WO2018066208A1 - Storage shelf - Google Patents

Storage shelf Download PDF

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Publication number
WO2018066208A1
WO2018066208A1 PCT/JP2017/026668 JP2017026668W WO2018066208A1 WO 2018066208 A1 WO2018066208 A1 WO 2018066208A1 JP 2017026668 W JP2017026668 W JP 2017026668W WO 2018066208 A1 WO2018066208 A1 WO 2018066208A1
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WO
WIPO (PCT)
Prior art keywords
container
flange
shelf
fall prevention
prevention member
Prior art date
Application number
PCT/JP2017/026668
Other languages
French (fr)
Japanese (ja)
Inventor
玄己 小合
Original Assignee
村田機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2018066208A1 publication Critical patent/WO2018066208A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/14Stack holders or separators

Definitions

  • the present invention relates to a storage shelf.
  • Containers such as FOUP, SMIF Pod, and reticle Pod that accommodate wafers or reticles are stored in a storage shelf such as a stocker.
  • the storage shelf has, for example, a plurality of shelf plates arranged in the vertical direction, and stores and stores containers on each shelf plate.
  • Each shelf is provided with pins that are inserted into a plurality of radial grooves provided at the bottom of the container.
  • Each container has a groove on the bottom surface, and is positioned by placing the pin of the shelf board into the groove, and is placed on the shelf board.
  • Patent Document 1 describes a configuration in which a shelf plate is provided with a fall prevention member that is locked to a bottom flange of a container.
  • the above-described fall prevention member is commonly applied to a plurality of types of containers having different shapes such as a bottom flange, it is necessary to increase the space for allowing the container to pass when the container is taken in and out. is there. As a result, the gap between the bottom flange and the fall prevention member becomes large, and the container may be greatly inclined when vibration is generated, which may give a large impact to the container or eventually cause the container to fall from the shelf.
  • the above-described fall prevention member is provided so as to largely protrude on the shelf plate, the storage space for the container is reduced by that amount, and the space efficiency is lowered.
  • an object of the present invention is to provide a storage shelf that can prevent a container from dropping from a shelf board with a simple configuration.
  • the storage shelf according to the present invention is a storage shelf for storing a container having a flange on the upper portion of the main body, and is disposed above the main body of the container placed on the shelf and in front of the flange. Is provided with a fall prevention member having a space that can pass through.
  • the container may be detachably attached to the side surface, and the upper part may have a lid part protruding upward from the main body part, and the fall prevention member may be arranged behind the upper part of the lid part.
  • a plurality of shelf boards may be provided in the vertical direction, and the fall prevention member may be an L-shaped member arranged so as to hang down from the upper shelf board. The fall prevention member may be formed by bending a part of the upper shelf board.
  • the fall prevention member may have a horizontal portion and a vertical portion that extends upward from the outside of the horizontal portion and connects to the upper shelf board. Further, the horizontal portion may be disposed at a height equal to or substantially equal to the flange of the container placed on the shelf board. Moreover, the shape of the part which opposes a flange according to the shape of a flange may be formed in a horizontal part.
  • the shelf board may include a notch part in which a central part in the left-right direction orthogonal to the front-rear direction is notched, and the fall prevention members may be provided on both sides of the notch part of the upper shelf board.
  • the storage shelf according to the present invention prevents the container from slipping or overturning when the front of the flange hits the fall prevention member when the container falls forward due to vibration such as an earthquake.
  • a part of the container hits the fall preventing member to prevent the container from being displaced or toppled.
  • a container can be prevented from dropping from the shelf board with a simple configuration.
  • since there is a space for allowing the flange to pass upward it is possible to avoid the flange or the main body of the container from interfering with the fall prevention member when the container is transferred to the shelf board. It will not be a hindrance.
  • the fall prevention member is placed on the upper portion of the lid portion or the main body portion of the container even when the container falls to the back side.
  • the container can be prevented from slipping or falling, and the container can be reliably prevented from falling from the shelf board.
  • the fall prevention member can be easily formed with a simple configuration. .
  • a fall prevention member is formed by bending a part of upper shelf board, a fall prevention member can be easily formed, without using a fixture.
  • the fall prevention member has a horizontal part and a vertical part that extends upward from the outside of the horizontal part and connects to the upper shelf, a space through which the flange passes can be easily formed by the vertical part.
  • the horizontal portion when the horizontal portion is disposed at a height equal to or substantially equal to the flange of the container placed on the shelf plate, the flange can be more reliably supported by the horizontal portion when the container falls forward.
  • the shape of the portion of the horizontal portion facing the flange is formed according to the shape of the flange, the horizontal portion can be disposed in the vicinity of the flange.
  • the shelf plate includes a notch portion in which a central portion in the left-right direction orthogonal to the front-rear direction is cut out, and the fall prevention members are provided on both sides sandwiching the notch portion of the upper shelf plate, By using the fall prevention member, it is possible to more reliably prevent the container from dropping.
  • FIG. 3C is a diagram showing a state where the container is placed. The container stored on the storage shelf is shown, (A) is a view showing a state in which the container has fallen forward, and (B) is a view showing a state in which the container has fallen backward.
  • FIG. 1 is a diagram schematically illustrating an example of a storage shelf 100 according to the present embodiment.
  • FIG. 2 is a side view of the storage shelf 100.
  • FIG. 3 is a front view of the storage shelf 100.
  • FIG. 4 is a plan view of the storage shelf 100.
  • the storage shelf 100 is disposed, for example, in an automatic warehouse that stores a plurality of containers 5, in the vicinity of a processing device, or along a traveling route of a ceiling transport vehicle.
  • the container 5 is a wafer or a FOUP that accommodates an article such as a reticle used for manufacturing a semiconductor element, but is not limited thereto, and may be a SMIF Pod, a reticle Pod, or the like.
  • the container 5 includes a main body portion 5a, a flange 5b, and a lid portion 5c.
  • the main body 5a has, for example, a box shape with a space that can accommodate articles therein, and has an opening on the front side surface.
  • the main body 5a can store and take out articles through the opening.
  • the flange 5b is disposed at the upper part of the main body 5a.
  • the flange 5b is formed in, for example, a rectangular plate shape, and a tapered portion (chamfered portion or notched portion) 5d is provided at a corner (see FIG. 5).
  • the flange 5b is fixed to the upper surface of the main body portion 5a via the flange fixing portion 5e. Therefore, the gap is generated between the flange 5b and the main body 5a by the height of the flange fixing portion 5e.
  • the lid 5c is attached so as to close the opening of the main body 5a, and is removable from the main body 5a.
  • the upper part of the lid part 5c protrudes upward from the main body part 5a.
  • the cover part 5c protrudes upwards from the main-body part 5a, the part which covers this protruding part may be provided in the main-body part 5a.
  • the storage shelf 100 includes a plurality of shelf boards 10, a column part 20, and a fall prevention member 30. Further, the storage shelf 100 may include a plurality of purge devices (not shown) for supplying purge gas into the container 5 when the container 5 is placed on the shelf board 10, and for transferring the container 5.
  • a transfer device for example, a stacker crane may be provided.
  • the shelf board 10 is arranged in a plurality of stages in the vertical direction (Z direction). Each of the shelf boards 10 is disposed in a substantially horizontal direction and is disposed at substantially equal intervals in the vertical direction. Note that the shelf boards 10 may be arranged in a plurality of stages in the up-down direction and arranged in a plurality in the horizontal direction (X direction). Further, only one shelf plate 10 may be provided.
  • the plurality of shelf boards 10 are fixed to the column part 20 by fixing members 13 such as bolts as shown in FIG.
  • Each of the plurality of shelf boards 10 has a notch portion 11 (see FIG. 1) and a placement portion 12.
  • the cutout portion 11 is provided by cutting out the central portion of the shelf board 10 in the left-right direction (X direction) orthogonal to the front-rear direction (Y direction).
  • the cutout portion 11 is provided in such a size that a part (portion on which the container 5 is placed) of the transfer device 40 (see FIG. 6) can pass in the vertical direction.
  • the mounting portion 12 extends in the front-rear direction, and is disposed on the left and right sides with the notch portion 11 interposed therebetween.
  • the mounting portion 12 is formed in a plate shape from a material such as metal, and the outer side edge in the left-right direction is bent downward ( ⁇ Z direction).
  • the placement parts 12 on both sides of the notch part 11 can place the container 5.
  • the mounting portion 12 has a plurality of pins 12a on the upper surface.
  • the pins 12 a are inserted into a plurality of radial grooves provided at the bottom of the container 5 when the container 5 is placed on the placement part 12.
  • Each pin 12a is inserted in each groove part, and positions the container 5 with respect to the shelf board 10 (mounting part 12).
  • inner side (+ Y side) of the shelf board 10 were connected in the left-right direction may be sufficient as the mounting part 12.
  • the pin 12a may be provided on the upper surface of the connection portion.
  • the pillars 20 are provided at regular intervals in the X direction, for example.
  • a shelf board 10 may be formed between the pillar portions 20.
  • the column portion 20 extends in the up-down direction (Z direction) and is disposed so as to sandwich the left and right sides of each shelf board 10.
  • the column portion 20 supports an end portion on the back side (+ Y side) of the shelf board 10.
  • the column portion 20 may be disposed so as to support the front side ( ⁇ Y side) of the shelf board 10.
  • the shelf board 10 is not limited to being supported by the column part 20, For example, you may attach to a panel etc.
  • the fall prevention member 30 supports a part of the container 5 such as the flange 5b when the container 5 falls forward, thereby restricting the container 5 from falling further forward and falling from the shelf board 10. To prevent that.
  • the fall prevention member 30 is provided on each of the placement parts 12 on both sides of the shelf plate 10 with the notch part 11 interposed therebetween. Moreover, the fall prevention member 30 is provided so that it may hang down from the upper shelf board 10 with respect to the shelf board 10 in which the container 5 is mounted, as shown in FIGS.
  • the fall prevention member 30 is provided, for example, in a state in which a part of the plate-like member constituting the placement unit 12 is bent downward.
  • the fall prevention member 30 has a vertical part 31 and a horizontal part 32.
  • the vertical portion 31 is a portion connected to the placement portion 12 of the shelf board 10 and extending downward ( ⁇ Z direction).
  • the horizontal portion 32 is provided at the lower end of the vertical portion 31, and is disposed in parallel or substantially parallel to the horizontal plane (XY plane).
  • the two horizontal portions 32 are formed so as to face each other.
  • the fall prevention member 30 is an L-shaped member arranged so as to hang down from the upper shelf 10 when viewed from the front-rear direction.
  • the horizontal portion 32 is disposed, for example, at a position where the height from the placement portion 12 (distance in the Z direction) is equal to or substantially equal to the flange 5b. Accordingly, the horizontal portion 32 is located above the main body portion 5a (+ Z side) and in front of the flange 5b ( ⁇ Y side) in a state where the container 5 is placed on the placement portion 12 of the shelf board 10. . Thereby, when the container 5 falls forward, the horizontal part 32 hits the flange 5b, and it is possible to support the container 5 so that it does not fall further forward.
  • the thickness (plate thickness) of the vertical portion 31 and the horizontal portion 32 is arbitrary.
  • the horizontal portion 32 needs to allow passage of a portion between the upper surface of the main body portion 5a and the lower surface of the flange 5b when the container 5 is transferred. Therefore, the thickness of the vertical part 31 and the horizontal part 32 is set so that it may become smaller than the space
  • a space K through which the flange 5b can pass when the container 5 is accommodated in the shelf board 10 or when the container 5 is taken out of the shelf board 10 is formed above the horizontal portion 32.
  • the horizontal portion 32 has a protruding portion 32 a that protrudes to the back side (+ Y side) of the shelf board 10.
  • FIG. 5 is an enlarged perspective view showing an example of the fall prevention member 30.
  • the protruding portion 32a is disposed to face a part of the flange 5b.
  • the protrusion 32a has, for example, a shape in which the inner end of the horizontal portion 32 extends to the back side (+ Y direction).
  • a tapered receiving portion 32d having a shape corresponding to the tapered portion 5d is formed in a portion of the protruding portion 32a facing the tapered portion 5d of the flange 5b.
  • the taper receiving portion 32d of the horizontal portion 32 is disposed in the vicinity with a predetermined gap with respect to the taper portion 5d of the flange 5b, and is disposed at the same or substantially the same height as the taper portion 5d. Since the horizontal portion 32 includes the protruding portion 32a and the taper receiving portion 32d, the horizontal portion 32 can be arranged closer to the flange 5b.
  • the predetermined gap described above is tapered with respect to the flange 5b in consideration of an error in the size of the flange 5b due to individual differences between the containers 5 and a transfer error when the container 5 is transferred by the transfer device 40.
  • it is set to about several mm to several cm.
  • each fall prevention member 30 is provided symmetrically with respect to the YZ plane. Accordingly, each fall prevention member 30 has a taper receiving portion 32d.
  • the two taper portions 5d of the flange 5b are received by the taper receiving portions 32d, respectively.
  • the container 5 is prevented from falling forward, and the flange 5b enters the two taper receiving portions 32d, thereby suppressing the container 5 from moving in the left-right direction (X direction). become.
  • the direction of the shaking of the storage shelf 100 is changed, for example, when the shaking in the left-right direction is added to the shaking in the front-rear direction. Even when the container 5 falls, it can be suppressed.
  • the taper receiving portion 32d is provided on the fall prevention member 30 is arbitrary, and the taper receiving portion 32d may not be provided.
  • FIG. 6 is a diagram illustrating an example of an operation when the container 5 is accommodated by the transfer device 40 with respect to the storage shelf 100 described above. In FIG. 6, a part of the configuration of the column portion 20 and the like is omitted.
  • the container 5 is accommodated, first, as shown in FIG. 6A, the container 5 is inserted between the upper and lower shelf boards 10 with the container 5 placed on the transfer device 40.
  • the height position (position in the Z direction) of the container 5 is adjusted so that the horizontal portion 32 is positioned between the upper surface (height H1) of the main body 5a and the lower surface (height H2) of the flange 5b.
  • the container 5 moves in the + Y direction.
  • the flange 5b passes through the space K above the horizontal portion 32, and the flange fixing portion 5e passes between the two horizontal portions 32 almost simultaneously, and the container 5 moves to the back side.
  • the insertion of the container 5 is completed above the shelf board 10 without the container 5 interfering with the fall prevention member 30.
  • the horizontal portion 32 of the fall prevention member 30 is disposed between the flange 5b and the lid portion 5c in the Y direction.
  • the container 5 is placed on the transfer device 40 and inserted above the shelf board 10.
  • the shelf board 10 has the pins 12a above as described above. Therefore, the height of the container 5 at the time of insertion is set to a height at which the lower part of the container 5 does not interfere with the pin 12a.
  • the transfer device 40 is lowered to pass through the notch 11.
  • the container 5 is placed on the placement portion 12 of the shelf plate 10, and the transfer from the transfer device 40 to the shelf plate 10 is completed.
  • the pin 12 a is inserted into a groove portion (not shown) provided at the bottom of the container 5, and the container 5 is placed in the horizontal direction (X direction and Positioned in the Y direction).
  • the horizontal portion 32 and the container 5 do not interfere with each other, and FIG. ) do not interfere with each other, and FIG. )
  • the container 5 is placed on the placement unit 12.
  • the horizontal portion 32 is disposed between the flange 5b and the lid portion 5c in the Y direction, and has a height (position in the Z direction) substantially equal to the flange 5b. Be placed.
  • the transfer device 40 after placing the container 5 on the placement unit 12 moves in the ⁇ Y direction with the lowered height, for example, and leaves the storage shelf 100.
  • the transfer device 40 is inserted below the shelf board 10 at a height lower than the target container 5. Subsequently, the container 5 is transferred from the placement unit 12 to the transfer device 40 by raising a part of the transfer device 40 through the notch 11. Subsequently, the transfer device 40 stops rising at a position where the flange 5b of the container 5 is higher than the horizontal part 32 and the horizontal part 32 is higher than the upper part of the main body part 5a, and the ⁇ Y direction while maintaining this height. 6A, the container 5 can be taken out from the storage shelf 100.
  • FIG. 7 shows the container 5 stored in the storage shelf 100, (A) shows a state in which the container 5 has fallen forward, and (B) shows a state in which the container 5 has fallen backward.
  • the storage shelf 100 shakes in the front-rear direction due to an earthquake or the like, the container 5 has a pin 12a in a groove portion (not shown) on the bottom surface, and the bottom portion of the main body portion 5a is fastened to the mounting portion 12 in the horizontal direction. Therefore, it tilts so as to fall forward or backward. For example, as shown in FIG.
  • the horizontal portion 32 of the fall prevention member 30 is disposed in front of the flange 5b, so that the flange 5b hits the horizontal portion 32 and the container 5 will be accepted. Thereby, it is possible to prevent the container 5 from being shifted forward on the placement portion 12 or the container 5 from falling forward and falling from the shelf board 10.
  • FIG. 7B shows an example in which the upper part of the lid 5c hits the horizontal part 32, but the present invention is not limited to this.
  • the upper surface of the main body portion 5 a of the container 5 may hit the horizontal portion 32. In this case as well, the container 5 can be prevented from falling backward.
  • the flange 5b hits the fall preventing member 30 and the container 5 is prevented from being displaced or toppled.
  • a part of the container 5 hits the fall preventing member 30 and the container 5 is prevented from being displaced or toppled.
  • the fall of the container 5 from the shelf board 10 can be prevented with a simple configuration.
  • the flange 5b or the main body 5a of the container 5 interferes with the fall prevention member 30 when the container 5 is transferred to the shelf board 10. This can be avoided, and the fall prevention member 30 does not hinder container transfer.
  • the fall prevention member 30 is arrange
  • the container 5 may be of a type in which the upper part of the lid part 5c does not protrude from the upper part of the main body part 5a. Even in such a container 5, when the container 5 falls to the rear side, the upper surface of the main body portion 5 a hits the fall prevention member 30, thereby preventing the container 5 from being displaced or toppled.
  • the technical scope of this invention is not limited to above-described embodiment.
  • the storage shelf 100 in which a plurality of the shelf boards 10 are provided above and below is described as an example, but the shelf board 10 may be a storage shelf with only one stage.
  • positioned only in any one mounting part 12 may be sufficient.
  • the fall prevention member 30 is an L-shaped member disposed so as to hang down from the upper shelf board 10, but is not limited to this shape, and is placed on the placement portion 12.
  • the form is arbitrary as long as it can be arranged in front of the flange 5b of the container 5.
  • the fall prevention member 30 may be attached to the column part 20, and shapes (for example, curved shape) other than L shape may be used.
  • the fall prevention member 30 is formed by bending a part of the upper shelf board 10, but the present invention is not limited to this.
  • a metal or resin fall prevention member 30 formed separately from the shelf board 10 may be attached to the shelf board 10 by a fastening member such as a fixing screw, or fixed to the shelf board 10 by welding or the like. May be.
  • a fastening member such as a fixing screw
  • a long hole or a plurality of through holes are formed in the fall prevention member 30 in advance, and the fixing position of the fall prevention member 30 with the fixing screw or the like is set in the horizontal direction. It may be adjustable. Thereby, the horizontal space
  • the space K is formed by the vertical portion 31 and the horizontal portion 32 of the fall prevention member 30, but the size of the space K may be changeable.
  • the width in the left-right direction of the space K can be changed by adjusting the fixing position of the fall prevention member 30 (vertical portion 31).
  • the vertical part 31 and the horizontal part 32 are comprised separately, and the space
  • the storage shelf 100 is provided with the fall prevention member 30 .
  • a structure for preventing the container 5 from dropping or the like may be added to the storage shelf 100.
  • the storage rack 100 may be provided with the fall prevention member 30 and a structure for locking the bottom flange of the container 5 to the shelf board 10 may be added.
  • a structure in which the side is inclined upward may be added.
  • the horizontal portion 32 of the fall prevention member 30 is disposed at a height equal to or substantially equal to the flange 5 b of the container 5 placed on the shelf board 10.
  • the almost equal height is, for example, a height at which the flange 5b can hit the horizontal portion 32 when the container 5 falls forward. Therefore, the height of the horizontal portion 32 may be determined by the distance between the flange 5 b of the container 5 placed on the shelf board 10 and the horizontal portion 32.
  • the horizontal portion 32 may be higher or lower than the height of the flange 5b.
  • the horizontal portion 32 of the fall prevention member 30 has been described by taking as an example the configuration including the taper receiving portion 32d facing the taper portion 5d of the flange 5b.
  • the present invention is not limited to this.
  • the taper receiving portion 32d may have another shape, or the taper receiving portion 32d may not be provided.
  • the configuration in which the protruding portion 32a is provided on the horizontal portion 32 of the fall prevention member 30 has been described as an example.
  • the configuration is not limited to this configuration, and the protruding portion 32a is not provided. There may be.
  • the structure provided in the state in which a part of horizontal part 32 extended to the + Y side was mentioned as an example as the protrusion part 32a, it demonstrated and was not limited to this structure, Other structures may be sufficient.
  • the contents of Japanese Patent Application No. 2016-196217 which is a Japanese patent application, and all the references cited in this specification are incorporated herein by reference.

Abstract

[Problem] To provide a storage shelf having a simple configuration which can prevent a container from falling from a shelf board. [Solution] A storage shelf 100 for storing a container 5, which has a flange 5b at the top of the body 5a, is equipped with a fall prevention member 30 which is disposed in front of the flange 5b and above the body 5a of the container 5 placed on a shelf board 10, and which has a space K that allows the flange 5b to pass thereover.

Description

保管棚Storage shelf
 本発明は、保管棚に関する。 The present invention relates to a storage shelf.
 ウェハ又はレチクルなどを収容するFOUP、SMIF Pod、レチクルPodなどの容器は、ストッカ等の保管棚に保管される。保管棚は、例えば、上下方向に配置された複数の棚板を有し、各棚板に容器を載置して保管する。各棚板には、容器の底部に設けられる放射状の複数の溝部に挿入するピンが設けられている。各容器は、底面に溝部を備え、棚板のピンが溝部に入り込むことによって位置決めされて棚板上に載置されている。近年、地震等の振動発生時において、容器が棚板から落下しない構成が求められている。特許文献1には、容器のボトムフランジに係止する落下防止部材を棚板に備える構成が記載されている。 Containers such as FOUP, SMIF Pod, and reticle Pod that accommodate wafers or reticles are stored in a storage shelf such as a stocker. The storage shelf has, for example, a plurality of shelf plates arranged in the vertical direction, and stores and stores containers on each shelf plate. Each shelf is provided with pins that are inserted into a plurality of radial grooves provided at the bottom of the container. Each container has a groove on the bottom surface, and is positioned by placing the pin of the shelf board into the groove, and is placed on the shelf board. In recent years, there has been a demand for a configuration in which a container does not fall from a shelf board when a vibration such as an earthquake occurs. Patent Document 1 describes a configuration in which a shelf plate is provided with a fall prevention member that is locked to a bottom flange of a container.
特開2009-196748号公報JP 2009-196748 A
 しかしながら、上記の落下防止部材では、ボトムフランジなどの形状が異なる複数種類の容器に対して共通して適用させるため、容器を出し入れする際に容器の通過を許容するための空間を大きくする必要がある。その結果、ボトムフランジと落下防止部材との隙間が大きくなり、振動発生時に容器が大きく傾いて、容器に対して大きな衝撃を与えたり、ひいては棚板から容器の落下を招く可能性がある。また、上記の落下防止部材は棚板上に大きく突出して設けられるため、その分だけ容器の保管スペースが縮小し、スペース効率が低下してしまう。 However, since the above-described fall prevention member is commonly applied to a plurality of types of containers having different shapes such as a bottom flange, it is necessary to increase the space for allowing the container to pass when the container is taken in and out. is there. As a result, the gap between the bottom flange and the fall prevention member becomes large, and the container may be greatly inclined when vibration is generated, which may give a large impact to the container or eventually cause the container to fall from the shelf. In addition, since the above-described fall prevention member is provided so as to largely protrude on the shelf plate, the storage space for the container is reduced by that amount, and the space efficiency is lowered.
 以上のような事情に鑑み、本発明は、簡単な構成で棚板から容器の落下を防止することが可能な保管棚を提供することを目的とする。 In view of the circumstances as described above, an object of the present invention is to provide a storage shelf that can prevent a container from dropping from a shelf board with a simple configuration.
 本発明に係る保管棚は、本体部の上部にフランジを有する容器を保管する保管棚であって、棚板に載置された容器の本体部の上方、かつ、フランジの前方に配置され、フランジが上方を通過可能な空間を有する落下防止部材を備える。 The storage shelf according to the present invention is a storage shelf for storing a container having a flange on the upper portion of the main body, and is disposed above the main body of the container placed on the shelf and in front of the flange. Is provided with a fall prevention member having a space that can pass through.
 また、容器は、側面に取り外し可能に取り付けられ、かつ、上部が本体部から上方に突出する蓋部を有し、落下防止部材は、蓋部の上部の後方に配置されてもよい。また、棚板は、上下方向に複数設けられ、落下防止部材は、上段の棚板から垂れ下がるように配置されたL字形状の部材であってもよい。また、落下防止部材は、上段の棚板の一部を折り曲げることにより形成されてもよい。 Further, the container may be detachably attached to the side surface, and the upper part may have a lid part protruding upward from the main body part, and the fall prevention member may be arranged behind the upper part of the lid part. Further, a plurality of shelf boards may be provided in the vertical direction, and the fall prevention member may be an L-shaped member arranged so as to hang down from the upper shelf board. The fall prevention member may be formed by bending a part of the upper shelf board.
 また、落下防止部材は、水平部と、水平部の外側から上方に延びて上段の棚板に接続する垂直部と、を有してもよい。また、水平部は、棚板に載置された容器のフランジと等しいまたはほぼ等しい高さに配置されてもよい。また、水平部は、フランジに対向する部分の形状がフランジの形状に応じて形成されてもよい。また、棚板は、前後方向と直交する左右方向の中央部分を切り欠いた切り欠き部を備え、落下防止部材は、上段の棚板の切り欠き部を挟む両側にそれぞれ設けられてもよい。 Further, the fall prevention member may have a horizontal portion and a vertical portion that extends upward from the outside of the horizontal portion and connects to the upper shelf board. Further, the horizontal portion may be disposed at a height equal to or substantially equal to the flange of the container placed on the shelf board. Moreover, the shape of the part which opposes a flange according to the shape of a flange may be formed in a horizontal part. In addition, the shelf board may include a notch part in which a central part in the left-right direction orthogonal to the front-rear direction is notched, and the fall prevention members may be provided on both sides of the notch part of the upper shelf board.
 本発明に係る保管棚は、地震等の振動により容器が前方側に倒れた場合、フランジの前方が落下防止部材に当たって、容器のズレあるいは転倒を防止する。また、容器が後方側に倒れた場合も、容器の一部が落下防止部材に当たって、容器のズレあるいは転倒を防止する。これにより、簡単な構成で棚板から容器の落下を防止することができる。また、上方にフランジを通過させるための空間を有するため、容器を棚板に移載する際にフランジまたは容器の本体部が落下防止部材と干渉することを回避でき、落下防止部材が容器移載の支障とならない。 The storage shelf according to the present invention prevents the container from slipping or overturning when the front of the flange hits the fall prevention member when the container falls forward due to vibration such as an earthquake. In addition, even when the container falls to the rear side, a part of the container hits the fall preventing member to prevent the container from being displaced or toppled. Thereby, a container can be prevented from dropping from the shelf board with a simple configuration. In addition, since there is a space for allowing the flange to pass upward, it is possible to avoid the flange or the main body of the container from interfering with the fall prevention member when the container is transferred to the shelf board. It will not be a hindrance.
 また、容器が蓋部を有し、落下防止部材が蓋部の上部の後方に配置される場合、容器が背面側に倒れた際においても、落下防止部材が蓋部の上部あるいは容器の本体部の上面に当たって、容器のズレあるいは転倒を防止し、棚板からの容器の落下を確実に防止することができる。また、棚板が、上下方向に複数設けられ、落下防止部材が、上段の棚板から垂れ下がるように配置されたL字形状の部材である場合、簡単な構成で容易に落下防止部材を形成できる。また、落下防止部材が、上段の棚板の一部を折り曲げることにより形成される場合、取り付け具等を用いることなく、落下防止部材を容易に形成できる。 In addition, when the container has a lid portion and the fall prevention member is arranged behind the upper portion of the lid portion, the fall prevention member is placed on the upper portion of the lid portion or the main body portion of the container even when the container falls to the back side. The container can be prevented from slipping or falling, and the container can be reliably prevented from falling from the shelf board. Further, when a plurality of shelf boards are provided in the vertical direction and the fall prevention member is an L-shaped member arranged so as to hang down from the upper shelf board, the fall prevention member can be easily formed with a simple configuration. . Moreover, when a fall prevention member is formed by bending a part of upper shelf board, a fall prevention member can be easily formed, without using a fixture.
 また、落下防止部材が、水平部と、水平部の外側から上方に延びて上段の棚板に接続する垂直部と、を有する場合、垂直部によってフランジが通過する空間を容易に形成できる。また、水平部が、棚板に載置された容器のフランジと等しいまたはほぼ等しい高さに配置される場合、容器が前方に倒れた際に水平部によってフランジをより確実に支持することができる。また、水平部の、フランジに対向する部分の形状がフランジの形状に応じて形成される場合、水平部をフランジの近傍に配置することができる。また、棚板が、前後方向と直交する左右方向の中央部分を切り欠いた切り欠き部を備え、落下防止部材が、上段の棚板の切り欠き部を挟む両側にそれぞれ設けられる場合、一対の落下防止部材を用いることにより容器の落下をより確実に防止できる。 Also, when the fall prevention member has a horizontal part and a vertical part that extends upward from the outside of the horizontal part and connects to the upper shelf, a space through which the flange passes can be easily formed by the vertical part. Further, when the horizontal portion is disposed at a height equal to or substantially equal to the flange of the container placed on the shelf plate, the flange can be more reliably supported by the horizontal portion when the container falls forward. . Further, when the shape of the portion of the horizontal portion facing the flange is formed according to the shape of the flange, the horizontal portion can be disposed in the vicinity of the flange. Further, in the case where the shelf plate includes a notch portion in which a central portion in the left-right direction orthogonal to the front-rear direction is cut out, and the fall prevention members are provided on both sides sandwiching the notch portion of the upper shelf plate, By using the fall prevention member, it is possible to more reliably prevent the container from dropping.
本実施形態に係る保管棚の一例を示す図である。It is a figure which shows an example of the storage shelf which concerns on this embodiment. 保管棚の側面図である。It is a side view of a storage shelf. 保管棚の正面図である。It is a front view of a storage shelf. 保管棚の平面図である。It is a top view of a storage shelf. 落下防止部材の一例を拡大して示す斜視図である。It is a perspective view which expands and shows an example of a fall prevention member. 保管棚に容器を移載する作業の一例を示し、(A)は容器が落下防止部材を通過する前の状態を示す図、(B)は容器が落下防止部材を通過した後の状態を示す図、(C)は容器を載置した状態を示す図である。An example of the operation | work which transfers a container to a storage shelf is shown, (A) is a figure which shows the state before a container passes a fall prevention member, (B) shows the state after a container passes the fall prevention member. FIG. 3C is a diagram showing a state where the container is placed. 保管棚に保管された容器を示し、(A)は容器が前方に倒れた状態を示す図、(B)は容器が後方に倒れた状態を示す図である。The container stored on the storage shelf is shown, (A) is a view showing a state in which the container has fallen forward, and (B) is a view showing a state in which the container has fallen backward.
 以下、実施形態について図面を参照しながら説明する。また、図面においては実施形態を説明するため、一部分を大きくまたは強調して記載するなど適宜縮尺を変更して表現している。以下の各図において、XYZ座標系を用いて図中の方向を説明する。このXYZ座標系においては、鉛直方向をZ方向とし、水平方向をX方向、Y方向とする。X方向、Y方向及びZ方向のそれぞれは、図中の矢印の方向が+方向であり、矢印の方向とは反対の方向が-方向であるとして説明する。 Hereinafter, embodiments will be described with reference to the drawings. Further, in the drawings, in order to describe the embodiment, the scale is appropriately changed and expressed by partially enlarging or emphasizing the description. In the following drawings, directions in the drawings will be described using an XYZ coordinate system. In this XYZ coordinate system, the vertical direction is the Z direction, and the horizontal direction is the X direction and the Y direction. In each of the X direction, the Y direction, and the Z direction, the direction of the arrow in the figure is the + direction, and the direction opposite to the direction of the arrow is the − direction.
 図1は、本実施形態に係る保管棚100の一例を概略的に示す図である。図2は、保管棚100の側面図である。図3は、保管棚100の正面図である。図4は、保管棚100の平面図である。図1から図4に示すように、保管棚100は、例えば、複数の容器5を保管する自動倉庫、または、処理装置の近傍に配置されて、あるいは天井搬送車の走行経路に沿って配置されて容器5を保管する保管装置、などである。容器5は、例えば、半導体素子の製造に用いられるウェハ、又はレチクルなどの物品を収容するFOUPを図示しているが、これに限定されず、SMIF Pod、レチクルPodなどでもよい。本実施形態では、容器5は、本体部5aと、フランジ5bと、蓋部5cとを有する。 FIG. 1 is a diagram schematically illustrating an example of a storage shelf 100 according to the present embodiment. FIG. 2 is a side view of the storage shelf 100. FIG. 3 is a front view of the storage shelf 100. FIG. 4 is a plan view of the storage shelf 100. As shown in FIGS. 1 to 4, the storage shelf 100 is disposed, for example, in an automatic warehouse that stores a plurality of containers 5, in the vicinity of a processing device, or along a traveling route of a ceiling transport vehicle. A storage device for storing the container 5. For example, the container 5 is a wafer or a FOUP that accommodates an article such as a reticle used for manufacturing a semiconductor element, but is not limited thereto, and may be a SMIF Pod, a reticle Pod, or the like. In the present embodiment, the container 5 includes a main body portion 5a, a flange 5b, and a lid portion 5c.
 本体部5aは、内部に物品を収容可能な空間部を備える例えば箱状であって、前方側の側面に開口部を有する。本体部5aにおいては、開口部を介して物品を収容及び取り出し可能である。フランジ5bは、本体部5aの上部に配置される。フランジ5bは、例えば矩形の板状に形成され、角部にはテーパ部(面取り部あるいは切り欠き部)5dが設けられる(図5参照)。フランジ5bは、フランジ固定部5eを介して本体部5aの上面に固定される。したがって、フランジ固定部5eの高さの分だけ、フランジ5bと本体部5aとの間に間隔が生じた状態となっている。 The main body 5a has, for example, a box shape with a space that can accommodate articles therein, and has an opening on the front side surface. The main body 5a can store and take out articles through the opening. The flange 5b is disposed at the upper part of the main body 5a. The flange 5b is formed in, for example, a rectangular plate shape, and a tapered portion (chamfered portion or notched portion) 5d is provided at a corner (see FIG. 5). The flange 5b is fixed to the upper surface of the main body portion 5a via the flange fixing portion 5e. Therefore, the gap is generated between the flange 5b and the main body 5a by the height of the flange fixing portion 5e.
 蓋部5cは、本体部5aの開口部を閉塞するように取り付けられ、本体部5aに対して取り外し可能である。蓋部5cは、上部が本体部5aから上方に突出している。なお、蓋部5cが本体部5aから上方に突出する場合、この突出する部分をカバーする部分が本体部5aに設けられてもよい。 The lid 5c is attached so as to close the opening of the main body 5a, and is removable from the main body 5a. The upper part of the lid part 5c protrudes upward from the main body part 5a. In addition, when the cover part 5c protrudes upwards from the main-body part 5a, the part which covers this protruding part may be provided in the main-body part 5a.
 図1から図4に示すように、保管棚100は、複数の棚板10と、柱部20と、落下防止部材30とを備える。また、保管棚100は、棚板10に容器5を載置した際に容器5内にパージガスを供給する不図示の複数のパージ装置を備えてもよく、また、容器5を移載するための移載装置(例えば、スタッカクレーン等)を備えてもよい。 As shown in FIG. 1 to FIG. 4, the storage shelf 100 includes a plurality of shelf boards 10, a column part 20, and a fall prevention member 30. Further, the storage shelf 100 may include a plurality of purge devices (not shown) for supplying purge gas into the container 5 when the container 5 is placed on the shelf board 10, and for transferring the container 5. A transfer device (for example, a stacker crane) may be provided.
 棚板10は、図2及び図3に示すように、上下方向(Z方向)に複数段並んで配置される。各棚板10のそれぞれは、ほぼ水平方向に配置され、上下方向にほぼ等間隔で配置されている。なお、棚板10は、上下方向に複数段並べられ、かつ、横方向(X方向)にも複数並べて配置されてもよい。また、棚板10は、一段だけ設けられてもよい。 As shown in FIGS. 2 and 3, the shelf board 10 is arranged in a plurality of stages in the vertical direction (Z direction). Each of the shelf boards 10 is disposed in a substantially horizontal direction and is disposed at substantially equal intervals in the vertical direction. Note that the shelf boards 10 may be arranged in a plurality of stages in the up-down direction and arranged in a plurality in the horizontal direction (X direction). Further, only one shelf plate 10 may be provided.
 複数の棚板10は、図2に示すように、ボルト等の固定部材13により柱部20に固定されている。複数の棚板10は、それぞれ、切り欠き部11(図1参照)と、載置部12とを有する。切り欠き部11は、棚板10のうち前後方向(Y方向)と直交する左右方向(X方向)の中央部分を切り欠いて設けられる。切り欠き部11は、移載装置40(図6参照)の一部(容器5を載置する部分)が上下方向に通過可能な大きさに設けられる。 The plurality of shelf boards 10 are fixed to the column part 20 by fixing members 13 such as bolts as shown in FIG. Each of the plurality of shelf boards 10 has a notch portion 11 (see FIG. 1) and a placement portion 12. The cutout portion 11 is provided by cutting out the central portion of the shelf board 10 in the left-right direction (X direction) orthogonal to the front-rear direction (Y direction). The cutout portion 11 is provided in such a size that a part (portion on which the container 5 is placed) of the transfer device 40 (see FIG. 6) can pass in the vertical direction.
 載置部12は、図4に示すように、前後方向に延びており、切り欠き部11を挟んで左右に配置される。載置部12は、金属等の材料により板状に形成され、左右方向の外側の端辺側が下方(-Z方向)に折り曲げられている。切り欠き部11を挟んだ両側の載置部12は、容器5を載置可能である。載置部12は、上面に複数のピン12aを有する。ピン12aは、容器5が載置部12に載置される際に、容器5の底部に設けられる複数の放射状の溝部に挿入される。各ピン12aは、それぞれの溝部に挿入されることにより、棚板10(載置部12)に対して容器5を位置決めする。なお、載置部12は、棚板10の奥側(+Y側)の端部同士が左右方向に接続された構成であってもよい。この場合、接続部分の上面にピン12aが設けられてもよい。 As shown in FIG. 4, the mounting portion 12 extends in the front-rear direction, and is disposed on the left and right sides with the notch portion 11 interposed therebetween. The mounting portion 12 is formed in a plate shape from a material such as metal, and the outer side edge in the left-right direction is bent downward (−Z direction). The placement parts 12 on both sides of the notch part 11 can place the container 5. The mounting portion 12 has a plurality of pins 12a on the upper surface. The pins 12 a are inserted into a plurality of radial grooves provided at the bottom of the container 5 when the container 5 is placed on the placement part 12. Each pin 12a is inserted in each groove part, and positions the container 5 with respect to the shelf board 10 (mounting part 12). In addition, the structure by which the edge parts of the back | inner side (+ Y side) of the shelf board 10 were connected in the left-right direction may be sufficient as the mounting part 12. FIG. In this case, the pin 12a may be provided on the upper surface of the connection portion.
 柱部20は、例えば、X方向に一定間隔で設けられる。これら柱部20の間には棚板10が形成されてもよい。柱部20は、上下方向(Z方向)に延びており、各棚板10の左右を挟むように配置される。柱部20は、棚板10のうち奥側(+Y側)の端部を支持する。なお、柱部20は、棚板10の前側(-Y側)の側方を支持するように配置されてもよい。また、棚板10は、柱部20に支持されることに限定されず、例えば、パネル等に取り付けられてもよい。 The pillars 20 are provided at regular intervals in the X direction, for example. A shelf board 10 may be formed between the pillar portions 20. The column portion 20 extends in the up-down direction (Z direction) and is disposed so as to sandwich the left and right sides of each shelf board 10. The column portion 20 supports an end portion on the back side (+ Y side) of the shelf board 10. Note that the column portion 20 may be disposed so as to support the front side (−Y side) of the shelf board 10. Moreover, the shelf board 10 is not limited to being supported by the column part 20, For example, you may attach to a panel etc.
 落下防止部材30は、容器5が前方に倒れた際に容器5の一部、例えばフランジ5b等を支持することにより、容器5がこれ以上前方に倒れるのを規制し、棚板10から落下することを防止する。落下防止部材30は、図1あるいは図3、図4に示すように、棚板10のうち切り欠き部11を挟む両側の載置部12にそれぞれ設けられる。また、落下防止部材30は、図1から図3に示すように、容器5が載置される棚板10に対して上段の棚板10から垂れ下がるように設けられる。落下防止部材30は、例えば、載置部12を構成する板状部材の一部を下方に折り曲げた状態で設けられる。 The fall prevention member 30 supports a part of the container 5 such as the flange 5b when the container 5 falls forward, thereby restricting the container 5 from falling further forward and falling from the shelf board 10. To prevent that. As shown in FIG. 1, FIG. 3, and FIG. 4, the fall prevention member 30 is provided on each of the placement parts 12 on both sides of the shelf plate 10 with the notch part 11 interposed therebetween. Moreover, the fall prevention member 30 is provided so that it may hang down from the upper shelf board 10 with respect to the shelf board 10 in which the container 5 is mounted, as shown in FIGS. The fall prevention member 30 is provided, for example, in a state in which a part of the plate-like member constituting the placement unit 12 is bent downward.
 落下防止部材30は、垂直部31及び水平部32を有する。垂直部31は、棚板10の載置部12に接続され、下方(-Z方向)に延びる部分である。水平部32は、垂直部31の下端に設けられ、水平面(XY平面)に平行またはほぼ平行に配置される。2つの水平部32は、互いに向き合うように形成される。落下防止部材30は、前後方向から見ると、上段の棚板10から垂れ下がるように配置されたL字形状の部材である。 The fall prevention member 30 has a vertical part 31 and a horizontal part 32. The vertical portion 31 is a portion connected to the placement portion 12 of the shelf board 10 and extending downward (−Z direction). The horizontal portion 32 is provided at the lower end of the vertical portion 31, and is disposed in parallel or substantially parallel to the horizontal plane (XY plane). The two horizontal portions 32 are formed so as to face each other. The fall prevention member 30 is an L-shaped member arranged so as to hang down from the upper shelf 10 when viewed from the front-rear direction.
 水平部32は、図2に示すように、例えば、載置部12からの高さ(Z方向の距離)がフランジ5bと等しいまたはほぼ等しくなる位置に配置される。したがって、水平部32は、容器5が棚板10の載置部12に載置された状態において、本体部5aの上方(+Z側)、かつ、フランジ5bの前方(-Y側)に位置する。これにより、容器5が前方に倒れた際に、水平部32がフランジ5bに当たり、容器5がこれ以上前方側に倒れないように支持することが可能となっている。 As shown in FIG. 2, the horizontal portion 32 is disposed, for example, at a position where the height from the placement portion 12 (distance in the Z direction) is equal to or substantially equal to the flange 5b. Accordingly, the horizontal portion 32 is located above the main body portion 5a (+ Z side) and in front of the flange 5b (−Y side) in a state where the container 5 is placed on the placement portion 12 of the shelf board 10. . Thereby, when the container 5 falls forward, the horizontal part 32 hits the flange 5b, and it is possible to support the container 5 so that it does not fall further forward.
 なお、垂直部31及び水平部32の厚さ(板厚)は、任意である。ただし、水平部32は、容器5が移載される際に、本体部5aの上面とフランジ5bの下面との間の部分の通過を許容する必要がある。そのため、垂直部31及び水平部32の厚さは、本体部5aとフランジ5bとの間隔より小さくなるように設定される。 Note that the thickness (plate thickness) of the vertical portion 31 and the horizontal portion 32 is arbitrary. However, the horizontal portion 32 needs to allow passage of a portion between the upper surface of the main body portion 5a and the lower surface of the flange 5b when the container 5 is transferred. Therefore, the thickness of the vertical part 31 and the horizontal part 32 is set so that it may become smaller than the space | interval of the main-body part 5a and the flange 5b.
 水平部32の上方には、容器5を棚板10に収容される際、または容器5を棚板10から取り出される際に、フランジ5bが通過可能な空間Kが形成される。空間Kが設けられることにより、容器5を棚板10に対して移載される際に、フランジ5b又は本体部5aが落下防止部材30と干渉することを回避でき、落下防止部材30が容器5の移載の支障とならない。また、2つの水平部32の間隔は、フランジ固定部5eの幅よりも大きく設定されている。これにより、フランジ5bが水平部32の上方の空間Kを通過する際に、フランジ固定部5eが2つの水平部32の間を通過することができ、フランジ固定部5eが水平部32に干渉することを回避できる。 A space K through which the flange 5b can pass when the container 5 is accommodated in the shelf board 10 or when the container 5 is taken out of the shelf board 10 is formed above the horizontal portion 32. By providing the space K, it is possible to avoid the flange 5b or the main body portion 5a from interfering with the fall prevention member 30 when the container 5 is transferred to the shelf board 10, and the fall prevention member 30 can be Will not hinder the transfer of Further, the interval between the two horizontal portions 32 is set larger than the width of the flange fixing portion 5e. Thereby, when the flange 5b passes through the space K above the horizontal portion 32, the flange fixing portion 5e can pass between the two horizontal portions 32, and the flange fixing portion 5e interferes with the horizontal portion 32. You can avoid that.
 水平部32は、図4に示すように、棚板10の奥側(+Y側)に突出する突出部32aを有する。図5は、落下防止部材30の一例を拡大して示す斜視図である。突出部32aは、図5に示すように、フランジ5bの一部と対向して配置される。突出部32aは、例えば、水平部32の内側の端部が奥側(+Y方向)に延びた形状となっている。 As shown in FIG. 4, the horizontal portion 32 has a protruding portion 32 a that protrudes to the back side (+ Y side) of the shelf board 10. FIG. 5 is an enlarged perspective view showing an example of the fall prevention member 30. As shown in FIG. 5, the protruding portion 32a is disposed to face a part of the flange 5b. The protrusion 32a has, for example, a shape in which the inner end of the horizontal portion 32 extends to the back side (+ Y direction).
 突出部32aのうち、フランジ5bのテーパ部5dと対向する部分には、このテーパ部5dに対応する形状のテーパ受け部32dが形成される。水平部32のテーパ受け部32dは、フランジ5bのテーパ部5dに対して所定の隙間を空けて近傍に配置され、かつテーパ部5dと同一またはほぼ同一の高さに配置される。水平部32は、突出部32a及びテーパ受け部32dを有することで、よりフランジ5bの近傍に配置することが可能となっている。ただし、上記した所定の隙間は、容器5の個体差によるフランジ5bの大きさの誤差、及び移載装置40によって容器5を移載する際の移載誤差などを考慮して、フランジ5bとテーパ受け部32dとが干渉しないように、例えば、数mmから数cm程度に設定される。 A tapered receiving portion 32d having a shape corresponding to the tapered portion 5d is formed in a portion of the protruding portion 32a facing the tapered portion 5d of the flange 5b. The taper receiving portion 32d of the horizontal portion 32 is disposed in the vicinity with a predetermined gap with respect to the taper portion 5d of the flange 5b, and is disposed at the same or substantially the same height as the taper portion 5d. Since the horizontal portion 32 includes the protruding portion 32a and the taper receiving portion 32d, the horizontal portion 32 can be arranged closer to the flange 5b. However, the predetermined gap described above is tapered with respect to the flange 5b in consideration of an error in the size of the flange 5b due to individual differences between the containers 5 and a transfer error when the container 5 is transferred by the transfer device 40. In order not to interfere with the receiving part 32d, for example, it is set to about several mm to several cm.
 また、図4に示すように、2つの落下防止部材30は、YZ面に対して対称に設けられている。したがって、各落下防止部材30は、それぞれテーパ受け部32dを有している。例えば、容器5が前方に倒れた場合は、フランジ5bの2つのテーパ部5dがそれぞれテーパ受け部32dに受け止められる。これにより、容器5の前方への倒れを規制し、かつ、フランジ5bが2つのテーパ受け部32dに入り込んだ状態となって、容器5が左右方向(X方向)に移動するのを抑制することになる。 Further, as shown in FIG. 4, the two fall prevention members 30 are provided symmetrically with respect to the YZ plane. Accordingly, each fall prevention member 30 has a taper receiving portion 32d. For example, when the container 5 falls forward, the two taper portions 5d of the flange 5b are received by the taper receiving portions 32d, respectively. As a result, the container 5 is prevented from falling forward, and the flange 5b enters the two taper receiving portions 32d, thereby suppressing the container 5 from moving in the left-right direction (X direction). become.
 このように、フランジ5bの2つのテーパ部5dを2つのテーパ受け部32dで受け止めることにより、保管棚100が、前後方向の揺れに左右方向の揺れが加わった場合など、揺れの方向が変化したときでも容器5が倒れることを抑制可能となる。ただし、落下防止部材30にテーパ受け部32dを設けるか否かは任意であり、テーパ受け部32dが設けられなくてもよい。 In this way, by receiving the two taper portions 5d of the flange 5b with the two taper receiving portions 32d, the direction of the shaking of the storage shelf 100 is changed, for example, when the shaking in the left-right direction is added to the shaking in the front-rear direction. Even when the container 5 falls, it can be suppressed. However, whether or not the taper receiving portion 32d is provided on the fall prevention member 30 is arbitrary, and the taper receiving portion 32d may not be provided.
 図6は、上記した保管棚100に対して、移載装置40により容器5を収容する際の動作の一例を示す図である。図6では、柱部20等の一部の構成を省略している。容器5を収容する場合、まず、図6(A)に示すように、移載装置40に容器5を載置した状態で、上下の棚板10の間に容器5を挿入する。 FIG. 6 is a diagram illustrating an example of an operation when the container 5 is accommodated by the transfer device 40 with respect to the storage shelf 100 described above. In FIG. 6, a part of the configuration of the column portion 20 and the like is omitted. When the container 5 is accommodated, first, as shown in FIG. 6A, the container 5 is inserted between the upper and lower shelf boards 10 with the container 5 placed on the transfer device 40.
 このとき、本体部5aの上面(高さH1)とフランジ5bの下面(高さH2)との間に水平部32が位置するように、容器5の高さ位置(Z方向の位置)が調整されて、容器5が+Y方向に移動する。これにより、フランジ5bが水平部32の上方の空間Kを通過し、ほぼ同時にフランジ固定部5eが2つの水平部32の間を通過して、容器5が奥側に移動する。このように、容器5が落下防止部材30に干渉することなく、棚板10の上方に容器5の挿入が完了する。 At this time, the height position (position in the Z direction) of the container 5 is adjusted so that the horizontal portion 32 is positioned between the upper surface (height H1) of the main body 5a and the lower surface (height H2) of the flange 5b. As a result, the container 5 moves in the + Y direction. As a result, the flange 5b passes through the space K above the horizontal portion 32, and the flange fixing portion 5e passes between the two horizontal portions 32 almost simultaneously, and the container 5 moves to the back side. Thus, the insertion of the container 5 is completed above the shelf board 10 without the container 5 interfering with the fall prevention member 30.
 容器5が挿入位置に配置された場合、Y方向について、フランジ5bと蓋部5cとの間に落下防止部材30の水平部32が配置された状態となる。なお、図6(A)に示すように、容器5は、移載装置40に載置されて棚板10の上方に挿入されるが、棚板10には、上記したようにピン12aが上方に突出しているため、挿入する際の容器5の高さは、容器5の下部がピン12aと干渉しない高さに設定されている。 When the container 5 is disposed at the insertion position, the horizontal portion 32 of the fall prevention member 30 is disposed between the flange 5b and the lid portion 5c in the Y direction. As shown in FIG. 6A, the container 5 is placed on the transfer device 40 and inserted above the shelf board 10. The shelf board 10 has the pins 12a above as described above. Therefore, the height of the container 5 at the time of insertion is set to a height at which the lower part of the container 5 does not interfere with the pin 12a.
 次に、図6(B)に示すように、移載装置40を下降させて切り欠き部11を通過させる。移載装置40により切り欠き部11を通過させることにより、容器5は棚板10の載置部12に載置され、移載装置40から棚板10への移載が完了する。なお、棚板10に容器5が載置された際、容器5の底部に設けられた不図示の溝部にピン12aが挿入され、容器5が載置部12に対して水平方向(X方向及びY方向)に位置決めされる。また、水平部32がフランジ5bと蓋部5cとの間に配置された状態で容器5が下降するため、水平部32と容器5(フランジ5b等)とが干渉することなく、図6(C)に示すように、容器5が載置部12に載置される。 Next, as shown in FIG. 6 (B), the transfer device 40 is lowered to pass through the notch 11. By allowing the transfer device 40 to pass through the cutout portion 11, the container 5 is placed on the placement portion 12 of the shelf plate 10, and the transfer from the transfer device 40 to the shelf plate 10 is completed. When the container 5 is placed on the shelf board 10, the pin 12 a is inserted into a groove portion (not shown) provided at the bottom of the container 5, and the container 5 is placed in the horizontal direction (X direction and Positioned in the Y direction). Further, since the container 5 is lowered in a state where the horizontal portion 32 is disposed between the flange 5b and the lid portion 5c, the horizontal portion 32 and the container 5 (flange 5b and the like) do not interfere with each other, and FIG. ), The container 5 is placed on the placement unit 12.
 容器5が載置部12に載置された状態において、水平部32は、Y方向においてフランジ5bと蓋部5cとの間に配置され、フランジ5bとほぼ等しい高さ(Z方向の位置)に配置される。なお、容器5を載置部12に載置した後の移載装置40は、例えば、下降した高さのまま-Y方向に移動して保管棚100から離脱する。 In a state where the container 5 is placed on the placement portion 12, the horizontal portion 32 is disposed between the flange 5b and the lid portion 5c in the Y direction, and has a height (position in the Z direction) substantially equal to the flange 5b. Be placed. The transfer device 40 after placing the container 5 on the placement unit 12 moves in the −Y direction with the lowered height, for example, and leaves the storage shelf 100.
 また、載置部12に載置された容器5を移載装置40で取り出す場合は、上述した説明と逆の動作が行われる。例えば、移載装置40は、対象の容器5より低い高さで棚板10の下方に差し込まれる。続いて、移載装置40の一部を、切り欠き部11を介して上昇させることにより、容器5は、載置部12から移載装置40に移載される。続いて、移載装置40は、容器5のフランジ5bが水平部32より高く、かつ水平部32が本体部5aの上部より高い位置で上昇を停止し、この高さを維持しながら-Y方向に移動することにより、図6(A)に示す状態となり、容器5を保管棚100から取り出すことができる。 Further, when the container 5 placed on the placement unit 12 is taken out by the transfer device 40, an operation opposite to that described above is performed. For example, the transfer device 40 is inserted below the shelf board 10 at a height lower than the target container 5. Subsequently, the container 5 is transferred from the placement unit 12 to the transfer device 40 by raising a part of the transfer device 40 through the notch 11. Subsequently, the transfer device 40 stops rising at a position where the flange 5b of the container 5 is higher than the horizontal part 32 and the horizontal part 32 is higher than the upper part of the main body part 5a, and the −Y direction while maintaining this height. 6A, the container 5 can be taken out from the storage shelf 100.
 図7は、保管棚100に保管された容器5を示し、(A)は容器5が前方に倒れた状態を示す図、(B)は容器5が後方に倒れた状態を示す図である。地震等により保管棚100が前後方向に揺れた場合、容器5は、底面の不図示の溝部にピン12aが入っており、水平方向に本体部5aの底部が載置部12に留められた状態となっているため、前方側あるいは後方側に倒れるように傾く。例えば、図7(A)に示すように、容器5が前方側に倒れた場合、落下防止部材30の水平部32がフランジ5bの前方に配置されているので、フランジ5bが水平部32に当たって容器5が受け止められることになる。これにより、容器5が載置部12上で前方側にズレたり、または、容器5が前方に倒れて棚板10から落下するのを防止することができる。 FIG. 7 shows the container 5 stored in the storage shelf 100, (A) shows a state in which the container 5 has fallen forward, and (B) shows a state in which the container 5 has fallen backward. When the storage shelf 100 shakes in the front-rear direction due to an earthquake or the like, the container 5 has a pin 12a in a groove portion (not shown) on the bottom surface, and the bottom portion of the main body portion 5a is fastened to the mounting portion 12 in the horizontal direction. Therefore, it tilts so as to fall forward or backward. For example, as shown in FIG. 7A, when the container 5 falls to the front side, the horizontal portion 32 of the fall prevention member 30 is disposed in front of the flange 5b, so that the flange 5b hits the horizontal portion 32 and the container 5 will be accepted. Thereby, it is possible to prevent the container 5 from being shifted forward on the placement portion 12 or the container 5 from falling forward and falling from the shelf board 10.
 また、例えば、図7(B)に示すように、容器5が後方側に倒れた場合、落下防止部材30の水平部32が蓋部5cの上部の後方に配置されるため、蓋部5cの上部が水平部32に当たって容器5が受け止められることになる。これにより、容器5が載置部12上で後方側にズレたり、または、容器5が後方に倒れるのを防止することができる。なお、図7(B)では、蓋部5cの上部が水平部32に当たる例を示しているが、これに限定されない。容器5の本体部5aの上面が水平部32に当たってもよい。この場合においても上記と同様に容器5が後方に倒れるのを防止することができる。 Further, for example, as shown in FIG. 7B, when the container 5 falls to the rear side, the horizontal portion 32 of the fall prevention member 30 is disposed behind the upper portion of the lid portion 5c. The upper part hits the horizontal part 32 and the container 5 is received. Thereby, it can prevent that the container 5 shifts | deviates back on the mounting part 12, or the container 5 falls back. FIG. 7B shows an example in which the upper part of the lid 5c hits the horizontal part 32, but the present invention is not limited to this. The upper surface of the main body portion 5 a of the container 5 may hit the horizontal portion 32. In this case as well, the container 5 can be prevented from falling backward.
 このように、本実施形態に係る保管棚100によれば、容器5が前方側に倒れた場合、フランジ5bが落下防止部材30に当たって、容器5のズレあるいは転倒が防止される。また、容器5が後方側に倒れた場合も、容器5の一部が落下防止部材30に当たって、容器5のズレあるいは転倒が防止される。これにより、簡単な構成で棚板10から容器5の落下を防止することができる。また、上方にフランジ5bを通過させるための空間Kを有するため、容器5を棚板10に対して移載する際にフランジ5bまたは容器5の本体部5aが落下防止部材30と干渉することを回避でき、落下防止部材30が容器移載の支障とならない。 Thus, according to the storage shelf 100 according to the present embodiment, when the container 5 falls forward, the flange 5b hits the fall preventing member 30 and the container 5 is prevented from being displaced or toppled. In addition, even when the container 5 falls to the rear side, a part of the container 5 hits the fall preventing member 30 and the container 5 is prevented from being displaced or toppled. Thereby, the fall of the container 5 from the shelf board 10 can be prevented with a simple configuration. Moreover, since it has the space K for allowing the flange 5b to pass upward, the flange 5b or the main body 5a of the container 5 interferes with the fall prevention member 30 when the container 5 is transferred to the shelf board 10. This can be avoided, and the fall prevention member 30 does not hinder container transfer.
 また、本実施形態に係る保管棚100は、落下防止部材30が容器5の蓋部5cの上部の後方に配置されるため、容器5が後方側に倒れた際においても、落下防止部材30が蓋部の5c上部あるいは容器5の本体部5aの上面に当たって、容器5のズレあるいは転倒が防止され、棚板10からの容器5の落下を確実に防止することができる。容器5には、蓋部5cの上部が本体部5aの上部から突出しないタイプも想定される。このような容器5であっても、容器5が後方側に倒れた際、本体部5aの上面が落下防止部材30に当たることで容器5のズレあるいは転倒が防止される。 Moreover, since the fall prevention member 30 is arrange | positioned at the back of the upper part of the cover part 5c of the container 5 in the storage shelf 100 which concerns on this embodiment, even when the container 5 falls back, the fall prevention member 30 is The container 5 is prevented from being displaced or overturned by hitting the upper part of the lid part 5c or the main body part 5a of the container 5, and the container 5 can be reliably prevented from dropping from the shelf board 10. The container 5 may be of a type in which the upper part of the lid part 5c does not protrude from the upper part of the main body part 5a. Even in such a container 5, when the container 5 falls to the rear side, the upper surface of the main body portion 5 a hits the fall prevention member 30, thereby preventing the container 5 from being displaced or toppled.
 以上、本発明の実施形態について説明したが、本発明の技術範囲は、上記した実施形態に限定されない。例えば、上記した実施形態では、棚板10が上下に複数設けられる保管棚100を例に挙げて説明したが、棚板10が一段だけの保管棚であってもよい。また、落下防止部材30が切り欠き部11を挟む両側の載置部12にそれぞれ配置された構成を例に挙げて説明したが、これに限定されない。例えば、いずれか一方の載置部12のみに落下防止部材30が配置された構成であってもよい。 As mentioned above, although embodiment of this invention was described, the technical scope of this invention is not limited to above-described embodiment. For example, in the above-described embodiment, the storage shelf 100 in which a plurality of the shelf boards 10 are provided above and below is described as an example, but the shelf board 10 may be a storage shelf with only one stage. Moreover, although the description has been given of the configuration in which the fall prevention member 30 is disposed on each of the placement parts 12 on both sides of the notch part 11, the present invention is not limited thereto. For example, the structure by which the fall prevention member 30 is arrange | positioned only in any one mounting part 12 may be sufficient.
 また、上記した実施形態では、落下防止部材30が、上段の棚板10から垂れ下がるように配置されたL字形状の部材であるが、この形状に限定されず、載置部12に載置された容器5のフランジ5bの前方に配置可能であれば形態は任意である。例えば、落下防止部材30は、柱部20に取り付けられてもよいし、L字形状以外の形状(例えば、湾曲した形状)が用いられてもよい。 In the above-described embodiment, the fall prevention member 30 is an L-shaped member disposed so as to hang down from the upper shelf board 10, but is not limited to this shape, and is placed on the placement portion 12. The form is arbitrary as long as it can be arranged in front of the flange 5b of the container 5. For example, the fall prevention member 30 may be attached to the column part 20, and shapes (for example, curved shape) other than L shape may be used.
 また、上記した実施形態では、落下防止部材30が、上段の棚板10の一部を折り曲げて形成されるが、これに限定されない。例えば、棚板10と別個に形成された金属製または樹脂製等の落下防止部材30が、固定ネジ等の締結部材によって棚板10に取り付けられてもよいし、棚板10に溶接等によって固定されてもよい。固定ネジ等で落下防止部材30を棚板10に取り付ける場合、落下防止部材30には予め長穴または複数の貫通穴が形成されて、固定ネジ等による落下防止部材30の固定位置を水平方向に調整可能としてもよい。これにより、2つの落下防止部材30どうしの水平方向の間隔を容易に調整することができる。 In the above-described embodiment, the fall prevention member 30 is formed by bending a part of the upper shelf board 10, but the present invention is not limited to this. For example, a metal or resin fall prevention member 30 formed separately from the shelf board 10 may be attached to the shelf board 10 by a fastening member such as a fixing screw, or fixed to the shelf board 10 by welding or the like. May be. When the fall prevention member 30 is attached to the shelf board 10 with a fixing screw or the like, a long hole or a plurality of through holes are formed in the fall prevention member 30 in advance, and the fixing position of the fall prevention member 30 with the fixing screw or the like is set in the horizontal direction. It may be adjustable. Thereby, the horizontal space | interval of the two fall prevention members 30 can be adjusted easily.
 また、上記した実施形態では、落下防止部材30の垂直部31と水平部32とによって空間Kを形成しているが、空間Kの大きさは変更可能であってもよい。例えば、上記のように、落下防止部材30(垂直部31)の固定位置を調整することにより、空間Kの左右方向の幅を変更可能である。また、垂直部31と水平部32とを別体で構成し、水平部32が垂直部31に対して移動可能とすることにより、空間Kの上下方向の間隔を変更可能である。 Further, in the above-described embodiment, the space K is formed by the vertical portion 31 and the horizontal portion 32 of the fall prevention member 30, but the size of the space K may be changeable. For example, as described above, the width in the left-right direction of the space K can be changed by adjusting the fixing position of the fall prevention member 30 (vertical portion 31). Moreover, the vertical part 31 and the horizontal part 32 are comprised separately, and the space | interval of the up-down direction of the space K can be changed by enabling the horizontal part 32 to move with respect to the vertical part 31.
 また、上記した実施形態では、保管棚100に落下防止部材30が設けられた構成を示しているが、容器5の落下等を防止するための構造が保管棚100に付加されてもよい。例えば、保管棚100に落下防止部材30が設けられ、かつ、棚板10に容器5のボトムフランジを係止する構造が付加されてもよいし、また、棚板10の載置部12の前方側を上方に傾斜させる構造が付加されてもよい。このような、複数の落下防止対策が形成されることにより、容器5の落下が確実に防止される。 In the above-described embodiment, a configuration in which the storage shelf 100 is provided with the fall prevention member 30 is shown. However, a structure for preventing the container 5 from dropping or the like may be added to the storage shelf 100. For example, the storage rack 100 may be provided with the fall prevention member 30 and a structure for locking the bottom flange of the container 5 to the shelf board 10 may be added. A structure in which the side is inclined upward may be added. By forming such a plurality of fall prevention measures, the container 5 is reliably prevented from falling.
 また、上記した実施形態では、落下防止部材30の水平部32が、棚板10に載置された容器5のフランジ5bと等しいまたはほぼ等しい高さに配置されている。このうち、ほぼ等しい高さとは、例えば、容器5が前方に倒れた際に、フランジ5bが水平部32に当たることが可能な高さである。したがって、棚板10に載置された容器5のフランジ5bと、水平部32との間隔によって水平部32の高さが決定されてもよい。例えば、水平部32は、フランジ5bの高さに対して高くてもよく、また、低くてもよい。 In the above-described embodiment, the horizontal portion 32 of the fall prevention member 30 is disposed at a height equal to or substantially equal to the flange 5 b of the container 5 placed on the shelf board 10. Among these, the almost equal height is, for example, a height at which the flange 5b can hit the horizontal portion 32 when the container 5 falls forward. Therefore, the height of the horizontal portion 32 may be determined by the distance between the flange 5 b of the container 5 placed on the shelf board 10 and the horizontal portion 32. For example, the horizontal portion 32 may be higher or lower than the height of the flange 5b.
 また、上記した実施形態では、落下防止部材30の水平部32が、フランジ5bのテーパ部5dに対向するテーパ受け部32dを備える構成を例に挙げて説明したが、これに限定されない。例えば、テーパ受け部32dが他の形状であってもよいし、テーパ受け部32dが設けられない構成であってもよい。 In the above-described embodiment, the horizontal portion 32 of the fall prevention member 30 has been described by taking as an example the configuration including the taper receiving portion 32d facing the taper portion 5d of the flange 5b. However, the present invention is not limited to this. For example, the taper receiving portion 32d may have another shape, or the taper receiving portion 32d may not be provided.
 また、上記した実施形態では、落下防止部材30の水平部32に突出部32aが設けられた構成を例に挙げて説明したが、この構成に限定されず、突出部32aが設けられない構成であってもよい。また、突出部32aとして、水平部32の一部が+Y側に伸びた状態で設けられた構成を例に挙げて説明したが、この構成に限定されず、他の構成であってもよい。また、法令で許容される限りにおいて、日本特許出願である特願2016-196217、及び本明細書で引用した全ての文献、の内容を援用して本文の記載の一部とする。 In the above-described embodiment, the configuration in which the protruding portion 32a is provided on the horizontal portion 32 of the fall prevention member 30 has been described as an example. However, the configuration is not limited to this configuration, and the protruding portion 32a is not provided. There may be. Moreover, although the structure provided in the state in which a part of horizontal part 32 extended to the + Y side was mentioned as an example as the protrusion part 32a, it demonstrated and was not limited to this structure, Other structures may be sufficient. In addition, to the extent permitted by law, the contents of Japanese Patent Application No. 2016-196217, which is a Japanese patent application, and all the references cited in this specification are incorporated herein by reference.
 K・・・空間
 5・・・容器
 5a・・・本体部
 5b・・・フランジ
 5c・・・蓋部
 5d・・・テーパ部
 5e・・・フランジ固定部
 10・・・棚板
 11・・・切り欠き部
 12・・・載置部
 12a・・・ピン
 20・・・柱部
 30・・・落下防止部材
 31・・・垂直部
 32・・・水平部
 32a・・・突出部
 32d・・・テーパ受け部
 40・・・移載装置
 100・・・保管棚
K ... Space 5 ... Container 5a ... Main body 5b ... Flange 5c ... Lid 5d ... Taper 5e ... Flange fixing part 10 ... Shelf 11 ... Notch part 12 ... Placement part 12a ... Pin 20 ... Column part 30 ... Fall prevention member 31 ... Vertical part 32 ... Horizontal part 32a ... Protrusion part 32d ... Taper receiving part 40 ... Transfer device 100 ... Storage shelf

Claims (8)

  1.  本体部の上部にフランジを有する容器を保管する保管棚であって、
     棚板に載置された前記容器の前記本体部の上方、かつ、前記フランジの前方に配置され、前記フランジが上方を通過可能な空間を有する落下防止部材を備える、保管棚。
    A storage shelf for storing a container having a flange at the top of the main body,
    A storage shelf comprising a fall prevention member disposed above the main body portion of the container placed on a shelf plate and in front of the flange, and having a space through which the flange can pass.
  2.  前記容器は、側面に取り外し可能に取り付けられ、かつ、上部が前記本体部から上方に突出する蓋部を有し、
     前記落下防止部材は、前記蓋部の上部の後方に配置される、請求項1または請求項2に記載の保管棚。
    The container has a lid part that is detachably attached to a side surface, and an upper part projects upward from the main body part,
    The storage shelf according to claim 1, wherein the fall prevention member is disposed behind the upper portion of the lid.
  3.  前記棚板は、上下方向に複数設けられ、
     前記落下防止部材は、上段の前記棚板から垂れ下がるように配置されたL字形状の部材である、請求項1または請求項2に記載の保管棚。
    A plurality of the shelf boards are provided in the vertical direction,
    The storage shelf according to claim 1 or 2, wherein the fall prevention member is an L-shaped member arranged so as to hang down from the shelf on the upper stage.
  4.  前記落下防止部材は、上段の前記棚板の一部を折り曲げることにより形成される、請求項3に記載の保管棚。 The storage shelf according to claim 3, wherein the fall prevention member is formed by bending a part of the upper shelf.
  5.  前記落下防止部材は、水平部と、前記水平部の外側から上方に延びて上段の前記棚板に接続する垂直部と、を有する、請求項3または請求項4に記載の保管棚。 The storage shelf according to claim 3 or 4, wherein the fall prevention member has a horizontal portion and a vertical portion that extends upward from the outside of the horizontal portion and connects to the upper shelf.
  6.  前記水平部は、前記棚板に載置された前記容器の前記フランジと等しいまたはほぼ等しい高さに配置される、請求項5に記載の保管棚。 The storage shelf according to claim 5, wherein the horizontal portion is disposed at a height equal to or substantially equal to the flange of the container placed on the shelf board.
  7.  前記水平部は、前記フランジに対向する部分の形状が前記フランジの形状に応じて形成される、請求項5または請求項6に記載の保管棚。 The storage shelf according to claim 5 or 6, wherein a shape of a portion of the horizontal portion facing the flange is formed according to a shape of the flange.
  8.  前記棚板は、前後方向と直交する左右方向の中央部分を切り欠いた切り欠き部を備え、
     前記落下防止部材は、上段の前記棚板の前記切り欠き部を挟む両側にそれぞれ設けられる、請求項3から請求項7のいずれか一項に記載の保管棚。
     
    The shelf board is provided with a notch portion in which a central portion in the left-right direction perpendicular to the front-rear direction is cut out,
    The storage shelf according to any one of claims 3 to 7, wherein the fall prevention member is provided on both sides of the notch portion of the upper shelf.
PCT/JP2017/026668 2016-10-04 2017-07-24 Storage shelf WO2018066208A1 (en)

Applications Claiming Priority (2)

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JP2016-196217 2016-10-04
JP2016196217 2016-10-04

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013337A1 (en) * 2009-07-29 2011-02-03 ムラテックオートメーション株式会社 Conveyor system and storage equipment
WO2011125097A1 (en) * 2010-04-02 2011-10-13 ムラテックオートメーション株式会社 Side buffer for a transport vehicle that travels along the ceiling, and transport vehicle system
JP2014049585A (en) * 2012-08-31 2014-03-17 Renesas Electronics Corp Method of manufacturing semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013337A1 (en) * 2009-07-29 2011-02-03 ムラテックオートメーション株式会社 Conveyor system and storage equipment
WO2011125097A1 (en) * 2010-04-02 2011-10-13 ムラテックオートメーション株式会社 Side buffer for a transport vehicle that travels along the ceiling, and transport vehicle system
JP2014049585A (en) * 2012-08-31 2014-03-17 Renesas Electronics Corp Method of manufacturing semiconductor device

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