TW202202531A - Photosensitive resin composition for black resist, method for producing the same, light-shielding film, color filter, touch panel, and display device Capable of forming a high-definition pattern, and can suppress the generation of aggregated foreign matter - Google Patents

Photosensitive resin composition for black resist, method for producing the same, light-shielding film, color filter, touch panel, and display device Capable of forming a high-definition pattern, and can suppress the generation of aggregated foreign matter Download PDF

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TW202202531A
TW202202531A TW110123959A TW110123959A TW202202531A TW 202202531 A TW202202531 A TW 202202531A TW 110123959 A TW110123959 A TW 110123959A TW 110123959 A TW110123959 A TW 110123959A TW 202202531 A TW202202531 A TW 202202531A
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light
photosensitive resin
acid
resin composition
silica particles
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内田一幸
新名将司
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日商日鐵化學材料股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0752Silicon-containing compounds in non photosensitive layers or as additives, e.g. for dry lithography
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Structural Engineering (AREA)
  • Architecture (AREA)
  • Human Computer Interaction (AREA)
  • Materials For Photolithography (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Optical Filters (AREA)

Abstract

The present invention provides a photosensitive resin composition for a black resist which has high light-shielding properties and low reflectance, can form a high-definition pattern, and can suppress the generation of aggregated foreign matter. The photosensitive resin composition for black resists of the present invention includes (A) a photosensitive resin containing an unsaturated group, (B) a photopolymerizable monomer having at least two or more unsaturated bonds, and (C) A photopolymerization initiator, (D) at least one light-shielding component selected from the group consisting of black pigments, color mixing pigments, and light-shielding materials, (E) silica particles, and (F) a dispersant. The (F) dispersing agent has an acid value and an amine value, the acid value and the amine value are both 10 mgKOH/g or more and 80 mgKOH/g or less, and the total mass (mF) of the (F) dispersing agent The ratio (mF/mE) to the total mass (mE) of the (E) silica particles is 0.02 to 0.60.

Description

黑色抗蝕劑用感光性樹脂組成物、其製造方法、遮光膜、彩色濾光片、觸控面板及顯示裝置Photosensitive resin composition for black resist, method for producing the same, light-shielding film, color filter, touch panel, and display device

本發明涉及一種黑色抗蝕劑用感光性樹脂組成物及所述感光性樹脂組成物的製造方法及將所述黑色抗蝕劑用感光性樹脂組成物硬化而成的遮光膜、具有所述遮光膜的彩色濾光片及觸控面板、具有所述彩色濾光片及觸控面板的顯示裝置。The present invention relates to a photosensitive resin composition for a black resist, a method for producing the photosensitive resin composition, a light-shielding film obtained by curing the photosensitive resin composition for a black resist, and a light-shielding film having the light-shielding film. A color filter and a touch panel of a film, and a display device having the color filter and the touch panel.

近年來,因移動終端的發展,室外或車載用途中使用的觸控面板及液晶面板等顯示裝置增加。所述顯示裝置中,在觸控面板外框設置有遮光膜以遮蔽背面的液晶面板周邊部的漏光,且在所述液晶面板設置有黑色矩陣以抑制黑色顯示時光自畫面漏出、以及抑制相鄰的彩色抗蝕劑彼此的混色。In recent years, with the development of mobile terminals, display devices such as touch panels and liquid crystal panels used for outdoor or in-vehicle applications have increased. In the display device, a light-shielding film is arranged on the outer frame of the touch panel to shield the light leakage of the peripheral portion of the liquid crystal panel on the back side, and a black matrix is arranged on the liquid crystal panel to suppress the leakage of light from the screen during black display and to suppress the adjacent ones. color resists are mixed with each other.

在顯示裝置等中,為了抑制漏光等並改善所述顯示裝置等的畫面的視認性,有時提高遮光膜中的黑色顏料的濃度來提高遮光膜的遮光性(降低遮光膜的透光性)。與透明基材或硬化性樹脂的折射率相比,黑色顏料的折射率高,因此,若提高遮光膜中的黑色顏料濃度,則自透明基材的與形成有遮光膜的面相反的面側進行觀察時,反射率會變高。因此,形成於透明基材上的遮光膜與透明基材的界面處的反射增加,產生向遮光膜上的映入、或與彩色濾光片著色部的反射率的差異所引起的黑色矩陣邊界顯眼的不良情況。In a display device or the like, in order to suppress light leakage or the like and improve the visibility of the screen of the display device or the like, the concentration of the black pigment in the light-shielding film may be increased to improve the light-shielding property of the light-shielding film (reduce the light-transmitting property of the light-shielding film). . Since the refractive index of the black pigment is higher than the refractive index of the transparent substrate or the curable resin, if the concentration of the black pigment in the light-shielding film is increased, the surface of the transparent base material opposite to the surface on which the light-shielding film is formed is increased. When observing, the reflectance becomes high. Therefore, reflection at the interface between the light-shielding film formed on the transparent base material and the transparent base material increases, and reflection on the light-shielding film or a black matrix boundary due to the difference in reflectance from the colored portion of the color filter occurs. Conspicuous bad condition.

因此,迫切期望一種具有高遮光性與低反射率兩者的黑色抗蝕劑用感光性樹脂組成物以及使其硬化而成的遮光膜以及彩色濾光片。Therefore, the photosensitive resin composition for black resists which have both high light-shielding property and low reflectance, and the light-shielding film and color filter which hardened it are eagerly desired.

例如,專利文獻1中,公開有一種黑色感光性樹脂組成物,其特徵在於包含:疏水性的二氧化矽粒子及特定的分散劑(胺基甲酸酯系分散劑)。其通過使用疏水性二氧化矽粒子及特定的分散劑,可形成兼顧高遮光性及低反射率的黑色矩陣。 [現有技術文獻] [專利文獻]For example, Patent Document 1 discloses a black photosensitive resin composition characterized by including hydrophobic silica particles and a specific dispersant (urethane-based dispersant). By using hydrophobic silica particles and a specific dispersant, a black matrix with both high light-shielding properties and low reflectivity can be formed. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2015-161815號公報[Patent Document 1] Japanese Patent Laid-Open No. 2015-161815

[發明所要解決的問題] 但是,本發明者等人進行了研究,結果,專利文獻1中記載的黑色感光性樹脂組成物中,存在如下課題:在圖案形成中,圖案邊緣部分呈鋸齒狀,或者在黑色矩陣上產生源自二氧化矽粒子的凝聚異物。[Problems to be Solved by Invention] However, the inventors of the present invention have conducted studies, and as a result, the black photosensitive resin composition described in Patent Document 1 has the following problems: during pattern formation, the pattern edge portion is zigzag, or a source is generated on the black matrix. Agglomerated foreign matter from silica particles.

本發明是鑒於所述方面而成,其目的在於提供一種具有高遮光性及低反射率、可形成高精細的圖案、可抑制凝聚異物的產生的黑色抗蝕劑用感光性樹脂組成物以及將其硬化而成的遮光膜、具有所述遮光膜的彩色濾光片及觸控面板、具有所述彩色濾光片及觸控面板的顯示裝置。 [解決問題的技術手段]The present invention has been made in view of the above-mentioned aspects, and an object of the present invention is to provide a photosensitive resin composition for a black resist which has high light-shielding properties and low reflectance, can form a high-definition pattern, and can suppress the generation of aggregated foreign matter, and A light-shielding film formed by curing, a color filter and a touch panel having the light-shielding film, and a display device having the color filter and the touch panel. [Technical means to solve the problem]

本發明的黑色抗蝕劑用感光性樹脂組成物包含:(A)含有不飽和基的感光性樹脂、(B)具有至少兩個以上的不飽和鍵的光聚合性單體、(C)光聚合起始劑、(D)選自由黑色顏料、混色顏料及遮光材料所組成的群組中的至少一種遮光成分、(E)二氧化矽粒子、以及(F)分散劑,所述(F)分散劑具有酸值及胺值,所述酸值及所述胺值均為10 mgKOH/g以上且80 mgKOH/g以下,所述(F)分散劑的總質量(mF )相對於所述(E)二氧化矽粒子的總質量(mE )的比例(mF /mE )為0.02~0.60。The photosensitive resin composition for black resists of the present invention contains: (A) a photosensitive resin containing an unsaturated group, (B) a photopolymerizable monomer having at least two or more unsaturated bonds, and (C) a light A polymerization initiator, (D) at least one light-shielding component selected from the group consisting of black pigments, color mixing pigments, and light-shielding materials, (E) silica particles, and (F) a dispersant, the (F) The dispersant has an acid value and an amine value, the acid value and the amine value are both 10 mgKOH/g or more and 80 mgKOH/g or less, and the total mass (m F ) of the (F) dispersant is relative to the (E) The ratio (m F /m E ) of the total mass (m E ) of the silica particles is 0.02 to 0.60.

本發明的黑色抗蝕劑用感光性樹脂組成物的製造方法是將(A)含有不飽和基的感光性樹脂、(B)光聚合性單體、(C)光聚合起始劑、使(D)遮光成分分散於溶劑中而成的遮光成分分散體、以及使(E)二氧化矽粒子分散於溶劑中而成的二氧化矽粒子分散體混合,所述黑色抗蝕劑用感光性樹脂組成物的製造方法中,所述(E)二氧化矽粒子分散體含有(F)分散劑,所述(F)分散劑具有酸值及胺值,所述酸值及所述胺值均為10 mgKOH/g以上且80 mgKOH/g以下,所述(F)分散劑的總質量(mF )相對於所述(E)二氧化矽粒子的總質量(mE )的比例(mF /mE )為0.02~0.60。The method for producing the photosensitive resin composition for a black resist of the present invention is to mix (A) an unsaturated group-containing photosensitive resin, (B) a photopolymerizable monomer, (C) a photopolymerization initiator, and ( D) A light-shielding component dispersion obtained by dispersing a light-shielding component in a solvent, and (E) a silica particle dispersion obtained by dispersing silica particles in a solvent are mixed, and the photosensitive resin for the black resist is mixed In the manufacturing method of the composition, the (E) silica particle dispersion contains (F) a dispersant, and the (F) dispersant has an acid value and an amine value, and the acid value and the amine value are both. 10 mgKOH/g or more and 80 mgKOH /g or less, the ratio (m F / m E ) is 0.02 to 0.60.

本發明的遮光膜是將所述黑色抗蝕劑用感光性樹脂組成物硬化而成。The light-shielding film of this invention hardens the said photosensitive resin composition for black resists.

本發明的彩色濾光片具有所述遮光膜作為黑色矩陣。The color filter of the present invention has the light-shielding film as a black matrix.

本發明的觸控面板具有所述遮光膜作為黑色矩陣。The touch panel of the present invention has the light-shielding film as a black matrix.

本發明的顯示裝置具有所述彩色濾光片或所述觸控面板。 [發明的效果]The display device of the present invention includes the color filter or the touch panel. [Effect of invention]

根據本發明,可提供一種具有高遮光性及低反射率、可形成高精細的圖案、可抑制凝聚異物的產生的黑色抗蝕劑用感光性樹脂組成物以及將其硬化而成的遮光膜、具有所述遮光膜的彩色濾光片及觸控面板、具有所述彩色濾光片及觸控面板的顯示裝置。According to the present invention, there can be provided a photosensitive resin composition for a black resist, which has high light-shielding properties and low reflectance, can form a high-definition pattern, and can suppress the generation of agglomerated foreign matter, and a light-shielding film obtained by curing the same, A color filter and a touch panel having the light-shielding film, and a display device having the color filter and the touch panel.

以下,對本發明進行詳細說明。本發明的黑色抗蝕劑用感光性樹脂組成物(以下,簡稱為“感光性樹脂組成物”)包含(A)含有不飽和基的感光性樹脂、(B)具有至少兩個以上的不飽和鍵的光聚合性單體、(C)光聚合起始劑、(D)選自黑色顏料、混色顏料及遮光材料中的至少一種遮光成分、(E)二氧化矽粒子、以及(F)分散劑。以下,對(A)成分~(F)成分進行說明。Hereinafter, the present invention will be described in detail. The photosensitive resin composition for black resists of the present invention (hereinafter, simply referred to as "photosensitive resin composition") includes (A) a photosensitive resin containing an unsaturated group, and (B) a photosensitive resin having at least two or more unsaturated groups. Bonded photopolymerizable monomer, (C) photopolymerization initiator, (D) at least one light-shielding component selected from black pigments, color mixing pigments, and light-shielding materials, (E) silica particles, and (F) dispersion agent. Hereinafter, (A) component - (F) component are demonstrated.

1. (A)成分 作為本實施形態的(A)成分的含有不飽和基的感光性樹脂優選為在一分子中具有聚合性不飽和基、與用於使鹼可溶性顯現出的酸性基,更優選為含有聚合性不飽和基與羧基兩者。若為所述樹脂,則並無特別限定,可廣泛使用。1. (A) Ingredient The unsaturated group-containing photosensitive resin as the component (A) of the present embodiment preferably has a polymerizable unsaturated group and an acidic group for expressing alkali solubility in one molecule, and more preferably contains a polymerizable unsaturated group. Both saturated and carboxyl groups. It does not specifically limit as long as it is the said resin, It can use widely.

所述含有不飽和基的感光性樹脂的例子有通過如下方式而獲得的環氧(甲基)丙烯酸酯酸加成物:使(甲基)丙烯酸與由雙酚類衍生的具有兩個縮水甘油醚基的環氧化合物(以下,也稱為“通式(1)所表示的雙酚型環氧化合物”)反應,獲得具有羥基的化合物,並使多元羧酸或其酐與所獲得的具有羥基的化合物反應。所謂由雙酚類衍生的環氧化合物,是指雙酚類與表鹵醇反應而獲得的環氧化合物或其同等物。再者,所謂“(甲基)丙烯酸”,為丙烯酸及甲基丙烯酸的總稱,是指這些的一者或兩者。Examples of the unsaturated group-containing photosensitive resin include epoxy (meth)acrylate acid adducts obtained by combining (meth)acrylic acid with a bisphenol-derived glycidol having two glycidols. An ether-based epoxy compound (hereinafter, also referred to as "bisphenol-type epoxy compound represented by the general formula (1)") reacts to obtain a compound having a hydroxyl group, and a polyvalent carboxylic acid or an anhydride thereof is reacted with the obtained compound having a hydroxyl group. Hydroxyl compounds react. The epoxy compound derived from bisphenols refers to an epoxy compound obtained by reacting bisphenols with an epihalohydrin or an equivalent thereof. In addition, "(meth)acrylic acid" is a general term for acrylic acid and methacrylic acid, and refers to one or both of these.

作為(A)成分的含有不飽和基的感光性樹脂優選為下述通式(1)所表示的雙酚型環氧化合物。The unsaturated group-containing photosensitive resin as the component (A) is preferably a bisphenol-type epoxy compound represented by the following general formula (1).

[化1]

Figure 02_image001
[hua 1]
Figure 02_image001

(式(1)中,R1 、R2 、R3 及R4 分別獨立地為氫原子、碳數1~5的烷基或鹵素原子的任一者,X為-CO-、-SO2 -、-C(CF3 )2 -、-Si(CH3 )2 -、-CH2 -、-C(CH3 )2 -、-O-、通式(2)所表示的芴-9,9-二基或單鍵,l為0~10的整數)(In formula (1), R 1 , R 2 , R 3 and R 4 are each independently any one of a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X is -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, fluorene-9 represented by the general formula (2), 9-diradical or single bond, l is an integer from 0 to 10)

[化2]

Figure 02_image003
[hua 2]
Figure 02_image003

通式(1)所表示的雙酚型環氧化合物為使雙酚類與表氯醇反應而獲得的具有兩個縮水甘油醚基的環氧化合物。所述反應時,通常伴有二縮水甘油醚化合物的寡聚物化,因此,包含含有兩個以上的雙酚骨架的環氧化合物。The bisphenol-type epoxy compound represented by the general formula (1) is an epoxy compound having two glycidyl ether groups obtained by reacting bisphenols with epichlorohydrin. At the time of the said reaction, oligomerization of a diglycidyl ether compound is usually accompanied, and therefore, an epoxy compound containing two or more bisphenol skeletons is included.

所述反應中所使用的雙酚類的例子包含:雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)芴、9,9-雙(4-羥基-3-甲基苯基)芴、9,9-雙(4-羥基-3-氯苯基)芴、9,9-雙(4-羥基-3-溴苯基)芴、9,9-雙(4-羥基-3-氟苯基)芴、9,9-雙(4-羥基-3-甲氧基苯基)芴、9,9-雙(4-羥基-3,5-二甲基苯基)芴、9,9-雙(4-羥基-3,5-二氯苯基)芴、9,9-雙(4-羥基-3,5-二溴苯基)芴、4,4'-聯苯酚、3,3'-聯苯酚等。其中,優選為具有芴-9,9-二基的雙酚類。Examples of bisphenols used in the reaction include: bis(4-hydroxyphenyl) ketone, bis(4-hydroxy-3,5-dimethylphenyl) ketone, bis(4-hydroxy-3, 5-dichlorophenyl) ketone, bis(4-hydroxyphenyl) bis(4-hydroxy-3,5-dimethylphenyl) bis(4-hydroxy-3,5-dimethylphenyl) bis(4-hydroxy-3,5-dichlorobenzene) bis(4-hydroxyphenyl) hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl) hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl) ) hexafluoropropane, bis(4-hydroxyphenyl)dimethylsilane, bis(4-hydroxy-3,5-dimethylphenyl)dimethylsilane, bis(4-hydroxy-3,5-dimethysilane) Chlorophenyl)dimethylsilane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromophenyl) ) methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy-3 ,5-Dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxy-3-chlorophenyl)propane -Hydroxyphenyl) ether, bis(4-hydroxy-3,5-dimethylphenyl) ether, bis(4-hydroxy-3,5-dichlorophenyl) ether, 9,9-bis(4- Hydroxyphenyl) fluorene, 9,9-bis(4-hydroxy-3-methylphenyl)fluorene, 9,9-bis(4-hydroxy-3-chlorophenyl)fluorene, 9,9-bis(4 -Hydroxy-3-bromophenyl)fluorene, 9,9-bis(4-hydroxy-3-fluorophenyl)fluorene, 9,9-bis(4-hydroxy-3-methoxyphenyl)fluorene, 9 ,9-bis(4-hydroxy-3,5-dimethylphenyl)fluorene, 9,9-bis(4-hydroxy-3,5-dichlorophenyl)fluorene, 9,9-bis(4- Hydroxy-3,5-dibromophenyl)fluorene, 4,4'-biphenol, 3,3'-biphenol, etc. Among them, bisphenols having a fluorene-9,9-diyl group are preferable.

另外,和使此種環氧化合物與(甲基)丙烯酸進行反應而獲得的環氧(甲基)丙烯酸酯分子中的羥基反應的(a)二羧酸或三羧酸的酸單酐的例子包含:鏈式烴二羧酸或三羧酸的酸單酐、脂環式二羧酸或三羧酸的酸單酐、芳香族二羧酸或三羧酸的酸單酐等。此處,鏈式烴二羧酸或三羧酸的酸單酐的例子包含:琥珀酸、乙醯基琥珀酸、馬來酸、己二酸、衣康酸、壬二酸、檸蘋酸、丙二酸、戊二酸、檸檬酸、酒石酸、氧代戊二酸、庚二酸、癸二酸、辛二酸、二甘醇酸等的酸單酐。進而包含導入有任意的取代基的二羧酸或三羧酸的酸單酐等。另外,脂環式二羧酸或三羧酸的酸單酐的例子包含:環丁烷二羧酸、環戊烷二羧酸、六氫鄰苯二甲酸、四氫鄰苯二甲酸、降冰片烷二羧酸等的酸單酐。進而也包含導入有任意的取代基的二羧酸或三羧酸的酸單酐等。另外,芳香族二羧酸或三羧酸的酸單酐的例子包含:鄰苯二甲酸、間苯二甲酸、偏苯三甲酸等的酸單酐。進而包含導入有任意的取代基的二羧酸或三羧酸的酸單酐。Moreover, the example of the acid monoanhydride of (a) dicarboxylic acid or tricarboxylic acid reacted with the hydroxyl group in the epoxy (meth)acrylate molecule obtained by reacting such an epoxy compound with (meth)acrylic acid It includes: acid monoanhydride of chain hydrocarbon dicarboxylic acid or tricarboxylic acid, acid monoanhydride of alicyclic dicarboxylic acid or tricarboxylic acid, acid monoanhydride of aromatic dicarboxylic acid or tricarboxylic acid, and the like. Here, examples of the acid monoanhydride of chain hydrocarbon dicarboxylic acid or tricarboxylic acid include: succinic acid, acetylsuccinic acid, maleic acid, adipic acid, itaconic acid, azelaic acid, citramalic acid, Acid monoanhydrides of malonic acid, glutaric acid, citric acid, tartaric acid, oxoglutaric acid, pimelic acid, sebacic acid, suberic acid, diglycolic acid, and the like. Furthermore, the acid monoanhydride of dicarboxylic acid or tricarboxylic acid into which an arbitrary substituent is introduced, etc. are included. In addition, examples of the acid monoanhydride of alicyclic dicarboxylic acid or tricarboxylic acid include cyclobutanedicarboxylic acid, cyclopentanedicarboxylic acid, hexahydrophthalic acid, tetrahydrophthalic acid, norbornane Acid monoanhydrides such as alkanedicarboxylic acids. Furthermore, the acid monoanhydride of a dicarboxylic acid or tricarboxylic acid into which an arbitrary substituent is introduced, and the like are also included. In addition, examples of the acid monoanhydride of an aromatic dicarboxylic acid or tricarboxylic acid include acid monoanhydrides such as phthalic acid, isophthalic acid, and trimellitic acid. Furthermore, it contains the acid monoanhydride of the dicarboxylic acid or tricarboxylic acid which introduce|transduced arbitrary substituents.

另外,作為與環氧(甲基)丙烯酸酯進行反應的(b)四羧酸的酸二酐,可使用鏈式烴四羧酸的酸二酐、脂環式四羧酸的酸二酐或芳香族四羧酸的酸二酐。此處,鏈式烴四羧酸的酸二酐的例子包含:丁烷四羧酸、戊烷四羧酸、己烷四羧酸等酸二酐。進而包含導入有任意的取代基的四羧酸的酸二酐等。另外,脂環式四羧酸的酸二酐的例子包含:環丁烷四羧酸、環戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、降冰片烷四羧酸等的酸二酐。進而包含導入有任意的取代基的四羧酸的酸二酐等。另外,芳香族四羧酸的酸二酐的例子包含:均苯四甲酸、二苯甲酮四羧酸、聯苯基四羧酸、聯苯基醚四羧酸等的酸二酐。進而包含導入有任意的取代基的四羧酸的酸二酐等。Moreover, as the acid dianhydride of (b) tetracarboxylic acid which reacts with epoxy (meth)acrylate, the acid dianhydride of chain hydrocarbon tetracarboxylic acid, the acid dianhydride of alicyclic tetracarboxylic acid, or the acid dianhydride of alicyclic tetracarboxylic acid can be used. Acid dianhydrides of aromatic tetracarboxylic acids. Here, examples of the acid dianhydride of the chain hydrocarbon tetracarboxylic acid include acid dianhydrides such as butanetetracarboxylic acid, pentanetetracarboxylic acid, and hexanetetracarboxylic acid. Furthermore, the acid dianhydride of tetracarboxylic acid etc. which introduce|transduce arbitrary substituents are contained. In addition, examples of the acid dianhydride of alicyclic tetracarboxylic acid include cyclobutanetetracarboxylic acid, cyclopentanetetracarboxylic acid, cyclohexanetetracarboxylic acid, cycloheptanetetracarboxylic acid, and norbornanetetracarboxylic acid and other acid dianhydrides. Furthermore, the acid dianhydride of tetracarboxylic acid etc. which introduce|transduce arbitrary substituents are contained. In addition, examples of the acid dianhydride of the aromatic tetracarboxylic acid include acid dianhydrides such as pyromellitic acid, benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, and biphenyl ether tetracarboxylic acid. Furthermore, the acid dianhydride of tetracarboxylic acid etc. which introduce|transduce arbitrary substituents are contained.

與環氧(甲基)丙烯酸酯進行反應的(a)二羧酸或三羧酸的酸單酐和(b)四羧酸的酸二酐的莫耳比(a)/(b)優選為0.01~10.0,更優選為0.02以上且小於3.0。若莫耳比(a)/(b)脫離所述範圍,則無法獲得用於製成具有良好的光圖案化性的感光性樹脂組成物的最優分子量,因此並不優選。再者,有如下傾向:莫耳比(a)/(b)越小,分子量越變大,鹼溶解性越降低。The molar ratio (a)/(b) of (a) acid monoanhydride of dicarboxylic acid or tricarboxylic acid and (b) acid dianhydride of tetracarboxylic acid to be reacted with epoxy (meth)acrylate is preferably 0.01 to 10.0, more preferably 0.02 or more and less than 3.0. If the molar ratio (a)/(b) deviates from the above range, the optimum molecular weight for making the photosensitive resin composition having favorable photopatternability cannot be obtained, which is not preferable. Furthermore, there is a tendency that the smaller the molar ratio (a)/(b), the larger the molecular weight and the lower the alkali solubility.

另外,環氧化合物與(甲基)丙烯酸的反應、及利用所述反應而獲得的環氧(甲基)丙烯酸酯與多元羧酸或其酸酐的反應並無特別限定,可採用公知的方法。另外,利用所述反應而合成的含有不飽和基的感光性樹脂的重量平均分子量(Mw)優選為2000~10000,酸值優選為30 mgKOH/g~200 mgKOH/g。再者,關於所述酸值,可使樹脂溶液溶解於二噁烷中,例如使用電位差滴定裝置“COM-1600”(平沼產業股份有限公司製造)並利用1/10 N-KOH水溶液進行滴定來求出。另外,所述含有不飽和基的感光性樹脂的重量平均分子量(Mw)例如可使用凝膠滲透色譜儀(Gel Permeation Chromatograph,GPC)“HLC-8220GPC”(東曹(Tosoh)股份有限公司製造)來測定。Moreover, the reaction of an epoxy compound and (meth)acrylic acid, and the reaction of the epoxy (meth)acrylate obtained by the said reaction, and polyhydric carboxylic acid or its acid anhydride are not specifically limited, A well-known method can be employ|adopted. In addition, the weight average molecular weight (Mw) of the unsaturated group-containing photosensitive resin synthesized by the reaction is preferably 2,000 to 10,000, and the acid value is preferably 30 mgKOH/g to 200 mgKOH/g. The acid value can be obtained by dissolving the resin solution in dioxane, for example, by using a potentiometric titration device "COM-1600" (manufactured by Hiranuma Sangyo Co., Ltd.) and titrating it with a 1/10 N-KOH aqueous solution. ask for. In addition, the weight-average molecular weight (Mw) of the unsaturated group-containing photosensitive resin can be, for example, using a gel permeation chromatography (Gel Permeation Chromatograph, GPC) "HLC-8220GPC" (manufactured by Tosoh Co., Ltd.) to measure.

關於作為(A)成分的含有不飽和基的感光性樹脂,優選的樹脂的其他例子包含:為(甲基)丙烯酸、(甲基)丙烯酸酯等的共聚物、且具有(甲基)丙烯醯基及羧基的樹脂。所述樹脂的例子包含通過如下方式而獲得的含有聚合性不飽和基的鹼可溶性樹脂:使包含(甲基)丙烯酸縮水甘油酯的(甲基)丙烯酸酯類在溶劑中共聚而獲得共聚物,且使(甲基)丙烯酸與所獲得的共聚物反應,最後使二羧酸或三羧酸的酐進行反應。所述共聚物可參考:日本專利特開2014-111722號公報中所表示的、包含源自利用(甲基)丙烯酸將兩端的羥基加以酯化而成的二酯甘油的重複單元20莫耳%~90莫耳%、及源自可與其共聚的一種以上的聚合性不飽和化合物的重複單元10莫耳%~80莫耳%且數量平均分子量(Mn)為2000~20000並且酸值為35 mgKOH/g~120 mgKOH/g的共聚物;以及日本專利特開2018-141968號公報中所表示的、包含源自(甲基)丙烯酸酯化合物的單元、與具有(甲基)丙烯醯基及二羧酸殘基或三羧酸殘基的單元的、重量平均分子量(Mw)為3000~50000、酸值為30 mgKOH/g~200 mgKOH/g的聚合物即含有聚合性不飽和基的鹼可溶性樹脂。Regarding the unsaturated group-containing photosensitive resin as the component (A), other examples of preferable resins include copolymers such as (meth)acrylic acid, (meth)acrylate, and the like, and having (meth)acryloyl hydride and carboxyl-based resins. Examples of the resin include polymerizable unsaturated group-containing alkali-soluble resins obtained by copolymerizing (meth)acrylates containing glycidyl (meth)acrylate in a solvent to obtain a copolymer, And (meth)acrylic acid is made to react with the obtained copolymer, and finally the anhydride of dicarboxylic acid or tricarboxylic acid is made to react. For the copolymer, reference can be made to: 20 mol% of repeating units derived from diester glycerol obtained by esterifying hydroxyl groups at both ends with (meth)acrylic acid, as described in Japanese Patent Laid-Open No. 2014-111722 10 mol% to 80 mol% of repeating units derived from one or more polymerizable unsaturated compounds copolymerizable therewith, and a number average molecular weight (Mn) of 2000 to 20000 and an acid value of 35 mgKOH /g to 120 mgKOH/g; and, as shown in Japanese Patent Laid-Open No. 2018-141968, comprising a unit derived from a (meth)acrylate compound, and a (meth)acryloyl group and a A polymer having a unit of carboxylic acid residue or tricarboxylic acid residue, a weight average molecular weight (Mw) of 3,000 to 50,000 and an acid value of 30 mgKOH/g to 200 mgKOH/g is an alkali-soluble polymer containing a polymerizable unsaturated group. resin.

關於(A)成分的含有不飽和基的感光性樹脂,可單獨使用僅一種,也可併用兩種以上。About the unsaturated-group containing photosensitive resin of (A) component, only 1 type may be used independently, and 2 or more types may be used together.

2. (B)成分 作為本實施形態的(B)成分的具有至少兩個以上的不飽和鍵的光聚合性單體的例子包含:乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、四亞甲基二醇二(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、甘油三(甲基)丙烯酸酯、山梨糖醇五(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、山梨糖醇六(甲基)丙烯酸酯、磷腈(phosphazene)的環氧烷改性六(甲基)丙烯酸酯、己內酯改性二季戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類、作為具有乙烯性雙鍵的化合物的具有(甲基)丙烯醯基的樹枝狀聚合物等。可單獨使用這些單體的僅一種,也可併用兩種以上。另外,所述具有至少兩個乙烯性不飽和鍵的光聚合性單體可發揮使含有的鹼可溶性樹脂的分子彼此交聯的作用,為了發揮所述功能,優選為使用具有三個以上的不飽和鍵的物質。另外,用單體的分子量除以一分子中的(甲基)丙烯酸基的數量而得的丙烯酸當量優選為50~300,丙烯酸當量更優選為80~200。再者,(B)成分不具有游離羧基。2. (B) Ingredient Examples of the photopolymerizable monomer having at least two or more unsaturated bonds as the component (B) of the present embodiment include ethylene glycol di(meth)acrylate and diethylene glycol di(meth)acrylic acid Esters, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, tetramethylene glycol di(meth)acrylate, glycerol di(meth)acrylate, triglyceride Methylol propane tri(meth)acrylate, trimethylolethane tri(meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate Acrylates, dipentaerythritol tetra(meth)acrylate, glycerol tri(meth)acrylate, sorbitol penta(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate Acrylate, sorbitol hexa(meth)acrylate, alkylene oxide-modified hexa(meth)acrylate of phosphazene, caprolactone-modified dipentaerythritol hexa(meth)acrylate, etc. (methyl) acrylic acid esters, dendrimer having a (meth)acryloyl group as a compound having an ethylenic double bond, and the like. Only one kind of these monomers may be used alone, or two or more kinds may be used in combination. In addition, the photopolymerizable monomer having at least two ethylenically unsaturated bonds functions to crosslink the molecules of the alkali-soluble resin contained in the photopolymerizable monomer. substances with saturated bonds. In addition, the acrylic acid equivalent obtained by dividing the molecular weight of the monomer by the number of (meth)acrylic groups in one molecule is preferably 50 to 300, and the acrylic equivalent is more preferably 80 to 200. In addition, (B) component does not have a free carboxyl group.

作為可作為(B)成分而包含於組成物中的具有不飽和鍵的化合物,具有(甲基)丙烯醯基的樹枝狀聚合物的例子可例示:對多官能(甲基)丙烯酸酯的(甲基)丙烯醯基中的碳-碳雙鍵的一部分加成多元巰基化合物而獲得的樹枝狀聚合物。具體而言,包含:使下述通式(3)所表示的多官能(甲基)丙烯酸酯的(甲基)丙烯醯基與下述通式(4)所表示的多元巰基化合物反應而獲得的樹枝狀聚合物等。As an example of a dendrimer having a (meth)acryloyl group as a compound having an unsaturated bond which can be contained in the composition as the component (B), (meth)acrylate (meth)acrylate A dendrimer obtained by adding a polyvalent mercapto compound to a part of the carbon-carbon double bond in the meth)acryloyl group. Specifically, it is obtained by reacting the (meth)acryloyl group of the polyfunctional (meth)acrylate represented by the following general formula (3) with the polyvalent mercapto compound represented by the following general formula (4). dendrimers, etc.

[化3]

Figure 02_image004
[hua 3]
Figure 02_image004

(式(3)中,R5 為氫原子或甲基,R6 為將R7 (OH)k 的k個羥基中的n個羥基供予至式中的酯鍵後的殘留部分;作為優選的R7 (OH)k ,為基於碳數2~8的非芳香族的直鏈或分支鏈的烴骨架的多元醇、或者為所述多元醇的多個分子通過醇的脫水縮合並經由醚鍵進行連結而成的多元醇醚、或者為這些多元醇或多元醇醚與羥基酸的酯;k及n獨立地表示2~20的整數,k≧n)(In formula (3), R 5 is a hydrogen atom or a methyl group, and R 6 is the residue after donating n hydroxyl groups out of k hydroxyl groups of R 7 (OH) k to the ester bond in the formula; preferably R 7 (OH) k is a polyol based on a non-aromatic linear or branched hydrocarbon skeleton having 2 to 8 carbon atoms, or a plurality of molecules of the polyol are dehydrated and condensed through an alcohol and via an ether Polyol ethers that are linked by bonds, or esters of these polyols or polyol ethers and hydroxy acids; k and n independently represent an integer of 2 to 20, k≧n)

[化4]

Figure 02_image005
[hua 4]
Figure 02_image005

(式(4)中,R8 為單鍵或2價~6價的碳數1~6的烴基,m在R8 為單鍵時為2,在R8 為2價~6價的基時與R8 的價數相同)(In formula (4), R 8 is a single bond or a divalent to hexavalent hydrocarbon group having 1 to 6 carbon atoms, m is 2 when R 8 is a single bond, and when R 8 is a divalent to hexavalent group Same valence as R 8 )

通式(3)所表示的多官能(甲基)丙烯酸酯的例子包含:乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、環氧乙烷改性三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、己內酯改性季戊四醇三(甲基)丙烯酸酯等(甲基)丙烯酸酯。這些化合物可單獨使用僅其中一種,也可併用兩種以上。Examples of the polyfunctional (meth)acrylate represented by the general formula (3) include ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, and trimethylolpropane tri(meth)acrylate. Meth)acrylate, ethylene oxide modified trimethylolpropane tri(meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol penta(meth)acrylate (Meth)acrylates such as acrylate, dipentaerythritol hexa(meth)acrylate, caprolactone-modified pentaerythritol tri(meth)acrylate, etc. Only one of these compounds may be used alone, or two or more of them may be used in combination.

通式(4)所表示的多元巰基化合物的例子包含:三羥甲基丙烷三(巰基乙酸酯)、三羥甲基丙烷三(巰基丙酸酯)、季戊四醇四(巰基乙酸酯)、季戊四醇三(巰基乙酸酯)、季戊四醇四(巰基丙酸酯)、二季戊四醇六(巰基乙酸酯)、二季戊四醇六(巰基丙酸酯)等。這些化合物可單獨使用僅其中一種,也可併用兩種以上。Examples of the polyvalent mercapto compound represented by the general formula (4) include trimethylolpropane tris(mercaptoacetate), trimethylolpropane tris(mercaptopropionate), pentaerythritol tetrakis(mercaptoacetate), Pentaerythritol tris(mercaptoacetate), pentaerythritol tetra(mercaptopropionate), dipentaerythritol hexa(mercaptoacetate), dipentaerythritol hexa(mercaptopropionate), etc. Only one of these compounds may be used alone, or two or more of them may be used in combination.

(A)成分與(B)成分的調配比例以重量比(A)/(B)計而優選為30/70~90/10,更優選為60/40~80/20。若(A)成分的調配比例為30/70以上,則光硬化後的硬化物不易變脆,另外,在未曝光部塗膜的酸值不易變低,因此可抑制相對於鹼性顯影液的溶解性的降低。因此,不易產生圖案邊緣呈鋸齒狀、或變得不鮮明等不良情況。另外,若(A)成分的調配比例為90/10以下,則光反應性官能基在樹脂中所占的比例充分,因此可進行所期望的交聯結構的形成。另外,由於樹脂成分的酸值度不會過高,因此曝光部的相對於鹼性顯影液的溶解性不易變高,故而可抑制所形成的圖案變得比目標線寬細、或圖案的缺失。The compounding ratio of (A) component and (B) component is a weight ratio (A)/(B), Preferably it is 30/70 - 90/10, More preferably, it is 60/40 - 80/20. If the blending ratio of the component (A) is 30/70 or more, the cured product after photocuring is less likely to become brittle, and the acid value of the coating film at the unexposed portion is less likely to be lowered, so that the acid value of the coating film with respect to the alkaline developer can be suppressed. Decreased solubility. Therefore, it is difficult to cause problems such as zigzag pattern edges or indistinctness. Moreover, since the ratio of the photoreactive functional group in resin is sufficient as the compounding ratio of (A) component is 90/10 or less, formation of a desired crosslinked structure can be performed. In addition, since the acid value of the resin component does not become too high, the solubility of the exposed portion with respect to the alkaline developing solution is not likely to increase, so that the formed pattern can be prevented from becoming thinner than the target line width or the loss of the pattern. .

3. (C)成分 作為本實施形態的(C)成分的光聚合起始劑的例子包含:苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對叔丁基苯乙酮等苯乙酮類;二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲基胺基二苯甲酮等二苯甲酮類;苯偶醯、安息香、安息香甲基醚、安息香異丙基醚、安息香異丁基醚等安息香醚類;2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物類;2-三氯甲基-5-苯乙烯基-1,3,4-噁二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-噁二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-噁二唑等鹵代甲基噻唑化合物類;2,4,6-三(三氯甲基)-1,3,5-三嗪、2-甲基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-苯基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲硫基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪等鹵代甲基-均三嗪系化合物類;1,2-辛二酮,1-[4-(苯硫基)苯基]-,2-(O-苯甲醯基肟)、1-(4-苯基硫基苯基)丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲基硫基苯基)丁烷-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲基硫基苯基)丁烷-1-酮肟-O-乙酸酯、4-乙氧基-2-甲基苯基-9-乙基-6-硝基-9H-咔唑-3-基-O-乙醯基肟等O-醯基肟系化合類;苄基二甲基縮酮、硫雜蒽酮、2-氯硫雜蒽酮、2,4-二乙基硫雜蒽酮、2-甲基硫雜蒽酮、2-異丙基硫雜蒽酮等硫化合物;2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌等蒽醌類;偶氮雙異丁腈、苯甲醯基過氧化物、枯烯過氧化物等有機過氧化物;2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑等硫醇化合物;三乙醇胺、三乙基胺等三級胺等。這些光聚合起始劑可單獨使用僅其中一種,也可併用兩種以上。3. (C) Ingredient Examples of the photopolymerization initiator as (C) component of the present embodiment include acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminobenzene Acetophenones such as acetone, dichloroacetophenone, trichloroacetophenone, p-tert-butylacetophenone; benzophenone, 2-chlorobenzophenone, p,p'-bisdimethylamine Benzophenones such as benzophenone; benzoin ethers such as benzoin, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether; 2-(o-chlorophenyl)-4, 5-phenylbiimidazole, 2-(o-chlorophenyl)-4,5-bis(m-methoxyphenyl)biimidazole, 2-(o-fluorophenyl)-4,5-diphenylbiimidazole , 2-(o-methoxyphenyl)-4,5-diphenylbiimidazole, 2,4,5-triarylbiimidazole and other biimidazole compounds; 2-trichloromethyl-5-styrene base-1,3,4-oxadiazole, 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4-oxadiazole, 2-trichloromethyl-5-( halomethylthiazole compounds such as p-methoxystyryl)-1,3,4-oxadiazole; 2,4,6-tris(trichloromethyl)-1,3,5-triazine, 2-Methyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-triazine oxazine, 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxyphenyl)-4,6-bis (Trichloromethyl)-1,3,5-triazine, 2-(4-methoxynaphthyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2 -(4-Methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(3,4,5-trimethoxystyryl)- 4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methylthiostyryl)-4,6-bis(trichloromethyl)-1,3, Halogenated methyl-s-triazine compounds such as 5-triazine; 1,2-octanedione, 1-[4-(phenylthio)phenyl]-,2-(O-benzyl oxime ), 1-(4-phenylthiophenyl)butane-1,2-dione-2-oxime-O-benzoate, 1-(4-methylthiophenyl)butane- 1,2-Dione-2-oxime-O-acetate, 1-(4-methylthiophenyl)butane-1-one oxime-O-acetate, 4-ethoxy-2 -Methylphenyl-9-ethyl-6-nitro-9H-carbazol-3-yl-O-acetyl oxime and other O-acyl oxime compounds; benzyl dimethyl ketal, sulfur Sulfur compounds such as xanthone, 2-chlorothioxanthone, 2,4-diethylthioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone; 2-ethyl Anthraquinones such as anthraquinone, octamethylanthraquinone, 1,2-benzoanthraquinone, 2,3-diphenylanthraquinone; azobisisobutyronitrile, benzyl peroxide, cumene peroxide Organic peroxides such as oxides; thiol compounds such as 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole; tertiary compounds such as triethanolamine and triethylamine Amines etc. Only one of these photopolymerization initiators may be used alone, or two or more of them may be used in combination.

可優選地使用的O-醯基肟系化合物群組的例子包含下述通式(5)及下述通式(6)所表示的O-醯基肟系光聚合起始劑。這些化合物群組中,在以高濃度使用遮光成分的情況下,優選為使用365 nm下的莫耳吸光係數為10000以上的O-醯基肟系光聚合起始劑。再者,本發明中所述的“光聚合起始劑”是以包含增感劑的含義使用。Examples of the O-acyl oxime-based compound group that can be preferably used include O-acyl oxime-based photopolymerization initiators represented by the following general formula (5) and the following general formula (6). Among these compound groups, when the light-shielding component is used at a high concentration, it is preferable to use an O-acyl oxime-based photopolymerization initiator having a molar absorption coefficient at 365 nm of 10,000 or more. In addition, the "photopolymerization initiator" as used in the present invention is used in the sense of including a sensitizer.

[化5]

Figure 02_image006
[hua 5]
Figure 02_image006

(式(5)中,R9 、R10 分別獨立地表示碳數1~15的烷基、碳數6~18的芳基、碳數7~20的芳基烷基或碳數4~12的雜環基,R11 表示碳數1~15的烷基、碳數6~18的芳基、碳數7~20的芳基烷基;此處,烷基及芳基可經碳數1~10的烷基、碳數1~10的烷氧基、碳數1~10的烷醯基、鹵素取代,伸烷基部分可包含不飽和鍵、醚鍵、硫醚鍵、酯鍵;另外,烷基可為直鏈、分支、或環狀的任一種烷基)(In formula (5), R 9 and R 10 each independently represent an alkyl group having 1 to 15 carbon atoms, an aryl group having 6 to 18 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, or an arylalkyl group having 4 to 12 carbon atoms. , R 11 represents an alkyl group having 1 to 15 carbon atoms, an aryl group having 6 to 18 carbon atoms, and an arylalkyl group having 7 to 20 carbon atoms; ~10 alkyl groups, 1-10 carbon alkoxy groups, 1-10 carbon alkanoyl groups, halogen-substituted, alkylene moieties may contain unsaturated bonds, ether bonds, thioether bonds, ester bonds; in addition , the alkyl group can be any one of straight chain, branched, or cyclic)

[化6]

Figure 02_image008
[hua 6]
Figure 02_image008

(式(6)中,R12 及R13 分別獨立地為碳數1~10的直鏈狀或分支狀的烷基、或者為碳數4~10的環烷基、環烷基烷基或烷基環烷基、或者為可經碳數1~6的烷基取代的苯基;R14 分別獨立地為碳數2~10的直鏈狀或分支狀的烷基或烯基,所述烷基或烯基中的-CH2 -基的一部分可經-O-基取代;進而,這些R12 ~R14 的基中的氫原子的一部分也可經鹵素原子取代)(In formula (6), R 12 and R 13 are each independently a linear or branched alkyl group having 1 to 10 carbon atoms, or a cycloalkyl group having 4 to 10 carbon atoms, a cycloalkylalkyl group, or Alkylcycloalkyl, or a phenyl group that may be substituted with an alkyl group having 1 to 6 carbon atoms; R 14 is each independently a linear or branched alkyl group or an alkenyl group having 2 to 10 carbon atoms, the A part of the -CH 2 - group in the alkyl or alkenyl group may be substituted with an -O- group; further, a part of the hydrogen atoms in the groups of these R 12 to R 14 may also be substituted with a halogen atom)

(C)成分的光聚合起始劑的使用量以(A)成分及(B)成分的各成分的合計100重量份為基準而優選為3重量份以上且30重量份以下,更優選為5重量份以上且20重量份以下。在(C)成分的調配比例為3重量份以上的情況下,感度良好,可具有充分的光聚合速度。在(C)成分的調配比例為30重量份以下的情況下,可具有適度的感度,因此可獲得所期望的圖案線寬及所期望的圖案邊緣。The usage-amount of the photopolymerization initiator of the (C) component is preferably 3 parts by weight or more and 30 parts by weight or less, more preferably 5 parts by weight, based on 100 parts by weight of the total of each component of the (A) component and the (B) component. Part by weight or more and less than or equal to 20 parts by weight. When the blending ratio of the component (C) is 3 parts by weight or more, the sensitivity is good and a sufficient photopolymerization rate can be obtained. When the compounding ratio of (C) component is 30 weight part or less, since it can have moderate sensitivity, a desired pattern line width and a desired pattern edge can be obtained.

4. (D)成分 作為本實施形態的(D)成分的黑色顏料、混色有機顏料及遮光材料等遮光成分若為以1 nm~1000 nm的平均粒子徑(利用雷射繞射/散射法粒徑分佈計或動態光散射法粒徑分佈計測定的平均粒子徑)分散的成分,則可無特別限制地使用公知的遮光成分。4. (D) Ingredient Light-shielding components such as black pigments, color-mixing organic pigments, and light-shielding materials, which are components (D) of the present embodiment, have an average particle diameter of 1 nm to 1000 nm (using a laser diffraction/scattering method particle size distribution meter or dynamic light A known light-shielding component can be used without particular limitation as the component dispersed in the average particle diameter measured by the particle size distribution meter by the scattering method.

作為(D)成分的黑色顏料的例子包含:苝黑、花青黑、苯胺黑、內醯胺黑、碳黑、鈦黑等。Examples of the black pigment as the component (D) include perylene black, cyanine black, aniline black, lactamide black, carbon black, titanium black, and the like.

作為(D)成分的混色有機顏料的例子包含:選自偶氮顏料、縮合偶氮顏料、偶氮甲鹼顏料、酞菁顏料、喹吖啶酮顏料、異吲哚啉酮顏料、異吲哚啉顏料、二噁嗪顏料、還原(threne)顏料、苝顏料、紫環酮(perinone)顏料、喹酞酮顏料、二酮基吡咯並吡咯顏料、硫靛顏料等有機顏料中的至少兩色混合而成的顏料。Examples of color-mixing organic pigments as the component (D) include: azo pigments, condensed azo pigments, azomethine pigments, phthalocyanine pigments, quinacridone pigments, isoindolinone pigments, isoindole pigments At least two-color mixing of organic pigments such as linoline pigments, dioxazine pigments, threne pigments, perylene pigments, perinone pigments, quinophthalone pigments, diketopyrrolopyrrole pigments, and thioindigo pigments made of pigments.

根據目標感光性樹脂組成物的功能,所述(D)成分可單獨使用僅其中一種,也可併用兩種以上。According to the function of the target photosensitive resin composition, only one of the components (D) may be used alone, or two or more of them may be used in combination.

再者,使用混色有機顏料作為(D)成分時可使用的有機顏料的例子包含在染料索引(Color Index)名稱中為以下編號的顏料,但並不限定於此。 顏料紅(pigment red)2、3、4、5、9、12、14、22、23、31、38、112、122、144、146、147、149、166、168、170、175、176、177、178、179、184、185、187、188、202、207、208、209、210、213、214、220、221、242、247、253、254、255、256、257、262、264、266、272、279等 顏料橙(pigment orange)5、13、16、34、36、38、43、61、62、64、67、68、71、72、73、74、81等 顏料黃(pigment yellow)1、3、12、13、14、16、17、55、73、74、81、83、93、95、97、109、110、111、117、120、126、127、128、129、130、136、138、139、150、151、153、154、155、173、174、175、176、180、181、183、185、191、194、199、213、214等 顏料綠(pigment green)7、36、58等 顏料藍(pigment blue)15、15:1、15:2、15:3、15:4、15:6、16、60、80等 顏料紫(pigment violet)19、23、37等In addition, the example of the organic pigment which can be used when using a color mixing organic pigment as (D)component includes the pigment of the following number in the name of a dye index (Color Index), but it is not limited to this. Pigment red 2, 3, 4, 5, 9, 12, 14, 22, 23, 31, 38, 112, 122, 144, 146, 147, 149, 166, 168, 170, 175, 176, 177, 178, 179, 184, 185, 187, 188, 202, 207, 208, 209, 210, 213, 214, 220, 221, 242, 247, 253, 254, 255, 256, 257, 262, 264, 266, 272, 279, etc. Pigment orange 5, 13, 16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74, 81, etc. Pigment yellow 1, 3, 12, 13, 14, 16, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154, 155, 173, 174, 175, 176, 180, 181, 183, 185, 191, 194, 199, 213, 214, etc. Pigment green 7, 36, 58, etc. Pigment blue (pigment blue) 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 60, 80, etc. Pigment violet 19, 23, 37, etc.

關於(D)成分的遮光成分的調配比例,可根據所期望的遮光度來任意決定,相對於感光性樹脂組成物中的固體成分,優選為20質量%以上且80質量%以下,更優選為40質量%以上且70質量%以下。關於(D)成分的遮光成分,在使用苯胺黑、花青黑、內醯胺黑等有機顏料或碳黑等碳系遮光成分的情況下,特別優選為相對於感光性樹脂組成物中的固體成分而為40質量%以上且60質量%以下。若遮光成分相對於感光性樹脂組成物中的固體成分而為20質量%以上,則可充分獲得遮光性。若遮光成分相對於感光性樹脂組成物中的固體成分而為80質量%以下,則原本成為黏合劑的感光性樹脂的含量不會減少,因此可獲得所期望的顯影特性及膜形成能力。The blending ratio of the light-shielding component of the component (D) can be arbitrarily determined according to the desired light-shielding degree, but is preferably 20% by mass or more and 80% by mass or less, more preferably 20% by mass or more and 80% by mass or less with respect to the solid content in the photosensitive resin composition 40 mass % or more and 70 mass % or less. Regarding the light-shielding component of the component (D), in the case of using organic pigments such as aniline black, cyanine black, and lactamide black, or carbon-based light-shielding components such as carbon black, it is particularly preferable to be relative to the solids in the photosensitive resin composition. It is 40 mass % or more and 60 mass % or less as a component. When the light-shielding component is 20 mass % or more with respect to the solid content in the photosensitive resin composition, light-shielding properties can be sufficiently obtained. If the light-shielding component is 80 mass % or less with respect to the solid content in the photosensitive resin composition, the content of the photosensitive resin originally serving as a binder does not decrease, so desired developing characteristics and film forming ability can be obtained.

所述(D)成分通常是以分散於溶劑中的遮光成分分散體的形式與其他調配成分混合,此時,可添加分散劑。分散劑可無特別限制地使用顏料(遮光成分)分散中所使用的公知的化合物(以分散劑、分散潤濕劑、分散促進劑等名稱而市售的化合物等)等。The component (D) is usually mixed with other formulation components in the form of a light-shielding component dispersion dispersed in a solvent, and in this case, a dispersant may be added. As the dispersant, well-known compounds (compounds commercially available under the names of dispersants, dispersion wetting agents, dispersion accelerators, etc.) and the like used for dispersion of pigments (light-shielding components) can be used without particular limitation.

分散劑的例子包含:陽離子性高分子系分散劑、陰離子性高分子系分散劑、非離子性高分子系分散劑、顏料衍生物型分散劑(分散助劑)。尤其是,就對著色劑的吸附方面而言,所述分散劑優選為具有咪唑基、吡咯基、吡啶基、一級胺基、二級胺基或三級胺基等陽離子性官能基且胺值為1 mgKOH/g~100 mgKOH/g、數量平均分子量(Mn)處於1000~100000的範圍的陽離子性高分子系分散劑。所述分散劑的調配量相對於遮光成分而優選為1質量%~35質量%,更優選為2質量%~25質量%。再者,樹脂類般的高黏度物質通常具有使分散穩定的作用,但不具有分散促進能力的物質並不處理為分散劑。然而,並不限制出於使分散穩定的目的而使用的情況。Examples of dispersants include cationic polymer-based dispersants, anionic polymer-based dispersants, nonionic polymer-based dispersants, and pigment derivative-type dispersants (dispersing aids). In particular, the dispersant preferably has a cationic functional group such as an imidazole group, a pyrrole group, a pyridyl group, a primary amino group, a secondary amino group, or a tertiary amino group, and an amine value in terms of adsorption of colorants. It is a cationic polymer-based dispersant having a number average molecular weight (Mn) of 1 mgKOH/g to 100 mgKOH/g and a range of 1,000 to 100,000. It is preferable that the compounding quantity of the said dispersing agent is 1 mass % - 35 mass % with respect to a light-shielding component, and it is more preferable that it is 2 mass % - 25 mass %. In addition, resin-like high-viscosity substances generally have the effect of stabilizing dispersion, but substances that do not have dispersion-promoting ability are not treated as dispersants. However, it is not limited to use for the purpose of stabilizing dispersion.

另外,(E)二氧化矽粒子(後述)的總質量(mE )相對於所述(D)遮光成分的總質量(mD )的比例(mE /mD )優選為0.01~0.20,更優選為0.05~0.1。若(E)二氧化矽粒子的總質量(mE )相對於(D)遮光成分的總質量(mD )的比例為所述範圍,則可兼顧高遮光性與低反射率。In addition, the ratio (m E /m D ) of the total mass (m E ) of the (E) silica particles (described later) to the total mass (m D ) of the (D) light-shielding component is preferably 0.01 to 0.20, More preferably, it is 0.05-0.1. If the ratio of the total mass (m E ) of the (E) silica particles to the total mass (m D ) of the (D) light-shielding component is in the above-described range, both high light-shielding properties and low reflectance can be achieved.

5. (E)成分 關於作為(E)成分的二氧化矽粒子,氣相反應或液相反應等製造方法、或形狀(球狀、非球狀)並無特別限制。5. (E) Ingredient Regarding the silica particles as the component (E), there are no particular limitations on the production method such as gas phase reaction or liquid phase reaction, or the shape (spherical, non-spherical).

本發明中使用的作為(E)成分的二氧化矽粒子的種類並無特別限定。可使用實心二氧化矽,也可使用中空二氧化矽粒子。再者,所謂“中空二氧化矽粒子”,是指粒子的內部具有空洞的二氧化矽粒子。The type of the silica particles as the component (E) used in the present invention is not particularly limited. Solid silica can be used, or hollow silica particles can be used. In addition, the so-called "hollow silica particle" refers to a silica particle having a cavity inside the particle.

通過使用所述二氧化矽粒子,可降低包含所述二氧化矽粒子的遮光膜的折射率。By using the silica particles, the refractive index of the light-shielding film including the silica particles can be lowered.

所述二氧化矽粒子的平均粒子徑優選為1 nm~100 nm,更優選為10 nm~90 nm。認為,與平均粒子徑為數奈米(nm)這樣的小粒子徑的情況相比較,在為所述範圍內的大小時,不易產生二氧化矽粒子彼此的凝聚。由此,在所述粒子徑的範圍內,二氧化矽粒子的分散穩定性優異,因此可在遮光膜內均勻地存在。因此,遮光膜上的反射率不易產生偏差。The average particle diameter of the silica particles is preferably 1 nm to 100 nm, and more preferably 10 nm to 90 nm. Compared with the case where the average particle diameter is a small particle diameter such as several nanometers (nm), it is considered that the aggregation of the silica particles is less likely to occur when the particle diameter is within the above-mentioned range. As a result, within the range of the particle diameter, the silica particles are excellent in dispersion stability, and thus can be uniformly present in the light-shielding film. Therefore, the reflectance on the light-shielding film is less likely to vary.

另外,所述二氧化矽粒子的含量相對於感光性樹脂組成物的總質量而優選為0.1質量份~5質量份,更優選為0.1質量份~2質量份。若二氧化矽粒子的含量處於所述範圍內,則可達成低反射率化,並且可確保良好的光圖案化性。Moreover, 0.1 mass part - 5 mass parts are preferable with respect to the total mass of the photosensitive resin composition, and, as for content of the said silica particle, 0.1 mass part - 2 mass parts are more preferable. When the content of the silica particles is within the above-mentioned range, the reflectance can be lowered and favorable photopatternability can be ensured.

所述二氧化矽粒子的平均粒子徑可使用動態光散射法的粒度分佈計“粒徑分析儀FPAR-1000”(大塚電子股份有限公司製造),並利用累積法來測定。The average particle diameter of the silica particles can be measured by an accumulation method using a particle size distribution meter "Particle Size Analyzer FPAR-1000" (manufactured by Otsuka Electronics Co., Ltd.) using a dynamic light scattering method.

另外,所述二氧化矽粒子可使用折射率為1.10~1.47的粒子。通過除了可使用通常的二氧化矽粒子的折射率為1.45~1.47的粒子以外還使用具有低的折射率的中空二氧化矽粒子,而較僅包含通常的二氧化矽粒子的遮光膜的折射率而言,可進一步降低遮光膜的折射率。In addition, as the silica particles, particles having a refractive index of 1.10 to 1.47 can be used. By using hollow silica particles having a low refractive index in addition to ordinary silica particles having a refractive index of 1.45 to 1.47, the refractive index of a light-shielding film containing only ordinary silica particles can be reduced. In other words, the refractive index of the light-shielding film can be further reduced.

另外,二氧化矽粒子的折射率可由如下透明的混合液求出,所述混合液是通過對將所述二氧化矽粒子處理成粉末狀而成者、與折射率已知的標準折射液進行混合而獲得。在此情況下,將所述混合液的標準折射液的折射率設為二氧化矽粒子的折射率。再者,所述二氧化矽粒子的折射率可使用阿貝(Abbe)折射率計來測定。In addition, the refractive index of the silica particles can be obtained from a transparent mixed solution obtained by processing the silica particles into a powder form and a standard refractive solution of which the refractive index is known. obtained by mixing. In this case, the refractive index of the standard refractive liquid of the mixed liquid is the refractive index of the silica particles. In addition, the refractive index of the said silica particle can be measured using an Abbe refractometer.

另外,可抑制因透明基材與所形成的遮光膜的折射率差而產生的反射,因此,即便不在基材上另行設置抗反射膜等,也可抑制反射。In addition, since the reflection due to the difference in refractive index between the transparent base material and the formed light-shielding film can be suppressed, even if an antireflection film or the like is not separately provided on the base material, the reflection can be suppressed.

所述二氧化矽粒子的形狀可為圓球形狀,也可為橢圓形狀。本發明中使用的二氧化矽粒子的形狀優選為圓球狀。The shape of the silica particles can be spherical or elliptical. The shape of the silica particles used in the present invention is preferably spherical.

所述二氧化矽粒子的圓球度優選為1.0~1.5。若二氧化矽粒子的圓球度為所述範圍,則粒子形狀接近於圓球。因此,可均質地填充到膜厚薄的遮光膜中,可形成在維持被膜表面平滑性的同時所述二氧化矽粒子不會自被膜表面露出到外部的遮光膜。因此,可獲得折射率低、具有充分的強度的遮光膜。The sphericity of the silica particles is preferably 1.0 to 1.5. If the sphericity of the silica particles is in the range, the particle shape is close to a sphere. Therefore, a light-shielding film with a thin film thickness can be uniformly filled, and a light-shielding film in which the silicon dioxide particles are not exposed to the outside from the film surface can be formed while maintaining the smoothness of the film surface. Therefore, a light-shielding film having a low refractive index and sufficient strength can be obtained.

所述二氧化矽粒子的圓球度可由粒子的最長徑與最短徑的比例(任意100個二氧化矽粒子的平均值)求出。此處,所謂二氧化矽粒子的最長徑與最短徑,是利用穿透式電子顯微鏡對二氧化矽粒子進行拍攝,並根據所獲得的顯微鏡照片測定二氧化矽粒子的最長徑與最短徑而求出的值。The sphericity of the silica particles can be obtained from the ratio of the longest diameter to the shortest diameter of the particles (the average value of any 100 silica particles). Here, the longest and shortest diameters of the silica particles are obtained by photographing the silica particles with a transmission electron microscope, and measuring the longest and shortest diameters of the silica particles from the obtained microscope photographs. out value.

作為所述(E)成分的二氧化矽粒子可作為分散於溶劑中的二氧化矽粒子分散體而與其他調配成分混合。分散劑可無特別限制地使用顏料(遮光成分)分散中所使用的公知的化合物(以分散劑、分散濕潤劑、分散促進劑等名稱市售的化合物等)等。再者,在本實施形態中,所述二氧化矽粒子分散體含有後述的(F)分散劑。The silica particles as the component (E) can be mixed with other preparation components as a silica particle dispersion dispersed in a solvent. As the dispersing agent, known compounds (compounds marketed under the names of dispersing agents, dispersion wetting agents, dispersion accelerators, etc.) and the like which are used for dispersion of pigments (light-shielding components) and the like can be used without particular limitation. In addition, in this embodiment, the said silica particle dispersion contains the (F) dispersing agent mentioned later.

6. (F)成分 作為本實施形態的(F)成分的分散劑具有酸值及胺值,其酸值及胺值均為10 mgKOH/g以上且80 mgKOH/g以下。若分散劑的胺值為10 mgKOH/g以上,則可提高二氧化矽粒子的分散性。另一方面,僅具有胺值的分散劑雖提高二氧化矽粒子的分散性,但會使二氧化矽粒子在顯影液中的溶解性降低,因此會作為殘渣殘留於圖案邊緣部分,使直線性降低。相對於此,若分散劑的胺值為10 mgKOH/g以上,且酸值也為10 mgKOH/g以上,則可提高二氧化矽粒子的分散性,並且可形成高精細的圖案。另一方面,通過將酸值及胺值均設為80 mgKOH/g以下,而不會過度地提高由分散劑保護的二氧化矽粒子在顯影液中的溶解性,可抑制所形成的圖案的精細性的降低。就所述觀點而言,分散劑的胺值及酸值優選為均為30 mgKOH/g以上且80 mgKOH/g以下,更優選為均為30 mgKOH/g以上且80 mgKOH/g以下。6. (F) Ingredients The dispersing agent which is (F) component of this embodiment has an acid value and an amine value, and both the acid value and the amine value are 10 mgKOH/g or more and 80 mgKOH/g or less. When the amine value of the dispersant is 10 mgKOH/g or more, the dispersibility of the silica particles can be improved. On the other hand, a dispersant having only an amine value improves the dispersibility of the silica particles, but reduces the solubility of the silica particles in the developing solution, so it remains as a residue on the edge of the pattern, and the linearity is reduced. reduce. On the other hand, when the amine value of the dispersant is 10 mgKOH/g or more and the acid value is also 10 mgKOH/g or more, the dispersibility of the silica particles can be improved, and a high-definition pattern can be formed. On the other hand, by setting both the acid value and the amine value to be 80 mgKOH/g or less, the solubility of the silica particles protected by the dispersing agent in the developer solution is not excessively increased, and the resulting pattern can be suppressed from being damaged. Decreased refinement. From this viewpoint, the amine value and the acid value of the dispersant are preferably both 30 mgKOH/g or more and 80 mgKOH/g or less, and more preferably both are 30 mgKOH/g or more and 80 mgKOH/g or less.

另外,可提高二氧化矽粒子的分散性,抑制源自二氧化矽粒子的凝聚異物的產生。再者,作為(F)成分的分散劑的酸值是指中和1 g樹脂成分(固體成分)所需的KOH的mg數,可依據日本工業標準(Japanese Industrial Standard,JIS)-K0070來測定。作為(F)成分的分散劑的胺值是指相對於中和1 g樹脂成分(固體成分)所需的酸(乙酸等)的量而以當量計的KOH的mg數,可依據JIS-K7237來測定。In addition, the dispersibility of the silica particles can be improved, and the generation of agglomerated foreign matter derived from the silica particles can be suppressed. In addition, the acid value of the dispersing agent as the component (F) refers to the number of mg of KOH required to neutralize 1 g of the resin component (solid content), and can be measured in accordance with Japanese Industrial Standard (JIS)-K0070 . The amine value of the dispersing agent as the component (F) refers to the number of mg of KOH in equivalents with respect to the amount of acid (acetic acid, etc.) required to neutralize 1 g of the resin component (solid content), and can be based on JIS-K7237 to measure.

作為所述(F)成分的分散劑的例子包含:酸性聚合物的烷基銨鹽及烷醇銨鹽(alkylolammonium salts)、或者具有酸基的高分子共聚物的烷基銨鹽及烷醇銨鹽、具有烷基胺基的高分子的中和鹽、高分子共聚物的磷酸酯鹽等。這些中,優選為酸性聚合物的烷基銨鹽、或者具有酸基的高分子共聚物的烷基銨鹽。通過使用酸性聚合物的烷基銨鹽或烷醇銨鹽、或者具有酸基的高分子共聚物的烷基銨鹽或烷醇銨鹽作為分散劑,可更顯著地抑制源自二氧化矽粒子的凝聚異物的產生。Examples of the dispersing agent as the component (F) include alkylammonium salts and alkanolammonium salts of acidic polymers, or alkylammonium salts and alkanolammonium salts of polymer copolymers having acid groups Salts, neutralized salts of polymers having alkylamine groups, phosphate ester salts of polymer copolymers, and the like. Among these, an alkylammonium salt of an acidic polymer or an alkylammonium salt of a polymer copolymer having an acid group is preferable. By using an alkylammonium salt or an alkanolammonium salt of an acidic polymer, or an alkylammonium salt or an alkanolammonium salt of a polymer copolymer having an acid group as a dispersant, it is possible to suppress the silica particles more significantly the production of agglomerated foreign bodies.

另外,作為(F)成分的分散劑的市售品的例子包含:迪斯帕畢克(DISPERBYK)-140、142、145、2001、2025、9076(均為日本畢克化學(BYK-Chemie Japan)公司製造,“DISPERBYK”為日本畢克化學(BYK-Chemie Japan)公司的註冊商標)等。所述市售品中,優選為迪斯帕畢克(DISPERBYK)-140、142、9076,更優選為迪斯帕畢克(DISPERBYK)-140、9076。In addition, examples of commercially available products as dispersants of the component (F) include: DISPERBYK-140, 142, 145, 2001, 2025, 9076 (all BYK-Chemie Japan ) company, "DISPERBYK" is a registered trademark of BYK-Chemie Japan) and so on. Among the commercial products, DISPERBYK-140, 142, and 9076 are preferable, and DISPERBYK-140 and 9076 are more preferable.

(F)分散劑的含量相對於感光性樹脂組成物的總質量而優選為0.01質量份~0.5質量份。(F) It is preferable that content of a dispersing agent is 0.01 mass part - 0.5 mass part with respect to the total mass of the photosensitive resin composition.

另外,所述(F)分散劑的總質量(mF )相對於所述(E)二氧化矽粒子的總質量(mE )的比例(mF /mE )優選為0.02~0.6,更優選為0.03~0.4。若所述(F)分散劑的總質量(mF )相對於二氧化矽粒子的總質量(mE )的比例為所述範圍,則可降低玻璃基板側的反射率,並且可抑制源自二氧化矽粒子的凝聚異物的產生。In addition, the ratio (m F /m E ) of the total mass (m F ) of the (F) dispersant to the total mass (m E ) of the (E) silica particles is preferably 0.02 to 0.6, more Preferably it is 0.03-0.4. If the ratio of the total mass (m F ) of the (F) dispersing agent to the total mass (m E ) of the silica particles is in the above range, the reflectance on the glass substrate side can be reduced, and the reflectance from the glass substrate side can be suppressed. Generation of agglomerated foreign matter of silica particles.

通過利用適當的方法使所述(A)成分~(F)成分混合並分散,可製備本發明的感光性樹脂組成物中所使用的分散液。The dispersion liquid used for the photosensitive resin composition of this invention can be prepared by mixing and dispersing the said (A) component - (F) component by an appropriate method.

7. 溶劑 本發明的感光性樹脂組成物中,優選為除了使用(A)成分~(F)成分以外,還使用作為(G)成分的溶劑。溶劑的例子包含:甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇等醇類;α-萜品醇或β-萜品醇等萜烯類;丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯烷酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;溶纖劑、甲基溶纖劑、乙基溶纖劑、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚等二醇醚類;乙酸乙酯、乙酸丁酯、溶纖劑乙酸酯、乙基溶纖劑乙酸酯、丁基溶纖劑乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等乙酸酯類。通過單獨使用這些或併用兩種以上並進行溶解、混合,可製成均勻的溶液狀的組成物。7. Solvents In the photosensitive resin composition of this invention, it is preferable to use the solvent which is (G) component in addition to (A) component - (F) component. Examples of solvents include: alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol; terpenes such as α-terpineol or β-terpineol; acetone, methyl ethyl ketone, Cyclohexanone, N-methyl-2-pyrrolidone and other ketones; toluene, xylene, tetramethylbenzene and other aromatic hydrocarbons; cellosolve, methyl cellosolve, ethyl cellosolve, carbitol , methyl carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol Glycol ethers such as alcohol monoethyl ether; ethyl acetate, butyl acetate, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, carbitol acetate, ethyl carbitol Acetates such as bisphenol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate. By using these alone or in combination of two or more, dissolving and mixing, a uniform solution-like composition can be obtained.

另外,本發明的感光性樹脂組成物中可視需要調配環氧樹脂等(A)成分以外的樹脂、硬化劑、硬化促進劑、熱聚合抑制劑及抗氧化劑、塑化劑、二氧化矽以外的填充材料、流平劑、消泡劑、界面活性劑、偶合劑等添加劑。In the photosensitive resin composition of the present invention, resins other than the component (A) such as epoxy resins, curing agents, curing accelerators, thermal polymerization inhibitors, antioxidants, plasticizers, and other substances other than silicon dioxide may be blended as necessary. Filler, leveling agent, defoamer, surfactant, coupling agent and other additives.

熱聚合抑制劑及抗氧化劑的例子包含:對苯二酚、對苯二酚單甲醚、連苯三酚(pyrogallol)、叔丁基鄰苯二酚、吩噻嗪、受阻酚系化合物等。塑化劑的例子包含:鄰苯二甲酸二丁酯、鄰苯二甲酸二辛酯、磷酸三甲苯酯等。填充材料的例子包含:玻璃纖維、二氧化矽、雲母、氧化鋁等。消泡劑或流平劑的例子包含:矽酮系、氟系、丙烯酸系的化合物。界面活性劑的例子包含氟系界面活性劑、矽酮系界面活性劑等。偶合劑的例子包含:3-(縮水甘油基氧基)丙基三甲氧基矽烷、3-丙烯醯氧基丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等。Examples of thermal polymerization inhibitors and antioxidants include hydroquinone, hydroquinone monomethyl ether, pyrogallol, t-butylcatechol, phenothiazine, hindered phenol-based compounds, and the like. Examples of the plasticizer include: dibutyl phthalate, dioctyl phthalate, tricresyl phosphate, and the like. Examples of filler materials include: fiberglass, silica, mica, alumina, and the like. Examples of the defoaming agent or leveling agent include silicone-based, fluorine-based, and acrylic-based compounds. Examples of the surfactant include fluorine-based surfactants, silicone-based surfactants, and the like. Examples of coupling agents include: 3-(glycidyloxy)propyltrimethoxysilane, 3-propenyloxypropyltrimethoxysilane, 3-isocyanatopropyltriethoxysilane, 3 -Ureidopropyltriethoxysilane, etc.

本發明的感光性樹脂組成物優選為在將溶劑除外的固體成分(固體成分中包含光硬化後成為固體成分的單體)中包含作為(A)成分的含有不飽和基的感光性樹脂、作為(B)成分的具有至少兩個以上的不飽和鍵的光聚合性單體、作為(C)成分的光聚合起始劑、作為(D)成分的選自黑色顏料、混色顏料及遮光材料中的至少一種遮光成分、(E)二氧化矽粒子、以及(F)分散劑。溶劑的量根據目標黏度而變化,優選為相對於整體量而為40質量%~90質量%。The photosensitive resin composition of the present invention preferably contains the unsaturated group-containing photosensitive resin as the component (A) in the solid content excluding the solvent (the solid content includes a monomer that becomes a solid content after photocuring), and as the The photopolymerizable monomer having at least two or more unsaturated bonds as the component (B), the photopolymerization initiator as the component (C), and the component (D) selected from black pigments, color mixing pigments, and light-shielding materials of at least one light-shielding ingredient, (E) silica particles, and (F) a dispersant. The amount of the solvent varies depending on the target viscosity, but is preferably 40% by mass to 90% by mass relative to the entire amount.

本發明的感光性樹脂組成物通過將(A)含有不飽和基的感光性樹脂、(B)光聚合性單體、(C)光聚合起始劑、使(D)遮光成分分散於溶劑中而成的遮光成分分散體、使(E)二氧化矽粒子分散於溶劑中而成的二氧化矽粒子分散體混合,可製造黑色抗蝕劑用感光性樹脂組成物。所述(E)二氧化矽粒子分散體含有所述(F)分散劑。The photosensitive resin composition of the present invention is obtained by dispersing (A) an unsaturated group-containing photosensitive resin, (B) a photopolymerizable monomer, (C) a photopolymerization initiator, and (D) a light-shielding component in a solvent The obtained light-shielding component dispersion and the silica particle dispersion obtained by dispersing the (E) silica particles in a solvent are mixed to produce a photosensitive resin composition for a black resist. The (E) silica particle dispersion contains the (F) dispersant.

通過使(F)分散劑預先含有於(E)二氧化矽粒子分散體中,可提高二氧化矽分散體的分散穩定性,在與其他樹脂成分混合時可防止凝聚異物的產生。By preliminarily containing the (F) dispersant in the (E) silica particle dispersion, the dispersion stability of the silica dispersion can be improved, and the generation of agglomerated foreign matter can be prevented when mixing with other resin components.

另外,使本發明的感光性樹脂組成物硬化而成的遮光膜例如可通過如下方式獲得:將感光性樹脂組成物的溶液塗佈於基板等上,使溶劑乾燥,並照射光(包含紫外線、放射線等)而使其硬化。若使用光罩幕等設置照射到光的部分與並未照射到光的部分,且僅使照射到光的部分硬化,並利用鹼性溶液使其他部分溶解,則可獲得所期望的圖案。In addition, the light-shielding film obtained by curing the photosensitive resin composition of the present invention can be obtained, for example, by applying a solution of the photosensitive resin composition on a substrate or the like, drying the solvent, and irradiating light (including ultraviolet rays, radiation, etc.) to harden it. A desired pattern can be obtained by providing a portion irradiated with light and a portion not irradiated with light using a photomask or the like, hardening only the portion irradiated with light, and dissolving the other portion with an alkaline solution.

另外,具有本發明的遮光膜作為黑色矩陣的彩色濾光片或觸控面板例如可通過如下方式等製作:在透明基材上形成膜厚為1.0 μm~2.0 μm的遮光膜,在遮光膜形成後,利用光微影術形成紅色、藍色及綠色的各畫素;另外,在遮光膜中利用噴墨製程注入紅色、藍色及綠色的油墨。In addition, a color filter or a touch panel having the light-shielding film of the present invention as a black matrix can be produced, for example, by forming a light-shielding film with a thickness of 1.0 μm to 2.0 μm on a transparent substrate, and forming a light-shielding film on the light-shielding film. After that, each pixel of red, blue and green is formed by photolithography; in addition, red, blue and green inks are injected into the light-shielding film by an inkjet process.

再者,使本發明的感光性樹脂組成物硬化而成的遮光膜也可作為液晶顯示裝置的黑色柱狀間隔物來使用。例如,也可使用單一的黑色抗蝕劑來製作多個膜厚不同的部分,使其中一者作為間隔物發揮功能,使另一者作為黑色矩陣發揮功能。In addition, the light-shielding film which hardened the photosensitive resin composition of this invention can also be used as a black columnar spacer of a liquid crystal display device. For example, a plurality of portions with different film thicknesses may be formed using a single black resist, and one may function as a spacer and the other may function as a black matrix.

對於基於感光性樹脂組成物的塗佈/乾燥的遮光膜的成膜方法的各步驟進行具體例示。Each step of the film-forming method of the light-shielding film by coating/drying of the photosensitive resin composition will be specifically exemplified.

作為將感光性樹脂組成物塗佈於基板上的方法,也可採用公知的溶液浸漬法、噴霧法、使用輥塗佈機、圓盤塗佈機(Land coater machine)、狹縫塗佈機或旋轉機的方法等任一方法。在利用這些方法塗佈為所期望的厚度後,將溶劑去除(預烘烤),由此形成被膜。預烘烤是通過利用烘箱、加熱板等進行的加熱、真空乾燥或者這些的組合而進行。預烘烤中的加熱溫度及加熱時間可根據使用的溶劑而適宜選擇,例如優選為在80℃~120℃下進行1分鐘~10分鐘。As a method of applying the photosensitive resin composition on the substrate, a known solution dipping method, spray method, use of a roll coater, a land coater machine, a slit coater, or a Any method such as the method of the rotating machine. After coating to a desired thickness by these methods, the solvent is removed (pre-baking) to form a film. Prebaking is performed by heating with an oven, a hot plate, etc., vacuum drying, or a combination of these. The heating temperature and heating time in the prebaking can be appropriately selected according to the solvent to be used, but, for example, it is preferably performed at 80° C. to 120° C. for 1 minute to 10 minutes.

作為曝光中所使用的放射線,例如可使用可見光線、紫外線、遠紫外線、電子束、X射線等,放射線的波長範圍優選為250 nm~450 nm。另外,作為適合於所述鹼顯影的顯影液,例如可使用碳酸鈉、碳酸鉀、氫氧化鉀、二乙醇胺、四甲基氫氧化銨等的水溶液。這些顯影液可根據樹脂層的特性而適宜選擇,但視需要添加界面活性劑也是有效的。顯影溫度優選為20℃~35℃,可使用市售的顯影機或超音波清洗機等精密地形成微細的圖像。再者,在鹼顯影後,通常進行水洗。作為顯影處理法,可應用噴淋顯影法、噴霧顯影法、浸漬(dip)顯影法、水坑式(puddle)顯影法等。As radiation used for exposure, for example, visible rays, ultraviolet rays, extreme ultraviolet rays, electron beams, X-rays, etc. can be used, and the wavelength range of the radiation is preferably 250 nm to 450 nm. Moreover, as a developing solution suitable for the said alkali image development, the aqueous solution of sodium carbonate, potassium carbonate, potassium hydroxide, diethanolamine, tetramethylammonium hydroxide, etc. can be used, for example. These developing solutions can be appropriately selected according to the properties of the resin layer, but it is also effective to add a surfactant as needed. The developing temperature is preferably 20° C. to 35° C., and a fine image can be precisely formed using a commercially available developing machine, an ultrasonic cleaner, or the like. In addition, water washing is usually performed after alkali development. As the development treatment method, a shower development method, a spray development method, a dip development method, a puddle development method, or the like can be applied.

如此進行顯影後,在180℃~250℃下以20分鐘~100分鐘進行熱處理(後烘烤)。所述後烘烤是出於提高經圖案化的遮光膜與基板的密合性等目的而進行。其與預烘烤同樣地,可通過利用烘箱、加熱板等進行加熱來進行。本發明的經圖案化的遮光膜經過基於光微影法的各步驟而形成。而且,通過熱使聚合或硬化(有時將兩者合起來稱為硬化)完結,可獲得具有所期望的圖案的遮光膜。After developing in this way, heat treatment (post-baking) is performed at 180° C. to 250° C. for 20 minutes to 100 minutes. The post-baking is performed for the purpose of improving the adhesiveness between the patterned light-shielding film and the substrate, and the like. It can be performed by heating with an oven, a hotplate, etc. similarly to prebaking. The patterned light-shielding film of the present invention is formed through various steps based on a photolithography method. Furthermore, the light-shielding film which has a desired pattern can be obtained by completion|finishing superposition|polymerization or hardening (it may be called hardening together) by heat.

如上所述,本發明的黑色抗蝕劑用感光性樹脂組成物不僅適合於通過曝光、鹼顯影等操作來形成微細的圖案,而且即便利用以往的網版印刷形成圖案,也可同樣獲得遮光性、密合性、電絕緣性、耐熱性、耐化學品性優異的遮光膜。As described above, the photosensitive resin composition for a black resist of the present invention is not only suitable for forming fine patterns by operations such as exposure and alkali development, but also can obtain light-shielding properties in the same manner even when patterns are formed by conventional screen printing. , Adhesion, electrical insulation, heat resistance, chemical resistance excellent light-shielding film.

本發明的黑色抗蝕劑用感光性樹脂組成物可適宜用作塗佈材料。尤其是,液晶的顯示裝置或攝影元件中所使用的彩色濾光片用油墨、及由所述油墨形成的遮光膜作為彩色濾光片、液晶投影用的黑色矩陣等而有用。另外,本發明的黑色抗蝕劑用感光性樹脂組成物除了用作彩色液晶顯示器的彩色濾光片油墨以外,還可用作有機電致發光(electroluminescence,EL)元件所代表的有機電場發光裝置、彩色液晶顯示裝置、彩色傳真機、影像感測器等各種多色顯示體中的各色分劃用或遮光用的油墨材料。根據本發明的彩色濾光片,可降低著色層(包含黑色抗蝕劑層)與基板的界面處的外部光的反射、或例如用於有機EL元件時來自元件的發光的反射。即,可通過降低外部光的反射來實現亮處對比度的提高、或通過改善來自發光側的光取出效率來實現發光效率的提高。 [實施例]The photosensitive resin composition for black resists of this invention can be used suitably as a coating material. In particular, inks for color filters used in liquid crystal display devices and imaging elements, and light-shielding films formed of the inks are useful as color filters, black matrices for liquid crystal projection, and the like. In addition, the photosensitive resin composition for a black resist of the present invention can be used not only as a color filter ink for a color liquid crystal display, but also as an organic electroluminescence device represented by an organic electroluminescence (EL) element. , Color liquid crystal display devices, color facsimile machines, image sensors and other multi-color display materials for color division or shading ink materials. According to the color filter of the present invention, reflection of external light at the interface between the colored layer (including the black resist layer) and the substrate, or reflection of light emitted from the element when used in an organic EL element, for example, can be reduced. That is, it is possible to improve the contrast at bright spots by reducing the reflection of external light, or to improve the luminous efficiency by improving the light extraction efficiency from the light emitting side. [Example]

以下,基於實施例及比較例對本發明的實施形態進行具體說明,但本發明並不限定於這些實施例及比較例。再者,在本發明中,關於各成分的含量,在小數第一位為0時,有時省略小數點以後的表述。Hereinafter, embodiments of the present invention will be specifically described based on Examples and Comparative Examples, but the present invention is not limited to these Examples and Comparative Examples. In addition, in this invention, regarding the content of each component, when the 1st decimal place is 0, the expression after a decimal point may be abbreviate|omitted.

首先,自作為(A)成分的含有不飽和基的鹼可溶性樹脂的合成例開始進行說明,這些合成例中的樹脂的評價只要並無說明則如以下般進行。First, the synthesis example of the unsaturated group-containing alkali-soluble resin as the component (A) will be described, and the evaluation of the resin in these synthesis examples is performed as follows unless otherwise described.

[固體成分濃度] 使合成例中所獲得的樹脂溶液1 g含浸於玻璃濾光片〔重量:W0 (g)〕並稱重〔W1 (g)〕,根據在160℃下加熱2小時後的重量〔W2 (g)〕並利用下述式子進行求出。 固體成分濃度(重量%)=100×(W2 -W0 )/(W1 -W0[Solid Content Concentration] 1 g of the resin solution obtained in the synthesis example was impregnated into a glass filter [weight: W 0 (g)], weighed [W 1 (g)], and heated at 160° C. for 2 hours according to The resulting weight [W 2 (g)] was obtained by the following formula. Solid content concentration (% by weight)=100×(W 2 -W 0 )/(W 1 -W 0 )

[酸值] 將樹脂溶液溶解於二噁烷中,使用電位差滴定裝置“COM-1600”(平沼產業股份有限公司製造),並利用1/10N-KOH水溶液進行滴定而求出。[acid value] The resin solution was dissolved in dioxane, and a potentiometric titration device "COM-1600" (manufactured by Hiranuma Sangyo Co., Ltd.) was used to titrate it with a 1/10 N-KOH aqueous solution to obtain it.

[分子量] 利用凝膠滲透色譜法(Gel Permeation Chromatography,GPC)“HLC-8220GPC”(東曹(Tosoh)股份有限公司製造,溶媒:四氫呋喃,管柱:TSKgelSuper H-2000(2根)+TSKgelSuper H-3000(1根)+TSKgelSuper H-4000(1根)+TSKgelSuper H-5000(1根)(東曹(Tosoh)股份有限公司製造),溫度:40℃,速度:0.6 ml/min)進行測定,並作為標準聚苯乙烯(東曹(Tosoh)股份有限公司製造,PS-寡聚物套組)換算值來求出重量平均分子量(Mw)。[Molecular weight] Gel Permeation Chromatography (GPC) "HLC-8220GPC" (manufactured by Tosoh Co., Ltd., solvent: tetrahydrofuran, column: TSKgelSuper H-2000 (2) + TSKgelSuper H-3000 ( 1 piece) + TSKgelSuper H-4000 (1 piece) + TSKgelSuper H-5000 (1 piece) (manufactured by Tosoh Co., Ltd., temperature: 40°C, speed: 0.6 ml/min) were measured and used as The weight average molecular weight (Mw) was calculated|required by the conversion value of standard polystyrene (Tosoh Co., Ltd. product, PS-oligomer set).

[平均粒子徑] 二氧化矽粒子的平均粒子徑是使用動態光散射法的粒度分佈計“粒徑分析儀FPAR-1000”(大塚電子股份有限公司製造),並利用累積法來求出。[average particle size] The average particle diameter of the silica particles was determined by the accumulation method using a particle size distribution meter "Particle Size Analyzer FPAR-1000" (manufactured by Otsuka Electronics Co., Ltd.) using the dynamic light scattering method.

合成例及比較合成例中使用的簡稱如下所述。 BPFE:雙酚芴型環氧化合物(9,9-雙(4-羥基苯基)芴與氯甲基氧雜環丙烷的反應產物;通式(1)的化合物中,X為芴-9,9-二基、R1 ~R4 為氫的化合物) AA:丙烯酸 BPDA:3,3',4,4'-聯苯基四羧酸二酐 THPA:四氫鄰苯二甲酸酐 TEAB:溴化四乙基銨 PGMEA:丙二醇單甲醚乙酸酯Abbreviations used in the synthesis examples and comparative synthesis examples are as follows. BPFE: bisphenol fluorene type epoxy compound (the reaction product of 9,9-bis(4-hydroxyphenyl) fluorene and chloromethyl oxirane; in the compound of general formula (1), X is fluorene-9, 9-diyl, R 1 to R 4 are hydrogen compounds) AA: Acrylic acid BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride THPA: Tetrahydrophthalic anhydride TEAB: Bromine Tetraethylammonium PGMEA: Propylene Glycol Monomethyl Ether Acetate

[合成例] 在帶有回流冷卻器的500 ml四口燒瓶中,投入BPFE(114.4 g、0.23莫耳)、AA(33.2 g、0.46莫耳)、PGMEA(157 g)及TEAB(0.48 g),在100℃~105℃下攪拌20小時使其反應。繼而,在燒瓶內投入BPDA(35.3 g、0.12莫耳)、THPA(18.3 g、0.12莫耳),在120℃~125℃下攪拌6小時,獲得含有不飽和基的鹼可溶性樹脂(A)。所獲得的樹脂溶液的固體成分濃度為56.0質量%,酸值(固體成分換算)為103 mgKOH/g,通過GPC分析而獲得的Mw為3600。[Synthesis example] In a 500 ml four-neck flask with a reflux cooler, put BPFE (114.4 g, 0.23 mol), AA (33.2 g, 0.46 mol), PGMEA (157 g) and TEAB (0.48 g), at 100 ° C It was reacted by stirring at ~105°C for 20 hours. Next, BPDA (35.3 g, 0.12 mol) and THPA (18.3 g, 0.12 mol) were put into the flask, and the mixture was stirred at 120° C. to 125° C. for 6 hours to obtain an unsaturated group-containing alkali-soluble resin (A). The solid content concentration of the obtained resin solution was 56.0 mass %, the acid value (solid content conversion) was 103 mgKOH/g, and the Mw obtained by GPC analysis was 3600.

以表1中記載的調配量(單位為質量%)製備實施例1~實施例10、比較例1~比較例7的感光性樹脂組成物。表1中所使用的調配成分如下所述。The photosensitive resin compositions of Examples 1 to 10 and Comparative Examples 1 to 7 were prepared at the compounding amounts (units are mass %) described in Table 1. The formulation ingredients used in Table 1 are as follows.

(含有不飽和基的鹼可溶性樹脂) (A):所述合成例中所獲得的含有不飽和基的鹼可溶性樹脂溶液(固體成分濃度為56.0質量%)(Alkali-soluble resin containing unsaturated group) (A): The unsaturated group-containing alkali-soluble resin solution obtained in the above synthesis example (solid content concentration: 56.0% by mass)

(光聚合性單體) (B):二季戊四醇六丙烯酸酯與二季戊四醇五丙烯酸酯的混合物(亞羅尼斯(Aronix)M-405,東亞合成股份有限公司製造,“Aronix”為東亞合成股份有限公司的註冊商標)(photopolymerizable monomer) (B): A mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (Aronix M-405, manufactured by Toagosei Corporation, "Aronix" is a registered trademark of Toagosei Corporation)

(光聚合起始劑) (C)-1:乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)(豔佳固(Irgacure)OXE-02,日本巴斯夫(BASF Japan)公司製造,“Irgacure”為日本巴斯夫(BASF Japan)公司的註冊商標) (C)-2:艾迪科亞科魯茲(Adeka arkls)NCI-831,艾迪科(ADEKA)股份有限公司製造,“Adeka arkls”為艾迪科(ADEKA)股份有限公司的註冊商標)(photopolymerization initiator) (C)-1: Ethanone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-, 1-(O-acetyloxime ) (Irgacure OXE-02, manufactured by BASF Japan, "Irgacure" is a registered trademark of BASF Japan) (C)-2: Adeka arkls NCI-831, manufactured by Adeka Corporation, "Adeka arkls" is a registered trademark of Adeka Corporation)

(碳黑分散液) (D):碳黑濃度為25.0質量%,高分子分散劑濃度為2.0質量%,分散樹脂(合成例的鹼可溶性樹脂(A)(固體成分為8.0質量%))的PGMEA分散液(固體成分為35.0質量%)(carbon black dispersion) (D): Carbon black concentration of 25.0 mass %, polymer dispersant concentration of 2.0 mass %, PGMEA dispersion liquid (solid content) of dispersing resin (alkali-soluble resin (A) of synthesis example (solid content: 8.0 mass %)) 35.0 mass %)

(E):二氧化矽粒子的PGMEA分散液“YA050C”(愛德馬泰克(admatech)股份有限公司製造,固體成分濃度為30質量%,平均粒子徑50 nm)(E): PGMEA dispersion liquid "YA050C" of silica particles (manufactured by Admatech Co., Ltd., solid content concentration: 30 mass %, average particle diameter: 50 nm)

(分散劑) (F)-1:迪斯帕畢克(DISPERBYK)-140(固體成分濃度為52質量%) (F)-2:迪斯帕畢克(DISPERBYK)-142(固體成分濃度為60質量%) (F)-3:迪斯帕畢克(DISPERBYK)-9076(固體成分濃度為100質量%) (F)-4:迪斯帕畢克(DISPERBYK)-167(固體成分濃度為52質量%) (F)-5:迪斯帕畢克(DISPERBYK)-170(固體成分濃度為30質量%) (F)-6:迪斯帕畢克(DISPERBYK)-180(固體成分濃度為100質量%) (F)-7:迪斯帕畢克(DISPERBYK)-9077(固體成分濃度為100質量%) 再者,(F)-1~(F)-7均為日本畢克化學(BYK-Chemie Japan)公司製造,“DISPERBYK”為日本畢克化學(BYK-Chemie Japan)公司的註冊商標。(Dispersant) (F)-1: DISPERBYK-140 (solid content concentration: 52 mass %) (F)-2: DISPERBYK-142 (solid content concentration: 60 mass %) (F)-3: DISPERBYK-9076 (solid content concentration: 100 mass %) (F)-4: DISPERBYK-167 (solid content concentration: 52 mass %) (F)-5: DISPERBYK-170 (solid content concentration: 30 mass %) (F)-6: DISPERBYK-180 (solid content concentration: 100 mass %) (F)-7: DISPERBYK-9077 (solid content concentration: 100% by mass) Furthermore, (F)-1 to (F)-7 are all manufactured by BYK-Chemie Japan, and "DISPERBYK" is a registered trademark of BYK-Chemie Japan.

另外,(F)-1為具有酸性聚合物的烷基銨鹽結構的分散劑,(F)-2為高分子共聚物的磷酸酯鹽型分散劑,(F)-3為含有具有酸基的高分子共聚物的烷基銨鹽結構的分散劑,(F)-4為胺基甲酸酯系分散劑,(F)-5為具有酸性官能基的高分子分散劑,(F)-6為包含酸基的共聚物的烷醇銨鹽型分散劑,(F)-7為具有胺值的高分子共聚物。In addition, (F)-1 is a dispersant having an alkylammonium salt structure of an acidic polymer, (F)-2 is a phosphate salt type dispersant of a polymer copolymer, and (F)-3 is a dispersant having an acid group (F)-4 is a urethane-based dispersant, (F)-5 is a polymer dispersant with an acidic functional group, (F)- 6 is an alkanolammonium salt type dispersant of a copolymer containing an acid group, and (F)-7 is a polymer copolymer having an amine value.

(溶劑) (G)-1:丙二醇單甲醚乙酸酯(PGMEA) (G)-2:環己酮(ANON)(solvent) (G)-1: Propylene glycol monomethyl ether acetate (PGMEA) (G)-2: Cyclohexanone (ANON)

[表1] 調配成分 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 比較例 比較例 比較例 比較例 比較例 比較例 比較例 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 (A) 5.3 5.3 5.3 5.3 5.4 5.2 5.0 5.4 5.2 5.0 5.4 5.3 5.3 5.3 5.3 5.4 5.4 (B) 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.7 1.6 1.6 1.6 1.6 1.7 1.7 (C)-1 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 (C)-2 0.3 (D) 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 (E) 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 (F)-1 0.11 0.06 0.35 0.58 0.01 (F)-2 0.10 (F)-3 0.06 0.06 0.03 0.18 0.30 0.006 (F)-4 0.11 (F)-5 0.20 (F)-6 0.06 (F)-7 0.06 (G)-1 28.0 28.0 28.0 28.0 27.9 27.8 27.8 28.0 28.0 28.1 27.9 28.0 27.9 28.0 28.0 27.9 27.9 (G)-2 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 F成分的 特性值 酸值 73 46 38 38 73 73 73 38 38 38 - - 11 94 - 73 38 胺值 76 43 44 44 76 76 76 44 44 44 - 13 - 94 48 76 44 mE /mD 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 mF /mE 0.10 0.10 0.10 0.10 0.05 0.30 0.50 0.05 0.30 0.50 - 0.10 0.10 0.10 0.10 0.01 0.01 [Table 1] Ingredients Example Example Example Example Example Example Example Example Example Example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 (A) 5.3 5.3 5.3 5.3 5.4 5.2 5.0 5.4 5.2 5.0 5.4 5.3 5.3 5.3 5.3 5.4 5.4 (B) 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.6 1.7 1.6 1.6 1.6 1.6 1.7 1.7 (C)-1 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 (C)-2 0.3 (D) 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 24.0 (E) 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 2.0 (F)-1 0.11 0.06 0.35 0.58 0.01 (F)-2 0.10 (F)-3 0.06 0.06 0.03 0.18 0.30 0.006 (F)-4 0.11 (F)-5 0.20 (F)-6 0.06 (F)-7 0.06 (G)-1 28.0 28.0 28.0 28.0 27.9 27.8 27.8 28.0 28.0 28.1 27.9 28.0 27.9 28.0 28.0 27.9 27.9 (G)-2 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 38.7 Characteristic value of F component Acid value 73 46 38 38 73 73 73 38 38 38 - - 11 94 - 73 38 Amine value 76 43 44 44 76 76 76 44 44 44 - 13 - 94 48 76 44 m E /m D 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 mF / mE 0.10 0.10 0.10 0.10 0.05 0.30 0.50 0.05 0.30 0.50 - 0.10 0.10 0.10 0.10 0.01 0.01

[評價] 如以下那樣製作用於評價的將黑色抗蝕劑用感光性樹脂組成物硬化而成的遮光膜。[evaluate] The light-shielding film which hardened the photosensitive resin composition for black resists for evaluation was produced as follows.

(評價用的遮光膜的製成) 使用旋轉塗佈機,以加熱硬化處理後的膜厚為1.2 μm的方式將表1所示的感光性樹脂組成物塗佈於預先利用低壓水銀燈照射波長254 nm的照度1000 mJ/cm2 的紫外線而清洗了表面的、125 mm×125 mm的玻璃基板“#1737”(康寧(corning)公司製造)(以下,稱為“玻璃基板”)上,使用加熱板在90℃下進行1分鐘預烘烤,製作遮光膜。繼而,將曝光間隙調整為100 μm,在乾燥遮光膜上被覆線/空間=10 μm/50 μm的負型光罩幕,利用i射線且照度30 mW/cm2 的超高壓水銀燈照射50 mJ/cm2 的紫外線,進行感光部分的光硬化反應。(Preparation of light-shielding film for evaluation) Using a spin coater, the photosensitive resin composition shown in Table 1 was applied on a pre-irradiated wavelength of 254 μm with a low-pressure mercury lamp so that the film thickness after heat curing treatment was 1.2 μm. On the glass substrate "#1737" (manufactured by Corning) (hereinafter, referred to as "glass substrate") of 125 mm x 125 mm, the surface of which was cleaned with ultraviolet rays with an illuminance of 1000 mJ/cm 2 , using a heating The plate was pre-baked at 90° C. for 1 minute to produce a light-shielding film. Then, the exposure gap was adjusted to 100 μm, and a negative mask with line/space=10 μm/50 μm was covered on the dry light-shielding film, and 50 mJ / cm 2 of ultraviolet light, the photosensitive part of the photohardening reaction.

繼而,對曝光後的所述遮光膜,在25℃下利用0.04%氫氧化鉀溶液以1 kgf/cm2 的噴淋壓進行自圖案開始顯現的顯影時間(間斷時間(break time)=BT)起+10秒及+20秒的顯影處理,之後,進行5 kgf/cm2 的噴霧水洗,去除所述遮光膜的未曝光部分而在玻璃基板上形成遮光膜圖案,使用熱風乾燥機在230℃下正式硬化(後烘烤)30分鐘,獲得實施例1~實施例10、以及比較例1~比較例7的評價用的遮光膜。Next, the light-shielding film after exposure was subjected to a development time (break time=BT) at 25° C. with a spray pressure of 1 kgf/cm 2 with a 0.04% potassium hydroxide solution from the start of pattern development. After developing treatment for +10 seconds and +20 seconds, spray washing at 5 kgf/cm 2 was performed to remove the unexposed portion of the light-shielding film to form a light-shielding film pattern on the glass substrate, using a hot air dryer at 230 ° C. The main hardening (post-baking) was performed for 30 minutes, and the light-shielding films for evaluation of Examples 1-10 and Comparative Examples 1-7 were obtained.

關於所製作的所述評價用的遮光膜,針對以下項目進行評價。About the produced light-shielding film for evaluation, the following items were evaluated.

[圖案直線性評價] (評價方法) 對於正式硬化(後烘烤)後的10 μm罩幕圖案,使用光學顯微鏡及掃描式電子顯微鏡(scanning electron microscope,SEM)觀察圖案邊緣部分呈鋸齒的情況。再者,圖案直線性的評價是在BT+10秒的情況與BT+20秒的情況下進行。再者,將○以上設為合格。[Pattern linearity evaluation] (Evaluation method) For the 10 μm mask pattern after main hardening (post-baking), use an optical microscope and a scanning electron microscope (SEM) to observe the serration at the edge of the pattern. In addition, the evaluation of the pattern linearity was performed in the case of BT+10 second and the case of BT+20 second. In addition, ○ or more was set as a pass.

(評價基準) ○:未確認到圖案邊緣部分呈鋸齒狀 △:局部確認到圖案邊緣部分呈鋸齒狀 ×:遍佈整體而確認到圖案邊緣部分呈鋸齒狀(Evaluation Criteria) ○: No zigzag pattern was observed at the edge of the pattern △: The edge of the pattern is partially serrated ×: It is confirmed that the pattern edge portion is zigzag throughout the whole

[光密度評價] (評價方法) 使用麥克貝斯(Macbeth)透過濃度計,求出所製作的評價用的遮光膜的光密度(optical density,OD)。另外,測定形成於基板上的遮光膜的膜厚,並將用光密度(OD)的值除以膜厚而得的值設為OD/μm。[Optical Density Evaluation] (Evaluation method) The optical density (optical density, OD) of the produced light-shielding film for evaluation was calculated|required using a Macbeth transmission densitometer. In addition, the film thickness of the light-shielding film formed on the substrate was measured, and the value obtained by dividing the value of the optical density (OD) by the film thickness was set to OD/μm.

光密度(OD)是利用以下式(1)來算出。 光密度(OD)=-log10 T  (1) (T表示透過率)The optical density (OD) was calculated by the following formula (1). Optical Density (OD)=-log 10 T (1) (T represents transmittance)

[反射率評價] (評價方法) 對於與所述評價用的遮光膜同樣地製作的帶有遮光膜的基板,使用紫外可見紅外分光光度計“UH4150”(日立高科技科學(Hitachi High-Tech Science)股份有限公司製造)以入射角2°測定基板(玻璃基板)側的反射率。再者,將△以上設為合格。 (評價基準) ○:帶有遮光膜的基板的基板側的反射率為5%以下 △:帶有遮光膜的基板的基板側的反射率超過5%且小於6% ×:帶有遮光膜的基板的基板側的反射率為6%以上[Reflectivity evaluation] (Evaluation method) About the board|substrate with a light-shielding film produced similarly to the light-shielding film for the said evaluation, the incident angle was measured using the ultraviolet-visible-infrared spectrophotometer "UH4150" (manufactured by Hitachi High-Tech Science Co., Ltd.). 2° The reflectance on the substrate (glass substrate) side was measured. In addition, △ or more was set as a pass. (Evaluation Criteria) ○: The reflectance on the substrate side of the substrate with the light-shielding film is 5% or less △: The reflectance on the substrate side of the substrate with the light-shielding film is more than 5% and less than 6% ×: The reflectance on the substrate side of the substrate with the light-shielding film is 6% or more

[凝聚異物評價] (評價方法) 對正式硬化(後烘烤)後的評價用的遮光膜,使用光學顯微鏡進行觀察,確認有無凝聚異物。再者,將△以上設為合格。[Assessment of Agglomerated Foreign Matter] (Evaluation method) The light-shielding film for evaluation after main curing (post-baking) was observed with an optical microscope, and the presence or absence of aggregated foreign matter was confirmed. In addition, △ or more was set as a pass.

(評價基準) ○:在遮光膜中未確認到凝聚異物 △:在遮光膜的一部分中確認到凝聚異物 ×:在遮光膜的整面中確認到凝聚異物(Evaluation Criteria) ○: Aggregated foreign matter was not observed in the light-shielding film △: Aggregated foreign matter was observed in a part of the light-shielding film ×: Aggregated foreign matter was observed on the entire surface of the light-shielding film

將所述評價結果示於表2中。The evaluation results are shown in Table 2.

[表2] 調配成分 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 比較例 比較例 比較例 比較例 比較例 比較例 比較例 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 光密度(OD) 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 反射率/ 基板側(%) 4.8 (〇) 4.8 (〇) 4.9 (〇) 4.9 (〇) 4.8 (〇) 4.9 (〇) 5.5 (△) 4.8 (〇) 5.0 (〇) 5.6 (△) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.9 (〇) 圖案 直線性 BT+10 BT+20 × × × 凝聚異物評價 × × × × [Table 2] Ingredients Example Example Example Example Example Example Example Example Example Example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 Optical Density (OD) 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 Reflectance / Substrate side (%) 4.8 (〇) 4.8 (〇) 4.9 (〇) 4.9 (〇) 4.8 (〇) 4.9 (〇) 5.5 (△) 4.8 (〇) 5.0 (〇) 5.6 (△) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.8 (〇) 4.9 (〇) Pattern linearity BT+10 BT+20 × × × Agglomerated foreign matter evaluation × × × ×

如實施例1~實施例10所示,得知通過使用酸值及胺值均為10 mgKOH/g以上且80 mgKOH/g以下的分散劑,可形成高精細的圖案。另一方面,得知在酸值及胺值均大於80 mgKOH/g的情況下,在顯影液中的溶解性過於變高,因此圖案的直線性惡化。As shown in Examples 1 to 10, it was found that a high-definition pattern can be formed by using a dispersant having both an acid value and an amine value of 10 mgKOH/g or more and 80 mgKOH/g or less. On the other hand, when both the acid value and the amine value are more than 80 mgKOH/g, the solubility in the developing solution becomes too high, and the linearity of the pattern is thus degraded.

另外,如實施例1~實施例10所示,得知與應用僅具有胺值的分散劑的比較例2、比較例5相比較,消除了圖案邊緣部分呈鋸齒狀的情況。認為其原因在於:通過使分散劑吸附於二氧化矽粒子,有降低在顯影液中的溶解性的傾向,但通過應用具有酸值及胺值的分散劑,而確保二氧化矽粒子在顯影液中的溶解性。Moreover, as shown in Example 1 - Example 10, compared with the comparative example 2 and the comparative example 5 which applied only the dispersing agent which has an amine value, it turns out that the zigzag shape of a pattern edge part is eliminated. The reason for this is considered to be that the solubility in the developer tends to decrease by adsorbing the dispersant to the silica particles, but the application of a dispersant having an acid value and an amine value ensures that the silica particles are soluble in the developer. solubility in .

另外,如實施例1~實施例10所示,得知通過使用酸值及胺值均為10 mgKOH/g以上且80 mgKOH/g以下的分散劑,可提高二氧化矽粒子的分散穩定性,抑制凝聚異物的產生。尤其是,得知,在使用具有烷基銨鹽結構的高分子分散劑的實施例1、實施例3~實施例10中,可顯著抑制源自二氧化矽粒子的凝聚異物。認為其原因在於:通過所述分散劑而有效地保護二氧化矽粒子表面所存在的矽烷醇基,改善在黑色抗蝕劑用感光性組成物中的分散穩定性。In addition, as shown in Examples 1 to 10, it was found that the dispersion stability of silica particles can be improved by using a dispersant having an acid value and an amine value of 10 mgKOH/g or more and 80 mgKOH/g or less. Suppresses the generation of agglomerated foreign matter. In particular, in Example 1 and Example 3 to Example 10 using a polymer dispersant having an alkylammonium salt structure, it was found that aggregation of foreign substances derived from silica particles can be significantly suppressed. The reason for this is considered to be that the silanol groups present on the surfaces of the silica particles are effectively protected by the dispersant, and the dispersion stability in the photosensitive composition for black resists is improved.

如實施例1~實施例10所示,得知通過將(F)分散劑的總質量(mF )相對於(E)二氧化矽粒子的總質量(mE )的比例(mF /mE )設為0.02~0.6,可將玻璃基板側的反射率抑制為5%以下,並且可抑制源自二氧化矽粒子的凝聚異物。若mF /mE 小於所述範圍,則二氧化矽粒子的分散穩定性不充分,會產生凝聚異物。另一方面,若mF /mE 大於所述範圍,則由於二氧化矽粒子的相容性過於變高,因此並不偏在於玻璃基板附近,玻璃基板側的反射率大於5%。 [產業上的可利用性]As shown in Examples 1 to 10, the ratio (m F /m) of the total mass (m F ) of the (F) dispersant to the total mass (m E ) of the (E) silica particles was found E ) When it is set to 0.02 to 0.6, the reflectance on the glass substrate side can be suppressed to 5% or less, and the aggregated foreign matter derived from the silica particles can be suppressed. If mF / mE is less than the above-mentioned range, the dispersion stability of the silica particles is insufficient, and aggregated foreign matter may be generated. On the other hand, when mF / mE is larger than the above-mentioned range, the compatibility of the silica particles becomes too high, so that it is not concentrated in the vicinity of the glass substrate, and the reflectance on the glass substrate side is more than 5%. [Industrial Availability]

根據本發明的感光性樹脂組成物,可提供一種兼具高遮光性及低反射率的黑色矩陣用感光性樹脂組成物及使用其的遮光膜以及彩色濾光片、觸控面板。另外,根據所述彩色濾光片及觸控面板,可提供視認性優異的各種顯示裝置。According to the photosensitive resin composition of this invention, the photosensitive resin composition for black matrices which have both high light-shielding property and low reflectance, and the light-shielding film using the same, a color filter, and a touch panel can be provided. Moreover, according to the said color filter and a touch panel, various display apparatuses excellent in visibility can be provided.

without

Claims (10)

一種黑色抗蝕劑用感光性樹脂組成物,包含: (A)含有不飽和基的感光性樹脂; (B)具有至少兩個以上的不飽和鍵的光聚合性單體; (C)光聚合起始劑; (D)選自由黑色顏料、混色顏料及遮光材料所組成的群組中的至少一種遮光成分; (E)二氧化矽粒子;以及 (F)分散劑, 所述(F)分散劑具有酸值及胺值,所述酸值及所述胺值均為10 mgKOH/g以上且80 mgKOH/g以下,所述(F)分散劑的總質量(mF )相對於所述(E)二氧化矽粒子的總質量(mE )的比例(mF /mE )為0.02~0.60。A photosensitive resin composition for a black resist, comprising: (A) a photosensitive resin containing an unsaturated group; (B) a photopolymerizable monomer having at least two or more unsaturated bonds; (C) photopolymerization an initiator; (D) at least one light-shielding component selected from the group consisting of black pigments, color mixing pigments, and light-shielding materials; (E) silica particles; and (F) a dispersant, the (F) dispersing agent The agent has an acid value and an amine value, the acid value and the amine value are both 10 mgKOH/g or more and 80 mgKOH/g or less, and the total mass (m F ) of the (F) dispersant is relative to the ( E) The ratio (m F /m E ) of the total mass (m E ) of the silica particles is 0.02 to 0.60. 如請求項1所述的黑色抗蝕劑用感光性樹脂組成物,其中所述(A)含有不飽和基的感光性樹脂為使下述通式(1)所表示的由雙酚類衍生的具有兩個縮水甘油醚基的環氧化合物與(甲基)丙烯酸的反應產物、進而和多元羧酸或其酐進行反應而獲得的含有不飽和基的感光性樹脂,
Figure 03_image010
(式(1)中,R1 、R2 、R3 及R4 分別獨立地為氫原子、碳數1~5的烷基或鹵素原子的任一者,X為-CO-、-SO2 -、-C(CF3 )2 -、-Si(CH3 )2 -、-CH2 -、-C(CH3 )2 -、-O-、通式(2)所表示的芴-9,9-二基或單鍵,l為0~10的整數);
Figure 03_image012
The photosensitive resin composition for black resists according to claim 1, wherein the (A) unsaturated group-containing photosensitive resin is a bisphenol-derived resin represented by the following general formula (1). An unsaturated group-containing photosensitive resin obtained by reacting a reaction product of an epoxy compound having two glycidyl ether groups with (meth)acrylic acid, and further reacting with a polyvalent carboxylic acid or its anhydride,
Figure 03_image010
(In formula (1), R 1 , R 2 , R 3 and R 4 are each independently any one of a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X is -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, fluorene-9 represented by the general formula (2), 9-diradical or single bond, l is an integer from 0 to 10);
Figure 03_image012
.
如請求項1或請求項2所述的黑色抗蝕劑用感光性樹脂組成物,其中所述(F)分散劑為具有烷基銨鹽結構的高分子化合物。The photosensitive resin composition for a black resist according to claim 1 or claim 2, wherein the (F) dispersant is a polymer compound having an alkylammonium salt structure. 如請求項1或請求項2所述的黑色抗蝕劑用感光性樹脂組成物,其中所述(E)二氧化矽粒子的平均粒子徑為1 nm~100 nm。The photosensitive resin composition for a black resist according to claim 1 or claim 2, wherein the (E) silica particles have an average particle diameter of 1 nm to 100 nm. 如請求項1或請求項2所述的黑色抗蝕劑用感光性樹脂組成物,其中所述(E)二氧化矽粒子的總質量(mE )相對於所述(D)遮光成分的總質量(mD )的比例(mE /mD )為0.01~0.20。The photosensitive resin composition for a black resist according to claim 1 or claim 2, wherein the total mass (m E ) of the (E) silica particles is relative to the total mass of the (D) light-shielding component. The ratio (m E /m D ) of the mass (m D ) is 0.01 to 0.20. 一種製造方法,其為黑色抗蝕劑用感光性樹脂組成物的製造方法,其中,將 (A)含有不飽和基的感光性樹脂、 (B)光聚合性單體、 (C)光聚合起始劑、 (D)使遮光成分分散於溶劑中而成的遮光成分分散體、以及 (E)使二氧化矽粒子分散於溶劑中而成的二氧化矽粒子分散體 混合, 所述(E)二氧化矽粒子分散體含有(F)分散劑, 所述(F)分散劑具有酸值及胺值,所述酸值及所述胺值均為10 mgKOH/g以上且80 mgKOH/g以下,所述(F)分散劑的總質量(mF )相對於所述(E)二氧化矽粒子的總質量(mE )的比例(mF /mE )為0.02~0.60。A method for producing a photosensitive resin composition for a black resist, comprising (A) an unsaturated group-containing photosensitive resin, (B) a photopolymerizable monomer, and (C) a photopolymerizable A starting agent, (D) a light-shielding component dispersion obtained by dispersing a light-shielding component in a solvent, and (E) a silica particle dispersion obtained by dispersing silica particles in a solvent are mixed, said (E) The silica particle dispersion contains (F) a dispersant, and the (F) dispersant has an acid value and an amine value, and the acid value and the amine value are both 10 mgKOH/g or more and 80 mgKOH/g or less, The ratio (m F /m E ) of the total mass (m F ) of the (F) dispersant to the total mass (m E ) of the (E) silica particles is 0.02 to 0.60. 一種遮光膜,其是將如請求項1至請求項5中任一項所述的黑色抗蝕劑用感光性樹脂組成物硬化而成。A light-shielding film obtained by curing the photosensitive resin composition for a black resist according to any one of Claims 1 to 5. 一種彩色濾光片,具有如請求項7所述的遮光膜作為黑色矩陣。A color filter having the light-shielding film as claimed in claim 7 as a black matrix. 一種觸控面板,具有如請求項7所述的遮光膜作為黑色矩陣。A touch panel having the light-shielding film according to claim 7 as a black matrix. 一種顯示裝置,具有如請求項8所述的彩色濾光片或如請求項9所述的觸控面板。A display device having the color filter according to claim 8 or the touch panel according to claim 9.
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