TW202013625A - Wiring board - Google Patents

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TW202013625A
TW202013625A TW108124297A TW108124297A TW202013625A TW 202013625 A TW202013625 A TW 202013625A TW 108124297 A TW108124297 A TW 108124297A TW 108124297 A TW108124297 A TW 108124297A TW 202013625 A TW202013625 A TW 202013625A
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conductor
planar conductor
power supply
planar
linear
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TW108124297A
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TWI706518B (en
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樋渡俊弘
上村林太郎
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日商京瓷股份有限公司
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Abstract

A wiring board of the present disclosure includes: an insulating base (2) comprised of a first surface (5) having a mounting region (5a) and a second surface (6) to be connected to an exterior substrate; a power source conductor (3P) comprised of a first planar conductor (3PF) located in a single-sided area (5b) around the mounting region and a first linear conductor (3PL) protruding in a comb-shaped form towards the mounting region; a grounded conductor (3G) comprised of a second planar conductor (3GF) located in an opposite side area (5c) around the mounting region and a second linear conductor (3GL) protruding in a comb-shaped form towards the mounting region such that the second linear conductor (3GL) is alternatingly adjacent to the first linear conductor (3PL); a power source terminal (11) electrically connected to the first planar conductor via a first through conductor located in a first region overlapping the first planar conductor in a top perspective view in the second surface; and a grounded terminal (12) electrically connected to the second planar conductor via a second through conductor located in a second region overlapping the second planar conductor.

Description

佈線基板 Wiring board

本揭示關於一種佈線基板。 The present disclosure relates to a wiring substrate.

近年來,以超級計算機等為代表的高速地進行運算處理的高性能的電子設備的開發正在推進。這樣的電子設備例如日本特開2003-188305號公報所記載的那樣,具有安裝有半導體積體電路元件的複數個佈線基板。由於在電子設備中搭載有複數個佈線基板,因此要求佈線基板的小型化。各個佈線基板具有:絕緣基體,係層疊有複數個絕緣層;佈線導體,係包括位於各絕緣層的表面的電源用導體以及接地用導體;半導體積體電路元件連接用的端子,係位於絕緣基體的最上表面;以及外部基板連接用的端子,係位於絕緣基體的最下表面。 In recent years, the development of high-performance electronic devices that perform arithmetic processing at high speeds, such as supercomputers, is advancing. Such an electronic device has, for example, as described in Japanese Patent Laid-Open No. 2003-188305, a plurality of wiring boards on which semiconductor integrated circuit elements are mounted. Since a plurality of wiring boards are mounted in the electronic device, the wiring board needs to be miniaturized. Each wiring board includes: an insulating base, on which a plurality of insulating layers are stacked; a wiring conductor, which includes a power supply conductor and a grounding conductor located on the surface of each insulating layer; and a terminal for connecting semiconductor integrated circuit elements, which is located on the insulating base The uppermost surface of the; and the terminal for external substrate connection are located on the lowermost surface of the insulating substrate.

然而,上述半導體積體電路元件為了高速地進行運算處理而需要較多的電力。安裝這樣的半導體積體電路元件的佈線基板要求優異的電力供給特性。為了提高電力供給特性,例如,考慮在佈線基板內設置較多作為電力供給路徑的電源用導體以及接地用導體。但是,為此需要設置電力供給路徑的複數個區域,因此佈線基板的小型化有可能變得困難。 However, the above-mentioned semiconductor integrated circuit element requires a large amount of power in order to perform arithmetic processing at high speed. A wiring board on which such semiconductor integrated circuit elements are mounted requires excellent power supply characteristics. In order to improve the power supply characteristics, for example, it is considered to provide a large number of power supply conductors and ground conductors as power supply paths in the wiring board. However, since it is necessary to provide a plurality of areas of the power supply path for this, it may become difficult to miniaturize the wiring board.

本揭示的佈線基板具有:絕緣基體,係具有第一表面及第二表面,且層疊有複數個絕緣層,該第一表面係包括搭載半導體積體電路元件的搭載區域,該第二表面係與外部基板連接;電源用導體,係具有第一面狀導體、及複數個第一線狀導體,該第一面狀導體係在第一表面中,位於搭載區域的周圍的單側區域,該複數個第一線狀導體係從第一面狀導體以梳齒狀態向搭載區域突出,且分別連接有半導體積體電路元件的複數個電源用電極;接地用導體,係具有的第二面狀導體、及複數個第二線狀導體,該第二面狀導體係在第一表面中,位於搭載區域的周圍的單側區域的相反側區域,該複數個第二線狀導體係與第一線狀導體交替鄰接地從第二面狀導體以梳齒狀態向搭載區域突出,且分別連接有半導體積體電路元件的複數個接地用電極;複數個電源用端子,係在第二表面中位於在俯視透視時與第一面狀導體重疊的第一區域,在第一面狀導體與第一區域之間經由分別貫通複數個絕緣層的第一貫通導體而與第一面狀導體電連接;以及複數個接地用端子,係在第二表面中位於在俯視透視時與第二面狀導體重疊的第二區域,在第二面狀導體與第二區域之間經由分別貫通複數個絕緣層的第二貫通導體而與第二面狀導體電連接。 The wiring board of the present disclosure has an insulating substrate having a first surface and a second surface, and a plurality of insulating layers are stacked. The first surface includes a mounting area on which a semiconductor integrated circuit element is mounted, and the second surface is External substrate connection; power supply conductor, having a first planar conductor, and a plurality of first linear conductors, the first planar conductor system is located on the first surface, in a single-sided area around the mounting area, the plural A first linear conductor system protrudes from the first planar conductor to the mounting area in a comb-tooth state, and is respectively connected to a plurality of power supply electrodes of the semiconductor integrated circuit element; a ground conductor, which is a second planar conductor And a plurality of second linear conductors, the second planar conductor system is located on the first surface opposite to the one-sided region around the mounting area, the plurality of second linear conductor systems and the first wire The conductors alternately and adjacently protrude from the second planar conductor in a comb-tooth state toward the mounting area, and are respectively connected to a plurality of ground electrodes of the semiconductor integrated circuit element; a plurality of power supply terminals are located on the second surface A first region overlapping with the first planar conductor in a perspective view from above, electrically connected to the first planar conductor between the first planar conductor and the first region via first through conductors respectively penetrating through a plurality of insulating layers; and The plurality of grounding terminals are located on the second surface in a second region overlapping with the second planar conductor in a plan view, and between the second planar conductor and the second region via a plurality of insulating layers The two through conductors are electrically connected to the second planar conductor.

根據本揭示的佈線基板,能夠具備小型且優異的電力供給特性。 According to the wiring board of the present disclosure, it is possible to provide small and excellent power supply characteristics.

1‧‧‧佈線基板 1‧‧‧Wiring board

2‧‧‧絕緣基體 2‧‧‧Insulating substrate

2a‧‧‧核心用絕緣層 2a‧‧‧Core insulating layer

2b‧‧‧增層用絕緣層 2b‧‧‧Insulation layer for build-up

3‧‧‧佈線導體 3‧‧‧Wiring conductor

3G‧‧‧接地用導體 3G‧‧‧grounding conductor

3GF‧‧‧第二面狀導體 3GF‧‧‧second surface conductor

3GL‧‧‧第二線狀導體 3GL‧‧‧second linear conductor

3P‧‧‧電源用導體 3P‧‧‧Power conductor

3PF‧‧‧第一面狀導體 3PF‧‧‧The first planar conductor

3PL‧‧‧第一線狀導體 3PL‧‧‧First linear conductor

3S‧‧‧信號用導體 3S‧‧‧Signal conductor

4‧‧‧阻焊劑 4‧‧‧ solder resist

4a、4b‧‧‧開口 4a, 4b‧‧‧ opening

5‧‧‧第一表面 5‧‧‧First surface

5a‧‧‧搭載區域 5a‧‧‧deployment area

5b‧‧‧單側區域 5b‧‧‧Single side area

5c‧‧‧相反側區域 5c‧‧‧The area on the opposite side

6‧‧‧第二表面 6‧‧‧Second surface

7‧‧‧貫通孔 7‧‧‧Through hole

8‧‧‧貫通孔導體 8‧‧‧Through hole conductor

9‧‧‧通孔 9‧‧‧Through hole

10‧‧‧通孔導體 10‧‧‧Through hole conductor

11‧‧‧電源用端子 11‧‧‧Power terminal

12‧‧‧接地用端子 12‧‧‧Ground terminal

13‧‧‧信號用端子 13‧‧‧Signal terminal

S‧‧‧半導體積體電路元件 S‧‧‧ Semiconductor integrated circuit components

第1圖是用於說明本揭示的佈線基板的概略剖視圖。 FIG. 1 is a schematic cross-sectional view for explaining the wiring board of the present disclosure.

第2圖是用於說明本揭示的佈線基板的概略俯視(上表面)圖。 FIG. 2 is a schematic plan (upper surface) view for explaining the wiring board of the present disclosure.

第3圖是用於說明本揭示的佈線基板的概略俯視(下表面)圖。 FIG. 3 is a schematic plan (lower surface) view for explaining the wiring board of the present disclosure.

第4圖是用於說明本揭示的佈線基板的另一實施型態的概略俯視(下表面)圖。 FIG. 4 is a schematic plan (lower surface) view for explaining another embodiment of the wiring board of the present disclosure.

基於第1圖至第3圖,對本揭示的一實施型態的佈線基板1進行說明。第1圖表示佈線基板1的概略剖視圖。第2圖表示絕緣基體2的概略俯視圖。第3圖表示絕緣基體2的概略仰視圖。 Based on FIGS. 1 to 3, a wiring board 1 according to an embodiment of the present disclosure will be described. FIG. 1 shows a schematic cross-sectional view of the wiring board 1. FIG. 2 shows a schematic plan view of the insulating base 2. FIG. 3 shows a schematic bottom view of the insulating base 2.

一實施型態的佈線基板1具備絕緣基體2、佈線導體3以及阻焊劑4。佈線基板1例如在俯視時具有四邊形狀。佈線基板1的厚度例如設定為0.3至1.5mm。 The wiring board 1 of an embodiment includes an insulating base 2, a wiring conductor 3 and a solder resist 4. The wiring board 1 has a quadrangular shape in plan view, for example. The thickness of the wiring substrate 1 is set to 0.3 to 1.5 mm, for example.

絕緣基體2具有包括搭載半導體積體電路元件S的搭載區域5a的第一表面5以及與外部基板連接的第二表面6。進而,第一表面5具有位於搭載區域5a的周圍的單側區域5b以及相反側區域5c。搭載區域5a例如具有正方形。搭載區域5a的形狀也可以與半導體積體電路元件S的形狀一致而為長方形。單側區域5b以及相反側區域5c隔著從搭載區域5a的一對對邊位於絕緣基體2的外周緣的直線狀的邊界而配置。單側區域5b例如具有確保後述的電源用導體3P的配置區域的功能。相反側區域5c例如具有確保後述的接地用導體3G的配置區域的功能。 The insulating base 2 has a first surface 5 including a mounting area 5a on which a semiconductor integrated circuit element S is mounted, and a second surface 6 connected to an external substrate. Furthermore, the first surface 5 has a single-side region 5b and an opposite-side region 5c located around the mounting region 5a. The mounting area 5a has, for example, a square shape. The shape of the mounting region 5a may be a rectangular shape consistent with the shape of the semiconductor integrated circuit element S. The one-sided region 5b and the opposite-side region 5c are arranged via a linear boundary located on the outer peripheral edge of the insulating base 2 from a pair of opposite sides of the mounting region 5a. The one-sided region 5b has, for example, a function of ensuring an arrangement region of the power supply conductor 3P described later. The opposite side region 5c has, for example, a function of ensuring an arrangement area of the grounding conductor 3G described later.

在一實施型態的佈線基板1中,絕緣基體2具有在一層的核心用絕緣層2a以及核心用絕緣層2a的上表面和下表面各位於一層的增層用絕緣層2b。核心用絕緣層2a例如具有確保佈線基板1的剛性而保持佈線基板1的平坦性等的功能。核心用絕緣層2a包括玻璃布以及環氧樹脂或者雙馬來醯亞胺三嗪 樹脂等絕緣材料。這樣的核心用絕緣層2a例如通過一邊對在玻璃布中浸漬了環氧樹脂的半固化狀態的半固化片進行加熱一邊利用平板進行衝壓加工而平坦地形成。 In the wiring substrate 1 according to an embodiment, the insulating base 2 has a build-up insulating layer 2b in which one layer of the core insulating layer 2a and the upper and lower surfaces of the core insulating layer 2a are located on one layer. The core insulating layer 2 a has functions such as ensuring the rigidity of the wiring substrate 1 and maintaining the flatness of the wiring substrate 1. The core insulating layer 2a includes glass cloth and insulating materials such as epoxy resin or bismaleimide triazine resin. Such a core insulating layer 2a is formed flat by, for example, pressing a slab in a semi-cured state in which a glass cloth is impregnated with an epoxy resin while being heated.

核心用絕緣層2a具有從其上表面貫通至下表面的複數個貫通孔(through hole)7。相互鄰接的貫通孔7彼此隔開規定的鄰接間隔而配置。貫通孔7的直徑例如設定為100至300μm。貫通孔7的鄰接間隔例如設定為150至350μm。貫通孔7例如通過噴砂加工、鑽孔加工而形成。由佈線導體3的一部分構成的貫通孔導體8位於貫通孔7內。貫通孔導體8將位於核心用絕緣層2a的上表面以及下表面的佈線導體3彼此電連接。 The core insulating layer 2a has a plurality of through holes 7 penetrating from the upper surface to the lower surface. The through holes 7 adjacent to each other are arranged with a predetermined adjacent interval. The diameter of the through hole 7 is set to, for example, 100 to 300 μm. The adjacent interval of the through holes 7 is set to, for example, 150 to 350 μm. The through hole 7 is formed by, for example, sandblasting or drilling. The through-hole conductor 8 composed of a part of the wiring conductor 3 is located in the through-hole 7. The through-hole conductor 8 electrically connects the wiring conductors 3 located on the upper and lower surfaces of the core insulating layer 2a to each other.

增層用絕緣層2b分別位於核心用絕緣層2a的上表面以及下表面各一層。增層用絕緣層2b例如具有確保後述的佈線導體3的配置區域的功能。增層用絕緣層2b包括絕緣粒子以及環氧樹脂、聚醯亞胺樹脂等絕緣材料。這樣的增層用絕緣層2b例如通過將包括分散有二氧化矽的環氧樹脂的樹脂膜在真空下黏貼於核心用絕緣層2a的表面並進行熱固化而形成。增層用絕緣層2b由於具有上述功能,因此比核心用絕緣層2a薄。 The build-up insulating layers 2b are respectively located on the upper surface and the lower surface of the core insulating layer 2a. The build-up insulating layer 2b has, for example, a function of ensuring the layout area of the wiring conductor 3 described later. The build-up insulating layer 2b includes insulating particles and insulating materials such as epoxy resin and polyimide resin. Such an insulating layer 2b for build-up is formed, for example, by sticking a resin film including an epoxy resin dispersed with silicon dioxide to the surface of the insulating layer 2a for core under vacuum and thermally curing it. Since the insulating layer 2b for build-up has the above-mentioned function, it is thinner than the insulating layer 2a for core.

增層用絕緣層2b具有以位於核心用絕緣層2a的上表面或者下表面的佈線導體3為底部的複數個通孔(via hole)9。由佈線導體3的一部分構成的通孔導體10位於通孔9內。通孔導體10將隔著增層用絕緣層2b而位於上側以及下側的佈線導體3彼此電連接。通孔9的直徑例如設定為30至100μm。通孔9例如通過雷射光加工而形成。 The build-up insulating layer 2b has a plurality of via holes 9 with the wiring conductor 3 located on the upper or lower surface of the core insulating layer 2a as the bottom. A through-hole conductor 10 composed of a part of the wiring conductor 3 is located in the through-hole 9. The via-hole conductor 10 electrically connects the wiring conductors 3 located on the upper side and the lower side via the build-up insulating layer 2b. The diameter of the through hole 9 is set to 30 to 100 μm, for example. The through hole 9 is formed by laser processing, for example.

佈線導體3位於核心用絕緣層2a的上下表面、增層用絕緣層2b的上表面或者下表面、貫通孔7內以及通孔9內。佈線導體3包括電源用導體 3P、接地用導體3G以及信號用導體3S。電源用導體3P、接地用導體3G以及信號用導體3S分別隔開規定間隔而配置,以使相互不會短路。 The wiring conductor 3 is located on the upper and lower surfaces of the core insulating layer 2a, the upper or lower surface of the build-up insulating layer 2b, inside the through hole 7 and inside the through hole 9. The wiring conductor 3 includes a power supply conductor 3P, a grounding conductor 3G, and a signal conductor 3S. The power supply conductor 3P, the grounding conductor 3G, and the signal conductor 3S are arranged at predetermined intervals so as not to be short-circuited with each other.

電源用導體3P例如具有對安裝於佈線基板1的上表面的半導體積體電路元件S供給來自外部電源的電力的功能。為了抑制來自外部電源的損失並且向半導體積體電路元件S迅速地供給電力,電源用導體3P需要以佔據包括半導體積體電路元件S的正下方的附近較大的面積的狀態來配置。即,電源用導體3P通過以短的距離將外部電源與半導體積體電路元件S之間連結,從而能夠提高電力的供給特性。 The power supply conductor 3P has a function of supplying power from an external power supply to the semiconductor integrated circuit element S mounted on the upper surface of the wiring board 1, for example. In order to suppress the loss from the external power supply and quickly supply power to the semiconductor integrated circuit element S, the power supply conductor 3P needs to be arranged in a state where it occupies a large area including the vicinity of the semiconductor integrated circuit element S immediately below. That is, the power supply conductor 3P connects the external power supply and the semiconductor integrated circuit element S at a short distance, so that the power supply characteristics can be improved.

在一實施型態的佈線基板1中,電源用導體3P具有第一面狀導體3PF以及第一線狀導體3PL。第一面狀導體3PF在最接近半導體積體電路元件S的絕緣層2b的第一表面5中,位於搭載區域5a周圍的單側區域5b。即,第一面狀導體3PF在距半導體積體電路元件S的距離短的單側區域5b具有面狀的寬的路徑。在一實施型態的佈線基板1中,第一面狀導體3PF佔據搭載區域5a的周圍的大約一半的區域。 In the wiring board 1 of one embodiment, the power supply conductor 3P has a first planar conductor 3PF and a first linear conductor 3PL. The first planar conductor 3PF is located in the one-sided region 5b around the mounting region 5a in the first surface 5 closest to the insulating layer 2b of the semiconductor integrated circuit element S. That is, the first planar conductor 3PF has a planar wide path in the one-sided region 5b where the distance from the semiconductor integrated circuit element S is short. In the wiring board 1 of one embodiment, the first planar conductor 3PF occupies approximately half of the area around the mounting area 5a.

第一面狀導體3PF經由位於其正下方的作為第一貫通導體的貫通孔導體8以及通孔導體10、以及經由與外部基板的電極連接的電源用端子11(詳細後述)而與外部電源電連接。換言之,由於第一面狀導體3PF經由位於其正下方的佈線導體3而與外部電源連接,因此一實施型態的佈線基板1在第一面狀導體3PF的正下方也能夠縮短電力的供給路徑。 The first planar conductor 3PF is electrically connected to the external power supply via the through-hole conductor 8 and the through-hole conductor 10 that are the first through conductors located directly below it, and the power supply terminal 11 (described in detail later) connected to the electrode of the external substrate. connection. In other words, since the first planar conductor 3PF is connected to the external power source via the wiring conductor 3 located directly below it, the wiring board 1 of the embodiment can also shorten the power supply path directly under the first planar conductor 3PF .

第一線狀導體3PL在最接近半導體積體電路元件S的絕緣層2b的第一表面5中,從第一面狀導體3PF以梳齒狀態向搭載區域5a突出地配置。各個第一線狀導體3PL與半導體積體電路元件S的複數個電源用電極連接。即, 第一線狀導體3PL在搭載區域5a中,在其正上方與半導體積體電路元件S的電源用電極連接,因此能夠縮短電力的供給路徑。進而,由於從具有以短路徑與外部電源連接的寬的路徑的第一面狀導體3PF向搭載區域5a突出,因此能夠以低電阻高效地供給電力。 The first linear conductor 3PL is arranged on the first surface 5 closest to the insulating layer 2b of the semiconductor integrated circuit element S from the first planar conductor 3PF in a comb-tooth state toward the mounting region 5a. Each first linear conductor 3PL is connected to a plurality of power supply electrodes of the semiconductor integrated circuit element S. That is, the first linear conductor 3PL is connected to the power supply electrode of the semiconductor integrated circuit element S directly above the mounting region 5a, so that the power supply path can be shortened. Furthermore, since the first planar conductor 3PF having a wide path connected to the external power source by a short path protrudes toward the mounting area 5a, power can be efficiently supplied with low resistance.

第一線狀導體3PL經由位於其正下方的第一貫通導體即貫通孔導體8以及通孔導體10以及與外部基板的電極連接的電源用端子11(詳細後述)而與外部電源電連接。換言之,第一線狀導體3PL經由位於其正下方的佈線導體3而與外部電源連接,因此一實施型態的佈線基板1在第一線狀導體3PL的正下方也能夠縮短電力的供給路徑。 The first linear conductor 3PL is electrically connected to an external power supply via a through-hole conductor 8 and a through-hole conductor 10 that are the first through-conductors located directly below it, and a power supply terminal 11 (described in detail later) connected to the electrode of the external substrate. In other words, the first linear conductor 3PL is connected to the external power source via the wiring conductor 3 located directly below it. Therefore, the wiring board 1 of the embodiment can shorten the power supply path even under the first linear conductor 3PL.

第一線狀導體3PL配置為在搭載區域5a中與後述的第二線狀導體3GL交替地鄰接。這樣,通過配置為電源用導體3P與接地用導體3G交替地鄰接,從而能夠抑制佈線基板1的環路電感,在能夠提高電力供給特性方面是有利的。第一線狀導體3PL的寬度例如設定為50至100μm,以使能夠連接半導體積體電路元件S的電源用電極。 The first linear conductor 3PL is arranged alternately adjacent to the second linear conductor 3GL described later in the mounting area 5a. In this way, by arranging the power supply conductor 3P and the ground conductor 3G alternately adjacent to each other, the loop inductance of the wiring board 1 can be suppressed, which is advantageous in that the power supply characteristics can be improved. The width of the first linear conductor 3PL is set to, for example, 50 to 100 μm so that the power supply electrode of the semiconductor integrated circuit element S can be connected.

接地用導體3G通過在與電源用導體3P之間設置電位差,從而具有與電源用導體3P一起實現向半導體積體電路元件S的電力供給的功能。因此,接地用導體3G也與電源用導體3P相同地以短的距離、寬的路徑將外部電源與半導體積體電路元件S之間連結,從而能夠提高電力的供給特性。此外,接地用導體3G具有抑制在鄰接的信號用導體3S彼此之間產生的寄生電容、吸收從信號用導體3S產生的輻射雜訊的功能等。 The grounding conductor 3G has a function of supplying electric power to the semiconductor integrated circuit element S together with the power supply conductor 3P by providing a potential difference between the power supply conductor 3P. Therefore, the grounding conductor 3G also connects the external power supply and the semiconductor integrated circuit element S with a short distance and a wide path as in the power supply conductor 3P, so that the power supply characteristics can be improved. In addition, the grounding conductor 3G has a function of suppressing the parasitic capacitance generated between the adjacent signal conductors 3S and absorbing radiated noise generated from the signal conductor 3S.

在一實施型態的佈線基板1中,接地用導體3G具有第二面狀導體3GF以及第二線狀導體3GL。第二面狀導體3GF在最接近半導體積體電路元 件S的絕緣層2b的第一表面5中,位於與搭載區域5a周圍的單側區域5b的相反側的相反側區域5c。即,第二面狀導體3GF在距半導體積體電路元件S的距離短的相反側區域5c中,以確保面狀的寬的路徑的狀態存在。在本例中,第二面狀導體3GF佔據搭載區域5a的周圍的大約一半的區域。 In the wiring board 1 of one embodiment, the ground conductor 3G has a second planar conductor 3GF and a second linear conductor 3GL. The second planar conductor 3GF is located on the first surface 5 closest to the insulating layer 2b of the semiconductor integrated circuit element S, on the side region 5c opposite to the side region 5b around the mounting region 5a. That is, the second planar conductor 3GF exists in the state of ensuring the planar wide path in the region 5c on the opposite side where the distance from the semiconductor integrated circuit element S is short. In this example, the second planar conductor 3GF occupies approximately half of the area around the mounting area 5a.

第二面狀導體3GF經由位於其正下方的第二貫通導體即貫通孔導體8、以及通孔導體10以及與外部基板的電極連接的接地用端子12(詳細後述)而與外部電源電連接。換言之,第二面狀導體3GF經由位於其正下方的佈線導體3而與外部電源連接,因此一實施型態的佈線基板1在第二面狀導體3GF的正下方也能夠縮短第二面狀導體3GF與外部電源的路徑長度。 The second planar conductor 3GF is electrically connected to an external power source via a through-hole conductor 8 that is a second through-conductor located directly below it, and a through-hole conductor 10 and a ground terminal 12 (described in detail later) connected to an electrode of an external substrate. In other words, the second planar conductor 3GF is connected to the external power source via the wiring conductor 3 located directly below it. Therefore, the wiring board 1 of the embodiment can shorten the second planar conductor even under the second planar conductor 3GF The path length between 3GF and external power supply.

第二線狀導體3GL在最接近半導體積體電路元件S的絕緣層2b的第一表面5中,從第二面狀導體3GF以梳齒狀態向搭載區域5a突出地配置。各個第二線狀導體3GL與半導體積體電路元件S的複數個接地用電極連接。即,第二線狀導體3GL在搭載區域5a中,在其正上方與半導體積體電路元件S的接地用電極連接,因此能夠縮短第二線狀導體3GL與半導體積體電路元件S的路徑長度。進而,由於從具有以短路徑與外部電源連接的寬的路徑的第二面狀導體3GF向搭載區域5a突出,因此能夠以低電阻高效地供給電力。 The second linear conductor 3GL is arranged on the first surface 5 closest to the insulating layer 2b of the semiconductor integrated circuit element S from the second planar conductor 3GF in a comb-tooth state toward the mounting region 5a. Each second linear conductor 3GL is connected to a plurality of ground electrodes of the semiconductor integrated circuit element S. That is, the second linear conductor 3GL is directly connected to the ground electrode of the semiconductor integrated circuit element S in the mounting area 5a, and therefore the path length of the second linear conductor 3GL and the semiconductor integrated circuit element S can be shortened . Furthermore, since the second planar conductor 3GF having a wide path connected to the external power source with a short path protrudes toward the mounting area 5a, power can be efficiently supplied with low resistance.

第二線狀導體3GL經由位於其正下方的第二貫通導體即貫通孔導體8以及通孔導體10以及與外部基板的電極連接的接地用端子12(詳細後述)而與外部電源電連接。第二線狀導體3GL配置為在搭載區域5a中與第一線狀導體3PL交替地鄰接。電源用導體3P與接地用導體3G配置為交替地鄰接。因此,如上所述,能夠抑制佈線基板1中的環路電感,在能夠提高電力供給特性方面是有利的。 The second linear conductor 3GL is electrically connected to an external power source via a through-hole conductor 8 and a through-hole conductor 10 which are second through-conductors located directly below it, and a grounding terminal 12 (described in detail later) connected to the electrode of the external substrate. The second linear conductor 3GL is arranged alternately adjacent to the first linear conductor 3PL in the mounting area 5a. The power supply conductor 3P and the ground conductor 3G are arranged alternately adjacent to each other. Therefore, as described above, the loop inductance in the wiring substrate 1 can be suppressed, which is advantageous in that the power supply characteristics can be improved.

第二線狀導體3GL的寬度例如設定為50至100μm,以使能夠連接半導體積體電路元件S的接地用電極。第二線狀導體3GL的寬度被設定為與第一線狀導體3PL的寬度相同的大小。 The width of the second linear conductor 3GL is set to, for example, 50 to 100 μm so that the ground electrode of the semiconductor integrated circuit element S can be connected. The width of the second linear conductor 3GL is set to the same size as the width of the first linear conductor 3PL.

信號用導體3S在一實施型態的佈線基板1中,分別從搭載區域5a的外周部配置到單側區域5b、以及從搭載區域5a的外周部配置到相反側區域5c。信號用導體3S在搭載區域5a的外周部與半導體積體電路元件S的信號用電極連接。信號用導體3S在單側區域5b或者相反側區域5c,經由貫通導體即貫通孔導體8以及通孔導體10以及與外部基板的電極連接的信號用端子13(詳細後述)而與外部基板電連接。由此,信號用導體3S具有在半導體積體電路元件S與外部基板之間進行電信號的傳輸的功能。信號用導體3S的寬度例如設定為5至50μm。 The signal conductor 3S is arranged in the wiring board 1 of one embodiment from the outer peripheral portion of the mounting region 5a to the one-sided region 5b and from the outer peripheral portion of the mounting region 5a to the opposite region 5c. The signal conductor 3S is connected to the signal electrode of the semiconductor integrated circuit element S at the outer periphery of the mounting region 5a. The signal conductor 3S is electrically connected to the external substrate via the through-hole conductor 8 and the through-hole conductor 10 which are the through conductors and the signal terminal 13 (described in detail later) connected to the electrode of the external substrate in the one-side region 5b or the opposite side region 5c . Thus, the signal conductor 3S has a function of transmitting electrical signals between the semiconductor integrated circuit element S and the external substrate. The width of the signal conductor 3S is set to, for example, 5 to 50 μm.

佈線導體3在絕緣基體2的第二表面6中具有與外部基板的電極連接的電源用端子11、接地用端子12以及信號用端子13。電源用端子11在第二表面6中位於俯視透視時與第一面狀導體3PF重疊的區域以及與第一線狀導體3PL重疊的區域(將這些區域作為第一區域)。而且,電源用端子11經由貫通孔導體8以及通孔導體10而分別與第一面狀導體3PF以及第一線狀導體3PL電連接。 The wiring conductor 3 has a power supply terminal 11, a ground terminal 12, and a signal terminal 13 connected to the electrodes of the external substrate on the second surface 6 of the insulating base 2. The power supply terminal 11 is located on the second surface 6 in a region overlapping the first planar conductor 3PF and a region overlapping the first linear conductor 3PL in a plan view (these regions are referred to as first regions). The power supply terminal 11 is electrically connected to the first planar conductor 3PF and the first linear conductor 3PL via the through-hole conductor 8 and the through-hole conductor 10, respectively.

換言之,位於第二表面6的電源用端子11位於能夠在其正上方經由第一面狀導體3PF或者第一線狀導體3PL和佈線導體3而以短路徑連接的部位。由此,能夠縮短電源用端子11與電源用導體3P的路徑。電源用端子11例如具有圓形,直徑例如設定為500至700μm。各電源用端子11在分別獨立設置的圓形的電源用端子導體內各設置一個。 In other words, the power supply terminal 11 located on the second surface 6 is located at a portion that can be connected by a short path via the first planar conductor 3PF or the first linear conductor 3PL and the wiring conductor 3 directly above it. Thus, the path between the power supply terminal 11 and the power supply conductor 3P can be shortened. The power supply terminal 11 has, for example, a circular shape, and the diameter is set to 500 to 700 μm, for example. Each power supply terminal 11 is provided in each of the circular power supply terminal conductors independently provided.

接地用端子12在第二表面6中位於俯視透視時與第二面狀導體3GF重疊的區域、以及與第二線狀導體3GL重疊的區域(將這些區域作為第二區域)。而且,接地用端子12經由貫通孔導體8以及通孔導體10而分別與第二面狀導體3GF以及第二線狀導體3GL電連接。 The grounding terminal 12 is located on the second surface 6 in a region overlapping the second planar conductor 3GF and a region overlapping the second linear conductor 3GL in a plan view (these regions are referred to as second regions). Furthermore, the grounding terminal 12 is electrically connected to the second planar conductor 3GF and the second linear conductor 3GL via the through-hole conductor 8 and the through-hole conductor 10, respectively.

換言之,位於第二表面6的接地用端子12位於能夠在其正上方經由第二面狀導體3GF或者第二線狀導體3GL和佈線導體3而以短路徑連接的位置。由此,能夠縮短接地用端子12與接地用導體3G的路徑。接地用端子12例如在電源用端子11以及信號用端子13的周圍隔開規定的間隔而以平面狀態配置的一個接地用端子導體內設置有複數個,例如直徑為500至700μm的圓形。 In other words, the grounding terminal 12 located on the second surface 6 is located at a position that can be connected by a short path directly via the second planar conductor 3GF or the second linear conductor 3GL and the wiring conductor 3. Thus, the path between the ground terminal 12 and the ground conductor 3G can be shortened. The grounding terminal 12 is provided with a plurality of, for example, a circle having a diameter of 500 to 700 μm in one grounding terminal conductor arranged in a planar state at predetermined intervals around the power supply terminal 11 and the signal terminal 13.

信號用端子13位於第二表面6,經由貫通孔導體8以及通孔導體10而與位於第一表面5的信號用導體3S電連接。信號用端子13例如具有圓形,直徑例如設定為500至700μm。各信號用端子13在分別獨立設置的圓形的信號用端子導體內各設置一個。 The signal terminal 13 is located on the second surface 6 and is electrically connected to the signal conductor 3S located on the first surface 5 via the through-hole conductor 8 and the through-hole conductor 10. The signal terminal 13 has a circular shape, for example, and the diameter is set to 500 to 700 μm, for example. Each signal terminal 13 is provided in each of the circular signal terminal conductors independently provided.

這樣的佈線導體3例如使用半添加法、減成法等佈線形成技術,由銅等良導電性金屬形成。 Such a wiring conductor 3 is formed of a highly conductive metal such as copper using wiring forming techniques such as a semi-additive method and a subtractive method.

在一實施型態的佈線基板1中,如第1圖所示,阻焊劑4位於最上層的增層用絕緣層2b的上表面以及最下層的增層用絕緣層2b的下表面。阻焊劑4在本揭示的佈線基板中不是必須的結構要素。阻焊劑4例如具有保護佈線導體3不受在佈線基板1安裝半導體積體電路元件S時的熱影響的功能。上表面的阻焊劑4具有將第一線狀導體3PL以及第二線狀導體3GL的一部分露出 的開口4a。下表面的阻焊劑4具有將電源用端子11、接地用端子12以及信號用端子13露出的開口4b。 In the wiring board 1 of an embodiment, as shown in FIG. 1, the solder resist 4 is located on the upper surface of the uppermost build-up insulating layer 2 b and the lowermost layer of the buildup insulating layer 2 b. The solder resist 4 is not an essential structural element in the wiring board of the present disclosure. The solder resist 4 has, for example, a function of protecting the wiring conductor 3 from heat when the semiconductor integrated circuit element S is mounted on the wiring board 1. The solder resist 4 on the upper surface has an opening 4a exposing a part of the first linear conductor 3PL and the second linear conductor 3GL. The solder resist 4 on the lower surface has an opening 4b that exposes the terminal 11 for power supply, the terminal 12 for grounding, and the terminal 13 for signal.

這樣的阻焊劑4例如通過將丙烯酸改性環氧樹脂等具有感光性的熱固化性樹脂的膜黏貼於增層用絕緣層2b的上表面或者下表面,並曝光以及顯影為規定的圖案後,進行紫外線固化以及熱固化而形成。 Such a solder resist 4 is obtained by, for example, sticking a film of a photosensitive thermosetting resin such as an acrylic-modified epoxy resin to the upper or lower surface of the build-up insulating layer 2b, and exposing and developing into a predetermined pattern. It is formed by ultraviolet curing and thermal curing.

這樣,本揭示的佈線基板1具有:絕緣基體2,係具有第一表面5、及第二表面6,該第一表面5係包括搭載區域5a,該第二表面6係與外部基板連接;第一面狀導體3PF,係位於搭載區域5a周圍的單側區域5b;以及電源用導體3P,係具有複數個第一線狀導體3PL,該複數個第一線狀導體3PL係從第一面狀導體3PF以梳齒狀態向搭載區域5a突出。本揭示的佈線基板1更具有接地用導體3G,該接地用導體3G具有:第二面狀導體3GF,係位於搭載區域5a周圍的單側區域5b的相反側的相反側區域5c;以及複數個第二線狀導體3GL,係從第二面狀導體3GF以梳齒狀態向搭載區域5a突出,以使與第一線狀導體3PL交替地鄰接。 In this way, the wiring substrate 1 of the present disclosure has the insulating base 2 having the first surface 5 and the second surface 6, the first surface 5 including the mounting area 5a, and the second surface 6 connected to the external substrate; A planar conductor 3PF, which is a single-sided region 5b located around the mounting region 5a; and a power supply conductor 3P, which has a plurality of first linear conductors 3PL, the plurality of first linear conductors 3PL extending from the first plane The conductor 3PF protrudes toward the mounting area 5a in a comb-toothed state. The wiring board 1 of the present disclosure further includes a grounding conductor 3G including: a second planar conductor 3GF, which is located on the opposite side region 5c opposite to the one side region 5b around the mounting region 5a; and a plurality of The second linear conductor 3GL protrudes from the second planar conductor 3GF in a comb-toothed state toward the mounting area 5a so as to be alternately adjacent to the first linear conductor 3PL.

本揭示的佈線基板1在第二表面6中在俯視透視時位於與第一面狀導體3PF重疊的第一區域,在第一面狀導體3PF與第一區域之間具有經由第一貫通導體而與第一面狀導體3PF電連接的複數個電源用端子11。本揭示的佈線基板1還在第二表面6中在俯視透視時位於與第二面狀導體3GF重疊的第二區域,在第二面狀導體3GF與第二區域之間具有經由第二貫通導體而與第二面狀導體3GF電連接的複數個接地用端子12。 The wiring board 1 of the present disclosure is located in the first region overlapping the first planar conductor 3PF in the second surface 6 in a plan view, and has a first through conductor between the first planar conductor 3PF and the first region A plurality of power supply terminals 11 electrically connected to the first planar conductor 3PF. The wiring board 1 of the present disclosure is also located on the second surface 6 in a second region overlapping the second planar conductor 3GF in a top view, and has a second through conductor between the second planar conductor 3GF and the second region A plurality of ground terminals 12 electrically connected to the second planar conductor 3GF.

如上所述,第一面狀導體3PF在距半導體積體電路元件S的距離短的單側區域5b中,以確保面狀的寬的路徑的狀態存在。進而,由於第一面狀 導體3PF經由位於其正下方的第一貫通導體以及電源用端子11而與外部電源連接,因此能夠縮短第一面狀導體3PF與電源用端子11的路徑。 As described above, the first planar conductor 3PF exists in the one-sided region 5b having a short distance from the semiconductor integrated circuit element S while ensuring a planar wide path. Furthermore, since the first planar conductor 3PF is connected to the external power supply via the first through conductor and the power supply terminal 11 located directly below it, the path between the first planar conductor 3PF and the power supply terminal 11 can be shortened.

第二面狀導體3GF在距半導體積體電路元件S的距離短的相反側區域5c中,以確保面狀的寬的路徑的狀態存在。進而,由於第二面狀導體3GF經由位於其正下方的第二貫通導體以及接地用端子12而與外部電源連接,因此能夠縮短第二面狀導體3GF與接地用端子12的路徑。 The second planar conductor 3GF exists in the region 5c on the opposite side with a short distance from the semiconductor integrated circuit element S while ensuring a planar and wide path. Furthermore, since the second planar conductor 3GF is connected to the external power source via the second through conductor and the ground terminal 12 located directly below it, the path between the second planar conductor 3GF and the ground terminal 12 can be shortened.

由此,根據本揭示的佈線基板1,能夠抑制來自外部電源的損失而迅速向半導體積體電路元件S供給電力。 Thus, according to the wiring board 1 of the present disclosure, it is possible to quickly supply power to the semiconductor integrated circuit element S while suppressing the loss from the external power source.

而且,在搭載區域5a中,第一線狀導體3PL以及第二線狀導體3GL交替鄰接地配置。因此,能夠抑制佈線基板1的環路電感,有利於提高電力供給特性。 In the mounting area 5a, the first linear conductor 3PL and the second linear conductor 3GL are alternately arranged adjacent to each other. Therefore, the loop inductance of the wiring board 1 can be suppressed, which contributes to improving the power supply characteristics.

本揭示並不限定於上述的實施型態的一例,只要在不脫離本揭示的主旨的範圍內,能夠進行各種變更。 The present disclosure is not limited to an example of the above-described embodiment, and various changes can be made as long as they do not deviate from the gist of the present disclosure.

例如,在本例中,表示了第一面狀導體3PF與第二面狀導體3GF的邊界為直線狀的情況,但邊界的全部或者一部分也可以包括曲線部分。在這樣的情況下,例如在能夠提高信號用導體3S的配置的自由度方面是有利的。 For example, in this example, the case where the boundary between the first planar conductor 3PF and the second planar conductor 3GF is linear, but all or part of the boundary may include a curved portion. In such a case, for example, it is advantageous in that the degree of freedom of the arrangement of the signal conductor 3S can be increased.

在本揭示的佈線基板1中,如第3圖所示,表示設置有電源用端子11的電源用端子導體具有獨立的圓形的情況。但是,也可以具有複數個包含具有圓形的複數個電源用端子11的長條形狀的電源用端子導體。 In the wiring board 1 of the present disclosure, as shown in FIG. 3, the case where the power supply terminal conductor provided with the power supply terminal 11 has an independent circular shape is shown. However, it may have a plurality of elongated terminal conductors for a power supply including a plurality of circular power supply terminals 11.

第4圖表示電源用端子11例如具有長圓形的情況。這樣的長圓形的端子11a例如在利用銅等良導電性金屬將第3圖中相互鄰接的圓形的電源用端子11彼此連接的狀態下位於第二表面6。因此,與圓形的電源用端子11分別 存在的狀態相比,長圓形的端子11a能夠確保較寬的導體面積。由此,能夠更多地配置連接電源用端子11(即長圓形的端子11a)和第一面狀導體3PF以及第一線狀導體3PL的第一貫通導體。 FIG. 4 shows a case where the power supply terminal 11 has an oblong shape, for example. Such an oblong terminal 11 a is located on the second surface 6 in a state where circular power terminals 11 adjacent to each other in FIG. 3 are connected to each other with a good conductive metal such as copper, for example. Therefore, the oblong terminal 11a can secure a wider conductor area than the state where the circular power terminals 11 exist. Thereby, more first through conductors connecting the power supply terminal 11 (that is, the oblong terminal 11 a ), the first planar conductor 3PF, and the first linear conductor 3PL can be arranged.

其結果是,能夠抑制外部電源與半導體積體電路元件之間的電阻值,在能夠提高電力的供給特性方面是有利的。 As a result, the resistance value between the external power supply and the semiconductor integrated circuit element can be suppressed, which is advantageous in that the power supply characteristics can be improved.

接地用端子12的一部分位於上述那樣的長圓形的端子11a彼此之間。這樣,通過接地用端子12位於長圓形的端子11a彼此之間,從而具有抑制佈線基板1中的環路電感的效果,在能夠提高電力供給特性方面是有利的。 A part of the grounding terminal 12 is located between the above-mentioned oblong terminals 11a. In this way, since the ground terminal 12 is located between the oblong terminals 11 a, the loop inductance in the wiring board 1 is suppressed, which is advantageous in that the power supply characteristics can be improved.

在第4圖中,表示了各個長圓形的端子11a的長度方向相互平行的狀態下的情況。但是,並不限定於此。確定各個端子的長度方向即可,以使構成為能夠更多地配置將長圓形的端子11a與第一面狀導體3PF連接的第一貫通導體的結構。 FIG. 4 shows a state where the longitudinal directions of the respective oblong terminals 11a are parallel to each other. However, it is not limited to this. The length direction of each terminal may be determined so that the first through conductor connecting the oblong terminal 11a and the first planar conductor 3PF may be arranged more.

在第4圖中,表示了電源用端子11具有長圓形的情況。但是,從電特性、生產率的觀點出發,也可以適當地設定為矩形、橢圓形。 In FIG. 4, the case where the power supply terminal 11 has an oblong shape is shown. However, from the viewpoint of electrical characteristics and productivity, it may be appropriately set to be rectangular or elliptical.

2‧‧‧絕緣基體 2‧‧‧Insulating substrate

3G‧‧‧接地用導體 3G‧‧‧grounding conductor

3GF‧‧‧第二面狀導體 3GF‧‧‧second surface conductor

3GL‧‧‧第二線狀導體 3GL‧‧‧second linear conductor

3P‧‧‧電源用導體 3P‧‧‧Power conductor

3PF‧‧‧第一面狀導體 3PF‧‧‧The first planar conductor

3PL‧‧‧第一線狀導體 3PL‧‧‧First linear conductor

3S‧‧‧信號用導體 3S‧‧‧Signal conductor

5a‧‧‧搭載區域 5a‧‧‧deployment area

5b‧‧‧單側區域 5b‧‧‧Single side area

5c‧‧‧相反側區域 5c‧‧‧The area on the opposite side

9‧‧‧通孔 9‧‧‧Through hole

Claims (5)

一種佈線基板,係具有: A wiring board with: 絕緣基體,係具有第一表面及第二表面,且層疊有複數個絕緣層,該第一表面係包括搭載半導體積體電路元件的搭載區域,該第二表面係與外部基板連接; The insulating substrate has a first surface and a second surface, and a plurality of insulating layers are stacked, the first surface includes a mounting area on which a semiconductor integrated circuit element is mounted, and the second surface is connected to an external substrate; 電源用導體,係具有第一面狀導體、及複數個第一線狀導體,該第一面狀導體係在前述第一表面中,位於前述搭載區域的周圍的單側區域,該複數個第一線狀導體係從該第一面狀導體以梳齒狀態向前述搭載區域突出,且分別連接有前述半導體積體電路元件的複數個電源用電極; The power supply conductor includes a first planar conductor and a plurality of first linear conductors, the first planar conductor system is located on a single side area around the mounting area on the first surface, and the plurality of first A linear conductor system protruding from the first planar conductor in a comb-tooth state toward the mounting area, and a plurality of power supply electrodes of the semiconductor integrated circuit element are respectively connected; 接地用導體,係具有第二面狀導體、及複數個第二線狀導體,該第二面狀導體係在前述第一表面中,位於前述搭載區域的周圍的前述單側區域的相反側區域,該複數個第二線狀導體係與前述第一線狀導體交替鄰接地從該第二面狀導體以梳齒狀態向前述搭載區域突出,且分別連接有前述半導體積體電路元件的複數個接地用電極; The grounding conductor has a second planar conductor and a plurality of second linear conductors, and the second planar conductor system is located on the first surface and opposite to the one-sided region around the mounting region The plurality of second linear conductor systems and the first linear conductor alternately and adjacently protrude from the second planar conductor in a comb-tooth state toward the mounting area, and are respectively connected to the plurality of semiconductor integrated circuit elements Electrodes for grounding; 複數個電源用端子,係在前述第二表面中位於在俯視透視時與前述第一面狀導體重疊的第一區域,在前述第一面狀導體與前述第一區域之間經由分別貫通前述複數個絕緣層的第一貫通導體而與前述第一面狀導體電連接;以及 A plurality of power supply terminals are located on the second surface in a first region that overlaps with the first planar conductor in a plan view, and the plurality of terminals are respectively penetrated between the first planar conductor and the first region A first through conductor of an insulating layer electrically connected to the first planar conductor; and 複數個接地用端子,係在前述第二表面中位於在俯視透視時與前述第二面狀導體重疊的第二區域,在前述第二面狀導體與前述第二區域之間經由分別貫通前述複數個絕緣層的第二貫通導體而與前述第二面狀導體電連接。 A plurality of grounding terminals are located on the second surface in a second region overlapping the second planar conductor in a plan view, and the plurality of terminals are respectively penetrated between the second planar conductor and the second region The second through conductors of each insulating layer are electrically connected to the second planar conductor. 如申請專利範圍第1項所述的佈線基板,其中, The wiring board according to item 1 of the patent application scope, in which 前述第一線狀導體以及前述第二線狀導體係具有相同的寬度,且隔開相互相同的間隔地配置。 The first linear conductor and the second linear conductor system have the same width and are arranged at the same interval from each other. 如申請專利範圍第1項所述的佈線基板,其中, The wiring board according to item 1 of the patent application scope, in which 前述第一面狀導體與前述第二面狀導體的邊界為直線狀,前述邊界的延長線將前述搭載區域一分為二。 The boundary between the first planar conductor and the second planar conductor is linear, and the extension of the boundary divides the mounting area into two. 如申請專利範圍第1項所述的佈線基板,其中, The wiring board according to item 1 of the patent application scope, in which 前述第一面狀導體與前述第二面狀導體的邊界包括曲線部分。 The boundary between the first planar conductor and the second planar conductor includes a curved portion. 如申請專利範圍第1項所述的佈線基板,其中, The wiring board according to item 1 of the patent application scope, in which 在前述第二表面具有包含複數個前述電源用端子的長條形狀的複數個電源用端子導體, A plurality of terminal conductors for a power supply in a long shape including a plurality of terminals for a power supply on the second surface, 包含複數個前述接地用端子的接地用端子導體的一部分係位於相互鄰接的前述電源用端子導體彼此之間。 A part of the grounding terminal conductor including a plurality of the grounding terminals is located between the adjacent power supply terminal conductors.
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