TW201832637A - Air cooling heat dissipation device - Google Patents

Air cooling heat dissipation device Download PDF

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Publication number
TW201832637A
TW201832637A TW106105649A TW106105649A TW201832637A TW 201832637 A TW201832637 A TW 201832637A TW 106105649 A TW106105649 A TW 106105649A TW 106105649 A TW106105649 A TW 106105649A TW 201832637 A TW201832637 A TW 201832637A
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Taiwan
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air
plate
cooling heat
gas
dissipating device
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TW106105649A
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Chinese (zh)
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TWI641310B (en
Inventor
廖家淯
陳世昌
黃哲威
黃啟峰
韓永隆
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研能科技股份有限公司
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Priority to TW106105649A priority Critical patent/TWI641310B/en
Priority to US15/894,256 priority patent/US10438868B2/en
Priority to JP2018022759A priority patent/JP7040957B2/en
Publication of TW201832637A publication Critical patent/TW201832637A/en
Application granted granted Critical
Publication of TWI641310B publication Critical patent/TWI641310B/en

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Abstract

An air cooling heat dissipation device is disclosed and is for dissipating heat to an electronic device. The air-cooling heat dissipation device comprises a carrier substrate, an air pump, and a radiator. The carrier substrate comprises an inlet opening and a heat conduction plate, wherein the heat conduction plate is disposed on a top surface of the carrier substrate which is corresponding to the inlet opening, and the electronic device is disposed on the heat conduction plate. The air pump is fixed on a bottom surface of the carrier substrate, and closes the inlet opening correspondingly. The radiator is disposed on the electronic device. By driving the air pump, the air flows into the inlet opening and makes heat exchanged with the electronic device.

Description

氣冷散熱裝置Air cooling device

本案係關於一種氣冷散熱裝置,尤指一種利用氣體泵浦提供驅動氣流以進行散熱之氣冷散熱裝置。The present invention relates to an air-cooling heat dissipating device, and more particularly to an air-cooling heat dissipating device that uses a gas pump to provide a driving airflow for heat dissipation.

隨著科技的進步,各種電子設備例如可攜式電腦、平板電腦、工業電腦、可攜式通訊裝置、影音播放器等已朝向輕薄化、可攜式及高效能的趨勢發展,這些電子設備於其有限內部空間中必須配置各種高積集度或高功率之電子元件,為了使電子設備之運算速度更快和功能更強大,電子設備內部之電子元件於運作時將產生更多的熱能,並導致高溫。此外,這些電子設備大部分皆設計為輕薄、扁平且具緊湊外型,且沒有額外的內部空間用於散熱冷卻,故電子設備中的電子元件易受到熱能、高溫的影響,進而導致干擾或受損等問題。With the advancement of technology, various electronic devices such as portable computers, tablet computers, industrial computers, portable communication devices, video players, etc. have been trending toward thin, portable, high-performance, and these electronic devices are In the limited internal space, various high-accumulation or high-power electronic components must be configured. In order to make the electronic device faster and more powerful, the electronic components inside the electronic device will generate more heat during operation, and Causes high temperatures. In addition, most of these electronic devices are designed to be thin, flat, and compact, and have no additional internal space for heat dissipation. Therefore, electronic components in electronic devices are susceptible to heat and high temperatures, which may cause interference or interference. Damage and other issues.

一般而言,電子設備內部的散熱方式可分為主動式散熱及被動式散熱。主動式散熱通常採用軸流式風扇或鼓風式風扇設置於電子設備內部,藉由軸流式風扇或鼓風式風扇驅動氣流,以將電子設備內部電子元件所產生的熱能轉移,俾實現散熱。然而,軸流式風扇及鼓風式風扇在運作時會產生較大的噪音,且其體積較大不易薄型化及小型化,再則軸流式風扇及鼓風式風扇的使用壽命較短,故傳統的軸流式風扇及鼓風式風扇並不適用於輕薄化及可攜式之電子設備中實現散熱。Generally speaking, the heat dissipation method inside the electronic device can be divided into active heat dissipation and passive heat dissipation. The active heat dissipation is usually disposed inside the electronic device by using an axial fan or a blower fan, and the airflow is driven by the axial fan or the blower fan to transfer the heat energy generated by the electronic components inside the electronic device to achieve heat dissipation. . However, axial fans and blower fans generate large noise during operation, and their bulk is not easy to be thinner and smaller, and axial fans and blower fans have a shorter service life. Therefore, the traditional axial flow fan and the blower fan are not suitable for heat dissipation in thin and light portable and portable electronic devices.

再者,許多電子元件會利用例如表面黏貼技術(Surface Mount Technology, SMT)、選擇性焊接(Selective Soldering)等技術焊接於印刷電路板(Printed Circuit Board, PCB)上,然而採用前述焊接方式所焊接之電子元件,於經長時間處於高熱能、高溫環境下,容易使電子元件與印刷電路板相脫離,且大部分電子元件亦不耐高溫,若電子元件長時間處於高熱能、高溫環境下,易導致電子元件之性能穩定度下降及壽命減短。Furthermore, many electronic components are soldered to a printed circuit board (PCB) using techniques such as Surface Mount Technology (SMT) and Selective Soldering, but soldered by the soldering method described above. The electronic components are easily separated from the printed circuit board after being in a high thermal energy and high temperature environment for a long time, and most of the electronic components are not resistant to high temperatures. If the electronic components are in a high heat and high temperature environment for a long time, It is easy to cause the performance stability of electronic components to decrease and the lifespan to be shortened.

第1圖係為傳統散熱機構之結構示意圖。如第1圖所示,傳統散熱機構係為一被動式散熱機構,其包括熱傳導板12,該熱傳導板12係藉由一導熱膠13與一待散熱之電子元件11相貼合,藉由導熱膠13以及熱傳導板12所形成之熱傳導路徑,可使電子元件11利用熱傳導及自然對流方式達到散熱。然而,前述散熱機構之散熱效率較差,無法滿足應用需求。Figure 1 is a schematic view of the structure of a conventional heat dissipation mechanism. As shown in FIG. 1 , the conventional heat dissipating mechanism is a passive heat dissipating mechanism, and includes a heat conducting plate 12 which is adhered to a electronic component 11 to be dissipated by a thermal conductive adhesive 13 by a thermal conductive adhesive. 13 and the heat conduction path formed by the heat conduction plate 12 allows the electronic component 11 to achieve heat dissipation by heat conduction and natural convection. However, the heat dissipation mechanism of the foregoing heat dissipation mechanism is inferior and cannot meet the application requirements.

有鑑於此,實有必要發展一種氣冷散熱裝置,以解決現有技術所面臨之問題。In view of this, it is necessary to develop an air-cooling heat sink to solve the problems faced by the prior art.

本案之目的在於提供一種氣冷散熱裝置,其可應用於各種電子設備,以對電子設備內部之電子元件進行散熱,俾提升散熱效能,降低噪音,且使電子設備內部電子元件之性能穩定並延長使用壽命。The purpose of the present invention is to provide an air-cooling heat dissipating device, which can be applied to various electronic devices to dissipate heat from electronic components inside the electronic device, improve heat dissipation performance, reduce noise, and stabilize and extend the performance of electronic components inside the electronic device. Service life.

本案之另一目的在於提供一種氣冷散熱裝置,其具有溫控功能,可依據電子設備內部電子元件之溫度變化,控制氣體泵浦之運作,俾提升散熱效能,以及延長氣冷散熱裝置之使用壽命。Another object of the present invention is to provide an air-cooling heat dissipating device having a temperature control function, which can control the operation of the gas pump according to the temperature change of the electronic components inside the electronic device, improve the heat dissipation performance, and prolong the use of the air cooling device. life.

為達上述目的,本案之一較廣義實施樣態為提供一種氣冷散熱裝置,用於對電子元件散熱,氣冷散熱裝置包含:承載基板,包含上表面、下表面、導氣端開口以及熱傳導板,其中熱傳導板設置於上表面且對應於導氣端開口,以及電子元件係設置於 熱傳導板上;氣體泵浦,氣體泵浦係為壓電致動氣體泵浦,固設於承載基板之下表面,且對應封閉導氣端開口,氣體泵浦包含:共振片,具有一中空孔洞;壓電致動器,與該共振片相對應設置;以及蓋板,具有側壁、底板及開口部,該側壁係環繞該底板周緣而凸設於該底板上,並與該底板形成一容置空間,且該共振片及該壓電致動器係設置於該容置空間中,該開口設置於該側壁上,該共振片及該蓋板之該側壁共同定義出一匯流腔室;其中,當壓電致動器受驅動以進行集氣作業時,氣體係先由蓋板之開口匯集至匯流腔室,再由共振片之中空孔洞流至第一腔室暫存,當壓電致動器受驅動以進行排氣作業時,氣體係先由第一腔室通過共振片之中空孔洞流入導氣端開口,並對熱傳導板進行熱交換。In order to achieve the above object, one of the more general embodiments of the present invention provides an air-cooling heat dissipating device for dissipating heat from an electronic component. The air-cooling heat dissipating device comprises: a carrier substrate including an upper surface, a lower surface, an air-conducting end opening, and heat conduction. a plate, wherein the heat conducting plate is disposed on the upper surface and corresponds to the air guiding end opening, and the electronic component is disposed on the heat conducting plate; the gas pumping, the gas pumping is piezoelectrically actuated gas pumping, is fixed on the carrier substrate a lower surface, corresponding to the closed air guiding end opening, the gas pump comprises: a resonant piece having a hollow hole; a piezoelectric actuator disposed corresponding to the resonant piece; and a cover plate having a side wall, a bottom plate and an opening portion, The side wall is disposed on the bottom of the bottom plate and protrudes from the bottom plate, and forms an accommodating space with the bottom plate. The resonant plate and the piezoelectric actuator are disposed in the accommodating space, and the opening is disposed in the accommodating space. On the side wall, the resonant plate and the side wall of the cover jointly define a confluence chamber; wherein when the piezoelectric actuator is driven for the gas gathering operation, the gas system is first assembled by the opening of the cover The confluence chamber is further flowed from the hollow hole of the resonator piece to the first chamber for temporary storage. When the piezoelectric actuator is driven to perform the exhaust operation, the gas system first flows from the first chamber through the hollow hole of the resonator piece. The air guiding end is open and heat exchange is performed on the heat conducting plate.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上係當作說明之用,而非架構於限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

請參閱第2A圖、第2B圖及第3圖第2A圖為本案較佳實施例之氣冷散熱裝置之結構示意圖,第2B圖為第2A圖所示之氣冷散熱裝置於另一視角之結構示意圖,以及第3圖為第2A圖所示之氣冷散熱裝置於AA截面之結構示意圖。如圖所示,本案之氣冷散熱裝置2可應用於一電子設備,例如但不限於可攜式電腦、平板電腦、工業電腦、可攜式通訊裝置、影音播放器,以對電子設備內待散熱之電子元件3進行散熱。本案之氣冷散熱裝置2包含承載基板20、氣體泵浦21以及散熱器26,其中承載基板20包括上表面20a、下表面20b、導氣端開口23以及熱傳導板25。承載基板20可為但不限於印刷電路板,用以承載並設置電子元件3及氣體泵浦21。承載基板20之導氣端開口23係貫穿上表面20a及下表面20b。氣體泵浦21係固設於承載基板20之下表面20b,對應組裝定位於導氣端開口23,並且封閉該導氣端開口23。熱傳導板25設置於承載基板20之上表面20a上,組裝定位於導氣端開口23上,且熱傳導板25與承載基板20間具有間隙G,用以供氣體流通。於本實施例中,熱傳導板25更具有複數個散熱片25a,設置於熱傳導板25之表面上,並鄰近於導氣端開口23而設置,但不以此為限,用以增加散熱面積,進而提升散熱效率。電子元件3係設置於熱傳導板25上,且電子元件3之一表面貼附於熱傳導板25,並且可透過熱傳導板25之熱傳導路徑進行散熱。散熱器26係設置於電子元件3上,且貼附於電子元件3之另一表面。其中,藉由驅動氣體泵浦21,以將氣流導入導氣端開口23並對熱傳導板25進行熱交換,俾實現對電子元件3之散熱。Please refer to FIG. 2A, FIG. 2B and FIG. 3A. FIG. 2A is a schematic structural view of the air-cooling heat dissipating device according to the preferred embodiment of the present invention, and FIG. 2B is a view of the air-cooling heat dissipating device shown in FIG. 2A in another view. The schematic diagram of the structure, and Fig. 3 is a schematic view showing the structure of the air-cooling heat dissipating device shown in Fig. 2A in the AA cross section. As shown in the figure, the air-cooling heat sink 2 of the present invention can be applied to an electronic device such as, but not limited to, a portable computer, a tablet computer, an industrial computer, a portable communication device, a video player, and the like. The heat-dissipating electronic component 3 dissipates heat. The air cooling device 2 of the present invention includes a carrier substrate 20, a gas pump 21, and a heat sink 26, wherein the carrier substrate 20 includes an upper surface 20a, a lower surface 20b, an air guiding end opening 23, and a heat conducting plate 25. The carrier substrate 20 can be, but not limited to, a printed circuit board for carrying and disposing the electronic component 3 and the gas pump 21. The air guide end opening 23 of the carrier substrate 20 penetrates the upper surface 20a and the lower surface 20b. The gas pump 21 is fixed to the lower surface 20b of the carrier substrate 20, the corresponding assembly is positioned at the air guiding end opening 23, and the air guiding end opening 23 is closed. The heat conduction plate 25 is disposed on the upper surface 20a of the carrier substrate 20, and is assembled and positioned on the air conduction end opening 23, and has a gap G between the heat conduction plate 25 and the carrier substrate 20 for gas circulation. In this embodiment, the heat conduction plate 25 further has a plurality of heat dissipation fins 25a disposed on the surface of the heat conduction plate 25 and disposed adjacent to the air conduction end opening 23, but not limited thereto, to increase the heat dissipation area. In turn, the heat dissipation efficiency is improved. The electronic component 3 is disposed on the heat conduction plate 25, and one surface of the electronic component 3 is attached to the heat conduction plate 25, and is radiated through the heat conduction path of the heat conduction plate 25. The heat sink 26 is disposed on the electronic component 3 and attached to the other surface of the electronic component 3. The heat pumping of the electronic component 3 is achieved by driving the gas pump 21 to introduce the gas flow into the gas-conducting end opening 23 and exchange heat with the heat-conducting plate 25.

於本實施例中,散熱器26包括一底座261及複數個散熱片262,底座261貼附於電子元件3之該另一表面,複數個散熱片262係垂直連接於底座261。藉由散熱器26之設置,可增加散熱面積,使電子元件3所產生之熱能可經由散熱器26之熱傳導路徑導離。In this embodiment, the heat sink 26 includes a base 261 and a plurality of heat sinks 262. The base 261 is attached to the other surface of the electronic component 3. The plurality of heat sinks 262 are vertically connected to the base 261. By the arrangement of the heat sink 26, the heat dissipation area can be increased, so that the thermal energy generated by the electronic component 3 can be guided away via the heat conduction path of the heat sink 26.

於本實施例中,氣體泵浦21係為一壓電致動氣體泵浦,用以驅動氣體流動,以將氣體由氣冷散熱裝置2之外部導入導氣端開口23中。於一些實施例中,承載基板20更包括至少一迴流穿槽24,該迴流穿槽24係貫穿上表面20a及下表面20b,且鄰設於熱傳導板25之周緣。當氣體泵浦21將氣體導入導氣端開口23時,所導入氣流與設置於承載基板20之上表面20a之熱傳導板25進行熱交換,並推動承載基板20與熱傳導板25間之間隙G內的氣體快速流動,促使熱交換後之氣流將熱能經由間隙G排出,其中部分氣流將經由迴流穿槽24迴流至承載基板20之下表面20b,並於冷卻後續供氣體泵浦21利用。此外,部分氣流則沿熱傳導板25之周緣朝散熱器26之方向流動,並於冷卻後流經散熱器26之散熱片261,俾加速對電子元件3之散熱。由於氣體泵浦21係連續地作動以導入氣體,使電子元件3可與連續導入之氣體進行熱交換,同時使熱交換後的氣體排出,藉此可實現對電子元件3之散熱,且可提高散熱效能,進而增加電子元件3之性能穩定度及壽命。In the present embodiment, the gas pump 21 is a piezoelectrically actuated gas pump for driving the gas flow to introduce the gas from the outside of the air-cooling heat sink 2 into the air-conducting end opening 23. In some embodiments, the carrier substrate 20 further includes at least one recirculation through groove 24 extending through the upper surface 20a and the lower surface 20b and adjacent to the periphery of the heat conduction plate 25. When the gas pump 21 introduces the gas into the air guide opening 23, the introduced air stream exchanges heat with the heat conduction plate 25 disposed on the upper surface 20a of the carrier substrate 20, and pushes the gap G between the carrier substrate 20 and the heat conduction plate 25. The gas flows rapidly, causing the gas stream after the heat exchange to discharge the heat energy through the gap G, wherein part of the gas stream will be returned to the lower surface 20b of the carrier substrate 20 via the return flow through groove 24, and used for cooling the subsequent gas pump 21 for use. In addition, part of the airflow flows along the circumference of the heat conduction plate 25 toward the heat sink 26, and after cooling, flows through the heat sink 261 of the heat sink 26 to accelerate heat dissipation to the electronic component 3. Since the gas pump 21 is continuously operated to introduce a gas, the electronic component 3 can exchange heat with the continuously introduced gas, and at the same time, the heat-exchanged gas is discharged, whereby heat dissipation to the electronic component 3 can be achieved, and the heat can be improved. The heat dissipation performance further increases the performance stability and life of the electronic component 3.

請參閱第4A、4B圖,第4A圖係為本案較佳實施例之氣體泵浦之正面分解結構示意圖,第4B圖係為本案較佳實施例之氣體泵浦之背面分解結構示意圖。於本實施例中,氣體泵浦21係為一壓電致動氣體泵浦,用以驅動氣體流動。如圖所示,本案之氣體泵浦21包含共振片212、壓電致動器213、蓋板216等元件。共振片212係對應於壓電致動器213設置,並具有一中空孔洞2120,設置於共振片212中心區域,但不以此為限。壓電致動器213具有懸浮板2131、外框2132及壓電陶瓷板2133,其中,懸浮板2131具有中心部2131c及外周部2131d,當壓電陶瓷板2133受電壓驅動時,懸浮板2131可由中心部2131c到外周部2131d彎曲振動,外框2132係環繞設置於懸浮板2131之外側,且具有至少一支架2132a及一導電接腳2132b,但不以此為限,每一支架2132a係設置於懸浮板2131及外框2132之間,且每一支架2132a之兩端係連接懸浮板2131及外框2132,以提供彈性支撐,導電接腳2132b係向外凸設於外框2132上,用以供電連接之用,壓電陶瓷板2133係貼附於懸浮板2131之第二表面2131b,用以接受外加電壓而產生形變,以驅動懸浮板2131彎曲振動。蓋板216具有側壁2161、底板2162及開口部2163,側壁2161係環繞底板2162周緣而凸設於底板2162上,並與底板2162共同形成容置空間216a,用以供共振片212及壓電致動器213設置於其中,開口部2163係設置於側壁2161上,用以供外框2132之導電接腳2132b及導電片215之導電接腳2151向外穿過開口部2163而凸出於蓋板216之外,以便於與外部電源連接,但不以此為限。Please refer to FIG. 4A and FIG. 4B. FIG. 4A is a schematic diagram showing the front exploded structure of the gas pump of the preferred embodiment of the present invention, and FIG. 4B is a schematic view showing the rear exploded structure of the gas pump of the preferred embodiment of the present invention. In the present embodiment, the gas pump 21 is a piezoelectrically actuated gas pump for driving gas flow. As shown, the gas pump 21 of the present invention includes elements such as a resonator piece 212, a piezoelectric actuator 213, and a cover plate 216. The resonator piece 212 is disposed corresponding to the piezoelectric actuator 213 and has a hollow hole 2120 disposed in the central area of the resonator piece 212, but is not limited thereto. The piezoelectric actuator 213 has a suspension plate 2131, an outer frame 2132, and a piezoelectric ceramic plate 2133. The suspension plate 2131 has a central portion 2131c and a peripheral portion 2131d. When the piezoelectric ceramic plate 2133 is driven by a voltage, the suspension plate 2131 can be The central portion 2131c is bent and vibrated to the outer peripheral portion 2131d. The outer frame 2132 is disposed on the outer side of the suspension plate 2131 and has at least one bracket 2132a and a conductive pin 2132b. However, not limited thereto, each bracket 2132a is disposed on The suspension plate 2131 and the outer frame 2132 are connected to the suspension plate 2131 and the outer frame 2132 to provide elastic support. The conductive pins 2132b are outwardly protruded from the outer frame 2132 for For the power supply connection, the piezoelectric ceramic plate 2133 is attached to the second surface 2131b of the suspension plate 2131 for receiving an applied voltage to generate deformation to drive the suspension plate 2131 to bend and vibrate. The cover plate 216 has a side wall 2161, a bottom plate 2162 and an opening portion 2163. The side wall 2161 is disposed on the bottom plate 2162 around the periphery of the bottom plate 2162, and forms a receiving space 216a with the bottom plate 2162 for the resonant piece 212 and the piezoelectric body. The opening portion 2163 is disposed on the side wall 2161, and the conductive pin 2132b of the outer frame 2132 and the conductive pin 2151 of the conductive piece 215 protrude outward through the opening portion 2163 to protrude from the cover plate. In addition to 216, in order to connect with external power supply, but not limited to this.

於本實施例中,本案之氣體泵浦21更包含兩絕緣片2141、2142及一導電片215,但並不以此為限,其中,兩絕緣片2141、2142係分別設置於導電片215上下,其外形係大致對應於壓電致動器213之外框2132,且係由可絕緣之材質所構成,例如:塑膠,以進行絕緣之用,但皆不以此為限,導電片215則係由導電材質所製成,例如:金屬,以進行電導通之用,且其外形亦為大致對應於壓電致動器213之外框2132,但皆不以此為限。再於本實施例中,導電片215上亦可設置一導電接腳2151,以進行電導通之用。In the present embodiment, the gas pump 21 of the present invention further includes two insulating sheets 2141, 2142 and a conductive sheet 215, but not limited thereto, wherein the two insulating sheets 2141 and 2142 are respectively disposed on the conductive sheet 215. The shape is substantially corresponding to the outer frame 2132 of the piezoelectric actuator 213, and is composed of an insulating material, such as plastic, for insulation, but not limited thereto, and the conductive sheet 215 is It is made of a conductive material, such as a metal, for electrical conduction, and its shape also corresponds to the outer frame 2132 of the piezoelectric actuator 213, but is not limited thereto. In this embodiment, a conductive pin 2151 may be disposed on the conductive sheet 215 for electrical conduction.

請參閱第5A、5B、5C圖,第5A圖係為本案較佳實施例之壓電致動器之正面結構示意圖,第5B圖係為本案較佳實施例之壓電致動器之背面結構示意圖,第5C圖係為本案較佳實施例之壓電致動器之剖面結構示意圖。如圖所示,於本實施例中,本案之懸浮板2131係為階梯面之結構,即於懸浮板2131第一表面2131a之中心部2131c上更具有一凸部2131e,且凸部2131e為一圓形凸起結構,但並不以此為限,於一些實施例中,懸浮板2131亦可為雙面平整之板狀正方形。又如第5C圖所示,懸浮板2131之凸部2131e係與外框2132之第一表面2132c共平面,且懸浮板2131之第一表面2131a及支架2132a之第一表面2132a’亦為共平面,另外,懸浮板2131之凸部2131e及外框2132之第一表面2132c與懸浮板2131之第一表面2131a及支架2132a之第一表面2132a’之間係具有一特定深度。至於懸浮板2131之第二表面2131b,則如第5B圖及第5C圖所示,其與外框2132之第二表面2132d及支架2132a之第二表面2132a”為平整之共平面結構,而壓電陶瓷板2133則貼附於此平整之懸浮板2131之第二表面2131b處。於另一些實施例中,懸浮板2131之型態亦可為一雙面平整之板狀正方形結構,並不以此為限,可依照實際施作情形而任施變化。於一些實施例中,懸浮板2131、外框2132及支架2132a係可為一體成型之結構,且可由一金屬板所構成,例如可由不鏽鋼材質所構成,但不以此為限。又於本實施例中,本案氣體泵浦21於懸浮板2131、外框2132及支架2132a之間更具有至少一空隙2134,用以供氣體通過。Please refer to FIGS. 5A, 5B, and 5C. FIG. 5A is a front view of the piezoelectric actuator of the preferred embodiment of the present invention, and FIG. 5B is a rear structure of the piezoelectric actuator of the preferred embodiment of the present invention. FIG. 5C is a schematic cross-sectional view showing the piezoelectric actuator of the preferred embodiment of the present invention. As shown in the figure, in the present embodiment, the suspension plate 2131 of the present invention has a stepped surface structure, that is, a convex portion 2131e is further formed on the central portion 2131c of the first surface 2131a of the suspension plate 2131, and the convex portion 2131e is a The circular raised structure is not limited thereto. In some embodiments, the suspension plate 2131 may also be a plate-shaped square that is flat on both sides. As shown in FIG. 5C, the convex portion 2131e of the suspension plate 2131 is coplanar with the first surface 2132c of the outer frame 2132, and the first surface 2131a of the suspension plate 2131 and the first surface 2132a' of the bracket 2132a are also coplanar. In addition, the convex portion 2131e of the suspension plate 2131 and the first surface 2132c of the outer frame 2132 and the first surface 2131a of the suspension plate 2131 and the first surface 2132a' of the bracket 2132a have a specific depth. As for the second surface 2131b of the suspension plate 2131, as shown in FIGS. 5B and 5C, the second surface 2132d of the outer frame 2132 and the second surface 2132a of the bracket 2132a are flat and planar, and the pressure is The electric ceramic plate 2133 is attached to the second surface 2131b of the flat suspension plate 2131. In other embodiments, the shape of the suspension plate 2131 may also be a double-sided flat plate-like square structure, not In this embodiment, the suspension plate 2131, the outer frame 2132, and the bracket 2132a may be integrally formed, and may be composed of a metal plate, for example, may be made of stainless steel. The material is composed of, but not limited to, in this embodiment, the gas pump 21 of the present invention further has at least one gap 2134 between the suspension plate 2131, the outer frame 2132 and the bracket 2132a for gas to pass therethrough.

接著說明組裝完成後之本案氣體泵浦21之內外部結構,請參閱第6圖及第7A圖,第6圖係為第2A圖所示之氣冷散熱裝置於BB截面剖面示意圖,第7A圖係為第2B圖所示之氣冷散熱裝置於CC截面剖面示意圖。如圖所示,本案之氣體泵浦21係依序由蓋板216、絕緣片2142、導電片215、絕緣片2141、壓電致動器213、共振片212及等元件由上至下堆疊,且於組合堆疊後之壓電致動器213、絕緣片2141、導電片215、另一絕緣片2142之四周予以塗膠形成膠體218,進而填滿蓋板216之容置空間216a之周緣而完成密封。組裝完成後之氣體泵浦21係為四邊形之結構,但並不以此為限,其形狀可依照實際需求任施變化。此外,於本實施例中,僅有導電片215之導電接腳2151(未圖示)與壓電致動器213之導電接腳2132b(如第6圖所示)凸出設置於蓋板216外,以便於與外部電源連接,但亦不以此為限。組裝後之氣體泵浦21於蓋板216與共振片212之間則形成第一腔室217b。Next, the internal structure of the gas pump 21 after the assembly is completed, please refer to FIG. 6 and FIG. 7A, and FIG. 6 is a cross-sectional view of the air-cooling heat dissipating device shown in FIG. 2A in the BB section, FIG. 7A. It is a cross-sectional view of the CC cross section shown in Figure 2B. As shown in the figure, the gas pump 21 of the present invention is sequentially stacked from top to bottom by a cover plate 216, an insulating sheet 2142, a conductive sheet 215, an insulating sheet 2141, a piezoelectric actuator 213, a resonator piece 212, and the like. And after the stacked piezoelectric actuator 213, the insulating sheet 2141, the conductive sheet 215, and the other insulating sheet 2142 are glued to form a colloid 218, thereby filling the periphery of the accommodating space 216a of the cover 216. seal. After the assembly, the gas pump 21 is a quadrangular structure, but it is not limited thereto, and its shape may be changed according to actual needs. In addition, in the embodiment, only the conductive pins 2151 (not shown) of the conductive sheet 215 and the conductive pins 2132b of the piezoelectric actuator 213 (shown in FIG. 6 ) are protruded from the cover 216 . In addition, it is convenient to connect to an external power supply, but it is not limited to this. The assembled gas pump 21 forms a first chamber 217b between the cover plate 216 and the resonator piece 212.

當氣體泵浦21與承載基板20組裝完成後,如第3圖所示,蓋板216之側壁2161抵頂於承載基板20之下表面20b上,並封閉導氣端開口23,且透過蓋板216之側壁2161、共振片212共同定義出匯流腔室217a,再如第6圖所示,藉由蓋板216之開口部2163與外部連通,進而可從外部環境進行集氣。再於本實施例中,本案之氣體泵浦21之共振片212與壓電致動器213之間具有間隙g0,且於間隙g0中係填入導電材質,例如:導電膠,但並不以此為限,藉此可使共振片212與壓電致動器213之懸浮板2131之凸部2131e之間保持一個間隙g0之深度,進而可導引氣流更迅速地流動,且因懸浮板2131之凸部2131e與共振片212保持適當距離使彼此接觸干涉減少,促使噪音降低,於另一些實施例中,亦可藉由加高壓電致動器213之外框2132之高度,以使其與共振片212組裝時增加一間隙,但亦不以此為限。藉此,當壓電致動器213受驅動以進行集氣作業時,氣體係先由蓋板216之開口部2163匯集至匯流腔室217a,並進一步經由共振片212之中空孔洞2120流至第一腔室217b暫存,當壓電致動器213受驅動以進行排氣作業時,氣體係先由第一腔室217b通過共振片212之中空孔洞2120流至匯流腔室217a,流入導氣端開口23中,使氣流與熱傳導板25進行熱交換。After the gas pump 21 is assembled with the carrier substrate 20, as shown in FIG. 3, the side wall 2161 of the cover plate 216 abuts against the lower surface 20b of the carrier substrate 20, and closes the air-conducting end opening 23, and passes through the cover plate. The side wall 2161 of the 216 and the resonator piece 212 collectively define the confluence chamber 217a. Further, as shown in Fig. 6, the opening portion 2163 of the cover plate 216 communicates with the outside, thereby collecting air from the external environment. In this embodiment, the resonator plate 212 of the gas pump 21 of the present invention has a gap g0 between the piezoelectric actuator 213 and the piezoelectric material 213, and the conductive material is filled in the gap g0, for example, conductive adhesive, but not Therefore, the resonance piece 212 and the convex portion 2131e of the suspension plate 2131 of the piezoelectric actuator 213 are maintained at a depth of a gap g0, thereby guiding the airflow to flow more rapidly, and the suspension plate 2131 The convex portion 2131e is kept at an appropriate distance from the resonant piece 212 to reduce the mutual contact interference, thereby causing the noise to decrease. In other embodiments, the height of the outer frame 2132 can be increased by adding the high voltage electric actuator 213. A gap is added when assembling the resonator piece 212, but is not limited thereto. Thereby, when the piezoelectric actuator 213 is driven to perform the air collecting operation, the gas system is first collected by the opening portion 2163 of the cover plate 216 to the confluence chamber 217a, and further flows through the hollow hole 2120 of the resonance piece 212 to the first A chamber 217b is temporarily stored. When the piezoelectric actuator 213 is driven to perform an exhaust operation, the gas system first flows from the first chamber 217b through the hollow hole 2120 of the resonator 212 to the confluence chamber 217a, and flows into the air guide. In the end opening 23, the air flow is exchanged with the heat conduction plate 25.

以下進一步說明本案氣體泵浦21之作動流程,請同時參閱第7A~7D圖,其中第7B~7D圖係為本案較佳實施例之氣體泵浦之作動過程示意圖。首先,如第7A圖所示,氣體泵浦21之結構係如前述,為依序由蓋板216、另一絕緣片2142、導電片215、絕緣片2141壓電致動器213及共振片212所堆疊組裝定位而成,於共振片212與壓電致動器213之間係具有間隙g0,且共振片212及蓋板216之側壁2161共同定義出該匯流腔室217a,於共振片212與壓電致動器213之間則具有第一腔室217b。當氣體泵浦21尚未受到電壓驅動時,其各元件之位置即如第7A圖所示。The operation flow of the gas pump 21 in this case is further described below. Please refer to the drawings 7A to 7D at the same time, wherein the 7B-7D diagram is a schematic diagram of the operation process of the gas pump of the preferred embodiment of the present invention. First, as shown in FIG. 7A, the structure of the gas pump 21 is as described above, in order from the cover plate 216, the other insulating sheet 2142, the conductive sheet 215, the insulating sheet 2141, the piezoelectric actuator 213, and the resonator 212. The stacked assembly is positioned to have a gap g0 between the resonant piece 212 and the piezoelectric actuator 213, and the resonant piece 212 and the side wall 2161 of the cover plate 216 jointly define the confluent chamber 217a on the resonant piece 212 and The piezoelectric actuator 213 has a first chamber 217b between them. When the gas pump 21 has not been driven by the voltage, the position of each element is as shown in Fig. 7A.

接著如第7B圖所示,當氣體泵浦21之壓電致動器213受電壓致動而向上振動時,氣體會由蓋板216之開口部2163進入氣體泵浦21中,並匯集到匯流腔室217a,接著再經由共振片212上的中空孔洞2120向上流入至第一腔室217b中,同時共振片212受到壓電致動器213之懸浮板2131共振影響亦會隨之進行往復式振動,即共振片212隨之向上形變,即共振片212在中空孔洞2120處向上微凸。Next, as shown in Fig. 7B, when the piezoelectric actuator 213 of the gas pump 21 is vibrated upward by the voltage, the gas enters the gas pump 21 from the opening portion 2163 of the cap plate 216, and is collected into the confluence. The chamber 217a then flows upward into the first chamber 217b via the hollow hole 2120 on the resonator piece 212, and the resonance piece 212 is resonated by the resonance of the suspension plate 2131 of the piezoelectric actuator 213. That is, the resonant piece 212 is deformed upward, that is, the resonant piece 212 is slightly convex upward at the hollow hole 2120.

其後,則如第7C圖所示,此時壓電致動器213係向下振動回初始位置,此時壓電致動器213之懸浮板2131上凸部2131e,並接近於共振片212在中空孔洞2120處向上微凸部分,進而促使氣體泵浦21內氣體往上半層第一腔室217b暫存。Thereafter, as shown in FIG. 7C, at this time, the piezoelectric actuator 213 is vibrated downward to the initial position, at which time the convex portion 2131e of the suspension plate 2131 of the piezoelectric actuator 213 is close to the resonance piece 212. The micro-convex portion is upwardly raised at the hollow hole 2120, thereby causing the gas in the gas pump 21 to temporarily accumulate to the upper first chamber 217b.

再如第7D圖所示,壓電致動器213再向下振動,且共振片212由於受壓電致動器213振動之共振作用,共振片212亦會隨之向下振動,藉由此共振片212之向下形變壓縮第一腔室217b之體積,進而促使上半層第一腔室217b內的氣體推擠向兩側流動並經過壓電致動器213之空隙2134向下穿越流通,以流至共振片212之中空孔洞2120處而壓縮排出,形成一股壓縮氣流向承載基板20之導氣端開口23處以對熱傳導板25進行散熱。由此實施態樣可見,當共振片212進行垂直之往復式振動時,係可由共振片212與壓電致動器213之間的間隙g0以增加其垂直位移的最大距離,換句話說,於共動片212與壓電致動器213之間設置之間隙g0可使共振片212於共振時可產生更大幅度的上下位移。Further, as shown in FIG. 7D, the piezoelectric actuator 213 vibrates downward again, and the resonance piece 212 is vibrated by the vibration of the piezoelectric actuator 213, and the resonance piece 212 is also vibrated downward. The downward deformation of the resonator piece 212 compresses the volume of the first chamber 217b, thereby causing the gas in the upper half of the first chamber 217b to push to flow to both sides and pass through the gap 2134 of the piezoelectric actuator 213 to circulate downward. And flowing to the hollow hole 2120 of the resonator piece 212 to be compressed and discharged, forming a compressed airflow to the air-conducting end opening 23 of the carrier substrate 20 to dissipate the heat-conducting plate 25. It can be seen from this embodiment that when the resonant piece 212 performs vertical reciprocating vibration, the gap g0 between the resonant piece 212 and the piezoelectric actuator 213 can be increased by the maximum distance of the vertical displacement, in other words, The gap g0 provided between the movable piece 212 and the piezoelectric actuator 213 can cause the resonance piece 212 to generate a larger vertical displacement when it resonates.

最後,共振片212會回位至初始位置,即如第7A圖所示,進而透過前述之作動流程,由第7A~7D圖之順序持續循環,氣體會持續地經由蓋板216之開口部2163而流入匯流腔室217a,再流入第一腔室217b,並接著由第一腔室217b流入匯流腔室217a中,使氣流連續流入導氣端開口23中,進而能夠穩定傳輸氣體。換言之,當本案之氣體泵浦21運作時,氣體係依序流經之蓋板216之開口部2163、匯流腔室217a、第一腔室217b、匯流腔室217a及導氣端開口23,故本案之氣體泵浦21可透過單一元件,即蓋板216,並利用蓋板216之開口部2163之結構設計,能夠達到減少氣體泵浦21之元件數量,簡化整體製程之功效。Finally, the resonant piece 212 will return to the initial position, that is, as shown in FIG. 7A, and then continue to circulate through the steps 7A to 7D through the aforementioned operation flow, and the gas will continuously pass through the opening portion 2163 of the cover plate 216. The flow enters the confluence chamber 217a, flows into the first chamber 217b, and then flows into the confluence chamber 217a from the first chamber 217b, so that the airflow continuously flows into the air guide opening 23, thereby enabling stable gas transfer. In other words, when the gas pump 21 of the present invention operates, the gas system sequentially flows through the opening portion 2163 of the cover plate 216, the confluence chamber 217a, the first chamber 217b, the confluence chamber 217a, and the air guide opening 23, The gas pump 21 of the present invention can pass through a single component, that is, the cover plate 216, and is designed by using the opening portion 2163 of the cover plate 216, thereby reducing the number of components of the gas pump 21 and simplifying the overall process.

承上所述,透過上述氣體泵浦21之作動,將氣體導入承載基板20之導氣端開口23,使氣流流入間隙G,並使所導入氣體與電子元件3相連接之熱傳導板25進行熱交換,並持續推動間隙G中之氣體快速流動,促使熱交換後的氣體將熱能經由排至間隙G之外部,藉此以提高散熱冷卻的效率,進而增加電子元件3之性能穩定度及壽命。此外,藉由氣體快速流動排出間隙G之外部,間接增加散熱器26周圍氣體對流,亦可增加散熱冷卻的效率。As described above, the gas is introduced into the air-conducting end opening 23 of the carrier substrate 20 by the operation of the gas pump 21, the airflow flows into the gap G, and the heat-conducting plate 25 to which the introduced gas and the electronic component 3 are connected is heated. Exchanging, and continuously pushing the gas in the gap G to flow rapidly, the heat exchanged gas is caused to discharge heat energy to the outside of the gap G, thereby improving the efficiency of heat dissipation cooling, thereby increasing the performance stability and life of the electronic component 3. In addition, by rapidly flowing the gas out of the gap G, the gas convection around the radiator 26 is indirectly increased, and the efficiency of heat dissipation cooling can also be increased.

請參閱第8圖,第8圖為本案之氣冷散熱裝置之控制系統之架構示意圖。如圖所示,本案較佳實施例之氣冷散熱裝置2係具有溫控功能,其更包括控制系統5,其中控制系統5更包含控制單元51及溫度感測器52,其中控制單元51係與氣體泵浦21電連接,以控制氣體泵浦21之運作。溫度感測器52係電連接於控制單元51,鄰近設置於電子元件3,用以感測電子元件3附近之溫度,或者直接貼附於電子元件3上感測電子元件3溫度,但不以此為限,並可將感測訊號傳輸至控制單元51。控制單元51依據溫度感測器52之感測訊號,判斷該電子元件3之溫度是否高於一溫度門檻值,當控制單元51判斷該電子元件3之溫度高於該溫度門檻值時,發出一控制訊號至氣體泵浦21,以致能氣體泵浦21運作,藉此使氣體泵浦21驅動氣流流動以對電子元件3進行散熱冷卻,俾使電子元件3散熱冷卻並降低溫度。當控制單元51判斷該電子元件3之溫度低於該溫度門檻值時,發出一控制訊號至氣體泵浦21,以停止氣體泵浦21運作,藉此可避免氣體泵浦21持續運作而導致壽命減短,降低額外的能量的耗損。是以,透過控制系統5之設置,使氣冷散熱裝置2之氣體泵浦21於電子元件3溫度過熱時可進行散熱冷卻,並於電子元件3溫度降低後停止運作,藉此可避免氣體泵浦21持續運作而導致壽命減短,降低額外的能量的耗損,亦可使電子元件3於一較佳溫度環境下運作,提高電子元件3的穩定度。Please refer to Fig. 8. Fig. 8 is a schematic structural view of the control system of the air-cooling heat dissipating device of the present invention. As shown in the figure, the air-cooling heat dissipating device 2 of the preferred embodiment of the present invention has a temperature control function, and further includes a control system 5, wherein the control system 5 further includes a control unit 51 and a temperature sensor 52, wherein the control unit 51 is It is electrically connected to the gas pump 21 to control the operation of the gas pump 21. The temperature sensor 52 is electrically connected to the control unit 51, and is disposed adjacent to the electronic component 3 for sensing the temperature in the vicinity of the electronic component 3, or directly attached to the electronic component 3 to sense the temperature of the electronic component 3, but not This is limited and the sensing signal can be transmitted to the control unit 51. The control unit 51 determines whether the temperature of the electronic component 3 is higher than a temperature threshold according to the sensing signal of the temperature sensor 52. When the control unit 51 determines that the temperature of the electronic component 3 is higher than the temperature threshold, the control unit 51 issues a The control signal is applied to the gas pump 21 so that the gas pump 21 operates, whereby the gas pump 21 drives the airflow to cool the electronic component 3, and the electronic component 3 is cooled to cool and lower the temperature. When the control unit 51 determines that the temperature of the electronic component 3 is lower than the temperature threshold, a control signal is sent to the gas pump 21 to stop the operation of the gas pump 21, thereby preventing the gas pump 21 from continuing to operate and causing the life. Shorten and reduce the loss of extra energy. Therefore, through the setting of the control system 5, the gas pump 21 of the air-cooling heat sink 2 can be cooled and cooled when the temperature of the electronic component 3 is overheated, and stops after the temperature of the electronic component 3 is lowered, thereby avoiding the gas pump. The continued operation of the Pu 21 results in a shortened life span, reducing the loss of additional energy, and also allowing the electronic component 3 to operate in a preferred temperature environment to improve the stability of the electronic component 3.

綜上所述,本案提供一種氣冷散熱裝置,其可應用於各種電子設備以對其內部之電子元件散熱,俾提升散熱效能,降低噪音,且使電子設備內部電子元件之性能穩定並延長使用壽命。此外,本案之氣冷散熱裝置,其具有溫控功能,可依據電子設備內部電子元件之溫度變化,控制氣體泵浦之運作,俾提升散熱效能,以及延長氣冷散熱裝置之使用壽命。In summary, the present invention provides an air-cooling heat dissipating device, which can be applied to various electronic devices to dissipate heat from internal electronic components, improve heat dissipation performance, reduce noise, and stabilize and prolong the performance of electronic components inside electronic devices. life. In addition, the air-cooling heat dissipating device of the present case has a temperature control function, which can control the operation of the gas pump according to the temperature change of the electronic components inside the electronic device, improve the heat dissipation performance, and prolong the service life of the air cooling heat dissipating device.

本案得由熟知此技術之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

11‧‧‧電子元件11‧‧‧Electronic components

12‧‧‧熱傳導板12‧‧‧heat transfer board

13‧‧‧導熱膠13‧‧‧thermal adhesive

2‧‧‧氣冷散熱裝置2‧‧‧Air-cooling heat sink

20‧‧‧承載基板20‧‧‧Loading substrate

20a‧‧‧上表面20a‧‧‧ upper surface

20b‧‧‧下表面20b‧‧‧ lower surface

21‧‧‧氣體泵浦21‧‧‧ gas pump

212‧‧‧共振片212‧‧‧Resonance film

2120‧‧‧中空孔洞2120‧‧‧ hollow holes

213‧‧‧壓電致動器213‧‧‧ Piezoelectric Actuator

2131‧‧‧懸浮板2131‧‧‧suspension plate

2131a‧‧‧第一表面2131a‧‧‧ first surface

2131b‧‧‧第二表面2131b‧‧‧ second surface

2131c‧‧‧中心部2131c‧‧‧ Central Department

2131d‧‧‧外周部2131d‧‧‧The outer part

2131e‧‧‧凸部2131e‧‧‧ convex

2132‧‧‧外框2132‧‧‧Front frame

2132a‧‧‧支架2132a‧‧‧ bracket

2132a’‧‧‧第一表面2132a’‧‧‧ first surface

2132a”‧‧‧第二表面2132a”‧‧‧second surface

2132b‧‧‧導電接腳2132b‧‧‧Electrical pins

2132c‧‧‧第一表面2132c‧‧‧ first surface

2132d‧‧‧第二表面2132d‧‧‧ second surface

2133‧‧‧壓電陶瓷板2133‧‧‧ Piezoelectric ceramic plate

2134‧‧‧空隙2134‧‧‧ gap

2141、2142‧‧‧絕緣片2141, 2142‧‧‧Insulation

215‧‧‧導電片215‧‧‧Conductor

2151‧‧‧導電接腳2151‧‧‧Electrical pins

216‧‧‧蓋板216‧‧‧ cover

216a‧‧‧容置空間216a‧‧‧ accommodating space

2161‧‧‧側壁2161‧‧‧ side wall

2162‧‧‧底板2162‧‧‧floor

2163‧‧‧開口部2163‧‧‧ openings

217b‧‧‧第一腔室217b‧‧‧ first chamber

217a‧‧‧匯流腔室217a‧‧ ‧ confluence chamber

218‧‧‧膠體218‧‧ ‧ colloid

23‧‧‧導氣端開口23‧‧‧ Air conduction opening

24‧‧‧迴流穿槽24‧‧‧Reflow through slot

25‧‧‧熱傳導板25‧‧‧heat transfer plate

25a‧‧‧散熱片25a‧‧ ‧ heat sink

26‧‧‧散熱器26‧‧‧ radiator

261‧‧‧底座261‧‧‧Base

262‧‧‧散熱片262‧‧‧ Heat sink

3‧‧‧電子元件3‧‧‧Electronic components

5‧‧‧控制系統5‧‧‧Control system

51‧‧‧控制單元51‧‧‧Control unit

52‧‧‧溫度感測器52‧‧‧temperature sensor

g0、G‧‧‧間隙G0, G‧‧‧ gap

第1圖為傳統散熱機構之結構示意圖。 第2A圖為本案較佳實施例之氣冷散熱裝置之結構示意圖。 第2B圖為第2A圖所示之氣冷散熱裝置於另一視角之結構示意圖。 第3圖為第2A圖所示之氣冷散熱裝置於AA截面之結構示意圖。 第4A及4B圖分別為本案較佳實施例之氣體泵浦於不同視角之分解結構示意圖。 第5A圖係為本案較佳實施例之壓電致動器之正面結構示意圖。 第5B圖係為本案較佳實施例之壓電致動器之背面結構示意圖。 第5C圖係為本案較佳實施例之壓電致動器之剖面結構示意圖。 第6圖係為第2B圖所示之氣冷散熱裝置於BB截面剖面示意圖。 第7A圖係為第2B圖所示之氣冷散熱裝置於CC截面剖面示意圖。 第7B至7D圖係為本案較佳實施例之氣體泵浦之作動過程示意圖。 第8圖為本案較佳實施例之氣冷散熱裝置之控制系統架構示意圖。Figure 1 is a schematic view of the structure of a conventional heat dissipation mechanism. 2A is a schematic structural view of the air-cooling heat dissipating device of the preferred embodiment of the present invention. Fig. 2B is a schematic view showing the structure of the air-cooling heat dissipating device shown in Fig. 2A at another viewing angle. Fig. 3 is a schematic view showing the structure of the air-cooling heat dissipating device shown in Fig. 2A in the AA cross section. 4A and 4B are respectively schematic views showing the decomposition structure of the gas pumped at different viewing angles in the preferred embodiment of the present invention. Fig. 5A is a schematic view showing the front structure of the piezoelectric actuator of the preferred embodiment of the present invention. Fig. 5B is a schematic view showing the structure of the back surface of the piezoelectric actuator of the preferred embodiment of the present invention. Fig. 5C is a schematic cross-sectional view showing the piezoelectric actuator of the preferred embodiment of the present invention. Figure 6 is a cross-sectional view of the air-cooling heat sink shown in Figure 2B taken along the line BB. Fig. 7A is a schematic cross-sectional view of the air-cooling heat dissipating device shown in Fig. 2B in the CC section. 7B to 7D are schematic views of the operation of the gas pumping of the preferred embodiment of the present invention. Figure 8 is a schematic view showing the structure of the control system of the air-cooling heat dissipating device of the preferred embodiment of the present invention.

Claims (12)

一種氣冷散熱裝置,用於對一電子元件散熱,該氣冷散熱裝置包含: 一承載基板,包含一上表面、一下表面、一導氣端開口以及一熱傳導板,其中該熱傳導板設置於該上表面且對應於該導氣端開口,以及該電子元件係設置於該 熱傳導板上; 一氣體泵浦,該氣體泵浦係為壓電致動氣體泵浦,固設於該承載基板之該下表面,且對應封閉該導氣端開口,該氣體泵浦包含: 一共振片,具有一中空孔洞;一壓電致動器,與該共振片相對應設置;以及 一蓋板,具有一側壁、一底板及一開口部,該側壁係環繞該底板周緣而凸設於該底板上,並與該底板形成一容置空間,且該共振片及該壓電致動器係設置於該容置空間中,該開口設置於該側壁上,該共振片及該蓋板之該側壁共同定義出一匯流腔室;以及 一散熱器,設置於該電子元件上; 其中,當該壓電致動器受驅動以進行集氣作業時,氣體係先由該蓋板之該開口部匯集至該匯流腔室,再由該共振片之該中空孔洞流至該第一腔室暫存,當該壓電致動器受驅動以進行排氣作業時,氣體係先由該第一腔室通過該共振片之該中空孔洞流入該導氣端開口,並對該熱傳導板進行熱交換。An air-cooling heat dissipating device for dissipating heat to an electronic component, the air-cooling heat dissipating device comprising: a carrier substrate comprising an upper surface, a lower surface, an air guiding end opening, and a heat conducting plate, wherein the heat conducting plate is disposed on the An upper surface corresponding to the air-conducting end opening, and the electronic component is disposed on the heat-conducting plate; a gas pumping, the gas pumping is piezoelectrically actuated gas pumping, and is fixed on the carrier substrate a lower surface, and correspondingly closing the air guiding end opening, the gas pump comprises: a resonant piece having a hollow hole; a piezoelectric actuator disposed corresponding to the resonant piece; and a cover plate having a side wall a bottom plate and an opening portion, the side wall is protruded from the bottom of the bottom plate and protrudes from the bottom plate, and forms an accommodation space with the bottom plate, and the resonant piece and the piezoelectric actuator are disposed in the receiving portion In the space, the opening is disposed on the sidewall, the resonant plate and the sidewall of the cover collectively define a confluence chamber; and a heat sink disposed on the electronic component; wherein, the piezoelectric actuator Subject to When the gas gathering operation is performed, the gas system is first collected from the opening portion of the cover plate to the confluence chamber, and then the hollow hole of the resonance piece flows to the first chamber for temporary storage. When the actuator is driven to perform the exhausting operation, the gas system first flows into the air-conducting end opening through the hollow hole of the resonance piece from the first chamber, and heat-exchanges the heat-conducting plate. 如申請專利範圍第1項所述之氣冷散熱裝置,其中該承載基板之該導氣端開口係貫穿該上表面及該下表面。The air-cooling heat dissipating device of claim 1, wherein the air-conducting end opening of the carrier substrate extends through the upper surface and the lower surface. 如申請專利範圍第1項所述之氣冷散熱裝置,其中該熱傳導板與該承載基板間具有一間隙,用以供氣流流通。The air-cooling heat dissipating device of claim 1, wherein the heat conducting plate and the carrier substrate have a gap for airflow. 如申請專利範圍第1項所述之氣冷散熱裝置,其中該熱傳導板貼附該電子元件之一表面,且該散熱器貼附該電子元件之另一表面。The air-cooling heat dissipating device of claim 1, wherein the heat conducting plate is attached to a surface of the electronic component, and the heat sink is attached to the other surface of the electronic component. 如申請專利範圍第1項所述之氣冷散熱裝置,其中該承載基板更包括至少一迴流穿槽,該迴流穿槽係貫穿該上表面及該下表面,且鄰設於該熱傳導板之周緣。The air-cooling heat dissipating device of claim 1, wherein the carrier substrate further comprises at least one recirculation through groove extending through the upper surface and the lower surface and adjacent to the periphery of the heat conduction plate . 如請求項1所述之氣冷散熱裝置,其中該壓電致動器包含: 一懸浮板,具有一第一表面與一第二表面; 一外框,具有至少一支架,該至少一支架連接該懸浮板及該外框且設置於該懸浮板及該外框之間;以及 一壓電陶瓷板,貼附於該懸浮板之該第一表面,用以施加電壓以驅動該懸浮板彎曲振動。The air-cooling heat dissipating device of claim 1, wherein the piezoelectric actuator comprises: a suspension plate having a first surface and a second surface; an outer frame having at least one bracket, the at least one bracket connected The suspension plate and the outer frame are disposed between the suspension plate and the outer frame; and a piezoelectric ceramic plate attached to the first surface of the suspension plate for applying a voltage to drive the suspension plate to bend and vibrate . 如請求項6所述之氣冷散熱裝置,其中該共振片與該壓電致動器之間具有一間隙。The air-cooling heat sink of claim 6, wherein the resonator has a gap with the piezoelectric actuator. 如請求項6所述之氣冷散熱裝置,其中該支架、該懸浮板及該外框之間更具有至少一空隙,且該支架之兩端點係分別連接該外框與該懸浮板。The air-cooling heat dissipating device of claim 6, wherein the bracket, the suspension plate and the outer frame further have at least one gap, and the two ends of the bracket are respectively connected to the outer frame and the suspension plate. 如請求項6所述之氣冷散熱裝置,其中該氣體泵浦之該懸浮板於該第二表面上更具有一凸部,且該凸部為一圓柱結構。The air-cooling heat dissipating device of claim 6, wherein the suspension plate of the gas pump further has a convex portion on the second surface, and the convex portion has a cylindrical structure. 如請求項7所述之氣冷散熱裝置,其中該氣體泵浦更包含至少一絕緣片及一導電片,且該至少一絕緣片及該導電片依序設置於該壓電致動器之下。The air-cooling heat dissipating device of claim 7, wherein the gas pump further comprises at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially disposed under the piezoelectric actuator . 如請求項10所述之氣冷散熱裝置,其中該壓電致動器之外框具有一導電接腳,該導電片具有一導電接腳,而該氣體泵浦之該蓋板之該開口部設置於側壁上,用以供該外框之該導電接腳及該導電片之該導電接腳向外穿過該開口部而凸出於該蓋板之外,以便於與外部電源連接。The air-cooling heat dissipating device of claim 10, wherein the piezoelectric actuator outer frame has a conductive pin, the conductive piece has a conductive pin, and the gas pumps the opening of the cover plate The conductive pin of the outer frame and the conductive pin of the conductive sheet protrude outwardly from the opening to protrude from the cover to facilitate connection with an external power source. 如請求項1所述之氣冷散熱裝置,其更包括一控制系統,該控制系統包括: 一控制單元,電連接於該氣體泵浦,以控制該氣體泵浦運作;以及 一溫度感測器,電連接於該控制單元且鄰設於該電子元件,以感測該電子元件之一溫度以輸出一感測訊號至該控制單元; 其中,當該控制單元於接收到該感測訊號,並判斷該電子元件之該溫度大於一溫度門檻值時,該控制單元使該氣體泵浦致能,以驅動氣流流動,以及當該控制單元於接收到該感測訊號,並判斷該電子元件之該溫度低於該溫度門檻值時,該控制單元使該氣體泵浦停止運作。The air-cooling heat dissipating device of claim 1, further comprising a control system comprising: a control unit electrically connected to the gas pump to control the gas pumping operation; and a temperature sensor Electrically connected to the control unit and adjacent to the electronic component to sense a temperature of the electronic component to output a sensing signal to the control unit; wherein, when the control unit receives the sensing signal, When the temperature of the electronic component is greater than a temperature threshold, the control unit enables the gas pump to drive the airflow, and when the control unit receives the sensing signal, and determines the electronic component When the temperature is below the temperature threshold, the control unit stops the gas pump from operating.
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