CN110977798A - Method for manufacturing grinding wheel - Google Patents

Method for manufacturing grinding wheel Download PDF

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Publication number
CN110977798A
CN110977798A CN201910876545.1A CN201910876545A CN110977798A CN 110977798 A CN110977798 A CN 110977798A CN 201910876545 A CN201910876545 A CN 201910876545A CN 110977798 A CN110977798 A CN 110977798A
Authority
CN
China
Prior art keywords
grinding wheel
adhesive
grinding
embedded
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910876545.1A
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Chinese (zh)
Inventor
寺本政由志
不破德人
饲牛秀和
广中利成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN110977798A publication Critical patent/CN110977798A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

Abstract

Provided is a method for manufacturing a grinding wheel, which can prevent the adhesive from overflowing from the embedded part of the grinding wheel. A recessed part (23) is formed at the corner of the boundary between the bottom surface (101) of the grinding wheel base (10) and the groove part (21), thereby forming a grinding wheel embedded part (25) including the groove part (21) and the recessed part (23). When the grinding wheel (11) is embedded in the wheel embedding part (25) filled with the adhesive (J), the adhesive (J) stays in the recess (23). Therefore, the adhesive (J) can be prevented from overflowing from the grindstone embedded portion (25) to the bottom surface (101). Therefore, it is not necessary to perform a step of removing the adhesive (J) that has overflowed, and therefore the number of steps in manufacturing the grinding wheel can be reduced. In addition, the adhesive (J) can be inhibited from penetrating into the inside of the portion of the grinding wheel (11) protruding from the bottom surface (101) of the grinding wheel base (10). Therefore, the occurrence of processing defects such as surface abnormalities of the workpiece can be suppressed.

Description

Method for manufacturing grinding wheel
Technical Field
The present invention relates to a method for manufacturing a grinding wheel.
Background
A grinding wheel used for grinding a workpiece such as a semiconductor wafer has a grinding wheel base made of aluminum or the like formed in a circular ring shape, and a grinding wheel embedded portion having a groove shape is formed on a bottom surface of the grinding wheel base. A grinding wheel is bonded with an appropriate adhesive and embedded in a wheel embedding portion, and a part of the grinding wheel protrudes from a bottom surface of a grinding wheel base (see, for example, patent documents 1 and 2).
The grinding wheel is attached to a spindle of the grinding apparatus and rotated by rotation of the spindle. Accordingly, the grinding wheel rotates while contacting the workpiece to be ground and applies a pressing force to grind the workpiece.
Patent document 1: japanese patent laid-open publication No. 2015-199133
Patent document 2: japanese patent laid-open publication No. 2007-301665
When a grinding wheel is embedded in a wheel embedding portion of a grinding wheel base, the wheel embedding portion is filled with an adhesive. When the amount of the adhesive is small, the grinding wheel may fall off from the grinding wheel base due to pressure during grinding due to poor adhesion. Therefore, the grinding stone buried portion is filled with a larger amount of the adhesive than necessary.
Therefore, when the grinding wheel is embedded, the adhesive overflows from the wheel embedding portion to the bottom surface of the grinding wheel base, and a step of removing the adhesive is performed. In addition, even if the adhesive is removed, there is a fear that the adhesive penetrates into the inside of the portion of the grinding wheel protruding from the bottom surface of the grinding wheel base. Therefore, a processing defect such as a surface abnormality of the workpiece occurs.
Disclosure of Invention
The invention provides a method for manufacturing a grinding wheel, which can prevent the adhesive from overflowing from the embedded part of the grinding wheel.
The method for manufacturing a grinding wheel according to the present invention is a method for manufacturing a grinding wheel including an annular grinding wheel base and a grinding wheel disposed to protrude from a bottom surface of the grinding wheel base, the method including the steps of: a grinding wheel embedded part forming step of forming a grinding wheel embedded part in which the grinding wheel is embedded by forming a groove part in the bottom surface of the grinding wheel base and forming a recess along the groove part at a corner part of a boundary between the bottom surface of the grinding wheel base and the groove part; an adhesive filling step of filling an adhesive into the grindstone buried portion; and a grinding wheel molding step of embedding a grinding wheel formed by mixing abrasive grains and a binder in the wheel embedding portion filled with the binder so that the grinding wheel protrudes by a predetermined amount from the bottom surface of the grinding wheel base, wherein when the grinding wheel is embedded in the wheel embedding portion filled with the binder, the binder stays in the recess formed in the wheel embedding portion, and the binder is prevented from overflowing from the wheel embedding portion.
In the method for manufacturing a grinding wheel according to the present invention, since the recessed portion formed at the corner portion of the boundary between the bottom surface of the grinding wheel base and the groove portion serves as a region where the adhesive stays, the adhesive can be prevented from overflowing from the grindstone embedded portion.
Therefore, it is not necessary to perform a step of removing the adhesive that has overflowed, and therefore the number of steps in manufacturing the grinding wheel can be reduced. In addition, the adhesive can be inhibited from penetrating into the inside of the portion of the grinding wheel protruding from the bottom surface of the grinding wheel base. Therefore, the occurrence of processing defects such as surface abnormalities of the workpiece can be suppressed.
Drawings
Fig. 1 is a perspective view showing a grinding wheel.
Fig. 2 is a perspective view showing the grinding wheel base before forming the groove.
Fig. 3 is a perspective view showing the grinding wheel base after the groove portion is formed.
Fig. 4 is a sectional view taken along line a-a of fig. 3.
Fig. 5 is a perspective view showing a grinding wheel base in which a grinding wheel buried portion having a groove portion and a recess is formed.
Fig. 6 is a cross-sectional view taken along line B-B of fig. 5.
Fig. 7 is a sectional view showing the grinding wheel base filled with the adhesive in the grinding wheel buried portion.
Fig. 8 is a sectional view showing a grinding wheel base in which a grinding wheel is embedded in a wheel embedded portion.
Fig. 9 is a cross-sectional view of a grinding wheel base showing a modification of the recess of the grindstone buried portion.
Fig. 10 is a cross-sectional view of a grinding wheel base showing another modification of the recess of the grindstone buried portion.
Fig. 11 is a cross-sectional view of a grinding wheel base showing another modification of the recess of the grindstone buried portion.
Description of the reference symbols
1: grinding the grinding wheel; 10: a grinding wheel base station; 11: grinding the grinding tool; 110: an opening; 100: a mounting surface; 101: a bottom surface; 102: an inclined surface; 103: grinding the water supply port; 21: a groove part; 23: a recess; 25: a grinding tool embedding part; j: and (3) an adhesive.
Detailed Description
The method for manufacturing a grinding wheel according to the present embodiment (the present manufacturing method) is a method for manufacturing a grinding wheel 1 as shown in fig. 1.
The grinding wheel 1 shown in fig. 1 has an annular grinding wheel base 10 made of metal such as SUS or aluminum. The grinding wheel base 10 has a flat mounting surface 100. In fig. 1, the grinding wheel 1 is shown in an orientation opposite to the orientation used for grinding. When used for grinding, the mounting surface 100 of the grinding wheel base 10 of the grinding wheel 1 is positioned on the upper side. The grinding wheel 1 is attached to a tip end side of a spindle of a grinding apparatus (none of which is shown) via an attachment surface 100 via an attachment base.
The surface of the grinding wheel base 10 on the side opposite to the mounting surface 100 is a bottom surface 101 to which the grinding wheel 11 is fixed. The mounting surface 100 and the bottom surface 101 are formed substantially parallel to each other.
As shown in fig. 1, a circular opening 110 penetrating the grinding wheel base 10 from the attachment surface 100 to the bottom surface 101 is formed in the center of the grinding wheel base 10.
A plurality of grinding stones 11 are fixed to the bottom surface 101 of the grinding wheel base 10 by a suitable adhesive along the circumferential direction with a gap 104 having a predetermined width. Each grinding stone 11 is formed to have a substantially rectangular parallelepiped shape by, for example, kneading abrasive grains and an appropriate binder. The grinding wheel 11 is disposed on the bottom surface 101 so as to protrude from the bottom surface 101 by a predetermined amount. That is, in the grinding wheel 1, a predetermined length of the distal end portion of the grinding wheel 11 protrudes from the bottom surface 101 of the grinding wheel base 10.
Examples of the binder include metals, ceramics, and resins. Examples of the material of the abrasive grains include diamond and CBN (Cubic Boron Nitride).
Thus, the grinding wheel 1 includes: an annular grinding wheel base 10; and a grinding wheel 11 disposed to protrude from the bottom surface 101 of the grinding wheel base 10.
The inner surface of the grinding wheel base 10 is, for example, an inclined surface 102 inclined at a predetermined angle. A plurality of grinding water supply ports 103 are formed in the inclined surface 102 at intervals in the circumferential direction. These grinding water supply ports 103 are used to discharge grinding water such as pure water.
Next, the steps of the present manufacturing method for manufacturing the grinding wheel 1 will be described.
(1) Step of forming a grinding tool buried portion
First, an annular metal is processed to form a grinding wheel base 10 having a mounting surface 100, a bottom surface 101, an inclined surface 102, a grinding water supply port 103, and an opening 110 as shown in fig. 2.
Next, as shown in fig. 3 and 4, the groove 21 is formed in the bottom surface 101 of the grinding wheel base 10. Groove 21 is formed in an annular shape along bottom surface 101 at substantially the center of bottom surface 101. The depth of the groove 21 is set, for example, according to the length of the grinding wheel 11 and the length of the portion of the grinding wheel 11 protruding from the bottom surface 101 of the grinding wheel base 10.
The groove 21 is formed by, for example, turning. In the turning process, the grinding wheel base 10 is mounted on a lathe, and a sharp cutting tool (for example, a grooving tool) is pressed against the bottom surface 101 of the grinding wheel base 10 while rotating the grinding wheel base 10. This can cut the bottom surface 101 to form the groove 21. The groove portion 21 is formed by cutting, and a precise dimensional shape of the groove portion 21 can be obtained.
Next, as shown in fig. 5 and 6, an annular recess 23 is formed along the groove 21 at the corner of the boundary between the bottom surface 101 of the grinding wheel base 10 and the groove 21.
The recess 23 is a recessed portion formed in the upper portion of the groove 21. The lower end of the recess 23 is connected to the upper end of the groove 21, and the upper end of the recess 23 is connected to the bottom 101. The width (length in the radial direction) of the recess 23 is substantially the same as the width of the groove 21 at the lower end, and increases upward. Therefore, the recess 23 has a trapezoidal cross section.
Such a recess 23 is formed in the upper portion of the groove 21 by cutting a corner portion of the boundary between the bottom surface 101 and the groove 21 by, for example, lathe machining.
By forming the concave portion 23 in the upper portion of the groove portion 21, the grindstone embedded portion 25 including the groove portion 21 and the concave portion 23 is formed on the bottom surface 101 of the grinding wheel base 10. The grinding stone 11 shown in fig. 1 is embedded in the stone embedded portion 25 so that a part thereof protrudes from the bottom surface 101.
(2) Adhesive filling step
In this step, as shown in fig. 7, the grinding wheel buried portion 25 formed on the bottom surface 101 of the grinding wheel base 10 is filled with the adhesive J. The amount of the adhesive J filled into the grindstone buried portion 25 is, for example, such an amount that the groove portion 21 is filled with the adhesive J or such an amount that the groove portion 21 slightly penetrates the recess 23.
(3) Grinding tool forming step
In this step, as shown in fig. 8, a plurality of grinding stones 11 are embedded in the grinding stone embedded portion 25 filled with the adhesive J so that a part of each grinding stone 11 protrudes from the bottom surface 101 of the grinding wheel base 10 with a gap 104 (see fig. 1) of a predetermined width being interposed therebetween.
At this time, the adhesive J in the groove portion 21 is pushed by the grinding wheel 11, and thus the liquid level of the adhesive J rises. In the present embodiment, the adhesive J pushed by the grinding whetstone 11 is accumulated in the recess 23 of the whetstone buried portion 25.
Then, the grinding wheel 1 is finished by hardening the adhesive J.
As described above, in the present manufacturing method, the recessed portion 23 is formed at the corner portion of the boundary between the bottom surface 101 of the grinding wheel base 10 and the groove portion 21, and the grindstone embedded portion 25 including the groove portion 21 and the recessed portion 23 is formed. When the grinding stone 11 is embedded in the stone embedded portion 25 filled with the adhesive J, the adhesive J stays in the concave portion 23. Therefore, the adhesive J can be prevented from overflowing from the grindstone embedded portion 25 onto the bottom surface 101.
Therefore, in the present manufacturing method, since it is not necessary to perform a step of removing the excess adhesive J, the number of steps in manufacturing the grinding wheel 1 can be reduced. In addition, the adhesive J can be inhibited from infiltrating into the inside of the portion of the grinding wheel 11 protruding from the bottom surface 101 of the grinding wheel base 10. Therefore, the occurrence of processing defects such as surface abnormalities of the workpiece can be suppressed.
Further, it is preferable that the width of the groove portion 21 is not excessively larger than the thickness (length in the radial direction) of the grinding stone 11. For example, the width of the groove portion 21 may be made as narrow as possible in consideration of the thickness of the grinding stone 11 and the adhesion force of the adhesive J. This makes it difficult to cause a positional deviation of the grinding stone 11.
In the present embodiment, the grinding whetstone 11 is a so-called segmented whetstone having a substantially rectangular parallelepiped shape, and a plurality of grinding whetstones 11 are embedded in the whetstone embedding portion 25 of the bottom surface 101 along the circumferential direction. However, the grinding wheel for grinding the grinding wheel 1 is not limited to this, and may be an integrated annular grinding wheel that can be embedded in the annular grinding wheel embedding portion 25.
In the grindstone embedded portion 25 of the present embodiment, the concave portion 23 formed in the upper portion of the groove portion 21 has a trapezoidal cross section. However, the shape of the recess formed in the grindstone buried portion 25 is not limited to this, and may be any shape as long as the adhesive J pushed by the grinding grindstone 11 can stay. For example, as shown in fig. 9, the grinder buried portion 25 may have a recess 23a, and the recess 23a may have a substantially rectangular cross section. In this structure, the recessed portion 23a has a substantially uniform width wider than the groove portion 21.
Alternatively, the grindstone buried portion 25 may have a recess 23b as shown in fig. 10. The side of the cross section of the recess 23b closer to the bottom surface 101 is a rectangular shape having a width wider than the width of the cross section of the groove 21, and the side of the cross section closer to the groove 21 is a trapezoidal shape having a width that is narrower toward the groove 21. That is, the side wall of the recess 23b includes a portion on the wide bottom surface 101 side substantially parallel to the side wall of the groove 21 and a tapered portion connecting the portion to the side wall of the groove 21.
Alternatively, the grindstone buried portion 25 may have a recess 23c as shown in fig. 11. The side of the cross section of the concave portion 23c closer to the bottom surface 101 is a rectangular shape having a width wider than the width of the cross section of the groove portion 21, and the side of the cross section closer to the groove portion 21 is a curved trapezoidal shape having a width narrower toward the groove portion 21. That is, the side wall of the recess 23c includes a portion on the wide bottom surface 101 side substantially parallel to the side wall of the groove 21 and a bent portion connecting the portion to the side wall of the groove 21.

Claims (1)

1. A method for manufacturing a grinding wheel comprising an annular grinding wheel base and a grinding wheel provided so as to protrude from the bottom surface of the grinding wheel base, wherein,
the manufacturing method of the grinding wheel comprises the following steps:
a grinding wheel embedded part forming step of forming a grinding wheel embedded part in which the grinding wheel is embedded by forming a groove part in the bottom surface of the grinding wheel base and forming a recess along the groove part at a corner part of a boundary between the bottom surface of the grinding wheel base and the groove part;
an adhesive filling step of filling an adhesive into the grindstone buried portion; and
a grinding wheel molding step of embedding a grinding wheel obtained by kneading abrasive grains and a binder in the wheel embedding portion filled with the binder so that the grinding wheel protrudes from the bottom surface of the grinding wheel base by a predetermined amount,
when the grinding stone is buried in the stone buried part filled with the adhesive, the adhesive stays in the concave part formed in the stone buried part, thereby suppressing the adhesive from overflowing from the stone buried part.
CN201910876545.1A 2018-10-02 2019-09-17 Method for manufacturing grinding wheel Pending CN110977798A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-187351 2018-10-02
JP2018187351A JP7152922B2 (en) 2018-10-02 2018-10-02 Grinding wheel manufacturing method

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CN110977798A true CN110977798A (en) 2020-04-10

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KR (1) KR20200038183A (en)
CN (1) CN110977798A (en)
TW (1) TWI800687B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022096834A (en) * 2020-12-18 2022-06-30 株式会社ディスコ Grinding wheel

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242410A1 (en) * 1986-04-17 1987-10-28 Carborundum Schleifmittelwerke GmbH Method of manufacturing an elastic grinding body
JPH0890426A (en) * 1994-09-26 1996-04-09 Toshiba Ceramics Co Ltd Polishing device
CN1265954A (en) * 1999-03-09 2000-09-13 广东工业大学 Novel diamond wheel
JP2007216306A (en) * 2006-02-14 2007-08-30 Disco Abrasive Syst Ltd Manufacturing method of grinding wheel
JP2012125076A (en) * 2010-12-09 2012-06-28 Hitachi Industrial Equipment Systems Co Ltd Permanent magnet motor and method of manufacturing the same
JP2014091193A (en) * 2012-11-02 2014-05-19 Takatori Corp Grinding wheel
CN105014557A (en) * 2015-05-25 2015-11-04 江苏锋泰工具有限公司 Light and efficient diamond grinding wheel
JP2015199133A (en) * 2014-04-04 2015-11-12 株式会社ディスコ grinding wheel
CN105965402A (en) * 2015-03-13 2016-09-28 株式会社迪思科 Grinding wheel

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007301665A (en) 2006-05-10 2007-11-22 Disco Abrasive Syst Ltd Grinding wheel and its manufacturing method

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242410A1 (en) * 1986-04-17 1987-10-28 Carborundum Schleifmittelwerke GmbH Method of manufacturing an elastic grinding body
JPH0890426A (en) * 1994-09-26 1996-04-09 Toshiba Ceramics Co Ltd Polishing device
CN1265954A (en) * 1999-03-09 2000-09-13 广东工业大学 Novel diamond wheel
JP2007216306A (en) * 2006-02-14 2007-08-30 Disco Abrasive Syst Ltd Manufacturing method of grinding wheel
JP2012125076A (en) * 2010-12-09 2012-06-28 Hitachi Industrial Equipment Systems Co Ltd Permanent magnet motor and method of manufacturing the same
JP2014091193A (en) * 2012-11-02 2014-05-19 Takatori Corp Grinding wheel
JP2015199133A (en) * 2014-04-04 2015-11-12 株式会社ディスコ grinding wheel
CN105965402A (en) * 2015-03-13 2016-09-28 株式会社迪思科 Grinding wheel
CN105014557A (en) * 2015-05-25 2015-11-04 江苏锋泰工具有限公司 Light and efficient diamond grinding wheel

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TW202014272A (en) 2020-04-16
JP7152922B2 (en) 2022-10-13
KR20200038183A (en) 2020-04-10
JP2020055071A (en) 2020-04-09
TWI800687B (en) 2023-05-01

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