TW202006342A - 感測元件 - Google Patents
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- 239000004065 semiconductor Substances 0.000 claims abstract description 169
- 230000005284 excitation Effects 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 230000003287 optical effect Effects 0.000 claims abstract description 25
- 238000001914 filtration Methods 0.000 claims abstract description 10
- 238000009792 diffusion process Methods 0.000 claims description 37
- 238000002955 isolation Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001917 fluorescence detection Methods 0.000 description 1
- 239000007850 fluorescent dye Substances 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
一種感測元件,包括半導體基板、過濾結構以及感測結構。半導體基板具有樣品激發區以及光學感測區。光學感測區側向包圍樣品激發區於其中。過濾結構嵌設於半導體基板中,其中過濾結構配置於樣品激發區中且具有樣品容納部。樣品容納部適於容納樣品且接納激發光束。感測結構嵌設於半導體基板中,其中感測結構的至少一部分配置於光學感測區中,且感測結構至少側向包圍過濾結構。在激發光束沿著垂直於半導體基板的表面的方向傳遞至樣品容納部並激發樣品後,樣品適於發射訊號光束,且感測結構適於感測訊號光束。
Description
本發明是有關於一種感測元件。
在一般的螢光檢測系統中,樣品被激發光束激發以發射螢光。來自樣品的螢光透射到光感測器,且光感測器將螢光轉換為電信號。螢光檢測系統中的處理器分析電信號以得知樣品的資訊。然而,由於螢光訊號的光強度遠低於激發光束的光強度,當有不想要的雜散光產生時,可能會干擾螢光信號的感測結果。
本發明提供一種具有高訊噪比(signal-noise ratio,SNR)的感測元件。
本發明的實施例的一種感測元件,包括半導體基板、過濾結構以及感測結構。半導體基板具有樣品激發區以及光學感測區。光學感測區側向包圍樣品激發區於其中。過濾結構嵌設於半導體基板中,其中過濾結構配置於樣品激發區中且具有樣品容納部。樣品容納部適於容納樣品且接納激發光束。感測結構嵌設於半導體基板中,其中感測結構的至少一部分配置於光學感測區中,且感測結構至少側向包圍過濾結構。在激發光束沿著垂直於半導體基板的表面的方向傳遞至樣品容納部並激發樣品後,樣品適於發射訊號光束,且感測結構適於感測訊號光束。
在本發明的一實施例中,上述的感測結構包括第一摻雜半導體區以及至少兩個第二摻雜半導體區。第一摻雜半導體區至少側向包圍過濾結構。至少兩個第二摻雜半導體區嵌設於第一摻雜半導體區中,其中至少兩個第二摻雜半導體區的其中第一個位於過濾結構與至少兩個第二摻雜半導體區的其中第二個之間。
在本發明的一實施例中,上述的至少兩個第二摻雜半導體區的第一個環繞過濾結構,至少兩個第二摻雜半導體區的第二個環繞過濾結構與至少兩個第二摻雜半導體區的第一個。
在本發明的一實施例中,上述的第一摻雜半導體區與至少兩個第二摻雜半導體區形成至少兩個光感測器的部分,且至少兩個光感測器適於分別感測訊號光束中具有不同波長的部分。
在本發明的一實施例中,上述的感測結構更包括至少兩個閘極以及至少兩個浮置擴散區,各個第二摻雜半導體區與各個浮置擴散區分別位於一個閘極的兩側。
在本發明的一實施例中,上述的至少兩個第二摻雜半導體區的第一個包括彼此分離的第一子區與第二子區,至少兩個第二摻雜半導體區的第二個包括彼此分離的第三子區與第四子區。
在本發明的一實施例中,上述的第一摻雜半導體區包覆過濾結構的側壁。
在本發明的一實施例中,上述的第一摻雜半導體區包覆過濾結構的底部表面。
在本發明的一實施例中,上述的感測元件更包括隔離結構,隔離結構側向包圍感測結構。
在本發明的一實施例中,上述的感測元件更包括訊號干涉過濾器,訊號干涉過濾器設置於過濾結構與半導體基板之間。
基於上述,在本發明的實施例的感測元件中,由於激發光束是沿著垂直於半導體基板的方向傳遞至樣品激發區來激發樣品,而光學感測區是側向包圍樣品激發區。換言之,光學感測區並不在激發光束的傳遞路徑上,因此位於光學感測區中的感測結構較不易受到激發光束的影響。如此一來,本發明的實施例中的感測元件可具有較高的訊噪比。
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。
圖1為根據本發明的一實施例的感測元件的上視示意圖。圖2是圖1中沿著線段A-A’的剖面示意圖。在本發明的實施例中,感測元件100例如是一種互補金屬氧化物半導體(Complementary Metal Oxide Semiconductor,CMOS)感測器的一個畫素單元(pixel cell)。圖1、圖2以及後續圖式僅繪示一個感測元件100來代表。在本實施例中,CMOS感測器可包含多個感測元件100,其中多個感測元件100例如是以陣列形式排列。
請參照圖1與圖2,在本發明的實施例中,感測元件100包括半導體基板110、過濾結構120以及感測結構130。半導體基板110具有樣品激發區ER以及光學感測區SR。光學感測區SR側向包圍樣品激發區ER於其中。過濾結構120嵌設於半導體基板110中,其中過濾結構120配置於樣品激發區ER中且具有樣品容納部C。樣品容納部C適於容納樣品50(標示於圖2)且接納激發光束EB(標示於圖2)。樣品容納部C例如是凹孔。感測結構130嵌設於半導體基板110中,其中感測結構130的至少一部分配置於光學感測區SR中,且感測結構130至少側向包圍過濾結構130。
在本實施例中,感測結構130包括第一摻雜半導體區132以及至少兩個第二摻雜半導體區(例如是第二摻雜半導體區134與第二摻雜半導體區136)。第一摻雜半導體區132至少側向包圍過濾結構120。第二摻雜半導體區134與第二摻雜半導體區136嵌設於第一摻雜半導體區132中。在本實施例中,第一摻雜半導體區132包覆過濾結構120的側壁120a(標示於圖2)。第二摻雜半導體區134位於過濾結構120與第二摻雜半導體區136之間,其中第二摻雜半導體區134環繞過濾結構120,第二摻雜半導體區136環繞過濾結構120與第二摻雜半導體區134。在其他實施例中,感測結構130還可以再包括另一個(或更多個)第二摻雜半導體區,且另一個第二摻雜半導體區環繞過濾結構120、第二摻雜半導體區134與第二摻雜半導體區136,本發明不以此為限。此外,在本實施例中,第二摻雜半導體區134與第二摻雜半導體區136的上視圖形大致上呈矩形框的形狀,在其他實施例中,第二摻雜半導體區134與第二摻雜半導體區136的上視圖形也可以大致上呈圓形框的形狀或其他形狀。
具體來說,在本實施例中,半導體基板110例如是矽基板,第一摻雜半導體區132、第二摻雜半導體區134與第二摻雜半導體區136例如是對半導體基板110進行離子植入(ion implantation)所形成的區域,其中第一摻雜半導體區132的摻雜類型不同於第二摻雜半導體區134與第二摻雜半導體區136的摻雜類型。舉例來說,第一摻雜半導體區132可以是半導體基板110的P型摻雜區,第二摻雜半導體區134與第二摻雜半導體區136可以是半導體基板110的N型摻雜區,而半導體基板110的主體可為P型摻雜。或者,第一摻雜半導體區132可以是半導體基板110的N型摻雜區,第二摻雜半導體區134與第二摻雜半導體區136可以是半導體基板110的P型摻雜區,而半導體基板110的主體可為N型摻雜。第一摻雜半導體區132的摻雜濃度高於半導體基板110的摻雜濃度,其中第一摻雜半導體區132的摻雜濃度例如是約在1016
cm-3
和1021
cm-3
之間,或者是約在1020
cm-3
和1021
cm-3
之間,而半導體基板110的摻雜濃度例如是約1015
cm-3
。在其他實施例中,第一摻雜半導體區132、第二摻雜半導體區134與第二摻雜半導體區136也可以是藉由磊晶成長(epitaxial growth)來形成,本發明不以此為限。
在本實施例中,第一摻雜半導體區134與至少兩個第二摻雜半導體區(第二摻雜半導體區134與第二摻雜半導體區136)形成至少兩個光感測器(photo detector)的部分。詳細來說,第一摻雜半導體區132與第二摻雜半導體區134(或第二摻雜半導體區136)兩者之間的PN接面可形成一個光二極體(photodiode),其可用以將光訊號轉換為電訊號,因此可用來做為光感測器。在本實施例中,由於感測結構130包括嵌入第一摻雜半導體區132中的至少兩個第二摻雜半導體區(第二摻雜半導體區134與第二摻雜半導體區136),因此感測結構130可視為包括至少兩個光感測器。
在本實施例中,感測結構130更包括至少兩個閘極(例如是閘極G1與閘極G2)以及至少兩個浮置擴散(floating diffusion)區(例如是浮置擴散區FD1與浮置擴散區FD2),各個第二摻雜半導體區與各個浮置擴散區分別位於一個閘極的兩側。浮置擴散區藉由閘極而耦合至第二摻雜半導體區。浮置擴散區與第二摻雜半導體區為半導體基板110中具有相同摻雜類型的摻雜區。舉例來說,若第二摻雜半導體區為N型摻雜,則浮置擴散區也為N型摻雜,反之亦然。如圖2所示,在本實施例中,閘極G1位於第二摻雜半導體區134的其中一端,而閘極G2位於第二摻雜半導體區136的其中一端。第二摻雜半導體區134與浮置擴散區FD1分別位於閘極G1的兩側,而第二摻雜半導體區136與浮置擴散區FD2分別位於閘極G2的兩側。在一些實施例中,感測結構130還可包括源極隨耦器(source follower)(未繪示),電性耦接於浮置擴散區,且用以放大感測訊號。
在本實施例中,在激發光束EB沿著垂直於半導體基板110的表面的方向D1傳遞至樣品容納部C並激發樣品50後,樣品50適於發射訊號光束SB,且感測結構130適於感測訊號光束SB。詳細來說,方向D1例如是圖2中沿著圖面由上往下的方向。樣品50例如是帶有至少一種螢光標記的生物分子。在樣品50被激發光束EB激發後,樣品50可向周圍發出訊號光束SB,並將訊號光束SB傳遞至感測結構130。在一些實施例中,激發光束EB可以具有單一波長。在一些實施例中,激發光束EB也可以具有多種波長。
由於激發光束EB是沿著垂直於半導體基板110的方向D1傳遞至樣品激發區ER來激發樣品50,並且沿著方向D1離開樣品激發區ER,而光學感測區SR是側向包圍樣品激發區ER。換言之,光學感測區SR並不在激發光束EB的傳遞路徑上,因此位於光學感測區SR中的感測結構130較不易受到激發光束EB的影響。如此一來,本發明的實施例中的感測元件100可具有較高的訊噪比。
一般來說,激發光束EB的波長會小於訊號光束SB的波長,若激發光束EB在樣品激發區ER產生雜散光,設置於樣品激發區ER的過濾結構120可用以過濾(例如吸收)波長較短的雜散光,且過濾結構120可不過濾(或僅過濾少部分)波長較長的訊號光束SB。在本實施例中,過濾結構120的材質例如是氮氧化矽(SiON)、任何可用以過濾雜散光的適當材質或其組合,本發明不以此為限。
值得一提的是,若樣品50帶有多種不同的螢光標記,則訊號光束SB可能為具有多種不同波長的光。由於不同波長的光在感測結構130中可傳遞的路徑長度不同,因此感測結構130的至少兩個光感測器可分別感測訊號光束SB中具有不同波長的部分。舉例來說,短波長的光可傳遞的路徑較短,長波長的光可傳遞的路徑較長,因此離樣品50較近的第二摻雜半導體區134與鄰近的第一摻雜半導體區132所形成的光感測器例如是感測訊號光束SB中短波長的部分,而離樣品50較遠的第二摻雜半導體區136與鄰近的第一摻雜半導體區132所形成的光感測器例如是感測訊號光束SB中長波長的部分。也就是說,藉由至少兩個光感測器的設置,使訊號光束SB中具有不同波長的部分都能被有效地偵測到,可增加感測元件100的靈敏度。
在本實施例中,感測元件100更包括隔離結構140,隔離結構140側向包圍感測結構130。隔離結構140例如是淺溝槽隔離(shallow trench isolation,STI)氧化層。
圖3為根據本發明的另一實施例的感測元件的上視示意圖。參照圖3,本實施例的感測元件200與圖1的感測元件100大致上相似。感測元件200的構件以及相關敘述可以參考圖1的感測元件100,在此便不再贅述,其主要差異在於本實施例的感測結構230的第二摻雜半導體區234包括彼此分離的第一子區234a與第二子區234b,第二摻雜半導體區236包括彼此分離的第三子區236a與第四子區236b,且感測結構230包括四個閘極(例如是閘極G1、閘極G2、閘極G3與閘極G4)以及四個浮置擴散區(例如是浮置擴散區FD1、浮置擴散區FD2、浮置擴散區FD3與浮置擴散區FD4)。
如圖3所示,在本實施例中,閘極G1位於第二摻雜半導體區234的第一子區234a的其中一端,閘極G2位於第二摻雜半導體區234的第二子區234b的其中一端,閘極G3位於第二摻雜半導體區236的第三子區236a的其中一端,閘極G4位於第二摻雜半導體區236的第四子區236b的其中一端。第二摻雜半導體區234的第一子區234a與浮置擴散區FD1分別位於閘極G1的兩側,第二摻雜半導體區234的第二子區234b與浮置擴散區FD2分別位於閘極G2的兩側,第二摻雜半導體區236的第三子區236a與浮置擴散區FD3分別位於閘極G3的兩側,而第二摻雜半導體區236的第四子區236b與浮置擴散區FD4分別位於閘極G4的兩側。
由於光子在PN接面所產生的電子和/或電洞在傳遞過程中可能因缺陷(defect)等因素而導致電子電洞複合,因此藉由增設的閘極以及浮置擴散區,可縮短電子和/或電洞的傳遞距離,以減少電子電洞複合的機率,進而提升光感測的效率。
圖4為根據本發明的另一實施例的感測元件的上視示意圖。參照圖4,本實施例的感測元件300與圖1的感測元件100大致上相似。感測元件300的構件以及相關敘述可以參考圖1的感測元件100,在此便不再贅述,其主要差異在於本實施例的感測結構330的第二摻雜半導體區334包括彼此分離的第一子區334a與第二子區334b,第二摻雜半導體區336包括彼此分離的第三子區336a與第四子區336b,且感測結構30包括四個閘極(例如是閘極G1、閘極G2、閘極G3與閘極G4)以及兩個浮置擴散區(例如是浮置擴散區FD1與浮置擴散區FD2),其中第二摻雜半導體區334的第一子區334a與第二子區334b共用一個浮置擴散區FD1,且第二摻雜半導體區336的第三子區336a與第四子區336b共用一個浮置擴散區FD2。
如圖4所示,在本實施例中,閘極G1位於第二摻雜半導體區334的第一子區334a的其中一端,閘極G2位於第二摻雜半導體區334的第二子區334b的其中一端,閘極G3位於第二摻雜半導體區336的第三子區336a的其中一端,閘極G4位於第二摻雜半導體區336的第四子區336b的其中一端。第二摻雜半導體區334的第一子區334a與浮置擴散區FD1分別位於閘極G1的兩側,第二摻雜半導體區334的第二子區334b與浮置擴散區FD1分別位於閘極G2的兩側,第二摻雜半導體區336的第三子區336a與浮置擴散區FD2分別位於閘極G3的兩側,而第二摻雜半導體區336的第四子區336b與浮置擴散區FD2分別位於閘極G4的兩側,其中閘極G1與閘極G2分別位於浮置擴散區FD1的兩側,且閘極G3與閘極G4分別位於浮置擴散區FD2的兩側。
圖5為根據本發明的另一實施例的感測元件的上視示意圖。圖6是圖5中沿著線段B-B’的剖面示意圖。參照圖5與圖6,本實施例的感測元件400與圖1的感測元件100大致上相似。感測元件400的構件以及相關敘述可以參考圖1的感測元件100,在此便不再贅述,其主要差異在於本實施例的感測結構430的第一摻雜半導體區432在光學感測區SR可具有較小的佔據面積。舉例來說,第二摻雜半導體區436與隔離結構140之間可不具有第一摻雜半導體區432的部分,或是第二摻雜半導體區434與過濾結構120之間也可不具有第一摻雜半導體區432的部分。再者,第一摻雜半導體區432的一部分可延伸至樣品激發區ER內,且包覆過濾結構120的底部表面120b,以防止第二摻雜半導體區434與半導體基底110之間產生漏電流(leakage current)。此外,第二摻雜半導體區434的上視圖形可以是呈現完整的矩形框形狀。
圖7為根據本發明的另一實施例的感測元件的上視示意圖。參照圖7,本實施例的感測元件500與圖1的感測元件100大致上相似。感測元件500的構件以及相關敘述可以參考圖1的感測元件100,在此便不再贅述,其主要差異在於本實施例的感測元件500更包括訊號干涉過濾器(signal interference filter)550。訊號干涉過濾器550設置於過濾結構120與半導體基板110之間。在本實施例中,訊號干涉過濾器550為多層薄膜疊加所形成的多層結構。訊號干涉過濾器550可對具有不同波長的光束提供不同的光學作用。舉例來說,本實施例的訊號干涉過濾器550可經設計而例如是用以阻擋激發光束EB通過,且允許訊號光束SB通過。也就是說,激發光束EB不會穿透訊號干涉過濾器550,而訊號光束SB可穿透訊號干涉過濾器550。因此,可避免激發光束EB在通過半導體基板110時產生不必要的雜散光,且不影響訊號光束SB傳遞至樣品激發區ER。
綜上所述,在本發明的實施例的感測元件中,由於激發光束是沿著垂直於半導體基板的方向傳遞至樣品激發區來激發樣品,而光學感測區是側向包圍樣品激發區。換言之,光學感測區並不在激發光束的傳遞路徑上,因此位於光學感測區中的感測結構較不易受到激發光束的影響。如此一來,本發明的實施例中的感測元件可具有較高的訊噪比。
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。
100、200、300、400、500‧‧‧感測元件110‧‧‧半導體基板120‧‧‧過濾結構120a‧‧‧側壁120b‧‧‧底部表面130、230、330、430‧‧‧感測結構132、432‧‧‧第一摻雜半導體區134、136、234、236、334、336、434、436‧‧‧第二摻雜半導體區140‧‧‧隔離結構234a、334a‧‧‧第一子區234b、334b‧‧‧第二子區236a、336a‧‧‧第三子區236b、336b‧‧‧第四子區50‧‧‧樣品550‧‧‧訊號干涉過濾器A-A’、B-B’‧‧‧線段C‧‧‧樣品容納部D1‧‧‧方向EB‧‧‧激發光束ER‧‧‧樣品激發區FD1、FD2、FD3、FD4‧‧‧浮置擴散區SR‧‧‧光學感測區SB‧‧‧訊號光束G1、G2、G3、G4‧‧‧閘極
圖1為根據本發明的一實施例的感測元件的上視示意圖。 圖2是圖1中沿著線段A-A’的剖面示意圖。 圖3為根據本發明的另一實施例的感測元件的上視示意圖。 圖4為根據本發明的另一實施例的感測元件的上視示意圖。 圖5為根據本發明的另一實施例的感測元件的上視示意圖。 圖6是圖5中沿著線段B-B’的剖面示意圖。 圖7為根據本發明的另一實施例的感測元件的上視示意圖。
100‧‧‧感測元件
110‧‧‧半導體基板
120‧‧‧過濾結構
130‧‧‧感測結構
132‧‧‧第一摻雜半導體區
134、136‧‧‧第二摻雜半導體區
140‧‧‧隔離結構
A-A’‧‧‧線段
C‧‧‧樣品容納部
ER‧‧‧樣品激發區
FD1、FD2‧‧‧浮置擴散區
SR‧‧‧光學感測區
G1、G2‧‧‧閘極
Claims (10)
- 一種感測元件,包括: 半導體基板,具有樣品激發區以及光學感測區,所述光學感測區側向包圍所述樣品激發區於其中; 過濾結構,嵌設於所述半導體基板中,其中所述過濾結構配置於所述樣品激發區中且具有樣品容納部,所述樣品容納部適於容納樣品且接納激發光束;以及 感測結構,嵌設於所述半導體基板中,其中所述感測結構的至少一部分配置於所述光學感測區中,且所述感測結構至少側向包圍所述過濾結構, 其中,在所述激發光束沿著垂直於所述半導體基板的表面的方向傳遞至所述樣品容納部並激發所述樣品後,所述樣品適於發射訊號光束,且所述感測結構適於感測所述訊號光束。
- 如申請專利範圍第1項所述的感測元件,其中所述感測結構包括: 第一摻雜半導體區,至少側向包圍所述過濾結構;以及 至少兩個第二摻雜半導體區,嵌設於所述第一摻雜半導體區中,其中所述至少兩個第二摻雜半導體區的其中第一個位於所述過濾結構與所述至少兩個第二摻雜半導體區的其中第二個之間。
- 如申請專利範圍第2項所述的感測元件,其中所述至少兩個第二摻雜半導體區的所述第一個環繞所述過濾結構,所述至少兩個第二摻雜半導體區的所述第二個環繞所述過濾結構與所述至少兩個第二摻雜半導體區的所述第一個。
- 如申請專利範圍第2項所述的感測元件,其中所述第一摻雜半導體區與所述至少兩個第二摻雜半導體區形成至少兩個光感測器的部分,且所述至少兩個光感測器適於分別感測所述訊號光束中具有不同波長的部分。
- 如申請專利範圍第2項所述的感測元件,其中所述感測結構更包括至少兩個閘極以及至少兩個浮置擴散區,各個所述第二摻雜半導體區與各個所述浮置擴散區分別位於一個所述閘極的兩側。
- 如申請專利範圍第2項所述的感測元件,其中所述至少兩個第二摻雜半導體區的所述第一個包括彼此分離的第一子區與第二子區,所述至少兩個第二摻雜半導體區的所述第二個包括彼此分離的第三子區與第四子區。
- 如申請專利範圍第2項所述的感測元件,其中所述第一摻雜半導體區包覆所述過濾結構的側壁。
- 如申請專利範圍第2項所述的感測元件,其中所述第一摻雜半導體區包覆所述過濾結構的底部表面。
- 如申請專利範圍第1項所述的感測元件,更包括隔離結構,所述隔離結構側向包圍所述感測結構。
- 如申請專利範圍第1項所述的感測元件,更包括訊號干涉過濾器,所述訊號干涉過濾器設置於所述過濾結構與所述半導體基板之間。
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