TW202018225A - Chemical fluid supplementing and recycling system and method - Google Patents

Abstract

The present invention discloses a chemical fluid supplementing and recycling system. In the present invention, ID cards of operation staffs, drivers of chemical trunks, at least one chemical containing tank, and at least one chemical containing tank setting region are all attached with a corresponding information carrying unit thereof. Therefore, by using a portable electronic device to read the information carried by the different types of the information carrying units, a back-end remote supervisory center is able to confirm whether the operation staff has a operation authority or not. Therefore, the operation staff is allowed to execute a chemical fluid supplementing operation or a chemical fluid recycling operation. As a result, by the implementation of this novel system, man-made abnormal operation is effectively prevented from occurring in the chemical fluid supplementing (or recycling) procedure because all steps of the procedure are achieved under an electronic management without using any paper documents.

Description

Fluid filling and extraction system and method

The present invention relates to the technical field of semiconductor manufacturing processes, in particular to a fluid filling and extraction system and method, which is used to assist operators of integrated circuit manufacturing plants (IC foundry) to complete chemical storage under the supervision of a back-end central monitoring system Filling and recycling of chemical containing tank.

The process of semiconductor integrated circuits includes thin film deposition, diffusion, lithography etching, ion implantation and other basic semiconductor processes; and, in the process of making semiconductor integrated circuits, a large amount of chemicals must be used to meet the needs of the process. In particular, the manufacture of semiconductor integrated circuits must keep the production process uninterrupted at all times. Therefore, the supply of these chemicals must also be maintained uninterrupted. For this reason, when the integrated circuit manufacturing plant is planning the plant area, it will specially plan at least one specific chemical tank plant area for the purpose of installing various large chemical storage tanks.

At present, chemical suppliers use large chemical tankers to load all kinds of chemicals that have been produced. It is conceivable that when the integrated circuit manufacturing plant supplements all kinds of chemicals, the chemical tank truck is directly driven to the chemical tank plant area, and then the chemical is directly added to the designated large chemical storage tank Among them, complete the chemical supplement operation. However, the chemicals used in the semiconductor manufacturing process usually have high-risk properties such as flammability, toxicity, oxidation, and corrosiveness. Once the negligence of the operator or system failure occurs during the chemical supplement operation, there are extremely It may cause chemical leakage or chemical reactions between dissimilar chemicals. The resulting consequences are not only huge financial losses, but also more likely to cause casualties and environmental pollution of the workers.

As can be seen from the above description, the operation safety of tank truck operations is extremely dangerous. Therefore, for integrated circuit manufacturers, it is very important to synchronize the filling and extraction operations of large chemical tanks with electronic operations. In this way, the factory management of the integrated circuit manufacturing plant can completely and comprehensively monitor the process of filling and extracting the large chemical tank through the central control system, and whether the operator has the relevant execution authority. In view of this, the inventor of this case tried his best to research and create, and finally developed a fluid filling and extraction system and method of the present invention

The main object of the present invention is to provide a fluid filling and extraction system, which includes: at least one first identity information carrying unit, at least one second identity information carrying unit, at least one item information carrying unit, and at least one tank area An information carrying unit, at least one receiving slot information carrying unit, and at least one portable electronic device. In particular, after the portable electronic device reads the basic messages carried by the message carrying units with its reading unit, the back-end central monitoring system can confirm whether the operator has performed the fluid filling operation and/or Or after the operation authority of the extraction (recycling) operation and whether the information of the materials contained in the item container 3 (ie, chemical tanker) is correct, allow the operator to perform the fluid filling operation and/or extraction (Recycling) operations. In this way, it can ensure that the filling operation, extraction operation and related records are carried out under the electronic system management, eliminating any paper records, is to effectively avoid any human operation abnormalities or complete in a way that does not meet the standard operating procedures Related work.

In order to achieve the above main objective of the present invention, the inventor of the present invention provides an embodiment of the fluid filling and extraction system, which includes: at least one first identity information carrying unit, which is provided on at least one operator identity card At least one item information carrying unit is set on at least one item container, and the item container is equipped with a specific item; at least one slot information carrying unit is set on At least one tank control door; at least one holding tank information carrying unit is arranged on at least one fluid holding tank, and the at least one fluid holding tank is arranged behind the tank control door At least one fluid containing tank area; and at least one portable electronic device with a reading unit; wherein, by means of the reading unit, the portable electronic device can be carried by reading the item information The method of loading unit confirms whether the specific item contained in the item container needs to perform a filling operation to fill the specific item from the item container to the specific fluid containing tank area And the specific fluid containing tank; wherein, by means of the reading unit, the portable electronic device can confirm whether the fluid is in the way of reading the tank area information carrying unit and the containing tank information carrying unit The specific item accommodated in the accommodating slot needs to perform an extraction operation; wherein, with the reading unit, the portable electronic device can confirm the possession of the first identity message carrying unit by reading Whether one of the operator identity cards has the authority to perform the filling operation and the extraction operation.

In the embodiment of the fluid filling and extracting system of the present invention, it further includes: at least one second identity information carrying unit, which is disposed on at least one carrier identification card of the item container; at least one The tank valve information carrying unit is provided on at least one switching valve unit, and the switching valve unit is used to switch the fluid input and the fluid in and out of the fluid accommodating tank; at least one valve protection device is installed on the On at least one switching valve unit; and a central monitoring system, which communicates with the portable electronic device through a transceiver device, and monitors and controls the access control management of the slot control door through a control device, and is used to pass the control Activate or deactivate the valve protection device.

In an embodiment of the fluid filling and pumping system of the present invention, the specific item is a chemical fluid (eg, chemical liquid or chemical gas), the item container is a chemical tank, and the fluid volume The placement tank is a chemical storage tank or a chemical waste storage tank.

In order to be able to more clearly describe the fluid filling and extraction system and method proposed by the present invention, the following will explain the preferred embodiments of the present invention in detail with reference to the drawings.

The manufacturing process of semiconductor integrated circuits uses many chemicals, which are usually chemical fluids, including: chemical liquids (or pure liquids) and chemical gases. Common chemicals are organized as shown in table (1) below. Table 1)

The fluid filling and extraction system of the present invention is applied to manage the filling and extraction (recovery) of these chemicals. In particular, the "chemical filling" refers to driving the chemical tank truck to the designated chemical tank plant and supplementing the chemical into the designated large chemical storage tank. The "chemical extraction (recycling)" refers to driving the chemical tanker to the designated chemical tank plant and extracting the chemical waste liquid or chemical gas from the designated large chemical waste storage tank (recycling) .

First embodiment

Please refer to FIG. 1, which is a structural diagram of a first embodiment of a fluid filling and extraction system of the present invention. As shown in FIG. 1, the fluid filling and extraction system of the present invention mainly includes: at least a first identity information carrying unit 21, at least a second identity information carrying unit 81, at least one item information carrying The loading unit 31, at least one slot information carrying unit 41, at least one receiving slot information carrying unit 61, at least one portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the first identity information carrying unit 21 is disposed on an operator identity card 2, and the second identity information carrying unit 81 is disposed on at least one of the item containers 3 The identification card 8 of the transport personnel, for example: the driver of the chemical tank truck. It is conceivable that the item container 3 referred to here is a chemical tank truck as shown in FIG. 1. It is added that the first identity information carrying unit 21 is used to carry the basic information of an operator holding the operator’s identity card 2, including: name, job number, subordinate unit, rank, and whether to complete the chemical Qualification of the supplement (fill) operation and the waste liquid extraction (recovery) operation. Of course, operators who complete the qualification test will be allowed to perform related operations.

On the other hand, the item information carrying unit 31 is provided on the chemical tanker (ie, the item container 3) for carrying a plurality of specific items transported by the chemical tanker Basic information, including: product name (or material number), batch number, delivery tool number (ie, chemical tanker number), expiration date, and serial number. For example, the item name can be used to indicate that the specific item is a chemical liquid or a chemical gas. On the other hand, it can be seen from the above table (1) that there are many types of chemical liquids and chemical gases used in IC foundry. Therefore, the present invention particularly uses at least one slot information carrying unit 41 to be installed in at least one Above the control gate 4 of a slot. It is conceivable that at least one fluid accommodating trough area is planned behind the trough area control door 4, and the fluid accommodating trough area is usually provided with different fluid volumes according to the application process of the type of chemicals Zhi Slot 6. In the present invention, at least one accommodating tank information carrying unit 61 is disposed on the at least one fluid accommodating tank 6.

It can be known from the above description that the unit "at least one" is used to indicate that the number of the five types of information carrying units (21, 81, 31, 41, 61) is one or more. In other words, the exact number of the five message carrying units (21, 81, 31, 41, 61) is determined by the operator ID card 2, the carrier ID card 8, and the item container 3 (ie, chemical tank truck), the number of the tank area control door 4, and the fluid containing tank 6. On the other hand, the portable electronic device 5 has a reading unit 51. With the reading unit 51, the portable electronic device 5 can confirm whether the specific item contained in the item container 3 needs to be executed by reading the item information carrying unit 31 The filling operation is to fill the specific item from the item container 3 to the specific fluid accommodating tank area and the specific fluid accommodating tank 6. In addition, with the reading unit 51, the portable electronic device 5 can confirm whether the fluid containing tank 6 is read by reading the tank area information carrying unit 41 and the containing tank information carrying unit 61 The contained specific item needs to perform an extraction operation. Of course, before performing the chemical filling operation or the extraction (recycling) operation, the portable electronic device 5 must first confirm the identity of the operator by reading the first identity information carrying unit 21 Whether the operator of the card 2 has the authority to perform the filling operation and the extraction operation.

Moreover, as shown in FIG. 1, the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver device R. The communication protocol between the transceiver device R and the portable electronic device 5 may be a wireless communication network. Including WIFI, 3G, 4G, Bluetooth, Zigbee, etc. The communication protocol between the transceiver R and the central monitoring system CSRC can be a wireless communication network or a wired communication network, where the wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee Wait. In addition, the central monitoring system CSRC monitors and controls the access control of the tank control door 4 through a control device 7 to prevent factory personnel, operators, or drivers of chemical tankers (ie, chemical transport personnel) The slot control door 4 is opened arbitrarily, wherein the control device 7 includes a programmable logic controller (PLC) or a direct digital controller (DDC) or an object linking and embedding device (Object Linking and Embedding, OLE) or OLE device for process control (OLE for Process Control, OPC). It is conceivable that after reading the tank information carrying unit 41 and the item information carrying unit 31, the portable electronic device 5 can learn the chemical tank truck from the central monitoring system CSRC (That is, the item container 3) whether the specific item transported and the chemical contained in the fluid storage tank 6 provided behind the control door 4 of the tank area are the same chemical fluid or chemical gas. It can be inferred that after completing the above confirmation, the chemical delivery personnel and the operator of the integrated circuit manufacturing plant will be allowed to start the next procedure of the chemical filling operation. Such a confirmation method is to prevent the transport personnel and the operator from mistakenly filling chemicals transported by the tank truck into the wrong fluid accommodating tank 6.

It is worth noting that although FIG. 1 shows the first identity information carrying unit 21, the second identity information carrying unit 81, the item information carrying unit 31, the slot information carrying unit 41, and The information carrying units 61 of the accommodating slots are all one-dimensional barcodes (ID barcodes), however, the implementation of the information carrying units (21, 31, 41, 61) should not be limited by this. When the present invention is actually applied, the first identity information carrying unit 21, the second identity information carrying unit 81, the item information carrying unit 31, the slot information carrying unit 41, and the container The slot information carrying unit 61 may be any one of the following: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, Matrix barcode (Maxicode), RFID tag, NFC tag, a combination of any two of the above, or a combination of any two or more of the above. Taking a one-dimensional barcode (1D barcode) as an example, the item information carrying unit 31 can be made using a Code 39 barcode generator, and it carries the name of the specific item contained in the item container 3 ( Item number), batch number, effective date, and serial number. It is worth noting in particular that in order to facilitate the clear reading of the product name (item number), batch number, delivery vehicle number, expiration date, and serial number of the portable electronic device 5, a one-dimensional barcode of the item information carrying unit 31 is produced , A message separator (Central seperating character) must be inserted between two adjacent basic messages, for example: %, $, /, ~, !, @, #, ^, &, *, (,), -, _, |, {, }, ?, <, >, \, [,] or +.

It is conceivable that corresponding to the message carrying units (21, 81, 31, 41, 61) of different implementations, the reading unit 51 of the portable electronic device 5 may be any one of the following: RFID tag reading Reader, NFC tag reader, image reader, 1D barcode reader, 2D barcode reader, Hanxin code reader, QR code reader, matrix barcode reader, or image capture . If the portable electronic device 5 is a smartphone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capture module built in the portable electronic device 5 can be directly used as the Reading unit 51; thus, after installing an image (or barcode) recognition software on the portable electronic device 5, the portable electronic device 5 can be used to make the portable electronic device by using the reading unit 51 and the image recognition unit together The device 5 completes the first identity information carrying unit 21, the second identity information carrying unit 81, the item information carrying unit 31, the slot information carrying unit 41, and/or the receiving slot information carrying Loading unit 61 reading. However, in view of the fact that most integrated circuit manufacturers prohibit the use of any type of smart electronic device in the factory, a digital personal assistant (PDA) equipped with a barcode scanner (ie, reading unit 51) It becomes the best embodiment of the portable electronic device 5.

Continue to refer to FIG. 1 and also refer to FIG. 2 at the same time, showing a perspective view of the portable electronic device. It is worth noting that although the portable electronic device 5 can read the first identity information carrying unit 21 to confirm whether the operator holding the operator identity card 2 has the chemical filling operation and the extraction operation Operation authority, but considering that the low-level operator may borrow the high-level plant manager or engineer's operator identity card 2 to perform related operations arbitrarily, the present invention adds a so-called Electronic token unit (Electronic token unit) 8. As shown in FIG. 2, the electronic token unit 8 stores a one-time password (One-time password, OTP). In particular, after the portable electronic device 5 completes reading the first identity information carrying unit 21, the central monitoring system CSRC can request the operator to provide the electronic token unit 8 through the portable electronic device 5; , The portable electronic device 5 can repeatedly confirm whether the operator holding the operator identity card 2 has the operation authority to perform the chemical filling operation and the extraction operation by accessing the one-time authentication code, to avoid The operator's identity card 2 of the plant manager or engineer of the higher vocational level is used to carry out related operations arbitrarily. The present invention does not limit the implementation of the electronic token unit 8. As shown in FIG. 2, the electronic token unit 8 may be: a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. Moreover, after the portable electronic device 5 completes the access to the one-time authentication code from the electronic token unit 8, a token code generating unit (not shown) inside the portable electronic device 5 will Regenerate a set of one-time authentication codes and write them into the electronic token unit 8 to improve the operation authority of the first machine 4 and the second machine 6 in this way.

In this way, the above description is a complete and clear description of a fluid filling and extraction system of the present invention. Next, the following will continue to describe the operation flow of a fluid filling and extraction system of the present invention. Please refer to FIG. 1 repeatedly, and refer to FIGS. 3A and 3B at the same time, which are front views of the screen of the portable electronic device when performing the fluid filling operation. As shown in FIGS. 1 and 3A, when performing the fluid filling operation, at least one first identity information carrying unit 21 is first disposed on at least one operator identity card 2 and at least one second identity information carrying unit 81 is disposed on at least one carrier ID card 8, at least one item information carrying unit 31 is disposed on at least one item container 3, and at least one slot information carrying unit 41 is disposed on at least one The tank area control door 4 is provided with at least one containing tank information carrying unit 61 on at least one fluid containing tank 6; wherein, the item container 3 contains a specific chemical (for example: Chemical liquid or chemical gas), the fluid accommodating tank 6 is used for accommodating and storing the chemical, and the item accommodator 3 is a chemical tank truck that transports the chemical.

Further, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example: a barcode scanner). In the actual operation flow of the fluid filling operation, as shown in FIG. 3A (a), it is necessary to select and execute a fluid filling operation through the portable electronic device 5. Next, as shown in (b) of FIG. 3A, if the chemicals transported by the chemical tanker are chemical fluids (or pure liquids), the operator must further access an operation interface of the portable electronic device 5 Select "Chemical Liquid Tank Truck". Continuing, as shown in (c) of FIG. 3A, the operator must further select “start of filling operation” on an operation interface of the portable electronic device 5, this action is notified through the portable electronic device 5. The central monitoring system CSRC at the rear allows its monitoring staff to know that they are currently at the specific tank control gate 4 in preparation for starting the fluid filling operation.

Before replenishing chemicals to the designated large chemical storage tank, as shown in (d) of FIG. 3A, the first identity information carrying unit 21 and the second must be read by the portable electronic device 5 The identity information carrying unit 81, the item information carrying unit 31, and the slot information carrying unit 41 are used to confirm the operator barcode, driving barcode, tank truck barcode, and item barcode, and the slot barcode. Continuing, as shown in (a) of FIG. 3B, the central monitoring system CSRC is the portable electronic device 5 requiring the operator to input basic information of the chemical to be filled. The input of the basic information can be quickly completed by the portable electronic device 5 reading the item information carrying unit 31. At the same time, as shown in (b) of FIG. 3B, the operator must also read the first identity information carrying unit 21, the second identity information carrying unit 81, and the slot information with the portable electronic device 5. The carrying unit 41 and the holding slot information carrying unit 61, so that the back-end central monitoring system CSRC can repeatedly confirm the capital data of the operators and transport personnel performing chemical filling operations. At the same time, the central monitoring system CSRC can also repeatedly confirm the chemical to be chemically filled (that is, the specific item transported by the chemical tank truck), the fluid containing tank 6 and the fluid containing the fluid containing tank 6 Slot area.

After completing the confirmation of the operator, the transport personnel, the specific items transported by the chemical tank truck, the fluid storage tank area, and the fluid storage tank 6, the back-end central monitoring system CSRC will open the tank control door 4 The door lock allows operators and transport personnel to proceed to the designated chemical tank plant and replenish the chemical into the designated large chemical storage tank to complete the chemical filling operation. Afterwards, as shown in (c) of FIG. 3B, after selecting an option for ending the filling operation through the portable electronic device 5, the system will again require the operator to repeatedly read the first with the portable electronic device 5. The identity information carrying unit 21, the second identity information carrying unit 81, the item information carrying unit 31, and the slot information carrying unit 41 (as shown in (d) of FIG. 3B). In this way, the back-end central monitoring system CSRC can know that the chemical filling operation has been completed, and then activate the lock of the tank control door 4.

Please refer to FIG. 1 again, and refer to FIGS. 4A and 4B at the same time, which are front views of the screen of the portable electronic device when performing fluid filling extraction (recovery) operations. In the actual operation flow of the fluid extraction operation, as shown in (a) of FIG. 4A, it is necessary to select and execute a fluid extraction operation through the portable electronic device 5. Next, as shown in (b) of FIG. 4A, if the chemical fluid to be extracted is a chemical waste liquid, the operator must further select “chemical waste liquid” on an operation interface of the portable electronic device 5 Tank truck". Continuing, as shown in FIG. 4A (c), the operator must further select “start extraction operation” on an operation interface of the portable electronic device 5, this action is notified through the portable electronic device 5 The central monitoring system CSRC at the rear allows its monitoring staff to know that they are currently at the specific tank control gate 4 in preparation for starting the fluid extraction operation.

Before moving the chemical waste tank to the designated large chemical storage tank, as shown in (d) of FIG. 4A, the first identity information carrying unit 21 must be read by the portable electronic device 5, The second identity information carrying unit 81, the item information carrying unit 31, and the slot information carrying unit 41, to confirm the operator barcode, driving barcode, tank truck barcode and item barcode, and the slot barcode . Continuing, the back-end central monitoring system CSRC will open the lock of the control door 4 of the tank area, so that operators and transport personnel can proceed to drive the chemical tank truck to the designated chemical tank plant area, and remove the chemical waste from (Chemical (Waste fluid) The fluid is drawn from the tank 6 and filled until the chemical waste fluid flows into the tank truck. After completing the chemical filling operation, as shown in (a) of FIG. 4B, the operator must select an option for ending the extraction operation through the portable electronic device 5; after that, as shown in (b) of FIG. 4B , The system will again request the operator to repeatedly read the first identity information carrying unit 21, the second identity information carrying unit 81, the item information carrying unit 31, and the slot with the portable electronic device 5 Information carrying unit 41. After that, the back-end central monitoring system CSRC can know that the chemical filling operation has been completed, and then activate the lock of the tank control door 4.

Second embodiment

Obviously, FIG. 1, FIG. 3A, FIG. 3B, and the above description describe how to use the fluid filling and pumping system of the present invention to complete the chemical liquid filling operation and the extraction (recovery) operation. Continuing, the following will continue to describe how to use the fluid filling and extraction system of the present invention to complete the chemical gas filling operation. Please refer to FIG. 5, which is a structural diagram of a second embodiment of a fluid filling and extraction system of the present invention. In particular, in the second embodiment, the central monitoring system CSRC not only monitors and controls the access control of the slot control door 4 through the control device 7, but also activates or deactivates a valve through the control device 7 at the same time. The activation and release of the protection device AD. The valve protection device AD is known as Auto guard in the industry to prevent the gas valve from being opened arbitrarily without the approval of the central monitoring system CSRC. The main reason is that the chemical gases used in the semiconductor process, such as NH ₃ or SiH ₄ , therefore, the filling or extraction of chemical gases must be started after the central monitoring system CSRC releases the valve protection device AD .

Please refer to FIG. 5 repeatedly, and refer to FIGS. 6A and 6B at the same time, which are front views of the screen of the portable electronic device when performing the fluid filling operation. The specific item for fluid filling operation here is chemical gas. In the actual operation flow of the (chemical gas) fluid filling operation, as shown in (a) of FIG. 6A, it is necessary to select and perform a fluid filling operation through the portable electronic device 5. Next, as shown in (b) of FIG. 6A, since the chemicals transported by the chemical tank truck are chemical gases, the operator must further select “Chemical Gases” on an operating interface of the portable electronic device 5 Tank truck". Continuing, as shown in (c) of FIG. 6A, the operator must further select “start of filling operation” on an operation interface of the portable electronic device 5, this action is notified through the portable electronic device 5. The central monitoring system CSRC at the rear allows its monitoring staff to know that they are currently at the specific tank control gate 4 in preparation for starting the fluid filling operation.

Before filling the specified large chemical storage tank with chemical gas, as shown in (d) of FIG. 6A, the first identity information carrying unit 21, the first Two identity information carrying unit 81, the item information carrying unit 31, and the slot information carrying unit 41, to confirm the operator bar code, driving bar code, tank bar code and item bar code, and the bar code of the bar area. After confirming that the capital information of the operators and transport personnel performing chemical filling operations is correct, the central monitoring system CSRC at the back end will open the control gate 4 of the tank area, so that the operators and transport personnel can proceed to drive the chemical tank truck to the designated Chemical tank plant area. Further, after the back-end central monitoring system CSRC releases the valve protection device AD (Auto guard), the operator and the transport personnel can start to fill the chemical gas into the designated large chemical storage tank to complete the chemical Filling job. After that, as shown in (a) and (b) of FIG. 6B, after selecting an option to end the filling operation through the portable electronic device 5, the system will again require the operator to repeat the operation of the portable electronic device 5. The first identity information carrying unit 21, the second identity information carrying unit 81, the item information carrying unit 31, and the slot information carrying unit 41 are read. In this way, the back-end central monitoring system CSRC can know that the chemical filling operation has been completed, and then activate the door lock of the valve protection device AD (Auto guard) and the tank control door 4.

Third embodiment

Obviously, FIG. 5, FIG. 6A, FIG. 6B, and the above description describe how to use the fluid filling and pumping system of the present invention to complete the chemical gas filling operation. Continuing, the following will continue to describe how to use the fluid filling and extraction system of the present invention to complete the extraction (recovery) of chemical gases. Please refer to FIG. 7, which is a structural diagram of a third embodiment of a fluid filling and extraction system of the present invention. In particular, in the third embodiment, at least one tank valve information carrying unit 91 is simultaneously disposed on at least one switching valve unit 9, and the switching valve unit 9 is used to switch the fluid containing tank 6 fluid input and fluid input and output. At the same time, the central monitoring system CSRC not only monitors and controls the access control of the slot control door 4 through the control device 7, but also activates or deactivates a valve protection device AD through the control device 7.

Please refer to FIG. 7 again, and refer to FIGS. 8A and 8B at the same time, which are front views of the screen of the portable electronic device when performing the fluid filling extraction (recovery) operation. In the actual operation flow of the (chemical gas) fluid extraction operation, as shown in (a) of FIG. 8A, it is necessary to select and execute a fluid extraction operation through the portable electronic device 5. Next, as shown in FIG. 8A (b), if the chemical to be extracted is a chemical gas, the operator must further select “Chemical Gas Tank Truck” on an operating interface of the portable electronic device 5 ". Continuing, as shown in FIG. 8A(c), the operator must further select “start extraction operation” on an operation interface of the portable electronic device 5, this action is notified by the portable electronic device 5 The central monitoring system CSRC at the rear allows its monitoring staff to know that they are currently at the specific tank control gate 4 in preparation for starting the fluid extraction operation.

Before moving the chemical gas tank truck to the designated large chemical storage tank, as shown in (d) of FIG. 8A, the first identity information carrying unit 21 and the portable electronic device 5 must be read first. The second identity information carrying unit 81, the item information carrying unit 31, and the slot area information carrying unit 41 are used to confirm the operator bar code, driving bar code, tank bar code, item bar code, and bar area bar code. After confirming that the capital information of the operators and transport personnel performing chemical extraction operations is correct, the central monitoring system CSRC at the back end will open the control gate 4 of the tank area, so that the operators and transport personnel can proceed to drive the chemical gas tank truck to The designated chemical tank plant area. Further, after the valve monitoring device AD (Auto guard) is released by the central monitoring system CSRC at the back end, the operator and the transport personnel can start to draw out the chemical gas in the fluid accommodating tank 6 and then fill the chemical gas tank truck Among. After the chemical extraction (recovery) operation is completed, as shown in (a) and (b) of FIG. 8B, after selecting an option for ending the filling operation through the portable electronic device 5, the system will request the operation again The person repeatedly reads the first identity information carrying unit 21, the second identity information carrying unit 81, the item information carrying unit 31, and the slot information carrying unit 41 with the portable electronic device 5. In this way, the back-end central monitoring system CSRC can know that the chemical filling operation has been completed, and then activate the door lock of the valve protection device AD (Auto guard) and the tank control door 4.

In this way, the above system has completely and clearly described a fluid filling and extraction system and method of the present invention; and, through the above, the present invention has the following advantages:

(1) The present invention provides a fluid filling and extraction system, which includes: at least one first identity information carrying unit 21, at least one second identity information carrying unit 81, at least one item information carrying unit 31, at least one The slot information carrying unit 41, at least one accommodating slot information carrying unit 61, and at least one portable electronic device 5. In particular, after the portable electronic device 5 reads the basic messages carried by the message carrying units (21, 81, 31, 41, 61) with its reading unit 51, the back-end central monitoring system CSRC You can confirm whether the operator has the operation authority to perform the fluid filling operation and/or the extraction (recovery) operation and whether the information of the information contained in the item container 3 (that is, the chemical tanker) is consistent After no errors, the operator is allowed to perform fluid filling operations and/or extraction (recovery) operations. In this way, it can ensure that the filling operation, extraction operation and related records are carried out under the electronic system management, eliminating any paper records, is to effectively avoid any human operation abnormalities or complete in a way that does not meet the standard operating procedures Related work.

It must be emphasized that the above detailed description is a specific description of possible embodiments of the present invention, but this embodiment is not intended to limit the patent scope of the present invention, and any equivalent implementation or change without departing from the technical spirit of the present invention, Should be included in the patent scope of this case.

<Invention> 21: First identity information carrying unit 81: Second identity information carrying unit 31: Item information carrying unit 41: Slot area information carrying unit 61: Accommodating slot information carrying unit 5: Available Portable electronic device CSRC: central monitoring system 2: operator identification card 8: carrier identification card 3: item container 4: tank control door 6: fluid storage tank 5: portable electronic device 51: reading Take unit R: Transceiver 7: Control device 8: Electronic token unit 9: Switching valve unit 91: Slot valve information carrying unit

<Xizhi>None

1 is a block diagram of a first embodiment of a fluid filling and extraction system of the present invention; FIG. 2 is a perspective view of a portable electronic device; FIG. 3A and FIG. 3B are showing the portable when performing a fluid filling operation 4A and 4B are front views of the screen of the portable electronic device when performing fluid extraction (recovery) operation; FIG. 5 is a fluid filling and extraction system of the present invention 6A and 6B are front views of the screen of the portable electronic device when performing a fluid filling operation; FIG. 7 is a third view of a fluid filling and extraction system of the present invention. 8A and 8B are front views of the screen of the portable electronic device when performing fluid extraction (recovery) operations.

21: The first identity information carrying unit

81: Second identity information carrying unit

31: Item information carrying unit

41: Slot information carrying unit

61: information slot carrying unit

5: Portable electronic device

CSRC: Central Monitoring System

2: operator identity card

8: Identity card for transport personnel

3: Item container

4: Slot area control door

6: fluid containing groove

5: Portable electronic device

51: Reading unit

R: Transceiver

7: Control device

Claims (10)

A fluid filling and extraction system, including: at least one first identity information carrying unit, which is set on at least one operator identity card; at least one item information carrying unit, which is set on at least one item container On the device, and the item container accommodates a specific item; at least one slot information carrying unit is arranged above at least one slot control door; at least one slot information carrying unit, Is disposed on at least one fluid accommodating tank, and the at least one fluid accommodating tank is disposed in at least one fluid accommodating tank area behind the control door of the tank area; and at least one portable electronic device, It has a reading unit; where, by means of the reading unit, the portable electronic device can confirm whether the specific material contained in the item container is read by reading the item information carrying unit The product needs to be filled to fill the specific item from the item container to the specific fluid containing tank area and the specific fluid containing tank; where, with the reading unit, the The portable electronic device can confirm whether the specific item contained in the fluid containing tank needs to perform an extraction operation by reading the tank information carrying unit and the containing tank information carrying unit; among them, With the reading unit, the portable electronic device can confirm whether an operator holding the operator identity card has the ability to perform the filling operation and the extraction operation by reading the first identity information carrying unit Permissions. The fluid filling and extraction system as described in item 1 of the scope of the patent application, which further includes: at least one second identity information carrying unit, which is provided on at least one carrier identification card of the item container 3 ; And At least one tank valve information carrying unit is provided on at least one switching valve unit, and the switching valve unit is used to switch the fluid input and output of the fluid accommodating tank. The fluid filling and pumping system as described in item 1 of the patent application scope, which further includes: at least one valve protection device installed on the at least one switching valve unit; and a central monitoring system through a transceiver The device communicates with the portable electronic device, and monitors and controls the access control management of the slot control door through a control device, and is used to activate or deactivate the valve protection device through the control device. The fluid filling and pumping system described in item 1 of the patent scope, wherein the specific item is a chemical fluid, the item container is a chemical tanker, and the fluid containing tank is a chemical container Set tank or a chemical waste storage tank. The fluid filling and extraction system described in item 2 of the patent scope, wherein the first identity information carrying unit, the second identity information carrying unit, the tank valve information carrying unit, and the item information carrying unit , The slot information carrying unit and the holding slot information carrying unit can be any of the following: graphics, text, letters, numbers, one-dimensional barcode (1D barcode), two-dimensional barcode (2D barcode), Chinese-sensible code, QR code, matrix barcode (Maxicode), RFID tag, NFC tag, a combination of any two of the above, or a combination of any two or more of the above. The fluid filling and extraction system as described in item 1 of the patent scope, wherein the portable electronic device may be any of the following: a smartphone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or Smart watch; the reading unit 51 can be any one of the following: RFID tag reader, NFC tag reader, image reader, 1D barcode reader, 2D barcode reader, Hanxin code reader Reader, QR code reader, or matrix barcode reader. The fluid filling and extraction system as described in item 2 of the patent application range, wherein the reading unit is an image capture device, and the portable electronic device further has an image recognition unit; wherein, by using the The reading unit and the image recognition unit, the portable electronic device can complete the first identity information carrying unit, the second identity information carrying unit, the tank valve information carrying unit, and the item information carrying unit , Reading of the information carrying unit of the slot, and/or the information carrying unit of the accommodating slot. The fluid filling and extracting system as described in item 1 of the patent application scope, wherein the plurality of basic information carried by the item information carrying unit includes: product name, batch number, item number, delivery vehicle number, valid Date, and serial number, and a message separator (Central seperating character) is inserted between two adjacent basic messages. The fluid filling and pumping system as described in item 4 of the patent application scope, wherein the chemical fluid may be any of the following: chemical liquid or chemical gas. The fluid filling and extraction system as described in item 8 of the patent application scope, wherein the message separator can be any of the following: %, $, /, ~, !, @, #, ^, &, *, ( , ), -, _, |, {, }, ?, <, >, \, [,] or +.

Images