TW201813897A - Storage shelf - Google Patents
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- TW201813897A TW201813897A TW106132634A TW106132634A TW201813897A TW 201813897 A TW201813897 A TW 201813897A TW 106132634 A TW106132634 A TW 106132634A TW 106132634 A TW106132634 A TW 106132634A TW 201813897 A TW201813897 A TW 201813897A
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- flange
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/14—Stack holders or separators
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- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
Description
本發明係關於保管架。 The present invention relates to a storage rack.
收容晶圓或光罩(reticle)等之FOUP(前開式晶圓盒;Front Opening Unified Pod)、SMIF Pod(標準機械介面晶圓盒;Standard Mechanical Interface)、光罩盒(Reticle Pod)等之容器,係保管於自動倉儲(stocker)等之保管架。保管架例如具有沿上下方向被配置之複數個擱板,並於各擱板載置而保管容器。於各擱板設有插入被設於容器底部之放射狀之複數個溝部的銷。各容器於底面具備有溝部,並藉由擱板之銷進入溝部被定位而被載置於擱板上。近年來,需要在地震等產生震動時,容器不會自擱板掉落之構成。於專利文獻1記載有在擱板具備有卡止於容器之底部凸緣之防掉落構件的構成。 Containers for FOUP (Front Opening Unified Pod), SMIF Pod (Standard Mechanical Interface), Reticle Pod, etc. for wafers or reticles It is stored in a storage rack such as an automatic warehouse. The storage rack includes, for example, a plurality of shelves arranged in the vertical direction, and the containers are placed on each shelf to store the containers. Each shelf is provided with pins inserted into a plurality of radial grooves provided at the bottom of the container. Each container is provided with a groove portion on the bottom surface, and is positioned on the shelf by being inserted into the groove portion by a pin of the shelf. In recent years, it has been required that the container does not fall off the shelf when a vibration occurs, such as an earthquake. Patent Literature 1 describes a configuration in which a shelf is provided with a fall prevention member that is locked to a bottom flange of a container.
[專利文獻1]日本專利特開2009-196748號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2009-196748
然而,前述之防掉落構件,為了共通地適用於底 部凸緣等之形狀不同的複數種容器,必須增大在取出或放入容器時用來容許容器通過的空間。其結果,底部凸緣與防掉落構件之間隙變大,在震動產生時容器大幅地傾斜,而存在有對容器造成較大的撞擊,甚至導致容器自擱板掉落之可能性。又,前述之防掉落構件由於較大地突出而被設於擱板上,因此容器之保管空間會隨之縮小,而使空間效率下降。 However, in order to apply the aforementioned fall prevention member to a plurality of containers having different shapes such as a bottom flange in common, it is necessary to increase a space for allowing the container to pass when the container is taken out or put into the container. As a result, the gap between the bottom flange and the fall-prevention member becomes large, and when the vibration is generated, the container is greatly inclined, and there is a possibility that the container may cause a large impact and may even cause the container to fall from the shelf. In addition, since the aforementioned fall prevention member is provided on the shelf because it protrudes greatly, the storage space of the container is reduced accordingly, thereby reducing space efficiency.
鑒於以上之實情,本發明之目的,在於提供能以簡單之構成來防止容器自擱板掉落之保管架。 In view of the foregoing, an object of the present invention is to provide a storage rack capable of preventing a container from falling off a shelf with a simple structure.
本發明之保管架係對在本體部之上部具有凸緣之容器進行保管者,其具有防掉落構件,該防掉落構件係配置在被載置於擱板之容器之本體部之上方且凸緣之前方,具有可供凸緣通過上方之空間。 The storage rack of the present invention is a holder who holds a container having a flange on the upper portion of the main body portion, and has a fall prevention member which is arranged above the main body portion of the container placed on the shelf and Before the flange, there is space for the flange to pass above.
又,容器亦可具有可裝卸地被安裝於側面且上部自本體部朝上方突出之蓋部,防掉落構件係配置於蓋部之上部之後方。又,擱板亦可沿著上下方向設置有複數個,防掉落構件係以自上層之擱板垂下之方式被配置之L字形狀的構件。又,防掉落構件亦可藉由將上層之擱板之一部分彎折所形成。 In addition, the container may have a lid portion detachably mounted on the side and an upper portion protruding upward from the main body portion, and the fall prevention member is disposed behind the upper portion of the lid portion. In addition, a plurality of shelves may be provided in the up-down direction, and the fall-prevention member is an L-shaped member arranged so as to hang from the shelf on the upper layer. Also, the fall prevention member may be formed by bending a part of the upper shelf.
又,防掉落構件亦可具有水平部、及自水平部之外側朝上方延伸而連接於上層之擱板的垂直部。又,水平部亦可被配置在與被載置於擱板之容器之凸緣相同或大致相同的高度。又,水平部其與凸緣對向之部分的形狀亦可對應於凸緣之形狀所形成。又,擱板亦可具備有將與前後方向正交之左右方向之中央部分切缺的缺口部,防掉落構件分別被設於上層之擱板之夾著缺口部的兩側。 Further, the fall prevention member may include a horizontal portion and a vertical portion extending upward from the outside of the horizontal portion and connected to a shelf of the upper layer. The horizontal portion may be disposed at the same or substantially the same height as the flange of the container placed on the shelf. In addition, the shape of the portion of the horizontal portion facing the flange may be formed corresponding to the shape of the flange. Moreover, the shelf may be provided with the notch part which cut | disconnected the center part of the left-right direction orthogonal to the front-back direction, and a fall prevention member was provided in the both sides of the notch part which were provided in the upper shelf.
本發明之保管架,在容器因地震等之震動而向前方側傾倒時,凸緣之前方會碰到防掉落構件而防止容器之偏移或傾倒。又,在容器向後方側傾倒之情形時,容器之一部分亦會碰到防掉落構件而防止容器之偏移或傾倒。藉此,能以簡單之構成來防止容器自擱板掉落。又,由於在上方具有供凸緣通過之空間,因此能避免在將容器移載至擱板時凸緣或容器之本體部與防掉落構件產生干涉之情形,而使防掉落構件不會成為容器移載之阻礙。 In the storage rack of the present invention, when the container is tipped to the front side due to an earthquake or the like, the front side of the flange may collide with an anti-falling member to prevent the container from shifting or falling. In addition, when the container is dumped to the rear side, a part of the container may collide with the falling prevention member to prevent the container from being shifted or toppled. Thereby, the container can be prevented from falling from the shelf with a simple structure. In addition, since there is a space for the flange to pass through, it is possible to prevent the flange or the body of the container from interfering with the fall prevention member when the container is transferred to the shelf, so that the fall prevention member does not Become an obstacle to container transfer.
而且,於容器具有蓋部且防掉落構件被配置在蓋部之上部之後方之情形時,即便在容器朝背面側傾倒時,防掉落構件亦會碰到蓋部之上部或容器之本體部之上表面,而防止容器之偏移或傾倒,從而能確實地防止容器自擱板掉落。又,在擱板沿著上下方向設有複數個且防掉落構件為以自上層之擱板垂下之方式被配置之L字形狀的構件之情形時,能以簡單之構成來容易地形成防掉落構件。又,在防掉落構件係藉由將上層之擱板之一部分彎折所形成之情形時,可無需使用安裝工具等就容易地形成防掉落構件。 Further, in a case where the container has a lid portion and the fall prevention member is disposed behind the upper portion of the lid portion, the fall prevention member may hit the upper portion of the lid portion or the body of the container even when the container is tilted toward the back side. The upper surface of the container prevents the container from shifting or falling down, thereby reliably preventing the container from falling off the shelf. When a plurality of shelves are provided in the up-down direction and the fall-preventing member is an L-shaped member arranged so as to be suspended from a shelf on the upper stage, the prevention of the fall can be easily performed with a simple structure. Drop the component. In addition, when the fall-prevention member is formed by bending a part of the upper shelf, the fall-prevention member can be easily formed without using an installation tool or the like.
又,在防掉落構件具有水平部、及自水平部之外側朝上方延伸而連接於上層之擱板之垂直部之情形時,可利用垂直部容易地形成供凸緣通過之空間。又,於水平部被配置在與被載置於擱板之容器之凸緣相同或大致相同的高度之情形時,當容器朝前方傾倒時,可藉由水平部更確實地支撐凸緣。又,在水平部之與凸緣對向之部分之形狀對應於凸緣之形狀所 形成時,可將水平部配置於凸緣之附近。又,在擱板具備有將與前後方向正交之左右方向之中央部分切缺的缺口部且防掉落構件分別被設於上層之擱板之夾著缺口部的兩側之情形時,可藉由使用一對防掉落構件而更確實地防止容器掉落。 In the case where the fall prevention member has a horizontal portion and a vertical portion extending upward from the outside of the horizontal portion and connected to the upper shelf, the vertical portion can easily form a space for the flange to pass through. When the horizontal portion is arranged at the same or substantially the same height as the flange of the container placed on the shelf, the flange can be more reliably supported by the horizontal portion when the container is tilted forward. When the shape of the portion of the horizontal portion facing the flange corresponds to the shape of the flange, the horizontal portion may be arranged near the flange. In addition, when the shelf includes a notch portion that cuts off a central portion in the left-right direction orthogonal to the front-rear direction and the fall-prevention member is provided on both sides of the notch portion between the shelves on the upper stage, By using a pair of fall prevention members, the container is more reliably prevented from falling.
5‧‧‧容器 5‧‧‧ container
5a‧‧‧本體部 5a‧‧‧Body
5b‧‧‧凸緣 5b‧‧‧ flange
5c‧‧‧蓋部 5c‧‧‧ cover
5d‧‧‧傾斜部 5d‧‧‧inclined
5e‧‧‧凸緣固定部 5e‧‧‧ flange fixing part
10‧‧‧擱板 10‧‧‧ Shelves
11‧‧‧缺口部 11‧‧‧ gap
12‧‧‧載置部 12‧‧‧ placement section
12a‧‧‧銷 12a‧‧‧pin
13‧‧‧固定構件 13‧‧‧Fixed components
20‧‧‧柱部 20‧‧‧ pillar
30‧‧‧防掉落構件 30‧‧‧fall-proof member
31‧‧‧垂直部 31‧‧‧ vertical section
32‧‧‧水平部 32‧‧‧Horizontal
32a‧‧‧突出部 32a‧‧‧ protrusion
32d‧‧‧傾斜支承部 32d‧‧‧inclined support
40‧‧‧移載裝置 40‧‧‧ transfer device
100‧‧‧保管架 100‧‧‧Storage rack
H1、H2‧‧‧高度 H1, H2‧‧‧ height
K‧‧‧空間 K‧‧‧ space
X、Y、Z‧‧‧軸 X, Y, Z‧‧‧ axis
圖1係顯示本實施形態之保管架之一例之圖。 FIG. 1 is a diagram showing an example of a storage rack according to this embodiment.
圖2係保管架之側視圖。 Figure 2 is a side view of the storage rack.
圖3係保管架之前視圖。 Figure 3 is a front view of the storage rack.
圖4係保管架之俯視圖。 Fig. 4 is a plan view of a storage rack.
圖5係將防掉落構件之一例放大而顯示之立體圖。 FIG. 5 is an enlarged perspective view showing an example of the fall prevention member.
圖6顯示將容器移載至保管架之作業之一例,圖6(A)係顯示容器通過防掉落構件之前之狀態之圖,圖6(B)係顯示容器通過防掉落構件之後之狀態之圖,圖6(C)係顯示載置有容器之狀態之圖。 Fig. 6 shows an example of the operation of transferring a container to a storage rack. Fig. 6 (A) is a diagram showing a state before the container passes the fall prevention member, and Fig. 6 (B) is a state after the container passes the fall prevention member. FIG. 6 (C) is a view showing a state where a container is placed.
圖7顯示被保管於保管架之容器,圖7(A)係顯示容器朝前方傾倒之狀態之圖,圖7(B)係顯示容器朝後方傾倒之狀態之圖。 FIG. 7 shows a container stored in a storage rack, FIG. 7 (A) is a view showing a state where the container is tilted forward, and FIG. 7 (B) is a view showing a state where the container is dumped backward.
以下,一邊參照圖式一邊對實施形態進行說明。又,於圖式中,為了說明實施形態,將一部分放大或強調而加以記載等,適當地變更比例來呈現。於以下之各圖中,使用XYZ座標系對圖中之方向進行說明。於該XYZ座標系中,將鉛垂方向設為Z方向,並將水平方向設為X方向、Y方向。X方向、Y方向及Z方向之各者,圖中之箭頭方向作為+方向,與箭頭方向相反之方向係作為-方向而進行說明。 Hereinafter, embodiments will be described with reference to the drawings. In addition, in the drawings, in order to explain the embodiment, a part is enlarged or emphasized and described, etc., and the ratio is appropriately changed and presented. In each of the following figures, the directions in the figures are described using the XYZ coordinate system. In this XYZ coordinate system, the vertical direction is set to the Z direction, and the horizontal direction is set to the X direction and the Y direction. For each of the X direction, the Y direction, and the Z direction, the arrow direction in the figure is described as the + direction, and the direction opposite to the arrow direction is described as the-direction.
圖1係概略性地顯示本實施形態之保管架100之一例之圖。圖2係保管架100之側視圖。圖3係保管架100之前視圖。圖4係保管架100之俯視圖。如圖1至圖4所示,保管架100例如為保管複數個容器5之自動倉庫、或者為被配置於處理裝置附近、或沿著高架搬送車之移行路徑被配置而保管容器5之保管裝置等。容器5雖圖示為例如收容被使用於半導體元件之製造的晶圓、或光罩等之物品的FOUP,但並不限定於此,亦可為SMIF Pod、光罩盒等。於本實施形態中,容器5具有本體部5a、凸緣5b及蓋部5c。 FIG. 1 is a diagram schematically showing an example of a storage rack 100 according to this embodiment. FIG. 2 is a side view of the storage rack 100. FIG. 3 is a front view of the storage rack 100. FIG. 4 is a plan view of the storage rack 100. As shown in FIG. 1 to FIG. 4, the storage rack 100 is, for example, an automatic warehouse for storing a plurality of containers 5, or a storage device that is arranged near a processing device or is arranged along a movement path of an overhead transport vehicle to store the containers 5 Wait. Although the container 5 is shown as a FOUP for accommodating a wafer used for the manufacture of a semiconductor element or a mask, for example, the container 5 is not limited to this, and may be a SMIF Pod, a mask box, or the like. In this embodiment, the container 5 includes a main body portion 5a, a flange 5b, and a lid portion 5c.
本體部5a係於內部具備有可收容物品之空間部的例如箱狀,並於前方側之側面具有開口部。於本體部5a,可經由開口部收容及取出物品。凸緣5b係配置於本體部5a之上部。凸緣5b係形成為例如矩形之板狀,且於角部設有傾斜部(倒角部或缺口部)5d(參照圖5)。凸緣5b係經由凸緣固定部5e而被固定於本體部5a之上表面。因此,成為於凸緣5b與本體部5a之間產生對應於凸緣固定部5e之高度的間隔之狀態。 The main body portion 5a is, for example, a box shape having a space portion capable of accommodating an article therein, and has an opening portion on a front side surface. In the main body portion 5a, articles can be stored and taken out through the opening portion. The flange 5b is arranged above the main body portion 5a. The flange 5b is formed in a rectangular plate shape, for example, and an inclined portion (chamfered portion or cutout portion) 5d is provided at a corner portion (see FIG. 5). The flange 5b is fixed to the upper surface of the main body part 5a via the flange fixing part 5e. Therefore, a state in which a gap corresponding to the height of the flange fixing portion 5e occurs between the flange 5b and the main body portion 5a.
蓋部5c係以封閉本體部5a之開口部之方式被安裝,且可相對於本體部5a進行裝卸。蓋部5c其上部自本體部5a朝上方突出。再者,於蓋部5c自本體部5a朝上方突出之情形時,覆蓋該突出部分之部分亦可被設於本體部5a。 The cover portion 5c is attached to close the opening portion of the main body portion 5a, and is attachable and detachable to and from the main body portion 5a. The upper portion of the cover portion 5c protrudes upward from the main body portion 5a. Moreover, when the cover part 5c protrudes upward from the main-body part 5a, the part which covers this protrusion part may be provided in the main-body part 5a.
如圖1至圖4所示,保管架100具備有複數個擱板10、柱部20及防掉落構件30。又,保管架100既可具備有當擱板10載置有容器5時對容器5內供給淨化氣體之未圖示之複數個淨化裝置,而且,亦可具備有用以移載容器5之移載 裝置(例如堆高起重機等)。 As shown in FIGS. 1 to 4, the storage rack 100 includes a plurality of shelves 10, a pillar portion 20, and a fall prevention member 30. The storage rack 100 may be provided with a plurality of purification devices (not shown) for supplying a purge gas into the container 5 when the container 5 is placed on the shelf 10, and may also include a transfer device for transferring the container 5. Devices (such as stacking cranes, etc.).
如圖2及圖3所示,擱板10係沿著上下方向(Z方向)排列而配置有複數層。各擱板10分別朝大致水平方向被配置,且沿著上下方向大致等間隔地被配置。再者,擱板10亦可沿著上下方向排列有複數層,且於橫向(X方向)亦排列而配置有複數個。又,擱板10亦可僅被設為一層。 As shown in FIG. 2 and FIG. 3, the shelf 10 is arrange | positioned in the up-down direction (Z direction), and several layers are arrange | positioned. Each of the shelves 10 is arranged in a substantially horizontal direction, and is arranged at substantially regular intervals in the vertical direction. Further, the shelf 10 may be arranged in a plurality of layers along the up-down direction, and may also be arranged in a horizontal direction (X direction) to be arranged in a plurality. The shelf 10 may be provided in only one layer.
如圖2所示,複數個擱板10係藉由螺栓等之固定構件13而被固定於柱部20。複數個擱板10分別具有缺口部11(參照圖1)、及載置部12。缺口部11係將擱板10中與前後方向(Y方向)正交之左右方向(X方向)之中央部分切缺而設置。缺口部11係設為可供移載裝置40(參照圖6)之一部分(載置容器5之部分)朝上下方向通過之大小。 As shown in FIG. 2, the plurality of shelves 10 are fixed to the pillar portion 20 by fixing members 13 such as bolts. The plurality of shelves 10 each include a notch portion 11 (see FIG. 1) and a placing portion 12. The cutout portion 11 is provided by cutting out a center portion of the shelf 10 in a left-right direction (X direction) orthogonal to the front-rear direction (Y direction). The cutout portion 11 is a size that allows a portion of the transfer device 40 (see FIG. 6) (the portion on which the container 5 is placed) to pass in a vertical direction.
如圖4所示,載置部12係沿著前後方向延伸,且夾著缺口部11被配置於左右。載置部12係由金屬等材料被形成為板狀,且左右方向之外側之端邊側朝下方(-Z方向)被彎折。夾著缺口部11之兩側的載置部12,可載置容器5。載置部12於上表面具有複數個銷12a。當容器5被載置於載置部12時,銷12a係插入被設在容器5之底部之複數個放射狀之溝部。各銷12a藉由分別被插入各溝部,而將容器5定位於擱板10(載置部12)。再者,載置部12亦可為擱板10之裏側(+Y側)之端部彼此沿著左右方向被連接之構成。於該情形時,銷12a亦可被設置於連接部分之上表面。 As shown in FIG. 4, the placing portion 12 extends in the front-rear direction, and is disposed on the left and right with the notch portion 11 interposed therebetween. The mounting portion 12 is formed in a plate shape from a material such as metal, and the end side of the outer side in the left-right direction is bent downward (-Z direction). The container 5 can be placed between the placement portions 12 on both sides of the cutout portion 11. The mounting portion 12 includes a plurality of pins 12 a on the upper surface. When the container 5 is placed on the placing portion 12, the pins 12 a are inserted into a plurality of radial groove portions provided at the bottom of the container 5. Each pin 12a is inserted into each groove part, thereby positioning the container 5 on the shelf 10 (mounting part 12). Moreover, the mounting part 12 may be comprised so that the edge part of the back side (+ Y side) of the shelf 10 may be connected to each other in the left-right direction. In this case, the pin 12a may be provided on the upper surface of the connection portion.
柱部20例如沿著X方向以固定間隔被設置。於該等柱部20之間,亦可形成有擱板10。柱部20係沿著上下方向(Z方向)延伸,並以夾著各擱板10之左右的方式被配置。柱部20支撐 擱板10中裏側(+Y側)之端部。再者,柱部20亦可以支撐擱板10之前側(-Y側)之側方的方式被配置。又,擱板10並不限定於由柱部20所支撐,例如亦可被安裝於平板(panel)等。 The pillar portions 20 are provided at regular intervals along the X direction, for example. A shelf 10 may be formed between the pillar portions 20. The pillar portion 20 extends in the up-down direction (Z direction), and is arranged so as to sandwich the left and right sides of each of the shelves 10. The pillar portion 20 supports an end portion on the back side (+ Y side) of the shelf 10. In addition, the pillar part 20 may be arrange | positioned so that the side of the front side (-Y side) of the shelf 10 may be supported. The shelf 10 is not limited to being supported by the pillar portion 20, and may be mounted on a panel or the like, for example.
防掉落構件30當容器5向前方傾倒時,藉由支撐例如凸緣5b等之容器5之一部分,來限制容器5進一步朝前方傾倒,而防止自擱板10掉落之情形。如圖1或圖3、圖4所示,防掉落構件30分別被設於擱板10之夾著缺口部11之兩側載置部12。又,如圖1至圖3所示,防掉落構件30係以相對於載置有容器5之擱板10,自上層之擱板10垂下的方式被設置。防掉落構件30例如以將構成載置部12之板狀構件之一部分朝下方彎折的狀態被設置。 When the container 5 falls forward, the anti-falling member 30 restricts the container 5 from falling forward further by supporting a part of the container 5 such as the flange 5b, and prevents the container 5 from falling down. As shown in FIG. 1, FIG. 3, and FIG. 4, the fall prevention members 30 are respectively provided on the mounting portions 12 on both sides of the shelf 10 with the notch portion 11 therebetween. As shown in FIGS. 1 to 3, the fall preventing member 30 is provided so as to hang down from the shelf 10 on the upper stage with respect to the shelf 10 on which the container 5 is placed. The fall prevention member 30 is provided in the state which bent one part of the plate-shaped member which comprises the mounting part 12 downward, for example.
防掉落構件30具有垂直部31及水平部32。垂直部31係連接於擱板10之載置部12且朝下方(-Z方向)延伸的部分。水平部32係設於垂直部31之下端,平行或大致平行於水平面(XY平面)地被配置。2個水平部32係形成為彼此相對向。防掉落構件30係以若自前後方向觀察時自上層之擱板10垂下之方式被配置之L字形狀的構件。 The fall prevention member 30 includes a vertical portion 31 and a horizontal portion 32. The vertical portion 31 is a portion connected to the placing portion 12 of the shelf 10 and extending downward (-Z direction). The horizontal portion 32 is provided at the lower end of the vertical portion 31 and is arranged in parallel or substantially parallel to a horizontal plane (XY plane). The two horizontal portions 32 are formed to face each other. The fall prevention member 30 is an L-shaped member which is arrange | positioned so that it may fall from the shelf 10 of an upper stage when seen from the front-back direction.
如圖2所示,水平部32例如被配置於距載置部12之高度(Z方向之距離)與凸緣5b相同或大致相同之位置。因此,水平部32在容器5被載置於擱板10之載置部12之狀態下,位於本體部5a之上方(+Z側)且凸緣5b之前方(-Y側)。藉此,當容器5朝前方傾倒時,水平部32會碰到凸緣5b,而支撐容器5使其不會進一步朝前方側傾倒。 As shown in FIG. 2, the horizontal portion 32 is, for example, disposed at a position (the distance in the Z direction) from the placement portion 12 that is the same as or substantially the same as the flange 5 b. Therefore, the horizontal portion 32 is positioned above the main body portion 5 a (+ Z side) and in front of the flange 5 b (−Y side) in a state where the container 5 is placed on the mounting portion 12 of the shelf 10. Thereby, when the container 5 is tilted forward, the horizontal portion 32 hits the flange 5b, and the container 5 is supported so that it does not fall further forward.
再者,垂直部31及水平部32之厚度(板厚)為任 意。但是,當容器5被移載時,水平部32必須容許本體部5a之上表面與凸緣5b之下表面之間的部分通過。因此,垂直部31及水平部32之厚度係設定為小於本體部5a與凸緣5b之間隔。 The thickness (plate thickness) of the vertical portion 31 and the horizontal portion 32 is arbitrary. However, when the container 5 is transferred, the horizontal portion 32 must allow a portion between the upper surface of the main body portion 5a and the lower surface of the flange 5b to pass. Therefore, the thicknesses of the vertical portion 31 and the horizontal portion 32 are set to be smaller than the interval between the main body portion 5a and the flange 5b.
於水平部32之上方,形成有當容器5被收容至擱板10時、或容器5自擱板10被取出時,可供凸緣5b通過之空間K。藉由設置有空間K,能避免當容器5相對於擱板10被移載時,凸緣5b或本體部5a與防掉落構件30產生干涉之情形,而使防掉落構件30不會成為容器5之移載的阻礙。又,2個水平部32之間隔係設定為大於凸緣固定部5e之寬度。藉此,當凸緣5b通過水平部32上方之空間K時,凸緣固定部5e可通過2個水平部32之間,而可避免凸緣固定部5e與水平部32產生干涉之情形。 Above the horizontal portion 32, there is formed a space K through which the flange 5b can pass when the container 5 is accommodated in the shelf 10 or when the container 5 is taken out of the shelf 10. By providing the space K, it is possible to prevent the flange 5b or the main body portion 5a from interfering with the fall prevention member 30 when the container 5 is transferred with respect to the shelf 10, so that the fall prevention member 30 does not become Barrier to container 5 transfer. The distance between the two horizontal portions 32 is set to be larger than the width of the flange fixing portion 5e. Thereby, when the flange 5b passes through the space K above the horizontal portion 32, the flange fixing portion 5e can pass between the two horizontal portions 32, and interference between the flange fixing portion 5e and the horizontal portion 32 can be avoided.
如圖4所示,水平部32具有朝擱板10之裏側(+Y側)突出之突出部32a。圖5係將防掉落構件30之一例放大顯示之立體圖。如圖5所示,突出部32a係與凸緣5b之一部分對向地被配置。突出部32a成為例如水平部32之內側之端部朝裏側(+Y方向)延伸的形狀。 As shown in FIG. 4, the horizontal portion 32 has a protruding portion 32 a protruding toward the back side (+ Y side) of the shelf 10. FIG. 5 is an enlarged perspective view showing an example of the fall prevention member 30. As shown in FIG. 5, the protruding portion 32 a is disposed so as to face a part of the flange 5 b. The protruding portion 32 a has, for example, a shape in which an end portion on the inner side of the horizontal portion 32 extends inward (+ Y direction).
於突出部32a中與凸緣5b之傾斜部5d對向之部分,形成有與該傾斜部5d對應之形狀的傾斜支承部32d。水平部32之傾斜支承部32d係與凸緣5b之傾斜部5d隔著既定間隙而被配置於附近,且被配置於與傾斜部5d相同或大致相同之高度。水平部32藉由具有突出部32a及傾斜支承部32d,而可更靠近凸緣5b而配置。但是,前述之既定間隙,考量到因容器5之個體差異所導致凸緣5b大小的誤差、及藉由移載裝置40移載容器5時之移載誤差等,且為了使凸緣5b與傾斜支承部32d不會產生干涉,而被設定為例 如數mm至數cm程度。 An inclined support portion 32d having a shape corresponding to the inclined portion 5d is formed in a portion of the protruding portion 32a that faces the inclined portion 5d of the flange 5b. The inclined support portion 32d of the horizontal portion 32 is disposed near the inclined portion 5d of the flange 5b with a predetermined gap therebetween, and is disposed at the same or substantially the same height as the inclined portion 5d. The horizontal portion 32 can be disposed closer to the flange 5b by having the protruding portion 32a and the inclined support portion 32d. However, the predetermined gap mentioned above takes into consideration the error of the size of the flange 5b caused by the individual difference of the container 5, and the transfer error when the container 5 is transferred by the transfer device 40, etc., and in order to make the flange 5b and the tilt The support portion 32d is set to, for example, several mm to several cm without causing interference.
又,如圖4所示,2個防掉落構件30係相對於YZ面對稱地被設置。因此,各防掉落構件30分別具有傾斜支承部32d。例如,在容器5朝前方傾倒之情形時,凸緣5b之2個傾斜部5d分別由傾斜支承部32d所支承。藉此,成為限制容器5朝向前方傾倒且凸緣5b進入2個傾斜支承部32d之狀態,而抑制容器5沿著左右方向(X方向)移動之情形。 As shown in FIG. 4, two fall prevention members 30 are provided symmetrically with respect to the YZ plane. Therefore, each fall prevention member 30 has a tilt support part 32d. For example, when the container 5 is tilted forward, the two inclined portions 5d of the flange 5b are supported by the inclined support portions 32d, respectively. As a result, the container 5 is restricted from being tilted forward, and the flange 5b is prevented from entering the two inclined support portions 32d, and the container 5 is prevented from moving in the left-right direction (X direction).
如此,藉由以2個傾斜支承部32d支承凸緣的5b之2個傾斜部5d,而在保管架100除了前後方向的搖動還被施加左右方向的搖動之情形時等,即便搖動方向產生變化,亦能抑制容器5傾倒之情形。但是,是否於防掉落構件30設置傾斜支承部32d為任意,亦可不設置傾斜支承部32d。 In this way, by supporting the two inclined portions 5d of 5b of the flange with two inclined support portions 32d, when the storage rack 100 is shaken in the left-right direction in addition to the forward-backward swing, even if the swing direction changes It can also prevent the container 5 from falling down. However, it is optional whether or not the inclined support portion 32d is provided on the fall prevention member 30, and the inclined support portion 32d may not be provided.
圖6係顯示在利用移載裝置40對前述之保管架100收容容器5時之動作之一例的圖。於圖6中,省略柱部20等一部分之構成。在收容容器5之情形時,首先,如圖6(A)所示,在移載裝置40載置有容器5之狀態下,將容器5插入上下之擱板10之間。 FIG. 6 is a diagram showing an example of an operation when the container 5 is stored in the storage rack 100 by the transfer device 40. In FIG. 6, a part of the structure such as the pillar portion 20 is omitted. When the container 5 is stored, first, as shown in FIG. 6 (A), the container 5 is inserted between the upper and lower shelves 10 in a state where the container 5 is placed on the transfer device 40.
此時,容器5之高度位置(Z方向之位置)係以水平部32位於本體部5a之上表面(高度H1)與凸緣5b之下表面(高度H2)之間之方式被調整,而使容器5朝+Y方向移動。藉此,凸緣5b通過水平部32上方之空間K,且大致同時地凸緣固定部5e通過2個水平部32之間,使容器5朝裏側移動。如此,以容器5不會與防掉落構件30產生干涉之方式,結束於擱板10之上方容器5之插入。 At this time, the height position (position in the Z direction) of the container 5 is adjusted so that the horizontal portion 32 is positioned between the upper surface (height H1) of the main body portion 5a and the lower surface (height H2) of the flange 5b. The container 5 moves in the + Y direction. Thereby, the flange 5b passes through the space K above the horizontal portion 32, and the flange fixing portion 5e passes between the two horizontal portions 32 at substantially the same time, so that the container 5 is moved inward. In this way, the insertion of the container 5 above the shelf 10 is completed so that the container 5 does not interfere with the fall prevention member 30.
在容器5被配置於插入位置之情形時,於Y方向,成為防掉落構件30之水平部32被配置於凸緣5b與蓋部5c之間之狀態。再者,如圖6(A)所示,容器5雖被載置於移載裝置40而被插入至擱板10之上方,但由於在擱板10,如上所述般銷12a朝上方突出,因此插入時之容器5之高度,係設定為容器5之下部不會與銷12a產生干涉之高度。 When the container 5 is disposed at the insertion position, the horizontal portion 32 of the fall prevention member 30 is disposed between the flange 5 b and the lid portion 5 c in the Y direction. Moreover, as shown in FIG. 6 (A), although the container 5 is placed on the transfer device 40 and inserted above the shelf 10, the pin 12a protrudes upward as described above on the shelf 10, Therefore, the height of the container 5 at the time of insertion is set to a height at which the lower portion of the container 5 does not interfere with the pin 12a.
其次,如圖6(B)所示,使移載裝置40下降而使容器5通過缺口部11。藉由利用移載裝置40使容器5通過缺口部11,容器5係載置於擱板10之載置部12,而結束容器5自移載裝置40朝向擱板10之移載。再者,當容器5被載置於擱板10時,銷12a被插入被設在容器5之底部之未圖示之溝部,使容器5相對於載置部12於水平方向(X方向及Y方向)上被定位。又,由於容器5在水平部32被配置於凸緣5b與蓋部5c之間的狀態下下降,因此容器5以水平部32與容器5(凸緣5b等)不會產生干涉之方式,如圖6(C)所示般被載置於載置部12。 Next, as shown in FIG. 6 (B), the transfer device 40 is lowered and the container 5 is passed through the cutout portion 11. By using the transfer device 40 to pass the container 5 through the notch portion 11, the container 5 is placed on the placement portion 12 of the shelf 10, and the transfer of the container 5 from the transfer device 40 to the shelf 10 is ended. In addition, when the container 5 is placed on the shelf 10, the pin 12a is inserted into a groove portion (not shown) provided at the bottom of the container 5 so that the container 5 is horizontal to the placement portion 12 (X direction and Y Direction). In addition, since the container 5 is lowered in a state where the horizontal portion 32 is disposed between the flange 5b and the lid portion 5c, the container 5 is in such a manner that the horizontal portion 32 and the container 5 (flange 5b, etc.) do not interfere, such as As shown in FIG. 6 (C), it is placed on the placing section 12.
在容器5被載置於載置部12之狀態下,水平部32於Y方向上被配置於凸緣5b與蓋部5c之間,且被配置於與凸緣5b大致相同之高度(Z方向之位置)。再者,將容器5載置於載置部12後之移載裝置40,例如維持下降後之高度朝-Y方向移動而離開保管架100。 In a state where the container 5 is placed on the placement portion 12, the horizontal portion 32 is disposed between the flange 5 b and the cover portion 5 c in the Y direction, and is disposed at substantially the same height as the flange 5 b (the Z direction). Location). In addition, the transfer device 40 after placing the container 5 on the mounting portion 12 moves away from the storage rack 100, for example, while maintaining the lowered height in the -Y direction.
又,在利用移載裝置40取出被載置於載置部12之容器5時,進行與前述之說明相反之動作。例如,移載裝置40以低於對象之容器5之高度插入擱板10之下方。接著,使移載裝置40之一部分經由缺口部11而上升,藉此容器5自載置部12被移載至 移載裝置40。接著,移載裝置40於容器5之凸緣5b高於水平部32且水平部32高於本體部5a之上部的位置停止上升,一邊維持該高度一邊朝-Y方向移動,藉此成為圖6(A)所示之狀態,而可將容器5自保管架100取出。 When the container 5 placed on the placing section 12 is taken out by the transfer device 40, the operation opposite to the above description is performed. For example, the transfer device 40 is inserted below the shelf 10 at a height lower than the target container 5. Next, a part of the transfer device 40 is raised through the cutout portion 11, whereby the container 5 is transferred from the placement portion 12 to the transfer device 40. Next, the transfer device 40 stops rising at a position where the flange 5b of the container 5 is higher than the horizontal portion 32 and the horizontal portion 32 is higher than the upper portion of the main body portion 5a, and moves in the -Y direction while maintaining the height. In the state shown in (A), the container 5 can be taken out of the storage rack 100.
圖7顯示被保管於保管架100之容器5,圖7(A)係顯示容器5朝前方傾倒之狀態之圖,圖7(B)係顯示容器5朝後方傾倒之狀態之圖。在保管架100因地震等原因而朝前後方向搖晃之情形時,由於容器5成為銷12a進入底面之未圖示之溝部且本體部5a之底部於水平方向上被固定於載置部12之狀態,因此以朝前方側或後方側傾倒之方式傾斜。例如,如圖7(A)所示,在容器5朝前方側傾倒之情形時,由於防掉落構件30之水平部32被配置於凸緣5b之前方,因此水平部32會碰到凸緣5b使容器5被支承。藉此,可防止容器5於載置部12上朝前方側偏移、或容器5朝前方傾倒而自擱板10掉落之情形。 FIG. 7 shows the container 5 stored in the storage rack 100, FIG. 7 (A) is a view showing a state in which the container 5 is tilted forward, and FIG. 7 (B) is a view showing a state in which the container 5 is dumped backward. When the storage rack 100 is shaken in the front-rear direction due to an earthquake or the like, the container 5 becomes a state where the pin 12a enters a groove portion (not shown) on the bottom surface and the bottom of the main body portion 5a is fixed to the mounting portion 12 in the horizontal direction. , So it tilts in such a way that it tilts towards the front or back. For example, as shown in FIG. 7 (A), when the container 5 is tilted to the front side, the horizontal portion 32 of the fall prevention member 30 is disposed in front of the flange 5b, so the horizontal portion 32 hits the flange. 5b supports the container 5. Thereby, it is possible to prevent the container 5 from being shifted toward the front side on the placement portion 12 or the container 5 is tipped forward and dropped from the shelf 10.
又,例如,如圖7(B)所示,在容器5朝後方側傾倒之情形時,由於防掉落構件30之水平部32被配置於蓋部5c之上部之後方,因此水平部32會碰到蓋部5c之上部而使容器5被支承。藉此,可防止容器5於載置部12上朝後方側偏移、或容器5朝後方傾倒之情形。再者,於圖7(B),雖顯示蓋部5c之上部碰到水平部32之例,但並不限定於此。亦可為容器5之本體部5a之上表面碰到水平部32。於該情形時,亦可與前述同樣地防止容器5朝後方傾倒之情形。 Further, for example, as shown in FIG. 7 (B), when the container 5 is tilted to the rear side, the horizontal portion 32 of the fall prevention member 30 is disposed behind the upper portion of the cover portion 5c. The container 5 is supported by hitting the upper portion of the lid portion 5c. Thereby, it is possible to prevent the container 5 from being shifted to the rear side on the placement portion 12 or the container 5 to be tipped to the rear. 7 (B) shows an example in which the upper portion of the cover portion 5c hits the horizontal portion 32, but it is not limited to this. The upper surface of the main body portion 5a of the container 5 may also touch the horizontal portion 32. In this case, it is possible to prevent the container 5 from falling backward in the same manner as described above.
如此,根據本實施形態之保管架100,在容器5朝前方側傾倒之情形時,凸緣5b會碰到防掉落構件30,而可 防止容器5之偏移或傾倒。又,在容器5朝後方側傾倒之情形時,容器5之一部分亦會碰到防掉落構件30,而可防止容器5之偏移或傾倒。藉此,能以簡單之構成來防止容器5自擱板10掉落。又,由於具有供凸緣5b通過上方之空間K,因此可避免當相對於擱板10移載容器5時凸緣5b或容器5之本體部5a與防掉落構件30產生干涉之情形,而使防掉落構件30不會成為容器移載之阻礙。 As described above, according to the storage rack 100 according to the present embodiment, when the container 5 is tilted toward the front side, the flange 5b can collide with the fall prevention member 30, and the container 5 can be prevented from being displaced or tipped over. Moreover, when the container 5 is tipped to the rear side, a part of the container 5 may also hit the fall prevention member 30, so that the container 5 can be prevented from being shifted or toppled. Thereby, the container 5 can be prevented from falling from the shelf 10 with a simple structure. Furthermore, since the flange 5b passes through the space K above, it is possible to avoid interference between the flange 5b or the main body portion 5a of the container 5 and the fall prevention member 30 when the container 5 is transferred with respect to the shelf 10. The fall prevention member 30 is not an obstacle to container transfer.
又,本實施形態之保管架100,由於防掉落構件30被配置於容器5之蓋部5C之上部之後方,因此即便當容器5朝後方側傾倒時,防掉落構件30亦會碰到蓋部之5c上部或容器5之本體部5a之上表面,而可防止容器5之偏移或傾倒,而能確實地防止容器5自擱板10掉落。容器5亦可為蓋部5c之上部不自本體部5a之上部突出的類型。即便為如此之容器5,當容器5朝後方側傾倒時,亦可藉由本體部5a之上表面碰到防掉落構件30,而防止容器5之偏移或傾倒。 In addition, since the storage rack 100 of this embodiment is disposed behind the upper portion 5C of the lid portion 5 of the container 5, even when the container 5 is tilted to the rear side, the drop prevention member 30 may hit The upper portion 5c of the lid portion or the upper surface of the main body portion 5a of the container 5 can prevent the container 5 from shifting or falling down, and can reliably prevent the container 5 from falling off the shelf 10. The container 5 may be a type in which the upper portion of the lid portion 5c does not protrude from the upper portion of the main body portion 5a. Even with the container 5 as described above, when the container 5 is tilted to the rear side, the upper surface of the main body portion 5a can touch the anti-falling member 30 to prevent the container 5 from shifting or falling.
以上,雖已對本發明之實施形態進行說明,但本發明之技術範圍並不限定於前述之實施形態。例如,於前述之實施形態中,雖已以沿著上下設置有複數個擱板10之保管架100為例進行說明,但亦可為僅一層擱板10之保管架。又,雖已以防掉落構件30分別被配置於夾著缺口部11之兩側之載置部12的構成為例進行說明,但並不限定於此。亦可為例如防掉落構件30僅被配置於任一載置部12之構成。 As mentioned above, although embodiment of this invention was described, the technical scope of this invention is not limited to the said embodiment. For example, in the aforementioned embodiment, the storage rack 100 having a plurality of shelves 10 arranged along the top and bottom has been described as an example, but it may be a storage rack having only one shelf 10. Moreover, although the structure in which the fall prevention member 30 was arrange | positioned at the both sides of the mounting part 12 which sandwiched the notch part 11 was demonstrated as an example, it is not limited to this. For example, a structure in which the fall prevention member 30 is arranged only on any one of the mounting portions 12 may be adopted.
又,在前述之實施形態中,防掉落構件30雖為以自上層之擱板10垂下之方式被配置之L字形狀的構件,但並不限定於此形狀,只要可配置在被載置於載置部12之容器5之凸緣5b之 前方,則形態為任意。例如,防掉落構件30既可被安裝於柱部20,亦可使用L字形狀以外之形狀(例如彎曲之形狀)。 Moreover, in the aforementioned embodiment, although the fall preventing member 30 is an L-shaped member arranged so as to be suspended from the upper shelf 10, it is not limited to this shape, as long as it can be placed on the placed The shape before the flange 5b of the container 5 of the mounting part 12 is arbitrary. For example, the fall prevention member 30 may be attached to the pillar portion 20, or a shape other than the L-shape (for example, a curved shape) may be used.
又,於前述之實施形態中,防掉落構件30雖將上層之之擱板10之一部分彎折所形成,但並不限定於此。例如,與擱板10分開地被形成之金屬製或樹脂製等之防掉落構件30,既可藉由固定螺釘等之緊固構件被安裝於擱板10,亦可藉由焊接等被固定於擱板10。在利用固定螺釘等將防掉落構件30安裝於擱板10之情形時,亦可於防掉落構件30預先形成有長孔或複數個貫通孔,而可於水平方向上調整由固定螺釘等所固定之防掉落構件30之固定位置。藉此,能容易地調整2個防掉落構件30彼此之水平方向之間隔。 Further, in the aforementioned embodiment, the fall preventing member 30 is formed by bending a part of the upper shelf 10, but it is not limited to this. For example, the fall-preventing member 30 made of metal, resin, or the like formed separately from the shelf 10 may be attached to the shelf 10 by a fastening member such as a fixing screw, or may be fixed by welding or the like.于 架 架 10。 Shelves 10. When the fall-prevention member 30 is mounted on the shelf 10 using a fixing screw or the like, a long hole or a plurality of through holes may be formed in the fall-prevention member 30 in advance, and the fixing screw or the like may be adjusted in the horizontal direction. A fixed position of the fixed fall preventing member 30. Thereby, the interval in the horizontal direction between the two fall prevention members 30 can be easily adjusted.
又,於前述之實施形態中,雖由防掉落構件30之垂直部31與水平部32形成空間K,但空間K之大小亦可為可變更。例如,如前所述,藉由調整防掉落構件30(垂直部31)之固定位置,可變更空間K之左右方向之寬度。又,藉由分開地構成垂直部31與水平部32,且使水平部32可相對於垂直部31移動,而可變更空間K之上下方向之間隔。 In the aforementioned embodiment, although the space K is formed by the vertical portion 31 and the horizontal portion 32 of the fall prevention member 30, the size of the space K may be changed. For example, as described above, the width of the space K in the left-right direction can be changed by adjusting the fixed position of the fall prevention member 30 (vertical portion 31). In addition, the vertical portion 31 and the horizontal portion 32 are separately configured, and the horizontal portion 32 can be moved relative to the vertical portion 31, so that the interval in the vertical direction of the space K can be changed.
又,於前述之實施形態中,雖顯示在保管架100設有防掉落構件30之構成,但用以防止容器5掉落等之構造,亦可被附設於保管架100。例如,亦可為在保管架100設有防掉落構件30且於擱板10附設有卡止容器5之底部凸緣之構造,或者,亦可附設有使擱板10之載置部12之前方側朝上方傾斜之構造。藉由形成如上述之複數個防掉落對策,而確實地防止容器5掉落。 Moreover, although the structure which provided the fall prevention member 30 in the storage rack 100 was shown in the said embodiment, the structure for preventing the container 5 from falling etc. may be attached to the storage rack 100. For example, the storage rack 100 may be provided with a fall prevention member 30 and the bottom flange of the holding container 5 attached to the shelf 10, or may be provided before the mounting portion 12 of the shelf 10 is attached. The side is inclined upward. By forming a plurality of fall prevention measures as described above, the container 5 is reliably prevented from falling.
又,於前述之實施形態中,防掉落構件30之水平部32係配置在與被載置於擱板10之容器5之凸緣5b相同或大致相同的高度。其中,所謂大致相同的高度,係指例如,當容器5朝前方傾倒時,水平部32能碰到凸緣5b之高度。因此,水平部32之高度亦可由被載置於擱板10之容器5之凸緣5b與水平部32之間隔來決定。例如,水平部32既可高於凸緣5b之高度,或者,亦可低於凸緣5b之高度。 In the aforementioned embodiment, the horizontal portion 32 of the fall prevention member 30 is disposed at the same or substantially the same height as the flange 5 b of the container 5 placed on the shelf 10. Here, the substantially same height means, for example, the height at which the horizontal portion 32 can hit the flange 5 b when the container 5 is tilted forward. Therefore, the height of the horizontal portion 32 can also be determined by the distance between the flange 5 b of the container 5 placed on the shelf 10 and the horizontal portion 32. For example, the horizontal portion 32 may be higher than the height of the flange 5b, or may be lower than the height of the flange 5b.
又,於前述之實施形態中,雖已以防掉落構件30之水平部32具備有與凸緣5b之傾斜部5d對向之傾斜支承部32d的構成為例進行說明,但並不限定於此。例如,傾斜支承部32d既可為其他形狀,亦可為不設置傾斜支承部32d之構成。 Moreover, in the said embodiment, although the structure of the horizontal part 32 of the fall prevention member 30 provided with the inclined support part 32d which opposes the inclined part 5d of the flange 5b was described as an example, it is not limited to this. this. For example, the inclined support portion 32d may have another shape or a configuration in which the inclined support portion 32d is not provided.
又,於前述之實施形態中,雖已以於防掉落構件30之水平部32設有突出部32a之構成為例進行說明,但並不限定為該構成,亦可為不設置突出部32a之構成。又,作為突出部32a,雖已以水平部32之一部分朝+Y側延伸之狀態所設置的構成為例進行說明,但並不限定為該構成,亦可為其他構成。又,只要在法令所允許之範圍內,可援用作為日本專利申請案之特願2016-196217、及本說明書所引用之所有文獻之內容,來作為本說明書之記載的一部分。 In the foregoing embodiment, the configuration in which the protruding portion 32a is provided on the horizontal portion 32 of the fall prevention member 30 has been described as an example, but the configuration is not limited to this, and the protruding portion 32a may not be provided. Of the composition. Moreover, although the structure provided as a part of the horizontal part 32 extended to the + Y side as an example was demonstrated as the protrusion part 32a, it is not limited to this structure, It can also be another structure. In addition, as long as it is within the scope permitted by law, the contents of Japanese Patent Application No. 2016-196217 and all documents cited in this specification can be used as part of the description in this specification.
Claims (8)
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JP2016-196217 | 2016-10-04 |
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TW106132634A TW201813897A (en) | 2016-10-04 | 2017-09-22 | Storage shelf |
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JP5024337B2 (en) * | 2009-07-29 | 2012-09-12 | 村田機械株式会社 | Transport system and storage device |
US8550006B2 (en) * | 2010-04-02 | 2013-10-08 | Murata Machinery, Ltd. | Side buffer for a transport vehicle that travels along the ceiling, and transport vehicle system |
JP2014049585A (en) * | 2012-08-31 | 2014-03-17 | Renesas Electronics Corp | Method of manufacturing semiconductor device |
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