TW201732424A - Photosensitive resin composition for light-shielding film functioning as spacer, light-shielding film, LCD device, method for manufacturing photosensitive resin composition for light-shielding film functioning as spacer, method for manufacturing light-sh - Google Patents

Photosensitive resin composition for light-shielding film functioning as spacer, light-shielding film, LCD device, method for manufacturing photosensitive resin composition for light-shielding film functioning as spacer, method for manufacturing light-sh Download PDF

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TW201732424A
TW201732424A TW105132177A TW105132177A TW201732424A TW 201732424 A TW201732424 A TW 201732424A TW 105132177 A TW105132177 A TW 105132177A TW 105132177 A TW105132177 A TW 105132177A TW 201732424 A TW201732424 A TW 201732424A
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light
shielding
photosensitive resin
resin composition
component
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TWI708995B (en
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小野悠樹
滑川崇平
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新日鐵住金化學股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13394Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136209Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0048Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Structural Engineering (AREA)
  • Architecture (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Polymerisation Methods In General (AREA)
  • Graft Or Block Polymers (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

The present invention provides a photosensitive resin composition which is excellent in spacer properties such as elastic modulus, deformation amount, elastic recovery ratio and the like while maintaining light-shielding properties and insulating properties, and can obtain a fine and good spacer shape. The present invention relates to a photosensitive resin composition for light-shielding film functioning as spacer. The photosensitive resin composition of the present invention comprises the followings as essential components: (A) a polymerizable unsaturated group-containing alkali-soluble resin which is obtained by reacting a reaction product of an epoxy compound having two glycidyl ether groups derived from bisphenols and an unsaturated group-containing monocarboxylic acid, with (a) a tetracarboxylic acid or its acid dianhydride and (b) a dicarboxylic acid or a tricarboxylic acid or its anhydride; (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond; (C) a photopolymerization initiator; (D) one or more light-shielding component selected from the group consisting of black organic pigments, mixed organic pigments and light-shielding materials; (E) a solvent.

Description

具有間隔件功能之遮光膜用之感光性樹脂組成物、遮光膜、液晶顯示裝置、具有間隔件功能之遮光膜用之感光性樹脂組成物的製造方法、遮光膜之製造方法、及液晶顯示裝置之製造方法 Photosensitive resin composition for a light-shielding film having a spacer function, a light-shielding film, a liquid crystal display device, a method for producing a photosensitive resin composition for a light-shielding film having a spacer function, a method for producing a light-shielding film, and a liquid crystal display device Manufacturing method

本發明係關於具有間隔件功能之遮光膜用之感光性樹脂組成物、及使其硬化後之具有間隔件功能之遮光膜,詳細而言,係關於感光性樹脂組成物及其硬化膜,其係可藉由光刻法形成在液晶顯示裝置中兼具間隔件功能及黑色矩陣(black matrix)功能之黑色柱狀間隔件。本發明係進一步關於使用有上述硬化所得之黑色柱狀間隔件的液晶顯示裝置。本發明係進一步關於上述感光性樹脂組成物、遮光膜及液晶顯示裝置之製造方法。 The present invention relates to a photosensitive resin composition for a light-shielding film having a spacer function and a light-shielding film having a spacer function after curing, and more particularly to a photosensitive resin composition and a cured film thereof. A black columnar spacer having a spacer function and a black matrix function in a liquid crystal display device can be formed by photolithography. The present invention is further directed to a liquid crystal display device using the black columnar spacer obtained by the above hardening. The present invention further relates to the above-described photosensitive resin composition, a light shielding film, and a method of producing a liquid crystal display device.

最近數年來,在液晶電視、液晶螢幕、彩色液晶行動電話等所有領域中使用彩色液晶顯示裝置(LCD)。其中,為了LCD的高性能化,以提升視野角、對比、應答速度等特性為目標之改善正積極地進行,現在大多數使用之薄膜電晶體(TFT)-LCD亦開發出各式各樣的面板結構。針對TFT-LCD主要採用向來之分別製造形成有TFT之陣列基板與彩色濾光片基板,並將兩基板藉由間隔件以保持一定間隔之狀態下進行貼合的方法,然而亦正開發以低成本化、產率比提升為目標之LCD製造程序。例如,開發有在陣列基板之TFT上直接形成彩色濾光片並與作為對向基板之玻璃基板進行貼合之製造程序。如此形成之結構,稱為在TFT上之彩色濾光片(Color filter on TFT,COT)等。在該COT中,亦探討有將黑色矩陣(該黑色矩陣係成為在TFT上形成之彩色濾光片層的紅(R)、綠(G)、藍(B)等各像素之邊界)在RGB形成前形成之方法、在RGB像素形成後形成之方法、或者是在對向之玻璃基板上形成之方法等,各式各樣的LCD面板結構。 In recent years, color liquid crystal display devices (LCDs) have been used in all fields such as liquid crystal televisions, liquid crystal screens, and color liquid crystal mobile phones. Among them, in order to improve the performance of the LCD, improvement in the characteristics of improving the viewing angle, contrast, and response speed is actively progressing, and most of the thin film transistors (TFT)-LCDs currently used have been developed. Panel structure. The TFT-LCD is mainly manufactured by separately manufacturing an array substrate on which a TFT is formed and a color filter substrate, and bonding the two substrates in a state of being kept at a certain interval by a spacer, but is also being developed to be low. A cost-effective, high-yield ratio LCD manufacturing process. For example, a manufacturing process has been developed in which a color filter is directly formed on a TFT of an array substrate and bonded to a glass substrate as a counter substrate. The structure thus formed is referred to as a color filter on TFT (COT) or the like on the TFT. In the COT, it is also considered to have a black matrix (the black matrix is the boundary of each pixel such as red (R), green (G), and blue (B) which is a color filter layer formed on the TFT) in RGB. A method of forming before formation, a method of forming after formation of RGB pixels, a method of forming on a glass substrate opposite thereto, and the like, and various LCD panel structures.

針對具有達成使屬於影響LCD性能之其中1個因子之液晶層的厚度(若為先前方法,係陣列基板與彩色濾光片基板之間隔)保持一定的功能之間隔件,向來採取夾著具有一定粒徑之球狀間隔件之方法。然而,在此方法中,存在有由於球狀間隔件之分散狀態不均勻而使每個像素之光的穿透量不為一定之問題。針對此問題,採用藉由 光刻法形成柱狀間隔件之方法。然而,以光刻法形成之柱狀間隔件大多為透明,在如此之柱狀間隔件中,存在有由斜方向入射之光影響TFT之電特性並使顯示品質劣化之問題。針對如此之問題,提案有一種應用遮光性柱狀間隔件之LCD面板結構,其係藉由光刻法形成之具有間隔件功能之遮光膜(專利文獻1)。在COT中,亦探討有將柱狀間隔件以與黑色矩陣相同之材料形成之形成所謂黑色柱狀間隔件(BCS)的方法(例如,專利文獻2)。 For the spacer having a certain function of achieving a liquid crystal layer belonging to one of the factors affecting the performance of the LCD (if the previous method is the interval between the array substrate and the color filter substrate), the spacer has always been sandwiched A method of spherical spacers of particle size. However, in this method, there is a problem that the amount of penetration of light per pixel is not constant due to the uneven dispersion state of the spherical spacer. For this problem, use A method of forming a columnar spacer by photolithography. However, the columnar spacer formed by photolithography is often transparent, and in such a columnar spacer, there is a problem in that the light incident from the oblique direction affects the electrical characteristics of the TFT and deteriorates the display quality. In view of such a problem, there is proposed an LCD panel structure using a light-shielding column spacer which is a light-shielding film having a spacer function formed by photolithography (Patent Document 1). In the COT, a method of forming a so-called black columnar spacer (BCS) by forming a columnar spacer with the same material as the black matrix is also discussed (for example, Patent Document 2).

該遮光性柱狀間隔件,為了發揮作為間隔件之功能,膜厚必須為2至7μm左右。又,形成有TFT之處與其他處高度不同之遮光性柱狀間隔件必須可同時形成。又,對於遮光性柱狀間隔件,亦要求作為間隔件功能之彈性率、變形量、彈性恢復率等在適當的範圍(專利文獻3)。進一步,對於遮光性柱狀間隔件,亦要求改善起因於在間隔件中添加遮光性成分(著色劑)所造成之硬化性成分的減少、及起因於著色劑中的不純物等的影響所造成之電特性的損失等(專利文獻4)。 In order to exhibit the function as a spacer, the light-shielding columnar spacer must have a film thickness of about 2 to 7 μm. Further, the light-shielding columnar spacer which is different in height from the other places where the TFT is formed must be formed at the same time. In addition, the light-shielding columnar spacer is also required to have an elastic modulus, a deformation amount, an elastic recovery rate, and the like as a spacer function in an appropriate range (Patent Document 3). Further, the light-shielding columnar spacer is also required to be improved by the reduction of the curable component caused by the addition of the light-shielding component (colorant) to the separator, and the influence of impurities such as the colorant. Loss of electrical characteristics, etc. (Patent Document 4).

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

專利文獻1:日本特開平08-234212號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 08-234212

專利文獻2:美國專利申請公開第2009/0303407號說明書 Patent Document 2: US Patent Application Publication No. 2009/0303407

專利文獻3:日本特開2009-031778號公報 Patent Document 3: Japanese Laid-Open Patent Publication No. 2009-031778

專利文獻4:國際公開2013/062011號 Patent Document 4: International Publication 2013/062011

在專利文獻4中,雖使用混色有機顏料,然而未揭示遮光性柱狀間隔件之光學濃度。相較於碳黑等無機顏料,混色有機顏料有效地低介電常數化,然而遮光性大多亦較低。又,由於間隔件必須同時形成高度不同之間隔件,故對於遮光性柱狀間隔件,亦進一步要求彈性率、變形量、彈性恢復率等機械特性。由於如此間隔件之形狀及機械特性受遮光成分之影響巨大,因而遮光膜用之感光性樹脂組成物的設計困難。因此,使用有碳黑或混色有機顏料等之間隔件的形狀及機械特性仍稱不上充分,而有必要進一步改良。 In Patent Document 4, although a color mixed organic pigment is used, the optical density of the light-blocking column spacer is not disclosed. The mixed color organic pigment is effectively low in dielectric constant compared to an inorganic pigment such as carbon black, but the light blocking property is often low. Further, since the spacers must simultaneously form spacers having different heights, mechanical properties such as elastic modulus, deformation amount, and elastic recovery ratio are further required for the light-blocking column spacer. Since the shape and mechanical properties of the spacer are greatly affected by the light-shielding component, the design of the photosensitive resin composition for the light-shielding film is difficult. Therefore, the shape and mechanical properties of a separator using carbon black or a mixed color organic pigment or the like are still not sufficient, and further improvement is necessary.

又,如上述,遮光性柱狀間隔件以2至7μm左右之膜厚進行製造。伴隨著近年來液晶顯示元件的小型化,對於遮光性柱狀間隔件,期望即使膜厚為2至7μm左右亦能形成微細的間隔件形狀。 Further, as described above, the light-blocking columnar spacer is manufactured to have a film thickness of about 2 to 7 μm. With the recent miniaturization of the liquid crystal display element, it is desirable that the light-shielding columnar spacer can have a fine spacer shape even when the film thickness is about 2 to 7 μm.

本發明係有鑑於上述問題點而形成者,提供具有高遮光性及絕緣性,更甚者,彈性率、變形量、彈性恢復率優異的具有間隔件功能之遮光膜用之遮光性樹脂組成物及使用其而形成之具有間隔件功能之遮光膜及以該遮光膜作為構成要素之液晶顯示裝置。 In view of the above-described problems, the present invention provides a light-shielding resin composition for a light-shielding film having a spacer function and having excellent light-shielding property and insulating property, and more excellent in elastic modulus, deformation amount, and elastic recovery rate. And a light-shielding film having a spacer function formed using the same, and a liquid crystal display device having the light-shielding film as a constituent element.

本發明人等為了解決如上述之在遮光膜用 的感光性樹脂組成物中的課題進行檢討之結果,發現特定之著色劑適合作為目的之遮光膜用的感光性樹脂組成物的遮光成分,進而完成本發明。 The present inventors have solved the problem of the light shielding film as described above. As a result of reviewing the problem of the photosensitive resin composition, it was found that a specific coloring agent is suitable as a light-shielding component of the photosensitive resin composition for the intended light-shielding film, and the present invention has been completed.

(1)本發明係一種具有間隔件功能之遮光膜用之感光性樹脂組成物,其係包含下述(A)至(E)成分作為必須成分:(A)針對由雙酚類衍生之具有2個環氧丙基醚基之環氧化合物與含有不飽和基之單羧酸的反應物,使其與(a)四羧酸或其酸二酐、及(b)二羧酸或三羧酸或其酸酐反應而得之含有聚合性不飽和基之鹼可溶性樹脂;(B)具有至少1個乙烯性不飽和鍵之光聚合性單體;(C)光聚合起始劑;(D)選自由黑色有機顏料、混色有機顏料及遮光材料所成群組中之1種以上的遮光成分;以及(E)溶劑。 (1) The present invention is a photosensitive resin composition for a light-shielding film having a separator function, which comprises the following components (A) to (E) as essential components: (A) has a derivative derived from a bisphenol a reaction product of two epoxy propyl ether group epoxy compounds and an unsaturated group-containing monocarboxylic acid, and (a) a tetracarboxylic acid or an acid dianhydride thereof, and (b) a dicarboxylic acid or a tricarboxylic acid An alkali-soluble resin containing a polymerizable unsaturated group obtained by reacting an acid or an anhydride thereof; (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond; (C) a photopolymerization initiator; (D) One or more kinds of light-shielding components in a group of black organic pigments, mixed color organic pigments, and light-shielding materials are selected; and (E) a solvent.

(2)本發明又係如(1)所記載之感光性樹脂組成物,其係包含鈦黑作為(D)遮光成分。 (2) The photosensitive resin composition according to (1), which contains titanium black as the (D) light-shielding component.

(3)本發明又係如(2)所記載之感光性樹脂組成物,其中,前述鈦黑之平均二次粒徑為100至300nm。 (3) The photosensitive resin composition according to (2), wherein the titanium black has an average secondary particle diameter of 100 to 300 nm.

(4)本發明又係如(1)至(3)中任一項所述之感光性樹脂組成物,其係包含黑色有機顏料及/或混色有機顏料作為(D)遮光成分,且前述黑色有機顏料及/或混色有機顏料之平均二次粒徑為20至500nm。 (4) The photosensitive resin composition according to any one of (1) to (3), which comprises a black organic pigment and/or a mixed color organic pigment as (D) a light-shielding component, and the aforementioned black The average secondary particle diameter of the organic pigment and/or the mixed color organic pigment is from 20 to 500 nm.

(5)本發明又係如(1)至(4)中任一項所述之感光性樹脂組成物,其中,相對於(A)成分100質量份,包含(B)成分5至400質量份;相對於(A)成分與(B)成分之合計量100質量份,包含(C)成分0.1至30質量份;當將包括在光硬 化後成為固形份之(B)成分、且去除(E)成分之成分作為固形份時,在固形份之合計量中,包含(D)成分5至80質量%。 (5) The photosensitive resin composition according to any one of (1) to (4), wherein the component (B) is contained in an amount of 5 to 400 parts by mass based on 100 parts by mass of the component (A). 100 parts by mass of the total of (A) component and (B) component, containing 0.1 to 30 parts by mass of the component (C); when it is included in the light hard When the component (B) is added as a solid component and the component of the component (E) is removed as a solid component, the component (D) is contained in an amount of 5 to 80% by mass based on the total amount of the solid component.

(6)本發明又係如(1)至(5)中任一項所述之感光性樹脂組成物,其可形成光學濃度OD為0.5/μm以上3/μm以下之遮光膜,並且該遮光膜施加電壓10V時之體積電阻率為1×109Ω‧cm以上、且介電常數為2至10。 (6) The photosensitive resin composition according to any one of (1) to (5), which is capable of forming a light-shielding film having an optical density OD of 0.5/μm or more and 3/μm or less, and the light-shielding The volume resistivity at a voltage of 10 V applied to the film was 1 × 10 9 Ω ‧ cm or more, and the dielectric constant was 2 to 10.

(7)本發明又係如(1)至(6)中任一項所述之感光性樹脂組成物,其可形成在藉由微小硬度計所施加之負載-卸載試驗中,滿足下述(i)至(iii)之至少1者的遮光膜:(i)破壞強度為200mN以上,(ii)彈性恢復率為30%以上,(iii)壓縮率為40%以下。 (7) The photosensitive resin composition according to any one of (1) to (6) which can be formed in a load-unloading test applied by a micro hardness tester, which satisfies the following ( The light-shielding film of at least one of i) to (iii): (i) the breaking strength is 200 mN or more, (ii) the elastic recovery rate is 30% or more, and (iii) the compression ratio is 40% or less.

(8)本發明又係一種具有間隔件功能之遮光膜,其係使(1)至(7)項中任一項所述之感光性樹脂組成物硬化而形成者。 (8) The present invention is a light-shielding film having a function of a spacer, which is formed by curing the photosensitive resin composition according to any one of (1) to (7).

(9)本發明又係一種液晶顯示裝置,其係具有(8)所述之遮光膜作為黑色柱狀間隔件(BCS)。 (9) The present invention is also a liquid crystal display device comprising the light-shielding film of (8) as a black columnar spacer (BCS).

(10)本發明又係如(9)所述之液晶顯示裝置,其係進一步具有薄膜電晶體(TFT)。 (10) The liquid crystal display device according to (9), further comprising a thin film transistor (TFT).

(11)本發明又係一種具有間隔件功能之遮光膜用之感光性樹脂組成物的製造方法,其係在調製出使(D)遮光成分分散於(E)溶劑中而成之分散體後,進一步於前述分散體中添加且混合(A)鹼可溶性樹脂、(B)具有至少1個乙烯性不飽和鍵之光聚合性單體、(C)光聚合起始劑、及(E)溶劑; 其中,前述(A)鹼可溶性樹脂,係針對由雙酚類衍生之具有2個環氧丙基醚基之環氧化合物與含有不飽和基之單羧酸的反應物,使其與(a)四羧酸或其酸二酐、及(b)二羧酸或三羧酸或其酸酐反應而得之鹼可溶性樹脂;(D)遮光成分係選自由黑色有機顏料、混色有機顏料及遮光材料所成群組中之1種以上的成分。 (11) The present invention is also a method for producing a photosensitive resin composition for a light-shielding film having a separator function, which is obtained by dispersing a dispersion obtained by dispersing (D) a light-shielding component in (E) a solvent. Further, the (A) alkali-soluble resin, (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond, (C) a photopolymerization initiator, and (E) a solvent are further added to and mixed with the dispersion. ; Wherein the (A) alkali-soluble resin is a reaction product of an epoxy compound having two epoxypropyl ether groups derived from a bisphenol and a monocarboxylic acid containing an unsaturated group, and (a) An alkali-soluble resin obtained by reacting a tetracarboxylic acid or an acid dianhydride thereof and (b) a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof; (D) a light-shielding component selected from the group consisting of a black organic pigment, a mixed color organic pigment, and a light-shielding material. One or more components in a group.

(12)本發明又係如(11)所述之方法,其中,(D)遮光成分包含鈦黑。 (12) The method of (11), wherein the (D) light-shielding component comprises titanium black.

(13)本發明又係如(12)所述之方法,其中,在前述分散體中,前述鈦黑之平均二次粒徑為100至300nm。 (13) The method according to (12), wherein, in the dispersion, the titanium dioxide has an average secondary particle diameter of 100 to 300 nm.

(14)本發明又係如(11)至(13)中任一項所述之方法,其中,(D)遮光成分包含黑色有機顏料及/或混色有機顏料,在前述分散體中,前述黑色有機顏料及/或混色有機顏料之平均二次粒徑為20至500nm。 The method of any one of (11) to (13), wherein the (D) light-shielding component comprises a black organic pigment and/or a mixed color organic pigment, and in the dispersion, the black color The average secondary particle diameter of the organic pigment and/or the mixed color organic pigment is from 20 to 500 nm.

(15)本發明又係一種遮光膜之製造方法,其係於基板上塗佈(1)至(7)中任一項所述之感光性樹脂組成物,藉由光照射使前述感光性樹脂組成物硬化,而在基板上形成遮光膜。 (15) The method of producing a light-shielding film according to any one of (1) to (7), wherein the photosensitive resin is coated by light irradiation. The composition is hardened to form a light-shielding film on the substrate.

(16)本發明又係一種遮光膜之製造方法,其係如(15)所述之遮光膜之製造方法,且同時形成當H2為2至7μm時,△H=H2-H1為0.1至2.9之膜厚H1與膜厚H2的遮光膜,其中,膜厚H1為用以使作為遮光膜之光學濃度設為0.5/μm以上且不足3/μm之膜厚,膜厚H2為擔任間隔件功能之遮光膜的膜厚。 (16) The present invention is also a method for producing a light-shielding film, which is a method for producing a light-shielding film according to (15), and at the same time, when H2 is 2 to 7 μm, ΔH=H2-H1 is 0.1 to 2.9. In the light-shielding film of the film thickness H1 and the film thickness H2, the film thickness H1 is a film thickness for making the optical density of the light-shielding film 0.5/μm or more and less than 3/μm, and the film thickness H2 is a spacer function. The film thickness of the light shielding film.

(17)本發明又係一種液晶顯示裝置之製造方法,其係將(16)所述之方法中製造之遮光膜作為黑色柱狀間隔件。 (17) The present invention is also a method for producing a liquid crystal display device, which comprises the light-shielding film produced in the method of (16) as a black columnar spacer.

(18)本發明又係如(17)所述之製造方法,其中,前述液晶顯示裝置具有薄膜電晶體(TFT)。 (18) The manufacturing method according to (17), wherein the liquid crystal display device has a thin film transistor (TFT).

在本發明所述之遮光膜用之感光性樹脂組成物係由於包含特定的著色劑,故相較於向來的感光性樹脂組成物,可獲得維持遮光性、絕緣性,且彈性率、變形量、彈性恢復率優異的硬化物。進一步本發明所述之遮光膜用之感光性樹脂組成物,即使膜厚為2至7μm左右亦可形成微細的間隔件形狀。 Since the photosensitive resin composition for a light-shielding film according to the present invention contains a specific coloring agent, it is possible to maintain the light-shielding property and the insulating property, and the elastic modulus and the deformation amount as compared with the conventional photosensitive resin composition. A hardened material with excellent elastic recovery rate. Further, the photosensitive resin composition for a light-shielding film according to the present invention can form a fine spacer shape even when the film thickness is about 2 to 7 μm.

以下,針對本發明進行詳細地說明。 Hereinafter, the present invention will be described in detail.

(A)成分之含有聚合性不飽和基之鹼可溶性樹脂,係衍生自雙酚類之具有2個環氧丙基醚基的環氧化合物,較佳為將使通式(I)所示之環氧化合物與(甲基)丙烯酸(此為「丙烯酸及/或甲基丙烯酸」之意思)反應而得之含有聚合性不飽和基之含有羥基之化合物(c),與(a)四羧酸或其酸二酐、及(b)二羧酸或三羧酸或其酸酐反應而得之1分子內具有羧基及聚合性不飽和基之鹼可溶性樹脂。(A)成分係由於兼具聚合性不飽和雙鍵與羧基,可賦予感光性樹脂組成物優異的光硬化性、良顯影性、圖案化特性而獲得遮光膜的物性 提升。 The alkali-soluble resin containing a polymerizable unsaturated group of the component (A) is an epoxy compound having two epoxypropyl ether groups derived from a bisphenol, and is preferably represented by the formula (I). a hydroxyl group-containing compound (c) containing a polymerizable unsaturated group and an (a) tetracarboxylic acid obtained by reacting an epoxy compound with (meth)acrylic acid (this is meaning "acrylic acid and/or methacrylic acid") An alkali-soluble resin having a carboxyl group and a polymerizable unsaturated group in one molecule obtained by reacting the acid dianhydride or (b) a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof. In the component (A), the polymerizable unsaturated double bond and the carboxyl group are combined, and the photocurable property, the excellent developability, and the patterning property of the photosensitive resin composition can be imparted to obtain the physical properties of the light-shielding film. Upgrade.

惟,在通式(I)中,R1、R2、R3及R4係獨立地表示為氫原子、碳數1至5之烷基、鹵原子或苯基,X表示-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、或茀-9,9-二基或單鍵,m之平均值為0至10,較佳為0至3的範圍。 However, in the formula (I), R 1 , R 2 , R 3 and R 4 are independently represented by a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group, and X represents -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, or 茀-9,9-diyl Or a single bond, the average value of m is from 0 to 10, preferably from 0 to 3.

作為賦予通式(I)之環氧化合物的雙酚類,可列舉雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基) 茀、9,9-雙(4-羥基-3-氯苯基)茀、9,9-雙(4-羥基-3-溴苯基)茀、9,9-雙(4-羥基-3-氟苯基)茀、9,9-雙(4-羥基-3-甲氧基苯基)茀、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3,5-二氯苯基)茀、9,9-雙(4-羥基-3,5-二溴苯基)茀、4,4’-雙酚、3,3’-雙酚等。該等雙酚類可僅使用1種化合物,亦可組合併用複數種。其中,特佳為使用通式(I)中之X為茀-9,9-二基之雙酚類。 Examples of the bisphenol which imparts the epoxy compound of the formula (I) include bis(4-hydroxyphenyl) ketone, bis(4-hydroxy-3,5-dimethylphenyl) ketone, and bis(4- Hydroxy-3,5-dichlorophenyl)one, bis(4-hydroxyphenyl)anthracene, bis(4-hydroxy-3,5-dimethylphenyl)anthracene, bis(4-hydroxy-3,5 -dichlorophenyl)indole, bis(4-hydroxyphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5- Dichlorophenyl) hexafluoropropane, bis(4-hydroxyphenyl)dimethyl decane, bis(4-hydroxy-3,5-dimethylphenyl)dimethyl decane, bis(4-hydroxy-3) ,5-dichlorophenyl)dimethyl decane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5- Dibromophenyl)methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-dual (4 -hydroxy-3,5-dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane , bis(4-hydroxyphenyl)ether, bis(4-hydroxy-3,5-dimethylphenyl)ether, bis(4-hydroxy-3,5-dichlorophenyl)ether, 9,9- Bis(4-hydroxyphenyl)fluorene, 9,9-bis(4-hydroxy-3-methylphenyl) Indole, 9,9-bis(4-hydroxy-3-chlorophenyl)indole, 9,9-bis(4-hydroxy-3-bromophenyl)anthracene, 9,9-bis(4-hydroxy-3- Fluorophenyl)fluorene, 9,9-bis(4-hydroxy-3-methoxyphenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dimethylphenyl)anthracene, 9, 9-bis(4-hydroxy-3,5-dichlorophenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dibromophenyl)anthracene, 4,4'-bisphenol, 3, 3'-bisphenol, etc. These bisphenols may be used alone or in combination of plural kinds. Among them, it is particularly preferred to use a bisphenol of the formula (I) wherein X is a -9,9-diyl group.

用於衍生出(A)鹼可溶性樹脂的通式(I)的化合物,係使上述雙酚類與環氧氯丙烷反應所得之具有2個環氧丙基醚基之環氧化合物。在此反應之際,一般而言伴隨著二環氧丙醚化合物之低聚合化,m在各個分子中為0至10之整數,通常混合存在有複數個值之分子,故平均值0至10(不限於整數),m之平均值較佳為0至3。m之平均值超過上限值時,將使用該環氧化合物合成之鹼可溶性樹脂使用製作為感光性樹脂組成物時,組成物之黏度變得過大無法順利進行塗佈,或無法充分賦予鹼可溶性,鹼顯影性變得極為不佳。 The compound of the formula (I) for deriving the (A) alkali-soluble resin is an epoxy compound having two epoxypropyl ether groups obtained by reacting the above bisphenols with epichlorohydrin. In the case of this reaction, generally, with the oligomerization of the diglycidyl ether compound, m is an integer of 0 to 10 in each molecule, and a molecule having a plurality of values is usually mixed, so the average value is 0 to 10. (not limited to an integer), the average value of m is preferably 0 to 3. When the average value of m exceeds the upper limit, when the alkali-soluble resin synthesized using the epoxy compound is used as a photosensitive resin composition, the viscosity of the composition becomes too large to be applied smoothly, or alkali solubility cannot be sufficiently provided. The alkali developability becomes extremely poor.

其次,將使環氧化合物與(甲基)丙烯酸反應所得之含有聚合性不飽和基的含有羥基之化合物、與酸成分反應,而可獲得在1分子內具有羧基及聚合性不飽和基之鹼可溶性樹脂。作為酸成分者,宜使用可與含有羥基之化合物反應之四羧酸或其酸二酐(a)、及二羧酸或三羧酸或其酸單酐(b)。此酸成分之羧酸殘基可具有飽和烴或不飽和烴之一。又,在該等羧酸殘基中亦可包含-O-、-S-、羰基 等含雜元素之鍵結。 Next, a hydroxyl group-containing compound containing a polymerizable unsaturated group obtained by reacting an epoxy compound with (meth)acrylic acid and an acid component are reacted to obtain a base having a carboxyl group and a polymerizable unsaturated group in one molecule. Soluble resin. As the acid component, a tetracarboxylic acid or an acid dianhydride (a) which can react with a compound containing a hydroxyl group, and a dicarboxylic acid or a tricarboxylic acid or an acid anhydride (b) thereof are preferably used. The carboxylic acid residue of this acid component may have one of a saturated hydrocarbon or an unsaturated hydrocarbon. Further, -O-, -S-, or a carbonyl group may be contained in the carboxylic acid residues. Such as a bond containing a hetero element.

以下顯示酸成分之具體例,惟亦可使用例示之多元羧酸之二酐及單酐。 Specific examples of the acid component are shown below, but the dianhydride and monoanhydride of the exemplified polycarboxylic acid can also be used.

首先,作為(a)四羧酸者,可列舉鏈式烴四羧酸、脂環式四羧酸或芳香族多元羧酸。此處,作為鏈式烴四羧酸者,例如,丁烷四羧酸、戊烷四羧酸、己烷四羧酸等,此外,亦可為導入有任意的取代基之四羧酸。又,作為脂環式四羧酸者,例如環丁烷四羧酸、環戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、降莰烷四羧酸等,而且亦可為導入有任意的取代基之四羧酸。另外,作為芳香族四羧酸者,例如均苯四甲酸、二苯甲酮四羧酸、聯苯四羧酸、聯苯醚四羧酸等,而且亦可為導入有任意的取代基之四羧酸。該等(a)四羧酸係可僅使用1種化合物,亦可組合使用複數種。 First, as the (a) tetracarboxylic acid, a chain hydrocarbon tetracarboxylic acid, an alicyclic tetracarboxylic acid or an aromatic polycarboxylic acid can be mentioned. Here, as the chain hydrocarbon tetracarboxylic acid, for example, butane tetracarboxylic acid, pentanetetracarboxylic acid, hexanetetracarboxylic acid, or the like, or a tetracarboxylic acid to which an arbitrary substituent is introduced may be used. Further, as the alicyclic tetracarboxylic acid, for example, cyclobutanetetracarboxylic acid, cyclopentanetetracarboxylic acid, cyclohexanetetracarboxylic acid, cycloheptanetetracarboxylic acid, norbornanetetracarboxylic acid, etc. It may be a tetracarboxylic acid to which an arbitrary substituent is introduced. Further, examples of the aromatic tetracarboxylic acid include pyromellitic acid, benzophenone tetracarboxylic acid, biphenyltetracarboxylic acid, and diphenyl ether tetracarboxylic acid, and may be any of the substituents introduced therein. carboxylic acid. These (a) tetracarboxylic acid type may be used alone or in combination of plural kinds.

又,作為(b)二羧酸或三羧酸者,可使用鏈式烴二羧酸或三羧酸、脂環式二羧酸或三羧酸、芳香族二羧酸或三羧酸。此處,作為鏈式烴二羧酸或三羧酸者,例如琥珀酸、乙醯基琥珀酸、馬來酸、己二酸、衣康酸、壬二酸、甲基蘋果酸、丙二酸、戊二酸、檸檬酸、酒石酸、側氧戊二酸、庚二酸、癸二酸、辛二酸、二乙醇酸等,而且亦可為導入有任意取代基之二羧酸或三羧酸。又,作為脂環式二羧酸或三羧酸者,例如環丁烷二羧酸、環戊烷二羧酸、六氫鄰苯二甲酸、四氫鄰苯二甲酸、降莰烷二羧酸,而且亦可為導入有任意取代基之二羧酸或三羧酸。此外, 作為芳香族二羧酸或三羧酸者,例如鄰苯二甲酸、間苯二甲酸、偏苯三甲酸等,而且亦可為導入有任意取代基之二羧酸或三羧酸。該等(b)二羧酸或三羧酸係可僅使用1種化合物,亦可組合使用複數種。 Further, as the (b) dicarboxylic acid or tricarboxylic acid, a chain hydrocarbon dicarboxylic acid or a tricarboxylic acid, an alicyclic dicarboxylic acid or a tricarboxylic acid, an aromatic dicarboxylic acid or a tricarboxylic acid can be used. Here, as a chain hydrocarbon dicarboxylic acid or a tricarboxylic acid, for example, succinic acid, acetyl succinic acid, maleic acid, adipic acid, itaconic acid, sebacic acid, methyl malic acid, malonic acid , glutaric acid, citric acid, tartaric acid, oxoglutaric acid, pimelic acid, sebacic acid, suberic acid, diglycolic acid, etc., and may also be a dicarboxylic acid or a tricarboxylic acid into which an arbitrary substituent is introduced. . Further, as an alicyclic dicarboxylic acid or a tricarboxylic acid, for example, a cyclobutane dicarboxylic acid, a cyclopentane dicarboxylic acid, a hexahydrophthalic acid, a tetrahydrophthalic acid, a norbornane dicarboxylic acid Further, it may be a dicarboxylic acid or a tricarboxylic acid to which an arbitrary substituent is introduced. In addition, Examples of the aromatic dicarboxylic acid or tricarboxylic acid include phthalic acid, isophthalic acid, trimellitic acid, and the like, and may be a dicarboxylic acid or a tricarboxylic acid into which an arbitrary substituent is introduced. These (b) dicarboxylic acid or tricarboxylic acid type may be used alone or in combination of plural kinds.

在(A)鹼可溶性樹脂中所使用之(a)四羧酸或其酸二酐與(b)二羧酸或三羧酸或其酸酐之莫耳比(b)/(a),係0.01至0.5,較佳為0.02以上且不足0.1。莫耳比(b)/(a)脫離上述範圍時,由於無法得到為了作為本發明之高遮光且高電阻並且具有良好光圖案化性之感光性樹脂組成物的最適分子量,故不佳。此外,莫耳比(b)/(a)越小則有鹼溶解性越大、分子量越大之傾向 The molar ratio (b)/(a) of (a) a tetracarboxylic acid or an acid dianhydride thereof and (b) a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof used in the (A) alkali-soluble resin is 0.01 To 0.5, preferably 0.02 or more and less than 0.1. When the molar ratio (b)/(a) is out of the above range, the optimum molecular weight of the photosensitive resin composition having high light-shielding and high electric resistance as the present invention is not obtained, which is not preferable. In addition, the smaller the molar ratio (b) / (a), the greater the alkali solubility and the higher the molecular weight.

針對使上述之含有聚合性不飽和基之含有羥基的化合物(c)與酸成分(b)及(a)反應之比率,較佳為以使化合物之末端成為羧基之方式,並以使各成分之莫耳比成為(c):(b):(a)=1:0.2至1.0:0.01至1.0之方式進行定量地反應。此時,較佳為使含有聚合性不飽和基之含有羥基的化合物(c)相對於酸成分之總量的莫耳比(c)/[(b)/2+(a)]=0.5至1.0之方式進行定量地反應。此莫耳比不足0.5時,鹼可溶性樹脂之末端成為酸酐,又未反應酸二酐之含量增大而有鹼可溶性樹脂組成物之歷時安定性降低之疑慮。另一方面,莫耳比超過1.0時,未反應之含有聚合性不飽和基之含有羥基的化合物之含量增大而有鹼可溶性樹脂組成物之歷時安定性降低之疑慮。(a)、(b)及(c)之各成分的莫耳比係能夠以調整鹼可溶性樹脂之酸價、分子量為目 的而在上述的範圍任意地變更。 The ratio of the reaction of the hydroxyl group-containing compound (c) containing the polymerizable unsaturated group to the acid components (b) and (a) is preferably such that the terminal of the compound becomes a carboxyl group and the components are used. The molar ratio is quantitatively reacted in the manner of (c): (b): (a) = 1: 0.2 to 1.0: 0.01 to 1.0. In this case, it is preferred that the molar ratio (c) / [(b) / 2+ (a)] = 0.5 to the total amount of the hydroxyl group-containing compound (c) containing a polymerizable unsaturated group relative to the acid component is The quantitative reaction was carried out in a 1.0 manner. When the molar ratio is less than 0.5, the end of the alkali-soluble resin becomes an acid anhydride, and the content of the unreacted acid dianhydride increases, and the stability of the alkali-soluble resin composition is lowered. On the other hand, when the molar ratio exceeds 1.0, the content of the unreacted hydroxyl group-containing compound containing a polymerizable unsaturated group increases, and the stability of the alkali-soluble resin composition is lowered. The molar ratio of each component of (a), (b), and (c) can be adjusted by adjusting the acid value and molecular weight of the alkali-soluble resin. However, it is arbitrarily changed in the above range.

(A)鹼可溶性樹脂係可依據上述之步驟,且依據已知的方法,例如日本特開平8-278629號公報或日本特開2008-9401號公報等所記載之方法而製造。首先,作為使通式(I)之環氧化合物與(甲基)丙烯酸反應之方法者,例如將與環氧化合物之環氧基等莫耳的(甲基)丙烯酸添加至溶劑中,在觸媒(氯化三乙基苯甲基銨、2,6-二異丁基苯酚等)的存在下,吹入空氣且同時在90至120℃下進行加熱、攪拌且反應的方法。接著,作為使反應生成物之丙烯酸環氧酯化合物之羥基與酸酐反應的方法者,係在溶劑中添加指定量的丙烯酸環氧酯化合物與酸二酐及酸單酐,在觸媒(溴化四乙基銨、三苯基膦等)存在下,在90至140℃下進行加熱、攪拌且反應的方法。 (A) The alkali-soluble resin can be produced according to the method described above, and can be produced by a method described in, for example, JP-A-H08-278629 or JP-A-2008-9401. First, as a method of reacting the epoxy compound of the formula (I) with (meth)acrylic acid, for example, a molar (meth)acrylic acid such as an epoxy group of an epoxy compound is added to a solvent, A method of heating, stirring, and reacting at 90 to 120 ° C while blowing air in the presence of a medium (triethylbenzylammonium chloride, 2,6-diisobutylphenol, etc.). Next, as a method of reacting a hydroxyl group of an epoxy acrylate compound of a reaction product with an acid anhydride, a predetermined amount of an epoxy acrylate compound, an acid dianhydride, and an acid monoanhydride are added to a solvent, and a catalyst (bromination) A method of heating, stirring, and reacting at 90 to 140 ° C in the presence of tetraethylammonium, triphenylphosphine, or the like.

如此方式製造之(A)鹼可溶性樹脂係例如具有通式(II)所示之結構。 The (A) alkali-soluble resin produced in this manner has, for example, a structure represented by the formula (II).

式中,R1、R2、R3及R4係各自獨立地表示為氫原子、碳數1至5之烷基、鹵原子或苯基,R5表示氫原子或甲基,X表示-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、 -CH2-、-C(CH3)2-、-O-、或茀-9,9-二基或直鍵,Y表示4元羧酸殘基,Z各自獨立地表示為氫原子或-OC-W-(COOH)1(惟,W表示2元或3元羧酸殘基,1表示1至2之數),n表示1至20之數。 In the formula, R 1 , R 2 , R 3 and R 4 are each independently represented by a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group, R 5 represents a hydrogen atom or a methyl group, and X represents - CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, or 茀-9,9 a di- or direct bond, Y represents a 4-membered carboxylic acid residue, and Z is each independently represented as a hydrogen atom or -OC-W-(COOH) 1 (only, W represents a 2- or 3-membered carboxylic acid residue, 1 Indicates the number from 1 to 2), and n represents the number from 1 to 20.

(A)鹼可溶性樹脂之由凝膠滲透層析(GPC)測定之以聚苯乙烯換算的重量平均分子量(Mw),通常為1000至100000,較佳為2000至20000。重量平均分子量不足1000時,有鹼顯影時之圖案密著性降低之疑慮,重量平均分子量超過100000時,有顯影性顯著降低之疑慮。 (A) The weight average molecular weight (Mw) in terms of polystyrene measured by gel permeation chromatography (GPC) of the alkali-soluble resin, usually from 1,000 to 100,000, preferably from 2,000 to 20,000. When the weight average molecular weight is less than 1,000, there is a concern that the pattern adhesion at the time of alkali development is lowered, and when the weight average molecular weight exceeds 100,000, the developability is remarkably lowered.

又,(A)鹼可溶性樹脂之酸價的較佳範圍為80至120mgKOH/g。由於該值小於80mgKOH/g時鹼顯影時殘渣容易殘留,超過120mgKOH/g時鹼性顯影液的浸透過早,產生剝離顯影,任一者皆為不佳。此外,(A)含有聚合性不飽和基的鹼可溶性樹脂係可僅使用其1種,亦可使用2種以上的混合物。 Further, the acid value of the (A) alkali-soluble resin is preferably in the range of 80 to 120 mgKOH/g. When the value is less than 80 mgKOH/g, the residue tends to remain during alkali development. When the amount exceeds 120 mgKOH/g, the immersion of the alkaline developing solution is early, and peeling development occurs, and neither of them is poor. Further, (A) the alkali-soluble resin containing a polymerizable unsaturated group may be used singly or in combination of two or more kinds.

在本發明中,(A)之重量平均分子量係使用將經抽樣之溶液溶解於四氫呋喃中並以TOSOH公司製之HLC-8220GPC進行分子量分布測定,以標準聚苯乙烯換算的重量平均分子量所算出之值。又A成分之酸價係使用將經抽樣之溶液溶解於二烷中並以0.1當量之氫氧化鉀水溶液進行中和滴定,從當量點所算出之試樣溶液的固形份換算之酸價之值。 In the present invention, the weight average molecular weight of (A) is determined by dissolving the sampled solution in tetrahydrofuran and measuring the molecular weight distribution by HLC-8220GPC manufactured by TOSOH Co., Ltd., and calculating the weight average molecular weight in terms of standard polystyrene. value. The acid value of the component A is used to dissolve the sampled solution in the second The value of the acid value in terms of the solid content of the sample solution calculated from the equivalent point was determined by neutralization titration with an aqueous solution of 0.1 equivalent of potassium hydroxide in the alkane.

接著,作為(B)具有至少1個乙烯性不飽和鍵之光聚合性單體者,可列舉例如:(甲基)丙烯酸2-羥基 乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基己酯等具有羥基之(甲基)丙烯酸酯類;乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、四亞甲二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、新戊四醇二(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇四(甲基)丙烯酸酯、(甲基)丙烯酸甘油酯、山梨糖醇五(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、或二新戊四醇六(甲基)丙烯酸酯、山梨糖醇六(甲基)丙烯酸酯、磷腈(phosphazene)的環氧烷改性六(甲基)丙烯酸酯、己內酯改性二新戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類;新戊四醇、二新戊四醇等多元醇類;苯酚酚醛清漆(phenol novolak)等多元酚類的乙烯基苄基醚化合物;二乙烯基苯等二乙烯基化合物類的加成聚合物等。該等(B)具有至少1個乙烯性不飽和鍵之光聚合性單體,係可僅使用1種化合物,亦可組合使用複數種。此外,(B)具有至少1個乙烯性不飽和鍵之光聚合性單體係不具有遊離之羧基。 Next, as (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond, for example, (meth)acrylic acid 2-hydroxyl group a (meth) acrylate having a hydroxyl group such as ethyl ester, 2-hydroxypropyl (meth) acrylate or 2-hydroxyhexyl (meth) acrylate; ethylene glycol di(meth) acrylate, diethylene glycol Alcohol di(meth)acrylate, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, tetramethylene glycol di(meth)acrylate, trimethylol Propane tri(meth)acrylate, trimethylolethane tri(meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, neopentyl Alcohol tetra(meth)acrylate, dipentaerythritol tetra(meth)acrylate, glyceryl (meth)acrylate, sorbitol penta(meth)acrylate, dipentaerythritol penta (methyl) Acrylate, or neopentyltetraol hexa(meth) acrylate, sorbitol hexa(meth) acrylate, phosphazene alkylene oxide modified hexa(meth) acrylate, (meth)acrylates such as ester-modified dipentaerythritol hexa(meth)acrylate; polyhydric alcohols such as pentaerythritol and dipentaerythritol; and polyphenols such as phenol novolak Vinyl benzyl Ether compounds; divinylbenzene divinyl compound based addition polymer. These (B) photopolymerizable monomers having at least one ethylenically unsaturated bond may be used alone or in combination of plural kinds. Further, (B) the photopolymerizable single system having at least one ethylenically unsaturated bond does not have a free carboxyl group.

相對於(A)成分100質量份,(B)成分之調配比例可為5至400質量份,較佳為10至150質量份。相對於(A)成分100質量份,(B)成分之調配比例多於400質量份時,光硬化後的硬化物變脆,又由於在未曝光部中塗膜的酸價變低,因此對鹼性顯影液的溶解性降低,產生圖案邊緣成為鋸齒狀變得不清晰的問題。另一方面,相對於(A) 成分100質量份,(B)成分之調配比例少於5質量份時,樹脂中所占的光反應性官能基的比例少而交聯結構的形成不充分,另外,由於樹脂成分中的酸價較高,在曝光部中對於鹼性顯影液的溶解性變高,因此有發生所形成之圖案變得比目標線寬更細、或容易產生圖案缺口等問題之疑慮。 The compounding ratio of the component (B) may be 5 to 400 parts by mass, preferably 10 to 150 parts by mass, based on 100 parts by mass of the component (A). When the blending ratio of the component (B) is more than 400 parts by mass based on 100 parts by mass of the component (A), the cured product after photocuring becomes brittle, and the acid value of the coating film in the unexposed portion becomes low, so The solubility of the alkaline developing solution is lowered, and the problem that the edge of the pattern becomes jagged becomes unclear. On the other hand, relative to (A) When the blending ratio of the component (B) is less than 5 parts by mass, the proportion of the photoreactive functional group in the resin is small, and the formation of the crosslinked structure is insufficient, and the acid value in the resin component is insufficient. When the solubility in the exposed portion is high for the alkaline developing solution, there is a concern that the formed pattern becomes thinner than the target line width, or the pattern is easily formed.

再者,作為(C)成分之光聚合起始劑者,可列舉例如:苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對第三丁基苯乙酮等苯乙酮類;二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲基胺基二苯甲酮等二苯甲酮類;二苯乙二酮(benzil)、安息香、安息香甲醚、安息香異丙醚、安息香異丁醚等安息香醚類;2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物類;2-三氯甲基-5-苯乙烯基-1,3,4-二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-二唑等鹵代甲基二唑化合物類;2,4,6-三(三氯甲基)-1,3,5-三、2-甲基-4,6-雙(三氯甲基)-1,3,5-三、2-苯基-4,6-雙(三氯甲基)-1,3,5-三、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲硫基苯乙烯 基)-4,6-雙(三氯甲基)-1,3,5-三等鹵代甲基均三系化合物類;1,2-辛二酮,1-[4-(苯硫基)苯基]-,2-(O-苯甲醯肟)、1-(4-苯基硫基苯基)丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲基硫基苯基)丁烷-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲基硫基苯基)丁烷-1-酮肟-O-乙酸酯、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯肟)、甲酮,(9-乙基-6-硝基-9H-咔唑-3-基)[4-(2-甲氧基-1-甲基乙氧基)-2-甲基苯基]-,O-乙醯肟、甲酮,(2-甲基苯基)(7-硝基-9,9-二丙基-9H-茀-2-基)-,乙醯肟、乙酮,1-[7-(2-甲基苯甲醯基)-9,9-二丙基-9H-茀-2-基]-,1-(O-乙醯肟)、乙酮,1-(-9,9-二丁基-7-硝基-9H-茀-2-基)-,1-O-乙醯肟等O-醯基肟系化合物類;苄基二甲基縮酮、噻噸酮、2-氯噻噸酮、2,4-二乙基噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮等硫化合物;2-乙基蒽醌、八甲基蒽醌、1,2-苯並蒽醌、2,3-二苯基蒽醌等蒽醌類;偶氮雙異丁基腈、過氧化苯甲醯、過氧化異丙苯等有機過氧化物;2-巰基苯並咪唑、2-巰基苯並唑、2-巰基苯並噻唑等硫醇化合物等。其中,由容易獲得高感度的遮光膜用感光性樹脂組成物的觀點而言,較佳為使用O-醯基肟系化合物類。該等(C)光聚合起始劑係可僅使用1種化合物,亦可組合使用複數種。此外,本發明中所謂的光聚合起始劑,以包含增感劑的含義而使用。 Further, examples of the photopolymerization initiator of the component (C) include acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, and p-dimethylamino group. Acetophenones such as propiophenone, dichloroacetophenone, trichloroacetophenone, p-tert-butylacetophenone; benzophenone, 2-chlorobenzophenone, p,p'-bisdimethyl Benzophenones such as carbamide benzophenone; benzil, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether and other benzoin ethers; 2-(o-chlorophenyl) -4,5-phenylbiimidazole, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)biimidazole, 2-(o-fluorophenyl)-4,5-di a biimidazole-based compound such as phenylbiimidazole, 2-(o-methoxyphenyl)-4,5-diphenylbiimidazole or 2,4,5-triarylbiimidazole; 2-trichloromethyl- 5-styryl-1,3,4- Diazole, 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4- Diazole, 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4- Halogenated methyldiazole compounds such as oxadiazole; 2,4,6-tris(trichloromethyl)-1,3,5-three 2-methyl-4,6-bis(trichloromethyl)-1,3,5-three 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-methoxynaphthyl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(3,4,5-trimethoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-three 2-(4-Methylthiostyryl)-4,6-bis(trichloromethyl)-1,3,5-three Isohalogenated methyl Compounds; 1,2-octanedione, 1-[4-(phenylthio)phenyl]-, 2-(O-benzamide), 1-(4-phenylthiophenyl) Butane-1,2-dione-2-indole-O-benzoate, 1-(4-methylthiophenyl)butane-1,2-dione-2-indole-O-B Acid ester, 1-(4-methylthiophenyl)butan-1-one oxime-O-acetate, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzamide) -9H-carbazol-3-yl]-, 1-(O-acetamidine), ketone, (9-ethyl-6-nitro-9H-carbazol-3-yl)[4- (2-methoxy-1-methylethoxy)-2-methylphenyl]-, O-acetamidine, ketone, (2-methylphenyl) (7-nitro-9, 9-dipropyl-9H-indol-2-yl)-, acetamidine, ethyl ketone, 1-[7-(2-methylbenzhydryl)-9,9-dipropyl-9H-indole -2-yl]-, 1-(O-acetamidine), ethyl ketone, 1-(-9,9-dibutyl-7-nitro-9H-indol-2-yl)-, 1-O - O-mercapto lanthanide compounds such as acetamidine; benzyl dimethyl ketal, thioxanthone, 2-chlorothioxanthone, 2,4-diethyl thioxanthone, 2-methyl thioxanthene a sulfur compound such as a ketone or 2-isopropylthioxanthone; an anthracene such as 2-ethylhydrazine, octamethylguanidine, 1,2-benzopyrene or 2,3-diphenylanthracene; Azobisisobutyronitrile, benzammonium peroxide, cumene peroxide, etc. Thereof; 2- mercaptobenzimidazole, 2-mercaptobenzimidazole a thiol compound such as azole or 2-mercaptobenzothiazole. Among them, from the viewpoint of easily obtaining a photosensitive resin composition for a light-shielding film having high sensitivity, an O-fluorenyl compound is preferably used. These (C) photopolymerization initiators may be used alone or in combination of plural kinds. Further, the photopolymerization initiator in the present invention is used in the meaning of containing a sensitizer.

該等光聚合起始劑或增感劑除可僅單獨使用其中1種之外,亦可組合使用2種以上。而且,亦可添加其自身不發揮光聚合起始劑或增感劑之作用,但藉由組 合使用可使光聚合起始劑或增感劑的能力增大的化合物。作為如此之化合物者,可列舉例如:與二苯甲酮組合使用而具有效果的三乙醇胺、三乙胺等三級胺。 These photopolymerization initiators or sensitizers may be used alone or in combination of two or more. Moreover, it is also possible to add a function which does not exert a photopolymerization initiator or a sensitizer by itself, but by a group A compound which can increase the ability of a photopolymerization initiator or a sensitizer is used in combination. As such a compound, for example, a tertiary amine such as triethanolamine or triethylamine which is effective in combination with benzophenone can be mentioned.

(C)成分的光聚合起始劑的使用量,以(A)成分與(B)成分的合計100質量份為基準,可為0.1至30質量份,較佳為1至25質量份。(C)成分的調配比例不足0.1質量份時,光聚合的速度變慢、感度降低;另一方面,在超過30質量份時,有產生:感度過強、圖案線寬成為相對於圖案遮罩變粗的狀態,而無法重現對於遮罩忠實的線寬、或者圖案邊緣成為鋸齒狀而無法變清晰等問題之疑慮。 The amount of the photopolymerization initiator to be used in the component (C) may be 0.1 to 30 parts by mass, preferably 1 to 25 parts by mass, based on 100 parts by mass of the total of the components (A) and (B). When the proportion of the component (C) is less than 0.1 part by mass, the rate of photopolymerization is slow and the sensitivity is lowered. On the other hand, when it exceeds 30 parts by mass, the sensitivity is too strong, and the pattern line width is relative to the pattern mask. The state is thicker, and it is impossible to reproduce the doubt that the mask has a faithful line width, or that the edge of the pattern is jagged and cannot be sharpened.

(D)成分是選自黑色有機顏料、混色有機顏料及遮光材料的遮光成分,可為絕緣性、耐熱性、耐光性及耐溶劑性優異的成分。此處,作為黑色有機顏料者,可列舉例如:苝黑、苯胺黑、花青黑、內醯胺黑等。作為混色有機顏料者,可列舉將選自紅、藍、綠、紫、黃色、花青、品紅等的2種以上顏料混合而進行模擬黑色化而成者。作為遮光材料者,可列舉碳黑、氧化鉻、氧化鐵、鈦黑等。該等(D)遮光成分可僅使用1種化合物,亦可以組合使用複數種。 The component (D) is a light-shielding component selected from the group consisting of a black organic pigment, a mixed color organic pigment, and a light-shielding material, and is a component excellent in insulation, heat resistance, light resistance, and solvent resistance. Here, examples of the black organic pigment include black, aniline black, cyanine black, and indoleamine black. As a color-mixing organic pigment, two or more types of pigments selected from red, blue, green, purple, yellow, cyanine, and magenta are mixed and simulated black. Examples of the light shielding material include carbon black, chromium oxide, iron oxide, and titanium black. These (D) light-shielding components may be used alone or in combination of plural kinds.

作為遮光材料者,由遮光性、彈性率、變形量、彈性恢復率良好的觀點而言,較佳為鈦黑。在使用鈦黑時,以更進一步提升絕緣性為目的下,亦可併用黑色有機顏料及/或混色有機顏料。如此,將無機系的遮光材料與有機顏料併用時,[遮光材料/(黑色有機顏料及/或混色有 機顏料)]的調配比,就質量比而言可為90/10至10/90,較佳為70/30至30/70。藉由如此之遮光材料與有機顏料之組合、及該等的調配比,而可獲得具有期望之遮光性、絕緣性等特性的具有間隔件功能之遮光膜。在欲使遮光膜為無彩色這類的控制遮光膜的色度等之目的下,黑色以外的有機顏料不只模擬混色而成為黑色之目的,亦可作為單色添加。 As a light-shielding material, titanium black is preferable from the viewpoint of good light-shielding property, elastic modulus, deformation amount, and elastic recovery rate. When titanium black is used, black organic pigments and/or color mixed organic pigments may be used in combination for the purpose of further improving the insulating properties. Thus, when an inorganic light-shielding material is used together with an organic pigment, [light-shielding material/(black organic pigment and/or color mixture is The mixing ratio of the organic pigment) can be 90/10 to 10/90, preferably 70/30 to 30/70 in terms of mass ratio. By such a combination of the light-shielding material and the organic pigment, and the blending ratios thereof, a light-shielding film having a spacer function having desired properties such as light-shielding property and insulating property can be obtained. For the purpose of controlling the chromaticity of the light-shielding film such as achromatic color, etc., the organic pigment other than black is not only mixed for color mixing but also black, and may be added as a single color.

本發明中使用之鈦黑,係以低階氧化鈦、氮氧化鈦等為代表之含鈦的黑色無機顏料,該等之中較佳可使用顯示高絕緣性者。作為該等鈦黑之製作方法者,係有將二氧化鈦與金屬鈦的混合體在還原環境下使其加熱還原的方法(日本特開昭49-5432號公報)、將以四氯化鈦的高溫水解而得之超微細二氧化鈦在含有氫之還原環境中進行還原的方法(日本特開昭57-205322號公報)、將二氧化鈦或氫氧化鈦在氨存在下進行高溫還原的方法(日本特開昭60-65069號公報、日本特開昭61-201610號公報)、使釩化合物附著在二氧化鈦或氫氧化鈦,在氨存在下進行高溫還原的方法(日本特開昭61-201610號公報)等,然而並不被該等所限定。 The titanium black used in the present invention is a titanium-containing black inorganic pigment typified by low-order titanium oxide, titanium oxynitride or the like, and among them, those having high insulating properties can be preferably used. As a method of producing such a titanium black, a method of heating and reducing a mixture of titanium dioxide and titanium metal in a reducing environment is disclosed (JP-A-49-5432), and a high temperature of titanium tetrachloride is used. A method of reducing ultrafine titanium dioxide obtained by hydrolysis in a reducing environment containing hydrogen (JP-A-57-205322), and a method of reducing titanium dioxide or titanium hydroxide in the presence of ammonia at a high temperature (Japanese special open method) Japanese Laid-Open Patent Publication No. Sho 61-201610, etc., a method in which a vanadium compound is adhered to titanium dioxide or titanium hydroxide, and a high-temperature reduction is carried out in the presence of ammonia (JP-A-61-201610). However, it is not limited by these.

再者,該等含鈦的黑色無機顏料,亦可為在無機粒子表面被覆有有機化合物或無機化合物者。作為用於被覆之有機化合物之例者,係多元醇、醇胺或其衍生物、有機矽化合物(聚矽氧烷類、矽烷系偶合劑等)、高級脂肪酸或其金屬鹽、有機金屬化合物(鈦系偶合劑、鋁系偶 合劑等)等。另一方面,作為用於被覆之無機化合物之例者,可列舉鋁化合物、矽化合物、鋯化合物、錫化合物、鈦化合物、銻化合物等。作為該含鈦粒子的表面被覆方法者,係可使用日本特開2006-206891所記載之方法等。 Further, the titanium-containing black inorganic pigment may be one in which an inorganic compound or an inorganic compound is coated on the surface of the inorganic particles. Examples of the organic compound to be coated include a polyol, an alcohol amine or a derivative thereof, an organic hydrazine compound (polysiloxane, a decane coupling agent, etc.), a higher fatty acid or a metal salt thereof, and an organometallic compound ( Titanium coupler, aluminum couple Mixture, etc.). On the other hand, examples of the inorganic compound to be coated include an aluminum compound, a ruthenium compound, a zirconium compound, a tin compound, a titanium compound, and a ruthenium compound. As a method of covering the surface of the titanium-containing particles, a method described in JP-A-2006-206891 or the like can be used.

作為鈦黑的市售品之例者,可列舉三菱Materials製之鈦黑12S、13M-T、13M-C、UF8;赤穗化成製之Tilack D(「Tilack D」係同公司的註冊商標)等。 Examples of commercially available products of titanium black include Titanium Black 12S, 13M-T, 13M-C, and UF8 manufactured by Mitsubishi Materials; and Tilack D ("Tilack D" is a registered trademark of the company). Wait.

作為在本發明中使用之有機顏料者,未特別限定而可使用公知的化合物,較佳為經微粒化加工之由BET法之比表面積為50m2/g以上者。具體而言,可列舉:偶氮顏料、縮合偶氮顏料、偶氮甲鹼(azomethine)顏料、酞菁顏料、喹吖啶酮顏料、異吲哚啉酮顏料、異吲哚啉顏料、二顏料、陰丹士林(threne)顏料、苝顏料、紫環酮顏料、喹酞酮(quinophthalone)顏料、二酮吡咯並吡咯顏料、硫靛顏料等,具體而言,可列舉如下述之C.I.名之化合物,惟不被該等所限定。 The organic pigment to be used in the present invention is not particularly limited, and a known compound can be used, and it is preferred that the specific surface area by the BET method of the microparticulation processing is 50 m 2 /g or more. Specific examples thereof include azo pigments, condensed azo pigments, azomethine pigments, phthalocyanine pigments, quinacridone pigments, isoindolinone pigments, isoporphyrin pigments, and a pigment, a threne pigment, an anthraquinone pigment, a picone pigment, a quinophthalone pigment, a diketopyrrolopyrrole pigment, a thioindigo pigment, etc., specifically, a CI name as described below The compounds are not limited by these.

C.I.顏料紅2、3、4、5、9、12、14、22、23、31、38、112、122、144、146、147、149、166、168、170、175、176、177、178、179、184、185、187、188、202、207、208、209、210、213、214、220、221、242、247、253、254、255、256、257、262、264、266、272、279等;C.I.顏料橙5、13、16、34、36、38、43、61、62、64、67、68、71、72、73、74、81等;C.I.顏料黃1、3、12、13、14、16、17、55、73、74、 81、83、93、95、97、109、110、111、117、120、126、127、128、129、130、136、138、139、150、151、153、154、155、173、174、175、176、180、181、183、185、191、194、199、213、214等;C.I.顏料綠7、36、58等;C.I.顏料藍15、15:1、15:2、15:3、15:4、15:6、16、60、80等;C.I.顏料紫19、23、37等。 CI Pigment Red 2, 3, 4, 5, 9, 12, 14, 22, 23, 31, 38, 112, 122, 144, 146, 147, 149, 166, 168, 170, 175, 176, 177, 178 , 179, 184, 185, 187, 188, 202, 207, 208, 209, 210, 213, 214, 220, 221, 242, 247, 253, 254, 255, 256, 257, 262, 264, 266, 272 , 279, etc.; CI Pigment Orange 5, 13, 16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74, 81, etc.; CI Pigment Yellow 1, 3, 12 , 13, 14, 16, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154, 155, 173, 174, 175, 176, 180, 181, 183, 185, 191, 194, 199, 213, 214, etc.; CI pigment green 7, 36, 58, etc.; CI pigment blue 15, 15: 1, 15: 2, 15: 3, 15:4, 15:6, 16, 60, 80, etc.; CI Pigment Violet 19, 23, 37, etc.

再者,作為(E)成分之溶劑者,可列舉例如:甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇、3-甲氧基-1-丁醇、乙二醇單丁醚、3-羥基-2-丁酮、二丙酮醇等醇類;α-萜品醇或β-萜品醇等萜烯類等;丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯啶酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;賽珞蘇、甲基賽珞蘇、乙基賽珞蘇、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚等二醇醚類;乙酸乙酯、乙酸丁酯、乳酸乙酯、乙酸3-甲氧基丁酯、乙酸3-甲氧基-3-丁酯、賽珞蘇乙酸酯、乙基賽珞蘇乙酸酯、丁基賽珞蘇乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等酯類等,藉由使用這些溶劑進行溶解、混合,可製成均一的溶液狀組成物。為了塗佈性等必要特性,該等溶劑亦可使用2種以上。 Further, examples of the solvent of the component (E) include methanol, ethanol, n-propanol, isopropanol, ethylene glycol, propylene glycol, 3-methoxy-1-butanol, and ethylene glycol monobutylene. Alcohols, alcohols such as 3-hydroxy-2-butanone and diacetone; terpenes such as α-terpineol or β-terpineol; acetone, methyl ethyl ketone, cyclohexanone, N-A Ketones such as phenyl-2-pyrrolidone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; celecoxime, methyl acesulfame, ethyl acesulfame, carbitol, and methyl carbene Alcohol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, etc. Alcohol ethers; ethyl acetate, butyl acetate, ethyl lactate, 3-methoxybutyl acetate, 3-methoxy-3-butyl acetate, celecoxib acetate, ethyl cyanohydrin Acid ester, butyl cyproterone acetate, carbitol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate Esters and the like, etc., by using these solvents The solution is dissolved and mixed to form a uniform solution-like composition. These solvents may be used in combination of two or more kinds in order to have the necessary properties such as coating properties.

而且,該等遮光成分較佳為預先與(F)分散劑一同分散於溶劑而製成遮光性分散液,然後調配為遮光膜用感光性樹脂組成物。此處,由於使其分散的溶劑成為(E)成分的一部分,因此只要為在上述(E)成分中所列舉者即可使用,例如可較佳使用丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯等。關於形成遮光性分散液的(D)遮光成分的調配比例,可以是在相對於本發明的遮光膜用之感光性樹脂組成物的全固形份為5至80質量%的範圍使用。此外,所謂上述固形份係指在組成物中去除(E)成分之成分。在上述固形份中,亦包含在光硬化後成為固形份之(B)成分。如果少於5質量%,則不能設定為期望的遮光性。如果超過80質量%,由於本來成為黏合劑的感光性樹脂的含量減少,因此產生損及顯影特性且損及膜形成能力等不佳的問題。 Further, these light-shielding components are preferably dispersed in a solvent together with the (F) dispersant to form a light-shielding dispersion liquid, and then formulated into a photosensitive resin composition for a light-shielding film. Here, since the solvent to be dispersed is a part of the component (E), it can be used as long as it is listed in the above component (E). For example, propylene glycol monomethyl ether acetate or acetic acid 3- can be preferably used. Methoxybutyl ester and the like. The blending ratio of the (D) light-shielding component to form the light-shielding dispersion liquid may be in the range of 5 to 80% by mass based on the total solid content of the photosensitive resin composition for the light-shielding film of the present invention. Further, the above-mentioned solid portion means a component which removes the component (E) in the composition. In the above solid portion, the component (B) which becomes a solid component after photocuring is also included. If it is less than 5% by mass, it cannot be set to a desired light blocking property. When the content is more than 80% by mass, the content of the photosensitive resin which is originally a binder is reduced, which causes a problem of impairing the development characteristics and impairing the film forming ability.

在此遮光性分散液中之遮光成分以雷射繞射/散射式粒徑分布儀所測定之平均粒徑(以下稱為「平均二次粒徑」),較佳為以成為如下所述而進行。使用鈦黑時之鈦黑的平均二次粒徑可為100至300nm;使用黑色有機顏料及/或混色有機顏料、以及/或單色的有機顏料時,分散粒子的平均二次粒徑可為20至500nm。此外,即使在調配該等之遮光性分散液而調製之遮光膜用之感光性樹脂組成物中,該等遮光成分較佳為具有相同之平均二次粒徑。 The average particle diameter (hereinafter referred to as "average secondary particle diameter") measured by a laser diffraction/scattering particle size distribution device in the light-shielding dispersion liquid is preferably as follows. get on. The average secondary particle diameter of titanium black when using titanium black may be 100 to 300 nm; when black organic pigment and/or mixed color organic pigment, and/or monochromatic organic pigment is used, the average secondary particle diameter of the dispersed particles may be 20 to 500 nm. Further, even in the photosensitive resin composition for a light-shielding film prepared by disposing these light-shielding dispersions, the light-shielding components preferably have the same average secondary particle diameter.

再者,在遮光性分散液中,為了使遮光成分安定地分散而使用(F)分散劑,在該目的中可使用各種高分子分散劑等公知的分散劑。作為分散劑的例子者,並無 特別限制地可使用以往顏料分散中所使用的公知化合物(以分散劑、分散濕潤劑、分散促進劑等名稱而市售的化合物等),可列舉例如:陽離子性高分子系分散劑、陰離子性高分子系分散劑、非離子性高分子系分散劑、顏料衍生物型分散劑(分散助劑)等。特別是較佳為具有咪唑基、吡咯基、吡啶基、一級胺基、二級胺基或三級胺基等陽離子性官能基作為對顏料的吸附點,且胺價為1至100mgKOH/g、數量平均分子量為1千至10萬的範圍的陽離子性高分子系分散劑。相對於遮光成分,該分散劑的調配量為1至30質量%,較佳為2至25質量%。 In the light-shielding dispersion, a (F) dispersant is used in order to stably disperse the light-shielding component, and a known dispersant such as various polymer dispersants can be used for the purpose. As an example of a dispersant, there is no A known compound (a compound which is commercially available under the names of a dispersing agent, a dispersing wetting agent, a dispersing accelerator, etc.) used for the dispersion of the pigments can be used, and examples thereof include a cationic polymer dispersing agent and an anionic property. A polymer dispersant, a nonionic polymer dispersant, a pigment derivative dispersant (dispersion aid), and the like. In particular, it is preferred to have a cationic functional group such as an imidazolyl group, a pyrrolyl group, a pyridyl group, a primary amino group, a secondary amino group or a tertiary amino group as a point of adsorption to the pigment, and an amine value of from 1 to 100 mgKOH/g, A cationic polymer-based dispersant having a number average molecular weight of from 1,000 to 100,000. The dispersing agent is formulated in an amount of from 1 to 30% by mass, preferably from 2 to 25% by mass, based on the light-shielding component.

另外,在製備遮光性分散液時,藉由除了上述分散劑以外亦使(A)成分的含有聚合性不飽和基之鹼可溶性樹脂的一部分共分散,而在製成遮光膜用之感光性樹脂組成物時,可製成容易將曝光感度維持高感度、顯影時的密著性良好且難以產生殘渣的問題的感光性樹脂組成物。(A)成分的調配量,較佳為遮光性分散液中的2至20質量%,更佳為5至15質量%。(A)成分不足2質量%時,無法獲得感度提升、密著性提升、殘渣減少等共分散的效果。又,如果為20質量%以上,則特別是在遮光材料的含量大時,遮光性分散液的黏度高,變得難以均一地分散或者非常需要時間,變得難以獲得用以獲得遮光成分均一地分散的塗膜的感光性樹脂組成物。 In addition, when a light-shielding dispersion liquid is prepared, a part of the alkali-soluble resin containing a polymerizable unsaturated group of the component (A) is co-dispersed in addition to the above-mentioned dispersing agent, thereby preparing a photosensitive resin for a light-shielding film. In the case of the composition, it is possible to obtain a photosensitive resin composition which is easy to maintain the high sensitivity of the exposure sensitivity, has good adhesion during development, and is less likely to cause residue. The blending amount of the component (A) is preferably 2 to 20% by mass, more preferably 5 to 15% by mass in the light-shielding dispersion. When the amount of the component (A) is less than 2% by mass, the effect of co-dispersion such as improvement in sensitivity, improvement in adhesion, and reduction in residue cannot be obtained. In addition, when the content of the light-shielding material is large, the viscosity of the light-shielding dispersion liquid is high, and it is difficult to uniformly disperse or it takes a lot of time, and it becomes difficult to obtain a uniform light-shielding component. A photosensitive resin composition of a dispersed coating film.

如此所得之遮光性分散液,係藉由將(A)成分(在調製遮光性分散液之際,使(A)成分共分散時所剩餘 的(A)成分)、(B)成分、(C)成分、及剩餘的(E)成分混合而可製成遮光膜用之感光性樹脂組成物。 The light-shielding dispersion liquid thus obtained is obtained by the component (A) (the remaining component (A) is dispersed when the light-shielding dispersion liquid is prepared The component (A), the component (B), the component (C), and the remaining component (E) are mixed to form a photosensitive resin composition for a light-shielding film.

而且,在本發明的感光性樹脂組成物中,可根據需要調配硬化促進劑、熱聚合抑制劑及抗氧化劑、塑化劑、填充材料、溶劑、調平劑、消泡劑、偶合劑、界面活性劑等添加劑。作為熱聚合抑制劑及抗氧化劑者可列舉對苯二酚、對苯二酚單甲醚、鄰苯三酚、第三丁基兒茶酚、啡噻、受阻酚系化合物等;作為塑化劑者可列舉鄰苯二甲酸二丁酯、鄰苯二甲酸二辛酯、磷酸三甲苯酯等;作為填充材料者可列舉玻璃纖維、二氧化矽、雲母、氧化鋁等;消泡劑或調平劑者可列舉矽酮系、氟系、丙烯酸系的化合物。又,作為界面活性劑者可列舉氟系界面活性劑、矽酮系界面活性劑等,作為偶合劑者可列舉3-(環氧丙基氧基)丙基三甲氧基矽烷、3-丙烯醯氧基丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等矽烷偶合劑。 Further, in the photosensitive resin composition of the present invention, a curing accelerator, a thermal polymerization inhibitor, and an antioxidant, a plasticizer, a filler, a solvent, a leveling agent, an antifoaming agent, a coupling agent, and an interface may be blended as needed. Additives such as active agents. Examples of thermal polymerization inhibitors and antioxidants include hydroquinone, hydroquinone monomethyl ether, pyrogallol, tert-butylcatechol, and thiophene Examples of the plasticizer include dibutyl phthalate, dioctyl phthalate, and tricresyl phosphate. Examples of the filler include glass fiber, cerium oxide, and mica. Examples of the antifoaming agent or the leveling agent include an anthrone-based, fluorine-based, or acrylic-based compound. Further, examples of the surfactant include a fluorine-based surfactant and an anthrone-based surfactant. Examples of the coupling agent include 3-(glycidoxy)propyltrimethoxydecane and 3-propene oxime. A decane coupling agent such as oxypropyltrimethoxydecane, 3-isocyanatopropyltriethoxydecane or 3-ureidopropyltriethoxydecane.

本發明之感光性樹脂組成物,係可併用藉由熱而聚合或硬化之其他樹脂成分。作為其他樹脂成分者,較佳為(G)具有2個以上環氧基之環氧樹脂或環氧化合物,可列舉3,3',5,5'-四甲基-4,4'-雙酚型環氧樹脂、雙酚A型環氧樹脂、雙酚茀型環氧樹脂、苯酚酚醛清漆型環氧樹脂、3,4-環氧基環己烯基甲基-3',4'-環氧基環己烯羧酸酯、2,2-雙(羥甲基)-1-丁醇的1,2-環氧基-4-(2-氧雜環丙烷基)環己烷加成物、環氧矽酮樹脂等。該等追加成分係可僅使用 1種化合物,亦可組合使用複數種。 In the photosensitive resin composition of the present invention, other resin components which are polymerized or cured by heat can be used in combination. As another resin component, (G) an epoxy resin or an epoxy compound having two or more epoxy groups is preferable, and 3,3',5,5'-tetramethyl-4,4'-double is mentioned. Phenolic epoxy resin, bisphenol A epoxy resin, bisphenol oxime epoxy resin, phenol novolak epoxy resin, 3,4-epoxycyclohexenylmethyl-3', 4'- Addition of 1,2-epoxy-4-(2-oxiranyl)cyclohexane of epoxycyclohexenecarboxylate and 2,2-bis(hydroxymethyl)-1-butanol , epoxy ketone resin, and the like. These additional components can be used only One type of compound may be used in combination of plural kinds.

本發明的感光性樹脂組成物含有上述(A)成分至(E)成分作為主成分。在上述固形份中,(A)成分至(D)成分合計含有70質量%,較佳為80質量%以上。(E)溶劑的量根據目標黏度而變化,宜在感光性樹脂組成物中包含60至90質量%的範圍。 The photosensitive resin composition of the present invention contains the above components (A) to (E) as a main component. In the solid content, the components (A) to (D) are contained in a total amount of 70% by mass, preferably 80% by mass or more. The amount of the solvent (E) varies depending on the target viscosity, and is preferably in the range of 60 to 90% by mass in the photosensitive resin composition.

本發明中的遮光膜用之感光性樹脂組成物,係例如作為用以形成具有間隔件功能之遮光膜的感光性樹脂組成物而言為優異者。作為具有間隔件功能之遮光膜的形成方法者係如下所述的光刻法。可列舉:首先,將本發明之遮光膜用的感光性樹脂組成物塗佈於基板上,接著使溶劑乾燥(預烘烤)後,在如上所述方式而得的被膜上放置光遮罩,照射紫外線而使曝光部硬化,進一步進行使用鹼性水溶液而使未曝光部溶出的顯影,從而形成圖案,進一步進行作為後乾燥之後烘烤(熱燒成)的方法。 The photosensitive resin composition for a light-shielding film of the present invention is excellent as, for example, a photosensitive resin composition for forming a light-shielding film having a separator function. The method of forming the light-shielding film having a spacer function is a photolithography method as described below. First, the photosensitive resin composition for a light-shielding film of the present invention is applied onto a substrate, and then the solvent is dried (prebaked), and then a light mask is placed on the film obtained as described above. The exposed portion is cured by irradiation with ultraviolet rays, and development by elution of the unexposed portion using an alkaline aqueous solution is carried out to form a pattern, and further, a method of post-drying and baking (thermal baking) is performed.

上述基材可為透明基板,亦可為在形成RGB等像素後,在像素上、或像素上的平坦化膜上、或於像素上的平坦膜上所製膜成之配向膜等透明基板以外之基材。在何種基材上形成具有間隔件功能之遮光膜係依據液晶顯示裝置的設計而有所不同。 The substrate may be a transparent substrate, or may be formed on a transparent film such as an alignment film formed on a pixel or a flattening film on a pixel or a flat film on a pixel after forming a pixel such as RGB. The substrate. The formation of a light-shielding film having a spacer function on which substrate differs depending on the design of the liquid crystal display device.

作為塗佈感光性樹脂組成物的透明基板者,除了玻璃基板以外,還可例示在透明膜(例如聚碳酸酯、聚對苯二甲酸乙二酯、聚醚碸等)上蒸鍍或圖案化有ITO或金等透明電極的基板等。在透明基板上塗佈感光性 樹脂組成物的溶液的方法除了公知的溶液浸漬法、噴霧法以外,亦可採用使用輥塗機、降落塗機(land coater)、狹縫塗佈機或旋轉機的方法等任意方法。藉由該等方法而塗佈為期望的厚度後,將溶劑除去(預烘烤)而形成被膜。預烘烤可藉由利用烘箱、加熱板等進行加熱而進行。預烘烤的加熱溫度及加熱時間可根據所使用的溶劑而適當地選擇,例如在60至110℃的溫度下進行1至3分鐘。 As a transparent substrate to which a photosensitive resin composition is applied, in addition to a glass substrate, vapor deposition or patterning on a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether oxime, etc.) may be exemplified. A substrate having a transparent electrode such as ITO or gold. Coating photosensitivity on a transparent substrate The method of the solution of the resin composition may be any method such as a roll coater, a land coater, a slit coater or a rotary machine, in addition to a known solution dipping method or a spray method. After coating to a desired thickness by these methods, the solvent is removed (prebaked) to form a film. The prebaking can be carried out by heating using an oven, a hot plate or the like. The heating temperature and heating time of the prebaking can be appropriately selected depending on the solvent to be used, for example, at a temperature of 60 to 110 ° C for 1 to 3 minutes.

在預烘烤後所進行的曝光,係利用紫外線曝光裝置而進行,隔著光遮罩而進行曝光,由此而僅使與圖案對應的部分的抗蝕劑(resist)感光。曝光裝置及其曝光照射條件係適當地選擇,使用超高壓水銀燈、高壓水銀燈、金屬鹵素燈、遠紫外線燈等光源而進行曝光,使塗膜中的感光性樹脂組成物光硬化。 The exposure performed after the prebaking is performed by an ultraviolet exposure apparatus, and exposure is performed through a light mask, whereby only a portion of the resist corresponding to the pattern is exposed. The exposure apparatus and the exposure and irradiation conditions thereof are appropriately selected, and exposure is performed using a light source such as an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, or a far ultraviolet lamp to photoharden the photosensitive resin composition in the coating film.

曝光後的鹼性顯影是以將未曝光部分的抗蝕劑除去為目的而進行,藉由該顯影而形成期望的圖案。作為適用於該鹼性顯影的顯影液者,可列舉例如:鹼金屬或鹼土類金屬的碳酸鹽的水溶液、鹼金屬的氫氧化物的水溶液等,特別是可使用含有0.05至3質量%碳酸鈉、碳酸鉀、碳酸鋰等碳酸鹽的弱鹼性水溶液,在23至28℃的溫度下進行顯影,可使用市售的顯影機或超音波清洗機等精密地形成微細的圖像。 The alkali development after the exposure is performed for the purpose of removing the resist in the unexposed portion, and the desired pattern is formed by the development. Examples of the developing solution to be used for the alkaline development include an aqueous solution of an alkali metal or an alkaline earth metal carbonate, an aqueous solution of an alkali metal hydroxide, and the like, and particularly, a sodium carbonate containing 0.05 to 3% by mass can be used. A weakly alkaline aqueous solution of a carbonate such as potassium carbonate or lithium carbonate is developed at a temperature of 23 to 28 ° C, and a fine image can be precisely formed using a commercially available developing machine or an ultrasonic cleaner.

於顯影後,較佳為在180至250℃的溫度及20至60分鐘的條件下進行熱處理(後烘烤)。該後烘烤係以提高經圖案化的遮光膜與基板的密著性等為目的而進行。 其與預烘烤同樣地藉由利用烘箱、加熱板等進行加熱而進行。本發明的經圖案化的遮光膜是經過以上的利用光刻法的各步驟而形成。 After the development, heat treatment (post-baking) is preferably carried out at a temperature of from 180 to 250 ° C and for 20 to 60 minutes. This post-baking is performed for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. This is carried out by heating using an oven, a hot plate or the like in the same manner as the prebaking. The patterned light-shielding film of the present invention is formed by the above various steps by photolithography.

若依據上述方法,可形成光學濃度為0.5/μm至3/μm,較佳為1.5/μm至2.5/μm的遮光膜。再者,若依據上述方法,可形成施加電壓10V時之體積電阻率為1×109Ω‧cm以上,較佳為1×1012Ω‧cm以上的遮光膜。又,若依據上述方法,可形成介電常數為2至10,較佳為2至8,更佳為3至6的遮光膜。又,若依據上述方法,可形成在機械特性試驗中,滿足破壞強度為200mN以上、及/或彈性恢復率為30%以上、及/或壓縮率為40%以下的遮光膜。以上述方法所形成之遮光膜係可作為液晶顯示裝置的柱狀間隔件而使用,較佳為可作為黑色柱狀間隔件而使用。 According to the above method, a light-shielding film having an optical density of 0.5/μm to 3/μm, preferably 1.5/μm to 2.5/μm can be formed. Further, according to the above method, a light-shielding film having a volume resistivity of 1 × 10 9 Ω ‧ cm or more, preferably 1 × 10 12 Ω ‧ cm or more, when a voltage of 10 V is applied can be formed. Further, according to the above method, a light-shielding film having a dielectric constant of 2 to 10, preferably 2 to 8, more preferably 3 to 6 can be formed. Further, according to the above method, it is possible to form a light-shielding film having a breaking strength of 200 mN or more, and/or an elastic recovery ratio of 30% or more, and/or a compression ratio of 40% or less in the mechanical property test. The light-shielding film formed by the above method can be used as a columnar spacer of a liquid crystal display device, and is preferably used as a black columnar spacer.

又,依據上述方法,針對用以將作為遮光膜的光學濃度設為0.5/μm以上不足3/μm之膜厚H1、與擔任間隔件功能的遮光膜之膜厚H2,H2為2至7μm時,△H=H2-H1為0.1至2.9,而可同時形成膜厚H1之遮光膜與膜厚H2之遮光膜。以上述方法所形成之硬化膜係可作為液晶顯示裝置的柱狀間隔件而使用,較佳為可作為黑色柱狀間隔件而使用。若依據上述△H為上述範圍之硬化膜,由於有高度差之黑色柱狀間隔件可由同一材料一次形成,故可更有效率地進行液晶顯示裝置的製造。此時,例如,可使膜厚H2之硬化膜作為間隔件發揮功能,並使膜厚H1之硬化膜作為黑色矩陣發揮功能。此外,△H成為 必要之理由,係若將黑色矩陣功能之膜設為與間隔件功能之膜為相同膜厚時,會導致液晶層以每個像素為單位逐一區分,在防止液晶層自由地流動的同時,有使填充液晶層製成液晶顯示裝置之際的產率比降低之疑慮。 In addition, when the film thickness H1 which is an optical density of the light-shielding film is 0.5/μm or more and less than 3/μm, and the film thickness H2 of the light-shielding film which functions as a spacer, H2 is 2 to 7 μm. ΔH=H2-H1 is 0.1 to 2.9, and a light-shielding film having a film thickness H1 and a light-shielding film having a film thickness H2 can be simultaneously formed. The cured film formed by the above method can be used as a columnar spacer of a liquid crystal display device, and is preferably used as a black columnar spacer. According to the cured film in which the above ΔH is in the above range, since the black columnar spacer having the height difference can be formed at one time from the same material, the liquid crystal display device can be manufactured more efficiently. At this time, for example, the cured film having the film thickness H2 functions as a spacer, and the cured film having the film thickness H1 functions as a black matrix. In addition, △H becomes For the reason, if the film of the black matrix function is set to have the same film thickness as the film of the spacer function, the liquid crystal layer is differentiated one by one in each pixel unit, and the liquid crystal layer is prevented from flowing freely. There is a concern that the yield ratio at the time of filling the liquid crystal layer into a liquid crystal display device is lowered.

具有上述遮光膜或硬化膜之液晶顯示裝置較佳為設置有薄膜電晶體之TFT-LCD。 The liquid crystal display device having the above light shielding film or cured film is preferably a TFT-LCD provided with a thin film transistor.

具有上述遮光膜或硬化膜之液晶顯示裝置係遮光性及絕緣性高,另外還具有彈性率、變形量、彈性恢復率優異的間隔件功能,並且即使膜厚為2至7μm左右亦可形成微細的間隔件形狀。 The liquid crystal display device having the above-mentioned light-shielding film or cured film has high light-shielding property and insulating property, and has a spacer function which is excellent in elastic modulus, deformation amount, and elastic recovery rate, and can be formed fine even when the film thickness is about 2 to 7 μm. Spacer shape.

[實施例] [Examples]

以下,基於實施例及比較例對本發明之實施形態進行具體的說明,惟本發明並不被該等所限定。 Hereinafter, the embodiments of the present invention will be specifically described based on examples and comparative examples, but the present invention is not limited thereto.

首先,顯示本發明之(A)含有聚合性不飽和基之鹼可溶性樹脂的合成例。在合成例中之樹脂的評估係可如下述方式進行。 First, a synthesis example of the (A) alkali-soluble resin containing a polymerizable unsaturated group of the present invention is shown. The evaluation of the resin in the synthesis example can be carried out as follows.

[固形份濃度] [solid concentration]

使在合成例中所得之樹脂溶液1g含浸於玻璃濾光片[重量:W0(g)]並秤量[W1(g)],從在160℃加熱2hr後之重量[W2(g)]藉由下式而求得。 1 g of the resin solution obtained in the synthesis example was impregnated into a glass filter [weight: W 0 (g)] and weighed [W 1 (g)], and the weight after heating at 160 ° C for 2 hr [W 2 (g) ] is obtained by the following formula.

固形份濃度(重量%)=100×(W2-W0)/(W1-W0)。 Solid concentration (% by weight) = 100 × (W 2 - W 0 ) / (W 1 - W 0 ).

[酸價] [acid price]

使樹脂溶液在二烷中溶解,使用電位差滴定裝置[平沼產業股份有限公司製、商品名COM-1600]以1/10N-KOH水溶液進行滴定而求得。 Making the resin solution in two The alkane was dissolved and titrated by a 1/10 N-KOH aqueous solution using a potentiometric titration apparatus [manufactured by Hiranuma Sangyo Co., Ltd., trade name: COM-1600].

[分子量] [molecular weight]

以凝膠滲透層析(GPC)[TOSOH股份有限公司製商品名HLC-8220GPC、溶劑:四氫呋喃、管柱:TSKgelSuperH-2000(2根)+TSKgelSuperH-3000(1根)+TSKgelSuperH-4000(1根)+TSKgelSuper-H5000(1根)[TOSOH股份有限公司製]、溫度:40℃、速度:0.6ml/min]進行測定,設為標準聚苯乙烯[TOSOH股份有限公司製PS-寡聚物試劑盒]換算值而求出重量平均分子量(Mw)。 By gel permeation chromatography (GPC) [trade name HLC-8220GPC, manufactured by TOSOH Co., Ltd., solvent: tetrahydrofuran, column: TSKgel SuperH-2000 (2) + TSKgel SuperH-3000 (1) + TSKgel SuperH-4000 (1 ) +TSKgel Super-H5000 (1) [manufactured by TOSOH Co., Ltd.], temperature: 40 ° C, speed: 0.6 ml/min], and was measured as standard polystyrene [PS- oligomer reagent manufactured by TOSOH Co., Ltd.) The weight average molecular weight (Mw) of the box was converted.

[平均二次粒徑測定] [Average secondary particle size measurement]

針對遮光性分散液以溶劑(在本實施例為PGMEA)稀釋為遮光成分之濃度為0.1質量%左右之溶液,使用雷射繞射/散射法之粒度分布儀(日機裝股份有限公司製,Micro track MT-3000),測定出平均二次粒徑。 In the light-shielding dispersion liquid, a solvent (in the present example, PGMEA) is diluted to a solution having a light-shielding component concentration of about 0.1% by mass, and a laser diffraction/scattering particle size distribution meter (made by Nikkiso Co., Ltd., Micro track MT-3000), the average secondary particle size was determined.

又,在合成例及比較合成例所使用之簡稱如下所述。 Further, the abbreviations used in the synthesis examples and comparative synthesis examples are as follows.

BPFE:9,9-雙(4-羥基苯基)茀與氯甲基氧雜環丙烷的反應物。在通式(I)的化合物中,X為茀-9,9-二基,R1、R2為氫的化合物。 BPFE: a reaction of 9,9-bis(4-hydroxyphenyl)anthracene with chloromethyloxirane. In the compound of the formula (I), X is a compound of -9,9-diyl, and R 1 and R 2 are hydrogen.

BPDA:3,3',4,4'-聯苯四羧酸二酐 BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride

BTDA:3,3',4,4'-二苯甲酮四羧酸二酐 BTDA: 3,3',4,4'-benzophenone tetracarboxylic dianhydride

THPA:1,2,3,6-四氫鄰苯二甲酸酐 THPA: 1,2,3,6-tetrahydrophthalic anhydride

TPP:三苯基膦 TPP: triphenylphosphine

PGMEA:丙二醇單甲醚乙酸酯 PGMEA: propylene glycol monomethyl ether acetate

[合成例1] [Synthesis Example 1]

在具有回流冷凝器的1L四口燒瓶中加入BPFE 116.7g(0.23mol)、丙烯酸33.1g(0.46mol)、TPP 0.60g、及PGMEA 161.0g,在100至105℃的加熱下進行12hr攪拌而獲得反應生成物。 116.7 g (0.23 mol) of BPFE, 33.1 g (0.46 mol) of acrylic acid, 0.60 g of TPP, and 161.0 g of PGMEA were added to a 1 L four-necked flask equipped with a reflux condenser, and stirred under heating at 100 to 105 ° C for 12 hr. Reaction product.

接著,在所得的反應生成物中加入BPDA 33.8g(0.12mol)及THPA 17.5g(0.12mol),在115至120℃的加熱下進行6hr攪拌,獲得含有聚合性不飽和基的鹼可溶性樹脂溶液(A)-1。所得的樹脂溶液的固形份濃度為56.5wt%,酸價(固形份換算)為102mgKOH/g,利用GPC分析的Mw是3600。 Next, 33.8 g (0.12 mol) of BPDA and 17.5 g (0.12 mol) of THPA were added to the obtained reaction product, and the mixture was stirred under heating at 115 to 120 ° C for 6 hr to obtain an alkali-soluble resin solution containing a polymerizable unsaturated group. (A)-1. The solid content concentration of the obtained resin solution was 56.5 wt%, the acid value (in terms of solid content) was 102 mgKOH/g, and the Mw analyzed by GPC was 3,600.

[合成例2] [Synthesis Example 2]

在具有回流冷凝器的1L四口燒瓶中加入BPFE 116.7g(0.23mol)、丙烯酸33.1g(0.46mol)、TPP 0.60g、及PGMEA 161.0g,在100至105℃的加熱下進行12hr攪拌而獲得反應生成物。 116.7 g (0.23 mol) of BPFE, 33.1 g (0.46 mol) of acrylic acid, 0.60 g of TPP, and 161.0 g of PGMEA were added to a 1 L four-necked flask equipped with a reflux condenser, and stirred under heating at 100 to 105 ° C for 12 hr. Reaction product.

接著,在所得的反應生成物中加入BTDA 37.1g(0.12mol)及THPA 17.5g(0.12mol),在115至120℃的 加熱下進行6hr攪拌,獲得含有聚合性不飽和基的鹼可溶性樹脂溶液(A)-2。所得的樹脂溶液的固形份濃度為56.6wt%,酸價(固形份換算)為102mgKOH/g,利用GPC分析的Mw為3700。 Next, BTDA 37.1 g (0.12 mol) and THPA 17.5 g (0.12 mol) were added to the obtained reaction product at 115 to 120 ° C. The mixture was stirred under heating for 6 hr to obtain an alkali-soluble resin solution (A)-2 containing a polymerizable unsaturated group. The solid content concentration of the obtained resin solution was 56.6 wt%, the acid value (in terms of solid content) was 102 mgKOH/g, and the Mw analyzed by GPC was 3,700.

[比較合成例1] [Comparative Synthesis Example 1]

在具有氮氣導入管及回流管的1000ml四口燒瓶中加入甲基丙烯酸51.65g(0.60mol)、甲基丙烯酸甲酯38.44g(0.38mol)、甲基丙烯酸芐酯38.77g(0.22mol)、偶氮雙異丁腈5.91g、及二乙二醇二甲醚370g,以80至85℃在氮氣氣流下,攪拌8hr使其聚合。進一步,在燒瓶內加入甲基丙烯酸環氧丙酯39.23g(0.28mol)、TPP 1.44g、2,6-二第三丁基對甲酚0.055g,以80至85℃攪拌16hr,獲得鹼可溶性樹脂溶液(A)-3。所得之樹脂溶液的固形份濃度為32質量%、酸價(固形份換算)為110mgKOH/g、利用GPC分析的Mw為18100。 51.65 g (0.60 mol) of methacrylic acid, 38.44 g (0.38 mol) of methyl methacrylate, 38.77 g (0.22 mol) of benzyl methacrylate, and even in a 1000 ml four-necked flask equipped with a nitrogen inlet tube and a reflux tube. 5.91 g of nitrogen bisisobutyronitrile and 370 g of diethylene glycol dimethyl ether were polymerized by stirring at 80 to 85 ° C for 8 hr under a nitrogen stream. Further, 39.23 g (0.28 mol) of glycidyl methacrylate, 1.42 g of TPP, and 0.055 g of 2,6-di-t-butyl-p-cresol were added to the flask, and stirred at 80 to 85 ° C for 16 hr to obtain alkali solubility. Resin solution (A)-3. The solid content concentration of the obtained resin solution was 32% by mass, the acid value (in terms of solid content) was 110 mgKOH/g, and the Mw analyzed by GPC was 18,100.

(含有聚合性不飽和基之鹼可溶性樹脂) (alkali-soluble resin containing a polymerizable unsaturated group)

(A)-1成分:在上述合成例1所得之鹼可溶性樹脂溶液 (A)-1 component: the alkali-soluble resin solution obtained in the above Synthesis Example 1.

(A)-2成分:在上述合成例2所得之鹼可溶性樹脂溶液 (A)-2 component: the alkali-soluble resin solution obtained in the above Synthesis Example 2

(A)-3成分:在上述比較合成例1所得之鹼可溶性樹脂溶液 (A)-3 component: the alkali-soluble resin solution obtained in the above Comparative Synthesis Example 1

(光聚合性單體) (photopolymerizable monomer)

(B):二新戊四醇六丙烯酸酯與二新戊四醇五丙烯酸酯的混合物(日本化藥股份有限公司製、商品名DPHA) (B): a mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (manufactured by Nippon Kayaku Co., Ltd., trade name DPHA)

(光聚合起始劑) (photopolymerization initiator)

(C):乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯肟)(日本BASF公司製、產品名Irgacure OXE02) (C): Ethylketone, 1-[9-ethyl-6-(2-methylbenzhydryl)-9H-indazol-3-yl]-, 1-(O-acetyl) (Japan) BASF company, product name Irgacure OXE02)

(遮光性分散顏料) (light-shielding disperse pigment)

(D)-1:鈦黑(三菱Materials股份有限公司製、製品名13M-C)濃度20.0質量%、分散劑濃度5.0質量%的PGMEA分散液(固形份25.0%、鈦黑的平均二次粒徑188nm) (D)-1: PGMEA dispersion of titanium black (manufactured by Mitsubishi Materials Co., Ltd., product name 13M-C) at a concentration of 20.0% by mass and a dispersant concentration of 5.0% by mass (solid content 25.0%, average secondary particle of titanium black) Trail 188nm)

(D)-2:黑色顏料(內醯胺黑、BASF公司製IrgaphorS100CF)15.0質量%、高分子分散劑4.5質量%之PGMEA分散液(固形份19.5%、黑色顏料的平均二次粒徑241nm) (D)-2: PGMEA dispersion of 15.0% by mass of black pigment (neuroguanamine black, Irgaphor S100CF manufactured by BASF Corporation) and 4.5% by mass of polymer dispersant (19.5% solid content, average secondary particle diameter 241 nm of black pigment)

(D)-3:C.I.顏料橙64(BASF公司製)7.0質量%、C.I.顏料紫23(CLARIANT公司製)3.0質量%、C.I.顏料藍15:6(CLARIANT公司製)7.0質量%、高分子分散劑濃度4.0質量%、磺化偶氮系分散助劑2.0質量%、甲基丙烯酸芐酯/甲基丙烯酸共聚物2.0質量%之PGMEA分散液(固形份25.0%) (D)-3: 7.0% by mass of CI Pigment Orange 64 (manufactured by BASF Corporation), 3.0% by mass of CI Pigment Violet 23 (manufactured by CLARIANT Co., Ltd.), and 7.0% by mass of CI Pigment Blue 15:6 (manufactured by CLARIANT Co., Ltd.), polymer dispersion A PMEEA dispersion having a concentration of 4.0% by mass, 2.0% by mass of a sulfonated azo dispersing aid, and 2.0% by mass of a benzyl methacrylate/methacrylic acid copolymer (solid content 25.0%)

(D)-4:碳黑20.0質量%、高分子分散劑濃度5.0質量%之PGMEA分散液(固形份25.0%、碳黑的平均二次粒徑 162nm) (D)-4: PGMEA dispersion of carbon black 20.0% by mass and polymer dispersant concentration 5.0% by mass (solid content 25.0%, average secondary particle diameter of carbon black) 162nm)

(溶劑) (solvent)

(E)-1:PGMEA (E)-1: PGMEA

(E)-2:乙酸3-甲氧基-3-甲基-1-丁酯 (E)-2: 3-methoxy-3-methyl-1-butyl acetate

(界面活性劑) (surfactant)

(H):BYK-330(畢克化學公司製)之PGMEA溶液(固形份1.0%) (H): PGMEA solution of BYK-330 (made by BYK Chemical Co., Ltd.) (solid content 1.0%)

以表1中所示的比例將上述之調配成分進行調配,調製實施例1至6及比較例1至2的感光性樹脂組成物。此外,表1中的數值皆表示質量份。而且,溶劑一欄中的(E)-1是不包含含有不飽和基的樹脂溶液(含有聚合性不飽和基的鹼可溶性樹脂溶液)中的PGMEA(與(E)-1相同)、及遮光性分散液中的PGMEA(與(E)-1相同)的量。 The above-mentioned formulation components were blended at the ratios shown in Table 1, and the photosensitive resin compositions of Examples 1 to 6 and Comparative Examples 1 to 2 were prepared. In addition, the numerical values in Table 1 represent the parts by mass. Further, (E)-1 in the column of the solvent is PGMEA (the same as (E)-1) in the resin solution (the alkali-soluble resin solution containing a polymerizable unsaturated group) containing no unsaturated group, and the light-shielding The amount of PGMEA (same as (E)-1) in the dispersion.

[評估] [assessment]

使用實施例1至6及比較例1至2的遮光膜用之感光性樹脂組成物,進行如下所記載的評估。將該等評估的結 果表示於表2。 Using the photosensitive resin compositions for the light-shielding films of Examples 1 to 6 and Comparative Examples 1 and 2, the evaluations described below were carried out. The conclusion of the evaluation The results are shown in Table 2.

<顯影特性> <Development characteristics>

使用旋塗機將上述所得之各感光性樹脂組成物以使熱硬化處理後的膜厚成為3.0μm的方式塗佈在厚度1.2mm的玻璃基板上,在90℃下進行1分鐘預烘烤。其後,使其與光遮罩密著,使用500W的高壓水銀燈以波長365nm的照度為30mW/cm2之超高壓水銀燈照射100mJ/cm2之紫外線,進行感光部分的光硬化反應。 Each of the photosensitive resin compositions obtained above was applied onto a glass substrate having a thickness of 1.2 mm so that the film thickness after the heat curing treatment was 3.0 μm, and prebaked at 90 ° C for 1 minute. Thereafter, it was adhered to a light-shielding, and a 100 WJ/cm 2 ultraviolet ray was irradiated with an ultrahigh-pressure mercury lamp having an illuminance of 30 mW/cm 2 at a wavelength of 365 nm using a high-pressure mercury lamp of 500 W to carry out a photohardening reaction of the photosensitive portion.

接著,將該曝光後的玻璃基板使用0.05%氫氧化鉀水溶液,在24℃、0.1MPa的壓力下顯影60秒,去除塗膜的未曝光部。其後,使用熱風乾燥機而進行230℃、30分鐘的加熱硬化處理,獲得感光性樹脂組成物的硬化膜。 Next, the exposed glass substrate was developed with a 0.05% potassium hydroxide aqueous solution at 24 ° C under a pressure of 0.1 MPa for 60 seconds to remove the unexposed portion of the coating film. Thereafter, heat curing treatment was performed at 230 ° C for 30 minutes using a hot air dryer to obtain a cured film of the photosensitive resin composition.

將所得之硬化膜圖案的細線形成以光學顯微鏡進行確認,並以下述的3階段評估之。 The thin line formation of the obtained cured film pattern was confirmed by an optical microscope and evaluated in the following three stages.

結果表示於表2。 The results are shown in Table 2.

○:L/S為10μm/10μm以上的圖案沒有殘渣形成者 ○: A pattern in which L/S is 10 μm/10 μm or more has no residue formation.

△:L/S為30μm/30μm以上的圖案沒有殘渣形成者 △: The pattern of L/S of 30 μm/30 μm or more has no residue formation.

×:沒有形成L/S為不足50μm/50μm的圖案、或著是圖案的捲邊或殘渣為明顯者 ×: A pattern having an L/S of less than 50 μm/50 μm or a curl or residue of a pattern is not formed.

<光學濃度> <Optical concentration>

使用旋塗機將上述所得之各感光性樹脂組成物以使 熱硬化處理後的膜厚成為1.1μm的方式塗佈在厚度1.2mm的玻璃基板上,在90℃下進行1分鐘預烘烤。其後,使用熱風乾燥機進行230℃、30分鐘的加熱硬化處理,獲得感光性樹脂組成物的硬化膜。接著,所得之硬化膜的光學濃度係使用Macbeth穿透濃度儀進行測定,評估每單位膜厚的光學濃度。 Each of the photosensitive resin compositions obtained above is used in a spin coater to The film thickness after the thermosetting treatment was applied to a glass substrate having a thickness of 1.2 mm so as to be 1.1 μm, and prebaked at 90 ° C for 1 minute. Thereafter, the film was subjected to a heat curing treatment at 230 ° C for 30 minutes using a hot air dryer to obtain a cured film of the photosensitive resin composition. Next, the optical density of the obtained cured film was measured using a Macbeth Penetration Concentrator, and the optical density per unit film thickness was evaluated.

<體積電阻率> <Volume resistivity>

使用旋塗機將上述所得之各感光性樹脂組成物以使熱硬化處理後的膜厚成為3.5μm的方式塗佈在經Cr蒸鍍之厚度1.2mm的玻璃基板上之除了電極之外的部分,在90℃下進行1分鐘加熱硬化處理。其後,使用熱風乾燥機進行230℃、30分鐘的加熱硬化處理,獲得感光性樹脂組成物的硬化膜。然後,在硬化膜上形成鋁電極而作成體積電阻率測定用基板。接著,使用靜電計(Keithley公司製、「6517A型」),測定施加電壓從1V至10V的體積電阻率。以1V的階級(step),在各施加電壓下各保持60秒的電壓的條件下進行測定,將施加10V時的體積電阻率表示於表2中。 The photosensitive resin composition obtained above was applied to a portion other than the electrode on a glass substrate having a thickness of 1.2 mm by Cr deposition so that the film thickness after the heat curing treatment was 3.5 μm by a spin coater. The heat hardening treatment was carried out at 90 ° C for 1 minute. Thereafter, the film was subjected to a heat curing treatment at 230 ° C for 30 minutes using a hot air dryer to obtain a cured film of the photosensitive resin composition. Then, an aluminum electrode was formed on the cured film to form a substrate for volume resistivity measurement. Next, using a static electricity meter ("6517A type" manufactured by Keithley Co., Ltd.), the volume resistivity of the applied voltage from 1 V to 10 V was measured. The measurement was carried out under the conditions of a voltage of 1 V at each applied voltage for 60 seconds, and the volume resistivity when 10 V was applied is shown in Table 2.

<介電常數> <Dielectric constant>

使用旋塗機將上述所得之各感光性樹脂組成物以使熱硬化處理後的膜厚成為3.5μm的方式塗佈在經Cr蒸鍍之厚度1.2mm的玻璃基板上之除了電極之外的部分,在90 ℃下進行1分鐘預烘烤。其後,使用熱風乾燥機進行230℃、30分鐘的加熱硬化處理,獲得感光性樹脂組成物的硬化膜。然後,在硬化膜上形成鋁電極而作成介電常數測定用基板。接著,使用靜電計(Keithley公司製、「6517A型」),測定頻率從1Hz至100000Hz的電容,從電容算出介電常數。算出之介電常數表示於表2中。 The photosensitive resin composition obtained above was applied to a portion other than the electrode on a glass substrate having a thickness of 1.2 mm by Cr deposition so that the film thickness after the heat curing treatment was 3.5 μm by a spin coater. At 90 Pre-bake for 1 minute at °C. Thereafter, the film was subjected to a heat curing treatment at 230 ° C for 30 minutes using a hot air dryer to obtain a cured film of the photosensitive resin composition. Then, an aluminum electrode was formed on the cured film to form a substrate for dielectric constant measurement. Next, using a static electricity meter ("6517A" manufactured by Keithley Co., Ltd.), a capacitance of 1 Hz to 100,000 Hz was measured, and a dielectric constant was calculated from the capacitance. The calculated dielectric constants are shown in Table 2.

<間隔件的半色調(Halftone,HT)特性> <Halftone (HT) characteristics of the spacer>

使用旋塗機將上述所得之各感光性樹脂組成物以使熱硬化處理後的膜厚成為3.0μm的方式塗佈在厚度1.2mm的玻璃基板上,在90℃下進行1分鐘預烘烤。其後,與具有點圖案之光遮罩密著,使用500W的高壓水銀燈以波長365nm的照度為30mW/cm2之超高壓水銀燈照射5mJ/cm2或100mJ/cm2之紫外線,進行感光部分的光硬化反應。 Each of the photosensitive resin compositions obtained above was applied onto a glass substrate having a thickness of 1.2 mm so that the film thickness after the heat curing treatment was 3.0 μm, and prebaked at 90 ° C for 1 minute. Thereafter, it was adhered to a light mask having a dot pattern, and a high-pressure mercury lamp of 500 W was used to irradiate ultraviolet rays of 5 mJ/cm 2 or 100 mJ/cm 2 with an ultrahigh pressure mercury lamp having an illuminance of 30 mW/cm 2 at a wavelength of 365 nm, and the photosensitive portion was irradiated. Photohardening reaction.

接著,將該曝光後的玻璃基板使用0.05%氫氧化鉀水溶液,在24℃、0.1MPa的壓力下顯影60秒,去除塗膜的未曝光部。其後,使用熱風乾燥機而進行230℃、30分鐘的加熱硬化處理,獲得感光性樹脂組成物的硬化膜。 Next, the exposed glass substrate was developed with a 0.05% potassium hydroxide aqueous solution at 24 ° C under a pressure of 0.1 MPa for 60 seconds to remove the unexposed portion of the coating film. Thereafter, heat curing treatment was performed at 230 ° C for 30 minutes using a hot air dryer to obtain a cured film of the photosensitive resin composition.

間隔件的半色調特性係將曝光量為5mJ/cm2中之遮光膜的膜厚(H1)及100mJ/cm2中之間隔件的膜厚(H2)之差(△H)計算出,並以下述之4階段評估之。結果表示於表2。 Halftone characteristic difference based spacer thickness of the shading film exposure amount was 5 mJ / cm 2 in the (H1) and 100mJ film thickness (H2) of the spacer / cm 2 of (△ H) is calculated, and It is evaluated in the following four stages. The results are shown in Table 2.

○:△H為1.0μm至2.0μm之情形 ○: ΔH is 1.0 μm to 2.0 μm

△:△H為0.1μm至2.9μm之情形 △: ΔH is 0.1 μm to 2.9 μm

×:△H為不足0.1μm或大於2.9μm之情形 ×: ΔH is less than 0.1 μm or more than 2.9 μm

<間隔件之壓縮率、彈性回復率、破壞強度> <Compression ratio, elastic recovery rate, and breaking strength of the spacer>

使用旋塗機將上述所得之各感光性樹脂組成物以使熱硬化處理後的膜厚成為3.0μm的方式塗佈在厚度1.2mm的玻璃基板上,在90℃下進行1分鐘預烘烤。其後,與具有點圖案之光遮罩密著,使用500W的高壓水銀燈以波長365nm的照度為30mW/cm2之超高壓水銀燈照射100mJ/cm2之紫外線,進行感光部分的光硬化反應。 Each of the photosensitive resin compositions obtained above was applied onto a glass substrate having a thickness of 1.2 mm so that the film thickness after the heat curing treatment was 3.0 μm, and prebaked at 90 ° C for 1 minute. Thereafter, it was adhered to a light mask having a dot pattern, and an ultraviolet light of 100 mJ/cm 2 was irradiated with an ultrahigh pressure mercury lamp having an illuminance of 30 mW/cm 2 at a wavelength of 365 nm using a high-pressure mercury lamp of 500 W to carry out a photohardening reaction of the photosensitive portion.

接著,將該曝光後的玻璃基板使用0.05%氫氧化鉀水溶液,在24℃、0.1MPa的壓力下顯影60秒,去除塗膜的未曝光部。其後,使用熱風乾燥機而進行230℃、30分鐘的加熱硬化處理,獲得感光性樹脂組成物的硬化膜。 Next, the exposed glass substrate was developed with a 0.05% potassium hydroxide aqueous solution at 24 ° C under a pressure of 0.1 MPa for 60 seconds to remove the unexposed portion of the coating film. Thereafter, heat curing treatment was performed at 230 ° C for 30 minutes using a hot air dryer to obtain a cured film of the photosensitive resin composition.

所得之硬化膜圖案的間隔件特性係使用超微小硬度計(FISCHER儀器公司製、FISCHER SCOPE HM2000XyP)而評估。以負載速度5.0mN/秒、100μm見方的平面壓子按壓,在負載達到50mN的載重後,以卸載速度5.0mN/秒進行卸載並作成變位量曲線。 The separator characteristics of the obtained cured film pattern were evaluated using an ultra-micro hardness tester (FISCHER SCOPE HM2000XyP, manufactured by FISCHER Instruments Co., Ltd.). The flat pressure was pressed at a load speed of 5.0 mN/sec and 100 μm square, and after the load reached a load of 50 mN, the unloading speed was 5.0 mN/sec, and the displacement amount curve was created.

壓縮率係將負載時之載重50mN的變位量設為L1,由下述式算出。 The compression ratio is obtained by setting the displacement amount of the load of 50 mN at the time of load to L1.

壓縮率(%)=L1/間隔件的高度×100 Compression ratio (%) = L1/the height of the spacer × 100

彈性回復率係將負載時之載重50mN的變位量設為L1,卸載時的變位量設為L2,由下述式算出。 The elastic recovery rate is L1 at a load of 50 mN at the time of load, and L2 at the time of unloading, and is calculated by the following formula.

彈性回復率(%)=(L1-L2)/L1×100 Elastic recovery rate (%) = (L1-L2) / L1 × 100

破壞強度係使用超微小硬度計(FISCHER儀器公司製、FISCHER SCOPE HM2000XyP)而評估。以負載速度5.0mN/秒、100μm見方的平面壓子按壓,進行負載至300mN為止的載重且測定間隔件破壞時的載重,並以下述之4階段評估之。結果表示於表2。 The breaking strength was evaluated using an ultra-micro hardness tester (FISCHER Instruments, FISCHER SCOPE HM2000XyP). The load was applied to a load of 300 mN at a load speed of 5.0 mN/sec and a flat pressure of 100 μm square, and the load at the time of damage of the spacer was measured, and it was evaluated in the following four stages. The results are shown in Table 2.

○:破壞強度為300mN以上之情形 ○: The case where the breaking strength is 300 mN or more

△:破壞強度為200mN以下之情形 △: The case where the breaking strength is 200 mN or less

×:破壞強度為100mN以下之情形 ×: the case where the breaking strength is 100 mN or less

<間隔件的形狀> <Shape of spacer>

使用旋塗機將上述所得之各感光性樹脂組成物以使熱硬化處理後的膜厚成為3.0μm的方式塗佈在厚度1.2mm的玻璃基板上,在90℃下進行1分鐘預烘烤。其後,與具有點圖案之光遮罩密著,使用500W的高壓水銀燈以波長365nm的照度為30mW/cm2之超高壓水銀燈照射100mJ/cm2之紫外線,進行感光部分的光硬化反應。 Each of the photosensitive resin compositions obtained above was applied onto a glass substrate having a thickness of 1.2 mm so that the film thickness after the heat curing treatment was 3.0 μm, and prebaked at 90 ° C for 1 minute. Thereafter, it was adhered to a light mask having a dot pattern, and an ultraviolet light of 100 mJ/cm 2 was irradiated with an ultrahigh pressure mercury lamp having an illuminance of 30 mW/cm 2 at a wavelength of 365 nm using a high-pressure mercury lamp of 500 W to carry out a photohardening reaction of the photosensitive portion.

接著,將該曝光後的玻璃基板使用0.05%氫氧化鉀水溶液,在24℃、0.1MPa的壓力下顯影60秒,去除塗膜的未曝光部。其後,使用熱風乾燥機而進行230℃、30分鐘的加熱硬化處理,獲得感光性樹脂組成物的硬化膜。 Next, the exposed glass substrate was developed with a 0.05% potassium hydroxide aqueous solution at 24 ° C under a pressure of 0.1 MPa for 60 seconds to remove the unexposed portion of the coating film. Thereafter, heat curing treatment was performed at 230 ° C for 30 minutes using a hot air dryer to obtain a cured film of the photosensitive resin composition.

間隔件的形狀係使用掃描式電子顯微鏡評估間隔件端部的內角(錐角)。錐角為70°以上90°以下之情形設為◎、 50°以上不足70°之情形設為○、50°以下之情形設為△、90°以上之情形設為×。 The shape of the spacer was evaluated using a scanning electron microscope to estimate the internal angle (taper angle) of the end of the spacer. When the taper angle is 70° or more and 90° or less, the case is set to ◎, In the case of 50° or more and less than 70°, it is assumed that ○ and 50° or less are Δ, and 90° or more is set to ×.

從實施例1至6與比較例1至2之結果,可理解到藉由在(D)遮光材料中使用鈦黑,可維持體積電阻率,且同時使遮光性、介電常數及彈性回復率等間隔件特性提升。可理解到特別是藉由併用鈦黑與黑色有機顏料或 混色有機顏料,不會使彈性回復率等間隔件特性降低,可補足各種遮光材料的缺點,且有效地兼具遮光性、體積電阻率、介電常數。 From the results of Examples 1 to 6 and Comparative Examples 1 to 2, it can be understood that by using titanium black in the (D) light-shielding material, the volume resistivity can be maintained, and at the same time, the light-shielding property, the dielectric constant, and the elastic recovery ratio can be maintained. Equal spacer characteristics are improved. It can be understood, in particular, by using titanium black and black organic pigments together or The color-mixing organic pigment does not reduce the characteristics of the spacer such as the elastic recovery rate, and can complement the shortcomings of various light-shielding materials, and effectively has both light-shielding property, volume resistivity, and dielectric constant.

Claims (18)

一種具有間隔件功能之遮光膜用之感光性樹脂組成物,其係包含下述(A)至(E)成分作為必須成分:(A)針對由雙酚類衍生之具有2個環氧丙基醚基之環氧化合物與含有不飽和基之單羧酸的反應物,使其與(a)四羧酸或其酸二酐、及(b)二羧酸或三羧酸或其酸酐反應而得之含有聚合性不飽和基之鹼可溶性樹脂;(B)具有至少1個乙烯性不飽和鍵之光聚合性單體;(C)光聚合起始劑;(D)選自由黑色有機顏料、混色有機顏料及遮光材料所成群組中之1種以上的遮光成分;以及(E)溶劑。 A photosensitive resin composition for a light-shielding film having a spacer function, comprising the following components (A) to (E) as essential components: (A) having two epoxypropyl groups derived from bisphenols a reaction of an ether group-containing epoxy compound and an unsaturated group-containing monocarboxylic acid with (a) a tetracarboxylic acid or an acid dianhydride thereof, and (b) a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof An alkali-soluble resin containing a polymerizable unsaturated group; (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond; (C) a photopolymerization initiator; (D) selected from a black organic pigment, One or more kinds of light-shielding components in a group of mixed color organic pigments and light-shielding materials; and (E) a solvent. 如申請專利範圍第1項所述之感光性樹脂組成物,其係包含鈦黑作為(D)遮光成分。 The photosensitive resin composition according to claim 1, which comprises titanium black as a (D) light-shielding component. 如申請專利範圍第2項所述之感光性樹脂組成物,其中,前述鈦黑之平均二次粒徑為100至300nm。 The photosensitive resin composition according to claim 2, wherein the titanium black has an average secondary particle diameter of 100 to 300 nm. 如申請專利範圍第1至3項中任一項所述之感光性樹脂組成物,其係包含黑色有機顏料及/或混色有機顏料作為(D)遮光成分,且前述黑色有機顏料及/或混色有機顏料之平均二次粒徑為20至500nm。 The photosensitive resin composition according to any one of claims 1 to 3, which comprises a black organic pigment and/or a mixed color organic pigment as (D) a light-shielding component, and the black organic pigment and/or color mixture. The organic pigment has an average secondary particle diameter of 20 to 500 nm. 如申請專利範圍第1至4項中任一項所述之感光性樹脂組成物,其中,相對於(A)成分100質量份,包含(B)成分5至400質量份; 相對於(A)成分與(B)成分之合計量100質量份,包含(C)成分0.1至30質量份;當將包括在光硬化後成為固形份之(B)成分、且去除(E)成分之成分作為固形份時,在固形份之合計量中,包含(D)成分5至80質量%。 The photosensitive resin composition according to any one of claims 1 to 4, wherein the component (B) is contained in an amount of 5 to 400 parts by mass based on 100 parts by mass of the component (A); 100 parts by mass of the total of the component (A) and the component (B), the component (C) is contained in an amount of 0.1 to 30 parts by mass; when the component (B) which is a solid component after photohardening is included, and (E) is removed When the component of the component is a solid component, the component (D) is contained in an amount of from 5 to 80% by mass based on the total amount of the solid component. 如申請專利範圍第1至5項中任一項所述之感光性樹脂組成物,其可形成光學濃度OD為0.5/μm以上3/μm以下之遮光膜,並且該遮光膜之施加電壓10V時之體積電阻率為1×109Ω‧cm以上、且介電常數為2至10。 The photosensitive resin composition according to any one of claims 1 to 5, wherein a light-shielding film having an optical density OD of 0.5/μm or more and 3/μm or less is formed, and a voltage of 10 V is applied to the light-shielding film. The volume resistivity is 1 × 10 9 Ω ‧ cm or more and the dielectric constant is 2 to 10. 如申請專利範圍第1至6項中任一項所述之感光性樹脂組成物,其可形成在藉由微小硬度計所施行之負載-卸載試驗中,滿足下述(i)至(iii)之至少1者的遮光膜:(i)破壞強度為200mN以上,(ii)彈性恢復率為30%以上,(iii)壓縮率為40%以下。 The photosensitive resin composition according to any one of claims 1 to 6, which can be formed in a load-unloading test performed by a micro hardness tester, which satisfies the following (i) to (iii) The light shielding film of at least one of (i) the breaking strength is 200 mN or more, (ii) the elastic recovery rate is 30% or more, and (iii) the compression ratio is 40% or less. 一種具有間隔件功能之遮光膜,其係使申請專利範圍第1至7項中任一項所述之感光性樹脂組成物硬化而形成者。 A light-shielding film having a function of a spacer, which is formed by curing a photosensitive resin composition according to any one of claims 1 to 7. 一種液晶顯示裝置,其係具有申請專利範圍第8項所述之遮光膜作為黑色柱狀間隔件(BCS)。 A liquid crystal display device having the light-shielding film described in claim 8 as a black column spacer (BCS). 如申請專利範圍第9項所述之液晶顯示裝置,其係進一步具有薄膜電晶體(TFT)。 The liquid crystal display device of claim 9, further comprising a thin film transistor (TFT). 一種具有間隔件功能之遮光膜用之感光性樹脂組成物的製造方法,其係在調製出使(D)遮光成分分散於(E)溶 劑中而成之分散體後,進一步於前述分散體中添加且混合(A)鹼可溶性樹脂、(B)具有至少1個乙烯性不飽和鍵之光聚合性單體、(C)光聚合起始劑、及(E)溶劑;其中,前述(A)鹼可溶性樹脂,係針對由雙酚類衍生之具有2個環氧丙基醚基之環氧化合物與含有不飽和基之單羧酸的反應物,使其與(a)四羧酸或其酸二酐、及(b)二羧酸或三羧酸或其酸酐反應而得之鹼可溶性樹脂;(D)遮光成分係選自由黑色有機顏料、混色有機顏料及遮光材料所成群組中之1種以上的成分。 A method for producing a photosensitive resin composition for a light-shielding film having a separator function, wherein the (D) light-shielding component is dispersed in (E) After the dispersion is formed in the above-mentioned dispersion, (A) an alkali-soluble resin, (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond, and (C) photopolymerization are further added to the dispersion. a starting agent, and (E) a solvent; wherein the (A) alkali-soluble resin is an epoxy compound having two epoxypropyl ether groups derived from a bisphenol and a monocarboxylic acid containing an unsaturated group; a reactant, which is obtained by reacting (a) a tetracarboxylic acid or an acid dianhydride thereof, and (b) a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof; (D) a light-shielding component selected from the group consisting of black organic One or more components selected from the group consisting of pigments, mixed color organic pigments, and light-shielding materials. 如申請專利範圍第11項所述之製造方法,其中,(D)遮光成分包含鈦黑。 The manufacturing method according to claim 11, wherein the (D) light shielding component contains titanium black. 如申請專利範圍第12項所述之製造方法,其中,在前述分散體中,前述鈦黑之平均二次粒徑為100至300nm。 The production method according to claim 12, wherein in the dispersion, the titanium dioxide has an average secondary particle diameter of 100 to 300 nm. 如申請專利範圍第11至13項中任一項所述之製造方法,其中,(D)遮光成分包含黑色有機顏料及/或混色有機顏料,在前述分散體中,前述黑色有機顏料及/或混色有機顏料之平均二次粒徑為20至500nm。 The manufacturing method according to any one of claims 11 to 13, wherein the (D) light-shielding component comprises a black organic pigment and/or a mixed color organic pigment, and in the dispersion, the black organic pigment and/or The average secondary particle diameter of the color mixed organic pigment is 20 to 500 nm. 一種在基板上形成之遮光膜之製造方法,其係於基板上塗佈申請專利範圍第1至7項中任一項所述之感光性樹脂組成物,藉由光照射使前述感光性樹脂組成物硬化。 A method for producing a light-shielding film formed on a substrate, which is characterized in that the photosensitive resin composition according to any one of claims 1 to 7 is coated on a substrate, and the photosensitive resin is composed by light irradiation. Hardening of matter. 一種遮光膜之製造方法,其係申請專利範圍第15項所述之遮光膜之製造方法,且係同時形成當H2為2至7μm時,△H=H2-H1為0.1至2.9之膜厚H1與膜厚H2的遮光膜,其中,膜厚H1為用以使作為遮光膜之光學 濃度為0.5/μm以上不足3/μm之膜厚,膜厚H2為擔任間隔件功能之遮光膜的膜厚。 A method for producing a light-shielding film, which is a method for producing a light-shielding film according to claim 15 in which a film thickness H1 of ΔH=H2-H1 is 0.1 to 2.9 when H2 is 2 to 7 μm. a light-shielding film having a film thickness H2, wherein the film thickness H1 is used to make the light as a light-shielding film The film thickness is 0.5/μm or more and less than 3/μm, and the film thickness H2 is the film thickness of the light-shielding film which functions as a spacer. 一種液晶顯示裝置之製造方法,其係將藉由申請專利範圍第16項所述之製造方法而製造之遮光膜作為黑色柱狀間隔件。 A method for producing a liquid crystal display device, which is a black columnar spacer, which is manufactured by the manufacturing method described in claim 16 of the patent application. 如申請專利範圍第17項所述之製造方法,其中,前述液晶顯示裝置具有薄膜電晶體(TFT)。 The manufacturing method according to claim 17, wherein the liquid crystal display device has a thin film transistor (TFT).
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