TW202349036A - Photosensitive resin composition, cured film thereof, and display component and display device with that film - Google Patents

Photosensitive resin composition, cured film thereof, and display component and display device with that film Download PDF

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TW202349036A
TW202349036A TW112121275A TW112121275A TW202349036A TW 202349036 A TW202349036 A TW 202349036A TW 112121275 A TW112121275 A TW 112121275A TW 112121275 A TW112121275 A TW 112121275A TW 202349036 A TW202349036 A TW 202349036A
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component
acid
light
photosensitive resin
cured film
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岩井航平
小野悠樹
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日商日鐵化學材料股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images

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  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
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  • Structural Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

An object of the present invention is to provide a photosensitive resin composition capable of obtaining a cured film that has high light-shielding properties and low reflectivity and has low brightness. The solution of the present invention is a photosensitive composition, which contains: (A) a resin ingredient, including an unsaturated group-containing alkali-soluble resin (A1), a photopolymerizable compound having at least two unsaturated bonds (A2), and a thermosetting epoxy compound (A3); (B) a light-shielding ingredient, including a black pigment (B1), and magnesium fluoride and/or cryolite fine particles (B2); and (C) a photopolymerizable initiator.

Description

感光性樹脂組成物、硬化膜、顯示器構成要素及顯示裝置 Photosensitive resin composition, cured film, display components and display device

本發明係關於感光性樹脂組成物、硬化膜、顯示器構成要素及顯示裝置。 The present invention relates to a photosensitive resin composition, a cured film, a display component, and a display device.

近年來,相對於以往液晶顯示元件,有利於薄型化、可撓性化且光利用效率較高之有機EL顯示元件(OLED)係備受矚目並實用化。 In recent years, organic EL display elements (OLED), which are thinner, more flexible and have higher light utilization efficiency than conventional liquid crystal display elements, have attracted much attention and have been put into practical use.

如此OLED為了防止外光反射等造成的視覺確認性之降低而具備圓偏光板作為抗反射膜。但若具備圓偏光板,則不僅是外光會被阻隔,有機EL發光的光也會被阻隔,故光的利用效率會大幅降低。因此要求開發一種在不使用圓偏光板下視覺確認性亦良好且可以低耗電使用之OLED。 In order to prevent the reduction of visual visibility caused by external light reflection, OLED has a circular polarizing plate as an anti-reflection film. However, if a circular polarizing plate is provided, not only the external light will be blocked, but also the light emitted by the organic EL will be blocked, so the light utilization efficiency will be greatly reduced. Therefore, there is a need to develop an OLED that has good visual visibility without using a circular polarizing plate and can be used with low power consumption.

在此,利用彩色濾光片(CF)與光的共振效果下,不僅不會阻隔有機EL發光的光,進一步可使光譜成為尖銳且高強度,並可提高亮度及色純度。藉此可期待提高OLED的透過率、改善耗電。又,相較於圓偏光板,CF之膜厚較薄,可使裝置薄膜化。因此嘗試以CF取代圓偏光板。另一方面,CF中黑色矩陣的抗反射功能難謂充分,而強烈要求更好的低反射效果。 Here, the resonance effect of the color filter (CF) and light not only does not block the light emitted by the organic EL, but also makes the spectrum sharp and high-intensity, and improves the brightness and color purity. This can be expected to increase the transmittance of OLED and improve power consumption. In addition, compared with circular polarizing plates, the film thickness of CF is thinner, allowing the device to be thinner. So try to replace the circular polarizer with CF. On the other hand, the anti-reflective function of the black matrix in CF is hardly sufficient, and there is a strong demand for a better low-reflective effect.

至今為止,作為對黑色光阻等感光性樹脂組成物賦予更好的低反射特性之例,在專利文獻1中揭示一種包含疏水性二氧化矽微粒子及特定分散劑(胺甲酸乙酯系分散劑)之黑色感光性樹脂組成物。接著,藉由使用疏水性二氧化矽微粒子及特定分散劑,可形成兼具高遮光性及低反射率之黑色矩陣。 Until now, as an example of imparting better low-reflection characteristics to photosensitive resin compositions such as black photoresists, Patent Document 1 discloses a composition containing hydrophobic silica fine particles and a specific dispersant (urethane dispersant). ) black photosensitive resin composition. Next, by using hydrophobic silica particles and a specific dispersant, a black matrix with both high light-shielding properties and low reflectivity can be formed.

[先前技術文獻] [Prior technical literature]

[專利文獻] [Patent Document]

專利文獻1:日本特開2015-161815號公報。 Patent Document 1: Japanese Patent Application Publication No. 2015-161815.

然而,如專利文獻1所記載般添加二氧化矽填料時,二氧化矽之隔離層會成為光的擴散源,使塗膜之漆黑度降低,有外觀惡化之虞。 However, when a silica filler is added as described in Patent Document 1, the isolation layer of silica becomes a light diffusion source, reducing the blackness of the coating film and possibly deteriorating the appearance.

因此要求兼具低反射率(尤其是以SCI方式取得的反射率較低)及漆黑性的兩者之黑色光阻用感光性樹脂組成物、及其硬化所成之遮光膜、以及彩色濾光片。 Therefore, there is a demand for a photosensitive resin composition for black photoresist that has both low reflectivity (especially low reflectivity obtained by the SCI method) and jet blackness, a light-shielding film formed by curing the same, and a color filter. piece.

本發明係鑑於此點而研究者,目的在於提供可獲得具有高遮光性及低反射率且具有低明度之硬化膜之感光性樹脂組成物、其硬化所成之硬化膜、具有該硬化膜之顯示器構成要素、及具有該顯示器構成要素之顯示裝置。 The present invention was made in view of this point, and it is an object of the present invention to provide a photosensitive resin composition capable of obtaining a cured film having high light-shielding properties, low reflectivity and low brightness, a cured film formed by curing the photosensitive resin composition, and a photosensitive resin composition having the cured film. A display component, and a display device having the display component.

本發明係鑑於上述課題而研究者,作為所添加之填料係添加折射率較低之氟化鎂填料,藉此可賦予更好的低反射效果,且可獲得漆黑性較高之遮光膜。又,漆黑度與明度相關,漆黑度越高則為明度越低的遮光膜。 The present invention was developed in view of the above-mentioned problems. As the added filler, a magnesium fluoride filler with a lower refractive index is added. This can provide a better low-reflection effect and obtain a light-shielding film with high pitch blackness. In addition, the pitch blackness is related to the lightness, and the higher the pitch blackness, the lower the lightness of the light-shielding film.

亦即,本發明主旨如下。 That is, the gist of this invention is as follows.

[1]一種感光性樹脂組成物,係含有: [1] A photosensitive resin composition containing:

(A)樹脂成分,係包含含有不飽和基之鹼可溶性樹脂(A1)、具有至少2個以上不飽和鍵之光聚合性化合物(A2)、及熱硬化性環氧化合物(A3); (A) The resin component includes an alkali-soluble resin (A1) containing an unsaturated group, a photopolymerizable compound (A2) having at least two unsaturated bonds, and a thermosetting epoxy compound (A3);

(B)遮光成分,係含有黑色顏料(B1)、以及氟化鎂及/或冰晶石微粒子(B2);及 (B) The light-shielding component contains black pigment (B1), magnesium fluoride and/or cryolite particles (B2); and

(C)光聚合起始劑。 (C) Photopolymerization initiator.

[2]如[1]所述之感光性樹脂組成物,其中黑色顏料(B1)含有在製作單位OD:1[/μm]且膜厚1μm之塗膜時850nm之透過率為80%以上之黑色顏料(B1a)。 [2] The photosensitive resin composition according to [1], wherein the black pigment (B1) contains a transmittance of 80% or more at 850 nm when a coating film with unit OD: 1 [/μm] and film thickness of 1 μm is produced. Black pigment (B1a).

[3]如[2]所述之感光性樹脂組成物,其中黑色顏料(B1a)為有機黑色顏料。 [3] The photosensitive resin composition according to [2], wherein the black pigment (B1a) is an organic black pigment.

[4]如[1]至[3]中任一項所述之感光性樹脂組成物,其中相對於遮光成分(B)之總質量,氟化鎂及/或冰晶石微粒子(B2)之比率為1至30質量%。 [4] The photosensitive resin composition according to any one of [1] to [3], wherein the ratio of magnesium fluoride and/or cryolite fine particles (B2) to the total mass of the light-shielding component (B) 1 to 30% by mass.

[5]一種硬化膜,係如[1]至[4]中任一項所述之感光性樹脂組成物硬化而成。 [5] A cured film obtained by curing the photosensitive resin composition according to any one of [1] to [4].

[6]一種顯示器構成要素,係具有如[5]所述之硬化膜。 [6] A display component having the cured film according to [5].

[7]一種顯示裝置,係具有如[6]所述之顯示器構成要素。 [7] A display device having the display components described in [6].

根據本發明可提供可獲得具有高遮光性、低反射率及低明度之硬化膜之感光性樹脂組成物、其硬化所成之硬化膜,具有該硬化膜之彩色濾光片及觸控面板、具有該彩色濾光片及觸控面板之顯示裝置。 According to the present invention, it is possible to provide a photosensitive resin composition capable of obtaining a cured film with high light-shielding properties, low reflectivity and low brightness, a cured film formed by curing the composition, a color filter and a touch panel having the cured film, A display device having the color filter and the touch panel.

以下詳細說明本發明。 The present invention will be described in detail below.

本實施型態之(A1)成分之含有不飽和基之鹼可溶性樹脂係於1分子中含有聚合性不飽和基及羧基兩者。只要為上述樹脂,並無特別限定而可廣泛地使用。 The unsaturated group-containing alkali-soluble resin of component (A1) of this embodiment contains both a polymerizable unsaturated group and a carboxyl group in one molecule. It is not particularly limited as long as it is the above-mentioned resin and can be widely used.

上述含有不飽和基之感光性樹脂之例係有:使雙酚類所衍生之具有2個環氧丙基醚基之環氧化合物(以下亦稱為「通式(1)所示雙酚型環氧化合物」)與(甲基)丙烯酸反應,並使所得具有羥基之化合物與多元羧酸或其酐反應,而獲得之環氧基(甲基)丙烯酸酯酸加成物。雙酚類所衍生之環氧化合物係指使雙酚類與環氧鹵丙烷反應而獲得之環氧化合物或其同等物。又,「(甲基)丙烯酸」為丙烯酸及甲基丙烯酸的合稱,表示該等的一者或兩者。 Examples of the above-mentioned photosensitive resin containing an unsaturated group include an epoxy compound having two glycidyl ether groups derived from bisphenols (hereinafter also referred to as "bisphenol type represented by general formula (1)"). The epoxy (meth)acrylate acid adduct obtained by reacting an epoxy compound") with (meth)acrylic acid, and reacting the obtained compound with a hydroxyl group with a polycarboxylic acid or its anhydride. Epoxy compounds derived from bisphenols refer to epoxy compounds obtained by reacting bisphenols with epihalopropane or their equivalents. Moreover, "(meth)acrylic acid" is a collective name for acrylic acid and methacrylic acid, and represents one or both of them.

屬於(A1)成分之含有不飽和基之感光性樹脂較佳為通式(1)所示雙酚型環氧化合物。藉由採用通式(1)所示雙酚型環氧化合物而可獲得良好的顯影特性。 The unsaturated group-containing photosensitive resin belonging to the component (A1) is preferably a bisphenol-type epoxy compound represented by the general formula (1). Good development characteristics can be obtained by using a bisphenol type epoxy compound represented by general formula (1).

Figure 112121275-A0202-12-0004-1
Figure 112121275-A0202-12-0004-1

式(1)中,R1、R2、R3及R4分別獨立地為氫原子、碳數1至5之烷基或鹵原子之任一者,X為-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、通式(2)所示茀-9,9-二基或單鍵,l為0至10之整數。 In formula (1), R 1 , R 2 , R 3 and R 4 are each independently a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a halogen atom, and X is -CO-, -SO 2 - , -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, 茀-9,9- represented by the general formula (2) Diradical or single bond, l is an integer from 0 to 10.

Figure 112121275-A0202-12-0005-2
Figure 112121275-A0202-12-0005-2

通式(1)所示雙酚型環氧化合物為使雙酚類與環氧氯丙烷反應而獲得之具有2個環氧丙基醚基之環氧化合物。該反應時一般會伴隨二環氧丙基醚化合物的低聚化,故會包含含有2個以上雙酚骨架之環氧化合物。 The bisphenol type epoxy compound represented by the general formula (1) is an epoxy compound having two glycidyl ether groups obtained by reacting bisphenols and epichlorohydrin. This reaction is usually accompanied by the oligomerization of the diepoxypropyl ether compound, so it may include epoxy compounds containing two or more bisphenol skeletons.

該反應所使用雙酚類之例係包括雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、9,9-雙(4-羥基-3-氯苯基)茀、9,9-雙(4-羥基-3-溴苯基)茀、9,9-雙(4-羥基-3-氟苯基)茀、9,9-雙(4-羥基-3-甲氧基苯基)茀、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3,5- 二氯苯基)茀、9,9-雙(4-羥基-3,5-二溴苯基)茀、4,4’-聯苯酚、3,3’-聯苯酚等。其中較佳為具有茀-9,9-二基之雙酚類。 Examples of bisphenols used in this reaction include bis(4-hydroxyphenyl)ketone, bis(4-hydroxy-3,5-dimethylphenyl)ketone, and bis(4-hydroxy-3,5-dimethylphenyl)ketone. Chlorophenyl)ketone, bis(4-hydroxyphenyl)terine, bis(4-hydroxy-3,5-dimethylphenyl)terine, bis(4-hydroxy-3,5-dichlorophenyl)terine , bis(4-hydroxyphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane Propane, bis(4-hydroxyphenyl)dimethylsilane, bis(4-hydroxy-3,5-dimethylphenyl)dimethylsilane, bis(4-hydroxy-3,5-dichlorophenyl) )dimethylsilane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromophenyl)methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy-3,5- Dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxybenzene) base) ether, bis(4-hydroxy-3,5-dimethylphenyl) ether, bis(4-hydroxy-3,5-dichlorophenyl) ether, 9,9-bis(4-hydroxyphenyl) ) fluorine, 9,9-bis(4-hydroxy-3-methylphenyl) fluorine, 9,9-bis(4-hydroxy-3-chlorophenyl) fluorine, 9,9-bis(4-hydroxy- 3-bromophenyl)fluorine, 9,9-bis(4-hydroxy-3-fluorophenyl)fluorine, 9,9-bis(4-hydroxy-3-methoxyphenyl)fluorine, 9,9- Bis(4-hydroxy-3,5-dimethylphenyl)fluoride, 9,9-bis(4-hydroxy-3,5- Dichlorophenyl) fluorine, 9,9-bis(4-hydroxy-3,5-dibromophenyl) fluorine, 4,4’-biphenol, 3,3’-biphenol, etc. Among them, bisphenols having a fluorine-9,9-diyl group are preferred.

又,使如此環氧化合物與(甲基)丙烯酸反應而得之環氧基(甲基)丙烯酸酯分子中的羥基反應之(a)二羧酸或三羧酸的酸單酐之例係包括鏈式烴二羧酸或三羧酸的酸單酐、脂環式二羧酸或三羧酸的酸單酐、芳香族二羧酸或三羧酸的酸單酐等。在此,鏈式烴二羧酸或三羧酸的酸單酐之例係包括琥珀酸、乙醯基琥珀酸、馬來酸、己二酸、伊康酸、壬二酸、檸蘋酸、丙二酸、戊二酸、檸檬酸、酒石酸、側氧戊二酸、庚二酸、癸二酸、辛二酸、二甘醇酸等的酸單酐。又,也包括導入有任意取代基之二羧酸或三羧酸的酸單酐等。又,脂環式二羧酸或三羧酸的酸單酐之例係包括環丁烷二羧酸、環戊烷二羧酸、六氫鄰苯二甲酸、四氫鄰苯二甲酸、降莰烷二羧酸等的酸單酐。又,也包括導入有任意取代基之二羧酸或三羧酸的酸單酐等。又,芳香族二羧酸或三羧酸的酸單酐之例係包括鄰苯二甲酸、間苯二甲酸、偏苯三酸等的酸單酐。又,也包括導入有任意取代基之二羧酸或三羧酸的酸單酐。 In addition, examples of (a) dicarboxylic acid or tricarboxylic acid monoanhydride for reacting the hydroxyl group in the epoxy (meth)acrylate molecule obtained by reacting such an epoxy compound with (meth)acrylic acid include Acid monoanhydrides of chain hydrocarbon dicarboxylic acids or tricarboxylic acids, acid monoanhydrides of alicyclic dicarboxylic acids or tricarboxylic acids, acid monoanhydrides of aromatic dicarboxylic acids or tricarboxylic acids, etc. Here, examples of acid monoanhydrides of chain hydrocarbon dicarboxylic acids or tricarboxylic acids include succinic acid, acetylsuccinic acid, maleic acid, adipic acid, itaconic acid, azelaic acid, citramalic acid, Acid monoanhydrides of malonic acid, glutaric acid, citric acid, tartaric acid, oxyglutaric acid, pimelic acid, sebacic acid, suberic acid, diglycolic acid, etc. Furthermore, acid monoanhydrides of dicarboxylic acid or tricarboxylic acid into which optional substituents are introduced are also included. Furthermore, examples of acid monoanhydrides of alicyclic dicarboxylic acids or tricarboxylic acids include cyclobutanedicarboxylic acid, cyclopentanedicarboxylic acid, hexahydrophthalic acid, tetrahydrophthalic acid, norcamphene Acid monoanhydrides such as alkanedicarboxylic acids. Furthermore, acid monoanhydrides of dicarboxylic acid or tricarboxylic acid into which optional substituents are introduced are also included. Examples of the acid monoanhydrides of aromatic dicarboxylic acids or tricarboxylic acids include acid monoanhydrides of phthalic acid, isophthalic acid, trimellitic acid, and the like. Furthermore, acid monoanhydrides of dicarboxylic acid or tricarboxylic acid into which optional substituents are introduced are also included.

又,與環氧基(甲基)丙烯酸酯反應之(b)四羧酸的酸二酐係使用鏈式烴四羧酸的酸二酐、脂環式四羧酸的酸二酐或芳香族四羧酸的酸二酐。在此,鏈式烴四羧酸的酸二酐之例係包括丁烷四羧酸、戊烷四羧酸、己烷四羧酸等的酸二酐。又,也包括導入有任意取代基之四羧酸的酸二酐等。又,脂環式四羧酸的酸二酐之例係包括環丁烷四羧酸、環戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、降

Figure 112121275-A0202-12-0006-15
烷四羧酸等的酸二酐。又,也包括導入有任意取代基之四羧酸的酸二酐等。又,芳香族四羧酸的酸二酐之例係包括焦蜜石酸、二苯基酮四羧酸、聯苯基四羧 酸、聯苯基醚四羧酸等的酸二酐。又,也包括導入有任意取代基之四羧酸的酸二酐等。 Furthermore, (b) the acid dianhydride of tetracarboxylic acid used to react with epoxy (meth)acrylate is an acid dianhydride of chain hydrocarbon tetracarboxylic acid, an acid dianhydride of alicyclic tetracarboxylic acid or an aromatic acid dianhydride. Dianhydrides of tetracarboxylic acids. Here, examples of acid dianhydrides of chain hydrocarbon tetracarboxylic acids include acid dianhydrides of butane tetracarboxylic acid, pentane tetracarboxylic acid, hexane tetracarboxylic acid, and the like. In addition, acid dianhydrides of tetracarboxylic acid with optional substituents introduced therein are also included. Furthermore, examples of acid dianhydrides of alicyclic tetracarboxylic acids include cyclobutanetetracarboxylic acid, cyclopentanetetracarboxylic acid, cyclohexanetetracarboxylic acid, cycloheptanetetracarboxylic acid, and
Figure 112121275-A0202-12-0006-15
Acid dianhydrides such as alkane tetracarboxylic acids. In addition, acid dianhydrides of tetracarboxylic acid with optional substituents introduced therein are also included. Examples of the acid dianhydride of aromatic tetracarboxylic acid include acid dianhydrides such as pyromelite acid, diphenylketonetetracarboxylic acid, diphenyltetracarboxylic acid, and diphenylethertetracarboxylic acid. In addition, acid dianhydrides of tetracarboxylic acid with optional substituents introduced therein are also included.

與環氧基(甲基)丙烯酸酯反應之(a)二羧酸或三羧酸的酸單酐與(b)四羧酸的酸二酐的莫耳比(a)/(b)較佳為0.01以上10.0以下,更佳為0.02以上且未達3.0。莫耳比(a)/(b)若超出上述範圍,則無法獲得形成具有良好光圖案性之感光性樹脂組成物的最佳分子量,故不佳。又,莫耳比(a)/(b)越小則分子量越大,有鹼溶解性降低之傾向。 The preferred molar ratio (a)/(b) of (a) acid monoanhydride of dicarboxylic acid or tricarboxylic acid and (b) acid dianhydride of tetracarboxylic acid for reaction with epoxy (meth)acrylate It is 0.01 or more and 10.0 or less, and it is more preferable that it is 0.02 or more and less than 3.0. If the molar ratio (a)/(b) exceeds the above range, the optimum molecular weight for forming a photosensitive resin composition having good photopatterning properties cannot be obtained, which is undesirable. In addition, the smaller the molar ratio (a)/(b) is, the larger the molecular weight is and the alkali solubility tends to be reduced.

又,環氧化合物與(甲基)丙烯酸的反應、及該反應所得之環氧基(甲基)丙烯酸酯與多元羧酸或其酸酐的反應並無特別限定,可採用公知方法。又,上述反應所合成之含有不飽和基之感光性樹脂之重量平均分子量(Mw)較佳為2000至10000,酸價較佳為30至200mg/KOH。又,重量平均分子量(Mw)例如可使用凝膠滲透層析法(GPC)「HLC-8220GPC」(TOSOH股份有限公司製)測定。又,酸價例如可使用電位差滴定裝置「COM-1600」(平沼產業股份有限公司製)以1/10N-KOH水溶液滴定。 In addition, the reaction between the epoxy compound and (meth)acrylic acid and the reaction between the epoxy (meth)acrylate obtained by the reaction and the polycarboxylic acid or its anhydride are not particularly limited, and known methods can be used. In addition, the weight average molecular weight (Mw) of the unsaturated group-containing photosensitive resin synthesized by the above reaction is preferably 2,000 to 10,000, and the acid value is preferably 30 to 200 mg/KOH. Moreover, the weight average molecular weight (Mw) can be measured using gel permeation chromatography (GPC) "HLC-8220GPC" (manufactured by TOSOH Co., Ltd.), for example. In addition, the acid value can be titrated with a 1/10N-KOH aqueous solution using, for example, a potentiometric titration device "COM-1600" (manufactured by Hiranuma Sangyo Co., Ltd.).

作為(A1)成分之含有不飽和基之感光性樹脂之較佳樹脂的其他例係包括為(甲基)丙烯酸、(甲基)丙烯酸酯等的共聚物且具有(甲基)丙烯醯基及羧基之樹脂。上述樹脂之例係包括:將含有(甲基)丙烯酸環氧丙酯之(甲基)丙烯酸酯類在溶劑中共聚,使所得共聚物與(甲基)丙烯酸反應,最後與二羧酸或三羧酸的酐反應而獲得之含有聚合性不飽和基之鹼可溶性樹脂。上述共聚物作為參考可舉出:日本特開2014-111722號公報所示共聚物,其為源自於兩端羥基以(甲基)丙烯酸進行酯化的二酯甘油之重覆單元20至90莫耳%、及源自於可與其共聚之1種以上的聚合性不飽和化合物之重覆單元10至80莫耳%所構成,其數平 均分子量(Mn)為2000至20000且酸價為35至120mgKOH/g;及日本特開2018-141968號公報所示含有聚合性不飽和基之鹼可溶性樹脂,其為含有源自於(甲基)丙烯酸酯化合物之單元及具有(甲基)丙烯醯基及二或三羧酸殘基之單元,且重量平均分子量(Mw)為3000至50000,酸價為30至200mg/KOH之聚合物。 Other preferred examples of the unsaturated group-containing photosensitive resin as the component (A1) include copolymers of (meth)acrylic acid, (meth)acrylate, etc. and having a (meth)acrylyl group and Carboxyl resin. Examples of the above-mentioned resin include: copolymerizing (meth)acrylates containing glycidyl (meth)acrylate in a solvent, reacting the resulting copolymer with (meth)acrylic acid, and finally reacting it with dicarboxylic acid or tricarboxylic acid. Alkali-soluble resin containing polymerizable unsaturated groups obtained by reacting anhydride of carboxylic acid. Examples of the above-mentioned copolymer include the copolymer shown in Japanese Patent Application Publication No. 2014-111722, which has repeating units of 20 to 90 derived from diester glycerol in which both terminal hydroxyl groups are esterified with (meth)acrylic acid. It consists of 10 to 80 mol% of repeating units derived from one or more polymerizable unsaturated compounds that can be copolymerized with it. The average molecular weight (Mn) is 2000 to 20000 and the acid value is 35 to 120 mgKOH/g; and an alkali-soluble resin containing a polymerizable unsaturated group as shown in Japanese Patent Application Laid-Open No. 2018-141968, which is derived from (methyl ) Units of acrylate compounds and polymers having (meth)acrylyl groups and di- or tricarboxylic acid residues, with a weight average molecular weight (Mw) of 3,000 to 50,000, and an acid value of 30 to 200 mg/KOH.

(A1)成分之含有不飽和基之感光性樹脂可僅單獨使用1種或併用2種以上。 The unsaturated group-containing photosensitive resin of component (A1) may be used alone or in combination of two or more types.

本實施型態之(A2)成分中具有至少2個以上不飽和鍵之光聚合性化合物之例係包括乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、四亞甲基二醇二(甲基)丙烯酸酯、三丙二醇二丙烯酸酯、甘油(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、新戊四醇二(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇四(甲基)丙烯酸酯、甘油三(甲基)丙烯酸酯、山梨醇五(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、山梨醇六(甲基)丙烯酸酯、膦氮烯之環氧烷改質六(甲基)丙烯酸酯、己內酯改質二新戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯等具有羥基之(甲基)丙烯酸酯類;雙酚A型環氧基(甲基)丙烯酸酯、雙酚F型環氧基(甲基)丙烯酸酯、雙酚茀型環氧基(甲基)丙烯酸酯、二苯基茀型環氧基(甲基)丙烯酸酯、酚酚醛清漆型環氧基(甲基)丙烯酸酯、甲酚酚酸清漆型環氧基(甲基)丙烯酸酯、酚芳烷基型環氧基(甲基)丙烯酸酯等環氧基(甲基)丙烯酸酯;作為具有乙烯性雙鍵之化合物之具有(甲基)丙烯醯基之樹枝狀聚合物等。該等光聚合性化合物可僅單獨使用1種,也可併用2種以上。又,該至少具有2個乙烯性不 飽和鍵之光聚合性化合物係可起到使含有聚合性不飽和基之鹼可溶性樹脂的分子彼此交聯的作用,為了發揮該功能,較佳為使用具有3個以上不飽和鍵者。又,光聚合性化合物的分子量除以1分子中的(甲基)丙烯醯基數之丙烯酸當量較佳為50至300,丙烯酸當量更佳為80至200。又,(A2)成分不具有游離之羧基。 Examples of the photopolymerizable compound having at least two unsaturated bonds in the component (A2) of this embodiment include ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, Triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, tetramethylene glycol di(meth)acrylate, tripropylene glycol diacrylate, glycerin (meth)acrylic acid Ester, glyceryl di(meth)acrylate, trimethylolpropane tri(meth)acrylate, trimethylolethane tri(meth)acrylate, neopentylerythritol di(meth)acrylate, Neopenterythritol tri(meth)acrylate, neopenterythritol tetra(meth)acrylate, dineopenterythritol tetra(meth)acrylate, glycerol tri(meth)acrylate, sorbitol penta(meth)acrylate Alkylene oxide modification of meth)acrylate, dipenterythritol penta(meth)acrylate, dipenterythritol hexa(meth)acrylate, sorbitol hexa(meth)acrylate, and phosphine nitrene (Meth)acrylates such as hexa(meth)acrylate and caprolactone-modified dineopenterythritol hexa(meth)acrylate; 2-hydroxyethyl (meth)acrylate, (meth)acrylate 2-Hydroxypropyl acrylate and other (meth)acrylates with hydroxyl groups; bisphenol A type epoxy (meth)acrylate, bisphenol F type epoxy (meth)acrylate, bisphenol F type Epoxy (meth)acrylate, diphenyl fluorine type epoxy (meth)acrylate, phenol novolak type epoxy (meth)acrylate, cresol phenolic acid varnish type epoxy (meth)acrylate Epoxy (meth)acrylates such as ethyl)acrylate and phenol aralkyl type epoxy (meth)acrylate; dendrimers having (meth)acrylyl groups which are compounds with vinyl double bonds Polymers etc. Only one type of these photopolymerizable compounds may be used alone, or two or more types may be used in combination. In addition, the ethylenic resin must have at least 2 The photopolymerizable compound with a saturated bond serves to cross-link the molecules of the alkali-soluble resin containing a polymerizable unsaturated group. In order to exert this function, it is preferable to use one having three or more unsaturated bonds. Furthermore, the acrylic acid equivalent, which is the molecular weight of the photopolymerizable compound divided by the number of (meth)acrylyl groups in 1 molecule, is preferably 50 to 300, and more preferably 80 to 200 acrylic acid equivalent. In addition, component (A2) does not have free carboxyl groups.

(A2)成分之光聚合性化合物可僅單獨使用1種或併用2種以上。 The photopolymerizable compound of (A2) component may be used individually by 1 type or in combination of 2 or more types.

(A3)成分中的熱硬化性環氧化合物可使用公知環氧化合物而無特別限制。例如包括雙酚A型環氧化合物、雙酚F型環氧化合物、雙酚茀型環氧化合物、雙萘酚茀型環氧化合物、二苯基茀型環氧化合物、酚酚醛清漆型環氧化合物、(鄰-、間-、對-)甲酚酚醛清漆型環氧化合物、酚芳烷基型環氧化合物、聯苯型環氧化合物(例如jER YX4000:三菱化學股份有限公司製,「jER」為同公司之註冊商標)、含有萘骨架之酚酚醛清漆化合物(例如NC-7000L:日本化藥股份有限公司製)、萘酚芳烷基型環氧化合物、三酚甲烷型環氧化合物(例如EPPN-501H:日本化藥股份有限公司製)、四酚乙烷型環氧化合物、多元醇之環氧丙基醚、多元羧酸之環氧丙基酯、包含甲基丙烯酸與甲基丙烯酸環氧丙酯的共聚物之含有(甲基)丙烯酸環氧丙酯作為單元之具有(甲基)丙烯醯基之單體的共聚物、氫化雙酚A二環氧丙基醚(例如RIKARESIN HBE-100:新日本理化股份有限公司製,「RIKARESIN」為同公司之註冊商標)等具有環氧丙基之環氧化合物、1,4-環己烷二甲醇-雙3,4-環氧環己烷羧酸酯、2-(3,4-環氧基)環己基-5,1-螺(3,4-環氧基)環己基-間二

Figure 112121275-A0202-12-0009-38
烷(例如Araldite CY175:Huntsman公司製,「Araldite」為同公司之註冊商標)、雙(3,4-環氧環己基甲基)己二酸酯(例如CYRACURE UVR-6128:陶氏化學公司製)、包含3’,4’-環氧環己基甲基3,4-環氧環己烷羧酸酯之脂環式環氧化合物(例如Celloxide 2021P:Daicel股份有限公司製,「Celloxide」為同公司 之註冊商標)、丁烷四羧酸四(3,4-環氧環己基甲基)酯修飾ε-己內酯(例如Epolead GT401:Daicel股份有限公司製,「Epolead」為同公司之註冊商標)、具有環氧環己基之環氧化合物(例如HiREM-1:四國化成工業股份有限公司製)、具有二環戊二烯骨架之多官能環氧化合物(例如HP7200系列:DIC股份有限公司製)、2,2-雙(羥基甲基)-1-丁醇之1,2-環氧基-4-(2-環氧乙烷基)環己烷加成物(例如EHPE3150:Daicel股份有限公司製)等脂環式環氧化合物、環氧化聚丁二烯(例如NISSO-PB JP-100:日本曹達股份有限公司製,「NISSO-PB」為同公司之註冊商標)、具有聚矽氧骨架之環氧化合物等。又,該等熱硬化性環氧化合物可僅單獨使用1種或併用2種以上。 As the thermosetting epoxy compound in the component (A3), a known epoxy compound can be used without any particular limitation. Examples include bisphenol A-type epoxy compounds, bisphenol F-type epoxy compounds, bisphenol-type epoxy compounds, bis-naphthol-type epoxy compounds, diphenyl-type epoxy compounds, and phenolic novolac-type epoxy compounds. Compounds, (o-, m-, p-)cresol novolac type epoxy compounds, phenol aralkyl type epoxy compounds, biphenyl type epoxy compounds (such as jER YX4000: Mitsubishi Chemical Co., Ltd., "jER ” is a registered trademark of the same company), phenolic novolac compounds containing a naphthalene skeleton (such as NC-7000L: manufactured by Nippon Kayaku Co., Ltd.), naphthol aralkyl type epoxy compounds, trisphenolmethane type epoxy compounds ( For example, EPPN-501H: manufactured by Nippon Kayaku Co., Ltd.), tetraphenol ethane type epoxy compound, glycidyl ether of polyol, glycidyl ester of polycarboxylic acid, including methacrylic acid and methacrylic acid Copolymers of glycidyl ester, copolymers of monomers containing glycidyl (meth)acrylate as units and having (meth)acrylyl groups, hydrogenated bisphenol A diepoxypropyl ether (such as RIKARESIN HBE -100: Made by Shin Nippon Rika Co., Ltd., "RIKARESIN" is a registered trademark of the same company) and other epoxy compounds with epoxypropyl group, 1,4-cyclohexanedimethanol-bis-3,4-epoxy ring Hexanecarboxylate, 2-(3,4-epoxy)cyclohexyl-5,1-spiro(3,4-epoxy)cyclohexyl-m-di
Figure 112121275-A0202-12-0009-38
Alkanes (such as Araldite CY175: manufactured by Huntsman Co., Ltd., "Araldite" is a registered trademark of the same company), bis(3,4-epoxycyclohexylmethyl) adipate (such as CYRACURE UVR-6128: manufactured by The Dow Chemical Company ), alicyclic epoxy compounds containing 3',4'-epoxycyclohexylmethyl 3,4-epoxycyclohexanecarboxylate (such as Celloxide 2021P: manufactured by Daicel Co., Ltd., "Celloxide" is the same The company's registered trademark), butane tetracarboxylic acid tetrakis (3,4-epoxycyclohexylmethyl) ester modified ε-caprolactone (such as Epolead GT401: manufactured by Daicel Co., Ltd., "Epolead" is registered by the same company Trademark), epoxy compounds with an epoxycyclohexyl group (such as HiREM-1: manufactured by Shikoku Chemical Industry Co., Ltd.), multifunctional epoxy compounds with a dicyclopentadiene skeleton (such as HP7200 series: DIC Co., Ltd. System), 1,2-epoxy-4-(2-oxiranyl)cyclohexane adduct of 2,2-bis(hydroxymethyl)-1-butanol (such as EHPE3150: Daicel shares Co., Ltd.) and other alicyclic epoxy compounds, epoxidized polybutadiene (such as NISSO-PB JP-100: manufactured by Nippon Soda Co., Ltd., "NISSO-PB" is a registered trademark of the same company), polysilicon Oxygen skeleton epoxy compounds, etc. Moreover, only one type of these thermosetting epoxy compounds may be used alone, or two or more types may be used in combination.

相對於固形分之總質量,(A1)成分之含量較佳為5質量%以上30質量%以下,更佳為12質量%以上30質量%以下。(A1)成分之上述含量若為5質量%以上,則可形成高解析度之圖案。 The content of component (A1) is preferably not less than 5% by mass and not more than 30% by mass, more preferably not less than 12% by mass and not more than 30% by mass, relative to the total solid mass. If the content of the component (A1) is 5% by mass or more, a high-resolution pattern can be formed.

(A1)成分與(A2)成分的摻配比率以重量比(A1)/(A2)較佳為40/60至90/10,更佳為50/50至80/20。(A1)成分之摻配比率若為40/60以上,則光硬化後之硬化物不易破碎,又,未曝光部中塗膜的酸價不易變低,故可抑制對鹼顯影液的溶解性降低。因此較不易產生鋸齒狀圖案邊緣或銳度不足等不良情形。又,(A1)成分之摻配比率若為90/10以下,則光反應性官能基在樹脂中所佔比率充分,故可形成所求交聯構造。又,樹脂成分中的酸價度不會過高,故在曝光部中對鹼顯影液的溶解性不易提高,因此可抑制所形成圖案比目標線寬更細或圖案缺損。 The blending ratio of component (A1) and component (A2) is preferably 40/60 to 90/10, more preferably 50/50 to 80/20 in terms of weight ratio (A1)/(A2). If the blending ratio of component (A1) is 40/60 or more, the cured product after photocuring will not be easily broken, and the acid value of the coating film in the unexposed portion will not be easily reduced, so the solubility in the alkali developer can be suppressed. reduce. Therefore, it is less likely to cause problems such as jagged pattern edges or insufficient sharpness. Furthermore, if the blending ratio of component (A1) is 90/10 or less, the proportion of photoreactive functional groups in the resin is sufficient, so that the desired cross-linked structure can be formed. In addition, since the acid value of the resin component is not too high, the solubility to the alkali developer in the exposed portion is not easily increased, thereby suppressing the formed pattern from being thinner than the target line width or pattern defects.

相對於感光性樹脂組成物中之固形分,(A3)成分較佳為1至15質量%,更佳為2至9質量%。(A3)成分若為1質量%以上,則熱硬化後之硬化物 不易破碎。因此,即使是在如後烤溫度85℃之低溫硬化時,也不易產生因暴露於藥品而使硬化膜從基板剝離之不良情形。又,(A3)成分之固形分含量若為15%以下,則不會增加作為原本的其他黏合劑樹脂之鹼可溶性樹脂的摻配量,可確保顯影性。 The (A3) component is preferably 1 to 15% by mass, more preferably 2 to 9% by mass relative to the solid content in the photosensitive resin composition. If the component (A3) is 1% by mass or more, the cured product after thermal hardening Not easily broken. Therefore, even during low-temperature curing such as a post-baking temperature of 85°C, it is unlikely that the cured film will peel off from the substrate due to exposure to chemicals. In addition, if the solid content of the component (A3) is 15% or less, the blending amount of the alkali-soluble resin as the original other binder resin will not increase, and the developability can be ensured.

又,本發明之感光性樹脂組成物中可摻配(A1)成分至(A3)成分以外之樹脂。(A1)成分至(A3)成分以外之樹脂包括乙烯基樹脂、聚酯樹脂、聚醯胺樹脂、聚醯亞胺樹脂、聚胺甲酸乙酯樹脂、聚醚樹脂、及三聚氰胺樹脂等。 Furthermore, the photosensitive resin composition of the present invention may contain resins other than the component (A1) to the component (A3). Resins other than components (A1) to (A3) include vinyl resins, polyester resins, polyamide resins, polyimide resins, polyurethane resins, polyether resins, and melamine resins.

本實施型態之屬於(B)成分之黑色顏料、混色有機顏料及遮光材等遮光成分若為以1至1000nm之平均二次粒徑(以雷射繞射散射法粒徑分佈計或動態光散射法粒徑分佈計所測定出的平均粒徑)分散者,則可使用公知遮光成分,無特別限制。更佳為平均二次粒徑為10至300nm。 If the light-shielding components such as black pigments, mixed-color organic pigments, and light-shielding materials belonging to the component (B) in this embodiment have an average secondary particle diameter of 1 to 1000 nm (measured by laser diffraction scattering particle size distribution or dynamic light If the average particle size measured by a scattering particle size distribution meter) is dispersed, well-known light-shielding components can be used without particular limitations. More preferably, the average secondary particle size is 10 to 300 nm.

屬於(B1)成分之黑色顏料之例係包括苝黑、靛青黑、苯胺黑、內醯胺黑、碳黑、鈦黑、混色有機顏料等。 Examples of black pigments belonging to component (B1) include perylene black, indigo black, aniline black, lactamine black, carbon black, titanium black, mixed color organic pigments, etc.

屬於(B1)成分之混色有機顏料之例係包括將選自偶氮顏料、縮合偶氮顏料、次甲基偶氮顏料、酞青素顏料、喹吖酮顏料、異吲哚啉酮顏料、異吲哚啉顏料、二

Figure 112121275-A0202-12-0011-17
顏料、還原顏料、苝顏料、紫環酮顏料、喹啉黃顏料、二酮吡咯并吡咯顏料、硫靛藍顏料等有機顏料的至少2色混合並擬黑色化的顏料。 Examples of mixed-color organic pigments belonging to the component (B1) include those selected from the group consisting of azo pigments, condensed azo pigments, methine azo pigments, phthalocyanin pigments, quinacridone pigments, isoindolinone pigments, and isoindolinone pigments. Indoline pigment, 2
Figure 112121275-A0202-12-0011-17
A pigment that is mixed with at least two colors of organic pigments such as pigments, reduced pigments, perylene pigments, iconone pigments, quinoline yellow pigments, diketopyrrolopyrrole pigments, and thioindigo pigments to produce a pseudo-black color.

上述(B1)成分可因應目的之感光性樹脂組成物的功能僅單獨使用1種或併用2種以上。 The above-mentioned component (B1) may be used alone or in combination of two or more types according to the intended function of the photosensitive resin composition.

又,在使用作為(B1)成分之混色有機顏料時,可使用之有機顏料之例係包括顏料索引名為以下編號者,但不限定於此。 Furthermore, when using a mixed-color organic pigment as the component (B1), examples of the organic pigments that can be used include those with the following pigment index names, but are not limited thereto.

顏料紅(Pigment Red)A16、34、36、38、43、61、62、64、67、68、71、72、73、74、81等; Pigment Red (Pigment Red) A16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74, 81, etc.;

顏料黃1、3、12、13、14、16、17、55、73、74、81、83、93、95、97、109、110、111、117、120、126、127、128、129、130、136、138、139、150、151、153、154、155、173、174、175、176、180、181、183、185、191、194、199、213、214等; Pigment yellow 1, 3, 12, 13, 14, 16, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154, 155, 173, 174, 175, 176, 180, 181, 183, 185, 191, 194, 199, 213, 214, etc.;

顏料綠7、36、58等; Pigment green 7, 36, 58, etc.;

顏料藍15、15:1、15:2、15:3、15:4、15:6、16、60、80等; Pigment blue 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 60, 80, etc.;

顏料紫19、23、37等。 Pigments purple 19, 23, 37, etc.

作為(B1)成分,為了具有IR透過性,較佳為含有在製作單位OD為1[/μm]且膜厚1μm之塗膜時在850nm之透過率成為80%以上之黑色顏料(B1a)。 As the component (B1), in order to have IR transmittance, it is preferable to contain a black pigment (B1a) whose transmittance at 850 nm becomes 80% or more when a coating film with a unit OD of 1 [/μm] and a film thickness of 1 μm is produced.

(B1a)成分之例係可列舉如:將選自屬於有機黑色顏料之苝黑、靛青黑、苯胺黑、及內醯胺黑、或屬於無機黑色顏料之硫化鉍、屬於混色有機顏料之偶氮顏料、縮合偶氮顏料、次甲基偶氮顏料、酞青素顏料、喹吖酮顏料、異吲哚啉酮顏料、異吲哚啉顏料、二

Figure 112121275-A0202-12-0012-20
顏料、還原顏料、苝顏料、紫環酮顏料、喹啉黃顏料、二酮吡咯并吡咯顏料、硫靛藍顏料等有機顏料的至少2色混合之擬黑色顏料等。 Examples of the component (B1a) include perylene black, indigo black, aniline black, and lactamide black which are organic black pigments, bismuth sulfide which is an inorganic black pigment, and azo which is a mixed-color organic pigment. Pigments, condensed azo pigments, methine azo pigments, phthalocyanin pigments, quinacridone pigments, isoindolinone pigments, isoindoline pigments,
Figure 112121275-A0202-12-0012-20
Pseudo-black pigments mixed with at least two colors of organic pigments such as pigments, reduced pigments, perylene pigments, ionone pigments, quinoline yellow pigments, diketopyrrolopyrrole pigments, and thioindigo pigments.

(B1a)成分更佳為屬於有機黑色顏料之苝黑、靛青黑、苯胺黑、及內醯胺黑。藉由使用有機黑色顏料而可在不使用重金屬下遮光,故可形成安全性較高之硬化膜。 The component (B1a) is preferably organic black pigments such as perylene black, indigo black, aniline black, and lactone black. By using organic black pigments, light can be blocked without using heavy metals, so a highly safe cured film can be formed.

(B1)成分之黑色顏料之摻配比率可因應所求遮光度而任意地決定,但相對於感光性樹脂組成物中之固形分較佳為20至70質量%,更佳為30至60質量%。(B1)成分之黑色顏料之一部分使用苯胺黑、靛青黑、內醯胺黑等有機顏料或碳黑等碳系遮光成分時,相對於感光性樹脂組成物中之固形分較佳為25至60質量%,更佳為30至50%。相對於感光性樹脂組成物中之固形分,黑色顏料若為25質量%以上,則可獲得充分遮光性。相對於感光性樹脂組成物中之固形分,黑色顏料若為60質量%以下,則原本形成黏合劑之感光性樹脂((A1)+(A2))之含量不會減少而可得到所求顯影特性及膜形成能力。 The blending ratio of the black pigment of component (B1) can be arbitrarily determined according to the required opacity, but it is preferably 20 to 70 mass %, more preferably 30 to 60 mass % based on the solid content in the photosensitive resin composition. %. When an organic pigment such as aniline black, indigo black, lactide black or a carbon-based light-shielding component such as carbon black is used as part of the black pigment of the component (B1), the solid content in the photosensitive resin composition is preferably 25 to 60 mass%, preferably 30 to 50%. If the black pigment is 25% by mass or more relative to the solid content in the photosensitive resin composition, sufficient light-shielding properties can be obtained. If the black pigment is 60% by mass or less relative to the solid content in the photosensitive resin composition, the content of the photosensitive resin ((A1) + (A2)) that originally forms the binder will not be reduced and the desired development can be obtained properties and film-forming capabilities.

併用(B1a)成分與(B1a)以外之(B1)成分時,該等的比率((B1a)成分)/((B1a)以外之(B1)成分)較佳為50/50至99/1,更佳為80/20至95/5。(B1a)成分之摻配比率若為50/50至99/1,則可兼具IR區域之透過率及高遮光度。 When component (B1a) and component (B1) other than (B1a) are used together, the ratio (component (B1a))/(component (B1) other than (B1a)) is preferably 50/50 to 99/1. Better is 80/20 to 95/5. If the blending ratio of component (B1a) is 50/50 to 99/1, it can have both transmittance in the IR region and high opacity.

上述(B1)成分一般是作為分散於溶劑的黑色顏料分散體而與其他摻配成分混合,此時可添加分散劑。分散劑可使用顏料(黑色顏料)分散所使用之公知化合物(以分散劑、分散濕潤劑、分散促進劑等名稱販售的化合物等)等,而無特別限制。 The above-mentioned component (B1) is generally mixed with other blending components as a black pigment dispersion dispersed in a solvent. In this case, a dispersant may be added. The dispersant can be any known compound (compounds sold under the names of dispersants, dispersion wetting agents, dispersion accelerators, etc.) used for dispersing pigments (black pigments), etc., and is not particularly limited.

分散劑之例係包括陽離子性高分子系分散劑、陰離子性高分子系分散劑、非離子性高分子系分散劑、顏料衍生物型分散劑(分散助劑)。尤其,分散劑較佳為具有作為對著色劑的吸附點之咪唑基、吡咯基、吡啶基、一級、二級或三級之胺基等陽離子性官能基,且胺價為1至100mgKOH/g,數平均分子量(Mn)為1000至100000之範圍之陽離子性高分子系分散劑。相對於(B1)成分,該分散劑之摻配量較佳為1至40質量份,更佳為2至25質量份。又,如樹脂類之 高黏度物質一般具有穩定分散的作用,不具有分散促進能力者則不作為分散劑。但並未限制其用於穩定分散之目的。 Examples of dispersants include cationic polymer dispersants, anionic polymer dispersants, nonionic polymer dispersants, and pigment derivative dispersants (dispersing aids). In particular, the dispersant preferably has a cationic functional group such as an imidazolyl group, a pyrrolyl group, a pyridyl group, a primary, secondary or tertiary amine group as an adsorption point for the colorant, and the amine value is 1 to 100 mgKOH/g. , a cationic polymer dispersant with a number average molecular weight (Mn) in the range of 1,000 to 100,000. The blending amount of the dispersant is preferably 1 to 40 parts by mass, more preferably 2 to 25 parts by mass relative to the component (B1). Also, such as resin High-viscosity substances generally have the effect of stabilizing dispersion, and those that do not have the ability to promote dispersion are not used as dispersants. However, its use for stabilizing dispersion is not limited.

(B2)成分為氟化鎂微粒子及/或冰晶石微粒子。大氣的折射率約為1.0,相對於此,成為黑色顏料的內醯胺黑或碳黑的折射率約為1.7至2.0,因此,藉由使用折射率低於黑色顏料的折射率的微粒子,即可降低含有該微粒子之硬化膜的折射率。氟化鎂微粒子的折射率為1.38(文獻值),又,冰晶石的折射率為1.34(文獻值),任一者折射率皆位於大氣中與(B1)成分及(B3)成分的中間附近,故認為藉由使用該微粒子而可使大氣與硬化膜的折射率差變小,而降低反射率。又,氟化鎂微粒子及/或冰晶石微粒子在硬化膜內多少會凝集,但與二氧化矽等不同的是,凝集後與周圍樹脂的折射率差較低,故不易產生凝集所造成的明度上升,降低硬化膜之明度的效果較高。 (B2) The component is magnesium fluoride microparticles and/or cryolite microparticles. The refractive index of the atmosphere is about 1.0. On the other hand, the refractive index of lactam black or carbon black that becomes the black pigment is about 1.7 to 2.0. Therefore, by using fine particles with a refractive index lower than that of the black pigment, that is The refractive index of the cured film containing the microparticles can be lowered. The refractive index of magnesium fluoride fine particles is 1.38 (documentary value), and the refractive index of cryolite is 1.34 (documentary value). Both refractive indexes are located near the middle between the (B1) component and (B3) component in the atmosphere. , it is thought that by using these fine particles, the refractive index difference between the atmosphere and the cured film can be reduced, thereby reducing the reflectivity. In addition, magnesium fluoride particles and/or cryolite particles will agglomerate to some extent in the cured film. However, unlike silica and the like, the refractive index difference between the agglomerated particles and the surrounding resin is low, so the brightness caused by agglomeration is not easily produced. Rising, the effect of reducing the brightness of the hardened film is higher.

本發明所使用之(B2)成分之平均一次粒徑較佳為10至100nm。若為10nm以上,則表面能量不會過高,故不易在膜內凝集,較不易產生凝集的(B2)成分成為光的擴散源而造成的明度上升。若為100nm以下,則平均一次粒徑適當地較低,故較不易產生粒子單體成為擴散源而造成的明度上升。 The average primary particle size of component (B2) used in the present invention is preferably 10 to 100 nm. If it is 10 nm or more, the surface energy will not be too high, so it will be difficult to aggregate in the film, and it will be less likely to cause an increase in brightness due to the aggregation of the (B2) component becoming a light diffusion source. If it is 100 nm or less, the average primary particle diameter is suitably low, and therefore it is less likely to cause an increase in brightness caused by single particles becoming a diffusion source.

本發明所使用之(B2)成分之一次粒徑之平均值為藉由穿透式電子顯微鏡進行粒徑觀察,隨機選擇100個粒子並測量粒子之長軸長及短軸長,藉由該等的相加平均而求的值。又,(B2)成分構成凝集塊或聚集體時,一次粒子為構成該等之粒子。 The average primary particle size of component (B2) used in the present invention is determined by observing the particle size using a transmission electron microscope, randomly selecting 100 particles, and measuring the major axis length and minor axis length of the particles. The value obtained by adding the average of . Furthermore, when the component (B2) forms aggregates or aggregates, the primary particles constitute the particles.

本發明所使用之氟化鎂粒子及/或冰晶石微粒子對於氣相反應或液相反應等製造方法或形狀(球狀、非球狀)並無特別限制。 The magnesium fluoride particles and/or cryolite particles used in the present invention are not particularly limited in terms of the production method such as gas phase reaction or liquid phase reaction or the shape (spherical, non-spherical).

比率相對於(B)遮光成分之總質量,(B2)成分之摻配比率較佳為1至30質量%,更佳為2至25質量%,又更佳為12至25質量%。(B2)成分之含量若為1質量%以上,則充分降低硬化膜的折射率,並提高反射率降低效果。(B2)成分之含量若為30質量%以下,則提高(B1)成分之相對含量,可提高硬化膜之光學濃度。(B2)成分之含量若為25質量%以下,則不易產生(B2)成分所造成的密著性降低。又,(B2)成分之相對量即使低於上述程度,也可充分發揮(B2)成分的反射率降低效果。 Ratio The blending ratio of the (B2) component is preferably 1 to 30 mass%, more preferably 2 to 25 mass%, and still more preferably 12 to 25 mass% relative to the total mass of the (B) light-shielding component. If the content of the component (B2) is 1 mass % or more, the refractive index of the cured film will be sufficiently reduced, and the reflectance reducing effect will be enhanced. If the content of component (B2) is 30% by mass or less, increasing the relative content of component (B1) can increase the optical density of the cured film. If the content of the component (B2) is 25% by mass or less, the adhesion decrease caused by the component (B2) is less likely to occur. In addition, even if the relative amount of the component (B2) is lower than the above-mentioned level, the reflectance reducing effect of the component (B2) can be fully exerted.

又,可添加(B3)其他有機顏料成分,其可填補可見光帶的光中(B1)成分之黑色顏料的吸收率較低之波長的吸收性、或可填補遮光性。尤其,(B1)成分使用上述(B1a)成分,尤其是使用有機黑色顏料時,(B3)成分的吸收性補填所形成的低反射化效果、或遮光性提高效果、及一邊維持低反射性或遮光性一邊提高IR透過性的效果顯著。 In addition, (B3) other organic pigment components may be added, which can compensate for the absorptivity of wavelengths in which the black pigment of the component (B1) has a low absorptivity in the visible light band, or can supplement the light-shielding property. In particular, when the above-mentioned component (B1a) is used as the component (B1), especially when an organic black pigment is used, the absorptive filling of the component (B3) creates a low-reflective effect or a light-shielding improvement effect, while maintaining low reflectivity or It has a remarkable effect of improving IR transmittance while blocking light.

作為(B3)成分而可添加(B1)所例示的黑色以外之有機顏料。添加可吸收黑色顏料無法完全遮光並透過的可見光帶的光之(B3)成分,藉此可提高硬化膜之遮光度OD,且抑制透過區域之高反射率,並降低反射率。 As the component (B3), organic pigments other than black exemplified in (B1) can be added. By adding the (B3) component that can absorb light in the visible light band that cannot be completely blocked and transmitted by black pigments, the opacity OD of the cured film can be increased, and the high reflectivity of the transmission area can be suppressed and the reflectivity can be reduced.

併用(B1)成分及(B3)成分時,該等的比率((B1)成分)/((B3)成分)較佳為50/50至90/10。該摻配比率若為50/50至90/10,則低反射化效果及遮光性提高效果良好。在使用(B1a)成分作為(B1)成分時,((B1a)成分)/((B3)成分)較佳為50/50至90/10。 When component (B1) and component (B3) are used together, the ratio ((B1) component)/((B3) component) is preferably 50/50 to 90/10. If the blending ratio is 50/50 to 90/10, the low-reflection effect and light-shielding improvement effect will be good. When using component (B1a) as component (B1), ((B1a) component)/((B3) component) is preferably 50/50 to 90/10.

又,(B2)成分及(B3)成分也可作為分散於溶劑之遮光成分之分散體而與其他摻配成分混合。用以分散該等成分之分散劑可適當使用(B1)成分所例示者。又,分散劑之摻配量也可與相對於(B1)成分之分散劑之摻配量相同。 In addition, the component (B2) and the component (B3) may be mixed with other blending components as a dispersion of a light-shielding component dispersed in a solvent. As a dispersant for dispersing these components, those exemplified as component (B1) can be appropriately used. Moreover, the blending quantity of a dispersing agent may be the same as the blending quantity of a dispersing agent with respect to (B1) component.

相對於感光性樹脂組成物中之固形分,(B)成分之摻配比率較佳為20至80質量%,更佳為40至60質量%。(B)成分之含量若為20質量%以上,則可進一步提高硬化膜之遮光性。(B)成分之含量若為80質量%以下,則可形成高精細圖案。 The blending ratio of component (B) is preferably 20 to 80% by mass, more preferably 40 to 60% by mass relative to the solid content in the photosensitive resin composition. If the content of the component (B) is 20% by mass or more, the light-shielding properties of the cured film can be further improved. If the content of component (B) is 80% by mass or less, a high-definition pattern can be formed.

屬於(C)成分之光聚合起始劑之例係包括苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對第三丁基苯乙酮等苯乙酮類、二苯基酮、2-氯二苯基酮、p,p’-雙二甲胺基二苯基酮等二苯基酮類;苄基、安息香、安息香甲基醚、安息香異丙基醚、安息香異丁基醚等安息香醚類;2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物類;2-三氯甲基-5-苯乙烯基-1,3,4-

Figure 112121275-A0202-12-0016-21
二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-
Figure 112121275-A0202-12-0016-22
二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-
Figure 112121275-A0202-12-0016-23
二唑等鹵甲基噻唑化合物類;2,4,6-三(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-24
、2-甲基-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-25
、2-苯基-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-26
、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-27
、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-28
、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-29
、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-30
、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-31
、2-(4-甲硫基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 112121275-A0202-12-0016-32
等鹵甲基-S-三
Figure 112121275-A0202-12-0016-33
系化合物類;1,2-辛二酮、1-[4-(苯基硫基)苯基]-,2-(O-苯甲醯基肟)、1-(4-苯基氫硫基苯基)丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲氫硫基苯基)丁烷-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲氫硫基苯基)丁烷-1-酮肟-O-乙酸酯、4-乙氧基-2-甲基苯基-9-乙基-6-硝基-9H-咔唑并-3-基-O-乙醯基肟等O-醯基肟系化合物類;二苯乙二酮二甲基縮酮、 噻噸酮、2-氯噻噸酮、2,4-二乙基噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮等硫化合物;2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌等蒽醌類;偶氮雙異丁腈、過氧化苯甲醯、過氧化異丙苯等有機過氧化物;2-統基苯并咪唑、2-巰基苯并
Figure 112121275-A0202-12-0017-34
唑、2-巰基苯并噻唑等硫醇化合物、三乙醇胺、三乙胺等三級胺等。該等光聚合起始劑可僅單獨使用其1種或併用2種類以上。 Examples of photopolymerization initiators belonging to component (C) include acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, and dichlorobenzene Acetophenones such as ethyl ketone, trichloroacetophenone, p-tert-butyl acetophenone, diphenyl ketone, 2-chlorodiphenyl ketone, p,p'-bisdimethylaminodiphenyl ketone Benzoin ethers such as benzyl, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether, etc.; 2-(o-chlorophenyl)-4,5-phenylbiimidazole , 2-(o-chlorophenyl)-4,5-bis(m-methoxyphenyl)biimidazole, 2-(o-fluorophenyl)-4,5-diphenylbiimidazole, 2-(o-methyl Oxyphenyl)-4,5-diphenylbiimidazole, 2,4,5-triarylbiimidazole and other biimidazole compounds; 2-trichloromethyl-5-styryl-1,3, 4-
Figure 112121275-A0202-12-0016-21
Oxidazole, 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4-
Figure 112121275-A0202-12-0016-22
Oxidazole, 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4-
Figure 112121275-A0202-12-0016-23
Halomethylthiazole compounds such as oxadiazole; 2,4,6-tris(trichloromethyl)-1,3,5-tris
Figure 112121275-A0202-12-0016-24
, 2-methyl-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-25
, 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-26
, 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-27
, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-28
, 2-(4-methoxynaphthyl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-29
, 2-(4-methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-30
, 2-(3,4,5-trimethoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-31
, 2-(4-methylthiostyryl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 112121275-A0202-12-0016-32
Isohalomethyl-S-tri
Figure 112121275-A0202-12-0016-33
Compounds; 1,2-octanedione, 1-[4-(phenylthio)phenyl]-,2-(O-benzoyl oxime), 1-(4-phenylhydrogenthio) Phenyl)butane-1,2-dione-2-oxime-O-benzoate, 1-(4-methylhydrosulfanyl)butane-1,2-dione-2-oxime- O-acetate, 1-(4-methylhydrothiophenyl)butane-1-one oxime-O-acetate, 4-ethoxy-2-methylphenyl-9-ethyl- 6-nitro-9H-carbazolo-3-yl-O-acetyl oxime and other O-acetyl oxime compounds; benzoethylene glycol dimethyl ketal, thioxanthone, 2-chlorothiol Sulfur compounds such as xanthone, 2,4-diethylthioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone; 2-ethylanthraquinone, octamethylanthraquinone, 1,2 - Anthraquinones such as benzanthraquinone and 2,3-diphenylanthraquinone; organic peroxides such as azobisisobutyronitrile, benzoyl peroxide, and cumene peroxide; 2-benzyl Imidazole, 2-mercaptobenzo
Figure 112121275-A0202-12-0017-34
Thiol compounds such as azoles and 2-mercaptobenzothiazole, tertiary amines such as triethanolamine and triethylamine, etc. Only one type of these photopolymerization initiators may be used alone or two or more types may be used in combination.

可較佳使用之O-醯基肟系化合物類之例係有通式(3)及通式(4)所示O-醯基肟系光聚合起始劑。該等化合物群中,以高濃度使用遮光成分時,較佳為使用365nm中的莫耳吸光係數為10000以上之O-醯基肟系光聚合起始劑。又,本發明中的「光聚合起始劑」是以包括敏化劑的意義使用。 Examples of O-acyl oxime compounds that can be preferably used include O-acyl oxime photopolymerization initiators represented by general formula (3) and general formula (4). Among these compounds, when using a light-shielding component at a high concentration, it is preferable to use an O-acyl oxime-based photopolymerization initiator with a molar absorption coefficient at 365 nm of 10,000 or more. In addition, the "photopolymerization initiator" in the present invention is used in the sense of including a sensitizer.

Figure 112121275-A0202-12-0017-4
Figure 112121275-A0202-12-0017-4

式(3)中,R5、R6分別獨立地為C1至C15之烷基、C6至C18之芳基、C7至C20之芳基烷基或C4至C12之雜環基、R7為C1至C15之烷基、C6至C18之芳基或C7至C20之芳基烷基。在此,烷基及芳基可經C1至C10之烷基、C1至C10之烷氧基、C1至C10之烷醯基、鹵素取代,伸烷基部分可含有不飽和鍵、醚鍵、硫醚鍵、酯鍵。又,烷基可為直鏈、分支或環狀之任意烷基。 In formula (3), R 5 and R 6 are each independently an alkyl group from C1 to C15, an aryl group from C6 to C18, an arylalkyl group from C7 to C20, or a heterocyclic group from C4 to C12, and R 7 is C1 to C15 alkyl group, C6 to C18 aryl group or C7 to C20 arylalkyl group. Here, the alkyl and aryl groups may be substituted by C1 to C10 alkyl groups, C1 to C10 alkoxy groups, C1 to C10 alkyl groups, or halogens, and the alkylene group may contain unsaturated bonds, ether bonds, or sulfur bonds. Ether bond, ester bond. In addition, the alkyl group may be any linear, branched or cyclic alkyl group.

Figure 112121275-A0202-12-0018-5
Figure 112121275-A0202-12-0018-5

式(4)中,R8及R9分別獨立地為碳數1至10之直鏈狀或分支狀之烷基;或碳數4至10之環烷基、環烷基烷基或烷基環烷基;或可經碳數1至6之烷基取代之苯基。R10獨立地為碳數2至10之直鏈狀或分支狀之烷基或烯基,該烷基或烯基中之-CH2-基之一部分可經-O-基取代。又,該等R8至R10基中之氫原子之一部分可經鹵原子取代。 In formula (4), R 8 and R 9 are each independently a linear or branched alkyl group having 1 to 10 carbon atoms; or a cycloalkyl group, cycloalkylalkyl group or alkyl group having 4 to 10 carbon atoms. Cycloalkyl; or phenyl which may be substituted by an alkyl group having 1 to 6 carbon atoms. R 10 is independently a linear or branched alkyl or alkenyl group having 2 to 10 carbon atoms, and part of the -CH 2 - group in the alkyl or alkenyl group may be substituted by an -O- group. In addition, part of the hydrogen atoms in the R 8 to R 10 groups may be substituted with halogen atoms.

相對於(A1)成分及(A2)成分的合計量,(C)成分之光聚合起始劑之使用量較佳為2至35質量份,更佳為5至20質量份。(C)成分之摻配比率為2質量份以上時,靈敏度良好,且可具有充分之光聚合速度。(C)成分之摻配比率為25質量份以下時,可具有適度靈敏度,故可得所求圖案線寬及所求圖案邊緣。 The usage amount of the photopolymerization initiator of component (C) is preferably 2 to 35 parts by mass, more preferably 5 to 20 parts by mass relative to the total amount of component (A1) and component (A2). When the blending ratio of component (C) is 2 parts by mass or more, the sensitivity is good and a sufficient photopolymerization speed can be obtained. When the blending ratio of component (C) is 25 parts by mass or less, moderate sensitivity can be achieved, so the desired pattern line width and desired pattern edge can be obtained.

本發明之感光性樹脂組成物中,除了(A)至(C)之成分以外較佳為使用屬於(D)成分之溶劑。溶劑之例係包括甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇等醇類;α-或β-萜品醇等萜烯類;丙酮、甲基乙酮、環己酮、N-甲基-2-吡咯啶酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;賽珞蘇、甲基賽珞蘇、乙基賽珞蘇、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲基醚、丙二醇單乙基醚、二丙二醇單甲基醚、二丙二醇單乙基醚、三乙二醇單甲基醚、三乙二醇單乙基醚等二醇醚類;乙酸乙酯、乙酸丁酯、賽珞蘇乙酸酯、乙基賽珞蘇乙酸酯、丁基賽珞蘇乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯等乙酸酯類。該 等可單獨使用,或併用2種以上並使溶解、混合,藉此形成均勻溶液狀之組成物。 In the photosensitive resin composition of the present invention, it is preferable to use a solvent belonging to the component (D) in addition to the components (A) to (C). Examples of solvents include alcohols such as methanol, ethanol, n-propanol, isopropyl alcohol, ethylene glycol, and propylene glycol; terpenes such as α- or β-terpineol; acetone, methyl ethyl ketone, cyclohexanone, Ketones such as N-methyl-2-pyrrolidinone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; cellulosine, methylcellulose, ethylcellulose, carbitol, and Carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl Ether, triethylene glycol monoethyl ether and other glycol ethers; ethyl acetate, butyl acetate, cellulose acetate, ethyl cellulose acetate, butyl cellulose acetate, carboxyl Acetate esters such as ethanol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate. the etc. can be used alone, or two or more types can be used in combination and dissolved and mixed to form a uniform solution-like composition.

又,本發明之感光性樹脂組成物中視需要可摻配硬化劑、硬化促進劑、熱聚合抑制劑及抗氧化劑、塑化劑、填充材、調平劑、消泡劑、界面活性劑、耦合劑等添加劑。 In addition, the photosensitive resin composition of the present invention may be blended with a hardener, a hardening accelerator, a thermal polymerization inhibitor and an antioxidant, a plasticizer, a filler, a leveling agent, a defoaming agent, a surfactant, and a coupling agent as necessary. agents and other additives.

硬化劑之例係包括使熱硬化性環氧化合物硬化的胺系化合物、多元羧酸系化合物、酚樹脂、胺基樹脂、二氰二胺、路易士酸錯合物等。以提高硬化膜與基板之密著性之觀點來看,該等中較佳為二氰二胺。 Examples of the hardener include amine compounds that harden thermosetting epoxy compounds, polycarboxylic acid compounds, phenol resins, amino resins, dicyandiamide, Lewis acid complexes, and the like. From the viewpoint of improving the adhesion between the cured film and the substrate, dicyandiamide is preferred among these.

硬化促進劑之例係包括促進熱硬化性環氧化合物的硬化的三級胺、四級銨鹽、三級膦、四級鏻鹽、硼酸酯、路易士酸、有機金屬化合物、咪唑類等。 Examples of hardening accelerators include tertiary amines, quaternary ammonium salts, tertiary phosphines, quaternary phosphonium salts, borate esters, Lewis acids, organic metal compounds, imidazoles, etc. that accelerate the hardening of thermosetting epoxy compounds. .

熱聚合抑制劑及抗氧化劑之例係包括氫醌、氫醌單甲基醚、鄰苯三酚、第三丁基苯二酚、酚噻

Figure 112121275-A0202-12-0019-35
、受阻酚系化合物等。塑化劑之例係包括鄰苯二甲酸二丁酯、鄰苯二甲酸二辛酯、磷酸三甲苯酯等。填充劑之例係包括玻璃纖維、二氧化矽、雲母、氧化鋁等。調平劑或消泡劑之例係包括聚矽氧系、氟系、丙烯酸系之化合物。界面活性劑之例係包括月桂基硫酸銨、聚氧伸乙基烷基醚硫酸三乙醇胺等陰離子界面活性劑、硬脂基胺乙酸酯、月桂基三甲基銨氯化物等陽離子界面活性劑、月桂基二甲胺氧化物、月桂基羧甲基羥基乙基咪唑啉鎓甜菜鹼等兩性界面活性劑、聚氧伸乙基月桂基醚、聚氧伸乙基硬脂基醚、山梨醇酐單硬脂酸酯等非離子界面活性劑、以聚二甲基矽氧烷等為主骨架之聚矽氧系界面活性劑、氟系界面活性劑等。耦合劑之例係包括3-(環氧丙基氧基)丙基三甲氧基矽烷、3- 丙烯醯氧基丙基三甲氧基矽烷、3-異氰酸酯丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等。 Examples of thermal polymerization inhibitors and antioxidants include hydroquinone, hydroquinone monomethyl ether, pyrogallol, tert-butylquinone, and phenothiophene
Figure 112121275-A0202-12-0019-35
, hindered phenol compounds, etc. Examples of plasticizers include dibutyl phthalate, dioctyl phthalate, tricresyl phosphate, and the like. Examples of fillers include glass fiber, silica, mica, alumina, etc. Examples of leveling agents or defoaming agents include silicone-based, fluorine-based, and acrylic-based compounds. Examples of surfactants include anionic surfactants such as ammonium lauryl sulfate and polyoxyethylene alkyl ether sulfate triethanolamine, and cationic surfactants such as stearylamine acetate and lauryltrimethylammonium chloride. , lauryl dimethylamine oxide, lauryl carboxymethyl hydroxyethylimidazolinium betaine and other amphoteric surfactants, polyoxyethylene lauryl ether, polyoxyethylene ethyl stearyl ether, sorbitan anhydride Nonionic surfactants such as monostearate, polysiloxy surfactants with polydimethylsiloxane as the main skeleton, fluorine surfactants, etc. Examples of coupling agents include 3-(epoxypropyloxy)propyltrimethoxysilane, 3-acryloxypropyltrimethoxysilane, 3-isocyanatepropyltriethoxysilane, and 3-urea Propyltriethoxysilane, etc.

本發明之感光性樹脂組成物在去除屬於(D)成分之溶劑之固形分(固形分中包括硬化後成為固形分之光聚合性化合物)中,屬於(A)成分之樹脂成分、屬於(B)成分之遮光成分、屬於(C)成分之光聚合起始劑之合計較佳為含有80質量%以上,更佳為含有90質量%以上。屬於(D)成分之溶劑量會依目標黏度而變,但相對於整體量,較佳為40至90質量%。 The photosensitive resin composition of the present invention removes the solid content of the solvent that is the component (D) (the solid content includes a photopolymerizable compound that becomes a solid content after hardening), and the resin component that is the component (A) and the component that is the component (B) ) component and the photopolymerization initiator belonging to (C) component preferably contain 80 mass% or more, more preferably 90 mass% or more. The amount of solvent belonging to component (D) will vary depending on the target viscosity, but relative to the total amount, it is preferably 40 to 90% by mass.

又,例如可將感光性樹脂組成物之溶液塗布於基板等,使溶劑乾燥並照射光(包括紫外線、輻射線等)使之硬化,藉此獲得本發明之感光性樹脂組成物硬化而成之硬化膜。使用光罩等設置照光部分與非照光部分,僅使照光部分硬化,並以鹼溶液溶解其他部分,則可獲得所求圖案。也可在不形成圖案下使用。 Furthermore, for example, the photosensitive resin composition of the present invention can be cured by applying a solution of the photosensitive resin composition to a substrate, drying the solvent, and curing it by irradiating light (including ultraviolet rays, radiation, etc.) Hardened film. The desired pattern can be obtained by setting the illuminated and non-illuminated parts using a mask, etc., hardening only the illuminated parts, and dissolving the other parts with an alkali solution. Can also be used without patterning.

又,本發明之感光性樹脂組成物硬化而成之硬化膜其膜厚1μm之硬化膜的遮光度OD[μm-1]較佳為1.5以上,更佳為1.8以上,又更佳為2.0以上。又,本發明之感光性樹脂組成物硬化而成之硬化膜含有(B1a)成分時,以SCI方式取得的反射率較佳為未達6.5%,更佳為未達6.0%,又更佳為未達5.5%。又,本發明之感光性樹脂組成物硬化而成之硬化膜在不需要IR透過性且不含(B1a)成分時,以SCI方式取得的反射率較佳為未達6.0%,更佳為未達5.5%,又更佳為未達5.0%。又,本發明之感光性樹脂組成物硬化而成之硬化膜以SCE方式所取得的明度較佳為未達6.9,更佳為未達6.0,又更佳為未達3.0。藉由抑制明度而可獲得視覺確認性極為優異且具有高漆黑性之硬化膜(遮光膜)之顯示裝置。 Moreover, the light shielding degree OD [μm -1 ] of the cured film formed by curing the photosensitive resin composition of the present invention with a film thickness of 1 μm is preferably 1.5 or more, more preferably 1.8 or more, and still more preferably 2.0 or more. . Moreover, when the cured film formed by curing the photosensitive resin composition of the present invention contains the component (B1a), the reflectance obtained by the SCI method is preferably less than 6.5%, more preferably less than 6.0%, and still more preferably Less than 5.5%. Moreover, when the cured film formed by curing the photosensitive resin composition of the present invention does not require IR transmittance and does not contain the (B1a) component, the reflectance obtained by the SCI method is preferably less than 6.0%, more preferably less than 6.0%. reaches 5.5%, and preferably less than 5.0%. Furthermore, the brightness of the cured film obtained by curing the photosensitive resin composition of the present invention by SCE is preferably less than 6.9, more preferably less than 6.0, and still more preferably less than 3.0. By suppressing brightness, a display device can be obtained with a cured film (light-shielding film) that has extremely excellent visual visibility and high pitch blackness.

本發明之硬化膜(遮光膜)可用於彩色濾光片或觸控面板所使用之黑色矩陣、或包含有機EL元件之電場發光裝置、彩色液晶顯示裝置、影像感應 器等各種多色顯示體中的各色區分用或遮光用隔壁材或像素定義層、及包圍顯示器的顯示部分之表框等顯示器構成要素。根據本發明可降低著色層(包括黑光阻層)與基板之界面的外光反射、或例如用於有機EL元件時元件發光的反射。亦即,藉由降低外光反射而可提高視覺確認性,或改善發光側的光取出效率,藉此可實現低消耗電力化。 The cured film (light-shielding film) of the present invention can be used for color filters or black matrices used in touch panels, or electric field light-emitting devices including organic EL elements, color liquid crystal display devices, and image sensors. In various multi-color displays such as monitors, display components such as partition materials for color differentiation or light shielding, pixel definition layers, and frames surrounding the display portion of the display. According to the present invention, the external light reflection at the interface between the colored layer (including the black photoresist layer) and the substrate can be reduced, or the reflection of the light emitted by the element, for example, when used in an organic EL element. That is, by reducing external light reflection, visual confirmation can be improved, or light extraction efficiency on the light emitting side can be improved, thereby achieving low power consumption.

又,例如可於透明基材上形成膜厚為1.0至2.0μm之硬化膜,於遮光膜形成後藉由光刻形成紅、藍、及綠各像素,藉此製作具有本發明之硬化膜(遮光膜)作為黑色矩陣之彩色濾光片或觸控面板,此外,也可藉由以噴墨製程於遮光膜中注入紅、藍及綠之印墨而製作。 In addition, for example, a cured film with a film thickness of 1.0 to 2.0 μm can be formed on a transparent substrate, and red, blue, and green pixels are formed by photolithography after the light-shielding film is formed, thereby producing the cured film of the present invention ( Light-shielding film) is used as a black matrix color filter or touch panel. In addition, it can also be produced by injecting red, blue and green inks into the light-shielding film using an inkjet process.

又,本發明之感光性樹脂組成物硬化而成之硬化膜(遮光膜)可使用作為液晶顯示裝置之黑柱間隔件。例如可使用單一黑色光阻製作複數個膜厚相異之部分,使一者發揮作為間隔件之功能,使另一者發揮作為黑色矩陣之功能。 Furthermore, a cured film (light-shielding film) obtained by curing the photosensitive resin composition of the present invention can be used as a black column spacer in a liquid crystal display device. For example, a single black photoresist can be used to produce multiple parts with different film thicknesses, so that one can function as a spacer and the other can function as a black matrix.

具體例示藉由塗布、乾燥感光性樹脂組成物而成膜硬化膜之成膜方法的各步驟。 Each step of the film-forming method of forming a cured film by coating and drying a photosensitive resin composition is specifically illustrated.

於基板塗布感光性樹脂組成物之方法可採用公知溶液浸漬法、噴霧法、使用輥塗布機、刀背塗布機(land coater)、狹縫塗布機或旋轉機之方法等的任意方法。藉由該等方法塗布為所求厚度後,去除溶劑(預烤),藉此形成覆膜。預烤可藉由烘箱、加熱板等的加熱、真空乾燥、或將該等組合而進行。預烤中的加熱溫度及加熱時間可因應所使用之溶劑適當地選擇,但例如較佳為在60至120℃進行1至10分鐘。 The photosensitive resin composition can be coated on the substrate by any method such as a known solution dipping method, a spray method, a method using a roll coater, a land coater, a slit coater, or a rotary machine. After coating to a desired thickness by these methods, the solvent is removed (prebaking) to form a coating. Prebaking can be performed by heating in an oven, a hot plate, etc., vacuum drying, or a combination thereof. The heating temperature and heating time in prebaking can be appropriately selected according to the solvent used, but for example, it is preferably 60 to 120° C. for 1 to 10 minutes.

曝光所使用之輻射線可使用例如可見光、紫外線、遠紫外線、電子束、X射線等,但輻射之波長範圍較佳為250至450nm。又,適合於該鹼顯影之顯影液例如可使用碳酸鈉、碳酸鉀、氫氧化鉀、二乙醇胺、四甲基銨氫氧化物等水溶液。可配合樹脂層之特性而適當地選擇該等顯影液,但視需要添加界面活性劑亦為有效。顯影溫度較佳為20至35℃,可使用市售顯影機或超音波洗淨機等精密地形成精細圖像。又,鹼顯影後通常進行水洗。顯影處理法可應用噴淋顯影法、噴灑顯影法、浸泡(浸漬)顯影法、覆液(puddle)顯影法等。 The radiation used for exposure can be, for example, visible light, ultraviolet light, far ultraviolet light, electron beam, X-ray, etc., but the wavelength range of the radiation is preferably 250 to 450 nm. In addition, as a developing solution suitable for this alkali development, for example, aqueous solutions such as sodium carbonate, potassium carbonate, potassium hydroxide, diethanolamine, and tetramethylammonium hydroxide can be used. The developer can be appropriately selected according to the characteristics of the resin layer, but it is also effective to add a surfactant if necessary. The development temperature is preferably 20 to 35°C, and a commercially available developing machine or ultrasonic cleaning machine can be used to accurately form fine images. In addition, water washing is usually performed after alkali development. As the development treatment method, spray development method, spray development method, immersion development method, puddle development method, etc. can be applied.

用上述方式顯影後,在80至150℃進行20至100分鐘之熱處理(後烤)。該後烤的目的為提高經圖案化的硬化膜(遮光膜)與基板的密著性等。其與預烤同樣地以藉由烘箱、加熱板等的加熱而進行。本發明之經圖案化的硬化膜(遮光膜)係經過光刻法的各步驟而形成。接著結束藉由熱進行的聚合或硬化(將兩者合稱為硬化),而可獲得具有所求圖案之遮光膜。 After development using the above method, heat treatment (post-baking) is performed at 80 to 150°C for 20 to 100 minutes. The purpose of this post-baking is to improve the adhesion between the patterned cured film (light-shielding film) and the substrate. This is performed by heating with an oven, a hot plate, etc., like prebaking. The patterned cured film (light-shielding film) of the present invention is formed through various steps of photolithography. Then, polymerization or curing by heat is completed (the two are collectively referred to as curing), and a light-shielding film having a desired pattern can be obtained.

如前述,本發明之感光性樹脂組成物不僅適合於藉由曝光、鹼顯影等操作形成精細圖案,以往之藉由網版印刷形成圖案也可獲得相同之遮光性、密著性、電絕緣性、耐熱性、耐藥性優異之遮光膜。 As mentioned above, the photosensitive resin composition of the present invention is not only suitable for forming fine patterns through operations such as exposure and alkali development, but also can obtain the same light-shielding properties, adhesion, and electrical insulation properties as conventional patterns formed by screen printing. , a light-shielding film with excellent heat resistance and drug resistance.

(實施例) (Example)

以下根據實施例及比較例具體說明本發明之實施型態,但本發明並不限定於該等。 The embodiments of the present invention will be described in detail below based on examples and comparative examples, but the present invention is not limited to these.

首先說明屬於(A1)成分之含有聚合性不飽和基之鹼可溶性樹脂之合成例,在未特別說明下,該等合成例中樹脂的評定是用以下方式進行。 First, a synthesis example of the alkali-soluble resin containing a polymerizable unsaturated group that is the component (A1) will be described. Unless otherwise specified, the evaluation of the resin in these synthesis examples is performed in the following manner.

[固形分濃度] [Solid content concentration]

將合成例中所得之樹脂溶液1g含浸於玻璃濾器〔重量:W0(g)〕並秤量〔W1(g)〕,由在160℃加熱2小時後之重量〔W2(g)〕藉由下式而求得。 Impregnate 1 g of the resin solution obtained in the synthesis example into a glass filter [weight: W0 (g)] and weigh [W1 (g)]. From the weight [W2 (g)] after heating at 160°C for 2 hours, the following formula is used And seek for it.

固形分濃度(重量%)=100×(W2-W0)/(W1-W0)。 Solid concentration (weight%)=100×(W2-W0)/(W1-W0).

[酸價] [acid price]

將樹脂溶液溶解於二

Figure 112121275-A0202-12-0023-36
烷,使用電位差滴定裝置「COM-1600」(平沼產業股份有限公司製)以1/10N-KOH水溶液滴定而求得。 Dissolve the resin solution in two
Figure 112121275-A0202-12-0023-36
Alkane was obtained by titrating a 1/10N-KOH aqueous solution using a potentiometric titration device "COM-1600" (manufactured by Hiranuma Sangyo Co., Ltd.).

[分子量] [Molecular weight]

以凝膠滲透層析法(GPC)「HLC-8220GPC」(TOSOH股份有限公司製,溶劑:四氫呋喃,管柱:TSKgelSuper H-2000(2支)+TSKgelSuper H-3000(1支)+TSKgelSuper H-4000(1支)+TSKgelSuper H-5000(1支)(TOSOH股份有限公司製),溫度:40℃,速度:0.6ml/min)測定,作為標準聚苯乙烯(TOSOH股份有限公司製PS-Oligomer Kit)換算值而求得重量平均分子量(Mw)。 Gel permeation chromatography (GPC) "HLC-8220GPC" (manufactured by TOSOH Co., Ltd., solvent: tetrahydrofuran, column: TSKgelSuper H-2000 (2 pieces) + TSKgelSuper H-3000 (1 piece) + TSKgelSuper H- 4000 (1 piece) + TSKgelSuper H-5000 (1 piece) (manufactured by TOSOH Co., Ltd.), temperature: 40°C, speed: 0.6ml/min), measured as standard polystyrene (PS-Oligomer, produced by TOSOH Co., Ltd. Kit) to obtain the weight average molecular weight (Mw).

[測定一次粒徑] [Measurement of primary particle size]

將含有粒子的溶液以溶劑稀釋為粒子濃度0.1wt%左右,將所得分散液滴入附有碳支撐膜之金屬製網而製作測定用樣品,藉由穿透式電子顯鏡(TEM;日本電子公司製JEM-2000EX)觀測該測定用樣品,以所得粒徑為一次粒徑。 The solution containing the particles was diluted with a solvent to a particle concentration of about 0.1wt%, and the resulting dispersion was dropped into a metal mesh with a carbon support film to prepare a sample for measurement, which was analyzed by transmission electron microscopy (TEM; JEOL Ltd. The sample for measurement was observed using JEM-2000EX (manufactured by the company), and the obtained particle size was regarded as the primary particle size.

[測定平均二次粒徑] [Measurement of average secondary particle size]

對含有遮光成分的分散液係藉由動態光散射法之粒度分佈計(大塚電子股份有限公司製粒徑分析儀FPAR-1000)以累積量法測定所求得之平均二次粒徑。含有(B1)或(B3)成分之分散液係以分散於丙二醇單甲基醚乙酸酯(PGMEA)之粒子濃度成為0.1至0.5質量%之方式稀釋形成測定用樣品。又,含有(B2)成分之分 散液中,以成為可測定的散射強度之方式以甲醇稀釋成粒子濃度為1至10質量%,並作為測定用樣品。 The average secondary particle size of the dispersion containing the light-shielding component was measured by the cumulative volume method using a dynamic light scattering particle size distribution meter (Particle Size Analyzer FPAR-1000 manufactured by Otsuka Electronics Co., Ltd.). The dispersion liquid containing component (B1) or (B3) is diluted so that the concentration of particles dispersed in propylene glycol monomethyl ether acetate (PGMEA) becomes 0.1 to 0.5% by mass to form a sample for measurement. Also, those containing component (B2) The dispersion was diluted with methanol to a particle concentration of 1 to 10% by mass such that the scattering intensity could be measured, and used as a sample for measurement.

合成例所使用之縮寫如下。 The abbreviations used in the synthesis examples are as follows.

BPFE:雙酚茀型環氧化合物(9,9-雙(4-羥基苯基)茀與氯甲基環氧乙烷的反應物。通式(1)之化合物中X為茀-9,9-二基、R1至R4為氫之化合物)。 BPFE: The reaction product of bisphenol fluoride type epoxy compound (9,9-bis(4-hydroxyphenyl) fluorine and chloromethyl ethylene oxide. In the compound of general formula (1), X is fluorine-9,9 -Diyl, compounds in which R 1 to R 4 are hydrogen).

AA:丙烯酸。 AA: Acrylic.

BPDA:3,3’,4,4’-聯苯基四羧酸二酐。 BPDA: 3,3’,4,4’-biphenyltetracarboxylic dianhydride.

THPA:四氫鄰苯二甲酸酐。 THPA: Tetrahydrophthalic anhydride.

TEAB:溴化四乙基銨。 TEAB: tetraethylammonium bromide.

PGMEA:丙二醇單甲基醚乙酸酯。 PGMEA: propylene glycol monomethyl ether acetate.

PTMA:新戊四醇四[巰基乙酸酯]。 PTMA: neopentylerythritol tetrakis[thioglycolate].

DPHA:二新戊四醇六丙烯酸酯(與二新戊四醇五丙烯酸酯的混合物)。 DPHA: dipenterythritol hexaacrylate (mixture with dipenterythritol pentaacrylate).

HQ:氫醌。 HQ: hydroquinone.

BzDMA:苄基二甲胺。 BzDMA: Benzyldimethylamine.

[合成例1] [Synthesis example 1]

於附迴流冷卻器之500ml四口燒瓶中加入BPFE(50.0g,0.10莫耳)、AA(14.1g,0.20莫耳)、PGMEA(67g)及TPP(0.26g),於100至105℃攪拌12小時並反應。接著於燒瓶內加入BPDA(14.4g,0.05莫耳)、THPA(7.4g,0.05莫耳),於120至125℃攪拌6小時,而獲得含有不飽和基之鹼可溶性樹脂(A1)-1。所得樹脂溶液之固形分濃度為56質量%,酸價(固形分換算)為96mgKOH/g,GPC分析之Mw為3600。 Add BPFE (50.0g, 0.10 mol), AA (14.1g, 0.20 mol), PGMEA (67g) and TPP (0.26g) into a 500ml four-necked flask with a reflux cooler, and stir at 100 to 105°C for 12 hours and react. Then, BPDA (14.4 g, 0.05 mol) and THPA (7.4 g, 0.05 mol) were added to the flask, and the mixture was stirred at 120 to 125° C. for 6 hours to obtain an alkali-soluble resin (A1)-1 containing unsaturated groups. The solid content concentration of the obtained resin solution was 56% by mass, the acid value (in terms of solid content) was 96 mgKOH/g, and the Mw analyzed by GPC was 3600.

[合成例2] [Synthesis example 2]

於附迴流冷卻器之500ml四口燒瓶中加入BPFE(50.0g,0.1莫耳)、AA(14.1g,0.2莫耳)、PGMEA(67g)及TPP(0.26g),於100至105℃攪拌12小時反應。接著,於燒瓶內加入BPDA(20.9g,0.07莫耳)、THPA(0.23g,0.015莫耳),於120至125℃攪拌6小時,而獲得含有不飽和基之鹼可溶性樹脂(A1)-2。所得樹脂溶液之固形分濃度為56質量%,酸價(固形分換算)為102mgKOH/g,GPC分析之Mw為7000。 Add BPFE (50.0g, 0.1 mol), AA (14.1g, 0.2 mol), PGMEA (67g) and TPP (0.26g) into a 500ml four-necked flask with a reflux cooler, and stir at 100 to 105°C for 12 hour response. Next, BPDA (20.9g, 0.07 mol) and THPA (0.23g, 0.015 mol) were added to the flask, and stirred at 120 to 125° C. for 6 hours to obtain alkali-soluble resin (A1)-2 containing unsaturated groups. . The solid content concentration of the obtained resin solution was 56% by mass, the acid value (in terms of solid content) was 102 mgKOH/g, and the Mw analyzed by GPC was 7000.

[合成例3] [Synthesis example 3]

於1L四口燒瓶內加入PTMA(20g,巰基0.19莫耳))、DPHA(212g(丙烯醯基2.12莫耳))、PGMEA(58g)、HQ(0.1g)、及BzDMA(0.01g),於60℃反應12小時,而獲得樹枝狀聚合物溶液(A2)-3。樹枝狀聚合物溶液之固形分濃度為80質量%,GPC分析之Mw為10000。又,所得樹枝狀聚合物以碘滴定法確認巰基消失。 Add PTMA (20g, 0.19 mole of mercapto group), DPHA (212g (2.12 mole of acrylyl group)), PGMEA (58g), HQ (0.1g), and BzDMA (0.01g) into a 1L four-necked flask. The reaction was carried out at 60° C. for 12 hours to obtain a dendritic polymer solution (A2)-3. The solid content concentration of the dendrimer solution was 80% by mass, and the Mw analyzed by GPC was 10,000. In addition, the obtained dendrimer was confirmed to have lost thiol groups by iodine titration.

[合成例4] [Synthesis Example 4]

於附迴流冷卻器之500ml四口燒瓶中加入BPFE(114.4g,0.23mol)、AA(33.2g,0.46mol)、PGMEA(156g)及TEAB(0.48g),於100至105℃加熱下攪拌20小時反應。接著於燒瓶內加入BPDA(44.1g,0.15mol)、THPA(0.76g,0.005mol),於120至125℃在加熱下攪拌6小時,而獲得含有不飽和基之鹼可溶性樹脂(A1)-3。所得樹脂溶液之固形分濃度為55.6質量%,酸價(固形分換算)為93mgKOH/g,GPC分析之Mw為8300。 Add BPFE (114.4g, 0.23mol), AA (33.2g, 0.46mol), PGMEA (156g) and TEAB (0.48g) into a 500ml four-necked flask with a reflux cooler, and stir for 20 seconds under heating at 100 to 105°C. hour response. Then add BPDA (44.1g, 0.15mol) and THPA (0.76g, 0.005mol) into the flask, and stir under heating at 120 to 125°C for 6 hours to obtain alkali-soluble resin (A1)-3 containing unsaturated groups. . The solid content concentration of the obtained resin solution was 55.6% by mass, the acid value (in terms of solid content) was 93 mgKOH/g, and the Mw analyzed by GPC was 8300.

又,藉由以下方法調製表面以染料被覆的碳黑。 Moreover, carbon black whose surface was coated with dye was prepared by the following method.

[調製例1] [Preparation example 1]

將碳黑(TPX-1099:cabot公司製)1000g與水混合而調製漿體10L,於95℃攪拌1小時,放冷後水洗。將其再次與水混合處理而調製漿體10L,添加70%之 硝酸42.9g,於40℃攪拌4小時。將其放冷,水洗後再次與水混合而調製漿體10L,添加13%之次氯酸鈉水溶液769.2g,於40℃攪拌6小時。將其放冷,水洗後再次與水混合而調製漿體10L,添加純度38.4%之染料(Direct Deep BLACK)38.1g,於40℃攪拌1小時,其後進一步添加硫酸鋁10.1g,於40℃攪拌1小時。將其放冷後水洗並過濾乾燥,而獲得被覆染料的碳黑。 1000 g of carbon black (TPX-1099: Cabot Co., Ltd.) was mixed with water to prepare 10 L of slurry, and the mixture was stirred at 95° C. for 1 hour, allowed to cool, and then washed with water. Mix it with water again to prepare 10L of slurry, add 70% of 42.9g of nitric acid, stirred at 40°C for 4 hours. This was cooled, washed with water, and mixed with water again to prepare 10 L of slurry. 769.2 g of 13% sodium hypochlorite aqueous solution was added, and the mixture was stirred at 40° C. for 6 hours. Let it cool, wash it with water, mix it with water again to prepare 10L of slurry, add 38.1g of dye (Direct Deep BLACK) with a purity of 38.4%, stir at 40°C for 1 hour, and then add 10.1g of aluminum sulfate and stir at 40°C. Stir for 1 hour. After cooling, the mixture is washed with water, filtered and dried to obtain dye-coated carbon black.

將上述被覆染料的碳黑、高分子分散劑、及PGMEA混合並以珠磨機分散,而獲得被覆染料的碳黑之濃度為25.0質量%、高分子分散劑之濃度為10.0質量%之碳黑分散液(B1b)。 The above dye-coated carbon black, polymer dispersant, and PGMEA are mixed and dispersed with a bead mill to obtain carbon black with a concentration of 25.0 mass% of the dye-coated carbon black and a concentration of 10.0 mass% of the polymer dispersant. Dispersion (B1b).

使用合成例1至3及調整例1所準備之成分及下述成分進行實驗1至實驗3。 Experiments 1 to 3 were conducted using the components prepared in Synthesis Examples 1 to 3 and Adjustment Example 1 and the following components.

(含有聚合性不飽和基之鹼可溶性樹脂) (Alkali-soluble resin containing polymerizable unsaturated groups)

(A1)-1:上述合成例1所得鹼可溶性樹脂溶液。 (A1)-1: The alkali-soluble resin solution obtained in Synthesis Example 1 above.

(A1)-2:上述合成例2所得鹼可溶性樹脂溶液。 (A1)-2: The alkali-soluble resin solution obtained in Synthesis Example 2 above.

(具有至少2個以上不飽和鍵之光聚合性化合物) (Photopolymerizable compound having at least 2 unsaturated bonds)

(A2)-1:新戊四醇三丙烯酸酯與新戊四醇四丙烯酸酯的混合物(Aronix M-450,東亞合成股份有限公司製)。 (A2)-1: A mixture of neopentylerythritol triacrylate and neopentylerythritol tetraacrylate (Aronix M-450, manufactured by Toagosei Co., Ltd.).

(A2)-2:二新戊四醇五丙烯酸酯與六丙烯酸酯的混合物(DPHA(丙烯酸當量96至115),日本化藥股份有限公司製)。 (A2)-2: A mixture of dipenterythritol pentaacrylate and hexaacrylate (DPHA (acrylic acid equivalent: 96 to 115), manufactured by Nippon Kayaku Co., Ltd.).

(A2)-3:上述合成例3所得樹脂狀聚合物。 (A2)-3: The resinous polymer obtained in Synthesis Example 3 above.

(環氧化合物) (epoxy compound)

(A3)-1:Celloxide 2021P(Daicel股份有限公司製)。 (A3)-1: Celloxide 2021P (manufactured by Daicel Co., Ltd.).

(A3)-2:EHPE3150P(Daicel股份有限公司製)。 (A3)-2: EHPE3150P (made by Daicel Co., Ltd.).

(黑色顏料分散液) (black pigment dispersion)

(B1a):黑色顏料(內醯胺黑BASF公司製IrgaphorS100CF)15.0質量%、高分子分散劑4.5質量%之PGMEA分散液(固形分19.5%,黑色顏料之平均二次粒徑240nm)。 (B1a): PGMEA dispersion of 15.0% by mass of black pigment (lactam black Irgaphor S100CF manufactured by BASF) and 4.5% by mass of polymer dispersant (solid content: 19.5%, average secondary particle size of black pigment: 240 nm).

(B1b):上述調製例1所得被覆染料的碳黑分散體。 (B1b): The dye-coated carbon black dispersion obtained in Preparation Example 1 above.

(氟化鎂及/或冰晶石微粒子) (Magnesium fluoride and/or cryolite particles)

(B2):氟化鎂分散體(MgF2為20.0質量%,高分子分散劑6.2質量%(固形分26.2質量%),平均二次粒徑47nm)。 (B2): Magnesium fluoride dispersion (20.0 mass% MgF 2 , 6.2 mass% polymer dispersant (26.2 mass% solid content), average secondary particle size 47 nm).

(二氧化矽微粒子) (SiO2 fine particles)

(B2’):二氧化矽分散體「YA010C」(MgF2為20.0質量%(固形分20.0質量%),Admatechs股份有限公司製,平均一次粒徑10nm)。 (B2'): Silica dispersion "YA010C" (MgF 2 : 20.0 mass% (solid content: 20.0 mass%), manufactured by Admatechs Co., Ltd., average primary particle size: 10 nm).

(藍色顏料分散體) (blue pigment dispersion)

(B3):顏料藍15:6(有機顏料成分13.0質量%、高分子分散劑4.6質量%之PGMEA分散液(固形分17.6質量%),平均一次粒徑90nm)。 (B3): Pigment blue 15:6 (PGMEA dispersion liquid (solid content: 17.6 mass%) with 13.0 mass% organic pigment component and 4.6 mass% polymer dispersant, average primary particle size 90nm).

(光聚合起始劑) (Photopolymerization initiator)

(C)-1:ADEKA ARKLS NCI-831,ADEKA股份有限公司製,「ADEKA ARKLS」為同公司之註冊商標)。 (C)-1: ADEKA ARKLS NCI-831, manufactured by ADEKA Co., Ltd., "ADEKA ARKLS" is a registered trademark of the same company).

(溶劑) (solvent)

(D)-1:丙二醇單甲基醚乙酸酯(PGMEA)。 (D)-1: Propylene glycol monomethyl ether acetate (PGMEA).

(D)-2:乳酸乙酯(EL)。 (D)-2: Ethyl lactate (EL).

(D)-3:二乙二醇乙基甲基醚(EDM)。 (D)-3: Diethylene glycol ethyl methyl ether (EDM).

(硬化劑) (hardener)

(其他成分)-1:偏苯三酸酐。 (Other ingredients)-1: Trimellitic anhydride.

(其他成分)-2:二氰二胺。 (Other ingredients)-2: Dicyanodiamide.

(實驗1) (Experiment 1)

用以下順序測定(B1)成分在850nm之透過率。 Use the following procedure to measure the transmittance of component (B1) at 850 nm.

[評定] [Assessment]

用以下方式製作評定所使用之感光性樹脂組成物硬化而成之硬化膜(遮光膜)。 A cured film (light-shielding film) in which the photosensitive resin composition used for evaluation is cured is prepared in the following manner.

((B1)成分在850nm透過率評定用硬化膜(塗膜)之製作) (Preparation of cured film (coating film) for evaluation of transmittance of component (B1) at 850nm)

使用合成例1所得樹脂及屬於(B1)成分之顏料而調製固形分13.5%之PGMEA溶液。以加熱硬化處理後之塗膜成為單位OD=1[/μm]且膜厚1μm之方式調整(B1)成分量。將所得PGMEA溶液以加熱硬化處理後之膜厚成為1μm之方式使用旋轉塗布器塗布於預先以低壓汞燈照射波長254nm的照度為1000mJ/cm2之紫外線並洗淨表面之125mm×125mm玻璃基板「#1737」(康寧公司製)(以下稱為「玻璃基板」)上,使用加熱板於85℃預烤1分鐘,而製作硬化膜(塗膜)。在不覆蓋負性光罩下以i射線照度為30mW/cm2之超高壓汞燈照射40mJ/cm2之紫外線,而進行光硬化。 A PGMEA solution with a solid content of 13.5% was prepared using the resin obtained in Synthesis Example 1 and the pigment belonging to the component (B1). Adjust the amount of component (B1) so that the coating film after heat hardening treatment has unit OD=1[/μm] and a film thickness of 1μm. The obtained PGMEA solution was coated using a spin coater so that the film thickness after heat hardening became 1 μm on a 125 mm × 125 mm glass substrate that had been previously irradiated with ultraviolet light at a wavelength of 254 nm and an illumination of 1000 mJ/cm 2 using a low-pressure mercury lamp and the surface was cleaned. "#1737" (manufactured by Corning Incorporated) (hereinafter referred to as "glass substrate"), prebaked at 85° C. for 1 minute using a hot plate to produce a cured film (coating film). Without covering the negative photomask, use an ultra-high pressure mercury lamp with i-ray illumination of 30mW/ cm2 to irradiate ultraviolet light of 40mJ/ cm2 for photohardening.

接著將曝光的上述硬化膜(遮光膜)藉由在23℃、0.05%之氫氧化鉀溶液以1kgf/cm2之噴淋壓進行在圖案顯現之顯影時間(Break Time=BT)起20秒之顯影處理後,進行5kgf/cm2之噴灑水洗,去除上述硬化膜(遮光膜)之未曝光部分而於玻璃基板上形成硬化膜圖案,使用熱風乾燥機於85℃進行主固化(後烤)60分鐘,而獲得硬化膜(遮光膜)。 Then, the above-mentioned cured film (shielding film) was exposed at 23°C, 0.05% potassium hydroxide solution and a spray pressure of 1kgf/cm 2 for 20 seconds from the development time (Break Time=BT) for pattern development. After the development process, spray water at 5kgf/ cm2 is performed to remove the unexposed part of the above-mentioned cured film (shielding film) to form a cured film pattern on the glass substrate. Use a hot air dryer to perform main curing (post-baking) at 85°C for 60 minutes to obtain a cured film (light-shielding film).

[850nm透過率之評定] [Evaluation of 850nm transmittance]

(評定方法) (evaluation method)

對上述製作之附有硬化膜(遮光膜)之基板使用紫外線-可見光-紅外線分光光度「UH4150」(Hitachi High-Tech Science股份有限公司製)以C光源、入射角2°、波長範圍380至1000nm之條件測定硬化膜(遮光膜)側之透過率。 Use the ultraviolet-visible-infrared spectrophotometer "UH4150" (manufactured by Hitachi High-Tech Science Co., Ltd.) with a C light source, an incident angle of 2°, and a wavelength range of 380 to 1000nm for the substrate with a cured film (shielding film) produced above. Measure the transmittance of the cured film (shielding film) side under the conditions.

(850nm透過率之評定基準) (Evaluation standard for 850nm transmittance)

分別使用(B1a)、(B1b)作為(B1)成分之顏料時,將所製作硬化膜在850nm的透過率是否為80%以上之評定結果呈示於表1。 When (B1a) and (B1b) were respectively used as the pigment of the (B1) component, the evaluation results were shown in Table 1 to determine whether the transmittance of the cured film produced was 80% or more at 850 nm.

[表1]

Figure 112121275-A0202-12-0029-14
[Table 1]
Figure 112121275-A0202-12-0029-14

(實驗2) (Experiment 2)

對於使用(B1a)作為黑色顏料(B1)之組成物評定各種特性。本實驗調製之組成物呈示於表2(單位為質量份)。又,表2中,(D)成分以外皆僅記載固形分量。 Various characteristics were evaluated for the composition using (B1a) as the black pigment (B1). The compositions prepared in this experiment are shown in Table 2 (units are parts by mass). In addition, in Table 2, except for (D) component, only the solid content is described.

[表2]

Figure 112121275-A0202-12-0030-8
[Table 2]
Figure 112121275-A0202-12-0030-8

[評定] [Assessment]

用以下方式製作評定所使用之感光性樹脂組成物硬化而成之硬化膜(遮光膜)。 A cured film (light-shielding film) in which the photosensitive resin composition used for evaluation is cured is prepared in the following manner.

(光學濃度(OD)評定用硬化膜(塗膜)之製作) (Preparation of cured film (coating film) for optical density (OD) evaluation)

將表2所示之感光性樹脂組成物以加熱硬化處理後之膜厚成為1.2μm之方式使用旋轉塗布器塗布於預先以低壓汞燈照射波長254nm之照度為1000mJ/cm2之紫外線並洗淨表面之125mm×125mm玻璃基板「#1737」(康寧公司製)(「玻璃基板」)上,使用加熱板於85℃預烤1分鐘,而製作硬化膜(塗膜)。在不覆蓋負 性光罩下以i射線照度為30mW/cm2之超高壓汞燈照射40mJ/cm2之紫外線,而進行光硬化反應。 The photosensitive resin composition shown in Table 2 was applied using a spin coater so that the film thickness after heat hardening became 1.2 μm, and was irradiated with ultraviolet rays with a wavelength of 254 nm and an illumination of 1000 mJ/cm 2 in advance using a low-pressure mercury lamp, and then washed. On the surface of the 125mm×125mm glass substrate "#1737" (manufactured by Corning Corporation) ("Glass Substrate"), a hot plate was used to pre-bake it at 85°C for 1 minute to produce a cured film (coating film). Without covering the negative photomask, use an ultra-high pressure mercury lamp with an i-ray illumination of 30mW/ cm2 to irradiate ultraviolet light of 40mJ/ cm2 to perform a photohardening reaction.

接著將曝光的上述硬化膜(遮光膜)藉由在23℃、0.05%之氫氧化鉀溶液以1kgf/cm2之噴淋壓進行在圖案顯現之顯影時間(Break Time=BT)起20秒之顯影處理後,進行5kgf/cm2之噴灑水洗,去除上述硬化膜(遮光膜)之未曝光部分而於玻璃基板上形成硬化膜圖案,使用熱風乾燥機於85℃進行主固化(後烤)60分鐘,而獲得實施例11至17及比較例11至12之硬化膜(遮光膜)。 Then, the above-mentioned cured film (shielding film) was exposed at 23°C, 0.05% potassium hydroxide solution and a spray pressure of 1kgf/cm 2 for 20 seconds from the development time (Break Time=BT) for pattern development. After the development process, spray water at 5kgf/ cm2 is performed to remove the unexposed part of the above-mentioned cured film (shielding film) to form a cured film pattern on the glass substrate. Use a hot air dryer to perform main curing (post-baking) at 85°C for 60 minutes, and the cured films (light-shielding films) of Examples 11 to 17 and Comparative Examples 11 to 12 were obtained.

[膜厚測定] [Film thickness measurement]

(評定方法) (evaluation method)

使用階規(KLA-Tencor公司製「TENCOR P-17」)以測定範圍500μm、掃描速度50μm/秒、取樣率20Hz之條件測定玻璃基板表面與硬化膜表面的階差,以其平均值作為硬化膜之平均厚度。 The step gauge ("TENCOR P-17" manufactured by KLA-Tencor) was used to measure the step difference between the glass substrate surface and the cured film surface under the conditions of a measuring range of 500 μm, a scanning speed of 50 μm/second, and a sampling rate of 20 Hz, and the average value was used as the hardened film. The average thickness of the film.

[光學濃度(OD)評定] [Optical density (OD) evaluation]

(評定方法) (evaluation method)

使用透過濃度計「X-rite公司製「X-rite 361T(V)」」測定光學濃度(OD)。從上述測定之膜厚與光學濃度(OD)計算膜厚每1μm之光學濃度(OD)。 The optical density (OD) was measured using a transmission density meter "X-rite 361T (V)" manufactured by X-rite Corporation. The optical density (OD) per 1 μm of film thickness was calculated from the film thickness and optical density (OD) measured above.

光學濃度(OD)是以下式(5)計算。 The optical density (OD) is calculated by the following formula (5).

光學濃度(OD)=-log10T 式(5) Optical concentration (OD)=-log 10 T Formula (5)

(T表示透過率)。 (T stands for transmittance).

[SCI方式之反射率評定] [SCI method reflectivity evaluation]

(評定方法) (evaluation method)

以與光學濃度(OD)評定用硬化膜(遮光膜)相同方式製作附有硬化膜(遮光膜)之基板,對此使用紫外線-可見光-紅外線-分光光度「UH4150」(Hitachi High-Tech Science股份有限公司製)以C光源、入射角2°、波長範圍380至780nm之條件測定硬化膜(遮光膜)側各個的反射率。 A substrate with a cured film (light-shielding film) was produced in the same manner as the cured film (light-shielding film) for optical density (OD) evaluation, and the ultraviolet-visible-infrared-spectrophotometer "UH4150" (Hitachi High-Tech Science Co., Ltd. Co., Ltd.) The reflectance of each cured film (light-shielding film) side was measured under the conditions of C light source, incident angle of 2°, and wavelength range of 380 to 780 nm.

(反射率特性之評定基準) (Evaluation criteria for reflectivity characteristics)

○:SCI方式之反射率未達5.5%。 ○: The reflectivity of SCI method does not reach 5.5%.

△:SCI方式之反射率為5.5%以上且未達6.5%。 △: The reflectivity of SCI method is more than 5.5% and less than 6.5%.

×:SCI方式之反射率為6.5%以上。 ×: The reflectivity of SCI method is above 6.5%.

[SCE方式之明度評定] [SCE method of brightness evaluation]

(評定方法) (evaluation method)

相對於以與光學濃度(OD)評定用硬化膜(遮光膜)相同方式製作附有硬化膜(遮光膜)之基板,對此使用紫外線-可見光-紅外線分光光度「UH4150」(Hitachi High-Tech Science股份有限公司製)以C光源、入射角2°、波長範圍380至780nm之條件測定硬化膜(遮光膜)側以SCE方式的明度。 For producing a substrate with a cured film (light-shielding film) in the same manner as the cured film (light-shielding film) for optical density (OD) evaluation, an ultraviolet-visible-infrared spectrophotometer "UH4150" (Hitachi High-Tech Science Co., Ltd.) measured the brightness of the cured film (light-shielding film) side using the SCE method under the conditions of C light source, incident angle 2°, and wavelength range 380 to 780nm.

(SCE方式之明度之評定基準) (Evaluation criteria for brightness in SCE method)

○:SCE方式之明度未達6.0。 ○: The brightness of SCE method does not reach 6.0.

△:SCE方式之明度為6.0以上且未達6.9。 △: The brightness of the SCE method is 6.0 or more and less than 6.9.

×:SCE方式之明度為6.9以上。 ×: The brightness of the SCE method is 6.9 or more.

(顯影密著性評定用硬化膜(遮光膜)之製作) (Preparation of cured film (shielding film) for evaluation of development adhesion)

將表2所示感光性樹脂組成物以加熱硬化處理後之膜厚成為1.2μm之方式使用旋轉塗布器塗布於預先以低壓汞燈照射波長254nm之照度為1000mJ/cm2之紫外線並洗淨表面之125mm×125mm玻璃基板「#1737」(康寧公司製)(「玻璃基 板」)上,使用加熱板於85℃預烤1分鐘而製作硬化膜(遮光膜)。接著以不存在曝光間隙之方式於乾燥硬化膜上覆蓋線寬為1至20μm之負性光罩,以i射線照度為30mW/cm2之超高壓汞燈照射40mJ/cm2之紫外線,而進行感光部分之光硬化反應。 The photosensitive resin composition shown in Table 2 was applied using a spin coater so that the film thickness after heat hardening became 1.2 μm, and the surface was previously irradiated with ultraviolet rays with a wavelength of 254 nm and an illumination of 1000 mJ/cm 2 using a low-pressure mercury lamp, and the surface was cleaned. On the 125mm×125mm glass substrate "#1737" (manufactured by Corning Incorporated) ("Glass Substrate"), use a hot plate to pre-bake at 85°C for 1 minute to produce a cured film (light-shielding film). Then, cover the dry cured film with a negative photomask with a line width of 1 to 20 μm without an exposure gap, and use an ultra-high-pressure mercury lamp with an i-ray illumination of 30 mW/cm 2 to irradiate ultraviolet rays of 40 mJ/cm 2 for Photohardening reaction of the photosensitive part.

接著將曝光的上述硬化膜(遮光膜)藉由在25℃、0.04%之氫氧化鉀溶液以1kgf/cm2之噴淋壓進行在圖案顯現之顯影時間(Break Time=BT)起+20秒之顯影處理後,進行5kgf/cm2之噴灑水洗,去除上述硬化膜(遮光膜)之未曝光部分,而於玻璃基板上形成硬化膜圖案,使用熱風乾燥機於85℃進行主固化(後烤)60分鐘,而獲得實施例11至17及比較例11至12之硬化膜(遮光膜)。 Then, the exposed cured film (shielding film) is treated with a 0.04% potassium hydroxide solution at 25°C and a spray pressure of 1kgf/cm 2 for 20 seconds starting from the development time (Break Time=BT) for pattern development. After the development treatment, perform spray water washing at 5kgf/ cm2 to remove the unexposed portion of the above-mentioned cured film (shielding film), and form a cured film pattern on the glass substrate. Use a hot air dryer to perform main curing (post-baking) at 85°C. ) for 60 minutes, and the cured films (light-shielding films) of Examples 11 to 17 and Comparative Examples 11 to 12 were obtained.

對於上述所得實施例11至17、比較例11至12之感光性樹脂組成物硬化而成之硬化膜(遮光膜)評定以下項目。 The following items were evaluated about the cured films (light-shielding films) obtained by curing the photosensitive resin compositions of Examples 11 to 17 and Comparative Examples 11 to 12 obtained above.

[顯影密著性評定] [Development adhesion evaluation]

(評定方法) (evaluation method)

對於上述所得使用各寬度之負性光罩形成的圖案,使用光學顯微鏡觀察是否殘留圖案。又,△以上為及格。 The above-obtained patterns formed using negative masks of various widths were observed using an optical microscope to see whether the pattern remained. Also, △ or above is a passing grade.

(顯影密著性之評定基準) (Evaluation criteria for development adhesion)

◎:殘留圖案之最小線寬未達5μm。 ◎: The minimum line width of the remaining pattern is less than 5μm.

○:殘留圖案之最小線寬為5μm以上且未達10μm。 ○: The minimum line width of the remaining pattern is 5 μm or more and less than 10 μm.

△:殘留圖案之最小線寬為10μm以上且未達20μm。 △: The minimum line width of the remaining pattern is 10 μm or more and less than 20 μm.

×:殘留圖案之最小線寬僅為20μm。 ×: The minimum line width of the residual pattern is only 20μm.

[850nm(IR)透過性之評定] [Evaluation of 850nm (IR) transmittance]

(評定方法) (evaluation method)

以與光學濃度(OD)評定用硬化膜(遮光膜)相同方式製作附有硬化膜(遮光膜)之基板,對此使用紫外線-可見光-紅外線分光光度「UH4150」(Hitachi High-Tech Science股份有限公司製)以C光源、入射角2°、波長範圍380至1000nm之條件測定硬化膜(遮光膜)側之透過率。 A substrate with a cured film (light-shielding film) was produced in the same manner as the cured film (light-shielding film) for optical density (OD) evaluation, and an ultraviolet-visible-infrared spectrophotometer "UH4150" (Hitachi High-Tech Science Co., Ltd. (manufactured by our company), measure the transmittance of the cured film (light-shielding film) side under the conditions of C light source, incident angle 2°, and wavelength range 380 to 1000 nm.

(IR透過性之評定基準) (Evaluation criteria for IR transmittance)

○:850nm的透過率為80%以上。 ○: The transmittance at 850 nm is 80% or more.

△:850nm的透過率為20%以上且未達80%。 △: The transmittance at 850 nm is 20% or more and less than 80%.

×:850nm的透過率未達20%。 ×: The transmittance at 850nm is less than 20%.

上述評定結果呈示於表3。 The above evaluation results are presented in Table 3.

[表3]

Figure 112121275-A0202-12-0034-9
[table 3]
Figure 112121275-A0202-12-0034-9

相較於使用二氧化矽粒子的系統(比較例11)或無添加系統(比較例12),實施例11至17之感光性樹脂組成物係可確認在高遮光率中可降低塗膜面的SCI方式之反射率及SCE方式之明度。又,可確認實施例11至17之感光性樹脂組成物硬化而成之硬化膜(遮光膜)皆為顯影密著性良好。 Compared with the system using silica particles (Comparative Example 11) or the additive-free system (Comparative Example 12), it was confirmed that the photosensitive resin compositions of Examples 11 to 17 can reduce the coating film surface at high light shielding rate. The reflectivity of SCI method and the brightness of SCE method. Moreover, it was confirmed that the cured films (light-shielding films) obtained by curing the photosensitive resin compositions of Examples 11 to 17 all had good development adhesion.

(實驗3) (Experiment 3)

對不使用(B1a)而僅使用(B1b)作為黑色顏料(B1)之組成物評定各種特性。將本實驗所調製之組成物呈示於表4(單位為質量份)。又,表4中,(D)成分以外皆僅記載固形分量。 Various characteristics were evaluated for the composition using only (B1b) as the black pigment (B1) without using (B1a). The compositions prepared in this experiment are shown in Table 4 (units are parts by mass). In addition, in Table 4, except for (D) component, only the solid content is described.

[表4]

Figure 112121275-A0202-12-0035-11
[Table 4]
Figure 112121275-A0202-12-0035-11

[評定] [Assessment]

用以下方式製作評定所使用之感光性樹脂組成物硬化而成之硬化膜(遮光膜)。 A cured film (light-shielding film) in which the photosensitive resin composition used for evaluation is cured is prepared in the following manner.

(光學濃度(OD)評定用硬化膜(塗膜)之製作) (Preparation of cured film (coating film) for optical density (OD) evaluation)

將塗布有保護層(OC)劑之125mm×125mm玻璃基板「#1737」(康寧公司製)預先以低壓汞燈照射波長254nm之照度為1000mJ/cm2之紫外線,洗淨表面,於其上以加熱硬化處理後之膜厚成為1.2μm之方式使用旋轉塗布器塗布表1所示之感光性樹脂組成物,使用加熱板於85℃預烤1分鐘,而製作硬化膜(塗膜)。在不覆蓋負性光罩下以i射線照度為30mW/cm2之超高壓汞燈照射40mJ/cm2之紫外線,而進行光硬化反應。 A 125 mm × 125 mm glass substrate "#1737" (manufactured by Corning Incorporated) coated with a protective layer (OC) agent was irradiated with ultraviolet light at a wavelength of 254 nm and an illumination of 1000 mJ/cm 2 in advance with a low-pressure mercury lamp, and the surface was cleaned, and then The photosensitive resin composition shown in Table 1 was applied using a spin coater so that the film thickness after heat curing treatment became 1.2 μm, and was prebaked at 85° C. for 1 minute using a hot plate to produce a cured film (coating film). Without covering the negative photomask, use an ultra-high pressure mercury lamp with an i-ray illumination of 30mW/ cm2 to irradiate ultraviolet light of 40mJ/ cm2 to perform a photohardening reaction.

(保護層劑之製作) (Preparation of protective layer agent)

上述保護層劑係以任意比率包含含有聚合性不飽和基之鹼可溶性樹脂、具有至少2個以上不飽和鍵之光聚合性化合物、光起始劑、溶劑、及其他成分之樹脂組成物。本實驗所使用之組成係如以下所示。 The protective layer agent is a resin composition containing an alkali-soluble resin containing a polymerizable unsaturated group, a photopolymerizable compound having at least two unsaturated bonds, a photoinitiator, a solvent, and other components in any ratio. The composition system used in this experiment is as follows.

(含有聚合性不飽和基之鹼可溶性樹脂) (Alkali-soluble resin containing polymerizable unsaturated groups)

(A1)-3:上述合成例4所得鹼可溶性樹脂溶液。 (A1)-3: The alkali-soluble resin solution obtained in Synthesis Example 4 above.

(具有至少2個以上不飽和鍵之光聚合性化合物) (Photopolymerizable compound having at least 2 unsaturated bonds)

(A2)-2:二新戊四醇五丙烯酸酯與六丙烯酸酯的混合物(DPHA(丙烯酸當量96至115),日本化藥股份有限公司製)。 (A2)-2: A mixture of dipenterythritol pentaacrylate and hexaacrylate (DPHA (acrylic acid equivalent: 96 to 115), manufactured by Nippon Kayaku Co., Ltd.).

(光聚合起始劑) (Photopolymerization initiator)

(C)-2:1-[4-(苯基氫硫基)苯基]辛烷-1,2-二酮2-O-苯甲醯基肟(IRGACURE OXE01,BASF公司製)。 (C)-2: 1-[4-(phenylhydrothio)phenyl]octane-1,2-dione 2-O-benzoyl oxime (IRGACURE OXE01, manufactured by BASF).

(溶劑) (solvent)

(D)-1:丙二醇單甲基醚乙酸酯(PGMEA)。 (D)-1: Propylene glycol monomethyl ether acetate (PGMEA).

(D)-3:二乙二醇乙基甲基醚(EDM)。 (D)-3: Diethylene glycol ethyl methyl ether (EDM).

(矽烷耦合劑) (silica coupling agent)

(其他成分)-3:3-環氧丙氧基丙基三甲氧基矽烷。 (Other ingredients) -3:3-glycidoxypropyltrimethoxysilane.

(界面活性劑) (surfactant)

(其他成分)-4:BYK-302(1質量%PGMEA溶液)(BYK公司製)。 (Other ingredients)-4: BYK-302 (1 mass % PGMEA solution) (manufactured by BYK Corporation).

[表5]

Figure 112121275-A0202-12-0037-12
[table 5]
Figure 112121275-A0202-12-0037-12

(保護層劑塗布基板之製作) (Production of substrate coated with protective layer agent)

將表5所示保護層劑組成物以加熱硬化處理後之膜厚成為0.3μm之方式使用旋轉塗布器塗布於預先以低壓汞燈照射波長254nm之照度為1000mJ/cm2之紫外線並洗淨表面之125mm×125mm玻璃基板「#1737」(康寧公司製)(「玻璃基板」)上,使用加熱板於90℃預烤1分鐘,而製作硬化膜(塗膜)。接著使用熱風乾燥機 於230℃主固化(後烤)30分鐘,而獲得實施例21至24及比較例21所使用之底層基板。 The protective layer agent composition shown in Table 5 is applied using a spin coater so that the film thickness after heat hardening becomes 0.3 μm. The surface is previously irradiated with ultraviolet rays with a wavelength of 254 nm and an illumination of 1000 mJ/cm 2 using a low-pressure mercury lamp and the surface is cleaned. On the 125mm×125mm glass substrate "#1737" (manufactured by Corning Incorporated) ("Glass Substrate"), a hot plate was used to pre-bake at 90°C for 1 minute to produce a cured film (coating film). Then, a hot air dryer was used for main curing (post-baking) at 230° C. for 30 minutes to obtain the underlying substrates used in Examples 21 to 24 and Comparative Example 21.

[膜厚測定] [Film thickness measurement]

(評定方法) (evaluation method)

使用階規(KLA-Tencor公司製「TENCOR P-17」)以測定範圍500μm、掃描速度50μm/秒、取樣率20Hz之條件測定玻璃基板表面與保護層劑硬化膜表面的階差,將其平均值作為保護層劑硬化膜之平均厚度。又,以相同條件測定玻璃基板表面與遮光膜表面的階差,將其平均值作為包含保護層劑硬化膜與遮光膜的硬化膜之平均厚度。由包含該保護層劑硬化膜與遮光膜的硬化膜之平均厚度減去前述保護層劑硬化膜之平均厚度,藉此而求得遮光膜之平均厚度(=包含保護層劑硬化膜與遮光膜的硬化膜之平均厚度-保護層劑硬化膜之平均厚度)。 Using a step gauge ("TENCOR P-17" manufactured by KLA-Tencor Corporation), the step difference between the surface of the glass substrate and the surface of the protective layer agent cured film was measured under the conditions of a measurement range of 500 μm, a scanning speed of 50 μm/second, and a sampling rate of 20 Hz, and averaged the steps. The value is taken as the average thickness of the protective layer agent cured film. Furthermore, the step difference between the glass substrate surface and the light-shielding film surface was measured under the same conditions, and the average value was taken as the average thickness of the cured film including the protective layer agent cured film and the light-shielding film. The average thickness of the protective layer agent cured film and the light-shielding film is subtracted from the average thickness of the cured film including the protective layer agent cured film and the light-shielding film, thereby obtaining the average thickness of the light-shielding film (= including the protective layer agent cured film and the light-shielding film The average thickness of the cured film - the average thickness of the protective layer agent cured film).

[光學濃度(OD)評定] [Optical density (OD) evaluation]

(評定方法) (evaluation method)

除了使用塗布有OC劑之玻璃基板(底層基板)取代玻璃基板之外,以與實驗2相同方法評定。 The evaluation was performed in the same manner as in Experiment 2, except that a glass substrate (underlying substrate) coated with an OC agent was used instead of the glass substrate.

[SCI方式之反射率評定] [SCI method reflectivity evaluation]

(評定方法) (evaluation method)

以與實驗2相同方法評定。 Evaluate in the same way as Experiment 2.

(反射率特性之評定基準) (Evaluation criteria for reflectivity characteristics)

○:SCI方式之反射率未達5.0%。 ○: The reflectance of SCI method does not reach 5.0%.

△:SCI方式之反射率為5.0%以上且未達6.0%。 △: The reflectivity of SCI method is 5.0% or more and less than 6.0%.

×:SCI方式之反射率為6.0%以上。 ×: The reflectivity of SCI method is above 6.0%.

[SCE方式之明度評定] [SCE method of brightness evaluation]

(評定方法) (evaluation method)

以與實驗2相同方法評定。 Evaluate in the same way as Experiment 2.

(SCE方式之明度之評定基準) (Evaluation criteria for brightness in SCE method)

○:SCE方式之明度未達3.0。 ○: The brightness of SCE method does not reach 3.0.

×:SCE方式之明度為3.0以上。 ×: The brightness of the SCE method is 3.0 or more.

(顯影密著性評定用硬化膜(遮光膜)之製作) (Preparation of cured film (shielding film) for evaluation of development adhesion)

除了使用塗布有OC劑之玻璃基板(底層基板)取代玻璃基板之外,以與實驗2相同方法製作。 It was produced in the same manner as Experiment 2 except that a glass substrate (base substrate) coated with an OC agent was used instead of the glass substrate.

對上述所得實施例21至24、比較例21之感光性樹脂組成物硬化而成之硬化膜(遮光膜)評定以下項目。 The following items were evaluated for the cured films (light-shielding films) obtained by curing the photosensitive resin compositions of Examples 21 to 24 and Comparative Example 21 obtained above.

[顯影密著性評定] [Development adhesion evaluation]

(評定方法) (evaluation method)

以與實驗2相同方法評定。又,△以上為及格。 Evaluate in the same way as Experiment 2. Also, △ or above is a passing grade.

(顯影密著性之評定基準) (Evaluation criteria for development adhesion)

◎:殘留圖案之最小線寬未達5μm。 ◎: The minimum line width of the remaining pattern is less than 5μm.

○:殘留圖案之最小線寬為5μm以上且未達10μm。 ○: The minimum line width of the remaining pattern is 5 μm or more and less than 10 μm.

△:殘留圖案之最小線寬為10μm以上且未達20μm。 △: The minimum line width of the remaining pattern is 10 μm or more and less than 20 μm.

×:殘留圖案之最小線寬僅為20μm。 ×: The minimum line width of the residual pattern is only 20μm.

上述評定結果呈示於表6。 The above evaluation results are shown in Table 6.

[表6]

Figure 112121275-A0202-12-0040-13
[Table 6]
Figure 112121275-A0202-12-0040-13

相較於無添加系統(比較例21),實施例21至24之感光性樹脂組成物係可確認在高遮光率中均可降低塗膜面的SCI方式之反射率及SCE方式之明度。又,可確認實施例21至24之感光性樹脂組成物硬化而成之硬化膜(遮光膜)皆為顯影密著性良好。 Compared with the additive-free system (Comparative Example 21), it was confirmed that the photosensitive resin compositions of Examples 21 to 24 can reduce the reflectivity of the SCI method and the brightness of the SCE method of the coating surface even at high light shielding rates. Moreover, it was confirmed that the cured films (light-shielding films) obtained by curing the photosensitive resin compositions of Examples 21 to 24 all had good development adhesion.

(產業利用性) (industrial applicability)

根據本發明之感光性樹脂組成物,可提供兼具低反射率及低明度之感光性樹脂組成物、及使用其之硬化膜、以及彩色濾光片、觸控面板。又,根據該彩色濾光片及觸控面板,可提供視覺確認性優異之各種顯示裝置。 According to the photosensitive resin composition of the present invention, a photosensitive resin composition having both low reflectivity and low brightness, a cured film using the photosensitive resin composition, a color filter, and a touch panel can be provided. In addition, according to the color filter and the touch panel, various display devices with excellent visual confirmation can be provided.

Claims (7)

一種感光性樹脂組成物,係含有: A photosensitive resin composition containing: (A)樹脂成分,係包含含有不飽和基之鹼可溶性樹脂(A1)、具有至少2個以上不飽和鍵之光聚合性化合物(A2)、及熱硬化性環氧化合物(A3); (A) The resin component includes an alkali-soluble resin (A1) containing an unsaturated group, a photopolymerizable compound (A2) having at least two unsaturated bonds, and a thermosetting epoxy compound (A3); (B)遮光成分,係含有黑色顏料(B1)、以及氟化鎂及/或冰晶石微粒子(B2);及 (B) The light-shielding component contains black pigment (B1), magnesium fluoride and/or cryolite particles (B2); and (C)光聚合起始劑。 (C) Photopolymerization initiator. 如請求項1所述之感光性樹脂組成物,其中黑色顏料(B1)含有在製作單位OD:1[/μm]且膜厚1μm之塗膜時850nm之透過率為80%以上之黑色顏料(B1a)。 The photosensitive resin composition according to Claim 1, wherein the black pigment (B1) contains a black pigment ( B1a). 如請求項2所述之感光性樹脂組成物,其中黑色顏料(B1a)為有機黑色顏料。 The photosensitive resin composition according to claim 2, wherein the black pigment (B1a) is an organic black pigment. 如請求項1至3中任一項所述之感光性樹脂組成物,其中相對於遮光成分(B)之總質量,氟化鎂及/或冰晶石微粒子(B2)之比率為1至30質量%。 The photosensitive resin composition according to any one of claims 1 to 3, wherein the ratio of the magnesium fluoride and/or cryolite particles (B2) to the total mass of the light-shielding component (B) is 1 to 30 mass. %. 一種硬化膜,係如請求項1至4中任一項所述之感光性樹脂組成物硬化而成。 A cured film formed by curing the photosensitive resin composition according to any one of claims 1 to 4. 一種顯示器構成要素,係具有如請求項5所述之硬化膜。 A display component having the cured film according to claim 5. 一種顯示裝置,係具有如請求項6所述之顯示器構成要素。 A display device having the display components described in claim 6.
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