TW201816014A - Touch sensor and touch panel having touch sensor - Google Patents

Touch sensor and touch panel having touch sensor Download PDF

Info

Publication number
TW201816014A
TW201816014A TW106128808A TW106128808A TW201816014A TW 201816014 A TW201816014 A TW 201816014A TW 106128808 A TW106128808 A TW 106128808A TW 106128808 A TW106128808 A TW 106128808A TW 201816014 A TW201816014 A TW 201816014A
Authority
TW
Taiwan
Prior art keywords
touch sensor
item
sensor according
passivation layer
scope
Prior art date
Application number
TW106128808A
Other languages
Chinese (zh)
Other versions
TWI731149B (en
Inventor
尹億根
金龍煥
崔永民
姜求炫
琴同基
Original Assignee
南韓商東友精細化工有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 南韓商東友精細化工有限公司 filed Critical 南韓商東友精細化工有限公司
Publication of TW201816014A publication Critical patent/TW201816014A/en
Application granted granted Critical
Publication of TWI731149B publication Critical patent/TWI731149B/en

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/061Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0448Details of the electrode shape, e.g. for enhancing the detection of touches, for generating specific electric field shapes, for enhancing display quality
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/40OLEDs integrated with touch screens
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/208Touch screens
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Position Input By Displaying (AREA)

Abstract

A touch sensor and a touch panel having the same are provided. For a touch sensor and a touch panel having the same, a substrate, a touch sensor layer and a passivation layer are arranged orderly, wherein the passivation layer includes polysiloxane for more easily making the touch sensor without deteriorating the physical properties of the passivation layer.

Description

觸控式感測器以及包括該觸控式感測器的觸控式螢幕面板Touch sensor and touch screen panel including the same

本發明是關於一種觸控式感測器及包括該觸控式感測器的觸控式螢幕面板,更詳細地涉及不降低物性且容易製造的觸控式感測器以及包括該觸控式感測器的觸控式螢幕面板。The invention relates to a touch sensor and a touch screen panel including the touch sensor, and more particularly relates to a touch sensor that does not reduce physical properties and is easy to manufacture and includes the touch sensor. Touch screen panel of the sensor.

近年來隨著資訊化社會的發展,對顯示幕領域的需求也是以多種形態增加,因此具有薄形化、輕量化、低功耗化等特徵的各種平板顯示裝置(Flat Panel Display device),例如,液晶顯示裝置(Liquid Crystal Display device)、電漿顯示裝置(Plasma Display Panel device)、電致發光顯示裝置(Electro Luminescent Display device)、有機發光二極體顯示裝置(Organic Light-Emitting Diode Display device)等。With the development of the information society in recent years, the demand for display screens has also increased in various forms. Therefore, various flat panel display devices (Thin Panel Display Devices) with features such as thinness, light weight, and low power consumption, such as , Liquid Crystal Display device, Plasma Display Panel device, Electro Luminescent Display device, Organic Light-Emitting Diode Display device Wait.

其中,由於有機發光二極體(OLED)顯示裝置具有高速應答、高畫質、廣視角、低功耗等優點,因此近年來以新一代的顯示裝置接受關注。Among them, since organic light emitting diode (OLED) display devices have the advantages of high-speed response, high picture quality, wide viewing angle, and low power consumption, they have attracted attention in recent years with a new generation of display devices.

另外,貼在所述顯示裝置上,能夠由人的手或物體選擇顯示在畫面上的指示內容來輸入使用者的命令的輸入裝置、即觸控面板(touch panel)在備受矚目。觸控面板配備在顯示裝置的前面(front face),從而將人的手或物體直接接觸的位置變換為電信號。In addition, a touch panel, which is an input device that is pasted on the display device and can input a user's command by selecting instruction content displayed on the screen by a human hand or an object, has attracted much attention. The touch panel is provided on the front face of the display device, thereby converting a position where a human hand or an object directly contacts into an electric signal.

從而,以輸入信號接收在接觸位置選擇的指示內容。由於這種觸控面板可以替代如鍵盤以及滑鼠等與影像顯示裝置連接而運轉的另設的輸入裝置,因此其利用範圍是逐漸擴大的趨勢。Thereby, the instruction content selected at the contact position is received with the input signal. Since such a touch panel can replace other input devices such as a keyboard and a mouse that are connected to the image display device and operate, its use range is gradually expanding.

因此,如韓國公開專利第2014-0092366號,近年來採用觸控式螢幕面板的觸控式感測器採用在了多種圖像顯示裝置上,但是對於為了提高生產性從而以更加簡單的工序製造的觸控式感測器需求一直存在。Therefore, as in Korean Laid-Open Patent No. 2014-0092366, in recent years, a touch sensor using a touch screen panel has been used in a variety of image display devices, but it has been manufactured in a simpler process for improving productivity The need for touch sensors has always existed.

現有技術文獻Prior art literature

專利文獻-韓國公開專利第2014-0092366號。Patent Literature-Korean Published Patent No. 2014-0092366.

本發明的目的是提供一種具備不降低物性且製造工序容易的鈍化層的觸控式感測器。而且,本發明的目的在於提供一種製造容易且可以較厚地形成鈍化層的觸控式感測器的製造方法為目的。An object of the present invention is to provide a touch sensor having a passivation layer that does not reduce physical properties and is easy to manufacture. Furthermore, an object of the present invention is to provide a method for manufacturing a touch sensor that is easy to manufacture and can form a passivation layer with a thick thickness.

解決課題的方案:Solution to the problem:

方案1-一種觸控式感測器,按順序配置有基板、觸控式感測器層以及鈍化層,並且所述鈍化層包括聚矽氧烷構造。Solution 1-A touch sensor, in which a substrate, a touch sensor layer, and a passivation layer are sequentially arranged, and the passivation layer includes a polysiloxane structure.

方案2-根據上述方案1所述的觸控式感測器,所述鈍化層是聚矽氧烷化合物的燒制層。Embodiment 2-The touch sensor according to the above embodiment 1, wherein the passivation layer is a fired layer of a polysiloxane compound.

方案3-根據上述方案1所述的觸控式感測器,所述鈍化層的厚度為0.5µm至2µm。Solution 3- According to the touch sensor of the above solution 1, the thickness of the passivation layer is 0.5 μm to 2 μm.

方案4-根據上述方案1所述的觸控式感測器,所述觸控式感測器層包括多個隔離的感應圖案,所述感應圖案配置在同一面。Solution 4-The touch sensor according to the above solution 1, wherein the touch sensor layer includes a plurality of isolated sensing patterns, and the sensing patterns are disposed on a same surface.

方案5-根據上述方案1所述的觸控式感測器,Scheme 5-The touch sensor according to the above Scheme 1,

所述觸控式感測器層包括:沿第一方向形成的第一感應圖案;沿第二方向形成的第二感應圖案;以及橋電極,其連接所述第二感應圖案的相互隔離的單位圖案。The touch sensor layer includes: a first sensing pattern formed along a first direction; a second sensing pattern formed along a second direction; and a bridge electrode connected to mutually isolated units of the second sensing pattern pattern.

方案6-根據上述方案1所述的觸控式感測器,所述基板是有機發光二極體(OLED)的封裝基板。Scheme 6-The touch-sensitive sensor according to the above Scheme 1, wherein the substrate is an organic light emitting diode (OLED) package substrate.

方案7-根據上述方案1所述的觸控式感測器,所述基板由玻璃、高分子或金屬氧化物形成。Embodiment 7-The touch-sensitive sensor according to the embodiment 1, wherein the substrate is formed of glass, a polymer, or a metal oxide.

方案8-根據上述方案4所述的觸控式感測器,所述感應圖案由選自銦錫氧化物(ITO)、銦鋅氧化物(IZO)、鋅氧化物(ZnO)、銦鋅錫氧化物(IZTO)、鎘錫氧化物(CTO)以及金屬絲組成的組中的至少一個形成。Item 8- The touch sensor according to item 4, wherein the sensing pattern is selected from the group consisting of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), and indium zinc tin. At least one of a group consisting of an oxide (IZTO), a cadmium tin oxide (CTO), and a metal wire is formed.

方案9-根據上述方案5所述的觸控式感測器,所述感應圖案由選自銦錫氧化物(ITO)、銦鋅氧化物(IZO)、鋅氧化物(ZnO)、銦鋅錫氧化物(IZTO)、鎘錫氧化物(CTO)以及金屬絲組成的系列物中的至少一個形成。Item 9-The touch sensor according to item 5, wherein the sensing pattern is selected from the group consisting of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), and indium zinc tin. At least one of a series consisting of an oxide (IZTO), a cadmium tin oxide (CTO), and a metal wire is formed.

方案10-根據上述方案5所述的觸控式感測器,為了防止第一感應圖案與橋電極的電連接,第一感應圖案與橋電極之間還包括絕緣體。Item 10-The touch sensor according to item 5, in order to prevent the first sensing pattern from being electrically connected to the bridge electrode, an insulator is further included between the first sensing pattern and the bridge electrode.

方案11-根據上述方案10所述的觸控式感測器,所述絕緣體是由感光樹脂組合物的固化物或矽氧化物形成。Item 11-The touch sensor according to the item 10, wherein the insulator is formed of a cured product or a silicon oxide of a photosensitive resin composition.

方案12-一種觸控式感測器的製造方法,包括:在基板上形成觸控式感測器層的步驟;在所述觸控式感測器層上塗佈包含聚矽氧烷化合物以及溶劑的鈍化層形成用組合物的步驟;以及燒制所述塗佈的鈍化層形成用組合物而形成鈍化層的步驟。Scheme 12-A method for manufacturing a touch sensor, comprising the steps of forming a touch sensor layer on a substrate; coating the touch sensor layer with a polysiloxane compound and A step of forming a composition for forming a passivation layer by a solvent; and a step of firing the coated composition for forming a passivation layer.

方案13-根據上述方案12所述的觸控式感測器的製造方法,形成所述鈍化層的組合物的表面能量為20至30dyne/cm。Embodiment 13-The method for manufacturing a touch sensor according to the above embodiment 12, wherein a surface energy of the composition forming the passivation layer is 20 to 30 dyne / cm.

方案14-根據上述方案12所述的觸控式感測器的製造方法,以噴墨印刷方式執行的所述鈍化層形成用組合物的塗佈。Embodiment 14: The method for manufacturing a touch sensor according to the above embodiment 12, wherein the composition for forming a passivation layer is applied by an inkjet printing method.

方案15-根據上述方案12所述的觸控式感測器的製造方法,所述燒制以先燒制工序和後燒制工序執行。Embodiment 15-The method for manufacturing a touch sensor according to the above embodiment 12, wherein the firing is performed in a first firing process and a post firing process.

方案16-根據上述方案15所述的觸控式感測器的製造方法,所述先燒制工序在110至150℃執行50至150秒。Embodiment 16-The method for manufacturing a touch sensor according to the above embodiment 15, wherein the first firing step is performed at 110 to 150 ° C. for 50 to 150 seconds.

方案17-根據上述方案15所述的觸控式感測器的製造方法,所述後燒制工序在180至230℃執行15至45分鐘。Embodiment 17- The method for manufacturing a touch sensor according to the above Embodiment 15, the post-baking step is performed at 180 to 230 ° C. for 15 to 45 minutes.

方案18-根據上述方案15所述的觸控式感測器的製造方法,所述後燒制工序包括:在180至230℃執行15至45分鐘的第一後燒制階段;以及在380至420℃執行15至45分鐘的第二後燒制階段。Item 18- The method for manufacturing a touch sensor according to item 15, wherein the post-baking process includes: performing a first post-baking stage at 180 to 230 ° C. for 15 to 45 minutes; and A second post-firing stage is performed at 420 ° C for 15 to 45 minutes.

方案19-一種觸控式螢幕面板,包括上述方案1至方案11中的任意一項所述的觸控式感測器。Embodiment 19-A touch screen panel including the touch sensor according to any one of the above embodiments 1 to 11.

方案20-一種圖像顯示裝置,包括上述方案19所述的觸控式螢幕面板。Item 20-An image display device including the touch screen panel according to item 19 above.

本發明的觸控式感測器,因為鈍化層包括了聚矽氧烷結構,所以可以由更加簡單的工序製造,並且根據需求可以具備較厚的鈍化層。Since the touch-sensitive sensor of the present invention includes a polysiloxane structure, the passivation layer can be manufactured in a simpler process, and a thicker passivation layer can be provided according to requirements.

根據本發明的觸控式感測器的鈍化層,可以對於由蒸鍍形成的矽氧化物鈍化層具有同等以上的物性。According to the passivation layer of the touch sensor of the present invention, it is possible to have the same or more physical properties for a silicon oxide passivation layer formed by vapor deposition.

而且,本發明的觸控式感測器的製造方法通過塗佈聚矽氧烷化合物並燒制的階段,可以容易地執行。Furthermore, the method for manufacturing a touch sensor of the present invention can be easily performed at a stage of applying a polysiloxane compound and firing.

而且,本發明的觸控式感測器的製造方法在塗佈聚矽氧烷化合物時若採用噴墨方式時可以形成更厚的鈍化層。In addition, in the method for manufacturing a touch sensor of the present invention, when a polysiloxane compound is applied, if the inkjet method is used, a thicker passivation layer can be formed.

為了對本發明之上述及其他方面有更佳的瞭解,下文特舉實施例,並配合所附圖式詳細說明如下:In order to have a better understanding of the above and other aspects of the present invention, the following specific examples are described in detail below in conjunction with the accompanying drawings:

本發明是關於一種觸控式感測器,所述觸控式感測器按順序配置有基板、觸控式感測器層以及鈍化層,並且所述鈍化層包括聚矽氧烷構造,而且所述觸控式感測器不降低物性並且容易製造。The invention relates to a touch sensor. The touch sensor is configured with a substrate, a touch sensor layer, and a passivation layer in this order. The passivation layer includes a polysiloxane structure. The touch sensor does not reduce physical properties and is easy to manufacture.

下面,參照附圖詳細地說明本發明的實施例。但是,附圖中所示的圖是將本發明的特定的實施例示例在示意圖的,並且結合上述發明內容有更詳細地理解本發明技術思想的作用,因此,應當理解為本發明並不限於圖中所公開的實施方式。Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the drawings shown in the drawings are examples of specific embodiments of the present invention in a schematic diagram, and have a more detailed understanding of the technical idea of the present invention in combination with the above-mentioned content of the invention. Therefore, it should be understood that the present invention is not limited to The embodiment disclosed in the figure.

根據本發明的觸控式感測器的一實施例,第1圖是其立體圖,第2圖是表示第1圖中所示的觸控式感測器的A-A'剖視圖。According to an embodiment of the touch sensor of the present invention, FIG. 1 is a perspective view thereof, and FIG. 2 is an AA ′ cross-sectional view showing the touch sensor shown in FIG. 1.

根據本發明的觸控式感測器的另一實施例,第4圖是其立體圖,第5圖是表示第4圖中所示的觸控式感測器的A-A'剖視圖。According to another embodiment of the touch sensor of the present invention, FIG. 4 is a perspective view thereof, and FIG. 5 is an AA ′ cross-sectional view showing the touch sensor shown in FIG. 4.

根據本發明的觸控式感測器的又一實施例,分別對應第1圖(第4圖)和第4圖(第5圖),但是絕緣體以層狀形成從而使橋電極通過接觸孔與感應圖案連接的實施例表示在第3圖和第6圖。According to yet another embodiment of the touch sensor of the present invention, corresponding to FIG. 1 (FIG. 4) and FIG. 4 (FIG. 5), respectively, but the insulator is formed in a layered manner so that the bridge electrode passes through the contact hole and Examples of the sensing pattern connection are shown in FIGS. 3 and 6.

但是,在第1圖和第4圖中,為了容易掌握層疊結構沒有示出鈍化層70。However, in FIGS. 1 and 4, the passivation layer 70 is not shown in order to easily grasp the laminated structure.

本發明的觸控式傳感器具有按順序配置有基板1、觸控式感測器層60以及鈍化層70的結構。基板1、觸控式感測器層60以及鈍化層70可以是按順序層疊的結構,而且該些之間可以進一步插入有所屬領域中公知的結構。The touch sensor of the present invention has a structure in which a substrate 1, a touch sensor layer 60, and a passivation layer 70 are sequentially arranged. The substrate 1, the touch sensor layer 60, and the passivation layer 70 may have a stacked structure in order, and a structure known in the art may be further interposed therebetween.

基板1,可以不被特別限定而無限制地使用通常使用於觸控式感測器的材料,例如可以是由玻璃、高分子以及金屬氧化物形成的系列物中選擇的。高分子可以由環烯烴聚合物(COP)、聚對苯二甲酸乙二醇酯(PET)、聚丙烯酸酯(PAR)、聚醚醯亞胺(PEI)、聚乙烯苯二甲酸鹽(PEN)、聚苯硫醚(PPS)、聚丙烯酯(polyallylate)、聚醯亞胺(PI)、醋酸丙酸纖維素(CAP)、聚醚碸(PES)、三乙酸纖維素(TAC)、聚碳酸酯(PC)、環烯烴共聚物(COC)、聚甲基丙烯酸甲酯(PMMA)等中分別單獨或混合兩種以上來使用,較佳地使用聚醯亞胺,但不限定於此。The substrate 1 may be any material that is generally used in a touch sensor without limitation, and may be selected from a series consisting of glass, a polymer, and a metal oxide, for example. Macromolecules can be composed of cyclic olefin polymers (COP), polyethylene terephthalate (PET), polyacrylates (PAR), polyether-imide (PEI), and polyvinyl phthalate (PEN ), Polyphenylene sulfide (PPS), polypropylene (polyallylate), polyimide (PI), cellulose acetate propionate (CAP), polyether fluorene (PES), cellulose triacetate (TAC), poly Carbonate (PC), cyclic olefin copolymer (COC), polymethyl methacrylate (PMMA), etc. may be used alone or as a mixture of two or more thereof. Polyimide is preferably used, but is not limited thereto.

氧化鋁(Al2 O3 )等可以使用於金屬氧化物。Aluminum oxide (Al 2 O 3 ) and the like can be used for the metal oxide.

考慮到用於形成後述的鈍化層70的燒制工序,基板1較佳地可以是玻璃或金屬氧化物。In consideration of a firing process for forming a passivation layer 70 described later, the substrate 1 may preferably be glass or a metal oxide.

根據本發明的一實施例,基板1可以是密封有機發光二極體(OLED)的封裝基板。According to an embodiment of the present invention, the substrate 1 may be a package substrate for sealing an organic light emitting diode (OLED).

OLED通常是在底座基板上層疊的陽極、包括有機發光層的有機膜層以及陰極並被封裝基板密封的結構。An OLED generally has a structure in which an anode, an organic film layer including an organic light emitting layer, and a cathode are stacked on a base substrate and sealed by a package substrate.

有機發光層的有機發光物質在接觸濕氣或氧氣時將被氧化從而壽命明顯降低,因此封裝基板有防止水分和氧氣透過的屏障層的作用。The organic light-emitting material of the organic light-emitting layer will be oxidized when exposed to moisture or oxygen, thereby significantly reducing its life. Therefore, the packaging substrate has a role of a barrier layer to prevent moisture and oxygen from passing through.

觸控式感測器層60可以形成在基板1上。The touch sensor layer 60 may be formed on the substrate 1.

觸控式感測器層60並無特別限定地可以使用所屬領域公知的觸控式感測器。例如觸控式感測器層60具有多個感應圖案。感應圖案提供接觸點的座標資訊,具體地,當人的手或物體與覆蓋視窗基板接觸時,通過該位置的圖案以及連接在圖案的位置檢測線傳遞接觸位置的靜電容量的變化,並且通過該靜電容量的變化變換為電信號,確認接觸位置。The touch sensor layer 60 is not particularly limited to a touch sensor known in the art. For example, the touch sensor layer 60 has a plurality of sensing patterns. The sensing pattern provides coordinate information of the contact point. Specifically, when a human hand or an object is in contact with the cover window substrate, the change in the electrostatic capacity of the contact position is transmitted through the pattern at the position and the position detection line connected to the pattern, and through The change in capacitance is converted into an electrical signal, and the contact position is confirmed.

根據本發明的觸控式感測器層60的一實施例表示在了第1圖和第4圖。An embodiment of the touch sensor layer 60 according to the present invention is shown in FIGS. 1 and 4.

第1圖和第4圖所示的觸控式感測器層60可以包括:沿第一方向形成的第一感應圖案10;沿第二方向形成的第二感應圖案20;以及連接所述第二感應圖案的相互隔離的單位圖案的橋電極。The touch sensor layer 60 shown in FIGS. 1 and 4 may include: a first sensing pattern 10 formed along a first direction; a second sensing pattern 20 formed along a second direction; Bridge electrodes of unit patterns with two sensing patterns separated from each other.

第1圖表示了橋電極30與鈍化層70接觸的結構的實施例(參照第2圖),第4圖表示了橋電極30與基板1接觸的結構的實施例(參照第5圖)。FIG. 1 shows an example of a structure in which the bridge electrode 30 is in contact with the passivation layer 70 (see FIG. 2), and FIG. 4 shows an example of a structure in which the bridge electrode 30 is in contact with the substrate 1 (see FIG. 5).

第一感應圖案10與第二感應圖案20沿互相不同的方向配置。例如,第一方向是X軸方向,第二方向可以是與其交叉的Y軸方向,但是不以此限定。The first sensing pattern 10 and the second sensing pattern 20 are arranged in mutually different directions. For example, the first direction is the X-axis direction, and the second direction may be the Y-axis direction crossing it, but it is not limited thereto.

第一感應圖案10和第二感應圖案20提供關於接觸點的X座標和Y座標的資訊。具體地,當人的手或物體與覆蓋視窗基板接觸時經由第一感應圖案10、第二感應圖案20以及位置檢測線向驅動回路側傳遞根據接觸位置的靜電容量的變化。然後,靜電容量的變化通過X以及Y輸入處理回路(未顯示於圖示)等變換為電信號,從而確認接觸位置。The first sensing pattern 10 and the second sensing pattern 20 provide information about the X coordinate and the Y coordinate of the contact point. Specifically, when a human hand or an object is in contact with the cover window substrate, a change in the electrostatic capacity according to the contact position is transmitted to the driving circuit side via the first sensing pattern 10, the second sensing pattern 20, and the position detection line. Then, the change in the electrostatic capacity is converted into an electric signal through an X and Y input processing circuit (not shown), etc., thereby confirming the contact position.

與此相關,第一感應圖案10和第二感應圖案20形成在同一層,為了檢測觸控位置,各個圖案需要電連接。但是,雖然第一感應圖案10的單位圖案通過接合部成相互連接形態,而第二感應圖案20的單位圖案是以島(island)形態相互分離的結構,因此為了電連接第二感應圖案20需要另外的橋電極30。Related to this, the first sensing pattern 10 and the second sensing pattern 20 are formed on the same layer, and in order to detect a touch position, each pattern needs to be electrically connected. However, although the unit patterns of the first sensing pattern 10 are connected to each other through the joint portion, and the unit patterns of the second sensing pattern 20 are separated from each other in an island form, it is necessary to electrically connect the second sensing pattern 20 Additional bridge electrode 30.

所屬領域公知的透明電極材料可以無限制地適用於感應圖案10、20。例如,銦錫氧化物(ITO)、銦鋅氧化物(IZO)、鋅氧化物(ZnO)、銦鋅錫氧化物(IZTO)、鎘錫氧化物(CTO)、金屬絲,較佳地可以使用銦錫氧化物。用於金屬絲的金屬沒有特別限定,例如銀(Ag)、金、鋁、銅、鐵、鎳、鈦、碲、鉻。這些可以單獨或混合二種以上使用。Transparent electrode materials known in the art can be applied to the sensing patterns 10 and 20 without limitation. For example, indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium zinc tin oxide (IZTO), cadmium tin oxide (CTO), metal wire, preferably can be used Indium tin oxide. The metal used for the wire is not particularly limited, and examples thereof include silver (Ag), gold, aluminum, copper, iron, nickel, titanium, tellurium, and chromium. These can be used individually or in mixture of 2 or more types.

橋電極30電連接第二感應圖案20的相互隔離的單位圖案。The bridge electrode 30 is electrically connected to the unit patterns of the second sensing pattern 20 that are isolated from each other.

此時,因為橋電極30需要與感應圖案中的第一感應圖案10電隔離,為此形成有絕緣體40。對此在下文中說明。At this time, since the bridge electrode 30 needs to be electrically isolated from the first sensing pattern 10 in the sensing pattern, an insulator 40 is formed for this purpose. This is explained below.

橋電極30可以位於第二感應圖案20的上部或下部。The bridge electrode 30 may be located above or below the second sensing pattern 20.

第1圖是表示橋電極30位於第二感應圖案20的上部的一實施例的立體圖(即,與鈍化層70接觸的形態),第4圖是表示橋電極30位於第二感應圖案20的下部的一實施例的立體圖(即,與基板1接觸的形態)。FIG. 1 is a perspective view showing an embodiment in which the bridge electrode 30 is located on the upper part of the second sensing pattern 20 (that is, a state in which the bridge electrode 30 is in contact with the passivation layer 70). FIG. A perspective view of an embodiment (ie, a form of contact with the substrate 1).

而且,第2圖是表示第1圖中所示的觸控式感測器的A-A'剖視圖。第5圖是表示第4圖中所示的觸控式感測器的A-A'剖視圖。FIG. 2 is a cross-sectional view taken along the line AA ′ of the touch sensor shown in FIG. 1. FIG. 5 is an AA ′ cross-sectional view showing the touch sensor shown in FIG. 4.

如上述附圖所述,橋電極30可以位於第二感應圖案20的上部或下部,因此感應圖案和絕緣體40的層疊順序同樣可以由所屬領域公知的方法適當地選擇。As described in the above drawings, the bridge electrode 30 may be located on the upper or lower portion of the second sensing pattern 20, so the stacking order of the sensing pattern and the insulator 40 may also be appropriately selected by a method known in the art.

根據本發明的橋電極30由金屬材料形成,較佳地由與配置在觸控式螢幕面板的非顯示部的對應領域的位置檢測線等相同的材料形成。此時,因為形成位置檢測線時可以同時形成橋電極30,所以可以進一步簡化工序。The bridge electrode 30 according to the present invention is formed of a metal material, and is preferably formed of the same material as a position detection line or the like disposed in a corresponding area of a non-display portion of the touch screen panel. At this time, since the bridge electrode 30 can be formed at the same time when the position detection line is formed, the process can be further simplified.

在本說明書,非顯示部是指採用觸控式感測器的觸控式螢幕面板中不顯示圖像的邊緣部位(邊框),顯示部是指顯示圖像的部位。形成在顯示部的感應圖案和橋電極識別使用者的觸控信號,檢測出的信號經由非顯示部的位置檢測線向驅動回路側傳遞。In this specification, the non-display portion refers to an edge portion (frame) where an image is not displayed in a touch screen panel using a touch sensor, and the display portion refers to a portion where an image is displayed. The sensing pattern formed on the display section and the bridge electrode recognize the user's touch signal, and the detected signal is transmitted to the drive circuit side via the position detection line of the non-display section.

所述金屬,只要是電導率優秀且低電阻的金屬將沒有特別限定,例如可以是鉬、銀、鋁、銅、鈀、金、鉑、鋅、錫、鈦、以及這些金屬的二種以上的合金等。這些金屬可以單獨或混合兩種以上使用。The metal is not particularly limited as long as it is a metal having excellent electrical conductivity and low resistance, and may be, for example, molybdenum, silver, aluminum, copper, palladium, gold, platinum, zinc, tin, titanium, and two or more of these metals. Alloys, etc. These metals can be used alone or in combination of two or more.

而且,橋電極30可以是二種以上的金屬層疊二層以上的形態。可以由上述的金屬材料的範圍內的兩種以上的金屬以兩層、三層等多層的結構形成,例如鉬/鋁/鉬的三層結構,但並不限定於此。In addition, the bridge electrode 30 may be in a form in which two or more metals are stacked in two or more layers. The two or more metals in the range of the above-mentioned metal materials may be formed in a multilayer structure such as two layers or three layers, such as a three-layer structure of molybdenum / aluminum / molybdenum, but it is not limited thereto.

為了防止第一感應圖案10與橋電極30的電連接,絕緣體40形成在第一感應圖案10與橋電極30之間。To prevent the first sensing pattern 10 from being electrically connected to the bridge electrode 30, an insulator 40 is formed between the first sensing pattern 10 and the bridge electrode 30.

絕緣體40可以形成在第一感應圖案10的單位圖案的接合部上。The insulator 40 may be formed on a joint portion of the unit pattern of the first sensing pattern 10.

而且,絕緣體為了形成的便利性,不僅是形成在第一感應圖案10的單位圖案的結合部的上面,還可以以包括其的層的形態形成。In addition, for the convenience of formation, the insulator may be formed not only on the upper portion of the coupling portion of the unit pattern of the first sensing pattern 10 but also in the form of a layer including the same.

如第3圖和第6圖所示,當絕緣體40以層的形態形成時可以根據需求具備接觸孔,以使橋電極30可以連接第二感應圖案20的隔離的單位圖案。此時,在接觸孔實現第二圖案20的隔離的單位圖案與橋電極30的電接觸。As shown in FIGS. 3 and 6, when the insulator 40 is formed in the form of a layer, a contact hole may be provided as required so that the bridge electrode 30 can be connected to the isolated unit pattern of the second sensing pattern 20. At this time, the unit pattern that isolates the second pattern 20 in the contact hole is in electrical contact with the bridge electrode 30.

根據本發明的絕緣體40可以無限制地適用所屬領域公知的透明絕緣材料。例如,可以使用如矽氧化物的無機物材料,或固化包括丙烯酸類樹脂之透明的感光樹脂組合物或熱固性樹脂組合物,形成為層或需要的圖案。The insulator 40 according to the present invention can be applied without limitation to a transparent insulating material known in the art. For example, an inorganic material such as silicon oxide, or a transparent photosensitive resin composition or a thermosetting resin composition including an acrylic resin may be used to form a layer or a desired pattern.

根據本發明的另一實施例,觸控式感測器層60可以是多個隔離的感應圖案配置在同一面上的結構。此時,各感應圖案均與位置檢測線連接,並且可以不需要橋電極。According to another embodiment of the present invention, the touch sensor layer 60 may be a structure in which a plurality of isolated sensing patterns are arranged on the same surface. At this time, each sensing pattern is connected to a position detection line, and a bridge electrode may not be required.

鈍化層70有保護觸控式感測器層60並使其與外部絕緣的功能。The passivation layer 70 has a function of protecting the touch sensor layer 60 and isolating it from the outside.

根據本發明的鈍化層70包括聚矽氧烷結構。The passivation layer 70 according to the present invention includes a polysiloxane structure.

對於已知的現有的觸控式感測器的鈍化材料無機氧化物膜,蒸鍍工序是必要的,因此有製造工序複雜的問題。For the conventional inorganic oxide film of a passivation material of a conventional touch sensor, a vapor deposition process is necessary, and therefore there is a problem that the manufacturing process is complicated.

對此,本發明通過鈍化層70包括聚矽氧烷結構,具備優秀的透明度、耐劃傷性(硬度)、耐熱性、貼緊力的同時,可以通過如包括聚矽氧烷化合物的組合物的塗佈和燒制等較簡單的工序製造。In this regard, the present invention includes a polysiloxane structure through the passivation layer 70, and has excellent transparency, scratch resistance (hardness), heat resistance, and adhesion. It can be manufactured by simpler processes such as coating and firing.

只要是所屬領域公知的結構不特別限定聚矽氧烷結構,例如可以是在形成聚矽氧烷結構的矽元素結合脂肪族烴和芳香族烴中的至少一個的結構。脂肪族烴可以是例如碳數為1至10的直鏈或支鏈的烷基或烷氧基,芳香族烴可以是碳數為6至20的芳基,但不限定於此。The polysiloxane structure is not particularly limited as long as the structure is known in the art, and for example, it may be a structure in which at least one of an aliphatic hydrocarbon and an aromatic hydrocarbon is bonded to a silicon element forming a polysiloxane structure. The aliphatic hydrocarbon may be, for example, a linear or branched alkyl or alkoxy group having 1 to 10 carbon atoms, and the aromatic hydrocarbon may be an aryl group having 6 to 20 carbon atoms, but is not limited thereto.

鈍化層70的聚矽氧烷結構可以具有與聚矽氧烷化合物同樣的重複單位。另外,根據本發明的另一實施例,聚矽氧烷結構可以通過塗佈聚矽氧烷化合物後燒制形成。聚矽氧烷化合物燒制後為透明且具有的陶瓷特性,從而適用於鈍化層70的原材料。聚矽氧烷結構是由燒制聚矽氧烷化合物後獲取時,其重複單位在燒制工序中結合在矽元素的脂肪族和/或芳香族烴可能會脫離,因此有可能與聚矽氧烷化合物的重複單位不同。The polysiloxane structure of the passivation layer 70 may have the same repeating unit as the polysiloxane compound. In addition, according to another embodiment of the present invention, the polysiloxane structure may be formed by applying a polysiloxane compound and firing. The polysiloxane compound is transparent and has ceramic characteristics after firing, so that it is suitable for the raw material of the passivation layer 70. When the polysiloxane structure is obtained by firing a polysiloxane compound, the aliphatic and / or aromatic hydrocarbons of which the repeating unit is bound to the silicon element during the firing process may be detached, so it may be separated from the polysiloxane The repeating unit of the alkane compound is different.

根據本發明的鈍化層70厚度可以是0.5µm至2µm,較佳地可以是0.8µm至1.5µm。通過在所述厚度範圍具有充分的硬度,因此可以更有效地發揮提高耐劃傷性和保護觸控式感測器層70的功能。The thickness of the passivation layer 70 according to the present invention may be 0.5 μm to 2 μm, and preferably 0.8 μm to 1.5 μm. By having sufficient hardness in the thickness range, the functions of improving scratch resistance and protecting the touch sensor layer 70 can be exhibited more effectively.

以下,對根據本發明的觸控式感測器的製造方法的一實施例進行詳細地說明。但是,以下說明的製造方法是根據本發明的觸控式感測器特定的實施例的示例,並且用於結合前述的發明內容加深理解本發明地技術思想的作用,因此不能解釋為本發明限定於此。Hereinafter, an embodiment of a method for manufacturing a touch sensor according to the present invention will be described in detail. However, the manufacturing method described below is an example of a specific embodiment of the touch sensor according to the present invention, and is used to deepen the understanding of the technical idea of the present invention in combination with the foregoing summary, and therefore cannot be interpreted as a limitation of the present invention. herein.

根據本發明的觸控式感測器的一實施例,可以包括:在基板上形成觸控式感測器層的步驟;在所述觸控式感測器層上塗佈包含聚矽氧烷化合物以及溶劑的鈍化層形成用組合物的步驟;以及燒制所述塗佈的鈍化層形成用組合物而形成鈍化層的步驟。According to an embodiment of the touch sensor of the present invention, it may include: forming a touch sensor layer on a substrate; and coating the touch sensor layer with a polysiloxane A step of forming a passivation layer composition with a compound and a solvent; and a step of firing the coated passivation layer forming composition to form a passivation layer.

根據本發明的觸控式感測器的製造方法,可以由塗佈以及燒制組合物而形成鈍化層70,因此相比蒸鍍法可以更簡單地形成鈍化層70,因此在生產性和經濟性方面比較優秀。According to the manufacturing method of the touch sensor of the present invention, the passivation layer 70 can be formed by coating and firing the composition. Therefore, the passivation layer 70 can be formed more easily than the vapor deposition method. Sexually good.

首先,在基板1上形成觸控式感測器層60的步驟可以無特別限定地適用所屬領域中公知的觸控式感測器的製造工序。First, the step of forming the touch sensor layer 60 on the substrate 1 can be applied to a manufacturing process of a touch sensor known in the art without particular limitation.

例如,感應圖案10、20和橋電極30可以由物理氣相沉積法(Physical Vapor Deposition,PVD),化學氣相沉積法(Chemical VaporDeposition,CVD)等多種薄膜蒸鍍技術形成。例如,可以由物理氣相沉積法的一例的反應濺射(reactive sputtering)形成。或者,可以由印刷工序形成。在進行印刷工序時,可以利用凹版膠印(gravure off set)、反向偏置(reverse off set)、噴墨印刷、絲網印刷以及凹版(gravure)印刷等多種印刷方法。特別地,利用印刷工序形成感應圖案時,可以由可印刷的漿料物質形成。例如可以由納米碳管(carbon nano tube,CNT)、導電性聚合物以及銀納米線油墨(Ag nano wire ink)形成。除了所述方法外還可以由微影製程形成。For example, the sensing patterns 10 and 20 and the bridge electrode 30 may be formed by various thin film evaporation techniques such as Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), and the like. For example, it can be formed by reactive sputtering, which is an example of a physical vapor deposition method. Alternatively, it may be formed by a printing process. In the printing process, a variety of printing methods such as gravure off set, reverse off set, inkjet printing, screen printing, and gravure printing can be used. In particular, when forming a sensing pattern by a printing process, it can be formed from a printable paste substance. For example, it may be formed of a carbon nano tube (CNT), a conductive polymer, and a silver nano wire ink (Ag nano wire ink). In addition to the method, it can also be formed by a lithography process.

絕緣體40由如金屬氧化物的無機材料形成時,適用於感應圖案的方法同樣可以適用於其,並且由如感光樹脂組合物的有機材料形成時可以無特別限定地適用所屬領域中公知的固化層或固化圖案的製造方法。When the insulator 40 is formed of an inorganic material such as a metal oxide, the method applicable to the sensing pattern can also be applied thereto, and when formed of an organic material such as a photosensitive resin composition, a curing layer known in the art can be applied without particular limitation. Or a method for manufacturing a cured pattern.

其次,在觸控式感測器層60上塗佈包含聚矽氧烷化合物和溶劑的鈍化層形成用組合物。Next, a composition for forming a passivation layer containing a polysiloxane compound and a solvent is applied on the touch sensor layer 60.

聚矽氧烷化合物如上述所述,可以是矽氧烷重複單位的矽元素在矽元素上結合脂肪族烴和芳香族烴中的至少一個的結構。As described above, the polysiloxane compound may have a structure in which at least one of an aliphatic hydrocarbon and an aromatic hydrocarbon is bonded to the silicon element of the silicon element in the repeating unit of the silicone.

例如聚矽氧烷化合物的重量平均分子量可以是1000至5000。在所述範圍燒制後可以表現出優秀的透明度、層的平滑度、硬度以及耐劃傷性。For example, the weight average molecular weight of the polysiloxane compound may be 1,000 to 5,000. After firing in the above range, excellent transparency, layer smoothness, hardness, and scratch resistance can be exhibited.

溶劑只要是可以溶解聚矽氧烷化合物的溶劑就無特別限定,例如可以單獨或混合使用丙二醇甲醚醋酸酯、丙二醇甲醚等,但並不限定於此。The solvent is not particularly limited as long as it is a solvent capable of dissolving the polysiloxane compound. For example, propylene glycol methyl ether acetate, propylene glycol methyl ether, or the like can be used alone or in combination, but is not limited thereto.

在塗佈性、塗佈或固化後的膜的平滑性、加工性等方面鈍化層形成用組合物的較佳的黏度是5至15cps(25℃)。在此方面組合物內的較佳的聚矽氧烷化合物的濃度是20重量%至50重量%。A preferable viscosity of the composition for forming a passivation layer is 5 to 15 cps (25 ° C) in terms of coatability, smoothness of the film after coating or curing, and processability. The preferred concentration of the polysiloxane compound in the composition in this aspect is 20% to 50% by weight.

鈍化層形成用組合物的表面能量可以是20至30達因/公分(dyne/cm)。組合物的表面能量在所述範圍時噴墨印刷工序中組合物噴射時表現出更加均勻的鍍層性,同時可以最優化鈍化層的圖案特性。表面能量的調節可以通過調節聚矽氧烷化合物和溶劑的具體種類和含量實現。The surface energy of the composition for forming a passivation layer may be 20 to 30 dyne / cm (dyne / cm). When the surface energy of the composition is within the above range, the composition exhibits more uniform plating properties when the composition is sprayed in the inkjet printing process, and at the same time, the pattern characteristics of the passivation layer can be optimized. The surface energy can be adjusted by adjusting the specific types and contents of the polysiloxane compound and the solvent.

通常的方法可以無限定地適用于鈍化層形成用組合物的塗佈,考慮到塗佈的精密性可以較佳噴墨印刷方式。The ordinary method can be applied to the application of the composition for forming a passivation layer without limitation, and an inkjet printing method can be used in consideration of the precision of the application.

之後,燒制塗佈的鈍化層形成用組合物形成鈍化層。After that, the composition for forming a passivation layer is fired to form a passivation layer.

通過燒制(bake)工序,聚矽氧烷化合物的相互的結合乃至聚合而形成具有優秀的透明度和硬度的硬化層。Through the bake process, the polysiloxane compounds are combined with each other or polymerized to form a hardened layer having excellent transparency and hardness.

較佳地,燒制工序可以分為先燒制(pre-bake)工序和後燒制(post-bake)工序執行。Preferably, the firing process can be divided into a pre-bake process and a post-bake process.

通過先燒制工序去除組合物的溶劑的大部分(70%至80%)。在此方面,先燒制工序可以在110℃至150℃執行50至150秒,但不限定於此。Most of the solvent (70% to 80%) of the composition is removed by the first firing process. In this regard, the first firing step may be performed at 110 ° C. to 150 ° C. for 50 to 150 seconds, but is not limited thereto.

在後燒制工序,從聚矽氧烷化合物脫離有機基的一部分,並進行矽氧烷化合物之間的結合乃至聚合反應而形成具有無機物特性的鈍化層70。為了形成優秀的鈍化層70,後燒制工序可以在180℃至230℃執行15至45分鐘。In the post-firing step, a part of the organic group is separated from the polysiloxane compound, and the bonding or the polymerization reaction between the silicone compounds is performed to form a passivation layer 70 having inorganic characteristics. In order to form an excellent passivation layer 70, the post-baking process may be performed at 180 ° C to 230 ° C for 15 to 45 minutes.

根據本發明的另一實施例,後燒制工序可以包括在180℃至230℃之間執行15至45分鐘的第一後燒制階段、以及在380℃至420℃之間執行15至45分鐘的第二後燒制階段。第一後燒制工序是為了表現出前述的後燒制工序的效果,第二後燒制工序可以為了增加形成鈍化層70後後續的熱處理工序的耐久性而執行。According to another embodiment of the present invention, the post-firing process may include a first post-firing stage performed between 180 ° C. and 230 ° C. for 15-45 minutes, and a post-firing period between 380 ° C. and 420 ° C. The second post-firing stage. The first post-baking step is to show the effects of the aforementioned post-baking step, and the second post-baking step may be performed in order to increase the durability of the subsequent heat treatment step after the passivation layer 70 is formed.

另外,本發明提供了包括上述的觸控式感測器的觸控式螢幕面板。根據本發明的觸控式螢幕面板可以附加所屬領域中公開的構成並製造。In addition, the present invention provides a touch screen panel including the touch sensor described above. The touch screen panel according to the present invention can be manufactured with additional configurations disclosed in the art.

另外,本發明提供了包括上述的觸控式螢幕面板的圖像顯示裝置。本發明的觸控式感測器不僅適用於通常的液晶顯示裝置(Liquid Crystal Display device),還可以適用於電漿顯示板裝置(Plasma Display Panel device)、電致發光顯示裝置(Electro Luminescent Display device)、有機發光二極體顯示裝置(Organic Light-Emitting Diode Display device)等多種圖像顯示裝置。In addition, the present invention provides an image display device including the touch screen panel described above. The touch sensor of the present invention is not only applicable to a common liquid crystal display device (Liquid Crystal Display device), but also applicable to a plasma display panel device (Plasma Display Panel device) and an electroluminescence display device (Electro Luminescent Display device). ), Organic light-emitting diode display devices (Organic Light-Emitting Diode Display device) and other image display devices.

以下,公開了用於理解本發明的實施例,但該些實施例是本發明的示例性示出的,並且不限定權利要求的範圍,本領域的普通技術人員應當理解在不脫離記載在本發明權利要求書的範疇以及技術思想範圍內,本發明可以進行多種修正以及變更。Hereinafter, embodiments for understanding the present invention are disclosed, but these embodiments are exemplarily shown by the present invention, and do not limit the scope of the claims. Those of ordinary skill in the art should understand without departing from the description in the present invention. Within the scope of the claims of the invention and the scope of the technical idea, the present invention can be variously modified and changed.

實施例一Example one

在玻璃基板上製造了第4圖中示出的結構的觸控式感測器層。作為第一和第二感應圖案蒸鍍了ITO、作為橋電極蒸鍍了鉬、作為絕緣體蒸鍍了二氧化矽來使用。A touch sensor layer having a structure shown in FIG. 4 was manufactured on a glass substrate. ITO was used as the first and second sensing patterns, molybdenum was used as the bridge electrode, and silicon dioxide was used as the insulator.

在觸控式感測器層上塗佈包含聚甲基矽氧烷(重量平均分子量Mw:3000)30重量份和丙二醇單甲醚70重量份的鈍化層形成用組合物(表面能量25dyne/cm,黏度7cps),並在130℃先燒制90秒,在200℃後燒制30分鐘形成鈍化層(燒制後厚度1µm),從而製造觸控式感測器。此時,鈍化層形成為一邊的長度為0.25mm的四角形的開口部圖案。A composition for forming a passivation layer (surface energy: 25 dyne / cm) containing 30 parts by weight of polymethylsiloxane (weight average molecular weight Mw: 3000) and 70 parts by weight of propylene glycol monomethyl ether was applied on the touch sensor layer. , Viscosity 7cps), and then fired at 130 ° C for 90 seconds, and then fired at 200 ° C for 30 minutes to form a passivation layer (thickness 1µm after firing), thereby manufacturing a touch sensor. At this time, the passivation layer was formed into a rectangular opening pattern having a length of 0.25 mm on one side.

實施例二Example two

除了分為在200℃執行20分鐘的第一後燒制階段和在400℃執行30分鐘的第二後燒制階段執行的後燒制工序外,使用了與實施例一相同的方法製造了觸控式感測器。Except that it was divided into a first post-firing step performed at 200 ° C for 20 minutes and a second post-firing step performed at 400 ° C for 30 minutes, a contact was manufactured using the same method as in Example 1. Control sensor.

實施例三Example three

除了鈍化層形成用組合物包含聚甲基矽氧烷(重量平均分子量Mw:3000)40重量份和丙二醇單甲醚60重量份的鈍化層形成用組合物,而且表面能量為35dyne/cm,黏度為10cps外,使用了與實施例一相同的方法製造了觸控式感測器。In addition to the passivation layer-forming composition, the composition for forming a passivation layer contains 40 parts by weight of polymethylsiloxane (weight average molecular weight Mw: 3000) and 60 parts by weight of propylene glycol monomethyl ether, and has a surface energy of 35 dyne / cm and a viscosity Except for 10 cps, a touch sensor was manufactured using the same method as in the first embodiment.

實施例四Embodiment 4

除了在250℃執行後燒制工序外,使用了與實施例一相同的方法製造了觸控式感測器。A touch sensor was manufactured using the same method as in Example 1 except that the post-baking process was performed at 250 ° C.

比較例Comparative example

除了通過化學氣相蒸鍍法由SiO2 層形成的鈍化層(鍍膜後厚度為3000Å)外,使用了與實施例一相同的方法製造了觸控式感測器。同樣的SiO2 層成膜後通過微影製程形成為一邊長度為0.25mm的四角形開口部圖案。Except for the passivation layer (thickness of 3000Å after coating) formed by the SiO 2 layer by the chemical vapor deposition method, a touch sensor was manufactured using the same method as in the first embodiment. After the same SiO 2 layer was formed, it was formed into a quadrangular opening pattern with a length of 0.25 mm on one side by a lithography process.

實驗例Experimental example

對實施例和比較例的觸控式感測器執行了下面的實驗,將其結果記載在表1。The following experiments were performed on the touch sensors of Examples and Comparative Examples, and the results are shown in Table 1.

1.測量穿透率1. Measuring transmittance

在550nm波長的條件下利用光譜色度計(CM-3600A,Konica Minolta)分別測量了由實施例和比較例製造的觸控式感測器的穿透率,並在另外的玻璃基板上個別形成其鈍化層後,分別測量了鈍化層單獨的穿透率。The transmittance of the touch sensors manufactured in the examples and comparative examples was measured with a spectral colorimeter (CM-3600A, Konica Minolta) at a wavelength of 550 nm, and formed separately on another glass substrate. After the passivation layer, the individual transmittance of the passivation layer was measured.

2.測量霧度2. Measuring Haze

利用霧度測量儀(HM-150,Murasaki)測量了由實施例和比較例製造的觸控式感測器的霧度。The haze of the touch sensors manufactured in the examples and comparative examples was measured using a haze meter (HM-150, Murasaki).

3.測量色度和色差3. Measure chromaticity and color difference

在550nm波長的條件下利用光譜色度計(CM-3600A,Konica Minolta)測量了由實施例和比較例製造的觸控式感測器的色度和色差值。The chromaticity and color difference values of the touch sensors manufactured in the examples and comparative examples were measured using a spectral colorimeter (CM-3600A, Konica Minolta) under the condition of a wavelength of 550 nm.

4.測量鉛筆硬度4. Measuring pencil hardness

根據ASTM D3363測量了由實施例和比較例製造的觸控式感測器的鉛筆硬度。The pencil hardness of the touch sensors manufactured by Examples and Comparative Examples was measured according to ASTM D3363.

5.測量粘附性5. Measuring adhesion

根據ASTM D3359測量了由實施例和比較例製造的觸控式感測器的粘附性,評價基準如下。The adhesion of the touch sensors manufactured in the examples and comparative examples was measured according to ASTM D3359, and the evaluation criteria were as follows.

5B:無剝離5B: No peeling

4B:未滿5%的剝離4B: Less than 5% peeling

3B:5%以上,小於15%的剝離3B: above 5%, less than 15% peeling

2B:15%以上,小於35%的剝離2B: above 15%, less than 35% peeling

1B:35%以上,小於65%的剝離1B: more than 35%, less than 65% peeling

0B:65%以上的剝離0B: more than 65% peeling

6.測量裂紋6. Measuring crack

利用顯微鏡觀測裂紋產生與否並評價。The occurrence of cracks was observed with a microscope and evaluated.

7.測量圖案特性7. Measuring pattern characteristics

利用顯微鏡觀測開口部圖案的形象並評價。The image of the opening pattern was observed with a microscope and evaluated.

表1 Table 1

參照表1,可以確認實施例的鈍化層表現出與蒸鍍的氧化矽層相等水準的光學特性,機械特性。Referring to Table 1, it can be confirmed that the passivation layer of the example exhibits optical characteristics and mechanical characteristics equivalent to those of the vapor-deposited silicon oxide layer.

但是,在其他實施例的沒有發現圖案形象的倒塌,但是在組合物的表面能量較大的實施例3發現了全體圖案的約10%在圖案邊界發生坍塌的現象。However, in other examples, no collapse of the pattern image was found, but in Example 3 where the surface energy of the composition was large, it was found that about 10% of the entire pattern collapsed at the pattern boundary.

而且,在後燒制工序的溫度較高的實施例4在鈍化層表面發現了細微裂紋,並且表現出了與其他實施例相比在色差值和硬度以及貼近力相對低下的結果。Further, in Example 4 where the temperature of the post-firing step was high, fine cracks were found on the surface of the passivation layer, and the results of the color difference value, the hardness, and the close force were relatively low compared with other examples.

綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In summary, although the present invention has been disclosed as above with the embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the attached patent application.

1‧‧‧基板1‧‧‧ substrate

10‧‧‧第一感應圖案10‧‧‧First sensor pattern

20‧‧‧第二感應圖案20‧‧‧Second sensor pattern

30‧‧‧橋電極30‧‧‧bridge electrode

40‧‧‧絕緣體40‧‧‧ insulator

60‧‧‧觸控式感測器層60‧‧‧Touch sensor layer

70‧‧‧鈍化層70‧‧‧ passivation layer

第1圖是表示本發明一實施例的觸控式感測器的概略圖。 第2圖是表示第1圖中所示的觸控式感測器的A-A'剖視圖。 第3圖與第2圖相同地,是表示當橋電極位於第二感應圖案的上部時通過接觸孔與第二感應圖案連接的結構的概略剖視圖。 第4圖是表示本發明的另一實施例的觸控式感測器的概略立體圖。 第5圖是表示第4圖中所示的觸控式感測器的A-A'剖視圖。 第6圖與第4圖相同地,是表示當橋電極位於第二感應圖案的下部時通過接觸孔與第二感應圖案連接的結構的概略剖視圖。FIG. 1 is a schematic diagram showing a touch sensor according to an embodiment of the present invention. Fig. 2 is an AA 'cross-sectional view showing the touch sensor shown in Fig. 1. 3 is a schematic cross-sectional view showing a structure in which a bridge electrode is connected to a second sensing pattern through a contact hole when the bridge electrode is positioned above the second sensing pattern, as in FIG. 2. FIG. 4 is a schematic perspective view showing a touch sensor according to another embodiment of the present invention. FIG. 5 is an AA ′ cross-sectional view showing the touch sensor shown in FIG. 4. FIG. 6 is a schematic cross-sectional view showing a structure in which the bridge electrode is connected to the second sensing pattern through the contact hole when the bridge electrode is located below the second sensing pattern, as in FIG.

Claims (20)

一種觸控式感測器,其特徵在於, 按順序配置有基板、觸控式感測器層以及鈍化層,並且所述鈍化層包括聚矽氧烷構造。A touch sensor is characterized in that a substrate, a touch sensor layer, and a passivation layer are sequentially arranged, and the passivation layer includes a polysiloxane structure. 如申請專利範圍第1項所述的觸控式感測器,其中, 所述鈍化層是聚矽氧烷化合物的燒制層。The touch sensor according to item 1 of the scope of patent application, wherein the passivation layer is a fired layer of a polysiloxane compound. 如申請專利範圍第1項所述的觸控式感測器,其中, 所述鈍化層的厚度為0.5µm至2µm。The touch sensor according to item 1 of the scope of patent application, wherein a thickness of the passivation layer is 0.5 μm to 2 μm. 如申請專利範圍第1項所述的觸控式感測器,其中, 所述觸控式感測器層包括多個隔離的感應圖案,所述感應圖案配置在同一面。The touch sensor according to item 1 of the scope of the patent application, wherein the touch sensor layer includes a plurality of isolated sensing patterns, and the sensing patterns are disposed on a same surface. 如申請專利範圍第1項所述的觸控式感測器,其中, 所述觸控式感測器層包括: 沿第一方向形成的第一感應圖案; 沿第二方向形成的第二感應圖案;以及 橋電極,其連接所述第二感應圖案的相互隔離的單位圖案。The touch sensor according to item 1 of the scope of patent application, wherein the touch sensor layer includes: a first sensing pattern formed along a first direction; a second sensing formed along a second direction A pattern; and a bridge electrode connected to the unit patterns of the second sensing pattern that are isolated from each other. 如申請專利範圍第1項所述的觸控式感測器,其中, 所述基板是有機發光二極體(OLED)的封裝基板。The touch sensor according to item 1 of the scope of application, wherein the substrate is an organic light emitting diode (OLED) package substrate. 如申請專利範圍第1項所述的觸控式感測器,其中, 所述基板由玻璃、高分子或金屬氧化物形成。The touch-sensitive sensor according to item 1 of the scope of patent application, wherein the substrate is formed of glass, a polymer, or a metal oxide. 如申請專利範圍第4項所述的觸控式感測器,其中, 所述感應圖案由選自銦錫氧化物、銦鋅氧化物、鋅氧化物、銦鋅錫氧化物、鎘錫氧化物以及金屬絲組成的組中的至少一個形成。The touch sensor according to item 4 of the scope of patent application, wherein the sensing pattern is selected from the group consisting of indium tin oxide, indium zinc oxide, zinc oxide, indium zinc tin oxide, and cadmium tin oxide. And at least one of the group consisting of wires is formed. 如申請專利範圍第5項所述的觸控式感測器,其中, 所述感應圖案由選自銦錫氧化物、銦鋅氧化物、鋅氧化物、銦鋅錫氧化物、鎘錫氧化物以及金屬絲組成的系列物中的至少一個形成。The touch sensor according to item 5 of the scope of patent application, wherein the sensing pattern is selected from the group consisting of indium tin oxide, indium zinc oxide, zinc oxide, indium zinc tin oxide, and cadmium tin oxide. And at least one of a series of metal wires is formed. 如申請專利範圍第5項所述的觸控式感測器,其中, 為了防止該第一感應圖案與該橋電極的電連接,該第一感應圖案與該橋電極之間還包括絕緣體。The touch sensor according to item 5 of the patent application, wherein, in order to prevent the first sensing pattern from being electrically connected to the bridge electrode, an insulator is further included between the first sensing pattern and the bridge electrode. 如申請專利範圍第10項所述的觸控式感測器,其中, 所述絕緣體是由感光樹脂組合物的固化物或矽氧化物形成。The touch sensor according to claim 10, wherein the insulator is formed of a cured product or a silicon oxide of a photosensitive resin composition. 一種觸控式感測器的製造方法,其特徵在於,包括: 在基板上形成觸控式感測器層的步驟; 在所述觸控式感測器層上塗佈包含聚矽氧烷化合物以及溶劑的鈍化層形成用組合物的步驟;以及 燒制塗佈的所述鈍化層形成用組合物而形成鈍化層的步驟。A method for manufacturing a touch sensor, comprising the steps of: forming a touch sensor layer on a substrate; and coating the touch sensor layer with a polysiloxane compound A step of forming a composition for forming a passivation layer by a solvent; and a step of firing the applied composition for forming a passivation layer. 如申請專利範圍第12項所述的觸控式感測器的製造方法,其中, 形成所述鈍化層的組合物的表面能量為20至30dyne/cm。The method for manufacturing a touch sensor according to item 12 of the application, wherein a surface energy of the composition forming the passivation layer is 20 to 30 dyne / cm. 如申請專利範圍第12項所述的觸控式感測器的製造方法,其中, 以噴墨印刷方式執行的所述鈍化層形成用組合物的塗佈。The method for manufacturing a touch sensor according to item 12 of the scope of patent application, wherein the application of the composition for forming a passivation layer is performed by an inkjet printing method. 如申請專利範圍第12項所述的觸控式感測器的製造方法,其中, 所述燒制以先燒制工序和後燒制工序執行。The method for manufacturing a touch sensor according to item 12 of the scope of the patent application, wherein the firing is performed in a first firing step and a second firing step. 如申請專利範圍第15項所述的觸控式感測器的製造方法,其中, 所述先燒制工序在110℃至150℃執行50秒至150秒。The method for manufacturing a touch sensor according to item 15 of the scope of application for a patent, wherein the first firing step is performed at 110 ° C to 150 ° C for 50 seconds to 150 seconds. 如申請專利範圍第15項所述的觸控式感測器的製造方法,其中, 所述後燒制工序在180℃至230℃執行15分鐘至45分鐘。The method for manufacturing a touch sensor according to item 15 of the scope of patent application, wherein the post-baking step is performed at 180 ° C. to 230 ° C. for 15 minutes to 45 minutes. 如申請專利範圍第15項所述的觸控式感測器的製造方法,其中, 所述後燒制工序包括:在180℃至230℃執行15分鐘至45分鐘的第一後燒制階段;以及在380℃至420℃執行15分鐘至45分鐘的第二後燒制階段。The method for manufacturing a touch sensor according to item 15 of the scope of patent application, wherein the post-baking process includes: performing a first post-baking stage at 180 ° C to 230 ° C for 15 minutes to 45 minutes; And a second post-firing stage performed at 380 ° C to 420 ° C for 15 minutes to 45 minutes. 一種觸控式螢幕面板,其特徵在於, 包括申請專利範圍第1至11項中的任意一項所述的觸控式感測器。A touch screen panel includes a touch sensor according to any one of claims 1 to 11 of a patent application. 一種圖像顯示裝置,其特徵在於, 包括申請專利範圍第19項所述的觸控式螢幕面板。An image display device is characterized in that it includes the touch screen panel according to item 19 of the scope of patent application.
TW106128808A 2016-09-13 2017-08-24 Touch sensor and touch panel having touch sensor TWI731149B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020160118269A KR101810892B1 (en) 2016-09-13 2016-09-13 Touch sensor and touch screen panel comprising the same
KR10-2016-0118269 2016-09-13
??10-2016-0118269 2016-09-13

Publications (2)

Publication Number Publication Date
TW201816014A true TW201816014A (en) 2018-05-01
TWI731149B TWI731149B (en) 2021-06-21

Family

ID=60931550

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106128808A TWI731149B (en) 2016-09-13 2017-08-24 Touch sensor and touch panel having touch sensor

Country Status (3)

Country Link
KR (1) KR101810892B1 (en)
CN (1) CN107817916A (en)
TW (1) TWI731149B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI685771B (en) * 2018-09-19 2020-02-21 大陸商北京集創北方科技股份有限公司 Method for improving touch track smoothness of touch and display driving integrated system and touch display device using the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210033568A (en) 2019-09-18 2021-03-29 삼성디스플레이 주식회사 Display device and manufacturing method of the same

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6410151B1 (en) * 1999-09-29 2002-06-25 Jsr Corporation Composition for film formation, method of film formation, and insulating film
JP4737361B2 (en) * 2003-12-19 2011-07-27 Jsr株式会社 Insulating film and method for forming the same
DE102006009116A1 (en) * 2006-02-24 2007-09-06 Gerhard Heiche Gmbh Corrosion-resistant substrate and method for its production
JP5098269B2 (en) * 2006-09-26 2012-12-12 大日本印刷株式会社 Method for manufacturing organic semiconductor element
DE102007045186A1 (en) * 2007-09-21 2009-04-09 Continental Teves Ag & Co. Ohg Residue-free, layer-forming, aqueous sealing system for metallic silane-based surfaces
CN101993032B (en) * 2009-08-14 2013-03-27 京东方科技集团股份有限公司 Method for manufacturing microstructural film pattern and TFT-LCD array substrate
US8193027B2 (en) * 2010-02-23 2012-06-05 Air Products And Chemicals, Inc. Method of making a multicomponent film
KR101305378B1 (en) * 2010-03-19 2013-09-06 엘지디스플레이 주식회사 In-plane switching mode liquid crystal display device having touch sensing function and method of fabricating the same
CN102279678A (en) * 2010-06-12 2011-12-14 宸鸿科技(厦门)有限公司 Touch circuit graphic structure, manufacturing method thereof, touch panel and touch display screen
US9138982B2 (en) * 2011-04-27 2015-09-22 Xerox Corporation Image data based temperature control of a keyless inker
JP5844996B2 (en) 2011-05-11 2016-01-20 日東電工株式会社 Transparent conductive laminate and touch panel
CN202221765U (en) * 2011-07-07 2012-05-16 西安交通大学苏州研究院 Silicon solar battery back field electrode structure
US9079384B2 (en) * 2011-11-11 2015-07-14 Apple Inc. Touch sensor panel having an index matching passivation layer
CN103176641A (en) * 2011-12-25 2013-06-26 宸鸿科技(厦门)有限公司 Touch panel and manufacturing method thereof
CN103186272B (en) * 2011-12-29 2016-10-05 宸鸿科技(厦门)有限公司 Contact panel and manufacture method thereof
CN202422065U (en) * 2011-12-31 2012-09-05 宸鸿科技(厦门)有限公司 Touch panel
WO2014014109A1 (en) * 2012-07-19 2014-01-23 日立化成株式会社 Passivation-layer-forming composition, semiconductor substrate having passivation layer, method for manufacturing semiconductor substrate having passivation layer, solar-cell element, method for manufacturing solar-cell element, and solar cell
TW201408676A (en) * 2012-07-19 2014-03-01 Hitachi Chemical Co Ltd Composition for forming passivation layer, semiconductor substrate with passivation layer, method for producing semiconductor substrate with passivation layer, photovoltaic cell element, method for producing photovoltaic cell element and photovoltaic
CN102964920B (en) * 2012-11-27 2015-07-22 广东道氏技术股份有限公司 Ink for ceramic ink-jet printing and method for preparing same
WO2014085346A1 (en) * 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Hollow body with inside coating
KR102031778B1 (en) * 2012-12-06 2019-10-14 엘지디스플레이 주식회사 Display Device Including Touch Panel And Method Of Fabricating The Same
TWI503628B (en) * 2014-07-11 2015-10-11 Everlight Chem Ind Corp Negative-type photosensitive resin composition
TWI512058B (en) * 2014-12-25 2015-12-11 Chi Mei Corp Photo-curing coating composition, photo-curing coating film and touch panel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI685771B (en) * 2018-09-19 2020-02-21 大陸商北京集創北方科技股份有限公司 Method for improving touch track smoothness of touch and display driving integrated system and touch display device using the same

Also Published As

Publication number Publication date
KR101810892B1 (en) 2017-12-20
TWI731149B (en) 2021-06-21
CN107817916A (en) 2018-03-20

Similar Documents

Publication Publication Date Title
TWI459449B (en) Stacked structure for touch panel
TWI746603B (en) Transparent electrode, touch sensor and image display device including the same
JP5946847B2 (en) Touch panel and manufacturing method thereof
TWM472252U (en) Touch panel
TWI631488B (en) Transparent electrode patterned laminate and touch screen panel including the same
JP6533214B2 (en) Transparent electrode pattern laminate and touch screen panel provided with the same
US8895136B2 (en) Transparent conductive film
JP7143141B2 (en) Transparent electrode laminate and manufacturing method thereof
TWI712934B (en) Transparent electrode and electronic device including the same
CN103779379A (en) Flexible electronic device and manufacturing method thereof
TWI731149B (en) Touch sensor and touch panel having touch sensor
KR102077548B1 (en) Transparent electrode pattern structure and touch screen panel having the same
TWI678648B (en) Touch screen panel and image display comprising the same
CN110275649A (en) High-resolution touch sensor
JP2015118682A (en) Touch panel
KR101114028B1 (en) Touch panel
WO2015080442A1 (en) Flexible hybrid substrate for display and method for manufacturing same
JP6446209B2 (en) Transparent electrode pattern laminate and touch screen panel provided with the same
KR101799266B1 (en) Touch sensor integrated with oled and oled display device comprising the same
TWI606382B (en) Touch screen panel
JP2015146253A (en) Laminate and conductive pattern substrate for touch panel
JP6642863B2 (en) Manufacturing method of laminate
TWI623873B (en) Transparent electrode laminate and touch screen panel including the same
TWM588821U (en) Conductive plate for touch device