TW201816478A - 玻璃基板的研磨方法及研磨裝置 - Google Patents

玻璃基板的研磨方法及研磨裝置 Download PDF

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Publication number
TW201816478A
TW201816478A TW106123497A TW106123497A TW201816478A TW 201816478 A TW201816478 A TW 201816478A TW 106123497 A TW106123497 A TW 106123497A TW 106123497 A TW106123497 A TW 106123497A TW 201816478 A TW201816478 A TW 201816478A
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TW
Taiwan
Prior art keywords
glass substrate
polishing
chemical polishing
liquid
spray
Prior art date
Application number
TW106123497A
Other languages
English (en)
Chinese (zh)
Inventor
住母家岩夫
伊東由夫
中村馬羅
日高羅林頓
田中光明
Original Assignee
日商電硝工程股份有限公司
日商日本創造股份有限公司
日商Ｉｃｍ股份有限公司
日商常盤製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商電硝工程股份有限公司, 日商日本創造股份有限公司, 日商Ｉｃｍ股份有限公司, 日商常盤製作所股份有限公司 filed Critical 日商電硝工程股份有限公司
Publication of TW201816478A publication Critical patent/TW201816478A/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Liquid Crystal (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Electroluminescent Light Sources (AREA)
TW106123497A 2016-07-27 2017-07-13 玻璃基板的研磨方法及研磨裝置 TW201816478A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
??PCT/JP2016/003476 2016-07-27
PCT/JP2016/003476 WO2018020531A1 (ja) 2016-07-27 2016-07-27 ガラス基板の研磨方法および研磨装置

Publications (1)

Publication Number Publication Date
TW201816478A true TW201816478A (zh) 2018-05-01

Family

ID=61015743

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106123497A TW201816478A (zh) 2016-07-27 2017-07-13 玻璃基板的研磨方法及研磨裝置

Country Status (3)

Country Link
JP (1) JP6766147B2 (ja)
TW (1) TW201816478A (ja)
WO (1) WO2018020531A1 (ja)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3995147B2 (ja) * 2002-02-01 2007-10-24 西山ステンレスケミカル株式会社 プラズマディスプレイパネル用ガラス基板の製造方法
JP4185710B2 (ja) * 2002-06-07 2008-11-26 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP2008145621A (ja) * 2006-12-08 2008-06-26 Hitachi Displays Ltd 液晶表示装置及びその製造方法
KR100835745B1 (ko) * 2006-12-29 2008-06-09 최찬규 하향식 유리 박형화 방법
KR101387711B1 (ko) * 2007-04-10 2014-04-23 에프엔에스테크 주식회사 평판디스플레이 유리기판 에칭장치
KR20090008945A (ko) * 2007-07-19 2009-01-22 삼성전자주식회사 기판 식각 장치
JP2010073875A (ja) * 2008-09-18 2010-04-02 Hitachi Ltd 電極形成装置
JP2011197194A (ja) * 2010-03-18 2011-10-06 Tekurabo:Kk フラットパネルディスプレイの製造方法
JP2013237579A (ja) * 2012-05-14 2013-11-28 Asahi Glass Co Ltd ガラス板エッチング装置、ガラス板保持治具およびガラス板の製造方法

Also Published As

Publication number Publication date
JPWO2018020531A1 (ja) 2019-03-22
JP6766147B2 (ja) 2020-10-07
WO2018020531A1 (ja) 2018-02-01

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