JP7152922B2 - Grinding wheel manufacturing method - Google Patents

Grinding wheel manufacturing method Download PDF

Info

Publication number
JP7152922B2
JP7152922B2 JP2018187351A JP2018187351A JP7152922B2 JP 7152922 B2 JP7152922 B2 JP 7152922B2 JP 2018187351 A JP2018187351 A JP 2018187351A JP 2018187351 A JP2018187351 A JP 2018187351A JP 7152922 B2 JP7152922 B2 JP 7152922B2
Authority
JP
Japan
Prior art keywords
grinding wheel
groove
adhesive
wheel
grindstone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018187351A
Other languages
Japanese (ja)
Other versions
JP2020055071A (en
Inventor
政由志 寺本
徳人 不破
秀和 飼牛
利成 広中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Priority to JP2018187351A priority Critical patent/JP7152922B2/en
Priority to CN201910876545.1A priority patent/CN110977798A/en
Priority to KR1020190118211A priority patent/KR20200038183A/en
Priority to TW108135263A priority patent/TWI800687B/en
Publication of JP2020055071A publication Critical patent/JP2020055071A/en
Application granted granted Critical
Publication of JP7152922B2 publication Critical patent/JP7152922B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Description

本発明は、研削ホイールの製造方法に関する。 The present invention relates to a method of manufacturing a grinding wheel.

半導体ウェーハ等の被加工物の研削に用いられる研削ホイールは、円環状に形成されたアルミニウム等からなるホイール基台を備えており、ホイール基台の底面には、溝形状の砥石埋設部が形成されている。砥石埋設部には、適宜の接着剤によって研削砥石が接着されて埋設されており、研削砥石の一部がホイール基台の底面から突出している（たとえば、特許文献１および２参照）。 Grinding wheels used for grinding workpieces such as semiconductor wafers are equipped with a wheel base made of aluminum or the like and formed in an annular shape. It is A grinding wheel is embedded in the grinding wheel embedding portion by bonding with an appropriate adhesive, and a part of the grinding wheel protrudes from the bottom surface of the wheel base (see Patent Documents 1 and 2, for example).

そして、研削ホイールは、研削装置のスピンドルに装着され、スピンドルの回転によって回転する。これにともない研削砥石が回転しながら被研削物に接触して押圧力が加えられることによって、当該被加工物の研削が行われる。 The grinding wheel is then mounted on the spindle of the grinding machine and rotated by the rotation of the spindle. Along with this, the grinding wheel rotates and comes into contact with the object to be ground to apply a pressing force, thereby grinding the object.

特開２０１５－１９９１３３号公報JP 2015-199133 A 特開２００７－３０１６６５号公報JP 2007-301665 A

ホイール基台の砥石埋設部に研削砥石を埋設する際、砥石埋設部に接着剤が充填される。この接着剤の量が少ないと、接着不良により、研削時の圧力によって研削砥石がホイール基台から脱落することがある。このため、砥石埋設部には、必要な量よりも多い量の接着剤が充填される。 When embedding the grinding wheel in the wheel base, the grindstone-embedded part is filled with an adhesive. If the amount of this adhesive is too small, the grinding wheel may fall off from the wheel base due to the pressure during grinding due to poor adhesion. For this reason, the grindstone-buried portion is filled with an amount of adhesive that is larger than the required amount.

そのため、研削砥石を埋設する際、接着剤が、砥石埋設部からホイール基台の底面にはみ出ることとなり、はみ出た接着剤を除去する工程が実施される。また、接着剤を除去したとしても、研削砥石におけるホイール基台の底面から突出している部分の内部に、接着剤が染み込んでいる懸念がある。このため、被加工物の面異常などの加工不具合が発生する。 Therefore, when embedding the grinding wheel, the adhesive protrudes from the grindstone embedding portion to the bottom surface of the wheel base, and a step of removing the protruding adhesive is carried out. Moreover, even if the adhesive is removed, there is a concern that the adhesive may permeate inside the portion of the grinding wheel that protrudes from the bottom surface of the wheel base. For this reason, processing defects such as surface abnormalities of the workpiece occur.

本発明にかかる研削ホイールの製造方法は、環状のホイール基台と、該ホイール基台の
底面から突出して配設される研削砥石とから構成される研削ホイールを製造する研削ホイールの製造方法であって、該ホイール基台の底面に溝部を形成すること、および、該ホイール基台の底面と該溝部との境界の角部に該溝部に沿って凹部を形成することによって、該研削砥石が埋設される砥石埋設部を形成する砥石埋設部形成ステップと、該砥石埋設部の該溝部に接着剤を充填する接着剤充填ステップと、該接着剤が充填された該砥石埋設部の該溝部に、砥粒とボンド剤とを混練してなる研削砥石を、該研削砥石が該ホイール基台の底面から所定量突出するように埋設する研削砥石成形ステップと、を備え、該接着剤が充填された該砥石埋設部に該研削砥石を埋設する際、該溝部から押しのけられた該接着剤が該砥石埋設部に形成された該凹部に留まり、該接着剤が該砥石埋設部からはみ出ることを抑制する。 A grinding wheel manufacturing method according to the present invention is a grinding wheel manufacturing method for manufacturing a grinding wheel comprising an annular wheel base and a grinding wheel arranged so as to protrude from the bottom surface of the wheel base. The grinding wheel is embedded by forming a groove in the bottom surface of the wheel base and forming a concave portion along the groove at the corner of the boundary between the bottom surface of the wheel base and the groove. an adhesive filling step of filling the groove of the grindstone-embedded portion with an adhesive; and the groove of the grindstone-embedded portion filled with the adhesive, and a grinding wheel molding step of embedding a grinding wheel formed by kneading abrasive grains and a bonding agent so that the grinding wheel protrudes from the bottom surface of the wheel base by a predetermined amount, and the adhesive is filled. When embedding the grinding wheel in the grindstone-embedded portion, the adhesive pushed away from the groove stays in the recess formed in the grindstone-embedded portion, thereby suppressing the adhesive from protruding from the grindstone-embedded portion. .

本発明の研削ホイールの製造方法では、ホイール基台の底面と溝部の境界の角部に形成された凹部が、接着剤を留める領域となるので、接着剤が砥石埋設部からはみ出ることを抑制することが可能となる。
そのため、はみ出た接着剤を除去する工程を実施する必要がないので、研削ホイールの製造にかかる工程数を削減することが可能となる。さらに、研削砥石におけるホイール基台の底面から突出している部分の内部に、接着剤が染み込むことを抑制することができる。このため、被加工物の面異常などの加工不具合の発生を抑制することができる。 In the grinding wheel manufacturing method of the present invention, the recess formed at the corner of the boundary between the bottom surface of the wheel base and the groove serves as a region for holding the adhesive, thereby suppressing the adhesive from protruding from the grindstone embedded portion. becomes possible.
Therefore, since it is not necessary to remove the protruding adhesive, it is possible to reduce the number of steps required for manufacturing the grinding wheel. Furthermore, it is possible to suppress the penetration of the adhesive into the portion of the grinding wheel that protrudes from the bottom surface of the wheel base. Therefore, it is possible to suppress the occurrence of processing defects such as surface abnormalities of the workpiece.

研削ホイールを示す斜視図である。1 is a perspective view of a grinding wheel; FIG. 溝部が形成される前のホイール基台を示す斜視図である。FIG. 4 is a perspective view showing the wheel base before grooves are formed; 溝部が形成されたホイール基台を示す斜視図である。FIG. 4 is a perspective view showing a wheel base in which grooves are formed; 図３のＡ－Ａ線矢視断面図である。FIG. 4 is a cross-sectional view taken along the line AA of FIG. 3; 溝部および凹部を有する砥石埋設部が形成されたホイール基台を示す斜視図である。FIG. 4 is a perspective view showing a wheel base in which a grindstone-embedded portion having grooves and recesses is formed; 図５のＢ－Ｂ線矢視断面図である。FIG. 6 is a cross-sectional view taken along the line BB of FIG. 5; 砥石埋設部に接着剤が充填されているホイール基台を示す断面図である。FIG. 4 is a cross-sectional view showing a wheel base in which a grindstone-buried portion is filled with an adhesive; 砥石埋設部に研削砥石が埋設されているホイール基台を示す断面図である。FIG. 3 is a cross-sectional view showing a wheel base in which a grinding stone is embedded in a grinding stone-embedded portion; 砥石埋設部の凹部の変形例を示すホイール基台の断面図である。FIG. 5 is a cross-sectional view of the wheel base showing a modification of the recessed portion of the grindstone-burying portion; 砥石埋設部の凹部の他の変形例を示すホイール基台の断面図である。FIG. 10 is a cross-sectional view of the wheel base showing another modification of the recess of the grindstone-burying portion; 砥石埋設部の凹部の他の変形例を示すホイール基台の断面図である。FIG. 10 is a cross-sectional view of the wheel base showing another modification of the recess of the grindstone-burying portion;

本実施形態にかかる研削ホイールの製造方法（本製造方法）は、図１に示すような研削ホイール１を製造する方法である。 A grinding wheel manufacturing method (this manufacturing method) according to the present embodiment is a method for manufacturing a grinding wheel 1 as shown in FIG.

図１に示す研削ホイール１は、ＳＵＳあるいはアルミニウム等の金属からなる円環状のホイール基台１０を備えている。ホイール基台１０は、平坦な装着面１００を有している。なお、図１では、研削ホイール１を、研削に使用される際の姿勢とは逆向きに示している。研削に使用される際には、研削ホイール１は、ホイール基台１０の装着面１００が上側となる。研削ホイール１は、装着面１００を介して、研削装置のスピンドルの先端側に、マウントを介して装着される（全て図示せず）。 A grinding wheel 1 shown in FIG. 1 includes an annular wheel base 10 made of metal such as SUS or aluminum. The wheel base 10 has a flat mounting surface 100 . In addition, FIG. 1 shows the grinding wheel 1 in the opposite direction to the posture when it is used for grinding. When the grinding wheel 1 is used for grinding, the mounting surface 100 of the wheel base 10 faces upward. Grinding wheel 1 is mounted via a mounting surface 100 to the distal end of the spindle of the grinding apparatus (all not shown).

ホイール基台１０における装着面１００と反対側の面は、研削砥石１１が固定される底面１０１である。装着面１００と底面１０１とは、互いに略平行となるように形成されている。
図１に示すように、ホイール基台１０の中央には、ホイール基台１０を装着面１００から底面１０１まで貫通する、円形状の開口１１０が形成されている。 The surface of the wheel base 10 opposite to the mounting surface 100 is a bottom surface 101 to which the grinding wheel 11 is fixed. The mounting surface 100 and the bottom surface 101 are formed so as to be substantially parallel to each other.
As shown in FIG. 1 , a circular opening 110 is formed in the center of the wheel base 10 so as to penetrate the wheel base 10 from the mounting surface 100 to the bottom surface 101 .

ホイール基台１０の底面１０１には、所定幅の隙間１０４を空けて、周方向に沿うように、複数の研削砥石１１が、適宜の接着剤によって固着されている。各研削砥石１１は、たとえば、砥粒と適宜のボンド剤とを混練することによって、略直方体状を有するように形成されている。研削砥石１１は、底面１０１から所定量突出するように、底面１０１に配設されている。すなわち、研削ホイール１では、研削砥石１１の先端部における所定長さの部分が、ホイール基台１０の底面１０１から突出している。 A plurality of grinding wheels 11 are fixed to the bottom surface 101 of the wheel base 10 with an appropriate adhesive so as to extend along the circumferential direction with a gap 104 having a predetermined width. Each grinding wheel 11 is formed to have a substantially rectangular parallelepiped shape, for example, by kneading abrasive grains and an appropriate bonding agent. The grinding wheel 11 is arranged on the bottom surface 101 so as to protrude from the bottom surface 101 by a predetermined amount. That is, in the grinding wheel 1 , a portion of a predetermined length at the tip of the grinding wheel 11 protrudes from the bottom surface 101 of the wheel base 10 .

なお、ボンド剤としては、たとえば、金属、セラミックスおよび樹脂が挙げられる。また砥粒の材料としては、たとえば、ダイヤモンドおよびＣＢＮ（Cubic Boron Nitride）が挙げられる。
このように、研削ホイール１は、環状のホイール基台１０と、ホイール基台１０の底面１０１から突出して配設される研削砥石１１とを含んでいる。 Examples of bonding agents include metals, ceramics, and resins. Materials for the abrasive grains include, for example, diamond and CBN (Cubic Boron Nitride).
Thus, the grinding wheel 1 includes the ring-shaped wheel base 10 and the grinding wheel 11 protruding from the bottom surface 101 of the wheel base 10 .

ホイール基台１０の内側面は、たとえば、所定の角度で傾斜する傾斜面１０２となっている。この傾斜面１０２に、複数の研削水供給口１０３が、周方向に沿って間隔を空けて形成されている。これらの研削水供給口１０３は、純水等の研削水を噴出させるために用いられる。 The inner surface of the wheel base 10 is, for example, an inclined surface 102 inclined at a predetermined angle. A plurality of grinding water supply ports 103 are formed on the inclined surface 102 at intervals along the circumferential direction. These grinding water supply ports 103 are used to eject grinding water such as pure water.

次に、このような研削ホイール１を製造するための本製造方法のステップについて説明する。
（１）砥石埋設部形成ステップ
まず、円環状の金属を加工することによって、図２に示すように、装着面１００、底面１０１、傾斜面１０２、研削水供給口１０３および開口１１０を有するホイール基台１０を形成する。 The steps of the manufacturing method for manufacturing such a grinding wheel 1 will now be described.
(1) Grinding wheel embedding portion forming step First, as shown in FIG. A platform 10 is formed.

次に、図３および図４に示すように、ホイール基台１０の底面１０１に、溝部２１を形成する。溝部２１は、底面１０１の略中央に、底面１０１に沿う円環状に形成されている。溝部２１の深さは、たとえば、研削砥石１１の長さ、および、研削砥石１１におけるホイール基台１０の底面１０１から突出する部分の長さに応じて設定される。 Next, as shown in FIGS. 3 and 4, grooves 21 are formed in bottom surface 101 of wheel base 10 . The groove portion 21 is formed in an annular shape substantially in the center of the bottom surface 101 along the bottom surface 101 . The depth of groove 21 is set, for example, according to the length of grinding wheel 11 and the length of the portion of grinding wheel 11 protruding from bottom surface 101 of wheel base 10 .

溝部２１は、たとえば、旋削加工によって形成される。旋削加工では、ホイール基台１０を旋盤に取り付け、ホイール基台１０を回転させながら、その底面１０１に鋭い切削バイト（たとえば溝切りバイト）を押し付ける。これによって、底面１０１を切削して溝部２１を形成することができる。切削加工によって溝部２１を形成することにより、溝部２１の精密な寸法形状を得ることが可能である。 Groove portion 21 is formed, for example, by turning. In lathe turning, the wheel base 10 is mounted on a lathe, and a sharp cutting bit (for example, a grooving bit) is pressed against the bottom surface 101 of the wheel base 10 while rotating the wheel base 10 . Thereby, the groove portion 21 can be formed by cutting the bottom surface 101 . By forming the grooves 21 by cutting, it is possible to obtain precise dimensions and shape of the grooves 21 .

次に、図５および図６に示すように、ホイール基台１０の底面１０１と溝部２１との境界の角部に、溝部２１に沿って、円環状の凹部２３を形成する。
凹部２３は、溝部２１の上部に形成された、凹み形状を有する部分である。凹部２３の下端は溝部２１の上端に接続されており、凹部２３の上端は底面１０１に接続されている。凹部２３の幅（径方向の長さ）は、下端では溝部２１の幅と略同一であり、上方に向かうに連れて広がっている。したがって、凹部２３は、台形状の断面を有している。 Next, as shown in FIGS. 5 and 6 , an annular recess 23 is formed along the groove 21 at the corner of the boundary between the bottom surface 101 of the wheel base 10 and the groove 21 .
The recess 23 is a recessed portion formed in the upper portion of the groove 21 . The lower end of recess 23 is connected to the upper end of groove 21 , and the upper end of recess 23 is connected to bottom surface 101 . The width (length in the radial direction) of the concave portion 23 is substantially the same as the width of the groove portion 21 at the lower end and widens upward. Therefore, the recess 23 has a trapezoidal cross section.

このような凹部２３は、たとえば、底面１０１と溝部２１との境界の角部を旋削加工によって切削することにより、溝部２１の上部に形成される。 Such recessed portion 23 is formed in the upper portion of groove portion 21 by, for example, cutting the corner portion of the boundary between bottom surface 101 and groove portion 21 by turning.

溝部２１の上部に凹部２３を形成することにより、ホイール基台１０の底面１０１に、溝部２１および凹部２３を含む砥石埋設部２５が形成される。砥石埋設部２５には、図１に示した研削砥石１１が、その一部が底面１０１から突出するように、埋設される。 By forming the recessed portion 23 in the upper portion of the groove portion 21 , a grindstone-embedded portion 25 including the groove portion 21 and the recessed portion 23 is formed in the bottom surface 101 of the wheel base 10 . The grinding wheel 11 shown in FIG. 1 is embedded in the grinding wheel embedding portion 25 so that a portion of the grinding wheel 11 protrudes from the bottom surface 101 .

（２）接着剤充填ステップ
このステップでは、図７に示すように、ホイール基台１０の底面１０１に形成された砥石埋設部２５に、接着剤Ｊを充填する。砥石埋設部２５に充填される接着剤Ｊの量は、たとえば、接着剤Ｊが溝部２１を満たす程度、あるいは、溝部２１から凹部２３に僅かにあふれる程度である。 (2) Adhesive Filling Step In this step, as shown in FIG. The amount of the adhesive J filled in the grindstone embedded portion 25 is, for example, such that the adhesive J fills the groove portion 21 or slightly overflows the recess portion 23 from the groove portion 21 .

（３）研削砥石成形ステップ
このステップでは、図８に示すように、接着剤Ｊが充填された砥石埋設部２５に、複数の研削砥石１１を、所定幅の隙間１０４（図１参照）を空けて、各研削砥石１１の一部がホイール基台１０の底面１０１から突出するように、埋設する。
この際、溝部２１内の接着剤Ｊが、研削砥石１１に押しのけられるので、接着剤Ｊの液面が上昇する。本実施形態では、研削砥石１１に押しのけられた接着剤Ｊは、砥石埋設部２５の凹部２３に溜まる。
その後、接着剤Ｊを硬化させることで、研削ホイール１が完成する。 (3) Grinding wheel forming step In this step, as shown in FIG. 8, a plurality of grinding wheels 11 are placed in the grinding wheel embedding portion 25 filled with the adhesive J with a gap 104 (see FIG. 1) having a predetermined width. Then, each grinding wheel 11 is embedded so that a part of each grinding wheel 11 protrudes from the bottom surface 101 of the wheel base 10 .
At this time, since the adhesive J in the groove 21 is pushed away by the grinding wheel 11, the liquid level of the adhesive J rises. In this embodiment, the adhesive J pushed away by the grinding wheel 11 accumulates in the recess 23 of the grinding wheel embedding portion 25 .
After that, the grinding wheel 1 is completed by curing the adhesive J.

以上のように、本製造方法では、ホイール基台１０の底面１０１と溝部２１との境界の角部に、凹部２３を形成することにより、溝部２１および凹部２３を含む砥石埋設部２５を形成する。そして、接着剤Ｊが充填された砥石埋設部２５に研削砥石１１を埋設する際、接着剤Ｊが凹部２３に留まる。このため、接着剤Ｊが砥石埋設部２５から底面１０１上にはみ出ることを抑制することができる。 As described above, in this manufacturing method, the grindstone-embedded portion 25 including the groove portion 21 and the recess portion 23 is formed by forming the recess portion 23 at the corner portion of the boundary between the bottom surface 101 of the wheel base 10 and the groove portion 21. . Then, when the grinding wheel 11 is embedded in the grinding wheel embedding portion 25 filled with the adhesive J, the adhesive J stays in the concave portion 23 . Therefore, it is possible to prevent the adhesive J from protruding from the grindstone embedded portion 25 onto the bottom surface 101 .

したがって、本製造方法では、はみ出た接着剤Ｊを除去する工程を実施する必要がないので、研削ホイール１の製造にかかる工程数を削減することが可能となる。さらに、研削砥石１１におけるホイール基台１０の底面１０１から突出している部分の内部に、接着剤Ｊが染み込むことを抑制することができる。このため、被加工物の面異常などの加工不具合の発生を抑制することができる。 Therefore, in this manufacturing method, since it is not necessary to perform a step of removing the protruding adhesive J, the number of steps required for manufacturing the grinding wheel 1 can be reduced. Furthermore, it is possible to suppress the penetration of the adhesive J into the portion of the grinding wheel 11 protruding from the bottom surface 101 of the wheel base 10 . Therefore, it is possible to suppress the occurrence of processing defects such as surface abnormalities of the workpiece.

なお、溝部２１の幅は、研削砥石１１の厚さ（径方向の長さ）に比して広すぎないことが好ましい。たとえば、研削砥石１１の厚さおよび接着剤Ｊの接着力を考慮して、溝部２１の幅をできるだけ狭くしてもよい。これにより、研削砥石１１の位置ずれが発生しにくくなる。 In addition, it is preferable that the width of the groove portion 21 is not too wide as compared with the thickness (length in the radial direction) of the grinding wheel 11 . For example, considering the thickness of the grinding wheel 11 and the adhesive strength of the adhesive J, the width of the groove 21 may be made as narrow as possible. As a result, displacement of the grinding wheel 11 is less likely to occur.

また、本実施形態では、研削砥石１１が、略直方体形状のいわゆるセグメントタイプの砥石であり、複数の研削砥石１１が、底面１０１の砥石埋設部２５に、その周方向に沿うように埋設されている。しかしながら、これに限らず、研削ホイール１に用いられる研削砥石は、リング状の砥石埋設部２５に埋設される一体型のリング状の砥石であってもよい。 Further, in the present embodiment, the grinding wheel 11 is a so-called segment-type grinding wheel having a substantially rectangular parallelepiped shape, and a plurality of grinding wheels 11 are embedded in the grinding wheel embedding portion 25 of the bottom surface 101 along the circumferential direction thereof. there is However, the grinding wheel used in the grinding wheel 1 is not limited to this, and may be an integrated ring-shaped grindstone embedded in the ring-shaped grindstone embedding portion 25 .

また、本実施形態の砥石埋設部２５では、溝部２１の上部に形成される凹部２３が、台形状の断面を有している。しかし、砥石埋設部２５に形成される凹部の形状は、これに限られず、研削砥石１１に押しのけられた接着剤Ｊを溜められる形状であればよい。たとえば、図９に示すように、砥石埋設部２５は、略長方形状の断面を有する凹部２３ａを有してもよい。この構成では、凹部２３ａは、溝部２１よりも広い略均一の幅を有する。 Further, in the grindstone embedding portion 25 of the present embodiment, the recess 23 formed in the upper portion of the groove portion 21 has a trapezoidal cross section. However, the shape of the recess formed in the grindstone embedding portion 25 is not limited to this, and any shape that can store the adhesive J pushed away by the grinding wheel 11 may be used. For example, as shown in FIG. 9, the grindstone embedding portion 25 may have a recess 23a having a substantially rectangular cross section. In this configuration, recess 23 a has a substantially uniform width that is wider than groove 21 .

あるいは、砥石埋設部２５は、図１０に示すような凹部２３ｂを備えてもよい。凹部２３ｂの断面は、底面１０１に近い側では、溝部２１の断面の幅よりも広い幅を有する長方形状であり、溝部２１に近い側では、溝部２１に向かって幅の狭くなる台形状である。すなわち、凹部２３ｂの側壁は、溝部２１の側壁と略平行な幅広の底面１０１側の部分と、この部分と溝部２１の側壁とをつなぐテーパ部分とを含んでいる。 Alternatively, the grindstone embedding portion 25 may have a recess 23b as shown in FIG. The cross section of the recess 23b is rectangular with a width wider than the cross section of the groove 21 on the side closer to the bottom surface 101, and has a trapezoidal shape that narrows toward the groove 21 on the side closer to the groove 21. . That is, the side wall of the recess 23b includes a wide bottom 101 side portion substantially parallel to the side wall of the groove 21 and a tapered portion connecting this portion and the side wall of the groove 21 .

あるいは、砥石埋設部２５は、図１１に示すような凹部２３ｃを備えてもよい。凹部２３ｃの断面は、底面１０１に近い側では、溝部２１の断面の幅よりも広い幅を有する長方形状であり、溝部２１に近い側では、溝部２１に向かって幅の狭くなる湾曲した台形状である。すなわち、凹部２３ｃの側壁は、溝部２１の側壁と略平行な幅広の底面１０１側の部分と、この部分と溝部２１の側壁とをつなぐ湾曲部分とを含んでいる。 Alternatively, the grindstone embedding portion 25 may have a recess 23c as shown in FIG. The cross section of the recess 23c has a rectangular shape with a width wider than the cross section of the groove 21 on the side near the bottom surface 101, and a curved trapezoid whose width narrows toward the groove 21 on the side near the groove 21. is. That is, the side wall of the recess 23 c includes a wide bottom 101 side portion substantially parallel to the side wall of the groove 21 and a curved portion connecting this portion and the side wall of the groove 21 .

１：研削ホイール、
１０：ホイール基台、１１：研削砥石、１１０：開口、
１００：装着面、１０１：底面、１０２：傾斜面、１０３：研削水供給口、
２１：溝部、２３：凹部、２５：砥石埋設部、
Ｊ：接着剤 1: grinding wheel,
10: Wheel base, 11: Grinding wheel, 110: Opening,
100: mounting surface, 101: bottom surface, 102: inclined surface, 103: grinding water supply port,
21: groove portion, 23: concave portion, 25: grinding stone embedded portion,
J: Adhesive

Claims (1)

環状のホイール基台と、該ホイール基台の底面から突出して配設される研削砥石とから構成される研削ホイールを製造する研削ホイールの製造方法であって、
該ホイール基台の底面に溝部を形成すること、および、該ホイール基台の底面と該溝部との境界の角部に該溝部に沿って凹部を形成することによって、該研削砥石が埋設される砥石埋設部を形成する砥石埋設部形成ステップと、
該砥石埋設部の該溝部に接着剤を充填する接着剤充填ステップと、
該接着剤が充填された該砥石埋設部の該溝部に、砥粒とボンド剤とを混練してなる研削砥石を、該研削砥石が該ホイール基台の底面から所定量突出するように埋設する研削砥石成形ステップと、を備え、
該接着剤が充填された該砥石埋設部の該溝部に該研削砥石を埋設する際、該溝部から押しのけられた該接着剤が該砥石埋設部に形成された該凹部に留まり、該接着剤が該砥石埋設部からはみ出ることを抑制する研削ホイールの製造方法。 A grinding wheel manufacturing method for manufacturing a grinding wheel comprising an annular wheel base and a grinding wheel arranged so as to protrude from the bottom surface of the wheel base, comprising:
The grinding wheel is embedded by forming a groove in the bottom surface of the wheel base and forming a recess along the groove at a corner of the boundary between the bottom surface of the wheel base and the groove. a whetstone-burying portion forming step for forming a whetstone-burying portion;
an adhesive filling step of filling the groove of the grindstone embedded portion with an adhesive;
A grinding wheel formed by kneading abrasive grains and a bonding agent is embedded in the groove of the grinding wheel embedding part filled with the adhesive so that the grinding wheel protrudes from the bottom surface of the wheel base by a predetermined amount. a grinding wheel forming step;
When the grinding wheel is embedded in the groove of the grindstone-embedded portion filled with the adhesive, the adhesive pushed away from the groove stays in the recess formed in the grindstone-embedded portion, and the adhesive is A method for manufacturing a grinding wheel that suppresses protruding from the grindstone-buried portion.
JP2018187351A 2018-10-02 2018-10-02 Grinding wheel manufacturing method Active JP7152922B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2018187351A JP7152922B2 (en) 2018-10-02 2018-10-02 Grinding wheel manufacturing method
CN201910876545.1A CN110977798A (en) 2018-10-02 2019-09-17 Method for manufacturing grinding wheel
KR1020190118211A KR20200038183A (en) 2018-10-02 2019-09-25 Manufacturing method of grinding wheel
TW108135263A TWI800687B (en) 2018-10-02 2019-09-27 Manufacturing method of grinding wheel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018187351A JP7152922B2 (en) 2018-10-02 2018-10-02 Grinding wheel manufacturing method

Publications (2)

Publication Number Publication Date
JP2020055071A JP2020055071A (en) 2020-04-09
JP7152922B2 true JP7152922B2 (en) 2022-10-13

Family

ID=70081765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018187351A Active JP7152922B2 (en) 2018-10-02 2018-10-02 Grinding wheel manufacturing method

Country Status (4)

Country Link
JP (1) JP7152922B2 (en)
KR (1) KR20200038183A (en)
CN (1) CN110977798A (en)
TW (1) TWI800687B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022096834A (en) * 2020-12-18 2022-06-30 株式会社ディスコ Grinding wheel

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007216306A (en) 2006-02-14 2007-08-30 Disco Abrasive Syst Ltd Manufacturing method of grinding wheel
JP2014091193A (en) 2012-11-02 2014-05-19 Takatori Corp Grinding wheel
JP2015199133A (en) 2014-04-04 2015-11-12 株式会社ディスコ grinding wheel

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE53324T1 (en) * 1986-04-17 1990-06-15 Carborundum Schleifmittel PROCESS FOR MANUFACTURING AN ELASTIC ABRASIVE BODY.
JPH0890426A (en) * 1994-09-26 1996-04-09 Toshiba Ceramics Co Ltd Polishing device
CN1265954A (en) * 1999-03-09 2000-09-13 广东工业大学 Novel diamond wheel
JP2007301665A (en) 2006-05-10 2007-11-22 Disco Abrasive Syst Ltd Grinding wheel and its manufacturing method
JP5378345B2 (en) * 2010-12-09 2013-12-25 株式会社日立産機システム Permanent magnet motor and manufacturing method thereof
JP2016168660A (en) * 2015-03-13 2016-09-23 株式会社ディスコ Grinding wheel
CN105014557B (en) * 2015-05-25 2017-12-26 江苏锋泰工具有限公司 Efficient and light weight diamond-impregnated wheel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007216306A (en) 2006-02-14 2007-08-30 Disco Abrasive Syst Ltd Manufacturing method of grinding wheel
JP2014091193A (en) 2012-11-02 2014-05-19 Takatori Corp Grinding wheel
JP2015199133A (en) 2014-04-04 2015-11-12 株式会社ディスコ grinding wheel

Also Published As

Publication number Publication date
CN110977798A (en) 2020-04-10
JP2020055071A (en) 2020-04-09
KR20200038183A (en) 2020-04-10
TWI800687B (en) 2023-05-01
TW202014272A (en) 2020-04-16

Similar Documents

Publication Publication Date Title
JP4816815B2 (en) Polishing apparatus for polygonal columnar member and polishing method thereof
US20220055105A1 (en) Method for producing a machining segment for the dry machining of concrete materials
EP1319470B1 (en) Ultra abrasive grain wheel for mirror finish
US20220055106A1 (en) Method for producing a machining segment for the dry machining of concrete materials
US20220023945A1 (en) Method for producing a machining segment for the dry machining of concrete materials
JP7152922B2 (en) Grinding wheel manufacturing method
CN106346378B (en) Grinding wheel
JP5119614B2 (en) Wafer outer periphery grinding method
KR20190072583A (en) hone
JP6302889B2 (en) Whetstone
JP2009224496A (en) Wafer edge grinding method, wafer edge grinding unit, and wafer rear-face grinder
JP2022047538A (en) Chamfer grinding method and chamfer grinding device
JP2006082197A (en) Grinding wheel
JP4906467B2 (en) Inclined grooved whetstone and manufacturing method thereof
JP5468110B2 (en) Manufacturing method of grindstone with recess
JP6161463B2 (en) Foreign matter removal tool and foreign matter removal method
JP7370667B2 (en) Processing method of workpiece
WO2001035450A1 (en) Compound semiconductor wafer
EP0974425A1 (en) Grinding wheel available for cutting and grinding
US20200324387A1 (en) Dressing tool
JP2002066931A (en) Grinding wheel and method and device for mirror finished surface grinding
JP4948122B2 (en) Whetstone with inclined grooves
JP3115420U (en) Segment type grinding wheel for vertical surface grinding
US20130252516A1 (en) Polishing pad and polishing method
JP2016140970A (en) Retainer ring, polishing device, and semiconductor device manufacturing method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210811

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220525

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220531

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220729

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220906

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220930

R150 Certificate of patent or registration of utility model

Ref document number: 7152922

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150