TW201920962A - Test socket with carbon nanotubes - Google Patents

Abstract

The present invention relates to a test socket with carbon nanotubes, and more particularly, to a test socket including: a plurality of conductive portions in which a plurality of conductive particles are arranged in a first insulative elastic material in a thickness direction of the first insulative elastic material, the plurality of conductive portions being provided at positions corresponding to terminals of a test-target device; an insulative support portion arranged between the conductive portions and surrounding and supporting the conductive portions, the insulative support portion including a second insulative elastic material; and carbon nanotubes dispersed in the insulative support portion, wherein surfaces of the carbon nanotubes are coated with silica.

Description

Test socket with nano carbon tube

The invention relates to a test socket with a nano carbon tube, and more particularly to a test socket with a nano carbon tube coated with silicon dioxide.

Cross-reference to related applications

This application claims the benefit of Korean Patent Application No. 10-2017-0110659, filed at the Korean Intellectual Property Office on August 31, 2017, and the disclosure of the Korean patent application is incorporated herein by reference in its entirety.

Generally, when testing the electrical characteristics of a test target element, the test target element and the test device need to be electrically connected stably. Generally, a test socket is used to connect the test target element to the inspection device.

The test socket connects the terminal of the test target component to the pad of the inspection device so as to be able to transmit electrical signals in both directions between the test target component and the inspection device. To this end, the test socket includes an elastic conductive sheet or a pogo pin as a contact member. The elastic conductive sheet includes a conductive portion for connecting with a terminal of a test target element, the conductive portion is formed by arranging a plurality of conductive particles in a silicone rubber, and the pogo pin includes a A spring in the housing to electrically connect the test target element to the inspection device. Because such elastic conductive sheets or pogo pins can absorb mechanical shock that may occur during contact, most test sockets use such elastic conductive sheets or pogo pins.

Among such test sockets, a test socket using an elastic conductive sheet includes: a conductive portion formed in an area in contact with a ball lead of a ball grid array (BGA) semiconductor element; and an insulating support portion formed In an area not in contact with the ball lead (terminal) of the semiconductor element, it is used to support the conductive portion and serves as an insulating layer. In this case, a conductive portion can be provided by densely arranging a plurality of conductive particles in a silicone rubber. In use, the test socket is attached to an inspection device including a plurality of pads. Specifically, the test socket is mounted on the inspection device in a state where the conductive portions are in contact with the pads of the inspection device, respectively.

During the electrical inspection process, the conductive part of the test socket frequently shrinks and swells, and as a result, the silicone rubber of the conductive part may crack, causing the elasticity of the conductive part to decrease. When the elasticity of the conductive portion decreases as described above, the conductivity of the conductive portion decreases.

The conductive particles of the conductive portion are supported by silicone rubber, and when the silicone rubber is compressed due to contact with the test target element during the inspection process, the conductive particles are brought into contact with each other and thus are electrically connected to each other. In addition, when the test target element is removed after the inspection, the compressed silicone rubber returns to its original shape, and thus the conductive particles return to their original state.

As mentioned above, silicone rubber frequently shrinks and swells, and during these frequent shrinkage and expansion, the silicone rubber can torn.

If the silicone rubber is cracked, it is difficult to firmly support the conductive particles, and thus the conductive particles can be easily separated from the conductive portion. Such conductive particle separation is the main reason for the decrease in the overall conductivity of the test socket.

The Korean Patent No. 1588844, filed by the applicant of the present invention and awarded to the applicant of the present invention, discloses a test socket that can solve these problems.

The test socket 100 includes a conductive portion 110 that is disposed at a position corresponding to the terminal 141 of the test target element 140 by arranging a plurality of conductive particles 111 in the insulating elastic material in a thickness direction of the insulating elastic material. An insulating support portion 120 is arranged between the conductive portions 110 to surround and support the conductive portion 110; and a nano carbon tube 121 is arranged in the conductive portion 110 and is wound like a coil, wherein the nano carbon tubes 121 are in the conductive portion to each other Proximity.

Use of carbon nanotubes in the test socket to supplement the elasticity of the insulating elastic material, so that the test socket is prevented from losing its elasticity when the test target element is repeatedly inspected using the test socket, and the adjacent nano carbon tube with a spring shape is tangled Together, so even if the insulating elastic material expands at high temperatures, the deterioration of the electrical characteristics of the test socket can be minimized.

However, the carbon nanotubes arranged in the test socket may cause the following problems.

The pure nano carbon tube has conductivity, and therefore, when the pure nano carbon tube is also included in the insulating support portion other than the conductive portion, current leakage may occur. That is, although no current should flow in the insulating support portion, the nano-carbon tube may cause current to leak through the insulating support portion, and thus a short circuit may occur.

In addition, because the pure carbon nanotubes have weak adhesion to silicone rubber, which is an insulating and elastic material, the pure carbon nanotubes can be separated or detached from the silicone rubber during the frequent inspection process. The mechanical strength can be reduced compared to existing test sockets.

In addition, pure carbon nanotubes have strong cohesive force due to high van der Waals force, as shown in the enlarged part of Figure 1. Therefore, when the test socket is made by a general manufacturing process, the nano tube Carbon tubes can be densely distributed in some local areas. In the general manufacturing process, conductive particles are densely arranged in the insulating elastic material by applying a magnetic field to the liquid silicone in which the carbon nanotubes are arranged. In some areas. That is, it is difficult to uniformly distribute the carbon nanotubes.

The present invention is provided to solve the above problems. Specifically, the technical objective of the present invention is to provide a test socket including a nano carbon tube, which prevents current leakage, has strong adhesion to an insulating elastic material, and is evenly dispersed in the insulating elastic material. Because the carbon material has heat dissipation characteristics, it has stable resistance at high temperatures, and is used as a filler in the insulating elastic material to improve the tensile strength and abrasion resistance of the insulating elastic material.

In order to achieve the above objective, a test socket is provided, the test socket is configured to be placed between a test target element and an inspection device to electrically connect a terminal of the test target element to a pad of the inspection device. The test socket includes: a plurality of conductive portions, in which a plurality of conductive particles are arranged in the first insulating elastic material in a thickness direction of the first insulating elastic material, and the plurality of conductive portions are provided At a position corresponding to the terminal of the test target element; an insulating support portion arranged between the conductive portions and surrounding and supporting the conductive portion, the insulating support portion including a second insulating elastic material; and A plurality of nano carbon tubes are dispersed in the insulating support portion, wherein the surface of the nano carbon tubes is coated with silicon dioxide.

The insulating support portion containing the nano carbon tube may have a surface resistivity of 10 ⁹ ohms to 10 ¹⁴ ohms.

The nano carbon tube can be uniformly dispersed in the insulating support portion.

The second insulating elastic material may include a silicone rubber.

The nano carbon tube coated with silicon dioxide may be dispersed in the first insulating elastic material of the conductive portion.

An insulating sheet may be attached to an upper surface of the insulating support portion, and the insulating sheet includes a plurality of connection holes at a position corresponding to the conductive portion.

The nano carbon tube can also be dispersed in the conductive portion.

In order to achieve the above objective, a test socket is provided, the test socket is configured to be placed between a test target element and an inspection device to electrically connect a terminal of the test target element to a pad of the inspection device. The test socket includes: a plurality of conductive portions, in which a plurality of conductive particles are arranged in the first insulating elastic material in a thickness direction of the first insulating elastic material, and the plurality of conductive portions are provided At a position corresponding to the terminal of the test target element; an insulating support portion arranged between the conductive portions and surrounding and supporting the conductive portion, the insulating support portion including a second insulating elastic material; and A plurality of nano carbon tubes are dispersed in the conductive portion, wherein the surface of the nano carbon tubes is coated with silicon dioxide.

In order to achieve the above objective, a test socket is provided, the test socket is configured to be placed between a test target element and an inspection device to electrically connect a terminal of the test target element to a pad of the inspection device. The test socket includes: a plurality of conductive portions, in which a plurality of conductive particles are arranged in the first insulating elastic material in a thickness direction of the first insulating elastic material, and the plurality of conductive portions are provided At a position corresponding to the terminal of the test target element; an insulating support portion arranged between the conductive portions and surrounding and supporting the conductive portion, the insulating support portion including a second insulating elastic material; and Conductive protrusions protruding upward from the conductive portion above the surface of the insulating support portion; and a plurality of nano carbon tubes dispersed in the conductive protrusions, wherein the surface of the nano carbon tube is coated Covered with silicon dioxide.

An insulating sheet may be attached to the upper surface of the insulating support portion, the insulating sheet includes a plurality of connection holes at positions corresponding to the conductive portion, and the conductive protruding portion may be embedded in the insulating sheet Connection hole.

In the test socket of the present invention, the nano carbon tube is coated with silicon dioxide, thereby minimizing current leakage. The overall mechanical strength is improved due to the enhanced adhesion of the nano carbon tube to the insulating elastic material, and because Van der Waals weakens and ensures that the carbon nanotubes are evenly dispersed.

In addition, because the carbon material has heat dissipation characteristics, high-temperature resistance stability can be ensured, and because the nano carbon tube is used as a filler, the tensile strength and abrasion resistance of the insulating elastic material can be improved.

Hereinafter, the test socket 10 will be explained in detail according to a preferred embodiment of the present invention with reference to the accompanying drawings.

The test socket 10 of the present invention is placed between the test target element 60 and the inspection device 70 to electrically connect the plurality of terminals 61 of the test target element 60 to the plurality of pads 71 of the inspection device 70.

The test socket 10 includes a plurality of conductive portions 20, an insulating support portion 30, and a plurality of nano carbon tubes 40.

The conductive portion 20 is provided at a position corresponding to the terminal 61 of the test target element 60, and is provided by arranging a plurality of conductive particles 21 in the first insulating elastic material in the thickness direction of the first insulating elastic material. The conductive particles 21 are magnetic and contained in the conductive portion, and are densely arranged in the thickness direction of the conductive portion 20.

Preferably, the first insulating elastic material forming the conductive portion 20 may be a heat-resistant polymer material having a crosslinked structure. A variety of curable polymer-forming materials can be used to obtain crosslinked polymeric materials. Specific examples of such curable polymer-forming materials include: silicone rubber; conjugated diene rubbers such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, And acrylonitrile-butadiene copolymer rubber, and hydrogenated products of the above types of rubber; block copolymer rubbers, such as styrene-butadiene-diene block copolymer rubber, and styrene-isoprene Block copolymer rubber and hydrogenated products of the above types of rubber; chloroprene rubber; urethane rubber; polyester rubber; epichlorohydrin rubber; ethylene-propylene copolymer rubber; ethylene-propylene-diene Copolymer rubber; and soft liquid epoxy rubber.

Among the listed materials, silicone rubber is preferably used from the viewpoint of formability and electrical properties.

In addition, in the case where a probe test or an aging test is performed on the integrated circuit of a wafer using the test socket 10, a cured product of addition-curing liquid silicone rubber (hereinafter referred to as "silicone rubber" The cured product ") can be used as the first insulating elastic material, and when measured at 150 ° C, the compression set of the cured silicone rubber product can be preferably 30% or less, more preferably It is preferably 20% or less, and particularly preferably 10% or less. When the compression deformation rate of the cured silicone rubber product is higher than 30%, the conductive part 20 of the test socket 10 may easily suffer permanent deformation after the test socket 10 is used or repeatedly used under high temperature conditions. In this case, the arrangement of the conductive particles 21 of the conductive portion 20 may be distorted, and thus it may be difficult to maintain the desired conductivity.

In addition, when measured at 23 ° C, the hardness A of the silicone rubber cured product may be preferably from 10 to 80, more preferably from 15 to 80, and even more preferably from 20 to 80. If the hardness A of the cured product of the silicone rubber is less than 10, the insulating support portion 30 that insulates the conductive portions 20 from each other may be excessively distorted when the conductive portions 20 are pressed, and therefore it may be difficult to insulate the conductive portions 20 Maintain the desired level of insulation. On the other hand, if the hardness A of the cured product of the silicone rubber is greater than 80, a large load may be applied to the conductive portion 20 to cause the conductive portion 110 to deform to a desired degree. In this case, for example, the test target object may be deformed or broken.

Preferably, the conductive particles 21 contained in the conductive portion 20 of the test socket 10 may be magnetic, and in this case, the conductive particles 21 may be easily moved in the forming material by applying a magnetic field to the conductive particles 21 . Examples of the magnetically conductive particles 21 may include: particles of a magnetic metal such as iron, nickel, and cobalt; particles of an alloy of the metal; particles containing any of the metals; by preparing such particles as a core Particles and particles formed by coating the core particles with a highly conductive metal such as gold, silver, palladium, or rhodium; by preparing non-magnetic metal particles such as particles of inorganic materials such as glass beads or copolymer particles as a core Particles, and particles formed by coating the core particles with a conductive magnetic material, such as nickel or cobalt, or coating the core particles with a conductive magnetic material and a highly conductive metal.

Preferably, the conductive particles 21 may be formed by preparing nickel particles as core particles and coating the core particles with a highly conductive metal such as gold or silver.

The method of coating the core particles with a conductive metal is not limited. For example, electroless plating can be used.

In the case where the conductive particles 21 are formed by coating the core particles with a conductive metal to obtain high conductivity, the coating ratio of the core particles with the conductive metal (that is, the surface area of the core particles versus the surface area coated with the conductive metal) The ratio of the area) may be preferably 40% or more, more preferably 45% or more, and particularly preferably 47% to 95%.

In addition, the amount of the conductive metal used for coating may be preferably 2.5% to 50% by weight of the core particles, more preferably 3% to 30% by weight of the core particles, and even more preferably 3.5% of the core particles. % To 25% by weight, and even more preferably 4% to 20% by weight of the core particles. If the conductive metal is gold, the amount of the conductive metal used for coating may be preferably 3% to 30% by weight of the core particles, more preferably 3.5% to 25% by weight of the core particles, and particularly preferably 4 to 20% by weight of the core particles, and even more preferably 4.5 to 10% by weight of the core particles. In addition, if the conductive metal is silver, the amount of the conductive metal used for coating may be preferably 3% to 30% by weight of the core particles, more preferably 4% to 25% by weight of the core particles, and more particularly It is preferably 5 to 23% by weight of the core particles, and even more preferably 6 to 20% by weight of the core particles.

In addition, the diameter of the conductive particles 21 may be preferably 1 micrometer to 500 micrometers, more preferably 2 micrometers to 400 micrometers, particularly preferably 5 micrometers to 300 micrometers, and even more preferably 10 micrometers to 150 micrometers. .

When the conductive particles 21 meet the above conditions, the test socket 10 can be easily compressed and deformed, thereby ensuring that the conductive particles 21 can be fully electrically contacted.

The shape of the conductive particles 21 is not particularly limited. However, the conductive particles 21 may preferably have a sphere shape or a star shape to be easily dispersed in the polymer-forming material.

The insulating support portion 30 is arranged around the conductive portion 20 to support the conductive portion 20 and insulate the conductive portions 20 from each other. The insulating support portion 30 contains a second insulating elastic material that contains no or almost no conductive particles 21. Preferably, the insulating support portion 30 includes the same insulating elastic material as the first insulating elastic material included in the conductive portion 20. For example, the insulating support portion 30 may include a silicone rubber. However, the insulating support portion 30 is not limited to silicone rubber. That is, the insulating support portion 30 may also include any material other than silicone rubber as long as the material has elasticity and insulation.

The carbon nanotubes 40 are dispersed in the insulating support portion 30, and each of the carbon nanotubes 40 is shaped like a thin wire. The nano carbon tube 40 has a long thin line shape and has a thickness of 10 nm to 20 nm. The carbon nanotube 40 has an extended length smaller than the horizontal diameter of the conductive portion 20 and is included in the conductive portion 20 in various directions such as a vertical (thickness) direction, a horizontal direction (surface direction), or an inclined direction.

The nano-carbon tube 40 is an amorphous carbon fiber, which has a unique structure that a fiber material does not have, and has a heat dissipation characteristic unique to a carbon material. The nano-carbon tube 40 is housed in an insulating elastic material, and therefore can still have resistivity stability at high temperatures. In addition, the nano carbon tube 40 is used as a filler in silicone rubber, that is, in an insulating elastic material, thereby improving the tensile strength and abrasion resistance of the silicone rubber.

Carbon nano-controlling catalysts can be used, for example, the carbon nanotube 40 is made by a catalyst heating process and a growth process, in which the raw material gas and the carrier gas are supplied to make The source gas is in contact with the catalyst to grow the nano-carbon structure.

In the catalyst heating process, the catalyst is heated to a heating temperature equal to or higher than the minimum temperature, and the raw material gas can be decomposed by the catalyst at the heating temperature. In this case, the heating temperature can be appropriately adjusted to, for example, 600 ° C. or higher according to the type of the catalyst and the type of the raw material gas.

In the growth process, a source gas and a carrier gas are supplied to the catalyst to grow the nano carbon tube 40. Specifically, the supplied raw material gas is decomposed when it comes into contact with the surface of the heated catalyst. As the carbon atoms generated by the decomposition are bound to the catalyst surface, a nano carbon tube 40 is formed. In the growth process, the internal pressure of the reaction chamber can be appropriately adjusted to, for example, atmospheric pressure according to the reaction conditions. The reaction time can be appropriately adjusted according to the reaction conditions, the desired length of the carbon nanotube 40, and the like.

In addition, as shown in FIG. 5, the carbon nanotube 40 is coated with silicon dioxide 41 so that the silicon dioxide 41 can surround the surface of the carbon nanotube 40. Nanotubes 40 can be coated with silicon dioxide 41 by a typical method or process, such as sol-gel technology (Seeger T.) and 6 others, Chem. Phys. Lett.) 41-46, 2001; Sieg T. and 6 others, Chem. Commun., 1, 34-35, 2002; etc.), Surfactant Coupling Layer Process (Fu Q And 2 others, "Nano Lett.", 3, 329-335, 2002, etc., or sputtering annealing process (Liu JW and 5 others, "Chemical Physics Newsletter", 348, 357- 360, 2001).

In the current embodiment, the surface of the nano carbon tube 40 is directly coated with silicon dioxide 41.

According to the present invention, since the surface of the nano carbon tube 40 is coated with silicon dioxide 41, the following advantages can be obtained.

First, the surface resistivity is increased compared to a case where a pure carbon nanotube 40 is used, and thus the current leakage is reduced. In detail, when a large number of pure carbon nanotubes 40 are mixed with silicone rubber, the surface resistivity of the silicone rubber is in the range of 1 × 10 ⁸ ohms to 5 × 10 ⁸ ohms, and therefore when the pure carbon nanotubes are When 40 is applied to the test socket 10, a current leakage may occur at the insulating support portion 30. This current leakage makes it difficult to increase the number of pure nano carbon tubes 40 in the second insulating elastic material. However, in the current embodiment, the nano carbon tube 40 is coated with silicon dioxide 41 to improve the surface resistivity, and therefore, current leakage can be minimized. Therefore, although the number of the nano-carbon tubes 40 is increased, the stability can be guaranteed without current leakage. In addition, the proper surface resistivity of the silicone rubber mixed with the nano-carbon tube 40 coated with silicon dioxide 41 may be in the range of 1 × 10 ⁹ ohm to 1 × 10 ¹⁴ ohm, and preferably 1 × 10 ¹² ohms to 1 x 10 ¹⁴ ohms.

In addition, the pure carbon nanotube 40 has weak adhesion to insulating elastic materials such as silicone rubber, and therefore can be easily separated from the silicone rubber during the test, and the carbon nanotube 40 separated from the silicone rubber does not cause The tensile strength and abrasion resistance of silicone rubber are significantly improved. However, the nano-carbon tube 40 coated with silicon dioxide 41 according to the present invention has strong adhesion to silicone rubber and maintains adhesion even during frequent testing, thereby ensuring improved tensile strength over a long period of time. And abrasion resistance. Specifically, the nano carbon tube 40 coated with silicon dioxide 41 is used as a filler, which can maintain the silicone rubber with high tensile strength and abrasion resistance for a long period of time.

In addition, the pure nano-carbon tube 40 cannot be uniformly dispersed in the silicone rubber due to the strong intermolecular cohesive force formed by van der Waals force, and thus causes deviations in the physical properties of the silicone and hinders the improvement of the mechanical properties of the silicone the elements of. That is, the tensile strength and abrasion resistance of the silicone rubber may be significantly different between the area where the carbon nanotubes 40 are agglomerated by van der Waals and the area where the carbon nanotubes 40 are not present, which results Significant deviations occur in the physical properties of silicone rubber.

However, the van der Waals power possessed by the nanometer carbon tube 40 coated with silicon dioxide 41 is reduced, and therefore, the nanometer carbon tube 40 coated with silicon dioxide 41 can be uniformly dispersed due to a dispersing force. That is, although the nano-tube particles of the pure nano-carbon tube 40 have high cohesion and therefore cannot be uniformly dispersed, as shown in FIG. 1, the nano-tube particles of the nano-carbon tube 40 of the current embodiment have Weak cohesion and therefore uniformly dispersed in the insulating support portion 30 as shown in FIG. 3.

In addition, since the nano carbon tube 40 according to the present invention is coated with silicon dioxide 41, current leakage does not substantially occur, and therefore, a necessary number of the nano carbon tubes 40 can be sufficiently included in the silicone rubber. Therefore, since the carbon material has a unique heat dissipation characteristic (proportional to the amount of the carbon material), sufficient resistance stability can still be obtained at high temperatures.

The test socket 10 according to the embodiment of the present invention can be manufactured as follows.

First, a magnetically conductive particle 21 and a silicon dioxide-coated nano carbon tube 40 are dispersed in a liquid insulating elastic material to prepare a forming material 20A having fluidity. Then, as shown in FIG. 6, the forming material 20A is filled in the cavity of the mold, and at the same time, the frame plate 45 is located between the ferromagnetic portion 52 of the upper mold 50 and the corresponding ferromagnetic portion 57 of the lower mold 55. The frame plate 45 is placed in a mold in a state of. Next, for example, a pair of electromagnets (not shown) are placed on the upper surface of the ferromagnetic substrate 51 of the upper mold 50 and the lower surface of the ferromagnetic substrate 56 of the lower mold 55, and the pair of electromagnetics is operated. The body is such that a parallel magnetic field having an uneven intensity distribution can be applied in the thickness direction of the forming material 20A. That is, a parallel magnetic field is applied along the thickness of the forming material 20A, which has a relatively high magnetic strength between the ferromagnetic portion 52 of the upper mold 50 and the corresponding ferromagnetic portion 57 of the lower mold 55.

Therefore, as shown in FIG. 7, the conductive particles 21 dispersed in the forming material 20A agglomerate between the ferromagnetic portion 52 forming the conductive portion 20 between the ferromagnetic portion 52 of the upper mold 50 and the corresponding ferromagnetic portion 57 of the lower mold 55. In the region, and in addition, the conductive particles 21 are aligned along the thickness of the forming material 20A.

In addition, in this state, the forming material 20A is hardened, thereby forming a test socket 10 including a conductive portion 20, a ferromagnetic portion 52 arranged on the upper mold 50 and a corresponding ferromagnetic portion of the lower mold 55 Between 57, the conductive particles 21 are densely filled in the conductive portion 20 in a state of being arranged in the thickness direction of the insulating elastic material; and the insulating support portion 30 is provided around the conductive portion 20 and contains no or almost no conductive particles 21 . In this case, the carbon nanotubes 40 coated with silicon dioxide are uniformly dispersed in the conductive portion 20 and the insulating support portion 30. Specifically, since the nano carbon tube 40 is coated with silicon dioxide, the nano carbon tube 40 is uniformly mixed with the fluid forming material 20A during the manufacturing process.

The test socket 10 of the present invention has the following operation effects.

First, the test socket 10 is mounted on the inspection device 70 such that the conductive portion 20 is in contact with the pad 71 of the inspection device 70, and in this state, the test target element 60 is moved toward the test socket 10. Then, the test target element 60 is lowered so that the terminal 61 of the test target element 60 is in contact with the upper surface of the conductive portion 20 as shown in FIG. 4. Next, the inspection device 70 applies an electrical signal to the test target element 60 via the conductive portion 20 and performs an electrical test.

At this time, when the terminal 61 of the test target element 60 presses the conductive portion 20, the conductive portion 20 expands horizontally while being compressed in its thickness direction, and the insulating support portion 30 provided between the conductive portions 20 is at the conductive portion. 20 supports conductive portion 20 when expanded.

In the current embodiment, the carbon nanotubes 40 coated with silicon dioxide are uniformly dispersed in the test socket 10, and therefore when the silicone rubber (insulating elastic material) is elastically deformed, the carbon nanotubes 40 are used as Filler to improve the tensile strength and abrasion resistance of silicone rubber, thereby preventing the silicone rubber from cracking.

In addition to extruding the silicone rubber by the test target element 60, it can also be excessively expanded in a high-temperature environment to perform a burn-in test. However, according to the embodiment, since the silicon dioxide-coated nano carbon tube 40 is provided in the silicone rubber, the excessive expansion of the silicone rubber can be suppressed. That is, the nano carbon tube 40 allows the silicone rubber to expand, but controls the maximum expansion degree of the silicone rubber (the degree of expansion that causes the silicone rubber to crack), thereby preventing the silicone rubber from cracking.

In addition, since the nano carbon tube 40 is coated with silicon dioxide, current leakage can be prevented, and therefore the number of the nano carbon tubes 40 in the insulating elastic material can be increased. In addition, the nano carbon tube 40 can be firmly bonded to the silicone rubber, and the silicone rubber can be maintained elastic for a long period of time. In addition, since the nano carbon tube 40 is uniformly dispersed in the silicone rubber, the physical property deviation of the silicone rubber can be substantially zero throughout the test socket 10. In addition, since the carbon nanotube 40 has a heat dissipation characteristic, the test socket 10 can still have a stable resistance at high temperatures.

The test socket 10 of the present invention can be modified as follows.

In the above embodiment, the carbon nanotubes 40 are arranged in the insulating support portion 30. However, the present invention is not limited to this. For example, as shown in FIG. 8, the carbon nanotubes 40 may be arranged only in the conductive portion 20. In this case, the insulating support portion 30 does not contain or substantially does not contain a carbon nanotube.

In addition, as shown in FIG. 9, the carbon nanotubes 40 may be arranged in both the conductive portion 20 and the insulating support portion 30.

In addition, the carbon nanotubes 40 may be arranged only in the insulating support portion 30.

In addition, as shown in FIG. 10, an insulating sheet 31 may be attached to the upper surface of the insulating support portion 30, and the insulating sheet 31 has a plurality of connection holes 31A at positions corresponding to the conductive portion 20.

Examples of the material that can be used to form the insulating sheet 31 may include: a resin material such as a liquid crystal polymer, polyimide, polyester, polyaramide, or polyimide; a fiber-reinforced resin material such as glass fiber reinforced Epoxy resin, glass fiber reinforced polyester resin, or glass fiber reinforced polyimide resin; and composite resin materials containing inorganic materials such as alumina or boron nitride in epoxy resin and the like .

When used in a high temperature environment test socket 10, the insulating sheet 31 may preferably have in the range of K 3 × 10 ^-5 / K or less than 3 × 10 ^-5 /, more preferably at 1 × 10 ^-6 / A coefficient of linear thermal expansion in the range of K to 2 × 10 ^-5 / K, and particularly preferably in the range of 1 × 10 ^-6 / K to 6 × 10 ^-6 / K. In this case, misalignment caused by thermal expansion of the insulating sheet 31 can be suppressed.

The insulating sheet 31 is attached to the upper surface of the insulating support portion 30 as a part of the insulating support portion 30, and therefore foreign matter from the test target element cannot directly reach the insulating support portion 30 but accumulates on the insulating support portion 30. In addition, since the insulating sheet 31 is attached to the upper surface of the insulating support portion 30, excessive expansion of the silicone rubber can be suppressed.

In addition, as shown in FIG. 11, a plurality of conductive protruding portions 25 protruding upward from the conductive portion 20 may be additionally provided on the upper surface of the conductive portion 20. In this case, the conductive protruding portion 25 is located above the surface of the insulating support portion 30. In this case, the nano carbon tube 40 may be included only in the conductive protruding portion 25.

In addition, as shown in FIG. 12, the nano carbon tube 40 may be arranged in the conductive portion 20, the insulating support portion 30, and the conductive protruding portion 25 of the test socket 10.

In addition, as shown in FIG. 13, the conductive protruding portion 25 may be embedded in the connection hole 31A of the insulating sheet 31 in a state where the insulating sheet 31 is attached to the upper surface of the insulating edge support portion 30 and the insulating sheet 31 support.

Although the test socket of the present invention has been described based on various embodiments, the present invention is not limited to the embodiments, but various forms and forms of the embodiments can be made without departing from the spirit and scope of the present invention. Changes in details.

10‧‧‧test socket

20‧‧‧ conductive part

20A‧‧‧Forming material

21‧‧‧ conductive particles

25‧‧‧ conductive protrusion

30‧‧‧ Insulation support

31‧‧‧Insulation sheet

31A‧‧‧Connecting hole

40‧‧‧nanometer carbon tube

41‧‧‧Silica dioxide

45‧‧‧frame board

50‧‧‧Up mold

51‧‧‧ Ferromagnetic substrate

52‧‧‧ Ferromagnetic Section

55‧‧‧mould

56‧‧‧ Ferromagnetic substrate

57‧‧‧ Ferromagnetic section

60‧‧‧Test target component

61‧‧‧terminal

70‧‧‧Inspection device

71‧‧‧ pad

FIG. 1 is a schematic diagram illustrating a related art test socket.

FIG. 2 is a diagram illustrating an operation state of the test socket shown in FIG. 1. FIG.

FIG. 3 is a schematic diagram illustrating a test socket according to the present invention.

FIG. 4 is a diagram illustrating an operation state of the test socket shown in FIG. 3.

FIG. 5 is a schematic view specifically illustrating a silicon dioxide-coated nano carbon tube according to the present invention.

6 and 7 are schematic diagrams illustrating a manufacturing process of the test socket shown in FIG. 3.

8 to 13 are schematic diagrams illustrating a test socket according to other embodiments of the present invention.

Claims (10)

A test socket configured to be placed between a test target element and a test device to electrically connect a plurality of terminals of the test target element to a plurality of pads of the test device, the test socket includes: a plurality of A conductive portion, among the plurality of conductive portions, a plurality of conductive particles are arranged in the first insulating elastic material in a thickness direction of the first insulating elastic material, and the plurality of conductive portions are disposed in contact with the test target At positions corresponding to the plurality of terminals of the element; an insulating support portion arranged between the plurality of conductive portions and surrounding and supporting the plurality of conductive portions, the insulating support portion including a second insulating elastic material; and A plurality of nano carbon tubes are dispersed in the insulating support portion, wherein the surfaces of the plurality of nano carbon tubes are coated with silicon dioxide. The test socket according to item 1 of the scope of patent application, wherein the insulating support portion containing the plurality of nano carbon tubes has a surface resistivity of 10 ⁹ ohms to 10 ¹⁴ ohms. The test socket according to item 1 of the scope of patent application, wherein the plurality of nano carbon tubes are uniformly dispersed in the insulating support portion. The test socket of claim 1, wherein the second insulating elastic material comprises a silicone rubber. The test socket according to item 1 of the scope of patent application, wherein the plurality of nanometer carbon tubes coated with silicon dioxide are dispersed in the first insulating elastic material of the plurality of conductive portions. The test socket according to item 1 of the scope of patent application, wherein an insulating sheet is attached to an upper surface of the insulating support portion, and the insulating sheet includes a plurality of connection holes at positions corresponding to the plurality of conductive portions . The test socket according to item 1 of the scope of patent application, wherein the plurality of nano carbon tubes are more dispersed in the plurality of conductive portions. A test socket configured to be placed between a test target element and a test device to electrically connect a plurality of terminals of the test target element to a plurality of pads of the test device, the test socket includes: a plurality of A conductive portion, among the plurality of conductive portions, a plurality of conductive particles are arranged in the first insulating elastic material in a thickness direction of the first insulating elastic material, and the plurality of conductive portions are disposed in contact with the test target At positions corresponding to the plurality of terminals of the element; an insulating support portion arranged between the plurality of conductive portions and surrounding and supporting the plurality of conductive portions, the insulating support portion including a second insulating elastic material; and A plurality of nano carbon tubes are dispersed in the plurality of conductive portions, and the surfaces of the plurality of nano carbon tubes are coated with silicon dioxide. A test socket configured to be placed between a test target element and a test device to electrically connect a plurality of terminals of the test target element to a plurality of pads of the test device, the test socket includes: a plurality of A conductive portion, among the plurality of conductive portions, a plurality of conductive particles are arranged in the first insulating elastic material in a thickness direction of the first insulating elastic material, and the plurality of conductive portions are disposed in contact with the test target Positions corresponding to the plurality of terminals of the element; an insulating support portion arranged between the plurality of conductive portions and surrounding and supporting the plurality of conductive portions, the insulating support portion including a second insulating elastic material; and Conductive protrusions protruding upward from the plurality of conductive portions above the surface of the insulating support portion; and a plurality of nanometer carbon tubes dispersed in the plurality of conductive protrusion portions, wherein the plurality of nanometers The surface of the carbon tube is coated with silicon dioxide. The test socket according to item 9 of the scope of patent application, wherein an insulating sheet is attached to an upper surface of the insulating support portion, and the insulating sheet includes a plurality of connection holes at positions corresponding to the plurality of conductive portions And the plurality of conductive protruding portions are embedded in the plurality of connection holes of the insulating sheet.