TW202000764A - Solder paste - Google Patents

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TW202000764A
TW202000764A TW108122478A TW108122478A TW202000764A TW 202000764 A TW202000764 A TW 202000764A TW 108122478 A TW108122478 A TW 108122478A TW 108122478 A TW108122478 A TW 108122478A TW 202000764 A TW202000764 A TW 202000764A
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solder particles
solder
mass
particles
alloy
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TW108122478A
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Chinese (zh)
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須方振一郎
赤井邦彦
江尻芳則
岡田悠平
森谷敏光
宮地勝将
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日商日立化成股份有限公司
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Publication of TW202000764A publication Critical patent/TW202000764A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C12/00Alloys based on antimony or bismuth
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C13/00Alloys based on tin
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C28/00Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Powder Metallurgy (AREA)

Abstract

The present invention relates to a solder paste which contains solder particles and a flux. A part of the surface of the solder particles has a flat portion.

Description

焊料膏Solder paste

本發明是有關於一種焊料膏。The invention relates to a solder paste.

自先前以來,作為各向異性導電膜、各向異性導電膏等各向異性導電材料中調配的導電性粒子,正在研究使用焊料粒。例如,於專利文獻1中記載一種包含熱硬化性成分、與實施了特定的表面處理的多個焊料粒的導電膏。 [現有技術文獻] [專利文獻]Since the past, the use of solder particles has been investigated as conductive particles formulated in anisotropic conductive materials such as anisotropic conductive films and anisotropic conductive pastes. For example, Patent Document 1 describes a conductive paste containing a thermosetting component and a plurality of solder particles subjected to a specific surface treatment. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2016-76494號公報[Patent Document 1] Japanese Patent Laid-Open No. 2016-76494

[發明所欲解決之課題] 本發明的目的在於提供一種新穎的焊料膏。[Problems to be solved by the invention] The object of the present invention is to provide a novel solder paste.

[解決課題之手段] 本發明的一方面是有關於一種焊料膏,包含焊料粒與助焊劑,所述焊料粒於表面的一部分具有平面部。[Means to solve the problem] One aspect of the present invention relates to a solder paste including solder particles and flux, the solder particles having a flat portion on a part of the surface.

於一實施方式中,焊料粒的平均粒徑亦可為1 μm~30 μm,且變異係數(coefficient of variation,C.V.)值亦可為20%以下。In one embodiment, the average particle size of the solder particles may also be 1 μm to 30 μm, and the coefficient of variation (C.V.) value may also be 20% or less.

於一實施方式中,平面部的直徑A相對於焊料粒的直徑B的比(A/B)亦可滿足下述式。 0.01<A/B<1.0In one embodiment, the ratio (A/B) of the diameter A of the flat portion to the diameter B of the solder particles may also satisfy the following formula. 0.01<A/B<1.0

於一實施方式中,於利用兩對平行線製成與焊料粒的投影像外切的四邊形的情況下,於將相向的邊間的距離設為X及Y(其中Y<X)時,X及Y亦可滿足下述式。 0.8<Y/X<1.0In one embodiment, when two pairs of parallel lines are used to form a quadrilateral circumscribed from the projection image of the solder particles, when the distance between the opposing sides is set to X and Y (where Y<X), X And Y can also satisfy the following formula. 0.8<Y/X<1.0

於一實施方式中,焊料粒亦可包含選自由錫、錫合金、銦及銦合金所組成的群組中的至少一種。In one embodiment, the solder particles may also include at least one selected from the group consisting of tin, tin alloy, indium, and indium alloy.

於一實施方式中,焊料粒亦可包含選自由In-Sn合金、In-Sn-Ag合金、In-Bi合金、Sn-Au合金、Sn-Bi合金、Sn-Bi-Ag合金、Sn-Ag-Cu合金及Sn-Cu合金所組成的群組中的至少一種錫合金。In one embodiment, the solder particles may also be selected from In-Sn alloy, In-Sn-Ag alloy, In-Bi alloy, Sn-Au alloy, Sn-Bi alloy, Sn-Bi-Ag alloy, Sn-Ag -At least one tin alloy in the group consisting of Cu alloy and Sn-Cu alloy.

[發明的效果] 根據本發明,可提供一種新穎的焊料膏。藉由使用於表面的一部分具有平面部的焊料粒,可獲得潤濕擴展性優異的焊料膏。[Effect of invention] According to the present invention, a novel solder paste can be provided. By using the solder particles having a flat portion on a part of the surface, a solder paste having excellent wettability and spreadability can be obtained.

以下,對本發明的實施形態進行說明。本發明並不限定於以下的實施形態。再者,以下例示的材料只要無特別說明,則可單獨使用一種,亦可組合使用兩種以上。關於組成物中的各成分的含量,於在組成物中存在多種相當於各成分的物質的情況下,只要無特別說明,則是指組成物中所存在的該多種物質的合計量。使用「~」而表示的數值範圍表示包含「~」的前後所記載的數值分別作為最小值及最大值的範圍。本說明書中階段性地記載的數值範圍中,某階段的數值範圍的上限值或下限值亦可置換為其他階段的數值範圍的上限值或下限值。本說明書中記載的數值範圍中,所述數值範圍的上限值或下限值亦可置換為實施例中所示的值。Hereinafter, embodiments of the present invention will be described. The present invention is not limited to the following embodiments. In addition, unless otherwise specified, the materials exemplified below may be used alone or in combination of two or more. The content of each component in the composition refers to the total amount of the plurality of substances present in the composition, unless there is a plurality of substances corresponding to each component in the composition, unless otherwise specified. The numerical range indicated using "-" indicates a range including the numerical values described before and after "-" as the minimum value and the maximum value, respectively. In the numerical range described in stages in this specification, the upper limit or lower limit of the numerical range in a certain stage may be replaced with the upper limit or lower limit of the numerical range in other stages. In the numerical range described in this specification, the upper limit value or the lower limit value of the numerical range may be replaced with the values shown in the examples.

<焊料膏> 本實施形態的焊料膏包含焊料粒與助焊劑。該膏亦可進而包含熱硬化性成分、其他成分。<Solder paste> The solder paste of this embodiment contains solder particles and flux. The paste may further contain thermosetting components and other components.

(焊料粒) 焊料粒於表面的一部分具有平面部。焊料粒及其製造方法的詳情將於後敘述。(Solder pellets) The solder particles have a flat portion on a part of the surface. The details of the solder particles and the manufacturing method thereof will be described later.

以焊料膏的總質量為基準,焊料粒的含量亦可為1質量%以上,亦可為2質量%以上、10質量%以上、20質量%以上或30質量%以上。另外,以焊料膏的總質量為基準,該含量亦可為99質量%以下,亦可為90質量%以下或85質量%以下。藉由焊料粒的含量為所述範圍內,更容易將焊料粒配置於電極上,且容易於電極間配置大量的焊料粒,有導通可靠性提高的傾向。Based on the total mass of the solder paste, the content of the solder particles may be 1% by mass or more, 2% by mass or more, 10% by mass or more, 20% by mass or more, or 30% by mass or more. In addition, based on the total mass of the solder paste, the content may be 99% by mass or less, 90% by mass or less, or 85% by mass or less. When the content of the solder particles is within the above range, it is easier to arrange the solder particles on the electrodes, and it is easier to arrange a large number of solder particles between the electrodes, which tends to improve the conduction reliability.

(助焊劑) 作為助焊劑,可列舉焊料接合等中一般使用的化合物,例如可列舉:氯化鋅、氯化鋅及無機鹵化物的混合物、氯化鋅及無機酸的混合物、熔融鹽、磷酸、磷酸的衍生物、有機鹵化物、肼、有機酸、松脂等。該些助焊劑可單獨使用一種,亦可併用兩種以上而使用。(Flux) Examples of the flux include compounds generally used in solder bonding and the like, and examples thereof include zinc chloride, a mixture of zinc chloride and an inorganic halide, a mixture of zinc chloride and an inorganic acid, molten salt, phosphoric acid, and derivatization of phosphoric acid Substances, organic halides, hydrazine, organic acids, rosin, etc. These fluxes may be used alone or in combination of two or more.

再者,作為熔融鹽,可列舉氯化銨等。作為有機酸,可列舉:乳酸、檸檬酸、硬脂酸、麩胺酸、戊二酸等。作為松脂,可列舉活化松脂、非活化松脂等。另外,作為松脂,更具體而言可列舉以松脂酸為主要成分的松香類。助焊劑較佳為松香類,更佳為松脂酸。藉由使用該些助焊劑,電極間的導通可靠性更進一步提高。In addition, examples of the molten salt include ammonium chloride. Examples of organic acids include lactic acid, citric acid, stearic acid, glutamic acid, glutaric acid, and the like. Examples of the rosin include activated rosin and non-activated rosin. In addition, as the rosin, more specifically, rosins containing rosin acid as a main component can be cited. The flux is preferably rosin, more preferably rosin acid. By using these fluxes, the conduction reliability between the electrodes is further improved.

助焊劑的熔點亦可為50℃以上,亦可為70℃以上或80℃以上。還該熔點亦可為200℃以下,亦可為160℃以下、150℃以下或140℃以下。若助焊劑的熔點為所述範圍內,則有如下傾向:容易發揮助焊劑效果,將焊料粒有效地配置於電極上。例如,作為於所述範圍內具有熔點的助焊劑,可列舉:琥珀酸(熔點186℃)、戊二酸(熔點96℃)、己二酸(熔點152℃)、庚二酸(熔點104℃)、辛二酸(熔點142℃)等二羧酸、苯甲酸(熔點122℃)、蘋果酸(熔點130℃)等。The melting point of the flux may be 50°C or higher, 70°C or 80°C. The melting point may be 200°C or lower, 160°C or lower, 150°C or lower, or 140°C or lower. When the melting point of the flux is within the above range, there is a tendency that the flux effect is easily exerted, and the solder particles are effectively arranged on the electrode. For example, as a flux having a melting point within the above range, succinic acid (melting point 186°C), glutaric acid (melting point 96°C), adipic acid (melting point 152°C), pimelic acid (melting point 104°C) may be mentioned. ), suberic acid (melting point 142°C) and other dicarboxylic acids, benzoic acid (melting point 122°C), malic acid (melting point 130°C), etc.

另外,作為助焊劑,可使用具有羥基及羧基的有機酸。就高效地去除焊料粒的表面氧化膜,賦予良好的接合可靠性的方面而言,較佳為脂肪族二羥基羧酸。例如可列舉:酒石酸、2,2-雙(羥甲基)丙酸、2,2-雙(羥甲基)丁酸、2,2-雙(羥甲基)戊酸等。In addition, as the flux, an organic acid having a hydroxyl group and a carboxyl group can be used. In terms of efficiently removing the surface oxide film of the solder particles and providing good bonding reliability, aliphatic dihydroxycarboxylic acid is preferred. For example, tartaric acid, 2,2-bis(hydroxymethyl)propionic acid, 2,2-bis(hydroxymethyl)butanoic acid, 2,2-bis(hydroxymethyl)valeric acid, etc. may be mentioned.

助焊劑不僅包含於焊料膏中,亦可附著於焊料粒的表面。The flux is not only contained in the solder paste, but also adheres to the surface of the solder particles.

以焊料膏的總質量為基準,助焊劑的含量亦可為0.5質量%以上。另外,以焊料膏的總質量為基準,該含量亦可為30質量%以下,亦可為25質量%以下。若助焊劑的含量為所述範圍內,則於焊料及電極的表面難以形成氧化被膜,且容易有效地去除形成於焊料及電極的表面的氧化被膜。Based on the total mass of solder paste, the flux content can also be 0.5% by mass or more. In addition, based on the total mass of the solder paste, the content may be 30% by mass or less, or 25% by mass or less. If the content of the flux is within the above range, it is difficult to form an oxide film on the surfaces of the solder and the electrode, and it is easy to effectively remove the oxide film formed on the surface of the solder and the electrode.

(熱硬化性成分) 熱硬化性成分可包含熱硬化性化合物及熱硬化劑。 作為熱硬化性化合物,可列舉:氧雜環丁烷化合物、環氧化合物、環硫化合物、(甲基)丙烯酸化合物、酚化合物、胺基化合物、不飽和聚酯化合物、聚胺基甲酸酯化合物、矽酮化合物、聚醯亞胺化合物等。(Thermosetting component) The thermosetting component may include a thermosetting compound and a thermosetting agent. Examples of thermosetting compounds include oxetane compounds, epoxy compounds, episulfide compounds, (meth)acrylic compounds, phenol compounds, amino compounds, unsaturated polyester compounds, and polyurethanes. Compounds, silicone compounds, polyimide compounds, etc.

以焊料膏的總質量為基準,熱硬化性化合物的含量亦可為10質量%以上,亦可為40質量%以上或50質量%以上。另外,以焊料膏的總質量為基準,該含量亦可為99質量%以下,亦可為98質量%以下、90質量%以下或80質量%以下。Based on the total mass of the solder paste, the content of the thermosetting compound may be 10% by mass or more, 40% by mass or more, or 50% by mass or more. In addition, based on the total mass of the solder paste, the content may be 99% by mass or less, 98% by mass or less, 90% by mass or less, or 80% by mass or less.

作為熱硬化劑,可列舉:咪唑硬化劑、胺硬化劑、酚硬化劑、多硫醇硬化劑、酸酐、熱陽離子起始劑、熱自由基產生劑等。該些熱硬化劑可單獨使用一種,亦可併用兩種以上。Examples of the thermal hardener include imidazole hardener, amine hardener, phenol hardener, polythiol hardener, acid anhydride, thermal cation initiator, thermal radical generator, and the like. These thermosetting agents may be used alone or in combination of two or more.

就使焊料膏容易於低溫下迅速硬化的觀點而言,可將咪唑硬化劑、多硫醇硬化劑、胺硬化劑等用作熱硬化劑。就保存穩定性的觀點而言,可使用潛伏性的熱硬化劑。作為潛伏性硬化劑,可使用潛伏性咪唑硬化劑、潛伏性多硫醇硬化劑、潛伏性胺硬化劑等。From the viewpoint of making the solder paste easily harden quickly at low temperatures, imidazole hardeners, polythiol hardeners, amine hardeners, and the like can be used as the thermal hardener. From the viewpoint of storage stability, a latent thermosetting agent can be used. As the latent hardener, a latent imidazole hardener, a latent polythiol hardener, a latent amine hardener, etc. can be used.

熱硬化劑的反應起始溫度亦可為50℃以上,亦可為70℃以上或80℃以上。另外,該溫度亦可為250℃以下,亦可為200℃以下、150℃以下或140℃以下。若熱硬化劑的反應起始溫度為所述範圍內,則容易將焊料粒有效地配置於電極上。於本說明書中,所謂熱硬化劑的反應起始溫度,是指DSC中的發熱峰值的開始上昇的溫度。The reaction initiation temperature of the thermosetting agent may be 50°C or higher, 70°C or higher, or 80°C or higher. In addition, the temperature may be 250°C or lower, 200°C or lower, 150°C or lower, or 140°C or lower. If the reaction starting temperature of the thermosetting agent is within the above range, it is easy to effectively arrange the solder particles on the electrode. In this specification, the reaction starting temperature of the thermosetting agent refers to the temperature at which the peak of heat generation in DSC starts to rise.

相對於熱硬化性化合物100質量份,熱硬化劑的含量亦可為0.01質量份以上,亦可為1質量份以上。另外,該含量亦可為200質量份以下,亦可為100質量份以下或75質量份以下。若熱硬化劑的含量為所述範圍內,則有如下傾向:容易使焊料膏硬化,且於硬化後未參與硬化的剩餘的熱硬化劑難以殘存,且硬化物的耐熱性變高。The content of the thermosetting agent may be 0.01 part by mass or more, or 1 part by mass or more with respect to 100 parts by mass of the thermosetting compound. In addition, the content may be 200 parts by mass or less, or 100 parts by mass or 75 parts by mass or less. If the content of the thermosetting agent is within the above range, there is a tendency that the solder paste is easily cured, and the remaining thermosetting agent that does not participate in curing after curing hardly remains, and the heat resistance of the cured product becomes high.

(其他成分) 焊料膏視需要亦可進而包含有機溶劑、觸變控制劑、偶合劑、反應性稀釋劑等。(Other ingredients) The solder paste may further contain an organic solvent, a thixotropy control agent, a coupling agent, a reactive diluent, etc. as needed.

<焊料粒> 本實施形態的焊料粒於表面的一部分具有平面部。此時該平面部以外的表面較佳為球冠狀。即,焊料粒可為具有平面部與球冠狀的曲面部者。於使用此種焊料粒獲得各向異性導電材料的情況下,能夠實現優異的導通可靠性及絕緣可靠性。以下,對該理由進行說明。<Solder grains> The solder particles of this embodiment have a flat portion on a part of the surface. In this case, the surface other than the plane portion is preferably spherical. That is, the solder particles may have a flat portion and a spherical curved portion. When using such solder particles to obtain an anisotropic conductive material, excellent conduction reliability and insulation reliability can be achieved. The reason will be described below.

首先,藉由焊料粒具有的平面部與電極相接,可於該平面部與電極之間確保寬廣的接觸面積。例如於連接由焊料容易潤濕擴展的材料形成的電極與由焊料難以潤濕擴展的材料形成的電極的情況下,藉由調整為將焊料粒的平面部配置於後者的電極側,可較佳地進行兩電極間的連接。First, by connecting the flat portion of the solder particles to the electrode, a wide contact area can be ensured between the flat portion and the electrode. For example, in the case of connecting an electrode formed of a material that is easy to wet and expand with solder and an electrode formed with a material that is difficult to wet and expand with solder, it is preferable to adjust the plane portion of the solder particles to the electrode side of the latter Ground between the two electrodes.

另外,焊料粒與電極的接觸面積寬廣時焊料容易潤濕擴展。例如,作為用以使配置於電極(基板)上的焊料粒潤濕擴展至電極上的方法,有如下方法:將助焊劑預先塗佈於焊料粒自身或電極上,藉由回流(加熱)使焊料粒熔解。此時,關於焊料粒的氧化被膜厚的情況、助焊劑弱的情況等,若焊料粒與電極的接觸面積窄,則焊料難以潤濕擴展。另一方面,若於焊料粒的表面的一部分有平面部,則電極與焊料粒的接觸面積變寬廣,有容易潤濕擴展的傾向。推測這是因為於進行氧化被膜的去除時,若電極與焊料粒表面接觸,則變薄的氧化被膜會出現龜裂,經熔解的焊料或助焊劑發生流動,而容易進行氧化被膜的去除。如此,若焊料粒與電極的接觸面積寬廣,則電極與焊料粒表面的接觸點增加,因此潤濕擴展的時間提前而容易潤濕擴展。再者,由於為容易潤濕擴展的焊料粒,故可減少助焊劑量,可抑制由助焊劑的殘渣引起的離子遷移的發生。In addition, when the contact area between the solder particles and the electrode is wide, the solder easily wets and expands. For example, as a method for wetting and spreading the solder particles arranged on the electrode (substrate) onto the electrode, there is a method of applying flux in advance on the solder particles themselves or on the electrode, by reflow (heating) The solder particles melt. At this time, regarding the thickness of the oxide film of the solder particles, the weak flux, etc., if the contact area of the solder particles and the electrode is narrow, it is difficult for the solder to wet and spread. On the other hand, if there is a flat portion on a part of the surface of the solder particles, the contact area between the electrode and the solder particles becomes wider, and there is a tendency for the wetting to spread easily. This is presumably because when the oxide film is removed, if the electrode comes into contact with the surface of the solder particles, the thinned oxide film will crack, and the melted solder or flux will flow, making it easy to remove the oxide film. In this way, if the contact area between the solder particles and the electrode is wide, the contact point between the electrode and the surface of the solder particles increases, so that the time for wetting expansion is advanced and wetting expansion is easy. In addition, since the solder particles are easy to wet and expand, the amount of solder flux can be reduced, and the occurrence of ion migration caused by flux residues can be suppressed.

進而,具有平面部的焊料粒的穩定度良好,故於以平面部與電極相接的方式將焊料粒配置於電極上的情況下,由於其穩定的形狀而難以產生焊料粒的位置偏移。即,容易抑制因於回流前焊料粒向電極間外滾出,而引起相向的電極間的導通可靠性降低、及鄰接的電極間的絕緣可靠性降低的情況。Furthermore, the stability of the solder particles having a flat portion is good. Therefore, when the solder particles are arranged on the electrode so that the flat portion is in contact with the electrode, the position of the solder particles is less likely to shift due to its stable shape. That is, it is easy to suppress the decrease in the reliability of conduction between the opposing electrodes and the decrease in the insulation reliability between adjacent electrodes due to the solder particles rolling out between the electrodes before reflow.

圖1是示意性地表示本實施形態的焊料粒1的一例的圖。如圖1所示,焊料粒1具有於具有直徑B的球的表面的一部分形成有直徑A的平面部11的形狀。就實現優異的導通可靠性及絕緣可靠性的觀點而言,平面部的直徑A相對於焊料粒1的直徑B的比(A/B)例如可超過0.01且未滿1.0(0.01<A/B<1.0),亦可為0.1~0.9、0.1~0.5、0.1~0.3或0.1~0.2。焊料粒的直徑B及平面部的直徑A例如可利用掃描式電子顯微鏡等進行觀察。 具體而言,利用掃描式電子顯微鏡觀察任意的粒子,並拍攝圖像。根據所獲得的圖像測定焊料粒的直徑B及平面部的直徑A,求出該粒子的A/B。對300個焊料粒進行該作業並算出平均值,作為焊料粒的A/B。FIG. 1 is a diagram schematically showing an example of solder particles 1 of the present embodiment. As shown in FIG. 1, the solder grain 1 has a shape in which a flat portion 11 of a diameter A is formed on a part of the surface of a ball having a diameter B. From the viewpoint of achieving excellent conduction reliability and insulation reliability, the ratio (A/B) of the diameter A of the planar portion to the diameter B of the solder grain 1 may exceed, for example, 0.01 and less than 1.0 (0.01<A/B <1.0), or 0.1 to 0.9, 0.1 to 0.5, 0.1 to 0.3, or 0.1 to 0.2. The diameter B of the solder particles and the diameter A of the planar portion can be observed with a scanning electron microscope or the like, for example. Specifically, an arbitrary particle is observed with a scanning electron microscope, and an image is taken. The diameter B of the solder particles and the diameter A of the planar portion were measured from the obtained image, and the A/B of the particles was obtained. This operation was performed on 300 solder particles and the average value was calculated as A/B of the solder particles.

關於焊料粒1,亦可平均粒徑為1 μm~30 μm,且C.V.值為20%以下。此種焊料粒兼顧小的平均粒徑與窄的粒度分佈,可較佳地用作適用於導電可靠性及絕緣可靠性高的各向異性導電材料的導電性粒子。Regarding the solder particles 1, the average particle diameter may be 1 μm to 30 μm, and the C.V. value is 20% or less. Such solder particles have both a small average particle size and a narrow particle size distribution, and can be preferably used as conductive particles suitable for anisotropic conductive materials with high conduction reliability and insulation reliability.

焊料粒的平均粒徑只要為所述範圍,則並無特別限定,較佳為30 μm以下,更佳為25 μm以下,進而佳為20 μm以下。另外,焊料粒的平均粒徑較佳為1 μm以上,更佳為2 μm以上,進而佳為4 μm以上。The average particle diameter of the solder particles is not particularly limited as long as it is within the above range, and is preferably 30 μm or less, more preferably 25 μm or less, and still more preferably 20 μm or less. In addition, the average particle diameter of the solder particles is preferably 1 μm or more, more preferably 2 μm or more, and still more preferably 4 μm or more.

焊料粒的平均粒徑可使用與尺寸一致的各種方法來測定。例如可利用動態光散射法、雷射繞射法、離心沈降法、電檢測帶法、共振式質量測定法等方法。進而,可利用根據由光學顯微鏡、電子顯微鏡等獲得的圖像測定粒子尺寸的方法。作為具體的裝置,可列舉:流動式粒子像分析裝置、麥奇克(microtrac)、庫爾特計數器等。The average particle diameter of the solder particles can be measured using various methods consistent with the size. For example, methods such as dynamic light scattering method, laser diffraction method, centrifugal sedimentation method, electrical detection zone method, resonance mass measurement method, and the like can be used. Furthermore, a method of measuring the particle size from an image obtained by an optical microscope, an electron microscope, or the like can be used. As a specific device, a flow-type particle image analysis device, a microtrac, a Coulter counter, etc. may be mentioned.

就可實現更優異的導電可靠性及絕緣可靠性的觀點而言,焊料粒的C.V.值較佳為20%以下,更佳為10%以下,進而佳為7%以下,最佳為5%以下。另外,焊料粒的C.V.值的下限並無特別限定。 例如,焊料粒的C.V.值可為1%以上,亦可為2%以上。From the viewpoint of achieving more excellent conduction reliability and insulation reliability, the CV value of the solder particles is preferably 20% or less, more preferably 10% or less, further preferably 7% or less, and most preferably 5% or less . In addition, the lower limit of the C.V. value of the solder particles is not particularly limited. For example, the C.V. value of the solder particles may be 1% or more, or 2% or more.

焊料粒的C.V.值可藉由將利用所述方法測定的粒徑的標準偏差除以平均粒徑而得的值乘以100來算出。The C.V. value of the solder particles can be calculated by multiplying the value obtained by dividing the standard deviation of the particle diameter measured by the method by the average particle diameter by 100.

於利用兩對平行線製成與焊料粒的投影像外切的四邊形的情況下,於將相向的邊間的距離設為X及Y(其中Y<X)時,Y相對於X的比(Y/X)可超過0.8且未滿1.0(0.8<Y/X<1.0),亦可為0.81~0.99或0.81~0.95。此種焊料粒可稱為更接近真球的粒子。於將焊料粒再次收納於基體60的凹部62中的情況下,若焊料粒接近球狀,則有容易收納的傾向。另外,藉由焊料粒接近真球,於經由焊料粒使相向的多個電極間電性連接時,焊料粒與電極間接觸難以產生不均,有可獲得穩定的連接的傾向。另外,於製作使焊料粒分散於樹脂材料中而成的導電性膜或膏時,可獲得高分散性,有可獲得製造時的分散穩定性的傾向。進而,於將使焊料粒分散於樹脂材料中而成的膜或膏用於電極間的連接的情況下,即便焊料粒於樹脂中旋轉,若焊料粒為球體形狀,則以投影像進行觀察時焊料粒彼此的投影面積接近。因此,有如下傾向:容易獲得於連接電極彼此時偏差少、穩定的電氣連接。就所述觀點而言,焊料粒的真圓度(焊料粒的兩個同心圓(最小外切圓的半徑r、最大內切圓的半徑R)的半徑之比r/R)可為0.85以上,亦可為0.90以上。In the case of using two pairs of parallel lines to make a quadrilateral circumscribed from the projection image of the solder particles, when the distance between the opposing sides is set to X and Y (where Y <X), the ratio of Y to X ( Y/X) can exceed 0.8 and less than 1.0 (0.8<Y/X<1.0), and can also be 0.81 to 0.99 or 0.81 to 0.95. Such solder particles can be called particles closer to true spheres. When the solder particles are accommodated in the concave portion 62 of the base 60 again, if the solder particles are close to a spherical shape, there is a tendency to be easily accommodated. In addition, when the solder particles are close to a true sphere, when electrically connecting between a plurality of electrodes facing each other through the solder particles, uneven contact between the solder particles and the electrodes is unlikely to occur, and there is a tendency for stable connection to be obtained. In addition, when producing a conductive film or paste in which solder particles are dispersed in a resin material, high dispersibility can be obtained, and there is a tendency that dispersion stability at the time of manufacturing can be obtained. Furthermore, when a film or paste in which solder particles are dispersed in a resin material is used for connection between electrodes, even if the solder particles rotate in the resin, if the solder particles are in the shape of a sphere, they are observed with a projection image The projected areas of the solder particles are close to each other. Therefore, there is a tendency that it is easy to obtain a stable electrical connection with less deviation when connecting the electrodes. From the viewpoint, the roundness of the solder particles (the radius ratio r/R of the two concentric circles of the solder particles (radius r of the minimum circumscribed circle and radius R of the maximum inscribed circle)) can be 0.85 or more , Can also be 0.90 or more.

圖2是表示利用兩對平行線製成與焊料粒的投影像外切的四邊形時相向的邊間的距離X及Y(其中Y<X)的圖。例如,利用掃描式電子顯微鏡觀察任意的粒子而獲得投影像。對於所獲得的投影像而描繪兩對平行線,一對平行線配置於平行線的距離成為最小的位置,另一對平行線配置於平行線的距離成為最大的位置,求出該粒子的Y/X。對300個焊料粒進行該作業算出平均值,並作為焊料粒的Y/X。FIG. 2 is a diagram showing the distances X and Y (where Y<X) between the opposing sides when a quadrilateral that is circumscribed from the projection image of the solder particles is formed by using two pairs of parallel lines. For example, a scanning electron microscope is used to observe arbitrary particles to obtain a projection image. Draw two pairs of parallel lines on the obtained projection image, one pair of parallel lines is arranged at the position where the distance of the parallel lines becomes the smallest, and the other pair of parallel lines is arranged at the position where the distance of the parallel lines becomes the maximum, and the Y of the particle is obtained /X. This operation was performed on 300 solder particles and the average value was calculated as Y/X of the solder particles.

焊料粒可為包含錫或錫合金者。作為錫合金,例如可使用In-Sn合金、In-Sn-Ag合金、Sn-Au合金、Sn-Bi合金、Sn-Bi-Ag合金、Sn-Ag-Cu合金、Sn-Cu合金等。作為該些錫合金的具體例,可列舉下述例。 ·In-Sn(In 52質量%、Bi 48質量% 熔點118℃) ·In-Sn-Ag(In 20質量%、Sn 77.2質量%、Ag 2.8質量% 熔點175℃) ·Sn-Bi(Sn 43質量%、Bi 57質量% 熔點138℃) ·Sn-Bi-Ag(Sn 42質量%、Bi 57質量%、Ag 1質量% 熔點139℃) ·Sn-Ag-Cu(Sn 96.5質量%、Ag 3質量%、Cu 0.5質量% 熔點217℃) ·Sn-Cu(Sn 99.3質量%、Cu 0.7質量% 熔點227℃) ·Sn-Au(Sn 21.0質量%、Au 79.0質量% 熔點278℃) 焊料粒可為包含銦或銦合金者。作為銦合金,例如可使用In-Bi合金、In-Ag合金等。作為該些銦合金的具體例,可列舉下述例。 ·In-Bi(In 66.3質量%、Bi 33.7質量% 熔點72℃) ·In-Bi(In 33.0質量%、Bi 67.0質量% 熔點109℃) ·In-Ag(In 97.0質量%、Ag 3.0質量% 熔點145℃)The solder particles may include tin or tin alloy. As the tin alloy, for example, In-Sn alloy, In-Sn-Ag alloy, Sn-Au alloy, Sn-Bi alloy, Sn-Bi-Ag alloy, Sn-Ag-Cu alloy, Sn-Cu alloy, or the like can be used. Specific examples of these tin alloys include the following examples. ·In-Sn (In 52% by mass, Bi 48% by mass, melting point 118°C) ·In-Sn-Ag (In 20% by mass, Sn 77.2% by mass, Ag 2.8% by mass, melting point 175℃) ·Sn-Bi (Sn 43% by mass, Bi 57% by mass, melting point 138°C) ·Sn-Bi-Ag (Sn 42 mass%, Bi 57 mass%, Ag 1 mass%, melting point 139℃) ·Sn-Ag-Cu (Sn 96.5 mass%, Ag 3 mass%, Cu 0.5 mass%, melting point 217℃) ·Sn-Cu (Sn 99.3% by mass, Cu 0.7% by mass, melting point 227°C) ·Sn-Au (Sn 21.0% by mass, Au 79.0% by mass, melting point 278°C) The solder particles may include indium or indium alloy. As the indium alloy, for example, In-Bi alloy, In-Ag alloy, or the like can be used. As specific examples of these indium alloys, the following examples may be mentioned. ·In-Bi (In 66.3% by mass, Bi 33.7% by mass, melting point 72°C) ·In-Bi (In 33.0% by mass, Bi 67.0% by mass, melting point 109°C) ·In-Ag (In 97.0% by mass, Ag 3.0% by mass, melting point 145℃)

可根據焊料粒的用途(使用時的溫度)等來選擇所述錫合金或銦合金。例如於將焊料粒用於低溫下的熔接的情況下,只要採用In-Sn合金、Sn-Bi合金即可,於該情況下,可於150℃以下進行熔接。於採用Sn-Ag-Cu合金、Sn-Cu合金等熔點高的材料的情況下,即便於高溫放置後亦可維持高可靠性。The tin alloy or indium alloy can be selected according to the purpose of the solder particles (temperature at the time of use) and the like. For example, when the solder particles are used for welding at a low temperature, the In-Sn alloy or the Sn-Bi alloy may be used. In this case, the welding may be performed at 150° C. or lower. When a material having a high melting point such as Sn-Ag-Cu alloy or Sn-Cu alloy is used, high reliability can be maintained even after being left at a high temperature.

焊料粒亦可包含選自Ag、Cu、Ni、Bi、Zn、Pd、Pb、Au、P及B中的一種以上。該些元素中,就以下的觀點而言,亦可包含Ag或Cu。即,藉由焊料粒包含Ag或Cu,可使焊料粒的熔點降低至220℃左右,且與電極的接合強度進一步提高,故容易獲得更良好的導通可靠性。The solder particles may also contain one or more kinds selected from Ag, Cu, Ni, Bi, Zn, Pd, Pb, Au, P, and B. Among these elements, Ag or Cu may be included from the following viewpoint. That is, when the solder particles contain Ag or Cu, the melting point of the solder particles can be reduced to about 220° C., and the bonding strength with the electrode is further improved, so it is easy to obtain better conduction reliability.

焊料粒的Cu含有率例如為0.05質量%~10質量%,亦可為0.1質量%~5質量%或0.2質量%~3質量%。若Cu含有率為0.05質量%以上,則容易達成更良好的焊料連接可靠性。另外,若Cu含有率為10質量%以下,則容易形成熔點低、潤濕性優異的焊料粒,結果由焊料粒帶來的接合部的連接可靠性容易變得良好。The Cu content of the solder particles is, for example, 0.05% by mass to 10% by mass, or 0.1% by mass to 5% by mass or 0.2% by mass to 3% by mass. If the Cu content is 0.05% by mass or more, it is easy to achieve better solder connection reliability. In addition, if the Cu content is 10% by mass or less, it is easy to form solder particles having a low melting point and excellent wettability, and as a result, the connection reliability of the joint portion by the solder particles tends to be good.

焊料粒的Ag含有率例如為0.05質量%~10質量%,亦可為0.1質量%~5質量%或0.2質量%~3質量%。若Ag含有率為0.05質量%以上,則容易達成更良好的焊料連接可靠性。另外,若Ag含有率為10質量%以下,則容易形成熔點低、潤濕性優異的焊料粒,結果由焊料粒帶來的接合部的連接可靠性容易變得良好。The Ag content of the solder particles is, for example, 0.05% by mass to 10% by mass, or 0.1% by mass to 5% by mass or 0.2% by mass to 3% by mass. If the Ag content is 0.05% by mass or more, it is easy to achieve better solder connection reliability. In addition, if the Ag content is 10% by mass or less, it is easy to form solder particles having a low melting point and excellent wettability. As a result, the connection reliability of the joint portion due to the solder particles tends to be good.

焊料粒的用途並無特別限定,例如可較佳地用作各向異性導電材料用的導電性粒子。另外,亦可較佳地用於在半導體積體電路的安裝中廣泛使用的球柵陣列連接方法(BGA(ball grid array)連接)等電性連接電極彼此的用途,或微機電系統(microelectro mechanical systems,MEMS)等零件的密封或密封管、硬焊、高度或間隙控制的隔板等用途。即,可將所述焊料粒用於先前使用焊料的一般用途中。The use of the solder particles is not particularly limited, and for example, it can be preferably used as conductive particles for anisotropic conductive materials. In addition, it can also be preferably used for the purpose of electrically connecting electrodes to each other, such as a ball grid array connection method (BGA (ball grid array) connection) widely used in the mounting of semiconductor integrated circuits, or a microelectromechanical system (microelectro mechanical systems, MEMS) and other parts such as sealing or sealing tube, brazing, spacers for height or gap control. That is, the solder pellets can be used in general applications where solder was previously used.

<焊料粒的製造方法> 本實施形態的焊料粒的製造方法並無特別限制,以下說明製造方法的一例。例如,本實施形態的焊料粒可藉由如下的焊料粒的製造方法來製造,即包括:準備步驟,準備具有多個凹部的基體與焊料微粒;收納步驟,將焊料微粒的至少一部分收納於基體的凹部中;以及熔合步驟,使收納於凹部中的焊料微粒熔合,於凹部的內部形成焊料粒。根據該製造方法,可製造於表面的一部分具有平面部的焊料粒。<Manufacturing method of solder pellets> The manufacturing method of the solder pellet of this embodiment is not particularly limited, and an example of the manufacturing method will be described below. For example, the solder particles of this embodiment can be manufactured by a method of manufacturing solder particles, which includes: a preparation step of preparing a substrate having a plurality of recesses and solder particles; and a storage step of storing at least a portion of the solder particles in the substrate And the fusing step, fusing the solder particles contained in the recess to form solder particles inside the recess. According to this manufacturing method, it is possible to manufacture solder particles having a flat portion on a part of the surface.

以下,參照圖3(a)~圖6對焊料粒的製造方法進行說明。Hereinafter, a method of manufacturing solder particles will be described with reference to FIGS. 3( a) to 6.

首先,準備焊料微粒與用以收納焊料微粒的基體60。圖3(a)是示意性地表示基體60的一例的平面圖,圖3(b)是圖3(a)所示的IIIb-IIIb線的剖面圖。圖3(a)所示的基體60具有多個凹部62。多個凹部62可以規定的圖案有規則地配置。First, the solder particles and the base 60 for storing the solder particles are prepared. FIG. 3(a) is a plan view schematically showing an example of the base 60, and FIG. 3(b) is a cross-sectional view taken along the line IIIb-IIIb shown in FIG. 3(a). The base 60 shown in FIG. 3( a) has a plurality of recesses 62. The plurality of recesses 62 may be regularly arranged in a predetermined pattern.

基體60的凹部62較佳為形成為開口面積自凹部62的底部62a側向基體60的表面60a側擴大的錐狀。即,如圖3(a)、圖3(b)所示,凹部62的底部62a的寬度(圖3(a)、圖3(b)中的寬度a)較佳為較凹部62的表面60a的開口的寬度(圖3(a)、圖3(b)中的寬度b)而言窄。而且,凹部62的尺寸(寬度a、寬度b、容積、錐角度及深度等)只要根據設為目標的焊料粒的尺寸設定即可。The concave portion 62 of the base 60 is preferably formed in a tapered shape whose opening area expands from the bottom 62 a side of the concave portion 62 toward the surface 60 a side of the base 60. That is, as shown in FIGS. 3(a) and 3(b), the width of the bottom 62a of the recess 62 (the width a in FIGS. 3(a) and 3(b)) is preferably more than the surface 60a of the recess 62 The width of the opening (width b in FIGS. 3(a) and 3(b)) is narrow. Moreover, the size of the recess 62 (width a, width b, volume, taper angle, depth, etc.) may be set according to the size of the target solder particles.

再者,凹部62的形狀亦可為除圖3(a)、圖3(b)所示的形狀以外的形狀。例如,凹部62的表面60a的開口的形狀除圖3(a)、圖3(b)所示的圓形以外,可為橢圓形、三邊形、四邊形、多邊形等。In addition, the shape of the recess 62 may be other than the shapes shown in FIGS. 3( a) and 3 (b ). For example, the shape of the opening of the surface 60a of the recess 62 may be an ellipse, a triangle, a quadrangle, a polygon, etc. in addition to the circle shown in FIGS. 3(a) and 3(b).

另外,垂直於表面60a的剖面中的凹部62的形狀例如可為如圖4(a)~圖4(d)所示的形狀。圖4(a)~圖4(d)是示意性地表示基體所具有的凹部的剖面形狀的例子的剖面圖。圖4(a)~圖4(d)所示的任一剖面形狀中底面均平坦。藉此,於焊料粒的表面的一部分中形成平面部。另外,圖4(a)~圖4(d)所示的任一剖面形狀中凹部62的表面60a的開口的寬度(寬度b)均成為剖面形狀中的最大寬度。藉此,於凹部62內形成的焊料粒容易取出,作業性提高。In addition, the shape of the recess 62 in the cross section perpendicular to the surface 60a may be, for example, the shape shown in FIGS. 4(a) to 4(d). FIGS. 4( a) to 4 (d) are cross-sectional views schematically showing examples of the cross-sectional shape of the recessed portion included in the base. In any of the cross-sectional shapes shown in FIGS. 4(a) to 4(d), the bottom surface is flat. With this, a flat portion is formed in a part of the surface of the solder particles. In addition, in any of the cross-sectional shapes shown in FIGS. 4( a) to 4 (d ), the width (width b) of the opening of the surface 60 a of the recess 62 becomes the maximum width in the cross-sectional shape. With this, the solder particles formed in the recess 62 are easily taken out, and the workability is improved.

作為構成基體60的材料,例如可使用矽、各種陶瓷、玻璃、不鏽鋼等金屬等無機材料、以及各種樹脂等有機材料。該些中,基體60較佳為包含具有於焊料微粒的熔融溫度下不會變質的耐熱性的材質。另外,基體60的凹部62可利用光微影法、壓印法、機械加工法、電子束加工法、放射線加工法等公知的方法來形成。As the material constituting the base 60, for example, inorganic materials such as silicon, various ceramics, glass, stainless steel, and other metals, and organic materials such as various resins can be used. Among these, the base 60 preferably includes a material having heat resistance that does not deteriorate at the melting temperature of the solder particles. In addition, the concave portion 62 of the base 60 can be formed by a known method such as photolithography, imprinting, mechanical processing, electron beam processing, and radiation processing.

準備步驟中準備的焊料微粒只要為包含粒徑較凹部62的表面60a的開口的寬度(寬度b)而言更小的微粒者即可,較佳為更多地包含粒徑較寬度b而言更小的微粒。例如,焊料微粒較佳為粒度分佈的D10粒徑較寬度b而言更小,更佳為粒度分佈的D30粒徑較寬度b而言更小,進而佳為粒度分佈的D50粒徑較寬度b而言更小。The solder particles prepared in the preparation step may be those containing particles having a particle size smaller than the width (width b) of the opening of the surface 60a of the recess 62, and preferably containing more particles having a particle size than the width b Smaller particles. For example, the solder particles preferably have a particle size distribution D10 particle size smaller than the width b, more preferably a particle size distribution D30 particle size smaller than the width b, and more preferably a particle size distribution D50 particle size wider than the width b In terms of being smaller.

焊料微粒的粒度分佈可使用與尺寸一致的各種方法來測定。例如可利用動態光散射法、雷射繞射法、離心沈降法、電檢測帶法、共振式質量測定法等方法。進而,可利用根據由光學顯微鏡、電子顯微鏡等獲得的圖像測定粒子尺寸的方法。作為具體的裝置,可列舉:流動式粒子像分析裝置、麥奇克、庫爾特計數器等。The particle size distribution of the solder particles can be measured using various methods consistent with the size. For example, methods such as dynamic light scattering method, laser diffraction method, centrifugal sedimentation method, electrical detection zone method, resonance mass measurement method, and the like can be used. Furthermore, a method of measuring the particle size from an image obtained by an optical microscope, an electron microscope, or the like can be used. As specific devices, there may be mentioned a flow-type particle image analysis device, a Macchik, a Coulter counter, and the like.

準備步驟中準備的焊料微粒的C.V.值並無特別限定,但就藉由大小的微粒的組合來提高對凹部62的填充性的觀點而言,C.V.值較佳為高。例如,焊料微粒的C.V.值可超過20%,較佳為25%以上,更佳為30%以上。The C.V. value of the solder particles prepared in the preparation step is not particularly limited, but the C.V. value is preferably high from the viewpoint of improving the fillability of the recess 62 by the combination of particles of large and small sizes. For example, the C.V. value of the solder particles may exceed 20%, preferably 25% or more, and more preferably 30% or more.

焊料微粒的C.V.值可藉由將利用所述方法測定的粒徑的標準偏差除以平均粒徑(D50粒徑)而得的值乘以100來算出。The C.V. value of the solder particles can be calculated by multiplying the value obtained by dividing the standard deviation of the particle diameter measured by the method by the average particle diameter (D50 particle diameter) by 100.

焊料微粒可為包含錫或錫合金者。作為錫合金,例如可使用In-Sn合金、In-Sn-Ag合金、Sn-Au合金、Sn-Bi合金、Sn-Bi-Ag合金、Sn-Ag-Cu合金、Sn-Cu合金等。作為該些錫合金的具體例,可列舉下述例。 ·In-Sn(In 52質量%、Bi 48質量% 熔點118℃) ·In-Sn-Ag(In 20質量%、Sn 77.2質量%、Ag 2.8質量% 熔點175℃) ·Sn-Bi(Sn 43質量%、Bi 57質量% 熔點138℃) ·Sn-Bi-Ag(Sn 42質量%、Bi 57質量%、Ag 1質量% 熔點139℃) ·Sn-Ag-Cu(Sn 96.5質量%、Ag 3質量%、Cu 0.5質量% 熔點217℃) ·Sn-Cu(Sn 99.3質量%、Cu 0.7質量% 熔點227℃) ·Sn-Au(Sn 21.0質量%、Au 79.0質量% 熔點278℃) 焊料粒可為包含銦或銦合金者。作為銦合金,例如可使用In-Bi合金、In-Ag合金等。作為該些銦合金的具體例,可列舉下述例。 ·In-Bi(In 66.3質量%、Bi 33.7質量% 熔點72℃) ·In-Bi(In 33.0質量%、Bi 67.0質量% 熔點109℃) ·In-Ag(In 97.0質量%、Ag 3.0質量% 熔點145℃)The solder particles may include tin or tin alloy. As the tin alloy, for example, In-Sn alloy, In-Sn-Ag alloy, Sn-Au alloy, Sn-Bi alloy, Sn-Bi-Ag alloy, Sn-Ag-Cu alloy, Sn-Cu alloy, or the like can be used. Specific examples of these tin alloys include the following examples. ·In-Sn (In 52% by mass, Bi 48% by mass, melting point 118°C) ·In-Sn-Ag (In 20% by mass, Sn 77.2% by mass, Ag 2.8% by mass, melting point 175℃) ·Sn-Bi (Sn 43% by mass, Bi 57% by mass, melting point 138°C) ·Sn-Bi-Ag (Sn 42 mass%, Bi 57 mass%, Ag 1 mass%, melting point 139℃) ·Sn-Ag-Cu (Sn 96.5 mass%, Ag 3 mass%, Cu 0.5 mass%, melting point 217℃) ·Sn-Cu (Sn 99.3% by mass, Cu 0.7% by mass, melting point 227°C) ·Sn-Au (Sn 21.0% by mass, Au 79.0% by mass, melting point 278°C) The solder particles may include indium or indium alloy. As the indium alloy, for example, In-Bi alloy, In-Ag alloy, or the like can be used. As specific examples of these indium alloys, the following examples may be mentioned. ·In-Bi (In 66.3% by mass, Bi 33.7% by mass, melting point 72°C) ·In-Bi (In 33.0% by mass, Bi 67.0% by mass, melting point 109°C) ·In-Ag (In 97.0% by mass, Ag 3.0% by mass, melting point 145℃)

可根據焊料粒的用途(使用時的溫度)等來選擇所述錫合金或銦合金。例如於欲獲得用於低溫下的熔接的焊料粒的情況下,只要採用In-Sn合金、Sn-Bi合金即可,於該情況下可獲得能夠於150℃以下熔接的焊料粒。於採用Sn-Ag-Cu合金、Sn-Cu合金等熔點高的材料的情況下,可獲得即便於高溫放置後亦能夠維持高可靠性的焊料粒。The tin alloy or indium alloy can be selected according to the purpose of the solder particles (temperature at the time of use) and the like. For example, when it is desired to obtain solder particles for welding at a low temperature, an In-Sn alloy or a Sn-Bi alloy may be used, and in this case, solder particles that can be welded at 150° C. or less can be obtained. When a material having a high melting point such as Sn-Ag-Cu alloy or Sn-Cu alloy is used, solder particles capable of maintaining high reliability even after being left at a high temperature can be obtained.

焊料微粒亦可包含選自Ag、Cu、Ni、Bi、Zn、Pd、Pb、Au、P及B中的一種以上。該些元素中,就以下的觀點而言,亦可包含Ag或Cu。即,藉由焊料微粒包含Ag或Cu,可發揮如下效果:獲得可使獲得的焊料粒的熔點降低至220℃左右的與電極的接合強度優異的焊料粒,藉此獲得良好的導通可靠性。The solder fine particles may contain one or more types selected from Ag, Cu, Ni, Bi, Zn, Pd, Pb, Au, P, and B. Among these elements, Ag or Cu may be included from the following viewpoint. That is, when the solder fine particles contain Ag or Cu, it is possible to obtain the effect of obtaining solder particles excellent in the bonding strength with the electrode, which can lower the melting point of the obtained solder particles to about 220°C, thereby obtaining good conduction reliability.

焊料微粒的Cu含有率例如為0.05質量%~10質量%,亦可為0.1質量%~5質量%或0.2質量%~3質量%。若Cu含有率為0.05質量%以上,則容易獲得能夠達成良好的焊料連接可靠性的焊料粒。另外,若Cu含有率為10質量%以下,則容易獲得熔點低、潤濕性優異的焊料粒,結果由焊料粒帶來的接合部的連接可靠性容易變得良好。The Cu content of the solder fine particles is, for example, 0.05% by mass to 10% by mass, or 0.1% by mass to 5% by mass or 0.2% by mass to 3% by mass. If the Cu content is 0.05% by mass or more, it is easy to obtain solder particles that can achieve good solder connection reliability. In addition, if the Cu content is 10% by mass or less, solder particles having a low melting point and excellent wettability are easily obtained, and as a result, the connection reliability of the joint portion due to the solder particles tends to be good.

焊料微粒的Ag含有率例如為0.05質量%~10質量%,亦可為0.1質量%~5質量%或0.2質量%~3質量%。若Ag含有率為0.05質量%以上,則容易獲得能夠達成良好的焊料連接可靠性的焊料粒。另外,若Ag含有率為10質量%以下,則容易獲得熔點低、潤濕性優異的焊料粒,結果由焊料粒帶來的接合部的連接可靠性容易變得良好。The Ag content of the solder fine particles is, for example, 0.05% by mass to 10% by mass, or 0.1% by mass to 5% by mass or 0.2% by mass to 3% by mass. If the Ag content is 0.05% by mass or more, it is easy to obtain solder particles that can achieve good solder connection reliability. In addition, if the Ag content is 10% by mass or less, it is easy to obtain solder particles having a low melting point and excellent wettability. As a result, the connection reliability of the joint portion due to the solder particles tends to be good.

於收納步驟中,於基體60的凹部62的各個中收納準備步驟中準備的焊料微粒。關於收納步驟,可為將準備步驟中準備的焊料微粒全部收納於凹部62中的步驟,可為將準備步驟中準備的焊料微粒的一部分(例如,焊料微粒中較凹部62的開口的寬度b而言更小者)收納於凹部62中的步驟。In the storage step, the solder particles prepared in the preparation step are stored in each of the recesses 62 of the base 60. Regarding the storage step, it may be a step of storing all the solder particles prepared in the preparation step in the concave portion 62, or may be a part of the solder particles prepared in the preparation step (for example, the width b of the opening of the concave portion 62 in the solder particles) If it is smaller, it is stored in the recess 62.

圖5是示意性地表示於基體60的凹部62中收納有焊料微粒111的狀態的剖面圖。如圖5所示,於多個凹部62的各個中收納有多個焊料微粒111。FIG. 5 is a cross-sectional view schematically showing a state in which the solder particles 111 are accommodated in the recess 62 of the base 60. As shown in FIG. 5, a plurality of solder particles 111 are stored in each of the plurality of recesses 62.

收納於凹部62中的焊料微粒111的量例如相對於凹部62的容積而較佳為20%以上,更佳為30%以上,進而佳為50%以上,最佳為60%以上。藉此可抑制收納量的偏差,容易獲得粒度分佈更小的焊料粒。The amount of the solder particles 111 stored in the recess 62 is preferably 20% or more, more preferably 30% or more, further preferably 50% or more, and most preferably 60% or more with respect to the volume of the recess 62, for example. This can suppress variations in the storage volume and easily obtain solder particles with a smaller particle size distribution.

將焊料微粒收納於凹部62中的方法並無特別限定。收納方法亦可為乾式、濕式的任一種。例如將準備步驟中準備的焊料微粒配置於基體60上,使用塗刮板(squeegee)摩擦基體60的表面60a,藉此可去除多餘的焊料微粒,同時於凹部62內收納充分的焊料微粒。於凹部62的開口的寬度b較凹部62的深度而言更大的情況下,有時焊料微粒自凹部62的開口飛出。若使用塗刮板,則自凹部62的開口飛出的焊料微粒被去除。 作為去除多餘的焊料微粒的方法,亦可列舉吹附壓縮空氣、利用不織布或纖維束摩擦基體60的表面60a等方法。該些方法與塗刮板相比,物理力弱,因此就處理容易變形的焊料微粒的方面而言較佳。另外,於該些方法中亦可將自凹部62的開口飛出的焊料微粒殘留於凹部內。The method of storing the solder particles in the recess 62 is not particularly limited. The storage method may be either dry or wet. For example, the solder particles prepared in the preparation step are arranged on the base 60, and the surface 60a of the base 60 is rubbed with a squeegee, whereby excess solder particles can be removed, and sufficient solder particles are accommodated in the recess 62. When the width b of the opening of the recess 62 is larger than the depth of the recess 62, solder particles may fly out of the opening of the recess 62. If a coating blade is used, the solder particles flying out of the opening of the recess 62 are removed. As a method of removing excess solder particles, a method of blowing compressed air, rubbing the surface 60a of the base 60 with a non-woven fabric or a fiber bundle, and the like can also be mentioned. These methods are weaker in physical force than coated squeegees, and therefore are preferable in terms of handling solder particles that are easily deformed. In addition, in these methods, solder particles flying out of the opening of the recess 62 may remain in the recess.

熔合步驟為使收納於凹部62中的焊料粒111熔合而於凹部62的內部形成焊料粒1的步驟。圖6是示意性地表示於基體60的凹部62形成有焊料粒1的狀態的剖面圖。收納於凹部62中的焊料微粒111藉由熔融而進行一體化,並藉由表面張力而形成球狀。此時,於凹部62的與底部62a的接觸部,熔融的焊料追隨底部62a而形成平面部11。藉此,形成的焊料粒1成為於表面的一部分具有平面部11的形狀。The fusing step is a step of fusing the solder particles 111 accommodated in the recess 62 to form the solder particles 1 inside the recess 62. FIG. 6 is a cross-sectional view schematically showing a state where the solder particles 1 are formed in the recess 62 of the base 60. The solder fine particles 111 accommodated in the recess 62 are integrated by melting and formed into a spherical shape by surface tension. At this time, in the contact portion of the recess 62 with the bottom 62a, molten solder follows the bottom 62a to form the flat portion 11. As a result, the formed solder particles 1 have a shape having a flat portion 11 on a part of the surface.

圖1是自與圖6中的凹部62的開口部相反之側觀察焊料粒1的圖。FIG. 1 is a view of the solder grain 1 viewed from the side opposite to the opening of the recess 62 in FIG. 6.

作為使收納於凹部62中的焊料微粒111熔融的方法,可列舉將焊料微粒111加熱至焊料的熔點以上的方法。焊料微粒111由於氧化被膜的影響而存在:即便於熔點以上的溫度下加熱亦不會熔融的情況、不會發生潤濕擴展的情況、無法進行一體化的情況。因此,將焊料微粒111暴露於還原環境下去除焊料微粒111的表面氧化被膜後,並加熱至焊料微粒111的熔點以上的溫度,藉此可使焊料微粒111進行熔融、潤濕擴展、一體化。另外,焊料微粒111的熔融較佳為於還原環境下進行。藉由將焊料微粒111加熱至焊料微粒111的熔點以上且設為還原環境,焊料微粒111的表面的氧化被膜被還原,容易有效地進行焊料微粒111的熔融、潤濕擴展、一體化。As a method of melting the solder fine particles 111 accommodated in the recess 62, a method of heating the solder fine particles 111 to the melting point of the solder or more can be mentioned. The solder fine particles 111 are affected by the oxide film: they do not melt even when heated at a temperature above the melting point, do not cause wetting and expansion, and cannot be integrated. Therefore, the solder fine particles 111 are exposed to a reducing environment to remove the surface oxide coating of the solder fine particles 111, and then heated to a temperature above the melting point of the solder fine particles 111, whereby the solder fine particles 111 can be melted, wetted, expanded, and integrated. In addition, the melting of the solder particles 111 is preferably performed in a reducing environment. By heating the solder particles 111 to the melting point of the solder particles 111 or more and setting it as a reducing environment, the oxide film on the surface of the solder particles 111 is reduced, and the solder particles 111 are easily and effectively melted, wet-spreaded, and integrated.

設為還原環境的方法只要為可獲得所述效果的方法,則並無特別限定,例如有使用氫氣、氫自由基、甲酸氣體等的方法。例如藉由使用氫還原爐、氫自由基還原爐、甲酸還原爐、或者該些的輸送式爐(conveyor furnace)或連續爐,可使焊料微粒111於還原環境下進行熔融。該些裝置可於爐內包括加熱裝置、填充有惰性氣體(氮、氬等)的腔室、將腔室內設為真空的機構等,藉此還原氣體的控制變得更容易。另外,若於腔室內形成真空,則於焊料微粒111的熔融及一體化後,可藉由減壓進行空隙的去除,可獲得連接穩定性更優異的焊料粒1。The method for setting the reduction environment is not particularly limited as long as it can obtain the above-mentioned effects, and for example, there are methods using hydrogen gas, hydrogen radicals, formic acid gas, and the like. For example, by using a hydrogen reduction furnace, a hydrogen radical reduction furnace, a formic acid reduction furnace, or these conveyor furnaces or continuous furnaces, the solder particles 111 can be melted in a reducing environment. These devices may include a heating device, a chamber filled with an inert gas (nitrogen, argon, etc.) in the furnace, a mechanism that sets the chamber to a vacuum, etc., thereby controlling the reducing gas becomes easier. In addition, if a vacuum is formed in the chamber, after melting and integration of the solder particles 111, voids can be removed by reduced pressure, and solder particles 1 having more excellent connection stability can be obtained.

焊料微粒111的還原、熔解條件、溫度、爐內環境調整等的設定檔可考慮焊料微粒111的熔點、粒度、凹部尺寸、基體60的材質等而適宜設定。例如將於凹部填充有焊料微粒111的基體60插入爐內進行抽真空後,導入還原氣體,以還原氣體充滿爐內並去除焊料微粒111的表面氧化被膜後,藉由抽真空去除還原氣體,之後加熱至焊料微粒111的熔點以上,使焊料微粒進行熔解及一體化,於凹部62內形成焊料粒後,填充氮氣後將爐內溫度恢復至室溫,從而可獲得焊料粒1。另外,例如將於凹部填充有焊料微粒111的基體60插入爐內進行抽真空後,導入還原氣體,以還原氣體充滿爐內,利用爐內加熱加熱器對焊料微粒111進行加熱並去除焊料微粒111的表面氧化被膜後,藉由抽真空去除還原氣體,之後加熱至焊料微粒111的熔點以上,使焊料微粒進行熔解及一體化,於凹部62內形成焊料粒後,填充氮氣後將爐內溫度恢復至室溫,從而可獲得焊料粒1。藉由在還原環境下對焊料微粒進行加熱,具有如下優點:還原力增加,容易去除焊料微粒的表面氧化被膜。The setting files of reduction, melting conditions, temperature, and furnace environment adjustment of the solder particles 111 can be appropriately set in consideration of the melting point, particle size, recess size, material of the substrate 60, etc. of the solder particles 111. For example, after inserting the substrate 60 filled with solder particles 111 into the furnace and evacuating the furnace, a reducing gas is introduced to fill the furnace with the reducing gas to remove the oxide film on the surface of the solder particles 111, and then the reducing gas is removed by vacuuming. After heating to the melting point of the solder particles 111 or more, the solder particles are melted and integrated, and the solder particles are formed in the recess 62. After filling with nitrogen, the temperature in the furnace is returned to room temperature to obtain the solder particles 1. In addition, for example, after inserting the substrate 60 filled with the solder particles 111 into the furnace and evacuating the furnace, a reducing gas is introduced to fill the furnace with the reducing gas, and the solder particles 111 are heated by the furnace heating heater to remove the solder particles 111 After the oxide film on the surface is removed by vacuum, the reducing gas is removed, and then heated to the melting point of the solder particles 111 or more, so that the solder particles are melted and integrated, and the solder particles are formed in the recess 62. After filling with nitrogen, the temperature in the furnace is restored To room temperature, the solder particles 1 can be obtained. By heating the solder particles in a reducing environment, it has the following advantages: the reducing power is increased, and the surface oxide film of the solder particles is easily removed.

進而,例如將於凹部填充有焊料微粒111的基體60插入爐內進行抽真空後,導入還原氣體,以還原氣體充滿爐內,利用爐內加熱加熱器將基體60加熱至焊料微粒111的熔點以上,藉由還原而去除焊料微粒111的表面氧化被膜,同時使焊料微粒進行熔解及一體化,於凹部62內形成焊料粒,藉由抽真空去除還原氣體,進而減少焊料粒內的空隙後,填充氮氣後將爐內溫度恢復至室溫,從而可獲得焊料粒1。於該情況下,爐內溫度的上昇、下降的調節可分別為一次,因此具有可以短時間進行處理的優點。Furthermore, for example, after inserting the substrate 60 filled with solder particles 111 into the furnace and evacuating the furnace, a reducing gas is introduced to fill the furnace with the reducing gas, and the substrate 60 is heated to above the melting point of the solder particles 111 by the furnace heating heater. , The surface oxide film of the solder particles 111 is removed by reduction, and the solder particles are melted and integrated at the same time to form solder particles in the recess 62, and the reducing gas is removed by vacuuming, thereby reducing the voids in the solder particles and filling After nitrogen gas, the temperature in the furnace is returned to room temperature, thereby obtaining solder particles 1. In this case, the adjustment of the rise and fall of the temperature in the furnace can be performed once, which has the advantage that it can be processed in a short time.

於所述凹部62內形成焊料粒後,添加再一次將爐內設為還原環境,去除未完全去除的表面氧化被膜的步驟,可減少未熔合而殘留的焊料微粒、或未熔合而殘留的氧化被膜的一部分等殘渣。After the solder particles are formed in the concave portion 62, a step of setting the furnace inside again as a reducing environment to remove the surface oxide film that has not been completely removed can reduce solder particles remaining without fusion or oxidation remaining without fusion Residues such as part of the coating.

於使用大氣壓的輸送式爐的情況下,可將於凹部填充有焊料微粒111的基體60載置於搬送用輸送機上,使其連續通過多個區域而獲得焊料粒1。例如,將於凹部填充有焊料微粒111的基體60載置於設定為一定速度的輸送機上,通過充滿了溫度低於焊料微粒111的熔點的氮或氬等惰性氣體的區域,繼而通過溫度低於焊料微粒111的熔點的甲酸氣體等還原氣體所存在的區域,去除焊料微粒111的表面氧化被膜,繼而通過充滿了溫度為焊料微粒111的熔點以上的氮或氬等惰性氣體的區域,使焊料微粒111進行熔融、一體化,繼而通過充滿了氮或氬等惰性氣體的冷卻區域,從而可獲得焊料粒1。例如,將於凹部填充有焊料微粒111的基體60載置於設定為一定速度的輸送機上,通過充滿了溫度為焊料微粒111的熔點以上的氮或氬等惰性氣體的區域,繼而通過溫度為焊料微粒111的熔點以上的甲酸氣體等還原氣體所存在的區域,去除焊料微粒111的表面氧化被膜,進行熔融、一體化,繼而通過充滿了氮或氬等惰性氣體的冷卻區域,從而可獲得焊料粒1。所述輸送式爐由於能夠於大氣壓下進行處理,故亦可以輥對輥連續地對膜狀的材料進行處理。例如,製作於凹部填充有焊料微粒111的基體60的連續捲製品,於輸送式爐的入口側設置卷捲出機,於輸送式爐的出口側設置卷捲繞機,並以一定速度搬送基體60,使其通過輸送式爐內的各區域,藉此可使填充至凹部的焊料微粒111進行熔合。In the case of using a conveyor furnace of atmospheric pressure, the base 60 filled with the solder fine particles 111 in the concave portion can be placed on a conveyor for conveyance, and the solder particles 1 can be obtained by continuously passing through a plurality of areas. For example, the substrate 60 filled with the solder particles 111 in the concave portion is placed on a conveyor set at a constant speed, and then passed through an area filled with an inert gas such as nitrogen or argon whose temperature is lower than the melting point of the solder particles 111, and then passes through the low temperature In the area where the reducing gas such as formic acid gas at the melting point of the solder particles 111 exists, the surface oxide film of the solder particles 111 is removed, and then the area is filled with an inert gas such as nitrogen or argon whose temperature is higher than the melting point of the solder particles 111 to make the solder The fine particles 111 are melted and integrated, and then pass through a cooling area filled with an inert gas such as nitrogen or argon, whereby the solder particles 1 can be obtained. For example, a substrate 60 filled with solder particles 111 in a recessed portion is placed on a conveyor set at a constant speed, filled with an inert gas such as nitrogen or argon whose temperature is above the melting point of the solder particles 111, and then passed through Solder particles 111 are melted and integrated in the area where reducing gas such as formic acid gas above the melting point of the solder particles 111 is removed, and then melted and integrated. Then, the cooling area filled with inert gas such as nitrogen or argon can be used to obtain solder Grain 1. Since the conveying furnace can be processed under atmospheric pressure, the film-like material can also be processed continuously on a roll-to-roll basis. For example, a continuous roll product made in a substrate 60 in which recesses are filled with solder particles 111 is provided with a coiler at the entrance side of the conveyor furnace, and a coiler at the outlet side of the conveyor furnace, and the substrate is transported at a constant speed 60, passing through each area in the conveyor furnace, whereby the solder particles 111 filled in the recesses can be fused.

所形成的焊料粒1可自凹部62取出而加以回收並供於焊料膏的製備。圖7是表示以所述方式獲得的焊料粒的一例的SEM像。再者,焊料粒1可以收納於基體60的凹部62中的狀態加以搬運·保管等。The formed solder particles 1 can be taken out from the concave portion 62 to be recovered and used for preparation of solder paste. 7 is an SEM image showing an example of the solder particles obtained in the above manner. In addition, the solder particles 1 can be transported, stored, or the like while being accommodated in the recess 62 of the base 60.

若為本實施形態的製造方法,則無論焊料微粒的材質及形狀如何,均可形成尺寸均勻的焊料粒。例如,銦系焊料能夠藉由鍍敷來析出,但難以以粒子狀析出,柔軟且難以處理。但是,於本實施形態的製造方法中,藉由將銦系焊料微粒用作原料,可容易地製造具有均勻粒徑的銦系焊料粒。另外,所形成的焊料粒1可以收納於基體60的凹部62中的狀態進行操作,因此可於不使焊料粒變形的情況下進行搬運·保管等。進而,由於所形成的焊料粒1僅為收納於基體60的凹部62中的狀態,故容易取出,且可於不使焊料粒變形的情況下進行回收·表面處理等。According to the manufacturing method of this embodiment, regardless of the material and shape of the solder particles, solder particles of uniform size can be formed. For example, indium-based solder can be deposited by plating, but it is difficult to precipitate in particles, and it is soft and difficult to handle. However, in the production method of the present embodiment, by using indium-based solder fine particles as a raw material, indium-based solder particles having a uniform particle diameter can be easily produced. In addition, the formed solder grains 1 can be handled while being accommodated in the recess 62 of the base body 60, and therefore can be transported and stored without deforming the solder grains. Furthermore, since the formed solder particles 1 are only in a state of being accommodated in the recess 62 of the base 60, they are easy to take out, and they can be recovered and surface-treated without deforming the solder particles.

另外,焊料微粒111可於粒度分佈方面偏差大,形狀亦可歪曲,若可收納於凹部62內,則可用作本實施形態的製造方法的原料。In addition, the solder fine particles 111 may have a large deviation in particle size distribution, and the shape may be distorted. If it can be accommodated in the recess 62, it can be used as a raw material for the manufacturing method of this embodiment.

另外,關於本實施形態的製造方法,基體60可利用微影法、壓印法、電子束加工法、放射線加工法、機械加工法等自如地設計凹部62的形狀。由於焊料粒1的尺寸依賴於收納於凹部62中的焊料微粒111的量,故於本實施形態的製造方法中,可藉由凹部62的設計自如地設計焊料粒1的尺寸。In addition, regarding the manufacturing method of the present embodiment, the base 60 can freely design the shape of the recess 62 using a lithography method, an imprint method, an electron beam processing method, a radiation processing method, a machining method, or the like. Since the size of the solder particles 1 depends on the amount of the solder particles 111 stored in the recess 62, in the manufacturing method of this embodiment, the size of the solder particles 1 can be freely designed by the design of the recess 62.

以上,對本發明的較佳的實施形態進行了說明,但本發明並不限定於所述實施形態。 [實施例]The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments. [Example]

以下,藉由實施例對本發明進一步進行詳細說明,但本發明並不限定於該些實施例。Hereinafter, the present invention will be further described in detail through examples, but the present invention is not limited to these examples.

<焊料粒的製作> [實施例1] (步驟a1:焊料微粒的分級) 將Sn-Bi焊料微粒(5N Plus公司製造,熔點139℃,Type8)100 g浸漬於蒸餾水進行超音波分散後,加以靜置並回收懸浮於上清液中的焊料微粒。重覆進行該操作,回收10 g的焊料微粒。所獲得的焊料微粒的平均粒徑為1.0 μm,C.V.值為42%。 (步驟b1:於基體的配置) 準備具有多個開口直徑1.2 μmϕ、底部直徑1.0 μmϕ、深度1.0 μm(關於底部直徑1.0 μmϕ,自上表面觀察開口部時位於開口直徑1.2 μmϕ的中央)的凹部的基體(聚醯亞胺膜,厚100 μm)。多個凹部以1.0 μm的間隔有規則地排列。將步驟a中獲得的焊料微粒(平均粒徑1.0 μm,C.V.值42%)配置於基體的凹部。再者,藉由利用微黏著輥摩擦基體的形成有凹部的面側,去除多餘的焊料微粒,從而獲得僅於凹部內配置有焊料微粒的基體。 (步驟c1:焊料粒的形成) 將步驟b1中於凹部配置有焊料微粒的基體放入氫還原爐,抽真空後向爐內導入氫氣,以氫充滿爐內。之後將爐內於280℃下保持20分鐘後,再次抽成真空,導入氮並恢復至大氣壓後將爐內的溫度降低至室溫為止,藉此形成焊料粒。<Production of solder pellets> [Example 1] (Step a1: Classification of solder particles) 100 g of Sn-Bi solder particles (manufactured by 5N Plus, melting point 139°C, Type 8) were immersed in distilled water for ultrasonic dispersion, and then allowed to stand and recover the solder particles suspended in the supernatant. This operation was repeated, and 10 g of solder particles were recovered. The average particle diameter of the obtained solder particles was 1.0 μm, and the C.V. value was 42%. (Step b1: placement on the substrate) Prepare a substrate (polyimide film, which has multiple recesses with an opening diameter of 1.2 μm, a bottom diameter of 1.0 μm ϕ, and a depth of 1.0 μm (the bottom diameter is 1.0 μm ϕ, which is located at the center of the opening diameter of 1.2 μm ϕ when the opening is viewed from the upper surface). 100 μm thick). The multiple recesses are regularly arranged at intervals of 1.0 μm. The solder fine particles (average particle diameter 1.0 μm, C.V. value 42%) obtained in step a were arranged in the concave portion of the substrate. Furthermore, by rubbing the surface of the base body on which the recesses are formed with the micro-adhesion roller, excess solder particles are removed, thereby obtaining a substrate in which solder particles are arranged only in the recesses. (Step c1: Formation of solder particles) In step b1, the substrate in which the solder particles are arranged in the concave portion is placed in a hydrogen reduction furnace, and after evacuation, hydrogen gas is introduced into the furnace to fill the furnace with hydrogen. After the furnace was kept at 280°C for 20 minutes, vacuum was drawn again, nitrogen was introduced and the atmospheric pressure was restored, and the temperature in the furnace was reduced to room temperature to form solder particles.

再者,藉由自凹部背側敲擊經過步驟c1的基體,自凹部回收焊料粒。利用下述方法觀察獲得的焊料粒。於固定於掃描式電子顯微鏡(SEM)觀察用台座表面的導電膠帶上載置所獲得的焊料粒,於厚度5 mm的不鏽鋼板上敲擊SEM觀察用台座而使焊料粒於導電膠帶上均勻地擴展。之後對導電膠帶表面吹附壓縮氮氣,將焊料粒以單層固定於導電膠帶上。將觀察結果示於圖7。圖7是藉由實施例1而獲得的焊料粒的SEM像。如該圖所示,所獲得的焊料粒具有於球的表面的一部分形成有平面部的形狀。再者,其他實施例中獲得的焊料粒亦具有相同的形狀。Furthermore, by tapping the substrate passing through step c1 from the back side of the recessed portion, the solder particles are recovered from the recessed portion. Observe the obtained solder particles by the following method. Place the obtained solder particles on the conductive tape fixed on the surface of the scanning electron microscope (SEM) observation stand, and tap the SEM observation stand on a 5 mm thick stainless steel plate to spread the solder particles uniformly on the conductive tape . Then, compressed nitrogen is blown onto the surface of the conductive tape to fix the solder particles on the conductive tape in a single layer. The observation result is shown in Fig. 7. 7 is an SEM image of solder particles obtained in Example 1. FIG. As shown in the figure, the obtained solder particles have a shape in which a flat portion is formed on a part of the surface of the ball. Furthermore, the solder particles obtained in other embodiments also have the same shape.

<焊料粒的評價> 於以與經過步驟c1的基體的凹部相對向的方式貼附導電膠帶後進行剝離,藉此獲得焊料粒的平面部與導電膠帶面平行排列的觀察用樣品。對該觀察用樣品的配置有焊料粒的面實施Pt濺鍍後,進行SEM觀察。觀察300個焊料粒,算出焊料粒的平均直徑B(平均粒徑)、平面部的平均直徑A、C.V.值、真圓度、A/B及Y/X。將結果示於表1。 真圓度:焊料粒的兩個同心圓(最小外切圓的半徑r、最大內切圓的半徑R)的半徑之比r/R。 A/B:平面部的直徑A相對於焊料粒的直徑B之比。 Y/X:於利用兩對平行線製成與焊料粒的投影像外切的四邊形的情況下,於將相向的邊間的距離設為X及Y(其中Y<X)時的Y相對於X之比。<Evaluation of solder particles> After attaching the conductive tape so as to face the concave portion of the substrate passing through the step c1 and peeling off, a sample for observation in which the plane portion of the solder particles and the surface of the conductive tape are arranged in parallel is obtained. After the surface of the observation sample on which the solder particles were arranged was subjected to Pt sputtering, SEM observation was performed. Observing 300 solder particles, the average diameter B (average particle diameter) of the solder particles, the average diameter A, C.V. value, roundness, A/B, and Y/X of the plane portion were calculated. The results are shown in Table 1. Roundness: the ratio r/R of the radius of the two concentric circles of the solder particles (the radius r of the smallest circumscribed circle and the radius R of the largest inscribed circle). A/B: The ratio of the diameter A of the flat surface to the diameter B of the solder particles. Y/X: When using two pairs of parallel lines to make a quadrilateral circumscribed from the projected image of the solder particles, Y is relative to Y when the distance between the opposing sides is X and Y (where Y<X) X ratio.

[實施例2~實施例12] 如表1記載般變更凹部尺寸,除此以外與實施例1同樣地製作焊料粒,並實施焊料粒的評價。[Example 2 to Example 12] Except for changing the size of the concave portion as described in Table 1, solder pellets were produced in the same manner as in Example 1, and the solder pellets were evaluated.

<焊料膏的製作> [製作例1] 將YL980(三菱化學股份有限公司製造,雙酚A型環氧樹脂的商品名)16.0質量份、2P4MHZ-PW(四國化成股份有限公司製造,咪唑化合物的商品名)0.8質量份、及作為助焊劑活性劑的己二酸3.2質量份混合,將混合物通過三次三根輥而製備接著劑成分。<Production of solder paste> [Production Example 1] 16.0 parts by mass of YL980 (manufactured by Mitsubishi Chemical Co., Ltd., bisphenol A type epoxy resin), 0.8 parts by mass of 2P4MHZ-PW (manufactured by Shikoku Chemicals Co., Ltd., trade name of imidazole compounds), and 3.2 parts by mass of adipic acid of the flux activator were mixed, and the mixture was passed through three rolls three times to prepare an adhesive component.

其次,相對於接著劑成分20質量份,加入實施例1中製作的於球的表面的一部分形成有平面部的Sn-Bi焊料粒80質量份,利用行星式混合機將獲得的混合物攪拌混煉,於500 Pa以下進行10分鐘脫泡處理,藉此獲得焊料膏。Next, with respect to 20 parts by mass of the adhesive component, 80 parts by mass of Sn-Bi solder particles having a flat portion formed on a part of the surface of the ball prepared in Example 1 were added, and the obtained mixture was stirred and kneaded with a planetary mixer , Defoaming treatment is performed at 500 Pa or less for 10 minutes to obtain solder paste.

[製作例2~製作例12] 使用藉由實施例2~實施例12而獲得的於球的表面的一部分形成有平面部的Sn-Bi焊料粒,除此以外利用與製作例1相同的方法進行焊料膏的製作。[Production Example 2 to Production Example 12] Except for using Sn-Bi solder particles having flat portions formed on part of the surface of the balls obtained in Examples 2 to 12, the solder paste was produced by the same method as in Production Example 1.

[製作例13] 將YL980(三菱化學股份有限公司製造,雙酚A型環氧樹脂的商品名)16.7質量份、2P4MHZ-PW(四國化成股份有限公司製造,咪唑化合物的商品名)0.8質量份、及作為助焊劑活性劑的己二酸2.5質量份混合,將混合物通過三次三根輥而製備接著劑成分。[Production Example 13] 16.7 parts by mass of YL980 (manufactured by Mitsubishi Chemical Corporation, bisphenol A type epoxy resin), 0.8 parts by mass of 2P4MHZ-PW (manufactured by Shikoku Chemicals Co., Ltd., trade name of imidazole compounds), and 2.5 parts by mass of adipic acid of the flux activator were mixed, and the mixture was passed through three rollers three times to prepare an adhesive component.

其次,相對於接著劑成分20質量份,加入實施例5中製作的於球的表面的一部分形成有平面部的Sn-Bi焊料粒80質量份,利用行星式混合機將獲得的混合物攪拌混煉,於500 Pa以下進行10分鐘脫泡處理,藉此獲得焊料膏。Next, with respect to 20 parts by mass of the adhesive component, 80 parts by mass of Sn-Bi solder particles having a flat portion formed on a part of the surface of the ball produced in Example 5 were added, and the obtained mixture was stirred and kneaded with a planetary mixer , Defoaming treatment is performed at 500 Pa or less for 10 minutes to obtain solder paste.

[比較製作例1] 代替於球的表面的一部分形成有平面部的Sn-Bi焊料粒而使用不具有此種平面部的SnBi焊料粒(三井金屬股份有限公司製造的「ST-3」),除此以外利用與製作例1相同的方法進行焊料膏的製作。再者,該SnBi焊料粒的平均粒徑為4 μm,C.V.值為31%。[Comparative Production Example 1] Instead of using Sn-Bi solder particles with a flat surface formed on a part of the surface of the ball, use SnBi solder particles without such a flat portion ("ST-3" manufactured by Mitsui Metals Co., Ltd.), and use and manufacture The solder paste was produced in the same manner as in Example 1. Furthermore, the average particle diameter of the SnBi solder particles was 4 μm, and the C.V. value was 31%.

[比較製作例2] 代替於球的表面的一部分形成有平面部的Sn-Bi焊料粒而使用不具有此種平面部的SnBi焊料粒(三井金屬股份有限公司製造的「Type-4」),除此以外利用與製作例1相同的方法進行焊料膏的製作。再者,該SnBi焊料粒的平均粒徑為26 μm,C.V.值為25%。[Comparative Production Example 2] Instead of using Sn-Bi solder grains with a planar portion formed on a part of the surface of the ball, use SnBi solder grains ("Type-4" manufactured by Mitsui Metals Co., Ltd.) that do not have such a planar portion, and use and manufacture otherwise The solder paste was produced in the same manner as in Example 1. Furthermore, the average particle diameter of the SnBi solder particles was 26 μm, and the C.V. value was 25%.

[比較製作例3] 將YL980(三菱化學股份有限公司製造,雙酚A型環氧樹脂的商品名)15.4質量份、2P4MHZ-PW(四國化成股份有限公司製造,咪唑化合物的商品名)0.8質量份、及作為助焊劑活性劑的己二酸3.9質量份混合,將混合物通過三次三根輥而製備接著劑成分。[Comparative Production Example 3] 15.4 parts by mass of YL980 (manufactured by Mitsubishi Chemical Corporation, bisphenol A type epoxy resin), 0.8 parts by mass of 2P4MHZ-PW (manufactured by Shikoku Chemicals Co., Ltd., product name of imidazole compound), and 3.9 parts by mass of adipic acid of the flux activator were mixed, and the mixture was passed through three rollers three times to prepare an adhesive component.

其次,相對於接著劑成分20質量份,如所述般加入80質量份的不具有平面部的SnBi焊料粒(三井金屬股份有限公司製造的「ST-3」),利用行星式混合機將獲得的混合物攪拌混煉,於500 Pa以下進行10分鐘脫泡處理,藉此獲得焊料膏。Next, with respect to 20 parts by mass of the adhesive component, 80 parts by mass of SnBi solder particles ("ST-3" manufactured by Mitsui Metals Co., Ltd.) without plane parts were added as described above, and the planetary mixer was used to obtain The mixture was stirred and kneaded, and defoamed at 500 Pa or less for 10 minutes to obtain solder paste.

[比較製作例4] 將YL980(三菱化學股份有限公司製造,雙酚A型環氧樹脂的商品名)16.7質量份、2P4MHZ-PW(四國化成股份有限公司製造,咪唑化合物的商品名)0.8質量份、及作為助焊劑活性劑的己二酸2.5質量份混合,將混合物通過三次三根輥而製備接著劑成分。[Comparative Production Example 4] 16.7 parts by mass of YL980 (manufactured by Mitsubishi Chemical Corporation, bisphenol A type epoxy resin), 0.8 parts by mass of 2P4MHZ-PW (manufactured by Shikoku Chemicals Co., Ltd., trade name of imidazole compounds), and 2.5 parts by mass of adipic acid of the flux activator were mixed, and the mixture was passed through three rollers three times to prepare an adhesive component.

其次,相對於接著劑成分20質量份,如所述般加入80質量份的不具有平面部的SnBi焊料粒(三井金屬股份有限公司製造的「ST-3」),利用行星式混合機將獲得的混合物攪拌混煉,於500 Pa以下進行10分鐘脫泡處理,藉此獲得焊料膏。Next, with respect to 20 parts by mass of the adhesive component, 80 parts by mass of SnBi solder particles ("ST-3" manufactured by Mitsui Metals Co., Ltd.) without plane parts were added as described above, and the planetary mixer was used to obtain The mixture was stirred and kneaded, and defoamed at 500 Pa or less for 10 minutes to obtain solder paste.

利用下述方法測定所述製作例及比較製作例的焊料膏的特性。將其結果匯總並示於表2。The characteristics of the solder pastes of the production examples and the comparative production examples were measured by the following methods. The results are summarized and shown in Table 2.

(1)接著強度的評價 於帶鍍銀的銅板(10 mm×15 mm,厚度:0.20 mm)上塗佈0.5 mg的焊料膏,於其上積層矩形平板狀的帶鍍錫的銅晶片(2 mm×2 mm,厚度0.25 mm)後,使用加熱板施加150℃、10分鐘的熱歷程,從而獲得試驗片。對於該試驗片使用接合測試機(DAGE公司製造,2400),於剪切速度500 μm/sec、間隙100 μm的條件下測定25℃下的剪切強度。(1) Evaluation of subsequent strength A silver plated copper plate (10 mm×15 mm, thickness: 0.20 mm) was coated with 0.5 mg of solder paste, and a rectangular flat plate-shaped tinned copper wafer (2 mm×2 mm, thickness 0.25) was deposited thereon. mm), apply a heat history of 150°C for 10 minutes using a hot plate to obtain a test piece. For this test piece, a bonding tester (manufactured by DAGE Corporation, 2400) was used, and the shear strength at 25° C. was measured under the conditions of a shear rate of 500 μm/sec and a gap of 100 μm.

(2)溫度循環試驗 準備具備相鄰的兩個銅箔焊盤(0.2 mm×0.4 mm)、且銅箔焊盤間的距離為100 μm的100 mm×50 mm×0.5 mm的矩形平板狀的薄型FR4基板。繼而,使用金屬遮罩(厚度100 μm,開口尺寸0.2 mm×0.3 mm)將焊料膏印刷至銅箔焊盤上,搭載電極間距離為100 μm的小型晶片電阻(0.2 mm×0.4 mm)。對該零件搭載基板施加與所述(1)相同的熱歷程,從而獲得耐TCT性評價用的試驗基板。使用簡易測試機確認該試驗基板的初期電阻後,投入至熱衝擊試驗機(1循環:於-55℃下保持30分鐘,花5分鐘昇溫至125℃為止,於125℃下保持30分鐘,花5分鐘降溫至-55℃為止),來測定連接電阻。耐TCT性的評價是以相對於初期電阻顯示±10%以內的電阻變化率的循環數為指標。(2) Temperature cycle test A thin rectangular FR4 substrate with a rectangular flat plate shape of 100 mm×50 mm×0.5 mm with two adjacent copper foil pads (0.2 mm×0.4 mm) and a distance between the copper foil pads of 100 μm is prepared. Next, a metal mask (thickness 100 μm, opening size 0.2 mm×0.3 mm) was used to print the solder paste onto the copper foil pad, and a small chip resistor (0.2 mm×0.4 mm) with a distance of 100 μm between electrodes was mounted. A test substrate for evaluation of TCT resistance was obtained by applying the same thermal history as in (1) above to this component mounting substrate. After confirming the initial resistance of the test substrate using a simple test machine, it was put into a thermal shock test machine (1 cycle: held at -55°C for 30 minutes and heated for 5 minutes to 125°C, held at 125°C for 30 minutes and spent Cool down to -55°C for 5 minutes) to measure the connection resistance. The evaluation of TCT resistance is based on the number of cycles showing a resistance change rate within ±10% relative to the initial resistance.

(3)絕緣電阻試驗 於測定利用與所述(2)相同的方法而製作的零件搭載基板的絕緣電阻值後,實施遷移試驗(溫度60℃、濕度90%、施加50 V)。耐遷移性的評價是以藉由電極間的洩漏發生,絕緣電阻值顯示109 Ω以下的試驗時間為指標。(3) Insulation resistance test After measuring the insulation resistance value of the component mounting board produced by the same method as (2) above, a migration test (temperature 60°C, humidity 90%, 50 V applied) was performed. The evaluation of the migration resistance is based on the test time in which the leakage between the electrodes occurs and the insulation resistance value shows 10 9 Ω or less.

製作例1~製作例13中均顯示出良好的接著強度,溫度循環試驗、絕緣電阻試驗均顯示出良好的結果。All of Production Examples 1 to 13 showed good adhesion strength, and both the temperature cycle test and the insulation resistance test showed good results.

比較製作例1、比較製作例2中確認到接著強度明顯降低,耐溫度循環性降低。In Comparative Production Example 1 and Comparative Production Example 2, it was confirmed that the subsequent strength was significantly reduced and the temperature cycle resistance was reduced.

比較製作例3中雖發現由助焊劑成分增加帶來的連接性的提高,但確認到由遷移引起的絕緣性降低。In Comparative Production Example 3, although the improvement in connectivity due to the increase in the flux component was found, it was confirmed that the insulation property due to migration decreased.

比較製作例4中雖發現由助焊劑成分減少帶來的絕緣可靠性的提高,但確認到由焊料潤濕性的降低引起的連接強度降低與耐溫度循環性的降低。In Comparative Production Example 4, although the improvement in insulation reliability due to the reduction in the flux component was found, it was confirmed that the connection strength decreased and the temperature cycle resistance decreased due to the decrease in solder wettability.

於製作例5與比較製作例1中儘管使用平均粒徑4 μm的焊料粒,但於受到焊料粒的潤濕擴展性影響的連接強度、及連接可靠性方面發現差異。評價製作例5與比較製作例1的潤濕擴展性。Although the solder particles having an average particle diameter of 4 μm were used in Production Example 5 and Comparative Production Example 1, differences were found in connection strength and connection reliability affected by the wettability of the solder particles. The wettability of Production Example 5 and Comparative Production Example 1 were evaluated.

使用印刷用金屬遮罩(開口:5 mm×5 mm,厚度:0.1 mm)於軋製銅箔(10 mm×15 mm,厚度:0.04 mm)上印刷規定量的焊料膏,並使用加熱板施加150℃、3分鐘的熱歷程,評價潤濕擴展性。將潤濕擴展性評價結果示於圖8(a)、圖8(b)。Use a metal mask for printing (opening: 5 mm×5 mm, thickness: 0.1 mm) to print a specified amount of solder paste on the rolled copper foil (10 mm×15 mm, thickness: 0.04 mm) and apply it using a hot plate A heat history of 150°C for 3 minutes was used to evaluate the wettability and spreadability. The evaluation results of wettability and expansion are shown in FIGS. 8(a) and 8(b).

圖8(a)是表示製作例5的潤濕擴展性的圖。可確認到維持印刷後的形狀即正方形,並且迅速潤濕擴展至銅箔。FIG. 8( a) is a diagram showing the wetting spreadability of Production Example 5. FIG. It can be confirmed that the shape after printing is maintained as a square, and it quickly wets and spreads to the copper foil.

圖8(b)是表示比較製作例1的潤濕擴展性的圖。可確認到對銅箔的潤濕擴展性差,稀疏地進行潤濕擴展。FIG. 8( b) is a diagram showing the wet spreadability of Comparative Production Example 1. FIG. It was confirmed that the wettability and spreadability to the copper foil was poor, and the wettability and spread were performed sparsely.

[表1]

Figure 108122478-A0304-0001
[Table 1]
Figure 108122478-A0304-0001

[表2]

Figure 108122478-A0304-0002
[Table 2]
Figure 108122478-A0304-0002

1‧‧‧焊料粒 11‧‧‧平面部 60‧‧‧基體 60a‧‧‧表面 62‧‧‧凹部 62a‧‧‧底部 111‧‧‧焊料微粒 A‧‧‧直徑 a‧‧‧寬度 B‧‧‧直徑 b‧‧‧寬度1‧‧‧ solder particles 11‧‧‧ Plane Department 60‧‧‧Matrix 60a‧‧‧Surface 62‧‧‧recess 62a‧‧‧Bottom 111‧‧‧ solder particles A‧‧‧Diameter a‧‧‧Width B‧‧‧Diameter b‧‧‧Width

圖1是示意性地表示焊料粒的一例的圖。 圖2是表示利用兩對平行線製成與焊料粒的投影像外切的四邊形時、相向的邊間的距離X及Y(其中Y≦X)的圖。 圖3(a)是示意性地表示基體的一例的平面圖,圖3(b)是圖3(a)所示的IIIb-IIIb線的剖面圖。 圖4(a)~圖4(d)是示意性地表示基體的凹部的剖面形狀的例子的剖面圖。 圖5是示意性地表示於基體的凹部收納有焊料微粒的狀態的剖面圖。 圖6是示意性地表示於基體的凹部形成有焊料粒的狀態的剖面圖。 圖7是表示焊料粒的一例的SEM像。 圖8(a)、圖8(b)是表示潤濕擴展性評價結果的圖。FIG. 1 is a diagram schematically showing an example of solder particles. FIG. 2 is a diagram showing the distances X and Y (where Y≦X) between the opposing sides when a quadrilateral that is circumscribed from the projection image of the solder particles is formed by using two pairs of parallel lines. FIG. 3( a) is a plan view schematically showing an example of the base, and FIG. 3( b) is a cross-sectional view taken along the line IIIb-IIIb shown in FIG. 3( a ). 4( a) to 4 (d) are cross-sectional views schematically showing examples of the cross-sectional shape of the concave portion of the base. 5 is a cross-sectional view schematically showing a state in which solder fine particles are accommodated in a concave portion of a base. FIG. 6 is a cross-sectional view schematically showing a state where solder particles are formed in the concave portion of the base. 7 is an SEM image showing an example of solder particles. 8(a) and 8(b) are diagrams showing the evaluation results of wettability and spreadability.

1‧‧‧焊料粒 1‧‧‧ solder particles

11‧‧‧平面部 11‧‧‧ Plane Department

A‧‧‧直徑 A‧‧‧Diameter

B‧‧‧直徑 B‧‧‧Diameter

Claims (6)

一種焊料膏,包含焊料粒與助焊劑, 所述焊料粒於表面的一部分具有平面部。A solder paste, containing solder particles and flux, The solder particles have a flat portion on a part of the surface. 如申請專利範圍第1項所述的焊料膏,其中所述焊料粒的平均粒徑為1 μm~30 μm,且變異係數值為20%以下。The solder paste as described in item 1 of the patent application, wherein the average particle diameter of the solder particles is 1 μm to 30 μm, and the coefficient of variation value is 20% or less. 如申請專利範圍第1項或第2項所述的焊料膏,其中所述平面部的直徑A相對於所述焊料粒的直徑B的比(A/B)滿足下述式, 0.01<A/B<1.0。The solder paste according to item 1 or item 2 of the patent application range, wherein the ratio (A/B) of the diameter A of the planar portion to the diameter B of the solder particles satisfies the following formula, 0.01<A/B<1.0. 如申請專利範圍第1項至第3項中任一項所述的焊料膏,於利用兩對平行線製成與所述焊料粒的投影像外切的四邊形的情況下,將相向的邊間的距離設為X及Y(其中Y<X)時,X及Y滿足下述式, 0.8<Y/X<1.0。For the solder paste as described in any one of the first to third patent applications, when two quadrilaterals are used to form a quadrilateral circumscribed from the projected image of the solder particles, the opposing sides When the distance is set to X and Y (where Y <X), X and Y satisfy the following formula, 0.8<Y/X<1.0. 如申請專利範圍第1項至第4項中任一項所述的焊料膏,其中所述焊料粒包含選自由錫、錫合金、銦及銦合金所組成的群組中的至少一種。The solder paste according to any one of claims 1 to 4, wherein the solder particles include at least one selected from the group consisting of tin, tin alloy, indium, and indium alloy. 如申請專利範圍第5項所述的焊料膏,其中所述焊料粒包含選自由In-Sn合金、In-Sn-Ag合金、In-Bi合金、Sn-Au合金、Sn-Bi合金、Sn-Bi-Ag合金、Sn-Ag-Cu合金及Sn-Cu合金所組成的群組中的至少一種錫合金。The solder paste as described in item 5 of the patent application range, wherein the solder particles comprise a material selected from the group consisting of In-Sn alloy, In-Sn-Ag alloy, In-Bi alloy, Sn-Au alloy, Sn-Bi alloy, Sn- At least one tin alloy in the group consisting of Bi-Ag alloy, Sn-Ag-Cu alloy, and Sn-Cu alloy.
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