TW201917430A - Light source apparatus having high output power - Google Patents

Light source apparatus having high output power Download PDF

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Publication number
TW201917430A
TW201917430A TW107113878A TW107113878A TW201917430A TW 201917430 A TW201917430 A TW 201917430A TW 107113878 A TW107113878 A TW 107113878A TW 107113878 A TW107113878 A TW 107113878A TW 201917430 A TW201917430 A TW 201917430A
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light source
row
laser
laser light
laser beam
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TW107113878A
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Chinese (zh)
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TWI667506B (en
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金秀炫
金根徹
嚴基榮
成圭棟
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南韓商Eo科技股份有限公司
南韓商Eol股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30Collimators
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)

Abstract

A high-power light source device having a compact structure which efficiently combines laser beams emitted from a plurality of laser light sources is provided. The high-power light source device includes: a first row of laser light sources and a second row of laser light sources arranged to face each other; a third row of reflective mirrors arranged outside the second row of laser light sources; a fourth row of reflective mirrors arranged outside the first row of laser light sources; and a beam combiner. The first row of laser light sources and the second row of laser light sources are staggered, the first row of laser light sources are arranged to have a step difference with each other, and the second row of laser light sources are arranged to have a step difference with each other.

Description

具有高輸出功率的光源裝置Light source device with high output power

本發明是有關於一種高輸出光源裝置,詳細而言,有關於一種藉由有效率地將自多個雷射光源射出的雷射光束耦合而具有精簡化的構造的高輸出光源裝置。BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a high output light source device, and more particularly to a high output light source device having a streamlined configuration by efficiently coupling laser beams emitted from a plurality of laser light sources.

如雷射二極體的雷射光源具有可耦合(coupling)至光纖而容易且有效率地將雷射光束傳輸至所期望之處的優點,故而利用於如雷射熔接(laser welding)、雷射焊接(laser soldering)或雷射泵源(laser pumping source)等的各種應用領域。A laser source such as a laser diode has the advantage of being coupable to an optical fiber to easily and efficiently transmit a laser beam to a desired location, and thus is utilized, for example, in laser welding, lightning. Various application fields such as laser soldering or laser pumping source.

自一個雷射二極體射出的雷射光束的輸出存在極限,故而通常使用結合有多個雷射二極體的光源裝置。於此情形時,需求一種提高雷射光束與光纖的耦合效率(coupling efficiency)且於空間上具有精簡化的構造的高輸出光源裝置。There is a limit to the output of a laser beam emitted from a laser diode, and therefore a light source device incorporating a plurality of laser diodes is generally used. In this case, there is a need for a high output light source device that improves the coupling efficiency of the laser beam to the optical fiber and has a streamlined configuration in space.

本發明的一實施例提供一種藉由有效率地將自多個雷射光源射出的雷射光耦合而具有精簡化的構造的高輸出光源裝置。An embodiment of the present invention provides a high output light source device having a streamlined configuration by efficiently coupling laser light emitted from a plurality of laser light sources.

於本發明的一觀點中,提供一種光源裝置,其包括: 第1行的雷射光源與第2行的雷射光源,彼此對向地配置; 第3行的反射鏡,反射自上述第1行的雷射光源射出的雷射光束,配置至上述第2行的雷射光源的外側; 第4行的反射鏡,反射自上述第2行的雷射光源射出的雷射光束,配置至上述第1行的雷射光源的外側;及 光束耦合器(beam combiner),將由上述第3行的反射鏡反射的雷射光束與由上述第4行的反射鏡反射的雷射光束耦合;且 上述第1行的雷射光源與上述第2行的雷射光源交錯地配置, 上述第1行的雷射光源以彼此具有階差的方式設置,上述第2行的雷射光源以彼此具有階差的方式設置。According to one aspect of the present invention, a light source device includes: a laser light source of a first row and a laser light source of a second row, which are disposed opposite to each other; and a mirror of the third row is reflected from the first The laser beam emitted by the row of laser light sources is disposed outside the laser light source of the second row; the mirror of the fourth row is reflected by the laser beam emitted from the laser light source of the second row, and is disposed above An outer side of the laser light source of the first row; and a beam combiner coupling the laser beam reflected by the mirror of the third row to the laser beam reflected by the mirror of the fourth row; The laser light sources of the first row are alternately arranged with the laser light sources of the second row, and the laser light sources of the first row are arranged with a step difference therebetween, and the laser light sources of the second row have a step difference with each other. Way to set.

彼此鄰接的一對上述第1行的雷射光源與上述第2行的雷射光源可設置至相同高度的平面上。彼此鄰接的一對上述第1行的雷射光源與上述第2行的雷射光源能夠以彼此具有階差的方式設置。A pair of laser light sources of the above-described first row adjacent to each other and the laser light source of the second row described above may be disposed on a plane of the same height. The pair of laser light sources of the first row adjacent to each other and the laser light sources of the second row described above can be provided with a step difference from each other.

可於上述第1行的雷射光源與上述第3行的反射鏡之間、及上述第2行的雷射光源與上述第4行的反射鏡之間設置快軸準直(Fast Axis Collimating,FAC)透鏡。Fast Axis Collimating can be provided between the laser source of the first row and the mirror of the third row, and between the laser source of the second row and the mirror of the fourth row. FAC) lens.

可於上述第3行的反射鏡與上述FAC透鏡之間、及上述第4行的反射鏡與上述FAC透鏡之間設置慢軸準直(Slow Axis Collimating,SAC)透鏡。A Slow Axis Collimating (SAC) lens may be disposed between the mirror of the third row and the FAC lens, and between the mirror of the fourth row and the FAC lens.

上述光束耦合器可包括偏振光束耦合器(polarization beam combiner),於上述第3行的反射鏡與上述光束耦合器之間設置偏振轉換器(polarization converter)。The beam coupler may include a polarization beam combiner, and a polarization converter is disposed between the mirror of the third row and the beam coupler.

上述光束耦合器可包括波長光束耦合器(wavelength beam combiner),於上述第3行的反射鏡與上述光束耦合器之間設置第1波長選擇元件,於上述第4行的反射鏡與上述光束耦合器之間設置第2波長選擇元件。The beam coupler may include a wavelength beam combiner, and a first wavelength selecting element is disposed between the mirror of the third row and the beam coupler, and the mirror of the fourth row is coupled to the beam A second wavelength selection element is provided between the devices.

上述光源裝置可更包括將藉由上述光束耦合器耦合的雷射光束耦合至光纖的耦合透鏡(coupling lens)。The light source device may further include a coupling lens that couples the laser beam coupled by the beam coupler to the optical fiber.

於另一觀點中,提供一種光源裝置,其包括: 第1行的雷射光源與第2行的雷射光源,彼此對向地配置; 第3行的反射鏡,反射自上述第1行的雷射光源射出的雷射光束,配置至上述第2行的雷射光源的外側; 第4行的反射鏡,反射自上述第2行的雷射光源射出的雷射光束,配置至上述第1行的雷射光源的外側;及 偏振光束耦合器,將由上述第3行的反射鏡反射的雷射光束與由上述第4行的反射鏡反射的雷射光束耦合;且 上述第1行的雷射光源與上述第2行的雷射光源交錯地配置, 上述第1行的雷射光源以彼此具有階差的方式設置,上述第2行的雷射光源以彼此具有階差的方式設置。In another aspect, a light source device includes: a laser source of a first row and a laser source of a second row disposed opposite to each other; and a mirror of the third row reflected from the first row The laser beam emitted from the laser light source is disposed outside the laser light source in the second row; the mirror in the fourth row is reflected from the laser beam emitted from the laser light source in the second row, and is arranged to the first An outer side of the row of laser light sources; and a polarizing beam coupler that couples the laser beam reflected by the mirror of the third row to the laser beam reflected by the mirror of the fourth row; and the thunder of the first row The light source is arranged alternately with the laser light sources of the second row, and the laser light sources of the first row are provided with a step difference therebetween, and the laser light sources of the second row are provided with a step difference therebetween.

自上述第1行的雷射光源射出的雷射光束與自上述第2行的雷射光源射出的雷射光束可具有相同的偏振方向(polarization direction)。The laser beam emitted from the laser light source of the first row and the laser beam emitted from the laser light source of the second row may have the same polarization direction.

自上述第1行的雷射光源射出的雷射光束與自上述第2行的雷射光源射出的雷射光束可具有不同的偏振方向。The laser beam emitted from the laser light source of the first row and the laser beam emitted from the laser light source of the second row may have different polarization directions.

於又一觀點中,提供一種光源裝置,其包括: 第1行的雷射光源與第2行的雷射光源,彼此對向地配置; 第3行的反射鏡,反射自上述第1行的雷射光源射出的雷射光束,配置至上述第2行的雷射光源的外側; 第4行的反射鏡,反射自上述第2行的雷射光源射出的雷射光束,配置至上述第1行的雷射光源的外側;及 波長光束耦合器,將由上述第3行的反射鏡反射的雷射光束與由上述第4行的反射鏡反射的雷射光束耦合;且 上述第1行的雷射光源與上述第2行的雷射光源交錯地配置, 上述第1行的雷射光源以彼此具有階差的方式設置,上述第2行的雷射光源以彼此具有階差的方式設置。In still another aspect, a light source device includes: a laser source of a first row and a laser source of a second row disposed opposite to each other; and a mirror of the third row reflected from the first row The laser beam emitted from the laser light source is disposed outside the laser light source in the second row; the mirror in the fourth row is reflected from the laser beam emitted from the laser light source in the second row, and is arranged to the first a laser beam coupler, and a wavelength beam coupler that couples the laser beam reflected by the mirror of the third row to the laser beam reflected by the mirror of the fourth row; and the Ray of the first row The light source is arranged alternately with the laser light sources of the second row, and the laser light sources of the first row are provided with a step difference therebetween, and the laser light sources of the second row are provided with a step difference therebetween.

自上述第1行的雷射光源射出的雷射光束與自上述第2行的雷射光源射出的雷射光束可具有相同的波長範圍。The laser beam emitted from the laser light source of the first row described above and the laser beam emitted from the laser light source of the second row described above may have the same wavelength range.

可於上述第3行的反射鏡與上述光束耦合器之間設置第1波長選擇元件,於上述第4行的反射鏡與上述光束耦合器之間設置第2波長選擇元件。上述第1波長選擇元件及第2波長選擇元件可包括體布勒格光柵(Volume Bragg Grating,VBG)。A first wavelength selecting element may be disposed between the mirror of the third row and the beam coupler, and a second wavelength selecting element may be provided between the mirror of the fourth row and the beam coupler. The first wavelength selection element and the second wavelength selection element may include a Volume Bragg Grating (VBG).

根據本發明的例示性的實施例,可實現藉由空間耦合及偏振耦合自雷射光源射出的雷射光束而將光損耗最小化的高效率及高輸出的光源裝置。另外,彼此交錯地配置雷射光源,將反射鏡設置至雷射光源的外側,藉此可製作更精簡化的構造的光源裝置。另外,亦可耦合具有不同的波長範圍的雷射光束而耦合至光纖。According to an exemplary embodiment of the present invention, a high-efficiency and high-output light source device that minimizes optical loss by spatially coupling and polarization-coupled laser beams emitted from a laser source can be realized. Further, the laser light source is arranged alternately with each other, and the mirror is disposed outside the laser light source, whereby a light source device having a more simplified structure can be produced. Alternatively, a laser beam having a different wavelength range can be coupled to couple to the fiber.

以下,參照隨附圖式,詳細地對本發明的實施例進行說明。以下所例示的實施例是為了向於本技術領域內具有常識者說明本發明而提供,並不限定本發明的範圍。於圖中,相同的參照符號表示相同的構成要素,為了明確地進行說明,可誇張地表示各構成要素的尺寸或厚度。另外,於說明為特定的物質層存在於基板或其他層時,上述物質層可直接與基板或其他層相接而存在,亦可於上述物質層與基板或其他層之間存在另外的第3層。並且,於下述實施例中,構成各層的物質為示例,因此除此以外亦可使用其他物質。Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments exemplified below are provided to illustrate the invention to those skilled in the art, and do not limit the scope of the invention. In the drawings, the same reference numerals are given to the same components, and the size or thickness of each component can be exaggerated for the sake of clarity. In addition, when it is stated that a specific substance layer exists on a substrate or another layer, the substance layer may exist directly in contact with a substrate or another layer, or another third may exist between the substance layer and the substrate or other layer. Floor. Further, in the following examples, the substances constituting each layer are exemplified, and therefore other substances may be used in addition to the above.

圖1是表示本發明的例示性的實施例的光源裝置的俯視圖。並且,圖2是圖1所示的光源裝置的側視圖。Fig. 1 is a plan view showing a light source device according to an exemplary embodiment of the present invention. 2 is a side view of the light source device shown in FIG. 1.

參照圖1及圖2,光源裝置100包括設置至基板101上的雷射光源、反射鏡及光束耦合器(beam combiner)。雷射光源可配置成2行。具體而言,雷射光源可包括彼此隔開而對向地配置的第1行的雷射光源110與第2行的雷射光源120。第1行的雷射光源110可包括第1雷射光源111、第2雷射光源112及第3雷射光源113,第2行的雷射光源120可包括第4雷射光源121、第5雷射光源122及第6雷射光源123。此處,第1行的雷射光源110與第2行的雷射光源120可彼此交錯地配置。即,第1雷射光源111、第2雷射光源112及第3雷射光源113可與第4雷射光源121、第5雷射光源122及第6雷射光源123交錯地配置。Referring to FIGS. 1 and 2, the light source device 100 includes a laser light source, a mirror, and a beam combiner disposed on the substrate 101. The laser source can be configured in 2 rows. Specifically, the laser light source may include the laser light source 110 of the first row and the laser light source 120 of the second row which are disposed opposite to each other and opposed to each other. The laser light source 110 of the first row may include a first laser light source 111, a second laser light source 112, and a third laser light source 113. The laser light source 120 of the second row may include a fourth laser light source 121, and a fifth The laser light source 122 and the sixth laser light source 123. Here, the laser light source 110 of the first row and the laser light source 120 of the second row may be alternately arranged with each other. In other words, the first laser light source 111, the second laser light source 112, and the third laser light source 113 can be alternately arranged with the fourth laser light source 121, the fifth laser light source 122, and the sixth laser light source 123.

於隨附圖式中,例示性地表示第1行的雷射光源110及第2行的雷射光源120分別包括3個雷射光源的情形。然而,上述情形僅為示例,除此之外,亦可設置各種個數的雷射光源。In the accompanying drawings, the case where the laser light source 110 of the first row and the laser light source 120 of the second row respectively include three laser light sources is exemplarily shown. However, the above situation is merely an example, and in addition to this, various numbers of laser light sources may be provided.

圖3是表示可應用至圖1所示的光源裝置的雷射光源的立體圖。圖3所示的雷射光源115與圖1所示的第1雷射光源至第6雷射光源111、112、113、121、122、123相同。Fig. 3 is a perspective view showing a laser light source applicable to the light source device shown in Fig. 1. The laser light source 115 shown in Fig. 3 is the same as the first laser light source to the sixth laser light source 111, 112, 113, 121, 122, and 123 shown in Fig. 1 .

參照圖3,雷射光源115可包括子安裝基板115a及接合於上述子安裝基板115a的雷射二極體115b。雷射二極體115b作為雷射光束的產生源,可製作成半導體晶片形態。此種雷射二極體115b可藉由焊料(solder,未圖示)而接合至子安裝基板115a的金屬層(未圖示)上。子安裝基板111a例如可包括如AlN、BeO等的導熱性優異的物質。Referring to FIG. 3, the laser light source 115 may include a sub-mount substrate 115a and a laser diode 115b bonded to the sub-mount substrate 115a. The laser diode 115b is used as a source of a laser beam and can be fabricated in the form of a semiconductor wafer. Such a laser diode 115b can be bonded to a metal layer (not shown) of the sub-mount substrate 115a by solder (not shown). The submount substrate 111a may include, for example, a material having excellent thermal conductivity such as AlN or BeO.

圖4a是圖3所示的雷射光源的俯視圖,圖4b是圖3所示的雷射光源的前視圖,圖4c是圖3所示的雷射光源的側視圖。於圖4a及圖4c中表示自雷射二極體115b射出的雷射光束L發散的情形。4a is a plan view of the laser light source shown in FIG. 3, FIG. 4b is a front view of the laser light source shown in FIG. 3, and FIG. 4c is a side view of the laser light source shown in FIG. The case where the laser beam L emitted from the laser diode 115b is diverged is shown in Figs. 4a and 4c.

參照圖4a至圖4c,自雷射二極體115b射出的雷射光束L可沿水平方向(D1方向)及垂直方向(D2方向)發散。此處,雷射光束L發散的角度根據方向而發生變化。具體而言,雷射光束L沿水平方向(D1方向)發散的角度θ1與沿垂直方向(D2方向)發散的角度θ2不同。4a to 4c, the laser beam L emitted from the laser diode 115b can be diverged in the horizontal direction (D1 direction) and the vertical direction (D2 direction). Here, the angle at which the laser beam L diverges changes depending on the direction. Specifically, the angle θ1 at which the laser beam L diverges in the horizontal direction (D1 direction) is different from the angle θ2 that diverges in the vertical direction (D2 direction).

自雷射二極體115b射出的雷射光束L中的沿水平方向(D1方向)發散的光束於空間上具有多模(multi-mode),其發散角θ1為大致8°至12°左右而相對較小。並且,自雷射二極體115b射出的雷射光束L中的沿垂直方向(D2方向)發散的光束於空間上具有單模(single-mode),其發散角θ2為大致28°至35°左右而相對較大。通常,垂直方向(D2方向)被稱為高速軸(fast axis)方向,水平方向(D1方向)被稱為低速軸(slow axis)方向。如上所述,自雷射二極體115b射出的雷射光束L的發散角根據方向而不同,故而為了使自雷射二極體115b射出的雷射光束L變成平行光,需要各方向的準直透鏡。The light beam diverging in the horizontal direction (D1 direction) from the laser beam L emitted from the laser diode 115b has a multi-mode in space, and the divergence angle θ1 is approximately 8° to 12°. Relatively small. Further, the light beam diverging in the vertical direction (D2 direction) among the laser beams L emitted from the laser diode 115b has a single-mode in space, and the divergence angle θ2 is approximately 28° to 35°. It is relatively large from left to right. Generally, the vertical direction (D2 direction) is referred to as a fast axis direction, and the horizontal direction (D1 direction) is referred to as a slow axis direction. As described above, since the divergence angle of the laser beam L emitted from the laser diode 115b differs depending on the direction, in order to make the laser beam L emitted from the laser diode 115b into parallel light, it is necessary to be accurate in each direction. Straight lens.

為了使沿垂直方向(D2方向)、即高速軸方向發散的光束變平行,需要高速軸方向的焦距相對較短的準直透鏡、即FAC(Fast Axis Collimating)透鏡,為了使沿水平方向(D1方向)、即低速軸方向發散的光束變平行,需要低速軸方向的焦距相對較長的準直透鏡、即SAC(Slow Axis Collimating)透鏡。藉此,自雷射二極體115b射出的雷射光束L可藉由通過FAC透鏡及SAC透鏡而具有沿低速軸方向較長的橢圓形態的剖面。In order to make the light beams diverging in the vertical direction (D2 direction), that is, in the high-speed axis direction, a collimator lens having a relatively short focal length in the high-speed axial direction, that is, a FAC (Fast Axis Collimating) lens is required, in order to make it in the horizontal direction (D1) The direction, that is, the beam diverging in the direction of the low speed axis becomes parallel, and a collimator lens having a relatively long focal length in the low speed axis direction, that is, a SAC (Slow Axis Collimating) lens is required. Thereby, the laser beam L emitted from the laser diode 115b can have a cross section of an elliptical shape that is long in the direction of the low speed axis by the FAC lens and the SAC lens.

再次參照圖1及圖2,第1雷射光源111、第2雷射光源112及第3雷射光源113射出第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,第4雷射光源121、第5雷射光源122及第6雷射光源123射出第4雷射光束L4、第5雷射光束L5及第6雷射光束L6。此處,第1雷射光束L1至第6雷射光束L6可具有相同的偏振方向(polarization direction)、例如第1偏振方向。Referring again to FIGS. 1 and 2, the first laser light source 111, the second laser light source 112, and the third laser light source 113 emit the first laser beam L1, the second laser beam L2, and the third laser beam L3. The fourth laser light source 121, the fifth laser light source 122, and the sixth laser light source 123 emit the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6. Here, the first to sixth laser beams L1 to L6 may have the same polarization direction, for example, the first polarization direction.

構成第1行的雷射光源110的第1雷射光源111、第2雷射光源112及第3雷射光源113與構成第2行的雷射光源120的第4雷射光源121、第5雷射光源122及第6雷射光源123交錯地配置。藉此,第1雷射光束L1經過第4雷射光源121與第5雷射光源122之間,第2雷射光束L2經過第5雷射光源122與第6雷射光源123之間。並且,第4雷射光束L4經過第1雷射光源111與第2雷射光源112之間,第5雷射光束L5經過第2雷射光源112與第3雷射光源113之間。The first laser light source 111, the second laser light source 112, and the third laser light source 113 constituting the laser light source 110 of the first row, and the fourth laser light source 121 and the fifth laser light source 120 constituting the second row The laser light source 122 and the sixth laser light source 123 are alternately arranged. Thereby, the first laser beam L1 passes between the fourth laser light source 121 and the fifth laser light source 122, and the second laser beam L2 passes between the fifth laser light source 122 and the sixth laser light source 123. Further, the fourth laser beam L4 passes between the first laser light source 111 and the second laser light source 112, and the fifth laser beam L5 passes between the second laser light source 112 and the third laser light source 113.

於本實施例中,構成第1行的雷射光源110的第1雷射光源111、第2雷射光源112及第3雷射光源113以具有特定尺寸h的階差的方式設置,以便第1雷射光束L1、第2雷射光束L2及第3雷射光束L3不干涉。並且,構成第2行的雷射光源120的第4雷射光源121、第5雷射光源122及第6雷射光源123以具有特定尺寸h的階差的方式設置,以便第4雷射光束L4、第5雷射光束L5及第6雷射光束L6不干涉。另外,鄰接的第1行的雷射光源110與第2行的雷射光源120設置於相同高度的平面上。In the present embodiment, the first laser light source 111, the second laser light source 112, and the third laser light source 113 constituting the laser light source 110 of the first row are disposed so as to have a step of a specific size h so as to be 1 The laser beam L1, the second laser beam L2, and the third laser beam L3 do not interfere. Further, the fourth laser light source 121, the fifth laser light source 122, and the sixth laser light source 123 constituting the laser light source 120 of the second row are disposed so as to have a step of a specific size h so that the fourth laser beam is provided. L4, the fifth laser beam L5, and the sixth laser beam L6 do not interfere. Further, the laser light source 110 of the adjacent first row and the laser light source 120 of the second row are disposed on a plane of the same height.

具體而言,參照圖2,基板101可包括按照特定尺寸h的階差而依序設置的第1面S1、第2面S2及第3面S3,此處,第1面S1具有最高的高度,第3面S3具有最低的高度。構成第1行的雷射光源110的第1雷射光源111、第2雷射光源112及第3雷射光源113可分別設置至基板101的第1面S1、第2面S2及第3面S3。並且,構成第2行的雷射光源120的第4雷射光源121、第5雷射光源122及第6雷射光源123可分別設置至基板101的第1面S1、第2面S2及第3面S3。因此,彼此鄰接的第1雷射光源111及第4雷射光源121可設置至第1面S1,彼此鄰接的第2雷射光源112及第5雷射光源122設置至第2面S2,並且,彼此鄰接的第3雷射光源113及第6雷射光源123設置至第3面S3。Specifically, referring to FIG. 2, the substrate 101 may include a first surface S1, a second surface S2, and a third surface S3 which are sequentially disposed according to a step of a specific size h. Here, the first surface S1 has the highest height. The third surface S3 has the lowest height. The first laser light source 111, the second laser light source 112, and the third laser light source 113 constituting the laser light source 110 of the first row can be respectively provided to the first surface S1, the second surface S2, and the third surface of the substrate 101. S3. Further, the fourth laser light source 121, the fifth laser light source 122, and the sixth laser light source 123 constituting the laser light source 120 of the second row can be provided to the first surface S1 and the second surface S2 of the substrate 101, respectively. 3 sides S3. Therefore, the first laser light source 111 and the fourth laser light source 121 adjacent to each other can be provided to the first surface S1, and the second laser light source 112 and the fifth laser light source 122 adjacent to each other are provided to the second surface S2, and The third laser light source 113 and the sixth laser light source 123 adjacent to each other are provided to the third surface S3.

反射鏡可配置成2行。具體而言,反射鏡可包括配置至第2行的雷射光源120的外側的第3行的反射鏡170、及配置至第1行的雷射光源110的外側的第4行的反射鏡180。此處,第3行的反射鏡170可包括反射第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的第1反射鏡171、第2反射鏡172及第3反射鏡173。此種第1反射鏡171、第2反射鏡172及第3反射鏡173可分別設置至基板101的第1面S1、第2面S2及第3面S3。第4行的反射鏡180可包括反射第4雷射光束L4、第5雷射光束L5及第6雷射光束L6的第4反射鏡181、第5反射鏡182及第6反射鏡183。此種第4反射鏡181、第5反射鏡182及第6反射鏡183可分別設置至基板101的第1面S1、第2面S2及第3面S3。The mirror can be configured in 2 rows. Specifically, the mirror may include a mirror 170 arranged in the third row outside the laser light source 120 in the second row, and a mirror 180 in the fourth row disposed outside the laser light source 110 in the first row. . Here, the mirror 170 of the third row may include the first mirror 171, the second mirror 172, and the third mirror that reflect the first laser beam L1, the second laser beam L2, and the third laser beam L3. 173. The first mirror 171, the second mirror 172, and the third mirror 173 can be provided to the first surface S1, the second surface S2, and the third surface S3 of the substrate 101, respectively. The mirror 180 of the fourth row may include a fourth mirror 181, a fifth mirror 182, and a sixth mirror 183 that reflect the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6. The fourth mirror 181, the fifth mirror 182, and the sixth mirror 183 can be provided to the first surface S1, the second surface S2, and the third surface S3 of the substrate 101, respectively.

於第1雷射光源111與第1反射鏡171之間設置有第1FAC透鏡131及第1SAC透鏡151。第1FAC透鏡131發揮使自第1雷射光源111射出的第1雷射光束L1相對於高速軸方向變平行的作用,第1SAC透鏡151發揮使經由第1FAC透鏡131的第1雷射光束L1相對於低速軸方向變平行的作用。經由第1FAC透鏡131及第1SAC透鏡151的第1雷射光束L1可具有沿低速軸方向較長的橢圓形態的剖面。The first FAC lens 131 and the first SAC lens 151 are provided between the first laser light source 111 and the first mirror 171. The first FAC lens 131 functions to parallelize the first laser beam L1 emitted from the first laser light source 111 with respect to the high-speed axis direction, and the first SAC lens 151 functions to make the first laser beam L1 via the first FAC lens 131 relatively The effect of paralleling in the direction of the low speed axis. The first laser beam L1 passing through the first FAC lens 131 and the first SAC lens 151 may have a cross section in an elliptical shape that is long in the low speed axis direction.

於第2雷射光源112與第2反射鏡172之間設置有第2FAC透鏡132及第2SAC透鏡152,於第3雷射光源113與第3反射鏡173之間設置有第3FAC透鏡133及第3SAC透鏡153。於第4雷射光源131與第4反射鏡181之間設置有第4FAC透鏡141及第4SAC透鏡161,於第5雷射光源122與第5反射鏡182之間設置有第5FAC透鏡142及第5SAC透鏡162。並且,於第6雷射光源123與第6反射鏡183之間設置有第6FAC透鏡143及第6SAC透鏡163。第2FAC透鏡至第6FAC透鏡132、133、141、142、143可執行與上述第1FAC透鏡131相同的功能,第2SAC透鏡至第6SAC透鏡152、153、161、162、163執行與上述第1SAC透鏡151相同的功能。A second FAC lens 132 and a second SAC lens 152 are disposed between the second laser light source 112 and the second mirror 172, and a third FAC lens 133 and a third are disposed between the third laser light source 113 and the third mirror 173. 3SAC lens 153. A fourth FAC lens 141 and a fourth SAC lens 161 are disposed between the fourth laser light source 131 and the fourth mirror 181, and a fifth FAC lens 142 and a fifth are disposed between the fifth laser light source 122 and the fifth mirror 182. 5SAC lens 162. Further, a sixth FAC lens 143 and a sixth SAC lens 163 are provided between the sixth laser light source 123 and the sixth mirror 183. The second FAC lens to the sixth FAC lens 132, 133, 141, 142, and 143 can perform the same function as the first FAC lens 131, and the second to sixth SAC lenses 152, 153, 161, 162, and 163 perform the first SAC lens. 151 the same function.

光束耦合器可包括偏振光束耦合器(polarization beam combiner)193。並且,可於第3行的反射鏡170與偏振光束耦合器193之間的路徑上設置轉換第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的偏振方向的偏振轉換器(polarization converter)192。作為偏振轉換器192,例如可使用1/2波長板。於第1雷射光束L1至第6雷射光束L6具有第1偏振方向的情形時,經由偏振轉換器192的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可具有與第1偏振方向垂直的第2偏振方向。另一方面,於第3行的反射鏡170與偏振轉換器192之間可更設置使第1雷射光束L1、第2雷射光束L2及第3雷射光束L3朝向偏振轉換器192側反射的鏡191。The beam coupler can include a polarization beam combiner 193. Further, polarization conversion for converting the polarization directions of the first laser beam L1, the second laser beam L2, and the third laser beam L3 can be provided on the path between the mirror 170 of the third row and the polarization beam coupler 193. Polarization converter 192. As the polarization converter 192, for example, a 1/2 wavelength plate can be used. When the first laser beam L1 to the sixth laser beam L6 have the first polarization direction, the first laser beam L1, the second laser beam L2, and the third laser beam L3 that pass through the polarization converter 192 can be used. The second polarization direction is perpendicular to the first polarization direction. On the other hand, between the mirror 170 in the third row and the polarization converter 192, the first laser beam L1, the second laser beam L2, and the third laser beam L3 can be further reflected toward the polarization converter 192 side. Mirror 191.

於如上所述的構造的光源裝置100中,自第1雷射光源至第6雷射光源111、112、113、121、122、123射出第1雷射光束L1至第6雷射光束L6。此處,第1雷射光束L1至第6雷射光束L6可具有第1偏振方向。接著,自第1雷射光源111、第2雷射光源112及第3雷射光源113射出的第1雷射光束L1、第2雷射光束L2、第3雷射光束L3由第1反射鏡171、第2反射鏡172、第3反射鏡173反射。此處,如上所述,第1雷射光源111、第2雷射光源112及第3雷射光源113以具有特定尺寸h的階差的方式設置,藉此第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可於空間上耦合。另外,自第4雷射光源121、第5雷射光源122及第6雷射光源123射出的第4雷射光束L4、第5雷射光束L5、第6雷射光束L6由第4反射鏡181、第5反射鏡182、第6反射鏡183反射。此處,如上所述,第4雷射光源121、第5雷射光源122及第6雷射光源123以具有特定尺寸h的階差的方式設置,藉此第4雷射光束L4、第5雷射光束L5及第6雷射光束L6可於空間上耦合。In the light source device 100 having the above configuration, the first to sixth laser light sources L1 to L6 are emitted from the first to fourth laser light sources 111, 112, 113, 121, 122, and 123. Here, the first to sixth laser beams L1 to L6 may have a first polarization direction. Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3 emitted from the first laser light source 111, the second laser light source 112, and the third laser light source 113 are formed by the first mirror. 171. The second mirror 172 and the third mirror 173 reflect. Here, as described above, the first laser light source 111, the second laser light source 112, and the third laser light source 113 are provided with a step having a specific size h, whereby the first laser beam L1 and the second beam are provided. The laser beam L2 and the third laser beam L3 are spatially coupled. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 emitted from the fourth laser light source 121, the fifth laser light source 122, and the sixth laser light source 123 are formed by the fourth mirror. 181. The fifth mirror 182 and the sixth mirror 183 are reflected. Here, as described above, the fourth laser light source 121, the fifth laser light source 122, and the sixth laser light source 123 are provided with a step having a specific size h, whereby the fourth laser beam L4, the fifth The laser beam L5 and the sixth laser beam L6 are spatially coupled.

圖5a是表示通過圖1的A-A'平面的雷射光束的剖面的圖。Fig. 5a is a view showing a cross section of a laser beam passing through the AA' plane of Fig. 1.

參照圖5a,藉由以具有特定階差h的方式設置的第1行的雷射光源110而第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於空間上耦合,藉由以具有階差的方式設置的第2行的雷射光源120而第4雷射光束L4、第5雷射光束L5及第6雷射光束L6於空間上耦合。此處,於空間上耦合的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3之間的間隔h與第1雷射光源111、第2雷射光源112及第3雷射光源113之間的階差尺寸h相同,於空間上耦合的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6之間的間隔h與第4雷射光源121、第5雷射光源122及第6雷射光源123之間的階差尺寸h相同。另一方面,第1雷射光束L1與第4雷射光束L4、第2雷射光束L2與第5雷射光束L5、及第3雷射光束L3與第6雷射光束L6分別具有相同的高度。Referring to FIG. 5a, the first laser beam L1, the second laser beam L2, and the third laser beam L3 are spatially coupled by the laser light source 110 of the first row provided with a specific step h. The fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are spatially coupled by the laser light source 120 of the second row provided with a step. Here, the interval h between the first laser beam L1, the second laser beam L2, and the third laser beam L3 that are spatially coupled with the first laser light source 111, the second laser light source 112, and the third The step size h between the laser light sources 113 is the same, and the space h between the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6, which are spatially coupled, and the fourth laser light source 121 are the same. The step size h between the fifth laser source 122 and the sixth laser source 123 is the same. On the other hand, the first laser beam L1 and the fourth laser beam L4, the second laser beam L2 and the fifth laser beam L5, and the third laser beam L3 and the sixth laser beam L6 have the same respectively. height.

其次,於空間上耦合的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3在由鏡反射後入射至偏振轉換器192。偏振轉換器192可設置至基板101的第3面S3。此處,偏振轉換器192可發揮將入射的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的第1偏振方向轉換成第2偏振方向的作用。此處,第2偏振方向可垂直於第1偏振方向。具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3藉由經由偏振轉換器192而入射至偏振光束耦合器193。另外,於空間上耦合的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6亦入射至偏振光束耦合器193,上述第4雷射光束L4、第5雷射光束L5及第6雷射光束L6具有第1偏振方向。Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3, which are spatially coupled, are incident on the polarization converter 192 after being reflected by the mirror. The polarization converter 192 can be disposed to the third surface S3 of the substrate 101. Here, the polarization converter 192 can function to convert the first polarization directions of the incident first laser beam L1, the second laser beam L2, and the third laser beam L3 into the second polarization direction. Here, the second polarization direction may be perpendicular to the first polarization direction. The first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction are incident on the polarization beam coupler 193 via the polarization converter 192. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6, which are spatially coupled, are also incident on the polarization beam coupler 193, the fourth laser beam L4 and the fifth laser beam L5. And the sixth laser beam L6 has a first polarization direction.

偏振光束耦合器193可使具有第1偏振方向的光束透過,且反射具有第2偏振方向的光束。偏振光束耦合器193可設置至基板101的第3面S3。藉此,具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3由偏振光束耦合器193反射,具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6透過偏振光束耦合器,藉此具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3與具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6耦合。The polarization beam coupler 193 transmits a light beam having a first polarization direction and reflects a light beam having a second polarization direction. The polarization beam coupler 193 can be disposed to the third face S3 of the substrate 101. Thereby, the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction are reflected by the polarization beam coupler 193, and the fourth laser beam L4 having the first polarization direction is The fifth laser beam L5 and the sixth laser beam L6 are transmitted through the polarization beam coupler, whereby the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction have the same The fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 in the polarization direction are coupled.

圖5b是表示通過圖1的B-B'平面的雷射光束的剖面的圖。Fig. 5b is a view showing a cross section of a laser beam passing through the plane BB' of Fig. 1.

參照圖5b,具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3與具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6藉由偏振光束耦合器而耦合。耦合的雷射光束L1+L4、L2+L5、L3+L6之間的間隔h與第1雷射光源111、第2雷射光源112及第3雷射光源113之間的階差尺寸h或第4雷射光源121、第5雷射光源122及第6雷射光源123之間的階差尺寸h相同。Referring to Fig. 5b, the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction and the fourth laser beam L4 and the fifth laser beam L5 having the first polarization direction are provided. And the sixth laser beam L6 is coupled by a polarization beam coupler. The interval h between the coupled laser beams L1+L4, L2+L5, L3+L6 and the step size h or the fourth laser source 121 between the first laser source 111, the second laser source 112, and the third laser source 113 The step size h between the fifth laser source 122 and the sixth laser source 123 is the same.

如上所述,自偏振光束耦合器193出射的耦合的雷射光束L1至雷射光束L6可藉由耦合透鏡(coupling lens)194而耦合至光纖199。As described above, the coupled laser beam L1 to laser beam L6 emerging from the polarization beam coupler 193 can be coupled to the fiber 199 by a coupling lens 194.

於本實施例中,第1行的雷射光源110與第2行的雷射光源120彼此交錯地配置,第3行的反射鏡170配置至第2行的雷射光源120的外側,第4行的反射鏡180配置於第1行的雷射光源110的外側。另外,第1行的雷射光源110藉由導體(未圖示)而彼此電性連接,第2行的雷射光源120藉由導體(未圖示)而彼此電性連接。此處,自第1行的雷射光源110射出的雷射光束L1、L2、L3需不受連接第2行的雷射光源120的導體的干擾而經過第2行的雷射光源120之間。另外,自第2行的雷射光源120射出的雷射光束L4、L5、L6需不受連接第1行的雷射光源110的導體的干擾而經過第1行的雷射光源110之間。In the present embodiment, the laser light source 110 of the first row and the laser light source 120 of the second row are alternately arranged, and the mirror 170 of the third row is disposed outside the laser light source 120 of the second row, the fourth The row of mirrors 180 are disposed outside the laser light source 110 of the first row. Further, the laser light sources 110 of the first row are electrically connected to each other by a conductor (not shown), and the laser light sources 120 of the second row are electrically connected to each other by a conductor (not shown). Here, the laser beams L1, L2, and L3 emitted from the laser light source 110 of the first row need to pass between the laser light sources 120 of the second row without being interfered by the conductors of the laser light source 120 connected to the second row. . Further, the laser beams L4, L5, and L6 emitted from the laser light source 120 of the second row need to pass between the laser light sources 110 of the first row without being interfered by the conductors of the laser light source 110 connected to the first row.

圖6a至圖6c是表示雷射光源之間的電性連接方法的圖。於圖6a及圖6c中,例示性地表示在自第4雷射光源121射出的第4雷射光束L4經過第1雷射光源111與第2雷射光源112之間的情形時電性連接第1雷射光源111與第2雷射光源112的方法。6a to 6c are views showing a method of electrically connecting laser light sources. 6a and 6c, it is exemplarily shown that the fourth laser beam L4 emitted from the fourth laser light source 121 is electrically connected when passing between the first laser light source 111 and the second laser light source 112. A method of the first laser light source 111 and the second laser light source 112.

參照圖6a,第1雷射光源111與第2雷射光源112藉由金屬線105而電性連接。金屬線105例如可包括Au、Al等,但並不限定於此。於此情形時,可藉由調節金屬線105的形狀而第4雷射光束L4經過金屬線105的下部。Referring to FIG. 6a, the first laser light source 111 and the second laser light source 112 are electrically connected by a metal wire 105. The metal wire 105 may include, for example, Au, Al, or the like, but is not limited thereto. In this case, the fourth laser beam L4 passes through the lower portion of the metal wire 105 by adjusting the shape of the metal wire 105.

參照圖6b,第1雷射光源111與第2雷射光源112藉由導電性構造物106而電性連接。導電性構造物106例如可包括導電性環氧樹脂等,但並不限定於此。於此情形時,可藉由調節導電性構造物106的形狀而第4雷射光束L4經過導電性構造物106的下部。Referring to FIG. 6b, the first laser light source 111 and the second laser light source 112 are electrically connected by a conductive structure 106. The conductive structure 106 may include, for example, a conductive epoxy resin, but is not limited thereto. In this case, the fourth laser beam L4 passes through the lower portion of the conductive structure 106 by adjusting the shape of the conductive structure 106.

參照圖6c,第1雷射光源111與第2雷射光源112藉由連接墊107而電性連接。於此情形時,可藉由調節連接墊107的高度而第4雷射光束L4經過連接墊1107的上部或下部。Referring to FIG. 6c, the first laser light source 111 and the second laser light source 112 are electrically connected by a connection pad 107. In this case, the fourth laser beam L4 can pass through the upper or lower portion of the connection pad 1107 by adjusting the height of the connection pad 107.

如上所述,於本實施例中,可藉由空間耦合及偏振耦合自雷射光源111、112、113、121、122、123射出的雷射光束L1至雷射光束L6而有效率地實現高輸出的光源裝置100。通常,為了實現高輸出,需增加雷射光源的個數。然而,於僅藉由利用階差的空間性耦合而增加雷射光源的個數的情形時,隨雷射光源的高度變化變大而光損耗增加,因此於增加雷射光源的個數方面存在極限。然而,可如本實施例般藉由空間耦合及偏振耦合雷射光束L1至雷射光束L6而將光損耗最小化,並且有效地增加雷射光源111、112、113、121、122、123的個數。As described above, in the present embodiment, the laser beam L1 to the laser beam L6 emitted from the laser light sources 111, 112, 113, 121, 122, 123 can be efficiently realized by spatial coupling and polarization coupling. The light source device 100 is output. Generally, in order to achieve high output, it is necessary to increase the number of laser light sources. However, in the case where the number of laser light sources is increased only by utilizing the spatial coupling of the step differences, as the height of the laser light source changes, the light loss increases, and thus the number of laser light sources increases. limit. However, the optical loss can be minimized by spatially coupling and polarization coupling the laser beam L1 to the laser beam L6 as in the present embodiment, and the laser light sources 111, 112, 113, 121, 122, 123 are effectively increased. Number.

另外,於本實施例中,彼此交錯地配置第1行的雷射光源110與第2行的雷射光源120,第3行的反射鏡170及第4行的反射鏡180設置至第1行的雷射光源110及第2行的雷射光源120的外側,藉此可實現具有更精簡化的構造的光源裝置100。並且,設置至雷射光源與反射鏡之間的SAC透鏡可根據焦距而於雷射光源與反射鏡之間的路徑上設置至各種位置,另外,亦能夠以減小透鏡的像差影響為目的而設置多個。Further, in the present embodiment, the laser light source 110 of the first row and the laser light source 120 of the second row are arranged alternately with each other, and the mirror 170 of the third row and the mirror 180 of the fourth row are set to the first row. The laser light source 110 and the outer side of the laser light source 120 of the second row can thereby realize the light source device 100 having a more simplified structure. Further, the SAC lens disposed between the laser light source and the mirror can be disposed at various positions on the path between the laser light source and the mirror according to the focal length, and can also reduce the influence of the aberration of the lens. And set more than one.

圖7是表示本發明的另一例示性的實施例的光源裝置的俯視圖。自第1行的雷射光源210射出的雷射光束L1、L2、L3的偏振方向與自第2行的雷射光源220射出的雷射光束L4、L5、L6的偏振方向不同,且未設置偏振轉換器,除此之外,圖7所示的光源裝置200與圖1所示的光源裝置100相同。Fig. 7 is a plan view showing a light source device according to another exemplary embodiment of the present invention. The polarization directions of the laser beams L1, L2, and L3 emitted from the laser light source 210 of the first row are different from those of the laser beams L4, L5, and L6 emitted from the laser light source 220 of the second row, and are not set. The light source device 200 shown in Fig. 7 is the same as the light source device 100 shown in Fig. 1 except for the polarization converter.

參照圖7,構成第1行的雷射光源210的第1雷射光源211、第2雷射光源212及第3雷射光源213可射出具有第1偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3。此處,第1雷射光源211、第2雷射光源212及第3雷射光源213可按照特定尺寸的階差而分別設置至基板201的第1面S1、第2面S2及第3面S3。並且,構成第2行的雷射光源220的第4雷射光源221、第5雷射光源222及第6雷射光源223可射出具有與第1偏振方向垂直的第2偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6。此處,第4雷射光源221、第5雷射光源222及第6雷射光源223可按照特定尺寸的階差而分別設置至基板201的第1面S1、第2面S2及第3面S3。Referring to Fig. 7, the first laser light source 211, the second laser light source 212, and the third laser light source 213 constituting the laser light source 210 of the first row can emit the first laser beam L1 having the first polarization direction. 2 laser beam L2 and third laser beam L3. Here, the first laser light source 211, the second laser light source 212, and the third laser light source 213 can be respectively provided to the first surface S1, the second surface S2, and the third surface of the substrate 201 in accordance with the step of a specific size. S3. Further, the fourth laser light source 221, the fifth laser light source 222, and the sixth laser light source 223 constituting the laser light source 220 of the second row can emit the fourth mine having the second polarization direction perpendicular to the first polarization direction. The light beam L4, the fifth laser beam L5, and the sixth laser beam L6. Here, the fourth laser light source 221, the fifth laser light source 222, and the sixth laser light source 223 can be respectively provided to the first surface S1, the second surface S2, and the third surface of the substrate 201 in accordance with the step of a specific size. S3.

第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於經由第1FAC透鏡231、第2FAC透鏡232及第3FAC透鏡233與第1SAC透鏡251、第2SAC透鏡252及第3SAC透鏡253後,由第3行的反射鏡270(即第1反射鏡271、第2反射鏡272及第3反射鏡273)反射。此處,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可於空間上耦合。並且,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6於經由第4FAC透鏡241、第5FAC透鏡242及第6FAC透鏡343、與第4SAC透鏡261、第5SAC透鏡262及第6SAC透鏡263後,由第4行的反射鏡280(即第4反射鏡281、第5反射鏡282及第6反射鏡283)反射。此處,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6可於空間上耦合。The first laser beam L1, the second laser beam L2, and the third laser beam L3 pass through the first FAC lens 231, the second FAC lens 232, the third FAC lens 233, the first SAC lens 251, the second SAC lens 252, and the third SAC lens. After 253, the mirror 270 of the third row (that is, the first mirror 271, the second mirror 272, and the third mirror 273) is reflected. Here, the first laser beam L1, the second laser beam L2, and the third laser beam L3 may be spatially coupled. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 pass through the fourth FAC lens 241, the fifth FAC lens 242 and the sixth FAC lens 343, the fourth SAC lens 261, and the fifth SAC lens 262. After the sixth SAC lens 263, it is reflected by the mirror 280 of the fourth row (that is, the fourth mirror 281, the fifth mirror 282, and the sixth mirror 283). Here, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 may be spatially coupled.

接著,具有第1偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於由鏡291反射後入射至偏振光束耦合器293,具有第2偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6亦入射至偏振光束耦合器293。偏振光束耦合器293反射具有第1偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,使具有第2偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6透過,藉此具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可與具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6耦合。Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first polarization direction are reflected by the mirror 291 and then incident on the polarization beam coupler 293, and have the fourth polarization direction. The laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are also incident on the polarization beam coupler 293. The polarization beam coupler 293 reflects the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first polarization direction, and causes the fourth laser beam L4 and the fifth mine having the second polarization direction. The first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction are transmitted through the fourth beam having the first polarization direction. The laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are coupled.

以此方式耦合的第1雷射光束L1至第6雷射光束L6可藉由耦合透鏡293而耦合至光纖299。The first to sixth laser beams L1 to L6 coupled in this manner can be coupled to the optical fiber 299 by the coupling lens 293.

圖8是表示本發明的又一例示性的實施例的光源裝置的俯視圖。並且,圖9是圖8所示的光源裝置的側視圖。圖8及圖9所示的光源裝置300除於鄰接的第1行的雷射光源310與第2行的雷射光源320之間存在階差以外,與圖1所示的光源裝置100相同。Fig. 8 is a plan view showing a light source device according to still another exemplary embodiment of the present invention. 9 is a side view of the light source device shown in FIG. 8. The light source device 300 shown in FIGS. 8 and 9 is the same as the light source device 100 shown in FIG. 1 except that there is a step difference between the adjacent laser light source 310 in the first row and the laser light source 320 in the second row.

參照圖8,光源裝置300包括設置至基板301上的雷射光源、反射鏡及光束耦合器。雷射光源可包括彼此隔開而對向地配置的第1行的雷射光源310與第2行的雷射光源320。第1行的雷射光源310可包括第1雷射光源311、第2雷射光源312及第3雷射光源313。第2行的雷射光源320可包括第4雷射光源321、第5雷射光源322及第6雷射光源323。此處,第1行的雷射光源310與第2行的雷射光源320可彼此交錯地配置。藉此,第1雷射光束L1經過第4雷射光源321與第5雷射光源322之間,第2雷射光束L2經過第5雷射光源322與第6雷射光源323之間。另外,第4雷射光束L4經過第1雷射光源311與第2雷射光源312之間,第5雷射光束L5經過第2雷射光源312與第3雷射光源313之間。Referring to FIG. 8, the light source device 300 includes a laser light source, a mirror, and a beam coupler that are disposed on the substrate 301. The laser source may include a laser source 310 of the first row and a laser source 320 of the second row that are disposed opposite each other. The laser light source 310 of the first row may include a first laser light source 311, a second laser light source 312, and a third laser light source 313. The laser light source 320 of the second row may include a fourth laser light source 321, a fifth laser light source 322, and a sixth laser light source 323. Here, the laser light source 310 of the first row and the laser light source 320 of the second row may be alternately arranged with each other. Thereby, the first laser beam L1 passes between the fourth laser light source 321 and the fifth laser light source 322, and the second laser beam L2 passes between the fifth laser light source 322 and the sixth laser light source 323. Further, the fourth laser beam L4 passes between the first laser light source 311 and the second laser light source 312, and the fifth laser beam L5 passes between the second laser light source 312 and the third laser light source 313.

構成第1行的雷射光源310的第1雷射光源311、第2雷射光源312及第3雷射光源313射出第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,構成第2行的雷射光源320的第4雷射光源321、第5雷射光源322及第6雷射光源323射出第4雷射光束L4、第5雷射光束L5及第6雷射光束L6。此處,第1雷射光束L1至第6雷射光束L6可具有相同的偏振方向、例如第1偏振方向。The first laser light source 311, the second laser light source 312, and the third laser light source 313 constituting the laser light source 310 of the first row emit the first laser beam L1, the second laser beam L2, and the third laser beam. L3, the fourth laser light source 321, the fifth laser light source 322, and the sixth laser light source 323 constituting the laser light source 320 of the second row emit the fourth laser beam L4, the fifth laser beam L5, and the sixth mine The light beam L6. Here, the first to sixth laser beams L1 to L6 may have the same polarization direction, for example, the first polarization direction.

構成第1行的雷射光源310的第1雷射光源311、第2雷射光源312及第3雷射光源313以具有特定尺寸h的階差的方式設置,以便第1雷射光束L1、第2雷射光束L2及第3雷射光束L3不干涉。並且,構成第2行的雷射光源320的第4雷射光源321、第5雷射光源322及第6雷射光源323以具有特定尺寸h的階差的方式設置,以便第4雷射光束L4、第5雷射光束L5及第6雷射光束L6不干涉。另外,鄰接的第1行的雷射光源310與第2行的雷射光源320亦以具有特定尺寸h的階差的方式設置。The first laser light source 311, the second laser light source 312, and the third laser light source 313 constituting the laser light source 310 of the first row are disposed so as to have a step of a specific size h so that the first laser beam L1 is provided. The second laser beam L2 and the third laser beam L3 do not interfere. Further, the fourth laser light source 321, the fifth laser light source 322, and the sixth laser light source 323 constituting the laser light source 320 of the second row are disposed so as to have a step of a specific size h so that the fourth laser beam is provided. L4, the fifth laser beam L5, and the sixth laser beam L6 do not interfere. Further, the adjacent laser light source 310 of the first row and the laser light source 320 of the second row are also provided with a step having a specific size h.

如圖9所示,基板301可包括按照特定尺寸h的階差而依序設置的第1面S1至第6面S6,此處,第1面S1具有最高的高度,第6面S6具有最低的高度。構成第1行的雷射光源310的第1雷射光源311、第2雷射光源312及第3雷射光源313可分別設置至基板301的第1面S1、第3面S3及第5面S5。並且,構成第2行的雷射光源320的第4雷射光源321、第5雷射光源322及第6雷射光源323可分別設置至基板301的第2面S2、第4面S4及第6面S6。As shown in FIG. 9, the substrate 301 may include first to sixth surfaces S1 to S6 which are sequentially disposed according to a step of a specific size h. Here, the first surface S1 has the highest height, and the sixth surface S6 has the lowest the height of. The first laser light source 311, the second laser light source 312, and the third laser light source 313 constituting the laser light source 310 of the first row can be respectively provided to the first surface S1, the third surface S3, and the fifth surface of the substrate 301. S5. Further, the fourth laser light source 321 , the fifth laser light source 322 , and the sixth laser light source 323 constituting the laser light source 320 of the second row can be respectively provided to the second surface S2 and the fourth surface S4 and the second surface of the substrate 301 . 6 faces S6.

反射鏡可包括配置至第2行的雷射光源320的外側的第3行的反射鏡370、與配置至第1行的雷射光源310的外側的第4行的反射鏡380。此處,第3行的反射鏡370可包括反射第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的第1反射鏡371、第2反射鏡372及第3反射鏡373,第4行的反射鏡380可包括反射第4雷射光束L4、第5雷射光束L5及第6雷射光束L6的第4反射鏡381、第5反射鏡382及第6反射鏡383。此處,第1反射鏡371、第2反射鏡372及第3反射鏡373可分別設置至基板301的第1面S1、第3面S3及第5面S5,第4反射鏡381、第5反射鏡382及第6反射鏡383可分別設置至基板301的第2面S2、第4面S4及第6面S6。The mirror may include a mirror 370 arranged in the third row outside the laser light source 320 in the second row, and a mirror 380 in the fourth row disposed outside the laser light source 310 in the first row. Here, the mirror 370 of the third row may include the first mirror 371, the second mirror 372, and the third mirror that reflect the first laser beam L1, the second laser beam L2, and the third laser beam L3. 373. The mirror 380 of the fourth row may include a fourth mirror 381, a fifth mirror 382, and a sixth mirror 383 that reflect the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6. . Here, the first mirror 371, the second mirror 372, and the third mirror 373 may be provided to the first surface S1, the third surface S3, and the fifth surface S5 of the substrate 301, respectively, and the fourth mirror 381 and the fifth mirror 5, respectively. The mirror 382 and the sixth mirror 383 can be respectively provided to the second surface S2, the fourth surface S4, and the sixth surface S6 of the substrate 301.

可於第1雷射光源311與第1反射鏡371之間設置第1FAC透鏡331及第1SAC透鏡351,可於第2雷射光源312與第2反射鏡372之間設置第2FAC透鏡332及第2SAC透鏡352,可於第3雷射光源313與第3反射鏡373之間設置第3FAC透鏡333及第3SAC透鏡353。並且,可於第4雷射光源321與第4反射鏡381之間設置第4FAC透鏡341及第4SAC透鏡361,可於第5雷射光源322與第5反射鏡382之間設置第5FAC透鏡342及第5SAC透鏡362,可於第6雷射光源323與第6反射鏡383之間設置第6FAC透鏡343及第6SAC透鏡363。The first FAC lens 331 and the first SAC lens 351 may be disposed between the first laser light source 311 and the first mirror 371, and the second FAC lens 332 and the second laser 312 may be disposed between the second laser light source 312 and the second mirror 372. The 2SAC lens 352 is provided with a third FAC lens 333 and a third SAC lens 353 between the third laser light source 313 and the third mirror 373. Further, a fourth FAC lens 341 and a fourth SAC lens 361 may be provided between the fourth laser light source 321 and the fourth mirror 381, and a fifth FAC lens 342 may be provided between the fifth laser light source 322 and the fifth mirror 382. The fifth SAC lens 362 and the sixth FAC lens 343 and the sixth SAC lens 363 are provided between the sixth laser light source 323 and the sixth mirror 383.

光束耦合器可包括偏振光束耦合器393。並且,可於第3行的反射鏡370與偏振光束耦合器393之間設置轉換第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的偏振方向的偏振轉換器392。作為上述偏振轉換器392,例如可使用1/2波長板。如上所述,於第1雷射光束L1至第6雷射光束L6具有第1偏振方向的情形時,經由偏振轉換器392的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可具有與第1偏振方向垂直的第2偏振方向。另一方面,於第3行的反射鏡370與偏振轉換器392之間可更設置使第1雷射光束L1、第2雷射光束L2及第3雷射光束L3朝向偏振轉換器392側反射的鏡391。The beam coupler can include a polarizing beam coupler 393. Further, a polarization converter 392 that converts the polarization directions of the first laser beam L1, the second laser beam L2, and the third laser beam L3 may be provided between the mirror 370 of the third row and the polarization beam coupler 393. As the polarization converter 392, for example, a half-wavelength plate can be used. As described above, when the first laser beam L1 to the sixth laser beam L6 have the first polarization direction, the first laser beam L1, the second laser beam L2, and the third thunder pass through the polarization converter 392. The light beam L3 may have a second polarization direction perpendicular to the first polarization direction. On the other hand, between the mirror 370 of the third row and the polarization converter 392, the first laser beam L1, the second laser beam L2, and the third laser beam L3 can be further reflected toward the polarization converter 392 side. Mirror 391.

於如上所述的構造的光源裝置300中,自第1雷射光源至第6雷射光源311、312、313、321、322、323射出具有第1偏振方向的第1雷射光束L1至第6雷射光束L6。接著,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可由第1反射鏡371、第2反射鏡372及第3反射鏡373反射,此處,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於空間上耦合。另外,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6可由第4反射鏡381、第5反射鏡382及第6反射鏡383反射,此處,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6於空間上耦合。In the light source device 300 having the above-described configuration, the first laser light source L1 having the first polarization direction is emitted from the first laser light source to the sixth laser light source 311, 312, 313, 321, 322, and 323. 6 laser beam L6. Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3 are reflected by the first mirror 371, the second mirror 372, and the third mirror 373. Here, the first laser beam L1, the second laser beam L2, and the third laser beam L3 are spatially coupled. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are reflected by the fourth mirror 381, the fifth mirror 382, and the sixth mirror 383. Here, the fourth laser beam L4, the fifth laser beam L5 and the sixth laser beam L6 are spatially coupled.

圖10a是表示通過圖8的A-A'平面的雷射光束的剖面的圖。Fig. 10a is a view showing a cross section of a laser beam passing through the AA' plane of Fig. 8.

參照圖10a,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於空間上耦合,此處,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3之間的間隔2h與第1雷射光源311、第2雷射光源312及第3雷射光源313之間的階差尺寸2h相同。另外,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6於空間上耦合,此處,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6之間的間隔2h與第4雷射光源321、第5雷射光源322及第6雷射光源323之間的階差尺寸2h相同。Referring to Fig. 10a, the first laser beam L1, the second laser beam L2, and the third laser beam L3 are spatially coupled, where the first laser beam L1, the second laser beam L2, and the third laser beam are coupled. The interval 2h between the light beams L3 is the same as the step size 2h between the first laser light source 311, the second laser light source 312, and the third laser light source 313. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are spatially coupled, where the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are spatially coupled. The interval 2h is the same as the step size 2h between the fourth laser light source 321, the fifth laser light source 322, and the sixth laser light source 323.

其次,於空間上耦合的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3在由鏡391反射後入射至偏振轉換器392。此處,偏振轉換器392將入射的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的第1偏振方向轉換成第2轉換方向。第2偏振方向可垂直於第1偏振方向。具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3藉由偏振轉換器392而入射至偏振光束耦合器393。並且,於空間上耦合的具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6亦入射至偏振光束耦合器393。Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3, which are spatially coupled, are reflected by the mirror 391 and then incident on the polarization converter 392. Here, the polarization converter 392 converts the first polarization directions of the incident first laser beam L1, the second laser beam L2, and the third laser beam L3 into the second conversion direction. The second polarization direction may be perpendicular to the first polarization direction. The first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction are incident on the polarization beam coupler 393 by the polarization converter 392. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 having the first polarization direction coupled in space are also incident on the polarization beam coupler 393.

偏振光束耦合器393反射具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,使具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6透過,藉此具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3與具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6耦合。The polarization beam coupler 393 reflects the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction, and causes the fourth laser beam L4 and the fifth mine having the first polarization direction. The first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction and the fourth laser beam having the first polarization direction are transmitted through the beam L5 and the sixth laser beam L6. The beam L4, the fifth laser beam L5, and the sixth laser beam L6 are coupled.

圖10b是表示通過圖1的B-B'平面的雷射光束的剖面的圖。Fig. 10b is a view showing a cross section of a laser beam passing through the BB' plane of Fig. 1;

參照圖10b,具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3與具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6藉由偏振光束耦合器393而耦合。此處,因鄰接的第1行的雷射光源310與第2雷射光源320之間的階差而第1雷射光束L1、第2雷射光束L2及第3雷射光束L3與第4雷射光束L4、第5雷射光束L5及第6雷射光束L6上下交替地設置。此種雷射光束之間的間隔h可為鄰接的第1行的雷射光源310與第2雷射光源320之間的階差尺寸h。並且,以此方式耦合的雷射光束L1至雷射光束L6可藉由耦合透鏡394而耦合至光纖399。Referring to Fig. 10b, the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction and the fourth laser beam L4 and the fifth laser beam L5 having the first polarization direction And the sixth laser beam L6 is coupled by a polarization beam coupler 393. Here, the first laser beam L1, the second laser beam L2, and the third laser beam L3 and the fourth portion are caused by the step difference between the adjacent laser light source 310 and the second laser light source 320 in the first row. The laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are alternately arranged up and down. The spacing h between such laser beams may be the step size h between the adjacent laser source 310 and the second laser source 320 in the first row. Also, the laser beam L1 to the laser beam L6 coupled in this manner can be coupled to the optical fiber 399 by the coupling lens 394.

另一方面,以上對第1雷射光源311、第4雷射光源321、第2雷射光源312、第5雷射光源322、第3雷射光源313及第6雷射光源323按照特定尺寸h的階差而依序設置的情形進行了說明。然而,第1行的雷射光源310與第2雷射光源320可利用階差而實現各種配置,並不限定於此。On the other hand, the first laser light source 311, the fourth laser light source 321, the second laser light source 312, the fifth laser light source 322, the third laser light source 313, and the sixth laser light source 323 are of a specific size. The case where the steps of h are sequentially set is explained. However, the laser light source 310 and the second laser light source 320 in the first row can be variously arranged by using the step, and are not limited thereto.

圖11a及圖11b是表示通過圖8的A-A'平面及B-B'平面的雷射光束的變形例的圖。於圖11a中表示如下情形:第1雷射光源、第2雷射光源及第3雷射光源按照特定尺寸的階差而設置,從而第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於空間上耦合,第4雷射光源、第5雷射光源及第5雷射光源按照特定尺寸的階差而設置,從而第4雷射光束L4、第5雷射光束L5及第6雷射光束L6於空間上耦合。此處,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6可形成於低於第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的位置。並且,於圖11b中表示如下情形:在圖11a所示的狀態下,具有第2偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3與具有第1偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6藉由偏振光束耦合器而耦合。11a and 11b are views showing a modification of the laser beam passing through the AA' plane and the BB' plane of Fig. 8. FIG. 11a shows a case where the first laser light source, the second laser light source, and the third laser light source are arranged in accordance with a step of a specific size, so that the first laser beam L1, the second laser beam L2, and the first 3 laser beam L3 is spatially coupled, and the fourth laser source, the fifth laser source, and the fifth laser source are arranged according to a step of a specific size, so that the fourth laser beam L4 and the fifth laser beam L5 And the sixth laser beam L6 is spatially coupled. Here, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 may be formed at positions lower than the first laser beam L1, the second laser beam L2, and the third laser beam L3. . Further, Fig. 11b shows a case where the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the second polarization direction have the first polarization in the state shown in Fig. 11a. The fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 in the direction are coupled by a polarization beam coupler.

另一方面,於圖8所示的光源裝置300中,對雷射光源311、312、313、321、322、323射出具有相同的偏振方向、例如第1偏振方向的第1雷射光束L1至第6雷射光束L6的情形進行了說明。然而,與圖7所示的構成相似地,亦可存在如下情形:第1雷射光源311、第2雷射光源312及第3雷射光源313射出具有第1偏振方向的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,第4雷射光源321、第5雷射光源322及第6雷射光源323射出具有第2偏振方向的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6。於此情形時,未設置圖8所示的偏振轉換器392。On the other hand, in the light source device 300 shown in FIG. 8, the first laser beam L1 having the same polarization direction, for example, the first polarization direction, is emitted to the laser light sources 311, 312, 313, 321, 322, and 323 to The case of the sixth laser beam L6 is explained. However, similarly to the configuration shown in FIG. 7, the first laser light source 311, the second laser light source 312, and the third laser light source 313 may emit the first laser beam having the first polarization direction. The L1, the second laser beam L2, and the third laser beam L3, the fourth laser source 321 , the fifth laser source 322, and the sixth laser source 323 emit the fourth laser beam L4 having the second polarization direction, The fifth laser beam L5 and the sixth laser beam L6. In this case, the polarization converter 392 shown in Fig. 8 is not provided.

圖12是表示本發明的又一例示性的實施例的光源裝置的俯視圖。Fig. 12 is a plan view showing a light source device according to still another exemplary embodiment of the present invention.

參照圖12,光源裝置400包括設置至基板401上的雷射光源、反射鏡及光束耦合器。雷射光源可包括彼此隔開而對向地配置的第1行的雷射光源410與第2行的雷射光源420。第1行的雷射光源410可包括第1雷射光源411、第2雷射光源412及第3雷射光源413。第2行的雷射光源420可包括第4雷射光源421、第5雷射光源422及第6雷射光源423。此處,第1行的雷射光源410與第2行的雷射光源420可彼此交錯地配置。Referring to FIG. 12, the light source device 400 includes a laser light source, a mirror, and a beam coupler that are disposed on the substrate 401. The laser source may include a laser source 410 of the first row and a laser source 420 of the second row that are disposed opposite each other. The laser light source 410 of the first row may include a first laser light source 411, a second laser light source 412, and a third laser light source 413. The laser light source 420 of the second row may include a fourth laser light source 421, a fifth laser light source 422, and a sixth laser light source 423. Here, the laser light source 410 of the first row and the laser light source 420 of the second row may be alternately arranged with each other.

構成第1行的雷射光源410的第1雷射光源411、第2雷射光源412及第3雷射光源413射出第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,構成第2行的雷射光源420的第4雷射光源421、第5雷射光源422及第6雷射光源423射出第4雷射光束L4、第5雷射光束L5及第6雷射光束L6。此處,第1雷射光束L1至第6雷射光束L6可具有相同的波長範圍。The first laser light source 411, the second laser light source 412, and the third laser light source 413 constituting the laser light source 410 of the first row emit the first laser beam L1, the second laser beam L2, and the third laser beam. L3, the fourth laser light source 421, the fifth laser light source 422, and the sixth laser light source 423 constituting the laser light source 420 of the second row emit the fourth laser beam L4, the fifth laser beam L5, and the sixth mine The light beam L6. Here, the first to sixth laser beams L1 to L6 may have the same wavelength range.

於圖12所示的光源裝置400中,雷射光源411、412、413、421、422、423的構成與圖1相同。具體而言,第1雷射光源411、第2雷射光源412及第3雷射光源413以具有特定尺寸的階差的方式設置,以便第1雷射光束L1、第2雷射光束L2及第3雷射光束L3不干涉。此處,第1雷射光源411、第2雷射光源412及第3雷射光源413可分別設置至基板401的第1面S1、第2面S2及第3面S3。第4雷射光源421、第5雷射光源422及第6雷射光源423以具有特定尺寸的階差的方式設置,以便第4雷射光束L4、第5雷射光束L5及第6雷射光束L6不干涉。此處,第4雷射光源421、第5雷射光源422及第6雷射光源423可分別設置至基板401的第1面S1、第2面S2及第3面S3。彼此鄰接的第1行的雷射光源410與第2行的雷射光源420設置於相同高度的平面上。In the light source device 400 shown in FIG. 12, the configurations of the laser light sources 411, 412, 413, 421, 422, and 423 are the same as those in FIG. Specifically, the first laser light source 411, the second laser light source 412, and the third laser light source 413 are disposed so as to have a step of a specific size so that the first laser beam L1 and the second laser beam L2 and The third laser beam L3 does not interfere. Here, the first laser light source 411, the second laser light source 412, and the third laser light source 413 may be provided to the first surface S1, the second surface S2, and the third surface S3 of the substrate 401, respectively. The fourth laser light source 421, the fifth laser light source 422, and the sixth laser light source 423 are disposed in a manner having a step of a specific size so that the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam are provided. The light beam L6 does not interfere. Here, the fourth laser light source 421, the fifth laser light source 422, and the sixth laser light source 423 may be provided to the first surface S1, the second surface S2, and the third surface S3 of the substrate 401, respectively. The laser light source 410 of the first row adjacent to each other and the laser light source 420 of the second row are disposed on a plane of the same height.

反射鏡可包括配置至第2行的雷射光源420的外側的第3行的反射鏡470、與配置至第1行的雷射光源410的外側的第4行的反射鏡480。此處,第3行的反射鏡470可包括反射第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的第1反射鏡471、第2反射鏡472及第3反射鏡473,第4行的反射鏡480可包括反射第4雷射光束L4、第5雷射光束L5及第6雷射光束L6的第4反射鏡481、第5反射鏡482及第6反射鏡483。The mirror may include a mirror 470 arranged in the third row outside the laser light source 420 in the second row, and a mirror 480 in the fourth row disposed outside the laser light source 410 in the first row. Here, the mirror 470 of the third row may include the first mirror 471, the second mirror 472, and the third mirror that reflect the first laser beam L1, the second laser beam L2, and the third laser beam L3. 473. The mirror 480 of the fourth row may include a fourth mirror 481, a fifth mirror 482, and a sixth mirror 483 that reflect the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6. .

可於第1雷射光源411與第1反射鏡471之間設置第1FAC透鏡431及第1SAC透鏡451,可於第2雷射光源412與第2反射鏡472之間設置第2FAC透鏡432及第2SAC透鏡452,可於第3雷射光源413與第3反射鏡473之間設置第3FAC透鏡433及第3SAC透鏡453。並且,可於第4雷射光源421與第4反射鏡481之間設置第4FAC透鏡441及第4SAC透鏡461,可於第5雷射光源422與第5反射鏡482之間設置第5FAC透鏡442及第5SAC透鏡462,可於第6雷射光源423與第6反射鏡483之間設置第6FAC透鏡443及第6SAC透鏡463。The first FAC lens 431 and the first SAC lens 451 may be disposed between the first laser light source 411 and the first mirror 471, and the second FAC lens 432 and the second laser light source 412 and the second mirror 472 may be disposed between the second laser light source 412 and the second mirror 472. The 2SAC lens 452 is provided with a third FAC lens 433 and a third SAC lens 453 between the third laser light source 413 and the third mirror 473. Further, a fourth FAC lens 441 and a fourth SAC lens 461 may be provided between the fourth laser light source 421 and the fourth mirror 481, and a fifth FAC lens 442 may be provided between the fifth laser light source 422 and the fifth mirror 482. The fifth SAC lens 462 and the sixth FAC lens 443 and the sixth SAC lens 463 are provided between the sixth laser light source 423 and the sixth mirror 483.

光束耦合器可包括耦合不同的波長的光束的波長光束耦合器493。作為此種波長光束耦合器493,例如可使用分色鏡(dichroic mirror),但並不限定於此。並且,可於第3行的反射鏡470與波長光束耦合器493之間設置第1波長選擇元件495,可於第4行的反射鏡480與波長光束耦合器493之間設置第2波長選擇元件496。The beam coupler can include a wavelength beam coupler 493 that couples beams of different wavelengths. As such a wavelength beam coupler 493, for example, a dichroic mirror can be used, but it is not limited thereto. Further, a first wavelength selecting element 495 can be disposed between the mirror 470 of the third row and the wavelength beam coupler 493, and a second wavelength selecting element can be disposed between the mirror 480 of the fourth row and the wavelength beam coupler 493. 496.

第1波長選擇元件495可於入射的光束的波長範圍中僅選擇性地使第1波長範圍透過,第2波長選擇元件496可於入射的光束的波長範圍中僅選擇性地使第1波長範圍透過。作為此種第1波長選擇元件495及第2波長選擇元件496,例如可使用VBG(Volume Bragg Grating)。The first wavelength selecting element 495 can selectively transmit only the first wavelength range in the wavelength range of the incident light beam, and the second wavelength selecting element 496 can selectively only make the first wavelength range in the wavelength range of the incident light beam. Through. As such a first wavelength selection element 495 and a second wavelength selection element 496, for example, VBG (Volume Bragg Grating) can be used.

於如上所述的構造的光源裝置400中,自第1雷射光源至第6雷射光源411、412、413、421、422、423射出第1雷射光束L1至第6雷射光束L6。此處,第1雷射光束L1至第6雷射光束L6可具有相同的波長範圍。然而,並非必須限定於此。接著,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可由第1反射鏡471、第2反射鏡472及第3反射鏡473反射,此處,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於空間上耦合。另外,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6可由第4反射鏡481、第5反射鏡482及第6反射鏡483反射,此處,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6於空間上耦合。In the light source device 400 having the above-described configuration, the first to sixth laser light sources L1 to L6 are emitted from the first to sixth laser light sources 411, 412, 413, 421, 422, and 423. Here, the first to sixth laser beams L1 to L6 may have the same wavelength range. However, it is not necessarily limited to this. Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3 are reflected by the first mirror 471, the second mirror 472, and the third mirror 473. Here, the first laser beam L1, the second laser beam L2, and the third laser beam L3 are spatially coupled. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are reflected by the fourth mirror 481, the fifth mirror 482, and the sixth mirror 483. Here, the fourth laser beam L4, the fifth laser beam L5 and the sixth laser beam L6 are spatially coupled.

其次,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3入射至第1波長選擇元件495。第1波長選擇元件495於第1雷射光束L1、第2雷射光束L2及第3雷射光束L3的波長範圍中僅選擇性地使第1波長範圍透過。如上所述,具有第1波長範圍的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3藉由經由第1波長選擇元件495而由鏡491反射後入射至波長光束耦合器493。並且,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6入射至第2波長選擇元件496。第2波長選擇元件496於第4雷射光束L4、第5雷射光束L5及第6雷射光束L6的波長範圍中僅選擇性地使第2波長範圍透過。具有第2波長範圍的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6藉由經由此種第2波長選擇元件而入射至波長光束耦合器494。Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3 are incident on the first wavelength selecting element 495. The first wavelength selecting element 495 selectively transmits only the first wavelength range in the wavelength range of the first laser beam L1, the second laser beam L2, and the third laser beam L3. As described above, the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first wavelength range are reflected by the mirror 491 via the first wavelength selecting element 495, and are incident to the wavelength beam coupling. 493. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are incident on the second wavelength selecting element 496. The second wavelength selecting element 496 selectively transmits only the second wavelength range in the wavelength range of the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6. The fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 having the second wavelength range are incident on the wavelength beam coupler 494 via the second wavelength selecting element.

波長光束耦合器494反射具有第1波長範圍的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,使具有第2波長範圍的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6透過,藉此具有第1波長範圍的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可與具有第2波長範圍的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6耦合。並且,以此方式耦合的雷射光束L1至雷射光束L6可藉由耦合透鏡494而耦合至光纖499。The wavelength beam coupler 494 reflects the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first wavelength range, and causes the fourth laser beam L4 and the fifth mine having the second wavelength range. The first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first wavelength range can be transmitted to the fourth wavelength range. The laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are coupled. Also, the laser beam L1 to the laser beam L6 coupled in this manner can be coupled to the optical fiber 499 by the coupling lens 494.

於本實施例的光源裝置400中,彼此交錯地配置2行雷射光源411、412、413、421、422、423,將反射鏡471、472、473、481、482、483設置至雷射光源411、412、413、421、422、423的外側,藉此可實現更精簡化的構造。另外,亦可耦合具有不同的波長範圍的雷射光束L1至雷射光束L6而入射至光纖。In the light source device 400 of the present embodiment, two rows of laser light sources 411, 412, 413, 421, 422, and 423 are alternately arranged, and the mirrors 471, 472, 473, 481, 482, and 483 are set to the laser light source. The outer sides of 411, 412, 413, 421, 422, and 423, whereby a more simplified configuration can be realized. In addition, the laser beam L1 to the laser beam L6 having different wavelength ranges may be coupled to the optical fiber.

於圖12所示的光源裝置中,對彼此鄰接的第1行的雷射光源410與第2行的雷射光源420設置於相同高度的平面上的情形進行了說明。然而,與圖8及圖9所示的構成相似地,彼此鄰接的第1行的雷射光源410與第2行的雷射光源420亦能夠以具有階差的方式設置,除此之外,雷射光源411、412、413、421、422、423亦可設置成各種形態。In the light source device shown in FIG. 12, the case where the laser light source 410 of the first row adjacent to each other and the laser light source 420 of the second row are provided on the same height plane have been described. However, similarly to the configuration shown in FIGS. 8 and 9, the laser light source 410 of the first row adjacent to each other and the laser light source 420 of the second row can be disposed with a step difference, in addition to The laser light sources 411, 412, 413, 421, 422, and 423 may be provided in various forms.

圖13是表示本發明的又一例示性的實施例的光源裝置的俯視圖。自第1行的雷射光源510射出的雷射光束L1、L2、L3的波長範圍與自第2行的雷射光源520射出的雷射光束L4、L5、L6的波長範圍不同,且未設置第1波長選擇元件及第2波長選擇元件,除此之外,圖13所示的光源裝置500與圖12所示的光源裝置400相同。Fig. 13 is a plan view showing a light source device according to still another exemplary embodiment of the present invention. The wavelength ranges of the laser beams L1, L2, and L3 emitted from the laser light source 510 of the first row are different from those of the laser beams L4, L5, and L6 emitted from the laser light source 520 of the second row, and are not set. The light source device 500 shown in Fig. 13 is the same as the light source device 400 shown in Fig. 12 except for the first wavelength selecting element and the second wavelength selecting element.

參照圖13,構成第1行的雷射光源510的第1雷射光源511、第2雷射光源512及第3雷射光源513可射出具有第1波長範圍的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3。此處,第1雷射光源511、第2雷射光源512及第3雷射光源513可分別設置至基板501的第1面S1、第2面S2及第3面S3。並且,構成第2行的雷射光源520的第4雷射光源521、第5雷射光源522及第6雷射光源523可射出具有第2波長範圍的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6。此處,第4雷射光源521、第5雷射光源522及第6雷射光源523可分別設置至基板501的第1面S1、第2面S2及第3面S3。Referring to Fig. 13, the first laser light source 511, the second laser light source 512, and the third laser light source 513 constituting the laser light source 510 of the first row can emit the first laser beam L1 having the first wavelength range. 2 laser beam L2 and third laser beam L3. Here, the first laser light source 511, the second laser light source 512, and the third laser light source 513 may be provided to the first surface S1, the second surface S2, and the third surface S3 of the substrate 501, respectively. Further, the fourth laser light source 521, the fifth laser light source 522, and the sixth laser light source 523 constituting the laser light source 520 of the second row can emit the fourth laser beam L4 and the fifth mine having the second wavelength range. The light beam L5 and the sixth laser beam L6. Here, the fourth laser light source 521, the fifth laser light source 522, and the sixth laser light source 523 may be provided to the first surface S1, the second surface S2, and the third surface S3 of the substrate 501, respectively.

第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於經由第1FAC透鏡531、第2FAC透鏡532及第3FAC透鏡533、與第1SAC透鏡551、第2SAC透鏡552及第3SAC透鏡553後,由第3行的反射鏡570(即第1反射鏡571、第2反射鏡572及第3反射鏡573)反射。此處,第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可於空間上耦合。並且,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6於經由第4FAC透鏡541、第5FAC透鏡542及第6FAC透鏡543、與第4SAC透鏡561、第5SAC透鏡562及第6SAC透鏡563後,由第4行的反射鏡580(即第4反射鏡581、第5反射鏡582及第6反射鏡583)反射。此處,第4雷射光束L4、第5雷射光束L5及第6雷射光束L6可於空間上耦合。The first laser beam L1, the second laser beam L2, and the third laser beam L3 pass through the first FAC lens 531, the second FAC lens 532, the third FAC lens 533, the first SAC lens 551, the second SAC lens 552, and the third SAC. After the lens 553, it is reflected by the mirror 570 of the third row (that is, the first mirror 571, the second mirror 572, and the third mirror 573). Here, the first laser beam L1, the second laser beam L2, and the third laser beam L3 may be spatially coupled. Further, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 pass through the fourth FAC lens 541, the fifth FAC lens 542 and the sixth FAC lens 543, the fourth SAC lens 561, and the fifth SAC lens 562. After the sixth SAC lens 563, it is reflected by the mirror 580 of the fourth row (that is, the fourth mirror 581, the fifth mirror 582, and the sixth mirror 583). Here, the fourth laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 may be spatially coupled.

接著,具有第1波長範圍的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3於由鏡591反射後入射至波長光束耦合器593,具有第2波長範圍的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6亦入射至波長光束耦合器593。波長光束耦合器593反射具有第1波長範圍的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3,使具有第2波長範圍的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6透過,藉此具有第1波長範圍的第1雷射光束L1、第2雷射光束L2及第3雷射光束L3可與具有第2波長範圍的第4雷射光束L4、第5雷射光束L5及第6雷射光束L6耦合。以此方式耦合的第1雷射光束至第6雷射光束可藉由耦合透鏡594而耦合至光纖599。Next, the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first wavelength range are reflected by the mirror 591 and then incident on the wavelength beam coupler 593, and have the fourth wavelength range. The laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are also incident on the wavelength beam coupler 593. The wavelength beam coupler 593 reflects the first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first wavelength range, and causes the fourth laser beam L4 and the fifth mine having the second wavelength range. The first laser beam L1, the second laser beam L2, and the third laser beam L3 having the first wavelength range can be transmitted to the fourth wavelength range. The laser beam L4, the fifth laser beam L5, and the sixth laser beam L6 are coupled. The first to sixth laser beams coupled in this manner can be coupled to the optical fiber 599 by a coupling lens 594.

根據上述實施例,可藉由將自雷射光源射出的雷射光束空間性耦合及偏振性耦合而實現高效率及高輸出的光源裝置。另外,彼此交錯地配置雷射光源,將反射鏡設置至雷射光源的外側,藉此可製作更精簡化的構造的光源裝置。另外,亦可耦合具有不同的波長範圍的雷射光束而入射至光纖。According to the above embodiment, the light source device of high efficiency and high output can be realized by spatially coupling and polarizing coupling of the laser beam emitted from the laser light source. Further, the laser light source is arranged alternately with each other, and the mirror is disposed outside the laser light source, whereby a light source device having a more simplified structure can be produced. Alternatively, a laser beam having a different wavelength range may be coupled to be incident on the optical fiber.

以上,對本發明的實施例進行了說明,但上述實施例僅為示例,於本領域內具有常識者應理解,可藉此實現各種變形及等同的其他實施例。The embodiments of the present invention have been described above, but the above-described embodiments are merely examples, and those skilled in the art should understand that various modifications and equivalents can be made.

100、200、300、400、500‧‧‧光源裝置100, 200, 300, 400, 500‧‧‧ light source devices

101、201、301、401、501‧‧‧基板101, 201, 301, 401, 501‧‧‧ substrates

S1‧‧‧第1面S1‧‧‧ first side

S2‧‧‧第2面S2‧‧‧2nd

S3‧‧‧第3面S3‧‧‧3rd

105‧‧‧金屬線105‧‧‧Metal wire

106‧‧‧導電性構造物106‧‧‧Electrically conductive structures

107‧‧‧連接墊107‧‧‧Connecting mat

110、210、310、410、510‧‧‧第1行的雷射光源110, 210, 310, 410, 510‧ ‧ the first line of laser light source

111、211、311、411、511‧‧‧第1雷射光源111, 211, 311, 411, 511‧‧‧1st laser source

111a‧‧‧子安裝基板111a‧‧‧Sub Mounting Substrate

112、212、312、412、512‧‧‧第2雷射光源112, 212, 312, 412, 512‧‧‧2nd laser source

113、213、313、413、513‧‧‧第3雷射光源113, 213, 313, 413, 513 ‧ ‧ 3rd laser source

111b‧‧‧雷射二極體111b‧‧‧Laser diode

120、220、320、420、520‧‧‧第2行的雷射光源120, 220, 320, 420, 520‧ ‧ the second line of laser light source

121、221、321、421、521‧‧‧第4雷射光源121, 221, 321, 421, 521 ‧ ‧ 4th laser source

122、222、322、422、522‧‧‧第5雷射光源122, 222, 322, 422, 522 ‧ ‧ 5th laser source

123、223、323、423、523‧‧‧第6雷射光源123, 223, 323, 423, 523‧‧‧6th laser source

131、231、331、431、531‧‧‧第1FAC透鏡131, 231, 331, 431, 531‧‧1st FAC lens

132、232、332、432、532‧‧‧第2FAC透鏡132, 232, 332, 432, 532‧ ‧ 2FAC lens

133、233、333、433、533‧‧‧第3FAC透鏡133, 233, 333, 433, 533 ‧ ‧ 3FAC lens

141、241、341、441、541‧‧‧第4FAC透鏡141, 241, 341, 441, 541 ‧ ‧ 4FAC lens

142、242、342、442、542‧‧‧第5FAC透鏡142, 242, 342, 442, 542 ‧ ‧ 5FAC lens

143、243、343、443、543‧‧‧第6FAC透鏡143, 243, 343, 443, 543 ‧ ‧ 6FAC lens

151、251、351、451、551‧‧‧第1SAC透鏡151, 251, 351, 451, 551 ‧ ‧ 1st SAC lens

152、252、352、452、552‧‧‧第2SAC透鏡152, 252, 352, 452, 552‧ ‧ 2nd SAC lens

153、253、353、453、553‧‧‧第3SAC透鏡153, 253, 353, 453, 553 ‧ ‧ 3SAC lens

161、261、361、461、561‧‧‧第4SAC透鏡161, 261, 361, 461, 561 ‧ ‧ 4SAC lens

162、262、362、462、562‧‧‧第5SAC透鏡162, 262, 362, 462, 562‧ ‧ 5th SAC lens

163、263、363、463、563‧‧‧第6SAC透鏡163, 263, 363, 463, 563 ‧ ‧ 6SAC lens

170、270、370、470、570‧‧‧第3行的反射鏡Mirrors of row 3, 170, 270, 370, 470, 570‧ ‧

171、271、371、471、571‧‧‧第1反射鏡171, 271, 371, 471, 571 ‧ ‧ 1st mirror

172、272、372、472、572‧‧‧第2反射鏡172, 272, 372, 472, 572 ‧ ‧ 2nd mirror

173、273、373、473、573‧‧‧第3反射鏡173, 273, 373, 473, 573 ‧ ‧ 3rd mirror

180、280、380、480、580‧‧‧第4行的反射鏡Mirrors on the 4th line of 180, 280, 380, 480, 580‧ ‧

181、281、381、481、581‧‧‧第4反射鏡181, 281, 381, 481, 581 ‧ ‧ 4th mirror

182、282、382、482、582‧‧‧第5反射鏡182, 282, 382, 482, 582‧ ‧ 5th mirror

183、283、383、483、583‧‧‧第6反射鏡183, 283, 383, 483, 583 ‧ ‧ 6th mirror

191、291、391、491、591‧‧‧鏡191, 291, 391, 491, 591‧‧ Mirror

192、392‧‧‧偏振轉換器192, 392‧‧ ‧ polarization converter

193、293、393‧‧‧偏振光束耦合器193, 293, 393‧‧ ‧ polarized beam coupler

194、294、394、494、594‧‧‧耦合透鏡194, 294, 394, 494, 594 ‧ ‧ coupling lens

199、299、399、499、599‧‧‧光纖199, 299, 399, 499, 599‧‧‧ fiber

S4‧‧‧第4面S4‧‧‧4th

S5‧‧‧第5面S5‧‧‧5th

S6‧‧‧第6面S6‧‧‧6th

493、593‧‧‧波長光束耦合器493, 593‧‧‧wavelength beam coupler

495‧‧‧第1波長選擇元件495‧‧‧1st wavelength selective component

496‧‧‧第2波長選擇元件496‧‧‧2nd wavelength selective component

A-A'、B-B'‧‧‧平面A-A', B-B'‧‧ plane

D1‧‧‧水平方向D1‧‧‧ horizontal direction

D2‧‧‧垂直方向D2‧‧‧Vertical direction

h‧‧‧特定尺寸/階差尺寸/間隔/特定階差h‧‧‧Specific size/step size/interval/specific step

2h‧‧‧階差尺寸/階差尺寸/間隔2h‧‧‧ step size/step size/interval

L1‧‧‧第1雷射光束L1‧‧‧1st laser beam

L2‧‧‧第2雷射光束L2‧‧‧2nd laser beam

L3‧‧‧第3雷射光束L3‧‧‧3rd laser beam

L4‧‧‧第4雷射光束L4‧‧‧4th laser beam

L5‧‧‧第5雷射光束L5‧‧‧5th laser beam

L6‧‧‧第6雷射光束L6‧‧‧6th laser beam

θ1、θ2‧‧‧發散角/角度Θ1, θ2‧‧‧ divergence angle/angle

圖1是表示本發明的例示性的實施例的光源裝置的俯視圖。 圖2是圖1所示的光源裝置的側視圖。 圖3是表示可應用至圖1所示的光源裝置的雷射光源的立體圖。 圖4a是圖3所示的雷射光源的俯視圖。 圖4b是圖3所示的雷射光源的前視圖。 圖4c是圖3所示的雷射光源的側視圖。 圖5a是表示通過圖1的A-A'平面的雷射光束的剖面的圖。 圖5b是表示通過圖1的B-B'平面的雷射光束的剖面的圖。 圖6a至圖6c是表示雷射光源之間的電性連接方法的圖。 圖7是表示本發明的另一例示性的實施例的光源裝置的俯視圖。 圖8是表示本發明的又一例示性的實施例的光源裝置的俯視圖。 圖9是圖8所示的光源裝置的側視圖。 圖10a是表示通過圖8的A-A'平面的雷射光束的剖面的圖。 圖10b是表示通過圖8的B-B'平面的雷射光束的剖面的圖。 圖11a及圖11b是表示通過圖8的A-A'平面及B-B'平面的雷射光束的變形例的圖。 圖12是表示本發明的又一例示性的實施例的光源裝置的俯視圖。 圖13是表示本發明的又一例示性的實施例的光源裝置的俯視圖。Fig. 1 is a plan view showing a light source device according to an exemplary embodiment of the present invention. Fig. 2 is a side view of the light source device shown in Fig. 1. Fig. 3 is a perspective view showing a laser light source applicable to the light source device shown in Fig. 1. Figure 4a is a top plan view of the laser source shown in Figure 3. Figure 4b is a front elevational view of the laser source shown in Figure 3. Figure 4c is a side view of the laser source shown in Figure 3. Fig. 5a is a view showing a cross section of a laser beam passing through the AA' plane of Fig. 1. Fig. 5b is a view showing a cross section of a laser beam passing through the plane BB' of Fig. 1. 6a to 6c are views showing a method of electrically connecting laser light sources. Fig. 7 is a plan view showing a light source device according to another exemplary embodiment of the present invention. Fig. 8 is a plan view showing a light source device according to still another exemplary embodiment of the present invention. Fig. 9 is a side view of the light source device shown in Fig. 8. Fig. 10a is a view showing a cross section of a laser beam passing through the AA' plane of Fig. 8. Fig. 10b is a view showing a cross section of a laser beam passing through the BB' plane of Fig. 8. 11a and 11b are views showing a modification of the laser beam passing through the AA' plane and the BB' plane of Fig. 8. Fig. 12 is a plan view showing a light source device according to still another exemplary embodiment of the present invention. Fig. 13 is a plan view showing a light source device according to still another exemplary embodiment of the present invention.

Claims (16)

一種光源裝置,其包括: 第1行的雷射光源與第2行的雷射光源,彼此對向地配置; 第3行的反射鏡,反射自所述第1行的雷射光源射出的雷射光束,配置至所述第2行的雷射光源的外側; 第4行的反射鏡,反射自所述第2行的雷射光源射出的雷射光束,配置至所述第1行的雷射光源的外側;及 光束耦合器,將由所述第3行的反射鏡反射的雷射光束與由所述第4行的反射鏡反射的雷射光束耦合;且 所述第1行的雷射光源與所述第2行的雷射光源交錯地配置, 所述第1行的雷射光源以彼此具有階差的方式設置,所述第2行的雷射光源以彼此具有階差的方式設置。A light source device comprising: a laser light source of a first row and a laser light source of a second row, arranged opposite to each other; and a mirror of the third row, reflecting a thunder emitted from the laser light source of the first row The light beam is disposed outside the laser light source of the second row; the mirror of the fourth row reflects the laser beam emitted from the laser light source of the second row, and is disposed to the Ray of the first row a light source coupler coupling a laser beam reflected by the mirror of The light source is alternately arranged with the laser light sources of the second row, the laser light sources of the first row are disposed with a step difference from each other, and the laser light sources of the second row are arranged with a step difference from each other . 如申請專利範圍第1項所述的光源裝置,其中彼此鄰接的一對所述第1行的雷射光源與所述第2行的雷射光源設置至相同高度的平面上。The light source device according to claim 1, wherein a pair of the first row of the laser light sources adjacent to each other and the second row of the laser light sources are disposed on a plane of the same height. 如申請專利範圍第1項所述的光源裝置,其中彼此鄰接的一對所述第1行的雷射光源與所述第2行的雷射光源以彼此具有階差的方式設置。The light source device according to claim 1, wherein the pair of the first row of the laser light sources adjacent to each other and the second row of the laser light sources are provided with a step difference from each other. 如申請專利範圍第1項所述的光源裝置,其中於所述第1行的雷射光源與所述第3行的反射鏡之間、及所述第2行的雷射光源與所述第4行的反射鏡之間設置快軸準直透鏡。The light source device according to claim 1, wherein the laser light source between the laser light source of the first row and the mirror of the third row, and the laser light source of the second row and the first A fast axis collimating lens is placed between the mirrors of 4 rows. 如申請專利範圍第4項所述的光源裝置,其中於所述第3行的反射鏡與所述快軸準直透鏡之間、及所述第4行的反射鏡與所述快軸準直透鏡之間設置慢軸準直透鏡。The light source device of claim 4, wherein the mirror of the third row and the fast axis collimating lens, and the mirror of the fourth row collimate with the fast axis A slow axis collimating lens is placed between the lenses. 如申請專利範圍第1項所述的光源裝置,其中所述光束耦合器包括偏振光束耦合器,於所述第3行的反射鏡與所述光束耦合器之間設置偏振轉換器。The light source device of claim 1, wherein the beam coupler comprises a polarization beam coupler, and a polarization converter is disposed between the mirror of the third row and the beam coupler. 如申請專利範圍第1項所述的光源裝置,其中所述光束耦合器包括波長光束耦合器,於所述第3行的反射鏡與所述光束耦合器之間設置第1波長選擇元件,於所述第4行的反射鏡與所述光束耦合器之間設置第2波長選擇元件。The light source device of claim 1, wherein the beam coupler comprises a wavelength beam coupler, and a first wavelength selective element is disposed between the mirror of the third row and the beam coupler, A second wavelength selecting element is disposed between the mirror of the fourth row and the beam coupler. 如申請專利範圍第1項所述的光源裝置,其更包括將藉由所述光束耦合器耦合的雷射光束耦合至光纖的耦合透鏡。The light source device of claim 1, further comprising a coupling lens that couples the laser beam coupled by the beam coupler to the optical fiber. 一種光源裝置,其包括: 第1行的雷射光源與第2行的雷射光源,彼此對向地配置; 第3行的反射鏡,反射自所述第1行的雷射光源射出的雷射光束,配置至所述第2行的雷射光源的外側; 第4行的反射鏡,反射自所述第2行的雷射光源射出的雷射光束,配置至所述第1行的雷射光源的外側;及 偏振光束耦合器,將由所述第3行的反射鏡反射的雷射光束與由所述第4行的反射鏡反射的雷射光束耦合;且 所述第1行的雷射光源與所述第2行的雷射光源交錯地配置, 所述第1行的雷射光源以彼此具有階差的方式設置,所述第2行的雷射光源以彼此具有階差的方式設置。A light source device comprising: a laser light source of a first row and a laser light source of a second row, arranged opposite to each other; and a mirror of the third row, reflecting a thunder emitted from the laser light source of the first row The light beam is disposed outside the laser light source of the second row; the mirror of the fourth row reflects the laser beam emitted from the laser light source of the second row, and is disposed to the Ray of the first row An outer side of the light source; and a polarizing beam coupler that couples the laser beam reflected by the mirror of the third row to the laser beam reflected by the mirror of the fourth row; and the Ray of the first row The light source is arranged alternately with the laser light sources of the second row, the laser light sources of the first row are arranged with a step difference from each other, and the laser light sources of the second row have a step difference with each other Settings. 如申請專利範圍第9項所述的光源裝置,其中自所述第1行的雷射光源射出的雷射光束與自所述第2行的雷射光源射出的雷射光束具有相同的偏振方向。The light source device of claim 9, wherein the laser beam emitted from the laser light source of the first row and the laser beam emitted from the laser light source of the second row have the same polarization direction . 如申請專利範圍第10項所述的光源裝置,其中於所述第3行的反射鏡與所述光束耦合器之間設置偏振轉換器。The light source device of claim 10, wherein a polarization converter is disposed between the mirror of the third row and the beam coupler. 如申請專利範圍第9項所述的光源裝置,其中自所述第1行的雷射光源射出的雷射光束與自所述第2行的雷射光源射出的雷射光束具有不同的偏振方向。The light source device of claim 9, wherein the laser beam emitted from the laser light source of the first row and the laser beam emitted from the laser light source of the second row have different polarization directions . 一種光源裝置,其包括: 第1行的雷射光源與第2行的雷射光源,彼此對向地配置; 第3行的反射鏡,反射自所述第1行的雷射光源射出的雷射光束,配置至所述第2行的雷射光源的外側; 第4行的反射鏡,反射自所述第2行的雷射光源射出的雷射光束,配置至所述第1行的雷射光源的外側;及 波長光束耦合器,將由所述第3行的反射鏡反射的雷射光束與由所述第4行的反射鏡反射的雷射光束耦合;且 所述第1行的雷射光源與所述第2行的雷射光源交錯地配置, 所述第1行的雷射光源以彼此具有階差的方式設置,所述第2行的雷射光源以彼此具有階差的方式設置。A light source device comprising: a laser light source of a first row and a laser light source of a second row, arranged opposite to each other; and a mirror of the third row, reflecting a thunder emitted from the laser light source of the first row The light beam is disposed outside the laser light source of the second row; the mirror of the fourth row reflects the laser beam emitted from the laser light source of the second row, and is disposed to the Ray of the first row An outer side of the light source; and a wavelength beam coupler that couples the laser beam reflected by the mirror of the third row to the laser beam reflected by the mirror of the fourth row; and the Ray of the first row The light source is arranged alternately with the laser light sources of the second row, the laser light sources of the first row are arranged with a step difference from each other, and the laser light sources of the second row have a step difference with each other Settings. 如申請專利範圍第13項所述的光源裝置,其中自所述第1行的雷射光源射出的雷射光束與自所述第2行的雷射光源射出的雷射光束具有相同的波長範圍。The light source device of claim 13, wherein the laser beam emitted from the laser light source of the first row and the laser beam emitted from the laser light source of the second row have the same wavelength range . 如申請專利範圍第14項所述的光源裝置,其中於所述第3行的反射鏡與所述光束耦合器之間設置第1波長選擇元件,於所述第4行的反射鏡與所述光束耦合器之間設置第2波長選擇元件。The light source device of claim 14, wherein a first wavelength selecting element is disposed between the mirror of the third row and the beam coupler, and the mirror of the fourth row is A second wavelength selecting element is disposed between the beam couplers. 如申請專利範圍第15項所述的光源裝置,其中所述第1波長選擇元件及第2波長選擇元件包括體布勒格光柵。The light source device according to claim 15, wherein the first wavelength selection element and the second wavelength selection element comprise a bulk Bole grating.
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