inflow pipe 7 process by high temperature resistant steel pipe, graphite electrode material or carbon/carbon composite, the lagging materials such as ceramic fiber blanket, charcoal felt are all wrapped up as thermal insulation layer in described vertical inlet pipe 6 and bottom inflow pipe 7 outsides, can play insulation effect to forerunner's carbon-source gas like this, reduce the abortive response amount of forerunner's carbon-source gas in vertical inlet pipe 6 and bottom inflow pipe 7.In the present embodiment, the vertical height of sediment chamber is less than 50mm～650mm described in the aspect ratio of described top tube coupling.The quantity of a plurality of described vertical air inlet tube coupling metas pore of outputing on the vertical air inlet tube coupling of described top tube coupling below is that two and two described production wells are even laying.During actual use, can need the gross weight of fine and close charcoal/charcoal crucible base substrate 9 to adjust accordingly the quantity of the pore of outputing on each vertical air inlet tube coupling according to filling in each sediment chamber, thereby realize the object of many sediment chambers single channel air inlet, and can effectively guarantee the homogeneity of air inlet.
Actual laying while installing, a plurality of described graphite pillar stiffeners 5 are laid along the outward flange of base plate 2 or horizontal baffle 4.In the present embodiment, a plurality of described graphite pillar stiffeners 5 are along the circumferential direction evenly laid.
On the inwall of described stove outer tank, be laid with ceramic fibre liner, the heating unit of described chemical vapor deposition stove is laid in the inner side of described ceramic fibre liner.Simultaneously, also be provided with the vacuum-lines one communicating with described stove outer tank inside, the vacuum-lines two communicating with stove inner canister 1 inside, be laid in described stove outer tank inside and described stove outer tank internal temperature is carried out to the temperature detecting unit detecting in real time and the housing being electrically connected to described temperature detecting unit, the outer end of described vacuum-lines one and vacuum-lines two all joins with vaccum-pumping equipment, and be all connected and sealed between bottom inflow pipe 7 and described stove outer tank and stove inner canister 1, the structure of described ceramic fibre liner and size are all identical with structure and the size of profile in described stove outer tank.
In the present embodiment, on described base plate 2 and horizontal baffle 4, be provided with the graphite gasket ring 11 of the fine and close charcoal/charcoal crucible precast body of a plurality of supply and demand respectively 9 horizontal positioned.
Actual laying while installing, a plurality of described graphite gasket rings 11 are even laying.
During actual use, the quantity of described sediment chamber is 3～8.On described base plate 2 and horizontal baffle 4, the quantity of set graphite gasket ring 11 is 3～8.
In the present embodiment, the quantity of described sediment chamber is 5,5 described sediment chambers by down under lay successively.During actual use, also can according to specific needs, the quantity of described sediment chamber be adjusted accordingly.
During actual installation, horizontal baffle 4 and gas sealing plate 8 are all coaxial laying with stove inner canister 1 described in described base plate 2, multilayer.
In the present embodiment, the bottom of described base plate 2 is provided with mast-up 12, and the inside bottom of described stove inner canister 1 is provided with graphite annulus or the support 13 for mast-up 12 horizontal positioned.And described mast-up 12 is coaxial laying with stove inner canister 1.
In the present embodiment, between described base plate 2 and horizontal baffle 4 and the inner side-wall of stove inner canister 1, all by being provided with envelope compression ring 14, between described base plate 2 and horizontal baffle 4 and the inner side-wall of stove inner canister 1, all leave the gap of giving vent to anger.
In the present embodiment, on described base plate 2 and horizontal baffle 4, all have a plurality of air inlet ports, a plurality of described air inlet ports are laid in respectively the middle part of a plurality of described graphite gasket rings 11.
In actual use procedure, by a plurality of described air inlet ports, reaction residue carbon-source gas in sediment chamber, below can be entered and needs fine and close charcoal/charcoal crucible precast body 9 inside with the fresh carbon-source gas of discharging by vertical inlet pipe 6, to increase the utilization ratio of carbon-source gas.
In the present embodiment, described bottom inflow pipe 7 is vertically to laying, and described stove inner canister 1 bottom has the open holes of installing for bottom inflow pipe 7.
During actual processing and fabricating, described stove inner canister 1 is high temperature steel inner canister.Between described base plate 2 and horizontal baffle 4 and the inner side-wall of stove inner canister 1, the width of the air cleft gap that reserves is 100mm～300mm, and the thickness of described base plate 2 and horizontal baffle 4 is 30mm～80mm.The diameter of described graphite pillar stiffener 5 is that 100mm～300mm and its are highly 400mm～700mm.Described mast-up 12, for the width in the gap of staying between high temperaturesteel material and itself and stove inner canister 1 inner side-wall is 20mm～100mm, and is evenly laid with a plurality of air inlet ports on described mast-up 12.The thickness of described gas sealing plate 8 is 5mm～20mm, and the thickness of envelope compression ring 14 is 0.5mm～20mm, and described gas sealing plate 8 and envelope compression ring 14 are made by carbon/carbon composite or graphite electrode material.On described envelope compression ring 14, be reserved with a plurality of erection opening.Described graphite cushion block 11 is processed by graphite electrode material and its thickness is 30mm～60mm.
Specifically add man-hour, can be according to actual needs, between base plate 2 and horizontal baffle 4 and stove inner canister 1 the width of the air cleft gap that reserves, diameter and the thickness of the height of stove inner canister 1 and internal diameter and gas sealing plate 8, base plate 2 and horizontal baffle 4 adjust accordingly.In the present embodiment, the 1Cr25Ni20Si2 steel plate that described high temperature steel inner canister is 12mm～30mm by thickness is made.
During actual use, the fine and close charcoal/charcoal crucible precast body 9 of need is tipped upside down on one by one and is placed on base plate 2 and horizontal baffle 4 on a plurality of graphite cushion blocks 11, the fine and close charcoal/charcoal crucible precast body 9 of a plurality of need of placement each sediment chamber in.Carbon-source gas in each sediment chamber be mainly the live gas of processing through insulation of being discharged by the vertical air inlet tube coupling that is positioned at next sediment chamber and the next sediment chamber being adjacent react residual gas in next sediment chamber, placed need fine and close charcoal/charcoal crucible precast body 9 the mixed gas that mixes of top, and a plurality of air inlet ports of mixed gas through opening on the horizontal baffle 4 of this bottom, sediment chamber, need fine and close charcoal/charcoal crucible precast body 9 outsides are permeated or flowed out in each need fine and close charcoal/charcoal crucible precast body 9 inside that enter in this sediment chamber, so circulation, guaranteed the maximum utilising efficiency of carbon-source gas.
The above; it is only preferred embodiment of the present utility model; not the utility model is imposed any restrictions; every any simple modification of above embodiment being done according to the utility model technical spirit, change and equivalent structure change, and all still belong in the protection domain of technical solutions of the utility model.
Claims (10)
1. the device of the fine and close charcoal/charcoal crucible of the quick CVI of a homogenizing, comprise the chemical vapor deposition stove being formed by stove outer tank and stove inner canister (1), it is characterized in that: also comprise that level is arranged on the base plate (2) of stove inner canister (1) bottom, bell (3) and multilayer that sealing is arranged on stove inner canister (1) top are laid in the horizontal baffle (4) in stove inner canister (1) from the bottom to top, horizontal baffle described in multilayer (4) is laid between base plate (2) and horizontal baffle (4), horizontal baffle (4) top that is positioned at top layer is provided with one and is horizontal direction gas sealing plate (8), between neighbouring two-layer described horizontal baffle (4), gas sealing plate (8) and be positioned between the horizontal baffle (4) of top layer and described base plate (2) and being positioned between the horizontal baffle (4) of the lowest layer is all separated to the graphite pillar stiffener (5) of laying by a plurality of being vertically, described horizontal baffle (4) and base plate (2) are graphite septum, between neighbouring two-layer described horizontal baffle (4), gas sealing plate (8) and be positioned between the horizontal baffle (4) of top layer and described base plate (2) and be positioned between the horizontal baffle (4) of the lowest layer and all form an independently sediment chamber, the quantity of described sediment chamber is a plurality of, a plurality of described sediment chambers from top to bottom lay and the quantity of described sediment chamber is N+1, and wherein N is the quantity of described horizontal baffle (4), the internal height of a plurality of described sediment chambers is all greater than the vertical height that needs fine and close charcoal/charcoal crucible base substrate (9), the sediment chamber that is positioned at top in a plurality of described sediment chambers is sediment chamber, top, the middle inside that is positioned at each sediment chamber of sediment chamber, described top below is all provided with a vertical air inlet tube coupling, all has to the production well that passes into carbon-source gas in sediment chamber of living in described in each on vertical air inlet tube coupling, the quantity of described vertical air inlet tube coupling is a plurality of, and a plurality of described vertical air inlet tube couplings are from top to bottom laid on the central axis of stove inner canister (1), the horizontal baffle (4) that is positioned at top layer is top layer dividing plate, and described base plate (2) middle part and each horizontal baffle (4) middle part that is positioned at described top layer dividing plate below all have one by neighbouring two vertical through holes that described vertical air inlet tube coupling is communicated with, the vertical air inlet tube coupling of a plurality of described vertical air inlet tube coupling metas in bottom is bottom tube coupling, described bottom tube coupling is arranged on base plate (2) middle part, described stove inner canister (1) bottom is provided with bottom inflow pipe (7), and described bottom inflow pipe (7) inserts in the tube coupling of described bottom from the bottom to top, the middle part of described bell (3) has air outlet (10).
2. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing claimed in claim 1, it is characterized in that: the middle inside of sediment chamber, described top is provided with a described vertical air inlet tube coupling, described top layer dividing plate middle part has a described vertical through holes.
3. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing described in claim 1 or 2, it is characterized in that: all vertical air inlet tube coupling of installing in described stove inner canister (1) connects as one and form the vertical inlet pipe (6) that is laid in stove inner canister (1) middle inside the open holes of described vertical through holes for installing for vertical inlet pipe (6).
4. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing described in claim 1 or 2, it is characterized in that: the vertical height of a plurality of described sediment chambers is all identical, the vertical air inlet tube coupling of a plurality of described vertical air inlet tube coupling metas in top is top tube coupling, the height of described top tube coupling is less than the vertical height of described sediment chamber, and the production well of opening on the tube coupling of described top is the upper port of described top tube coupling; The production well that a plurality of described vertical air inlet tube coupling metas are opened on the vertical air inlet tube coupling of described top tube coupling below is all laid on the sidewall of described vertical air inlet tube coupling.
5. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing described in claim 1 or 2, it is characterized in that: the outside of described vertical air inlet tube coupling and bottom inflow pipe (7) is all enclosed with one layer of heat preservation layer.
6. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing described in claim 1 or 2, it is characterized in that: the graphite gasket ring (11) that is provided with fine and close charcoal/charcoal crucible precast body (9) horizontal positioned of a plurality of supply and demand respectively on described base plate (2) and horizontal baffle (4).
7. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing described in claim 1 or 2, it is characterized in that: the bottom of described base plate (2) is provided with mast-up (12), the inside bottom of described stove inner canister (1) is provided with graphite annulus or the support (13) for mast-up (12) horizontal positioned.
8. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing claimed in claim 6, it is characterized in that: on described base plate (2) and horizontal baffle (4), all have a plurality of air inlet ports, a plurality of described air inlet ports are laid in respectively the middle part of a plurality of described graphite gasket rings (11).
9. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing described in claim 1 or 2, it is characterized in that: described in described base plate (2), multilayer, horizontal baffle (4) and gas sealing plate (8) are all coaxial laying with stove inner canister (1); Described bottom inflow pipe (7) is vertically to laying, and described stove inner canister (1) bottom has the open holes of installing for bottom inflow pipe (7).
10. according to the device of the fine and close charcoal/charcoal crucible of the quick CVI of a kind of homogenizing described in claim 1 or 2, it is characterized in that: described stove inner canister (1) is high temperature steel inner canister; Between described base plate (2) and horizontal baffle (4) and the inner side-wall of stove inner canister (1), the width of the air cleft gap that reserves is 100mm～300mm, and the thickness of described base plate (2) and horizontal baffle (4) is 30mm～80mm; The diameter of described graphite pillar stiffener (5) is that 100mm～300mm and its are highly 400mm～700mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320521614.5U CN203461974U (en) | 2013-08-24 | 2013-08-24 | Homogenization fast device of CVI (Chemical Vapor Infiltration) compact carbon/carbon crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320521614.5U CN203461974U (en) | 2013-08-24 | 2013-08-24 | Homogenization fast device of CVI (Chemical Vapor Infiltration) compact carbon/carbon crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203461974U true CN203461974U (en) | 2014-03-05 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104831347A (en) * | 2015-04-30 | 2015-08-12 | 西安超码科技有限公司 | Tool and method for densification of C/C crucible through internal-heat type chemical vapor infiltration |
| CN106747550A (en) * | 2016-11-16 | 2017-05-31 | 中国人民解放军第五七九工厂 | The batch densifying method of the blisk precast body based on carbon-carbon composites |
| CN108558427A (en) * | 2018-05-22 | 2018-09-21 | 中南大学 | A method of preparing even density carbon/carbon composite tablet using confinement reactor batch |
| CN109354508A (en) * | 2018-12-13 | 2019-02-19 | 上海康碳复合材料科技有限公司 | A kind of CVI process of batch preparing carbon/carbon composite material crucible side |
| CN113136570A (en) * | 2021-04-09 | 2021-07-20 | 郭李梁 | Device for preparing carbon-carbon composite material |
| CN114875377A (en) * | 2021-02-05 | 2022-08-09 | 保山隆基硅材料有限公司 | Deposition device for densifying preform and furnace charging structure |
| CN114892145A (en) * | 2022-06-01 | 2022-08-12 | 宁夏中晶新材料科技有限公司 | Method and equipment for improving chemical vapor deposition efficiency |
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2013
- 2013-08-24 CN CN201320521614.5U patent/CN203461974U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104831347A (en) * | 2015-04-30 | 2015-08-12 | 西安超码科技有限公司 | Tool and method for densification of C/C crucible through internal-heat type chemical vapor infiltration |
| CN104831347B (en) * | 2015-04-30 | 2017-07-14 | 西安超码科技有限公司 | A kind of frock and method of internal heat type chemical gas-phase permeation compaction C/C crucibles |
| CN106747550A (en) * | 2016-11-16 | 2017-05-31 | 中国人民解放军第五七九工厂 | The batch densifying method of the blisk precast body based on carbon-carbon composites |
| CN108558427A (en) * | 2018-05-22 | 2018-09-21 | 中南大学 | A method of preparing even density carbon/carbon composite tablet using confinement reactor batch |
| CN108558427B (en) * | 2018-05-22 | 2020-11-13 | 中南大学 | Method for batch preparation of carbon/carbon composite material flat plate with uniform density by using confined reactor |
| CN109354508A (en) * | 2018-12-13 | 2019-02-19 | 上海康碳复合材料科技有限公司 | A kind of CVI process of batch preparing carbon/carbon composite material crucible side |
| CN109354508B (en) * | 2018-12-13 | 2021-03-02 | 上海康碳复合材料科技有限公司 | CVI (chemical vapor infiltration) process method for rapidly preparing carbon/carbon composite crucible side in batches |
| CN114875377A (en) * | 2021-02-05 | 2022-08-09 | 保山隆基硅材料有限公司 | Deposition device for densifying preform and furnace charging structure |
| CN114875377B (en) * | 2021-02-05 | 2023-11-28 | 保山隆基硅材料有限公司 | Deposition device for densifying prefabricated body and charging structure |
| CN113136570A (en) * | 2021-04-09 | 2021-07-20 | 郭李梁 | Device for preparing carbon-carbon composite material |
| CN114892145A (en) * | 2022-06-01 | 2022-08-12 | 宁夏中晶新材料科技有限公司 | Method and equipment for improving chemical vapor deposition efficiency |
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