TW201924855A - Sharpening machine - Google Patents

Abstract

A sharpening machine to sharpen each probe on a probe card by contact abrasion so as to make the probe card detectable as expected and to lift the probe card service life.

Description

Puncture machine

The present invention relates to a semiconductor device, and more particularly to a puncture machine for performing a punctuation task on a probe card taken out of a wafer testing machine.

According to the test, in the manufacturing process of the wafer, the probes on the probe are often contacted on the wafer tester to contact the wafers on the wafer to transmit test signals to the wafers on the wafer, thereby testing the wafers. Whether the electrical function of the integrated circuit of each of the wafers is normal, and defective products having poor electrical function are eliminated before the wafers are packaged on the wafer, so as to reduce unnecessary packaging costs for defective products.

Furthermore, the concentration of the integrated circuit of each wafer on the wafer increases with the advancement of the integrated circuit processing technology, so that the probe can be smoothly contacted with the integrated circuit of each wafer on the wafer, so that the probe card The probe on the top is getting finer and thinner. However, after the probe is used for many times, the needle will be worn or contaminated, and the detection performance of the probe card will gradually decrease with the number of uses. More specifically, after the needle is worn and contaminated, it is easy to contact with the integrated circuit of each wafer on the wafer, so that the reliability of the detection result is greatly reduced, and the life of the probe card is limited.

Therefore, how to solve the problem of probe wear or contamination on the probe card to prolong the service life of the probe card has become a technical issue that the industry is currently trying to overcome.

In view of the above disadvantages of the prior art, the present invention provides a puncture machine for performing a punctuation task on a probe card taken out by a wafer testing machine, wherein the probe card includes a plurality of probes, and each of the probe cards The probe has a needle, and the needle machine comprises: a needle assembly, a needle assembly stage, a probe card fixture, a rotation mechanism, a longitudinal actuation mechanism, a setting module and a control module. The puncture needle assembly has a disc carrier and a puncture material, and the disc carrier has a circular area on which the puncture material is applied in a circular area of the disc carrier. The stylus assembly stage is for carrying the stylus assembly with a vacuum channel that provides a vacuum suction to the disk carrier to position the stylus assembly on the stylus assembly stage. The probe card holder is configured to carry the probe card, and expose the needle of each probe to the body of the probe fixture and toward the pin material, wherein the probe card is located above the pin assembly And the projection position of each of the probes on the disk carrier is at a first position in the circular region. The rotating mechanism actuates the stylus assembly carrier to rotate such that the projection position of each of the probes on the disk carrier is rotated from the first position to the second position in the circular region. The longitudinal actuating mechanism is configured to actuate the longitudinal movement of the pin assembly stage, such that the disk carrier drives the pin material toward the probes of the body of the probe fixture to expose the probes to each other through contact friction. The needle of the probe performs a pinning operation once, sharpening or cleaning the needles of the probes, and then causing the disk carrier to drive the needle material away from the needles of the probes, waiting for the needles of the probes Carry out the next puncture job. The setting module is configured to set task execution information in the execution of the puncture task, where the task execution information includes a total puncture number, a unit puncture number, and a unit rotation angle, wherein the total puncture number represents the probe The total number of times the needle needs to be connected to the needle; the number of needles per unit represents a reasonable number of times for each needle of the needle material to perform the needle punching operation for each probe of the probe; the unit rotation angle represents the loading of the needle assembly. The unit angle of the second rotation. When the cumulative number of stitches of the probes of the probes is less than the total number of punctures, the control module causes the longitudinal actuating mechanism to perform an operation to perform a puncture operation on the needles of the probes. The puncture material waits for the next puncture operation of the needles of the probes, and the puncture needle material is in the area under the probe needles, and the cumulative number of puncture operations for each of the probe needles has reached the unit. The number of punctures, the control module causes the rotating mechanism to actuate the rotation unit rotation angle of the puncture assembly stage.

Optionally, in an embodiment of the invention, the pin machine further includes a parameter import module, wherein the parameter import module is configured to import the digital task execution parameter according to the type of the probe card, and the task is performed. The execution parameters are provided to the setting module as task execution information, so as to save the complicated parameter setting of the personnel and prevent the misoperation of the personnel.

Optionally, in an embodiment of the invention, the pin machine further includes a data base and a data output module, wherein the data store stores a record of the probe card performing the puncture task, and the data output module is used for outputting. A record stored in the database for establishing a maintenance history of the probe card.

Optionally, in an embodiment of the invention, the pinting machine further comprises a record import module, wherein the record import module identifies the identity of the probe card by using a barcode representing the probe card, and according to the probe The identity of the card is imported into the history of use or an abnormal record, and the recorded records are stored in the database.

Optionally, in an embodiment of the invention, the pin machine further includes a display screen for displaying the record output by the data output module.

Optionally, in an embodiment of the invention, the pinting machine further comprises an image capturing module, wherein the image capturing module is configured to capture an image of the needle of each probe, and is used for judging the probe card. Whether the needle of each probe has an abnormality.

Optionally, in an embodiment of the invention, the pinting machine further comprises a recording module, wherein the recording module is configured to record whether the needle of each probe in the probe card has an abnormal judgment result.

Optionally, in an embodiment of the invention, the pinting machine further comprises a lighting module, wherein the lighting module lights the needles of the probes to provide a bright environment to assist the image capturing module. Capture an image of the needle of each probe.

Optionally, in an embodiment of the invention, the pin machine further includes a display screen for displaying an image captured by the image capturing module.

Optionally, in an embodiment of the invention, the probe card carrier further comprises a position adjustment structure, wherein the position adjustment structure adjusts a position of the probe card on the probe card carrier, so that the needle of each probe The position of the punching hole is exposed, which can be adapted to the position where the needle sand material is used for the needle punching operation of each probe of the probe.

Alternatively, in an embodiment of the invention, the stylus assembly stage is made of stone material; the suction passage is meshed on the surface of the stylus assembly stage facing the disk carrier.

Compared with the prior art, the puncture machine of the present invention changes the position of the puncture material to perform the puncture operation by rotating the disc carrier to avoid the local position of the puncture material, and the needle of each probe on the probe card is connected. The cumulative number of times of the puncture operation reaches the number of unit punctures, and the sharpening or cleaning ability of the needles of the respective probes is improved, so that the detection performance of the probe card after performing the puncture task is in accordance with expectations, so that the present invention The pinting machine can effectively improve the service life of the probe card, so as to solve the problem that the detection result is inaccurate due to probe wear or contamination after the probe card on the wafer testing machine is used for a long time.

The other aspects of the present invention will be readily understood by those skilled in the art from this disclosure. The invention may also be embodied or applied by other different embodiments. The details of the present invention can be variously modified and changed without departing from the spirit and scope of the invention. In particular, the relative relationship and relative positions of the various elements in the drawings are for illustrative purposes only and are not representative of actual implementation of the invention.

In the following, the same or similar functions will be described with the same reference numerals, and the description of the same or equivalent features will be omitted.

The invention mainly solves the problem that the detection result is inaccurate due to probe wear or contamination after the probe card on the wafer testing machine is used for a long time. The present invention provides a puncture machine for the respective probes on the probe card. The needle is used for the needle punching operation, and the needle of each probe is sharpened or cleaned by the contact friction, so that the detection property of the probe card can meet the expectation and the service life of the probe card is improved.

For the technical disclosure of the present invention, please refer to FIG. 1a to FIG. 9 together, the puncture machine 1 of the present invention is used for performing the puncture task for taking out the probe card 2 by the wafer testing machine, and the contact friction is used. The needle 211 of the plurality of probes 21 as shown in Fig. 9 on the probe card 2 is sharpened or cleaned. In an embodiment of the present invention, as shown in FIG. 8, the pinting machine 1 includes: a pin assembly 11, a pin assembly stage 12, a probe fixture 13, a rotating mechanism 14, and a longitudinal actuating mechanism 15. The module 16 and the control module 17 are set.

The pin assembly 11 has a disk carrier 111 and a pin material 112. The disk carrier 111 can optionally use a blank wafer having a high degree of flatness. The pin material 112 is used to provide grinding to sharpen or clean each of the probes. The needle 211 of 21 can be selected to use a sandpaper having a hardness higher than that of the needle 211 of each of the probes 21. As shown in the embodiment of Fig. 1d, the pin material 112 is evenly attached to the circular area 1111 of the disk carrier 111. .

The stylus assembly stage 12 is for carrying the stylus assembly 11 and has a vacuum channel 121 for providing a vacuum suction force to the disk carrier 111 for absorbing and positioning the stylus assembly 11 on the stylus assembly stage 12, Waiting for the needle 211 of each of the probes 21 to perform a pinning operation. In an embodiment of the invention, the stylus assembly stage 12 can be made of granite stone having a high degree of flatness to ensure that the vacuum channel 121 can form a negative pressure environment (ie, a vacuum environment), and the vacuum channel 121 is mesh-shaped. On the surface of the pouch assembly stage 12 facing the disc carrier 111, when the disc carrier 111 is overlaid on the surface of the disc carrier stage 12 facing the disc carrier 111, each of the disc carrier 111 is under the disc carrier 111 The portion provides negative pressure suction (i.e., vacuum suction) and the positioning of the disk carrier 111 is completed on the pin assembly stage 12.

The probe fixture 13 is used to carry the probe card 2, and has a punch working hole 131 and a position adjusting structure 132. The position adjusting structure 132 adjusts the position of the probe card 2 on the probe fixture 13 so that the position is adjusted. The needle 211 of each of the probes 21 exposes the pin working hole 131 of the body of the probe fixture 13 as shown in FIG. 1a and faces the pin assembly 11 to face the pin material 112 for each of the probes 21 The position of the needle 211 for the needle punching operation.

The rotating mechanism 14 provides rotational energy to actuate the stylus assembly stage 12 to rotate, as shown in Figure 2a, when the rotating mechanism 14 actuates the stylus assembly stage 12 to rotate the angle θ (at this time, each of the probes 21 does not move) The disk carrier 111 is rotated relative to each of the probes 21 such that the projection position of each of the probes 21 at the disk carrier 111 is rotated from the first position P1 in the circular area 1111 to the circular area 1111. The second position P2, and then the needle 211 of each of the probes 21 is successively punched by the pin material 112 distributed in the second position P2 in the circular area 1111 to avoid a local area of the pin material Excessive use, making the grinding ability not meet expectations.

The longitudinal actuating mechanism 15 provides longitudinal movement energy to actuate the longitudinal movement of the pin assembly stage 12 to enable the disk carrier 111 to actuate the pin material 112 as shown in FIG. 1b, exposing the pin to each of the probes 21 The needle 211 of the working hole 131 performs a pinning operation on the needle 211 of each of the probes 21 by means of contact friction, and the needle 211 of each of the probes 21 is sharpened or cleaned, and then the disk carrier 111 is rotated. The needle material 112 is moved away from the needle 211 of each of the probes 21 to wait for the next needle operation of the needle 211 of each of the probes 21.

In the embodiment shown in FIG. 8, the setting module 16 is configured for the user to set the task execution information in the puncture task performed by the puncture machine 1 according to actual needs, and the task execution information includes at least the total number of punctuation needles and units. The number of shots and the angle of rotation of the unit. In the present invention, the total number of punctuation needles represents the total number of times the needle 211 of each of the probes 21 needs to be successively subjected to a puncture operation; the number of unit puncture needles represents the needle 211 of the puncture needle material 112 per unit area for each of the probes 21 A reasonable number of puncturing operations are continued, and the reasonable number is mainly set according to the user's usage habits and experience of the stylus material 112; the unit rotation angle represents the rotation angle per unit of the stylus assembly stage 12.

Moreover, when the cumulative number of stitches of the needles 211 of the probes 21 is less than the total number of punctures, the control module 17 causes the longitudinal actuating mechanism 15 to perform an operation to the needles of the probes 21. 211 performs a pinning operation once. When the puncture material 112 waits for the next puncture operation of the needle 211 of each of the probes 21, and the puncture material 112 is in the area under the needle 211 of each of the probes 21 (at this time, the puncture material 112 is separated from each When the needle 211) of the probe 21 has accumulated the number of times of the needle punching operation on each of the probe 21 needles 211, the control module 17 causes the rotation mechanism 14 to actuate the needle assembly stage 12 Rotating the unit rotation angle to splicing the needle 211 of each of the probes 21 by the pin material 112 at another position on the disk carrier 111, thereby improving the sharpening of the needle 211 of each of the probes 21 Or cleaning ability.

It should be noted that the number of times the needle is allowed to be punctured to the needle 211 of each probe 21 per unit area of the needle material 112 is not the total number of times of the needle and the number of unit shots. The number of allowed punctuation marks represents the number of times each unit area of the puncture material 112 is allowed to perform a puncture operation on the needle 211 of each of the probes 21, if the grinding ability is as expected, if each unit area of the puncture material 112 is When the needle 211 of the probe 21 performs the punching operation for the number of times the needle has been allowed, the needle material 112 needs to be replaced.

It should be noted that, when the poking machine 1 of the present invention performs the puncture task, the probe card 2 carried on the probe jig 13 does not need to be moved, and only needs to be rotated by the rotation of the disc carrier 111. The position of the material 112 on the needle 211 of each of the probes 21 is changed from the first position P1 to the second position P2 to avoid the local position of the pin material 112, and the needle 211 of each of the probes 21 The cumulative number of consecutive puncture operations reaches the number of unit punctures.

If the present invention is not employed, the position of the spiking material 112 for the puncturing operation is changed by rotating the disk carrier 111. As in the auxiliary illustrative example shown in Figs. 3a to 3c, the puncturing material 312 of the puncturing unit 31 is attached to the moment. The rectangular area 3111 of the disk carrier 311, therefore, the position of the pin material 312 on the needle 211 of each of the probes 21 is changed from the first position P1 (coordinates: X1, Y1) to the second position. P2 (coordinates: X2, Y2), the rectangular disk carrier 311 is moved so that the second position P2 of the pin material 312 is located below the needle 211 of each of the probes 21, and more specifically, the rectangular disk carrier 311 is required. Moving laterally by a lateral distance HD (HD=X2-X1) and a longitudinal movement by a longitudinal distance VD (VD=Y2-Y1), in contrast, changing the position of the needle material 112 for the position of the needle punching operation, The rotation mode using the present invention is significantly simpler than the movement mode of the auxiliary example shown in Figs. 3a to 3c.

Furthermore, referring to the auxiliary examples shown in FIGS. 3a to 3c and FIG. 4, if the pin material 312 of the pin assembly 31 is not attached to the circular area, the operator places the probe card on the probe. In the case of the card holder, in addition to the consideration of the starting position of the needle 211 of each of the probes 21, it is necessary to face the pin material 312, and also needs to be considered during the change of each position of the pin material 312, and the pin material 312 is changing. Whether the needle 211 of each probe 21 can still be facing after the position, in order to avoid the operator's mistake and the position and size of the probe on each probe card may be different, the patch material 312 is usually applied. The area is divided into a predetermined puncturing work area Z1 and an unscheduled puncturing work area Z2, and the non-predetermined puncturing work area Z2 is located outside the predetermined puncturing work area Z1, and is detachable from the predetermined puncturing work area Z1. The needle 211 of some or all of the probes 21 on the needle card 2 performs a pinning operation, and can be adapted to the probe cards of different probes in different positions and sizes to prevent the pin material 112 from leaving the probe card after the position is changed. a needle on part or all of the probe 21 on 2 The head 211 causes a problem that the sharpening or cleaning of the needle 211 of each of the probes 21 is not correct.

In the above, before the needle punching operation, the operator will make the needle 211 of each probe 21 avoid the position above the non-predetermined pin working area Z2, and move the rectangular disk carrier 311 to change the pin material 112 to poke. When the needle is in the position of the needle, the needle 211 of each of the probes 21 can be positioned above the predetermined needle working area Z1 to ensure that the needle material 312 can perform the needle punching of the needle 211 of each of the probes 21 even if the position is changed. As such, the use of the pin material 312 in the non-predetermined pin work area Z2 is low and waste.

In contrast, since the pin material 112 of the present invention is distributed over the circular area 1111 on the disk carrier 111, the rotation of the disk carrier 111 does not change the needle 211 of each of the probes 21 at the pin material 112. The upper state enables the puncture needle material 112 to effectively contact the needle 211 of each of the probes 21 when the puncture needle 1 of the present invention performs the puncture task, so that the needle 211 of each of the probes 21 is sharpened or cleaned. It can be more certain that the pin material 112 of the present invention does not need to be adapted to the probe cards of different probe positions and sizes, and an unpredetermined pin work area is additionally disposed around the outer periphery of the predetermined pin work area, so that Each part of the pin material 112 can be fully utilized to avoid waste.

Alternatively, as shown in the embodiment of FIG. 8, the pin machine 1 has a parameter import module 181, a database 182, a data output module 183, a record import module 184, a display screen 185, and image capture. The module 186, the recording module 187 and the lighting module 188.

The database 182 can provide a storage medium to store a record of the probe card 2 performing the puncturing task. The data output module 183 can provide a data output mechanism for outputting the records stored in the database 182 to establish a maintenance history for subsequent verification. The data output mechanism is, for example, a network or a disk. Display 185 is provided with a screen display to display the records output by data output module 183.

The parameter import module 181 can provide, for example, a data importing mechanism of the barcode machine for importing the digitized task execution parameters according to the type of the probe card 2, and providing the imported task execution parameters to the setting module. 16 is used as a task execution information to reduce the burden on the user to set the task execution information in the setting module 16, and can also save the setting of the complicated parameters of the personnel, and avoid the user's misoperation when setting the task execution information, that is, preventing the personnel. Misoperation. In addition, the record import module 184 can also use the bar code machine to scan the barcode representing the probe card 2 to identify the identity of the probe card 2, and import the used history or abnormal record according to the identity of the probe card 2, The entered records are stored in database 182 for subsequent review or use.

The image capture module 186 can provide image capture to capture the image of the needle 211 of each of the probes 21, and determine whether the needle 211 of each probe 21 in the probe card 2 is abnormal. Each of the probes 21 has an abnormal needle 211 which is immediately processed in response. The recording module 187 can provide a mechanism for writing a record for recording whether the needle 211 of each of the probes 21 in the probe card 2 is abnormal. The light-emitting module 188 lights the needles 211 of the probes 21, and brightens the vicinity of the needles 211 of the probes 21, thereby assisting the image capturing module 186 to capture the needles 211 of the probes 21. The image is used to enhance the sharpness of the image capture module 186. In addition, in the present invention, the image captured by the image capturing module 186 can also be displayed on the display screen 185 for the person to observe the state of each of the probes 21 of the probe 21.

In summary, the present invention provides a puncture machine for performing a punctuation task on a probe card taken out by a wafer testing machine to perform a puncture operation on a needle of each probe on the probe card. Sharpen or clean the needle of each probe, so that the detection performance of the probe card meets the expectations and improve the service life of the probe card to solve the probe wear or contamination after the probe card on the wafer test machine is used for a long time. The problem is that the detection result is not accurate.

In addition, the present invention changes the position of the puncturing material by rotating the disk carrier to avoid the local position of the puncturing material, and the cumulative number of puncturing operations of the needles of each of the probes reaches the number of unit puncturing times. , 俾 to improve the sharpening or cleaning ability of the needle of each probe.

Furthermore, the pin material of the present invention is applied to a circular area on the disk carrier such that the rotation of the disk carrier does not change the state in which the needle of each probe is located above the pin material, so the present invention The needle material does not need to be placed on the outer circumference of the predetermined puncture work area in accordance with the probe card with different probe positions and sizes, so that each part of the puncture material can be fully used. Avoid wasting the needle material.

The above embodiments are merely illustrative of the principles and effects of the invention and are not intended to limit the invention. Modifications and variations of the above-described embodiments can be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of the invention should be as defined in the scope of the invention.

1‧‧‧Pinch machine

11‧‧‧Pin needle assembly

111‧‧‧Disc carrier

1111‧‧‧Circular area

112‧‧‧Pick material

12‧‧‧Pin needle assembly stage

121‧‧‧ Inhalation channel

13‧‧‧ Probe card fixture

131‧‧‧Picking hole

132‧‧‧ Position adjustment structure

14‧‧‧Rotating mechanism

15‧‧‧Longitudinal actuating mechanism

16‧‧‧Setting module

17‧‧‧Control Module

181‧‧‧Parameter Import Module

182‧‧‧Database

183‧‧‧ data output module

184‧‧‧Record Import Module

185‧‧‧ display

186‧‧‧Image capture module

187‧‧‧record module

188‧‧‧Lighting module

2‧‧‧ probe card

21‧‧‧ probe

211‧‧‧ needle

31‧‧‧punch assembly

311‧‧‧ rectangular carrier

3111‧‧‧Rectangular area

312‧‧‧Pick material

P1‧‧‧ first position

P2‧‧‧ second position

1a to 1c are schematic views showing the operation of the poking machine of the present invention for performing a punctuation task.

2a to 2b are schematic views showing the operation of the puncture needle of the present invention.

3a to 3c are auxiliary diagrams for assisting in explaining the poking machine of the present invention for performing a punctuation task.

Figure 4 is an auxiliary diagram for assisting in explaining the punctuation task of the punctuator of the present invention.

Figure 5 is a schematic view of a puncture machine according to an embodiment of the present invention at a first viewing angle.

Figure 6 is a schematic illustration of a puncture machine in accordance with an embodiment of the present invention in a second perspective.

Figure 7 is a schematic view of a puncture machine according to an embodiment of the present invention in a third perspective.

Figure 8 is a system block diagram of a puncture machine in accordance with one embodiment of the present invention.

Figure 9 is a schematic view showing the image of the probe needle of the puncture machine of the present invention.

Claims (6)

A pinting machine for performing a puncturing task on a probe card taken out by a wafer testing machine, wherein the probe card comprises a plurality of probes, and each of the probes has a needle, the stamp The needle machine includes: a puncture component having a disc carrier and a puncture material, the disc carrier having a circular area on which the puncture material is attached In the circular area; a puncture assembly stage for carrying the puncture assembly, having a vacuum channel, the vacuum channel providing a vacuum suction force to the disk carrier to The stylus assembly is positioned on the stylus assembly stage; a probe card fixture for carrying the probe card and exposing the probe card to the probe card a body of the fixture and facing the pin material, wherein the probe card fixture is located above the pin assembly, and each of the probes is located in the circular region in a projection position of the disk carrier a first position; a rotating mechanism that actuates the pin assembly stage to rotate, Rotating, respectively, the projection position of the probe to the disc carrier from the first position to a second position in the circular area; a longitudinal actuating mechanism that actuates the puncture assembly The longitudinal movement of the stage causes the disk carrier to drive the needle material to face the needle of the body of the probe fixture outside the probe, and the needle of each probe is stamped once by contact friction. Needle work, sharpening or cleaning the needles of each of the probes, and then causing the disc carrier to move the needle material away from the needles of the probes, waiting for the next needle to be applied to the needles of the probes a setting module, the setting module is configured to set a task execution information in the execution of the punctuation task, the task execution information includes a total punctuation number, a unit puncture number, and a unit rotation angle; wherein The total number of punctuation needles represents the total number of times the needles of the probes need to be successively subjected to a puncture operation; the number of punctures of the unit represents a reasonable puncture operation of the needles of the probes per unit area of the puncture material. frequency; The unit rotation angle represents a unit angle of each rotation of the pin assembly stage; and a control module, when the cumulative number of needles of the probes of the probes is not up to the total number of punctures, the control module is Having the longitudinal actuating mechanism perform a work to perform a pinning operation on the needle of each of the probes, and the puncture material waits for the next puncture operation of the needles of the probes, and the puncture material In the area under the probe needle, the cumulative number of stitching operations for each of the probe needles has reached the number of unit punches, and the control module causes the rotating mechanism to actuate the needle assembly stage to rotate the Unit rotation angle. The poking machine of claim 1, further comprising a parameter import module, wherein the parameter import module is configured to import a digitized task execution parameter according to the type of the probe card, and The task execution parameter is provided to the setting module as the task execution information. The puncture machine of claim 1, further comprising a database and a data output module, wherein the database stores a record of the task of performing the puncture on the probe card, the data output module Used to output the records stored in this database. The marking machine of claim 3, further comprising a record importing module, wherein the record importing module identifies the identity of the probe card by using a barcode representing the probe card, and according to the The identity of the probe card is imported into the record of the usage history or abnormality, and the recorded records are stored in the database. The puncture machine of claim 3, further comprising a display screen for displaying the record output by the data output module. The puncturing machine of claim 1, further comprising a recording module for determining whether an abnormality of the needle of each of the probes in the probe card is abnormal.