TW201741063A - Stage apparatus includes first and second X-axis driving units driving a first movable body, and a second movable body, in which the first and second X-axis driving units are supported without passing through the second movable body - Google Patents

Abstract

The present invention provides a stage apparatus that provides a technique which is capable of realizing high precision of a stage apparatus. The stage apparatus includes a first movable body (12), a first X-axis driving unit (16) and a second X-axis driving unit (18) configured to drive the first movable body (12) along the X-axis direction, and a second movable body (14) is configured to guide the movement of the first movable body (12) in the X-axis direction and is configured to move in the Y-axis direction. The first X-axis driving unit (16) and the second X-axis driving unit (18) are supported without passing through the second movable body (14).

Description

Stage device

The present invention relates to a stage device.

A stage device for locating an object is well known. Conventionally, there has been proposed a stage apparatus including: a first moving body; a driving body that drives the first moving body in the X-axis direction; and a second moving body configured to guide the X-axis direction of the first moving body The upper movement is movable in the Y-axis direction (for example, Patent Document 1).

(previous technical literature) (Patent Literature)

Patent Document 1: Japanese Laid-Open Patent Publication No. 2009-101427

One of the exemplary objects of one aspect of the present invention is to provide a technique capable of achieving high precision of a stage device.

In order to solve the above problems, an aspect of the stage device of the present invention includes: a first moving body; an X-axis driving unit for driving the first moving body in the X-axis direction; and a second moving body configured to The movement of the first moving body in the X-axis direction is guided and can be moved in the Y-axis direction. The X-axis driving unit is not supported via the second moving body.

Further, even if any combination of the above constituent elements or a constituent element or expression of the present invention is converted between methods, apparatuses, systems, and the like, it is an effective aspect of the present invention.

According to the present invention, high precision of the stage device can be achieved.

12‧‧‧First mobile body

14‧‧‧Second moving body

70‧‧‧stage

88‧‧‧Linking components

100‧‧‧stage device

Fig. 1 is a view showing a stage device of the embodiment.

Fig. 2 (a) to (c) are views showing the stage device of the embodiment.

Fig. 3 is a cross-sectional view taken along line A-A of Fig. 2(a).

Fig. 4 is a perspective view showing one end of the guide beam of Fig. 1 and its periphery.

Fig. 5 (a) to (c) are views showing a connecting member of a modified example.

In the following, the same or equivalent constituent elements, members, and processes are denoted by the same reference numerals, and the description thereof will be omitted as appropriate. Further, the size of the members in the respective drawings is appropriately enlarged and reduced for convenience of understanding. Further, in the drawings, the embodiment will be described with the exception of the unimportant partial portion members.

The warp and weft of the stage device of the embodiment will be described.

Conventionally, a first moving body, an X-axis driving unit for driving the first moving body in the X-axis direction, and a first guiding movement for guiding the first moving body in the X-axis direction and moving in the Y-axis direction are provided. The carrier device of the two mobile bodies is well known. In the stage device, the X-axis driving unit is supported by the second moving body. Therefore, the reaction force when the X-axis driving portion drives the first moving body can be transmitted to the second moving body.

However, there is a desire to use the stage device for positioning a larger object. In this case, it is necessary to increase the size of the stage device, and the X-axis driving unit is also increased in size, and the reaction force when the X-axis driving unit drives the first moving body is also increased. Therefore, if the conventional stage device is directly enlarged, the large reaction force is transmitted to the second moving body. This causes a delay and vibration caused by the structural members of the second moving body. That is, it hinders high precision.

Further, the stage device is used in the manufacture of a semiconductor device. The stage device used in the manufacture requires further high precision by refinement or superposition of the design rules of the semiconductor device, or by lamination requirements.

That is, the stage device requires high precision in any case. relatively Here, in the stage device of the embodiment, the X-axis driving unit is not supported by the stage via the second moving body. Thereby, the reaction force when the X-axis drive unit drives the first movable body is transmitted to the second movable body, and the occurrence of hysteresis and shock caused by the structural member of the second movable body is not caused or can be suppressed. That is, a higher precision stage device can be realized. The details will be described below.

Fig. 1 and Fig. 2(a) to Fig. 2(c) are diagrams showing the stage device 100 of the embodiment. For convenience of explanation, as shown in the figure, an XYZ orthogonal coordinate system is defined in which a direction parallel to the mesa 10a (described later) is set to the X-axis direction, and a direction orthogonal to the X-axis direction parallel to the mesa 10a is set. In the Y-axis direction, the direction orthogonal to the two (that is, orthogonal to the mesa 10a) is set to the Z-axis direction. Fig. 1 is a perspective view showing the stage device 100. Fig. 2(a) is a plan view of the stage device 100, Fig. 2(b) is a side view of the stage device 100 confirmed from the X-axis direction, and Fig. 2(c) is confirmed from the Y-axis direction. A side view of the stage device 100. The stage device 100 is referred to as an XY stage, and positions the object in the X-axis direction and the Y-axis direction.

The stage device 100 includes a stage 10, a first moving body 12, a second moving body 14, a first X-axis driving unit 16, a second X-axis driving unit 18, a first Y-axis driving unit 20, and a second Y-axis driving. The portion 22, the first guide member 24, the second guide member 26, and the four coupling members 88.

The platform 10 is a rectangular member in plan view. Planar processing is performed on the mesa 10a which is the upper surface of the stage 10. Further, planar processing is also performed on the first side surface 10b extending in the Y-axis direction. Table top 10a and first side 10b functions as a sliding surface that the air bearing slides as will be described later.

The first Y-axis driving portion 20 includes a first Y-axis fixing member 28 and a first Y-axis movable member 30. The first Y-axis fixing member 28 is an elongated cylindrical member and is configured by connecting a plurality of cylindrical magnets. The first Y-axis fixing member 28 is disposed such that its axial direction coincides with the Y-axis direction, and the holding members (not shown) are held at both ends by one of the first side faces 10b fixed to the stage 10. That is, the first Y-axis fixing member 28 is disposed outside the platform 10 in plan view.

The first Y-axis mover 30 includes a housing 32 and a coil (not shown). The outer casing 32 is formed with an insertion hole having a circular cross section penetrating in the Y-axis direction, and a first Y-axis fixing member 28 is inserted. The coil is disposed in the insertion hole so as to surround the first Y-axis fixing member 28, and is fixed to the circumferential surface of the insertion hole. When a current flows in the coil, an electromagnetic force is generated between the coil and the first Y-axis stator 28, and the coil and the first Y-axis movable member 30 move in the Y-axis direction by electromagnetic interaction.

The second Y-axis driving portion 22 includes a second Y-axis fixing member 34 and a second Y-axis movable member 36. The second Y-axis stator 34 and the second Y-axis movable member 36 are configured in the same manner as the first Y-axis stator 28 and the first Y-axis movable member 30. Further, the second Y-axis fixing member 34 is disposed such that its axial direction coincides with the Y-axis direction and is arranged in parallel with the first Y-axis fixing member 28. Further, the second Y-axis fixing member 34 supports both ends by a pair of holding members (not shown) fixed to the table top 10a.

The second moving body 14 includes a second movable portion 38, a plurality of Y-axis partial air bearing 40, a guide beam 42, and a plurality of Y-axis lifting air bearings 44.

The second movable portion 38 is a plate-like member and is disposed such that the two main surfaces face the X-axis direction. The second movable portion 38 is provided below the first Y-axis movable member 30 and coupled to the first Y-axis movable member 30. Therefore, the second movable portion 38 moves together with the first Y-axis movable member 30. The lower side portion of the second movable portion 38 is opposed to the first side surface 10b of the stage 10.

A plurality of Y-axis partial air bearing 40 is fixed to a lower portion of the second movable portion 38 opposed to the first side surface 10b of the stage 10, and a gas such as air is ejected with respect to the first side surface 10b. By its repulsive force, the non-contact state of the second movable portion 38 and the first side face 10b is maintained.

The guide beam 42 is a long-side member and is disposed such that its longitudinal direction coincides with the X-axis direction between the first X-axis stator 52 (described later) and the second X-axis stator 58 (described later). One end of the guide beam 42 is coupled to the second movable portion 38, and the other end is coupled to the second Y-axis movable member 36. The shape of the cross section of the guide beam 42 orthogonal to the X-axis direction has a concave shape. In detail, the guide beam 42 includes a bottom wall 46, a first side wall 48, and a second side wall 50. The bottom wall 46 is a flat member that is long in the X-axis direction, and is disposed such that the two main surfaces face the Z-axis direction. The first side wall 48 is a vertical wall that is long in the X-axis direction and is erected from one end of the upper surface (i.e., one main surface) of the bottom wall 46 in the Y-axis direction. The second side wall 50 is identical to the first side wall 48, which is a vertical wall that is long in the X-axis direction, and is disposed upright from the other end in the Y-axis direction of the upper surface of the bottom wall 46 so as to be in contact with the first side wall 48. Opposite in the Y-axis direction.

The outer surface of the first side wall 48, that is, the surface opposite to the surface opposite to the second side wall 50, is planarly processed and used as an air shaft. The sliding surface of the sliding platform functions. Hereinafter, the outer surface of the first side wall 48 is referred to as a first sliding surface 48a. Similarly, the outer surface of the second side wall 50 is surface-finished and functions as a sliding surface for the air bearing to slide. Hereinafter, the outer surface of the second side wall 50 is referred to as a second sliding surface 50a.

A plurality of Y-axis lift air bearings 44 are fixed to the guide beams 42. The Y-axis lift air bearing 44 ejects gas with respect to the table top 10a of the platform 10. By the repulsive force, the Y-axis lift air bearing 44 and the guide beam 42 are kept in non-contact with the table top 10a, and in detail, are supported in the Z-axis direction by a gap of about several μm between the table surface 10a and the table top 10a.

The first X-axis driving portion 16 includes a first X-axis fixing member 52, a first X-axis movable member 54, and a first support member 56. The first X-axis fixing member 52 is configured in the same manner as the first Y-axis fixing member 28 or the second Y-axis fixing member 34. The first X-axis fixing member 52 is disposed such that its axial direction coincides with the X-axis direction, and both ends are supported by the first support member 56. The first X-axis movable member 54 is configured in the same manner as the first Y-axis movable member 30 or the second Y-axis movable member 36, and is moved in the X-axis direction by electromagnetic interaction with the first X-axis fixed member 52.

The second X-axis driving portion 18 includes a second X-axis fixing member 58, a second X-axis movable member 60, and a second supporting member 62. The second X-axis stator 58 and the second X-axis movable member 60 are configured in the same manner as the first X-axis stator 52 and the first X-axis movable member 54. The second X-axis fixing member 58 is disposed such that its axial direction coincides with the X-axis direction, and is arranged in parallel with the first X-axis fixing member 52, and supports both ends by the second supporting member 62.

Fig. 3 is a cross-sectional view taken along line A-A of Fig. 2(a). The first moving body 12 includes a first movable portion 64, a plurality of X-axis partial air bearing 66, a plurality of X-axis lifting air bearings 68, and a stage 70. The first movable portion 64 is a square tubular member and has a guide beam 42 inserted therein. The first movable portion 64 includes a bottom wall 72, an upper wall 74, a first side wall 76, and a second side wall 78. The first side wall 76 is opposed to the first sliding surface 48a of the guide beam 42, and the second side wall is opposed to the second sliding surface 50a of the Y-axis guide. The first X-axis movable member 54 is coupled to the outer surface of the first side wall via a connecting member (not shown), and the second X-axis movable body is coupled to the outer surface of the second side wall via a connecting member (not shown). Item 60. Therefore, the first movable portion 64 moves together with the first X-axis movable member 54 and the second X-axis movable member 60.

A plurality of X-axis partial air bearing 66 is fixed to an inner surface of the first side wall 76 (ie, a surface opposite to the second side wall) 76a and an inner surface of the second side wall 78 (ie, a surface opposite to the first side wall) 78a, and gas is ejected with respect to the first sliding surface 48a and the second sliding surface 50a of the guide beam 42. Further, a plurality of X-axis lift air bearings 68 are fixed to the lower surface 72a of the bottom wall 72, and gas is ejected with respect to the table top 10a. The first movable portion 64 is non-contact with the guide beam 42 and the table 10a by the repulsive force caused by the X-axis partial air bearing 66 and the X-axis lifting air bearing 68 ejecting gas, in detail, the guide beam 42 and the table 10a is supported in the Y-axis direction and the Z-axis direction via a gap of about several μm.

The stage 70 is fixed to the first movable portion 64. For example, the stage 70 is placed with an object to be processed such as a semiconductor wafer.

Returning to Fig. 1 and Fig. 2 (a) to (c), the first guide member 24 The first rail 80 and the two first sliders 82 are included. The first guide rail 80 is fixed to the table top 10a such that its extending direction coincides with the Y-axis direction. The two first sliders 82 respectively include a plurality of rolling bodies and move in the Y-axis direction along the first rail 80.

The second guide member 26 includes a second rail 84 and two second sliders 86. The second rail 84 and the second slider 86 are configured in the same manner as the first rail 80 and the first slider 82. Furthermore, the second guide rail 84 is disposed such that its extending direction coincides with the Y-axis direction and is arranged in parallel with the first guide rail 80.

One of the two first support members 56 supporting the first X-axis fixture 52 is fixed to the first slider 82 of the first guide member 24, and the other is supported by the second slider 86 of the second guide member 26. That is, the first support member 56 and the first X-axis drive unit 16 are configured to be movable in the Y-axis direction.

Similarly, one of the two second support members 62 supporting the second X-axis mount 58 is fixed to the first slider 82 of the first guide member 24, and the other is supported by the second slider 86 of the second guide member. That is, the second support member 62 and the second X-axis drive unit 18 are configured to be movable in the Y-axis direction.

Fig. 4 is a perspective view showing one end of the guide beam 42 and its periphery. The coupling member 88 connects the guide beam 42 and the first support member 56 and the second X-axis stator 58. That is, the connecting member 88 connects the second movable body 14 and the X-axis driving unit. The coupling member 88 is configured such that the rigidity in the X-axis direction is lower than the rigidity of the guide rails 80, 84 in the X-axis direction. For example, the connecting member 88 may be configured such that the width in the X-axis direction is thinner than the width of the guide rails 80, 84 in the X-axis direction. Also, for example, the connecting member 88 may also have a Young's modulus lower than The material of the first rail 80 is constructed.

Further, in the present embodiment, the coupling member 88 is configured to have a relatively high rigidity in the Y-axis direction and a relatively low rigidity in the X-axis direction (the rigidity is at least lower than the Y-axis direction). In the present embodiment, the coupling member 88 is formed in a plate shape, and its main surface is oriented in the X-axis direction. That is, the connecting member 88 is configured to be relatively thick in the Y-axis direction and relatively thin in the X-axis direction (at least thinner than the Y-axis direction).

The operation of the stage device 100 configured as above will be described.

If the current is supplied to the coil of the first Y-axis mover 30 of the first Y-axis drive unit 20 and the coil of the second Y-axis mover 36 of the second Y-axis drive unit 22, the coil and the Y-axis mount are provided. An electromagnetic force is generated between the Y-axis movable member and the second moving body 14 (and the first moving body 12) in the Y-axis direction by the electromagnetic interaction thereof. If the current is supplied to the coil of the first X-axis movable member 54 of the first X-axis driving portion 16 and the coil of the second X-axis movable member 60 of the second X-axis driving portion 18, the coil and the X-axis fixing member are provided. An electromagnetic force is generated between the X-axis movable member and the first moving body 12 in the X-axis direction by the electromagnetic interaction thereof. As described above, the first moving body 12 and the second moving body 14 are moved, whereby the stage 70 of the first moving body 12 is moved in the XY direction, and the object placed on the stage 70 is positioned at XY. In the direction. Since the first X-axis driving unit 16 and the second X-axis driving unit 18 are coupled to the second movable body 14 by the connecting member 88, the Y-axis is moved along with the Y-axis direction of the second moving body 14. Move in direction.

According to the stage device 100 of the embodiment described above, the first X The shaft driving portion 16 and the second X-axis driving portion 18 are supported by a supporting member that is supported by a guide provided on the table top 10a of the stage 10. That is, the first X-axis driving unit 16 and the second X-axis driving unit 18 are not supported via the second moving body 14. Thereby, the reaction force when the first moving body 12 is driven by the first X-axis driving unit 16 and the second X-axis driving unit 18 is transmitted to the second moving body 14 (especially the second movable portion 38). Therefore, hysteresis and vibration caused by the structural members of the second movable portion 38 do not occur or are suppressed. That is, the stage device 100 of higher precision can be realized. Further, since the reaction force is transmitted to the second movable portion 38, the vibration of the second movable portion 38 due to the reaction force is stopped earlier. Thereby, the production throughput of the stage device 100 is improved.

Further, according to the stage apparatus 100 of the present embodiment, the coupling member 88 is configured such that the rigidity in the X-axis direction is lower than the rigidity of the guide rails 80 and 84 in the X-axis direction. When the reaction force when the first moving body 12 is driven is easily transmitted to the higher rigidity, the reaction force is transmitted from the first support member 56 and the second support member 62 to the first member via the connecting member 88 as described above. The second moving body 14 is more easily transmitted from the first support member 56 and the second support member 62 to the platform 10 via the guide rails 80, 84. That is, the reaction force when the X-axis driving portion drives the first moving body 12 is transmitted to the second moving body 14 to be further suppressed.

Further, according to the stage device 100 of the embodiment, the coupling member 88 has a relatively high rigidity in the Y-axis direction. As a result, when the second movable body 14 moves in the Y-axis direction, the X-axis driving portion coupled to the second movable body 14 by the connecting member 88 is also moved in the Y-axis direction together with the second movable body 14. move. On the other hand, the joint member 88 has a relatively low rigidity in the X-axis direction. Thereby, compared with the case where it is not the above, the reaction force when the X-axis drive unit drives the first movable body 12 can be further suppressed from being transmitted to the second movable body 14.

As described above, the stage device has been described in the embodiment. This embodiment is merely illustrative, and it will be understood by those skilled in the art that the various constituent elements or combinations of processing and processing can be variously modified, and modifications made as such are also within the scope of the present invention. Modifications are shown below.

(Modification 1)

Although not specifically mentioned in the embodiment, the connecting member 88 may be configured to have lower rigidity in the X-axis direction than the first supporting member 56 and the second supporting member 62. Thereby, the reaction force when the X-axis drive unit drives the first movable body 12 is not easily transmitted to the connection member 88 having low rigidity, and therefore the reaction force is transmitted to the second movable body via the connection member 88 to be suppressed.

(Modification 2)

In the embodiment, the case where the connection member 88 is a plate-shaped member has been described, but the invention is not limited thereto. The connecting member 88 is configured such that the rigidity in the X-axis direction is lower than the rigidity of the guide rails 80 and 84 in the X-axis direction. Fig. 5 (a) to (c) respectively show a connecting member of a modified example.

The joint member 188 of Fig. 5(a) includes a first base 190, a second base 192, and an elastic hinge 194. The first base 190 and the second base 192 are formed in a plate shape. The first base 190 is fixed to the support member, and the second The base 192 is fixed to the guide beam 42. The elastic hinge 194 joins the first base 190 and the second base 192. The elastic hinge 194 is formed thinner than the first base 190 or the second base 192 in the Z-axis direction. The connecting member 188 has the elastic hinge 194, whereby the rigidity in the Z-axis direction is relatively lower than that of the connecting member 88 of the embodiment.

The joint member 288 of FIG. 5(b) includes a first base 290, a second base 292, and an elastic hinge 294. The first base 290 and the second base 292 are formed in a cylindrical shape. The first base 290 is fixed to the support member, and the second base 292 is fixed to the guide beam 42. The elastic hinge 294 joins the first base 290 and the second base 292. The elastic hinge 294 is a columnar elastic hinge that is thinner than the first base 290 or the second base 292 in the Y-axis direction and the Z-axis direction. The joint member 288 has an elastic hinge 294, whereby the rigidity in the Y-axis direction is relatively high, and the rigidity in the other direction is relatively low (at least lower than the rigidity in the Y-axis direction).

The joint member 388 of Fig. 5(c) includes a first base 390, a second base 392, a ball 394, and two springs 396. The first base 390 and the second base 392 are formed in a plate shape. The first base 390 is fixed to the support member, and the second base 392 is fixed to the guide beam 42. A concave portion is formed on a surface of the first base 390 opposed to the second base 392 and a surface of the second base 392 opposed to the first base 390, respectively. The ball 394 is sandwiched between the two recesses. Further, the first base 390 and the second base 392 are coupled by two springs 396. The connecting member 388 has a relatively high rigidity in the Y-axis direction and a relatively low rigidity in the other direction (at least lower than the rigidity in the Y-axis direction).

Here, in the stage device, the second moving body 14 is supported by the air shaft The X-axis driving portion is supported by the guide member. Therefore, when the second moving body 14 and the X-axis driving unit connected to the second moving body 14 by the connecting member move in the Y-axis direction, the second moving body 14 and the X-axis driving unit are asynchronously along the Z-axis direction. Move up and down slightly. On the other hand, in the connection members of FIGS. 5( a ) to 5 ( c ), the rigidity in the Z-axis direction is relatively low, and therefore the second moving body 14 and the X-axis driving unit are in the Z-axis direction even if they are asynchronous with each other. The microscopic movement up and down can also suppress the stress applied to the connecting member.

(Modification 3)

In the embodiment, the case where the Y-axis drive unit drives the second movable body in the Y-axis direction has been described, but the present invention is not limited thereto. The Y-axis drive unit can also drive the X-axis drive unit in the Y-axis direction. In this case, the mover of the Y-axis drive unit and the X-axis drive unit are coupled. When the X-axis drive unit is driven by the Y-axis drive unit and moved in the Y-axis direction, the second movable body coupled to the X-axis drive unit by the connection member moves in the Y-axis direction together with the X-axis drive unit.

(Modification 4)

In the embodiment and the above-described modification, the first moving body 12 and the X-axis driving unit are connected by a connecting member, and the first moving body 12 or the X-axis driving unit is driven by the Y-axis driving unit. However, it is not limited to this. The stage device may further include driving the X-axis drive in the Y-axis direction in addition to driving the Y-axis drive portion of the first movable body 12 in the Y-axis direction. Other Y-axis drive parts of the department. In this case, the X-axis driving unit may be actually moved in the same direction as the first moving body 12 by the other Y-axis driving unit while moving the first moving body 12 in the Y-axis direction by the Y-axis driving unit. Move in the X direction.

Any combination of the above-described embodiments and modifications is also useful as an embodiment of the present invention. The new embodiment produced by the combination has the effects of the combined embodiments and modifications.

10‧‧‧ platform

10a‧‧‧ countertop

10b‧‧‧ first side

12‧‧‧First mobile body

14‧‧‧Second moving body

16‧‧‧First X-axis drive unit

18‧‧‧Second X-axis drive unit

20‧‧‧First Y-axis drive

22‧‧‧Second Y-axis drive unit

24‧‧‧First guide

26‧‧‧Second guide

28‧‧‧First Y-axis fixture

30‧‧‧First Y-axis movable parts

32‧‧‧Shell

34‧‧‧Second Y-axis fixture

36‧‧‧Second Y-axis movable parts

38‧‧‧Second movable department

40‧‧‧Y-axis partial air bearing

42‧‧·guide beam

46‧‧‧ bottom wall

48‧‧‧First side wall

48a‧‧‧First sliding surface

50‧‧‧ second side wall

52‧‧‧First X-axis fixture

54‧‧‧First X-axis movable parts

56‧‧‧First support member

58‧‧‧Second X-axis fixture

60‧‧‧Second X-axis movable parts

62‧‧‧Second support member

70‧‧‧stage

80‧‧‧First rail

82‧‧‧First slide

84‧‧‧Second rail

86‧‧‧Second slide

88‧‧‧Linking components

100‧‧‧stage device

Claims (5)

A stage device comprising: a first moving body; an X-axis driving unit for driving the first moving body in an X-axis direction; and a second moving body configured to guide the first moving body The movement of the body in the X-axis direction is movable in the Y-axis direction, and the X-axis driving unit is not supported via the second moving body. The stage device according to claim 1, further comprising a Y-axis driving unit for moving the second moving body in the Y-axis direction, wherein the X-axis driving unit is configured to be movable in the Y-axis direction. The front Y-axis driving unit drives the front second moving body or the front X-axis driving unit in the Y-axis direction, and the second moving body and the front X-axis driving unit are connected by a connecting member. The stage device according to claim 2, further comprising: a guide rail that supports the X-axis driving unit and guides movement of the X-axis driving unit in the Y-axis direction, wherein the front connecting member is configured to have an X-axis direction The rigidity on the upper side is lower than the rigidity in the X-axis direction of the front guide rail. The stage device of claim 2, wherein the connecting member comprises: a first portion fixed to the front second moving body; a second portion fixed to the X-axis driving portion, and the column Elasticity A hinge connecting the aforementioned first portion and the aforementioned second portion. The stage device according to claim 1, further comprising: a Y-axis driving unit that drives the second moving body in a Y-axis direction and a Y-axis driving unit different from the Y-axis driving unit; The X-axis driving unit is driven in the Y-axis direction.