JP7370920B2 - stage equipment - Google Patents

Description

The present invention relates to a stage device.

Stage devices for positioning objects are known. Conventionally, a first movable body, a driving body that drives the first movable body in the X-axis direction, and a second movable body that guides the movement of the first movable body in the X-axis direction and is configured to be movable in the Y-axis direction. A stage device including a moving body has been proposed (for example, Patent Document 1).

JP2009-101427A

In the conventional stage device, the X-axis drive section is supported by the second moving body. Therefore, the reaction force generated when the X-axis drive unit drives the first moving body can be transmitted to the second moving body.

By the way, there is a demand for using the stage device for positioning a larger object. In this case, it is necessary to increase the size of the stage device, and accordingly, the X-axis drive section also increases in size, and the reaction force when the X-axis drive section drives the first moving body also increases. If the conventional stage device is made larger as it is, this large reaction force will be propagated to the second moving body. This induces hysteresis and vibrations due to the structural members of the second moving body. In other words, this becomes a hindrance to achieving higher precision.

Furthermore, the stage apparatus may be used in manufacturing semiconductor devices. Due to the miniaturization and stacking of semiconductor device design rules, or the need for stacking, stage devices used in manufacturing are required to have even higher precision.

In any case, stage devices are required to be highly accurate.

The present invention has been made under these circumstances, and one exemplary purpose of a certain aspect of the present invention is to provide a technique that can realize high precision of a stage device.

In order to solve the above problems, a stage device according to an aspect of the present invention includes a first moving body and an X-axis drive section that drives the first moving body in the X-axis direction and is configured to be movable in the Y-axis direction. a second moving body that guides the movement of the first moving body in the X-axis direction and is configured to be movable in the Y-axis direction; and a Y-axis that drives the X-axis drive unit or the second moving body in the Y-axis direction. The present invention includes a drive unit and a restraint unit that does not restrain relative movement of the X-axis drive unit and the second movable body in the X-axis direction, but restrains relative movement of the X-axis drive unit and the second moving body in the Y-axis direction in a state where they are not in contact with each other.

Note that arbitrary combinations of the above-mentioned components and mutual substitution of the components and expressions of the present invention among methods, devices, systems, etc. are also effective as aspects of the present invention.

According to the present invention, high precision of the stage device can be realized.

FIG. 1 is a diagram showing a stage device according to an embodiment. FIGS. 2(a) to 2(c) are diagrams showing the stage apparatus of FIG. 1. FIG. 2 is a cross-sectional view taken along line AA in FIG. 2(a). FIG. 2 is a perspective view showing one end of the guide beam in FIG. 1 and its surroundings. It is a figure explaining an example of a restraint unit. It is a figure explaining another example of a restraint unit. It is a figure explaining yet another example of a restraint unit. It is a figure explaining yet another example of a restraint unit.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on preferred embodiments with reference to the drawings. The embodiments are illustrative rather than limiting the invention, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention. Identical or equivalent components, members, and processes shown in each drawing are designated by the same reference numerals, and redundant explanations will be omitted as appropriate.

In this specification, "member A is not in contact with member B" means that member A and member B are not physically in contact with each other directly, and member A and member B are also in non-contact indirectly. (i.e., not even indirectly connected through other members).

FIG. 1 is a perspective view of a stage device 100 according to an embodiment. For convenience of explanation, as shown in the figure, a certain direction parallel to the board surface 10a (described later) is the X-axis direction, a direction parallel to the board surface 10a orthogonal to the X-axis direction is the Y-axis direction, and a direction perpendicular to both (that is, to the board surface 10a). An XYZ orthogonal coordinate system is defined in which the Z-axis direction is the (orthogonal) direction. 2(a) to 2(c) are diagrams showing the stage device 100 of FIG. 1. FIG. 2(a) is a top view of the stage device 100, FIG. 2(b) is a side view of the stage device 100 seen in the X-axis direction, and FIG. 2(c) is a side view of the stage device 100 seen in the Y-axis direction. It is.

The stage device 100 is called an XY stage, and positions the object in the X-axis direction and the Y-axis direction. The stage device 100 includes a surface plate 10, a first moving body 12 configured to be movable in the X-axis direction, and configured to guide movement of the first moving body 12 in the X-axis direction and to be movable in the Y-axis direction. a second moving body 14, a first X-axis drive section 16 and a second X-axis drive section 18 that drive the first moving body in the X-axis direction, and a first Y-axis drive that drives the second moving body in the Y-axis direction. 20, the second Y-axis drive section 22, the first Y-axis guide 24, the second Y-axis guide 26, and four components that restrain the relative movement of the X-axis drive section and the second movable body in the Y-axis direction in a non-contact manner. A restraint unit 88 is provided.

The surface plate 10 is a rectangular member in plan view. A plate surface 10a, which is the upper surface of the surface plate 10, is subjected to a flat surface processing. Further, the first side surface 10b extending along the Y-axis direction is also subjected to planar processing. The board surface 10a and the first side surface 10b function as a sliding surface on which an air bearing slides, as will be described later.

The first Y-axis drive unit 20 includes a first Y-axis stator 28 and a first Y-axis mover 30. The first Y-axis stator 28 is an elongated rod-shaped member whose cross section perpendicular to the longitudinal direction is circular, and is constructed by connecting a plurality of cylindrical magnets. The first Y-axis stator 28 is arranged so that its axial direction coincides with the Y-axis direction, and both ends are held by a pair of holding members (not shown) fixed to the first side surface 10b of the surface plate 10. That is, the first Y-axis stator 28 is arranged outside the surface plate 10 in plan view.

The first Y-axis mover 30 includes a housing 32 and a coil (not shown). The housing 32 has an insertion hole with a circular cross section that extends in the Y-axis direction, through which the first Y-axis stator 28 is inserted. The coil is arranged in the insertion hole so as to surround the first Y-axis stator 28, and is fixed to the circumferential surface of the insertion hole. When a current flows through the coil, an electromagnetic force is generated between the coil and the first Y-axis stator 28, and the electromagnetic interaction causes the coil and thus the first Y-axis mover 30 to move in the Y-axis direction.

The second Y-axis drive unit 22 includes a second Y-axis stator 34 and a second Y-axis mover 36. The second Y-axis stator 34 and the second Y-axis mover 36 are configured similarly to the first Y-axis stator 28 and the first Y-axis mover 30. Note that the second Y-axis stator 34 is arranged so that its axial direction coincides with the Y-axis direction and is aligned parallel to the first Y-axis stator 28. Further, the second Y-axis stator 34 is supported at both ends by a pair of holding members (not shown) fixed on the board surface 10a.

The second moving body 14 includes a second movable portion 38 , a plurality of Y-axis yaw air bearings 40 , a guide beam 42 , and a plurality of Y-axis lift air bearings 44 .

The second movable part 38 is a plate-shaped member, and is arranged so that its two main surfaces face the X-axis direction. The second movable section 38 is provided below the first Y-axis movable element 30 and is connected to the first Y-axis movable element 30 . Therefore, the second movable part 38 moves together with the first Y-axis movable element 30. A lower portion of the second movable portion 38 faces the first side surface 10b of the surface plate 10.

The plurality of Y-axis yaw air bearings 40 are fixed to the lower part of the second movable part 38 facing the first side surface 10b of the surface plate 10, and eject gas such as air to the first side surface 10b. The repulsive force maintains the non-contact state between the second movable portion 38 and the first side surface 10b.

The guide beam 42 is a long member, and is arranged between a first X-axis stator 52 (described later) and a second X-axis stator 58 (described later) so that its longitudinal direction coincides with the X-axis direction. Ru. The guide beam 42 has one end connected to the second movable section 38 and the other end connected to the second Y-axis movable element 36 . The guide beam 42 has a concave cross section perpendicular to the X-axis direction. Specifically, guide beam 42 includes a bottom wall 46, a first side wall 48, and a second side wall 50. The bottom wall 46 is a flat member that is long in the X-axis direction, and is provided so that its two main surfaces face in the Z-axis direction. The first side wall 48 is a vertical wall that is long in the X-axis direction, and is erected from one end of the upper surface (that is, one main surface) of the bottom wall 46 in the Y-axis direction. Like the first side wall 48, the second side wall 50 is a vertical wall that is long in the X-axis direction, and is erected from the other end of the top surface of the bottom wall 46 in the Y-axis direction so as to face the first side wall 48 in the Y-axis direction. do.

The outer surface of the first side wall 48, that is, the surface opposite to the surface facing the second side wall 50, is processed to be flat and functions as a sliding surface on which the air bearing slides. Hereinafter, the outer surface of the first side wall 48 will be referred to as a first sliding surface 48a. Similarly, the outer surface of the second side wall 50 is processed to be flat and functions as a sliding surface on which the air bearing slides. Hereinafter, the outer surface of the second side wall 50 will be referred to as a second sliding surface 50a.

A plurality of Y-axis lift air bearings 44 are fixed to the guide beam 42. The Y-axis lift air bearing 44 blows out gas against the plate surface 10a of the surface plate 10. Due to the repulsive force, the Y-axis lift air bearing 44 and thus the guide beam 42 are supported in the Z-axis direction without contacting the board surface 10a, specifically, with a gap of about several μm between them and the board surface 10a.

The first X-axis drive section 16 includes a first X-axis stator 52 and a first X-axis movable element 54 . The first X-axis stator 52 is configured similarly to the first Y-axis stator 28 and the second Y-axis stator 34. The first X-axis stator 52 is arranged so that its axial direction coincides with the X-axis direction, and both ends are supported by first support members 56. The first X-axis movable element 54 is configured similarly to the first Y-axis movable element 30 and the second Y-axis movable element 36, and moves in the X-axis direction by electromagnetic interaction with the first X-axis stator 52.

The second X-axis drive section 18 includes a second X-axis stator 58, a second X-axis movable element 60, and a second support member 62. The second X-axis stator 58 and the second X-axis mover 60 are configured similarly to the first X-axis stator 52 and the first X-axis mover 54, respectively. The second X-axis stator 58 is arranged so that its axial direction coincides with the X-axis direction and is parallel to the first X-axis stator 52, and is supported at both ends by the second support member 62.

FIG. 3 is a cross-sectional view taken along line AA in FIG. 2(a). The first moving body 12 includes a first movable part 64 , a plurality of X-axis yaw air bearings 66 , a plurality of X-axis lift air bearings 68 , and a stage 70 . The first movable part 64 is a square cylindrical member, through which the guide beam 42 is inserted. The first movable part 64 includes a bottom wall 72 , a top wall 74 , a first side wall 76 , and a second side wall 78 . The first side wall 76 faces the first sliding surface 48a of the guide beam 42, and the second side wall 78 faces the second sliding surface 50a of the guide beam 42. A first X-axis mover 54 is connected to the outer surface of the first side wall 76 via a connecting member (not shown), and a second X-axis mover 54 is connected to the outer surface of the second side wall 78 via a connecting member (not shown). Children 60 are connected. Therefore, the first movable part 64 moves together with the first X-axis movable element 54 and the second X-axis movable element 60.

The plurality of X-axis yaw air bearings 66 are fixed to the inner surface 76a of the first side wall 76 (that is, the surface facing the second side wall 78) and the inner surface 78a of the second side wall 78 (that is, the surface facing the first side wall 76). , the gas is ejected to the first sliding surface 48a and the second sliding surface 50a of the guide beam 42. Further, the plurality of X-axis lift air bearings 68 are fixed to the lower surface 72a of the bottom wall 72 and eject gas toward the board surface 10a. The first movable part 64 remains out of contact with the guide beam 42 and the board surface 10a due to the repulsive force caused by the gas ejected from the X-axis yaw air bearing 66 and the X-axis lift air bearing 68. It is supported in the Y-axis direction and the Z-axis direction with a gap of about several μm between it and 10a.

The stage 70 is fixed to the first movable part 64. For example, a workpiece such as a semiconductor wafer is placed on the stage 70 .

Returning to FIGS. 1 and 2(a) to (c), the first Y-axis guide 24 includes a first Y-axis guide rail 80 and two first sliders 82. The first Y-axis guide rail 80 is fixed on the board surface 10a so that its extending direction coincides with the Y-axis direction. The two first sliders 82 each include a plurality of rolling elements and move in the Y-axis direction along the first Y-axis guide rail 80.

The second Y-axis guide 26 includes a second Y-axis guide rail 84 and two second sliders 86. The second Y-axis guide rail 84 and the second slider 86 are configured similarly to the first Y-axis guide rail 80 and the first slider 82, respectively. Note that the second Y-axis guide rail 84 is arranged so that its extension direction coincides with the Y-axis direction and is aligned parallel to the first Y-axis guide rail 80.

One of the two first support members 56 supporting the first X-axis stator 52 is supported by the first slider 82 of the first Y-axis guide 24, and the other is supported by the second slider 86 of the second Y-axis guide 26. Ru. That is, the first support member 56 and, in turn, the first X-axis drive section 16 are configured to be movable in the Y-axis direction.

Similarly, one of the two second support members 62 supporting the second X-axis stator 58 is supported by the first slider 82 of the first Y-axis guide 24, and the other is supported by the second slider 86 of the second Y-axis guide. Supported. That is, the second support member 62 and, in turn, the second X-axis drive section 18 are configured to be movable in the Y-axis direction.

Here, support for the first moving body 12, the second moving body 14, the X-axis drive section, and the Y-axis drive section will be summarized.

(i) The first moving body 12 is not supported directly or indirectly (that is, via other members) by the second moving body 14, the X-axis drive section, and the Y-axis drive section. The first moving body 12 is directly supported by the surface plate 10. Specifically, the first moving body 12 is supported by the surface plate 10 without contacting the surface plate 10 by the repulsive force of the gas ejected from the X-axis lift air bearing 68 .

(ii) The second moving body 14 is not directly or indirectly supported by the first moving body 12, the X-axis drive section, and the Y-axis drive section. The second moving body 14 is directly supported by the surface plate 10. Specifically, the second moving body 14 is supported by the surface plate 10 without contacting the surface plate 10 by the repulsive force of the gas ejected from the plurality of Y-axis lift air bearings 44 .

(iii) The X-axis drive section is not directly or indirectly supported by the first moving body 12, the second moving body 14, and the Y-axis drive section. The X-axis drive section is supported by the surface plate 10 via a Y-axis guide that is directly supported by the surface plate 10.

(iv) The Y-axis drive section is not directly or indirectly supported by the first moving body 12, the second moving body 14, and the X-axis drive section. The Y-axis drive unit is supported by the surface plate 10 via a holding member (not shown) that is directly supported by the surface plate 10.

As described above, the first moving body 12, the second moving body 14, the X-axis drive section, and the Y-axis drive section are supported on the surface plate 10 independently of each other, in other words, without common members or each other. be done.

FIG. 4 is a perspective view showing one end of the guide beam 42 and its surroundings. The restraint unit 88 does not restrain the relative movement of the X-axis drive section and the second moving body 14 in the X-axis direction, but restrains the relative movement of the X-axis drive section and the second moving body 14 in the Y-axis direction. In particular, the restraint unit 88 is configured such that the X-axis drive section and the second movable body 14 are not in contact with each other, and more specifically, the X-axis drive section and the second movable body 14 are not in direct contact with each other, and other Relative movement in the Y-axis direction is restricted without being connected through any other members.

FIG. 5 is a diagram illustrating an example of the restraint unit 88. FIG. 5 is a top view of the stage device 100. In FIG. 5, the first moving body 12 and the Y-axis drive unit are not shown. The restraint unit 88 includes a first magnet 90, a second magnet 92, and a magnetic body 93. The magnets 90, 92 may be permanent magnets or electromagnets. The first magnet 90 is fixed to the X-axis drive section. In FIG. 5, it is fixed to the side of the support member facing the guide beam 42. The second magnet 92 and the magnetic body 93 are fixed to the second moving body 14. In FIG. 5, it is fixed to the side of the guide beam 42 facing the support member.

The magnetic body 93 faces the first magnet 90 in the Y-axis direction. Note that the magnetic body 93 may be fixed to the X-axis drive section and may face the second magnet 92 in the Y-axis direction. In any case, the magnetic body 93 and the magnet are attracted to each other in the Y-axis direction, and as a result, the X-axis drive section and the second moving body 14 are attracted to each other in the Y-axis direction, and the X-axis drive section and the second moving body 14 are attracted to each other in the Y-axis direction. relative movement in the Y-axis direction is restricted. In other words, the restraint unit 88 of this embodiment restrains the relative movement of the X-axis drive section and the second movable body 14 in the Y-axis direction by magnetic attraction force. Since the relative movement in the Y-axis direction is restricted, when the second moving body 14 is driven by the Y-axis drive unit and moves in the Y-axis direction, the X-axis drive unit also moves along the Y-axis following the second moving body 14. move in the direction.

Further, the first magnet 90 and the second magnet 92 are fixed so that the same magnetic poles face each other in the Y-axis direction. In FIG. 5, the S poles are fixed so as to face each other. Since the same magnetic poles face each other in the Y-axis direction, the first magnet 90 and the second magnet 92 repel each other in the Y-axis direction. This repulsive force maintains the non-contact state between the first magnet 90 and the X-axis drive unit, and the second magnet 92 and the second moving body 14.

On the other hand, the X-axis drive section and the second movable body 14 are not restricted in relative movement in the X-axis direction, and are supported independently of each other, so the X-axis drive section drives the first movable body 12. The reaction force upon driving is not propagated to the second moving body 14.

The operation of the stage device 100 configured as above will be explained.
When current is supplied to the coil of the first Y-axis mover 30 of the first Y-axis drive unit 20 and the coil of the second Y-axis mover 36 of the second Y-axis drive unit 22, a gap between each coil and the Y-axis stator An electromagnetic force is generated, and the Y-axis movable element and eventually the second movable body 14 (and the first movable body 12) move in the Y-axis direction due to the electromagnetic interaction. When current is supplied to the coils of the first X-axis movable element 54 of the first X-axis drive section 16 and the coils of the second X-axis movable element 60 of the second X-axis drive section 18, the distance between each coil and the X-axis stator An electromagnetic force is generated, and the X-axis movable element and, in turn, the first moving body 12 move in the X-axis direction due to the electromagnetic interaction. By moving the first moving body 12 and the second moving body 14 in this manner, the stage 70 of the first moving body 12 is moved in the XY directions, and the object placed on the stage 70 is positioned in the XY directions. . Since the first X-axis drive section 16, the second X-axis drive section 18, and the second moving body 14 are restrained from relative movement in the Y-axis direction by the restraint unit 88, movement of the second moving body 14 in the Y-axis direction Accordingly, the first X-axis drive section 16 and the second X-axis drive section 18 also move in the Y-axis direction.

According to the stage device 100 according to the embodiment described above, the relative movement of the X-axis drive unit and the second moving body 14 in the X-axis direction is not restrained, and the relative movement of the Y-axis direction is restrained without contact. Furthermore, the X-axis drive section and the second moving body are supported independently of each other. As a result, while the X-axis drive section is moved in the Y-axis direction following the movement of the second movable body 14 in the Y-axis direction, a reaction force is generated when the first movable body 12 is driven by the X-axis drive section. is prevented from propagating to the second moving body 14 (particularly to the second movable part 38). Therefore, hysteresis and vibration caused by the structural members of the second movable portion 38 do not occur or are suppressed from occurring. In other words, a more accurate stage device 100 is realized. Further, since the reaction force is prevented from propagating to the second movable part 38, the vibration of the second movable part 38 due to the reaction force stops relatively quickly. This improves the throughput of production using the stage device 100.

The stage apparatus has been described above in the embodiment. Those skilled in the art will understand that this embodiment is merely an example, and that various modifications can be made to the combinations of the constituent elements and processing processes, and that such modifications are also within the scope of the present invention. be. A modified example will be shown below.

(Modification 1)
FIG. 6 is a diagram illustrating another example of the restraint unit 88. FIG. 6 corresponds to FIG. In this modification, the restraining unit 88 is an air pad 96. The air pad 96 is fixed to one of the X-axis drive section and the second moving body 14. In FIG. 6, air pad 96 is secured to the side of the support member opposite guide beam 42. In FIG. The air pad 96 may be fixed to the support member via a spacer 98 so that the gap between the air pad 96 and the guide beam 42 is small. The air pad 96 has a suction port 96a and a jet port 96b facing the side surface of the guide beam 42. The air pad 96 sucks air from the suction port 96a. This attraction force restricts the relative movement of the X-axis drive unit and the second moving body 14 in the Y-axis direction.

The air pad 96 also jets high-pressure gas supplied from an air supply system (not shown) from the jet port 96b toward the guide beam 42 in the Y-axis direction. Due to the repulsive force, the non-contact state between the X-axis drive section and the second moving body 14 is maintained.

According to this modification, the same effects as the embodiment can be achieved.

(Modification 2)
FIG. 7 is a diagram illustrating still another example of the restraint unit 88. FIG. 7 corresponds to FIG. 5. The first X-axis drive section 16 and the second X-axis drive section 18 are connected to each other by a connecting member 94 so that they move together in the Y-axis direction. In FIG. 7 , the first support member 56 and the second support member 62 are connected by a connecting member 94 .

Restriction unit 88 includes a first magnet 90 and a second magnet 92. The first magnet 90 is fixed to the X-axis drive section. In FIG. 7, it is fixed to the side of the support member facing the guide beam 42. The second magnet 92 is fixed to the second moving body 14 . In FIG. 7, it is fixed to the side of the guide beam 42 facing the support member. The first magnet 90 and the second magnet 92 are fixed so that the same magnetic poles face each other in the Y-axis direction. In FIG. 7, the S poles are fixed so as to face each other. Thereby, the first magnet 90 and the second magnet 92 repel each other in the Y-axis direction.

When the second movable body 14 moves toward the first X-axis drive unit 16, the first support member 56 and, in turn, the first X-axis drive unit 16 are pushed against the guide beam 42 (second movable body 14) through the repulsive force of the magnet. and moves together with the second moving body 14. The second X-axis drive section 18 connected to the first X-axis drive section 16 also moves in the same direction. When the second movable body 14 moves toward the second X-axis drive unit 18, the second support member 62 and, in turn, the second X-axis drive unit 18 are pushed against the guide beam 42 (second movable body 14) through the repulsive force of the magnet. and moves together with the second moving body 14. The first X-axis drive section 16 connected to the second X-axis drive section 18 also moves in the same direction.

That is, in this modification, the relative movement of the X-axis drive unit and the second moving body 14 in the Y-axis direction is restrained using magnetic repulsion.

According to this modification, the same effects as the embodiment can be achieved.

(Modification 3)
FIG. 8 is a diagram illustrating still another example of the restraint unit 88. FIG. 8 corresponds to FIG. 7.

The restraint unit 88 includes an air pad 96 fixed to one of the X-axis drive section and the second moving body 14. In FIG. 8, the air pad 96 is fixed to the side of the support member facing the guide beam 42. In FIG. The air pad 96 is a blowout type air pad. The air pad 96 blows out high-pressure gas supplied from an air supply system (not shown) toward the guide beam 42 in the Y-axis direction, thereby forming a high-pressure gas layer in a small gap between the air pad 96 and the guide beam 42 . Note that the air pad 96 may be fixed to the side surface of the guide beam 42.

When the second moving body 14 moves toward the first X-axis drive unit 16, the first support member 56 and, in turn, the first X-axis drive unit 16 are pushed by the guide beam 42 (second moving body 14) through the gas layer. It moves together with the second moving body 14. The second X-axis drive section 18 connected to the first X-axis drive section 16 also moves in the same direction. When the second moving body 14 moves toward the second X-axis drive unit 18, the second support member 62 and, in turn, the second X-axis drive unit 18 are pushed by the guide beam 42 (second moving body 14) through the gas layer. It moves together with the second moving body 14. The first X-axis drive section 16 connected to the second X-axis drive section 18 also moves in the same direction.

That is, in this modification, the relative movement of the X-axis drive unit and the second moving body 14 in the Y-axis direction is restrained using the repulsive force of air.

According to this modification, the same effects as the embodiment can be achieved.

(Modification 4)
In the embodiment, a case has been described in which the Y-axis drive section drives the second moving body 14 in the Y-axis direction, but the present invention is not limited to this, and the Y-axis drive section drives the X-axis drive section in the Y-axis direction. It may be driven. In this case, the movable element of the Y-axis drive section and the X-axis drive section are connected. When the X-axis drive section is driven by the Y-axis drive section and moves in the Y-axis direction, the second moving body whose relative movement in the Y-axis direction with respect to the X-axis drive section is restrained by the restraint unit 88 moves to the X-axis drive section. and move in the Y-axis direction.

Any combination of the above-described embodiments and variations are also useful as embodiments of the present invention. A new embodiment resulting from a combination has the effects of each of the combined embodiments and modifications.

12 first moving body, 14 second moving body, 16 first X-axis drive section, 18 second X-axis drive section, 20 first Y-axis drive section, 22 second Y-axis drive section, 88 restraint unit, 100 stage device.

Claims (4)

a first moving body;
an X-axis drive unit that drives the first moving body in the X-axis direction and is configured to be movable in the Y-axis direction;
a second moving body configured to guide movement of the first moving body in the X-axis direction and movable in the Y-axis direction;
a Y-axis drive unit that drives the X-axis drive unit or the second moving body in the Y-axis direction;
a restraint unit that does not restrain the relative movement of the X-axis drive unit and the second moving body in the X-axis direction, but restrains the relative movement of the X-axis drive unit and the second moving body in the Y-axis direction in a state where the two are not in contact with each other;
A stage device comprising: The stage device according to claim 1, wherein the X-axis drive unit and the second moving body are supported independently of each other. The restraint unit restrains the relative movement of the X-axis drive unit and the second movable body in the Y-axis direction by an air attraction force, an air repulsion force, a magnetic attraction force, or a magnetic repulsion force. The stage device according to claim 1 or 2. 4. The stage apparatus according to claim 1, wherein the X-axis drive section and the Y-axis drive section are supported independently of each other.

Images