TW201915495A - Probe device and rectangular probe thereof - Google Patents

Abstract

A rectangular probe of a probe device includes a middle segment, a first connecting segment and a second connecting segment respectively extending from two opposite ends of the middle segment, a first contacting segment extending from the first connecting segment in a direction away from the middle segment, and a second contacting segment extending from the second connecting segment in a direction away from the middle segment. The first connecting segment is formed with a first groove. The depth of the first groove is not greater than 50% of the maximum thickness of the rectangular probe. In addition, the present disclosure also provides a probe device.

Description

 Probe device and rectangular probe  

The present invention relates to a probe device, and more particularly to a probe device suitable for a probe card and a rectangular probe thereof.

When the semiconductor wafer is tested, the test machine is electrically connected to the object to be tested through a probe card, and is subjected to signal transmission and signal analysis to obtain a test result of the object to be tested. The existing probe card usually consists of a circuit board and a probe device (ie, a probe head), or a space converter (ie, a carrier) disposed between the circuit board and the probe device, and a probe. The device is provided with a plurality of probes arranged corresponding to the electrical contacts of the object to be tested, so as to simultaneously touch the corresponding electrical contacts by the plurality of probes.

The probes of the existing probe devices include rectangular probes fabricated by Microelectromechanical Systems (MEMS) technology, and the shape thereof can be shaped according to the needs of the designer. In more detail, the existing rectangular probe is designed to be used as a cassette on the rectangular probe in order to be fixed to the guide in the probe device. However, in the process of passing the rectangular probe through the guide, the protruding feature (click) may cause a large friction with the guide, thereby scratching the guide and reducing the overall efficiency of the probe device. .

Accordingly, the present inventors believe that the above-mentioned defects can be improved, and that the present invention has been put forward with great interest and with the use of scientific principles, and finally proposes a design which is rational in design and can effectively improve the above defects.

Embodiments of the present invention provide a probe device and a rectangular probe thereof, which can effectively improve defects that may be generated by an existing probe device.

The embodiment of the invention discloses a probe device, comprising: a first guiding plate, a plurality of first hole walls are formed, each of the first hole walls is surrounded by a first through hole; and a plurality of rectangular probes are arranged. a plurality of the first through holes respectively penetrating the first guide plate, and each of the rectangular probes comprises: an intermediate segment; a first connecting segment extending from one end of the intermediate segment And passing through the corresponding first through hole; and a first contact portion extending from the first connecting portion and passing through the corresponding first through hole; wherein each of the The first connecting section of the rectangular probe is formed with a first groove, each of the first grooves has a width larger than a thickness of the first guiding plate, and each of the first grooves is correspondingly disposed The first through hole, and the groove bottom of the first groove faces at least a portion of the corresponding first hole wall.

The embodiment of the present invention further discloses a rectangular probe of a probe device, comprising: an intermediate segment; a first connecting segment and a second connecting segment respectively extending from opposite ends of the intermediate segment; a contact segment formed from the first connecting segment extending away from the intermediate segment; and a second contact segment formed from the second connecting segment extending away from the intermediate segment; wherein The first connecting section is formed with a first groove, and the depth of the first groove is not more than 50% of the maximum thickness of the rectangular probe.

In summary, the probe device and the rectangular probe disclosed in the embodiments of the present invention can form a first groove through the first connecting portion of the rectangular probe, and the width of the first groove is greater than a thickness of the first guide plate, and when the first connecting portion is passed through the corresponding first through hole, the groove bottom of the first groove faces at least a portion of the corresponding first hole wall, thereby being effective Lifting the fixing effect between the rectangular probe and the first guide, reducing the chance of friction between the rectangular probe and the first guide, reducing the chance of the rectangular probe scratching the first guide, and lifting the probe device Overall efficiency of use.

Furthermore, when the rectangular probe is stressed, the rectangular probe can be elastically actuated relative to the first guide by a design in which the width of the first groove is greater than the thickness of the first guide. That is, the first groove of the rectangular probe can be in contact with the first hole wall of the first guide plate and perform reciprocating piston movement, and can be performed without disturbing the elastic operation of the rectangular probe. Increase the fluency of its elastic action.

In addition, the probe device and the rectangular probe of the embodiment of the present invention can pass the depth of the first groove to be no more than 50% of the maximum thickness of the rectangular probe, so as to avoid affecting the current conduction of the first connecting segment. characteristic.

For a better understanding of the features and technical aspects of the present invention, reference should be made to the accompanying claims limit.

100‧‧‧ probe device

1‧‧‧ probe holder

11‧‧‧First guide

111‧‧‧ first hole wall

112‧‧‧ first through hole

113‧‧‧First guiding inclined wall

12‧‧‧Second guide

121‧‧‧ second hole wall

122‧‧‧second through hole

2‧‧‧Rectangular probe

21‧‧‧ Middle section

22‧‧‧First connection segment

221‧‧‧first groove

23‧‧‧Second connection

231‧‧‧second groove

24‧‧‧First contact segment

25‧‧‧Second contact

26‧‧‧ first side

27‧‧‧ second side

28‧‧‧First guiding bevel

W221, W231‧‧‧ width

T11, T12, T2‧‧‧ thickness

D221, D231‧‧ depth

1 is a perspective view of a probe device according to a first embodiment of the present invention.

Figure 2 is an exploded perspective view of Figure 1.

Figure 3 is a cross-sectional view taken along line III-III of Figure 1.

4 is a cross-sectional view showing a probe device according to a second embodiment of the present invention.

FIG. 5 is a cross-sectional view showing the first guide plate and the second guide plate dislocated in a dislocation direction according to the second embodiment of the present invention.

Figure 6 is a cross-sectional view showing another variation of the probe device of the second embodiment of the present invention.

Fig. 7 is a schematic view (1) showing an operation state of a probe device according to a third embodiment of the present invention.

Fig. 8 is a schematic view showing the operation state of the probe device according to the third embodiment of the present invention (2).

Please refer to FIG. 1 to FIG. 8 , which are embodiments of the present invention. It is to be noted that the related embodiments refer to the related embodiments of the present invention. The scope of the present invention is not to be construed as limiting the scope of the present invention.

 [First Embodiment]  

As shown in FIG. 1 to FIG. 3 , which is a first embodiment of the present invention, the present invention discloses a probe device 100 (ie, a probe head) including a probe holder 1 and a plurality of rectangular probes 2 . The probe base 1 includes a first upper plate 11 and a lower die 12, and the first guide plate 11 and the second guide plate 12 are spaced apart from each other. A plurality of the rectangular probes 2 can pass through the first guide 11 and the second guide 12, respectively, to assemble the probe device 100. Further, the probe holder 1 may be provided with a spacer (not shown) between the first guide 11 and the second guide 12, but the invention is not limited thereto.

It should be noted that, in order to facilitate the understanding of the present embodiment, the drawings only show the partial configuration of the probe device 100 in order to clearly present the various component configurations and connection relationships of the probe device 100. The respective element configurations of the probe device 100 of the present embodiment and their connection relationships will be separately described below.

Referring to FIG. 2 and FIG. 3, the first guiding plate 11 is formed with a plurality of first hole walls 111, each of the first hole walls 111 is surrounded by a first through hole 112, and each of the first The consistent aperture 112 has a first aperture (not labeled). The second guiding plate 12 is substantially parallel to the first guiding plate 11 , and the second guiding plate 12 is formed with a plurality of second hole walls 121 , and each of the second hole walls 121 is surrounded by a second through hole 122 . And each of the second through holes 122 has a second aperture (not labeled) that is not larger than the first aperture.

Furthermore, the plurality of rectangular probes 2 are arranged substantially in a matrix, and each of the rectangular probes 2 is sequentially disposed on the corresponding first through holes 112 of the first guide plate 11 , the partition plate, and The second guide plate 12 corresponds to the second through hole 122. Among them, since the spacer has a low correlation with the improvement of the present invention, the structure of the spacer will not be described in detail below.

Further, although the rectangular probe 2 of the present embodiment is described as being matched with the first guide plate 11, the spacer, and the second guide 12, the practical application of the rectangular probe 2 is not Limited by this. Furthermore, the rectangular probe 2 of the present embodiment is manufactured using a microelectromechanical system (MEMS) technology, so this embodiment is a circular probe that excludes the manufacturing process from being completely different. In other words, the rectangular probe 2 of the present embodiment is different from the circular probe in that the manufacturing processes of the two are completely different, so that there is no motivation to refer to each other.

Since the configurations of the plurality of rectangular probes 2 of the present embodiment are substantially the same, the drawings and the following description are exemplified by a single rectangular probe 2, but the present invention is not limited thereto. For example, in an embodiment not shown in the present invention, the plurality of rectangular probes 2 may also have configurations different from each other.

2 and FIG. 3, the rectangular probe 2 is electrically conductive and has a flexible straight strip configuration in this embodiment, and the rectangular probe 2 has a substantially rectangular cross section (including a square). ). The material of the rectangular probe 2 is, for example, gold (Au), silver (Ag), copper (Cu), nickel (Ni), cobalt (Co), or an alloy thereof; and the material of the rectangular probe 2 is preferably copper. At least one of a copper alloy, a nickel-cobalt alloy, a palladium-nickel alloy, a nickel-manganese alloy, a nickel-tungsten alloy, a nickel-phosphorus alloy, and a palladium-cobalt alloy, but the rectangular probe 2 of the present invention is not limited to the above materials.

Specifically, the rectangular probe 2 includes a middle section 21, a first connecting section 22 and a second connecting section 23 extending from opposite ends of the intermediate section 21, respectively, from the first A first contact segment 24 formed by extending the connecting portion 22 away from the intermediate portion 21 and a second contact portion 25 extending from the second connecting portion 23 away from the intermediate portion 21 are formed.

In other words, the rectangular probe 2 is sequentially formed (eg, from top to bottom in FIG. 3) with a first contact segment 24 having substantially the same outer diameter, a first connecting segment 22, a middle segment 21, The second connecting section 23 and the second contact section 25 are provided. The first contact segment 24 passes through the corresponding first through hole 112 of the first guide plate 11 and can be used to abut against a corresponding electrical contact of an adapter plate (not shown). Forming a probe card structure; the first connecting portion 22 is disposed through the corresponding first through hole 112 of the first guiding plate 11; the intermediate portion 21 is located between the first guiding plate 11 and the second guiding plate 12 The second connecting portion 23 is disposed through the corresponding second through hole 122 of the second guiding plate 12; the second contact portion 25 passes through the corresponding second through hole 122 of the second guiding plate 12 and can be used The top corresponds to a corresponding electrical contact of a test object (not shown, such as a semiconductor wafer).

Referring to FIG. 3, the first connecting portion 22 of the rectangular probe 2 is formed with a first recess 221, and the width W221 of the first recess 221 is greater than the thickness T11 of the first guiding plate 11, the first The groove 221 is received in the corresponding first through hole 112, and the groove bottom of the first groove 221 faces at least a part of the corresponding first hole wall 111. Furthermore, the depth D221 of the first groove 221 of the present embodiment is preferably not more than 50% of the maximum thickness T2 of the rectangular probe 2, but the present invention is not limited thereto.

Therefore, the probe device 100 of the present embodiment can form the first groove 221 through the first connecting portion 22 of the rectangular probe 2, and the width W221 of the first groove 221 is larger than the first guiding plate 11 When the first connecting portion 22 is disposed through the corresponding first through hole 112, the groove bottom of the first groove 221 faces at least a portion of the corresponding first hole wall 111, thereby effectively lifting The fixing effect between the rectangular probe 2 and the first guide 11 reduces the chance of friction between the rectangular probe 2 and the first guide 11, reduces the chance of the rectangular probe 2 scratching the first guide 11, And improving the efficiency of use of the probe device 100 as a whole.

Furthermore, when the rectangular probe 2 is stressed, the rectangular probe 2 can be designed with respect to the first guide by the design that the width W221 of the first recess 221 is greater than the thickness T11 of the first guide 11 The plate 11 is elastically actuated. That is, the first groove 221 of the rectangular probe 2 can be in contact with the first hole wall 111 of the first guide plate 11 and perform reciprocating piston movement, and can not interfere with the rectangular probe 2 In the case of elastic actuation, the fluency of its elastic actuation is increased.

In addition, the probe device 100 of the embodiment can pass the depth D221 of the first groove 221 is not more than 50% of the maximum thickness T2 of the rectangular probe 2, so as to avoid affecting the current conduction characteristics of the first connecting segment 22. .

Further, when the first guiding plate 11 and the second guiding plate 12 are displaced relative to each other in a dislocation direction, and the first through hole 112 and the second through hole 122 are dislocated in the dislocation direction, The portion of the first hole wall 111 is located in the first groove 221 and abuts against the groove bottom of the first groove 221 (not shown).

It should be noted that, in the embodiment, the first guide plate 11 is an upper die and the second guide 12 is a lower die. However, in practical applications, The first guide plate 11 may also be a lower die, and the second guide plate 12 may also be an upper die. In the embodiment, the probe device 100 includes the first guide plate 11 and the second guide plate 12. However, in practical applications, the probe device 100 may only include the first The guide plate 11 does not include the second guide plate 12.

 [Second embodiment]  

4 to 6, which are the second embodiment of the present invention, the present embodiment is substantially the same as the first embodiment described above, and the difference between the two is substantially as follows. The second connecting portion 23 of the rectangular probe 2 of the present embodiment may further be formed with a second recess 231 having a width W231 greater than a thickness T12 of the second guide 12, the second recess 231 is received in the corresponding second through hole 122, and the groove bottom of the second groove 231 faces at least a part of the corresponding second hole wall 121. Furthermore, the depth D231 of the second groove 231 of the present embodiment is preferably not more than 50% of the maximum thickness T2 of the rectangular probe 2, but the invention is not limited thereto.

In more detail, the rectangular probe 2 includes a first side surface 26 and a second side surface 27 on opposite sides, and the first groove 221 of the first connecting portion 22 is formed on the rectangular probe 2 The first side 26 of the second connecting section 23 is formed on the second side 27 of the rectangular probe 2.

Referring to FIG. 5, since the first recess 221 and the second recess 231 are formed on opposite sides of the rectangular probe 2, when the first guide 11 and the second guide 12 are displaced. When the first through hole 112 and the second through hole 122 are dislocated in the dislocation direction, the first groove 221 of the rectangular probe 2 can abut against the first guide 11 . Corresponding first hole wall 111, and second groove 231 of the rectangular probe 2 can abut against the corresponding second hole wall 121 of the second guide plate 12.

Thereby, the fixing effect between the rectangular probe 2 and the probe holder 1 (including the first guide 11 and the second guide 12) can be more effectively enhanced, and the rectangular probe 2 can be greatly reduced. Or the opportunity to drop the probe holder 1.

It should be noted that the present embodiment is exemplified by the fact that the first groove 221 and the second groove 231 are formed on opposite sides of the rectangular probe 2, but the invention is not limited thereto. For example, the first groove 221 and the second groove 231 may also be formed on the same side of the rectangular probe 2 (as shown in FIG. 6), depending on the needs of the designer.

 [Third embodiment]  

7 and FIG. 8, which is a third embodiment of the present invention, the present embodiment is substantially the same as the first and second embodiments described above, and the difference between the two is substantially as follows. The rectangular probe 2 of the present embodiment may further be formed with a first guiding slope 28 at a position of the first groove 221 (such as below the first groove 221 of FIG. 7), and the first groove 221 The position can correspond to the first aperture wall 111 (Fig. 8) by the guidance of the first guiding ramp 28. Thereby, the rectangular probe 2 can be fixed to the first guide plate 11 in a more fluid manner, thereby greatly reducing the chance of friction between the rectangular probe 2 and the first guide plate 11, and greatly reducing the scraping of the rectangular probe 2 The opportunity to injure the first guide 11.

Similarly, the rectangular probe 2 of the present embodiment may further be formed with a second guiding slope (not shown) beside the position of the second groove 231, and the position of the second groove 231 can pass through The guiding of the two guiding slopes corresponds to the second hole wall 121, but the invention is not limited thereto. For example, the rectangular probe 2 may also include only the first guiding bevel 28 and not the second guiding bevel.

More preferably, the first hole wall 111 of the first guide plate 11 and the second hole wall 121 of the second guide plate 12 of the embodiment may be further formed with a shape corresponding to the first guiding slope 28 and the second guiding slope a first guiding inclined wall 113 and a second guiding inclined wall (not shown), thereby passing through the first guiding inclined surface 28, the first guiding inclined wall 113, and the second guiding inclined surface And the second guiding oblique wall cooperates in shape so that the rectangular probe 2 can be fixed to the probe base 1 in a smoother manner (including the first guiding plate 11 and the second guiding plate 12) ). It should be noted that, in practical applications, the first hole wall 111 and the second hole wall 121 may not include the first guiding inclined wall 113 and the second guiding inclined wall, and are not limited to This embodiment is described.

 [Technical Effects of Embodiments of the Invention]  

In summary, the probe device 100 and the rectangular probe 2 thereof disclosed in the embodiments of the present invention can form a first recess 221 through the first connecting portion 22 of the rectangular probe 2, and the first The width W221 of the groove 221 is larger than the thickness T11 of the first guide plate 11, and the groove bottom surface of the first groove 221 faces when the first connecting portion 22 is bored through the corresponding first through hole 112. Corresponding at least part of the first hole wall 111, thereby effectively improving the fixing effect between the rectangular probe 2 and the first guide plate 11, reducing the frictional opportunity between the rectangular probe 2 and the first guide plate 11, The chance of the rectangular probe 2 scratching the first guide 11 and the use efficiency of the entire probe device 100 are reduced.

In addition, in the embodiment of the present invention, since the first groove 221 and the second groove 231 are formed on opposite sides of the rectangular probe 2, when the first through hole 112 and the second through hole are When the 122 is dislocated in a misalignment direction, the first groove 221 of the rectangular probe 2 can abut against the corresponding first hole wall 111 of the first guide 11 and the second of the rectangular probe 2 The groove 231 can abut against the corresponding second hole wall 121 of the second guide plate 12. Thereby, the fixing effect between the rectangular probe 2 and the probe holder 1 (including the first guide 11 and the second guide 12) can be more effectively enhanced, and the rectangular probe 2 can be greatly reduced. Or the opportunity to drop the probe holder 1.

In addition, in the embodiment of the present invention, a first guiding slope 28 and a second guiding slope are respectively formed beside the positions of the first groove 221 and the second groove 231 of the probe base 1, and the first The positions of a groove 221 and the second groove 231 can correspond to the first hole wall 111 and the second hole wall 121 through the guiding of the first guiding slope 28 and the second guiding slope, respectively. Thereby, the rectangular probe 2 can be fixed to the probe holder 1 (including the first guide plate 11 and the second guide plate 12) in a more fluid manner, thereby greatly reducing the rectangular probe 2 and each guide plate. The chance of friction between them, as well as greatly reducing the chance of the rectangular probe 2 scratching each of the guides.

The above are only the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. The equivalents and modifications made by the scope of the present invention should fall within the scope of the claims of the present invention. .

Claims (10)

 A probe device includes: a first guide plate, a plurality of first hole walls are formed, each of the first hole walls is surrounded by a first through hole; and a plurality of rectangular probes are respectively disposed at the a plurality of the first through holes of the first guide plate, and each of the rectangular probes comprises: an intermediate portion; a first connecting portion formed from an end of the intermediate portion and extending through the phase Corresponding to the first through hole; and a first contact segment formed from the first connecting segment and extending through the corresponding first through hole; wherein each of the rectangular probes The first connecting section is formed with a first groove, each of the first grooves has a width larger than a thickness of the first guiding plate, and each of the first grooves is received by the corresponding first a through hole, and the groove bottom of the first groove faces at least a portion of the corresponding first hole wall.    The probe device of claim 1, wherein in each of the rectangular probes, the depth of the first groove is not more than 50% of a maximum thickness of the rectangular probe.    The probe device according to claim 1, wherein in each of the rectangular probes and the first through hole through which the rectangular probe is placed, the rectangular probe is located beside the first groove A first guiding slope is formed, and the position of the first groove can correspond to the first hole wall by the guiding of the first guiding slope.    The probe device of claim 1, further comprising a second guide plate, the second guide plate is spaced apart from the first guide plate, and the second guide plate is formed with a plurality of second holes a wall, each of the second hole walls is surrounded by a second through hole, and a plurality of the rectangular probes are respectively disposed through the plurality of the second through holes of the second guide plate; wherein each The rectangular probe includes: a second connecting segment formed from the other end of the intermediate segment and extending through the corresponding second through hole; and a second contact segment from the first a second connecting hole extending and extending through the corresponding second through hole; wherein the second connecting portion of each of the rectangular probes is formed with a second groove, each of the second grooves The width of the second guide plate is greater than the thickness of the second guide plate, each of the second recesses is received in the corresponding second through hole, and the groove bottom of the second groove faces the corresponding one At least part of the walls of the two holes.    The probe device of claim 4, wherein in each of the rectangular probes, the depth of the second groove is not more than 50% of a maximum thickness of the rectangular probe; wherein, in each In the rectangular probe and the second through hole through which the rectangular probe is disposed, the rectangular probe is formed with a second guiding slope beside the position of the second groove, and the second groove is The position can correspond to the second bore wall by the guiding of the second guiding ramp.    The probe device of claim 4, wherein each of the rectangular probes includes a first side and a second side on opposite sides, and in each of the rectangular probes, the The first groove of a connecting segment is formed on the first side of the rectangular probe, and the second groove of the second connecting segment is formed in the rectangular probe The second side.    The probe device of claim 6, wherein the plurality of the first through holes are respectively offset from the plurality of the second through holes in a dislocation direction, so that the plurality of the rectangular probes are The first recesses respectively abut the plurality of the first hole walls of the first guide plate, and the second grooves of the plurality of rectangular probes respectively abut against the second guide plate a plurality of said second hole walls.    A rectangular probe of a probe device, comprising: an intermediate section; a first connecting section and a second connecting section respectively extending from opposite ends of the intermediate section; a first contact section, a first connecting section is formed to extend away from the intermediate section; and a second contact section is formed extending from the second connecting section away from the intermediate section; wherein the first connecting section is formed with a a first groove, and the depth of the first groove is no more than 50% of a maximum thickness of the rectangular probe.    The rectangular probe of the probe device of claim 8, wherein the rectangular probe is formed with a first guiding bevel at a position of the first groove, and the second connecting segment is formed with a second a groove, the rectangular probe is formed with a second guiding slope beside the position of the second groove, and the depth of the second groove is not more than 50% of the maximum thickness of the rectangular probe.    The rectangular probe of the probe device of claim 9, wherein the rectangular probe includes a first side and a second side on opposite sides, and the first of the first connecting segments A groove is formed on the first side of the rectangular probe, and the second groove of the second connecting segment is formed on the second side of the rectangular probe.