TW202014272A - Manufacturing method of grinding wheel prevents the adhesive beyond the range of the grindstone embedding part - Google Patents

Manufacturing method of grinding wheel prevents the adhesive beyond the range of the grindstone embedding part Download PDF

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Publication number
TW202014272A
TW202014272A TW108135263A TW108135263A TW202014272A TW 202014272 A TW202014272 A TW 202014272A TW 108135263 A TW108135263 A TW 108135263A TW 108135263 A TW108135263 A TW 108135263A TW 202014272 A TW202014272 A TW 202014272A
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grindstone
adhesive
grinding
wheel
wheel base
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TW108135263A
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Chinese (zh)
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TWI800687B (en
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寺本政由志
不破德人
飼牛秀和
廣中利成
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日商迪思科股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

The present invention prevents the adhesive beyond the range of the grindstone embedding part. A concave part is formed at the corner of the boundary between the bottom surface of the wheel base and the groove so that a grindstone embedded part including the groove and the concave part is formed. When the grinding stone is embedded in the grindstone embedding part filled with the adhesive, the adhesive stays in the concave part. Therefore, it is possible to suppress the adhesive from going out of the grindstone-embedded part to the bottom surface. Since it is not necessary to perform the step of removing the adhesive that is exceeded the range, it becomes possible to reduce the number of steps required in the manufacturing of the grinding wheel. In addition, the infiltration of the adhesive into the interior of the portion of the grinding stone 11 that protrudes from the bottom surface of the wheel base can be suppressed. Therefore, it is possible to suppress the occurrence of machining defects such as surface abnormalities of the workpiece.

Description

磨削輪的製造方法Manufacturing method of grinding wheel

發明領域 本發明是有關於一種磨削輪的製造方法。Field of invention The invention relates to a method for manufacturing grinding wheels.

發明背景 用於半導體晶圓等之被加工物的磨削之磨削輪，具備有由形成為圓環狀之鋁等所構成的輪基台，且在輪基台的底面形成有溝形狀的磨石埋設部。於磨石埋設部上，是藉由適當的接著劑來接著並埋設磨削磨石，且磨削磨石的一部分為從輪基台的底面突出(參照例如專利文獻1及2)。Background of the invention A grinding wheel for grinding a workpiece such as a semiconductor wafer includes a wheel base made of aluminum or the like formed in a ring shape, and a groove-shaped grindstone is formed on the bottom surface of the wheel base Buried Department. The grindstone embedding portion is followed by embedding and embedding the grindstone with an appropriate adhesive, and a part of the grindstone protrudes from the bottom surface of the wheel base (see, for example, Patent Documents 1 and 2).

並且，磨削輪是裝設在磨削裝置的主軸上，並藉由主軸的旋轉而旋轉。藉由伴隨於此而一邊旋轉此磨削磨石一邊接觸於被磨削物來施加按壓力，可進行該被加工物的磨削。 先前技術文獻 專利文獻In addition, the grinding wheel is mounted on the main shaft of the grinding device and rotates by the rotation of the main shaft. By rotating the grinding grindstone while being in contact with the object to be ground and applying a pressing force, the object can be ground. Prior technical literature Patent Literature

專利文獻1：日本專利特開2015-199133號公報 專利文獻2：日本專利特開2007-301665號公報Patent Literature 1: Japanese Patent Laid-Open No. 2015-199133 Patent Document 2: Japanese Patent Laid-Open No. 2007-301665

發明概要 發明欲解決之課題 在輪基台的磨石埋設部埋設磨削磨石時，可在磨石埋設部中充填接著劑。若此接著劑的量較少，會有因接著不良，而因磨削時的壓力使磨削磨石從輪基台脫落之情形。因此，在磨石埋設部中，會充填比所需之量更多量的接著劑。Summary of the invention Problems to be solved by invention When embedding the grinding stone in the embedding part of the grinding stone of the wheel base, the embedding part can be filled in the embedding part of the grinding stone. If the amount of the adhesive is small, there may be cases where the grinding stone falls off the wheel base due to the pressure of the grinding due to poor adhesion. Therefore, the embedment portion of the grindstone is filled with a larger amount of adhesive than necessary.

因此，埋設磨削磨石時，成為接著劑從磨石埋設部超出範圍到輪基台的底面之情形，而實施去除已超出範圍之接著劑的步驟。又，即使已去除接著劑，也有接著劑滲入到磨削磨石中的從輪基台之底面突出的部分之內部的疑慮。因此，會產生被加工物的面異常等的加工不良狀況。 用以解決課題之手段Therefore, when the grinding grindstone is embedded, the adhesive will be out of range from the embedment part of the grindstone to the bottom surface of the wheel base, and a step of removing the adhesive beyond the range will be performed. In addition, even if the adhesive is removed, there is a possibility that the adhesive penetrates into the portion of the grinding grindstone protruding from the bottom surface of the wheel base. Therefore, machining defects such as surface abnormalities of the workpiece may occur. Means to solve the problem

本發明中的磨削輪的製造方法是製造磨削輪，前述磨削輪是由環狀的輪基台、及從該輪基台的底面突出而配設的磨削磨石所構成，前述磨削輪的製造方法具備以下步驟： 磨石埋設部形成步驟，藉由在該輪基台的底面形成溝部、以及在該輪基台的底面與該溝部的交界的角部沿著該溝部形成凹部，來形成供該磨削磨石埋設的磨石埋設部； 接著劑充填步驟，在該磨石埋設部充填接著劑；以及 磨削磨石成形步驟，對充填有該接著劑的該磨石埋設部，將混練磨粒與黏結劑而成的磨削磨石以該磨削磨石從該輪基台的底面突出預定量的方式埋設， 又，在充填有該接著劑的該磨石埋設部埋設該磨削磨石之時，該接著劑停留在形成於該磨石埋設部的該凹部，而抑制該接著劑從該磨石埋設部超出範圍之情形。 發明效果The manufacturing method of the grinding wheel in the present invention is to manufacture a grinding wheel, which is composed of a ring-shaped wheel base and a grinding grindstone arranged to protrude from the bottom surface of the wheel base. The manufacturing method of the grinding wheel has the following steps: The step of forming a grindstone embedding portion is to form a grinding stone by forming a groove on the bottom surface of the wheel base and forming a recess along the groove at the corner of the boundary between the bottom surface of the wheel base and the groove Buried grinding stone burial department; An adhesive filling step, filling the adhesive in the grindstone embedding part; and Grinding stone forming step, for the embedment portion of the grindstone filled with the adhesive, the grindstone formed by kneading abrasive grains and binder protrudes from the bottom surface of the wheel base by a predetermined amount Buried in a way that Also, when the grinding grindstone is embedded in the grindstone embedding part filled with the adhesive, the adhesive stays in the concave portion formed in the grindstone embedding part, thereby suppressing the adhesive from the grindstone embedding part Out of scope. Invention effect

在本發明之磨削輪的製造方法中，由於形成在輪基台的底面與溝部之交界的角部之凹部，成為留住接著劑的區域，因此變得可抑制接著劑從磨石埋設部超出範圍之情形。 因此，由於不需要實施去除已超出範圍之接著劑的步驟，所以變得可減少在磨削輪之製造上所需要的步驟數。此外，可以抑制接著劑滲入到磨削磨石中的從輪基台之底面突出的部分之內部。因此，可以抑制被加工物的面異常等加工不良狀況的發生。In the manufacturing method of the grinding wheel of the present invention, since the concave portion formed at the corner of the boundary between the bottom surface of the wheel base and the groove becomes a region where the adhesive is retained, it becomes possible to suppress the adhesive from the embedment portion of the grindstone Out of scope. Therefore, since it is not necessary to perform the step of removing the adhesive that has exceeded the range, it becomes possible to reduce the number of steps required in the manufacture of the grinding wheel. In addition, it is possible to suppress the penetration of the adhesive into the portion of the grinding stone that protrudes from the bottom surface of the wheel base. Therefore, it is possible to suppress the occurrence of machining defects such as surface abnormalities of the workpiece.

用以實施發明之形態 本實施形態的磨削輪的製造方法(本製造方法)是製造如圖1所示的磨削輪1的方法。Forms for carrying out the invention The manufacturing method of the grinding wheel of this embodiment (this manufacturing method) is a method of manufacturing the grinding wheel 1 shown in FIG. 1.

圖1所示之磨削輪1具備有由SUS或鋁等金屬所構成之圓環狀的輪基台10。輪基台10具有平坦的裝設面100。再者，在圖1中，是將磨削輪1顯示為朝與使用於磨削時的姿勢相反的方向。當使用於磨削時，磨削輪1是輪基台10之裝設面100成為上側。磨削輪1是透過裝設面100，並隔著安裝座而裝設在磨削裝置之主軸的前端側(全部均為未圖示)。The grinding wheel 1 shown in FIG. 1 includes an annular wheel base 10 made of a metal such as SUS or aluminum. The wheel base 10 has a flat installation surface 100. In addition, in FIG. 1, the grinding wheel 1 is shown in a direction opposite to the posture used in grinding. When used for grinding, the grinding wheel 1 is the mounting surface 100 of the wheel base 10 and becomes the upper side. The grinding wheel 1 is installed on the front end side of the main shaft of the grinding device through the installation surface 100 through the installation seat (all are not shown).

輪基台10中的與裝設面100相反側之面，是固定磨削磨石11的底面101。裝設面100與底面101是形成為互相呈大致平行。 如圖1所示，於輪基台10的中央形成有圓形的開口110，前述圓形的開口110是將輪基台10從裝設面100貫通至底面101。The surface of the wheel base 10 opposite to the installation surface 100 is the bottom surface 101 of the fixed grinding stone 11. The installation surface 100 and the bottom surface 101 are formed to be substantially parallel to each other. As shown in FIG. 1, a circular opening 110 is formed in the center of the wheel base 10, and the aforementioned circular opening 110 penetrates the wheel base 10 from the installation surface 100 to the bottom surface 101.

在輪基台10的底面101，是以隔著預定寬度之間隙104且沿著周方向的方式，藉由適當的接著劑來固接複數個磨削磨石11。各磨削磨石11是藉由例如將磨粒與適當的黏結劑混練而形成為具有大致長方體狀。磨削磨石11是在底面101配設成從底面101突出預定量。亦即，在磨削輪1中，磨削磨石11之前端部中的預定長度之部分為從輪基台10之底面101突出。On the bottom surface 101 of the wheel base 10, a plurality of grinding stones 11 are fixed with an appropriate adhesive agent via a gap 104 of a predetermined width and along the circumferential direction. Each grinding stone 11 is formed into a substantially rectangular parallelepiped shape by, for example, kneading abrasive grains with an appropriate binder. The grinding stone 11 is arranged on the bottom surface 101 so as to protrude from the bottom surface 101 by a predetermined amount. That is, in the grinding wheel 1, a portion of a predetermined length in the front end portion of the grinding stone 11 protrudes from the bottom surface 101 of the wheel base 10.

再者，作為黏結劑，可列舉例如金屬、陶瓷及樹脂。又，作為磨粒的材料，可列舉例如鑽石及CBN (立方氮化硼，Cubic Boron Nitride)。 像這樣，磨削輪1包含有環狀的輪基台10、及從輪基台10的底面101突出而配設的磨削磨石11。Furthermore, examples of the binder include metals, ceramics, and resins. In addition, examples of the material of the abrasive grain include diamond and CBN (Cubic Boron Nitride). In this way, the grinding wheel 1 includes the ring-shaped wheel base 10 and the grinding stone 11 that protrudes from the bottom surface 101 of the wheel base 10 and is arranged.

輪基台10的內側面是形成為例如以預定的角度傾斜的傾斜面102。在此傾斜面102上，將複數個磨削水供給口103沿著周方向隔著間隔而形成。這些磨削水供給口103是為了使純水等之磨削水噴出而被使用。The inner surface of the wheel base 10 is an inclined surface 102 formed to be inclined at a predetermined angle, for example. On this inclined surface 102, a plurality of grinding water supply ports 103 are formed at intervals in the circumferential direction. These grinding water supply ports 103 are used to eject grinding water such as pure water.

接著，針對用於製造這種磨削輪1之本製造方法之步驟進行說明。 (1)磨石埋設部形成步驟 首先，藉由加工圓環狀的金屬，而如圖2所示，形成具有裝設面100、底面101、傾斜面102、磨削水供給口103及開口110的輪基台10。Next, the steps of the present manufacturing method for manufacturing such a grinding wheel 1 will be described. (1) Steps for forming the embedded part of grindstone First, by processing an annular metal, as shown in FIG. 2, a wheel base 10 having an installation surface 100, a bottom surface 101, an inclined surface 102, a grinding water supply port 103 and an opening 110 is formed.

接著，如圖3及圖4所示，在輪基台10的底面101形成溝部21。溝部21是在底面101的大致中央形成為沿著底面101的圓環狀。溝部21的深度是與例如磨削磨石11的長度、以及磨削磨石11的從輪基台10之底面101突出的部分的長度相應而設定。Next, as shown in FIGS. 3 and 4, a groove 21 is formed on the bottom surface 101 of the wheel base 10. The groove portion 21 is formed in an annular shape along the bottom surface 101 at substantially the center of the bottom surface 101. The depth of the groove portion 21 is set according to, for example, the length of the grinding stone 11 and the length of the portion of the grinding stone 11 that protrudes from the bottom surface 101 of the wheel base 10.

溝部21是藉由例如旋削加工而形成。在旋削加工中，是將輪基台10安裝於旋盤，一邊使輪基台10旋轉，一邊將尖銳的切削刀具(例如開槽刀具)按壓於該底面101。藉此，可以切削底面101而形成溝部21。藉由切削加工來形成溝部21，可獲得溝部21之精密的尺寸形狀。The groove 21 is formed by, for example, turning processing. In the turning process, the wheel base 10 is attached to the turntable, and while the wheel base 10 is rotated, a sharp cutting tool (for example, a slotting tool) is pressed against the bottom surface 101. By this, the bottom surface 101 can be cut to form the groove portion 21. By forming the groove 21 by cutting, the precise size and shape of the groove 21 can be obtained.

接著，如圖5及圖6所示，在輪基台10之底面101與溝部21之交界的角部，沿著溝部21形成圓環狀之凹部23。 凹部23是形成於溝部21的上部之具有凹陷形狀的部分。凹部23的下端是連接在溝部21的上端，且凹部23的上端是連接於底面101。凹部23的寬度(徑向的長度)是：在下端為與溝部21之寬度大致相同，且隨著朝向上方而逐漸變寬。從而，凹部23具有梯形的截面。Next, as shown in FIGS. 5 and 6, at the corner of the boundary between the bottom surface 101 of the wheel base 10 and the groove 21, an annular concave portion 23 is formed along the groove 21. The concave portion 23 is a portion having a concave shape formed on the upper portion of the groove portion 21. The lower end of the recess 23 is connected to the upper end of the groove 21, and the upper end of the recess 23 is connected to the bottom surface 101. The width (length in the radial direction) of the concave portion 23 is approximately the same as the width of the groove portion 21 at the lower end, and gradually widens toward the upper side. Thus, the recess 23 has a trapezoidal cross section.

如此之凹部23是藉由例如以旋削加工來切削底面101及溝部21之交界的角部，而形成於溝部21之上部。Such a concave portion 23 is formed on the upper portion of the groove portion 21 by, for example, cutting the corner portion of the boundary between the bottom surface 101 and the groove portion 21 by turning.

藉由在溝部21之上部形成凹部23，可在輪基台10的底面101形成包含溝部21及凹部23之磨石埋設部25。於磨石埋設部25中，是將圖1所示之磨削磨石11以其一部分從底面101突出的方式埋設。By forming the concave portion 23 on the upper portion of the groove portion 21, the grindstone embedded portion 25 including the groove portion 21 and the concave portion 23 can be formed on the bottom surface 101 of the wheel base 10. In the grindstone embedding portion 25, the grindstone 11 shown in FIG. 1 is embedded so that a part of it protrudes from the bottom surface 101.

(2)接著劑充填步驟 在此步驟中，如圖7所示，是將接著劑J充填到形成於輪基台10之底面101的磨石埋設部25。充填於磨石埋設部25之接著劑J的量是例如將接著劑J充滿溝部21之程度、或從溝部21僅稍微溢出至凹部23之程度。(2) Adhesive filling step In this step, as shown in FIG. 7, the grinder embedded portion 25 formed on the bottom surface 101 of the wheel base 10 is filled with the adhesive J. The amount of the adhesive agent J filled in the grindstone embedding portion 25 is, for example, such that the adhesive agent J fills the groove portion 21 or overflows from the groove portion 21 to the concave portion 23 only slightly.

(3)磨削磨石成形步驟 在此步驟中，如圖8所示，是將複數個磨削磨石11以隔著預定寬度的間隙104(參照圖1)，且讓各磨削磨石11的一部分從輪基台10的底面101突出的方式，來埋設於充填有接著劑J的磨石埋設部25。 此時，由於溝部21內的接著劑J被磨削磨石11推開，因此接著劑J的液面上升。在本實施形態中，被磨削磨石11推開的接著劑J是蓄積到磨石埋設部25之凹部23。 之後，藉由使接著劑J硬化而完成磨削輪1。(3) Grinding stone forming steps In this step, as shown in FIG. 8, a plurality of grinding stones 11 are separated by a gap 104 of a predetermined width (see FIG. 1 ), and a part of each grinding stone 11 is removed from the wheel base 10 The bottom surface 101 protrudes so as to be embedded in the grindstone embedding portion 25 filled with the adhesive J. At this time, since the adhesive J in the groove portion 21 is pushed away by the grinding stone 11, the liquid level of the adhesive J rises. In the present embodiment, the adhesive J pushed away by the grinding stone 11 is accumulated in the concave portion 23 of the grinding stone embedding portion 25. Thereafter, the grinding wheel 1 is completed by hardening the adhesive J.

如以上，在本製造方法中，是藉由在輪基台10之底面101與溝部21之交界的角部形成凹部23，而形成包含溝部21及凹部23之磨石埋設部25。並且，在充填有接著劑J之磨石埋設部25埋設磨削磨石11時，接著劑J為停留在凹部23。因此，可以抑制接著劑J從磨石埋設部25超出範圍到底面101上之情形。As described above, in the present manufacturing method, by forming the concave portion 23 at the corner of the boundary between the bottom surface 101 of the wheel base 10 and the groove portion 21, the grindstone embedded portion 25 including the groove portion 21 and the concave portion 23 is formed. When the grinding stone embedding portion 25 filled with the adhesive agent J is embedded in the grinding stone 11, the adhesive agent J stays in the concave portion 23. Therefore, it is possible to suppress the adhesive agent J from exceeding the range from the grindstone embedding portion 25 to the bottom surface 101.

從而，在本製造方法中，由於不需要實施去除已超出範圍之接著劑J的步驟，因此變得可減少在磨削輪1之製造上所需要的步驟數。此外，可以抑制接著劑J滲入到磨削磨石11的從輪基台10之底面101突出的部分之內部。因此，可以抑制被加工物的面異常等加工不良狀況的發生。Therefore, in the present manufacturing method, since there is no need to perform the step of removing the adhesive J that is out of range, it becomes possible to reduce the number of steps required for manufacturing the grinding wheel 1. In addition, the penetration of the adhesive J into the portion of the grinding stone 11 that protrudes from the bottom surface 101 of the wheel base 10 can be suppressed. Therefore, it is possible to suppress the occurrence of machining defects such as surface abnormalities of the workpiece.

再者，和磨削磨石11的厚度(徑向的長度)相比，溝部21的寬度不宜過寬。例如，亦可考慮磨削磨石11的厚度及接著劑J的接著力，而將溝部21的寬度儘可能設得較窄。藉此，變得難以產生磨削磨石11的位置偏移。Furthermore, the width of the groove portion 21 should not be too wide compared to the thickness (length in the radial direction) of the grinding stone 11. For example, the thickness of the grinding stone 11 and the adhesive force of the adhesive J may be considered, and the width of the groove portion 21 may be set as narrow as possible. With this, it becomes difficult to cause the positional deviation of the grinding stone 11.

又，在本實施形態中，磨削磨石11為大致長方體形狀之所謂的磨輪片(segment)型的磨石，並將複數個磨削磨石11以於底面101的磨石埋設部25沿著其周方向的方式來埋設。然而，並非受限於此，使用於磨削輪1的磨削磨石亦可為可埋設在環狀的磨石埋設部25之一體型的環狀的磨石。Moreover, in this embodiment, the grinding stone 11 is a so-called segment-type grinding stone having a substantially rectangular parallelepiped shape, and a plurality of grinding stones 11 are placed along the grinding stone embedding portion 25 of the bottom surface 101 Buried in the way of its circumference. However, it is not limited to this, and the grinding grindstone used for the grinding wheel 1 may also be a ring-shaped grindstone that can be embedded in the ring-shaped grindstone embedding portion 25.

又，在本實施形態的磨石埋設部25中，形成在溝部21的上部的凹部23具有梯形的截面。然而，形成於磨石埋設部25之凹部的形狀，並非受限於此，只要是可供被磨削磨石11推開之接著劑J蓄積的形狀即可。亦可例如，如圖9所示，磨石埋設部25具有凹部23a，前述凹部23a具有大致長方形的截面。在此構成中，凹部23a具有比溝部21更寬之大致均勻的寬度。Moreover, in the grindstone embedding portion 25 of this embodiment, the concave portion 23 formed on the upper portion of the groove portion 21 has a trapezoidal cross section. However, the shape of the concave portion formed in the grindstone embedding portion 25 is not limited to this, as long as it is a shape in which the adhesive J that can be pushed away by the grindstone 11 is accumulated. For example, as shown in FIG. 9, the grindstone-embedded portion 25 has a concave portion 23a, and the concave portion 23a has a substantially rectangular cross section. In this configuration, the concave portion 23a has a substantially uniform width wider than that of the groove portion 21.

或者，磨石埋設部25亦可具備如圖10所示之凹部23b。凹部23b的截面是如下的形狀：在接近於底面101之側為具有比溝部21的截面之寬度更寬的寬度之長方形，且在接近於溝部21之側，是寬度朝向溝部21而變窄之梯形。亦即，凹部23b的側壁包含有與溝部21之側壁大致平行之寬度較寬的底面101側的部分、及連接此部分與溝部21之側壁的斜面部分。Alternatively, the grindstone-embedded portion 25 may include a concave portion 23b as shown in FIG. 10. The cross-section of the concave portion 23b is a shape close to the bottom surface 101 as a rectangle having a wider width than the cross-sectional width of the groove 21, and on the side close to the groove 21, the width narrows toward the groove 21 Trapezoid. That is, the side wall of the concave portion 23b includes a portion of the bottom surface 101 side with a wider width that is substantially parallel to the side wall of the groove portion 21, and a slope portion connecting the portion and the side wall of the groove portion 21.

或者，磨石埋設部25亦可具備如圖11所示之凹部23c。凹部23c的截面是如下的形狀：在接近於底面101之側為具有比溝部21的截面之寬度更寬的寬度之長方形，且在接近於溝部21之側，是寬度朝向溝部21而變窄之彎曲的梯形。亦即，凹部23c的側壁包含有與溝部21之側壁大致平行之寬度較寬的底面101側的部分、及連接此部分與溝部21之側壁的彎曲部分。Alternatively, the grindstone-embedded portion 25 may include a concave portion 23c as shown in FIG. 11. The cross-section of the concave portion 23c is a shape close to the bottom surface 101 as a rectangle having a wider width than the cross-sectional width of the groove 21, and on the side close to the groove 21, the width narrows toward the groove 21 Curved trapezoid. That is, the side wall of the concave portion 23c includes a portion of the bottom surface 101 side with a wider width substantially parallel to the side wall of the groove portion 21, and a curved portion connecting this portion and the side wall of the groove portion 21.

1:磨削輪 10:輪基台 11:磨削磨石 110:開口 100:裝設面 101:底面 102:傾斜面 103:磨削水供給口 104:間隙 21:溝部 23:凹部 25:磨石埋設部 J:接著劑1: Grinding wheel 10: Wheel abutment 11: Grinding stone 110: opening 100: installation surface 101: underside 102: inclined surface 103: Grinding water supply port 104: gap 21: Ditch 23: recess 25: Grinding stone embedding department J: Adhesive

圖1是顯示磨削輪的立體圖。 圖2是顯示溝部形成前之輪基台的立體圖。 圖3是顯示形成有溝部之輪基台的立體圖。 圖4是圖3的A-A線箭頭視角截面圖。 圖5是顯示形成有磨石埋設部的輪基台的立體圖，其中前述磨石埋設部具有溝部及凹部。 圖6是圖5的B-B線箭頭視角截面圖。 圖7是顯示在磨石埋設部充填有接著劑之輪基台的截面圖。 圖8是顯示在磨石埋設部埋設有磨削磨石之輪基台的截面圖。 圖9是顯示磨石埋設部的凹部之變形例的輪基台的截面圖。 圖10是顯示磨石埋設部的凹部之其他變形例的輪基台的截面圖。 圖11是顯示磨石埋設部的凹部之其他變形例的輪基台的截面圖。FIG. 1 is a perspective view showing a grinding wheel. Fig. 2 is a perspective view showing the wheel base before the groove portion is formed. Fig. 3 is a perspective view showing a wheel base in which grooves are formed. Fig. 4 is a cross-sectional view taken along the line A-A of Fig. 3; 5 is a perspective view showing a wheel base on which a grindstone embedding portion is formed, wherein the grindstone embedding portion has a groove portion and a recessed portion. FIG. 6 is a cross-sectional view taken along the line B-B of FIG. 5. 7 is a cross-sectional view showing a wheel base filled with an adhesive in a grindstone embedding portion. 8 is a cross-sectional view showing a wheel base in which a grindstone is embedded in a grindstone embedding portion. 9 is a cross-sectional view of a wheel base showing a modification of the concave portion of the grindstone embedding portion. 10 is a cross-sectional view of a wheel base showing another modified example of the concave portion of the grindstone embedding portion. 11 is a cross-sectional view of a wheel base showing another modified example of the concave portion of the grindstone embedding portion.

10:輪基台 10: Wheel abutment

11:磨削磨石 11: Grinding stone

21:溝部 21: Ditch

23:凹部 23: recess

25:磨石埋設部 25: Grinding stone embedding department

100:裝設面 100: installation surface

101:底面 101: underside

102:傾斜面 102: inclined surface

J:接著劑 J: Adhesive

Claims (1)

一種磨削輪的製造方法，是製造磨削輪，前述磨削輪是由環狀的輪基台、以及從該輪基台的底面突出而配設的磨削磨石所構成，前述磨削輪的製造方法具備以下步驟： 磨石埋設部形成步驟，藉由在該輪基台的底面形成溝部、以及在該輪基台的底面與該溝部的交界的角部沿著該溝部形成凹部，來形成供該磨削磨石埋設的磨石埋設部； 接著劑充填步驟，在該磨石埋設部充填接著劑；以及 磨削磨石成形步驟，對充填有該接著劑的該磨石埋設部，將混練磨粒與黏結劑而成的磨削磨石以該磨削磨石從該輪基台的底面突出預定量的方式埋設， 在充填有該接著劑的該磨石埋設部埋設該磨削磨石之時，該接著劑停留在形成於該磨石埋設部的該凹部，而抑制該接著劑從該磨石埋設部超出範圍之情形。A method of manufacturing a grinding wheel is to manufacture a grinding wheel. The grinding wheel is composed of a ring-shaped wheel base and a grinding grindstone disposed protruding from the bottom surface of the wheel base. The wheel manufacturing method has the following steps: The step of forming a grindstone embedding portion is to form a grinding stone by forming a groove on the bottom surface of the wheel base and forming a recess along the groove at the corner of the boundary between the bottom surface of the wheel base and the groove Buried grinding stone burial department; An adhesive filling step, filling the adhesive in the grindstone embedding part; and Grinding stone forming step, for the embedment portion of the grinding stone filled with the adhesive, the grinding stone formed by kneading abrasive grains and binder protrudes from the bottom surface of the wheel base by a predetermined amount Buried in a way that When the grinding stone is embedded in the grindstone embedding part filled with the adhesive, the adhesive stays in the concave portion formed in the grindstone embedding part, thereby suppressing the adhesive from the grindstone embedding part out of range Situation.
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