TW201738993A - Wet etching device - Google Patents

Abstract

A wet etching device is disclosed. The wet etching device includes a chamber, a plurality of etching solution nozzles, and a supporting platform. The chamber includes a gas inlet and a gas outlet. The etching solution nozzles are disposed in the chamber to etch a substrate. The supporting platform includes a body and a plurality of platform nozzles. The body is disposed below the substrate. The platform nozzles penetrate the body. A solution provides a liquid buoyancy force to support the substrate via the platform nozzles. The wet etching device can avoid the problem that a back side of the substrate is dirty.

Description

Wet etching device

This invention relates to the field of wet processes, and more particularly to a wet etching apparatus.

In the panel industry, the development of wet processes is quite mature. However, in the conventional wet type processing machine, the use is difficult to maintain, the liquid consumption is large, the uniformity is poor, the night is leaking, and the back surface is dirty, and the like, the above problem is particularly serious in the case of fine pitch.

Most of the problems of the backside contamination are caused by the rollers supporting the substrate and moving the substrate. For ultra-thin substrates, thousands of rollers are often used, and the use of a large number of rollers is expensive. In addition, it is not conducive to maintenance, and even a roller mark is formed on the back side of the substrate (i.e., the side in contact with the roller). Furthermore, the existing three-dimensional (3D) package requires a two-sided process, and the wet etching apparatus using the roller carrier substrate cannot perform an etching process on the back surface of the substrate.

Therefore, it is necessary to propose a solution to the problem of using a roller-carrying substrate in the above-mentioned prior art.

The present invention provides a wet etching apparatus that solves the problem of using a roller-carrying substrate in the prior art.

The wet etching apparatus of the present invention comprises a cavity, a plurality of etchant nozzles, and a carrier platform. The cavity includes an air inlet and an air outlet. The air inlet is used to introduce a gas required for etching. The gas outlet is used to derive the gas required for the etching. The etchant nozzles are disposed in the cavity to etch a substrate. The carrier platform includes a body and a plurality of platforms nozzle. The body is disposed below the substrate. The platform nozzles extend through the body, and a liquid provides a liquid buoyancy through the platform nozzles to carry the substrate.

In a preferred embodiment, the wet etching apparatus further includes an exhaust module. The air extraction module is connected to the air inlet and the air outlet and is used for extracting the gas required for etching inside the cavity from the air outlet to the carrier.

In a preferred embodiment, the wet etching apparatus further includes a positioning unit. The positioning unit is disposed on the body and is used to define the substrate within a specific range.

In a preferred embodiment, the liquid is water or a liquid chemical required for the process.

In a preferred embodiment, the surface of the body includes one to five platform nozzles per square centimeter.

In a preferred embodiment, one of the platform nozzles has a diameter of from 0.5 mm to 1.5 mm.

In a preferred embodiment, the distance between the platform nozzles and the substrate is from 1 mm to 6 mm.

The wet etching apparatus of the present invention can avoid the problem of dirt on the back side of the substrate, reduce roll marks, and can perform a double-sided process. Further, since the gas required for etching can be further regenerated after being extracted by the air suction module, and the function of pressurizing the etching liquid, the gas usage can be saved.

1, 1'‧‧‧ Wet etching device

10, 10'‧‧‧etching liquid nozzle

20‧‧‧ cavity

30‧‧‧Substrate

40‧‧‧Loading platform

50‧‧‧Exhaust module

60‧‧‧ Positioning unit

200‧‧‧air inlet

202‧‧‧ outlet

400‧‧‧ body

402‧‧‧ platform nozzle

1 is a schematic view showing a wet etching apparatus according to a first embodiment of the present invention; and FIG. 2 is a view showing a wet etching apparatus according to a second embodiment of the present invention.

Please refer to FIG. 1. FIG. 1 is a schematic view showing a wet etching apparatus 1 according to a first embodiment of the present invention.

As shown in FIG. 1, the wet etching apparatus 1 of the present invention includes a plurality of etching liquid nozzles 10, a cavity 20, a carrying platform 40, and a draft module 50.

The nozzles 10 are disposed in the cavity 20 to etch a substrate 30. More specifically, the etchant nozzles 10 are disposed above the substrate 30. The substrate 30 can be a substrate that needs to be etched in the current wet process, such as but not limited to being a glass substrate. The carrier platform 40 is disposed in the cavity 20 and is used to carry the substrate 30 in a non-contact manner.

The cavity 20 mainly includes an air inlet 200 and an air outlet 202. In the embodiment, the air inlet 200 and the air outlet 202 are respectively disposed on two opposite sidewalls of the cavity 20, but the invention is not limited thereto, and the air inlet 200 and the air outlet 202 may be disposed. On the same or different side walls of the cavity 20.

The air inlet 200 is configured to introduce a gas required for etching, and the air blowing module 50 is connected to the air outlet 202. The air blowing module 50 is configured to extract the gas required for etching inside the cavity 20 from the air outlet 202. The gas required for the extraction etching can be further introduced through the air inlet 200 to achieve the purpose of regeneration, and the amount of gas required for etching is saved.

It is to be noted that the gas required for etching is well known to those of ordinary skill in the art to which the present invention pertains, and will not be described again.

One of the features of the present invention is that the carrying platform 40 is configured to carry the substrate 30 in a non-contact manner. The loading platform 40 includes a body 400 and a plurality of platform nozzles 402. The body 40 is disposed under the substrate 30 and has a substantially flat shape. . The platform nozzles 402 extend through the body 400, and a liquid provides a liquid buoyancy from the bottom to the top through the platform nozzles 402 to carry the substrate 30. Since the substrate 30 is carried by the liquid buoyancy, the substrate can be avoided. The back side of 30 (ie, the side of the substrate 30 facing the carrying platform 40) is dirty and the number of rollers is greatly reduced, and the substrate 30 does not come into contact with the carrying platform 40, and the substrate 30 does not occur when the roller is used. The back side (i.e., the side of the substrate 30 that faces the carrier platform 40) creates a problem of roll marks.

The liquid may be water or a liquid required for the process. When the liquid is a liquid required for the process, in addition to providing liquid buoyancy to carry the substrate 30, the liquid required for the process (for example, but not limited to, an etchant) It is uniformly sprayed on the back surface of the substrate 30 (i.e., the side of the substrate 30 facing the carrier platform 40), and thus can be applied to a double-sided process required for a three-dimensional package.

The factors that need to be considered in the design of the platform nozzles 402 include the area and weight of the substrate 30, the material of the body 400, the surface roughness, and the like.

In a preferred embodiment, the surface of the body 400 includes one to five platform nozzles 402 per square centimeter. The liquid pressure of the liquid is less than 2.5 kilograms per square centimeter (kg/cm ² ), and one of the platform nozzles 402 has a diameter. From 0.5 mm (millimeter; mm) to 1.5 mm, the distance between the platform nozzles 402 and the substrate 30 is from 1 mm to 6 mm.

It should be noted that the number of the platform nozzles 402, the liquid pressure of the liquid, the diameter of each platform nozzle 402, and the range of the distance between the platform nozzles 402 and the substrate 30 are special designs, not only The scope of the invention is readily known to those of ordinary skill in the art.

Referring to Figure 2, there is shown a schematic view of a wet etching apparatus 1' according to a second embodiment of the present invention.

It should be noted that the design of the etchant nozzles 10' of the present embodiment is slightly different from the design of the etchant nozzles 10 of the first embodiment, but both functions are the same and can be applied to the present invention. For the components of the first embodiment having the same reference numerals as the first embodiment, reference may be made to the related description of the first embodiment, which is not described in detail.

In the present embodiment, the wet etching apparatus 1 ′ further includes a positioning unit 60 , which is disposed and fixed on the body 400 . More specifically, the positioning unit 60 is disposed on the body 400 and located On both sides of the substrate 30, the positioning unit 60 is used to define the substrate 30 within a specific range, thereby preventing the substrate 30 from being greatly shaken under the load of the liquid.

In addition, it should be noted that the positioning unit 60 of the second embodiment is also applicable to the first embodiment, and details are not described herein.

The wet etching apparatus of the present invention can avoid the problem of contamination of the back side of the substrate (i.e., the side of the substrate facing the carrying platform), reduce the number of marks, and can perform a two-sided process. Further, since the gas required for etching can be further regenerated after being extracted by the air suction module, and the function of pressurizing the etching liquid, the gas usage can be saved.

While the invention has been described above by way of a preferred embodiment, the invention is not intended to be limited thereto, and the invention may be modified and modified without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

1‧‧‧ Wet etching device

10‧‧‧etching liquid nozzle

20‧‧‧ cavity

30‧‧‧Substrate

40‧‧‧Loading platform

50‧‧‧Exhaust module

200‧‧‧air inlet

202‧‧‧ outlet

400‧‧‧ body

402‧‧‧ platform nozzle

Claims (7)

A wet etching apparatus comprising: a cavity comprising: an air inlet for introducing an etching required gas; and an air outlet for deriving the gas required for the etching; and a plurality of etching liquid nozzles disposed at The substrate is etched with a substrate; and a carrier platform includes: a body disposed under the substrate; and a plurality of platform nozzles through which a liquid provides a liquid buoyancy through the platform nozzles to carry The substrate. The wet etching apparatus according to claim 1, further comprising: a ventilation module connected to the air inlet and the air outlet and configured to vent the gas required for etching inside the cavity from the air outlet Take out. The wet etching apparatus according to claim 1, further comprising a positioning unit disposed on the body and configured to define the substrate within a specific range. The wet etching apparatus according to claim 1, wherein the liquid is water or a chemical required for the process. The wet etching apparatus according to claim 1, wherein the surface of the body comprises one to five platform nozzles per square centimeter. The wet etching apparatus according to claim 1, wherein each of the platform nozzles has a diameter of from 0.5 mm to 1.5 mm. The wet etching apparatus according to claim 1, wherein the distance between the platform nozzles and the substrate is from 1 mm to 6 mm.