TWI580474B - Etching spraying module and wet etching device using the etching spraying module - Google Patents

Description

Etching spray module and wet etching device using the same

The present invention relates to the field of wet processes, and more particularly to an etch spray module and a wet etch apparatus using the etch spray module.

In the panel industry, the development of wet processes is quite mature. However, in the conventional wet type processing machine, the use is difficult to maintain, the liquid consumption is large, the uniformity is poor, the night is leaking, and the back surface is dirty, and the like, the above problem is particularly serious in the case of fine pitch.

The etching spray module in the conventional wet processing machine includes a plurality of nozzles, and the etching liquid is directly sprayed on a substrate through the nozzle to etch the substrate, but no processing is performed on the etching liquid regardless of the size of the nozzle. Therefore, when the etching liquid is sprayed on the substrate, a problem of poor uniformity occurs, which in turn affects the etching effect.

Therefore, it is necessary to propose a solution to the problem that the uniformity is poor when the etching liquid is sprayed on the substrate in the above-mentioned prior art.

The invention provides an etching spray module and a wet etching device using the same, which can solve the problem of poor uniformity when the etching liquid is sprayed on the substrate in the prior art.

The wet etching apparatus of the present invention comprises a cavity and an etch spray module. The cavity includes an air inlet, an air outlet, and an etchant inlet. The air inlet is used to introduce one Etching the desired gas. The gas outlet is used to derive the gas required for the etching. The etchant inlet is used to introduce an etchant. The etch spray module is disposed in the cavity to etch a substrate. The etch spray module includes a body and a plurality of nozzles. The body is coupled to the air inlet and the etchant inlet. The nozzles are disposed on a surface of the body facing the substrate. Each nozzle has an upper width and a narrow shape and includes a first inlet, a second inlet, and a nozzle outlet. The first inlet is for introducing the etchant liquid through the body. The second inlet is for introducing a gas required for the etching via the body. One of the nozzle outlets has a smaller diameter than one of the first inlets and less than one of the second inlets.

In a preferred embodiment, the wet etching apparatus further includes a carrier plate. The carrier plate is disposed in the cavity and is used to carry the substrate.

In a preferred embodiment, the wet etching apparatus further includes an exhaust module. The air extraction module is connected to the air outlet and is used for extracting the gas required for etching inside the cavity from the air outlet.

In a preferred embodiment, the first inlet has a diameter of from 10 mm to 55 mm.

In a preferred embodiment, the second inlet has a diameter of from 10 mm to 55 mm.

In a preferred embodiment, the nozzle outlet has a diameter of from 0.5 mm to 2 mm.

In a preferred embodiment, the distance between the etched spray module and the substrate is from 10 cm to 25 cm.

The spray module of the present invention is used in a wet etching apparatus, which includes a body and a plurality of nozzles. The nozzles are disposed on a surface of the body facing the substrate. Each nozzle has an upper width and a narrow shape and includes a first inlet, a second inlet, and a nozzle outlet. The first inlet is for introducing an etchant. The second inlet is used to introduce a gas required for etching. One of the nozzle outlets has a smaller diameter than one of the first inlets and is smaller than the second inlet One of the calibers.

In a preferred embodiment, the first inlet has a diameter of from 10 mm to 55 mm.

In a preferred embodiment, the second inlet has a diameter of from 10 mm to 55 mm.

In a preferred embodiment, the nozzle outlet has a diameter of from 0.5 mm to 2 mm.

The wet etching apparatus and the etching spray module of the present invention can uniformly spray the etching liquid on the substrate. Further, since the gas required for etching can be further regenerated after being extracted by the air suction module, and the function of pressurizing the etching liquid, the gas usage can be saved.

1‧‧‧ Wet etching device

10‧‧‧etching spray module

20‧‧‧ cavity

30‧‧‧Substrate

40‧‧‧Loading board

50‧‧‧Exhaust module

100‧‧‧ body

102‧‧‧Nozzles

200‧‧‧air inlet

202‧‧‧ outlet

204‧‧‧etching solution inlet

1020‧‧‧ first entrance

1022‧‧‧second entrance

1024‧‧‧Nozzle exit

1 shows a schematic view of a wet etching apparatus according to an embodiment of the present invention; and FIG. 2 shows a schematic view of a nozzle according to an embodiment of the present invention.

Referring to FIGS. 1 through 2, FIG. 1 is a schematic view showing a wet etching apparatus 1 according to an embodiment of the present invention, and FIG. 2 is a schematic view showing a nozzle 102 according to an embodiment of the present invention.

As shown in FIG. 1, the wet etching apparatus 1 of the present invention comprises an etching spray module 10, a cavity 20, a carrier plate 40, and a ventilation module 50.

The etching spray module 10 is used in the wet etching apparatus 1 and disposed in the cavity 20 to etch a substrate 30. The substrate 30 may be a substrate that needs to be etched in the current wet process, such as but not limited to It is a glass substrate. The carrier plate 40 is disposed in the cavity 20 and is used to carry the substrate 30.

The cavity 20 mainly includes an air inlet 200, an air outlet 202, and an etchant inlet 204. In the embodiment, the air inlet 200 and the air outlet 202 are respectively disposed in the cavity. The two opposite side walls of the 20, however, the present invention is not limited thereto, and the air inlet 200 and the air outlet 202 may be disposed on the same or different side walls of the cavity 20.

The air inlet 200 is configured to introduce a gas required for etching, and the air blowing module 50 is connected to the air outlet 202. The air blowing module 50 is configured to extract the gas required for etching inside the cavity 20 from the air outlet 202. The gas required for the extraction etching can be further introduced through the air inlet 200 to achieve the purpose of regeneration, and the amount of gas required for etching is saved.

It is to be noted that the gas required for etching is well known to those of ordinary skill in the art to which the present invention pertains, and will not be described again.

The etchant inlet 204 is used to introduce an etchant, and the etchant inlet 204 can be disposed on any sidewall of the cavity 20.

The etch spray module 10 is disposed in the cavity 20 corresponding to the substrate 30. The etch spray module 10 includes a body 100 and a plurality of nozzles 102. The nozzles 102 are disposed on the substrate 100 toward the substrate 30. One on the surface. The body 100 is connected to the air inlet 200 and the etching liquid inlet 204. The etching liquid is introduced into the body 100 through the etching liquid inlet 204, and is sprayed on the substrate 30 via the nozzles 102 to etch the substrate 30.

In a preferred embodiment, the distance between the etch spray module 10 and the substrate 30 is 10 cm to 25 cm.

2 is an enlarged schematic view of one of the nozzles 102 of FIG. 1 including a first inlet 1020, a second inlet 1022, and a nozzle outlet 1024. The nozzle 102 is substantially in the shape of a wide upper and lower narrow. The first inlet 1020 and the second inlet 1022 are disposed in a wider upper half, and the nozzle outlet 1024 is disposed in a narrower lower half. The first inlet 1020 is for introducing an etchant liquid through the body 100. The second inlet 1022 is for introducing a gas required for etching through the body 100. One of the nozzle outlets 1024 has a smaller diameter than one of the first inlets 1020 and one of the second inlets 1022.

In a preferred embodiment, the first inlet 1020 has a diameter of 10 mm (millimeter; mm) to 55 mm, and the second inlet 1022 has a diameter of 10 mm to 55 mm. The nozzle outlet has a diameter of from 0.5 mm to 2 mm.

It should be noted that the range of the diameter of the first inlet 1020, the diameter of the second inlet 1022, and the diameter of the nozzle outlet are specially designed, and it is not only known to those having ordinary knowledge in the technical field of the present invention. The scope.

One of the features of the present invention is the special design of the nozzle 102. More specifically, the etching required gas introduced by the second inlet 1022 is pressurized and mixed with the etching liquid introduced by the first inlet 1020, and then the diameter is compared. A small nozzle outlet 1024 is sprayed on the substrate 30 to etch the substrate 30, and the sprayed etching liquid forms a high-pressure atomized liquid, so that it can be uniformly sprayed on the substrate 30, and the range of the etching liquid is sprayed as a dotted line. Shown.

In a preferred embodiment, the gas pressure required for the etching is in the range of 1 to 7 kg/cm 2 .

In addition, the body 100 of FIG. 1 also includes holes (not shown) corresponding to the first inlet 1020 and the second inlet 1022.

In summary, the wet etching apparatus and the etching spray module of the present invention can uniformly spray the etching liquid on the substrate. Further, since the gas required for etching can be further regenerated after being extracted by the air suction module, and the function of pressurizing the etching liquid, the gas usage can be saved.

While the invention has been described above by way of a preferred embodiment, the invention is not intended to be limited thereto, and the invention may be modified and modified without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

1‧‧‧ Wet etching device

10‧‧‧etching spray module

20‧‧‧ cavity

30‧‧‧Substrate

40‧‧‧Loading board

50‧‧‧Exhaust module

100‧‧‧ body

102‧‧‧Nozzles

200‧‧‧air inlet

202‧‧‧ outlet

204‧‧‧etching solution inlet

Claims (7)

A wet etching apparatus for use in a wet etching process, the wet etching apparatus comprising: a cavity comprising: an air inlet for introducing a gas required for etching; and an air outlet for deriving the etching a desired gas; and an etchant inlet for introducing an etchant; and an etch spray module disposed in the cavity to etch a substrate, the etch spray module comprising: a body coupled to the The inlet port and the etchant inlet; and a plurality of nozzles disposed on the surface of the body facing the substrate, each nozzle having an upper width and a narrow shape and including: a first inlet for guiding through the body The etchant; a second inlet for introducing the gas required for etching through the body; and a nozzle outlet having a diameter smaller than one of the first inlets and less than one of the second inlets The caliber, the first inlet has a diameter of 10 mm to 55 mm, and the second inlet has a diameter of 10 mm to 55 mm. The wet etching apparatus according to claim 1, further comprising: a carrier plate disposed in the cavity and configured to carry the substrate. The wet etching apparatus according to claim 1, further comprising: a ventilation module connected to the air outlet and for extracting a gas required for etching inside the cavity from the air outlet. The wet etching apparatus according to claim 1, wherein the nozzle outlet has a diameter of 0.5 mm to 2 mm. The wet etching apparatus according to claim 1, wherein the distance between the etching spray module and the substrate is 10 cm to 25 cm. An etch spray module for a wet etching apparatus, the etch spray module comprising: a body; and a plurality of nozzles disposed on a surface of the body, each nozzle having an upper and lower narrow shape and comprising: a first inlet for introducing an etching liquid; and a second inlet for introducing a gas required for etching; and a nozzle outlet having a diameter smaller than a diameter of one of the first inlets and smaller than a diameter of one of the second inlets, the first inlet having a diameter of 10 mm to 55 mm The second inlet has a diameter of 10 mm to 55 mm. The etch-spray module of claim 6, wherein the nozzle outlet has a diameter of from 0.5 mm to 2 mm.