KR102672866B1 - Machining apparatus - Google Patents

Abstract

(Problem) When cleaning the lower surface of a plate-shaped workpiece, the workpiece should be continuously cleaned with a clean cleaning member without the operator having to clean the cleaning member.
(Solution means) Processing means (7) for grinding the workpiece held by the holding means (30), and carrying out means (4) for separating the workpiece after processing from the holding surface (300a) in a direction perpendicular to the holding surface (300a). It is provided with a cleaning mechanism (8) for cleaning the lower surface of the work, a carrying out means (4) in the direction of the holding surface, and a moving means (14) for relatively moving the cleaning mechanism (8), and the cleaning mechanism (8) moves. A roll cleaning member (80) in a direction intersecting the moving direction of the means (14) and extending parallel to the holding surface (300a), a cleaning member rotating means (81), and a side part of the roll cleaning member (80) A tank (82) is provided to form an exposed portion exposed in the extending direction to submerge parts other than the exposed portion of the roll cleaning member (80), and a water supply source (83) that stores water in the tank (82), and supplies water to the tank (82). ) A processing device (1) that cleans the lower surface of the workpiece held by the unloading means (4) against the exposed portion of the roll cleaning member (80) rotating within the barrel (82) while overflowing from the top.

Description

Machining equipment {MACHINING APPARATUS}

The present invention relates to a processing device for processing plate-shaped workpieces.

A grinding device for grinding a plate-shaped work grinds a plate-shaped work held on a holding surface of a holding table with a grinding wheel by rotating a grinding wheel in which grinding wheels are arranged in an annular manner. Then, before removing the ground plate-shaped work from the holding table, the surface to be ground is cleaned on the holding table. After that, the plate-shaped work is held by the carrying out means, the plate-shaped work is separated from the holding table, and the plate-shaped work held on the holding table is cleaned. The lower surface (maintenance surface) of the plate-shaped work is cleaned with a cleaning brush (for example, see Patent Document 1) or a cleaning sponge.

Japanese Patent Publication No. 2003-045841

However, when cleaning the lower surface of a plate-shaped work, dust adhering to the plate-shaped work adheres to the cleaning brush or cleaning sponge. And, because the dust reattaches to the plate-shaped work, the plate-shaped work may not be in a sufficiently cleaned state. To prevent this, workers regularly clean the cleaning brush or cleaning sponge.

Therefore, in the case of cleaning the lower surface (surface to be maintained) of a plate-shaped workpiece after processing, the plate-shaped workpiece can be continuously cleaned with a clean cleaning member even if the operator does not clean the cleaning member such as a cleaning brush or cleaning sponge. There is a task to make it possible.

The present invention for solving the above problems includes a processing means for grinding a plate-shaped work held on a holding surface of the holding means with a grinding wheel or polishing it with a polishing pad, and a processing means for grinding the plate-shaped work processed by the processing means orthogonal to the holding surface. It is provided with a carrying out means that moves away from the holding surface in a direction, a cleaning mechanism that cleans the lower surface of the plate-shaped work held by the carrying out means, and a moving means that relatively moves the carrying out means and the cleaning mechanism in the direction of the holding surface. A processing device, wherein the cleaning mechanism includes a cylindrical roll cleaning member extending in a direction intersecting the moving direction of the moving means and parallel to the holding surface, and rotating the central axis of the roll cleaning member about the axis. Rotating means, a tube forming an exposed part that exposes a part of the side surface of the roll cleaning member in a thin and long direction in the extending direction, and a container for receiving and submerging parts other than the exposed part of the roll cleaning member, and water supply means for storing water in the container. It is provided with, and the lower surface of the plate-shaped work held by the discharge means is brought into contact with the exposed portion of the roll cleaning member rotating within the tank while allowing the water supplied by the water supply means to overflow from the top of the tank. Therefore, it is a processing device that cleans the lower surface of the plate-shaped work.

The processing device extends parallel to the extension direction of the roll cleaning member and is disposed on the rear side of the cleaning mechanism in the direction of movement of the cleaning mechanism with respect to the unloading means when cleaning the plate-shaped work, It is preferable to provide air injection means for spraying air onto the plate-shaped work held by the unloading means, and to dry the lower surface of the plate-shaped work cleaned by the cleaning mechanism with air.

A processing device related to the present invention is a processing device including a cleaning mechanism for cleaning the lower surface of a plate-shaped workpiece held by a carrying out means, and a moving means for relatively moving the carrying out means and the cleaning mechanism in the direction of the holding surface, wherein the cleaning mechanism includes , a cylindrical roll cleaning member in a direction intersecting the moving direction of the moving means and extending parallel to the holding surface, a rotating means for rotating the central axis of the roll cleaning member as an axis, and a portion of the side surface of the roll cleaning member. A thin and long exposed portion is formed in the extending direction, and a passage for accommodating and submerging parts other than the exposed portion of the roll cleaning member, and a water supply means for storing water in the tank, and the water supplied by the water supply means is supplied to the upper part of the tank. The lower surface of the plate-shaped work held by the unloading means is brought into contact with the exposed part of the roll cleaning member that rotates within the container while overflowing from the container, thereby cleaning the lower surface of the plate-shaped work, thereby removing dust attached to the roll cleaning member during work cleaning into the container. By rinsing in water and preventing dust from reattaching to the plate-shaped work from the roll cleaning member during cleaning, the lower surface of the plate-shaped work can be continuously cleaned with a clean roll cleaning member.

The processing device extends parallel to the extension direction of the roll cleaning member and is disposed on the rear side of the cleaning mechanism in the direction of movement of the cleaning mechanism with respect to the unloading means when cleaning the plate-shaped work, and the unloading means By providing an air injection means for spraying air onto the held plate-shaped work, the lower surface of the plate-shaped work can be dried with air along with cleaning by the roll cleaning member, so that the plate-shaped work can be cleaned and transported in one direction by the moving means. Cleaning time can be shortened by cleaning and drying the underside of the work.

1 is a perspective view showing an example of a processing device.
Fig. 2 is an enlarged perspective view showing an example of a cleaning mechanism and an air injection means.
Fig. 3 is a perspective view showing a state in which cleaning of the lower surface of the plate-shaped workpiece using a cleaning mechanism has started.
Fig. 4 is a cross-sectional view showing a state in which the lower surface of the plate-shaped work is being cleaned by a cleaning mechanism and the lower surface of the plate-shaped work is being dried by an air injection means.

The processing device 1 shown in FIG. 1 is an device that grinds the plate-shaped work W held by the holding means 30 by the processing means 7 provided with a grinding wheel 740, and grinds the plate-shaped work W held in the holding means 30 in the Y-axis direction. It is provided with an extending base 10 and a column 11 erected on the rear side (+Y direction side) of the base 10. In addition, the processing device 1 may be a polishing device capable of performing polishing processing on the plate-shaped work W using a rotatably mounted polishing pad.

For example, the holding means 30, which has a circular outer shape, is made of a porous member or the like and includes an adsorption portion 300 that adsorbs the plate-shaped work W, and a frame 301 that supports the adsorption portion 300. do. The adsorption unit 300 is connected to a suction source (not shown) such as a vacuum generator, and the suction force generated by the suction source is transmitted to the holding surface 300a, which is the exposed surface of the adsorption unit 300, thereby maintaining the suction. The means 30 can suction and hold the plate-shaped work W on the holding surface 300a.

In addition, the holding means 30 is surrounded by a cover 39 that can move together with the holding means 30, and is rotated in the Z-axis direction by a rotating means 34 disposed below the holding means 30. It is capable of rotating around the axis.

Below the holding means 30, the cover 39, and the bellows cover 39a connected to the cover 39, a moving means ( 14) This arrangement is formed. The moving means 14 is connected to the ball screw 140, a ball screw 140 having an axis in the Y-axis direction, a pair of guide rails 141 disposed in parallel with the ball screw 140, and the ball screw 140. It is provided with a motor 142 that rotates the screw 140, and a movable plate 143 whose bottom is screwed onto the ball screw 140 and whose bottom slides on the guide rail 141. When the motor 142 rotates the ball screw 140, the movable plate 143 is guided by the guide rail 141 and moves in the Y-axis direction, rotating on the movable plate 143. The holding means 30 and the cover 39 arranged via the means 34 move in the Y-axis direction. Additionally, the bellows cover 39a expands and contracts in the Y-axis direction as the holding means 30 moves.

On the front side of the column 11, a machining transfer means 5 is arranged for processing and transporting the machining means 7 in the Z-axis direction (vertical direction) to separate or approach the holding surface 300a of the holding means 30. It is done. The processing transfer means 5 includes a ball screw 50 having an axis in the Z-axis direction, a pair of guide rails 51 disposed parallel to the ball screw 50, and an upper end of the ball screw 50. It is provided with a motor (52) that is connected and rotates the ball screw (50), and a lifting plate (53) whose inner nut is screwed to the ball screw (50) and whose side is in sliding contact with the guide rail (51), As the motor 52 rotates the ball screw 50, the lifting plate 53 is guided by the guide rail 51 and reciprocates in the Z-axis direction, and the processing means 7 fixed to the lifting plate 53 ) is processed and transferred in the Z-axis direction.

The processing means 7 for grinding the plate-shaped work W held by the holding means 30 includes a rotating shaft 70 whose axis is in the Z-axis direction, and a housing 71 that rotatably supports the rotating shaft 70. ), a motor 72 that rotates and drives the rotating shaft 70, a circular plate-shaped mount 73 connected to the lower end of the rotating shaft 70, and a grinding wheel detachably mounted on the lower surface of the mount 73 ( 74) and a holder 75 that supports the housing 71 and whose side is fixed to the lifting plate 53 of the processing transfer means 5.

On the bottom surface of the grinding wheel 74, a plurality of grinding wheels 740 having a substantially rectangular parallelepiped shape are fixed in an annular shape. Inside the rotating shaft 70, a flow path that communicates with the grinding water supply source and serves as a passage for the grinding water is formed penetrating in the axial direction of the rotating shaft 70. The flow path passes through the mount 73 and is connected to the grinding wheel. There is an opening at the bottom surface of 74 so that grinding water can be ejected toward the grinding wheel 740.

Additionally, the processing means 7 may be a polishing means provided with a polishing pad made of non-woven fabric or the like.

For example, a box-shaped processing chamber 16 is arranged at a position in front of the column 11 on the base 10 and below the processing means 7. A loading outlet 161 is formed on the side plate 160 constituting the processing chamber 16, and the holding means 30 passes through the loading outlet 161, allowing the holding means 30 to be stored in the processing chamber 16. It is acceptable. The loading exit 161 can be opened and closed by a shutter (not shown). The top plate 162 constituting the processing chamber 16 is formed with a circular processing means entry port 163 through which the processing means 7 enters the processing chamber 16.

Next to the movement path of the holding means 30 on the base 10, the plate-shaped work W processed by the processing means 7 is placed in a direction perpendicular to the holding surface 300a of the holding means 30 (Z-axis direction). The carrying out means 4 which separates from the holding surface 300a is disposed.

The carrying out means 4 includes, for example, a cylinder mechanism 40 that is erected on the base 10 and allows the holding pad 42, which will be described later, to be moved to a predetermined height position; An arm portion 41 fixed to the upper end and extending horizontally (+ ) is provided with a holding pad 42 that suctions and holds it.

The holding pad 42 has, for example, a rectangular shape that matches the outer shape of the plate-shaped work W, and its lower surface is made of a porous member or the like and serves as a holding surface that suction-holds the plate-shaped work W. The holding surface of the holding pad 42 is in communication with a suction source 43 such as a vacuum generating device via a suction pipe 421.

1 and 2, the processing device 1 is equipped with a cleaning mechanism 8 that cleans the lower surface Wa of the plate-shaped work W held by the unloading means 4. The cleaning mechanism 8 is disposed in the vicinity of the holding means 30, and is capable of reciprocating movement in the Y-axis direction together with the holding means 30 by the moving means 14. That is, the cleaning mechanism 8 is arranged on the upper surface of the cover 39, for example.

In addition, the arrangement formation point of the cleaning mechanism 8 is not limited to the example shown in this embodiment, and may be, for example, a predetermined distance -Y on the side of the frame 301 of the holding means 30 via a connecting member. It may be installed in a separated direction.

The cleaning mechanism 8 shown enlarged in FIG. 2 is a direction (X-axis direction) that intersects (orthogonal to) the direction in which the moving means 14 moves the holding means 30 (Y-axis direction) and also holds the holding means 30. A cylindrical roll cleaning member (80) extending parallel to the holding surface (300a) of the means (30), a rotation means (81) that rotates the central axis of the roll cleaning member (80) about its axis, and a roll cleaning member ( A barrel 82 that forms an exposed portion 801 that exposes a portion of the side surface of the roll cleaning member 80 to be thin and long in the extending direction (X-axis direction), and accommodates and submerges parts other than the exposed portion 801 of the roll cleaning member 80. ) and a water supply means (83) for supplying and storing washing water to the container (82).

In the present embodiment, the cylindrical roll cleaning member 80 extending in the It is equipped with As the sponge, for example, a sponge made by foaming and molding polyurethane, a PVA sponge, or a sponge made by adding a foaming agent to rubber and the like are used. In addition, the roll cleaning member 80 is not limited to a sponge, and may be, for example, a cleaning brush formed by forming elastic chemical fibers or the like into straight bristles and densely forming them into a roll shape.

The roll cleaning member 80 has a rotating shaft 810 of the rotating means 81 inserted into its cylinder and is fixed to the rotating shaft 810.

The barrel 82 is made up of, for example, a substantially rectangular bottom plate 82a and four side plates standing upright from the four sides of the bottom plate 82a, and the upper part is open. For example, the two side plates 82b and 82c constituting the cylinder 82 (the side plates 82b and 82c facing each other in the longitudinal direction (X-axis direction) of the cylinder 82) are shown to be provided with bearings. Each of the through holes is formed through the thickness direction, and the rotating shaft 810 on which the roll cleaning member 80 is fixed is inserted into the cylinder 82 through these through holes.

The volume of the barrel 82 is, for example, large enough to accommodate the entire roll cleaning member 80. As shown in FIG. 2, the arrangement height position within the cylinder 82 of the rotary shaft 810 on which the roll cleaning member 80 is mounted is adjusted, so that a portion of the side surface of the roll cleaning member 80 is aligned in the extending direction (X It becomes an exposed portion 801 that protrudes from the inside of the barrel 82 in a thin and long direction (axial direction). Additionally, a gap (see FIG. 4) of a predetermined size is formed between the roll cleaning member 80 and the bottom plate 82a of the cylinder 82.

A motor 811 is connected to one end of the rotating shaft 810 on the +X direction side through a coupling or the like. When the motor 811 rotates the rotary shaft 810, the roll cleaning member 80 mounted on the rotary shaft 810 also rotates around the axis in the X-axis direction within the tube 82.

2 and 4, the canister 82 is fixed, for example, on a pair of supports 86 extending in the same direction as the canister 82 and fixed on the cover 39, A water supply pipe 830 made of a flexible tube or the like is disposed in a gap below the barrel 82. The water supply pipe 830 is connected to a water supply pipe 831 that is composed of a pump or the like and can supply washing water such as pure water, and supplies water to the container 82 through the water supply pipe 830 and the water supply source 831. A storage water supply means 83 is constructed. As shown in FIG. 4, for example, a plurality of water supply ports 820 are formed on the bottom plate 82a of the barrel 82 at equal intervals in the extending direction of the barrel 82, and each water supply port 820 is provided. The supply port 820 is connected to the water supply pipe 830.

2 and 4, the processing device 1 in the present embodiment extends parallel to the extension direction (X-axis direction) of the roll cleaning member 80 and cleans the plate-shaped work W. It is disposed on the rear side (-Y direction side) of the cleaning mechanism 8 in the direction (+Y direction) of the cleaning mechanism 8 relative to the carrying out means 4 when carrying out, and the carrying out means 4 is held. An air injection means (2) for spraying air onto the plate-shaped work (W) is provided.

The air injection means 2 is disposed on the side plate of the cylinder 82, for example. The air injection means 2 includes, for example, a support portion 20 extending in the An air supply source (22) consisting of a compressed air storage tank, etc., which supplies compressed air to each injection port (21), and a guide plate ( 23) is provided.

The guide plate 23, which has the same length as the support portion 20, is, for example, fixed to the upper surface of the support portion 20 and is gently curved toward the roll cleaning member 80. .

Each injection port 21 is not limited to the example in which it is formed in a circular hole shape as shown in FIG. 2, and may be formed in the shape of a narrow slit, for example, and can be formed one continuously on the upper surface of the support portion 20. It may be formed in the form of a narrow slit extending in a straight line.

In addition, each injection port 21 may not be facing directly upward, but may be opened so as to face diagonally upward in the +Y direction, and may not be provided with the guide plate 23.

For example, a partition wall 38 is disposed between the holding means 30 on the cover 39 and the cleaning mechanism 8, and the partition wall 38 is positioned between the holding means 30 on the cover 39 and the cleaning mechanism 8. ) prevents the washing water mixed with dust such as grinding chips that overflows from flowing toward the holding means (30).

Below, the operation of the processing device 1 when grinding the plate-shaped work W held by the holding means 30 will be described. The plate-shaped work W shown in FIG. 1 is, for example, a large-sized substrate with a square shape, and a circuit is formed on the lower surface Wa of the plate-shaped work W facing downward in FIG. 1, and the plate-shaped work W faces upward. The upper surface Wb of the facing plate-shaped work W becomes a surface to be ground on which grinding processing is performed. In addition, the plate-shaped work W is not limited to the example shown, and may be a circular plate-shaped semiconductor wafer or the like.

First, the plate-shaped work W is placed on the holding surface 300a of the holding means 30 and held by suction. Next, the moving means 14 moves the holding means 30 holding the plate-shaped workpiece W in the +Y direction. Additionally, the shutter (not shown) of the processing chamber 16 is opened, and after the holding means 30 is brought into the processing chamber 16 through the loading outlet 161 of the side plate 160, the shutter is closed.

The holding means 30 holding the plate-shaped work W moves to the bottom of the processing means 7, and the rotational orbit of the grinding wheel 740 passes through the rotation center of the plate-shaped work W. The positioning of the processing means 7 is adjusted.

As the rotation shaft 70 is driven to rotate by the motor 72 shown in FIG. 1, the grinding wheel 74 rotates. Moreover, the processing means 7 is sent in the -Z direction by the processing means 5 shown in FIG. 1, and the grinding wheel 74 passes through the processing means entry port 163 and enters the processing chamber 16. Goes. Then, grinding is performed by the rotating grinding wheel 740 coming into contact with the upper surface Wb of the plate-shaped work W. In addition, when the rotating means 34 rotates the holding means 30, the plate-shaped work W held on the holding surface 300a also rotates, so that the entire upper surface Wb of the plate-shaped work W is ground. . During grinding, grinding water is supplied to the contact area between the grinding wheel 740 and the plate-shaped work W, and the contact area is cooled and cleaned.

After the upper surface Wb of the plate-shaped work W is ground by a predetermined amount, the processing means 7 is pulled up in the +Z direction by the processing transfer means 5, and the grinding wheel 740 is separated from the plate-shaped work W. do. Next, the moving means 14 moves the holding means 30 holding the plate-shaped work W on which grinding has been completed in the -Y direction. Additionally, the shutter (not shown) of the processing chamber 16 is opened, and the holding means 30 is carried out of the processing chamber 16 through the loading outlet 161 (not shown).

The moving means 14 moves the holding means 30, which suction-holds the plate-shaped workpiece W, in the -Y direction to a position immediately below the unloading means 4.

As shown in FIG. 3 , the cylinder mechanism 40 lowers the holding pad 42 to bring the holding surface of the holding pad 42 into contact with the upper surface Wb of the plate-shaped work W. The suction force generated by the operation of the suction source 43 is transmitted to the holding surface of the holding pad 42, so that the holding pad 42 attracts and holds the plate-shaped work W. The suction holding of the plate-shaped work W by the holding means 30 is released, and the carrying out means 4 holds the plate-shaped work W processed by the processing means 7 on the holding surface 300a of the holding means 30. ) away from the +Z direction.

As shown in FIG. 4, the water supply source 831 supplies washing water to the water supply pipe 830, and the washing water is stored in the tank 82. Even after the inside of the bucket 82 is filled with washing water, the supply of washing water from the water supply source 831 continues, so that the washing water overflows from the top of the bucket 82, causing the roll cleaning member 80 to Areas other than the exposed portion 801 are accommodated in the container 82 and are submerged. Additionally, the entire roll cleaning member 80 is in a state where it sufficiently contains cleaning water.

The holding pad 42 of the carrying out means 4 for suction-holding the plate-shaped work W is positioned on the cylinder so that the lower surface Wa of the plate-shaped work W contacts the exposed portion 801 of the roll cleaning member 80. It is positioned at a predetermined height position by the mechanism 40 (see FIG. 3). In addition, as shown in FIG. 4, the moving means 14 moves the cleaning mechanism 8 in the +Y direction at a predetermined cleaning feed speed, so that the exposed portion 801 of the roll cleaning member 80 moves to the plate-shaped workpiece. The lower surface of (W) is in contact with (Wa). That is, the exposed portion 801 is pressed against the plate-shaped work W and deformed to fit the lower surface Wa of the plate-shaped work W, so that its contact area is maximized.

In this state, the motor 811 rotates the rotating shaft 810, so that the roll cleaning member 80 rotating together with the rotating shaft 810 moves the lower surface Wa of the plate-shaped work W from the -Y direction side. It is washed toward the +Y direction.

As the exposed portion 801 of the roll cleaning member 80 cleans the lower surface Wa of the plate-shaped work W, the plate-shaped work W attaches to the side surface of the rotating roll cleaning member 80. Dust such as grinding chips adheres. The dust adhering to the roll cleaning member 80 enters the barrel 82 as the roll cleaning member 80 rotates, and is removed from the roll cleaning member 80 by the washing water stored in the barrel 82. Washed down from the side. When the specific gravity of the dust is smaller than that of the washing water, the dust flows out of the bucket 82 together with the washing water overflowing from the bucket 82, and thus does not adhere to the roll cleaning member 80 again. Accordingly, by continuously supplying the washing water from the water supply source 831 to the bucket 82, a certain amount of clean washing water is maintained stored in the bucket 82.

On the other hand, if the dust has a greater specific gravity than the washing water, the washing water is supplied from the bottom plate 82a of the tank 82 so that the dust does not settle on the bottom plate 82a of the tank 82. , the dust overflows together with the washing water from the bucket 82 before it settles, thereby keeping the inside of the bucket 82 clean and preventing dust from adhering to the roll cleaning member 80 again. Additionally, a drain valve (not shown) that drains the washing water from the tank 82 each time one sheet of plate-shaped work W is washed may be provided.

In the present embodiment, the lower surface Wa of the plate-shaped work W is cleaned by the cleaning mechanism 8, and the lower surface Wa after cleaning of the plate-shaped work W is cleaned by the cleaning mechanism 8. It is dried by the air injection means (2) moving in the +Y direction. That is, the air supply source 22 operates to supply compressed air to the receiving portion 20, and the air is sprayed from the injection port 21 toward the lower surface Wa of the plate-shaped work W. As a result, the washing water adhering to the lower surface Wa of the cleaned plate-shaped work W is blown away by the air, and the lower surface Wa of the plate-shaped work W dries. That is, the cleaned points on the lower surface Wa of the plate-shaped work W are dried from the back.

The cleaning mechanism 8 and the air blowing means 2 move to a predetermined position in the +Y direction that completely passes below the plate-shaped work W held by the unloading means 4, thereby removing the lower surface of the plate-shaped work W. (Wa) is washed and dried.

As described above, the processing device 1 according to the present invention includes a cleaning mechanism 8 that cleans the lower surface Wa of the plate-shaped work W held by the carrying out means 4, and a carrying out means 4 in the Y-axis direction. ) and a moving means (14) for relatively moving the cleaning mechanism (8), wherein the cleaning mechanism (8) has a direction intersecting the moving direction of the moving means (14) and is held by the holding means (30). A cylindrical roll cleaning member (80) extending parallel to the surface (300a), a rotation means (81) for rotating the central axis of the roll cleaning member (80) about its axis, and a portion of the side surface of the roll cleaning member (80). A barrel 82 that forms an exposed portion 801 that is exposed to be thin and long in the direction of extension, and accommodates and submerges parts other than the exposed portion 801 of the roll cleaning member 80, and water stored in the barrel 82. An exposed portion 801 of the roll cleaning member 80, which is provided with a supply means 83 and rotates within the barrel 82 while allowing water supplied by the water supply means 83 to overflow from the top of the barrel 82. Since the lower surface Wa of the plate-shaped work W held by the unloading means 4 is brought into contact with the lower surface Wa of the plate-shaped work W, the lower surface Wa of the plate-shaped work W is adhered to the roll cleaning member 80 during work cleaning. The accumulated dust is rinsed in water in the bucket 82, and the dust is not re-attached to the plate-shaped work W from the roll cleaning member 80 during cleaning, and the plate-shaped work W is continuously washed with a clean roll cleaning member 80. ) The lower surface (Wa) can be cleaned.

The processing device 1 extends parallel to the extension direction of the roll cleaning member 80 and extends in the direction (+Y) of the cleaning mechanism 8 with respect to the unloading means 4 when cleaning the plate-shaped work W. By providing an air injection means (2) disposed on the rear side of the cleaning mechanism (8) in the direction (direction) and blowing air to the lower surface (Wa) of the plate-shaped work (W) held by the unloading means (4), Since the lower surface Wa of the plate-shaped work W cleaned by the roll cleaning member 80 can be dried with air from behind, the plate-shaped work W can be cleaned in one direction by the moving means 14. The cleaning time can be shortened by cleaning and drying the lower surface Wa of the plate-shaped work W in the transport (one pass cleaning transport in the +Y direction).

In addition, the processing device 1 according to the present invention is not limited to the above embodiment, and the shape of each component of the device shown in the accompanying drawings is not limited to this, and the effect of the present invention can be achieved. It can be changed appropriately within the possible range.

For example, the carrying out means 4 is configured to be movable in the Y-axis direction, and when cleaning the lower surface Wa of the plate-shaped work W, the holding means 30 is not moved in the Y-axis direction, but the plate-shaped workpiece W is moved in the Y-axis direction. Cleaning may be performed by moving the carrying out means 4 holding the work W relative to the holding means 30.

W: plate work
1: Processing device
10: base
11: column
30: means of maintenance
300: adsorption unit
300a: holding surface
301: frame
39: cover
39a: bellows cover
38: partition wall
14: means of transportation
140: ball screw
141: Guide rail
142: motor
143: Movable plate
5: Processing conveyance means
7: Processing means
740: grinding stone
16: Processing room
160: side plate
161: Import exit
162: top plate
163: Processing means entrance
4: Means of export
40: Cylinder mechanism
41: arm part
42: retaining pad
421: suction tube
43: suction source
8: Cleaning mechanism
80: Roll cleaning member
801: exposed part
81: means of rotation
810: rotating shaft
811: motor
82: barrel
82a: bottom plate
82b, 82c: side plate
820: Water supply port
83: Water supply means
830: water supply pipe
831: water source
86: support
2: Air injection means

Claims (2)

Holding means for holding the plate-shaped work on the holding surface, processing means for grinding the plate-shaped work held on the holding surface with a grinding wheel or polishing it with a polishing pad, and holding the plate-shaped work processed by the processing means at right angles to the holding surface. It is provided with a carrying out means that separates the holding means from the holding surface in a direction, a cleaning mechanism that cleans the lower surface of the plate-shaped work held by the carrying out means, and a moving means that moves the holding means in the Y-axis direction parallel to the holding surface. As a processing device,
The cleaning mechanism includes a cylindrical roll cleaning member extending beyond the longitudinal length of the plate-shaped workpiece in a direction intersecting the Y-axis direction in a horizontal plane and parallel to the holding surface, and the center of the roll cleaning member. A rotating means for rotating the shaft about the axis, and a passage that forms an exposed part exposing a part of the side surface of the roll cleaning member to be elongated and thin in the extending direction, and accommodates and submerges parts other than the exposed portion of the roll cleaning member. It is provided with water supply means to store water, and is capable of moving in the Y-axis direction together with the holding means by the moving means, and with respect to the holding means, the moving direction of the holding means when cleaning the lower surface of the plate-shaped workpiece is provided. It is placed on the -Y direction side opposite to the +Y direction,
While overflowing the water supplied by the water supply means from the top of the tank, the cleaning mechanism is advanced in the +Y direction by the moving means, and the exposed portion of the roll cleaning member rotating within the tank is carried out. A processing device that comes into contact with the lower surface of the plate-shaped work held by the tool and cleans the lower surface of the plate-shaped work. According to claim 1,
of the plate-shaped work held by the unloading means, which extends parallel to the extension direction of the roll cleaning member and is disposed on the -Y direction side of the cleaning mechanism that advances in the +Y direction to clean the lower surface of the plate-shaped work. A processing device comprising air injection means for spraying air on the lower surface, and drying the lower surface of the cleaned plate-shaped workpiece by moving the cleaning mechanism in the +Y direction so that the air is poured from behind.

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