TW201807768A - Substrate transfer robot, vacuum processing apparatus to precisely move a substrate even without detecting the end of arm because the quartz plate will not extend even if the supporting plate extends due to a heating treatment - Google Patents

Abstract

The present invention provides a substrate transfer robot to precisely move a substrate even without detecting the end of arm. The positioning finger part (55) of arm (40) is constituted in a manner of configuring a quartz plate (42) on a supporting plate (41). A fixed part (50) fixed at the supporting plate (41) is disposed at the root portion of quartz plate (42). The portion of quartz plate (42) other than the fixed part (50) is not fixed to the supporting plate (41). The quartz plate (42) will not extend even if the supporting plate (41) extends due to a heating treatment, so the end-side position-limiting device (56) disposed at the end of quartz plate (42) will not move in response to the thermal expansion.

Description

Board transfer robot, vacuum processing device

The present invention relates to the technical field of substrate transfer robots, and in particular, to a substrate transfer robot capable of accurately positioning a substrate.

In the past, in order to move a substrate such as a glass plate or a semiconductor wafer, a substrate transfer robot that has placed a substrate on an arm and moved the arm has been widely used.

An arm of the substrate transfer robot has a type in which the substrate is placed on a plurality of elongated fingers (axis portions) to transfer the substrate.

A tip-side stopper is provided at the end of the arm to prevent displacement of the substrate and determine the position of the substrate (Existing Document 1).

The substrate transfer robot moves the substrate in a vacuum environment from the inside of the vacuum processing chamber in the pre-process of the processing end to the inside of the vacuum processing chamber in the post-process to perform the next processing.

The substrate may be heated during the pre-treatment process. In addition, the substrate to be moved to a later step may be heated to a high temperature. When a high-temperature substrate is placed on the elongated fingers of the arm, the fingers are heated.

Since the fingers need strength, they are made of ceramic or metal.

If the finger is heated so that the temperature of the finger is increased, the finger is thermally expanded only by an amount corresponding to the thermal expansion coefficient of the material constituting the finger, and as a result, it is set at the position of the end stopper at the end of the finger Move from the root of your finger in a direction away.

Due to the increase in the number of conveyed pieces and the elapse of the conveying time (running time), the temperature of the fingers rises, and the position of the end stopper changes with the rise in temperature. Therefore, there is a vacuum treatment that is conveyed to the subsequent process. The position of the substrate of the chamber is not a constant issue.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Application Laid-Open No. 2015-82532.

The present invention has been made in order to solve the incompleteness of the above-mentioned prior art, and an object thereof is to provide a substrate transfer robot that has a small variation in the position of the end-side stopper even if the temperature of a finger portion rises.

In order to solve the above problem, the present invention is a substrate transfer robot that moves an arm on which a substrate can be arranged, wherein the arm has a palm portion and a plurality of elongated fingers, and the plurality of thin arms A long finger is provided on the palm, and a substrate can be arranged. At least one of the plurality of fingers is a positioning finger having a support plate and a quartz plate, and the support plate is fixed to the root portion. The elongated support plate of the palm portion, the quartz plate is an elongated quartz plate placed along the support plate on the support plate, and is provided on one end of the quartz plate near one end of the palm portion near the root side of the palm portion. The fixing part is provided with a distal end stopper at the other end on the distal end side far from the palm part. The fixing part is mounted on a support body composed of the palm part and the supporting plate, and the other end on the distal end side is not Mounted on the support.

Moreover, this invention is a board | substrate conveying robot with the said arm having two or more said positioning fingers.

The present invention is a substrate transfer robot in which the aforementioned quartz plate is formed by fixing a plurality of quartz members to each other.

The present invention is a substrate transfer robot in which the support plate is made of alumina.

The present invention is a vacuum processing apparatus including a transfer chamber and a vacuum processing chamber. The transfer chamber includes a substrate transfer robot that moves an arm on which a substrate can be disposed, and a vacuum tank in which the substrate transfer robot is disposed. The chamber is connected to the transfer chamber and vacuum-processes the substrate. The arm has a palm and a plurality of elongated fingers. The plurality of elongated fingers are provided on the palm. One substrate can be arranged. At least one of the fingers is a positioning finger having a support plate and a quartz plate. The support plate is an elongated support plate whose root portion is fixed to the palm. The quartz plate is on the support plate. An elongated quartz plate placed along the support plate is provided with a fixing portion at one end of the quartz plate near the root side of the palm portion, and an end at the other end of the distal end side far from the palm portion. In the side stopper, the fixing portion is mounted on a support body composed of the palm portion and the support plate, the other end on the tip side is not mounted on the support body, and the arm has two or more of the positioning finger portions.

The present invention is the vacuum processing device according to item 5 of the patent application scope, wherein the arm has two or more positioning fingers.

The present invention is a vacuum processing apparatus in which the aforementioned quartz plate is formed such that a plurality of quartz members are fixed to each other.

The present invention is a vacuum processing apparatus in which the support plate is made of alumina.

A quartz plate made of quartz is provided at the finger portion, and an end-side stopper is provided at the end of the quartz plate. Therefore, the amount of movement of the end-side stopper due to thermal expansion becomes smaller, and the positioning of the substrate becomes accurate.

10‧‧‧Vacuum processing equipment

16‧‧‧ substrate

20‧‧‧ transfer robot

21‧‧‧Vacuum tank

30‧‧‧ support

34‧‧‧ Palm

40‧‧‧ arm

41‧‧‧ support plate

42‧‧‧Quartz Plate

42 ₁ ~ 42 ₃ ‧‧‧Quartz

50‧‧‧Fixed section

51a ~ 54a, 51b ~ 54b‧‧‧finger

55‧‧‧ Positioning Finger

60‧‧‧Connection Department

FIG. 1 is a diagram for explaining a vacuum processing apparatus.

Fig. 2 is a diagram for explaining a transfer room.

FIG. 3 is a partial cross-sectional view for explaining a substrate transfer robot.

FIG. 4 is a perspective view of the substrate transfer robot.

Figure 5 is a plan view of the arm.

FIG. 6 is a plan view for explaining a state in which a substrate is placed on the arm.

FIG. 7 is a partial cross-sectional view for explaining the positioning finger.

Fig. 8 (a) is a sectional view taken along the line II in Fig. 5, Fig. 8 (b) is a sectional view taken along the line II-II in Fig. 5, and Fig. 8 (c) is an example of a fixing portion Sectional drawing, FIG.8 (d) is a top view for demonstrating a connection part.

FIG. 1 is a vacuum processing apparatus 10 that performs vacuum processing of a processing object. The vacuum processing apparatus 10 includes a transfer chamber 11, a plurality of vacuum processing chambers 12, and at least one carry-in and carry-out chamber 13.

Each of the vacuum processing chambers 12 and the loading / unloading chambers 13 are arranged around the transfer chambers 11 and are configured to allow the inside of each of the vacuum processing chambers 12 and the loading / unloading chambers 13 to be connected to the interior of the transfer chambers 11 through opening and closing gate valves. cut off.

As shown in FIG. 2, the transfer chamber 11 includes a vacuum tank 21 and a transfer robot 20.

FIG. 3 is an enlarged view of a side surface of the transfer robot 20, and FIG. 4 is a perspective view.

The transfer robot 20 includes an arm 40, a slide plate 33, a base 32, and a pillar portion 31.

The arm 40, the slide plate 33, and the base 32 are arranged inside the vacuum tank 21, and the lower part of the pillar part 31 is provided outside the vacuum tank 21, and the base 32 is placed in the vacuum tank 21 of the pillar part 31 from below The slide plate 33 and the arm 40 are mounted in this order.

The vacuum evacuation device 14 is connected to a vacuum tank of each of the chambers 11 to 13, and the vacuum evacuation device 14 is operated to evacuate the interior of each of the chambers 11 to 13. The operations of the vacuum evacuation device 14, the transfer robot 20, and the motor 23 described below are controlled by the control device 28.

The base 32 is provided on the pillar portion 31 so as to be rotatable and liftable. The slide plate 33 is fixed to the base 32. When the rotation axis inside the pillar portion 31 is rotated by the operation of the motor 23, the slide plate 33 rotates together with the base 32, and if the rotation axis moves up and down, the slide plate 33 and The base 32 moves up and down together.

The arm 40 includes a palm portion 34 and a plurality of fingers 51 a to 54 a and 51 b to 54 b provided on the palm portion 34. The palm portion 34 is made of metal or ceramic such as alumina, and the finger portions 51a to 54a and 51b to 54b include metal or ceramic members such as alumina.

The slide plate 33 is arranged horizontally, and a guide groove 49 is provided on a surface facing upward. The slide plate 33 has a rectangular shape, the guide groove 49 has a linear shape, and is provided parallel to the long side of the slide plate 33. The guide groove 49 is horizontally arranged.

The palm portion 34 is connected to a motor (not shown) controlled by the control device 28, and the palm portion 34 is attached to the guide groove 49 so that the motor can move in a direction in which the guide groove 49 extends.

In this example, it is assumed that when the palm portion 34 moves horizontally on the slide plate 33, the palm portion 34 moves linearly in the horizontal plane.

The palm portion 34 is provided with a plurality of fingers 51 a to 54 a and 51 b to 54 b that are horizontally provided. In this example, all of the finger portions 51a to 54a and 51b to 54b are provided separately from each other so as to be parallel to the direction of forward movement and backward movement of the palm portion 34 and to the same direction.

The plurality of fingers 51 a to 54 a (here, four) and the remaining plurality of fingers 51 b to 54 b (here, four) are provided in two layers, one of which is an upper layer and the other of which is a lower layer. The plurality of finger portions 51 a to 54 a disposed on one of the upper and lower layers and the plurality of finger portions 51 b to 54 b disposed on the other layer can respectively hold the respective substrates.

Fingers 51a to 54a in the upper layer are set to the same height as each other, and fingers 51b to 54b in the lower layer are set to the same height as each other, and one substrate 16 can be placed on each.

Reference numerals 16 in FIGS. 4 and 6 indicate substrates that are arranged on the upper fingers 51 a to 54 a or the lower fingers 51 b to 54 b on the arm 40.

In this way, in the arm 40, one substrate 16 can be disposed in each of the upper fingers 51a to 54a and the lower fingers 51b to 54b, and therefore, two substrates 16 can be disposed in the arm 40. When the palm portion 34 moves forward or backward along the guide groove 49, the arm 40 and the substrate 16 disposed on the arm 40 move forward or backward together with the palm portion 34 and the fingers 51a to 54a and 51b to 54b.

When the arm 40 is moved forward, the arm 40 located in the transfer chamber 11 can be moved to the vacuum processing chamber 12 in the previous step. Then, make The arm 40 is stationary at a fixed position relative to the vacuum processing chamber 12 in the previous step, and the substrate 16 placed in the vacuum processing chamber 12 in the previous step is placed on the arm 40. Next, the arm 40 is moved backward, the arm 40 is moved into the transfer chamber 11, and the base 32 is rotated to change the direction of the arm 40. If the arm 40 is moved forward, the substrate 16 is moved to the vacuum processing chamber 12 in the subsequent process. Furthermore, the substrate 16 can be placed on a table in the vacuum processing chamber 12 in the subsequent step while being stationary at a fixed position relative to the vacuum processing chamber 12 in the subsequent step.

At least one of the plurality of fingers 51a to 54a or the fingers 51b to 54b, preferably two or more fingers 51a, 53a, and 54a, which are arranged on any one of the upper and lower layers and can arrange the same substrate 16 51b, 53b, and 54b have an elongated support plate 41 and an elongated quartz plate 42 made of quartz, which are arranged on the support plate 41, as shown in FIG. 5, and if these have the support plate 41 and the quartz plate 42, The finger portions 51a, 53a, 54a, 51b, 53b, and 54b serve as positioning finger portions, and the reference numeral 55 in FIG. 7 indicates the positioning finger portions. The other fingers 52a and 52b have a flat plate-shaped support plate 43 on which a quartz plate is not provided.

Preferably, a quartz plate 42 is provided as the positioning finger portion 55 in the finger portions 51a, 51b, 54a, and 54b located at the ends of the plurality of finger portions 51a to 54a and 51b to 54b.

FIG. 7 is a cross-sectional view of the side of the positioning finger 55, and FIG. 8 (a) is a cross-sectional view taken along the line I-I of the positioning finger 55 of FIG. The support plate 41 has a zigzag shape with an opening facing upward. The long side direction is arranged along the forward and backward movement directions of the palm portion 34. The quartz plate 42 is arranged on the support plate along the long side direction along the long side direction of the support plate 41. 41 on the underside. Make up The two wall portions 48 that are part of the zigzag shape are formed so as to be able to contact the side surface of the quartz plate 42. When the quartz plate 42 moves in the wall direction, it will come into contact with either of the two wall portions 48. Comes off from the support plate 41.

One end of both ends of the support plate 41 is located on or near the palm portion 34, and the other end is located far from the palm portion 34. The quartz plate 42 is fixed to the support plate 41 by a fixing portion 50 described later. An end on the side of the palm 34, and a part farther from the palm 34 is not fixed.

Therefore, the quartz plate 42 has a smaller thermal expansion property than the support plate 41, and only one end of the quartz plate 42 is restricted. Therefore, when the support plate 41 and the quartz plate 42 are heated together or cooled together so that the support plate 41 expands and contracts in the longitudinal direction with respect to the quartz plate 42, portions other than the fixed portion are opposed to the support plate 41. Sliding movement, therefore, even if the temperature rises or falls so that the support plate 41 expands and contracts, the support plate 41 is offset from the quartz plate 42 and the quartz plate 42 can maintain almost the same length as before the expansion of the support plate 41.

FIG. 8B is a cross-sectional view taken along the line II-II of the positioning finger 55 in FIG. 5. Holes 63 are formed in the quartz plate 42 at a plurality of positions, and bearings 64 are arranged in the holes 63.

The bearing 64 includes a main body 65 and a ball 66 disposed on the upper end of the main body 65 and rotatably mounted on the main body 65. The ball 66 is disposed higher than the support plate 41 and the quartz plate 42. The upper end of the ball 66 is exposed. .

The hole 63 is an elongated hole along the longitudinal direction, and the bearing 64 is arranged on the support plate 41 so that the main body 65 contacts the support plate 41.

The hole 63 of the quartz plate 42 is an elongated hole along the length direction of the finger (51a, etc.). When the support plate 41 and the quartz plate 42 are heated or cooled and the support plate 41 expands and contracts with respect to the quartz plate 42, the bearing 64 does not contact the edge of the hole 63, and does not interfere even if the positions of the support plate 41 and the quartz plate 42 are shifted. The bearing 64 can be attached to the quartz plate 42, but it is preferable to attach the bearing 64 to the support plate 41 in terms of strength.

The bearing 64 is also arranged on the fingers 52 a and 52 b other than the positioning finger 55, and the exposed upper end of the ball 66 of the bearing 64 arranged on the fingers 51 a to 54 a and 51 b to 54 b of the same substrate 16 is arranged. Into the same height.

Therefore, when the substrate 16 is placed on the arm 40, the back surface of the substrate 16 is in contact with the balls 66.

When a horizontal force is applied to the substrate 16, the balls 66 rotate and the substrate 16 rolls on the balls 66. Therefore, it is assumed that the substrate 16 is not in contact with the support plate 41 and the quartz plate 42 to prevent dust and damage to the substrate 16 caused by sliding.

In addition, one quartz plate 42 used in this embodiment is composed of a plurality of elongated quartz members 42 ₁ to 42 ₃ , and the central axes of the long sides of each quartz member 42 ₁ to 42 ₃ are arranged on the same straight line. Each of the quartz members 42 ₁ to 42 _{3 is} arranged so that the ends are in contact with each other.

A plurality of quartz member quartz member ₄₂₁ ~ _{423 421} located closest to the root side of the palm portion 34, the other end of the quartz member ₄₂₃ located on the side opposite to the base side, the remaining one or more of quartz member 42 ₂ is located between the two quartz members 42 ₁ and 42 ₃ on the root side and the tip side.

At the end of 42 ₁ to 42 ₃ of the contact members adjacent to the plurality of quartz 42 ₁ to 42 ₃ two quartz member to engage in each other with a coupling portion is provided 60, a plurality of elongated quartz members 42 ₁ to 42 ₃ A plurality of quartz members 42 ₁ to 42 _{3 are} connected by a connecting portion 60 to form a single quartz plate 42.

Fig. 8 (d) is an enlarged plan view of the connecting portion 60. Here, the connecting portion 60 connecting the central quartz member 42 ₂ and the distal-side quartz member 42 _{3 is shown} . Protrusions 67 fitted in the other of the quartz member is formed on one of the quartz member recess _{423 37} 422, which constitutes the connecting part 60.

The palm portion 34 and the support plate 41 are made of a metal, alumina, or the like, which is a material having higher mechanical strength than quartz, and the palm portion 34 and the support plate 41 are fixed to each other by screws 45 or the like.

The root portion of the quartz plate 42 is located on the palm portion 34 or the support plate 41. The root portion of the quartz plate 42 is provided with a fixing portion 50 that fixes the quartz plate 42 to the support plate 41. The fixing portion 50 is provided on the quartz member 42 ₁ located at the root portion.

When the fixing portion 50 is described, as shown in FIG. 7, in this example, a quartz plate-side through hole 46 a is formed in the quartz plate 42, and a support plate 41 is formed to communicate with the quartz plate-side through hole 46 a. The support plate-side through hole 46b is formed with a flange-shaped bolt 44 at the upper portion, and its lower end is inserted into the quartz plate-side through hole 46a and the support plate-side through hole 46b. The through-hole 46b constitutes a fixing portion 50 that fixes the quartz plate 42 and the support plate 41 to each other. The quartz plate 42 and the palm portion 34 may be fixed to each other to form the fixing portion 50.

One end on the palm portion 34 side of the quartz plate 42 is fixed to the support via a fixing portion 50. Bearing plate 41.

The fixing portion 50 may be provided on the palm portion 34, or the quartz plate 42 and the support plate 41 may be clamped and fixed by a clamp or the like.

The one end on the palm 34 side of the quartz plate 42 may be fixed to the support plate 41 or the palm 34. Therefore, if the palm 34 and the support plate 41 which are fixed to each other are referred to as the support body 30, The quartz plate 42 may be fixed to the support body 30 via the fixing portion 50, and the weight of the quartz plate 42 is supported by the support body 30.

From the fixed portion 50 to the end of the quartz plate 42 or the end of the support plate 41, the bottom surface of the quartz plate 42 is in contact with the support 30, but the portion of the quartz plate 42 on the distal side of the fixed portion 50 is not fixed to the support 30. The support plate 41 and the quartz plate 42 are separated from each other. When the support plate 41 is extended longer than the quartz plate 42 due to temperature rise, the support plate 41 and quartz are on the distal end side of the quartz plate 42 on the opposite side from the position of the fixing portion 50. The plates 42 are stretched by respective stretch amounts.

Of the two ends of the quartz plate 42, the end side opposite to the fixed portion 50 is provided at the end side stopper at a height that will contact the side surface of the substrate 16 disposed on the fingers 51a to 54a, 51b to 54b. 56.

When the substrate 16 disposed on the fingers 51 a to 54 a and 51 b to 54 b moves in the distal direction, it comes into contact with the distal side stopper 56 and stops.

The thermal expansion coefficient of the quartz plate 42 is 0.6 × 10 ^-6 / K, and the alumina is 7.2 × 10 ^-6 / K. The thermal expansion amount of the support plate 41 when heated is 10 times larger than that of the quartz plate 42. As described above, when the positioning finger portion 55 is heated, the support plate 41 and the quartz plate 42 of the positioning finger portion 55 thermally expand more than the quartz plate 42.

The parts of the quartz plate 42 and the support plate 41 other than the fixing portion 50 are not fixed to each other. Therefore, in a state where the support plate 41 and the quartz plate 42 are fixed to each other at the fixing portion 50, the ends of the support plate 41 are not affected by the quartz plate. 42 extends obstructively, and the position of the end of the support plate 41 with respect to the vacuum tank 21 greatly changes.

The extension of the quartz plate 42 due to heating and the shrinkage due to cooling are small compared to the expansion and contraction of the support plate 41. The end-side stopper 56 located at the end of the quartz plate 42 is caused by heating and cooling relative to the vacuum tank The position of 21 is small.

When the palm portion 34 is disposed at the same position with respect to the vacuum tank 21 inside the vacuum tank 21, the substrate 16 is disposed at the fingers 51a of the palm portion 34 multiple times in the same manner as the position with respect to the vacuum tank 21. 54a, 51b to 54b, at this time, even if the temperatures of the fingers 51a to 54a, 51b to 54b are different, the positional relationship between the substrate 16 and the end of the support plate 41 is greatly different, and the substrate 16 and the end stopper 56 are different. There is no big difference between the positional relationships.

Therefore, even if the temperatures of the plurality of fingers 51 a to 54 a and 51 b to 54 b are different from each other, the substrate 16 disposed on the arm 40 can be disposed at the same position with respect to the end stopper 56.

Numeral 57 in FIG. 7 is a root-side stopper and is located between the base plate 16 and the palm portion 34 arranged on the finger portions 51 a to 54 a and 51 b to 54 b. When the substrate 16 arranged on the fingers 51a to 54a and 51b to 54b moves to the root side, it contacts the root side stopper and stops, so it is set so as not to exceed the root side limit 器 57 地 移。 The 57 ground.

In addition, reference numeral 58 in FIGS. 5 and 6 is an L-shaped auxiliary board, and the side stoppers 59 attached to the ends of the auxiliary board 58 are provided to the four sides of the base plate 16 and the end side stoppers 56 and The sides of the root-side stopper 57 are in contact with each other to prevent the substrate 16 from moving in a direction perpendicular to the moving direction. In FIGS. 2, 3 and 7, the auxiliary plate 58 is omitted.

An example of mounting the root-side stopper 57 is shown in FIG. 8 (c). The structure of the root-side stopper 57 is the same as that of the tip-side stopper 56.

Numeral 69 is a stopper body of the root-side stopper 57. In this example, the stopper body 69 is provided with a plurality of positioning holes 72a and one stopper elongated hole 68. The quartz plate 42 is provided with a fixing through-hole 72b, and a positioning pin 74 is arranged in the fixing through-hole 72b.

The plurality of positioning holes 72a are arranged along a direction in which the stopper elongated hole 68 extends, and the plurality of positioning holes 72a and the stopper elongated hole 68 are formed in a line.

The stopper body 69 is placed on the quartz plate 42 so that a desired positioning hole 72a of the plurality of positioning holes 72a is inserted into the upper portion of the pin 74 protruding from the fixing through-hole 72b. When the positioning hole 72a inserted in the upper part of the pin 74 is changed, the position of the stopper body 69 can be changed.

A stopper elongated hole 68 is formed in the stopper body 69, and a quartz plate elongated hole 62a is formed in a portion of the quartz plate 42 at a position communicating with the stopper elongated hole 68.

On the support plate 41 located below the quartz plate elongated hole 62a, A support plate fine hole 62b is formed at a portion where the quartz plate elongated hole 62a communicates.

A rod-shaped portion of a bolt 61 formed as a flange at the upper portion is inserted into the elongated hole 68 of the stopper and the elongated hole 62a of the quartz plate which are communicated with each other.

The rod-shaped portion of the bolt 61 is located above the support plate pore 62b and is located inside the quartz plate elongated hole 62a and the stopper elongated hole 68, and the flange-shaped portion is located in the stopper elongated The inside of the hole 68.

The side surface of the flange-shaped portion of the bolt 61 is provided so as to be in contact with the inner circumferential surface of the stopper elongated hole 68 of the stopper body 69. The stopper body 69 is fixed to the quartz plate 42 by the pin 74 and the bolt 61.

The end stopper 56 is the same in that the stopper body has a positioning hole and a stopper elongated hole 68 and is fixed to the quartz plate 42 with a pin and a bolt.

16‧‧‧ substrate

30‧‧‧ support

34‧‧‧ Palm

41‧‧‧ support plate

40‧‧‧ arm

42‧‧‧Quartz Plate

42 ₁ ~ 42 ₃ ‧‧‧Quartz

43‧‧‧ support plate

45‧‧‧screw

50‧‧‧Fixed section

51a ~ 54a‧‧‧finger

51b ~ 54b‧‧‧finger

55‧‧‧ Positioning Finger

56‧‧‧ end stop

57‧‧‧ Root side stopper

58‧‧‧Auxiliary board

59‧‧‧side stopper

60‧‧‧Connection Department

64‧‧‧bearing

Claims (8)

A substrate transfer robot is a substrate transfer robot that moves an arm on which a substrate can be arranged, characterized in that the arm has: a palm portion; and a plurality of elongated finger portions, and the plurality of elongated finger portions are provided on the palm portion A substrate can be arranged. At least one of the plurality of fingers is a positioning finger with a support plate and a quartz plate. The support plate is an elongated support plate whose root portion is fixed to the palm. The quartz plate is an elongated quartz plate placed along the support plate on the support plate, and a fixing portion is provided on one end of the quartz plate near the root side of the palm portion, and is farther from the palm portion. A distal end stopper is provided on the other end of the distal end side, the fixing portion is mounted on a support body composed of the palm portion and the support plate, and the other end on the distal end side is not mounted on the support body. For example, the substrate transfer robot according to the first patent application scope, wherein the arm has two or more positioning fingers. For example, the substrate transfer robot according to item 1 or 2 of the patent application scope, wherein the quartz plate is formed so that a plurality of quartz members are fixed to each other. If the substrate transfer robot of any one of the scope of patent application is applied, The support plate is made of alumina. A vacuum processing apparatus is characterized by having a transfer chamber, a vacuum processing chamber, the transfer chamber includes a substrate transfer robot that moves an arm on which a substrate can be arranged, and a vacuum tank that is configured with the substrate transfer robot, and the vacuum processing chamber is connected to The transfer chamber vacuum-processes the substrate. The arm has a palm and a plurality of elongated fingers. The plurality of elongated fingers are provided on the palm. One substrate can be arranged. At least one of the fingers is a positioning finger having a support plate and a quartz plate. The support plate is an elongated support plate whose root portion is fixed to the palm portion. The quartz plate is along the support plate on the support plate. A long and narrow quartz plate is placed, a fixed portion is provided on one end of the quartz plate near the root side of the palm portion, and an end stopper is provided on the other end of the distal end side far from the palm portion. The fixing portion is attached to a support body composed of the palm portion and the support plate, and the other end on the distal end side is not attached to the support body. Said arm having at least two fingers of the positioning. For example, the vacuum processing apparatus according to claim 5 in which the arm has two or more positioning fingers. For example, the vacuum processing apparatus according to claim 5 or 6, wherein the aforementioned quartz plate is formed such that a plurality of quartz members are fixed to each other. The vacuum processing apparatus according to any one of claims 5 to 7, wherein the support plate is made of alumina.