JP5953328B2 - MOUNTING MATERIAL, WORK PROCESSING METHOD USING THE SAME AND MOUNTING BODY FOR FLAT - Google Patents

Description

  The present invention relates to a mount material, a workpiece processing method using the mount material, and a planar processing mount body, and more particularly to a mount material containing ceramic particles and a workpiece processing method using the mount material.

  Conventionally, JP-A-2006-169288 (Patent Document 1) discloses an adhesive having a main agent that generates an adhesive force when cured, a curing agent that accelerates the curing of the main agent, and a filler. .

  In Japanese Patent Laid-Open No. 2003-152021 (Patent Document 2), a semiconductor chip having an active surface is made of an adhesive on the side surface of the semiconductor chip by pressing the substrate through an adhesive with the active surface facing the substrate. A method is disclosed in which an adhesive portion is formed and the semiconductor chip and the adhesive portion are simultaneously ground from the surface of the semiconductor chip opposite to the active surface.

JP 2006-169288 A JP 2003-152021 A

  After the workpiece is fixed and ground or polished, processing damage remains on the surface of the workpiece. Polishing processing using cerium oxide is added to remove processing damage on the surface of the workpiece.

However, there is a problem that it is not easy to obtain cerium oxide.
Further, in the process using cerium oxide, there is a problem that dust is generated and the working environment is deteriorated.

  Accordingly, the present invention has been made to solve the above-described problems, and a mounting material capable of removing the processing damage on the surface of the workpiece without adding processing using cerium oxide, and processing of the workpiece using the same. It is an object to provide a method and a flat working mount.

  A mount material for fixing a workpiece according to the present invention includes a plurality of ceramic particles and a soft material having a Vickers hardness lower than that of the plurality of ceramic particles interposed between the plurality of ceramic particles.

  In the mount material configured as described above, the processing grindstone can be dressed using ceramic particles in the mount material during processing of the workpiece. As a result, the sharpness of the grindstone is improved, and processing damage to the surface of the workpiece can be suppressed.

  According to the said invention, the processing damage of the surface of a workpiece | work can be removed, without adding the process using a cerium oxide.

It is a top view which shows the mount structure using the mount material according to embodiment. It is sectional drawing along the II-II line | wire in FIG.

[Description of Embodiment of Present Invention]
First, the contents of the embodiments of the present invention will be listed and described.

  (1) A mount material for fixing a workpiece includes a plurality of ceramic particles and a soft material having a Vickers hardness lower than that of the plurality of ceramic particles interposed between the plurality of ceramic particles.

  In the mount material configured as described above, the processing grindstone can be dressed using ceramic particles in the mount material during processing of the workpiece. As a result, the sharpness of the grindstone is improved, and processing damage to the surface of the workpiece can be suppressed.

  (2) Preferably, the soft material binds each of the plurality of ceramic particles. In this case, the mount material becomes solid, and the work can be reliably fixed using the mount material.

  (3) Preferably, the ratio of the plurality of ceramic particles in the mount material is 25 volume% or more and 90 volume% or less. Since the ratio of the ceramic particles is 25% by volume or more, the processing grindstone can be dressed with a sufficient amount of the ceramic particles. Since the ratio of the ceramic particles is 90% by volume or less, the soft material can be sufficiently interposed between the ceramic particles.

  (4) Preferably, the Vickers hardness HV of the plurality of ceramic particles is 1 GPa or more and 30 GPa or less. Since the Vickers hardness HV of the plurality of ceramic particles is 1 GPa or more, the abrasive grains can be dressed reliably. Since the Vickers hardness HV of the plurality of ceramic particles is 30 GPa or less, the abrasive grains are not damaged.

(5) Preferably, the plurality of ceramic particles include alumina.
(6) Preferably, the average particle diameter of alumina is 0.1 μm or more and 100 μm or less.

  (7) Preferably, the soft material includes at least one selected from the group consisting of an epoxy resin, a phenol resin, and a polyimide resin.

  (8) The workpiece processing method includes a step of fixing the workpiece with the mounting material according to (1) to (7), and a step of processing the fixed workpiece with the grindstone while dressing the grindstone with a plurality of ceramic particles. With.

  (9) A planar processing mount body includes a work and the mount material according to any one of (1) to (7) surrounding the work.

  In the mount body configured as described above, since the mount material is disposed so as to surround the work, the ceramic particles can dress the grindstone at the same time as the grindstone processes the work. As a result, the sharpness of the grindstone is improved and the surface of the workpiece can be processed smoothly. Therefore, the surface of the work is not damaged.

[Details of the embodiment of the present invention]
Specific examples according to embodiments of the present invention will be described below with reference to the drawings. In addition, this invention is not limited to these illustrations, is shown by the claim, and intends that all the changes within the meaning and range equivalent to a claim are included.

(Mounting material and mounting structure)
FIG. 1 is a plan view showing a mount structure using a mount material according to the embodiment. FIG. 2 is a cross-sectional view taken along the line II-II in FIG. With reference to FIG. 1 and FIG. 2, the mount material 2 includes a plurality of ceramic particles and a soft material having a Vickers hardness lower than that of the plurality of ceramic particles interposed between the plurality of ceramic particles. The mount material 2 fixes the workpiece 3 on the plate material 1.

  The mount material 2 is arranged in a donut shape. The upper surface of the mounting material 2 is substantially flush with the upper surface of the workpiece 3. The entire circumference of the work 3 is covered with the mount material 2. Therefore, compared with the structure in which the mount material 2 is not disposed between the workpiece 3 and the workpiece 3 adjacent thereto, the grindstone continuously processes the workpiece 3, the mount material 2 and the workpiece 3.

  The grinding wheel 10 is positioned at a position separated from the workpiece 3 and the mount material 2. The grinding wheel 10 includes a base metal 12 and a grindstone 11 fixed to the base metal 12. At the time of processing, the grindstone 11 is brought into contact with the workpiece 3 and the mount material 2.

  The mount material 2 may be solid or gel. Since the mount material 2 is for fixing the workpiece 3, it contacts the workpiece 3 and the plate material 1 on which the workpiece 3 is placed.

  As the work 3, for example, glass is used. In the example of FIGS. 1 and 2, the workpiece 3 is a plate-like glass, but is not limited to a plate-like shape, and a block-like glass may constitute the workpiece 3. Further, in FIG. 1 and FIG. 2, seven workpieces 3 are arranged, but the present invention is not limited to this, and more or fewer workpieces 3 may be arranged on the plate material 1.

  Although the workpieces 3 are arranged in a circular shape in FIG. 1, the workpieces 3 may be arranged in a lattice shape instead of a circular shape. By arranging the workpieces 3 in a circular shape, the rotating grinding wheel 10 can be brought into contact with the plurality of workpieces 3 evenly. By arranging the workpieces 3 in a lattice shape, many workpieces 3 can be arranged in a small area.

  The area of the mount material 2 is preferably 20% or more and 500% or less with respect to the area of the work 3. In order to securely fix the workpiece 3 with the plate material 1, a recess may be provided in the plate material 1, and the workpiece 3 may be fitted in the recess. Even in this case, the mount material 2 is disposed around the work 3.

  In FIG. 2, the grinding wheel 10 and the workpiece 3 are shown separated from each other. However, at the time of grinding, the surface of the workpiece 3 and the surface of the grindstone 11 are approximately the same height, and the grinding wheel is in the direction indicated by the arrow 10 a. 10 is sent and the workpiece 3 is processed by the grindstone 11. When the workpiece 3 is fed to the processing point at a speed of Vmm / second in the direction indicated by the arrow 10a, it is preferable that the mount material 2 having a length of Vmm or more and 10Vmm or less exists upstream of the workpiece 3.

  In this case, the grindstone 11 is first dressed with the mount material 2 for 1 second or more and 10 seconds or less, and then the workpiece 3 is processed. As a result, the workpiece 3 can be processed with the sharp grinding wheel 11.

(Ceramic particles)
Ceramic particles are those capable of dressing a grindstone. For example, SiC or alumina is selected as the ceramic particles. These physical properties are as follows.

SiC: Vickers hardness HV 24 GPa, Young's modulus 410 GPa, tensile strength 600 MPa
Alumina: Vickers hardness HV 14.5-18 GPa, Young's modulus 300-400 GPa, tensile strength 465 MPa
More specifically, as ceramic particles, A abrasive grains (brown alumina abrasive grains), WA abrasive grains (alumina refined by the Bayer method, melted in an electric furnace, and solidified ingot was pulverized and granulated white alumina abrasive grains Grains), C abrasive grains (carbonite: black silicon carbide abrasive grains), and GC abrasive grains (green carbonite: green silicon carbide abrasive grains).

  When diamond is used as the superabrasive grain, the Vickers hardness of the ceramic particles is preferably 1/3 or less, more preferably 1/5 or less of the Vickers hardness of diamond.

  The particle size of the ceramic particles is preferably greater than or equal to the particle size of the abrasive grains in the grindstone. For example, WA abrasive grains having a particle size of # 1000 or more can be used. If the particle size is # 1000 or more, the ceramic particles can be obtained easily and inexpensively. The particle size (#) and the average particle size (μm) correspond as follows according to JIS R6001.

  # 240 has an average particle size of 74-88 μm, # 400 has an average particle size of 37-44 μm, # 600 has an average particle size of 26-31 μm, # 800 has an average particle size of 18-22 μm, and # 1000 has an average particle size of 14.5- 18 μm and # 2000 correspond to an average particle size of 7.1 to 8.9 μm, # 4000 corresponds to an average particle size of 3.1 to 4.5 μm, and # 8000 corresponds to an average particle size of 1.5 to 2 μm.

  The ceramic particles are present in a volume ratio of 2-4 times that of the soft material (resin), preferably in a volume ratio of 3 times or more. By making the volume of the ceramic particles larger than that of the soft material, it becomes possible to dress the grindstone with a sufficient amount of the ceramic particles.

(Soft material)
For example, a resin is selected as the soft material. In order to facilitate handling, a two-component resin is preferable. The two-component resin is composed of a main agent and a curing agent. By adjusting the timing for adding the curing agent to the main agent, the timing for curing the resin can be determined.

  As the resin, an epoxy resin, a phenol resin, or a polyimide resin can be used. The soft material is made of a material having a Vickers hardness lower than that of the ceramic particles, and is interposed between the ceramic particles.

(theory)
Ceramic particles (for example, WA particles) with low hardness that do not easily damage superabrasive grains are used, and the resin component is reduced, which is used as a mount material. A workpiece (for example, glass) and a mounting material are ground simultaneously with a superabrasive wheel. It is considered that the ceramic particles prevent clogging of a superabrasive grindstone (for example, a vitrified bond grindstone having pores) used for processing and assist in the cutting.

(effect)
In order to increase the effect of preventing clogging, the particle size of the ceramic particles is increased, and the amount of the ceramic particles in the soft material is increased within a range where the strength of the mounting material is not lowered. This enhances the effect of dressing the superabrasive wheel used for processing. Therefore, the processing process using cerium oxide can be omitted.

  Since the mount material contains a large amount of ceramic particles and the amount of the soft material is small, the adhesive force between the mount material and the workpiece can be reduced. As a result, the mount material can be easily peeled off from the work after the work is processed.

  Furthermore, it is possible to process a workpiece continuously even if the step of dressing the wheel is omitted.

  Generation of cracks, chips and scratches on the surface of the workpiece can be suppressed. Further, the inclination of the polished surface can be suppressed. Furthermore, the mirror surface accuracy can be improved.

  When a dummy workpiece is placed around the workpiece at a distance from the workpiece and these are machined, the machining is not stable because the machining is intermittent. On the other hand, since the grindstone processes the workpiece and the mount material at the same time, the grindstone continuously processes the workpiece and the mount material. As a result, machining accuracy is improved.

(Used powder)
The powder shown in Table 1 was prepared.

  In the column of alumina, “WA1000”, “WA400”, and “WA3000” mean that the composition is WA and the particle sizes are # 1000, # 400, and # 3000.

(mixture)
The raw materials shown in Table 2 below were mixed using a mixer.

  In the mixing order, first, the main agent and the solvent were mixed with a mixer, and alumina and a curing agent were added to the mixture and further mixed. In the “Flowability” column of “Mixing results” in Table 2, “A” indicates that the mixture flowed well, “B” indicates that the mixture flowed, and “C” indicates that the mixture did not flow very much. It shows that. Furthermore, “A” in the “Clot” column indicates that the mixture has solidified after mixing.

(Volume ratio)
Further, the volume of the resin, the volume of the WA abrasive grains, and the volume ratio thereof in the solid body mixed and solidified in Table 2 were calculated. The calculation results are shown in Table 3.

  In Table 3, calculation was performed on the assumption that neither the main agent nor the curing agent in Table 2 was volatilized.

(Survey item)
The equipment shown in Table 4 was prepared for sample investigation and evaluation.

Furthermore, a surface grinder SIG300A manufactured by Waida was prepared for grinding.
(Tools used for processing)
The tools (grinding wheels) shown in Table 5 were prepared for roughing and finishing.

(Create mount structure)
A mount structure having the shape shown in FIG. 1 was prepared. The diameter of the outer circumference circle 1a of the plate material 1 was 200 mm, the diameter of the outer circumference circle 2a of the mount material 2 was 150 mm, the diameter of the inner circumference circle 2b was 100 mm, and the dimensions of the workpiece 3 were 20 mm × 50 mm. Samples Nos. 1 to 5 were used as the mounting material 2.

(processing)
The workpiece 3 was processed using the grinding wheel shown in Table 5. Specifically, roughing was performed with a roughing grindstone, and finishing was performed with a finishing grindstone. Detailed conditions are shown in Table 6.

Note that the above roughing and finishing were both performed continuously.
(Evaluation)
The processed workpiece was evaluated based on the items in Table 4. The results are shown in Table 7.

  PV (between peak valleys) in Table 7 is the distance between the highest and lowest points in the sample. PV = Rp + Rv, where Rp is the height from the centerline to the highest value and Rv is the depth from the centerline to the lowest value.

  From this result, the surface roughness of the finished surface is improved when the WA abrasive grain size of the mount material is # 3000 finer. Further, it was found that even when the WA grain size is as coarse as # 400, the surface roughness of the finished surface is improved by increasing the ratio of WA in the mount material.

  The present invention can be used in the field of mounting materials.

  1 plate material, 2 mount material, 3 workpieces, 10 grinding wheel, 11 grindstone, 12 base metal.

Claims (9)

A plurality of ceramic particles;
A mounting material for fixing a workpiece by contacting and bonding to the workpiece, comprising a soft material having a Vickers hardness lower than that of the plurality of ceramic particles, which is interposed between the plurality of ceramic particles.   The mounting material for fixing a workpiece according to claim 1, wherein the soft material binds each of the plurality of ceramic particles.   The mounting material for fixing a workpiece according to claim 1 or 2, wherein a ratio of the plurality of ceramic particles in the mounting material is 25% by volume or more and 90% by volume or less.   The mounting material for fixing a workpiece according to any one of claims 1 to 3, wherein the plurality of ceramic particles have a Vickers hardness HV of 1 GPa to 30 GPa.   The mounting material for fixing a workpiece according to any one of claims 1 to 4, wherein the plurality of ceramic particles include alumina.   The mounting material for fixing a workpiece according to claim 5, wherein the average particle diameter of the alumina is 0.1 μm or more and 100 μm or less.   The mount material for fixing the workpiece according to any one of claims 1 to 6, wherein the soft material includes at least one selected from the group consisting of an epoxy resin, a phenol resin, and a polyimide resin. Fixing the workpiece with the mounting material according to claim 1;
And a step of processing the fixed workpiece with a grindstone while dressing the grindstone with the plurality of ceramic particles. Board material,
A workpiece placed on the plate ,
Said a mounting member according to any one of claims 1 to 7 for bonding in contact with enclosed viewing the workpiece and the plate takes the workpiece, surface machining mount body.

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