TW202124499A - Photosensitive resin composition for black resist, light-shielding film cured the same, color filter and touch panel having the light-shielding film, display device having the color filter and the touch panel - Google Patents

Photosensitive resin composition for black resist, light-shielding film cured the same, color filter and touch panel having the light-shielding film, display device having the color filter and the touch panel Download PDF

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TW202124499A
TW202124499A TW109146244A TW109146244A TW202124499A TW 202124499 A TW202124499 A TW 202124499A TW 109146244 A TW109146244 A TW 109146244A TW 109146244 A TW109146244 A TW 109146244A TW 202124499 A TW202124499 A TW 202124499A
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light
solvent
photosensitive resin
resin composition
shielding film
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内田一幸
小川淳也
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日商日鐵化學材料股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/13338Input devices, e.g. touch panels
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0385Macromolecular compounds which are rendered insoluble or differentially wettable using epoxidised novolak resin
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Optics & Photonics (AREA)
  • Human Computer Interaction (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)

Abstract

An object of the present invention is to provide a photosensitive resin composition for black resist, which has high light-shielding property and low reflectance and can suppress the generation of agglomerates.
The photosensitive resin composition for black resist of the present invention comprises: (A) an unsaturated group-containing photosensitive resin, (B) a photopolymerizable monomer having at least two or more unsaturated bonds, (C) a photopolymerization initiator, (D) at least one light-shielding component selected from black pigments, mixed color pigments and light-shielding materials, (E) silica particles, and (F) a solvent.

Description

黑色阻劑用感光性樹脂組成物、遮光膜、濾色器、觸控面板及顯示裝置 Photosensitive resin composition for black resist, light-shielding film, color filter, touch panel and display device

本發明係關於一種黑色阻劑用感光性樹脂組成物及將該感光性樹脂組成物硬化而成之遮光膜、具有該遮光膜之濾色器及觸控面板、具有該濾色器及觸控面板之顯示裝置。 The present invention relates to a photosensitive resin composition for a black resist, a light-shielding film formed by hardening the photosensitive resin composition, a color filter and a touch panel having the light-shielding film, and a color filter and a touch panel. Panel display device.

近年來,由於行動式終端的蓬勃發展,於使用於戶外或車載的觸控面板及液晶面板等顯示裝置增加。上述顯示裝置中,為了遮蔽背面液晶面板周邊部分的漏光,而在觸控面板外框設置遮光膜,又,為了抑制在顯示黑色時光從畫面漏出的情況、以及為了抑制相鄰的彩色阻劑(color resist)彼此混色,而在上述液晶面板上設置黑色矩陣。 In recent years, due to the vigorous development of mobile terminals, display devices such as touch panels and liquid crystal panels used outdoors or in vehicles have increased. In the above-mentioned display device, a light shielding film is provided on the outer frame of the touch panel in order to shield the light leakage of the peripheral portion of the back liquid crystal panel, and in order to suppress the leakage of light from the screen when displaying black, and to suppress the adjacent color resist ( The color resists are mixed with each other, and a black matrix is provided on the above-mentioned liquid crystal panel.

顯示裝置等中,為了抑制漏光等以改善上述顯示裝置等的畫面辨識性,有提高遮光膜中的黑色顏料的濃度以提升遮光膜之遮光性(降低遮光膜的光穿透性)之情形。相較於透明基材或硬化性樹脂的折射率,黑色顏料的折射率高, 因此提高遮光膜中的黑色顏料濃度時,有導致從與透明基材之形成有遮光膜的面相反之面側觀看時反射率變高之虞。因此,在形成於透明基材上的遮光膜與透明基材的界面中反射增加,進而產生在遮光膜上的倒映、以及與濾色器著色部的反射率之差異所致之黑色矩陣交界明顯等不良情況。 In display devices and the like, in order to suppress light leakage and the like to improve the screen visibility of the above-mentioned display devices and the like, there are cases in which the concentration of black pigment in the light-shielding film is increased to increase the light-shielding property of the light-shielding film (decrease the light transmittance of the light-shielding film). Compared with the refractive index of transparent substrates or curable resins, black pigments have a higher refractive index. Therefore, when the black pigment concentration in the light-shielding film is increased, the reflectance may increase when viewed from the side opposite to the surface on which the light-shielding film of the transparent substrate is formed. Therefore, the reflection at the interface between the light-shielding film formed on the transparent substrate and the transparent substrate increases, and the reflection on the light-shielding film and the black matrix boundary due to the difference in reflectivity with the colored part of the color filter are obvious. And other bad conditions.

因此,期望一種具有高遮光性與低反射率兩者的黑色阻劑用感光性樹脂組成物、將其硬化而成的遮光膜、以及濾色器。 Therefore, a photosensitive resin composition for a black resist having both high light-shielding properties and low reflectance, a light-shielding film formed by curing the photosensitive resin composition, and a color filter are desired.

例如,專利文獻1中揭示一種黑色感光性樹脂組成物,其包含疏水性氧化矽粒子及特定分散劑(胺基甲酸乙酯系分散劑)。根據專利文獻1,藉由使用疏水性氧化矽粒子及特定分散劑,可形成兼具高遮光性及低反射率的黑色矩陣。 For example, Patent Document 1 discloses a black photosensitive resin composition containing hydrophobic silica particles and a specific dispersant (urethane-based dispersant). According to Patent Document 1, by using hydrophobic silica particles and a specific dispersant, a black matrix having both high light-shielding properties and low reflectance can be formed.

[先前技術文獻] [Prior Technical Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本特開2015-161815號公報 [Patent Document 1] Japanese Patent Application Publication No. 2015-161815

然而,本案發明人等進行檢討時,發現專利文獻1中記載的黑色感光性樹脂組成物無法得到兼具期望之遮光性與反射率兩者的遮光膜。又,專利文獻1記載的黑色感光性樹脂組成物中,產生源自氧化矽粒子之凝聚物,其可能成為粗線部、外框部漏光以及開口部之異物的原因。 However, when the inventors of the present application conducted an examination, it was found that the black photosensitive resin composition described in Patent Document 1 could not provide a light-shielding film having both desired light-shielding properties and reflectance. In addition, in the black photosensitive resin composition described in Patent Document 1, aggregates derived from silicon oxide particles are generated, which may cause light leakage at the thick line portion, the outer frame portion, and foreign matter in the opening portion.

於是,本案發明人等為了解決先前感光性樹脂組成物中的課題經過精心地檢討,結果發現氧化矽粒子係具有容易透過存在於粒子表面之矽醇基而 凝聚的特徵,一般而言,可藉由以矽烷偶合劑進行被覆而分散於有機溶劑中。然而,不容易以矽烷偶合劑將存在於表面的所有矽醇基進行被覆,在與極性不同的樹脂組成物混合時,分散狀態變得不穩定,而有凝聚的傾向。發現藉由在適當的範圍內混合作為阻劑溶劑之相對介電係數高的極性溶劑,使氧化矽粒子表面的矽醇基藉由溶劑合作用(solvation)穩定,而能夠抑制氧化矽粒子的凝聚。 Therefore, the inventors of the present application have conducted careful examinations to solve the problems in the previous photosensitive resin composition, and found that the silica particles have silanol groups that are easily permeated on the surface of the particles. The characteristic of agglomeration, generally speaking, can be dispersed in an organic solvent by being coated with a silane coupling agent. However, it is not easy to coat all the silanol groups present on the surface with a silane coupling agent, and when mixed with a resin composition having a different polarity, the dispersion state becomes unstable and tends to aggregate. It was found that by mixing a polar solvent with a high relative permittivity as a resist solvent in an appropriate range, the silanol group on the surface of the silica particles can be stabilized by solvation, and the aggregation of the silica particles can be inhibited. .

本發明係鑒於此點而完成者,以提供一種具有高遮光性及低反射率並且可抑制凝聚物之產生的黑色阻劑用感光性樹脂組成物、及將該感光性樹脂組成物硬化而成的遮光膜、具有該遮光膜的濾色器及觸控面板、以及具有該濾色器及觸控面板的顯示裝置為目的。 The present invention was completed in view of this point to provide a photosensitive resin composition for a black resist that has high light-shielding properties and low reflectance and can inhibit the generation of aggregates, and hardened the photosensitive resin composition The light-shielding film, the color filter and touch panel with the light-shielding film, and the display device with the color filter and the touch panel are the purpose.

本發明之黑色阻劑用感光性樹脂組成物,係包含下列成分作為必須成分:(A)含不飽和基之感光性樹脂、(B)具有至少2個以上不飽和鍵的光聚合性單體、(C)光聚合起始劑、(D)選自黑色顏料、混色顏料及遮光材中的至少1種遮光成分、(E)氧化矽粒子、(F)溶劑;其中,前述(F)溶劑包含:為丙二醇單甲醚乙酸酯之第1溶劑、及在23℃的相對介電係數為10至30之第2溶劑;前述(F)溶劑整體在23℃的相對介電係數為8.5以上。 The photosensitive resin composition for black resists of the present invention contains the following components as essential components: (A) a photosensitive resin containing an unsaturated group, (B) a photopolymerizable monomer having at least two unsaturated bonds , (C) photopolymerization initiator, (D) at least one light-shielding component selected from black pigments, color-mixing pigments and light-shielding materials, (E) silica particles, (F) solvent; wherein, the aforementioned (F) solvent Contains: the first solvent that is propylene glycol monomethyl ether acetate, and the second solvent that has a relative permittivity of 10 to 30 at 23°C; the aforementioned (F) solvent as a whole has a relative permittivity of 8.5 or more at 23°C .

本發明之遮光膜係使上述黑色阻劑用感光性樹脂組成物硬化而成者。 The light-shielding film of this invention hardens the said photosensitive resin composition for black resists.

本發明之濾色器具有上述遮光膜作為黑色矩陣。 The color filter of the present invention has the above-mentioned light-shielding film as a black matrix.

本發明之觸控面板具有上述遮光膜作為黑色矩陣。 The touch panel of the present invention has the above-mentioned light-shielding film as a black matrix.

本發明之顯示裝置具有上述濾色器或上述觸控面板。 The display device of the present invention has the above-mentioned color filter or the above-mentioned touch panel.

根據本發明,可提供一種具有高遮光性及低反射率且可抑制凝聚物之產生的黑色阻劑用感光性樹脂組成物、及將該感光性樹脂組成物硬化而成的 遮光膜、具有該遮光膜的濾色器及觸控面板、以及具有該濾色器及觸控面板的顯示裝置。 According to the present invention, it is possible to provide a photosensitive resin composition for a black resist that has high light-shielding properties and low reflectance and can suppress the generation of aggregates, and a photosensitive resin composition obtained by curing the photosensitive resin composition A light-shielding film, a color filter and a touch panel having the light-shielding film, and a display device having the color filter and the touch panel.

以下詳細地說明本發明。本發明的黑色阻劑用感光性樹脂組成物(以下簡稱為感光性樹脂組成物)包含下列成分作為必須成分:(A)含不飽和基之感光性樹脂、(B)具有至少2個以上不飽和鍵的光聚合性單體、(C)光聚合起始劑、(D)選自黑色顏料、混色顏料及遮光材中的至少1種遮光成分、(E)氧化矽粒子、(F)溶劑。以下,說明(A)至(F)成分。 The present invention will be described in detail below. The photosensitive resin composition for black resists of the present invention (hereinafter referred to as the photosensitive resin composition) contains the following components as essential components: (A) a photosensitive resin containing an unsaturated group, (B) having at least two Photopolymerizable monomer with saturated bond, (C) photopolymerization initiator, (D) at least one light-shielding component selected from black pigments, color-mixing pigments, and light-shielding materials, (E) silica particles, (F) solvent . Hereinafter, the components (A) to (F) will be explained.

1.(A)成分 1. (A) Ingredient

屬於本實施形態之(A)成分的含不飽和基之感光性樹脂,較佳係在1分子中具有聚合性不飽和基、及用以表現鹼可溶性的酸性基,更佳係含有聚合性不飽和基與羧基兩者。只要是上述樹脂則未特別限定,可廣泛地使用。 The unsaturated group-containing photosensitive resin belonging to the component (A) of this embodiment preferably has a polymerizable unsaturated group and an acidic group for expressing alkali solubility in one molecule, and more preferably contains a polymerizable unsaturated group. Both saturated and carboxyl groups. As long as it is the above-mentioned resin, it will not specifically limit, It can use widely.

上述含不飽和基之感光性樹脂的例子,有以下述方式所得到的環氧(甲基)丙烯酸酯酸之加成物:使由雙酚類衍生之具有2個縮水甘油醚基之環氧化物(以下,亦稱為「通式(1)表示的雙酚型環氧化物」),與(甲基)丙烯酸反應,再使所得到的具有羥基之化合物與多元羧酸或其酸酐反應而獲得者。從雙酚類衍生之環氧化物係指使雙酚類與表鹵醇反應所得到的環氧化物或與其之同等物。另外,「(甲基)丙烯酸」為丙烯酸及甲基丙烯酸的總稱,其係指此等之一者或兩者。 Examples of the above-mentioned unsaturated group-containing photosensitive resin include epoxy (meth)acrylate acid adducts obtained in the following manner: epoxy resin having two glycidyl ether groups derived from bisphenols (Hereinafter, also referred to as "bisphenol-type epoxide represented by the general formula (1)"), react with (meth)acrylic acid, and then react the obtained compound having a hydroxyl group with a polycarboxylic acid or its anhydride. Winner. Epoxides derived from bisphenols refer to epoxides or equivalents obtained by reacting bisphenols with epihalohydrin. In addition, "(meth)acrylic acid" is a general term for acrylic acid and methacrylic acid, and it refers to one or both of these.

屬於(A)成分的含不飽和基之感光性樹脂,較佳為:使通式(1)表示的從雙酚類衍生之具有2個縮水甘油醚基的環氧化物與(甲基)丙烯酸的反應物,進一步與多元羧酸或其酸酐反應而得到的含不飽和基之感光性樹脂。 The unsaturated group-containing photosensitive resin belonging to the component (A) is preferably an epoxide having two glycidyl ether groups derived from bisphenols represented by the general formula (1) and (meth)acrylic acid The reactant of is further reacted with a polybasic carboxylic acid or its anhydride to obtain an unsaturated group-containing photosensitive resin.

Figure 109146244-A0202-12-0005-2
Figure 109146244-A0202-12-0005-2

(式(1)中,R1、R2、R3及R4分別獨立地為氫原子、碳數1至5的烷基或鹵素原子之任一者,X為-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、通式(2)表示的茀-9,9-二基或單鍵,l為0至10的整數)。 (In formula (1), R 1 , R 2 , R 3 and R 4 are each independently a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X is -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, 茀-9,9 represented by general formula (2) -Dibase or single bond, l is an integer from 0 to 10).

Figure 109146244-A0202-12-0005-3
Figure 109146244-A0202-12-0005-3

通式(1)表示的雙酚型環氧化物,係使雙酚類與表氯醇反應所得到的具有2個縮水甘油醚基的環氧化物。此反應時,一般伴隨二縮水甘油醚化合物的寡聚物化,因此亦包含具有2個以上雙酚骨架的環氧化物。 The bisphenol type epoxide represented by the general formula (1) is an epoxide having two glycidyl ether groups obtained by reacting bisphenols with epichlorohydrin. In this reaction, oligomerization of the diglycidyl ether compound is generally accompanied, and therefore epoxides having two or more bisphenol skeletons are also included.

此反應中所使用的雙酚類的例子包含:雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙 烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、9,9-雙(4-羥基-3-氯苯基)茀、9,9-雙(4-羥基-3-溴苯基)茀、9,9-雙(4-羥基-3-氟苯基)茀、9,9-雙(4-羥基-3-甲氧基苯基)茀、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3,5-二氯苯基)茀、9,9-雙(4-羥基-3,5-二溴苯基)茀、4,4’-雙酚、3,3’-雙酚等。其中較佳為具有茀-9,9-二基的雙酚類。 Examples of bisphenols used in this reaction include: bis(4-hydroxyphenyl) ketone, bis(4-hydroxy-3,5-dimethylphenyl) ketone, bis(4-hydroxy-3,5 -Dichlorophenyl) ketone, bis(4-hydroxyphenyl) sulfide, bis(4-hydroxy-3,5-dimethylphenyl) sulfide, bis(4-hydroxy-3,5-dichlorophenyl) ), bis(4-hydroxyphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl) Hexafluoropropane, bis(4-hydroxyphenyl)dimethylsilane, bis(4-hydroxy-3,5-dimethylphenyl)dimethylsilane, bis(4-hydroxy-3,5-dichloro) Phenyl) dimethylsilane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromophenyl) Methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane Alkane, 2,2-bis(4-hydroxy-3,5-dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4- Hydroxy-3-chlorophenyl) propane, bis(4-hydroxyphenyl) ether, bis(4-hydroxy-3,5-dimethylphenyl) ether, bis(4-hydroxy-3,5-dichloro) Phenyl) ether, 9,9-bis(4-hydroxyphenyl) pyrene, 9,9-bis(4-hydroxy-3-methylphenyl) pyrene, 9,9-bis(4-hydroxy-3- Chlorophenyl) quince, 9,9-bis(4-hydroxy-3-bromophenyl) quince, 9,9-bis(4-hydroxy-3-fluorophenyl) quince, 9,9-bis(4- Hydroxy-3-methoxyphenyl) pyrene, 9,9-bis(4-hydroxy-3,5-dimethylphenyl) pyrene, 9,9-bis(4-hydroxy-3,5-dichloro Phenyl) pyrene, 9,9-bis(4-hydroxy-3,5-dibromophenyl) pyrene, 4,4'-bisphenol, 3,3'-bisphenol, etc. Among them, preferred are bisphenols having a -9,9-diyl group.

再者,使如此之環氧化物與(甲基)丙烯酸反應而得到環氧(甲基)丙烯酸酯分子,與該環氧(甲基)丙烯酸酯分子中的羥基進行反應的(a)二羧酸或三羧酸之酸單酐的例子包含:鏈式烴二羧酸或三羧酸之酸單酐、脂環式二羧酸或三羧酸之酸單酐、芳香族二羧酸或三羧酸之酸單酐等。在此,鏈式烴二羧酸或三羧酸之酸單酐的例子包含:琥珀酸、乙醯基琥珀酸、馬來酸、己二酸、伊康酸、壬二酸、檸蘋酸(citramalic acid)、丙二酸、戊二酸、檸檬酸、酒石酸、側氧戊二酸、庚二酸、癸二酸、辛二酸、3-氧代戊二酸(diglycollic acid)等酸單酐。進一步,包含導入有任意取代基的二羧酸或三羧酸之酸單酐等。再者,脂環式二羧酸或三羧酸之酸單酐的例子包含:環丁烷二羧酸、環戊烷二羧酸、六氫苯二甲酸、四氫苯二甲酸、降莰烷二羧酸等酸單酐。進一步,亦包含導入有任意取代基的二羧酸或三羧酸之酸單酐等。再者,芳香族二羧酸或三羧酸之酸單酐的例子包含:苯二甲酸、間苯二甲酸、偏苯三酸等酸單酐。進一步,包含導入有任意取代基的二羧酸或三羧酸之酸單酐。 Furthermore, the epoxy (meth)acrylate molecule is obtained by reacting such an epoxide with (meth)acrylic acid, and (a) dicarboxylic acid which reacts with the hydroxyl group in the epoxy (meth)acrylate molecule Examples of acid or tricarboxylic acid monoanhydrides include: chain hydrocarbon dicarboxylic acid or tricarboxylic acid monoanhydride, alicyclic dicarboxylic acid or tricarboxylic acid monoanhydride, aromatic dicarboxylic acid or tricarboxylic acid monoanhydride Acid anhydrides of carboxylic acids, etc. Here, examples of chain hydrocarbon dicarboxylic acid or tricarboxylic acid monoanhydrides include: succinic acid, acetosuccinic acid, maleic acid, adipic acid, itaconic acid, azelaic acid, citramalic acid ( citramalic acid), malonic acid, glutaric acid, citric acid, tartaric acid, pendant oxoglutaric acid, pimelic acid, sebacic acid, suberic acid, 3-oxoglutaric acid (diglycollic acid) and other acid monoanhydrides . Furthermore, it contains the acid monoanhydride etc. of the dicarboxylic acid or tricarboxylic acid which introduce|transduced arbitrary substituents. Furthermore, examples of alicyclic dicarboxylic acid or tricarboxylic acid monoanhydrides include: cyclobutane dicarboxylic acid, cyclopentane dicarboxylic acid, hexahydrophthalic acid, tetrahydrophthalic acid, norbornane Acid mono anhydrides such as dicarboxylic acid. Further, it also includes acid monoanhydrides of dicarboxylic acid or tricarboxylic acid introduced with optional substituents, and the like. Furthermore, examples of the acid monoanhydrides of aromatic dicarboxylic acids or tricarboxylic acids include acid monohydrides such as phthalic acid, isophthalic acid, and trimellitic acid. Furthermore, it contains the acid monoanhydride of the dicarboxylic acid or tricarboxylic acid which introduce|transduced arbitrary substituents.

再者,與環氧(甲基)丙烯酸酯反應的(b)四羧酸之酸二酐,係使用鏈式烴四羧酸之酸二酐、脂環式四羧酸之酸二酐或芳香族四羧酸之酸二酐。在此,鏈式烴四羧酸之酸二酐的例子包含:丁烷四羧酸、戊烷四羧酸、己烷四羧酸等酸二酐。進一步,包含導入有任意取代基的四羧酸之酸二酐等。再者,脂環式四羧 酸之酸二酐的例子包含:環丁烷四羧酸、環戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、降莰烷四羧酸等酸二酐。進一步,包含導入有任意取代基的四羧酸之酸二酐等。再者,芳香族四羧酸之酸二酐的例子包含:均苯四甲酸(Pyromellitic Acid)、二苯基酮四羧酸、聯苯四羧酸、聯苯醚四羧酸等酸二酐。進一步,包含導入有任意取代基的四羧酸之酸二酐等。 Furthermore, (b) the acid dianhydride of tetracarboxylic acid which reacts with epoxy (meth)acrylate is the acid dianhydride of chain hydrocarbon tetracarboxylic acid, the acid dianhydride of alicyclic tetracarboxylic acid or aromatic The dianhydride of a tetracarboxylic acid. Here, examples of the acid dianhydrides of chain hydrocarbon tetracarboxylic acid include acid dianhydrides such as butane tetracarboxylic acid, pentane tetracarboxylic acid, and hexane tetracarboxylic acid. Furthermore, it includes acid dianhydride of tetracarboxylic acid introduced with optional substituents and the like. Furthermore, alicyclic tetracarboxylic acid Examples of acid dianhydrides include acid dianhydrides such as cyclobutane tetracarboxylic acid, cyclopentane tetracarboxylic acid, cyclohexane tetracarboxylic acid, cycloheptane tetracarboxylic acid, norbornane tetracarboxylic acid. Furthermore, it includes acid dianhydride of tetracarboxylic acid introduced with optional substituents and the like. Furthermore, examples of the acid dianhydrides of aromatic tetracarboxylic acids include acid dianhydrides such as pyromellitic acid, benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, and diphenyl ether tetracarboxylic acid. Furthermore, it includes acid dianhydride of tetracarboxylic acid introduced with optional substituents and the like.

與環氧(甲基)丙烯酸酯反應的(a)二羧酸或三羧酸之酸酐與(b)四羧酸之酸二酐之莫耳比(a)/(b)較佳為0.01至10.0,更佳為0.02以上且未達3.0。莫耳比(a)/(b)脫離上述範圍時,無法得到用以形成具有良好圖案化性能之感光性樹脂組成物的最佳分子量,因而不佳。另外,莫耳比(a)/(b)越小,則分子量變得越大,鹼溶解性有降低的傾向。 The molar ratio (a)/(b) of (a) dicarboxylic acid or tricarboxylic acid anhydride and (b) tetracarboxylic acid dianhydride reacted with epoxy (meth)acrylate is preferably 0.01 to 10.0, more preferably 0.02 or more and less than 3.0. When the molar ratio (a)/(b) is out of the above range, the optimal molecular weight for forming a photosensitive resin composition with good patterning performance cannot be obtained, which is unfavorable. In addition, the smaller the molar ratio (a)/(b), the larger the molecular weight, and the alkali solubility tends to decrease.

再者,環氧化物與(甲基)丙烯酸的反應,以及該反應所得到的環氧(甲基)丙烯酸酯與多元羧酸或其酸酐的反應並未特別限定,可採用習知的方法。再者,上述反應中所合成的含不飽和基之感光性樹脂,其重量平均分子量(Mw)較佳為2000至10000,酸價較佳為30至200mgKOH/g。 In addition, the reaction of the epoxide and (meth)acrylic acid and the reaction of the epoxy (meth)acrylate obtained by the reaction with the polycarboxylic acid or its anhydride are not particularly limited, and a conventional method can be used. Furthermore, the weight average molecular weight (Mw) of the unsaturated group-containing photosensitive resin synthesized in the above reaction is preferably from 2000 to 10,000, and the acid value is preferably from 30 to 200 mgKOH/g.

作為(A)成分的含不飽和基之感光性樹脂的較佳樹脂之其他例包含:(甲基)丙烯酸、(甲基)丙烯酸酯等的共聚物,其係具有(甲基)丙烯醯基及羧基的樹脂。上述樹脂的例子包含以下述方式所得到的含聚合性不飽和基的鹼可溶性樹脂:使包含(甲基)丙烯酸縮水甘油酯的(甲基)丙烯酸酯類在溶劑中共聚合而得到共聚物,使該共聚物與(甲基)丙烯酸反應,最後使二羧酸或三羧酸之酸酐反應而得到者。上述共聚物可參考日本特開2014-111722號公報中所示的共聚物,該共聚物係以20至90莫耳%之源自兩端的羥基經由(甲基)丙烯酸進行酯化的二酯甘油(diester gylcerol)的重複單元、以及10至80莫耳%之源自可與其共聚合的1種以上之聚合性不飽和化合物的重複單元構成者,其數量平均分子量(Mn)為2000至20000,且酸價為35至120mgKOH/g;以及日本特開2018-141968號公報中 所示的含聚合性不飽和基之鹼可溶性樹脂,該含聚合性不飽和基之鹼可溶性樹脂,係包含源自(甲基)丙烯酸酯化合物的單元、及具有(甲基)丙烯醯基及二或三羧酸殘基的單元的聚合物,其重量平均分子量(Mw)為3000至50000,酸價為30至200mgKOH/g。 Other examples of preferable resins as the unsaturated group-containing photosensitive resin of the component (A) include copolymers of (meth)acrylic acid, (meth)acrylate, etc., which have a (meth)acryloyl group And carboxyl resin. Examples of the above-mentioned resins include polymerizable unsaturated group-containing alkali-soluble resins obtained by copolymerizing (meth)acrylates containing glycidyl (meth)acrylate in a solvent to obtain copolymers, and The copolymer is obtained by reacting with (meth)acrylic acid and finally reacting the anhydride of dicarboxylic acid or tricarboxylic acid. The above-mentioned copolymer can refer to the copolymer shown in JP 2014-111722 A. The copolymer is a di-ester glycerol esterified with (meth)acrylic acid at 20 to 90 mol% of hydroxyl groups derived from both ends. (diester gylcerol) repeating unit and 10 to 80 mol% of repeating units derived from one or more polymerizable unsaturated compounds that can be copolymerized with the repeating unit, the number average molecular weight (Mn) is 2000 to 20000, And the acid value is 35 to 120mgKOH/g; and Japanese Patent Application Publication No. 2018-141968 The polymerizable unsaturated group-containing alkali-soluble resin shown, the polymerizable unsaturated group-containing alkali-soluble resin contains a unit derived from a (meth)acrylate compound, and has a (meth)acrylic group and The polymer of units of di- or tricarboxylic acid residues has a weight average molecular weight (Mw) of 3000 to 50000, and an acid value of 30 to 200 mgKOH/g.

關於(A)成分的含不飽和基之感光性樹脂,可僅單獨使用1種,亦可併用2種以上。 (A) As for the unsaturated group containing photosensitive resin of a component, only 1 type may be used individually, and 2 or more types may be used together.

2.(B)成分 2. (B) Ingredient

本實施形態之(B)成分中的具有至少2個以上不飽和鍵的光聚合性單體的例子包含:乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、伸丁二醇二(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、新戊四醇二(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇四(甲基)丙烯酸酯、甘油三(甲基)丙烯酸酯、山梨糖醇五(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、山梨糖醇六(甲基)丙烯酸酯、膦氮烯(phosphazene)的環氧烷改質六(甲基)丙烯酸酯、己內酯改質二新戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類、作為具有乙烯屬雙鍵之化合物的具有(甲基)丙烯酸基的樹枝狀聚合物等。此等單體可僅單獨使用1種,亦可併用2種以上。再者,該具有至少2個乙烯屬不飽和鍵的光聚合性單體,較佳係能夠發揮使含有鹼可溶性樹脂的分子彼此交聯之效果者,為了發揮此功能,較佳係使用具有3個以上不飽和鍵者。再者,以單體的分子量除以1分子中的(甲基)丙烯酸基的數量而得到的丙烯酸當量較佳為50至300g/eq,丙烯酸當量更佳為80至200g/eq。另外,(B)成分不具有游離的羧基。 Examples of the photopolymerizable monomer having at least two or more unsaturated bonds in the component (B) of this embodiment include: ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate , Triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, butylene glycol di(meth)acrylate, glycerol di(meth)acrylate, trimethylol Propane tri(meth)acrylate, trimethylolethane tri(meth)acrylate, neopentyl erythritol di(meth)acrylate, neopentyl erythritol tri(meth)acrylate, neopentyl erythritol Alcohol tetra(meth)acrylate, dineopentaerythritol tetra(meth)acrylate, glycerol tri(meth)acrylate, sorbitol penta(meth)acrylate, dineopentaerythritol penta(meth)acrylate Base) acrylate, dineopentaerythritol hexa(meth)acrylate, sorbitol hexa(meth)acrylate, phosphazene (phosphazene) alkylene oxide modified hexa(meth)acrylate, hexamethylene Lactones modify (meth)acrylates such as dineopentaerythritol hexa(meth)acrylate, and dendrimers having (meth)acrylic groups as compounds having vinyl double bonds, and the like. These monomers may be used individually by 1 type, and may use 2 or more types together. Furthermore, the photopolymerizable monomer having at least two ethylenically unsaturated bonds is preferably one that can cross-link the molecules containing the alkali-soluble resin with each other. In order to achieve this function, it is preferable to use a Those with more than one unsaturated bond. Furthermore, the acrylic acid equivalent obtained by dividing the molecular weight of the monomer by the number of (meth)acrylic groups in one molecule is preferably 50 to 300 g/eq, and the acrylic acid equivalent is more preferably 80 to 200 g/eq. In addition, the component (B) does not have a free carboxyl group.

具有(甲基)丙烯醯基之樹枝狀聚合物係作為(B)成分而能夠含有於組成物之中的具有不飽和鍵之化合物,該具有(甲基)丙烯醯基之樹枝狀聚合物的例子可例示:對多官能(甲基)丙烯酸酯的(甲基)丙烯醯基之中的部分碳-碳雙鍵加成多元巰基化合物所得到的樹枝狀聚合物。具體包含使通式(3)表示的多官能(甲基)丙烯酸酯的(甲基)丙烯醯基與通式(4)表示的多元巰基化合物反應所得到的樹枝狀聚合物等。 The dendrimer having a (meth)acrylic acid group is a compound having an unsaturated bond that can be contained in the composition as component (B), and the dendrimer having a (meth)acrylic acid group is Examples can be exemplified: dendrimers obtained by adding polyvalent mercapto compounds to part of the carbon-carbon double bonds in the (meth)acrylic groups of the polyfunctional (meth)acrylate. Specifically, it includes a dendrimer obtained by reacting the (meth)acrylic group of the polyfunctional (meth)acrylate represented by the general formula (3) with the polyvalent mercapto compound represented by the general formula (4), and the like.

Figure 109146244-A0202-12-0009-4
Figure 109146244-A0202-12-0009-4

(式(3)中,R5為氫原子或甲基,R6為將R7(OH)k的k個羥基中的n個羥基對式中的酯鍵供給後的剩餘部分。R7為從多元醇、多元醇醚或多元醇醚與羥酸的酯去除羥基後之殘基。較佳的R7(OH)k係以碳數2至8的非芳香族的直鏈或支鏈之烴骨架為基礎的多元醇、或該多元醇的複數分子藉由醇的脫水縮合並通過醚鍵連結而成的多元醇醚、或此等多元醇或多元醇醚與羥酸的酯。k及n獨立地表示2至20的整數,但k

Figure 109146244-A0202-12-0009-14
n) (In the formula (3), R 5 is a hydrogen atom or a methyl group, and R 6 is the remainder after n hydroxyl groups in the k hydroxyl groups of R 7 (OH) k are supplied to the ester bond in the formula. R 7 is The residue after removing the hydroxyl group from the polyol, the polyol ether or the ester of the polyol ether and the hydroxy acid. The preferred R 7 (OH)k is a non-aromatic linear or branched chain with 2 to 8 carbon atoms. Hydrocarbon skeleton-based polyhydric alcohols, or polyhydric alcohol ethers formed by dehydration and condensation of alcohols with multiple molecules of the polyhydric alcohols connected by ether bonds, or esters of these polyhydric alcohols or polyhydric alcohol ethers and hydroxy acids. k and n independently represents an integer from 2 to 20, but k
Figure 109146244-A0202-12-0009-14
n)

Figure 109146244-A0202-12-0009-5
Figure 109146244-A0202-12-0009-5

(式(4)中,R8為單鍵或2至6價的碳數1至6的烴基、m在R8為單鍵時為2,R8為2至6價基時則與R8的價數相同) (In formula (4), R 8 is a single bond or a 2 to 6 valent hydrocarbon group with carbon numbers of 1 to 6, and m is 2 when R 8 is a single bond, and when R 8 is a 2 to 6 valent group, it is the same as R8 Same price)

通式(3)表示的多官能(甲基)丙烯酸酯的例子包含:乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、環氧乙烷改質三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇二(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸 酯、己內酯改質新戊四醇三(甲基)丙烯酸酯等(甲基)丙烯酸酯。此等化合物可僅單獨使用1種,亦可併用2種以上。 Examples of the polyfunctional (meth)acrylate represented by the general formula (3) include: ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate Base) acrylate, ethylene oxide modified trimethylolpropane tri(meth)acrylate, neopentaerythritol di(meth)acrylate, neopentaerythritol tri(meth)acrylate, dixin Pentaerythritol penta(meth)acrylate, dineopentaerythritol hexa(meth)acrylic acid Ester and caprolactone are used to modify (meth)acrylates such as neopentylerythritol tri(meth)acrylate. These compounds may be used individually by 1 type, and may use 2 or more types together.

通式(4)表示的多元巰基化合物的例子包含:三羥甲基丙烷三(巰基乙酸酯)、三羥甲基丙烷三(巰基丙酸酯)、新戊四醇四(巰基乙酸酯)、新戊四醇三(巰基乙酸酯)、新戊四醇四(巰基丙酸酯)、二新戊四醇六(巰基乙酸酯)、二新戊四醇六(巰基丙酸酯)等。此等化合物可僅單獨使用1種,亦可併用2種以上。 Examples of the polyvalent mercapto compound represented by the general formula (4) include: trimethylolpropane tris (thioglycolate), trimethylolpropane tris (mercaptopropionate), neopentyl erythritol tetrakis (mercaptoacetate) ), neopentaerythritol three (mercaptoacetate), neopenteritol tetra (mercaptopropionate), dineopentylene erythritol hexa (mercaptoacetate), dineopentyl erythritol hexa (mercaptopropionate) )Wait. These compounds may be used individually by 1 type, and may use 2 or more types together.

(A)成分與(B)成分的摻合比例,以重量比(A)/(B)計,較佳為30/70至90/10,更佳為60/40至80/20。(A)成分的摻合比例在30/70以上時,光硬化後的硬化物不易變脆,再者,未曝光部中塗膜的酸價不易變低,因此可抑制對於鹼顯影液的溶解性降低。據此,不易發生圖案邊緣為鋸齒狀、無法變得尖銳之不良情形。再者,(A)成分的摻合比例在90/10以下時,光反應性官能基在樹脂中所佔的比例充分,因此可形成期望的交聯結構。再者,樹脂成分中的酸價度未高過,因此曝光部對於鹼顯影液的溶解性不易變高,因而可抑制所形成之圖案變得比目標的線寬更細或是圖案缺損。 The blending ratio of (A) component and (B) component is based on the weight ratio (A)/(B), preferably 30/70 to 90/10, more preferably 60/40 to 80/20. (A) When the blending ratio of component (A) is 30/70 or more, the cured product after photocuring is less likely to become brittle, and the acid value of the coating film in the unexposed area is less likely to become low, so dissolution in the alkaline developer can be suppressed Sexual decrease. Accordingly, it is unlikely that the pattern edges are jagged and cannot be sharpened. Furthermore, when the blending ratio of the component (A) is 90/10 or less, the ratio of the photoreactive functional group in the resin is sufficient, and therefore the desired crosslinked structure can be formed. Furthermore, since the acid value in the resin component is not too high, the solubility of the exposed portion in the alkali developer is not easily increased, and therefore, it is possible to prevent the formed pattern from becoming thinner than the target line width or pattern defect.

3.(C)成分 3. (C) Ingredients

本實施的型態之(C)光聚合起始劑的例子包含:苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲胺基丙醯苯、二氯苯乙酮、三氯苯乙酮、對第三丁基苯乙酮等苯乙酮類;二苯基酮、2-氯二苯基酮、p,p’-雙二甲胺基二苯基酮等二苯基酮類;苄基、苯偶姻、苯偶姻甲醚、苯偶姻異丙醚、苯偶姻異丁醚等苯偶姻醚類;2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物類;2-三氯甲基-5-苯乙烯基-1,3,4-

Figure 109146244-A0202-12-0010-15
二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-
Figure 109146244-A0202-12-0010-16
二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-
Figure 109146244-A0202-12-0010-17
二唑 等鹵甲基噻唑化合物類;2,4,6-參(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-18
、2-甲基-4,6-雙(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-19
、2-苯基-4,6-雙(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-20
、2-(4-氯苯基)-4,6-雙(三氯甲基-1,3,5-三
Figure 109146244-A0202-12-0011-22
、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-21
、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-23
、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-24
、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-25
、2-(4-甲基硫基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三
Figure 109146244-A0202-12-0011-26
等鹵甲基-S-三
Figure 109146244-A0202-12-0011-27
系化合物類;乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)、1,2-辛二酮、1-[4-(苯基硫基)苯基]-,2-(O-苯甲醯基肟)、1-(4-苯基氫硫基苯基)丁-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲基氫硫基苯基)丁-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲基氫硫基苯基)丁-1-酮肟-O-乙酸酯、4-乙氧基-2-甲基苯基-9-乙基-6-硝基-9H-咔唑(carbazolo)-3-基-O-乙醯基肟等O-醯基肟系化合物類;苄基二甲基縮酮、噻噸酮、2-氯噻噸酮、2,4-二乙基噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮等的硫化合物;2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌等蒽醌類;偶氮雙異丁腈、過氧化苯甲醯、過氧化異丙苯等有機過氧化物;2-巰基苯并咪唑、2-巰基苯并
Figure 109146244-A0202-12-0011-28
唑、2-巰基苯并噻唑等硫醇化合物、三乙醇胺、三乙胺等3級胺等。此等的光聚合起始劑可僅單獨使用1種,亦可併用2種以上。 Examples of the (C) photopolymerization initiator of this embodiment include: acetophenone, 2,2-diethoxyacetophenone, p-dimethyl acetophenone, and p-dimethylaminopropyl benzene , Dichloroacetophenone, trichloroacetophenone, p-tertiary butyl acetophenone and other acetophenones; diphenyl ketone, 2-chlorodiphenyl ketone, p,p'-bisdimethylamino group Diphenyl ketones such as diphenyl ketone; benzoin ethers such as benzyl, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether; 2-(o-chlorobenzene Yl)-4,5-phenylbiimidazole, 2-(o-chlorophenyl)-4,5-bis(m-methoxyphenyl)biimidazole, 2-(o-fluorophenyl)-4,5- Biimidazole compounds such as diphenylbiimidazole, 2-(o-methoxyphenyl)-4,5-diphenylbiimidazole, 2,4,5-triarylbiimidazole; 2-trichloromethyl -5-styryl-1,3,4-
Figure 109146244-A0202-12-0010-15
Diazole, 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4-
Figure 109146244-A0202-12-0010-16
Diazole, 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4-
Figure 109146244-A0202-12-0010-17
Diazole and other halomethylthiazole compounds; 2,4,6-ginseng (trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-18
, 2-Methyl-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-19
, 2-Phenyl-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-20
, 2-(4-chlorophenyl)-4,6-bis(trichloromethyl-1,3,5-tri
Figure 109146244-A0202-12-0011-22
, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-21
, 2-(4-methoxynaphthyl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-23
, 2-(4-Methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-24
, 2-(3,4,5-trimethoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-25
, 2-(4-Methylthiostyryl)-4,6-bis(trichloromethyl)-1,3,5-tri
Figure 109146244-A0202-12-0011-26
Isohalomethyl-S-tri
Figure 109146244-A0202-12-0011-27
Series compounds; ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-,1-(O-acetyloxime), 1,2-octanedione, 1-[4-(phenylthio)phenyl]-,2-(O-benzyloxime), 1-(4-phenylhydrothiophenyl)butyl -1,2-Dione-2-oxime-O-benzoate, 1-(4-methylsulfanylphenyl)butan-1,2-dione-2-oxime-O-acetate , 1-(4-Methylthiophenyl)butan-1-one oxime-O-acetate, 4-ethoxy-2-methylphenyl-9-ethyl-6-nitro- 9H-carbazolo-3-yl-O-acetyloxime and other O-acetoxy oxime compounds; benzyl dimethyl ketal, thioxanthone, 2-chlorothioxanthone, 2,4 -Diethylthioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone and other sulfur compounds; 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzoanthraquinone , 2,3-Diphenylanthraquinone and other anthraquinones; azobisisobutyronitrile, benzyl peroxide, cumene peroxide and other organic peroxides; 2-mercaptobenzimidazole, 2-mercaptobenzene and
Figure 109146244-A0202-12-0011-28
Thiol compounds such as azoles and 2-mercaptobenzothiazole, tertiary amines such as triethanolamine and triethylamine, etc. These photoinitiators may be used individually by 1 type, and may use 2 or more types together.

可較佳使用的O-醯基肟系化合物類的例子,係有通式(5)及通式(6)表示的O-醯基肟系光聚合起始劑。此等的化合物類之中,在以高濃度使用遮光成分時,較佳是使用在365nm中的莫耳吸光係數為10000以上的O-醯基肟系光聚合起始劑。另外,本發明中所指的「光聚合起始劑」包含增感劑的意思。 Examples of O-acyl oxime-based compounds that can be preferably used include O-acyl oxime-based photopolymerization initiators represented by general formula (5) and general formula (6). Among these compounds, when the light-shielding component is used at a high concentration, it is preferable to use an O-acetoxime-based photopolymerization initiator having a molar absorption coefficient at 365 nm of 10000 or more. In addition, the "photopolymerization initiator" referred to in the present invention means a sensitizer.

Figure 109146244-A0202-12-0012-6
Figure 109146244-A0202-12-0012-6

(式(5)中,R9、R10分別獨立地表示碳數1至15的烷基、碳數6至18的芳基、碳數7至20的芳基烷基或碳數4至12的雜環基,R11表示碳數1至15的烷基、碳數6至18的芳基、碳數7至20的芳基烷基。在此,烷基及芳基亦可由碳數1至10的烷基、碳數1至10的烷氧基、碳數1至10的烷醯基(alkanoyl),且可以鹵素取代,伸烷基部分亦可包含不飽和鍵、醚鍵、硫醚鍵、酯鍵。再者,烷基亦可為直鏈、分支或環狀的任一種烷基)。 (In formula (5), R 9 and R 10 each independently represent an alkyl group having 1 to 15 carbons, an aryl group having 6 to 18 carbons, an aryl alkyl group having 7 to 20 carbons, or a carbon number of 4 to 12 R 11 represents an alkyl group with 1 to 15 carbons, an aryl group with 6 to 18 carbons, or an arylalkyl group with 7 to 20 carbons. Here, the alkyl group and the aryl group may also have 1 carbon atoms. Alkyl groups up to 10, alkoxy groups having 1 to 10 carbons, and alkanoyl groups having 1 to 10 carbons, and may be substituted with halogen. The alkylene moiety may also contain unsaturated bonds, ether bonds, and thioethers. Bond, ester bond. In addition, the alkyl group may be any of linear, branched, or cyclic).

Figure 109146244-A0202-12-0012-8
Figure 109146244-A0202-12-0012-8

(式(6)中,R12及R13分別獨立地為碳數1至10的直鏈狀或分支狀的烷基,或碳數4至10的環烷基、環烷基-烷基(cycloalkyl-alkyl)或烷基-環烷基(alkyl-cycloalkyl),或是可經碳數1至6的烷基取代的苯基。R14分別獨立地為碳數2至10的直鏈狀或分支狀的烷基或烯基,該烷基或烯基中的部分-CH2-基亦可經-O-基取代。再者,此等R12至R14的基之中的部分氫原子亦可經鹵素原子取代)。 (In formula (6), R 12 and R 13 are each independently a linear or branched alkyl group having 1 to 10 carbons, or a cycloalkyl or cycloalkyl-alkyl group having 4 to 10 carbons ( cycloalkyl-alkyl) or alkyl-cycloalkyl (alkyl-cycloalkyl), or a phenyl group which may be substituted with an alkyl group having 1 to 6 carbons. R 14 is each independently a linear or linear chain having 2 to 10 carbons. A branched alkyl or alkenyl group, part of the -CH 2 -group in the alkyl or alkenyl group may be substituted with an -O- group. Furthermore, part of the hydrogen atoms in these R 12 to R 14 groups It can also be substituted by halogen atoms).

以(A)及(B)的各成分總計100重量份為基準,(C)成分的光聚合起始劑的使用量較佳為3至30重量份,更佳為5至20重量份。(C)成分的摻合比例為3重量份以上時,敏感度良好,可具有充分的光聚合速度。(C)成分的摻合比 例在30重量份以下時,可具有適當的敏感度,可得到期望的圖案線寬及期望的圖案邊緣。 The use amount of the photopolymerization initiator of the component (C) is preferably 3 to 30 parts by weight, more preferably 5 to 20 parts by weight based on 100 parts by weight of the total of each component of (A) and (B). (C) When the blending ratio of the component is 3 parts by weight or more, the sensitivity is good, and a sufficient photopolymerization rate can be obtained. (C) Blending ratio of components For example, when the amount is less than 30 parts by weight, it can have appropriate sensitivity, and can obtain the desired pattern line width and the desired pattern edge.

4.(D)成分 4. (D) Ingredients

本實施形態之(D)成分的黑色顏料、混色顏料及遮光材等遮光成分,只要是以1至1000nm的平均粒徑(雷射繞射/散射法粒徑分布計或動態光散射法粒徑分布計所測量出來的平均粒徑)分散者,則未特別限制,可使用習知的遮光成分。 The light-shielding components such as black pigments, color-mixing pigments, and light-shielding materials of the component (D) of this embodiment have an average particle diameter of 1 to 1000 nm (laser diffraction/scattering particle size distribution meter or dynamic light scattering particle size The average particle size measured by the distribution meter) is not particularly limited, and a conventional light-shielding component can be used.

(D)成分的黑色顏料的例子包含:苝黑、花青黑、苯胺黑、內醯胺黑、碳黑、鈦黑等。 (D) Examples of the black pigment of the component include perylene black, cyanine black, aniline black, internal amide black, carbon black, titanium black, and the like.

(D)成分的混色顏料的例子包含:選自偶氮顏料、縮合偶氮顏料、偶氮次甲基顏料、酞青素顏料、喹吖酮顏料、異吲哚啉酮顏料、異吲哚啉顏料、二

Figure 109146244-A0202-12-0013-29
顏料、還原(threne)顏料、苝顏料、紫環酮(perinone)顏料、喹酞酮(quinophthalone)顏料、吡咯并吡咯二酮(diketopyrrolopyrrole)顏料、硫靛顏料等有機顏料中的至少2色混合而成的顏料。 (D) Examples of color mixing pigments of component include: selected from azo pigments, condensed azo pigments, azomethine pigments, phthalocyanine pigments, quinacridone pigments, isoindolinone pigments, isoindoline Pigment, two
Figure 109146244-A0202-12-0013-29
At least 2 colors of organic pigments such as pigments, threne pigments, perylene pigments, perinone pigments, quinophthalone pigments, diketopyrrolopyrrole pigments, and thioindigo pigments are mixed and mixed Into the pigment.

上述(D)成分,因應作為目標的感光性樹脂組成物之功能,可僅單獨使用1種,亦可併用2種以上。 The above-mentioned (D) component may be used alone or in combination of two or more according to the function of the target photosensitive resin composition.

另外,使用混色顏料作為(D)成分的情況中能夠使用的有機顏料的例子包含比色指數(color index)名稱為下列編號者,但不限於此。 In addition, examples of organic pigments that can be used in the case of using a color-mixed pigment as the component (D) include those whose color index names have the following numbers, but are not limited thereto.

顏料紅2、3、4、5、9、12、14、22、23、31、38、112、122、144、146、147、149、166、168、170、175、176、177、178、179、184、185、187、188、202、207、208、209、210、213、214、220、221、242、247、253、254、255、256、257、262、264、266、272、279等 Pigment Red 2, 3, 4, 5, 9, 12, 14, 22, 23, 31, 38, 112, 122, 144, 146, 147, 149, 166, 168, 170, 175, 176, 177, 178, 179, 184, 185, 187, 188, 202, 207, 208, 209, 210, 213, 214, 220, 221, 242, 247, 253, 254, 255, 256, 257, 262, 264, 266, 272, 279 etc.

顏料橙5、13、16、34、36、38、43、61、62、64、67、68、71、72、73、74、81等 Pigment Orange 5, 13, 16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74, 81, etc.

顏料黃1、3、12、13、14、16、17、55、73、74、81、83、93、95、97、109、110、111、117、120、126、127、128、129、130、136、138、139、150、151、153、154、155、173、174、175、176、180、181、183、185、191、194、199、213、214等 Pigment Yellow 1, 3, 12, 13, 14, 16, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154, 155, 173, 174, 175, 176, 180, 181, 183, 185, 191, 194, 199, 213, 214, etc.

顏料綠7、36、58等 Pigment Green 7, 36, 58, etc.

顏料藍15、15:1、15:2、15:3、15:4、15:6、16、60、80等 Pigment Blue 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 60, 80, etc.

顏料紫19、23、37等 Pigment Violet 19, 23, 37 etc.

關於(D)成分的遮光成分的摻合比例,可根據期望的遮光度而任意地決定,但較佳係相對於感光性樹脂組成物中的固形份為20至80質量%,更佳為40至70質量%。使用苯胺黑、花青黑、內醯胺黑等有機顏料或碳黑等碳系遮光成分作為(D)成分之遮光成分時,特佳係相對於感光性樹脂組成物中的固形份為40至60質量%。遮光成分相對於感光性樹脂組成物中的固形份為20質量%以上時,可得到充分的遮光性。遮光成分相對於感光性樹脂組成物中的固形份在80質量%以下時,原來成為黏結劑的感光性樹脂的含量不會減少,因此可得到期望的顯影特性及形成膜的能力。 The blending ratio of the light-shielding component of the component (D) can be arbitrarily determined according to the desired degree of light-shielding, but it is preferably 20 to 80% by mass relative to the solid content in the photosensitive resin composition, more preferably 40 To 70% by mass. When using organic pigments such as aniline black, cyanine black, and internal amide black, or carbon-based light-shielding components such as carbon black as the light-shielding component of component (D), it is particularly preferable that the solid content of the photosensitive resin composition is 40 to 60% by mass. When the light-shielding component is 20% by mass or more with respect to the solid content in the photosensitive resin composition, sufficient light-shielding properties can be obtained. When the light-shielding component is 80% by mass or less relative to the solid content in the photosensitive resin composition, the content of the photosensitive resin originally used as the binder does not decrease, and therefore, the desired development characteristics and film-forming ability can be obtained.

上述(D)成分通常係作為分散於溶劑中的遮光成分分散體與其他摻合成分混合,此時可添加分散劑。分散劑並未特別限制,可使用用以分散顏料(遮光成分)的習知化合物(市售名稱為分散劑、分散濕潤劑、分散促進劑等化合物等)等。 The above-mentioned component (D) is usually mixed with other blending ingredients as a light-shielding component dispersion dispersed in a solvent, and a dispersant may be added in this case. The dispersant is not particularly limited, and conventional compounds for dispersing pigments (light-shielding components) (commercially available compounds such as dispersing agents, dispersion wetting agents, dispersion accelerators, etc.) can be used.

分散劑的例子包含:陽離子性高分子系分散劑、陰離子性高分子系分散劑、非離子性高分子系分散劑、顏料衍生物型分散劑(分散助劑)。分散劑特佳為陽離子性高分子系分散劑,該陽離子性高分子系分散劑具有咪唑基、吡咯基、吡啶基、一級、二級或三級的胺基等陽離子性之官能基作為對著色劑的吸附點,胺價為1至100mgKOH/g,數量平均分子量(Mn)在1000至100000之範圍內者。 此分散劑的摻合量,較佳係相對於遮光成分為1至35質量%,更佳為2至25質量%。另外,如樹脂類的高黏度物質,一般具有使分散穩定的作用,但不具有促進分散之能力者並不被視為分散劑。然而,其使用目的並不限於使分散穩定。 Examples of dispersants include cationic polymer dispersants, anionic polymer dispersants, nonionic polymer dispersants, and pigment derivative type dispersants (dispersion aids). The dispersant is particularly preferably a cationic polymer dispersant which has cationic functional groups such as imidazole groups, pyrrolyl groups, pyridyl groups, primary, secondary or tertiary amine groups as the coloring The adsorption point of the agent, the amine value is 1 to 100 mgKOH/g, and the number average molecular weight (Mn) is in the range of 1,000 to 100,000. The blending amount of this dispersant is preferably 1 to 35% by mass, more preferably 2 to 25% by mass relative to the light-shielding component. In addition, high-viscosity substances such as resins generally have the effect of stabilizing dispersion, but those that do not have the ability to promote dispersion are not regarded as dispersants. However, the purpose of its use is not limited to stabilizing the dispersion.

5.(E)成分 5.(E) Ingredient

(E)成分的氧化矽粒子係未特別限制如氣相反應或液相反應之製造方法以及形狀(球狀、非球狀)。 The silicon oxide particles of the component (E) are not particularly limited, such as the production method and shape (spherical, non-spherical) of gas phase reaction or liquid phase reaction.

本發明中所使用之(E)成分的氧化矽粒子的種類並未特別限定。可使用實心氧化矽,亦可使用中空氧化矽粒子。另外,「中空氧化矽粒子」係指粒子的內部具有空洞的氧化矽粒子。 The type of the silicon oxide particles of the component (E) used in the present invention is not particularly limited. Solid silica or hollow silica particles can be used. In addition, "hollow silica particles" refer to silica particles with voids in the particles.

藉由使用上述氧化矽粒子,可降低包含該氧化矽粒子之遮光膜的折射率。 By using the above-mentioned silicon oxide particles, the refractive index of the light-shielding film containing the silicon oxide particles can be reduced.

上述氧化矽粒子的平均粒徑較佳為1至100nm,更佳為10至90nm。相較於平均粒徑為如數nm之小粒徑的情況,據認為在上述範圍內的尺寸不易發生氧化矽粒子彼此的凝聚。藉此,在上述粒徑的範圍中,氧化矽粒子分散穩定性優良,因此可均勻地存在於遮光膜內。因此,不容易發生遮光膜上之反射率不均勻。 The average particle diameter of the silicon oxide particles is preferably 1 to 100 nm, more preferably 10 to 90 nm. Compared with the case where the average particle diameter is as small as several nm, it is considered that the agglomeration of silica particles with each other is unlikely to occur in the size within the above-mentioned range. Thereby, in the range of the above-mentioned particle diameter, the silica particles are excellent in dispersion stability, and therefore can be uniformly present in the light-shielding film. Therefore, uneven reflectance on the light-shielding film is unlikely to occur.

上述氧化矽粒子的平均粒徑可使用動態光散射法的粒度分布計「粒徑分析儀FPAR-1000」(大塚電子股份有限公司製),並藉由累積法進行測量。 The average particle diameter of the above-mentioned silica particles can be measured by the accumulation method using a particle size distribution meter "particle size analyzer FPAR-1000" (manufactured by Otsuka Electronics Co., Ltd.) of the dynamic light scattering method.

再者,上述氧化矽粒子的含量,較佳係相對於感光性樹脂組成物的總質量為0.1至5質量份,更佳為0.1至2質量份。氧化矽粒子的含量為在上述範圍內時,可達成低反射率化,並且可確保良好的圖案化性能。 Furthermore, the content of the silicon oxide particles is preferably 0.1 to 5 parts by mass, and more preferably 0.1 to 2 parts by mass relative to the total mass of the photosensitive resin composition. When the content of silicon oxide particles is within the above range, low reflectivity can be achieved and good patterning performance can be ensured.

再者,上述氧化矽粒子可使用折射率為1.10至1.47者。除了可使用折射率為1.45至1.47的一般氧化矽粒子以外,相較於僅含有一般氧化矽粒子 的遮光膜的折射率,藉由使用具有低折射率的中空氧化矽粒子可進一步降低遮光膜的折射率。 Furthermore, the above-mentioned silicon oxide particles can be those with a refractive index of 1.10 to 1.47. In addition to using ordinary silica particles with a refractive index of 1.45 to 1.47, compared to only containing ordinary silica particles The refractive index of the light-shielding film can be further reduced by using hollow silica particles with a low refractive index.

再者,氧化矽粒子的折射率,可從藉由將上述氧化矽粒子處理為粉末狀者與折射率已知的標準折射液混合所得到的透明混合液而求得。此時,將上述混合液的標準折射液的折射率設為氧化矽粒子的折射率。另外,上述氧化矽粒子的折射率可使用阿貝折射儀進行測量。 In addition, the refractive index of the silicon oxide particles can be obtained from a transparent mixed liquid obtained by mixing the above-mentioned silicon oxide particles into a powder form and a standard refracting liquid with a known refractive index. At this time, the refractive index of the standard refracting liquid of the above-mentioned mixed liquid is set to the refractive index of the silica particles. In addition, the refractive index of the aforementioned silica particles can be measured using an Abbe refractometer.

再者,因為可抑制由透明基材與所形成之遮光膜的折射率差所致之反射,因此即使不在基材上另外設置抗反射膜等,亦可抑制反射。 Furthermore, since the reflection caused by the difference in refractive index between the transparent substrate and the formed light-shielding film can be suppressed, the reflection can be suppressed even if an anti-reflection film or the like is not separately provided on the substrate.

上述氧化矽粒子的形狀可為真球狀,亦可為橢圓狀。本發明中所使用的氧化矽粒子的形狀較佳為真球狀。 The shape of the silicon oxide particles may be true spherical or elliptical. The shape of the silicon oxide particles used in the present invention is preferably a true spherical shape.

上述氧化矽粒子較佳為真球度是1.0至1.5。氧化矽粒子的真球度只要在此範圍內,則粒子形狀接近真球。因此,可以在膜厚較薄的遮光膜中均勻地填充之方式,維持被膜表面平滑性,並且,形成上述氧化矽粒子不會從被膜表面露出至外部的遮光膜。因此可得到折射率低且具有充分強度的遮光膜。 The above-mentioned silicon oxide particles preferably have a sphericity of 1.0 to 1.5. As long as the sphericity of the silicon oxide particles is within this range, the particle shape is close to a true sphere. Therefore, it is possible to uniformly fill the light-shielding film with a thin film thickness, maintain the smoothness of the film surface, and form a light-shielding film in which the silicon oxide particles are not exposed to the outside from the surface of the film. Therefore, a light-shielding film having a low refractive index and sufficient strength can be obtained.

上述氧化矽粒子的真球度可從粒子的最長徑與最短徑的比例(任意100個氧化矽粒子的平均值)求得。在此,氧化矽粒子的最長徑與最短徑,係以穿透式電子顯微鏡拍攝氧化矽粒子並從所得到的顯微鏡影像測量氧化矽粒子的最長徑與最短徑而求得的值。 The sphericity of the aforementioned silica particles can be obtained from the ratio of the longest diameter to the shortest diameter of the particles (the average value of any 100 silica particles). Here, the longest and shortest diameters of the silicon oxide particles are obtained by photographing the silicon oxide particles with a transmission electron microscope and measuring the longest and shortest diameters of the silicon oxide particles from the obtained microscope image.

6.(F)成分 6.(F) Ingredient

(F)成分的溶劑係包含:為丙二醇單甲醚乙酸酯之第1溶劑、及在23℃的相對介電係數為10至30之第2溶劑。 The solvent of the component (F) includes a first solvent that is propylene glycol monomethyl ether acetate, and a second solvent that has a relative permittivity of 10 to 30 at 23°C.

(F)溶劑之中,第1溶劑為丙二醇單甲醚乙酸酯。第1溶劑的含量較佳係相對於(F)成分的總質量為10至90質量%,更佳為20至80質量%,又更 佳為20至74質量%。藉由含有10至90質量%的丙二醇單甲醚乙酸酯作為第1溶劑,可提升黏結劑樹脂的溶解性、及黑色顏料的分散性。 (F) Among the solvents, the first solvent is propylene glycol monomethyl ether acetate. The content of the first solvent is preferably 10 to 90% by mass relative to the total mass of component (F), more preferably 20 to 80% by mass, and still more Preferably, it is 20 to 74% by mass. By containing 10 to 90% by mass of propylene glycol monomethyl ether acetate as the first solvent, the solubility of the binder resin and the dispersibility of the black pigment can be improved.

再者,上述第2溶劑在23℃的相對介電係數為10至30,更佳為13至20,又更佳為13至18。藉由使用在23℃的相對介電係數為10至30的溶劑作為上述第2溶劑,可藉由溶劑合作用使氧化矽粒子表面的矽醇基穩定,而可抑制阻劑組成中的氧化矽粒子凝聚。 Furthermore, the relative permittivity of the second solvent at 23° C. is 10-30, more preferably 13-20, and still more preferably 13-18. By using a solvent with a relative permittivity of 10 to 30 at 23°C as the second solvent, the silanol group on the surface of the silica particles can be stabilized by solvent cooperation, and the silica in the resist composition can be suppressed Particle aggregation.

上述第2溶劑,較佳為包含碳數3至12之具有鏈狀、分支或環狀結構的飽和酮類、或碳數3至12之具有鏈狀、分支或環狀結構的飽和或不飽和醇類。 The above-mentioned second solvent preferably contains saturated or unsaturated ketones having a chain, branched or cyclic structure with 3 to 12 carbons, or saturated or unsaturated ketones having a chain, branched or cyclic structure with 3 to 12 carbons Alcohols.

上述第2溶劑的例子包含:丙酮、甲基乙基酮、環戊酮、環己酮等酮類;乙醇、正丙醇、異丙醇、乙二醇、丙二醇、乳酸乙酯等醇類;賽路蘇、甲基賽路蘇、乙基賽路蘇、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、3-甲氧基-3-甲基丁醇、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚等二醇醚類等。上述第2溶劑之中較佳為:環己酮、乳酸乙酯、3-甲氧基-3-甲基丁醇、丙二醇單乙醚,更佳為:環己酮、乳酸乙酯、3-甲氧基-3-甲基丁醇。 Examples of the aforementioned second solvent include: ketones such as acetone, methyl ethyl ketone, cyclopentanone, and cyclohexanone; alcohols such as ethanol, n-propanol, isopropanol, ethylene glycol, propylene glycol, and ethyl lactate; Serousl, methyl Serousl, Ethyl Serousl, Carbitol, Methyl Carbitol, Ethyl Carbitol, Butyl Carbitol, Propylene Glycol Monomethyl Ether, Propylene Glycol Monoethyl Ether, 3-Methyl Carbitol Glycol ethers such as oxy-3-methylbutanol, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, and triethylene glycol monoethyl ether. Among the above-mentioned second solvents, preferred are: cyclohexanone, ethyl lactate, 3-methoxy-3-methylbutanol, propylene glycol monoethyl ether, more preferably: cyclohexanone, ethyl lactate, 3-methyl Oxy-3-methylbutanol.

上述第2溶劑的含量較佳係相對於(F)溶劑的總質量為10至50質量%,更佳為20至50質量%,再佳為25至50質量%。藉由使溶劑的含有率在上述範圍內,可抑制氧化矽粒子凝聚,並且可賦予良好的塗布性。 The content of the second solvent is preferably 10 to 50% by mass relative to the total mass of the solvent (F), more preferably 20 to 50% by mass, and still more preferably 25 to 50% by mass. By making the content of the solvent within the above-mentioned range, agglomeration of silicon oxide particles can be suppressed, and good coating properties can be imparted.

另外,上述(F)溶劑的相對介電係數可使用相對介電係數計「Model871」(Nihon Rufuto股份有限公司製)進行測量。 In addition, the relative permittivity of the solvent (F) can be measured using a relative permittivity meter "Model 871" (manufactured by Nihon Rufuto Co., Ltd.).

再者,(F)溶劑中,除了上述第1溶劑及上述第2溶劑以外,亦可包含在常壓下沸點為150℃至350℃的第3溶劑。上述第3溶劑在常壓下的沸點較佳為150至350℃,更佳為160至300℃。 In addition, in the solvent (F), in addition to the above-mentioned first solvent and the above-mentioned second solvent, a third solvent having a boiling point of 150°C to 350°C under normal pressure may be included. The boiling point of the third solvent under normal pressure is preferably 150 to 350°C, more preferably 160 to 300°C.

除了作為第1溶劑的丙二醇單甲醚乙酸酯及在23℃的相對介電係數為10至30的上述第2溶劑以外,亦可混合使用在常壓下的沸點為150℃至350℃的第3溶劑。 In addition to the propylene glycol monomethyl ether acetate as the first solvent and the above-mentioned second solvent with a relative permittivity of 10 to 30 at 23°C, a mixture with a boiling point of 150°C to 350°C under normal pressure can also be used in combination. The third solvent.

第3溶劑的例子包含:丁基賽路蘇乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單乙醚乙酸酯、3-乙氧基丙酸乙酯等乙酸酯類;二乙二醇二甲醚、二乙二醇乙基甲醚、二乙二醇二乙醚、二乙二醇二丁醚等醚類;α-或β-萜品醇等萜烯類等。上述第3溶劑之中較佳為:二乙二醇二甲醚、二乙二醇乙基甲醚、二乙二醇二乙醚、二乙二醇二丁醚。 Examples of the third solvent include: butyl cyrus acetate, carbitol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monoethyl ether acetate, 3- Acetate esters such as ethyl ethoxypropionate; ethers such as diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, and diethylene glycol dibutyl ether; α-or Terpenes such as β-terpineol. Among the above-mentioned third solvents, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, and diethylene glycol dibutyl ether are preferable.

上述第3溶劑的含量較佳係相對於(F)溶劑的總質量較佳為1至30質量%,更佳為1至20質量%。藉由在上述1至30質量%的範圍內含有上述第3溶劑,可抑制氧化矽粒子凝聚。再者,控制阻劑的乾燥性,可抑制真空乾燥時的突沸以及塗布噴嘴中乾燥異物的產生。 The content of the third solvent is preferably 1 to 30% by mass, and more preferably 1 to 20% by mass relative to the total mass of the solvent (F). By containing the above-mentioned third solvent in the above-mentioned range of 1 to 30% by mass, agglomeration of silicon oxide particles can be suppressed. Furthermore, by controlling the drying properties of the resist, it is possible to suppress bumping during vacuum drying and the generation of dry foreign matter in the coating nozzle.

再者,(F)溶劑整體在23℃的相對介電係數較佳為8.5以上15.0以下,更佳為8.8以上15.0以下,又更佳為9.3以上15.0以下。藉由使上述(F)溶劑整體在23℃的相對介電係數為8.5以上,可利用溶劑合作用使殘存於氧化矽粒子表面的矽醇基穩定,而可抑制氧化矽粒子凝聚。再者,藉由使在23℃的相對介電係數在15.0以下,可確保在減壓下使溶劑乾燥的VCD步驟中的乾燥性及良好的塗布性。在此,「溶劑整體」係指第1溶劑及第2溶劑的混合溶劑,或第1溶劑、第2溶劑及第3溶劑的混合溶劑。 Furthermore, (F) the relative permittivity of the entire solvent at 23° C. is preferably 8.5 or more and 15.0 or less, more preferably 8.8 or more and 15.0 or less, and still more preferably 9.3 or more and 15.0 or less. By setting the relative permittivity of the above-mentioned (F) solvent as a whole at 23° C. to 8.5 or more, the silanol group remaining on the surface of the silica particles can be stabilized by solvent cooperation, and the agglomeration of the silica particles can be suppressed. Furthermore, by setting the relative permittivity at 23°C to 15.0 or less, it is possible to ensure the drying properties and good coating properties in the VCD step of drying the solvent under reduced pressure. Here, "the whole solvent" refers to a mixed solvent of the first solvent and the second solvent, or a mixed solvent of the first solvent, the second solvent, and the third solvent.

再者,本發明的感光性樹脂組成物中亦可因應需求摻合環氧樹脂等(A)成分以外的樹脂、硬化劑、硬化促進劑、熱聚合抑制劑及抗氧化劑、塑化劑、氧化矽以外的填充材、均染劑、消泡劑、界面活性劑、偶合劑等添加劑。 Furthermore, the photosensitive resin composition of the present invention may be blended with resins other than (A) components such as epoxy resins, hardeners, hardening accelerators, thermal polymerization inhibitors, antioxidants, plasticizers, and oxidizers. Additives such as fillers, leveling agents, defoamers, surfactants, and coupling agents other than silicon.

熱聚合抑制劑及抗氧化劑的例子包含:對苯二酚、對苯二酚單甲醚、焦五倍子酚、第三丁基兒茶酚、酚噻

Figure 109146244-A0202-12-0018-30
、受阻酚系化合物等。塑化劑的例子 包含:鄰苯二甲酸二丁酯、磷苯二甲酸二辛酯、磷酸三甲苯酯等。填充材的例子包含:玻璃纖維、氧化矽、雲母、氧化鋁等。消泡劑或均染劑的例子包含:聚矽氧系、氟系、丙烯酸系的化合物。界面活性劑的例子包含:氟系界面活性劑、聚矽氧系界面活性劑等。偶合劑的例子包含:3-(縮水甘油氧基)丙基三甲氧基矽烷、3-丙烯醯氧基丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等。 Examples of thermal polymerization inhibitors and antioxidants include: hydroquinone, hydroquinone monomethyl ether, pyrogallol, tertiary butylcatechol, phenothiol
Figure 109146244-A0202-12-0018-30
, Hindered phenolic compounds, etc. Examples of plasticizers include dibutyl phthalate, dioctyl phosphate, tricresyl phosphate, and the like. Examples of fillers include: glass fiber, silica, mica, alumina, etc. Examples of defoaming agents or leveling agents include silicone-based, fluorine-based, and acrylic-based compounds. Examples of surfactants include fluorine-based surfactants, silicone-based surfactants, and the like. Examples of coupling agents include: 3-(glycidoxy)propyltrimethoxysilane, 3-propenyloxypropyltrimethoxysilane, 3-isocyanatopropyltriethoxysilane, 3- Ureayl propyl triethoxy silane and so on.

本發明的感光性樹脂組成物,在扣除溶劑的固形份(固形份包含光硬化後成為固形份的單體)中,較佳係包含(A)成分的含不飽和基之感光性樹脂、(B)成分的具有至少2個以上不飽和鍵的光聚合性單體、(C)成分的光聚合起始劑、(D)成分的選自黑色顏料、混色顏料及遮光材的至少1種遮光成分、(E)氧化矽粒子。溶劑的量係根據目標黏度而有變化,但較佳係相對於整體量為40至90質量%。 The photosensitive resin composition of the present invention is preferably an unsaturated group-containing photosensitive resin containing component (A), ( B) a photopolymerizable monomer having at least two unsaturated bonds of the component, a photopolymerization initiator of the component (C), and at least one light-shielding selected from black pigments, color-mixing pigments, and light-shielding materials for the component (D) Ingredients, (E) Silica particles. The amount of the solvent varies according to the target viscosity, but it is preferably 40 to 90% by mass relative to the total amount.

再者,使本發明的感光性樹脂組成物硬化而成的遮光膜,例如,可藉由將感光性樹脂組成物的溶液塗佈於基板等,使溶劑乾燥並照射光(包含紫外線、放射線等)以使其硬化而得到。使用光罩等設置照光部分與非照光部分,僅使照光部分硬化,並以鹼溶液溶解其他部分,如此可得到期望的圖案。 Furthermore, the light-shielding film formed by curing the photosensitive resin composition of the present invention can be prepared by applying a solution of the photosensitive resin composition to a substrate or the like, drying the solvent and irradiating light (including ultraviolet rays, radiation, etc.). ) To harden it. Use a photomask or the like to set the illuminated part and the non-illuminated part, only harden the illuminated part, and dissolve the other parts with an alkaline solution, so that the desired pattern can be obtained.

再者,具有本發明之遮光膜作為黑色矩陣的濾色器或觸控面板,例如,可藉由下列方法製作:於透明基材上形成膜厚1.0至2.0μm的遮光膜,在形成遮光膜後藉由光微影形成紅、藍及綠各像素,又,以噴墨製程將紅、藍及綠的印墨噴射至遮光膜中等。 Furthermore, a color filter or touch panel having the light-shielding film of the present invention as a black matrix, for example, can be produced by the following method: forming a light-shielding film with a thickness of 1.0 to 2.0 μm on a transparent substrate, and then forming a light-shielding film Then, the red, blue, and green pixels are formed by photolithography, and the red, blue, and green inks are sprayed onto the light-shielding film by an inkjet process.

另外,使本發明的感光性樹脂組成物硬化而成的遮光膜,亦可作為液晶顯示裝置的黑色管柱間隔件(Black Column Spacer)使用。例如,亦可使用單一的黑色阻劑製作複數個膜厚不同的部分,使一者發揮作為間隔件的功能,使其他者發揮作為黑色矩陣的功能。 In addition, the light-shielding film formed by curing the photosensitive resin composition of the present invention can also be used as a black column spacer (Black Column Spacer) of a liquid crystal display device. For example, a single black resist may be used to produce a plurality of portions with different film thicknesses, and one of them may function as a spacer and the other may function as a black matrix.

具體例示以感光性樹脂組成物的塗佈、乾燥形成遮光膜的方法中的各步驟。 Specifically, each step in the method of forming a light-shielding film by coating and drying the photosensitive resin composition is exemplified.

將感光性樹脂組成物塗佈於基板的方法,亦可採用習知的溶液浸漬法、噴霧法、使用輥塗機、降落塗機(land coater)、狹縫塗佈機或旋塗機的方法等任意方法。以此等方法塗佈成期望厚度後,將溶劑去除(預烘烤),藉此形成被膜。預烘烤可藉由以烘箱、加熱板等所進行之加熱、真空乾燥或此等的組合來進行。預烘烤中的加熱溫度及加熱時間可因應所使用之溶劑而適當地選擇,但較佳為例如在80至120℃進行1至10分鐘。 The method of applying the photosensitive resin composition to the substrate may also be a conventional solution dipping method, spray method, method using a roll coater, land coater, slit coater, or spin coater. And so on any method. After coating to a desired thickness by such methods, the solvent is removed (pre-baking), thereby forming a film. The pre-baking can be carried out by heating with an oven, a hot plate, etc., vacuum drying, or a combination of these. The heating temperature and heating time in the pre-baking can be appropriately selected according to the solvent used, but it is preferably carried out at 80 to 120°C for 1 to 10 minutes, for example.

曝光時所使用的放射線可使用例如可見光線、紫外線、遠紫外線、電子射線、X射線等,但放射線的波長範圍較佳為250至450nm。再者,適合此鹼顯影的顯影液可使用例如:碳酸鈉、碳酸鉀、氫氧化鉀、二乙醇胺、四甲基氫氧化銨等水溶液。此等顯影液可配合樹脂層的特性而適當地選擇,但亦有效的是因應需求添加界面活性劑。顯影溫度較佳為20至35℃,可使用市售的顯影機或超音波洗淨機等精密地形成微細的影像。另外,鹼顯影後通常進行水洗。顯影處理法可使用:沖淋顯影法、噴霧顯影法、浸漬式(浸漬)顯影法、劃槽(paddle)顯影法等。 The radiation used in the exposure can be, for example, visible light, ultraviolet, extreme ultraviolet, electron beam, X-ray, etc., but the wavelength range of the radiation is preferably 250 to 450 nm. Furthermore, a developer suitable for this alkaline development can use, for example, aqueous solutions such as sodium carbonate, potassium carbonate, potassium hydroxide, diethanolamine, and tetramethylammonium hydroxide. These developers can be appropriately selected according to the characteristics of the resin layer, but it is also effective to add a surfactant according to the needs. The developing temperature is preferably 20 to 35°C, and a commercially available developing machine or ultrasonic cleaner can be used to precisely form a fine image. In addition, water washing is usually performed after alkali development. The development treatment method may use: shower development method, spray development method, immersion (dipping) development method, paddle development method, and the like.

如此般進行顯影後,於180至250℃進行熱處理(後烘烤)20至100分鐘。此後烘烤之目的是提高經過圖案化之硬化膜(遮光膜)與基板的密合性等。其與預烘烤同樣地可藉由烘箱、加熱板等加熱來進行。本發明的經圖案化之硬化膜(遮光膜),可經由光微影法中的各個步驟形成。然後,藉由熱完成聚合及硬化(有時將兩者一併稱為硬化),可得到具有期望圖案的遮光膜。 After developing in this way, heat treatment (post-baking) is performed at 180 to 250° C. for 20 to 100 minutes. The purpose of the subsequent baking is to improve the adhesion between the patterned cured film (light-shielding film) and the substrate. This can be performed by heating by an oven, a hot plate, etc. similarly to the pre-baking. The patterned cured film (light-shielding film) of the present invention can be formed through various steps in the photolithography method. Then, polymerization and curing are completed by heat (the two are sometimes referred to as curing together), and a light-shielding film having a desired pattern can be obtained.

本發明的黑色阻劑用感光性樹脂組成物,如前述,不僅適合以曝光、鹼顯影等操作來形成微細圖案,即使藉由以往的網版印刷形成圖案,亦可得到同樣具有優異的遮光性、密合性、電絕緣性、耐熱性、耐化學性之遮光膜。 The photosensitive resin composition for black resists of the present invention, as mentioned above, is not only suitable for the formation of fine patterns by exposure, alkali development, etc., but also excellent light-shielding properties can be obtained even if the patterns are formed by conventional screen printing. , Adhesion, electrical insulation, heat resistance, and chemical resistance of light-shielding film.

本發明的黑色阻劑用感光性樹脂組成物適合作為塗佈材使用。液晶顯示裝置或攝影元件中所使用的濾色器用印墨、以及藉此形成的遮光膜,作為濾色器、液晶投影用的黑色矩陣等特別有用。再者,本發明的黑色阻劑用感光性樹脂組成物,除了彩色液晶顯示器的濾色器印墨以外,亦可用作以有機EL元件為代表的有機電激發光裝置、彩色液晶顯示裝置、彩色傳真、影像感測器等各種多色顯示器中用來區分各種顏色或遮光的印墨材料。根據本發明的濾色器,可減少在著色層(包含黑色阻劑層)與基板之界面的外部光線之反射,以及例如用於有機EL元件時來自元件之發光的反射。亦即,可實現降低外部光線的反射而提升亮部對比、以及改善從發光側萃取光線的效率而提升發光效率。 The photosensitive resin composition for black resists of this invention is suitable for use as a coating material. The ink for color filters used in liquid crystal display devices or imaging elements, and the light-shielding film formed thereby are particularly useful as color filters, black matrices for liquid crystal projection, and the like. Furthermore, the photosensitive resin composition for a black resist of the present invention can also be used as an organic electroluminescent device represented by an organic EL element, a color liquid crystal display device, in addition to the color filter ink of a color liquid crystal display. Color faxes, image sensors, and other multi-color displays are used to distinguish various colors or shading ink materials. According to the color filter of the present invention, it is possible to reduce the reflection of external light at the interface between the colored layer (including the black resist layer) and the substrate, and the reflection of light emitted from the device when used in, for example, an organic EL device. That is, the reflection of external light can be reduced to improve the contrast of bright parts, and the efficiency of extracting light from the light-emitting side can be improved to increase the luminous efficiency.

[實施例] [Example]

以下,根據實施例及比較例具體地說明本發明的實施形態,但本發明不限於此等實施形態。 Hereinafter, embodiments of the present invention will be specifically described based on examples and comparative examples, but the present invention is not limited to these embodiments.

首先,說明(A)成分的含聚合性不飽和基之鹼可溶性樹脂的合成例,此等合成例中的樹脂之評估若未另外說明,係以下述般進行。 First, the synthesis example of the polymerizable unsaturated group-containing alkali-soluble resin of (A) component is demonstrated, unless otherwise stated, the evaluation of the resin in these synthesis examples is performed as follows.

[固形份濃度] [Solid content concentration]

使合成例中所得到的樹脂溶液1g含浸於玻璃濾器[重量:W0(g)]並秤重[W1(g)],從在160℃加熱2小時後的重量[W2(g)],藉由下式而求得。 1 g of the resin solution obtained in the synthesis example was impregnated in a glass filter [weight: W0(g)] and weighed [W1(g)]. From the weight [W2(g)] after heating at 160°C for 2 hours, borrow It can be obtained from the following formula.

固形份濃度(重量%)=100×(W2-W0)/(W1-W0) Solid content concentration (weight%)=100×(W2-W0)/(W1-W0)

[酸價] [Acid value]

使樹脂溶液溶解於二

Figure 109146244-A0202-12-0021-31
烷,使用電位差滴定裝置「COM-1600」(平沼產業股份有限公司製),以1/10N-KOH水溶液進行滴定而求得。 Dissolve the resin solution in two
Figure 109146244-A0202-12-0021-31
The alkane was obtained by titration with a 1/10 N-KOH aqueous solution using a potentiometric titration device "COM-1600" (manufactured by Hiranuma Sangyo Co., Ltd.).

[分子量] [Molecular Weight]

以凝膠滲透層析(GPC)「HLC-8220GPC」(TOSOH股份有限公司製,溶劑:四氫呋喃,管柱:TSKgelSuperH-2000(2根)+TSKgelSuperH-3000(1根)+TSKgelSuperH-4000(1根)+TSKgelSuperH-5000(1根)(TOSOH股份有限公司製)、溫度:40℃,速度:0.6ml/min)測量,作為標準聚苯乙烯(TOSOH股份有限公司製,PS-Oligomer Kit)換算值,求出重量平均分子量(Mw)。 Gel permeation chromatography (GPC) "HLC-8220GPC" (manufactured by TOSOH Co., Ltd., solvent: tetrahydrofuran, column: TSKgelSuperH-2000 (2) + TSKgelSuperH-3000 (1) + TSKgelSuperH-4000 (1) )+TSKgelSuperH-5000 (1 piece) (manufactured by TOSOH Co., Ltd.), temperature: 40°C, speed: 0.6 ml/min), measured as standard polystyrene (manufactured by TOSOH Co., Ltd., PS-Oligomer Kit) conversion value , Calculate the weight average molecular weight (Mw).

[平均粒徑] [The average particle size]

氧化矽粒子的平均粒徑係使用動態光散射法的粒度分布計「粒徑分析儀FPAR-1000」(大塚電子股份有限公司製),藉由累積法求出。 The average particle size of the silica particles was determined by the accumulation method using a particle size distribution meter "particle size analyzer FPAR-1000" (manufactured by Otsuka Electronics Co., Ltd.) using a dynamic light scattering method.

合成例及比較合成例中所使用的簡寫如下。 The abbreviations used in the synthesis example and the comparative synthesis example are as follows.

BPFE:9,9-雙(4-羥基苯基)茀與1-氯-2,3-1環氧丙烷(chloromethyloxirane)的反應物。通式(1)的化合物中,X為茀-9,9-二基、R1至R4為氫的化合物。 BPFE: 9,9-bis(4-hydroxyphenyl) pyridium and 1-chloro-2,3-1 propylene oxide (chloromethyloxirane) reactant. Among the compounds of the general formula (1), X is a compound in which X is a -9,9-diyl group, and R 1 to R 4 are hydrogen.

AA:丙烯酸 AA: Acrylic

BPDA:3,3’,4,4’-聯苯四羧酸二酐 BPDA: 3,3’,4,4’-biphenyltetracarboxylic dianhydride

THPA:四氫酞酸酐 THPA: Tetrahydrophthalic anhydride

TEAB:溴化四乙銨 TEAB: Tetraethylammonium bromide

PGMEA:丙二醇單甲醚乙酸酯 PGMEA: Propylene Glycol Monomethyl Ether Acetate

[合成例] [Synthesis example]

在附回流冷卻器的500ml四頸燒瓶中饋入BPFE(114.4g,0.23莫耳)、AA(33.2g,0.46莫耳)、PGMEA(157g)及TEAB(0.48g),於100至105℃攪拌20小時以使其反應。接著,在燒瓶內饋入BPDA(35.3g,0.12莫耳)、THPA(18.3g, 0.12莫耳),於120至125℃攪拌6小時,得到含聚合性不飽和基之鹼可溶性樹脂(A)。所得到的樹脂溶液的固形份濃度為56.1質量%,酸價(固形份換算)為103mgKOH/g,以GPC分析所得到的Mw為3600。 Charge BPFE (114.4g, 0.23 mol), AA (33.2g, 0.46 mol), PGMEA (157g) and TEAB (0.48g) into a 500ml four-necked flask with reflux cooler, and stir at 100 to 105°C 20 hours to make it react. Next, BPDA (35.3g, 0.12 mol), THPA (18.3g, 0.12 mol) and stirring at 120 to 125°C for 6 hours to obtain an alkali-soluble resin (A) containing polymerizable unsaturated groups. The solid content concentration of the obtained resin solution was 56.1% by mass, the acid value (in terms of solid content) was 103 mgKOH/g, and the Mw obtained by GPC analysis was 3600.

以表1所記載的摻合量(單位為質量%)製備實施例1至14、比較例1至8的感光性樹脂組成物。表中所使用的摻合成分如下。 The photosensitive resin compositions of Examples 1 to 14 and Comparative Examples 1 to 8 were prepared in the blending amount (unit: mass %) described in Table 1. The blending components used in the table are as follows.

(含聚合性不飽和基之鹼可溶性樹脂) (Alkali-soluble resin containing polymerizable unsaturated groups)

(A):上述合成例中得到的鹼可溶性樹脂溶液(固形份濃度56.1質量%) (A): Alkali-soluble resin solution obtained in the above synthesis example (solid content concentration 56.1% by mass)

(光聚合性單體) (Photopolymerizable monomer)

(B):二新戊四醇六丙烯酸酯與二新戊四醇五丙烯酸酯的混合物(ARONIX M-405,東亞合成股份有限公司製,「ARONIX」為該公司的註冊商標) (B): A mixture of dineopentaerythritol hexaacrylate and dineopentaerythritol pentaacrylate (ARONIX M-405, manufactured by Toagosei Co., Ltd., "ARONIX" is the company's registered trademark)

(光聚合起始劑) (Photopolymerization initiator)

(C):乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)(Irgacure OXE-02,BASF Japan公司製,「Irgacure」為該公司的註冊商標) (C): Ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-,1-(O-acetyloxime)( Irgacure OXE-02, manufactured by BASF Japan, "Irgacure" is the company's registered trademark)

(碳黑分散液) (Carbon black dispersion)

(D):碳黑濃度25.0質量%、高分子分散劑濃度5.0質量%、分散樹脂(合成例之鹼可溶性樹脂(A)(固形份5.0質量%)的PGMEA分散液(固形份35.0質量%) (D): PGMEA dispersion (solid content 35.0% by mass) of carbon black concentration 25.0% by mass, polymer dispersant concentration of 5.0% by mass, and dispersing resin (alkali-soluble resin (A) of the synthesis example (solid content: 5.0% by mass))

(E):氧化矽PGMEA分散液「YA050C」(股份有限公司Admatechs製,固形份濃度40質量%,平均粒徑50nm) (E): Silica PGMEA dispersion liquid "YA050C" (made by Admatechs Co., Ltd., solid content concentration 40% by mass, average particle size 50nm)

(溶劑) (Solvent)

(第1溶劑) (The first solvent)

(F)-1:丙二醇單甲醚乙酸酯(PGMEA) (F)-1: Propylene glycol monomethyl ether acetate (PGMEA)

(第2溶劑) (Second solvent)

(F)-2:環己酮(ANON) (F)-2: Cyclohexanone (ANON)

(F)-3:乳酸乙酯(EL) (F)-3: Ethyl lactate (EL)

(F)-4:3-甲氧基-3-甲基丁醇(MMB) (F)-4: 3-Methoxy-3-methylbutanol (MMB)

(F)-5:丙二醇單甲醚(PGME) (F)-5: Propylene glycol monomethyl ether (PGME)

(第3溶劑) (3rd solvent)

(F)-6:二乙二醇二甲醚(MDM) (F)-6: Diethylene glycol dimethyl ether (MDM)

(F)-7:二乙二醇乙基甲醚(EDM) (F)-7: Diethylene glycol ethyl methyl ether (EDM)

(F)-8:二乙二醇二乙醚(EDE) (F)-8: Diethylene glycol diethyl ether (EDE)

(F)-9:二乙二醇二丁醚(BDB) (F)-9: Diethylene glycol dibutyl ether (BDB)

Figure 109146244-A0202-12-0025-10
Figure 109146244-A0202-12-0025-10

[評估] [evaluate]

如下述般製作使用於評估之硬化黑色阻劑用感光性樹脂組成物而成的硬化膜(遮光膜)。 The cured film (light-shielding film) which hardened the photosensitive resin composition for black resists used for evaluation was produced as follows.

(異物、光學濃度、反射率評估用的硬化膜(遮光膜)之製作) (Production of cured film (shading film) for evaluation of foreign matter, optical density, and reflectivity)

以使加熱硬化處理後的膜厚為1.2μm的方式,在預先以低壓汞燈照射波長254nm的照度1000mJ/cm2的紫外線而表面經洗淨的125mm×125mm的玻璃基板「# 1737」(Corning公司製)(以下稱為「玻璃基板」)上,使用旋塗法塗佈表1所示之感光性樹脂組成物,使用加熱板於90℃預烘烤1分鐘以製作乾燥遮光膜。接著,對於乾燥遮光膜的整個面以i線照度30mW/cm2的超高壓汞燈照射50mJ/cm2的紫外線,進行遮光膜的光硬化反應。 Heating to a thickness of 1.2μm after hardening manner, a low pressure mercury lamp in advance to a wavelength of 254nm UV illuminance 1000mJ / cm 2 and the surface is cleaned 125mm × 125mm glass substrates "# 1737" (Corning The photosensitive resin composition shown in Table 1 was coated on the company) (hereinafter referred to as "glass substrate") using a spin coating method, and pre-baked at 90°C for 1 minute using a hot plate to produce a dry light-shielding film. Next, ultraviolet rays of 50 mJ/cm 2 were irradiated with an ultra-high pressure mercury lamp with an i-line illuminance of 30 mW/cm 2 to the entire surface of the dried light shielding film to perform a photocuring reaction of the light shielding film.

接著,藉由25℃、0.04%氫氧化鉀溶液,以1kgf/cm2的沖淋壓力,對曝光後的上述硬化膜(遮光膜)進行1分鐘顯影處理後,進行5kgf/cm2的噴霧水洗,使用熱風乾燥機於230℃對顯影後的遮光膜進行正式硬化(後烘烤)30分鐘,得到實施例1至14及比較例1至8之硬化膜(遮光膜)。 Subsequently, by 25 ℃, 0.04% potassium hydroxide solution, to shower pressure 1kgf / cm 2, the above-mentioned cured film (light shielding film) for one minute after the exposure development processing performed 5kgf / cm 2 of water spray The developed light-shielding film was cured (post-baked) at 230° C. for 30 minutes using a hot air dryer to obtain cured films (light-shielding films) of Examples 1 to 14 and Comparative Examples 1 to 8.

針對使上述所得到的實施例1至14、比較例1至8的硬化黑色阻劑用感光性樹脂組成物而成的硬化膜(遮光膜)進行下列評估項目。 The following evaluation items were performed for the cured film (light-shielding film) obtained by curing the photosensitive resin composition for black resists of Examples 1 to 14 and Comparative Examples 1 to 8 obtained above.

[異物評估] [Foreign body assessment]

(評估方法) (assessment method)

使用顯微鏡觀察正式硬化(後烘烤)後的硬化膜(遮光膜),確認有無源自凝聚物之異物。另外,△以上視為合格。 Observe the cured film (light-shielding film) after the main curing (post-baking) with a microscope to confirm the presence or absence of foreign matter originating from aggregates. In addition, △ or more is regarded as a pass.

(異物評估的評估基準) (Evaluation criteria for foreign body evaluation)

○:硬化膜(遮光膜)中未確認到源自凝聚物之異物 ○: No foreign matter originating from aggregates is confirmed in the cured film (light-shielding film)

△:硬化膜(遮光膜)的一部分確認到源自凝聚物之異物 △: Part of the cured film (light-shielding film) is confirmed to be a foreign matter originating from agglomerates

×:硬化膜(遮光膜)的整個面皆確認到源自凝聚物之異物 ×: Foreign matter originating from aggregates is confirmed on the entire surface of the cured film (light-shielding film)

[光學濃度評估] [Optical Density Evaluation]

(評估方法) (assessment method)

使用麥克伯(Macbeth)穿透濃度計評估所製作之硬化膜(遮光膜)的光學濃度(OD)。再者,測定形成於基板上的硬化膜(遮光膜)之膜厚,將光學濃度(OD)的值除以膜厚所得到的值作為OD/μm。 A Macbeth penetrating densitometer was used to evaluate the optical density (OD) of the produced hardened film (shading film). Furthermore, the film thickness of the cured film (light-shielding film) formed on the substrate was measured, and the value obtained by dividing the value of the optical density (OD) by the film thickness was taken as OD/μm.

光學濃度(OD)係以下式(1)算出。 The optical density (OD) is calculated by the following formula (1).

光學濃度(OD)=-log10T(1) Optical density (OD)=-log10T(1)

(T表示穿透率) (T means penetration rate)

[反射率評估] [Reflectivity evaluation]

(評估方法) (assessment method)

對於以與光學濃度(OD)評估用的硬化膜(遮光膜)相同的方法製作成的附硬化膜(遮光膜)之基板,使用紫外線可見紅外線分光光度計「UH4150」(hitachi hightech science股份有限公司製),以入射角2°測定基板(玻璃基板)側的反射率。 For a substrate with a hardened film (light-shielding film) manufactured by the same method as the hardened film (light-shielding film) for optical density (OD) evaluation, use the ultraviolet-visible-infrared spectrophotometer "UH4150" (hitachi hightech science Co., Ltd.) Manufacture), and the reflectance on the substrate (glass substrate) side was measured at an incident angle of 2°.

[塗佈不均評估] [Evaluation of uneven coating]

(評估方法) (assessment method)

(塗佈不均評估用的硬化膜(遮光膜)之製作) (Production of cured film (shading film) for evaluation of uneven coating)

以使加熱硬化處理後的膜厚為1.2μm的方式,在預先以低壓汞燈照射波長254nm、照度1000mJ/cm2的紫外線而表面經洗淨的125mm×125mm的玻璃基板「# 1737」(Corning公司製)(以下稱為「玻璃基板」)上,塗佈表1所示的感光性樹脂組成物使用旋塗法,藉由VCD以200Pa真空乾燥1分鐘,使用加熱板於90℃預烘烤1分鐘,以製作乾燥遮光膜。接著,於230℃對於所得到的乾燥遮光膜進行正式硬化(後烘烤)30分鐘,得到實施例1至14及比較例1至8之硬化膜(遮光膜)。 Heating to a thickness of 1.2μm after hardening manner, a low pressure mercury lamp in advance to the wavelength 254nm, illuminance 1000mJ / cm 2 of ultraviolet rays through the surface of 125mm × 125mm glass substrate cleaned "# 1737" (Corning Company (made by the company) (hereinafter referred to as "glass substrate"), apply the photosensitive resin composition shown in Table 1 using the spin coating method, vacuum-dry at 200 Pa by VCD for 1 minute, and pre-baked at 90°C on a hot plate 1 minute to make a dry shading film. Next, the obtained dry light-shielding film was subjected to main curing (post-baking) at 230° C. for 30 minutes to obtain cured films (light-shielding films) of Examples 1 to 14 and Comparative Examples 1 to 8.

(評估方法) (assessment method)

以目視觀察正式硬化(後烘烤)後的硬化膜(遮光膜),確認塗膜的均勻性。另外,△以上視為合格。 The cured film (light-shielding film) after the main curing (post-baking) was visually observed to confirm the uniformity of the coating film. In addition, △ or more is regarded as a pass.

(塗佈不均評估的評估基準) (Evaluation criteria for evaluation of uneven coating)

○:硬化膜(遮光膜)中未確認到不均 ○: No unevenness is confirmed in the cured film (light-shielding film)

△:硬化膜(遮光膜)的一部分中確認到不均 △: Unevenness is confirmed in part of the cured film (light-shielding film)

×:硬化膜(遮光膜)並未均勻地製膜,整個面皆確認到不均 ×: The cured film (light-shielding film) was not uniformly formed, and unevenness was confirmed on the entire surface

上述評估結果示於表2。 The above evaluation results are shown in Table 2.

Figure 109146244-A0202-12-0029-11
Figure 109146244-A0202-12-0029-11

如實施例1至14所示,可知藉由包含在23℃的相對介電係數為10至30的第2溶劑並且使溶劑整體在23℃的相對介電係數設為8.5以上,可得到具有高遮光性及低反射率,並且凝聚物之產生經抑制的遮光膜。此是推測藉由使第2溶劑的相對介電係數為10至30並且使溶劑整體在23℃的相對介電係數設為8.5以上,而可藉由溶劑合作用使殘存於氧化矽粒子表面的矽醇基穩定。 As shown in Examples 1 to 14, it can be seen that by including a second solvent having a relative permittivity of 10 to 30 at 23°C and setting the relative permittivity of the entire solvent at 23°C to 8.5 or more, it is possible to obtain a high A light-shielding film with light-shielding and low reflectivity, and the generation of aggregates is suppressed. It is speculated that by setting the relative permittivity of the second solvent to 10 to 30 and setting the relative permittivity of the entire solvent to 8.5 or more at 23°C, the residual on the surface of the silicon oxide particles can be made by solvent cooperation. Silanol is stable.

尤其是,包含在23℃的相對介電係數為13以上的第2溶劑,在第2溶劑的含量相對所有溶劑之質量為20至50質量%的實施例1至3、7至11、13、14中,明顯抑制了在比較例4至8中所觀察到的凝聚物之產生,且未觀察到光學濃度降低。此是推測藉由相對介電係數高的上述第2溶劑而更有效地對於氧化矽粒子表面之矽醇基進行溶劑合作用。 In particular, including the second solvent having a relative permittivity of 13 or more at 23° C., the content of the second solvent is 20 to 50% by mass relative to the mass of all solvents in Examples 1 to 3, 7 to 11, 13, and In 14, the generation of aggregates observed in Comparative Examples 4 to 8 was significantly suppressed, and no decrease in optical density was observed. It is speculated that the above-mentioned second solvent with high relative permittivity can more effectively solvate the silanol groups on the surface of the silicon oxide particles.

包含第3溶劑的實施例9至14中,除了作為第2溶劑之效果的抑制源自氧化矽粒子之凝聚物以外,亦藉由具有高沸點的第3溶劑之效果改善乾燥性,而可抑制塗佈不均。 In Examples 9 to 14 containing the third solvent, in addition to the effect of the second solvent for suppressing agglomerates derived from silica particles, the effect of the third solvent with a high boiling point also improves the drying properties, which can suppress Uneven coating.

[產業上的可利用性] [Industrial availability]

根據本發明的感光性樹脂組成物,可提供兼具高遮光性及低反射率的黑色矩陣用感光性樹脂組成物及使用該感光性樹脂組成物的遮光膜以及濾色器、觸控面板。再者,藉由該濾色器及觸控面板,可提供辨識性優良的各種顯示裝置。 According to the photosensitive resin composition of the present invention, it is possible to provide a photosensitive resin composition for a black matrix having both high light-shielding properties and low reflectance, and a light-shielding film, color filter, and touch panel using the photosensitive resin composition. Furthermore, with the color filter and the touch panel, various display devices with excellent visibility can be provided.

Figure 109146244-A0202-11-0002-1
Figure 109146244-A0202-11-0002-1

Claims (9)

一種黑色阻劑用感光性樹脂組成物,係包含下列成分作為必須成分: A photosensitive resin composition for black resists, which contains the following components as essential components: (A)含不飽和基之感光性樹脂、 (A) photosensitive resin containing unsaturated groups, (B)具有至少2個以上不飽和鍵的光聚合性單體、 (B) A photopolymerizable monomer having at least 2 or more unsaturated bonds, (C)光聚合起始劑、 (C) photopolymerization initiator, (D)選自黑色顏料、混色顏料及遮光材的至少1種遮光成分、 (D) At least one light-shielding component selected from black pigments, mixed color pigments and light-shielding materials, (E)氧化矽粒子、及 (E) Silica particles, and (F)溶劑; (F) Solvent; 前述(F)溶劑包含為丙二醇單甲醚乙酸酯之第1溶劑、及於23℃的相對介電係數為10至30之第2溶劑; The aforementioned (F) solvent includes a first solvent that is propylene glycol monomethyl ether acetate, and a second solvent that has a relative permittivity of 10 to 30 at 23°C; 前述(F)溶劑整體在23℃的相對介電係數為8.5以上。 The aforementioned (F) solvent as a whole has a relative permittivity of 8.5 or more at 23°C. 如請求項1所述之黑色阻劑用感光性樹脂組成物,其中,前述(A)含不飽和基之感光性樹脂,係使通式(1)表示的從雙酚類衍生之具有2個縮水甘油醚基的環氧化物與(甲基)丙烯酸的反應物,進一步與多元羧酸或其酸酐反應所得到的含不飽和基之感光性樹脂; The photosensitive resin composition for a black resist according to claim 1, wherein the aforementioned (A) unsaturated group-containing photosensitive resin is derived from bisphenols represented by the general formula (1) and has two The reaction product of glycidyl ether group epoxide and (meth)acrylic acid is further reacted with polybasic carboxylic acid or its anhydride to obtain unsaturated group-containing photosensitive resin;
Figure 109146244-A0202-13-0001-12
Figure 109146244-A0202-13-0001-12
通式(1)中,R1、R2、R3及R4分別獨立地為氫原子、碳數1至5的烷基或鹵素原子中的任一者,X為-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、通式(2)表示的茀-9,9-二基或單鍵,l為0至10的整數; In the general formula (1), R 1 , R 2 , R 3 and R 4 are each independently a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X is -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, Fu-9 represented by general formula (2), 9-diyl or single bond, l is an integer from 0 to 10;
Figure 109146244-A0202-13-0002-13
Figure 109146244-A0202-13-0002-13
如請求項1或2所述之黑色阻劑用感光性樹脂組成物,其中,前述(F)溶劑係除了前述第1溶劑或前述第2溶劑以外,更包含第3溶劑,前述第3溶劑在常壓下的沸點為150℃至350℃。 The photosensitive resin composition for black resists according to claim 1 or 2, wherein the (F) solvent system includes a third solvent in addition to the first solvent or the second solvent, and the third solvent is The boiling point under normal pressure is 150°C to 350°C. 如請求項1至3中任一項所述之黑色阻劑用感光性樹脂組成物,其中,前述第2溶劑包含碳數3至12之具有鏈狀、分支或環狀結構的飽和酮類。 The photosensitive resin composition for black resists according to any one of claims 1 to 3, wherein the second solvent contains saturated ketones having a chain, branch, or cyclic structure with 3 to 12 carbon atoms. 如請求項1至3中任一項所述之黑色阻劑用感光性樹脂組成物,其中,前述第2溶劑包含碳數3至12之具有鏈狀、分支或環狀結構的飽和或不飽和醇類。 The photosensitive resin composition for a black resist according to any one of claims 1 to 3, wherein the second solvent contains a saturated or unsaturated chain, branched, or cyclic structure having a carbon number of 3 to 12 Alcohols. 一種遮光膜,係使請求項1至5中任一項所述之黑色阻劑用感光性樹脂組成物硬化而成者。 A light-shielding film obtained by curing the photosensitive resin composition for a black resist according to any one of claims 1 to 5. 一種濾色器,係具有請求項6所述之遮光膜作為黑色矩陣。 A color filter having the light-shielding film described in claim 6 as a black matrix. 一種觸控面板,係具有請求項6所述之遮光膜作為黑色矩陣。 A touch panel having the light-shielding film described in claim 6 as a black matrix. 一種顯示裝置,係具有請求項7所述之濾色器或請求項8所述之觸控面板。 A display device having the color filter described in claim 7 or the touch panel described in claim 8.
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JP6318699B2 (en) 2014-02-27 2018-05-09 凸版印刷株式会社 Black photosensitive resin composition, black matrix, black matrix substrate, color filter, liquid crystal display device, and organic electroluminescence display device

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