JP2023035181A - Transportation device, processing system, control method, and method for producing article - Google Patents

Abstract

To provide a transportation device capable of transporting a movable element without contact while controlling attitude of the movable element without increasing a system configuration.SOLUTION: A transportation device has a stator and a movable element that is transported in a first direction along the stator. One of the stator and the movable element has a plurality of coils arranged along the first direction. The other of the stator and the movable element is a magnet array including a plurality of magnets arranged in the first direction so as to be able to face the plurality of coils. magnetic poles of the magnets adjacent to each other in the first direction have different magnet arrays each other. The plurality of coils include a first coil group that applies first force in the first direction to the movable element by interaction with the magnet array and a second coil group that applies second force in a second direction intersecting with the first direction to the movable element by interaction with the magnet array by application of an electric current.SELECTED DRAWING: Figure 1A

Description

TECHNICAL FIELD The present invention relates to a conveying device, a processing system, a control method, and an article manufacturing method.

In general, transport systems are used in production lines for assembling industrial products, semiconductor exposure apparatuses, and the like. In particular, a transport system in a production line transports workpieces such as parts between multiple stations within or between factory-automated production lines. It may also be used as a transport device in process equipment. As a transport system, a transport system using a moving magnet type linear motor has already been proposed.

In a transport system using a moving magnet type linear motor, a transport system is constructed using a guide device that involves mechanical contact, such as a linear guide. However, in a transfer system that uses a guide device such as a linear guide, contaminants generated from the sliding part of the linear guide, such as worn pieces of rails and bearings, lubricating oil, and volatilized products, reduce productivity. I had a problem making it worse. In addition, there is a problem that the life of the linear guide is shortened due to increased friction of the sliding portion during high-speed transportation.

Therefore, Patent Documents 1 and 2 describe a non-contact magnetic levitation moving device or conveying device that does not have a sliding portion as a guide. In the moving device described in Patent Document 1, a total of seven rows of linear motors are installed to control the transportation and attitude of the mover. Also in the transport device described in Patent Document 2, a total of six rows of levitation electromagnets, guide electromagnets, and propelling electromagnets are installed.

JP 2015-230927 A Japanese translation of PCT publication No. 2016-532308

However, for example, in the case of the transport device described in Patent Document 2, the permanent magnets drivable in the transport direction and the levitation direction and the permanent magnets drivable in the guide direction orthogonal to the transport direction and the levitation direction can be arranged in the same arrangement. Can not. In order to avoid magnetic interference between permanent magnets driven in different directions, it is necessary to separate them from each other and not to energize the coils straddling each other. was there.

The present invention provides a conveying apparatus, a processing system, a control method, and an article manufacturing method that can convey a mover in a non-contact manner while controlling the attitude of the mover without enlarging the system configuration. It is intended to

According to one aspect of the present invention, it has a stator and a mover conveyed along the stator in a first direction, one of the stator and the mover being the first and the other of the stator and the mover has a plurality of magnets arranged along the first direction so as to be able to face the plurality of coils. wherein the magnetic poles of the magnets adjacent in the first direction have different magnet rows, and the plurality of coils interact with the magnet row by applying a current A first coil group that applies a first force to the mover in the first direction by applying a current to the mover, thereby exerting the first force on the mover by interaction with the magnet array. and a second group of coils for applying a second force in a second direction transverse to the one direction.

According to the present invention, the mover can be transported in a non-contact manner while controlling the posture of the mover without enlarging the system configuration.

1 is a schematic diagram showing a transport device according to a first embodiment of the invention; FIG. 1 is a schematic diagram showing a transport device according to a first embodiment of the invention; FIG. 1 is a schematic diagram showing a transport device according to a first embodiment of the invention; FIG. 1 is a schematic diagram showing a transport device according to a first embodiment of the invention; FIG. It is a schematic diagram showing a mover in the conveying device according to the first embodiment of the present invention. It is a schematic diagram showing a mover in the conveying device according to the first embodiment of the present invention. It is a schematic diagram showing a thrust generation method of a conveying device by a 1st embodiment of the present invention. It is a schematic diagram showing a thrust generation method of a conveying device by a 1st embodiment of the present invention. It is a schematic diagram showing a thrust generation method of a conveying device by a 1st embodiment of the present invention. It is a schematic diagram showing a thrust generation method of a conveying device by a 1st embodiment of the present invention. It is a schematic diagram showing a thrust generation method of a conveying device by a 1st embodiment of the present invention. It is a schematic diagram showing a thrust generation method of a conveying device by a 1st embodiment of the present invention. 5 is a graph showing thrust constants depending on the transport position in the transport apparatus according to the first embodiment of the present invention; 5 is a graph showing thrust constants depending on the transport position in the transport apparatus according to the first embodiment of the present invention; 5 is a graph showing thrust constants depending on the transport position in the transport apparatus according to the first embodiment of the present invention; FIG. 4 is a schematic diagram showing a thrust calculation method with 6 degrees of freedom in the conveying device according to the first embodiment of the present invention; FIG. 4 is a schematic diagram showing an arrangement example of coil units for each transport process of the transport apparatus according to the first embodiment of the present invention; FIG. 4 is a schematic diagram showing an arrangement example of coil units for each transport process of the transport apparatus according to the first embodiment of the present invention; It is a schematic diagram showing an application example of the conveying device according to the first embodiment of the present invention to a vacuum device. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the first coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. It is a schematic diagram showing other configurations of the second coil unit in the conveying apparatus according to the first embodiment of the present invention. FIG. 4 is a schematic diagram showing a conveying device according to a second embodiment of the invention; FIG. 4 is a schematic diagram showing a conveying device according to a second embodiment of the invention; FIG. 4 is a schematic diagram showing a conveying device according to a second embodiment of the invention; FIG. 4 is a schematic diagram showing a conveying device according to a second embodiment of the invention; FIG. 4 is a schematic diagram showing a conveying device according to a second embodiment of the invention; FIG. 4 is a schematic diagram showing a conveying device according to a second embodiment of the invention; FIG. 5 is a schematic diagram showing a conveying device according to a third embodiment of the invention; FIG. 5 is a schematic diagram showing a conveying device according to a third embodiment of the invention; FIG. 5 is a schematic diagram showing a conveying device according to a third embodiment of the invention;

An embodiment of the present invention will be described below with reference to the accompanying drawings. However, the following embodiments and examples merely exemplify preferred configurations of the present invention, and the scope of the present invention is not limited to those configurations.

[First embodiment]
A conveying apparatus according to a first embodiment of the present invention will be described with reference to FIGS. 1A to 9L.

First, a schematic configuration of a conveying device 1 according to this embodiment will be described with reference to FIGS. 1A to 2B. 1A to 1D are schematic diagrams showing a conveying device 1 according to this embodiment. FIG. 1A is a top view of the conveying device 1 viewed from the Z direction, which will be described later. FIG. 1B is a side view of the conveying device 1 viewed from the Y direction, which will be described later. 1C and 1D are side views seen from one direction and the other direction of the X direction, which will be described later. 2A and 2B are schematic diagrams showing the mover 10 in the transport device 1 according to this embodiment. FIG. 2A is a top view of the mover 10 as seen from the Z direction. FIG. 2B is a side view of the mover 10 viewed from the Y direction. Hereinafter, when there is no particular need to distinguish between constituent elements that may exist in multiple numbers, a common number-only code is used, and if necessary, a lower-case or upper-case alphabet is added after the number code to distinguish between them. .

As shown in FIGS. 1A to 1D, the conveying apparatus 1 according to this embodiment has a mover 10 that holds and conveys a work 123, and a stator 20 that forms a conveying path along which the mover 10 travels. ing. The conveying apparatus 1 according to the present embodiment is a magnetic levitation conveying type conveying apparatus that conveys a magnetically levitated mover 10 that is levitated by magnetic force against gravity. In the present embodiment, a moving magnet type linear motor (moving permanent magnet type linear motor, movable field type linear motor) is shown as an example of the conveying apparatus 1, but the conveying apparatus 1 is a moving coil type linear motor. It may be a conveying device by The conveying device 1 according to this embodiment constitutes part of a processing system that also includes a processing device 30 that processes the workpiece 123 conveyed by the mover 10 . The processing system can manufacture an article by processing the workpiece 123 using the processing device 30 .

For example, the transport device 1 transports the work 123 held by the mover 10 to the processing device 30 that processes the work 123 by transporting the mover 10 along the stator 20 . The processing apparatus 30 is not particularly limited, but may be, for example, a deposition apparatus, a sputtering apparatus, or the like for forming a film on a substrate such as a glass substrate that is the workpiece 123 .

Here, coordinate axes and directions used in the following description are defined. The moving direction of the mover 10 along the horizontal direction, that is, the traveling direction of the mover 10 is defined as the X-axis, and the moving direction of the mover 10 is defined as the X direction. An arrow M in FIG. 1 indicates the transport direction of the mover 10 along the X direction. Also, the Z-axis is taken along the vertical direction that is perpendicular to the X-direction, and the vertical direction is defined as the Z-direction. Also, the Y-axis is taken along the direction perpendicular to the X-direction and the Z-direction, and the direction perpendicular to the X-direction and the Z-direction is the Y-direction. Further, the direction of rotation about the X axis is the Wx direction, the direction of rotation about the Y axis is the Wy direction, and the direction of rotation about the Z axis is the Wz direction. Also, "*" is used as a symbol for multiplication. Also, the Y− side of the mover 10 is described as the R side, and the Y+ side is described as the L side. It should be noted that the transport direction of the mover 10 does not necessarily have to be the horizontal direction, but even in that case, the Y direction and the Z direction can be similarly defined with the transport direction being the X direction. The X-direction, Y-direction, and Z-direction are not necessarily limited to directions orthogonal to each other, and can also be defined as directions that intersect each other.

The stator 20 has a plurality of coil units of two or more different types. 1A to 1D illustrate a case where the stator 20 has a first coil unit 100 and a second coil unit 110 as a plurality of coil units. The first coil unit 100 has a coil core 101 and a coil 102 wound around the coil core 101 . The second coil unit 110 has a coil core 111 and a coil 112 wound around the coil core 111 . A case where the stator 20 has the first coil unit 100 and the second coil unit 110 will be described below.

The first coil unit 100 and the second coil unit 110 are arranged side by side along the moving direction (X direction) of the mover 10 . In FIGS. 1A to 1D, 24 first coil units 100 and 8 second coil units 110 are installed, and 3 first coil units 100 and 3 on each of the R side and the L side. , a case where one second coil unit 110 is alternately arranged. In this case, three coils 102 of the first coil unit 100 are installed between two coils 112 of the second coil unit 110 . The numbers of the first coil units 100 and the number of the second coil units 110 are not particularly limited, and can be appropriately changed according to the length of the transport path along which the mover 10 is to be transported.

Also, the number and order in which the first coil units 100 and the second coil units 110 are arranged in succession are not particularly limited. The second coil units 110 may be installed continuously, or the first coil units 100 and the second coil units 110 may be installed alternately one by one. The number of rows in which the first coil units 100 and the second coil units 110 are arranged in the X direction is not limited to the two rows shown in FIGS. 1A to 1D, and may be one row or three rows. A plurality of columns as described above may be used.

As shown in FIGS. 2A and 2B, the mover 10 has a magnet group made up of a plurality of permanent magnets 121, a mover yoke 120, and a holding portion 122. As shown in FIGS. The mover yokes 120 are arranged and attached to both the R side and the L side of the mover 10 along the X direction. A plurality of permanent magnets 121 are arranged on the mover yoke 120 so as to form a magnet row in two rows along the X direction, which is the longitudinal direction of the mover yoke 120 . The holding part 122 is attached to the bottom surface of the mover 10 . The mover 10 is transported along the stator 20 in the X direction.

Specifically, the plurality of R-side permanent magnets 121R are arranged on the mover yoke 120R so as to form a magnet row in two rows along the X direction, which is the longitudinal direction of the mover yoke 120R. ing. The plurality of permanent magnets 121R have different polarities on surfaces adjacent to each other in both the X direction and the Y direction, and N poles and S poles are arranged alternately. there is Similar to the R side, the plurality of permanent magnets 121L on the L side are arranged on the mover yoke 120L so as to form a magnet row in two rows along the X direction, which is the longitudinal direction of the mover yoke 120L. It is The plurality of permanent magnets 121L have different polarities on surfaces adjacent to each other in both the X direction and the Y direction, and N poles and S poles are arranged alternately. there is In the following description, the permanent magnet attached to the mover 10 is simply referred to as "permanent magnet 121" and the mover yoke is simply referred to as "mover yoke 120" unless there is a particular need to distinguish them.

Thus, the plurality of permanent magnets 121 form a plurality of magnet rows in which the magnetic poles of the permanent magnets 121 adjacent in the X direction and the Y direction are different from each other. The permanent magnets 121 arranged in the X direction may be arranged in a plurality of rows in the Y direction, or may be arranged in a single row.

The plurality of permanent magnets 121 are arranged so as to be able to face both or one of the first coil unit 100 and the second coil unit 110 of the stator 20 in the Z direction. The first coil unit 100 and the second coil unit 110 are installed such that three of them arranged in the X direction are arranged between the magnetic pole periods Pm of the permanent magnets 121 .

The holding part 122 is configured to hold a workpiece 123, which is an object to be transferred, on the lower side of the mover 10, for example. Note that the holding part 122 only needs to be able to hold the work 123 on the mover 10, and the place and holding mechanism where the holding part 122 holds the work 123 are not particularly limited. The work 123 is transported in the X direction as the mover 10 is transported while being held by the holding portion 122 of the mover 10 . The mover 10 may be guided by a linear guide or the like (not shown) so as to be able to travel along the X direction.

Further, the conveying device 1 according to this embodiment has a control unit 40 that controls the conveying of the mover 10 in the X direction along the stator 20 . The control unit 40 uses position detection means such as a linear encoder and a laser length measuring device (not shown) to determine the translational position (X-axis, Y-axis, Z-axis) and rotational orientation (Wx-axis, Z-axis) of the mover 10 . Wy axis, Wz axis) are detected. The control unit 40 also calculates the amount of current to be supplied to each coil 102 of the stator 20 according to the detected position of the mover 10 and energizes each coil 102 , 112 . As will be described later, the control unit 40 can energize the coils 102 and 112 with three-phase alternating current of U-phase, V-phase and W-phase. As a result, the control unit 40 generates a thrust to levitate the mover 10 in the Z direction and a thrust to drive the mover 10 in the X direction between the coils 102 and the permanent magnet 121 of the mover 10 . It is possible to generate a magnetic force that becomes In addition, a magnetic force acting as a thrust for guiding the mover 10 in the Y direction can be generated between each coil 112 and the permanent magnet 121 of the mover 10 .

A magnetic force acting as an attractive force acts as part of the levitation force between both or one of the first coil unit 100 and the second coil unit 110 and the permanent magnet 121 . By combining the thrust generated by the coil 102 and the coil 112, the control unit 40 controls six degrees of freedom of the X-axis, Y-axis, Z-axis, Wx-axis, Wy-axis, and Wz-axis of the mover 10, while controlling the X-axis. The workpiece 123 can be transported by transporting the mover 10 along the direction. In this embodiment, a case is shown in which the mover 10 is conveyed by controlling the six degrees of freedom, but it is not limited to this. It is also possible to install a guide mechanism for an axis that guides the mover 10 in the direction of one or more axes, and to control the degree of freedom of an axis other than the axis guided by the guide mechanism. For example, the mover 10 may be transported while controlling degrees of freedom less than six degrees of freedom, such as controlling two degrees of freedom of the mover 10 on the X axis and the Y axis.

In this embodiment, the stator 20 has the first coil unit 100 and the second coil unit 110, and the mover 10 has a plurality of permanent magnets 121. Although the moving magnet type linear motor conveying device is shown, , but not limited to. The conveying device 1 may be a conveying device using a moving coil type linear motor. In this case, the first coil unit 100 and the second coil unit 110 are installed on the mover 10 and the plurality of permanent magnets 121 are installed on the stator 20 .

Next, the details of the first and second coil units 100 and 110 and the principle of thrust generation according to this embodiment will be described with reference to FIGS. 3A to 4C. 3A to 3F are schematic diagrams showing a thrust generating method for the conveying device 1 according to this embodiment. 3A and 3B show an energization method when the first coil unit 100 generates thrust in the X direction. 3C and 3D show an energization method when the first coil unit 100 generates thrust in the Z direction. 3E and 3F show an energization method when the second coil unit 110 generates thrust in the Y direction. 3A, 3C, and 3E are views of the permanent magnet 121 of the mover 10 and the first coil unit 100 or the second coil unit 110 of the stator 20, respectively, viewed from the Y direction. 3B, 3D and 3F are views of the permanent magnet 121 and the first coil unit 100 or the second coil unit 110 shown in FIGS. 3A, 3C and 3E, respectively, viewed from the X direction.

A first coil unit 100 is composed of a coil core 101 and a coil 102 . The coil core 101 is composed of a back yoke portion 103 and two tooth portions 104a and 104b. The back yoke portion 103 is arranged along the Y direction. The tooth portions 104a and 104b are aligned in the Y direction and protrude downward in the Z direction from one end and the other end of the back yoke portion 103 in the Y direction toward the side along which the mover 10 travels. The coil 102 is wound around the back yoke portion 103 with the axis along the Y direction as the winding axis.

The plurality of coils 102 of the plurality of first coil units 100 are applied with a current as will be described later, and interact with the magnet array made up of the permanent magnets 121 so as to move toward the mover 10 in the X and Z directions. constitute a group of coils that apply electromagnetic force to

A second coil unit 110 is composed of a coil core 111 and a coil 112 . The coil core 111 is composed of a back yoke portion 113 and three tooth portions 114a, 114b and 114c. The back yoke portion 113 is arranged along the Y direction. The tooth portions 114a, 114b, and 114c are aligned in the Y direction and protrude downward in the Z direction from one end, the center, and the other end of the back yoke portion 113 in the Y direction toward the side on which the mover 10 travels. The coil 112 is wound around the center tooth portion 114b with the axis along the Z direction as the winding axis.

When a current is applied to the plurality of coils 112 of the plurality of second coil units 110 as will be described later, an electromagnetic force is exerted on the mover 10 in the Y direction due to interaction with the magnet array composed of the permanent magnets 121 . Construct a coil group that provides

In FIGS. 3A to 3F, arrows Fx, Fz, and Fy indicated below the mover yoke 120 indicate the direction of the generated thrust. Arrows shown in the coils 102 and 112 indicate directions of currents flowing through the coils 102 and 112, respectively. Also, N and S written on the permanent magnet 121 indicate magnetic poles on the upper surface of the permanent magnet 121 . N and S written on the teeth 104a, 104b, 114a, 114b, and 114c are the lower surfaces of the teeth 104a, 104b, 114a, 114b, and 114c obtained by applying a predetermined current to the coils 102 and 112. shows the magnetic poles of 3A to 3F show an example in which the first coil unit 100 and the second coil unit 110 are arranged for explaining the principle of thrust generation, and the first coil unit 100 and the second coil for thrust generation. The arrangement of the units 110 is not limited to these arrangements.

Pm is the period of the magnetic poles of the permanent magnet 121 in the X direction, x is the position in the X direction of the mover 10 including the permanent magnet 121 and the mover yoke 120, and the center of an arbitrary U-phase coil 102 or coil 112 is in the X direction. Let the coordinate of the position x where the center of the north pole of the permanent magnet coincides be the origin. The control unit 40 controls the current value to be applied to the coil 102 of the first coil unit 100 or the coil 112 of the second coil unit 110 as follows, so that the mover 10 is Alternatively, thrust can be generated in the Y direction.

When generating thrust in the X direction, the controller 40 energizes the coil 102 of the first coil unit 100 as shown in FIGS. 3A and 3B. As a result, the control unit 40 sets the current command to Ix0, the U-phase coil 102 by Equation (1), the V-phase coil 102 by Equation (2), and the W-phase coil 102 by Equation (3). Apply the indicated current value. By energizing the coil 102 of the first coil unit 100, thrust in the X and Z directions is generated. However, by energizing the current values shown in equations (1) to (3), the Z-direction thrust forces generated by the U-phase coil 102, the V-phase coil 102, and the W-phase coil 102 are canceled out, and the X A force with a constant thrust constant acts in the direction. In this way, a thrust force can be generated in the X direction with respect to the mover 10 .

When generating thrust in the Z direction, the controller 40 energizes the coil 102 of the first coil unit 100 as shown in FIGS. 3C and 3D. As a result, the control unit 40 sets the current command to Iz0, the U-phase coil 102 by Equation (4), the V-phase coil 102 by Equation (5), and the W-phase coil 102 by Equation (6). Apply the indicated current value. As described above, energizing the coil 102 of the first coil unit 100 generates thrust in the X and Z directions. However, by energizing according to equations (4) to (6), the thrust in the X direction generated by the U-phase coil 102, the V-phase coil 102, and the W-phase coil 102 cancel each other out, and the thrust in the Z direction is is a force with a constant thrust constant. In this way, a thrust force can be generated in the Z direction with respect to the mover 10 .

When generating thrust in the Y direction, the controller 40 energizes the coil 112 of the second coil unit 110 as shown in FIGS. 3E and 3F. As a result, the control unit 40 sets the current command to Iy0, the U-phase coil 112 by Equation (7), the V-phase coil 112 by Equation (8), and the W-phase coil 112 by Equation (9). Apply the indicated current value. By energizing the coil 112 of the second coil unit 110, a thrust force is generated in the Y direction. force works. In this way, a thrust force can be generated in the Y direction with respect to the mover 10 .

4A to 4C are graphs showing the thrust force constant depending on the transport position in the transport apparatus 1 according to this embodiment. The thrust constant is the thrust generated when a unit current command is given as the current command in the above-described equations (1) to (9). Specifically, FIG. 4A shows an X-direction thrust constant, which is the X-direction thrust generated when a unit current command is given as the current command Ix0 in equations (1) to (3). FIG. 4B shows the Y-direction thrust constant, which is the Y-direction thrust generated when a unit current command is given as the current command Iy0 in equations (7) to (9). FIG. 4C shows the Z-direction thrust constant, which is the Z-direction thrust generated when a unit current command is given as the current command Iz0 in equations (4) to (6). From FIGS. 4A to 4C, it can be seen that the thrust constant shows a constant value regardless of the position of the mover 10 in the X direction in any of the X, Y and Z directions.

In the X and Z directions, the same first coil unit 100 is used to generate thrust. For this reason, by superimposing the currents represented by the formulas (1) to (3) and the currents represented by the formulas (4) to (6) and causing them to flow through the coil 102, independent currents in the X direction and the Z direction can be obtained. It is possible to generate a thrust force that

Further, when energizing the three-phase alternating current to the coils 102 of the plurality of first coil units 100, the number of the U-phase coils 102 to be energized, the number of the V-phase coils 102 to be energized, and the number of the W-phase coils to be energized 102 can be the same as each other. As a result, the thrust constants in the X and Z directions can be made constant regardless of the position of the mover 10 in the X direction.

Similarly, when energizing the three-phase alternating current to the coils 112 of the plurality of second coil units 110, the number of U-phase coils 112 to be energized, the number of V-phase coils 112 to be energized, and and the number of W-phase coils 112 can be the same. As a result, the thrust force constant in the Y direction can be made constant regardless of the position of the mover 10 in the X direction.

In at least one of the coil group consisting of the plurality of coils 102 and the coil group consisting of the plurality of coils 112, the control unit 40 controls the three-phase alternating current so that the number of coils in each phase is the same as described above. can be energized.

The control unit 40 energizes the coil 102 of the first coil unit 100 and the coil 112 of the second coil unit 110 with three-phase alternating current as described above, and moves the mover 10 in the X direction and the Y direction. The mover 10 can be controlled by generating thrust in the direction and the Z direction.

Next, a thrust force calculation method with six degrees of freedom in the conveying apparatus 1 according to this embodiment will be described with reference to FIG. FIG. 5 is a schematic diagram showing a thrust calculation method with six degrees of freedom in the conveying apparatus 1 according to the present embodiment, and is a top view showing the mover 10 and the stator 20. As shown in FIG.

When the mover 10 in the magnetically levitated state is transported by traveling, assuming that the center of gravity of the mover 10 is G as shown in FIG. It is necessary to control 6 degrees of freedom of 3 degrees of freedom (Wx axis, Wy axis, Wz axis). Let the center of gravity G of the mover 10 be the origin, and the coordinates of an arbitrary coil unit (the second coil unit 110 in the example of FIG. 5) on the XY plane be (Lx, Ly). Let Fx be the thrust acting in the X direction of the translational direction of the mover 10, Fy be the thrust acting in the Y direction, and Fz be the thrust acting in the Z direction. Let Tx be the moment force acting in the Wx direction of the rotation direction of the mover 10, Ty be the moment force acting in the Wy direction, and Tz be the moment force acting in the Wz direction. Then, each force is represented by the following equations (10) to (15).
Fx = Σ(Kx * Ix) (10)
Fy = Σ(Ky*Iy) (11)
Fz = Σ(Kz*Iz) (12)
Tx = Σ(Kz*Iz*Ly) (13)
Ty=-Σ(Kz*Iz*Lx) (14)
Tz=-Σ(Kx*Ix*Ly)+Σ(Ky*Iy・Lx) (15)

Here, Kx is the thrust force generated in the X direction when a unit current command is given to the first coil unit 100 . Ky is the thrust generated in the Y direction when a unit current command is given to the second coil unit 110 . Kz is the thrust generated in the Z direction when a unit current command is given to the first coil unit 100 . Kx, Ky, and Kz change periodically depending on the position x of the mover 10 in the X direction, and are represented by equations (16) to (24) with Kx0, Ky0, and Kz0 as constants.

As shown in equations (10) to (12), the translational thrusts Fx, Fy, and Fz acting on the mover 10 are the sums of the forces acting in the respective axial directions from the respective coil units. Further, as shown in equations (13) to (15), the moment forces Tx, Ty, and Tz in the rotational direction acting on the mover 10 are from the center of gravity G of the mover 10 to each coil unit of the component perpendicular to the rotation axis. is the sum of products of the distances Lx and Ly and the force acting in the rotational direction from each coil unit.

The control unit 40 shown in FIG. 1 feeds back detected values of the position and orientation of the mover 10 with 6 degrees of freedom, and controls the mover 10 by applying a thrust force with 6 degrees of freedom so that the mover 10 attains the target position and orientation. As a result, levitation control transportation of the mover 10 with six degrees of freedom is realized. At this time, the control unit 40 superimposes the currents that generate the respective thrusts of the six degrees of freedom and energizes the coils 102 and 112. Therefore, even for the same U-phase coil, for example, different currents are supplied to the individual coils.

Next, an arrangement example of the first coil unit 100 and the second coil unit 110 for each transport process of the transport apparatus 1 according to this embodiment will be described with reference to FIGS. 6A and 6B. 6A and 6B are schematic diagrams showing examples of arrangement of the first coil unit 100 and the second coil unit 110 for each transfer process of the transfer device 1 according to this embodiment.

As described above, the transport device 1 according to this embodiment constitutes a part of a processing system that processes the work 123 transported by the mover 10, and has a plurality of processes in the transport section. . For example, when a plurality of workpieces 123 are continuously transported by a plurality of movers 10, the mover 10 is accelerated/decelerated to move the workpiece 123 in front of the mover 10 to be transported efficiently. There is a "process with additional acceleration/deceleration" to shorten the distance between In addition, there is a "processing step" for aligning and processing the work 123 at a predetermined position. In such a case, it is possible to arrange coil units suitable for each process.

FIG. 6A shows an arrangement example of the first coil unit 100 and the second coil unit 110 in the acceleration/deceleration addition step. When the mover 10 is accelerated/decelerated to shorten the distance from the mover 10 in front, the acceleration and deceleration of the mover 10 that transports the work 123 are prioritized over the accuracy of the transport position of the work 123. There are many. Therefore, in the section where the additional acceleration/deceleration process is performed, more first coil units 100 capable of generating thrust in the X and Z directions are arranged than the second coil units 110 capable of generating thrust in the Y direction. It is In the example shown in FIG. 6A , a U-phase second coil unit 110 d , a W-phase second coil unit 110 c , and a V-phase second coil unit 110 b each face the permanent magnet 121 . are arranged to All others are first coil units 100a, 100b, 100c, and 100d. The first coil units 100a, 100b, 100c, and 100d are arranged between the second coil units 110 such that the U-phase, V-phase, and W-phase are mutually different in the X direction. By arranging in this way, it is possible to give large acceleration and deceleration to the mover 10 while controlling the mover 10 with six degrees of freedom.

Thus, in the region of the stator 20 facing the mover 10, the plurality of coils 102 are arranged to have at least one U-phase coil 102, one V-phase coil 102, and one or more W-phase coils 102. can do. Also, in the region of the stator 20 facing the mover 10, the plurality of coils 112 are arranged so as to have at least one U-phase coil 112, at least one V-phase coil 112, and at least one W-phase coil 112. can be done. In this case, the plurality of coils 102 and the plurality of coils 112 can be arranged so that the number of coils differs from each other in the region of the stator 20 facing the mover 10 . By appropriately setting the number of both coils, the acceleration and deceleration that can be applied to the mover can be appropriately set.

FIG. 6B shows an arrangement example of the first coil unit 100 and the second coil unit 110 in the manufacturing process. After conveying the work 123 to the machining process by the mover 10, when the work 123 is aligned at a predetermined position and processed, the mover 10 has six degrees of freedom in order to achieve highly accurate positioning and holding of the work 123. High thrust may be required for each of them. In the example shown in FIG. 6B, the first coil units 100a, 100b, 100c, 100d, and 100e and the second coil units 110a, 110b, 110c, and 110d have six degrees of freedom around the center of gravity G of the mover 10. arranged symmetrically with respect to By arranging in this way, in the processing process, the control performance of the six degrees of freedom of the mover 10 is enhanced, and the processing device 30 is moved to the position indicated by the arrow D (X direction), the workpiece 123 can be machined.

The first coil unit 100 and the second coil unit 110 are detachable and replaceable in the stator 20, respectively. Thereby, when the transfer process is rearranged, the arrangement of the first coil unit 100 and the second coil unit 110 can be changed so as to be suitable for the process. Also, when a coil unit fails, only the failed coil unit can be replaced.

Next, an example in which a vacuum magnetic levitation transfer apparatus is configured by applying the transfer apparatus 1 described in the above embodiment to a vacuum apparatus will be described with reference to FIG. FIG. 7 is a schematic diagram showing an application example of the transfer device 1 to a vacuum device.

In the case of a vacuum magnetic levitation transport apparatus, a coil unit is arranged in a vacuum chamber, and the mover is transported in a state of magnetic levitation using the attractive force generated between the mover and the stator as levitation force. In such a vacuum magnetic levitation transfer apparatus, a gate valve or the like may be arranged for opening and closing a gate at the boundary between the vacuum chambers adjacent to each other. If a gate valve or the like is arranged, the coil units cannot be arranged continuously without gaps in the stator.

In the present embodiment, stable transport control of the mover 10 is realized even in the space 304 in which the gate valve 300 described below is installed, in which the coil units cannot be arranged continuously without gaps.

As shown in FIG. 7, the vacuum magnetic levitation transfer apparatus 2 according to this embodiment has a configuration in which vacuum chambers 301a and 301b and a gate valve 300 are added to the configuration of the first embodiment. .

The transfer device 1 is installed inside the vacuum chambers 301a and 301b. That is, the stator 20 is installed inside the vacuum chambers 301a and 301b. The mover 10 is carried by the stator 20 inside the vacuum chambers 301a and 301b. The vacuum chambers 301a and 301b are connected to each other through the gate valve 300 so that the internal space in which the transfer device 1 is installed can be connected or separated. Vacuum chambers 301a and 301b are connected to vacuum pumps (not shown) so that they can be maintained at an appropriate degree of vacuum.

The gate valve 300 is provided in a space 304 that is a connecting portion between the vacuum chambers 301a and 301b. The gate valve 300 moves up and down along the Z direction and functions as a valve portion that opens and closes the vacuum chambers 301a and 301b at the connecting portion of the vacuum chambers 301a and 301b. That is, as shown in FIG. 7, the gate valve 300 is raised to open the vacuum chambers 301a and 301b on both sides and connect them to each other. Further, the gate valve 300 is lowered by the gate valve elevating unit 303 to close the vacuum chambers 301a and 301b on both sides and separate them from each other.

As described above, the vacuum magnetic levitation transfer apparatus 2 includes the area where the vacuum chambers 301a and 301b are installed and the space 304 which is the area where the gate valve 300 is installed. The area where the vacuum chambers 301a and 301b are installed is the area where the first coil unit 100 and the second coil unit 110 are installed. A space 304 sandwiched between and adjacent to the areas where the vacuum chambers 301a and 301b are installed is an area where neither the first coil unit 100 nor the second coil unit 110 is installed.

In the space 304 where the gate valve 300 is installed, the first coil unit 100 and the second coil unit 110 cannot be arranged continuously without gaps. Therefore, as shown in FIG. 7, when the tip of the mover 10 in the conveying direction M is in the space 304, the magnet 121 acts between the permanent magnet 121 at the tip of the mover 10 and the coil unit. Attractive force and thrust due to coil current may decrease. If the attraction force and the thrust force decrease, the posture controllability especially in the Wy direction may decrease.

On the other hand, in the configuration shown in FIG. 7, the first coil units 100a and 100b and the second coil unit 110a are arranged inside the vacuum chamber 301a, and the first coil unit 100c is arranged inside the vacuum chamber 301b. are placed.

The second coil unit 110a that generates thrust in the Y direction has a rotation axis in the Wy direction that passes through the center of gravity G of the mover 10 when the mover 10 is in the transport position shown in the drawing, where the tip portion is located in the space 304. It is arranged to be positioned on or near it. A rotation axis in the Wy direction passing through the center of gravity G is an axis along the Y direction. Also, the first coil unit 100a and the first coil unit 100b that generate thrust in the X direction and the Z direction are arranged in front of and behind the second coil unit 110a in the X direction. The first coil unit 100c, which also generates thrust in the X and Z directions, is arranged adjacent to the space 304 inside the vacuum chamber 301b.

By arranging the coil units as described above, it becomes possible to generate a larger moment force Ty acting in the Wy direction, and the attitude controllability in the Wy direction can be improved. That is, when the leading end portion of the mover 10 in the conveying direction M passes through the space 304, the second coil unit 110a is shifted from the rotation axis in the Wy direction passing through the center of gravity G of the mover 10 or its vicinity. Become. At this time, the moment force Ty in the Wy direction acting on the rear end portion of the mover 10 in the conveying direction M decreases. However, after passing through the space 304, the permanent magnet 121 at the tip of the mover 10 in the conveying direction M comes to a position facing the first coil unit 100c. growing. Therefore, the mover 10 can be transported stably through the space 304 in which the coil units cannot be arranged continuously without gaps.

Next, another configuration of the first coil unit 100 in the conveying device 1 according to this embodiment will be described with reference to FIGS. 8A to 8J. 8A to 8J show other configurations of the first coil unit 100 in the conveying device 1 according to this embodiment. 8A, 8C, 8E, 8G, and 8I are side views of the first coil units 100 having different configurations as seen from the Y direction. 8B, 8D, 8F, 8H and 8J are side views of the first coil unit 100 shown in FIGS. 8A, 8C, 8E, 8G and 8I, respectively, viewed from the X direction. be. 8A, 8C, 8E, 8G, and 8I show one set of the U-phase coil 102, the V-phase coil 102, and the W-phase coil 102 of the stator 20, and the conveying direction of the mover 10. 1 shows one set of permanent magnets 121 in a simplified manner. An arrow shown in the coil 102 indicates the direction of current flow. Also, N and S written on the permanent magnet 121 indicate magnetic poles on the upper surface of the permanent magnet 121 . N and S written on the teeth 104 indicate the magnetic poles of the lower surfaces of the teeth 104 when a predetermined current is applied to the coil 102 .

8A and 8B show a configuration example of the first coil unit 100 explained in FIG. 8C and 8D show a configuration example in which coils 102a and 102b are wound around tooth portions 104a and 104b instead of coil 102 being wound around back yoke portion 103. FIG.

FIGS. 8E and 8F, and FIGS. 8G and 8H respectively show configuration examples in which the magnet rows of the permanent magnets 121 arranged along the X direction are arranged adjacent to each other in three rows in the Y direction. In these cases, the coil core 101 includes a back yoke portion 103 arranged along the Y direction and three coil cores arranged in the Y direction and projecting downward in the Z direction from one end, center, and other end of the back yoke portion 103 in the Y direction. It has three tooth portions 104a, 104b and 104c. 8E and 8F show a configuration example in which coils 102a and 102b are wound on a portion between teeth 104a and 104b and a portion between teeth 104b and 104c in back yoke portion 103. FIG. FIGS. 8G and 8H show configuration examples in which coils 102a, 102b, and 102c are wound around teeth 104a, 104b, and 104c.

FIGS. 8I and 8J show configuration examples in which only one row of permanent magnets 121 arranged in the X direction is arranged in the Y direction. In this case, the coil core 101 has one tooth portion 104 protruding downward in the Z direction from the back yoke portion 103 , and the coil 102 is wound around the tooth portion 104 . When the number of teeth portions 104 in the Y direction is one, the teeth portions 104 aligned in the X direction may be connected by the back yoke portion 103 in order to reduce the magnetic resistance.

As shown in FIGS. 8A and 8B, 8C and 8D, when the number of rows of the permanent magnets 121 in the Y direction is even, the first coil unit 100 has an even number of teeth 104 in the Y direction. can be configured as On the other hand, as shown in FIGS. 8E and 8F, FIGS. 8G and 8H, and FIGS. 8I and 8J, when the number of rows of the permanent magnets 121 in the Y direction is odd, the first coil unit 100 has teeth in the Y direction. The number of units 104 can be configured to be an odd number. Further, the coil 102 may be wound around the back yoke portion 103 or around the teeth portion 104 as long as the same magnetic flux can be generated.

Next, another configuration of the second coil unit 110 in the conveying device 1 according to this embodiment will be described with reference to FIGS. 9A to 9L. 9A to 9L show other configuration examples of the second coil unit 110 in the conveying device 1 according to this embodiment. 9A, 9C, 9E, 9G, 9I, and 9K are side views of second coil units 110 having different configurations as seen from the Y direction. Figures 9B, 9D, 9F, 9H, 9J and 9L illustrate the second coil unit 110 shown in corresponding Figures 9A, 9C, 9E, 9G, 9I and 9K respectively in the X direction. is a side view seen from . 9A, 9C, 9E, 9G, 9I, and 9K show one set of the U-phase coil 112, the V-phase coil 112, and the W-phase coil 112 of the stator 20, and one set of the mover 10. One set of permanent magnets 121 in the transport direction is shown in a simplified manner. An arrow shown in the coil 112 indicates the direction of current flow. Also, N and S written on the permanent magnet 121 indicate magnetic poles on the upper surface of the permanent magnet 121 . Also, N and S written on the teeth 114 indicate the magnetic poles of the lower surfaces of the teeth 114 when a predetermined current is applied to the coil 112 .

9A and 9B show configuration examples of the second coil unit described in FIG. FIGS. 9C and 9D, and FIGS. 9E and 9F show configuration examples in which the coil 112 is wound around the teeth 114b. 9C and 9D, the coil 112a is located between the teeth 114a and 114b of the back yoke 113, and the coil 112b is located between the teeth 114b and 114c of the back yoke 113. 4 shows an example of a rolled configuration. 9E and 9F show configuration examples in which coils 112a, 112b, and 112c are wound around teeth 114a, 114b, and 114c.

FIGS. 9G and 9H, and FIGS. 9I and 9J respectively show configuration examples in which the magnet rows of the permanent magnets 121 arranged along the X direction are arranged adjacent to each other in three rows in the Y direction.

9G and 9H, the coil core 111 is aligned in the Y direction with the back yoke portion 113 arranged along the Y direction, and extends downward in the Z direction from one end and the other end of the back yoke portion 113 in the Y direction. It has two protruding tooth portions 114a and 114b. 9G and 9H show configuration examples in which the coil 112 is wound around the back yoke portion 113. FIG.

9I and 9J, the coil core 111 includes a back yoke portion 113 arranged along the Y direction and four teeth arranged in the Y direction and projecting downward in the Z direction from the back yoke portion 113. 114a, 114b, 114c and 114d. In this case, the four teeth portions 114a, 114b, 114c, and 114d are spaced apart from one end to the other end of the back yoke portion 113 in the Y direction. FIGS. 9I and 9J show that coils 102a, 102b, and 102c are wound on a portion between teeth 114a and 114b, a portion between teeth 114b and 114c, and a portion between teeth 114c and 114d in back yoke portion 113. FIG. It shows an example configuration.

FIGS. 9K and 9L show configuration examples in which only one row of permanent magnets 121 arranged in the X direction is arranged in the Y direction. In this case, the coil core 111 includes a back yoke portion 113 arranged along the Y direction and two tooth portions aligned in the Y direction and projecting downward in the Z direction from one end and the other end of the back yoke portion 113 in the Y direction. 114a and 114b. 9K and 9L show configuration examples in which the coil 112 is wound around the back yoke portion 113. FIG.

As shown in FIGS. 9A and 9B, FIGS. 9C and 9D, and FIGS. 9E and 9F, when the number of rows of the permanent magnets 121 in the Y direction is an even number, the second coil unit 110 has teeth portions 114 in the Y direction. can be configured as being an odd number. On the other hand, as shown in FIGS. 9G and 9H, FIGS. 9I and 9J, 9K and 9L, when the number of rows of the permanent magnets 121 in the Y direction is odd, the second coil unit 110 has teeth in the Y direction. The number of sections 114 can be configured to be an even number. Further, the coil 112 may be wound around the back yoke portion 113 or around the teeth portion 114 as long as the same magnetic flux can be generated.

As described above, according to this embodiment, the first coil unit 100 applies force to the mover 10 in the X direction and the Z direction, and the second coil unit 110 applies force to the mover 10 in the X direction and the Z direction. A force can be applied in the Z direction. Therefore, according to the present embodiment, the mover 10 can be transported in a non-contact manner while controlling the posture of the mover 10 without enlarging the system configuration.

[Second embodiment]
Next, a conveying device according to a second embodiment of the present invention will be described with reference to FIGS. 10A to 11C. The same reference numerals are given to the same components as in the first embodiment, and the description thereof is omitted or simplified.

In the first embodiment, an example in which thrust is generated by energizing the coil and creating a gradient of magnetically accompanied energy has been described. In contrast, in the present embodiment, an example will be described in which thrust is generated by the Lorentz force, which is a force applied to electric charges passing through a magnetic field.

10A, 10B, and 10C show an example of a coreless type transport device according to this embodiment. Also, FIGS. 11A, 11B, and 11C show another example of a coreless type transport device according to this embodiment. 10A, 10B, and 10C are a front view, a top view, and a side view of an example of the conveying apparatus according to the present embodiment as seen from the Y direction, Z direction, and X direction, respectively. 11A, 11B, and 11C are a front view, a top view, and a side view, respectively, of another example of the conveying apparatus according to the present embodiment as seen from the Y direction, the top view, and the X direction, respectively. 10A to 11C show first and second coil units 100, 110, permanent magnets 221, and one side of the R side or L side of the configuration corresponding to the mover 10 and the stator 20 in the conveying apparatus 1 shown in FIG. Only the mover yoke 220 is shown and others are omitted. Further, the back yoke 203 is omitted in the top views of FIGS. 10A and 11A.

The conveying device 3 according to this embodiment has a mover 10 and a stator 20 . The configuration of the carrier device 3 according to this embodiment is the same as the configuration of the carrier device 1 according to the first embodiment, except for the first coil unit 100 and the second coil unit 110 in the stator 20 .

As shown in FIGS. 10A to 11C, the mover 10 has multiple permanent magnets 221 and a mover yoke 220 . The permanent magnets 221 are arranged on the mover yoke 220 so as to form a magnet row in two rows along the X direction, which is the longitudinal direction of the mover yoke 220, as in the first embodiment. The plurality of permanent magnets 221 are arranged so that the N poles and the S poles are alternately arranged so that the polarities of the surfaces adjacent to each other in both the X direction and the Y direction are different from each other.

The stator 20 has first and second coil units 100 and 110 that are different in configuration from the first embodiment. The example shown in FIGS. 10A, 10B and 10C and another example shown in FIGS. 11A, 11B and 11C differ from each other in the configuration of the first and second coil units 100 and 110 .

In the example shown in FIGS. 10A, 10B and 10C, the first coil unit 100 that generates thrust in the X and Z directions consists of a coil 202 and a back yoke 203a. A second coil unit 110 that generates thrust in the Y direction is composed of a coil 212 and a back yoke 203b. Each of the coils 202 and 212 is a coreless coil wound around an axis along the Z direction. The first coil unit 100 has two coils 202 arranged side by side along the Y direction. The second coil unit 110 has one coil 212 . The back yoke 203a and the back yoke 203b may be integral magnetic bodies, or may have a gap between them. In order to take advantage of the coreless type that the cogging torque is small, it is desirable that each back yoke be integrated. However, the cogging torque may be reduced by leaving a gap between adjacent two of the back yoke 203a and the back yoke 203b and inserting a magnetic material in the gap. The two coils 202 arranged in the Y direction may be connected in a figure-of-eight shape.

In the case of another example shown in FIGS. 11A, 11B, and 11C, instead of the first coil unit 100 and the second coil unit 110, a coil unit that also serves as the first coil unit 100 and the second coil unit 110 210 is installed. The coil unit 210 consists of a back yoke 203 and coils 202 and 212 . The coil 202 is for generating thrust in the X and Z directions. The coil 212 is for generating thrust in the Y direction. The coils 202 and 212 are installed so as to overlap in the Z direction. The coil 202 and the coil 212 may be stacked such that the coil 202 is positioned on the mover 10 side, or may be stacked such that the coil 212 is positioned on the mover 10 side.

10A, 10B and 10C, and 11A, 11B and 11C, the magnetic force acting as the attractive force between the back yoke 203 and the permanent magnet 221 is part of the levitation force. work as

Coreless motors are often used for precision positioning that requires high responsiveness. The coreless type conveying device 3 according to the present embodiment is configured so that the conveying device 1 according to the first embodiment and the mover 10 can be shared. That is, the common mover 10 can travel on a conveying path configured by arranging the stator 20 according to the first embodiment and the stator 20 according to the second embodiment so as to line up in the X direction. Therefore, the coreless-type carrier device 3 according to the present embodiment can be incorporated into the core-equipped carrier device 1 according to the first embodiment. As a result, a fine positioning process performed by the coreless-type transport apparatus 3 according to the present embodiment is provided between a plurality of transport processes performed by the transport apparatus 1 according to the first embodiment.

[Third Embodiment]
Next, a conveying device 4 according to a third embodiment of the present invention will be described with reference to FIGS. 12A to 12C. Components similar to those of the first and second embodiments are denoted by the same reference numerals, and descriptions thereof are omitted or simplified.

In this embodiment, as in the second embodiment, thrust is generated by the Lorentz force, and an example of a conveying apparatus using a moving-coil coreless linear motor in which permanent magnets are arranged on both sides of the coil will be described.

Figures 12A to 12C show a transport device 4 according to this embodiment. FIG. 12A is a view of the conveying device 4 according to this embodiment viewed from the X direction. FIG. 12B is a cross-sectional view along line AA' of FIG. 12A. FIG. 12C is a cross-sectional view taken along line BB' of FIG. 12A.

As shown in FIGS. 12A to 12C, in the transport device 4 according to this embodiment, the mover 10 has coils 302 and 312 and a mover housing 330 . The stator 20 also has a permanent magnet 321 and a stator yoke 320 .

The coil 302 corresponds to the coil 202 of the first coil unit 100 according to the second embodiment, and is a coreless coil that generates thrust in the X and Z directions. A coil 312 corresponds to the coil 212 of the second coil unit 110 according to the second embodiment. ing. 12A to 12C show examples in which coils 302 and 312 are arranged in the same manner as the coils 202 and 212 shown in FIGS. 10A and 10C. It should be noted that the coils 302, 312 can be arranged similarly to the coils 202, 212 of FIGS. 11A to 11C.

Coils 302 and 312 are connected to control unit 40 . The control unit 40 detects the position (X-axis, Y-axis, Z-axis) and orientation in the rotational direction (Wx-axis, Wy-axis, Wz axis) is detected, and energization to the coils 302 and 312 is controlled according to the detection results.

A plurality of permanent magnets 321 are installed on the stator yoke 320 so as to be able to face the coils 302 and 312 of the mover 10 from above and below in the Z direction. A plurality of permanent magnets 321 are arranged above and below the mover 10 in the Z direction along the X direction, which is the longitudinal direction of the stator yoke 320, like the permanent magnets 121 according to the first embodiment. They are arranged in two rows to form a magnet row.

The plurality of permanent magnets 321 are arranged so that the N poles and S poles are alternately arranged with mutually adjacent surfaces having different polarities in the X direction, the Y direction, and the Z direction. A stator yoke 320 and permanent magnets 321 are held in a stator housing 331 .

As in the present embodiment, the coils 302 and 312 can be installed in the mover 10 and the permanent magnet 321 can be installed in the stator 20 to configure the conveying device 4 by a moving coil type coreless linear motor.

1 Transfer Device 2 Vacuum Magnetic Levitation Transfer Device 3 Transfer Device 4 Transfer Device 10 Mover 20 Stator 30 Processing Device 40 Control Section 100 First Coil Unit 101 Coil Core 102 Coil 103 Back Yoke Section 104 Teeth Section 110 Second Coil Unit 111 Coil core 112 Coil 113 Back yoke 114 Teeth 120 Mover yoke 121 Permanent magnet 122 Holding part 123 Work 202 Coil 203 Back yoke 210 Coil unit 212 Coil 220 Mover yoke 221 Permanent magnet 300 Gate valve 301 Vacuum chamber 302 Coil 303 Gate Valve lifting section 304 Space 312 Coil 320 Stator yoke 321 Permanent magnet 330 Mover housing 331 Stator housing

Claims (14)

a stator;
a mover conveyed in a first direction along the stator,
one of the stator and the mover has a plurality of coils arranged along the first direction;
The other of the stator and the mover is a magnet row including a plurality of magnets arranged along the first direction so as to be able to face the plurality of coils, and is adjacent in the first direction. The magnetic poles of the magnets have different magnet rows,
The plurality of coils are
a first coil group that interacts with the magnet array to apply a first force in the first direction to the mover when a current is applied;
a second coil group that, when a current is applied, exerts a second force on the mover in a second direction that intersects with the first direction by interacting with the magnet array. A conveying device characterized by: When a current is applied to the first coil group, the first coil group moves in a third direction that intersects with each of the first direction and the second direction with respect to the mover due to interaction with the magnet array. 2. The conveying device according to claim 1, wherein the force is applied to the . the magnet rows are arranged in a plurality of rows in the second direction,
The conveying apparatus according to claim 1 or 2, wherein magnetic poles of said magnets adjacent in said second direction are different from each other. A control unit that energizes the first coil group and the second coil group with a three-phase alternating current,
The control unit controls the number of the U-phase coils, the number of the V-phase coils, and the number of the W-phase coils in at least one of the first coil group and the second coil group. The conveying apparatus according to any one of claims 1 to 3, wherein the three-phase alternating currents are energized so as to be the same. The conveying device includes a first region in which the first coil group and the second coil group are installed, and a second coil group in which neither the first coil group nor the second coil group is installed. and the area of
When the tip portion of the mover is located in the second region, the second tip is positioned on the second direction axis passing through the center of gravity of the mover in the first region. The first coil group and the second coil group are arranged such that the coils of the coil group are positioned and the coils of the first coil group are positioned before and after in the first direction. 5. The conveying apparatus according to any one of claims 1 to 4, characterized in that: In a third region of the stator facing the mover, the first coil group includes at least one U-phase coil, one V-phase coil, and one W-phase coil,
In the third region, the second coil group has at least one each of the U-phase coil, the V-phase coil, and the W-phase coil,
The conveying apparatus according to claim 4, wherein in the third area, the first coil group and the second coil group have different numbers of coils. 5. The transport according to claim 4, wherein the first coil group and the second coil group are arranged symmetrically with respect to six degrees of freedom around the center of gravity of the mover. Device. 5. The coil according to any one of claims 1 to 4, wherein at least three of said coils of said first coil group are installed between two of said coils of said second coil group. A conveying device as described. The coils of the first coil group are wound on a first core having one or more first teeth,
The number of rows of the magnet rows in the second direction is an even number and the number of the first tooth portions in the second direction is an even number, or the number of rows of the magnet rows in the second direction is an even number. is an odd number, and the number of the first teeth in the second direction is an odd number. The coils of the second coil group are wound around a second core having one or more second teeth,
The number of rows of the magnet rows in the second direction is an even number and the number of the second tooth portions in the second direction is an odd number, or the number of rows of the magnet rows in the second direction is an odd number. is an odd number, and the number of the second teeth in the second direction is an even number. The stator has the plurality of coils,
The conveying apparatus according to any one of claims 1 to 10, wherein the mover has the magnet row. a conveying device according to any one of claims 1 to 11;
and a processing device that processes the workpiece conveyed by the mover. An article manufacturing method for manufacturing an article using the processing system according to claim 12,
a step of conveying the work by the mover;
and a step of subjecting the workpiece transported by the mover to the processing by the processing device. a stator;
a mover conveyed in a first direction along the stator,
one of the stator and the mover has a plurality of coils arranged along the first direction;
The other of the stator and the mover is a magnet row including a plurality of magnets arranged along the first direction so as to be able to face the plurality of coils, and is adjacent in the first direction. The magnetic poles of the magnets have different magnet rows,
The plurality of coils are
a first coil group that interacts with the magnet array to apply a first force in the first direction to the mover when a current is applied;
a second coil group that, when current is applied, exerts a second force on the mover in a second direction that intersects with the first direction by interacting with the magnet array. A device control method comprising:
applying the first force in the first direction to the mover by applying a current to the first coil group;
A control method, wherein the second force is applied to the mover in the second direction by applying a current to the second coil group.

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