TW201942972A - Processing device allowing an operator to clean the workpiece with a clean cleaning member without cleaning the cleaning member - Google Patents

Abstract

When cleaning a lower surface of a plate-like workpiece, an operator can continue to clean the workpiece with a clean cleaning member without cleaning the cleaning member. A processing device 1 includes: a processing means 7, for grinding a workpiece held by a holding means 30; a moving-out means 4 for separating the processed workpiece from a holding surface 300a in a direction orthogonal to the holding surface 300a; a cleaning mechanism 8 for cleaning a lower surface of the workpiece; and a moving means 14 for driving the moving-out means 4 and the cleaning mechanism 8 to move relatively in the direction of the holding surface. The cleaning mechanism 8 includes a drum cleaning member 80 extending in a direction intersecting with the moving direction of the moving means 14 and parallel to the holding surface 300a; a rotating means 81; a bucket 82 formed with an exposed portion that exposes a part of a side surface of the drum cleaning member 80 in the extending direction, and immerses the portions other than the exposed portion of the drum cleaning member 80 with water; and a water supply source 8 for storing water in the bucket 82. Water is overflowed from the upper part of the bucket 82, and the lower surface of the workpiece held by the moving-out means 4 abuts against the exposed portion of the drum cleaning member 80 that is fully rotated in the bucket 82 for cleaning.

Description

Processing device

The invention relates to a processing device for processing a plate-shaped workpiece.

A grinding device for grinding a plate-like workpiece is a plate-like workpiece that rotates a grinding wheel provided with a grinding grinding ring in an annular shape and grinds the grinding wheel to hold the holding surface of a holding table. Before removing the ground plate-shaped workpiece from the holding table, the surface to be ground is washed on the holding table, and then the plate-shaped workpiece is held by the lifting means, the plate-shaped workpiece is separated from the holding table, and a cleaning brush (for example, See Patent Document 1) or the cleaning sponge cleans the lower surface (the held surface) of the plate-like workpiece held on the holding table.

[Xizhi technical literature]
[Patent Literature]
[Patent Document 1] Japanese Patent Application Laid-Open No. 2003-045841.

[Problems to be Solved by the Invention]
However, when cleaning the lower surface of the plate-shaped workpiece, the dust attached to the plate-shaped workpiece may adhere to the cleaning brush or the cleaning sponge. In addition, the dust adheres to the plate-shaped workpiece again, so that the plate-shaped workpiece cannot be sufficiently cleaned. To prevent this situation, the operator will regularly clean the cleaning brush or sponge.
Therefore, when the lower surface (retained surface) of the plate-shaped workpiece after cleaning is processed, there is a case where the operator can continue the cleaning operation with a clean cleaning member without performing a cleaning operation such as a cleaning brush or a cleaning sponge. The problem of cleaning plate-shaped workpieces continues.

[Technical means to solve the problem]
In order to solve the above-mentioned problems, the present invention is a processing device including: a processing means, a plate-like workpiece held by a grinding stone grinding or a grinding pad grinding to hold a holding surface of a holding means; and a carrying-out means to make a workpiece processed by the processing means The plate-shaped workpiece is separated from the holding surface in a direction orthogonal to the holding surface; the cleaning mechanism cleans the lower surface of the plate-shaped workpiece held by the carrying-out means; and the moving means causes the carrying-out means in the direction of the holding surface and The cleaning mechanism moves relatively; the cleaning mechanism includes: a cylindrical drum cleaning member extending in a direction that intersects the moving direction of the moving means and parallel to the holding surface; and a rotating means that causes the drum cleaning member to The central axis rotates as a shaft; the barrel makes a part of the side surface of the drum cleaning member to form an exposed portion that is slenderly exposed in the extension direction, and at the same time accommodates a portion other than the exposed portion of the drum cleaning member and is submerged with water; And a water supply means for storing water in the bucket; while the water supplied by the water supply means overflows from the upper part of the bucket, the water The means for holding the lower surface of the plate-shaped workpiece abuts the exposed portion of the tub to rotate the drum cleaning member, the cleaning of the lower surface of the plate-shaped workpiece.

Preferably, the processing apparatus includes an air spraying means that extends parallel to an extending direction of the drum cleaning member, and performs the cleaning mechanism with respect to the cleaning mechanism of the unloading means when cleaning a plate-shaped workpiece. It is arranged in the rear side of the cleaning mechanism in a direction, and sprays air on the plate-shaped workpiece held by the carrying-out means, so that the lower surface of the plate-shaped workpiece cleaned by the cleaning mechanism is air-dried.

[Inventive effect]
The present invention relates to a processing device including a cleaning mechanism that cleans a lower surface of a plate-shaped workpiece held by a carrying-out means; and a moving means that relatively moves the carrying-out means and the washing means in a direction of a holding surface; the washing mechanism includes: a cylinder The drum cleaning member in a shape extends in a direction intersecting with the moving direction of the moving means and in a direction parallel to the holding surface; the rotating means rotates the central axis of the drum cleaning member as an axis; and the bucket makes one of the sides of the drum cleaning member The part is formed in an exposed part that is exposed slenderly in the extension direction, while accommodating the part other than the exposed part of the drum washing member and submerged with water; and, a water supply means stores water in a bucket; while the water supplied by the water supply means Spilled from the upper part of the bucket, the lower surface of the plate-shaped workpiece held by the carrying-out means abuts the exposed portion of the drum cleaning member rotating in the bucket while cleaning the lower surface of the plate-shaped workpiece. To this end, it adheres to the drum during workpiece cleaning The dust of the cleaning member is washed in the bucket water, so that the dust is not allowed to adhere to the plate-shaped workpiece from the drum cleaning member during cleaning, which can continue Cylinder cleaning means to clean the lower surface of the plate-shaped workpiece cleaned.

The processing device includes an air spraying means that extends parallel to the extending direction of the drum cleaning member, and is disposed in the cleaning direction with respect to the proceeding direction of the cleaning mechanism of the unloading means when cleaning the plate-shaped workpiece. The rear side of the mechanism sprays air on the plate-shaped workpiece held by the carrying-out means, so that the lower surface of the plate-shaped workpiece can be dried by air while being cleaned by the drum cleaning member, so the plate-shaped workpiece can be made by moving means. The lower surface of the plate-like workpiece is cleaned and dried by the cleaning feed in one direction to shorten the cleaning time.

The processing device 1 shown in FIG. 1 is a device for grinding and processing a plate-shaped workpiece W held by a holding device 30 by a processing means 7 including a grinding grindstone 740. The processing device 1 includes a base 10 extending in the Y-axis direction, and a base A post 11 standing on the rear side (+ Y direction side) on 10. The processing device 1 may be a polishing device that performs a polishing process on the plate-like workpiece W by a polishing pad that is rotatably mounted.

For example, the holding means 30 having a circular shape includes a suction portion 300 configured by a porous member or the like and sucking a plate-like workpiece W, and a frame 301 that supports the suction portion 300. The suction unit 300 communicates with a suction source (not shown) such as a vacuum generating device, and the attraction force generated by the suction source suction is transmitted to the holding surface 300a which is the exposed surface of the suction unit 300, whereby the holding means 30 can suck on the holding surface 300a. The plate-shaped workpiece W is held.
In addition, the holding means 30 is surrounded by a cover 39 that is movable together with the holding means 30, and is rotatable about the axis of the Z-axis direction by a rotating means 34 provided below the holding means 30.

Below the holding means 30, the cover 39, and the bellows 39a to which the cover 39 is connected, there is provided a moving means 14 for moving the holding means 30 in the direction (Y-axis direction) of the holding surface 300a. The moving means 14 includes: a ball screw 140 having an axis center in the Y-axis direction; a pair of guide rails 141 disposed in parallel with the ball screw 140; a motor 142 connected to the ball screw 140 to rotate the ball screw 140; and a movable plate 143, The nut and ball screw 140 provided inside are screwed together and the bottom slides on the guide rail 141; when the motor 142 rotates the ball screw 140, the movable plate 143 is guided by the guide rail 141 to move in the Y-axis direction, and On the movable plate 143, the holding means 30 and the cover plate 39 provided by the rotating means 34 also move in the Y-axis direction. In addition, the snake web 39a expands and contracts in the Y-axis direction as the holding means 30 moves.

A processing feed means 5 is arranged on the front surface of the column 11, and the processing feed means 7 feeds in the Z-axis direction (vertical direction) in which the processing means 7 is separated or approached from the holding surface 300 a of the holding means 30. The processing feed means 5 includes: a ball screw 50 having an axis center in the Z axis direction; a pair of guide rails 51 arranged parallel to the ball screw 50; a motor 52 connected to the upper end of the ball screw 50 and rotating the ball screw 50; lifting The plate 53 has a nut inside and a ball screw 50 screwed on the side and sliding contact with the guide rail 51; when the motor 52 rotates the ball screw 50, the lifting plate 53 is guided by the guide rail 51 and moves back and forth in the Z axis direction Moreover, the processing means 7 fixed on the lifting plate 53 also processes the feed in the Z-axis direction.

The processing means 7 for grinding the plate-like workpiece W held by the holding means 30 includes: a rotating shaft 70, the axial direction of which is the Z-axis direction; a housing 71 for rotatably supporting the rotating shaft 70; and a motor 72 for rotationally driving rotation A shaft 70; a circular plate-shaped mounting member 73 connected to the lower end of the rotating shaft 70; a grinding wheel 74 is detachably connected to the lower surface of the mounting member 73; and a bracket 75 supporting the housing 71 and its side is fixed to the processing shaft. Gives means 5 of the lifting plate 53.

A plurality of grinding grinding stones 740 having a substantially rectangular parallelepiped shape are fixed to the bottom surface of the grinding wheel 74 in a ring shape. Inside the rotating part 70, a flow path that communicates with the grinding water supply source and serves as a channel for the grinding water is set to pass in the axial direction of the rotating shaft 70, and the flow path passes through the mounting member 73, and the bottom surface of the grinding wheel 74 is It can be opened by spraying grinding water toward the grinding stone 740.
The processing means 7 may be a polishing means provided with a polishing pad composed of a non-woven fabric or the like.

A box-shaped processing chamber 16 is arranged in front of the column 11 on the base 10 and below the processing means 7, for example. A carrying in / out port 161 is formed in the side plate 160 constituting the processing room 16, and the holding means 30 can be accommodated in the processing room 16 by passing the carrying in / out port 161. The loading / unloading port 161 can be opened and closed by a shutter (not shown). The top plate 162 constituting the processing chamber 16 is provided with a circular processing means inlet 163 for allowing the processing means 7 to enter the processing chamber 16.

The moving means side of the holding means 30 on the base 10 is provided with a carrying-out means 4 that makes the plate-shaped workpiece W processed by the processing means 7 in a direction (Z-axis direction) orthogonal to the holding surface 300 a of the holding means 30. The upper part is separated from the holding surface 300a.
For example, the carrying-out means 4 includes a cylinder mechanism 40 that can move a later-described holding pad 42 standing on the base 10 to a predetermined height position, and an arm portion 41 of the holding mechanism 30 fixed to the upper end side of the cylinder mechanism 40. The upper side of the moving path extends horizontally (+ X direction), and the holding pad 42 attracts and holds the plate-shaped workpiece W disposed on the lower surface of the front end side of the arm portion 41.

The holding pad 42 is, for example, a rectangular shape conforming to the shape of the plate-shaped workpiece W, and the lower surface is a holding surface made of a porous member or the like and attracts and holds the plate-shaped workpiece. This holding surface of the holding pad 42 communicates with a suction source 43 such as a vacuum generating device via a suction pipe 421.

As shown in FIGS. 1 and 2, the processing device 1 includes a cleaning mechanism 8 that cleans the lower surface Wa of the plate-shaped workpiece W held by the carrying-out means 4. The cleaning mechanism 8 is arranged near the holding means 30 and can move back and forth in the Y-axis direction by the moving means 14 simultaneously with the holding means 30. That is, the cleaning mechanism 8 is arranged on the upper surface of the cover plate 39, for example.
The arrangement of the cleaning mechanism 8 is not limited to the example shown in this embodiment. For example, the cleaning mechanism 8 may be mounted on the housing 301 of the holding means 30 in a state of being separated by a predetermined distance in the -Y direction by a connecting member. side.

The cleaning mechanism 8 enlargedly shown in FIG. 2 includes a cylindrical drum cleaning member 80 that intersects (at right angles to) a direction (X-axis direction) in a direction (Y-axis direction) that moves the holding means 30 with respect to the moving means 14. ) And extend parallel to the holding surface 300a of the holding means 30; the rotation means 81 rotates the central axis of the drum cleaning member 80 as an axis; and the bucket 82 forms a part of the side of the drum cleaning member 80 in the extension The exposed portion 801 exposed in the direction (X-axis direction) is slender, and at the same time, the portion other than the exposed portion 801 of the drum cleaning member 80 is immersed in water; and the water supply means 83 supplies washing water to the bucket 82 and stores water.

In the present embodiment, the cylindrical drum cleaning member 80 extending in the X-axis direction is formed by molding a sponge having a predetermined thickness into a cylindrical shape and having a length equal to or greater than the longitudinal direction of the plate-shaped workpiece W. . As the sponge, for example, a sponge formed by polyurethane foam molding, a PVA sponge, or a sponge formed by mixing a foaming agent and the like into a rubber is used. In addition, the drum cleaning member 80 is not limited to a sponge, For example, you may form the chemical fiber etc. which have elasticity in the shape of a straight hair, densely arrange, and further form a washing brush of a drum shape.
The drum cleaning member 80 is a state in which the rotation shaft 810 of the rotation means 81 is inserted into the drum, and the rotation shaft 810 is fixed.

The bucket 82 is composed of, for example, a substantially rectangular bottom plate 82a and four side plates standing from four sides of the bottom plate 82a, and has an opening at the upper portion. For example, two side plates 82b, 82c (side plates 82b, 82c facing the longitudinal direction (X-axis direction) of the bucket 82) of the bucket 82 are formed with through-holes (not shown) provided with bearing shafts, each of which penetrates in the thickness direction. The rotating shaft 810 fixed to the drum cleaning member 80 is inserted into the tub 82 through the through hole.

The volume of the tub 82 is, for example, a size that can accommodate the entire drum cleaning member 80. As shown in FIG. 2, by adjusting the arrangement height position in the barrel 82 of the rotating shaft 810 on which the drum cleaning member 80 is installed, a part of the side surface of the drum cleaning member 80 becomes elongated in the extending direction (X-axis direction). The exposed portion 801 protrudes from the inside of the barrel 82. In addition, a gap (see FIG. 4) having a predetermined size is formed between the drum cleaning member 80 and the bottom plate 82 a of the tub 82.

One end on the + X direction side of the rotation shaft 810 is connected to the motor 811 by a coupling or the like. The motor 811 rotates the rotation shaft 810, whereby the drum cleaning member 80 installed on the rotation shaft 810 also rotates around the axis of the X-axis direction in the 82 barrels.

As shown in FIGS. 2 and 4, for example, the bucket 82 is fixed on a pair of support bases 86 extending in the same direction as the bucket 82 and fixed on the cover plate 39. The water supply pipe 830 is composed of a flexible pipe and the like. The water supply pipe 830 communicates with a supply source 831 constituted by a pump or the like and can supply washing water such as pure water. The water supply pipe 830 and the water supply source 831 constitute a water supply means 83 and store water in the bucket 82. As shown in FIG. 4, for example, a plurality of water supply ports 820 are formed on the bottom plate 82 a of the bucket 82 at regular intervals in the extending direction of the bucket 82, and each of the water supply ports 820 communicates with the water supply pipe 830.

As shown in FIGS. 2 and 4, the processing apparatus 1 according to the present embodiment includes an air spraying means 2, and the air spraying means 2 and the extension direction (X-axis direction) of the drum cleaning member 80 extend in parallel and are used for cleaning a plate-like workpiece. The cleaning mechanism 8 of the carrying-out means 4 at the time of W is arranged on the rear side (-Y direction side) of the washing mechanism 8 in the advancing direction (+ Y direction), and sprays air on the plate-shaped workpiece W held by the carrying-out means 4.

The air spraying means 2 is arranged on a side plate of the tub 82, for example. The air injection means 2 includes, for example, a table portion 20 extending in the X-axis direction, an injection port 21 opened in parallel at a plurality of predetermined intervals on the upper surface of the table portion 20, and an air supply source 22 for the compressor and compressed air. Each injection port 21 composed of a storage tank or the like supplies compressed air; and an induction plate 23 guides air ejected from the injection port 21 to, for example, the drum cleaning member 80 side.
The induction plate 23 having the same length as the stage portion 20 is fixed to the upper surface of the stage portion 20, for example, and is gently bent toward the drum cleaning member 80 side.

Each of the injection ports 21 is not limited to being formed in a circular cavity shape as shown in FIG. 2, and may be formed into, for example, a narrow slit shape, or may be formed to continuously and linearly extend on the upper surface of the table portion 20. Slim slit.
In addition, each injection port 21 may not be opened directly upward, but may be opened obliquely upward toward the + Y direction side, and may not include the induction plate 23.

For example, a partition wall 38 is disposed between the holding means 30 on the cover plate 39 and the cleaning mechanism 8, and the partition wall 38 prevents the grinding water, which is mixed with the grinding chips and the like, overflowing from the bucket 82 of the cleaning mechanism 8 from flowing through the holding means 30. side.

The operation of the processing device 1 in the case of grinding the plate-shaped workpiece W held by the holding means 30 will be described below. The plate-like workpiece W shown in FIG. 1 is, for example, a large-sized substrate having a rectangular shape. A circuit is formed on the lower surface Wa of the plate-like workpiece W facing downward in FIG. Ground surface to be ground. It should be noted that the plate-shaped workpiece W is not limited to the illustrated example, and may be a circular plate-shaped semiconductor wafer or the like.

First, the plate-shaped workpiece W is placed on the holding surface 300 a of the holding means 30 and sucked and held. Next, the moving means 14 moves the holding means 30 holding the plate-like workpiece W in the + Y direction. In addition, the shutter (not shown) of the processing chamber 16 is opened, and after the holding means 30 is carried into the processing chamber 16 passing through the loading / unloading port 161 of the side plate 160, the shutter is closed.

The holding means 30 that holds the plate-like workpiece W is moved below the processing means 7, and the rotation track of the grinding stone 740 is aligned with the plate-like workpiece W and the processing means 7 so as to pass through the rotation center of the plate-like workpiece W.
When the rotary shaft 70 is rotationally driven by the motor 72 shown in FIG. 1, the grinding wheel 74 rotates in accordance therewith. The machining means 7 is fed in the -Z direction by the machining feed means 5 shown in FIG. 1, and the grinding wheel 74 enters the machining chamber 16 through the machining means inlet 163. The rotating grinding stone 740 abuts on the upper surface Wb of the plate-like workpiece W, thereby performing grinding processing. In addition, the rotating means 34 rotates the holding means 30 to rotate the plate-like workpiece W held on the holding surface 300a, so that the entire upper surface Wb of the plate-like workpiece W is ground. In the grinding process, grinding water is supplied to the contact portion between the grinding stone 740 and the plate-like workpiece W, and the contact portion is cooled and washed.

After the upper surface Wb of the plate-like workpiece W is ground by a predetermined amount, the processing means 7 is pulled up in the + Z direction by the processing feed means 5, and the grinding stone 740 is separated from the plate-like workpiece W. Next, the moving means 14 moves the holding means 30 that holds the ground plate-like workpiece W in the -Y direction. In addition, a shutter (not shown) of the processing room 16 is opened, and the holding means 30 is carried out of the processing room 16 through a loading / unloading port 161 (not shown).

The moving means 14 moves the holding means 30 that sucks and holds the plate-like workpiece W in the -Y direction to a position immediately below the unloading means 4.
As shown in FIG. 3, the cylinder mechanism 40 lowers the holding pad 42 and brings the holding surface of the holding pad 42 into contact with the upper surface Wb of the plate-like element W. The attractive force generated by the operation of the suction source 43 is transmitted to the holding surface of the holding pad 42, whereby the holding pad 42 attracts and holds the plate-shaped workpiece W. The suction and holding of the plate-shaped workpiece W is released by the holding means 30, and the carrying-out means 4 separates the plate-shaped workpiece W processed by the processing means 7 from the holding surface 300 a of the holding means 30 in the + Z direction.

As shown in FIG. 4, the water supply source 831 sends washing water to the water supply pipe 830 so that the washing water is stored in the tub 82. After the bucket 82 is filled with the washing water, the washing water is continuously supplied from the water supply source 831, whereby the washing water overflows from the upper part of the bucket 82, and the portion other than the exposed portion 801 of the drum cleaning member 80 is accommodated in The bucket 82 is submerged in water. In addition, the drum cleaning member 80 is in a state containing sufficient washing water as a whole.

The holding pad 42 of the carrying-out means 4 that sucks and holds the plate-like workpiece W is positioned at a predetermined height by the cylinder mechanism 40 (see FIG. 3) so that the lower surface Wa of the plate-like workpiece W contacts the exposed portion 801 of the drum cleaning member 80. position. In addition, as shown in FIG. 4, the moving means 14 moves the cleaning mechanism 8 in the + Y direction at a predetermined cleaning feed rate, whereby the exposed portion 801 of the drum cleaning member 80 contacts the lower surface Wa of the plate-like workpiece W. That is, the exposed portion 801 is pressed against the plate-like workpiece W and deforms the lower surface Wa of the plate-like workpiece W in cooperation with the plate-like workpiece W to maximize the contact area.
In this state, the motor 811 rotates the rotation shaft 810, whereby the drum cleaning member 80 that rotates together with the rotation shaft 810 cleans the lower surface Wa of the plate-like workpiece W from the −Y direction side toward the + Y direction.

The exposed portion 801 of the drum cleaning member 80 cleans the lower surface Wa of the plate-shaped workpiece W, and the dust such as grinding debris adhering to the plate-shaped workpiece W adheres to the side surface of the rotating drum cleaning member 80. The dust adhering to the drum cleaning member 80 enters the tub 82 with the rotation of the drum cleaning member 80, and the washing water stored in the tub 82 is washed off from the side of the drum cleaning member 80. When the specific gravity of the dust is smaller than the washing water, the dust flows out of the bucket 82 together with the washing water overflowing from the bucket 82, so that it does not adhere to the drum washing member 80 again. Therefore, the washing water is continuously supplied to the tub 82 from the water supply source 831, thereby maintaining a state in which a certain amount of clean washing water is stored in the tub 82.
On the one hand, when the specific gravity of the dust is larger than the washing water, the washing water is supplied from the bottom plate 82a side of the bucket 82 so that the dust does not settle on the bottom plate 82a of the bucket 82, and the washing water is removed together with the washing water before the dust settles The tub 82 overflows, and the inside of the tub 82 is maintained in a clean state so that dust does not adhere to the drum cleaning member 80 again. In addition, a drain valve (not shown) may be provided to drain the washing water of the tub 82 when washing one sheet-shaped workpiece W.

In this embodiment, the lower surface Wa of the plate-shaped workpiece W is cleaned by the cleaning mechanism 8 described above, and the air moving the + -direction of the lower surface Wa of the plate-shaped workpiece W together with the cleaning member 8 is cleaned together. The spraying means 2 makes it dry. That is, the air supply source 22 is operated to supply compressed air to the table portion 20 so that the air is ejected from the injection port 21 toward the lower surface Wa of the plate-shaped workpiece W. As a result, the cleaning water adhering to the lower surface Wa of the plate-like workpiece W to be cleaned is blown away by the air, and the lower surface Wa of the plate-like workpiece W is dried. That is, the portion cleaned by the lower surface Wa of the plate-like workpiece W is dried in a subsequent manner.

The cleaning member 8 and the air-jetting means 2 are moved to a predetermined position in the + Y direction below the plate-like workpiece W held by the carrying-out means 4, so that the lower surface Wa of the plate-like workpiece W is washed and dried.

The present invention as described above is a processing device 1 including the cleaning mechanism 8 to clean the lower surface Wa of the plate-shaped workpiece W held by the carrying-out means 4; and the moving means 14 to carry the carrying-out means 4 in the Y-axis direction and the washing means. 8 relatively moves; the cleaning mechanism 8 includes a cylindrical drum cleaning member 80 extending in a direction intersecting the moving direction of the moving means 14 and parallel to the holding surface 300a of the holding means 30; and a rotating means 81 using a drum The central axis of the cleaning member 80 is an axis rotation; the bucket 82 forms a part of the side surface of the drum cleaning member 80 to form an exposed portion 801 that is slenderly exposed in the extension direction, and simultaneously accommodates a portion other than the exposed portion 801 of the drum cleaning member 80 and Water immersion; and water supply means 83 stores water in the bucket 82; while the water supplied by the water supply means 83 overflows the upper part of the bucket 82, the lower surface Wa of the plate-shaped workpiece W held by the carrying out means 4 The abutting portion 801 of the drum cleaning member 80 rotating in the tub 82 cleans the lower surface Wa of the plate-shaped workpiece W. To this end, the dust adhering to the drum cleaning member 80 is washed into the water of the bucket 82 during workpiece cleaning. In this way, the lower surface Wa of the plate-like workpiece W can be continued to be cleaned by the clean roller-washing member 80 in such a manner as to prevent dust from re-adhering to the plate-like workpiece W during the cleaning.

The processing apparatus 1 is provided with the air spraying means 2, the air spraying means 2 and the extension direction of the drum cleaning member 80 are extended in parallel, and it is with respect to the advancing direction (+ Y direction) of the cleaning mechanism 8 of the carrying-out means 4 when cleaning the plate-shaped workpiece W ) Is disposed on the rear side of the cleaning mechanism 8 and sprays air on the lower surface Wa of the plate-like workpiece W held by the carrying-out means 4, thereby enabling the lower surface Wa of the plate-like workpiece W to be cleaned by the drum cleaning member 80. The lower surface of the plate-shaped workpiece W can be cleaned by the moving means 14 in one direction of the cleaning feed of the plate-shaped workpiece W (the cleaning feed of one stroke in the + Y direction) by the moving means 14 in a subsequent manner. Wa and dry it to shorten the cleaning time.

In addition, the processing device 1 of the present invention is not limited to the above-mentioned embodiment, and the shapes and the like of the various components of the device illustrated in the accompanying drawings are not limited to this, and can be performed within a range in which the effects of the present invention can be exerted. Change appropriately.
For example, as the configuration of the carrying-out means 4 that is movable in the Y-axis direction, it is also possible to prevent the holding means 30 from moving in the Y-axis direction while cleaning the lower surface Wa of the plate-like workpiece W, and to maintain the plate-like shape. The carrying-out means 4 of the workpiece W relatively moves and cleans the holding means 30.

W‧‧‧ plate workpiece

1‧‧‧Processing Equipment

10‧‧‧ base

11‧‧‧column

30‧‧‧ means of retention

300‧‧‧ Adsorption Department

300a‧‧‧ holding surface

301‧‧‧Frame

39‧‧‧ Cover

39a‧‧‧ snake web

38‧‧‧ partition

14‧‧‧ Means of movement

140‧‧‧ball screw

141‧‧‧rail

142‧‧‧Motor

143‧‧‧movable plate

5‧‧‧ processing feed means

7‧‧‧Processing means

740‧‧‧grinding stone

16‧‧‧Processing Room

160‧‧‧Side

161‧‧‧Moved in and out

162‧‧‧Top plate

163‧‧‧Processing entrance

4‧‧‧ means of removal

40‧‧‧cylinder mechanism

41‧‧‧arm

42‧‧‧Retaining pad

421‧‧‧Suction tube

43‧‧‧ Attraction source

8‧‧‧Cleaning mechanism

80‧‧‧ roller cleaning components

801‧‧‧ exposed

81‧‧‧ Rotation means

810‧‧‧rotation axis

811‧‧‧Motor

82‧‧‧ barrels

82a‧‧‧ floor

82b, 82c‧‧‧Side panels

820‧‧‧Water supply port

83‧‧‧ Water supply means

830‧‧‧Water supply pipe

831‧‧‧ Water supply source

86‧‧‧Support

2‧‧‧ air jet means

FIG. 1 is a perspective view showing an example of a processing apparatus.

FIG. 2 is an enlarged perspective view showing an example of a cleaning device and an air spraying means.

Fig. 3 is a perspective view showing a state in which the lower surface of the plate-shaped workpiece is cleaned by a cleaning mechanism.

FIG. 4 is a cross-sectional view showing a state where the lower surface of the plate-shaped workpiece is cleaned by a cleaning mechanism and the lower surface of the plate-shaped workpiece is dried by an air spraying method.

Claims (2)

A processing device having: The processing means is a plate-like workpiece held by a grinding stone or ground by a grinding pad to hold the holding surface of the holding means; and a carrying-out means is used to make the plate-shaped workpiece processed by the processing means from a direction orthogonal to the holding surface from The holding surface is separated; a cleaning mechanism that cleans the lower surface of the plate-shaped workpiece held by the carrying-out means; and a moving means that relatively moves the carrying-out means and the cleaning mechanism in the direction of the holding surface; The cleaning mechanism includes a cylindrical drum cleaning member that extends in a direction that intersects the moving direction of the moving means and is parallel to the holding surface; and a rotating means that rotates a central axis of the drum cleaning member as an axis; A bucket, in which a part of a side surface of the drum cleaning member is formed as an exposed portion that is slenderly exposed in an extension direction, while accommodating a portion other than the exposed portion of the drum cleaning member and immersed in water; and a water supply means in the Bucket of water While the water supplied by the water supply means overflows from the upper part of the tub, the lower surface of the plate-shaped workpiece held by the carrying-out means abuts against the exposed portion of the drum cleaning member rotating in the tub to clean The lower surface of the plate-like workpiece. The processing device described in item 1 of the patent application scope includes air spraying means which extends parallel to the extension direction of the drum cleaning member and is opposed to one of the unloading means when cleaning a plate-like workpiece. The cleaning mechanism is arranged on the rear side of the cleaning mechanism in the direction of progress, and sprays air on the plate-shaped workpiece held by the carrying-out means, so that the lower surface of the plate-shaped workpiece cleaned by the cleaning mechanism is air-dried.