TW201718714A - Polyimide precursor, resin composition, and method for producing resin film - Google Patents

Polyimide precursor, resin composition, and method for producing resin film Download PDF

Info

Publication number
TW201718714A
TW201718714A TW105130650A TW105130650A TW201718714A TW 201718714 A TW201718714 A TW 201718714A TW 105130650 A TW105130650 A TW 105130650A TW 105130650 A TW105130650 A TW 105130650A TW 201718714 A TW201718714 A TW 201718714A
Authority
TW
Taiwan
Prior art keywords
group
film
precursor
polyimine
formula
Prior art date
Application number
TW105130650A
Other languages
Chinese (zh)
Other versions
TWI641632B (en
Inventor
Masaki Maitani
Takeki Shimizu
Takayuki Kanada
Original Assignee
Asahi Chemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Ind filed Critical Asahi Chemical Ind
Publication of TW201718714A publication Critical patent/TW201718714A/en
Application granted granted Critical
Publication of TWI641632B publication Critical patent/TWI641632B/en

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0346Organic insulating material consisting of one material containing N
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/34Layered products comprising a layer of synthetic resin comprising polyamides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1003Preparatory processes
    • C08G73/1007Preparatory processes from tetracarboxylic acids or derivatives and diamines
    • C08G73/1025Preparatory processes from tetracarboxylic acids or derivatives and diamines polymerised by radiations
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/16Polyester-imides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/54Silicon-containing compounds
    • C08K5/541Silicon-containing compounds containing oxygen
    • C08K5/5415Silicon-containing compounds containing oxygen containing at least one Si—O bond
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2379/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Liquid Crystal (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Laminated Bodies (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

Provided is a polyimide precursor comprising a structural unit L represented by formula (1) (in the formula, X1 represents a tetravalent group having 4-32 carbon atoms, each of R1, R2, and R3 independently represents a monovalent organic group having 1-20 carbon atoms, n represents 0 or 1, and each of a, b, and c is an integer of 0-4) and a structural unit M represented by formula (2) (in the formula, X2 represents a tetravalent group having 4-32 carbon atoms) such that 1/99 ≤ (number of moles of structural unit L/number of moles of structural unit M) ≤ 99/1 is satisfied.

Description

聚醯亞胺前驅體、樹脂組合物及樹脂膜之製造方法Polyimine precursor, resin composition and method for producing resin film

本發明例如係關於一種用於軟性裝置之基板之製造中所使用之聚醯亞胺前驅體、樹脂組合物及樹脂膜之製造方法。The present invention relates to, for example, a method for producing a polyimide precursor, a resin composition, and a resin film used in the production of a substrate for a flexible device.

通常,於要求高耐熱性之用途中使用聚醯亞胺樹脂之膜作為樹脂膜。通常之聚醯亞胺樹脂係藉由將芳香族羧酸二酐與芳香族二胺進行溶液聚合而製造聚醯亞胺前驅體後,將其於高溫下進行熱醯亞胺化或使用觸媒進行化學醯亞胺化而製造的高耐熱樹脂。 聚醯亞胺樹脂係不溶、不熔之超耐熱性樹脂,具有耐熱氧化性、耐熱特性、耐輻射性、耐低溫性、耐化學品性等優異之特性。故而,聚醯亞胺樹脂被用於包含電子材料之廣範圍之領域中。作為電子材料領域中之聚醯亞胺樹脂之應用例,例如可列舉:絕緣塗佈劑、絕緣膜、半導體之保護膜、TFT-LCD(Thin film transistor-liquid crystal display,薄膜電晶體液晶顯示器)之電極保護膜等。最近正在研究代替顯示器材料之領域中先前所使用之玻璃基板而用作利用其輕度、柔軟性之無色透明軟性基板。 於製造作為軟性基板之聚醯亞胺樹脂膜之情形時,於適當之支持體上塗佈含有聚醯亞胺前驅體之組合物而形成塗膜後,進行熱處理而醯亞胺化,藉此獲得聚醯亞胺樹脂膜。作為上述支持體,例如使用玻璃、矽、氮化矽、氧化矽、金屬等。於製造於此種支持體上具有聚醯亞胺膜之積層體時,為了對聚醯亞胺前驅體進行乾燥及醯亞胺化,需要250℃以上之高溫下之加熱處理。藉由該加熱處理,於上述積層體中產生殘留應力,產生翹曲、剝離等嚴重之問題。其原因在於:與構成上述支持體之材料相比,聚醯亞胺之線熱膨脹係數較大。 作為熱膨脹係數較小之聚醯亞胺材料,最眾所周知的為由3,3',4,4'-聯苯四羧酸二酐與對苯二胺形成之聚醯亞胺。雖取決於膜厚及製作條件,但報告有該聚醯亞胺膜顯示出非常低之線熱膨脹係數(非專利文獻1)。 又,報告有於分子鏈中具有酯結構之聚醯亞胺具有適度之直線性及剛直性,故而顯示出較低之線熱膨脹係數(專利文獻1)。 然而,對於含有上述文獻中記載之聚醯亞胺之通常之聚醯亞胺樹脂而言,由於較高之芳香環密度而著色為茶色或黃色,故而於可見光線區域之透光率較低,因此難以用於要求透明性之領域中。例如,由3,3',4,4'-聯苯四羧酸二酐與對苯二胺獲得之上述非專利文獻1之聚醯亞胺系膜厚10 μm之黃色度(YI值)高達40以上,於透明性方面不充分。 關於膜之黃色度,例如已知使用具有氟原子之單體之聚醯亞胺顯示出極低之黃色度(專利文獻2)。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利第4627297號說明書 [專利文獻2]日本專利特表2010-538103號公報 [專利文獻3]日本專利第3079867號說明書 [非專利文獻] [非專利文獻1]最新聚醯亞胺 日本聚醯亞胺研究會編 NTSGenerally, a film of a polyimide resin is used as a resin film in applications requiring high heat resistance. A typical polyimine resin is obtained by solution polymerization of an aromatic carboxylic dianhydride and an aromatic diamine to produce a polyimide precursor, which is then thermally imidized or used at a high temperature. A high heat resistant resin produced by chemical hydrazine imidization. The polyimide resin is an insoluble and non-fusible super heat resistant resin, and has excellent properties such as heat oxidation resistance, heat resistance, radiation resistance, low temperature resistance, and chemical resistance. Therefore, polyimine resins are used in a wide range of fields including electronic materials. Examples of the application of the polyimide resin in the field of electronic materials include an insulating coating agent, an insulating film, a protective film for a semiconductor, and a TFT-LCD (Thin film transistor-liquid crystal display). Electrode protective film, etc. Recently, a glass substrate which has been previously used in the field of display materials has been studied and used as a colorless and transparent flexible substrate using its lightness and flexibility. In the case of producing a polyimide film of a flexible substrate, a composition containing a polyimide precursor is applied onto a suitable support to form a coating film, and then heat-treated to imidize the film. A polyimide film was obtained. As the support, for example, glass, ruthenium, tantalum nitride, ruthenium oxide, metal, or the like is used. In the case of a laminate having a polyimide film produced on such a support, in order to dry and ruthenium the polyimide precursor, heat treatment at a high temperature of 250 ° C or higher is required. By this heat treatment, residual stress is generated in the laminate, and serious problems such as warpage and peeling occur. The reason for this is that the linear thermal expansion coefficient of the polyimine is larger than that of the material constituting the above support. As the polyimine material having a small coefficient of thermal expansion, the most well-known polyimine formed from 3,3',4,4'-biphenyltetracarboxylic dianhydride and p-phenylenediamine. Although the film thickness and the production conditions are reported, it is reported that the polyimide film exhibits a very low linear thermal expansion coefficient (Non-Patent Document 1). Further, it has been reported that a polyimine having an ester structure in a molecular chain has a moderate linearity and a straightness, and thus exhibits a low coefficient of thermal expansion (Patent Document 1). However, in the case of the usual polyimine resin containing the polyimine described in the above document, the color is brown or yellow due to the higher aromatic ring density, so the light transmittance in the visible light region is low. It is therefore difficult to use in areas where transparency is required. For example, the yellowness (YI value) of the polyimide film of the above non-patent document 1 obtained from 3,3',4,4'-biphenyltetracarboxylic dianhydride and p-phenylenediamine is as high as 10 μm. 40 or more, it is insufficient in transparency. Regarding the yellowness of the film, for example, it is known that a polyimide having a monomer having a fluorine atom exhibits an extremely low yellowness (Patent Document 2). [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent No. 4627297 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2010-538103 [Patent Document 3] Japanese Patent No. 3079867 [Non-Patent Document] [Non-Patent Document 1] Latest Polyimine Japan Polyimine Research Association NTS

[發明所欲解決之問題] 然而,為了將聚醯亞胺樹脂用作無色透明軟性基板,除了透明性以外,亦要求優異之伸長率、斷裂強度等機械物性。尤其最近伴隨著TFT(thin-film transistor,薄膜電晶體)之裝置類型成為LTPS(Low Temperature Poly-silicon,低溫多晶矽)(低溫多晶矽TFT),而期望一種即使於超過先前之熱歷程中亦發揮上述物性之膜。 然而,公知之透明聚醯亞胺之物性特性於用作顯示器用之耐熱性無色透明基板之方面而言並不充分。 進而,經本發明者確認,可知專利文獻1中記載之聚醯亞胺樹脂雖顯示出較低之線熱膨脹係數,但存在剝離後之聚醯亞胺樹脂膜之黃色度(YI值)較大,另外殘留應力較高,伸長率較低,斷裂強度較低之課題。 關於黃色度,可知專利文獻2中記載之聚醯亞胺膜於300℃左右之溫度區域中顯示出較低之黃色度,但於400℃以上之高溫區域中,黃色度(YI值)顯著劣化。 又,作為降低了線膨脹係數之聚醯亞胺,揭示有包含4,4'-二胺基二苯醚與4,4'-二胺基二苯酯之聚醯亞胺(專利文獻3)。 然而,經本發明者確認,專利文獻3中記載之聚醯亞胺樹脂為了用作軟性基板而膜非常脆,且高溫下之黃色度存在改善之餘地。 本發明係鑒於上述說明之問題點而完成者。因此,本發明之目的在於提供一種殘留應力較低、翹曲較少、黃色度(YI值)較小、伸長率較高之聚醯亞胺樹脂膜及其製造方法。 [解決問題之技術手段] 本發明為如下內容。 [1] 一種聚醯亞胺前驅體,其特徵在於其係(a1)聚醯亞胺前驅體,其以1/99≦(結構單元L之莫耳數/結構單元M之莫耳數)≦99/1含有: 下述通式(1)所表示之結構單元L: [化1]{式中,X1 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數};及 下述通式(2)所表示之結構單元M: [化2]{式中,X2 表示碳數4~32之四價之基;Y為選自由下述通式(3)、(4)及(5)所組成之群中之至少一種}, [化3][化4][化5]{式中,R4 ~R11 分別獨立表示碳數1~20之一價之有機基;d~k為0~4之整數}。 [2] 如[1]之聚醯亞胺前驅體,其中上述通式(1)中之n為0。 [3] 如[1]或[2]之聚醯亞胺前驅體,其中上述通式(2)之Y為通式(3)。 [4] 如[1]或[2]之聚醯亞胺前驅體,其中上述通式(2)之Y為通式(4)。 [5] 如[1]或[2]之聚醯亞胺前驅體,其中上述通式(2)之Y為通式(5)。 [6] 一種聚醯亞胺前驅體,其特徵在於其係(a2)聚醯亞胺前驅體,其含有下述通式(10)所表示之結構單元: [化6]並且,重量平均分子量為30,000以上且300,000以下, {式中,X3 表示源自選自由4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種的四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。 [7] 如[6]之聚醯亞胺前驅體,其中上述(a2)聚醯亞胺前驅體中之重量平均分子量未達1,000之分子之含量未達5質量%。 [8] 如[6]或[7]之聚醯亞胺前驅體,其中通式(10)中之n為0。 [9] 如[1]至[5]中任一項之聚醯亞胺前驅體,其中上述X1 X2 為源自選自由均苯四甲酸二酐(PMDA)、4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種的四價之有機基。 [10] 一種樹脂組合物,其特徵在於其含有如[1]至[9]中任一項之聚醯亞胺前驅體及(b)有機溶劑。 [11] 如[10]之樹脂組合物,其進而含有選自由(c)界面活性劑及(d)烷氧基矽烷化合物所組成之群中之至少一種。 [12] 一種聚醯亞胺,其特徵在於其含有下述通式(11)所表示之結構單元: [化7]{式中,X1 、X2 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數;Y為選自由下述通式(3)、(4)及(5)所組成之群中之至少一種;l、m分別獨立表示1以上之整數,滿足0.01≦l/(l+m)≦0.99}, [化8][化9][化10]{式中,R4 ~R11 分別獨立表示碳數1~20之一價之有機基;d~k為0~4之整數}。 [13] 一種聚醯亞胺,其特徵在於其含有下述通式(12)所表示之結構單元: [化11]{式中,X3 表示源自選自由4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種的四價之基;R1 ,R2 ,R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數},且伸長率為15%以上。 [14] 一種樹脂膜之製造方法,其特徵在於其包含下述步驟: 藉由於支持體之表面上塗佈如[10]或[11]之樹脂組合物而形成塗膜的步驟; 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟;及 將上述聚醯亞胺樹脂膜自上述支持體剝離的步驟。 [15] 如[14]之樹脂膜之製造方法,其中於將上述聚醯亞胺樹脂膜自上述支持體剝離的步驟之前,進行自上述支持體側照射雷射之步驟。 [16] 一種積層體之製造方法,其特徵在於其包含下述步驟: 藉由於支持體之表面上塗佈如[10]或[11]之樹脂組合物而形成塗膜的步驟;及 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟。 [17] 一種顯示器基板之製造方法,其特徵在於其包含下述步驟: 藉由於支持體之表面上塗佈如[10]或[11]之樹脂組合物而形成塗膜的步驟; 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟; 於上述聚醯亞胺樹脂膜上形成元件或電路的步驟;及 將上述形成有元件或電路之聚醯亞胺樹脂膜自上述支持體剝離的步驟。 [18] 一種顯示器用聚醯亞胺膜,其特徵在於其含有下述通式(12)所表示之聚醯亞胺: [化12]{式中,X3 為選自由4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種,R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。 [19] 一種積層體,其特徵在於其包含聚醯亞胺膜層及低溫多晶矽TFT層,上述聚醯亞胺膜層含有下述通式(13)所表示之聚醯亞胺: [化13]{式中,X1 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。 [20] 一種聚醯亞胺膜,其特徵在於其於400℃以上加熱後之膜厚10微米之黃色度為20以下,膜厚1微米時之308 nm之吸光度為0.6以上且2.0以下,並且伸長率為15%以上。 [21] 一種樹脂組合物,其特徵在於其含有: (a)下述通式(1)所表示之聚醯亞胺前驅體、 (b)有機溶劑、及 選自由(c)界面活性劑及(d)烷氧基矽烷化合物所組成之群中之至少一種, [化14]{式中,X1 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。 [發明之效果] 由本發明之聚醯亞胺前驅體及樹脂組合物而獲得之聚醯亞胺膜之殘留應力較低,翹曲較少,黃色度(YI值)較小,伸長率較高。[Problems to be Solved by the Invention] However, in order to use a polyimide resin as a colorless transparent flexible substrate, mechanical properties such as excellent elongation and breaking strength are required in addition to transparency. In particular, recently, a device type of TFT (thin-film transistor) has become LTPS (Low Temperature Poly-silicon) (low-temperature polysilicon), and it is desired to exhibit the above even if it exceeds the previous thermal history. Physical film. However, the physical properties of the known transparent polyimides are not sufficient for use as a heat-resistant colorless transparent substrate for displays. Furthermore, the inventors of the present invention have confirmed that the polyimine resin described in Patent Document 1 exhibits a low coefficient of thermal expansion, but the yellowness (YI value) of the polyimide film after peeling is large. In addition, the residual stress is high, the elongation is low, and the fracture strength is low. Regarding the yellowness, it is understood that the polyimide film described in Patent Document 2 exhibits a low yellowness in a temperature region of about 300 ° C, but the yellowness (YI value) is significantly deteriorated in a high temperature region of 400 ° C or higher. . Further, as a polyimine having a reduced linear expansion coefficient, a polyimine containing 4,4'-diaminodiphenyl ether and 4,4'-diaminodiphenyl ester is disclosed (Patent Document 3) . However, the inventors of the present invention confirmed that the polyimide resin described in Patent Document 3 is very brittle in use as a flexible substrate, and there is room for improvement in yellowness at a high temperature. The present invention has been accomplished in view of the above-described problems. Accordingly, an object of the present invention is to provide a polyimide film having a low residual stress, less warpage, a small yellowness (YI value), and a high elongation, and a method for producing the same. [Technical means for solving the problem] The present invention is as follows. [1] A polyimine precursor, characterized in that it is a (a1) polyimine precursor, which is 1/99 ≦ (the number of moles of structural unit L / the number of moles of structural unit M) ≦ 99/1 contains: a structural unit represented by the following general formula (1): [Chemical Formula 1] Wherein X 1 represents a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; b and c are integers of 0 to 4}; and structural unit M represented by the following general formula (2): [Chemical 2] In the formula, X 2 represents a tetravalent group having a carbon number of 4 to 32; and Y is at least one selected from the group consisting of the following general formulae (3), (4), and (5)}, [Chemical 3 ] [Chemical 4] [Chemical 5] In the formula, R 4 to R 11 each independently represent an organic group having a carbon number of 1 to 20; and d to k are an integer of 0 to 4}. [2] The polyimine precursor according to [1], wherein n in the above formula (1) is 0. [3] The polyimine precursor of [1] or [2], wherein Y of the above formula (2) is the formula (3). [4] The polyimine precursor of [1] or [2], wherein Y of the above formula (2) is the formula (4). [5] The polyimine precursor of [1] or [2], wherein Y of the above formula (2) is the formula (5). [6] A polyimine precursor, characterized in that it is a (a2) polyimine precursor comprising a structural unit represented by the following formula (10): [Chem. 6] Further, the weight average molecular weight is 30,000 or more and 300,000 or less, wherein X 3 represents a source derived from 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA). And a tetravalent group of at least one of the group consisting of 4,4'-biphenyl bis(trimellitic acid monoester anhydride) (TAHQ); R 1 , R 2 and R 3 each independently represent a carbon number of 1 to 20 an organic group of one valence; n represents 0 or 1; and a, b and c are integers of 0 to 4}. [7] The polyimine precursor according to [6], wherein the content of the molecule having a weight average molecular weight of less than 1,000 in the (a2) polyamidene precursor is less than 5% by mass. [8] The polyimine precursor of [6] or [7], wherein n in the formula (10) is 0. [9] The polyimine precursor according to any one of [1] to [5] wherein the above X 1 , X 2 are derived from pyromellitic dianhydride (PMDA), 4, 4'- At least one of a group consisting of oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA), and 4,4'-biphenyl bis(trimellitic acid monoester anhydride) (TAHQ) A tetravalent organic group. [10] A resin composition comprising the polyimine precursor of any one of [1] to [9] and (b) an organic solvent. [11] The resin composition according to [10], which further contains at least one selected from the group consisting of (c) a surfactant and (d) an alkoxydecane compound. [12] A polyimine which is characterized by containing a structural unit represented by the following formula (11): [Chem. 7] Wherein X 1 and X 2 represent a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; And a, b and c are integers of 0 to 4; Y is at least one selected from the group consisting of the following general formulae (3), (4) and (5); and l and m each independently represent 1 or more. Integer, satisfying 0.01≦l/(l+m)≦0.99}, [Chem. 8] [Chemistry 9] [化10] In the formula, R 4 to R 11 each independently represent an organic group having a carbon number of 1 to 20; and d to k are an integer of 0 to 4}. [13] A polyimine which is characterized by containing a structural unit represented by the following formula (12): [Chem. 11] Wherein X 3 represents a source derived from 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA), and 4,4'-biphenyl bis(phenylene) a tetravalent group of at least one of the group consisting of tricarboxylic acid monoester anhydride) (TAHQ); R 1 , R 2 , and R 3 each independently represent an organic group having one carbon number of 1 to 20; n represents 0 or 1; and a, b, and c are integers of 0 to 4}, and the elongation is 15% or more. [14] A method for producing a resin film, comprising the steps of: forming a coating film by coating a resin composition such as [10] or [11] on a surface of a support; a step of heating the above-mentioned support and the coating film to imidize the polyamidene precursor contained in the coating film to form a polyimide film; and the above-mentioned polyimide film from the above The step of support stripping. [15] The method for producing a resin film according to [14], wherein the step of irradiating the laser from the support side is performed before the step of peeling the polyimine resin film from the support. [16] A method for producing a laminate, comprising the steps of: forming a coating film by coating a resin composition such as [10] or [11] on a surface of a support; The step of heating the above-mentioned support and the above-mentioned coating film to imidize the polyimine precursor precursor contained in the coating film to form a polyimide film. [17] A method of manufacturing a display substrate, comprising the steps of: forming a coating film by coating a resin composition such as [10] or [11] on a surface of a support; a step of heating the above-mentioned support and the coating film to imidize the polyamidene precursor contained in the coating film to form a polyimide film; forming a component on the polyimide film Or a step of a circuit; and a step of peeling the polyimine resin film on which the element or the circuit is formed from the support. [18] A polyimide film for display, which comprises a polyimine represented by the following formula (12): [Chem. 12] Wherein X 3 is selected from the group consisting of 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA), and 4,4'-biphenyl bis(trimellitic acid). At least one of the group consisting of monoester anhydrides (TAHQ), R 1 , R 2 , and R 3 each independently represent an organic group having one carbon number of 1 to 20; n represents 0 or 1; and a, b and c is an integer from 0 to 4. [19] A laminate comprising a polyimide film layer and a low temperature polysilicon TFT layer, wherein the polyimide film layer comprises a polyimine represented by the following formula (13): ] Wherein X 1 represents a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; b and c are integers from 0 to 4}. [20] A polyimide film having a film thickness of 10 μm and a yellowness of 20 or less after heating at 400 ° C or higher, and an absorbance at 308 nm of a film thickness of 1 μm of 0.6 or more and 2.0 or less, and The elongation is 15% or more. [21] A resin composition comprising: (a) a polyimine precursor represented by the following formula (1), (b) an organic solvent, and a surfactant selected from the group consisting of (c) a surfactant and (d) at least one of the group consisting of alkoxydecane compounds, [Chem. 14] Wherein X 1 represents a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; b and c are integers from 0 to 4}. [Effects of the Invention] The polyimine film obtained from the polyimine precursor of the present invention and the resin composition have low residual stress, less warpage, less yellowness (YI value), and high elongation. .

以下,對本發明例示之實施形態(以下簡稱為「實施形態」)進行詳細說明。再者,本發明並不受以下實施形態之限定,可於其主旨範圍內進行各種變化而實施。又,本發明中記載之特性值只要無特別說明,則是指藉由[實施例]之項目中記載之方法或業者理解為與其相同之方法而測定之值。 <樹脂組合物> 本發明之一個態樣所提供之樹脂組合物含有(a)聚醯亞胺前驅體及(b)有機溶劑。 以下,依序說明各成分。 [聚醯亞胺前驅體] 作為本實施之第一態樣之聚醯亞胺前驅體係具有如下特徵之聚醯亞胺前驅體:其係(a1)聚醯亞胺前驅體,其以1/99≦(結構單元L之莫耳數/結構單元M之莫耳數)≦99/1含有: 下述通式(1)所表示之結構單元L: [化15]{式中,X1 表示碳數4~32之四價之基。R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基。n表示0或1。並且a、b及c為0~4之整數};及 下述通式(2)所表示之結構單元M: [化16]{式中,X2 表示碳數4~32之四價之基。Y為選自由下述通式(3)、(4)及(5)所組成之群中之至少一種}。 [化17][化18][化19]{式中,R4 ~R11 分別獨立表示碳數1~20之一價之有機基。d~k為0~4之整數} 本實施之第一態樣之聚醯亞胺前驅體係於製成聚醯亞胺膜時殘留應力較低,翹曲較少,黃色度(YI值)較小,伸長率較高。又,本實施之第一態樣之聚醯亞胺前驅體係於製成聚醯亞胺膜時,於高溫區域中之黃色度(YI值)較小。 此處,R1 ~R3 只要分別獨立為碳數1~20之一價之有機基,則並無限定。作為此種有機基,可列舉:甲基、乙基、丙基等烷基,三氟甲基等含鹵素基,甲氧基、乙氧基等烷氧基等。其中,就高溫區域中之YI之觀點而言,較佳為甲基。 此處,a、b、c、d只要為0~4之整數,則並無限定。其中,就YI、殘留應力之觀點而言,較佳為0~2之整數,就高溫區域中之YI之觀點而言,尤佳為0。 此處,n為0或1。其中,就高溫區域中之YI之觀點而言,較佳為0。 又,結構單元L與結構單元M之莫耳比(結構單元L之莫耳數/結構單元M之莫耳數)之下限可為5/95,亦可為10/90,亦可為20/80,亦可為30/70,亦可為40/60。結構單元L與結構單元M之莫耳比(結構單元L之莫耳數/結構單元M之莫耳數)之上限可為95/5,亦可為90/10,亦可為80/20,亦可為70/30,亦可為60/40。 X1 、X2 分別獨立為碳數4~32之四價之基,可相同亦可不同。可例示源自下述四羧酸二酐之四價之有機基。 作為上述四羧酸二酐,具體而言可例示選自碳數為8~36之芳香族四羧酸二酐、碳數為6~36之脂肪族四羧酸二酐及碳數為6~36之脂環式四羧酸二酐中之化合物。其中,就高溫區域中之黃色度之觀點而言,較佳為碳數為8~36之芳香族四羧酸二酐。此處之碳數中亦包含羧基中所含之碳數。 進一步具體而言,作為碳數為8~36之芳香族四羧酸二酐,例如可例示:4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(以下亦記為6FDA)、5-(2,5-二側氧四氫-3-呋喃基)-3-甲基-環己烯-1,2-二羧酸酐、均苯四甲酸二酐(以下亦記為PMDA)、1,2,3,4-苯四羧酸二酐、3,3',4,4'-二苯甲酮四羧酸二酐、2,2',3,3'-二苯甲酮四羧酸二酐、3,3',4,4'-聯苯四羧酸二酐(以下亦記為BPDA)、3,3',4,4'-二苯基碸四羧酸二酐、2,2',3,3'-聯苯四羧酸二酐、亞甲基-4,4'-二鄰苯二甲酸二酐、1,1-亞乙基-4,4'-二鄰苯二甲酸二酐、2,2-亞丙基-4,4'-二鄰苯二甲酸二酐、1,2-伸乙基-4,4'-二鄰苯二甲酸二酐、1,3-三亞甲基-4,4'-二鄰苯二甲酸二酐、1,4-四亞甲基-4,4'-二鄰苯二甲酸二酐、1,5-五亞甲基-4,4'-二鄰苯二甲酸二酐、4,4'-氧二鄰苯二甲酸二酐(以下亦記為ODPA)、對伸苯基雙(偏苯三甲酸酐)(以下亦記為TAHQ)、硫代-4,4'-二鄰苯二甲酸二酐、磺醯基-4,4'-二鄰苯二甲酸二酐、1,3-雙(3,4-二羧基苯基)苯二酐、1,3-雙(3,4-二羧基苯氧基)苯二酐、1,4-雙(3,4-二羧基苯氧基)苯二酐、1,3-雙[2-(3,4-二羧基苯基)-2-丙基]苯二酐、1,4-雙[2-(3,4-二羧基苯基)-2-丙基]苯二酐、雙[3-(3,4-二羧基苯氧基)苯基]甲烷二酐、雙[4-(3,4-二羧基苯氧基)苯基]甲烷二酐、2,2-雙[3-(3,4-二羧基苯氧基)苯基]丙烷二酐、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酐、雙(3,4-二羧基苯氧基)二甲基矽烷二酐、1,3-雙(3,4-二羧基苯基)-1,1,3,3-四甲基二矽氧烷二酐、2,3,6,7-萘四羧酸二酐、1,4,5,8-萘四羧酸二酐、1,2,5,6-萘四羧酸二酐、3,4,9,10-苝四羧酸二酐、2,3,6,7-蒽四羧酸二酐、1,2,7,8-菲四羧酸二酐等。 作為碳數為6~50之脂肪族四羧酸二酐,例如可列舉:伸乙基四羧酸二酐、1,2,3,4-丁烷四羧酸二酐等; 作為碳數為6~36之脂環式四羧酸二酐,例如可列舉:1,2,3,4-環丁烷四羧酸二酐、環戊烷四羧酸二酐、環己烷-1,2,3,4-四羧酸二酐、環己烷-1,2,4,5-四羧酸二酐(以下記為CHDA)、3,3',4,4'-聯環己基四羧酸二酐、羰基-4,4'-雙(環己烷-1,2-二羧酸)二酐、亞甲基-4,4'-雙(環己烷-1,2-二羧酸)二酐、1,2-伸乙基-4,4'-雙(環己烷-1,2-二羧酸)二酐、1,1-亞乙基-4,4'-雙(環己烷-1,2-二羧酸)二酐、2,2-亞丙基-4,4'-雙(環己烷-1,2-二羧酸)二酐、氧基-4,4'-雙(環己烷-1,2-二羧酸)二酐、硫代-4,4'-雙(環己烷-1,2-二羧酸)二酐、磺醯基-4,4'-雙(環己烷-1,2-二羧酸)二酐、雙環[2,2,2]辛-7-烯-2,3,5,6-四羧酸二酐、rel-[1S,5R,6R]-3-氧雜雙環[3,2,1]辛烷-2,4-二酮-6-螺-3'-(四氫呋喃-2',5'-二酮)、4-(2,5-二側氧四氫呋喃-3-基)-1,2,3,4-四氫萘-1,2-二羧酸酐、乙二醇-雙-(3,4-二羧酸酐苯基)醚等。 就CTE(Coefficient of thermal expansion,熱膨脹係數)、耐化學品性、Tg(Glass Transition Temperature,玻璃轉移溫度)與高溫區域中之黃色度之平衡的觀點而言,較佳為PMDA、BPDA、TAHQ、ODPA,更佳為BPDA、TAHQ。 實施態樣之聚醯亞胺前驅體亦可於不損及其性能之範圍內,藉由除了上述四羧酸二酐外使用二羧酸而製成聚醯胺醯亞胺前驅體。藉由使用此種前驅體,可對所得之膜進行機械伸長率之提昇、玻璃轉移溫度之提昇、黃色度之降低等各種性能之調整。作為此種二羧酸,可列舉具有芳香環之二羧酸及脂環式二羧酸。尤佳為選自由碳數為8~36之芳香族二羧酸及碳數為6~34之脂環式二羧酸所組成之群中的至少一種化合物。此處之碳數中亦包含羧基中所含之碳數。 該等之中,較佳為具有芳香環之二羧酸。 具體而言,例如可列舉:間苯二甲酸、對苯二甲酸、4,4'-聯苯二羧酸、3,4'-聯苯二羧酸、3,3'-聯苯二羧酸、1,4-萘二羧酸、2,3-萘二羧酸、1,5-萘二羧酸、2,6-萘二羧酸、4,4'-磺醯基雙苯甲酸、3,4'-磺醯基雙苯甲酸、3,3'-磺醯基雙苯甲酸、4,4'-氧基雙苯甲酸、3,4'-氧基雙苯甲酸、3,3'-氧基雙苯甲酸、2,2-雙(4-羧基苯基)丙烷、2,2-雙(3-羧基苯基)丙烷、2,2'-二甲基-4,4'-聯苯二羧酸、3,3'-二甲基-4,4'-聯苯二羧酸、2,2'-二甲基-3,3'-聯苯二羧酸、9,9-雙(4-(4-羧基苯氧基)苯基)茀、9,9-雙(4-(3-羧基苯氧基)苯基)茀、4,4'-雙(4-羧基苯氧基)聯苯、4,4'-雙(3-羧基苯氧基)聯苯、3,4'-雙(4-羧基苯氧基)聯苯、3,4'-雙(3-羧基苯氧基)聯苯、3,3'-雙(4-羧基苯氧基)聯苯、3,3'-雙(3-羧基苯氧基)聯苯、4,4'-雙(4-羧基苯氧基)-對聯三苯、4,4'-雙(4-羧基苯氧基)-間聯三苯、3,4'-雙(4-羧基苯氧基)-對聯三苯、3,3'-雙(4-羧基苯氧基)-對聯三苯、3,4'-雙(4-羧基苯氧基)-間聯三苯、3,3'-雙(4-羧基苯氧基)-間聯三苯、4,4'-雙(3-羧基苯氧基)-對聯三苯、4,4'-雙(3-羧基苯氧基)-間聯三苯、3,4'-雙(3-羧基苯氧基)-對聯三苯、3,3'-雙(3-羧基苯氧基)-對聯三苯、3,4'-雙(3-羧基苯氧基)-間聯三苯、3,3'-雙(3-羧基苯氧基)-間聯三苯、1,1-環丁烷二羧酸、1,4-環己烷二羧酸、1,2-環己烷二羧酸、4,4'-二苯甲酮二羧酸、1,3-伸苯基二乙酸、1,4-伸苯基二乙酸等;及 國際公開第2005/068535號小冊子中記載之5-胺基間苯二甲酸衍生物等。於使該等二羧酸實際共聚合成聚合物之情形時,亦可以由亞硫醯氯等衍生之醯氯體、活性酯體等形式使用。 本實施形態之聚醯亞胺前驅體之重量平均分子量(Mw)較佳為10,000~300,000,尤佳為30,000~200,000。若重量平均分子量大於10,000,則伸長率、斷裂強度等機械特性優異,殘留應力較低,YI變低。若重量平均分子量小於300,000,則於聚醯胺酸之合成時容易控制重量平均分子量,可獲得適度黏度之樹脂組合物,樹脂組合物之塗佈性變得良好。本發明中,重量平均分子量係使用凝膠滲透層析法(以下亦稱為GPC)以標準聚苯乙烯換算值之形式求得之值。 本實施形態之聚醯亞胺前驅體中,分子量未達1,000之分子之含量相對於聚醯亞胺前驅體之總量而較佳為未達5質量%,更佳為未達1質量%。就由使用此種聚醯亞胺前驅體而獲得之樹脂組合物所形成之聚醯亞胺膜之殘留應力變低,形成於該聚醯亞胺膜上之無機膜之霧度(Haze)變低的觀點而言較佳。 相對於聚醯亞胺前驅體之總量的分子量未達1,000之分子之含量可由使用溶解有該聚醯亞胺前驅體之溶液進行GPC測定而獲得之波峰面積算出。 作為用於本實施形態之通式(1)所表示之結構單元之二胺,可例示下述通式(6)所表示之二胺。 [化20](式中,R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基。n表示0或1。並且a、b及c為0~4之整數) 作為R1 、R2 ,可列舉:甲基、乙基、丙基等烷基,三氟甲基等含鹵素基,甲氧基、乙氧基等烷氧基等。其中,就高溫區域中之YI之觀點而言,較佳為甲基。 此處,a、b只要為0~4之整數,則並無限定。其中,就YI、殘留應力之觀點而言,較佳為0~2之整數,就高溫區域中之YI之觀點而言,尤佳為0。 更具體而言,於n為0之情形時,可例示:4-胺基苯基-4-胺基苯甲酸酯(APAB)、2-甲基-4-胺基苯基-4-胺基苯甲酸酯(ATAB)、4-胺基苯基-3-胺基苯甲酸酯(4,3-APAB)等。 於n為1之情形時,可例示[4-(4-胺基苯甲醯基)氧基苯基]4-胺基苯甲酸酯等。 作為用於本實施形態之通式(3)所表示之結構單元之二胺,可例示下述通式(7)所表示之二胺。 [化21](式中,R4 、R5 分別獨立表示碳數1~20之一價之有機基。d、e為0~4之整數) 此處,R4 、R5 只要分別獨立為碳數1~20之一價之有機基,則並無限定。作為此種有機基,可列舉:甲基、乙基、丙基等烷基,三氟甲基等含鹵素基,甲氧基、乙氧基等烷氧基等。其中,就高溫區域中之YI之觀點而言,較佳為甲基。 此處,c、d只要為0~4之整數,則並無限定。其中,就YI、殘留應力之觀點而言,較佳為0~2之整數,就高溫區域中之YI之觀點而言,尤佳為0。 更具體而言可例示4,4'-二胺基二苯基碸、3,3'-二胺基二苯基碸。 作為用於本實施形態之通式(4)所表示之結構單元之二胺,可例示下述通式(8)所表示之二胺。 [化22]此處,R6 及R7 只要分別獨立為碳數1~20之一價之有機基,則並無限定。作為此種有機基,可列舉:甲基、乙基、丙基等烷基;三氟甲基等含鹵素基;甲氧基、乙氧基等烷氧基等。其中,就高溫區域中之YI之觀點而言,較佳為甲基。 R8 與R9 只要分別獨立為碳數1~20之一價之有機基、羥基或鹵素原子,則並無限定。作為上述有機基,例如可列舉:甲基、乙基、丙基等烷基;三氟甲基等含鹵素基;甲氧基、乙氧基等烷氧基等。作為鹵素原子,例如可列舉:氟原子、氯原子、溴原子、碘原子等。 f、g、h及i只要分別獨立為0~4之整數,則並無限定。其中,就YI、殘留應力之觀點而言,較佳為0~2之整數,就高溫區域中之YI之觀點而言,尤佳為0。 Z可例示單鍵、亞甲基、伸乙基、醚、酮等。其中,就高溫區域中之YI之觀點而言,更佳為單鍵。 更具體而言可例示:9,9-雙(胺基苯基)茀、9,9-雙(4-胺基-3-甲基苯基)茀、9,9-雙(4-胺基-3-氟苯基)茀、9,9-雙(4-羥基-3-胺基苯基)茀、9,9-雙[4-(4-胺基苯氧基)苯基]茀等,較佳為使用選自該等中之一種以上。 作為用於本實施形態之通式(5)所表示之結構單元之二胺,可例示下述通式(9)所表示之二胺。 [化23]此處,R10 及R11 只要分別獨立為碳數1~20之一價之有機基,則並無限定。作為此種有機基,例如可列舉:甲基、乙基、丙基等烷基;三氟甲基等含鹵素基;甲氧基、乙氧基等烷氧基等。其中,就高溫區域中之YI之觀點而言,較佳為甲基。 又,j、k只要分別獨立為0~4之整數,則並無限定。其中,就YI、殘留應力之觀點而言,較佳為0~2之整數,就高溫區域中之YI之觀點而言,尤佳為0。 更具體而言可例示2,2'-雙(三氟甲基)聯苯胺等。 由本實施之第一態樣之聚醯亞胺前驅體形成之聚醯亞胺膜之殘留應力較低,翹曲較少,高溫區域中之黃色度(YI值)較小,伸長率較高。 作為本實施之第二態樣,可提供如下之聚醯亞胺前驅體:其係(a2)聚醯亞胺前驅體,其含有下述通式(10)所表示之結構單元: [化24]並且,重量平均分子量為30,000以上且300,000以下。 {式中,X3 表示源自選自4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)中之至少一種的四價之基。R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基。n表示0或1。並且a、b及c為0~4之整數} 此處,X3 只要為源自選自ODPA、BPDA、TAHQ中之至少一種的四價之有機基,則並無限定,就CTE及Tg之觀點而言,較佳為BPDA、TAHQ。 此處,R1 ~R3 只要分別獨立為碳數1~20之一價之有機基,則並無限定。作為此種有機基,可列舉:甲基、乙基、丙基等烷基,三氟甲基等含鹵素基,甲氧基、乙氧基等烷氧基等。其中,就高溫區域中之YI之觀點而言,較佳為甲基。 此處,a、b、c、d只要為0~4之整數,則並無限定。其中,就YI、殘留應力之觀點而言,較佳為0~2之整數,就高溫區域中之YI之觀點而言,尤佳為0。 此處,n為0或1。其中,就高溫區域中之YI之觀點而言,較佳為0。 作為用於上述通式(10)所表示之結構之二胺,可使用上述通式(6)所使用之二胺。 第二態樣之聚醯亞胺前驅體之重量平均分子量(Mw)為30,000~300,000。若重量平均分子量大於30,000,則伸長率、斷裂強度等機械特性優異,殘留應力較低,YI變低。若重量平均分子量小於300,000,則於聚醯胺酸之合成時容易控制重量平均分子量,可獲得適度黏度之樹脂組合物,樹脂組合物之塗佈性變得良好。其中,重量平均分子量(Mw)更佳為35000以上且250000以下,尤佳為40000以上且230000以下。 本實施之第二態樣之聚醯亞胺前驅體中,分子量未達1,000之分子之含量相對於聚醯亞胺前驅體之總量,較佳為未達5質量%,更佳為未達1質量%。就由使用此種聚醯亞胺前驅體而獲得之樹脂組合物所形成之聚醯亞胺膜之殘留應力變低,形成於該聚醯亞胺膜上之無機膜之霧度變低的觀點而言較佳。 相對於聚醯亞胺前驅體之總量之分子量未達1,000之分子之含量可由使用溶解有該聚醯亞胺前驅體之溶液進行GPC測定而獲得之波峰面積算出。 本實施之第二態樣之聚醯亞胺前驅體之保存穩定性優異,塗佈性優異。又,由本實施之第二態樣之聚醯亞胺前驅體所形成之聚醯亞胺膜之殘留應力較低,翹曲少,黃色度(YI值)小,伸長率較高,斷裂強度較高。 於第一態樣及第二態樣之聚醯亞胺前驅體中,可於不損及伸長率、強度、應力及黃色度等之範圍內,使用除了上述通式(6)~(9)所表示之二胺外之其他二胺。 作為其他二胺,例如可列舉:對苯二胺、間苯二胺、4,4'-二胺基二苯硫醚、3,4'-二胺基二苯硫醚、3,3'-二胺基二苯硫醚、4,4'-二胺基聯苯、3,4'-二胺基聯苯、3,3'-二胺基聯苯、4,4'-二胺基二苯甲酮、3,4'-二胺基二苯甲酮、3,3'-二胺基二苯甲酮、4,4'-二胺基二苯基甲烷、3,4'-二胺基二苯基甲烷、3,3'-二胺基二苯基甲烷、1,4-雙(4-胺基苯氧基)苯、1,3-雙(4-胺基苯氧基)苯、1,3-雙(3-胺基苯氧基)苯、雙[4-(4-胺基苯氧基)苯基]碸、4,4-雙(4-胺基苯氧基)聯苯、4,4-雙(3-胺基苯氧基)聯苯、雙[4-(4-胺基苯氧基)苯基]醚、雙[4-(3-胺基苯氧基)苯基]醚、1,4-雙(4-胺基苯基)苯、1,3-雙(4-胺基苯基)苯、9,10-雙(4-胺基苯基)蒽、2,2-雙(4-胺基苯基)丙烷、2,2-雙(4-胺基苯基)六氟丙烷、2,2-雙[4-(4-胺基苯氧基)苯基)丙烷、2,2-雙[4-(4-胺基苯氧基)苯基)六氟丙烷、1,4-雙(3-胺基丙基二甲基矽烷基)苯等,較佳為使用選自該等中之一種以上。 所有二胺中之上述其他二胺之含量較佳為20莫耳%以下,尤佳為10莫耳%以下。 [聚醯亞胺前驅體之製造] 本發明之聚醯亞胺前驅體(聚醯胺酸)可藉由使四羧酸二酐、用於上述通式(1)所表示之結構單元之二胺(例如APAB)、用於上述通式(2)所表示之結構單元之二胺(例如4,4'-DAS)進行縮聚反應而合成。該反應較佳為於適當之溶劑中進行。具體而言,例如可列舉:於溶劑中溶解特定量之APAB及4,4'-DAS後,於所得之二胺溶液中添加特定量之四羧酸二酐,加以攪拌的方法。 二胺成分中,用於通式(1)所表示之結構單元之二胺與用於通式(2)所表示之結構單元之二胺的莫耳比只要為99/1~1/99即可,則並無限定。二胺成分中,若用於通式(2)所表示之結構單元之二胺為1莫耳%以上,則存在黃色度良好之傾向,若用於通式(1)所表示之結構單元之二胺為1莫耳%以上,則存在於所得之聚醯亞胺膜上形成無機膜後之翹曲良好之傾向。用於通式(1)所表示之結構單元之二胺與用於通式(2)所表示之結構單元之二胺的莫耳比較佳為95/5~50/50,更佳為90/10~50/50。用於通式(1)所表示之結構單元之二胺與用於通式(2)所表示之結構單元之二胺的莫耳比亦可為80/20~50/50,亦可為70/30~50/50。較佳為將用於通式(1)所表示之結構單元之二胺之莫耳比設為與用於通式(2)所表示之結構單元之二胺之莫耳比以上。 又,本實施之第二態樣之聚醯亞胺前驅體可藉由使四羧酸二酐(例如TAHQ)與用於上述通式(6)所表示之結構單元之二胺(例如APAB)進行縮聚反應而合成。該反應較佳為於適當之溶劑中進行。具體而言,例如可列舉:於溶劑中溶解特定量之APAB後,於所得之二胺溶液中添加特定量之TAHQ,加以攪拌的方法。 關於合成上述聚醯亞胺前驅體時之四羧酸二酐成分與二胺成分之比(莫耳比),就將所得樹脂膜之熱線膨脹率、殘留應力、伸長率及黃色度(以下亦稱為YI)控制於所期望之範圍內之觀點而言,較佳為設為四羧酸二酐:二胺=100:90~100:110(相對於四羧酸二酐1莫耳份,二胺為0.90~1.10莫耳份)之範圍,更佳為設為100:95~100:105(相對於酸二酐1莫耳份,二胺為0.95~1.05莫耳份)之範圍。 於本實施態樣中,於合成作為較佳聚醯亞胺前驅體之聚醯胺酸時,可藉由調整四羧酸二酐成分與二胺成分之比及添加封端劑而控制分子量。酸二酐成分與二胺成分之比越接近1:1,及封端劑之使用量越少,可使聚醯胺酸之分子量變得越大。 作為四羧酸二酐成分及二胺成分,推薦使用高純度品。作為該純度,較佳為分別設為98質量%以上,更佳為設為99質量%以上,進而較佳為設為99.5質量%以上。於併用複數種酸二酐成分或二胺成分之情形時,只要酸二酐成分或二胺成分總體具有上述純度即可,但較佳為所使用之所有種類之酸二酐成分及二胺成分分別具有上述純度。 作為反應之溶劑,只要為可溶解四羧酸二酐成分及二胺成分以及所生成之聚醯胺酸且可獲得高分子量之聚合物的溶劑,則並無特別限制。作為此種溶劑之具體例,例如可列舉非質子性溶劑、酚系溶劑、醚及醇系溶劑等。作為該等之具體例, 作為上述非質子性溶劑,例如可列舉:N,N-二甲基甲醯胺(DMF)、N,N-二甲基乙醯胺(DMAc)、N-甲基-2-吡咯啶酮(NMP)、N-甲基己內醯胺、1,3-二甲基咪唑啶酮、四甲基脲、下述通式(13): [化25]式中R12 =甲基所表示之Equamide M100(商品名:出光興產公司製造)及R12 =正丁基所表示之Equamide B100(商品名:出光興產公司製造)等醯胺系溶劑; γ-丁內酯、γ-戊內酯等內酯系溶劑; 六甲基磷醯胺、六甲基磷醯三胺等含磷系醯胺系溶劑; 二甲基碸、二甲基亞碸、環丁碸等含硫系溶劑; 環己酮、甲基環己酮等酮系溶劑; 甲基吡啶、吡啶等三級胺系溶劑; 乙酸(2-甲氧基-1-甲基乙基)酯等酯系溶劑等; 作為上述酚系溶劑,例如可列舉:苯酚、鄰甲酚、間甲酚、對甲酚、2,3-二甲苯酚、2,4-二甲苯酚、2,5-二甲苯酚、2,6-二甲苯酚、3,4-二甲苯酚、3,5-二甲苯酚等; 作為上述醚及醇系溶劑,例如可列舉:1,2-二甲氧基乙烷、雙(2-甲氧基乙基)醚、1,2-雙(2-甲氧基乙氧基)乙烷、雙[2-(2-甲氧基乙氧基)乙基]醚、四氫呋喃、1,4-二烷等。 聚醯胺酸之合成中所使用之溶劑之常壓下之沸點較佳為60~300℃,更佳為140~280℃,尤佳為170~270℃。若溶劑之沸點高於300℃,則乾燥步驟需要長時間。另一方面,若溶劑之沸點低於60℃,則有於乾燥步驟中於樹脂膜之表面產生粗糙,於樹脂膜中混入氣泡等,從而無法獲得均勻之膜之情形。 如此,就溶解性及塗佈時邊緣收縮之觀點而言,較佳為使用較佳為沸點為170~270℃、更佳為20℃下之蒸氣壓為250 Pa以下之溶劑。更具體而言,較佳為使用選自由N-甲基-2-吡咯啶酮、γ-丁內酯、上述通式(11)所表示之化合物所組成之群中之一種以上。 溶劑中之水分含量較佳為3000質量ppm以下。 該等溶劑可單獨使用或混合兩種以上使用。 本實施態樣之(a)聚醯亞胺前驅體中,分子量未達1,000之分子之含量較佳為未達5質量%。 認為於(a)聚醯亞胺前驅體中存在該分子量未達1,000之分子的原因在於:與合成時所使用之溶劑之水分量相關。即,認為其產生之原因在於:一部分酸二酐單體之酸酐基藉由水分而水解成為羧基,其並未高分子量化而以低分子之狀態殘存。因此,上述聚合反應中所使用之溶劑之水分量較佳為儘可能少。該溶劑之水分量較佳為設為3,000質量ppm以下,更佳為設為1,000質量ppm以下。 認為溶劑之水分量與以下因素相關:所使用之溶劑之等級(脫水等級、通用等級等)、溶劑容器(瓶子、18 L罐、筒罐等)、溶劑之保管狀態(稀有氣體之封入之有無等)、自開封至使用為止之時間(開封後立即使用、或開封後經時後使用等)等。又,認為亦與合成前之反應器之稀有氣體置換、合成中之稀有氣體流通之有無等相關。因此,推薦於(a)聚醯亞胺前驅體之合成時,使用高純度品作為原料,使用水分量較少之溶劑,並且於反應前及反應中採取措施以使來自環境之水分不混入至系統內。 於溶劑中溶解各單體成分時,視需要可進行加熱。 (a)聚醯亞胺前驅體合成時之反應溫度較佳為設為0℃~120℃,更佳為40℃~100℃,進而較佳為60~100℃。藉由於該溫度下進行聚合反應,可獲得聚合度較高之聚醯亞胺前驅體。聚合時間較佳為設為1~100小時,更佳為設為2~10小時。藉由將聚合時間設為1小時以上而可成為均勻聚合度之聚醯亞胺前驅體,藉由設為100小時以下而可獲得聚合度較高之聚醯亞胺前驅體。 於本實施形態之較佳態樣中,(a1)聚醯亞胺前驅體及(a2)聚醯亞胺前驅體具有以下特性。 將使(a)聚醯亞胺前驅體溶解於溶劑(例如N-甲基-2-吡咯啶酮)中所獲得之溶液塗佈於支持體之表面上後,將該溶液於氮氣環境下(例如氧濃度為2,000 ppm以下之氮氣中)、於300~550℃(例如430℃)下加熱(例如1小時)從而使該聚醯亞胺前驅體醯亞胺化而獲得的樹脂中,10 μm膜厚之黃色度為30以下。 將使(a)聚醯亞胺前驅體溶解於溶劑(例如N-甲基-2-吡咯啶酮)中所獲得之溶液塗佈於支持體之表面上後,將該溶液於氮氣環境下(例如氧濃度為2,000 ppm以下之氮氣中)、於300~550℃(例如430℃)下加熱(例如1小時)從而使該聚醯亞胺前驅體醯亞胺化而獲得的樹脂中,殘留應力為25 MPa以下。 本實施形態之聚醯亞胺前驅體視需要可於不損及本發明之所期望之性能之範圍內,進而含有具有下述通式(14)所表示之結構之聚醯亞胺前驅體: [化26]{通式(14)中,存在複數個之R13 分別獨立為氫原子、碳數1~20之一價之脂肪族烴或一價之芳香族基, X4 為碳數4~32之四價之有機基, Y為碳數4~32之二價之有機基。其中, 將相當於上述通式(1)及上述通式(6)之結構單元除外}。 於通式(14)中,R13 較佳為氫原子。又,就耐熱性、YI值之降低及全光線透過率之觀點而言,X3 較佳為四價之芳香族基。又,就耐熱性、YI值之降低及全光線透過率之觀點而言,Y較佳為二價之芳香族基或脂環式基。 作為本實施形態之(a)聚醯亞胺前驅體中之含有通式(14)所表示之結構單元之聚醯亞胺前驅體之質量比率,相對於(a)聚醯亞胺前驅體之全部,較佳為80質量%以下,就YI值及全光線透過率之氧依存性之下降之觀點而言,更佳為70質量%以下。 於本實施形態之較佳態樣中,(a1)聚醯亞胺前驅體及(a2)聚醯亞胺前驅體係其一部分可經醯亞胺化。該情形之醯亞胺化率較佳為設為80%以下,更佳為設為50%以下。該部分醯亞胺化可藉由將上述(a)聚醯亞胺前驅體加熱進行脫水閉環而獲得。該加熱可於較佳為120~200℃、更佳為150~180℃之溫度下,進行較佳為15分鐘~20小時、更佳為30分鐘~10小時。 又,於藉由上述反應而獲得之聚醯胺酸中添加N,N-二甲基甲醯胺二甲基縮醛或N,N-二甲基甲醯胺二乙基縮醛進行加熱,使羧酸之一部分或全部酯化後,將其用作本實施形態之(a)聚醯亞胺前驅體,藉此亦可獲得室溫保管時之黏度穩定性得以提昇之樹脂組合物。該等酯改性聚醯胺酸亦可另外藉由如下方式獲得:使上述酸二酐成分,與相對於酸酐基而為1當量之一元醇及亞硫醯氯、二環己基碳二醯亞胺等脫水縮合劑依序進行反應後,與二胺成分進行縮合反應。 就塗膜形成性之觀點而言,本實施形態之樹脂組合物中之(a)聚醯亞胺前驅體(較佳為聚醯胺酸)之比率較佳為3~50質量%,更佳為5~40質量%,尤佳為10~30質量%。 <樹脂組合物> 本發明之另一態樣係提供一種含有上述(a)聚醯亞胺前驅體及(b)有機溶劑之樹脂組合物。該樹脂組合物典型而言為清漆。 [(b)有機溶劑] 本實施形態之(b)有機溶劑只要為可溶解上述(a)聚醯亞胺前驅體及任意使用之其他成分者,則並無特別限制。作為此種(b)有機溶劑,可使用作為(a)聚醯亞胺前驅體之合成時可使用之溶劑而於前文中描述者。較佳之有機溶劑亦與上述相同。本實施形態之樹脂組合物中之(b)有機溶劑可與(a)聚醯亞胺前驅體之合成中所使用之溶劑相同亦可不同。 (b)有機溶劑較佳為設為樹脂組合物之固形物成分濃度成為3~50質量%之量。又,較佳為以樹脂組合物之黏度(25℃)成為500 mPa・s~100,000 mPa・s之方式調整(b)有機溶劑之構成及量後添加。 [其他成分] 本實施形態之樹脂組合物亦可除了上述(a)及(b)成分以外,進而含有(c)界面活性劑、(d)烷氧基矽烷化合物等。 本實施態樣之樹脂組合物含有選自由(a)聚醯亞胺前驅體、(b)有機溶劑、(c)界面活性劑及(d)烷氧基矽烷化合物所組成之群中之至少一種。 聚醯亞胺前驅體之骨架並不限定於上文中第一態樣及第二態樣中所述之骨架。即,聚醯亞胺前驅體之骨架只要為以下通式(1)所表示之骨架,則並無特別限定。 [化27]{式中,X1 表示碳數4~32之四價之基。R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基。n表示0或1。並且a、b及c為0~4之整數} ((c)界面活性劑) 本實施形態之樹脂組合物可藉由添加界面活性劑而提高該樹脂組合物之塗佈性。具體而言,可防止塗佈膜之條紋之產生。 此種界面活性劑例如可列舉:聚矽氧系界面活性劑、氟系界面活性劑、該等以外之非離子界面活性劑等。作為該等之例, 作為聚矽氧系界面活性劑,例如可列舉:有機矽氧烷聚合物(Organosilicone polymer)KF-640、642、643、KP341、X-70-092、X-70-093(以上為商品名,信越化學工業公司製造),SH-28PA、SH-190、SH-193、SZ-6032、SF-8428、DC-57、DC-190(以上為商品名,東麗道康寧聚矽氧公司製造),SILWET L-77、L-7001、FZ-2105、FZ-2120、FZ-2154、FZ-2164、FZ-2166、L-7604(以上為商品名,Nippon Unicar公司製造),DBE-814、DBE-224、DBE-621、CMS-626、CMS-222、KF-352A、KF-354L、KF-355A、KF-6020、DBE-821、DBE-712(Gelest),BYK-307、BYK-310、BYK-378、BYK-333(以上為商品名,BYK-Chemie Japan製造),Glanol(商品名,共榮社化學公司製造)等; 作為氟系界面活性劑,例如可列舉:MEGAFAC F171、F173、R-08(大日本油墨化學工業股份有限公司製造,商品名),Fluorad FC4430、FC4432(Sumitomo 3M股份有限公司,商品名)等; 作為該等以外之非離子界面活性劑,例如可列舉:聚氧乙烯月桂醚、聚氧乙烯硬脂基醚、聚氧乙烯油基醚、聚氧乙烯辛基苯酚醚等。 該等界面活性劑中,就樹脂組合物之塗佈性(抑制條紋)之觀點而言,較佳為聚矽氧系界面活性劑、氟系界面活性劑,就固化步驟時之氧濃度對YI值及全光線透過率之影響的觀點而言,較佳為聚矽氧系界面活性劑。 於使用(c)界面活性劑之情形時,其調配量相對於樹脂組合物中之(a)聚醯亞胺前驅體100質量份,較佳為0.001~5質量份,更佳為0.01~3質量份。 (d)烷氧基矽烷化合物 為了使由本實施形態之樹脂組合物獲得之樹脂膜於軟性裝置等之製造製程中於與支持體之間顯示出充分之密接性,該樹脂組合物可相對於(a)聚醯亞胺前驅體100質量%而含有0.01~20質量%之烷氧基矽烷化合物。藉由使相對於聚醯亞胺前驅體100質量%之烷氧基矽烷化合物之含量為0.01質量%以上,可於與支持體之間獲得良好之密接性。又,就樹脂組合物之保存穩定性之觀點而言,較佳為烷氧基矽烷化合物之含量為20質量%以下。烷氧基矽烷化合物之含量相對於聚醯亞胺前驅體100質量份,更佳為0.02~15質量%,進而較佳為0.05~10質量%,尤佳為0.1~8質量%。 藉由使用烷氧基矽烷化合物作為本實施形態之樹脂組合物之添加劑,除了提高上述密接性以外,進而可提高樹脂組合物之塗佈性(抑制條紋不均),並且可降低所得硬化膜之YI值之固化時氧濃度依存性。 作為烷氧基矽烷化合物,例如可列舉:3-脲基丙基三乙氧基矽烷、雙(2-羥基乙基)-3-胺基丙基三乙氧基矽烷、3-縮水甘油氧基丙基三甲氧基矽烷、γ-胺基丙基三甲氧基矽烷、γ-胺基丙基三丙氧基矽烷、γ-胺基丙基三丁氧基矽烷、γ-胺基乙基三乙氧基矽烷、γ-胺基乙基三丙氧基矽烷、γ-胺基乙基三丁氧基矽烷、γ-胺基丁基三乙氧基矽烷、γ-胺基丁基三甲氧基矽烷、γ-胺基丁基三丙氧基矽烷、γ-胺基丁基三丁氧基矽烷、苯基矽烷三醇、三甲氧基苯基矽烷、三甲氧基(對甲苯基)矽烷、二苯基矽烷二醇、二甲氧基二苯基矽烷、二乙氧基二苯基矽烷、二甲氧基二對甲苯基矽烷、三苯基矽烷醇及下述結構分別所表示之烷氧基矽烷化合物等,較佳為使用選自該等中之一種以上。 [化28]本實施形態之樹脂組合物之製造方法並無特別限定。例如可利用以下方法。 於合成(a)聚醯亞胺前驅體時所使用之溶劑與(b)有機溶劑相同之情形時,可將合成之聚醯亞胺前驅體溶液直接作為樹脂組合物。又,視需要亦可於室溫(25℃)~80℃之溫度範圍內,於聚醯亞胺前驅體中添加(b)有機溶劑及其他成分之一種以上,攪拌混合後用作樹脂組合物。該攪拌混合可使用具備攪拌翼之三一馬達(新東化學股份有限公司製造)、自轉公轉攪拌機等適宜之裝置。又,視需要可施加40~100℃之熱。 另一方面,於合成(a)聚醯亞胺前驅體時所使用之溶劑與(b)有機溶劑不同之情形時,可藉由例如再沈澱、溶劑蒸餾去除等適宜之方法將所合成之聚醯亞胺前驅體溶液中之溶劑去除而分離(a)聚醯亞胺前驅體後,於室溫~80℃之溫度範圍內,添加(b)有機溶劑及視需要之其他成分,進行攪拌混合,藉此製備樹脂組合物。 以上述方式製備樹脂組合物後,於例如130~200℃下對該組合物溶液進行例如5分鐘~2小時加熱,藉此可以不引起聚合物析出之程度使聚醯亞胺前驅體之一部分脫水醯亞胺化。此處,藉由控制加熱溫度及加熱時間,可控制醯亞胺化率。藉由使聚醯亞胺前驅體進行部分醯亞胺化,可提高樹脂組合物之室溫保管時之黏度穩定性。作為醯亞胺化率之範圍,就取得聚醯亞胺前驅體於樹脂組合物溶液中之溶解性與溶液之保存穩定性之平衡之觀點而言,較佳為5%~70%。 本實施形態之樹脂組合物較佳為其水分量為3,000質量ppm以下。 就保存該樹脂組合物時之黏度穩定性之觀點而言,樹脂組合物之水分量更佳為1,000質量ppm以下,進而較佳為500質量ppm以下。 本實施形態之樹脂組合物之溶液黏度於25℃下較佳為500~200,000 mPa・s,更佳為2,000~100,000 mPa・s,尤佳為3,000~30,000 mPa・s。該溶液黏度可使用E型黏度計(東機產業股份有限公司製造,VISCONICEHD)進行測定。若溶液黏度低於300 mPa・s,則膜形成時之塗佈困難,若高於200,000 mPa・s,則有產生合成時之攪拌變困難之問題之虞。 合成(a)聚醯亞胺前驅體時,即使溶液變為高黏度,亦可藉由於反應結束後添加溶劑並加以攪拌而獲得處理性較佳之黏度之樹脂組合物。 本實施形態之樹脂組合物於較佳態樣中具有以下特性。 將樹脂組合物塗佈於支持體之表面上而形成塗膜後,於氮氣環境下(例如氧濃度2,000 ppm以下之氮氣中)於300℃~550℃下對該塗膜進行加熱,藉此使上述塗膜中所含之聚醯亞胺前驅體醯亞胺化所得的樹脂膜係10 μm膜厚之黃色度YI為30以下。 將樹脂組合物塗佈於支持體之表面上而形成塗膜後,於氮氣環境下(例如氧濃度2,000 ppm以下之氮氣中)於300℃~550℃下對該塗膜進行加熱,藉此使上述塗膜中所含之聚醯亞胺前驅體醯亞胺化所得的樹脂膜係殘留應力為25 MPa以下。 本實施形態之樹脂組合物例如可較佳用於形成液晶顯示器、有機電致發光顯示器、場發射顯示器、電子紙等顯示裝置之透明基板。具體而言,可用於形成薄膜電晶體(TFT)之基板、彩色濾光片之基板、透明導電膜(ITO,IndiumThinOxide)之基板等。 本實施形態之樹脂前驅體可形成殘留應力為25 MPa以下般之聚醯亞胺膜,故而容易應用於在無色透明聚醯亞胺基板上具備TFT元件裝置之顯示器製造步驟。 <樹脂膜> 本發明之另一態樣係提供一種由上述樹脂前驅體形成之樹脂膜。 又,本發明之進而另一態樣係提供一種由上述樹脂組合物製造樹脂膜之方法。 本實施形態之樹脂膜之特徵在於包含: 藉由於支持體之表面上塗佈上述樹脂組合物而形成塗膜的步驟(塗佈步驟); 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟(加熱步驟);及 將上述聚醯亞胺樹脂膜自該支持體剝離的步驟(剝離步驟)。 此處,支持體只要具有對後續步驟之加熱溫度之耐熱性且剝離性良好,則並無特別限定。例如可使用:玻璃(例如無鹼玻璃)基板; 矽晶圓; PET(聚對苯二甲酸乙二酯)、OPP(延伸聚丙烯)、聚乙二醇對苯二甲酸酯、聚乙二醇萘二甲酸酯、聚碳酸酯、聚醯亞胺、聚醯胺醯亞胺、聚醚醯亞胺、聚醚醚酮、聚醚碸、聚伸苯基碸、聚苯硫醚等樹脂基板; 不鏽鋼、氧化鋁、銅、鎳等金屬基板等。 於形成膜狀之聚醯亞胺成形體之情形時,例如較佳為玻璃基板、矽晶圓等,於形成膜狀或片狀之聚醯亞胺成形體之情形時,例如較佳為包含PET(聚對苯二甲酸乙二酯)、OPP(延伸聚丙烯)等之支持體。 作為塗佈方法,例如可應用:刮刀塗佈機、氣刀塗佈機、輥式塗佈機、旋轉塗佈機、流塗機、模嘴塗佈機、棒式塗佈機等之塗佈方法,旋塗、噴霧塗佈、浸漬塗佈等塗佈方法;以網版印刷及凹版印刷等為代表之印刷技術等。 塗佈厚度應根據所期望之樹脂膜之厚度與樹脂組合物中之聚醯亞胺前驅體之含量而適宜調整,較佳為1~1,000 μm左右。塗佈步驟於室溫下實施即可,但若欲降低黏度而提高作業性,則亦可將樹脂組合物於40~80℃之範圍內加溫而實施。 塗佈步驟之後可進行乾燥步驟,亦可省略乾燥步驟而直接進行後續之加熱步驟。該乾燥步驟係以去除有機溶劑為目的而進行。於進行乾燥步驟之情形時,例如可利用加熱板、箱型乾燥機、輸送型乾燥機等適宜之裝置。乾燥步驟較佳為於80~200℃下進行,更佳為於100~150℃下進行。乾燥步驟之實施時間較佳為設為1分鐘~10小時,更佳為設為3分鐘~1小時。 以上述方式於支持體上形成含有聚醯亞胺前驅體之塗膜。 繼而,進行加熱步驟。加熱步驟係將上述乾燥步驟中殘留於塗膜中之有機溶劑去除,並且進行塗膜中之聚醯亞胺前驅體之醯亞胺化反應,獲得包含聚醯亞胺之膜的步驟。 該加熱步驟例如可使用惰性氣體烘箱、加熱板、箱型乾燥機、輸送型乾燥機等裝置而進行。該步驟可與上述乾燥步驟同時進行,亦可逐次進行兩步驟。 加熱步驟可於空氣環境下進行,但就安全性與所得聚醯亞胺膜之透明性及YI值之觀點而言,推薦於惰性氣體環境下進行。作為惰性氣體,例如可列舉氮氣、氬氣等。 加熱溫度可根據(b)有機溶劑之種類而適宜設定,較佳為250℃~550℃,更佳為300~450℃。若為250℃以上,則醯亞胺化充分,若為550℃以下,則不會發生所得聚醯亞胺膜之透明性下降、耐熱性劣化等不良狀況。加熱時間較佳為設為0.5~3小時左右。 本實施形態中,作為上述加熱步驟之周圍環境之氧濃度,就所得聚醯亞胺膜之透明性及YI值之觀點而言,較佳為2,000質量ppm以下,更佳為100質量ppm以下,進而較佳為10質量ppm以下。藉由於氧濃度為2,000質量ppm以下之環境中進行加熱,可使所得聚醯亞胺膜之YI值成為30以下。 根據聚醯亞胺樹脂膜之使用用途、目的不同,有時於上述加熱步驟後,需要自支持體剝離樹脂膜之剝離步驟。該剝離步驟較佳為於將支持體上之樹脂膜冷卻至室溫~50℃左右後實施。 作為該剝離步驟,例如可列舉下述(1)~(4)之態樣。 (1)藉由上述方法而製作包含聚醯亞胺樹脂膜/支持體之構成體後,自該結構體之支持體側照射雷射,對支持體與聚醯亞胺樹脂膜之界面進行剝蝕加工,藉此剝離聚醯亞胺樹脂的方法。作為雷射之種類,可列舉:固體(YAG(Yttrium Aluminum Garnet,釔-鋁-石榴石))雷射、氣體(UV(ultraviolet,紫外線)準分子)雷射等。較佳為使用波長308 nm等之光譜(參考日本專利特表2007-512568公報、日本專利特表2012-511173公報等)。 (2)於支持體上塗佈樹脂組合物前,於支持體上形成剝離層,其後獲得包含聚醯亞胺樹脂膜/剝離層/支持體之構成體,剝離聚醯亞胺樹脂膜的方法。作為剝離層,可列舉:使用Parylene(註冊商標,日本Parylene合同公司製造)、氧化鎢之方法;使用植物油系、聚矽氧系、氟系、醇酸系等之脫模劑之方法等。(參考日本專利特開2010-67957公報、日本專利特開2013-179306公報等)。 亦可將該方法(2)與上述(1)之雷射照射併用。 (3)使用可蝕刻之金屬基板作為支持體,獲得包含聚醯亞胺樹脂膜/支持體之構成體後,以蝕刻劑蝕刻金屬,藉此獲得聚醯亞胺樹脂膜的方法。作為金屬,例如可使用銅(具體例有三井金屬礦業股份有限公司製造之電解銅箔「DFF」)、鋁等。作為蝕刻劑,對銅使用氯化鐵等,對鋁使用稀鹽酸等。 (4)藉由上述方法而獲得包含聚醯亞胺樹脂膜/支持體之構成體後,於聚醯亞胺樹脂膜表面貼附黏著膜,自支持體分離黏著膜/聚醯亞胺樹脂膜,其後自黏著膜分離聚醯亞胺樹脂膜的方法。 該等剝離方法中,就所得之聚醯亞胺樹脂膜之正面及背面之折射率差、YI值及伸長率之觀點而言,適合的是方法(1)或(2),就所得聚醯亞胺樹脂膜之正面及背面之折射率差之觀點而言,更適合的是方法(1)。 再者,於方法(3)中,於使用銅作為支持體之情形時,可見所得聚醯亞胺樹脂膜之YI值變大,伸長率變小之傾向。認為其係由於銅離子之影響。 藉由上述方法而獲得之樹脂膜之厚度並無特別限定,較佳為1~200 μm之範圍,更佳為5~100 μm。 本實施形態之樹脂膜之10 μm膜厚之黃色度YI可為30以下。又,殘留應力可為25 MPa以下。尤其可使10 μm膜厚之黃色度YI為30以下且殘留應力為25 MPa以下。此種特性例如可藉由使本發明之樹脂前驅體於氮氣環境下(例如氧濃度2,000 ppm以下之氮氣中),於較佳為300℃~550℃、更佳為350℃~450℃下醯亞胺化而良好地實現。 本實施形態之樹脂膜進而拉伸伸長率可為15%以上。樹脂膜之拉伸伸長率進而可為20%以上,尤其可為30%以上。該拉伸伸長率可將10 μm膜厚之樹脂膜作為試樣,使用市售之拉伸試驗機進行測定。 本實施形態之樹脂膜係包含上述樹脂組合物中所含之(a1)聚醯亞胺前驅體經熱醯亞胺化而成之聚醯亞胺之膜。因此含有下述通式(11)所表示之結構單元: [化29]{式中,X1 、X2 表示碳數4~32之四價之基。R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基。n表示0或1。並且a、b及c為0~4之整數。Y為選自由上述通式(3)、(4)及(5)所組成之群中之至少一種。l、m分別獨立表示1以上之整數,滿足0.01≦l/(l+m)≦0.99}。 l/(l+m)之下限可為0.05,亦可為0.10,亦可為0.20,亦可為0.30,亦可為0.40。 l/(l+m)之上限可為0.95,亦可為0.90,亦可為0.80,亦可為0.70,亦可為0.60。 如上所述,較佳為殘留應力為25 MPa以下,YI為30以下,玻璃轉移溫度為400℃以上,伸長率為15%以上,並且斷裂強度為250 MPa以上。 又,作為第二態樣,係包含上述樹脂組合物中所含之(a2)聚醯亞胺前驅體經熱醯亞胺化而成之聚醯亞胺之膜。因此係含有下述通式(12)所表示之結構單元: [化30]{式中,X3 表示源自選自4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)中之至少一種的四價之基。R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基。n表示0或1。並且a、b及c為0~4之整數}且伸長率為15%以上之樹脂膜,較佳為殘留應力為25 MPa以下,YI為30以下,玻璃轉移溫度為400℃以上,並且斷裂強度為250 MPa以上。 <積層體> 本發明之另一態樣係提供一種包含支持體、及於該支持體之表面上由上述樹脂組合物形成之聚醯亞胺樹脂膜的積層體。 又本發明之進而另一態樣係提供一種上述積層體之製造方法。 本實施形態之積層體可藉由包含如下步驟之積層體之製造方法而獲得: 藉由於支持體之表面上塗佈上述樹脂組合物而形成塗膜的步驟(塗佈步驟);及 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟(加熱步驟)。 上述積層體之製造方法例如除了不進行剝離步驟以外,可以與上述樹脂膜之製造方法相同之方式實施。 該積層體例如可較佳用於軟性裝置之製造。 若進一步詳細說明,則如下所述。 於形成軟性顯示器之情形時,使用玻璃基板作為支持體,於其上形成軟性基板,進而於其上形成TFT等。於軟性基板上形成TFT等之步驟典型而言係於150~650℃之較廣範圍之溫度下實施。然而,為實現現實中所期望之性能,必須於250℃~450℃附近之高溫下,使用無機物材料,形成TFT-IGZO(InGaZnO)氧化物半導體或TFT(a-Si-TFT、poly-Si-TFT)。 另一方面,由於該等熱歷程,聚醯亞胺膜之各種物性(尤其黃色度或伸長率)存在下降之傾向,若超過400℃,則尤其黃色度或伸長率下降。然而,由本發明之聚醯亞胺前驅體獲得之聚醯亞胺膜即便於400℃以上之高溫區域中,黃色度或伸長率之下降亦極少,可於該區域中良好地使用。 進而,於本實施形態中,可提供一種包含聚醯亞胺膜層及LTPS(低溫多晶矽TFT)層之積層體,上述聚醯亞胺膜層含有下述通式(13)所表示之聚醯亞胺。 [化31]{式中,X1 表示碳數4~32之四價之基。R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基。n表示0或1。並且a、b及c為0~4之整數} 作為該積層體之製造方法,於製造包含上述支持體、及於該支持體之表面上由上述樹脂組合物形成之聚醯亞胺樹脂膜之積層體後,形成非晶Si層,於400~450℃下進行0.5~3小時左右之脫氫退火後,藉由準分子雷射等而結晶化,藉此可形成LTPS層。其後,藉由雷射剝離等將玻璃與聚醯亞胺膜剝離,藉此可獲得上述積層體。 包含含有通式(13)所表示之聚醯亞胺之聚醯亞胺膜層及LTPS(低溫多晶矽TFT)層之積層體係熱循環試驗後之剝離或鼓出較少,基板翹曲較少。 又,若軟性基板與聚醯亞胺樹脂膜中產生之殘留應力較高,則包含兩者之積層體於高溫之TFT步驟中膨脹後,於常溫冷卻時收縮時,可能產生玻璃基板之翹曲及破損、軟性基板自玻璃基板剝離等問題。通常,玻璃基板之熱膨脹係數小於樹脂,故而於該玻璃基板與軟性基板之間產生殘留應力。本實施形態之樹脂膜如上所述,可將與玻璃基板之間產生之殘留應力設為25 MPa以下,故而可較佳用於軟性顯示器之形成。 進而,本實施形態之聚醯亞胺膜係可將10 μm膜厚之黃色度YI設為30以下,且可將拉伸伸長率設為15%以上。藉此,本實施形態之樹脂膜於處理軟性基板時之斷裂強度優異,因此可提高製造軟性顯示器時之良率。 又,作為另一態樣,可提供一種於400℃以上加熱後之膜厚10微米之黃色度為20以下、膜厚0.1微米時之308 nm之吸光度為0.6以上且2.0以下、並且伸長率為15%以上的聚醯亞胺膜。 藉由使YI為20以下,可於不使製成顯示器時之畫質降低之情況下製作軟性基板。 更佳為18以下,尤佳為16以下。 藉由使膜厚0.1微米時之308 nm之吸光度為0.6以上且2.0以下並且使伸長率為15%以上,例如可自玻璃基板藉由雷射而容易地剝離聚醯亞胺膜。就抑制雷射剝離後之灰塵之觀點而言,較佳為0.6以上且1.5以下並且伸長率為20%以上,例如就不降低有機EL元件之性能之觀點而言,尤佳為0.6以上且1.0以下並且伸長率為20%以上。 伸長率之上限並無特別限定,可為80%以下,亦可為70%以下,亦可為60%以下,亦可為50%以下,亦可為40%以下。 再者,雷射剝離時有時會因雷射光而導致聚醯亞胺膜燃燒,其燃燒殘留即為灰塵。 因此,本發明之另一態樣係提供一種顯示器基板。 又,本發明之進而另一態樣係提供一種製造上述顯示器基板之方法。 本實施形態之顯示器基板之製造方法之特徵在於包含以下步驟: 藉由於支持體之表面上塗佈上述樹脂組合物而形成塗膜的步驟(塗佈步驟); 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟(加熱步驟); 於上述聚醯亞胺樹脂膜上形成元件或電路的步驟(元件、電路形成步驟);及 將上述形成有元件或電路之聚醯亞胺樹脂膜自上述支持體剝離的步驟(剝離步驟)。 於上述方法中,塗佈步驟、加熱步驟及剝離步驟可分別以與上述樹脂膜之製造方法相同之方式進行。 元件、電路形成步驟可藉由業者所公知之方法而實施。 滿足上述物性之本實施形態之樹脂膜可較佳地用於因既有之聚醯亞胺膜所具有之黃色而導致使用受限之用途,尤其軟性顯示器用無色透明基板、彩色濾光片用保護膜等用途。進而,亦可用於例如保護膜、TFT-LCD等之散光片材及塗膜(例如TFT-LCD之中間層、閘極絕緣膜、液晶配向膜等)、觸控面板用ITO基板、智慧型手機用之代替覆蓋玻璃之樹脂基板等要求無色透明性且低雙折射之領域中。若應用本實施形態之聚醯亞胺作為液晶配向膜,則可製造開口率較高且對比率較高之TFT-LCD。 使用本實施形態之聚醯亞胺前驅體、樹脂前驅體而製造之樹脂膜及積層體例如除了可用作半導體絕緣膜、TFT-LCD絕緣膜、電極保護膜等外,亦可於軟性裝置之製造中尤佳地用作基板。此處,作為可應用本實施形態之樹脂膜及積層體之軟性裝置,例如可列舉:軟性顯示器、軟性太陽電池、軟性觸控面板電極基板、軟性照明、軟性電池等。 [實施例] 以下,根據實施例對本發明進行更詳細說明,但該等係為了說明而記述者,本發明之範圍不受下述實施例之限定。 實施例及比較例之各種評價係如下述般進行。 <重量平均分子量之測定> 重量平均分子量(Mw)及數量平均分子量(Mn)係利用凝膠滲透層析法(GPC)藉由下述條件測定。 作為溶劑,使用N,N-二甲基甲醯胺(和光純藥工業公司製造,高效液相層析用,於即將測定前添加24.8 mmol/L之溴化鋰一水合物(和光純藥工業公司製造,純度99.5%)及63.2 mmol/L之磷酸(和光純藥工業公司製造,高效液相層析用)而溶解者)。用以算出重量平均分子量之校準曲線係使用標準聚苯乙烯(東曹公司製造)而製成。 管柱:Shodex KD-806M(昭和電工公司製造) 流速:1.0 mL/分鐘 管柱溫度:40℃ 泵:PU-2080Plus(JASCO公司製造) 檢測器:RI-2031Plus(RI:示差折射計,JASCO公司製造)及UV-2075Plus(UV-VIS:紫外可見吸光計,JASCO公司製造) <分子量未達1,000之分子之含量(低分子量體含量)之評價> 樹脂中之分子量未達1,000之分子之含量係使用上述所得GPC之測定結果,以分子量未達1,000之成分所占之波峰面積於分子量分佈總體之波峰面積中佔有的比率(百分率)之形式而算出。 <水分量之評價> 合成溶劑及樹脂組合物(清漆)之水分量係使用卡氏水分測定裝置(微量水分測定裝置AQ-300,平沼產業公司製造)而測定。 <樹脂組合物之黏度穩定性之評價> 對於實施例及比較例中分別製備之樹脂組合物, 將製備後於室溫下靜置3日之樣本作為製備後之樣本,進行23℃下之黏度測定; 將其後進而於室溫下靜置2週之樣本作為2週後之樣本,再次進行23℃下之黏度測定。該等黏度測定係使用附調溫機之黏度計(東機產業械公司製造TV-22)而進行。 使用上述測定值,藉由下述數式而算出室溫2週黏度變化率。 室溫2週黏度變化率(%)=[(2週後之樣本之黏度)-(製備後之樣本之黏度)]/(製備後之樣本之黏度)×100 室溫2週黏度變化率係根據下述基準而評價。 ◎:黏度變化率為5%以下(保存穩定性「優良」) ○:黏度變化率超過5且為10%以下(保存穩定性「良好」) ×:黏度變化率超過10%(保存穩定性「不良」) <清漆塗佈性之評價> 使用棒式塗佈機將實施例及比較例中分別製備之樹脂組合物以固化後膜厚成為15 μm之方式塗佈於無鹼玻璃基板(尺寸37×47 mm,厚度0.7 mm)上後,於140℃下預烤60分鐘。 使用表面輪廓儀(Tencor公司製造,型號名P-15)測定塗膜表面之階差而對清漆之塗佈性進行評價。 ◎:表面之階差為0.1 μm以下(塗佈性「優良」) ○:表面之階差超過0.1且為0.5 μm以下(塗佈性「良好」) ×:表面之階差超過0.5 μm(塗佈性「不良」) <殘留應力之評價> 於預先測定了「翹曲量」之厚625 μm±25 μm之6吋矽晶圓上藉由旋轉塗佈機而塗佈各樹脂組合物,於100℃下預烤7分鐘。其後,使用立式固化爐(Koyo Lindberg公司製造,型號名VF-2000B),以庫內之氧濃度成為10質量ppm以下之方式進行調整,於430℃下實施1小時之加熱硬化處理(固化處理),製作附有硬化後膜厚10 μm之聚醯亞胺樹脂膜之矽晶圓。 使用殘留應力測定裝置(Tencor公司製造,型號名FLX-2320)測定該晶圓之翹曲量,評價矽晶圓與樹脂膜之間產生之殘留應力。 ◎:殘留應力超過-5且為15 MPa以下(殘留應力之評價「優良」) ○:殘留應力超過15且為25 MPa以下(殘留應力之評價「良好」) ×:殘留應力超過25 MPa(殘留應力之評價「不良」) <形成有無機膜之聚醯亞胺樹脂膜之翹曲評價> 將實施例及比較例中分別製備之樹脂組合物以硬化後膜厚成為10 μm之方式旋轉塗佈於表面設置有鋁蒸鍍層之6吋矽晶圓基板上,於100℃下預烤7分鐘。其後,使用立式固化爐(Koyo Lindberg公司製造,型號名VF-2000B),以庫內之氧濃度成為10質量ppm以下之方式進行調整,於430℃下實施1小時之加熱硬化處理,製作形成有聚醯亞胺樹脂膜之晶圓。使用該晶圓,於聚醯亞胺樹脂膜上藉由CVD(chemical vapor deposition,化學氣相沈積)法於350℃下以100 nm之厚度形成作為無機膜之氮化矽(SiNx)膜,獲得形成有無機膜/聚醯亞胺樹脂之積層體晶圓。 將上述獲得之積層體晶圓浸漬於稀鹽酸水溶液中,將無機膜及聚醯亞胺膜之兩層作為一體而自晶圓剝離,藉此獲得表面上形成有無機膜之聚醯亞胺膜之樣本。使用該樣本,評價聚醯亞胺樹脂膜之翹曲。 ◎:無翹曲者(翹曲「優良」) ○:僅有少量翹曲者(翹曲「良好」) ×:因翹曲而導致膜捲曲者(翹曲「不良」) <黃色度(YI值)之評價> 以與上述<形成有無機膜之聚醯亞胺樹脂膜之翹曲評價>相同之方式製作晶圓(未形成無機膜者)。將該晶圓浸漬於稀鹽酸水溶液中,剝離聚醯亞胺樹脂膜,藉此獲得樹脂膜。 對於所得之聚醯亞胺樹脂膜,藉由日本電色工業(股份)製造(Spectrophotometer:SE600)使用D65光源測定YI值(換算為膜厚10 μm)。 <伸長率及斷裂強度之評價> 以與上述<形成有無機膜之聚醯亞胺樹脂膜之翹曲評價>相同之方式製作晶圓(未形成無機膜者)。使用晶圓切割機(DISCO股份有限公司製造之DAD3350)於該晶圓之聚醯亞胺樹脂膜上切入3 mm寬之切痕後,於稀鹽酸水溶液中浸漬一晩,剝離樹脂膜片,加以乾燥。將其切割為長50 mm,作為樣本。 對於上述樣本,使用TENSILON(Orientec公司製造 UTM-II-20),以試驗速度40 mm/min、初期加重0.5 fs測定伸長率及斷裂強度。 <聚醯亞胺樹脂膜之308 nm之吸光度測定> 於石英玻璃基板上分別旋轉塗佈上述清漆,於氮氣環境下於430℃下加熱1小時,藉此分別獲得膜厚0.1 μm之聚醯亞胺樹脂膜。對於該等聚醯亞胺膜,使用UV-1600(島津公司製造)測定308 nm之吸光度。 [實施例1] 於經氮氣置換之500 ml可分離式燒瓶中裝入N-甲基-2-吡咯啶酮(NMP)96 g,裝入4-胺基苯基-4-胺基苯甲酸酯(APAB)17.71 g(77.6 mmol)及4,4'-二胺基二苯基碸(DAS)4.82 g(19.4 mmol),加以攪拌而使APAB及DAS溶解。其後,添加聯苯-3,3',4,4'-四羧酸二酐(BPDA)29.42 g(100 mmol),於氮氣流通且80℃下於3小時攪拌下進行聚合反應。其後,冷卻至室溫,添加上述NMP以使溶液黏度成為51,000 mPa・s之方式進行調整,藉此獲得聚醯胺酸之NMP溶液(以下亦稱為清漆)P-1。所得聚醯胺酸之重量平均分子量(Mw)為65,000。 [實施例2~21及比較例1~5] 於上述實施例1中,除了分別如表1所記載般變更原料之投入量(莫耳比)、使用溶劑之種類、聚合溫度及聚合時間以外,以與實施例1相同之方式獲得清漆P-2~P-26。 將各清漆中所含之聚醯胺酸之重量平均分子量(Mw)一併記載於表1中。 [表1] 表1中之各成分之簡稱分別表示以下含義。 BPDA:3,3',4,4'-聯苯四羧酸二酐 PMDA:均苯四甲酸二酐 TAHQ:對伸苯基雙(偏苯三甲酸酐) APAB:4-胺基苯基-4-胺基苯甲酸酯 ATAB:2-甲基-4-胺基苯基-4-胺基苯甲酸酯 BABB:[4-(4-胺基苯甲醯基)氧基苯基]4-胺基苯甲酸酯 BAFL:9,9-雙(胺基苯基)茀 BFAF:9,9-雙(4-胺基-3-氟苯基)茀 TFMB:2,2'-雙(三氟甲基)聯苯胺 DAS:4,4'-二胺基二苯基碸 NMP:N-甲基-2-吡咯啶酮 DMF:N,N-二甲基甲醯胺 DMAc:N,N-二甲基乙醯胺 將上述實施例及比較例中獲得之清漆P-1~P-26直接用作樹脂組合物,依據上述方法進行評價。評價結果示於表2。 [表2] *表示膜脆而無法測定 **表示因膜白化而無法測定   如由表1及表2所表明,僅含有通式(1)所表示之結構單元之比較例1、2中所得之聚醯亞胺膜係膜脆,無法進行伸長率等物性評價。又,殘留應力亦成為較高之結果。又,僅含有通式(2)所表示之結構單元之比較例3中所得之聚醯亞胺膜係殘留應力較高,形成無機膜後產生翹曲,伸長率亦較低。 另一方面,以莫耳比99/1~1/99含有通式(1)所表示之結構單元與通式(2)所表示之結構單元的實施例1~21中所得之聚醯亞胺膜係成為黃色度低至20以下、殘留應力亦低至25 MPa以下、伸長率高達20%以上之結果。又,亦未產生形成無機膜後之翹曲,或即便產生亦僅為少量。 由上述表2之結果確認,由本發明之樹脂組合物獲得之聚醯亞胺樹脂膜係黃色度較小、殘留應力較低、機械物性優異之樹脂膜。 具體而言,本發明中,可獲得殘留應力為25 MPa以下、黃色度YI為30以下、伸長率為15%以上之樹脂膜。 [實施例22] 將N-甲基-2-吡咯啶酮(NMP)(水分量250質量ppm)以相當於固形物成分含量17 wt%之量自18 L之罐開封後立即添加至經氮氣置換之500 ml可分離式燒瓶中,裝入4-胺基苯基-4-胺基苯甲酸酯(APAB,純度99.5%,日本純良藥品股份有限公司製造)5.71 g(25.0 mmol),加以攪拌而使APAB溶解。其後,添加聯苯-3,3',4,4'-四羧酸二酐(BPDA,純度99.5%,MANAC股份有限公司製造)7.36 g(25.0 mmol),於氮氣流通且80℃下於3小時攪拌下進行聚合反應。其後,冷卻至室溫,添加上述NMP以溶液黏度成為51,000 mPa・s之方式進行調整,獲得聚醯胺酸之NMP溶液(以下亦稱為清漆)P-27。所得聚醯胺酸之重量平均分子量(Mw)為128,000,分子量未達1,000之分子之含量為0.01質量%。 [實施例23~33及比較例6~11] 於上述實施例22中,除了分別為如表3所記載般變更原料之種類、原料之投入量、使用溶劑之種類、聚合溫度及聚合時間以外,以與合成例1相同之方式獲得清漆P-28~P-44。 將各清漆中所含之聚醯胺酸之重量平均分子量(Mw)一併示於表3中。 [表3] 表3中之各成分之簡稱分別表示以下含義。 BPDA:聯苯四羧酸二酐,純度99.5%,三菱化學股份有限公司製造 TAHQ:對伸苯基雙(偏苯三甲酸酐),純度99.5%,MANAC股份有限公司製造 PMDA:均苯四甲酸二酐 APAB:4-胺基苯基-4-胺基苯甲酸酯,純度99.5% 4,3-APAB:4-胺基苯基-3-胺基苯甲酸酯,純度99.5% ATAB:2-甲基-4-胺基苯基-4-胺基苯甲酸酯 BABB:[4-(4-胺基苯甲醯基)氧基苯基]4-胺基苯甲酸酯 NMP1:18 L罐開封後立即使用者,水分量250 ppm NMP2:將500 ml瓶裝品開封後放置一個月者,水分量3,070 ppm DMF:將500 ml瓶裝品開封後者,水分量3510 ppm DMAc:將500 ml瓶裝品開封後者,水分量3430 ppm [實施例22~33及比較例6~11] 將上述實施例及比較例中所得之清漆P-27~P-44直接用作樹脂組合物,依據上述方法進行評價。評價結果示於表4。 [表4] 如由表3及表4所表明,聚醯亞胺前驅體(清漆)之重量平均分子量為3,0000以下之比較例6(P-39)、比較例7(P-40)、比較例8(P-41)、比較例10(P-43)及比較例11(P-44)中,殘留應力較大,翹曲亦較大。又,黃色度較大,伸長率及斷裂強度亦較小。尤其水分量較多之比較例10、11中,膜非常脆。 另一方面,聚醯亞胺前驅體之重量平均分子量為30,0000以上之比較例9(P-42)中,殘留應力、翹曲較小,黃色度亦較低,伸長率及斷裂強度亦較大,但塗佈性變差。 相對於此,使用重量平均分子量為30,000以上且300,000以下之聚醯亞胺前驅體P-27~P-38的實施例22~實施例33中,殘留應力較低,翹曲亦較小,黃色度較低,伸長率及斷裂強度亦較大,任一特性均獲得了優良結果。 由上述表4之結果確認,由本發明之樹脂組合物獲得之聚醯亞胺樹脂膜係黃色度較小、殘留應力較低、機械物性優異之樹脂膜。 具體而言,本發明中,可獲得殘留應力為25 MPa以下、黃色度YI為20以下、玻璃轉移溫度為400℃以上、伸長率為15%以上並且斷裂強度為250 MPa以上之樹脂膜。 繼而揭示之實施例34~實施例45中,對在樹脂組合物中添加選自由界面活性劑及烷氧基矽烷化合物所組成之群中的至少一種之情形時的效果進行實驗。 [實施例34] 首先,將上述實施例22中所得之清漆P-27直接用作樹脂組合物,根據以下順序進行塗佈條紋之評價。 <塗佈條紋之評價(塗佈性)> 使用棒式塗佈機將上述樹脂組合物以固化後膜厚成為15 μm之方式塗佈於無鹼玻璃基板(尺寸37×47 mm,厚度0.7 mm)上。塗佈後,於室溫下放置10分鐘後,以目視確認所得之塗膜上是否產生塗佈條紋。使用相同之樹脂組合物進行3次塗佈,對各塗膜檢查塗佈條紋之條數,使用其平均值根據下述基準進行評價。 ◎:寬1 mm以上、長1 mm以上之連續之塗佈條紋為0條(塗佈條紋之評價「優良」) ○:上述塗佈條紋為1或2條(塗佈條紋之評價「良好」) △:上述塗佈條紋為3~5條(塗佈條紋之評價「可」) 評價結果示於表5。 [實施例35~45] 於上述實施例22中所得之清漆P-27中分別添加作為追加添加劑之表5中所示之種類及量之界面活性劑或烷氧基矽烷化合物後,藉由0.1 μm之過濾器進行過濾,藉此製備樹脂組合物。 使用上述樹脂組合物,以與實施例34相同之方式進行塗佈條紋之評價。結果示於表5。 [表5] 表5中之各成分之簡稱分別表示以下含義。表5中之該等成分之使用量分別係相對於清漆中所含之聚醯亞胺前驅體100質量份之調配量(使用量)。於實施例39及45中,將界面活性劑1與烷氧基矽烷化合物1併用。 界面活性劑1:DBE-821,製品名,聚矽氧系界面活性劑,Gelest製造 界面活性劑2:MEGAFAC F171,製品名,氟系界面活性劑,DIC製造 烷氧基矽烷化合物1:下述通式(AS-1)所表示之化合物 烷氧基矽烷化合物2:下述通式(AS-2)所表示之化合物 [化32]如由表5所表明,含有界面活性劑或烷氧基矽烷化合物之實施例35~實施例39及實施例41~45中,與不含有之實施例34及40相比較,塗佈條紋之產生得到抑制,可獲得表面平滑性優異之聚醯亞胺樹脂膜。 [實施例46] 使用棒式塗佈機將清漆P-27以固化後膜厚成為10 μm之方式塗佈於無鹼玻璃基板(尺寸37×47 mm,厚度0.7 mm)上後,於140℃下預烤60分鐘。繼而使用立式固化爐(Koyo Lindberg公司製造,型號名VF-2000B),以庫內之氧濃度成為10質量ppm以下之方式進行調整,於430℃下實施1小時之加熱硬化處理,製作形成有聚醯亞胺樹脂膜之玻璃基板。於該聚醯亞胺膜上形成非晶矽層,於430℃下進行1小時脫氫退火,繼而照射準分子雷射,藉此形成LTPS層。藉由準分子雷射(波長308 nm,重複頻率300 Hz)而剝離玻璃基板,獲得包含聚醯亞胺膜與LTPS層之積層體。 該積層體無翹曲且黃色度亦為20以下。 [實施例47] 除了使用清漆P-1以外,以與實施例46相同之方法獲得積層體。該積層體無翹曲且黃色度亦為20以下。 [比較例12] 除了使用清漆P-24以外,以與實施例46相同之方法獲得積層體。該積層體之翹曲較大且聚醯亞胺膜之一部分產生龜裂。 [合成例] 於安裝有迪安-斯塔克裝置及回流器之可分離式燒瓶中,於氮氣環境下裝入APAB 2.24 g(9.8 mmol)、NMP 16.14 g及甲苯50 g,於攪拌下使APAB溶解。於其中添加H-PMDA 2.24 g(10.0 mmol),於180℃下回流2小時後,用3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃,藉由IR確認源自醯胺鍵之1,650 cm-1 附近之吸收(C=O)消失。其後,添加APAB 8.95 g(39.2 mmol)、NMP 121.6 g、PMDA 6.54 g(30.0 mmol)及6FDA 4.44 g(10.0 mmol)於80℃下攪拌4小時,藉此獲得聚醯亞胺-聚醯胺酸聚合物之清漆(P-45)。所得聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為82,000。 [實施例48~53、比較例13] 製作圖1所示之有機EL基板。 使用棒式塗佈機將聚醯亞胺前驅體清漆(P-1、P-11、P-20、P-22、P-27、P-33、P-45)以固化後膜厚成為10 μm之方式塗佈於素玻璃基板(厚度0.7 mm)上後,於140℃下預烤60分鐘。繼而使用立式固化爐(Koyo Lindberg公司製造,型號名VF-2000B),以庫內之氧濃度成為10質量ppm以下之方式進行調整,於430℃下實施1小時之加熱硬化處理,製作形成有聚醯亞胺樹脂膜之玻璃基板。 繼而藉由CVD(Chemical Vapor Deposition)法以厚度100 nm將SiN層成膜。 繼而藉由濺鍍法將鈦成膜,其後,藉由光微影法進行圖案化,形成掃描信號線。 其次,於形成有掃描信號線之玻璃基板整體上藉由CVD法以厚度100 nm將SiN層成膜。(將至此為止視為下部基板2a) 繼而,於下部基板2a上形成非晶矽層256,於430℃下進行1小時脫氫退火,繼而照射準分子雷射,藉此形成LTPS層。 其後,於下部基板2a之整個面上藉由旋轉塗佈法塗佈感光性之丙烯酸系樹脂,藉由光微影法進行曝光、顯影,形成具備複數個接觸孔257之258。成為藉由該接觸孔257而使各LTPS256之一部分露出之狀態。 其次於形成有層間絕緣膜258之下部基板2a之整個面上藉由濺鍍法將ITO膜成膜,藉由光微影法進行曝光、顯影,藉由蝕刻法進行圖案化,以與各LTPS成對之方式形成下部電極259。 再者,於各接觸孔257中,將貫穿層間絕緣膜258之下部電極252與LTPS256電性連接。 其次,形成間隔壁251後,於由間隔壁251劃分之各空間內形成電洞傳輸層253、發光層254。又,以覆蓋發光層254及間隔壁251之方式形成上部電極255。藉由上述步驟而製作有機EL基板25。 其次,對依序形成有玻璃基板、本實施形態之聚醯亞胺膜及SiN層之密封基板2b之周邊塗佈紫外線硬化樹脂,於氬氣環境中使密封基板2b與有機EL基板接著,藉此封入有機EL元件。藉此,於各有機EL元件與密封基板2b之間形成中空部261。 對如此形成之積層體之下部基板2a側及密封基板2b側照射準分子雷射(波長308 nm,重複頻率300 Hz),以剝離整個面所需之最小能量進行剝離。 對該積層體進行剝離後之基板翹曲、點亮試驗、積層體之白濁評價之有無之評價。又,亦實施熱循環試驗。結果示於表6。 <基板翹曲> ◎:無翹曲者 ○:僅有少量翹曲者 △:因翹曲而捲曲者 <點亮試驗> ○:點亮者 ×:未點亮者 <積層體白濁評價> 形成積層體後,將裝置整體為透明者視為○,將稍許白濁者視為△,將白濁者視為×。 <熱循環試驗> 使用Espec製造之熱循環試驗機,對-5℃與60℃分別以30分鐘(槽之移動時間為1分鐘)進行1000個循環試驗後,進行外觀觀察。 將無剝離或鼓出者視為○,將試驗後僅觀察到一部分剝離或鼓出者視為△,將試驗後觀察到整體剝離或鼓出者視為×。 [表6] [實施例54~58、比較例14] 使用聚醯亞胺前驅體清漆(P-1、P-11、P-20、P-22、P-27、P-33、P-45)進行上述積層體之製造時,除了將LTPS變更為IGZO以外進行積層體製造,進行上述試驗。結果示於表7。 [表7] [實施例59~63、比較例15] 對於提供YI為20以下、膜厚0.1微米時之308 nm之吸光度為0.6以上且2.0以下、伸長率為15%以上之聚醯亞胺前驅體清漆(P-1、P-11、P-20、P-27、P-33、P-45),對以上述雷射剝離時之雷射剝離所需之最小能量及對最小能量加10 mJ/cm2 所得之能量進行照射時之灰塵(灰分)進行評價。將完全未產生灰塵者視為○,將觀察到少量灰塵者視為△,將整體觀察到灰塵者視為×。結果示於表8。 [表8] 本發明並不限定於上述實施形態,可於不偏離發明之主旨之範圍內進行各種變更而實施。 [產業上之可利用性] 由本發明之聚醯亞胺前驅體形成之樹脂膜例如除了可應用於半導體體絕緣膜、TFT-LCD絕緣膜、電極保護膜等外,亦可於軟性顯示器之製造、觸控面板ITO電極用基板等中尤佳地用作基板。Hereinafter, an exemplary embodiment of the present invention (hereinafter simply referred to as "embodiment") will be described in detail. The present invention is not limited to the following embodiments, and various modifications can be made without departing from the spirit and scope of the invention. Moreover, the characteristic value described in the present invention means a value measured by the method described in the item of [Example] or the method which the manufacturer understands by the same method unless otherwise specified. <Resin Composition> The resin composition provided in one aspect of the present invention contains (a) a polyimine precursor and (b) an organic solvent. Hereinafter, each component will be described in order. [Polyimine precursor] The polyimine precursor system as the first aspect of the present embodiment has a polyimine precursor having the following characteristics: the (a1) polyimine precursor, which is 1/1 99≦ (the number of moles of the structural unit L/the number of moles of the structural unit M) ≦99/1 contains: the structural unit L represented by the following general formula (1): [Chem. 15] {式,X 1 It represents the four-valent base of carbon number 4 to 32. R 1 , R 2 , R 3 Each of the organic groups having a carbon number of 1 to 20 is independently represented. n represents 0 or 1. And a, b, and c are integers of 0 to 4}; and the structural unit M represented by the following general formula (2): [Chem. 16] {式,X 2 It represents the four-valent base of carbon number 4 to 32. Y is at least one selected from the group consisting of the following general formulae (3), (4), and (5)}. [化17] [化18] [Chemistry 19] {式,R 4 ~R 11 Each of the organic groups having a carbon number of 1 to 20 is independently represented. d to k is an integer of 0 to 4} The first aspect of the polyimine precursor system of the present embodiment has lower residual stress, less warpage, and yellowness (YI value) when formed into a polyimide film. Small, high elongation. Further, in the first aspect of the present embodiment, the polyimine precursor system has a small yellowness (YI value) in a high temperature region when it is formed into a polyimide film. Here, R 1 ~R 3 There is no limitation as long as it is independently an organic group having one carbon number of 1 to 20 carbon atoms. Examples of such an organic group include an alkyl group such as a methyl group, an ethyl group or a propyl group; a halogen-containing group such as a trifluoromethyl group; an alkoxy group such as a methoxy group or an ethoxy group; and the like. Among them, from the viewpoint of YI in a high temperature region, a methyl group is preferred. Here, a, b, c, and d are not limited as long as they are integers of 0 to 4. Among them, from the viewpoint of YI and residual stress, an integer of 0 to 2 is preferable, and it is particularly preferably 0 from the viewpoint of YI in a high temperature region. Here, n is 0 or 1. Among them, from the viewpoint of YI in the high temperature region, it is preferably 0. Moreover, the lower limit of the molar ratio of the structural unit L to the structural unit M (the number of moles of the structural unit L / the number of moles of the structural unit M) may be 5/95, may be 10/90, or may be 20/ 80, can also be 30/70, or 40/60. The upper limit of the molar ratio of the structural unit L to the structural unit M (the number of moles of the structural unit L / the number of moles of the structural unit M) may be 95/5, or may be 90/10 or 80/20. It can also be 70/30 or 60/40. X 1 , X 2 They are independently the basis of the four valences of carbon numbers 4 to 32, which may be the same or different. A tetravalent organic group derived from the following tetracarboxylic dianhydride can be exemplified. Specific examples of the tetracarboxylic dianhydride include an aromatic tetracarboxylic dianhydride having a carbon number of 8 to 36, an aliphatic tetracarboxylic dianhydride having a carbon number of 6 to 36, and a carbon number of 6 to 36. A compound of 36 alicyclic tetracarboxylic dianhydride. Among them, from the viewpoint of the yellowness in the high temperature region, an aromatic tetracarboxylic dianhydride having a carbon number of 8 to 36 is preferred. The carbon number here also includes the number of carbons contained in the carboxyl group. More specifically, as the aromatic tetracarboxylic dianhydride having a carbon number of 8 to 36, for example, 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (hereinafter also referred to as 6FDA) , 5-(2,5-di-oxotetrahydro-3-furanyl)-3-methyl-cyclohexene-1,2-dicarboxylic anhydride, pyromellitic dianhydride (hereinafter also referred to as PMDA) ), 1,2,3,4-benzenetetracarboxylic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 2,2',3,3'-diphenyl Ketotetracarboxylic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride (hereinafter also referred to as BPDA), 3,3',4,4'-diphenylphosphonium tetracarboxylic acid Anhydride, 2,2',3,3'-biphenyltetracarboxylic dianhydride, methylene-4,4'-diphthalic dianhydride, 1,1-ethylene-4,4'- Diphthalic dianhydride, 2,2-propylene-4,4'-diphthalic dianhydride, 1,2-extended ethyl-4,4'-diphthalic dianhydride, 1,3-trimethylene-4,4'-diphthalic dianhydride, 1,4-tetramethylene-4,4'-diphthalic dianhydride, 1,5-penta Base-4,4'-diphthalic dianhydride, 4,4'-oxydiphthalic dianhydride (hereinafter also referred to as ODPA), p-phenylene bis(trimellitic anhydride) (hereinafter also Recorded as TAHQ), thio-4,4'-diphthalic dianhydride Sulfonyl-4,4'-diphthalic dianhydride, 1,3-bis(3,4-dicarboxyphenyl)phthalic anhydride, 1,3-bis(3,4-dicarboxyphenoxyl) Phthalic anhydride, 1,4-bis(3,4-dicarboxyphenoxy)phthalic anhydride, 1,3-bis[2-(3,4-dicarboxyphenyl)-2-propyl] Phthalic anhydride, 1,4-bis[2-(3,4-dicarboxyphenyl)-2-propyl]benzene dianhydride, bis[3-(3,4-dicarboxyphenoxy)phenyl] Methane dianhydride, bis[4-(3,4-dicarboxyphenoxy)phenyl]methane dianhydride, 2,2-bis[3-(3,4-dicarboxyphenoxy)phenyl]propane II Anhydride, 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]propane dianhydride, bis(3,4-dicarboxyphenoxy)dimethyl phthalane dianhydride, 1,3 - bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethyldioxanane dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1,4, 5,8-naphthalenetetracarboxylic dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 3,4,9,10-decanetetracarboxylic dianhydride, 2,3,6,7-anthracene Tetracarboxylic dianhydride, 1,2,7,8-phenanthrenetetracarboxylic dianhydride, and the like. Examples of the aliphatic tetracarboxylic dianhydride having 6 to 50 carbon atoms include ethyltetracarboxylic dianhydride and 1,2,3,4-butanetetracarboxylic dianhydride; and the carbon number is Examples of the alicyclic tetracarboxylic dianhydride of 6 to 36 include 1,2,3,4-cyclobutanetetracarboxylic dianhydride, cyclopentane tetracarboxylic dianhydride, and cyclohexane-1,2. , 3,4-tetracarboxylic dianhydride, cyclohexane-1,2,4,5-tetracarboxylic dianhydride (hereinafter referred to as CHDA), 3,3',4,4'-bicyclohexyltetracarboxylic acid Acid dianhydride, carbonyl-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, methylene-4,4'-bis(cyclohexane-1,2-dicarboxylic acid a dianhydride, 1,2-extended ethyl-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,1-ethylene-4,4'-bis (cyclic) Hexane-1,2-dicarboxylic acid) dianhydride, 2,2-propylene-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, oxy-4,4 '-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, thio-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, sulfonyl-4, 4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, bicyclo[2,2,2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride, rel- [1S,5R,6R]-3-oxabicyclo[3,2,1]octane-2,4-dione-6-spiro-3'-(tetrahydrofuran-2',5'-dione), 4-(2,5-di-side oxytetrahydrofuran-3-yl)-1,2,3,4- Decalin-1,2-dicarboxylic acid anhydride, ethylene glycol - bis - (3,4-dicarboxylic anhydride) ether and the like. From the viewpoint of the balance between CTE (Coefficient of Thermal Expansion), chemical resistance, Tg (Glass Transition Temperature) and yellowness in a high temperature region, PMDA, BPDA, TAHQ, ODPA, more preferably BPDA, TAHQ. The polyimine precursor of the embodiment can also be made into a polyamidoximine precursor by using a dicarboxylic acid in addition to the above tetracarboxylic dianhydride without damaging its properties. By using such a precursor, the obtained film can be adjusted in various properties such as an increase in mechanical elongation, an increase in glass transition temperature, and a decrease in yellowness. Examples of such a dicarboxylic acid include a dicarboxylic acid having an aromatic ring and an alicyclic dicarboxylic acid. More preferably, it is at least one compound selected from the group consisting of an aromatic dicarboxylic acid having 8 to 36 carbon atoms and an alicyclic dicarboxylic acid having 6 to 34 carbon atoms. The carbon number here also includes the number of carbons contained in the carboxyl group. Among these, a dicarboxylic acid having an aromatic ring is preferred. Specific examples thereof include isophthalic acid, terephthalic acid, 4,4'-biphenyldicarboxylic acid, 3,4'-biphenyldicarboxylic acid, and 3,3'-biphenyldicarboxylic acid. , 1,4-naphthalene dicarboxylic acid, 2,3-naphthalene dicarboxylic acid, 1,5-naphthalene dicarboxylic acid, 2,6-naphthalene dicarboxylic acid, 4,4'-sulfonyl bisbenzoic acid, 3 , 4'-sulfonyl bisbenzoic acid, 3,3'-sulfonyl bisbenzoic acid, 4,4'-oxybisbenzoic acid, 3,4'-oxybisbenzoic acid, 3,3'- Oxydibenzoic acid, 2,2-bis(4-carboxyphenyl)propane, 2,2-bis(3-carboxyphenyl)propane, 2,2'-dimethyl-4,4'-biphenyl Dicarboxylic acid, 3,3'-dimethyl-4,4'-biphenyldicarboxylic acid, 2,2'-dimethyl-3,3'-biphenyldicarboxylic acid, 9,9-bis ( 4-(4-carboxyphenoxy)phenyl)anthracene, 9,9-bis(4-(3-carboxyphenoxy)phenyl)anthracene, 4,4'-bis(4-carboxyphenoxy) Biphenyl, 4,4'-bis(3-carboxyphenoxy)biphenyl, 3,4'-bis(4-carboxyphenoxy)biphenyl, 3,4'-bis(3-carboxyphenoxy Biphenyl, 3,3'-bis(4-carboxyphenoxy)biphenyl, 3,3'-bis(3-carboxyphenoxy)biphenyl, 4,4'-bis(4-carboxyphenoxyl) ())-P-triphenyl, 4,4'-bis(4-carboxyphenoxy)-m-triphenyl, 3,4'-bis(4-carboxyphenoxy)-para-triphenyl, 3,3' - double (4-carboxyl Phenyloxy)-terphenyl, 3,4'-bis(4-carboxyphenoxy)-m-triphenyl, 3,3'-bis(4-carboxyphenoxy)-m-triphenyl, 4,4'-bis(3-carboxyphenoxy)-para-triphenyl, 4,4'-bis(3-carboxyphenoxy)-m-triphenyl, 3,4'-bis(3-carboxybenzene Oxy))-p-triphenyl, 3,3'-bis(3-carboxyphenoxy)-para-triphenyl, 3,4'-bis(3-carboxyphenoxy)-m-triphenyl, 3,3 '-bis(3-carboxyphenoxy)-m-triphenyl, 1,1-cyclobutanedicarboxylic acid, 1,4-cyclohexanedicarboxylic acid, 1,2-cyclohexanedicarboxylic acid, 4,4'-benzophenone dicarboxylic acid, 1,3-phenylenediacetic acid, 1,4-phenylenediacetic acid, and the like; and 5-amino group described in International Publication No. 2005/068535 Isophthalic acid derivatives and the like. When the dicarboxylic acid is actually copolymerized into a synthetic polymer, it may be used in the form of a ruthenium chloride or an active ester derived from sulfonium chloride or the like. The weight average molecular weight (Mw) of the polyimide precursor of the present embodiment is preferably 10,000 to 300,000, particularly preferably 30,000 to 200,000. When the weight average molecular weight is more than 10,000, mechanical properties such as elongation and breaking strength are excellent, residual stress is low, and YI is low. When the weight average molecular weight is less than 300,000, the weight average molecular weight can be easily controlled at the time of synthesis of polyamic acid, and a resin composition having a moderate viscosity can be obtained, and the coatability of the resin composition becomes good. In the present invention, the weight average molecular weight is a value obtained by gel permeation chromatography (hereinafter also referred to as GPC) in the form of a standard polystyrene equivalent value. In the polyimine precursor of the present embodiment, the content of the molecule having a molecular weight of less than 1,000 is preferably less than 5% by mass, more preferably less than 1% by mass, based on the total amount of the polyimide intermediate. The residual stress of the polyimide film formed from the resin composition obtained by using such a polyimide precursor is lowered, and the haze of the inorganic film formed on the polyimide film is changed. It is better from a low point of view. The content of the molecule having a molecular weight of less than 1,000 relative to the total amount of the polyimide intermediate precursor can be calculated from the peak area obtained by GPC measurement using a solution in which the polyimide precursor is dissolved. The diamine represented by the following formula (6) can be exemplified as the diamine used in the structural unit represented by the formula (1) of the present embodiment. [Chemistry 20] (where, R 1 , R 2 , R 3 Each of the organic groups having a carbon number of 1 to 20 is independently represented. n represents 0 or 1. And a, b, and c are integers from 0 to 4) as R 1 , R 2 Examples thereof include an alkyl group such as a methyl group, an ethyl group or a propyl group; a halogen-containing group such as a trifluoromethyl group; an alkoxy group such as a methoxy group or an ethoxy group; and the like. Among them, from the viewpoint of YI in a high temperature region, a methyl group is preferred. Here, a and b are not limited as long as they are integers of 0 to 4. Among them, from the viewpoint of YI and residual stress, an integer of 0 to 2 is preferable, and it is particularly preferably 0 from the viewpoint of YI in a high temperature region. More specifically, in the case where n is 0, 4-aminophenyl-4-aminobenzoic acid ester (APAB), 2-methyl-4-aminophenyl-4-amine can be exemplified Benzobenzoate (ATAB), 4-aminophenyl-3-aminobenzoate (4,3-APAB), and the like. In the case where n is 1, [4-(4-aminobenzimidyl)oxyphenyl]4-aminobenzoate or the like can be exemplified. The diamine represented by the following formula (7) is exemplified as the diamine used in the structural unit represented by the formula (3) of the present embodiment. [Chem. 21] (where, R 4 , R 5 Each of the organic groups having a carbon number of 1 to 20 is independently represented. d, e is an integer from 0 to 4) Here, R 4 , R 5 There is no limitation as long as it is independently an organic group having one carbon number of 1 to 20 carbon atoms. Examples of such an organic group include an alkyl group such as a methyl group, an ethyl group or a propyl group; a halogen-containing group such as a trifluoromethyl group; an alkoxy group such as a methoxy group or an ethoxy group; and the like. Among them, from the viewpoint of YI in a high temperature region, a methyl group is preferred. Here, c and d are not limited as long as they are integers of 0 to 4. Among them, from the viewpoint of YI and residual stress, an integer of 0 to 2 is preferable, and it is particularly preferably 0 from the viewpoint of YI in a high temperature region. More specifically, 4,4'-diaminodiphenylanthracene and 3,3'-diaminodiphenylphosphonium can be exemplified. The diamine represented by the following formula (8) can be exemplified as the diamine used in the structural unit represented by the formula (4) of the present embodiment. [化22] Here, R 6 And R 7 There is no limitation as long as it is independently an organic group having one carbon number of 1 to 20 carbon atoms. Examples of such an organic group include an alkyl group such as a methyl group, an ethyl group or a propyl group; a halogen-containing group such as a trifluoromethyl group; an alkoxy group such as a methoxy group or an ethoxy group; and the like. Among them, from the viewpoint of YI in a high temperature region, a methyl group is preferred. R 8 With R 9 There is no limitation as long as it is independently an organic group having one carbon number of 1 to 20, a hydroxyl group or a halogen atom. Examples of the organic group include an alkyl group such as a methyl group, an ethyl group or a propyl group; a halogen-containing group such as a trifluoromethyl group; an alkoxy group such as a methoxy group or an ethoxy group; and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. f, g, h, and i are not limited as long as they are independently integers of 0 to 4. Among them, from the viewpoint of YI and residual stress, an integer of 0 to 2 is preferable, and it is particularly preferably 0 from the viewpoint of YI in a high temperature region. Z may, for example, be a single bond, a methylene group, an ethyl group, an ether, a ketone or the like. Among them, from the viewpoint of YI in the high temperature region, it is more preferably a single bond. More specifically, it can be exemplified: 9,9-bis(aminophenyl)anthracene, 9,9-bis(4-amino-3-methylphenyl)anthracene, 9,9-bis(4-amino group 3-fluorophenyl)anthracene, 9,9-bis(4-hydroxy-3-aminophenyl)anthracene, 9,9-bis[4-(4-aminophenoxy)phenyl]anthracene, etc. Preferably, one or more selected from the group consisting of these are used. The diamine represented by the following formula (9) can be exemplified as the diamine used in the structural unit represented by the formula (5) of the present embodiment. [化23] Here, R 10 And R 11 There is no limitation as long as it is independently an organic group having one carbon number of 1 to 20 carbon atoms. Examples of such an organic group include an alkyl group such as a methyl group, an ethyl group or a propyl group; a halogen-containing group such as a trifluoromethyl group; an alkoxy group such as a methoxy group or an ethoxy group; and the like. Among them, from the viewpoint of YI in a high temperature region, a methyl group is preferred. Further, j and k are not limited as long as they are each independently an integer of 0 to 4. Among them, from the viewpoint of YI and residual stress, an integer of 0 to 2 is preferable, and it is particularly preferably 0 from the viewpoint of YI in a high temperature region. More specifically, 2,2'-bis(trifluoromethyl)benzidine or the like can be exemplified. The polyimine film formed by the polyimide precursor of the first aspect of the present embodiment has a low residual stress, less warpage, a small yellowness (YI value) in a high temperature region, and a high elongation. As a second aspect of the present invention, there may be provided a polyimine precursor which is a (a2) polyimine precursor comprising a structural unit represented by the following formula (10): ] Further, the weight average molecular weight is 30,000 or more and 300,000 or less. {式,X 3 Indicated from 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA) and 4,4'-biphenyl bis(trimellitic acid monoester anhydride) A tetravalent base of at least one of (TAHQ). R 1 , R 2 , R 3 Each of the organic groups having a carbon number of 1 to 20 is independently represented. n represents 0 or 1. And a, b, and c are integers from 0 to 4} Here, X 3 The tetravalent organic group derived from at least one selected from the group consisting of ODPA, BPDA, and TAHQ is not limited, and from the viewpoints of CTE and Tg, BPDA and TAHQ are preferred. Here, R 1 ~R 3 There is no limitation as long as it is independently an organic group having one carbon number of 1 to 20 carbon atoms. Examples of such an organic group include an alkyl group such as a methyl group, an ethyl group or a propyl group; a halogen-containing group such as a trifluoromethyl group; an alkoxy group such as a methoxy group or an ethoxy group; and the like. Among them, from the viewpoint of YI in a high temperature region, a methyl group is preferred. Here, a, b, c, and d are not limited as long as they are integers of 0 to 4. Among them, from the viewpoint of YI and residual stress, an integer of 0 to 2 is preferable, and it is particularly preferably 0 from the viewpoint of YI in a high temperature region. Here, n is 0 or 1. Among them, from the viewpoint of YI in the high temperature region, it is preferably 0. As the diamine used in the structure represented by the above formula (10), a diamine used in the above formula (6) can be used. The second aspect of the polyimide precursor has a weight average molecular weight (Mw) of 30,000 to 300,000. When the weight average molecular weight is more than 30,000, mechanical properties such as elongation and breaking strength are excellent, residual stress is low, and YI is low. When the weight average molecular weight is less than 300,000, the weight average molecular weight can be easily controlled at the time of synthesis of polyamic acid, and a resin composition having a moderate viscosity can be obtained, and the coatability of the resin composition becomes good. Among them, the weight average molecular weight (Mw) is more preferably 35,000 or more and 250,000 or less, and particularly preferably 40,000 or more and 230,000 or less. In the second aspect of the present invention, the content of the molecule having a molecular weight of less than 1,000 is preferably less than 5% by mass, more preferably less than the total amount of the polyimide precursor. 1% by mass. The residual stress of the polyimide film formed from the resin composition obtained by using the polyimide precursor is low, and the haze of the inorganic film formed on the polyimide film is lowered. It is better. The content of the molecule having a molecular weight of less than 1,000 relative to the total amount of the polyimide intermediate precursor can be calculated from the peak area obtained by GPC measurement using a solution in which the polyimide precursor is dissolved. The polyimide precursor of the second aspect of the present embodiment is excellent in storage stability and excellent in coatability. Moreover, the polyimine film formed by the polyimide precursor of the second aspect of the present embodiment has low residual stress, less warpage, small yellowness (YI value), high elongation, and relatively high breaking strength. high. In the first aspect and the second aspect of the polyimide precursor, the above formula (6) to (9) can be used without impairing the elongation, strength, stress, and yellowness. Other diamines other than the diamines indicated. Examples of the other diamines include p-phenylenediamine, m-phenylenediamine, 4,4'-diaminodiphenyl sulfide, 3,4'-diaminodiphenyl sulfide, and 3,3'-. Diaminodiphenyl sulfide, 4,4'-diaminobiphenyl, 3,4'-diaminobiphenyl, 3,3'-diaminobiphenyl, 4,4'-diaminodi Benzophenone, 3,4'-diaminobenzophenone, 3,3'-diaminobenzophenone, 4,4'-diaminodiphenylmethane, 3,4'-diamine Diphenylmethane, 3,3'-diaminodiphenylmethane, 1,4-bis(4-aminophenoxy)benzene, 1,3-bis(4-aminophenoxy)benzene , 1,3-bis(3-aminophenoxy)benzene, bis[4-(4-aminophenoxy)phenyl]anthracene, 4,4-bis(4-aminophenoxy) Benzene, 4,4-bis(3-aminophenoxy)biphenyl, bis[4-(4-aminophenoxy)phenyl]ether, bis[4-(3-aminophenoxy) Phenyl]ether, 1,4-bis(4-aminophenyl)benzene, 1,3-bis(4-aminophenyl)benzene, 9,10-bis(4-aminophenyl)anthracene, 2,2-bis(4-aminophenyl)propane, 2,2-bis(4-aminophenyl)hexafluoropropane, 2,2-bis[4-(4-aminophenoxy)benzene Propyl, 2,2-bis[4-(4-aminophenoxy)phenyl)hexafluoropropane, 1,4-bis(3-aminopropyldimethylmethylalkyl)benzene, etc. good Use of one or more of those selected. The content of the above other diamine in all the diamines is preferably 20 mol% or less, and more preferably 10 mol% or less. [Production of Polyimine Precursor] The polyimine precursor (polylysine) of the present invention can be used for the tetracarboxylic dianhydride and the structural unit represented by the above formula (1) An amine (for example, APAB) and a diamine (for example, 4,4'-DAS) used for the structural unit represented by the above formula (2) are synthesized by a polycondensation reaction. The reaction is preferably carried out in a suitable solvent. Specifically, for example, a method in which a specific amount of APAB and 4,4′-DAS are dissolved in a solvent, and a specific amount of tetracarboxylic dianhydride is added to the obtained diamine solution, followed by stirring. In the diamine component, the molar ratio of the diamine used for the structural unit represented by the general formula (1) to the diamine used for the structural unit represented by the general formula (2) is from 99/1 to 1/99. Yes, there is no limit. In the diamine component, when the diamine used in the structural unit represented by the formula (2) is 1 mol% or more, the yellowness tends to be good, and it is used in the structural unit represented by the formula (1). When the amount of the diamine is 1 mol% or more, the warpage after the formation of the inorganic film on the obtained polyimide film tends to be good. The molar amount of the diamine used for the structural unit represented by the general formula (1) and the diamine used for the structural unit represented by the general formula (2) is preferably 95/5 to 50/50, more preferably 90/. 10 to 50/50. The molar ratio of the diamine used for the structural unit represented by the general formula (1) to the diamine used for the structural unit represented by the general formula (2) may be 80/20 to 50/50 or 70. /30~50/50. It is preferred that the molar ratio of the diamine used for the structural unit represented by the general formula (1) is set to be higher than the molar ratio of the diamine used for the structural unit represented by the general formula (2). Further, the second aspect of the present invention may be obtained by using a tetracarboxylic dianhydride (for example, TAHQ) with a diamine (for example, APAB) used for the structural unit represented by the above formula (6). The polycondensation reaction is carried out to synthesize. The reaction is preferably carried out in a suitable solvent. Specifically, for example, a method in which a specific amount of APAB is dissolved in a solvent, and a specific amount of TAHQ is added to the obtained diamine solution, followed by stirring. Regarding the ratio (mol ratio) of the tetracarboxylic dianhydride component to the diamine component in synthesizing the above polyimine precursor, the coefficient of thermal linear expansion, residual stress, elongation, and yellowness of the obtained resin film (hereinafter also From the viewpoint that YI) is controlled within a desired range, it is preferably set to tetracarboxylic dianhydride: diamine = 100: 90 to 100: 110 (relative to 1 mole of tetracarboxylic dianhydride, The range of the diamine is from 0.90 to 1.10 mole parts, more preferably from 100:95 to 100:105 (relative to 1 part of the acid dianhydride and 0.95 to 1.05 mole parts of the diamine). In the present embodiment, in synthesizing polyglycolic acid which is a preferred polyimine precursor, the molecular weight can be controlled by adjusting the ratio of the tetracarboxylic dianhydride component to the diamine component and adding a blocking agent. The closer the ratio of the acid dianhydride component to the diamine component is 1:1, and the smaller the amount of the terminal blocking agent used, the larger the molecular weight of the polyamic acid. As a tetracarboxylic dianhydride component and a diamine component, it is recommended to use a high purity product. The purity is preferably 98% by mass or more, more preferably 99% by mass or more, and still more preferably 99.5% by mass or more. When a plurality of acid dianhydride components or diamine components are used in combination, the acid dianhydride component or the diamine component may have the above-mentioned purity as a whole, but it is preferably all kinds of acid dianhydride components and diamine components used. Each has the above purity. The solvent for the reaction is not particularly limited as long as it is a solvent capable of dissolving the tetracarboxylic dianhydride component and the diamine component and the produced polyglycolic acid and obtaining a polymer having a high molecular weight. Specific examples of such a solvent include an aprotic solvent, a phenol solvent, an ether, and an alcohol solvent. Specific examples of the aprotic solvent include N,N-dimethylformamide (DMF), N,N-dimethylacetamide (DMAc), and N-methyl. -2-pyrrolidone (NMP), N-methyl caprolactam, 1,3-dimethylimidazolidinone, tetramethylurea, the following formula (13): [Chem. 25] Where R 12 = Equamide M100 (trade name: manufactured by Idemitsu Kosan Co., Ltd.) and R 12 = a guanamine solvent such as Equamide B100 (trade name: manufactured by Idemitsu Kosan Co., Ltd.) represented by n-butyl group; a lactone solvent such as γ-butyrolactone or γ-valerolactone; hexamethylphosphonium, six a phosphorus-containing guanamine-based solvent such as methylphosphonium triamine; a sulfur-containing solvent such as dimethyl hydrazine, dimethyl hydrazine or cyclobutyl hydrazine; a ketone solvent such as cyclohexanone or methylcyclohexanone; A tertiary amine solvent such as a pyridine or a pyridine; an ester solvent such as an acetic acid (2-methoxy-1-methylethyl) ester; and the phenol solvent: phenol, o-cresol, and phenol. Cresol, p-cresol, 2,3-xylenol, 2,4-xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, 3,5 - xylenol or the like; examples of the ether and the alcohol-based solvent include 1,2-dimethoxyethane, bis(2-methoxyethyl)ether, and 1,2-bis(2-methyl) Oxyethoxyethoxy)ethane, bis[2-(2-methoxyethoxy)ethyl]ether, tetrahydrofuran, 1,4-two Alkane, etc. The boiling point of the solvent used in the synthesis of the polyamic acid is preferably from 60 to 300 ° C, more preferably from 140 to 280 ° C, still more preferably from 170 to 270 ° C. If the boiling point of the solvent is higher than 300 ° C, the drying step takes a long time. On the other hand, when the boiling point of the solvent is less than 60 ° C, the surface of the resin film is rough in the drying step, and bubbles or the like are mixed in the resin film, so that a uniform film cannot be obtained. Thus, from the viewpoint of solubility and edge shrinkage at the time of coating, a solvent having a boiling point of preferably 170 to 270 ° C, more preferably a vapor pressure of 20 ° C or less at 20 ° C is preferably used. More specifically, it is preferred to use one or more selected from the group consisting of N-methyl-2-pyrrolidone, γ-butyrolactone, and a compound represented by the above formula (11). The moisture content in the solvent is preferably 3,000 ppm by mass or less. These solvents may be used singly or in combination of two or more. In the (a) polyimine precursor of the present embodiment, the content of the molecule having a molecular weight of less than 1,000 is preferably less than 5% by mass. The reason why the molecule having a molecular weight of less than 1,000 is present in the (a) polyimine precursor is that it is related to the moisture content of the solvent used in the synthesis. In other words, it is considered that the acid anhydride group of a part of the acid dianhydride monomer is hydrolyzed to a carboxyl group by water, and it is not polymerized and remains in a low molecular state. Therefore, the amount of water of the solvent used in the above polymerization reaction is preferably as small as possible. The water content of the solvent is preferably 3,000 ppm by mass or less, and more preferably 1,000 ppm by mass or less. It is considered that the moisture content of the solvent is related to the following factors: the grade of the solvent to be used (dehydration grade, general grade, etc.), the solvent container (bottle, 18 L can, canister, etc.), and the storage state of the solvent (whether or not the rare gas is enclosed) Etc.), the time from the opening to the use (used immediately after opening, or after use after opening), etc. Further, it is considered to be related to the replacement of the rare gas in the reactor before the synthesis, the presence or absence of the distribution of the rare gas in the synthesis, and the like. Therefore, it is recommended to use a high-purity product as a raw material, use a solvent having a small amount of water, and take measures before the reaction and in the reaction to prevent moisture from the environment from being mixed into the (a) polyimide imide precursor. Within the system. When each monomer component is dissolved in a solvent, it can be heated as needed. (a) The reaction temperature at the time of synthesis of the polyimide precursor is preferably from 0 ° C to 120 ° C, more preferably from 40 ° C to 100 ° C, still more preferably from 60 to 100 ° C. By carrying out the polymerization reaction at this temperature, a polyimide intermediate precursor having a high degree of polymerization can be obtained. The polymerization time is preferably from 1 to 100 hours, more preferably from 2 to 10 hours. A polyimine precursor which can be a uniform polymerization degree can be obtained by setting the polymerization time to 1 hour or more, and a polyimine precursor having a high degree of polymerization can be obtained by setting it to 100 hours or less. In a preferred embodiment of the present embodiment, the (a1) polyimine precursor and the (a2) polyimine precursor have the following characteristics. After the solution obtained by dissolving the (a) polyimine precursor in a solvent (for example, N-methyl-2-pyrrolidone) is applied onto the surface of the support, the solution is placed under a nitrogen atmosphere ( For example, in a nitrogen gas having an oxygen concentration of 2,000 ppm or less, heated at 300 to 550 ° C (for example, 430 ° C) (for example, 1 hour) to imidize the polyimine precursor oxime, 10 μm The yellowness of the film thickness is 30 or less. After the solution obtained by dissolving the (a) polyimine precursor in a solvent (for example, N-methyl-2-pyrrolidone) is applied onto the surface of the support, the solution is placed under a nitrogen atmosphere ( For example, in a nitrogen gas having an oxygen concentration of 2,000 ppm or less, heated at 300 to 550 ° C (for example, 430 ° C) (for example, 1 hour) to imidize the polyimine precursor ruthenium, residual stress It is 25 MPa or less. The polyimine precursor of the present embodiment may further contain a polyimine precursor having a structure represented by the following formula (14), as long as it does not impair the desired properties of the present invention: [Chem. 26] {In the general formula (14), there are a plurality of R 13 Each is independently a hydrogen atom, an aliphatic hydrocarbon having a carbon number of 1 to 20, or a monovalent aromatic group, X 4 It is a tetravalent organic group having 4 to 32 carbon atoms, and Y is a divalent organic group having 4 to 32 carbon atoms. However, the structural unit corresponding to the above formula (1) and the above formula (6) is excluded. In the general formula (14), R 13 It is preferably a hydrogen atom. Also, in terms of heat resistance, reduction in YI value, and total light transmittance, X 3 It is preferably a tetravalent aromatic group. Further, Y is preferably a divalent aromatic group or an alicyclic group from the viewpoint of heat resistance, reduction in YI value, and total light transmittance. The mass ratio of the polyimine precursor containing the structural unit represented by the general formula (14) in the (a) polyfluorene precursor of the present embodiment is relative to (a) the polyimine precursor All of them are preferably 80% by mass or less, and more preferably 70% by mass or less from the viewpoint of a decrease in the YI value and the oxygen dependency of the total light transmittance. In a preferred embodiment of the present embodiment, a portion of the (a1) polyimine precursor and the (a2) polyimine precursor system may be imidized by hydrazine. In this case, the imidization ratio is preferably 80% or less, and more preferably 50% or less. The partial ruthenium imidization can be obtained by heating the above (a) polyimine precursor to perform dehydration ring closure. The heating may be carried out at a temperature of preferably from 120 to 200 ° C, more preferably from 150 to 180 ° C, preferably from 15 minutes to 20 hours, more preferably from 30 minutes to 10 hours. Further, N,N-dimethylformamide dimethyl acetal or N,N-dimethylformamide diethyl acetal is added to the polylysine obtained by the above reaction, and heated. After partially or completely esterifying one of the carboxylic acids, it is used as the (a) polyimine precursor of the present embodiment, whereby a resin composition having improved viscosity stability at room temperature storage can be obtained. The ester-modified polylysine may also be obtained by additionally obtaining the above-mentioned acid dianhydride component, and one equivalent of one alcohol and sulfoxide, dicyclohexylcarbazide relative to the acid anhydride group. The dehydration condensing agent such as an amine is reacted in this order, and then subjected to a condensation reaction with the diamine component. The ratio of the (a) polyimine precursor (preferably poly-proline) in the resin composition of the present embodiment is preferably from 3 to 50% by mass, more preferably from the viewpoint of film formability. It is 5 to 40% by mass, and particularly preferably 10 to 30% by mass. <Resin Composition> Another aspect of the present invention provides a resin composition comprising the above (a) polyimine precursor and (b) an organic solvent. The resin composition is typically a varnish. [(b) Organic solvent] The organic solvent (b) of the present embodiment is not particularly limited as long as it can dissolve the (a) polyimine precursor and any other components used arbitrarily. As such an organic solvent (b), those which are described above as a solvent which can be used in the synthesis of the (a) polyimine precursor can be used. Preferred organic solvents are also the same as described above. The (b) organic solvent in the resin composition of the present embodiment may be the same as or different from the solvent used in the synthesis of the (a) polyimine precursor. (b) The organic solvent is preferably an amount of the solid content of the resin composition of from 3 to 50% by mass. In addition, it is preferable to adjust (b) the composition and amount of the organic solvent so that the viscosity (25 ° C) of the resin composition is 500 mPa·s to 100,000 mPa·s. [Other components] The resin composition of the present embodiment may further contain (c) a surfactant, (d) an alkoxydecane compound, etc., in addition to the above components (a) and (b). The resin composition of the present embodiment contains at least one selected from the group consisting of (a) a polyimide intermediate, (b) an organic solvent, (c) a surfactant, and (d) an alkoxydecane compound. . The skeleton of the polyimide precursor is not limited to the skeleton described in the first aspect and the second aspect above. In other words, the skeleton of the polyimide precursor is not particularly limited as long as it is a skeleton represented by the following formula (1). [化27] {式,X 1 It represents the four-valent base of carbon number 4 to 32. R 1 , R 2 , R 3 Each of the organic groups having a carbon number of 1 to 20 is independently represented. n represents 0 or 1. Further, a, b and c are integers of 0 to 4} ((c) Surfactant) The resin composition of the present embodiment can improve the coatability of the resin composition by adding a surfactant. Specifically, generation of streaks of the coating film can be prevented. Examples of such a surfactant include a polyfluorene-based surfactant, a fluorine-based surfactant, and other nonionic surfactants. As such an example, examples of the polyoxymethylene-based surfactant include an organic silicone polymer (KG-640, 642, 643, KP341, X-70-092, and X-70-093). (The above is the trade name, manufactured by Shin-Etsu Chemical Co., Ltd.), SH-28PA, SH-190, SH-193, SZ-6032, SF-8428, DC-57, DC-190 (the above is the trade name, Toray Dow Corning Poly Manufactured by the company, SILWET L-77, L-7001, FZ-2105, FZ-2120, FZ-2154, FZ-2164, FZ-2166, L-7604 (above, trade name, manufactured by Nippon Unicar), DBE-814, DBE-224, DBE-621, CMS-626, CMS-222, KF-352A, KF-354L, KF-355A, KF-6020, DBE-821, DBE-712 (Gelest), BYK-307 , BYK-310, BYK-378, BYK-333 (the above is a trade name, manufactured by BYK-Chemie Japan), Glanol (trade name, manufactured by Kyoeisha Chemical Co., Ltd.), etc.; as a fluorine-based surfactant, for example, MEGAFAC F171, F173, R-08 (manufactured by Dainippon Ink and Chemicals Co., Ltd., trade name), Fluorad FC4430, FC4432 (Sumitomo 3M Co., Ltd., trade name), etc.; as a nonionic surfactant other than these Examples thereof include: polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenol ether and the like. Among these surfactants, from the viewpoint of coating properties (streak suppression) of the resin composition, a polyfluorene-based surfactant or a fluorine-based surfactant is preferred, and the oxygen concentration in the curing step is YI. From the viewpoint of the influence of the value and the total light transmittance, a polyfluorene-based surfactant is preferred. In the case of using (c) a surfactant, the amount thereof is preferably 0.001 to 5 parts by mass, more preferably 0.01 to 3 parts by mass based on 100 parts by mass of the (a) polyimine precursor in the resin composition. Parts by mass. (d) alkoxy decane compound The resin composition can be made to have sufficient adhesion to the support in the production process of the flexible device or the like in the resin film of the present embodiment. a) The polyamidene precursor is contained in an amount of from 0.01 to 20% by mass based on 100% by mass of the alkoxydecane compound. By setting the content of the alkoxydecane compound in an amount of 100% by mass based on the polyimine precursor to 0.01% by mass or more, good adhesion to the support can be obtained. Moreover, from the viewpoint of storage stability of the resin composition, the content of the alkoxydecane compound is preferably 20% by mass or less. The content of the alkoxydecane compound is more preferably 0.02 to 15% by mass, still more preferably 0.05 to 10% by mass, even more preferably 0.1 to 8% by mass, based on 100 parts by mass of the polyimide intermediate. By using an alkoxydecane compound as an additive of the resin composition of the present embodiment, in addition to improving the adhesion, the coating property of the resin composition can be improved (strip unevenness is suppressed), and the obtained cured film can be lowered. The oxygen concentration dependence of the YI value during curing. Examples of the alkoxydecane compound include 3-ureidopropyltriethoxydecane, bis(2-hydroxyethyl)-3-aminopropyltriethoxydecane, and 3-glycidyloxy group. Propyltrimethoxydecane, γ-aminopropyltrimethoxydecane, γ-aminopropyltripropoxydecane, γ-aminopropyltributoxydecane, γ-aminoethyltriethyl Oxy decane, γ-aminoethyl tripropoxy decane, γ-aminoethyl tributoxy decane, γ-aminobutyl triethoxy decane, γ-aminobutyl trimethoxy decane , γ-aminobutyl tripropoxy decane, γ-aminobutyl tributoxy decane, phenyl decane triol, trimethoxy phenyl decane, trimethoxy (p-tolyl) decane, diphenyl Alkane diol, dimethoxydiphenyl decane, diethoxydiphenyl decane, dimethoxydi-p-tolyl decane, triphenyl decyl alcohol, and alkoxy decane represented by the following structures, respectively The compound or the like is preferably one or more selected from the group consisting of these. [化28] The method for producing the resin composition of the present embodiment is not particularly limited. For example, the following methods can be utilized. When the solvent used in the synthesis of the (a) polyimine precursor is the same as (b) the organic solvent, the synthesized polyimide intermediate precursor solution can be directly used as the resin composition. Further, if necessary, one or more organic solvents and other components may be added to the polyimide precursor in a temperature range from room temperature (25 ° C) to 80 ° C, and the mixture may be used as a resin composition after stirring and mixing. . As the stirring and mixing, a suitable device such as a Sany motor (manufactured by Shinto Chemical Co., Ltd.) equipped with a stirring blade, a rotary revolution mixer, or the like can be used. Further, heat of 40 to 100 ° C can be applied as needed. On the other hand, when the solvent used in the synthesis of the (a) polyimine precursor is different from the (b) organic solvent, the synthesized polymer can be synthesized by a suitable method such as reprecipitation or solvent distillation. After separating the (a) polyimine precursor by solvent removal in the quinone imine precursor solution, add (b) an organic solvent and other components as needed, and stir and mix at a temperature ranging from room temperature to 80 °C. Thereby, a resin composition was prepared. After preparing the resin composition in the above manner, the composition solution is heated, for example, at 130 to 200 ° C for, for example, 5 minutes to 2 hours, whereby one part of the polyimide precursor can be dehydrated to the extent that the polymer is not precipitated.醯imination. Here, the hydrazine imidation ratio can be controlled by controlling the heating temperature and the heating time. By partially imidating the polyimine precursor, the viscosity stability of the resin composition at the time of storage at room temperature can be improved. The range of the imidization ratio is preferably from 5% to 70% from the viewpoint of the balance between the solubility of the polyimide precursor in the resin composition solution and the storage stability of the solution. The resin composition of the present embodiment preferably has a water content of 3,000 ppm by mass or less. The water content of the resin composition is preferably 1,000 ppm by mass or less, and more preferably 500 ppm by mass or less from the viewpoint of the viscosity stability in the case of preserving the resin composition. The solution viscosity of the resin composition of the present embodiment is preferably 500 to 200,000 mPa·s at 25 ° C, more preferably 2,000 to 100,000 mPa·s, and particularly preferably 3,000 to 30,000 mPa·s. The viscosity of the solution can be measured using an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., VISCONICEHD). When the viscosity of the solution is less than 300 mPa·s, coating at the time of film formation is difficult, and if it is higher than 200,000 mPa·s, there is a problem that stirring at the time of synthesis becomes difficult. When the (a) polyimine precursor is synthesized, even if the solution becomes a high viscosity, a resin composition having a more handleable viscosity can be obtained by adding a solvent and stirring it after completion of the reaction. The resin composition of the present embodiment has the following characteristics in a preferred embodiment. After coating the resin composition on the surface of the support to form a coating film, the coating film is heated at 300 ° C to 550 ° C in a nitrogen atmosphere (for example, nitrogen gas having an oxygen concentration of 2,000 ppm or less). The resin film obtained by the imidization of the polyimine precursor contained in the coating film has a yellowness YI of 10 μm or less. After coating the resin composition on the surface of the support to form a coating film, the coating film is heated at 300 ° C to 550 ° C in a nitrogen atmosphere (for example, nitrogen gas having an oxygen concentration of 2,000 ppm or less). The resin film-based residual stress obtained by imidization of the polyimine precursor precursor contained in the coating film is 25 MPa or less. The resin composition of the present embodiment can be preferably used, for example, as a transparent substrate for forming a display device such as a liquid crystal display, an organic electroluminescence display, a field emission display, or an electronic paper. Specifically, it can be used for forming a substrate of a thin film transistor (TFT), a substrate of a color filter, a substrate of a transparent conductive film (ITO, Indium Thin Oxide), or the like. The resin precursor of the present embodiment can form a polyimide film having a residual stress of 25 MPa or less, and thus can be easily applied to a display manufacturing step including a TFT element device on a colorless transparent polyimide substrate. <Resin film> Another aspect of the present invention provides a resin film formed of the above resin precursor. Moreover, still another aspect of the present invention provides a method of producing a resin film from the above resin composition. The resin film of the present embodiment is characterized by comprising: a step of forming a coating film by applying the resin composition on the surface of the support (coating step); and heating the support and the coating film a step of imidizing the polyimine precursor contained in the coating film to form a polyimide film (heating step); and a step of peeling the polyimine resin film from the support (peeling) step). Here, the support is not particularly limited as long as it has heat resistance to the heating temperature in the subsequent step and the peeling property is good. For example, glass: (for example, alkali-free glass) substrate; germanium wafer; PET (polyethylene terephthalate), OPP (stretch polypropylene), polyethylene glycol terephthalate, polyethylene Alcohol naphthalate, polycarbonate, polyimine, polyamidimide, polyether phthalimide, polyether ether ketone, polyether oxime, polyphenylene fluorene, polyphenylene sulfide and other resins Substrate; metal substrates such as stainless steel, aluminum oxide, copper, and nickel. In the case of forming a film-shaped polyimine molded article, for example, a glass substrate, a ruthenium wafer or the like is preferably used, and in the case of forming a film-like or sheet-like polyimide film, for example, it is preferable to contain A support such as PET (polyethylene terephthalate) or OPP (extended polypropylene). As the coating method, for example, application by a knife coater, an air knife coater, a roll coater, a spin coater, a flow coater, a die coater, a bar coater, or the like can be applied. Methods, coating methods such as spin coating, spray coating, dip coating, etc.; printing techniques such as screen printing and gravure printing. The coating thickness is appropriately adjusted depending on the thickness of the desired resin film and the content of the polyimide precursor in the resin composition, and is preferably about 1 to 1,000 μm. The coating step may be carried out at room temperature. However, if the viscosity is to be lowered to improve the workability, the resin composition may be heated at a temperature of from 40 to 80 ° C. The drying step may be carried out after the coating step, or the subsequent heating step may be directly performed by omitting the drying step. This drying step is carried out for the purpose of removing the organic solvent. In the case of performing the drying step, for example, a suitable apparatus such as a hot plate, a box dryer, or a conveyor type dryer can be used. The drying step is preferably carried out at 80 to 200 ° C, more preferably at 100 to 150 ° C. The execution time of the drying step is preferably from 1 minute to 10 hours, more preferably from 3 minutes to 1 hour. A coating film containing a polyimide precursor is formed on the support in the above manner. Then, a heating step is performed. The heating step is a step of removing the organic solvent remaining in the coating film in the drying step, and performing a hydrazine imidization reaction of the polyimide precursor in the coating film to obtain a film comprising polyimine. This heating step can be carried out, for example, using an apparatus such as an inert gas oven, a hot plate, a box dryer, or a transport dryer. This step can be carried out simultaneously with the above drying step, or two steps can be carried out one by one. The heating step can be carried out in an air atmosphere, but it is recommended to carry out in an inert gas atmosphere from the viewpoint of safety and transparency and YI value of the obtained polyimide film. Examples of the inert gas include nitrogen gas, argon gas, and the like. The heating temperature can be appropriately set depending on the kind of the organic solvent (b), and is preferably from 250 ° C to 550 ° C, more preferably from 300 to 450 ° C. When it is 250 ° C or more, the ruthenium imidization is sufficient, and when it is 550 ° C or less, the transparency of the obtained polyimide film is not lowered, and the heat resistance is deteriorated. The heating time is preferably set to about 0.5 to 3 hours. In the present embodiment, the oxygen concentration of the surrounding environment of the heating step is preferably 2,000 ppm by mass or less, and more preferably 100 ppm by mass or less from the viewpoint of transparency and YI value of the obtained polyimide film. Further, it is preferably 10 ppm by mass or less. By heating in an environment having an oxygen concentration of 2,000 ppm by mass or less, the YI value of the obtained polyimide film can be made 30 or less. Depending on the use and purpose of the polyimide film, the peeling step of peeling the resin film from the support may be required after the above heating step. This peeling step is preferably carried out after cooling the resin film on the support to room temperature to about 50 °C. Examples of the peeling step include the following aspects (1) to (4). (1) After the structure comprising the polyimide film/support is produced by the above method, the laser is irradiated from the support side of the structure to etch the interface between the support and the polyimide film. A method of processing, thereby peeling off the polyimide resin. Examples of the type of the laser include a solid (YAG (Yttrium Aluminum Garnet)) laser, a gas (UV (ultraviolet) excimer) laser, and the like. It is preferable to use a spectrum having a wavelength of 308 nm or the like (refer to Japanese Patent Laid-Open Publication No. 2007-512568, Japanese Patent Laid-Open Publication No. 2012-511173, and the like). (2) A release layer is formed on the support before the application of the resin composition on the support, and thereafter, a composition comprising a polyimide film/release layer/support is obtained, and the polyimide film is peeled off. method. Examples of the release layer include a method of using Parylene (registered trademark, manufactured by Japan's Parylene Contract Co., Ltd.), tungsten oxide, and a method of using a release agent such as a vegetable oil, a polyoxygen, a fluorine or an alkyd. (Japanese Patent Laid-Open Publication No. 2010-67957, Japanese Patent Laid-Open Publication No. 2013-179306, etc.). The method (2) may also be used in combination with the laser irradiation of the above (1). (3) A method of obtaining a polyimine resin film by etching a metal with an etchant using an etchable metal substrate as a support and obtaining a constituent comprising a polyimide film/support. As the metal, for example, copper (specifically, electrolytic copper foil "DFF" manufactured by Mitsui Mining Co., Ltd.), aluminum, or the like can be used. As the etchant, ferric chloride or the like is used for copper, and dilute hydrochloric acid or the like is used for aluminum. (4) After obtaining a constituent comprising a polyimide film/support by the above method, an adhesive film is attached to the surface of the polyimide film, and the adhesive film/polyimine resin film is separated from the support. And a method of separating the polyimide film from the adhesive film. In the above-mentioned peeling method, from the viewpoints of the refractive index difference, the YI value and the elongation of the front and back sides of the obtained polyimide film, it is suitable for the method (1) or (2). From the viewpoint of the difference in refractive index between the front side and the back side of the imide resin film, the method (1) is more suitable. Further, in the case of using the copper as the support in the method (3), the YI value of the obtained polyimide film is increased, and the elongation tends to be small. It is believed to be due to the influence of copper ions. The thickness of the resin film obtained by the above method is not particularly limited, but is preferably in the range of 1 to 200 μm, more preferably 5 to 100 μm. The yellowness YI of the 10 μm film thickness of the resin film of the present embodiment may be 30 or less. Further, the residual stress can be 25 MPa or less. In particular, the yellowness YI of the film thickness of 10 μm is 30 or less and the residual stress is 25 MPa or less. Such a property can be obtained, for example, by subjecting the resin precursor of the present invention to a nitrogen atmosphere (for example, nitrogen having an oxygen concentration of 2,000 ppm or less), preferably 300 to 550 ° C, more preferably 350 to 450 ° C. It is well achieved by imidization. The resin film of the present embodiment may have a tensile elongation of 15% or more. The tensile elongation of the resin film may further be 20% or more, and particularly 30% or more. The tensile elongation can be measured by using a resin film having a film thickness of 10 μm as a sample using a commercially available tensile tester. The resin film of the present embodiment includes a film of a polyimine imide obtained by thermally imidating (a1) a polyimide precursor contained in the resin composition. Therefore, it contains a structural unit represented by the following formula (11): [Chem. 29] {式,X 1 , X 2 It represents the four-valent base of carbon number 4 to 32. R 1 , R 2 , R 3 Each of the organic groups having a carbon number of 1 to 20 is independently represented. n represents 0 or 1. And a, b and c are integers of 0-4. Y is at least one selected from the group consisting of the above formulas (3), (4), and (5). l, m independently represent an integer of 1 or more, satisfying 0.01≦l/(l+m)≦0.99}. The lower limit of l/(l+m) may be 0.05, may be 0.10, may be 0.20, may be 0.30, or may be 0.40. The upper limit of l/(l+m) may be 0.95, may be 0.90, may be 0.80, may be 0.70, or may be 0.60. As described above, the residual stress is preferably 25 MPa or less, the YI is 30 or less, the glass transition temperature is 400 ° C or higher, the elongation is 15% or more, and the breaking strength is 250 MPa or more. Further, the second aspect is a film comprising a polyimine imide obtained by thermally imidating the (a2) polyfluorene imide precursor contained in the resin composition. Therefore, it contains a structural unit represented by the following formula (12): [Chem. 30] {式,X 3 Indicated from 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA) and 4,4'-biphenyl bis(trimellitic acid monoester anhydride) A tetravalent base of at least one of (TAHQ). R 1 , R 2 , R 3 Each of the organic groups having a carbon number of 1 to 20 is independently represented. n represents 0 or 1. Further, the resin film in which a, b, and c are integers of 0 to 4} and the elongation is 15% or more preferably has a residual stress of 25 MPa or less, a YI of 30 or less, a glass transition temperature of 400 ° C or more, and a breaking strength. It is 250 MPa or more. <Laminate> Another aspect of the present invention provides a laminate comprising a support and a polyimide film formed of the above resin composition on the surface of the support. Still another aspect of the present invention provides a method of producing the above laminated body. The laminate of the present embodiment can be obtained by a method for producing a laminate comprising the following steps: a step of forming a coating film by coating the resin composition on the surface of the support (coating step); The support and the coating film are heated, and the polyimine precursor precursor contained in the coating film is imidized to form a polyimide film (heating step). The method for producing the laminated body can be carried out in the same manner as the method for producing the resin film, for example, except that the peeling step is not performed. The laminate can be preferably used, for example, for the manufacture of a flexible device. If it is described in further detail, it is as follows. In the case of forming a flexible display, a glass substrate is used as a support, a soft substrate is formed thereon, and a TFT or the like is formed thereon. The step of forming a TFT or the like on a flexible substrate is typically carried out at a temperature ranging from 150 to 650 °C. However, in order to achieve the desired performance in reality, an inorganic material must be used at a high temperature in the vicinity of 250 ° C to 450 ° C to form a TFT-IGZO (InGaZnO) oxide semiconductor or TFT (a-Si-TFT, poly-Si- TFT). On the other hand, due to these thermal history, various physical properties (especially yellowness or elongation) of the polyimide film tend to decrease, and if it exceeds 400 ° C, the yellowness or elongation is particularly lowered. However, the polyimide film obtained from the polyimine precursor of the present invention has a small decrease in yellowness or elongation even in a high temperature region of 400 ° C or higher, and can be favorably used in this region. Further, in the present embodiment, a laminate comprising a polyimide film layer and an LTPS (low temperature polycrystalline TFT) layer containing a polyfluorene represented by the following formula (13) can be provided. Imine. [化31] {式,X 1 It represents the four-valent base of carbon number 4 to 32. R 1 , R 2 , R 3 Each of the organic groups having a carbon number of 1 to 20 is independently represented. n represents 0 or 1. And a, b, and c are integers of 0 to 4} As a method for producing the laminate, the polyimide and the polyimide resin film formed of the resin composition on the surface of the support are produced. After the laminate is formed, an amorphous Si layer is formed, and after dehydrogenation annealing at 400 to 450 ° C for about 0.5 to 3 hours, it is crystallized by excimer laser or the like to form an LTPS layer. Thereafter, the glass and the polyimide film are peeled off by laser peeling or the like, whereby the laminate can be obtained. The layered system comprising the polyimine film layer containing the polyimine and the LTPS (low temperature polycrystalline ruthenium TFT) layer represented by the general formula (13) has less peeling or squeezing after the thermal cycle test, and the substrate warpage is less. Further, when the residual stress generated in the flexible substrate and the polyimide film is high, the laminate containing both of them may be warped in the high-temperature TFT step, and may shrink when the film is shrunk at room temperature. And problems such as damage and peeling of the flexible substrate from the glass substrate. Usually, the glass substrate has a thermal expansion coefficient smaller than that of the resin, so that residual stress is generated between the glass substrate and the flexible substrate. As described above, the resin film of the present embodiment can be preferably used for the formation of a flexible display because the residual stress generated between the glass substrate and the glass substrate can be 25 MPa or less. Further, in the polyimide film of the present embodiment, the yellowness YI of the film thickness of 10 μm can be made 30 or less, and the tensile elongation can be 15% or more. As a result, the resin film of the present embodiment is excellent in breaking strength when the flexible substrate is processed, so that the yield when manufacturing a flexible display can be improved. Further, as another aspect, it is possible to provide an absorbance at 308 nm of 0.6 or less and a thickness of 0.1 or less at a film thickness of 0.1 μm after heating at 400 ° C or higher, and an elongation ratio of 0.6 or more and 2.0 or less. More than 15% of the polyimide film. By setting YI to 20 or less, a flexible substrate can be produced without deteriorating the image quality when the display is formed. More preferably 18 or less, and particularly preferably 16 or less. When the absorbance at 308 nm when the film thickness is 0.1 μm is 0.6 or more and 2.0 or less and the elongation is 15% or more, for example, the polyimide film can be easily peeled off from the glass substrate by laser irradiation. From the viewpoint of suppressing the dust after the laser peeling, it is preferably 0.6 or more and 1.5 or less and the elongation is 20% or more. For example, from the viewpoint of not lowering the performance of the organic EL element, it is preferably 0.6 or more and 1.0. Hereinafter, the elongation is 20% or more. The upper limit of the elongation is not particularly limited, and may be 80% or less, 70% or less, 60% or less, 50% or less, or 40% or less. Furthermore, when the laser is peeled off, the polyimide film may be burned due to the laser light, and the combustion residue is dust. Accordingly, another aspect of the present invention is to provide a display substrate. Still another aspect of the present invention provides a method of manufacturing the above display substrate. The method for producing a display substrate according to the present embodiment includes the steps of: forming a coating film by applying the resin composition on the surface of the support (coating step); by using the support and the coating described above a step of heating the film to imidize the polyamidene precursor contained in the coating film to form a polyimide film (heating step); forming a component or circuit on the polyimide film a step (component, circuit forming step); and a step of peeling the polyimine resin film on which the element or the circuit is formed from the support (peeling step). In the above method, the coating step, the heating step, and the peeling step can be carried out in the same manner as the above-described method of producing the resin film. The component and circuit forming steps can be carried out by methods known to those skilled in the art. The resin film of the present embodiment which satisfies the above physical properties can be preferably used for applications in which the use of the yellow color of the existing polyimide film is limited, especially for a colorless transparent substrate for a display or a color filter. Protective film and other uses. Further, it can also be used for, for example, a protective film, a astigmatic sheet such as a TFT-LCD, and a coating film (for example, an intermediate layer of a TFT-LCD, a gate insulating film, a liquid crystal alignment film, etc.), an ITO substrate for a touch panel, and a smart phone. It is used in place of a resin substrate covering a glass or the like which requires colorless transparency and low birefringence. When the polyimine of the present embodiment is applied as a liquid crystal alignment film, a TFT-LCD having a high aperture ratio and a high contrast ratio can be produced. The resin film and the laminate which are produced by using the polyimide precursor of the present embodiment and the resin precursor can be used as a semiconductor insulating film, a TFT-LCD insulating film, an electrode protective film, or the like, for example, in a soft device. It is particularly preferably used as a substrate in manufacturing. Here, examples of the soft device to which the resin film and the laminate of the present embodiment can be applied include a flexible display, a flexible solar cell, a flexible touch panel electrode substrate, a soft illumination, and a flexible battery. [Examples] Hereinafter, the present invention will be described in more detail with reference to the accompanying Examples. The various evaluations of the examples and comparative examples were carried out as follows. <Measurement of Weight Average Molecular Weight> The weight average molecular weight (Mw) and the number average molecular weight (Mn) were measured by gel permeation chromatography (GPC) under the following conditions. As a solvent, N,N-dimethylformamide (manufactured by Wako Pure Chemical Industries, Ltd., for high performance liquid chromatography, and added 24.8 mmol/L of lithium bromide monohydrate before the measurement (manufactured by Wako Pure Chemical Industries, Ltd.) , purity of 99.5%) and 63.2 mmol / L of phosphoric acid (manufactured by Wako Pure Chemical Industries, Ltd., for high performance liquid chromatography) and dissolved). A calibration curve for calculating the weight average molecular weight was prepared using standard polystyrene (manufactured by Tosoh Corporation). Column: Shodex KD-806M (manufactured by Showa Denko Co., Ltd.) Flow rate: 1.0 mL/min Column temperature: 40 °C Pump: PU-2080Plus (manufactured by JASCO) Detector: RI-2031Plus (RI: differential refractometer, JASCO Manufactured and UV-2075Plus (UV-VIS: UV-Visible Absorber, manufactured by JASCO) <Evaluation of the molecular weight (low molecular weight content) of less than 1,000 molecular weight > The molecular weight of the resin in the resin of less than 1,000 Using the measurement results of the GPC obtained above, the peak area occupied by the component having a molecular weight of less than 1,000 was calculated as a ratio (percentage) occupied by the peak area of the entire molecular weight distribution. <Evaluation of the amount of water> The water content of the synthetic solvent and the resin composition (varnish) was measured using a Karl Fischer moisture measuring device (manual moisture measuring device AQ-300, manufactured by Hiranuma Sangyo Co., Ltd.). <Evaluation of Viscosity Stability of Resin Composition> For the resin compositions prepared in the examples and the comparative examples, a sample which was allowed to stand at room temperature for 3 days after preparation was used as a sample after preparation, and the viscosity at 23 ° C was carried out. The measurement was carried out, and the sample which was further allowed to stand at room temperature for 2 weeks was used as a sample after 2 weeks, and the viscosity measurement at 23 ° C was again performed. These viscosity measurements were carried out using a viscometer with a thermostat (TV-22 manufactured by Toki Machinery Co., Ltd.). Using the above measured values, the room temperature 2 week viscosity change rate was calculated by the following formula. 2 week viscosity change rate (%) = [(viscosity of sample after 2 weeks) - (viscosity of sample after preparation)] / (viscosity of sample after preparation) × 100 room temperature 2 weeks viscosity change rate It is evaluated according to the following criteria. ◎: The viscosity change rate is 5% or less (the storage stability is "excellent") ○: The viscosity change rate is more than 5 and 10% or less (storage stability is "good") ×: The viscosity change rate is more than 10% (storage stability) (Evaluation of varnish coating property) The resin composition prepared in each of the examples and the comparative examples was applied to an alkali-free glass substrate (size 37) after curing to a film thickness of 15 μm using a bar coater. ×47 mm, thickness 0.7 mm), pre-baked at 140 ° C for 60 minutes. The coating property of the varnish was evaluated by measuring the step of the surface of the coating film using a surface profiler (manufactured by Tencor Corporation, model name P-15). ◎: The step of the surface is 0.1 μm or less (the coating property is "excellent") ○: The step of the surface is more than 0.1 and 0.5 μm or less (the coating property is "good") ×: The step of the surface is more than 0.5 μm (coating) Cloth "bad") <Evaluation of residual stress> Each of the resin compositions was applied by a spin coater on a 6-inch wafer having a thickness of 625 μm ± 25 μm in which the amount of warpage was measured in advance. Pre-bake at 100 ° C for 7 minutes. Thereafter, a vertical curing oven (manufactured by Koyo Lindberg Co., Ltd., model name VF-2000B) was used, and the oxygen concentration in the chamber was adjusted to 10 ppm by mass or less, and the heat curing treatment was performed at 430 ° C for 1 hour. Treatment) A tantalum wafer with a polyimide film having a film thickness of 10 μm after hardening was produced. The amount of warpage of the wafer was measured using a residual stress measuring device (manufactured by Tencor Corporation, model name FLX-2320), and the residual stress generated between the tantalum wafer and the resin film was evaluated. ◎: The residual stress exceeds -5 and is 15 MPa or less (the evaluation of residual stress is "excellent") ○: The residual stress exceeds 15 and is 25 MPa or less (the evaluation of residual stress is "good") ×: The residual stress exceeds 25 MPa (residual Evaluation of stress "Poor") <Evaluation of warpage of polyimide film formed with inorganic film> The resin composition prepared in each of the examples and the comparative examples was spin-coated so that the film thickness after hardening became 10 μm. It was pre-baked at 100 ° C for 7 minutes on a 6-inch wafer substrate provided with an aluminum vapor-deposited layer. Then, using a vertical curing oven (manufactured by Koyo Lindberg Co., Ltd., model name VF-2000B), the oxygen concentration in the chamber was adjusted to 10 ppm by mass or less, and the heat curing treatment was performed at 430 ° C for 1 hour. A wafer in which a polyimide film is formed. Using the wafer, a tantalum nitride (SiNx) film as an inorganic film was formed on a polyimide film by a CVD (chemical vapor deposition) method at 350 ° C at a thickness of 100 nm. A laminate wafer having an inorganic film/polyimine resin is formed. The laminate wafer obtained above is immersed in a dilute hydrochloric acid aqueous solution, and two layers of the inorganic film and the polyimide film are integrally peeled off from the wafer, thereby obtaining a polyimide film having an inorganic film formed on the surface thereof. Sample. Using this sample, the warpage of the polyimide film was evaluated. ◎: No warp (warp "excellent") ○: only a small amount of warp (warp "good") ×: film curl due to warpage (warpage "bad") <yellowness (YI) Evaluation of Values> Wafers were produced in the same manner as in the above <Evaluation of warpage of the polyimide film formed with an inorganic film> (in which an inorganic film was not formed). The wafer was immersed in a dilute hydrochloric acid aqueous solution, and the polyimide film was peeled off, whereby a resin film was obtained. With respect to the obtained polyimine resin film, a YI value (converted to a film thickness of 10 μm) was measured by a D65 light source manufactured by Nippon Denshoku Industries Co., Ltd. (Spectrophotometer: SE600). <Evaluation of Elongation and Breaking Strength> A wafer was produced in the same manner as in the above <Evaluation of Warpage of Polyimide Resin Film Formed with Inorganic Film> (in which an inorganic film was not formed). Using a wafer dicing machine (DAD3350 manufactured by DISCO Co., Ltd.), a 3 mm wide cut was cut into the polyimide film of the wafer, and then immersed in a dilute hydrochloric acid aqueous solution to peel off the resin film. dry. It was cut to a length of 50 mm as a sample. For the above samples, elongation and breaking strength were measured using TENSILON (UTM-II-20 manufactured by Orientec Co., Ltd.) at a test speed of 40 mm/min and an initial weighting of 0.5 fs. <Measurement of Absorbance at 308 nm of Polyimide Resin Film> The varnish was spin-coated on a quartz glass substrate, and heated at 430 ° C for 1 hour under a nitrogen atmosphere, thereby obtaining a polyimide having a film thickness of 0.1 μm. Amine resin film. For these polyimide membranes, the absorbance at 308 nm was measured using UV-1600 (manufactured by Shimadzu Corporation). [Example 1] A nitrogen-substituted 500 ml separable flask was charged with 96 g of N-methyl-2-pyrrolidone (NMP), and charged with 4-aminophenyl-4-aminobenzoic acid. The ester (APAB) 17.71 g (77.6 mmol) and 4,4'-diaminodiphenylphosphonium (DAS) 4.82 g (19.4 mmol) were stirred to dissolve APAB and DAS. Thereafter, 29.42 g (100 mmol) of biphenyl-3,3',4,4'-tetracarboxylic dianhydride (BPDA) was added, and polymerization was carried out under a nitrogen gas flow and stirring at 80 ° C for 3 hours. Thereafter, the mixture was cooled to room temperature, and the above-mentioned NMP was added to adjust the viscosity of the solution to 51,000 mPa·s, thereby obtaining a polyacrylic acid NMP solution (hereinafter also referred to as varnish) P-1. The obtained polyaminic acid had a weight average molecular weight (Mw) of 65,000. [Examples 2 to 21 and Comparative Examples 1 to 5] In the above-described Example 1, except that the amount of the raw material (the molar ratio), the type of the solvent to be used, the polymerization temperature, and the polymerization time were changed as described in Table 1, respectively. Varnishes P-2 to P-26 were obtained in the same manner as in Example 1. The weight average molecular weight (Mw) of the polyamic acid contained in each varnish is collectively shown in Table 1. [Table 1] The abbreviations of the components in Table 1 respectively mean the following meanings. BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride PMDA: pyromellitic dianhydride TAHQ: p-phenylene bis(trimellitic anhydride) APAB: 4-aminophenyl-4 -Aminobenzoate ATAB: 2-methyl-4-aminophenyl-4-aminobenzoic acid BABB: [4-(4-Aminobenzylidene)oxyphenyl]4 -Aminobenzoate BAFL: 9,9-bis(aminophenyl)anthracene BFAF: 9,9-bis(4-amino-3-fluorophenyl)anthracene TFMB: 2,2'-double ( Trifluoromethyl)benzidine DAS: 4,4'-diaminodiphenylhydrazine NMP: N-methyl-2-pyrrolidone DMF: N,N-dimethylformamide DMAc: N, N -Dimethylacetamide The varnishes P-1 to P-26 obtained in the above Examples and Comparative Examples were directly used as a resin composition, and evaluated according to the above method. The evaluation results are shown in Table 2. [Table 2] * indicates that the film is brittle and cannot be measured. ** indicates that it is impossible to measure due to film whitening. As shown in Tables 1 and 2, the polyphenylene obtained in Comparative Examples 1 and 2 containing only the structural unit represented by the general formula (1) The amine film is brittle, and physical properties such as elongation cannot be evaluated. Moreover, the residual stress also becomes a higher result. Further, the polyimine film obtained in Comparative Example 3 containing only the structural unit represented by the general formula (2) had a high residual stress, and warpage occurred after the formation of the inorganic film, and the elongation was also low. On the other hand, the polyimine obtained in Examples 1 to 21 in which the structural unit represented by the formula (1) and the structural unit represented by the formula (2) are contained in the molar ratio of 99/1 to 1/99 The film system has a yellowness of less than 20, a residual stress of 25 MPa or less, and an elongation of 20% or more. Further, warpage after the formation of the inorganic film was not caused, or even if it occurred, it was only a small amount. As a result of the above-mentioned Table 2, it was confirmed that the polyimine resin film obtained from the resin composition of the present invention is a resin film having a small yellowness, a low residual stress, and excellent mechanical properties. Specifically, in the present invention, a resin film having a residual stress of 25 MPa or less, a yellowness YI of 30 or less, and an elongation of 15% or more can be obtained. [Example 22] N-methyl-2-pyrrolidone (NMP) (water content: 250 mass ppm) was added to nitrogen gas immediately after opening from a 18 L tank in an amount equivalent to 17 wt% of the solid content. In a 500 ml separable flask, a 5-aminophenyl-4-aminobenzoate (APAB, purity: 99.5%, manufactured by Nippon Pure Pharmaceutical Co., Ltd.), 5.71 g (25.0 mmol) was added. Stir and dissolve APAB. Thereafter, biphenyl-3,3',4,4'-tetracarboxylic dianhydride (BPDA, purity 99.5%, manufactured by MANAC Co., Ltd.) 7.36 g (25.0 mmol) was added, and the mixture was passed under nitrogen at 80 ° C. The polymerization was carried out under stirring for 3 hours. Thereafter, the mixture was cooled to room temperature, and the above-mentioned NMP was added so as to adjust the viscosity of the solution to 51,000 mPa·s to obtain a polyphosphonic acid NMP solution (hereinafter also referred to as varnish) P-27. The obtained polyaminic acid had a weight average molecular weight (Mw) of 128,000 and a molecular weight of less than 1,000. The content of the molecule was 0.01% by mass. [Examples 23 to 33 and Comparative Examples 6 to 11] In the above-described Example 22, the types of the raw materials, the amount of the raw materials, the type of the solvent to be used, the polymerization temperature, and the polymerization time were changed as described in Table 3, respectively. Varnishes P-28 to P-44 were obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyamic acid contained in each varnish is shown together in Table 3. [table 3] The abbreviations of the components in Table 3 respectively mean the following meanings. BPDA: biphenyltetracarboxylic dianhydride, purity 99.5%, manufactured by Mitsubishi Chemical Corporation TAHQ: p-phenylene bis(trimellitic anhydride), purity 99.5%, manufactured by MANAC Co., Ltd. PMDA: pyromellitic acid II Anhydride APAB: 4-aminophenyl-4-aminobenzoate, purity 99.5% 4,3-APAB: 4-aminophenyl-3-aminobenzoate, purity 99.5% ATAB: 2 -Methyl-4-aminophenyl-4-aminobenzoate BABB: [4-(4-Aminobenzylidene)oxyphenyl]4-aminobenzoate NMP1:18 Immediately after the L can is opened, the user will have a water content of 250 ppm. NMP2: After opening the 500 ml bottle for one month, the water content is 3,070 ppm DMF: the 500 ml bottle is opened, the water is 3510 ppm DMAc: 500 ml bottle The latter was opened, and the amount of water was 3,430 ppm. [Examples 22 to 33 and Comparative Examples 6 to 11] The varnishes P-27 to P-44 obtained in the above Examples and Comparative Examples were directly used as a resin composition, and were subjected to the above method. Evaluation. The evaluation results are shown in Table 4. [Table 4] As shown in Tables 3 and 4, Comparative Example 6 (P-39), Comparative Example 7 (P-40), and Comparative Example 8 in which the weight average molecular weight of the polyimide intermediate (varnish) was 3,000 or less. In (P-41), Comparative Example 10 (P-43), and Comparative Example 11 (P-44), the residual stress was large and the warpage was large. Also, the yellowness is large, and the elongation and breaking strength are also small. In Comparative Examples 10 and 11 in which the amount of water was large, the film was very brittle. On the other hand, in Comparative Example 9 (P-42) in which the weight average molecular weight of the polyimide intermediate precursor was 30,000 or more, residual stress, warpage was small, yellowness was low, and elongation and breaking strength were also Larger, but the coating properties are worse. On the other hand, in Examples 22 to 33 in which the polyiminoimine precursors P-27 to P-38 having a weight average molecular weight of 30,000 or more and 300,000 or less were used, the residual stress was low and the warpage was small, yellow. The degree is low, the elongation and the breaking strength are also large, and excellent results are obtained for any of the characteristics. As a result of the above-mentioned Table 4, it was confirmed that the polyimine resin film obtained from the resin composition of the present invention is a resin film having a small yellowness, a low residual stress, and excellent mechanical properties. Specifically, in the present invention, a resin film having a residual stress of 25 MPa or less, a yellowness YI of 20 or less, a glass transition temperature of 400 ° C or more, an elongation of 15% or more, and a breaking strength of 250 MPa or more can be obtained. In the examples 34 to 45 which were disclosed, an experiment was conducted in which the effect of adding at least one selected from the group consisting of a surfactant and an alkoxysilane compound to the resin composition was carried out. [Example 34] First, the varnish P-27 obtained in the above Example 22 was directly used as a resin composition, and evaluation of coating streaks was carried out in the following order. <Evaluation of Coating Stripe (Coating Property)> The above resin composition was applied to an alkali-free glass substrate (size 37 × 47 mm, thickness 0.7 mm) by a bar coater so as to have a film thickness of 15 μm after curing. )on. After the application, the mixture was allowed to stand at room temperature for 10 minutes, and it was visually confirmed whether or not coating streaks were formed on the obtained coating film. The coating was performed three times using the same resin composition, and the number of the coating stripes was examined for each coating film, and the average value was used and evaluated based on the following criteria. ◎: The number of continuous application stripes of 1 mm or more and 1 mm or more in length was 0 (the evaluation of the coating stripe was "excellent") ○: The coating stripe was 1 or 2 (the evaluation of the coating stripe was "good") △: The number of the application stripes was 3 to 5 (the evaluation of the coating stripe was "may"). The evaluation results are shown in Table 5. [Examples 35 to 45] After adding the surfactant and alkoxydecane compound of the type and amount shown in Table 5 as an additional additive to the varnish P-27 obtained in the above Example 22, respectively, 0.1 The filter of μm was filtered to prepare a resin composition. Evaluation of coating streaks was carried out in the same manner as in Example 34 using the above resin composition. The results are shown in Table 5. [table 5] The abbreviations of the components in Table 5 respectively mean the following meanings. The amounts of the components used in Table 5 are respectively based on the amount (usage amount) of 100 parts by mass of the polyimine precursor contained in the varnish. In Examples 39 and 45, Surfactant 1 was used in combination with alkoxydecane compound 1. Surfactant 1: DBE-821, product name, polyoxo-based surfactant, Gelest manufacture surfactant 2: MEGAFAC F171, product name, fluorine-based surfactant, DIC to manufacture alkoxydecane compound 1: Alkoxydecane compound 2 represented by the formula (AS-1): a compound represented by the following formula (AS-2) [Chem. 32] As shown in Table 5, in Examples 35 to 39 and Examples 41 to 45 containing a surfactant or alkoxydecane compound, the production of coating stripes was compared with Examples 34 and 40 which were not contained. When it is suppressed, the polyimine resin film excellent in surface smoothness can be obtained. [Example 46] After applying varnish P-27 to a non-alkali glass substrate (size: 37 × 47 mm, thickness: 0.7 mm) by a bar coater at a film thickness of 10 μm after curing, at 140 ° C Pre-bake for 60 minutes. Then, a vertical curing oven (manufactured by Koyo Lindberg Co., Ltd., model name VF-2000B) was used, and the oxygen concentration in the chamber was adjusted to 10 ppm by mass or less, and the heat curing treatment was performed at 430 ° C for 1 hour. A glass substrate of a polyimide film. An amorphous germanium layer was formed on the polyimide film, and dehydrogenation annealing was performed at 430 ° C for 1 hour, followed by irradiation of an excimer laser, thereby forming an LTPS layer. The glass substrate was peeled off by an excimer laser (wavelength 308 nm, repetition frequency 300 Hz) to obtain a laminate including a polyimide film and an LTPS layer. The laminate has no warpage and the yellowness is also 20 or less. [Example 47] A laminate was obtained in the same manner as in Example 46 except that varnish P-1 was used. The laminate has no warpage and the yellowness is also 20 or less. [Comparative Example 12] A laminate was obtained in the same manner as in Example 46 except that varnish P-24 was used. The laminate has a large warpage and a part of the polyimide film is cracked. [Synthesis Example] In a separable flask equipped with a Dean-Stark apparatus and a reflux vessel, APAB 2.24 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and stirred under stirring. APAB is dissolved. H-PMDA 2.24 g (10.0 mmol) was added thereto, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C and confirmed by IR to be 1,650 cm derived from the indole bond. -1 The nearby absorption (C=O) disappears. Thereafter, APAB 8.95 g (39.2 mmol), NMP 121.6 g, PMDA 6.54 g (30.0 mmol) and 6FDA 4.44 g (10.0 mmol) were added and stirred at 80 ° C for 4 hours, thereby obtaining polyimine-polyamide. Acid polymer varnish (P-45). The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 82,000. [Examples 48 to 53 and Comparative Example 13] An organic EL substrate shown in Fig. 1 was produced. The polytheneimide precursor varnish (P-1, P-11, P-20, P-22, P-27, P-33, P-45) was cured to a thickness of 10 by a bar coater. After coating on a plain glass substrate (thickness 0.7 mm) in a manner of μm, it was prebaked at 140 ° C for 60 minutes. Then, a vertical curing oven (manufactured by Koyo Lindberg Co., Ltd., model name VF-2000B) was used, and the oxygen concentration in the chamber was adjusted to 10 ppm by mass or less, and the heat curing treatment was performed at 430 ° C for 1 hour. A glass substrate of a polyimide film. The SiN layer was then formed into a film by a CVD (Chemical Vapor Deposition) method at a thickness of 100 nm. Titanium is then formed by sputtering, and then patterned by photolithography to form a scanning signal line. Next, the SiN layer was formed into a film by a CVD method at a thickness of 100 nm over the entire glass substrate on which the scanning signal lines were formed. (The lower substrate 2a is thus regarded as the lower substrate 2a.) Next, an amorphous germanium layer 256 is formed on the lower substrate 2a, and dehydrogenation annealing is performed at 430 ° C for 1 hour, followed by irradiation of an excimer laser to form an LTPS layer. Thereafter, a photosensitive acrylic resin is applied onto the entire surface of the lower substrate 2a by a spin coating method, and exposed and developed by photolithography to form 258 having a plurality of contact holes 257. A state in which one of the LTPSs 256 is partially exposed by the contact hole 257 is obtained. Next, an ITO film is formed on the entire surface of the lower substrate 2a on which the interlayer insulating film 258 is formed by sputtering, and exposed and developed by photolithography, and patterned by etching to form LTPS. The lower electrode 259 is formed in a paired manner. Further, in each of the contact holes 257, the lower electrode 252 of the interlayer insulating film 258 is electrically connected to the LTPS 256. Next, after the partition walls 251 are formed, the hole transport layer 253 and the light-emitting layer 254 are formed in the respective spaces partitioned by the partition walls 251. Further, the upper electrode 255 is formed to cover the light-emitting layer 254 and the partition wall 251. The organic EL substrate 25 was produced by the above steps. Next, the ultraviolet curable resin is applied to the periphery of the sealing substrate 2b in which the glass substrate, the polyimide film of the present embodiment and the SiN layer are sequentially formed, and the sealing substrate 2b and the organic EL substrate are bonded in an argon atmosphere. This encapsulates the organic EL element. Thereby, the hollow portion 261 is formed between each of the organic EL elements and the sealing substrate 2b. The excimer laser (wavelength 308 nm, repetition frequency 300 Hz) was irradiated to the side of the lower substrate 2a and the side of the sealing substrate 2b thus formed, and the minimum energy required to peel off the entire surface was peeled off. Evaluation of the presence or absence of the substrate warpage, the lighting test, and the white turbidity evaluation of the laminate after peeling the laminate. In addition, a thermal cycle test was also carried out. The results are shown in Table 6. <Base warpage> ◎: No warp ○: Only a small amount of warpage △: Curl due to warpage <Lighting test> ○: Lighted person ×: Unlit person < Evaluation of white matter of laminated body> Formation After the laminate is formed, the whole device is regarded as transparent as ○, the slightly opaque person is regarded as Δ, and the white opaque person is regarded as ×. <Thermal Cycle Test> Using a thermal cycle tester manufactured by Espec, 1000 cycles of each of -5 ° C and 60 ° C for 30 minutes (the movement time of the groove was 1 minute) were subjected to an appearance observation. Those who did not peel or bulge were regarded as ○, and only a part of the peeling or bulging was observed as Δ after the test, and the whole peeling or bulging was observed as × after the test. [Table 6] [Examples 54 to 58 and Comparative Example 14] The above was carried out using a polyimide polyimide precursor varnish (P-1, P-11, P-20, P-22, P-27, P-33, P-45). In the production of the laminate, the above test was carried out except that the laminate was produced by changing the LTPS to IGZO. The results are shown in Table 7. [Table 7] [Examples 59 to 63 and Comparative Example 15] A polyimide film varnish having an absorbance at 308 nm of not less than 20 and a film thickness of 0.1 μm of 0.6 or more and 2.0 or less and an elongation of 15% or more was provided ( P-1, P-11, P-20, P-27, P-33, P-45), the minimum energy required for laser stripping when the above laser is peeled off and the minimum energy plus 10 mJ/cm 2 The obtained energy was evaluated for dust (ash) at the time of irradiation. A person who does not generate dust at all is regarded as ○, a person who observes a small amount of dust is regarded as Δ, and a person who observes dust as a whole is regarded as ×. The results are shown in Table 8. [Table 8] The present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the spirit and scope of the invention. [Industrial Applicability] The resin film formed of the polyimide precursor of the present invention can be used for the manufacture of a flexible display, for example, in addition to a semiconductor body insulating film, a TFT-LCD insulating film, an electrode protective film, or the like. The substrate for a touch panel ITO electrode or the like is particularly preferably used as a substrate.

2a‧‧‧下部基板
2b‧‧‧密封基板
25‧‧‧有機EL基板
251‧‧‧間隔壁
252‧‧‧下部電極
253‧‧‧電洞傳輸層
254‧‧‧發光層
255‧‧‧上部電極
256‧‧‧非晶矽層
257‧‧‧接觸孔
258‧‧‧層間絕緣膜
259‧‧‧下部電極
261‧‧‧中空部
2a‧‧‧lower substrate
2b‧‧‧Seal substrate
25‧‧‧Organic EL substrate
251‧‧‧ partition wall
252‧‧‧ lower electrode
253‧‧‧ hole transport layer
254‧‧‧Lighting layer
255‧‧‧Upper electrode
256‧‧‧Amorphous layer
257‧‧‧Contact hole
258‧‧‧Interlayer insulating film
259‧‧‧lower electrode
261‧‧‧ Hollow

圖1係表示實施例及比較例中製作之有機EL(Electroluminescence,電致發光)基板之結構之圖。Fig. 1 is a view showing the structure of an organic EL (Electroluminescence) substrate produced in Examples and Comparative Examples.

no

Claims (21)

一種聚醯亞胺前驅體,其特徵在於其係(a1)聚醯亞胺前驅體,其以1/99≦(結構單元L之莫耳數/結構單元M之莫耳數)≦99/1含有: 下述通式(1)所表示之結構單元L: [化1]{式中,X1 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數};及 下述通式(2)所表示之結構單元M: [化2]{式中,X2 表示碳數4~32之四價之基;Y為選自由下述通式(3)、(4)及(5)所組成之群中之至少一種}, [化3][化4][化5]{式中,R4 ~R11 分別獨立表示碳數1~20之一價之有機基;d~k為0~4之整數}。A polybendimimine precursor characterized by being a (a1) polyimine precursor having a molar ratio of 1/99 ≦ (molar number of structural unit L / molar number of structural unit M) ≦ 99/1 Contains: Structural unit L represented by the following general formula (1): [Chemical Formula 1] Wherein X 1 represents a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; b and c are integers of 0 to 4}; and structural unit M represented by the following general formula (2): [Chemical 2] In the formula, X 2 represents a tetravalent group having a carbon number of 4 to 32; and Y is at least one selected from the group consisting of the following general formulae (3), (4), and (5)}, [Chemical 3 ] [Chemical 4] [Chemical 5] In the formula, R 4 to R 11 each independently represent an organic group having a carbon number of 1 to 20; and d to k are an integer of 0 to 4}. 如請求項1之聚醯亞胺前驅體,其中上述通式(1)中之n為0。The polyimine precursor of claim 1, wherein n in the above formula (1) is 0. 如請求項1或2之聚醯亞胺前驅體,其中上述通式(2)之Y為通式(3)。The polyimine precursor of claim 1 or 2, wherein Y of the above formula (2) is the formula (3). 如請求項1或2之聚醯亞胺前驅體,其中上述通式(2)之Y為通式(4)。The polyimine precursor of claim 1 or 2, wherein Y of the above formula (2) is the formula (4). 如請求項1或2之聚醯亞胺前驅體,其中上述通式(2)之Y為通式(5)。The polyimine precursor of claim 1 or 2, wherein Y of the above formula (2) is a formula (5). 一種聚醯亞胺前驅體,其特徵在於其係(a2)聚醯亞胺前驅體,其含有下述通式(10)所表示之結構單元: [化6]並且,重量平均分子量為30,000以上且300,000以下, {式中,X3 表示源自選自由4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種的四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。A polyimine precursor which is characterized in that it is a (a2) polyimine precursor comprising a structural unit represented by the following formula (10): [Chem. 6] Further, the weight average molecular weight is 30,000 or more and 300,000 or less, wherein X 3 represents a source derived from 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA). And a tetravalent group of at least one of the group consisting of 4,4'-biphenyl bis(trimellitic acid monoester anhydride) (TAHQ); R 1 , R 2 and R 3 each independently represent a carbon number of 1 to 20 an organic group of one valence; n represents 0 or 1; and a, b and c are integers of 0 to 4}. 如請求項6之聚醯亞胺前驅體,其中上述(a2)聚醯亞胺前驅體中之重量平均分子量未達1,000之分子之含量未達5質量%。The polyamidiamine precursor according to claim 6, wherein the content of the molecule having a weight average molecular weight of less than 1,000 in the (a2) polyamidene precursor is less than 5% by mass. 如請求項6或7之聚醯亞胺前驅體,其中通式(10)中之n為0。The polyamidiene precursor of claim 6 or 7, wherein n in the formula (10) is 0. 如請求項1至5中任一項之聚醯亞胺前驅體,其中上述X1 、X2 為源自選自由均苯四甲酸二酐(PMDA)、4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種的四價之有機基。The polyimine precursor according to any one of claims 1 to 5, wherein the above X 1 , X 2 are derived from pyromellitic dianhydride (PMDA), 4,4′-oxydi-phthalic acid Tetravalent at least one of a group consisting of formic acid dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA), and 4,4'-biphenyl bis(trimellitic acid monoester anhydride) (TAHQ) Organic base. 一種樹脂組合物,其特徵在於其含有如請求項1至9中任一項之聚醯亞胺前驅體及(b)有機溶劑。A resin composition characterized by containing the polyimine precursor of any one of claims 1 to 9 and (b) an organic solvent. 如請求項10之樹脂組合物,其進而含有選自由(c)界面活性劑及(d)烷氧基矽烷化合物所組成之群中之至少一種。The resin composition of claim 10, which further contains at least one selected from the group consisting of (c) a surfactant and (d) an alkoxydecane compound. 一種聚醯亞胺,其特徵在於其含有下述通式(11)所表示之結構單元: [化7]{式中,X1 、X2 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數;Y為選自由下述通式(3)、(4)及(5)所組成之群中之至少一種;l、m分別獨立表示1以上之整數,滿足0.01≦l/(l+m)≦0.99}, [化8][化9][化10]{式中,R4 ~R11 分別獨立表示碳數1~20之一價之有機基;d~k為0~4之整數}。A polyimine which is characterized by containing a structural unit represented by the following formula (11): [Chem. 7] Wherein X 1 and X 2 represent a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; And a, b and c are integers of 0 to 4; Y is at least one selected from the group consisting of the following general formulae (3), (4) and (5); and l and m each independently represent 1 or more. Integer, satisfying 0.01≦l/(l+m)≦0.99}, [Chem. 8] [Chemistry 9] [化10] In the formula, R 4 to R 11 each independently represent an organic group having a carbon number of 1 to 20; and d to k are an integer of 0 to 4}. 一種聚醯亞胺,其特徵在於其含有下述通式(12)所表示之結構單元: [化11]{式中,X3 表示源自選自由4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種的四價之基;R1 ,R2 ,R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數},且伸長率為15%以上。A polyimine which is characterized by containing a structural unit represented by the following formula (12): [Chem. 11] Wherein X 3 represents a source derived from 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA), and 4,4'-biphenyl bis(phenylene) a tetravalent group of at least one of the group consisting of tricarboxylic acid monoester anhydride) (TAHQ); R 1 , R 2 , and R 3 each independently represent an organic group having one carbon number of 1 to 20; n represents 0 or 1; and a, b, and c are integers of 0 to 4}, and the elongation is 15% or more. 一種樹脂膜之製造方法,其特徵在於其包含下述步驟: 藉由於支持體之表面上塗佈如請求項10或11之樹脂組合物而形成塗膜的步驟; 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟;及 將上述聚醯亞胺樹脂膜自上述支持體剝離的步驟。A method for producing a resin film, comprising the steps of: forming a coating film by coating a resin composition of claim 10 or 11 on a surface of a support; by using the above support and the above a step of heating the coating film to imidize the polyamidene precursor contained in the coating film to form a polyimide film; and removing the polyimine resin film from the support . 如請求項14之樹脂膜之製造方法,其中於將上述聚醯亞胺樹脂膜自上述支持體剝離的步驟之前,進行自上述支持體側照射雷射之步驟。The method for producing a resin film according to claim 14, wherein the step of irradiating the laser from the support side is performed before the step of peeling the polyimide film from the support. 一種積層體之製造方法,其特徵在於其包含下述步驟: 藉由於支持體之表面上塗佈如請求項10或11之樹脂組合物而形成塗膜的步驟;及 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟。A method for producing a laminate, comprising the steps of: forming a coating film by coating a resin composition as claimed in claim 10 or 11 on a surface of a support; and by using the above support and The coating film is heated to imidize the polyimine precursor precursor contained in the coating film to form a polyimide film. 一種顯示器基板之製造方法,其特徵在於其包含下述步驟: 藉由於支持體之表面上塗佈如請求項10或11之樹脂組合物而形成塗膜的步驟; 藉由將上述支持體及上述塗膜加熱,而使該塗膜中所含之聚醯亞胺前驅體醯亞胺化從而形成聚醯亞胺樹脂膜的步驟; 於上述聚醯亞胺樹脂膜上形成元件或電路的步驟;及 將上述形成有元件或電路之聚醯亞胺樹脂膜自上述支持體剝離的步驟。A method of manufacturing a display substrate, comprising the steps of: forming a coating film by coating a resin composition as claimed in claim 10 or 11 on a surface of a support; by using the above support and the above a step of heating the coating film to imidize the polyimine precursor precursor contained in the coating film to form a polyimide film; forming a component or a circuit on the polyimide film; And a step of peeling the polyimine resin film on which the element or the circuit is formed from the support. 一種顯示器用聚醯亞胺膜,其特徵在於其含有下述通式(12)所表示之聚醯亞胺: [化12]{式中,X3 為選自由4,4'-氧二鄰苯二甲酸二酐(ODPA)、聯苯四羧酸二酐(BPDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)所組成之群中之至少一種,R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。A polyimide film for display, which comprises a polyimine represented by the following formula (12): [Chemical 12] Wherein X 3 is selected from the group consisting of 4,4'-oxydiphthalic dianhydride (ODPA), biphenyltetracarboxylic dianhydride (BPDA), and 4,4'-biphenyl bis(trimellitic acid). At least one of the group consisting of monoester anhydrides (TAHQ), R 1 , R 2 , and R 3 each independently represent an organic group having one carbon number of 1 to 20; n represents 0 or 1; and a, b and c is an integer from 0 to 4. 一種積層體,其特徵在於其包含聚醯亞胺膜層及低溫多晶矽TFT層,上述聚醯亞胺膜層含有下述通式(13)所表示之聚醯亞胺: [化13]{式中,X1 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。A laminate comprising a polyimide film layer and a low temperature polysilicon TFT layer, wherein the polyimide film layer comprises a polyimine represented by the following formula (13): [Chem. 13] Wherein X 1 represents a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; b and c are integers from 0 to 4}. 一種聚醯亞胺膜,其特徵在於其於400℃以上加熱後之膜厚10微米之黃色度為20以下,膜厚1微米時之308 nm之吸光度為0.6以上且2.0以下,並且伸長率為15%以上。A polyimide film having a film thickness of 10 μm and a yellowness of 20 or less after heating at 400 ° C or higher, and an absorbance at 308 nm of a film thickness of 1 μm of 0.6 or more and 2.0 or less, and an elongation ratio. More than 15%. 一種樹脂組合物,其特徵在於其含有: (a)下述通式(1)所表示之聚醯亞胺前驅體、 (b)有機溶劑、及 選自由(c)界面活性劑及(d)烷氧基矽烷化合物所組成之群中之至少一種, [化14]{式中,X1 表示碳數4~32之四價之基;R1 、R2 、R3 分別獨立表示碳數1~20之一價之有機基;n表示0或1;並且a、b及c為0~4之整數}。A resin composition comprising: (a) a polyimine precursor represented by the following formula (1), (b) an organic solvent, and selected from the group consisting of (c) a surfactant and (d) At least one of the group consisting of alkoxydecane compounds, [Chem. 14] Wherein X 1 represents a tetravalent group having a carbon number of 4 to 32; and R 1 , R 2 and R 3 each independently represent an organic group having a carbon number of 1 to 20; n represents 0 or 1; b and c are integers from 0 to 4}.
TW105130650A 2015-09-24 2016-09-22 Polyimine precursor, resin composition and method for producing resin film TWI641632B (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP??2015-186730 2015-09-24
JP2015186730 2015-09-24
JP??2015-218783 2015-11-06
JP2015218783 2015-11-06
JP??2016-055476 2016-03-18
JP2016055476 2016-03-18
JP??2016-124849 2016-06-23
JP2016124849 2016-06-23

Publications (2)

Publication Number Publication Date
TW201718714A true TW201718714A (en) 2017-06-01
TWI641632B TWI641632B (en) 2018-11-21

Family

ID=58386775

Family Applications (2)

Application Number Title Priority Date Filing Date
TW105130650A TWI641632B (en) 2015-09-24 2016-09-22 Polyimine precursor, resin composition and method for producing resin film
TW107135584A TWI695855B (en) 2015-09-24 2016-09-22 Polyimide precursor, resin composition and resin film manufacturing method

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW107135584A TWI695855B (en) 2015-09-24 2016-09-22 Polyimide precursor, resin composition and resin film manufacturing method

Country Status (5)

Country Link
JP (5) JP6444522B2 (en)
KR (3) KR102460768B1 (en)
CN (2) CN112940253A (en)
TW (2) TWI641632B (en)
WO (1) WO2017051827A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI649298B (en) * 2017-01-27 2019-02-01 Wingo Technology Co., Ltd. Diamine compound, and polyimide compound and molded article using the same
TWI722787B (en) * 2019-02-01 2021-03-21 南韓商Lg化學股份有限公司 Polyimide precursor composition and polyimide film, substrate for display device, and optical device prepared by using same
US11999823B2 (en) 2019-02-01 2024-06-04 Lg Chem, Ltd. Polyimide-based polymer film, substrate for display device, and optical device using the same

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3608350B1 (en) * 2017-04-07 2023-05-24 I.S.T Corporation Polyimide film
CN112004858B (en) 2018-03-30 2023-06-30 株式会社钟化 Polyamic acid, polyamic acid solution, polyimide film, laminate, flexible device, and method for producing polyimide film
KR102516144B1 (en) * 2018-08-28 2023-03-29 주식회사 엘지화학 Pre-treating method of solvent for transparent film
KR102452136B1 (en) * 2018-12-20 2022-10-07 코오롱인더스트리 주식회사 Polyamic acid, Polyimide and Polyimide Film
US20220162445A1 (en) * 2019-02-01 2022-05-26 Wingo Technology Co., Ltd. Polyimide compound and molded article comprising the polyimide compound
WO2020159174A1 (en) * 2019-02-01 2020-08-06 주식회사 엘지화학 Polyimide-based polymer film, and substrate for display device and optical device, each using same
WO2020195819A1 (en) * 2019-03-26 2020-10-01 コニカミノルタ株式会社 Method for manufacturing optical film and optical film
JP7349253B2 (en) * 2019-03-29 2023-09-22 株式会社カネカ A polyamic acid, a polyamic acid solution, a polyimide, a polyimide film, a laminate, a flexible device, and a method for producing a polyimide film.
WO2021028960A1 (en) * 2019-08-09 2021-02-18 太陽ホールディングス株式会社 Colored resin composition, cured product, and laminate
KR20220056861A (en) * 2019-10-03 2022-05-06 미쓰이 가가쿠 가부시키가이샤 Polyimide film, polyamic acid, varnish containing same, polyimide laminate, and manufacturing method thereof
JP7365940B2 (en) * 2020-03-05 2023-10-20 東京応化工業株式会社 Varnish composition and method for producing polyimide resin
CN115348987A (en) 2020-03-27 2022-11-15 三菱瓦斯化学株式会社 Polyimide film and laminate
KR20230007328A (en) 2020-04-16 2023-01-12 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 Imide-amic acid copolymer and its preparation method, varnish, and polyimide film
CN115380059B (en) * 2020-04-16 2024-05-24 三菱瓦斯化学株式会社 Imide-amic acid copolymer, process for producing the same, varnish, and polyimide film
JP2021175790A (en) * 2020-04-24 2021-11-04 旭化成株式会社 Polyimide precursor and resin composition including the same, polyimide resin film, resin film, and method for producing the same
JP7483480B2 (en) 2020-04-24 2024-05-15 旭化成株式会社 Polyimide precursor, polyimide resin composition, polyimide resin film, and method for producing the same
CN111533909B (en) * 2020-06-08 2023-04-25 武汉柔显科技股份有限公司 Polyamide imide, polyamide imide film and display device
CN112225897A (en) * 2020-10-19 2021-01-15 深圳市道尔顿电子材料有限公司 Trifluoromethyl substituted aromatic diamine compound containing aromatic ester structure and preparation method thereof
KR20230092934A (en) * 2020-10-22 2023-06-26 가부시키가이샤 가네카 Polyamic acid, polyamic acid solution, polyimide, polyimide film, laminate, electronic device, and method for producing polyimide film
CN112175186B (en) * 2020-10-29 2022-12-20 深圳市道尔顿电子材料有限公司 Polyimide material and preparation method thereof, polyimide film and preparation method thereof
JPWO2022168832A1 (en) * 2021-02-03 2022-08-11
JP7174199B1 (en) 2021-04-02 2022-11-17 旭化成株式会社 Polyimide, resin composition, polyimide film, and method for producing the same
CN113292726B (en) * 2021-04-10 2023-03-24 常州市尚科新材料有限公司 Polyimide molding powder and preparation method and application thereof
WO2022220286A1 (en) 2021-04-16 2022-10-20 三菱瓦斯化学株式会社 Imide-amic acid copolymer and production method therefor, varnish, and polyimide film
TW202346425A (en) * 2022-03-29 2023-12-01 日商Ube股份有限公司 Polyimide precursor composition for flexible wiring boards, polyimide film, and polyimide metal multilayer body
KR20240055121A (en) 2022-07-29 2024-04-26 유비이 가부시키가이샤 Polyimide precursor composition, polyimide film and polyimide film/substrate laminate
JP7235157B1 (en) 2022-07-29 2023-03-08 Ube株式会社 Polyimide precursor composition, polyimide film and polyimide film/substrate laminate
WO2024058194A1 (en) * 2022-09-16 2024-03-21 三菱瓦斯化学株式会社 Method for producing polyimide film

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4627297Y1 (en) 1966-10-15 1971-09-20
JP3079867B2 (en) 1993-11-10 2000-08-21 信越化学工業株式会社 Polyimide copolymer, method for producing the same, and polyimide film
JPH1070157A (en) * 1996-08-27 1998-03-10 Kanegafuchi Chem Ind Co Ltd Fc type and tab tape using new polyimide film as base film
JP4608715B2 (en) * 1999-12-24 2011-01-12 Dic株式会社 Process for producing polyarylene sulfide
JP3079867U (en) 2001-02-27 2001-08-31 馬 慶修 Computer desk
TWI344967B (en) 2004-05-21 2011-07-11 Manac Inc Polyesterimide having low cofficient of linear expansion and precursor thereof
JP4699321B2 (en) 2005-09-20 2011-06-08 新日鐵化学株式会社 Ester group-containing polyimide, precursor thereof, and production method thereof
JP5251508B2 (en) * 2006-07-27 2013-07-31 宇部興産株式会社 Heat-resistant film metal foil laminate and method for producing the same
KR101225842B1 (en) 2007-08-27 2013-01-23 코오롱인더스트리 주식회사 Colorless polyimide film
JP2009091441A (en) 2007-10-05 2009-04-30 Asahi Kasei Corp Polyimide precursor and polyimide
CN102027044A (en) * 2008-05-16 2011-04-20 旭化成电子材料株式会社 Polyester-imide precursor and polyester-imide
JP5362385B2 (en) * 2009-02-23 2013-12-11 旭化成イーマテリアルズ株式会社 Polyamic acid varnish composition and polyimide metal laminate using the same
TWI470353B (en) * 2009-03-26 2015-01-21 Nippon Steel & Sumikin Chem Co A photosensitive resin composition and a hardening film
JP5755401B2 (en) * 2009-04-30 2015-07-29 株式会社ピーアイ技術研究所 Method for producing modified polyimide and modified polyimide
JP2011021072A (en) * 2009-07-14 2011-02-03 Asahi Kasei E-Materials Corp Polyesterimide precursor and polyesterimide
WO2011063209A1 (en) * 2009-11-20 2011-05-26 E. I. Du Pont De Nemours And Company Thin film transistor compositions, and methods relating thereto
JP5923887B2 (en) * 2011-07-21 2016-05-25 宇部興産株式会社 Polyimide and polyimide precursor
JP6075564B2 (en) * 2011-11-25 2017-02-08 日産化学工業株式会社 Resin composition for display substrate
KR20190095556A (en) * 2012-09-19 2019-08-14 혼슈우 카가쿠고교 가부시키가이샤 Polyimide and molded body thereof
JP6405616B2 (en) * 2012-10-25 2018-10-17 三菱ケミカル株式会社 LAMINATE MANUFACTURING METHOD, LAMINATE, DEVICE LAMINATE, AND DEVICE FILM
CN105593269B (en) * 2013-09-27 2017-11-21 东丽株式会社 Polyimide precursor, polyimide resin film therefrom and the display element containing it, optical element, photo detector, touch panel, circuit substrate, organic el display and organic EL element and the manufacture method of colour filter
JP6372200B2 (en) 2013-10-07 2018-08-15 Jsr株式会社 Method for producing liquid crystal alignment film, photo-alignment agent, and liquid crystal display element
JP2015078254A (en) * 2013-10-15 2015-04-23 東レ株式会社 Resin composition, polyimide resin film using the same, color filter, tft substrate and display device including the same, and their production method
KR101869173B1 (en) * 2014-02-14 2018-06-19 아사히 가세이 가부시키가이샤 Polyimide precursor and resin composition containing same
KR102268406B1 (en) * 2014-02-21 2021-06-23 미쯔비시 케미컬 주식회사 Polyimide precursor and/or polyimide-containing composition, and polyimide film
JP6555126B2 (en) * 2014-02-26 2019-08-07 東レ株式会社 Polyimide resin, resin composition and laminated film using the same
CN111234217A (en) * 2015-02-10 2020-06-05 日产化学工业株式会社 Composition for forming release layer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI649298B (en) * 2017-01-27 2019-02-01 Wingo Technology Co., Ltd. Diamine compound, and polyimide compound and molded article using the same
TWI722787B (en) * 2019-02-01 2021-03-21 南韓商Lg化學股份有限公司 Polyimide precursor composition and polyimide film, substrate for display device, and optical device prepared by using same
US11999823B2 (en) 2019-02-01 2024-06-04 Lg Chem, Ltd. Polyimide-based polymer film, substrate for display device, and optical device using the same

Also Published As

Publication number Publication date
CN108026273B (en) 2021-04-06
JP2020172652A (en) 2020-10-22
KR102460768B1 (en) 2022-10-28
TWI641632B (en) 2018-11-21
KR20180048605A (en) 2018-05-10
CN112940253A (en) 2021-06-11
JP7095024B2 (en) 2022-07-04
KR102133559B1 (en) 2020-07-13
TWI695855B (en) 2020-06-11
JP2024023254A (en) 2024-02-21
JP2022128480A (en) 2022-09-01
CN108026273A (en) 2018-05-11
KR20200085383A (en) 2020-07-14
JP7383764B2 (en) 2023-11-20
JP2019070811A (en) 2019-05-09
WO2017051827A1 (en) 2017-03-30
JP6444522B2 (en) 2018-12-26
KR20220147724A (en) 2022-11-03
JPWO2017051827A1 (en) 2018-03-22
TW201902992A (en) 2019-01-16
KR102659377B1 (en) 2024-04-19
JP6725626B2 (en) 2020-07-22

Similar Documents

Publication Publication Date Title
JP7383764B2 (en) Polyimide precursor, resin composition, and method for producing resin film
JP7152381B2 (en) Resin precursor, resin composition containing the same, polyimide resin film, resin film, and method for producing the same
JP7055832B2 (en) Polyimide precursor, resin composition, resin film and its manufacturing method
JP6476278B2 (en) Polyimide precursor resin composition
KR102593077B1 (en) Polyimide precursor and resin composition containing same, polyimide resin film, resin film and method of producing same
CN113549217B (en) Polyimide precursor, resin composition containing same, polyimide resin film, and method for producing same
JP7483480B2 (en) Polyimide precursor, polyimide resin composition, polyimide resin film, and method for producing the same
TW202204474A (en) resin composition