TW201716856A - Photo-sensitive resin composition, dry film, and printed wiring board (2) - Google Patents

Photo-sensitive resin composition, dry film, and printed wiring board (2) Download PDF

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TW201716856A
TW201716856A TW105102680A TW105102680A TW201716856A TW 201716856 A TW201716856 A TW 201716856A TW 105102680 A TW105102680 A TW 105102680A TW 105102680 A TW105102680 A TW 105102680A TW 201716856 A TW201716856 A TW 201716856A
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resin composition
photosensitive resin
carboxyl group
epoxy
group
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TW105102680A
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TWI620012B (en
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樋口倫也
橋本壯一
荒井貴
川里浩信
稻葉真司
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互應化學工業股份有限公司
新日鐵住金化學股份有限公司
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Priority claimed from JP2015215709A external-priority patent/JP6140246B2/en
Priority claimed from JP2015215706A external-priority patent/JP6082083B1/en
Priority claimed from JP2015215708A external-priority patent/JP6172816B2/en
Application filed by 互應化學工業股份有限公司, 新日鐵住金化學股份有限公司 filed Critical 互應化學工業股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials For Photolithography (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)

Abstract

The objective of the present invention is to have a photosensitive resin composition achieve excellent developability even if a carboxyl group-containing resin having a bisphenol fluorene skeleton is contained therein and to have a cured product of the photosensitive resin composition less susceptible to the occurrence of cracks during repeated temperature changes. A photosensitive resin composition according to the present invention contains a carboxyl group-containing resin (A), an unsaturated compound, a photopolymerization initiator and an epoxy compound. The carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) which is a reaction product of an acid anhydride and an intermediate that is a reaction product of an unsaturated group-containing carboxylic acid and an epoxy compound having a bisphenol fluorene skeleton represented by formula (1). The epoxy compound contains a crystalline epoxy resin and an amorphous epoxy resin.

Description

感光性樹脂組成物、乾膜及印刷線路板(二) Photosensitive resin composition, dry film and printed wiring board (2)

本發明有關一種感光性樹脂組成物、乾膜、印刷線路板,更詳細而言,本發明有關一種感光性樹脂組成物,其適合用以在印刷線路板上形成抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層等電絕緣性層。 The present invention relates to a photosensitive resin composition, a dry film, and a printed wiring board. More specifically, the present invention relates to a photosensitive resin composition suitable for forming a solder resist layer and a plating resist layer on a printed wiring board. An electrically insulating layer such as an etch resist layer or an interlayer insulating layer.

過去使用電絕緣性的樹脂組成物,用以形成印刷線路板的抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層等電絕緣性層。這樣的樹脂組成物,例如是感光性樹脂組成物。 In the past, an electrically insulating resin composition was used to form an electrically insulating layer such as a solder resist layer, a plating resist layer, an etch resist layer, and an interlayer insulating layer of a printed wiring board. Such a resin composition is, for example, a photosensitive resin composition.

已提案在感光性樹脂組成物中調配一種含羧基樹脂,用以對由感光性樹脂組成物所形成之層賦予較高的耐熱性,該含羧基樹脂具有雙酚茀骨架。例如日本專利第4508929號揭示使用一種具備茀骨架之含羧基樹脂,該含羧基樹脂是使茀環氧(甲基)丙烯酸酯與多元羧酸或其酸酐進行反應而獲得。 It has been proposed to formulate a carboxyl group-containing resin in a photosensitive resin composition for imparting high heat resistance to a layer formed of a photosensitive resin composition having a bisphenol fluorene skeleton. For example, Japanese Patent No. 4,508, 929 discloses the use of a carboxyl group-containing resin having an anthracene skeleton obtained by reacting a fluorene epoxy (meth) acrylate with a polyvalent carboxylic acid or an anhydride thereof.

然而,感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,則顯影性會較低,而難以使用這樣的感光 性樹脂組成物並以光刻法來製作厚度充分的抗焊劑層和層間絕緣層等電絕緣性層。又,即便能夠提高由上述感光性樹脂組成物所形成的層的耐熱性,在包含溫度上升與溫度下降在內的溫度變化反覆進行中,這樣的層仍會發生龜裂。 However, since the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, developability is low, and it is difficult to use such a sensitization. An electrically insulating layer such as a solder resist layer and an interlayer insulating layer having a sufficient thickness is formed by photolithography. Moreover, even if the heat resistance of the layer formed of the photosensitive resin composition can be improved, such a layer may be cracked even when the temperature change including temperature rise and temperature drop is repeated.

本發明的目的在於提供一種感光性樹脂組成物、乾膜、具備抗焊劑層之印刷線路板、具備層間絕緣層之印刷線路板、及前述感光性樹脂組成物的製造方法,該乾膜是前述感光性樹脂組成物的乾燥物,該抗焊劑層包含前述感光性樹脂組成物的硬化物,而該層間絕緣層包含前述感光性樹脂組成物的硬化物,並且,即便感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,仍能夠獲得優異的顯影性,而且仍能夠使其硬化物在溫度變化反覆進行中不容易發生龜裂。 An object of the present invention is to provide a photosensitive resin composition, a dry film, a printed wiring board having a solder resist layer, a printed wiring board including an interlayer insulating layer, and a method for producing the photosensitive resin composition, wherein the dry film is the aforementioned a dried product of the photosensitive resin composition, wherein the solder resist layer contains a cured product of the photosensitive resin composition, and the interlayer insulating layer contains a cured product of the photosensitive resin composition, and the photosensitive resin composition contains The carboxyl group-containing resin of the bisphenol fluorene skeleton can still obtain excellent developability, and can still cause the cured product to be less likely to crack during temperature change.

本發明的一態樣的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);並且,前述含羧基樹脂(A)含有含羧基樹脂(A1),該含羧基樹脂(A1)是中間體與酸酐之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物;前述環氧化合物(a1)具有以下述式(1)來表示 的雙酚茀骨架,且式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素;前述環氧化合物(D)含有結晶性環氧樹脂與非晶性環氧樹脂,而且,相對於前述含羧基樹脂(A)的1當量的羧基,前述結晶性環氧樹脂和前述非晶性環氧樹脂中包含的環氧基的當量的合計量在0.7~2.5的範圍內, An exemplary photosensitive resin composition of the present invention comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator ( And an epoxy compound (D); and the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) which is a reactant of an intermediate and an acid anhydride, and the intermediate is a ring a reactant of the oxygen compound (a1) and the unsaturated group-containing carboxylic acid (a2); the epoxy compound (a1) has a bisphenol fluorene skeleton represented by the following formula (1), and in the formula (1), R 1 ~R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen; and the epoxy compound (D) contains a crystalline epoxy resin and an amorphous epoxy resin, and is furthermore than the above-mentioned carboxyl group-containing resin. The total amount of the equivalent weight of the carboxyl group contained in the crystalline epoxy resin and the amorphous epoxy resin is in the range of 0.7 to 2.5,

本發明的一態樣的乾膜,含有前述感光性樹脂組成物。 A dry film according to an aspect of the present invention contains the photosensitive resin composition.

本發明的一態樣的印刷線路板,其具備層間絕緣層,該層間絕緣層包含前述感光性樹脂組成物的硬化物。 An printed wiring board according to an aspect of the present invention includes an interlayer insulating layer containing a cured product of the photosensitive resin composition.

本發明的一態樣的印刷線路板,其具備抗焊劑層,該抗焊劑層包含前述感光性樹脂組成物的硬化物。 A printed wiring board according to an aspect of the present invention includes a solder resist layer containing a cured product of the photosensitive resin composition.

1‧‧‧芯材 1‧‧‧ core material

2‧‧‧絕緣層 2‧‧‧Insulation

3‧‧‧第一導體線路 3‧‧‧First conductor line

4‧‧‧皮膜 4‧‧ ‧ film

5‧‧‧未曝光部分 5‧‧‧Unexposed parts

6‧‧‧孔 6‧‧‧ hole

7‧‧‧層間絕緣層 7‧‧‧Interlayer insulation

8‧‧‧第二導體線路 8‧‧‧Second conductor line

9‧‧‧穿孔鍍覆 9‧‧‧Perforated plating

10‧‧‧貫穿孔 10‧‧‧through holes

11‧‧‧印刷線路板 11‧‧‧Printed circuit board

第1圖A至第1圖E是表示製造本發明的一實施形態的多層印刷線路板的步驟之剖面圖。 Fig. 1 to Fig. 1E are cross-sectional views showing the steps of manufacturing a multilayer printed wiring board according to an embodiment of the present invention.

以下,說明本發明的一實施形態。再者,在以下說明中,「(甲基)丙烯酸」意指「丙烯酸」與「甲基丙烯酸」之中的至少其中一者。例如,(甲基)丙烯酸酯意指丙烯酸酯與甲基丙烯酸酯之中的至少其中一者。 Hereinafter, an embodiment of the present invention will be described. In the following description, "(meth)acrylic acid" means at least one of "acrylic acid" and "methacrylic acid". For example, (meth) acrylate means at least one of acrylate and methacrylate.

本實施形態的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D)。 The photosensitive resin composition of the present embodiment, comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C); And, epoxy compound (D).

含羧基樹脂(A),其含有含羧基樹脂(A1),該含羧基樹脂(A1)具有雙酚茀骨架。 The carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) having a bisphenol fluorene skeleton.

含羧基樹脂(A1),例如是中間體與酸酐之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物。環氧化合物(a1)具有雙酚茀骨架,該雙酚茀骨架是以下述式(1)來表示,且式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素。 The carboxyl group-containing resin (A1) is, for example, a reaction product of an intermediate and an acid anhydride, and the intermediate is a reaction product of an epoxy compound (a1) and an unsaturated group-containing carboxylic acid (a2). The epoxy compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the following formula (1), and in the formula (1), R 1 to R 8 are each independently hydrogen and have a carbon number of 1 to 5. Alkyl, or halogen.

含羧基樹脂(A1),是藉由下述方式來合成:使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,並使藉此獲得的中間體與酸酐進行反應。 The carboxyl group-containing resin (A1) is synthesized by reacting the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2), and reacting the intermediate obtained thereby with an acid anhydride.

式(1)中的R1~R8,各自可以是氫,亦可以是碳數1~5的烷基、或鹵素。這是因為下述緣故:即便芳香環中的氫被低分子量的烷基或鹵素取代,也不會對含羧基樹脂(A1)有不良影響,反而有時也會提升包含了含羧基樹脂(A1)之感光性樹脂組成物的硬化物的耐熱性或阻燃性。 R 1 to R 8 in the formula (1) may each be hydrogen, or may be an alkyl group having 1 to 5 carbon atoms or a halogen. This is because, even if the hydrogen in the aromatic ring is replaced by a low molecular weight alkyl group or a halogen, the carboxyl group-containing resin (A1) is not adversely affected, and the carboxyl group-containing resin (A1) is sometimes promoted. The heat resistance or flame retardancy of the cured product of the photosensitive resin composition.

更具體地說明含羧基樹脂(A1)。為了合成含羧基樹脂(A1),首先使環氧化合物(a1)的至少一部分的環氧基(參照式(2)),與含不飽和基羧酸(a2)進行反應,藉此合成中間體。中間體具有下述式(3)所示的結構(S3),該結構(S3)是由環氧基與含不飽和基羧酸(a2)的開環加成反應所產生。亦即,中間體在結構(S3)中具有二級羥基,該二級羥基是由環氧基與含不飽和基羧酸(a2)的開環加成反應所產生。在式(3)中,A是含不飽和基羧酸殘基。 The carboxyl group-containing resin (A1) is more specifically described. In order to synthesize the carboxyl group-containing resin (A1), first, an epoxy group (refer to the formula (2)) of at least a part of the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2) to thereby synthesize an intermediate. . The intermediate has a structure (S3) represented by the following formula (3) which is produced by a ring-opening addition reaction of an epoxy group with an unsaturated group-containing carboxylic acid (a2). That is, the intermediate has a secondary hydroxyl group in the structure (S3) which is produced by a ring-opening addition reaction of an epoxy group with an unsaturated group-containing carboxylic acid (a2). In the formula (3), A is an unsaturated group-containing carboxylic acid residue.

繼而,使中間體中的二級羥基與酸酐進行反應。藉此,能夠合成含羧基樹脂(A1)。 The secondary hydroxyl group in the intermediate is then reacted with an anhydride. Thereby, the carboxyl group-containing resin (A1) can be synthesized.

酸酐可含有酸二酐(a3)和酸單酐(Monoanhydride)(a4)之中的至少其中一種。當酸酐含有酸單酐(a4)時,含羧基樹脂(A1)具有以式(1)來表示的雙酚茀骨架(S1)與下述式(4)所示的結構(S4)。 The acid anhydride may contain at least one of acid dianhydride (a3) and monoanhydride (a4). When the acid anhydride contains the acid monoanhydride (a4), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1) represented by the formula (1) and a structure (S4) represented by the following formula (4).

結構(S4)是藉由中間體的結構(S3)中的二級羥基與酸單酐(a4)中的酸酐基進行反應來產生。在式(4)中,A是含不飽和基羧酸殘基,B是酸單酐殘基。 The structure (S4) is produced by reacting a secondary hydroxyl group in the structure (S3) of the intermediate with an acid anhydride group in the acid monoanhydride (a4). In the formula (4), A is an unsaturated group-containing carboxylic acid residue, and B is an acid mono-anhydride residue.

當酸酐含有酸二酐(a3)時,含羧基樹脂(A1)具有雙酚茀骨架(S1)與下述式(5)所示的結構(S5)。 When the acid anhydride contains the acid dianhydride (a3), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1) and a structure (S5) represented by the following formula (5).

結構(S5),是藉由酸二酐(a3)中的2個酸酐基分別與中間體中的2個二級羥基進行反應來產生。亦即,結構(S5),是藉由酸二酐(a3)將2個二級羥基彼此進行交聯來生成。再者,可能會有:存在於1個分子的中間體中的2個二級羥基彼此被交聯的情形、與分別存在於2個分子的中間體中的2個二級羥基彼此被交聯的情形。若分別存在於2個分子的中間體中的2個二級羥基彼此被交聯時,則分子量會增加。在式(5)中,A是含不飽和基羧酸殘基,D是酸二酐殘基。 The structure (S5) is produced by reacting two acid anhydride groups in the acid dianhydride (a3) with two secondary hydroxyl groups in the intermediate. That is, the structure (S5) is produced by crosslinking two secondary hydroxyl groups with each other by acid dianhydride (a3). Furthermore, there may be a case where two secondary hydroxyl groups present in one molecule of the intermediate are cross-linked to each other, and two secondary hydroxyl groups respectively present in the intermediate of two molecules are cross-linked to each other. The situation. If two secondary hydroxyl groups respectively present in the intermediate of two molecules are cross-linked to each other, the molecular weight increases. In the formula (5), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.

可使中間體中的二級羥基與酸酐進行反應,來獲得含羧基樹脂(A1)。當酸酐含有酸二酐(a3)和酸單酐(a4)時,使中間體中的二級羥基中的一部份與酸二酐(a3)進行反應,且使中間體中的二級羥基中的另一部份與酸單酐(a4)進行反應。藉此,能夠合成含羧基樹脂(A1)。此時,含羧基樹脂(A1)具有雙酚茀骨架(S1)、結構(S4)及結構(S5)。 The secondary hydroxyl group in the intermediate can be reacted with an acid anhydride to obtain a carboxyl group-containing resin (A1). When the acid anhydride contains acid dianhydride (a3) and acid monoanhydride (a4), a part of the secondary hydroxyl group in the intermediate is reacted with the acid dianhydride (a3), and the secondary hydroxyl group in the intermediate is made. Another part of the reaction with the acid monoanhydride (a4). Thereby, the carboxyl group-containing resin (A1) can be synthesized. At this time, the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1), a structure (S4), and a structure (S5).

含羧基樹脂(A1)亦可能進一步具有以下述式(6)來表示的結構(S6)。結構(S6),是藉由下述方式來產生:在酸二酐(a3)中的2個酸酐基中,僅其中1個酸酐基與中間體中的二級羥基進行反應。在式(6)中,A是含不飽和基羧酸殘基,D是酸二酐殘基。 The carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6). The structure (S6) is produced by reacting only one of the two acid anhydride groups in the acid dianhydride (a3) with the secondary hydroxyl group in the intermediate. In the formula (6), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.

在合成中間體時,當環氧化合物(a1)中的一部分環氧基未進行反應而殘留時,含羧基樹脂(A1)可能具有如式(2)所示的結構(S2)亦即環氧基。又,當中間體中的一部分結構(S3)是未進行反應而殘留時,含羧基樹脂(A1)亦可能具有結構(S3)。 When the intermediate is synthesized, when a part of the epoxy group in the epoxy compound (a1) is left unreacted, the carboxyl group-containing resin (A1) may have a structure (S2) as shown in the formula (2). base. Further, when a part of the structure (S3) in the intermediate remains without reaction, the carboxyl group-containing resin (A1) may have a structure (S3).

當酸酐含有酸二酐(a3)時,藉由將合成含羧基樹脂(A1)時的反應條件最佳化,來減少含羧基樹脂(A1)中的結構(S2)和結構(S6)的數量、或自含羧基樹脂(A1)將結構(S2)和結構(S6)的大部分去除。 When the acid anhydride contains acid dianhydride (a3), the number of structures (S2) and structures (S6) in the carboxyl group-containing resin (A1) is reduced by optimizing the reaction conditions for synthesizing the carboxyl group-containing resin (A1). Or removing most of the structure (S2) and the structure (S6) from the carboxyl group-containing resin (A1).

如上所述,含羧基樹脂(A1),可具有雙酚茀骨架(S1),且當酸酐含有酸單酐(a4)時可具有結構(S4),而當酸酐含有酸二酐(a3)時可具有結構(S5)。進一步,當酸酐含有酸單酐(a4)時,含羧基樹脂(A1),有時具有結構(S2)與結構(S3)之中的至少其中一種。又,當酸酐含有酸二酐(a3)時,含羧基樹脂(A1),有時具有結構(S2)與結構(S6)之中的至少其中一種。又,進一步當酸酐含有酸單酐(a4)與酸二酐(a3)時,含羧基樹脂 (A1)有時具有(S2)、結構(S3)及結構(S6)之中的至少其中一種。 As described above, the carboxyl group-containing resin (A1) may have a bisphenol fluorene skeleton (S1), and may have a structure (S4) when the acid anhydride contains the acid monoanhydride (a4), and when the acid anhydride contains the acid dianhydride (a3) It may have a structure (S5). Further, when the acid anhydride contains the acid monoanhydride (a4), the carboxyl group-containing resin (A1) sometimes has at least one of the structure (S2) and the structure (S3). Further, when the acid anhydride contains the acid dianhydride (a3), the carboxyl group-containing resin (A1) may have at least one of the structure (S2) and the structure (S6). Further, when the acid anhydride contains the acid monoanhydride (a4) and the acid dianhydride (a3), the carboxyl group-containing resin (A1) sometimes has at least one of (S2), structure (S3), and structure (S6).

又,當環氧化合物(a1)本身具有二級羥基時,亦即,例如當後述式(7)中是n=1以上時,含羧基樹脂(A1),有時也會具有藉由環氧化合物(a1)中的二級羥基與酸酐進行反應來產生的結構。 Further, when the epoxy compound (a1) itself has a secondary hydroxyl group, that is, for example, when n=1 or more in the following formula (7), the carboxyl group-containing resin (A1) sometimes has an epoxy group. A structure produced by reacting a secondary hydroxyl group in the compound (a1) with an acid anhydride.

再者,上述含羧基樹脂(A1)的結構,是依據技術常識來合理類推而得,現實上則無法藉由分析來特定出含羧基樹脂(A1)的結構。其理由如下所述。當環氧化合物(a1)本身具有二級羥基時(例如當在式(7)中n為1以上時),根據環氧化合物(a1)中的二級羥基的數量不同,含羧基樹脂(A1)的結構會有很大變化。又,在中間體與酸二酐(a3)進行反應時,如上所述,可能會有於存在於1個分子的中間體中的2個二級羥基彼此被酸二酐(a3)交聯的情形、與分別存在於2個分子的中間體中的2個二級羥基彼此被酸二酐(a3)交聯的情形。因此,最終獲得的含羧基樹脂(A1),包含了相互結構不同之複數分子,因而即便分析含羧基樹脂(A1),也無法特定出其結構。 Further, the structure of the carboxyl group-containing resin (A1) is rationally derived based on technical common sense, and in reality, the structure of the carboxyl group-containing resin (A1) cannot be specified by analysis. The reason is as follows. When the epoxy compound (a1) itself has a secondary hydroxyl group (for example, when n is 1 or more in the formula (7)), the carboxyl group-containing resin (A1) differs depending on the amount of the secondary hydroxyl group in the epoxy compound (a1). The structure of the ) will vary greatly. Further, when the intermediate is reacted with the acid dianhydride (a3), as described above, two secondary hydroxyl groups present in the intermediate of one molecule may be cross-linked with each other by the acid dianhydride (a3). In the case, the two secondary hydroxyl groups respectively present in the intermediate of two molecules are crosslinked by the acid dianhydride (a3). Therefore, the carboxyl group-containing resin (A1) finally obtained contains a plurality of molecules having different structures from each other, and thus even if the carboxyl group-containing resin (A1) is analyzed, the structure cannot be specified.

含羧基樹脂(A1),因為其具有源自含不飽和基羧酸(a2)之乙烯性不飽和基,所以具有光反應性。因此,含羧基樹脂(A1)能夠對感光性樹脂組成物賦予感光性(具體而言是紫外線硬化性)。又,含羧基樹脂(A1),因為其具有源自酸酐之羧基,所以能夠對感光性樹脂組成 物賦予藉由鹼性水溶液之顯影性,該鹼性水溶液含有鹼金屬鹽和鹼金屬氫氧化物之中的至少其中一者。進一步,當酸酐含有酸二酐(a3)時,含羧基樹脂(A1)的分子量,取決於藉由酸二酐(a3)來進行之架橋的數量。因此,能夠獲得酸價與分子量經適度地調整後之含羧基樹脂(A1)。當酸酐含有酸二酐(a3)和酸單酐(a4)時,藉由控制酸二酐(a3)和酸單酐(a4)的量、以及酸單酐(a4)相對於酸二酐(a3)的量,能夠容易獲得所期望的分子量和酸價之含羧基樹脂(A1)。 The carboxyl group-containing resin (A1) has photoreactivity because it has an ethylenically unsaturated group derived from the unsaturated group-containing carboxylic acid (a2). Therefore, the carboxyl group-containing resin (A1) can impart photosensitivity (specifically, ultraviolet curability) to the photosensitive resin composition. Further, the carboxyl group-containing resin (A1) can be composed of a photosensitive resin because it has a carboxyl group derived from an acid anhydride. The material is imparted with developability by an aqueous alkaline solution containing at least one of an alkali metal salt and an alkali metal hydroxide. Further, when the acid anhydride contains the acid dianhydride (a3), the molecular weight of the carboxyl group-containing resin (A1) depends on the number of bridging by the acid dianhydride (a3). Therefore, the carboxyl group-containing resin (A1) whose acid value and molecular weight are appropriately adjusted can be obtained. When the acid anhydride contains the acid dianhydride (a3) and the acid monoanhydride (a4), by controlling the amounts of the acid dianhydride (a3) and the acid monoanhydride (a4), and the acid monoanhydride (a4) relative to the acid dianhydride ( The amount of a3) can easily obtain a carboxyl group-containing resin (A1) having a desired molecular weight and acid value.

含羧基樹脂(A1)的重量平均分子量,較佳是在1000~5000的範圍內。若重量平均分子量是1000以上,則能夠進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。又,若重量平均分子量是5000以下,則能夠特別提升感光性樹脂組成物的藉由鹼性水溶液之顯影性。 The weight average molecular weight of the carboxyl group-containing resin (A1) is preferably in the range of from 1,000 to 5,000. When the weight average molecular weight is 1000 or more, the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. In addition, when the weight average molecular weight is 5,000 or less, the developability of the photosensitive resin composition by the alkaline aqueous solution can be particularly improved.

含羧基樹脂(A1)的固體成分酸價,較佳是在60~140mgKOH/g的範圍內。此時,能夠特別提升感光性樹脂組成物的顯影性。固體成分酸價,更佳是在80~135mgKOH/g的範圍內,進一步較佳是在90~130mgKOH/g的範圍內。 The solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH/g. In this case, the developability of the photosensitive resin composition can be particularly improved. The solid content acid value is more preferably in the range of 80 to 135 mgKOH/g, still more preferably in the range of 90 to 130 mgKOH/g.

含羧基樹脂(A1)的重量平均分子量(Mw),是由藉由膠體滲透層析法(Gel Permeation Chromatography,GPC)所進行的分子量測定結果來 進行計算。利用膠體滲透層析法的分子量測定,能夠以例如下述條件來實行。 The weight average molecular weight (Mw) of the carboxyl group-containing resin (A1) is determined by molecular weight measurement by Gel Permeation Chromatography (GPC). Calculation. The molecular weight measurement by colloidal osmosis chromatography can be carried out, for example, under the following conditions.

GPC裝置:昭和電工公司製造,商品名:SHODEX SYSTEM 11;管柱:SHODEX KF-800P、KF-005、KF-003、KF-001之4管串聯;移動相:四氫呋喃(Tetrahydrofuran,THF);流量:1ml/分鐘;管柱溫度:45℃;偵測器:折射率(RI)偵測器;換算:聚苯乙烯。 GPC device: manufactured by Showa Denko, trade name: SHODEX SYSTEM 11; pipe column: SHODEX KF-800P, KF-005, KF-003, KF-001 4 tube series; mobile phase: Tetrahydrofuran (THF); flow : 1 ml / min; column temperature: 45 ° C; detector: refractive index (RI) detector; conversion: polystyrene.

詳細地說明含羧基樹脂(A1)的原料及合成含羧基樹脂(A1)時的反應條件。 The raw material of the carboxyl group-containing resin (A1) and the reaction conditions when the carboxyl group-containing resin (A1) is synthesized will be described in detail.

環氧化合物(a1),具有例如下述式(7)所示的結構(S7)。式(7)中的n,例如是在0~20的範圍內的數。為了使含羧基樹脂(A1)的分子量為適當的值,n的平均,特佳是在0~1的範圍內。若n的平均在0~1的範圍內,尤其是當酸酐含有酸二酐(a3)時,則容易抑制由於酸二酐(a3)的加成所導致的過剩量的分子量增加。 The epoxy compound (a1) has a structure (S7) represented by the following formula (7), for example. n in the formula (7) is, for example, a number in the range of 0 to 20. In order to make the molecular weight of the carboxyl group-containing resin (A1) an appropriate value, the average of n is particularly preferably in the range of 0 to 1. If the average of n is in the range of 0 to 1, especially when the acid anhydride contains acid dianhydride (a3), it is easy to suppress an excessive increase in molecular weight due to the addition of the acid dianhydride (a3).

含不飽和羧酸(a2),可含有例如於一分子中僅具有1個乙烯性不飽和基之化合物。更具體而言,含不飽和基羧酸(a2),可含有例如選自由下述所組成之群組中的至少一種化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、巴豆酸、桂皮酸、琥珀酸單(2-丙烯醯基氧乙基)酯、琥珀酸單(2-甲基丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-丙烯醯基氧丙基)酯、鄰苯二甲酸單(2-甲基丙烯醯基氧丙基)酯、馬來酸單(2-丙烯醯基氧乙基)酯、馬來酸單(2-甲基丙烯醯基氧乙基)酯、丙烯酸β-羧基乙酯、四氫鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、四氫鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯、六氫鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、及六氫鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯。含不飽和基羧酸(a2)較佳是含有丙烯酸。 The unsaturated carboxylic acid (a2) may contain, for example, a compound having only one ethylenically unsaturated group in one molecule. More specifically, the unsaturated group-containing carboxylic acid (a2) may contain, for example, at least one compound selected from the group consisting of acrylic acid, methacrylic acid, and ω-carboxy-polycaprolactone (n≒). 2) monoacrylate, crotonic acid, cinnamic acid, succinic acid mono(2-propenyl methoxyethyl) ester, succinic acid mono(2-methylpropenyl oxyethyl) ester, phthalic acid mono ( 2-propenyl methoxyethyl) ester, mono(2-methylpropenyl oxyethyl) phthalate, mono(2-propenyl methoxypropyl) phthalate, o-phenyl phthalate Mono(2-methylpropenyloxypropyl)carboxylate, mono(2-propenyloxyethyl) maleate, mono(2-methylpropenyloxyethyl) maleate, Β-carboxyethyl acrylate, mono(2-propenyl methoxyethyl) tetrahydrophthalate, mono(2-methylpropenyl oxyethyl) tetrahydrophthalate, hexahydroortho Mono(2-propenyl methoxyethyl) phthalate, and mono(2-methylpropenyl oxyethyl) hexahydrophthalate. The unsaturated carboxylic acid (a2) preferably contains acrylic acid.

在使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應時,可採用公知的方法。例如,在環氧化合物(a1)的溶劑溶液中添加含不飽和基羧酸(a2),進一步視需要而添加熱聚合抑制劑和觸媒,並加以攪拌混合,藉此 獲得反應性溶液。可藉由利用常規方法,更佳是在60~150℃、特佳是在80~120℃的溫度使該反應性溶液進行反應,來獲得中間體。溶劑,可含有例如選自由下述所組成之群組中的至少一種成分:甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯(cellosolve acetate)、丁基賽璐蘇乙酸酯、卡必醇乙酸酯(carbitol acetate)、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯等乙酸酯類;及,二烷二醇醚類。熱聚合抑制劑,可含有例如氫醌和氫醌單甲醚之中的至少其中一者。觸媒,可含有例如選自由下述所組成之群組中的至少一種成分:苯甲基二甲基胺、三乙基胺等三級胺類;三甲基苯甲基氯化銨、甲基三乙基氯化銨等四級銨鹽類;三苯基膦、及三苯基銻(triphenyl stibine)。 When the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) are reacted, a known method can be employed. For example, an unsaturated group-containing carboxylic acid (a2) is added to a solvent solution of the epoxy compound (a1), and a thermal polymerization inhibitor and a catalyst are further added as needed, and stirred and mixed. A reactive solution is obtained. The intermediate solution can be obtained by a conventional method, preferably by reacting the reactive solution at a temperature of from 60 to 150 ° C, particularly preferably from 80 to 120 ° C. The solvent may contain, for example, at least one component selected from the group consisting of ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; ethyl acetate and butyl acetate; , acetic acid such as cellosolve acetate, butyl cyproterone acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, etc. Esters; and, dialkyl glycol ethers. The thermal polymerization inhibitor may contain, for example, at least one of hydroquinone and hydroquinone monomethyl ether. The catalyst may contain, for example, at least one component selected from the group consisting of tertiary amines such as benzyldimethylamine and triethylamine; trimethylbenzylammonium chloride, A a quaternary ammonium salt such as triethylammonium chloride; triphenylphosphine; and triphenyl stibine.

尤其,較佳是觸媒含有三苯基膦。亦即,較佳是:在三苯基膦的存在下,使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應。此時,能夠特別促進環氧化合物(a1)中的環氧基與含不飽和基羧酸(a2)的開環加成反應,而能夠達成95%以上、97%以上或大致100%的反應率(轉化率)。因此,能夠以較高的產率來獲得具有結構(S3)之中間體。又,能夠抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,而能夠進一步提升該層的絕緣可靠性。 In particular, it is preferred that the catalyst contains triphenylphosphine. That is, it is preferred to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in the presence of triphenylphosphine. In this case, the ring-opening addition reaction of the epoxy group in the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) can be particularly promoted, and a reaction of 95% or more, 97% or more, or approximately 100% can be achieved. Rate (conversion rate). Therefore, an intermediate having the structure (S3) can be obtained in a high yield. Further, it is possible to suppress the occurrence of ion migration in the layer of the cured product containing the photosensitive resin composition, and it is possible to further improve the insulation reliability of the layer.

在使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應時,相對於環氧化合物(a1)的1莫耳的環氧基, 含不飽和基羧酸(a2)的量,較佳是在0.8~1.2莫耳的範圍內。此時,能夠獲得具有優異的感光性與保存穩定性之感光性樹脂組成物。 When the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2), it is 1 mol of the epoxy group of the epoxy compound (a1). The amount of the unsaturated carboxylic acid (a2) is preferably in the range of 0.8 to 1.2 mol. At this time, a photosensitive resin composition having excellent photosensitivity and storage stability can be obtained.

亦較佳是在進行空氣起泡的狀態下使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應。此時,能夠抑制不飽和基的加成聚合反應,因此能夠抑制中間體的分子量的增加和中間體的溶液的膠化。又,能夠抑制最終產物也就是含羧基樹脂(A1)的過度著色。 It is also preferred to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) while air bubbling. At this time, since the addition polymerization reaction of the unsaturated group can be suppressed, the increase in the molecular weight of the intermediate and the gelation of the solution of the intermediate can be suppressed. Further, excessive coloring of the final product, that is, the carboxyl group-containing resin (A1) can be suppressed.

以這樣的方式進行而獲得的中間體,具備羥基,該羥基是藉由環氧化合物(a1)的環氧基與含不飽和基羧酸(a2)的羧基的反應所生成。 The intermediate obtained in such a manner has a hydroxyl group which is produced by a reaction of an epoxy group of the epoxy compound (a1) with a carboxyl group of the unsaturated group-containing carboxylic acid (a2).

酸二酐(a3),是具有2個酸酐基之化合物。酸二酐(a3),可含有四羧酸的酸酐。酸二酐(a3),可含有例如選自由下述所組成之群組中的至少一種化合物:1,2,4,5-苯四甲酸二酐、二苯基酮四甲酸二酐、甲基環己烯四甲酸二酐、四甲酸二酐、萘-1,4,5,8-四甲酸二酐、乙烯四甲酸二酐、9,9’-雙(3,4-二羧基苯基)茀二酐、甘油雙(偏苯三酸酯酐)單乙酸酯、乙二醇雙(偏苯三酸酯酐)、3,3’,4,4’-二苯基碸四甲酸二酐、1,3,3a,4,5,9b-六氫-5(四氫-2,5-二側氧基-3-呋喃基)萘并[1,2-c]呋喃-1,3-二酮、1,2,3,4-丁烷四甲酸二酐、及3,3’,4,4’-聯苯四甲酸二酐。尤其,較佳是酸二酐(a3)含有3,3’,4,4’-聯苯四甲酸二酐。亦即,較佳是式(5)和式(6)中的D包含3,3’,4,4’-聯苯四甲酸二酐 殘基。此時,能夠確保感光性樹脂組成物的良好顯影性,同時進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸二酐(a3)整體,3,3’,4,4’-聯苯四甲酸二酐的量,較佳是在20~100莫耳%的範圍內,更佳是在40~100莫耳%的範圍內,但是不受限於這些範圍內。 The acid dianhydride (a3) is a compound having two acid anhydride groups. The acid dianhydride (a3) may contain an acid anhydride of a tetracarboxylic acid. The acid dianhydride (a3) may contain, for example, at least one compound selected from the group consisting of 1,2,4,5-benzenetetracarboxylic dianhydride, diphenyl ketone tetracarboxylic dianhydride, methyl Cyclohexene tetracarboxylic dianhydride, tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylene tetracarboxylic dianhydride, 9,9'-bis(3,4-dicarboxyphenyl) Sebacic anhydride, glycerol bis(trimellitic anhydride) monoacetate, ethylene glycol bis(trimellitic anhydride), 3,3',4,4'-diphenylphosphonium tetracarboxylic dianhydride 1,3,3a,4,5,9b-hexahydro-5(tetrahydro-2,5-di-oxy-3-furanyl)naphtho[1,2-c]furan-1,3- Diketone, 1,2,3,4-butanetetracarboxylic dianhydride, and 3,3',4,4'-biphenyltetracarboxylic dianhydride. In particular, it is preferred that the acid dianhydride (a3) contains 3,3',4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferred that D in the formula (5) and the formula (6) contains 3,3',4,4'-biphenyltetracarboxylic dianhydride. Residues. In this case, the good developability of the photosensitive resin composition can be ensured, and the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. The amount of 3,3',4,4'-biphenyltetracarboxylic dianhydride is preferably in the range of 20 to 100 mol%, more preferably 40 to 100, based on the total of the acid dianhydride (a3). Moore% is within the scope, but is not limited to these ranges.

酸單酐(a4),是具有1個酸酐基之化合物。酸單酐(a4),可含有二羧酸的酸酐。酸單酐(a4),可含有例如選自由下述所組成之群組中的至少一種化合物:鄰苯二甲酸酐、1,2,3,6-四氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、甲基納迪克酸酐(methyl nadic acid anhydride)、六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、琥珀酸酐、甲基琥珀酸酐、馬來酸酐、檸康酸酐、戊二酸酐、環己烷-1,2,4-三甲酸-1,2-酐、及伊康酸酐。尤其,較佳是酸單酐(a4)含有1,2,3,6-四氫鄰苯二甲酸酐。亦即,較佳是酸酐含有1,2,3,6-四氫鄰苯二甲酸酐。亦即,較佳是:含羧基樹脂(A1)具有結構(S4),且式(4)中的B包含1,2,3,6-四氫鄰苯二甲酸酐殘基。此時,能夠確保感光性樹脂組成物的良好顯影性,同時進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸單酐(a4)整體,1,2,3,6-四氫鄰苯二甲酸酐的量,較佳是在20~100莫耳%的範圍內,更佳是在40~100莫耳%的範圍內,但是不受限於這些範圍內。 The acid monoanhydride (a4) is a compound having one acid anhydride group. The acid monoanhydride (a4) may contain an acid anhydride of a dicarboxylic acid. The acid monoanhydride (a4) may contain, for example, at least one compound selected from the group consisting of phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyl four. Hydrogen phthalic anhydride, methyl nadic acid anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride, succinic anhydride, methyl succinic anhydride, maleic anhydride, lemon Tonic anhydride, glutaric anhydride, cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride, and itaconic anhydride. In particular, it is preferred that the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferred that the acid anhydride contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferred that the carboxyl group-containing resin (A1) has a structure (S4), and B in the formula (4) contains a 1,2,3,6-tetrahydrophthalic anhydride residue. In this case, the good developability of the photosensitive resin composition can be ensured, and the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. The amount of 1,2,3,6-tetrahydrophthalic anhydride is preferably in the range of 20 to 100 mol%, more preferably 40 to 100 mol, based on the total of the acid monoanhydride (a4). Within the range of % of ears, but not limited to these ranges.

在使中間體與酸酐進行反應時,可採用公知的方法。例如,在中間體的溶劑溶液中添加酸酐,進一步視需要而添加熱聚合抑制劑和觸媒,並加以攪拌混合,藉此獲得反應性溶液。可藉由利用常規方法,更佳是在60~150℃、特佳是在80~120℃的溫度使該反應性溶液進行反應,來獲得含羧基樹脂(A1)。作為溶劑、觸媒及聚合抑制劑,可使用適當的溶劑、觸媒及聚合抑制劑,亦可直接使用合成中間體時所使用的溶劑、觸媒及聚合抑制劑。 When the intermediate is reacted with an acid anhydride, a known method can be employed. For example, an acid anhydride is added to a solvent solution of an intermediate, and a thermal polymerization inhibitor and a catalyst are further added as needed, and stirred and mixed, whereby a reactive solution is obtained. The carboxyl group-containing resin (A1) can be obtained by a conventional method, preferably by reacting the reactive solution at a temperature of from 60 to 150 ° C, particularly preferably from 80 to 120 ° C. As the solvent, catalyst, and polymerization inhibitor, a suitable solvent, catalyst, and polymerization inhibitor can be used, and a solvent, a catalyst, and a polymerization inhibitor used in the synthesis of the intermediate can be used as it is.

尤其,較佳是觸媒含有三苯基膦。亦即,較佳是:在三苯基膦的存在下,使中間體與酸酐進行反應。此時,能夠特別促進中間體中的二級羥基與酸酐的反應,而能夠達成90%以上、95%以上、97%以上或大致100%的反應率(轉化率)。因此,能夠以較高的產率來獲得具有結構(S4)和結構(S5)中的至少一種結構之含羧基樹脂(A1)。又,能夠抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,而能夠進一步提升該層的絕緣可靠性。 In particular, it is preferred that the catalyst contains triphenylphosphine. That is, it is preferred to react the intermediate with an acid anhydride in the presence of triphenylphosphine. In this case, the reaction of the secondary hydroxyl group and the acid anhydride in the intermediate can be particularly promoted, and a reaction rate (conversion ratio) of 90% or more, 95% or more, 97% or more, or approximately 100% can be achieved. Therefore, the carboxyl group-containing resin (A1) having at least one of the structures (S4) and (S5) can be obtained in a high yield. Further, it is possible to suppress the occurrence of ion migration in the layer of the cured product containing the photosensitive resin composition, and it is possible to further improve the insulation reliability of the layer.

當酸酐含有酸二酐(a3)與酸單酐(a4)時,相對於環氧化合物(a1)的1莫耳的環氧基,酸二酐(a3)的量,較佳是在0.05~0.24莫耳的範圍內。又,相對於環氧化合物(a1)的1莫耳的環氧基,酸單酐(a4)的量,較佳是在0.3~0.7莫耳的範圍內。此時,能夠容易獲得酸價與分子量經適度地調整後之含羧基樹脂(A1)。 When the acid anhydride contains the acid dianhydride (a3) and the acid monoanhydride (a4), the amount of the acid dianhydride (a3) is preferably 0.05% with respect to 1 mol of the epoxy group of the epoxy compound (a1). Within 0.24 moles. Further, the amount of the acid monoanhydride (a4) is preferably in the range of 0.3 to 0.7 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). At this time, the carboxyl group-containing resin (A1) whose acid value and molecular weight are appropriately adjusted can be easily obtained.

含羧基樹脂(A),可僅含有含羧基樹脂(A1),亦可進一步含有除了含羧基樹脂(A1)以外的含羧基樹脂(以下亦稱為含羧基樹脂(F))。 The carboxyl group-containing resin (A) may contain only the carboxyl group-containing resin (A1), and may further contain a carboxyl group-containing resin (hereinafter also referred to as a carboxyl group-containing resin (F)) other than the carboxyl group-containing resin (A1).

含羧基樹脂(F),可含有例如具有羧基但不具有光聚合性之化合物(以下稱為(F1)成分)。(F1)成分,含有例如乙烯性不飽和單體的聚合物,該乙烯性不飽和單體包含了具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,可含有下述化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯等。具有羧基之乙烯性不飽和化合物,亦可含有季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等與二元酸酐之反應物。乙烯性不飽和單體,可進一步含有下述不具有羧基之乙烯性不飽和化合物:鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或支鏈之脂肪族或脂環族(其中,環中可具有一部分不飽和鍵)的(甲基)丙烯酸酯等。 The carboxyl group-containing resin (F) may contain, for example, a compound having a carboxyl group but not having photopolymerization (hereinafter referred to as a component (F1)). The component (F1) contains a polymer such as an ethylenically unsaturated monomer, and the ethylenically unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated compound having a carboxyl group may contain the following compounds: acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≒2) monoacrylate, and the like. The ethylenically unsaturated compound having a carboxyl group may further contain a reaction product with a dibasic acid anhydride such as pentaerythritol triacrylate or pentaerythritol trimethacrylate. The ethylenically unsaturated monomer may further contain the following ethylenically unsaturated compound having no carboxyl group: 2-(meth)acryloxyethyl phthalate, 2-(methyl) propylene phthalate A (meth) acrylate or the like which is a methoxyethyl 2-hydroxyethyl ester, a linear or branched aliphatic or alicyclic group in which a ring may have a part of an unsaturated bond.

含羧基樹脂(F),可含有具有羧基和乙烯性不飽和基之化合物(以下稱為(F2)成分)。又,含羧基樹脂(F),可僅含有(F2)成分。(F2)成分,含有一種樹脂(以下稱為第一樹脂(g)),該樹脂是例如中間體與選自多元羧酸和其酸酐的群組中的至少一種化合物(g3)之反應物,該中間體是於一分子中具有2個以上環氧基之環氧化合物(g1)與乙烯性不飽和化合物(g2)之反應物。第一樹脂(g),例如可使環氧化合物(g1)中的環氧基與乙烯性不 飽和化合物(g2)中的羧基進行反應而獲得中間體,然後使化合物(g3)與中間體進行加成而獲得。環氧化合物(g1),可含有下述適當的環氧樹脂:甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂等。環氧化合物(g1),可含有乙烯性不飽和化合物(h)的聚合物。乙烯性不飽和化合物(h),含有例如(甲基)丙烯酸環氧丙酯等具有環氧基之化合物(h1),或進一步含有鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯等不具有環氧基之化合物(h2)。乙烯性不飽和化合物(g2),較佳是含有丙烯酸或甲基丙烯酸之中的至少其中一者。化合物(g3),含有例如選自由下述所組成之群組中的一種以上的化合物:鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸等多元羧酸;及,這些多元羧酸的酸酐。 The carboxyl group-containing resin (F) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter referred to as a component (F2)). Further, the carboxyl group-containing resin (F) may contain only the component (F2). a component (F2) containing a resin (hereinafter referred to as a first resin (g)), which is, for example, a reaction product of an intermediate with at least one compound (g3) selected from the group consisting of polycarboxylic acids and anhydrides thereof, This intermediate is a reaction product of an epoxy compound (g1) having two or more epoxy groups in one molecule and an ethylenically unsaturated compound (g2). The first resin (g), for example, may be such that the epoxy group in the epoxy compound (g1) is not ethylenic. The carboxyl group in the saturated compound (g2) is reacted to obtain an intermediate, and then the compound (g3) is added to an intermediate to obtain it. The epoxy compound (g1) may contain an appropriate epoxy resin: a cresol novolac type epoxy resin, a phenol novolak type epoxy resin, or the like. The epoxy compound (g1) may contain a polymer of the ethylenically unsaturated compound (h). The ethylenically unsaturated compound (h) contains an epoxy group-containing compound (h1) such as glycidyl (meth)acrylate or further contains 2-(methyl)propenyloxyethyl phthalate. The compound (h2) which does not have an epoxy group. The ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid or methacrylic acid. The compound (g3) contains, for example, one or more compounds selected from the group consisting of polycarboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid; Anhydrides of these polycarboxylic acids.

(F2)成分,亦可含有一種樹脂(稱為第二樹脂(i)),該樹脂是乙烯性不飽和單體的聚合物與具有環氧基之乙烯性不飽和化合物之反應物,該乙烯性不飽和單體含有具有羧基之乙烯性不飽和化合物。乙烯性不飽和單體,可進一步含有不具有羧基之乙烯性不飽和化合物。第二樹脂(i),可藉由下述方式來獲得:使具有環氧基之乙烯性不飽和化合物,與聚合物中的一部分羧基進行反應。乙烯性不飽和單體,可進一步含有不具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,含有例如下述化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基 丙烯酸酯等。不具有羧基之乙烯性不飽和化合物,含有例如下述化合物:鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或支鏈之脂肪族或脂環族(其中,環中可具有一部分不飽和鍵)的(甲基)丙烯酸酯等。具有環氧基之乙烯性不飽和性化合物,較佳是含有(甲基)丙烯酸環氧丙酯。 The component (F2) may further contain a resin (referred to as a second resin (i)) which is a reactant of a polymer of an ethylenically unsaturated monomer and an ethylenically unsaturated compound having an epoxy group, the ethylene The unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The second resin (i) can be obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of carboxyl groups in the polymer. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. An ethylenically unsaturated compound having a carboxyl group, which contains, for example, the following compounds: acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≒2) monoacrylate, pentaerythritol triacrylate, pentaerythritol trimethyl Acrylate and the like. An ethylenically unsaturated compound having no carboxyl group, and containing, for example, the following compound: 2-(methyl)propenyloxyethyl phthalate, 2-(methyl)propenyloxyethyl phthalate- 2-hydroxyethyl ester, a linear or branched aliphatic or alicyclic (wherein the ring may have a part of an unsaturated bond) (meth) acrylate or the like. The ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth)acrylate.

含羧基樹脂(A),僅含有含羧基樹脂(A1),或含有含羧基樹脂(A1)與含羧基樹脂(F)。含羧基樹脂(A),較佳是含有30質量%以上,更佳是含有50質量%以上,進一步較佳是含有100質量%的含羧基樹脂(A1)。此時,能夠使感光性樹脂組成物的硬化物的耐熱性和絕緣可靠性特別提升。又,能夠充分減少由感光性樹脂組成物所形成之皮膜的黏性。進一步,能夠確保感光性樹脂組成物的藉由鹼性水溶液之顯影性。 The carboxyl group-containing resin (A) contains only the carboxyl group-containing resin (A1) or the carboxyl group-containing resin (A1) and the carboxyl group-containing resin (F). The carboxyl group-containing resin (A) preferably contains 30% by mass or more, more preferably 50% by mass or more, and still more preferably 100% by mass of the carboxyl group-containing resin (A1). In this case, the heat resistance and insulation reliability of the cured product of the photosensitive resin composition can be particularly improved. Moreover, the viscosity of the film formed from the photosensitive resin composition can be sufficiently reduced. Further, the developability of the photosensitive resin composition by the alkaline aqueous solution can be ensured.

其次,說明本實施形態的感光性樹脂組成物所含有的含羧基樹脂(A)以外的成分。 Next, components other than the carboxyl group-containing resin (A) contained in the photosensitive resin composition of the present embodiment will be described.

如上所述,感光性樹脂組成物,其含有:含羧基樹脂(A)、於一分子中具有至少1個乙烯性不飽和鍵之不飽和化合物(B)、光聚合起始劑(C)、及環氧化合物(D)。 As described above, the photosensitive resin composition contains a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (C). And epoxy compound (D).

不飽和化合物(B),能夠對感光性樹脂組成物賦予光硬化性。不飽和化合物(B),可含有例如選自由下述所組成之群組中的至少一種化合物:(甲基)丙烯酸2-羥乙酯等單官能(甲基)丙烯酸酯;及,二乙二醇二(甲基) 丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、ε-己內酯改質季戊四醇六丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯等多官能(甲基)丙烯酸酯。 The unsaturated compound (B) can impart photocurability to the photosensitive resin composition. The unsaturated compound (B) may contain, for example, at least one compound selected from the group consisting of monofunctional (meth) acrylates such as 2-hydroxyethyl (meth)acrylate; and, diethyl 2 Alcohol (methyl) Acrylate, trimethylolpropane di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol Polyfunctional (meth)acrylic acid such as (meth) acrylate, dipentaerythritol hexa(meth) acrylate, ε-caprolactone modified pentaerythritol hexaacrylate, tricyclodecane dimethanol di(meth) acrylate ester.

尤其,不飽和化合物(B),較佳是含有三官能化合物,亦即於一分子中具有3個不飽和鍵之化合物。此時,在對由感光性樹脂組成物所形成之皮膜進行曝光、顯影時,能夠提升解析度,同時能夠特別提升感光性樹脂組成物的藉由鹼性水溶液之顯影性。三官能化合物,可含有例如選自由下述所組成之群組中的至少一種化合物:三羥甲基丙烷三(甲基)丙烯酸酯、環氧乙烷(EO)改質三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、乙氧基化異三聚氰酸三(甲基)丙烯酸酯、ε-己內酯改質參(2-丙烯醯氧基乙基)異三聚氰酸酯、及乙氧基化甘油三(甲基)丙烯酸酯。 In particular, the unsaturated compound (B) preferably contains a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule. In this case, when the film formed of the photosensitive resin composition is exposed and developed, the resolution can be improved, and the developability of the photosensitive resin composition by the alkaline aqueous solution can be particularly improved. The trifunctional compound may contain, for example, at least one compound selected from the group consisting of trimethylolpropane tri(meth)acrylate, ethylene oxide (EO) modified trimethylolpropane III (Meth) acrylate, pentaerythritol tri(meth) acrylate, ethoxylated isocyanuric acid tri(meth) acrylate, ε-caprolactone modified ginseng (2-propenyl methoxyethyl) Isocyanurate, and ethoxylated glycerol tri(meth)acrylate.

不飽和化合物(B),亦較佳是含有含磷化合物(含磷之不飽和化合物)。此時,能夠提升感光性樹脂組成物的硬化物的阻燃性。含磷之不飽和化合物,可含有例如選自由下述所組成之群組中的至少一種化合物:磷酸2-甲基丙烯醯基氧基乙酯(作為具體例,共榮社化學股份有限公司製造的商品型號LIGHT ESTER P-1M、和LIGHT ESTER P-2M)、磷酸2-丙烯醯基氧基乙酯(作 為具體例,共榮社化學股份有限公司製造的商品型號LIGHT ACRYLATE P-1A)、磷酸二苯基-2-甲基丙烯醯基氧基乙酯(作為具體例,大八工業股份有限公司製造的商品型號MR-260)、以及昭和高分子股份有限公司製造的HFA系列(作為具體例,二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物也就是商品型號HFA-6003和HFA-6007、己內酯改質二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物也就是商品型號HFA-3003和HFA-6127等)。 The unsaturated compound (B) preferably also contains a phosphorus-containing compound (phosphorus-containing unsaturated compound). At this time, the flame retardancy of the cured product of the photosensitive resin composition can be improved. The phosphorus-containing unsaturated compound may contain, for example, at least one compound selected from the group consisting of 2-methylpropenyloxyethyl phosphate (as a specific example, manufactured by Kyoeisha Chemical Co., Ltd.) Product type LIGHT ESTER P-1M, and LIGHT ESTER P-2M), 2-propenyl methoxyethyl phosphate For the specific example, the product model LIGHT ACRYLATE P-1A) manufactured by Kyoeisha Chemical Co., Ltd., and diphenyl-2-methylpropenyl methoxyethyl phosphate (as a specific example, manufactured by Daiba Industry Co., Ltd. Product model MR-260), and HFA series manufactured by Showa Polymer Co., Ltd. (as a specific example, dipentaerythritol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene- The addition reactants of 10-oxide) are also the commercial models HFA-6003 and HFA-6007, caprolactone modified dipentaerythritol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphine) The addition reactant of phenanthrene-10-oxide is also the product models HFA-3003 and HFA-6127, etc.).

不飽和化合物(B),可含有預聚物。預聚物,可含有例如選自由下述所組成之群組中的至少一種化合物:先使具有乙烯性不飽和鍵之單體進行聚合,再使乙烯性不飽和基與其進行加成而獲得之預聚物;及,低聚(甲基)丙烯酸酯預聚物類。低聚(甲基)丙烯酸酯預聚物類,可含有例如選自由下述所組成之群組中的至少一種成分:環氧(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、胺酯(甲基)丙烯酸酯(urethane(metha)crylate)、醇酸樹脂(甲基)丙烯酸酯、矽氧樹脂(甲基)丙烯酸酯、及螺烷烴樹脂(spirane resin)(甲基)丙烯酸酯。 The unsaturated compound (B) may contain a prepolymer. The prepolymer may contain, for example, at least one compound selected from the group consisting of polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group thereto. Prepolymer; and, oligomeric (meth) acrylate prepolymers. The oligomeric (meth) acrylate prepolymer may contain, for example, at least one component selected from the group consisting of epoxy (meth) acrylate, polyester (meth) acrylate, amine Ethyl (meth) acrylate, alkyd (meth) acrylate, oxirane (meth) acrylate, and spirane resin (meth) acrylate.

光聚合起始劑(C),含有例如醯基氧化膦系光聚合起始劑(C1)。亦即,感光性樹脂組成物,含有例如醯基氧化膦系光聚合起始劑(C1)。此時,儘管感光性樹脂組成物含有含羧基樹脂(A1),仍能夠對感光性樹脂組 成物賦予對於紫外線的高感光性。又,能夠抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,且該層的絕緣可靠性進一步提升。 The photopolymerization initiator (C) contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). In other words, the photosensitive resin composition contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). At this time, although the photosensitive resin composition contains the carboxyl group-containing resin (A1), it is still possible to apply the photosensitive resin group. The product imparts high sensitivity to ultraviolet light. Further, it is possible to suppress the occurrence of ion migration in the layer containing the cured product of the photosensitive resin composition, and the insulation reliability of the layer is further improved.

又,醯基氧化膦系光聚合起始劑(C1),不易妨礙硬化物的電絕緣性。因此,藉由對感光性樹脂組成物進行曝光硬化,能夠獲得電性絕緣性優異的硬化物,且該硬化物適合作為例如抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層。 Further, the fluorenylphosphine oxide-based photopolymerization initiator (C1) is less likely to interfere with the electrical insulation of the cured product. Therefore, by subjecting the photosensitive resin composition to exposure curing, a cured product excellent in electrical insulating properties can be obtained, and the cured product is suitable as, for example, a solder resist layer, a plating resist layer, an etch resist layer, and an interlayer insulating layer.

醯基氧化膦系光聚合起始劑(C1),可含有例如選自由下述所組成之群組中的至少一種成分:2,4,6-三甲基苯甲醯基-二苯基-氧化膦、2,4,6-三甲基苯甲醯基-苯基-膦酸乙酯等單醯基氧化膦系光聚合起始劑;及,雙-(2,6-二氯苯甲醯基)苯基氧化膦、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-1-萘基氧化膦、雙-(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,4,6-三甲基苯甲醯基)苯基氧化膦、(2,5,6-三甲基苯甲醯基)-2,4,4-三甲基戊基氧化膦等雙醯基氧化膦系光聚合起始劑。尤其,較佳是醯基氧化膦系光聚合起始劑(C1)含有2,4,6-三甲基苯甲醯基-二苯基-氧化膦,亦較佳是醯基氧化膦系光聚合起始劑(C1)僅含有2,4,6-三甲基苯甲醯基-二苯基-氧化膦。 The fluorenylphosphine oxide-based photopolymerization initiator (C1) may contain, for example, at least one component selected from the group consisting of 2,4,6-trimethylbenzylidene-diphenyl- Monothiol phosphine-based photopolymerization initiators such as phosphine oxide, 2,4,6-trimethylbenzimidyl-phenyl-phosphonic acid ethyl ester; and, bis-(2,6-dichlorobenzene) Mercapto) phenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)-2,5-dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)- 4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)-1-naphthylphosphine oxide, bis-(2,6-dimethoxybenzylidene)phenyl oxide Phosphine, bis-(2,6-dimethoxybenzylidene)-2,4,4-trimethylpentylphosphine oxide, bis-(2,6-dimethoxybenzylidene)- 2,5-Dimethylphenylphosphine oxide, bis-(2,4,6-trimethylbenzylidene)phenylphosphine oxide, (2,5,6-trimethylbenzylidene)- A bis-indenylphosphine oxide-based photopolymerization initiator such as 2,4,4-trimethylpentylphosphine oxide. In particular, it is preferred that the fluorenylphosphine oxide-based photopolymerization initiator (C1) contains 2,4,6-trimethylbenzylidene-diphenyl-phosphine oxide, and is preferably a fluorenylphosphine oxide-based light. The polymerization initiator (C1) contains only 2,4,6-trimethylbenzimidyl-diphenyl-phosphine oxide.

光聚合起始劑(C),較佳是:除了醯基氧化膦系光聚合起始劑(C1)以外,還含有羥基酮系光聚合起始劑(C2)。亦即,感光性樹脂組成物,較佳是含有羥基酮系光聚合起始劑(C2)。此時,相較於不含有羥基酮系光聚合起始劑(C2)的情形,能夠對感光性樹脂組成物賦予進一步較高的感光性。藉此,當對由感光性樹脂組成物所形成之塗膜照射紫外線來使其硬化時,能夠使塗膜自其表面以至深部皆充分硬化。作為羥基酮系光聚合起始劑(C2),可列舉例如:1-羥基-環己基-苯基-酮、苯基乙醛酸甲酯、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苯甲基]苯基}-2-甲基-丙-1-酮、及2-羥基-2-甲基-1-苯基-丙-1-酮。 The photopolymerization initiator (C) preferably contains a hydroxyketone-based photopolymerization initiator (C2) in addition to the fluorenylphosphine oxide-based photopolymerization initiator (C1). That is, the photosensitive resin composition preferably contains a hydroxyketone-based photopolymerization initiator (C2). In this case, it is possible to impart further high photosensitivity to the photosensitive resin composition as compared with the case where the hydroxyketone-based photopolymerization initiator (C2) is not contained. As a result, when the coating film formed of the photosensitive resin composition is irradiated with ultraviolet rays to be cured, the coating film can be sufficiently cured from the surface to the deep portion. Examples of the hydroxyketone-based photopolymerization initiator (C2) include 1-hydroxy-cyclohexyl-phenyl-ketone, methyl phenylglyoxylate, and 1-[4-(2-hydroxyethoxy). -phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propenyl)-benzene Methyl]phenyl}-2-methyl-propan-1-one, and 2-hydroxy-2-methyl-1-phenyl-propan-1-one.

醯基氧化膦系光聚合起始劑(C1)與羥基酮系光聚合起始劑(C2)的質量比,較佳是在1:0.01~1:10的範圍內。此時,能夠使在由感光性樹脂組成物所形成之塗膜的表面附近的硬化性與在深部的硬化性均衡地提升。 The mass ratio of the fluorenylphosphine oxide-based photopolymerization initiator (C1) to the hydroxyketone-based photopolymerization initiator (C2) is preferably in the range of 1:0.01 to 1:10. In this case, the hardenability in the vicinity of the surface of the coating film formed of the photosensitive resin composition and the hardenability in the deep portion can be uniformly adjusted.

光聚合起始劑(C),亦較佳是含有雙(二乙基胺基)二苯基酮(C3)。亦即,亦較佳是:感光性樹脂組成物含有醯基氧化膦系光聚合起始劑(C1)和雙(二乙基胺基)二苯基酮(C3),或感光性樹脂組成物含有醯基氧化膦系光聚合起始劑(C1)、羥基酮系光聚合起始劑(C2)及雙(二乙基胺基)二苯基酮(C3)。此時,當先對由感光性樹 脂組成物所形成之塗膜進行部分曝光後再進行顯影時,因為沒有被曝光的部分的硬化受到抑制,所以使解析度變特別高。因此,能夠形成非常微細圖案之感光性樹脂組成物的硬化物。尤其,當由感光性樹脂組成物製作多層印刷線路板的層間絕緣層,並且以光刻法來在該層間絕緣層設置用於貫穿孔的小徑的孔時(參照第1圖),能夠精密且容易形成小徑的孔。 The photopolymerization initiator (C) preferably also contains bis(diethylamino)diphenyl ketone (C3). In other words, the photosensitive resin composition preferably contains a fluorenylphosphine oxide-based photopolymerization initiator (C1) and bis(diethylamino)diphenyl ketone (C3), or a photosensitive resin composition. A fluorenylphosphine oxide-based photopolymerization initiator (C1), a hydroxyketone-based photopolymerization initiator (C2), and bis(diethylamino)diphenyl ketone (C3) are contained. At this time, the first pair of photosensitivity trees When the coating film formed of the lipid composition is partially exposed and then developed, since the hardening of the portion which is not exposed is suppressed, the resolution is particularly high. Therefore, it is possible to form a cured product of the photosensitive resin composition having a very fine pattern. In particular, when an interlayer insulating layer of a multilayer printed wiring board is produced from a photosensitive resin composition, and a hole having a small diameter for a through hole is provided in the interlayer insulating layer by photolithography (see FIG. 1), precision can be performed. And it is easy to form a hole with a small diameter.

相對於醯基氧化膦系光聚合起始劑(C1),雙(二乙基胺基)二苯基酮(C3)的量,較佳是在0.5~20質量%的範圍內。相對於醯基氧化膦系光聚合起始劑(C1),若雙(二乙基胺基)二苯基酮(C3)的量是0.5質量%以上,則使解析度變特別高。又,相對於醯基氧化膦系光聚合起始劑(C1),若雙(二乙基胺基)二苯基酮(C3)的量是20質量%以下,則雙(二乙基胺基)二苯基酮(C3)不易妨礙感光性樹脂組成物的硬化物的電絕緣性。 The amount of bis(diethylamino)diphenyl ketone (C3) is preferably in the range of 0.5 to 20% by mass based on the fluorenylphosphine oxide-based photopolymerization initiator (C1). When the amount of bis(diethylamino)diphenyl ketone (C3) is 0.5% by mass or more with respect to the fluorenylphosphine oxide-based photopolymerization initiator (C1), the resolution is particularly high. In addition, when the amount of bis(diethylamino)diphenyl ketone (C3) is 20% by mass or less based on the fluorenyl phosphine oxide-based photopolymerization initiator (C1), bis(diethylamino group) Diphenyl ketone (C3) does not easily impede the electrical insulation of the cured product of the photosensitive resin composition.

感光性樹脂組成物,可進一步含有公知的光聚合促進劑、敏化劑(sensitizer)等。感光性樹脂組成物,可含有例如選自由下述所組成之群組中的至少一種成分:安息香與其烷基醚類;苯乙酮、苯偶醯二甲基縮酮等苯乙酮類;2-甲基蒽醌等蒽醌類;2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二異丙基噻噸酮等噻噸酮(thioxanthone)類;二苯基酮、4-苯甲醯基-4’-甲基二苯基硫醚等二苯基酮類;2,4-二異丙基呫噸酮等呫噸酮類(xanthone);及, 2-羥基-2-甲基-1-苯基-丙-1-酮等α-羥基酮類;2-甲基-1-[4-(甲硫基)苯基]-2-(N-嗎啉基)-1-丙酮等含氮原子之化合物。感光性樹脂組成物,除了光聚合起始劑(C)以外,還可含有對二甲基苯甲酸乙酯、對二甲基胺基苯甲酸異戊酯、苯甲酸2-二甲基胺基乙酯等三級胺系等公知的光聚合促進劑或敏化劑等。感光性樹脂組成物,可視需要而含有用於可見光曝光的光聚合起始劑和用於近紅外線曝光的光聚合起始劑之中的至少一種。感光性樹脂組成物,除了光聚合起始劑(C)以外,還可含有用於雷射曝光法的敏化劑也就是7-二乙基胺基-4-甲基香豆素等香豆素衍生物、羰花青(carbocyanine)色素系、呫噸(xanthene)色素系等。 The photosensitive resin composition may further contain a known photopolymerization accelerator, a sensitizer, or the like. The photosensitive resin composition may contain, for example, at least one component selected from the group consisting of benzoin and its alkyl ethers; acetophenones such as acetophenone and benzoin dimethyl ketal; - anthracene such as methyl hydrazine; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, a thioxanthone such as 2,4-diisopropylthioxanthone; a diphenyl ketone such as diphenyl ketone or 4-benzylidene-4'-methyldiphenyl sulfide; , 4-diisopropyl xanthone and the like xanthone; and, Α-hydroxyketones such as 2-hydroxy-2-methyl-1-phenyl-propan-1-one; 2-methyl-1-[4-(methylthio)phenyl]-2-(N- A compound containing a nitrogen atom such as morpholinyl)-1-propanone. The photosensitive resin composition may contain, in addition to the photopolymerization initiator (C), ethyl p-dimethylbenzoate, p-amyl dimethylaminobenzoate, and 2-dimethylamino benzoate. A known photopolymerization accelerator or sensitizer such as a tertiary amine such as ethyl ester. The photosensitive resin composition may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near-infrared exposure, as needed. The photosensitive resin composition may contain, in addition to the photopolymerization initiator (C), a sensitizer for laser exposure, that is, coumarin such as 7-diethylamino-4-methylcoumarin A derivative, a carbocyanine pigment, a xanthene pigment, or the like.

環氧化合物(D),能夠對感光性樹脂組成物賦予熱硬化性。如上所述,環氧化合物(D),含有結晶性環氧樹脂及非晶性環氧樹脂。此處,「結晶性環氧樹脂」是具有熔點之環氧樹脂,「非晶性環氧樹脂」是不具有熔點之環氧樹脂。 The epoxy compound (D) can impart thermosetting properties to the photosensitive resin composition. As described above, the epoxy compound (D) contains a crystalline epoxy resin and an amorphous epoxy resin. Here, the "crystalline epoxy resin" is an epoxy resin having a melting point, and the "amorphous epoxy resin" is an epoxy resin having no melting point.

結晶性環氧樹脂,較佳是含有例如選自由下述所組成之群組中的一種以上的成分:1,3,5-參(2,3-環氧丙基)-1,3,5-三嗪-2,4,6(1H,3H,5H)-三酮、氫醌型結晶性環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品名YDC-1312)、聯苯型結晶性環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品名YX-4000)、二苯基醚型結晶性環氧樹脂(作為具體例, 新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、雙酚型結晶性環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品名YSLV-80XY)、肆(羥苯基)乙烷型結晶性環氧樹脂(作為具體例,日本化藥股份有限公司製造的商品型號GTR-1800)、雙酚茀型結晶性環氧樹脂(作為具體例,具有結構(S7)之環氧樹脂)。 The crystalline epoxy resin preferably contains, for example, one or more components selected from the group consisting of 1,3,5-gin(2,3-epoxypropyl)-1,3,5. - Triazine-2,4,6(1H,3H,5H)-trione, hydroquinone-type crystalline epoxy resin (as a specific example, trade name YDC-1312 manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), a biphenyl type crystalline epoxy resin (a specific example, a trade name YX-4000 manufactured by Mitsubishi Chemical Corporation) and a diphenyl ether type crystalline epoxy resin (for specific examples, A product type YSLV-80DE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., a bisphenol-type crystalline epoxy resin (as a specific example, trade name YSLV-80XY manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), 肆 (hydroxyl a phenyl) ethane type crystalline epoxy resin (a specific example, a product model GTR-1800 manufactured by Nippon Kayaku Co., Ltd.) or a bisphenol fluorene type crystalline epoxy resin (having a specific example (S7) Epoxy resin).

結晶性環氧樹脂,較佳是於一分子中具有2個環氧基。此時,更能夠使硬化物在溫度變化反覆進行中不容易發生龜裂。 The crystalline epoxy resin preferably has two epoxy groups in one molecule. At this time, it is more possible to make the cured product less likely to crack during the temperature change.

結晶性環氧樹脂,較佳是具有150~300g/eq的環氧當量。該環氧當量,是含有1克當量的環氧基之結晶性環氧樹脂的克重量。結晶性環氧樹脂具有熔點。作為結晶性環氧樹脂的熔點,可列舉例如70~180℃。 The crystalline epoxy resin preferably has an epoxy equivalent of from 150 to 300 g/eq. The epoxy equivalent is the gram weight of the crystalline epoxy resin containing 1 gram equivalent of the epoxy group. The crystalline epoxy resin has a melting point. The melting point of the crystalline epoxy resin is, for example, 70 to 180 °C.

尤其,環氧化合物(D),較佳是含有熔點110℃以下的結晶性環氧樹脂。此時,特別提升感光性樹脂組成物的藉由鹼性水溶液之顯影性。熔點110℃以下的結晶性環氧樹脂,可含有例如選自由下述所組成之群組中的至少一種成分:聯苯型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號YX-4000)、二苯基醚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、及雙酚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號 YSLV-80XY)、雙酚茀型結晶性環氧樹脂(作為具體例,具有結構(S7)之環氧樹脂)。 In particular, the epoxy compound (D) preferably contains a crystalline epoxy resin having a melting point of 110 ° C or lower. At this time, the developability of the photosensitive resin composition by an alkaline aqueous solution is particularly enhanced. The crystalline epoxy resin having a melting point of 110 ° C or less may contain, for example, at least one component selected from the group consisting of biphenyl type epoxy resins (for example, a product model YX manufactured by Mitsubishi Chemical Corporation) -4000), diphenyl ether type epoxy resin (as a specific example, the product model YSLV-80DE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), and bisphenol type epoxy resin (as a specific example, Nippon Steel & Sumitomo Metal Co., Ltd. Product model manufactured by Chemical Co., Ltd. YSLV-80XY), a bisphenol quinone type crystalline epoxy resin (as a specific example, an epoxy resin having a structure (S7)).

非晶性環氧樹脂,可含有例如選自由下述所組成之群組中的至少一種成分:苯酚酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-775)、甲酚酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-695)、雙酚A酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-865)、雙酚A型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號jER1001)、雙酚F型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號jER4004P)、雙酚S型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON EXA-1514)、雙酚AD型環氧樹脂、聯苯酚醛清漆型環氧樹脂(作為具體例,日本化藥股份有限公司製造的商品型號NC-3000)、氫化雙酚A型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號ST-4000D)、萘型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-4032、EPICLON HP-4700、EPICLON HP-4770)、三級丁基鄰苯二酚型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-820)、雙環戊二烯型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-7200)、金剛烷型環氧樹脂(作為具體例,出光興產股份有限公司製造的商品型號ADAMANTATE X-E-201)、特殊二官能型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號YL7175-500、及YL7175-1000;DIC股份有限公司製造的商品型號EPICLON TSR-960、EPICLON TER-601、EPICLON TSR-250-80BX、EPICLON 1650-75MPX、EPICLON EXA-4850、EPICLON EXA-4816、EPICLON EXA-4822、及EPICLON EXA-9726;新日鐵住金化學股份有限公司製造的商品型號YSLV-120TE)、橡膠狀核殼聚合物改質雙酚A型環氧樹脂(作為具體例,kaneka股份有限公司製造的商品型號MX-156)、橡膠狀核殼聚合物改質雙酚F型環氧樹脂(作為具體例,kaneka股份有限公司製造的商品型號MX-136)、以及含橡膠粒子之雙酚F型環氧樹脂(作為具體例,kaneka股份有限公司製造的商品型號MX-130)。 The amorphous epoxy resin may contain, for example, at least one component selected from the group consisting of phenol novolak-type epoxy resins (as a specific example, the product model EPICLON N-775 manufactured by DIC Corporation) , a cresol novolak type epoxy resin (a specific example, a product model EPICLON N-695 manufactured by DIC Corporation), and a bisphenol A novolak type epoxy resin (as a specific example, a product model manufactured by DIC Corporation) EPICLON N-865), a bisphenol A type epoxy resin (a specific example, a product model jER1001 manufactured by Mitsubishi Chemical Corporation), and a bisphenol F type epoxy resin (a product manufactured by Mitsubishi Chemical Corporation as a specific example) Model jER4004P), bisphenol S type epoxy resin (as a specific example, product model EPICLON EXA-1514 manufactured by DIC Corporation), bisphenol AD type epoxy resin, biphenyl aldehyde varnish type epoxy resin (as a specific example) , product type NC-3000 manufactured by Nippon Kayaku Co., Ltd., hydrogenated bisphenol A type epoxy resin (as a specific example, product model ST-4000D manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.) Naphthalene type epoxy resin (as a specific example, product type EPICLON HP-4032, EPICLON HP-4700, EPICLON HP-4770 manufactured by DIC Corporation), and tertiary catechol type epoxy resin (as a specific example) , product type EPICLON HP-820 manufactured by DIC Co., Ltd., and dicyclopentadiene type epoxy resin (as a specific example, the product model EPICLON manufactured by DIC Corporation) HP-7200), adamantane type epoxy resin (as a specific example, product type ADAMANTATE XE-201 manufactured by Idemitsu Kosan Co., Ltd.), special difunctional epoxy resin (as a specific example, manufactured by Mitsubishi Chemical Corporation) Models YL7175-500, and YL7175-1000; DIC Corporation's product models EPICLON TSR-960, EPICLON TER-601, EPICLON TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA-4850, EPICLON EXA- 4816, EPICLON EXA-4822, and EPICLON EXA-9726; product type YSLV-120TE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), rubbery core-shell polymer modified bisphenol A type epoxy resin (as a specific example, Product model MX-156) manufactured by Kaneka Co., Ltd., rubber-like core-shell polymer modified bisphenol F-type epoxy resin (as a specific example, product model MX-136 manufactured by Kaneka Co., Ltd.), and rubber-containing particles Bisphenol F-type epoxy resin (commodity model MX-130 manufactured by Kaneka Co., Ltd. as a specific example).

環氧化合物(D),可含有含磷環氧樹脂。此時,能夠提升感光性樹脂組成物的硬化物的阻燃性。可在結晶性環氧樹脂中含有含磷環氧樹脂,或可在非晶性環氧樹脂中含有含磷環氧樹脂。含磷環氧樹脂,例如是磷酸改質雙酚F型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICRON EXA-9726、及EPICRON EXA-9710)、新日鐵住金化學股份有限公司製造的商品型號EPOTOHTO FX-305等。 The epoxy compound (D) may contain a phosphorus-containing epoxy resin. At this time, the flame retardancy of the cured product of the photosensitive resin composition can be improved. The phosphorus-containing epoxy resin may be contained in the crystalline epoxy resin, or the phosphorus-containing epoxy resin may be contained in the amorphous epoxy resin. Phosphorus-containing epoxy resin, for example, phosphoric acid-modified bisphenol F-type epoxy resin (for example, EPICRON EXA-9726 and EPICRON EXA-9710, manufactured by DIC Corporation), Nippon Steel & Sumitomo Chemical Co., Ltd. The company's product model EPOTOHTO FX-305 and so on.

非晶性環氧樹脂,較佳是含有環氧樹脂(da),該環氧樹脂(da)具有雙酚型結構單元(d1)與結構單元(d2)。藉由非晶性環氧樹脂含有環氧樹脂(da),能夠提高感光性樹脂組成物的硬化物的耐熱衝擊性。 The amorphous epoxy resin preferably contains an epoxy resin (da) having a bisphenol type structural unit (d1) and a structural unit (d2). When the amorphous epoxy resin contains an epoxy resin (da), the thermal shock resistance of the cured product of the photosensitive resin composition can be improved.

結構單元(d1),可列舉例如源自下述之結構單元:雙酚A、雙酚F、雙酚S。結構單元(d1),具體而言可列舉例如:將此等化合物的末端的OH基去除而成的單元、及下述式(8)所示的單元。式(8)所示的單元中的伸苯基及苯基的一部份可經氫化。並且,式(8)所示的單元中的伸苯基和苯基,可具有烴基、烷氧基、芳基、芳氧基、羥基等取代基。 The structural unit (d1) may, for example, be a structural unit derived from bisphenol A, bisphenol F or bisphenol S. Specific examples of the structural unit (d1) include a unit obtained by removing OH groups at the terminal of these compounds, and a unit represented by the following formula (8). A part of the phenyl group and the phenyl group in the unit represented by the formula (8) may be hydrogenated. Further, the phenyl group and the phenyl group in the unit represented by the formula (8) may have a substituent such as a hydrocarbon group, an alkoxy group, an aryl group, an aryloxy group or a hydroxyl group.

結構單元(d2)是由從由下述所組成之群組中的至少一種所構成:碳原子數4以上且20以下的直鏈狀烴結構單元(d21)、及醚氧原子數3以上且20以下的聚伸烷基醚結構單元(d22)。 The structural unit (d2) is composed of at least one selected from the group consisting of a linear hydrocarbon structural unit (d21) having 4 or more and 20 or less carbon atoms, and an ether oxygen atom number of 3 or more. A polyalkylene ether structural unit (d22) of 20 or less.

直鏈狀烴結構單元(d21),是-(CH2)y-的y是4以上且20以下的結構單元。y較佳是4~10。再者,-(CH2)y-的y是4以上且20以下的結構單元中,可具 有羥基等取代基來取代氫原子。並且,-(CH2)y-的y是4以上且20以下的結構單元中的至少一個氫原子可經下述所取代:烴基、烷氧基、芳基、芳氧基等。作為該取代基的烴基及烷氧基,較佳是碳數4以下。芳基及芳氧基中的芳基,較佳是苯基。直鏈狀烴結構單元(d21),可在不損害結構單元(d2)的可撓性的範圍內具有此等取代基。 The linear hydrocarbon structural unit (d21) is a structural unit in which y of -(CH 2 )y- is 4 or more and 20 or less. y is preferably 4 to 10. Further, in the structural unit in which y of -(CH 2 )y- is 4 or more and 20 or less, a substituent such as a hydroxyl group may be substituted for the hydrogen atom. Further, at least one hydrogen atom of the structural unit in which y of -(CH 2 )y- is 4 or more and 20 or less may be substituted with a hydrocarbon group, an alkoxy group, an aryl group, an aryloxy group or the like. The hydrocarbon group and the alkoxy group as the substituent are preferably 4 or less carbon atoms. The aryl group in the aryl group and the aryloxy group is preferably a phenyl group. The linear hydrocarbon structural unit (d21) may have such substituents within a range that does not impair the flexibility of the structural unit (d2).

作為聚伸烷基醚結構單元(d22),醚氧原子數是3以上且20以下,較佳是3~10。聚伸烷基醚結構單元(d22),具體而言可列舉例如源自選自下述的1種或複數種環氧烷的聚合物的結構單元:環氧乙烷、環氧丙烷、環氧丁烷、環氧異丁烷、環氧戊烷、四氫呋喃等。又,此環氧烷的1個以上的氫原子,可經例如羥基、烷氧基、芳基、芳氧基、烴基等所取代。作為該取代基的烴基及烷氧基,較佳是碳數4以下。芳基及芳氧基中的芳基,較佳是苯基。聚伸烷基醚結構單元(d22),可在不損害結構單元(d2)的可撓性的範圍內具有此等取代基。 The polyalkylene ether structural unit (d22) has an ether oxygen atom number of 3 or more and 20 or less, preferably 3 to 10. The polyalkylene ether structural unit (d22) may, for example, be a structural unit derived from a polymer selected from one or a plurality of alkylene oxides selected from the group consisting of ethylene oxide, propylene oxide, and epoxy. Butane, epoxy isobutane, pentylene oxide, tetrahydrofuran, and the like. Further, one or more hydrogen atoms of the alkylene oxide may be substituted with, for example, a hydroxyl group, an alkoxy group, an aryl group, an aryloxy group, a hydrocarbon group or the like. The hydrocarbon group and the alkoxy group as the substituent are preferably 4 or less carbon atoms. The aryl group in the aryl group and the aryloxy group is preferably a phenyl group. The polyalkylene ether structural unit (d22) may have such substituents within a range that does not impair the flexibility of the structural unit (d2).

結構單元(d1)與結構單元(d2)的莫耳比例,較佳是10:1~1:5,更佳是5:1~1:3。若結構單元(d1)的莫耳比例高於上述範圍,則非晶性環氧樹脂不具有充分的柔軟性,而有感光性樹脂組成物的硬化物容易發生龜裂之虞。又,若結構單元(d1)的莫耳比例低於上述範圍,則非晶性環氧樹脂的Tg過低,而有感光性樹脂組成物的硬化物的耐熱性降低之虞。 The molar ratio of the structural unit (d1) to the structural unit (d2) is preferably 10:1 to 1:5, more preferably 5:1 to 1:3. When the molar ratio of the structural unit (d1) is higher than the above range, the amorphous epoxy resin does not have sufficient flexibility, and the cured product of the photosensitive resin composition is liable to be cracked. In addition, when the molar ratio of the structural unit (d1) is less than the above range, the Tg of the amorphous epoxy resin is too low, and the heat resistance of the cured product of the photosensitive resin composition is lowered.

環氧樹脂(da),具體而言較佳是具有下述結構式(9-i)~(9-iv)所示的任一種以上的結構。又,下述所示的結構式的複數個羥基亦可進行交聯反應,使羥基的氧原子結合形成不特定結構。 Specifically, the epoxy resin (da) preferably has a structure of any one or more of the following structural formulae (9-i) to (9-iv). Further, a plurality of hydroxyl groups of the structural formula shown below may be subjected to a crosslinking reaction to bond an oxygen atom of a hydroxyl group to form an undefined structure.

結構式(9-i)~(9-iv)中,Ar1、Ar2是可經氫化且可具有取代基的結構單元(d1)。Ar1、Ar2可相同或不同。X是選自由下述所組成之群組中的至少一種:碳原子數4以上且20以下的直鏈狀烴基、及醚氧原子數1以上且18以下的聚伸烷基醚結構。當X是碳原子數4以上且20以下的直鏈狀烴基時,X構成結構單元(d2)。當X是醚氧原子數1以上且18以下的聚伸烷基醚結構時,-O- X-O-構成結構單元(d2)。又,n是重複單元的平均值,是1~30。 In the structural formulae (9-i) to (9-iv), Ar 1 and Ar 2 are a structural unit (d1) which may be hydrogenated and may have a substituent. Ar 1 and Ar 2 may be the same or different. X is at least one selected from the group consisting of a linear hydrocarbon group having 4 or more and 20 or less carbon atoms, and a polyalkylene ether structure having an ether oxygen number of 1 or more and 18 or less. When X is a linear hydrocarbon group having 4 or more and 20 or less carbon atoms, X constitutes a structural unit (d2). When X is a polyalkylene ether structure having an ether oxygen atom number of 1 or more and 18 or less, -O-XO- constitutes a structural unit (d2). Further, n is an average value of the repeating unit and is 1 to 30.

獲得這樣的環氧化合物(da)的方法,可列舉例如:對既定的環氧樹脂,使用硬化劑來使其硬化的方法。 The method of obtaining such an epoxy compound (da) is, for example, a method of curing a predetermined epoxy resin using a curing agent.

作為此既定的環氧樹脂,可列舉例如:使用像上述這樣具有結構單元(d1)和(d2)之環氧化合物的方法;組合使用具有結構單元(d1)之環氧化合物與具有結構單元(d2)之環氧化合物的方法;組合使用具有結構單元(d1)之環氧化合物與能夠藉由反應來對該環氧化合物賦予結構單元(d2)之鏈延伸劑的方法等。 As such a predetermined epoxy resin, for example, a method of using an epoxy compound having structural units (d1) and (d2) as described above; using an epoxy compound having a structural unit (d1) in combination with a structural unit ( A method of the epoxy compound of d2); a method of using an epoxy compound having a structural unit (d1) in combination with a chain extender capable of imparting a structural unit (d2) to the epoxy compound by a reaction, or the like.

環氧化合物(da)的具體例,可列舉例如:DIC股份有限公司製造的商品型號EPICLON EXA4816、EPICLON EXA4822;三菱化學股份有限公司製造的商品型號YL7175-500、YL7175-1000等。 Specific examples of the epoxy compound (da) include, for example, product models EPICLON EXA4816 and EPICLON EXA4822 manufactured by DIC Corporation; and product models YL7175-500 and YL7175-1000 manufactured by Mitsubishi Chemical Corporation.

具有結構單元(d1)和結構單元(d1)之環氧化合物的環氧當量,較佳是200~800g/eq,更佳是350~650g/eq。 The epoxy equivalent of the epoxy compound having the structural unit (d1) and the structural unit (d1) is preferably 200 to 800 g/eq, more preferably 350 to 650 g/eq.

非晶性環氧樹脂,較佳是含有環氧樹脂(db),該環氧樹脂(db)具有酚醛清漆結構與聯苯骨架。含有環氧樹脂(db)的感光性樹脂組成物,其硬化物的電絕緣性能提高。因此,感光性樹脂組成物特別適合作為用於印刷線路板的絕緣材料,該印刷線路板的絕緣材料需要線間絕緣性和層間遷移耐性等高可靠性。環氧樹脂(db),含有非晶性聯苯酚醛清漆型環氧樹脂(具體例是日 本化藥股份有限公司製造的商品型號NC-3000、型號NC-3000-L、型號NC-3000-H、型號NC-3000-FH-75M、CER-3000-L)等。 The amorphous epoxy resin preferably contains an epoxy resin (db) having a novolac structure and a biphenyl skeleton. A photosensitive resin composition containing an epoxy resin (db) has improved electrical insulating properties of the cured product. Therefore, the photosensitive resin composition is particularly suitable as an insulating material for a printed wiring board, and the insulating material of the printed wiring board requires high reliability such as inter-line insulation and interlayer migration resistance. Epoxy resin (db) containing amorphous biphenyl aldehyde varnish type epoxy resin (specific example is day) The product model NC-3000, model NC-3000-L, model NC-3000-H, model NC-3000-FH-75M, CER-3000-L) manufactured by the Chemical Co., Ltd.

本實施形態的感光性樹脂組成物,可含有三聚氰胺(E)。此時,感光性樹脂組成物的硬化物與銅等金屬之間的黏合性提高。因此,感光性樹脂組成物特別適合作為用於印刷線路板的絕緣材料。又,感光性樹脂組成物的硬化物的耐鍍覆性、亦即無電解鍍鎳/金處理時的白化耐性提高。 The photosensitive resin composition of the present embodiment may contain melamine (E). At this time, the adhesion between the cured product of the photosensitive resin composition and a metal such as copper is improved. Therefore, the photosensitive resin composition is particularly suitable as an insulating material for a printed wiring board. Moreover, the plating resistance of the cured product of the photosensitive resin composition, that is, the whitening resistance at the time of electroless nickel plating/gold treatment is improved.

本實施形態的感光性樹脂組成物,可含有有機溶劑。有機溶劑,是基於下述目的而使用:感光性樹脂組成物的液狀化或清漆化、黏度的調整、塗佈性的調整、成膜性的調整等。 The photosensitive resin composition of the present embodiment may contain an organic solvent. The organic solvent is used for liquidification or varnishing of a photosensitive resin composition, adjustment of viscosity, adjustment of coatability, adjustment of film formability, and the like.

有機溶劑,可含有例如選自由下述所組成之群組中的至少一種化合物:乙醇、丙醇、異丙醇、己醇、乙二醇等直鏈、支鏈、2級或多元醇類;甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;Swasol系列(丸善石油化學公司製造)、Solvesso系列(埃克森美孚化學公司(ExxonMobil Chemical Company)製造)等石油系芳香族系混合溶劑;賽璐蘇、丁基賽璐蘇等賽璐蘇類;卡必醇、丁基卡必醇等卡必醇類;丙二醇甲基醚等丙二醇烷基醚類;二丙二醇甲基醚等聚丙二醇烷基醚類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、卡必醇乙酸酯等乙酸酯類;及,二烷二醇醚類。 The organic solvent may contain, for example, at least one compound selected from the group consisting of: linear, branched, quaternary or polyhydric alcohols such as ethanol, propanol, isopropanol, hexanol, ethylene glycol; Ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; Swasol series (manufactured by Maruzen Petrochemical Co., Ltd.), Solvesso series (manufactured by ExxonMobil Chemical Company), etc. Petroleum aromatic mixed solvent; celecoxib, butyl acesulfame, etc.; carbitol, carbitol, propylene glycol methyl ether and other propylene glycol alkyl ether; a polypropylene glycol alkyl ether such as propylene glycol methyl ether; an acetate such as ethyl acetate, butyl acetate, celecoxib acetate or carbitol acetate; and a dialkyl glycol ether.

適當調整感光性樹脂組成物中的成分的量,使得感光性樹脂組成物具有光硬化性且能夠藉由鹼性溶液來進行顯影。 The amount of the component in the photosensitive resin composition is appropriately adjusted so that the photosensitive resin composition has photocurability and can be developed by an alkaline solution.

相對於感光性樹脂組成物的固體成分量,含羧基樹脂(A)的量,若在5~85質量%的範圍內則較佳,若在10~75質量%的範圍內則更佳,若在30~60質量%的範圍內則進一步較佳。 The amount of the carboxyl group-containing resin (A) is preferably in the range of 5 to 85% by mass, more preferably in the range of 10 to 75% by mass, based on the solid content of the photosensitive resin composition. It is further preferably in the range of 30 to 60% by mass.

相對於含羧基樹脂(A),不飽和化合物(B)的量,若在1~50質量%的範圍內則較佳,若在10~45質量%的範圍內則更佳,若在21~40質量%的範圍內則進一步較佳。 The amount of the unsaturated compound (B) is preferably in the range of 1 to 50% by mass based on the carboxyl group-containing resin (A), and more preferably in the range of 10 to 45% by mass. Further preferably, it is in the range of 40% by mass.

相對於含羧基樹脂(A),光聚合起始劑(C)的量,較佳是在0.1~30質量%的範圍內,若在1~25質量%的範圍內則進一步較佳。 The amount of the photopolymerization initiator (C) is preferably in the range of 0.1 to 30% by mass based on the carboxyl group-containing resin (A), and more preferably in the range of 1 to 25% by mass.

有關環氧化合物(D)的量,相對於含羧基樹脂(A)中包含的1當量的羧基,較佳是環氧化合物(D)中包含的環氧基的當量的合計量在0.7~2.5的範圍內,更佳是在0.7~2.3的範圍內,若在0.7~2.0的範圍內則進一步較佳。 The amount of the epoxy compound (D) is preferably 0.7 to 2.5 in terms of the equivalent amount of the epoxy group contained in the epoxy compound (D) with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). The range is preferably in the range of 0.7 to 2.3, and further preferably in the range of 0.7 to 2.0.

相對於含羧基樹脂(A)中包含的1當量的羧基,結晶性環氧樹脂及非晶性環氧樹脂中包含的環氧基的當量的合計量是2.5以下,能夠提高顯影性。相對於含羧基樹脂(A)中包含的1當量的羧基,結晶性環氧樹脂及非 晶性環氧樹脂中包含的環氧基的當量的合計量,若是0.7~2.3則較佳,若是0.7~2.0則更佳。 The total amount of equivalents of the epoxy groups contained in the crystalline epoxy resin and the amorphous epoxy resin is 2.5 or less with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A), and the developability can be improved. a crystalline epoxy resin and a non-valent carboxyl group contained in the carboxyl group-containing resin (A) The total amount of the epoxy groups contained in the crystalline epoxy resin is preferably 0.7 to 2.3, more preferably 0.7 to 2.0.

相對於含羧基樹脂(A)中包含的1當量的羧基,較佳是結晶性環氧樹脂的環氧基的當量在0.2~1.9的範圍內。此時,能夠特別提高感光性樹脂組成物的顯影性。相對於含羧基樹脂(A)中包含的1當量的羧基,更佳是結晶性環氧樹脂的環氧基的當量在0.3~1.7的範圍內。 The equivalent of the epoxy group of the crystalline epoxy resin is preferably in the range of 0.2 to 1.9 with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). In this case, the developability of the photosensitive resin composition can be particularly improved. The equivalent of the epoxy group of the crystalline epoxy resin is preferably in the range of 0.3 to 1.7 with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A).

相對於含羧基樹脂(A)中包含的1當量的羧基,較佳是非晶性環氧樹脂的環氧基的當量在0.05~1.5的範圍內。此時,能夠特別提高感光性樹脂組成物的顯影性,並且提高硬化物在溫度變化反覆進行中的龜裂耐性。相對於含羧基樹脂(A)中包含的1當量的羧基,更佳是非晶性環氧樹脂的環氧基的當量在0.1~1.2的範圍內。 The equivalent of the epoxy group of the amorphous epoxy resin is preferably in the range of 0.05 to 1.5 with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). In this case, the developability of the photosensitive resin composition can be particularly improved, and the crack resistance of the cured product in the repeated progress of the temperature change can be improved. The equivalent of the epoxy group of the amorphous epoxy resin is preferably in the range of 0.1 to 1.2 with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A).

當感光性樹脂組成物含有三聚氰胺(E)時,相對於含羧基樹脂(A),三聚氰胺(E)的量,較佳是在0.1~10質量%的範圍內,若在0.5~5質量%的範圍內則進一步較佳。 When the photosensitive resin composition contains melamine (E), the amount of melamine (E) is preferably in the range of 0.1 to 10% by mass, and 0.5 to 5% by mass based on the carboxyl group-containing resin (A). Further within the range is further preferred.

當感光性樹脂組成物含有有機溶劑時,有機溶劑的量,較佳是:以在使由感光性樹脂組成物所形成之塗膜乾燥時有機溶劑能夠迅速地揮發而消失的方式,亦即以有機溶劑不殘留在乾燥膜中的方式,來進行調整。尤其,相對於感光性樹脂組成物整體,有機溶劑的量,較佳是在0~99.5質量%的範圍內,若在15~60質量%的範圍內 則進一步較佳。再者,有機溶劑的適當比例,會根據塗佈方法等而不同,因此,較佳是視塗佈方法來適當調節比例。 When the photosensitive resin composition contains an organic solvent, the amount of the organic solvent is preferably such that the organic solvent can be quickly volatilized and disappeared when the coating film formed of the photosensitive resin composition is dried, that is, The organic solvent is adjusted in such a manner that it does not remain in the dried film. In particular, the amount of the organic solvent is preferably in the range of 0 to 99.5% by mass, and in the range of 15 to 60% by mass, based on the entire photosensitive resin composition. It is further preferred. Further, the appropriate ratio of the organic solvent varies depending on the coating method and the like. Therefore, it is preferred to appropriately adjust the ratio depending on the coating method.

再者,固體成分量,是指從感光性樹脂組成物將溶劑等揮發性成分去除後餘留的所有成分的合計量。 In addition, the solid content amount is a total amount of all the components remaining after the volatile component such as a solvent is removed from the photosensitive resin composition.

只要在不妨礙本實施形態的功效的範圍內,感光性樹脂組成物,可進一步含有上述成分以外的成分。 The photosensitive resin composition may further contain components other than the above components, within a range that does not impair the effects of the embodiment.

例如:感光性樹脂組成物可含有無機填充材料。此時,會降低由感光性樹脂組成物所形成的膜之硬化收縮。無機填充材料,可含有例如選自由下述所組成之群組中的一種以上的材料:硫酸鋇、結晶性二氧化矽、奈米二氧化矽、奈米碳管(carbon nanotube)、滑石、膨潤土、氫氧化鋁、氫氧化鎂、及二氧化鈦。藉由使無機填充材料含有二氧化鈦、氧化鋅等白色材料,能夠使感光性樹脂組成物和其硬化物白色化。感光性樹脂組成物中的無機填充材料的量,可適當設定,但相對含羧基樹脂(A),無機填充材料的量,較佳是在1~300質量%的範圍內。 For example, the photosensitive resin composition may contain an inorganic filler. At this time, the hardening shrinkage of the film formed of the photosensitive resin composition is lowered. The inorganic filler may contain, for example, one or more materials selected from the group consisting of barium sulfate, crystalline cerium oxide, nano cerium oxide, carbon nanotubes, talc, and bentonite. , aluminum hydroxide, magnesium hydroxide, and titanium dioxide. When the inorganic filler contains a white material such as titanium oxide or zinc oxide, the photosensitive resin composition and the cured product thereof can be whitened. The amount of the inorganic filler in the photosensitive resin composition can be appropriately set. However, the amount of the inorganic filler is preferably in the range of 1 to 300% by mass based on the carboxyl group-containing resin (A).

感光性樹脂組成物,可含有選自由下述所組成之群組中的至少一種樹脂:經以己內醯胺、肟、丙二酸酯等封閉後之甲苯二異氰酸酯系、嗎啉二異氰酸酯系、異佛酮二異氰酸酯系及六亞甲基二異氰酸酯系的封閉異氰酸酯;三聚氰胺樹脂、正丁基化三聚氰胺樹脂、異丁基化三聚氰胺樹脂、丁基化尿素樹脂、丁基化三聚氰胺尿素共縮合樹脂、苯胍胺(benzoguanamine)系共縮合樹脂等胺基樹脂;前述以外的各種熱硬化性樹脂;紫外線硬化性環 氧(甲基)丙烯酸酯;使(甲基)丙烯酸與雙酚A型、苯酚酚醛清漆型、甲酚酚醛清漆型、脂環型等的環氧樹脂進行加成而獲得之樹脂;及,鄰苯二甲酸二烯丙酯樹脂、苯氧樹脂、胺酯樹脂、氟樹脂等高分子化合物。 The photosensitive resin composition may contain at least one resin selected from the group consisting of toluene diisocyanate and morpholine diisocyanate which are blocked with caprolactam, hydrazine, malonate or the like. Isophorone diisocyanate and hexamethylene diisocyanate blocked isocyanate; melamine resin, n-butyl melamine resin, isobutylated melamine resin, butylated urea resin, butylated melamine urea cocondensation resin , an amide-based resin such as a benzoguanamine-based co-condensation resin; various thermosetting resins other than the above; an ultraviolet curable ring Oxy (meth) acrylate; a resin obtained by adding (meth)acrylic acid to an epoxy resin such as a bisphenol A type, a phenol novolac type, a cresol novolak type, or an alicyclic type; and, adjacent A polymer compound such as diallyl phthalate resin, phenoxy resin, amine ester resin or fluororesin.

感光性樹脂組成物,可含有用來使環氧化合物(D)硬化之硬化劑。硬化劑,可含有例如選自由下述所組成之群組中的至少一種成分:咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等咪唑衍生物;雙氰胺、苯甲基二甲基胺、4-(二甲胺基)-N,N-二甲基苯甲基胺、4-甲氧基-N,N-二甲基苯甲基胺、4-甲基-N,N-二甲基苯甲基胺等胺化合物;己二醯肼、癸二醯肼等醯肼化合物;三苯基膦等磷化合物;酸酐;酚;硫醇;路易斯酸胺錯合物;及,鎓鹽。這些成分的市售品,例如有:四國化成股份有限公司製造的2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(皆為咪唑系化合物的商品名);San-Apro股份有限公司製造的U-CAT3503N、U-CAT3502T(皆為二甲基胺的封閉異氰酸酯化合物的商品名);DBU、DBN、U-CATSA102、U-CAT5002(皆為二環式脒化合物及其鹽)。 The photosensitive resin composition may contain a hardener for hardening the epoxy compound (D). The hardener may contain, for example, at least one component selected from the group consisting of imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl Imidazole derivatives such as imidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole; dicyandiamide, benzene Methyl dimethylamine, 4-(dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl -N,N-dimethylbenzylamine and other amine compounds; ruthenium compounds such as hexamethylenedifluoride and ruthenium dioxime; phosphorus compounds such as triphenylphosphine; acid anhydride; phenol; thiol; Lewis acid amine And; 鎓 salt. Commercial products of these components include, for example, 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, and 2P4MHZ manufactured by Shikoku Chemicals Co., Ltd. (all trade names of imidazole compounds); manufactured by San-Apro Co., Ltd. U-CAT3503N, U-CAT3502T (trade names of blocked isocyanate compounds of dimethylamine); DBU, DBN, U-CATSA102, U-CAT5002 (all of which are bicyclic guanidine compounds and salts thereof).

感光性樹脂組成物,可含有三聚氰胺(E)以外的黏合性賦予劑。黏合性賦予劑為例如:胍胺、乙醯胍胺、苯胍胺、以及2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三 嗪、2-乙烯基-4,6-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪的異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪的異三聚氰酸加成物等S-三嗪衍生物。 The photosensitive resin composition may contain an adhesiveness imparting agent other than melamine (E). The adhesion imparting agent is, for example, guanamine, acetamide, benzoguanamine, and 2,4-diamino-6-methylpropenyloxyethyl-S-three. Isophthalic acid, 2-vinyl-4,6-diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine, isomeric cyanuric acid adduct, 2,4 An S-triazine derivative such as an isomeric cyanuric acid addition product of diamino-6-methacryloxyethyl-S-triazine.

感光性樹脂組成物,可含有選自由下述所組成之群組中的至少一種成分:硬化促進劑;著色劑;聚矽氧、丙烯酸酯等的共聚物;塗平劑(leveling agent);矽烷耦合劑等黏合性賦予劑;搖變劑(thixotropic agent);聚合抑制劑;防光暈劑;阻燃劑;消泡劑;抗氧化劑;界面活性劑;以及,高分子分散劑。 The photosensitive resin composition may contain at least one component selected from the group consisting of a curing accelerator; a colorant; a copolymer of polyfluorene oxide, acrylate, etc.; a leveling agent; Cohesive imparting agent such as a coupling agent; a thixotropic agent; a polymerization inhibitor; an antihalation agent; a flame retardant; an antifoaming agent; an antioxidant; a surfactant; and a polymer dispersing agent.

感光性樹脂組成物中的胺化合物的含量,以盡可能減少為佳。若以這樣的方式進行,則不易損及由感光性樹脂組成物的硬化物所構成之層的電絕緣性。尤其,相對於含羧基樹脂(A),胺化合物的量,較佳是6質量%以下,若是4質量%以下則進一步較佳。 The content of the amine compound in the photosensitive resin composition is preferably as small as possible. When it is carried out in this manner, the electrical insulation of the layer composed of the cured product of the photosensitive resin composition is not easily impaired. In particular, the amount of the amine compound is preferably 6% by mass or less based on the carboxyl group-containing resin (A), and more preferably 4% by mass or less.

可藉由下述方式來調製感光性樹脂組成物:調配如上所述之感光性樹脂組成物的原料,並藉由使用例如三輥研磨機(three-roll mill)、球磨機(ball mill)、砂磨機(sand mill)等之公知的揉合方法來進行揉合。當感光性樹脂組成物的原料中包含液狀成分、黏度較低的成分等時,可藉由下述方式來調配感光性樹脂組成物:首先將原料中除了液狀成分、黏度較低的成分以外的部分進行揉合,然後在獲得的混合物中,添加液狀成分、黏度較低的成分等並加以混合。 The photosensitive resin composition can be prepared by blending a raw material of the photosensitive resin composition as described above, and by using, for example, a three-roll mill, a ball mill, and a sand. A well-known kneading method such as a sand mill is used for kneading. When the raw material of the photosensitive resin composition contains a liquid component or a component having a low viscosity, the photosensitive resin composition can be prepared by first adding a component having a low viscosity in addition to a liquid component in the raw material. The other portions are kneaded, and then a liquid component, a component having a low viscosity, and the like are added to the obtained mixture and mixed.

考慮到保存穩定性等,可藉由將感光性樹脂組成物的一部分成分混合來調製第一劑,並藉由將其餘成分混合來調製第二劑。亦即,感光性樹脂組成物可具備第一劑與第二劑。此時,例如,可藉由將感光性樹脂組成物的成分中的不飽和化合物(B)、一部分有機溶劑及熱硬化性成分預先混合並加以分散來調製第一劑,並藉由將感光性樹脂組成物的成分中的其餘成分混合並加以分散來調製第二劑。此時,可適時將需要量的第一劑與第二劑混合來調製混合液,並使該混合液硬化來獲得硬化物。 In consideration of storage stability and the like, the first agent can be prepared by mixing a part of components of the photosensitive resin composition, and the second agent can be prepared by mixing the remaining components. That is, the photosensitive resin composition may have a first agent and a second agent. In this case, for example, the first compound can be prepared by previously mixing and dispersing the unsaturated compound (B), a part of the organic solvent, and the thermosetting component in the component of the photosensitive resin composition, and by sensitizing The remaining components of the components of the resin composition are mixed and dispersed to prepare a second agent. At this time, the required amount of the first agent and the second agent may be mixed as appropriate to prepare a mixed solution, and the mixed solution is hardened to obtain a cured product.

本實施形態的感光性樹脂組成物,適合於用於印刷線路板的電絕緣性材料。尤其,感光性樹脂組成物,適合於抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層等電絕緣性層的材料。 The photosensitive resin composition of this embodiment is suitable for an electrically insulating material used for a printed wiring board. In particular, the photosensitive resin composition is suitable for a material such as a solder resist layer, a plating resist layer, an etch resist layer, or an interlayer insulating layer.

本實施形態的感光性樹脂組成物,較佳是具有如下所述之性質:即便是厚度25μm的皮膜,也能夠藉由碳酸鈉水溶液來進行顯影。此時,能夠藉由光刻法,由感光性樹脂組成物來製作充分厚的電絕緣性層,因此,能夠將感光性樹脂組成物廣泛地應用於製作印刷線路板中的層間絕緣層、抗焊劑層等。當然,亦能夠由感光性樹脂組成物來製作比厚度25μm更薄的電絕緣性層。 The photosensitive resin composition of the present embodiment preferably has a property of being developed by an aqueous solution of sodium carbonate even in the form of a film having a thickness of 25 μm . In this case, since a sufficiently thick electrically insulating layer can be produced from the photosensitive resin composition by photolithography, the photosensitive resin composition can be widely applied to the production of an interlayer insulating layer in a printed wiring board. Flux layer, etc. Of course, it is also possible to produce an electrically insulating layer thinner than the thickness of 25 μm from the photosensitive resin composition.

可藉由下述方法來確認厚度25μm的皮膜是否能夠藉由碳酸鈉水溶液來進行顯影。藉由在適當的基材上塗佈感光性樹脂組成物,來形成濕潤塗膜,然後以80℃對該濕潤塗膜加熱40分鐘,藉此形成厚度25μm的皮 膜。在將負型光罩直接地緊貼於該皮膜上的狀態下,以500mJ/cm2的條件對皮膜照射紫外線,來實行曝光,該負型光罩具有使紫外線穿透之曝光部、及遮蔽紫外線之非曝光部。在曝光後,實行下述處理:先以0.2MPa的噴射壓力來對皮膜噴射30℃的1%碳酸鈉(Na2CO3)水溶液90秒,再以0.2MPa的噴射壓力來噴射純水90秒。在該處理後觀察皮膜,結果皮膜中的對應於非曝光部的部分被去除且無法確認到殘渣時,則可判斷厚度25μm的皮膜能夠藉由碳酸鈉水溶液來進行顯影。 Whether or not the film having a thickness of 25 μm can be developed by an aqueous solution of sodium carbonate can be confirmed by the following method. The wet coating film was formed by coating a photosensitive resin composition on a suitable substrate, and then the wet coating film was heated at 80 ° C for 40 minutes to form a film having a thickness of 25 μm . Exposure was carried out by irradiating the film with ultraviolet rays at a condition of 500 mJ/cm 2 in a state in which the negative mask was directly adhered to the film, and the negative mask had an exposure portion for blocking ultraviolet rays and shielding. Non-exposure part of ultraviolet light. After the exposure, the following treatment was carried out: a 1% sodium carbonate (Na 2 CO 3 ) aqueous solution at 30 ° C was sprayed on the film at an injection pressure of 0.2 MPa for 90 seconds, and then pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. . When the film was observed after the treatment, and the portion corresponding to the non-exposed portion in the film was removed and the residue could not be confirmed, it was confirmed that the film having a thickness of 25 μm could be developed by the aqueous sodium carbonate solution.

以下,參照第1圖A至第1圖E,來說明印刷線路板的製造方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成之層間絕緣層。在本方法中,是藉由光刻法來在層間絕緣層上形成貫穿孔。 Hereinafter, an example of a method of manufacturing a printed wiring board having an interlayer insulating layer formed of the photosensitive resin composition of the present embodiment will be described with reference to FIG. 1 to FIG. In the method, a through hole is formed on the interlayer insulating layer by photolithography.

首先,如第1圖A所示,準備芯材1。芯材1,具備例如至少一絕緣層2與至少一導體線路3。設置在芯材1的其中一面上的導體線路3,以下稱為第一導體線路3。如第1圖B所示,在芯材1的其中一面上,由感光性樹脂組成物形成皮膜4。皮膜4的形成方法,例如有塗佈法與乾膜法。 First, as shown in FIG. 1A, the core material 1 is prepared. The core material 1 is provided with, for example, at least one insulating layer 2 and at least one conductor line 3. The conductor line 3 provided on one side of the core material 1 is hereinafter referred to as a first conductor line 3. As shown in Fig. 1B, a film 4 is formed on one surface of the core material 1 from a photosensitive resin composition. The method of forming the film 4 includes, for example, a coating method and a dry film method.

在塗佈法中,例如在芯材1上塗佈感光性樹脂組成物,來形成濕潤薄膜。感光性樹脂組成物的塗佈方法,可選自公知的方法,例如由下述方法所組成之群組:浸漬法、噴霧法、旋轉塗佈法、輥塗佈法、簾幕式塗佈法(curtain coating)、及網版印刷法。繼而,為了使感 光性樹脂組成物中的有機溶劑揮發,例如在60~120℃的範圍內的溫度下,使濕潤塗膜乾燥,藉此能夠獲得皮膜4。 In the coating method, for example, a photosensitive resin composition is applied onto the core material 1 to form a wet film. The coating method of the photosensitive resin composition may be selected from known methods, for example, a group consisting of a dipping method, a spray method, a spin coating method, a roll coating method, and a curtain coating method. (curtain coating), and screen printing. Then, in order to make sense The organic solvent in the photo-resin composition is volatilized, and the wet film is dried, for example, at a temperature in the range of 60 to 120 ° C, whereby the film 4 can be obtained.

在乾膜法中,首先在由聚酯等所作成的適當的支撐體上塗佈感光性樹脂組成物,再進行乾燥,藉此在支撐體上形成感光性樹脂組成物的乾燥物也就是乾膜。藉此,獲得一種積層體,其具備乾膜與用來支撐乾膜的支撐體。先將該積層體中的乾膜疊合於芯材1上,再對乾膜與芯材1施加壓力,繼而自乾膜將支撐體剝離,藉此自支撐體上將乾膜轉印至芯材1上。藉此,在芯材1上設置由乾膜所構成之皮膜4。 In the dry film method, first, a photosensitive resin composition is applied onto a suitable support made of polyester or the like, and dried, whereby a dried product of a photosensitive resin composition is formed on the support, that is, dried. membrane. Thereby, a laminated body having a dry film and a support for supporting the dry film is obtained. First, the dry film in the laminate is superposed on the core material 1, and then the dry film is pressed against the core material 1, and then the support is peeled off from the dry film, thereby transferring the dry film to the core from the support. On the material 1. Thereby, the film 4 composed of the dry film is provided on the core material 1.

如第1圖C所示,藉由對皮膜4進行曝光,來使皮膜4部分硬化。因此,例如先將負型光罩緊貼於皮膜4上,再對皮膜4照射紫外線。負型光罩具備使紫外線穿透之曝光部、及遮蔽紫外線之非曝光部,且非曝光部是設置在與貫穿孔10的位置一致的位置。負型光罩,例如是遮罩膜(mask film)或乾板(dry plate)等曝光用具(photo tool)。紫外線的光源,可選自由例如下述所組成之群組:化學燈(chemical lamp)、低壓水銀燈、中壓水銀燈、高壓水銀燈、超高壓水銀燈、氙氣燈、及金屬鹵素燈。 As shown in Fig. 1C, the film 4 is partially cured by exposure to the film 4. Therefore, for example, the negative mask is attached to the film 4, and the film 4 is irradiated with ultraviolet rays. The negative photomask includes an exposure portion that allows ultraviolet rays to pass through, and a non-exposure portion that blocks ultraviolet rays, and the non-exposed portion is provided at a position that coincides with the position of the through hole 10. The negative mask is, for example, a photo tool such as a mask film or a dry plate. The ultraviolet light source may be selected from the group consisting of a chemical lamp, a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, an ultra high pressure mercury lamp, a xenon lamp, and a metal halide lamp.

再者,曝光方法,可以是使用負型光罩之方法以外的方法。例如,可藉由直接描繪法來對皮膜4進行曝光,該直接描繪法是將自光源發出的紫外線僅照射在皮膜 4的所欲曝光的部分。適用於直接描繪法的光源,可選自由例如下述所組成之群組:高壓水銀燈、超高壓水銀燈、金屬鹵素燈、g線(436nm)、h線(405nm)、i線(365nm);及,g線、h線及i線之中的2種以上的組合。 Further, the exposure method may be a method other than the method using a negative mask. For example, the film 4 can be exposed by a direct drawing method in which ultraviolet rays emitted from a light source are irradiated only on the film. 4 of the desired part of the exposure. The light source suitable for the direct drawing method may be selected from the group consisting of a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a metal halide lamp, a g line (436 nm), an h line (405 nm), and an i line (365 nm); A combination of two or more of the g line, the h line, and the i line.

又,在乾膜法中,可先將該積層體的乾膜疊合於芯材1上,然後在不剝離支撐體的情形下,透過支撐體來對由乾膜所構成之皮膜4照射紫外線,藉此對皮膜4進行曝光,繼而在顯影處理前自皮膜4剝離支撐體。 Further, in the dry film method, the dry film of the laminate may be laminated on the core material 1, and then the film 4 composed of the dry film may be irradiated with ultraviolet rays through the support without peeling off the support. Thereby, the film 4 is exposed, and then the support is peeled off from the film 4 before the development process.

繼而,藉由對皮膜4實施顯影處理,來去除第1圖C所示的皮膜4的未曝光部分5,藉此,以第1圖D所示的方式,來在要形成貫穿孔10的位置上設置孔6。在顯影處理中,可視感光性樹脂組成物的組成而使用適當的顯影液。顯影液是例如:含有鹼金屬鹽和鹼金屬氫氧化物之中的至少其中一者的鹼性水溶液;或有機胺。鹼性水溶液,更具體而言,含有例如選自由下述所組成之群組中的至少一種成分:碳酸鈉、碳酸鉀、碳酸銨、碳酸氫鈉、碳酸氫鉀、碳酸氫銨、氫氧化鈉、氫氧化鉀、氫氧化銨、氫氧化四甲基銨、及氫氧化鋰。鹼性水溶液中的溶劑,可僅為水,亦可為水與低級醇類等親水性有機溶劑的混合物。有機胺,可含有例如選自由下述所組成之群組中的至少一種成分:單乙醇胺、二乙醇胺、三乙醇胺、單異丙醇胺、二異丙醇胺、及三異丙醇胺。 Then, by performing development processing on the film 4, the unexposed portion 5 of the film 4 shown in Fig. 1C is removed, whereby the through hole 10 is formed in the manner shown in Fig. 1D. Set the hole 6 on it. In the development treatment, an appropriate developer can be used depending on the composition of the photosensitive resin composition. The developer is, for example, an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide; or an organic amine. The alkaline aqueous solution, more specifically, contains, for example, at least one component selected from the group consisting of sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, ammonium hydrogencarbonate, sodium hydroxide , potassium hydroxide, ammonium hydroxide, tetramethylammonium hydroxide, and lithium hydroxide. The solvent in the alkaline aqueous solution may be only water or a mixture of water and a hydrophilic organic solvent such as a lower alcohol. The organic amine may contain, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine.

顯影液,較佳是含有鹼金屬鹽和鹼金屬氫氧化物中的至少其中一者之鹼性水溶液,特佳是碳酸鈉水溶 液。此時,能夠達成作業環境的提升和廢棄物處理的負擔減少。 The developer, preferably an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, particularly preferably sodium carbonate water-soluble liquid. At this time, it is possible to achieve an increase in the working environment and a reduction in the burden of waste disposal.

繼而,藉由對皮膜4進行加熱來使其硬化。加熱的條件,例如,加熱溫度是在120~200℃的範圍內,加熱時間是在30~120分鐘的範圍內。若以這樣的方式進行來使皮膜4進行熱硬化,則能夠提升層間絕緣層7的強度、硬度、耐化學藥品性等性能。 Then, the film 4 is hardened by heating it. The heating conditions, for example, the heating temperature is in the range of 120 to 200 ° C, and the heating time is in the range of 30 to 120 minutes. When the film 4 is thermally cured in this manner, the properties such as strength, hardness, and chemical resistance of the interlayer insulating layer 7 can be improved.

可視需要而在加熱前或加熱後、或在加熱前與加熱後,對皮膜4進一步照射紫外線。此時,能夠使皮膜4的光硬化進一步進行。 The film 4 is further irradiated with ultraviolet rays before or after heating, or before and after heating, as needed. At this time, the photocuring of the film 4 can be further performed.

根據以上所述,能夠在芯材1上設置層間絕緣層7,該層間絕緣層7是由感光性樹脂組成物的硬化物所構成。可藉由加成法等公知的方法,來在該層間絕緣層7上設置第二導體線路8和穿孔鍍覆9。藉此,能夠獲得印刷線路板11,該印刷線路板11,如第1圖E所示,具備:第一導體線路3;第二導體線路8;層間絕緣層7,其介於第一導體線路3與第二導體線路8之間;以及,貫穿孔10,其將第一導體線路3與第二導體線路8進行電性連接。再者,在第1圖E中,穿孔鍍覆9具有將孔6的內面被覆之筒狀的形狀,但是亦可在孔6的內側整體填充有穿孔鍍覆9。 According to the above, the interlayer insulating layer 7 can be provided on the core material 1, and the interlayer insulating layer 7 is composed of a cured product of a photosensitive resin composition. The second conductor line 8 and the perforated plating 9 may be provided on the interlayer insulating layer 7 by a known method such as an additive method. Thereby, the printed wiring board 11 can be obtained, as shown in FIG. 1E, comprising: a first conductor line 3; a second conductor line 8; and an interlayer insulating layer 7 interposed between the first conductor lines 3 and the second conductor line 8; and the through hole 10 electrically connects the first conductor line 3 and the second conductor line 8. Further, in FIG. 1E, the perforated plating 9 has a tubular shape in which the inner surface of the hole 6 is covered, but the perforated plating 9 may be entirely filled inside the hole 6.

說明製造印刷線路板的方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成之抗焊劑層。 An example of a method of manufacturing a printed wiring board comprising a solder resist layer formed of the photosensitive resin composition of the present embodiment will be described.

首先,準備芯材。芯材,具備例如至少一絕緣層與至少一導體線路。在芯材的設置有導體線路的面上,由感光性樹脂組成物形成皮膜。作為皮膜的形成方法,可列舉塗佈法與乾膜法。作為塗佈法與乾膜法,可採用與上述形成層間絕緣層時相同的方法。藉由對皮膜進行曝光來使部分進行硬化。曝光方法,亦可採用與上述形成層間絕緣層時相同的方法。繼而,藉由對皮膜實施顯影處理,來去除皮膜的未曝光部分,藉此,皮膜的曝光後的部分殘留於芯材上。繼而,藉由對芯材上的皮膜進行加熱,來使其進行熱硬化。顯影方法和加熱方法,亦可採用與上述形成層間絕緣層時相同的方法。在加熱前及加熱後其中之一個時間點、或者在加熱前及加熱後,對皮膜進一步照射紫外線。此時,能夠使皮膜的光硬化進一步進行。 First, prepare the core material. The core material is provided with, for example, at least one insulating layer and at least one conductor line. A film is formed from a photosensitive resin composition on a surface of the core material on which the conductor line is provided. As a method of forming the film, a coating method and a dry film method are exemplified. As the coating method and the dry film method, the same method as in the case of forming the interlayer insulating layer described above can be employed. The portion is hardened by exposing the film. The exposure method may be the same as the above-described method of forming the interlayer insulating layer. Then, the unexposed portion of the film is removed by subjecting the film to development treatment, whereby the exposed portion of the film remains on the core material. Then, the film on the core material is thermally hardened by heating it. The developing method and the heating method may be the same as those in the case of forming the interlayer insulating layer described above. The film is further irradiated with ultraviolet rays at one of the time points before and after the heating, or before and after the heating. At this time, the photocuring of the film can be further performed.

根據以上所述,能夠在芯材上設置抗焊劑層,該抗焊劑層是由感光性樹脂組成物的硬化物所構成。藉此,能夠獲得一種印刷線路板,其具備:芯材,其具備絕緣層與其上的導體線路;及,抗焊劑層,其部分地包覆了芯材的設置有導體線路的面。 According to the above, the solder resist layer can be provided on the core material, and the solder resist layer is composed of a cured product of the photosensitive resin composition. Thereby, it is possible to obtain a printed wiring board comprising: a core material having an insulating layer and a conductor line thereon; and a solder resist layer partially covering the surface of the core material on which the conductor line is provided.

[實施例] [Examples]

以下,藉由實施例來具體地說明本發明。 Hereinafter, the present invention will be specifically described by way of examples.

[合成例A-1~合成例A-10及B-2] [Synthesis Example A-1 to Synthesis Examples A-10 and B-2]

(1)合成例A-1~合成例A-10及B-2 (1) Synthesis Example A-1 to Synthesis Examples A-10 and B-2

在安裝有回流冷卻器、溫度計、空氣吹入管及攪拌機之四頸燒瓶內,添加表1~2中的「第一反應」欄中所示 的原料成分,並在有進行空氣起泡的狀態下攪拌這些原料成分,藉此調配混合物。於四頸燒瓶內,在有進行空氣起泡的狀態下一面攪拌該混合物,一面以「反應條件」欄中所示的反應溫度和反應時間來進行加熱。藉此,調配中間體的溶液。 In the four-necked flask equipped with a reflux condenser, a thermometer, an air blowing tube, and a stirrer, add the column shown in the "First Reaction" column in Tables 1 and 2. The raw material components are stirred and the raw material components are stirred in a state where air foaming is performed, thereby blending the mixture. The mixture was stirred while being air-bubble in a four-necked flask, and heated under the reaction temperature and reaction time shown in the column of "reaction conditions". Thereby, a solution of the intermediate is formulated.

繼而,在四頸燒瓶內的中間體的溶液中,投入表1~2的「第二反應」欄中所示的原料成分,並在有進行空氣起泡的狀態下一面攪拌四頸燒瓶內的溶液,一面以「反應條件(1)」欄中所示的反應溫度和反應時間來進行加熱。繼而,除了合成例B-2以外,其餘則在有進行空氣起泡的狀態下一面攪拌四頸燒瓶內的溶液,一面以「反應條件(2)」欄中所示的反應溫度和反應時間來進行加熱。藉此,獲得含羧基樹脂的65質量%溶液。含羧基樹脂的重量平均分子量和酸價,如表1~2所示。成分間的莫耳比亦表示於表1~2中。 Then, the raw material components shown in the "second reaction" column of Tables 1 to 2 were placed in the solution of the intermediate in the four-necked flask, and the inside of the four-necked flask was stirred while air bubbling was performed. The solution was heated while reacting at the reaction temperature and reaction time shown in the column of "Reaction conditions (1)". Then, in addition to the synthesis example B-2, the solution in the four-necked flask was stirred while air bubbling was performed, and the reaction temperature and reaction time shown in the column of "reaction condition (2)" were used. Heat up. Thereby, a 65 mass% solution of the carboxyl group-containing resin was obtained. The weight average molecular weight and acid value of the carboxyl group-containing resin are shown in Tables 1-2. The molar ratio between the components is also shown in Tables 1-2.

再者,表1~2中的(a1)欄中所示的成分的詳細內容如下所述。 In addition, the details of the components shown in the column (a1) in Tables 1-2 are as follows.

‧環氧化合物1:環氧當量250g/eq的雙酚茀型環氧化合物,其以式(7)來表示,且式(7)中的R1~R8皆為氫。 ‧Epoxy compound 1: A bisphenol fluorene type epoxy compound having an epoxy equivalent of 250 g/eq, which is represented by the formula (7), and all of R 1 to R 8 in the formula (7) are hydrogen.

‧環氧化合物2:環氧當量279g/eq的雙酚茀型環氧化合物,其以式(7)來表示,且式(7)中的R1和R5皆為甲基,R2~R4及R6~R8皆為氫。 ‧Epoxy compound 2: a bisphenol fluorene type epoxy compound having an epoxy equivalent of 279 g/eq, which is represented by the formula (7), and R 1 and R 5 in the formula (7) are each a methyl group, R 2 ~ R 4 and R 6 to R 8 are all hydrogen.

(2)合成例B-1 (2) Synthesis Example B-1

在安裝有回流冷卻器、溫度計、氮氣取代用玻璃管及攪拌機之四頸燒瓶內,添加48質量份的甲基丙烯酸、50質量份的ω-羧基-聚己內酯(n≒2)單丙烯酸酯(東亞合成股份有限公司製的ARONIX M-5300)、92質量份的甲基丙烯酸甲酯、10質量份的苯乙烯、430質量份的二丙二醇單甲基醚、及3.5質量份的偶氮雙異丁腈。在氮氣氣流下以75℃對該四頸燒瓶內的溶液加熱5小時,來進行聚合反應,藉此獲得濃度32%的共聚物溶液。 48 parts by mass of methacrylic acid and 50 parts by mass of ω-carboxy-polycaprolactone (n≒2) monoacrylic acid were added to a four-necked flask equipped with a reflux condenser, a thermometer, a glass tube for nitrogen substitution, and a stirrer. Ester (ARONIX M-5300, manufactured by Toagosei Co., Ltd.), 92 parts by mass of methyl methacrylate, 10 parts by mass of styrene, 430 parts by mass of dipropylene glycol monomethyl ether, and 3.5 parts by mass of azo Double isobutyronitrile. The solution in the four-necked flask was heated at 75 ° C for 5 hours under a nitrogen gas stream to carry out a polymerization reaction, whereby a copolymer solution having a concentration of 32% was obtained.

繼而,在該共聚物溶液中,添加0.1質量份的氫醌、64質量份的甲基丙烯酸環氧丙酯、及0.8質量份的二甲基苯甲基胺,並以80℃加熱24小時,藉此進行加成反應。藉此,獲得含羧基樹脂(B-1)的38質量%溶液。含羧基樹脂(B-1)的酸價是67mgKOH/g。 Then, 0.1 parts by mass of hydroquinone, 64 parts by mass of glycidyl methacrylate, and 0.8 parts by mass of dimethylbenzylamine were added to the copolymer solution, and heated at 80 ° C for 24 hours. Thereby an addition reaction is carried out. Thereby, a 38 mass% solution of the carboxyl group-containing resin (B-1) was obtained. The acid value of the carboxyl group-containing resin (B-1) was 67 mgKOH/g.

[實施例X1~X22、實施例Y1~Y19、實施例Z1~Z21、比較例X1~X11、比較例Y1~Y5、比較例Z1~Z7的調製] [Examples X1 to X22, Examples Y1 to Y19, Examples Z1 to Z21, Comparative Examples X1 to X11, Comparative Examples Y1 to Y5, and Comparative Examples Z1 to Z7]

以三輥研磨機來揉合後述表3~表13的「組成」欄中所示的成分後,在燒瓶內將此等成分攪拌混合,藉此獲得感光性樹脂組成物。再者,成分的詳細內容如下所述。預先使用噴射磨機或研缽來將下述結晶性環氧樹脂分別粉碎,而使此等的平均粒徑成為20μm以下。 After the components shown in the "composition" column of Tables 3 to 13 described later were blended in a three-roll mill, the components were stirred and mixed in a flask to obtain a photosensitive resin composition. Furthermore, the details of the components are as follows. The following crystalline epoxy resin was separately pulverized in advance using a jet mill or a mortar to have an average particle diameter of 20 μm or less.

‧不飽和化合物A:三羥甲基丙烷三丙烯酸酯。 ‧ Unsaturated Compound A: Trimethylolpropane triacrylate.

‧不飽和化合物B:ε-己內酯改質二季戊四醇六丙烯酸酯(日本化藥股份有限公司製,商品型號DPCA-60)。 ‧ Unsaturated compound B: ε-caprolactone modified dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd., product model DPCA-60).

‧不飽和化合物C:三環癸烷二甲醇二丙烯酸酯(新中村化學工業股份有限公司製,商品型號A-DCP)。 ‧ Unsaturated compound C: tricyclodecane dimethanol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., product model A-DCP).

‧不飽和化合物D:ε-己內酯改質二季戊四醇六丙烯酸酯,日本化藥股份有限公司製,商品型號KAYARAD DPCA-20。 ‧ Unsaturated compound D: ε-caprolactone modified dipentaerythritol hexaacrylate, manufactured by Nippon Kayaku Co., Ltd., product model KAYARAD DPCA-20.

‧光聚合起始劑A:2,4,6-三甲基苯甲醯基-二苯基-氧化膦(巴斯夫公司製造,商品型號Irgacure TPO)。 ‧ Photopolymerization initiator A: 2,4,6-trimethylbenzimidyl-diphenyl-phosphine oxide (manufactured by BASF Corporation, trade name Irgacure TPO).

‧光聚合起始劑B:1-羥基-環己基-苯基-酮(巴斯夫公司製造,商品型號Irgacure 184)。 ‧ Photopolymerization initiator B: 1-hydroxy-cyclohexyl-phenyl-ketone (manufactured by BASF Corporation, trade name Irgacure 184).

‧光聚合起始劑C:4,4’-雙(二乙基胺基)二苯基酮。 ‧ Photopolymerization initiator C: 4,4'-bis(diethylamino)diphenyl ketone.

‧結晶性環氧樹脂A:1,3,5-參(2,3-環氧丙基)-1,3,5-三嗪-2,4,6(1H,3H,5H)-三酮(高熔點型,熔點150~158℃,環氧當量99g/eq)。 ‧Crystalline epoxy resin A: 1,3,5-gin(2,3-epoxypropyl)-1,3,5-triazine-2,4,6(1H,3H,5H)-trione (High melting point type, melting point 150~158 ° C, epoxy equivalent 99 g/eq).

‧結晶性環氧樹脂B:氫醌型結晶性環氧樹脂(新日鐵住金化學股份有限公司製造的商品名YDC-1312,熔點138~145℃,環氧當量176g/eq)。 ‧ Crystalline Epoxy Resin B: Hydroquinone-type crystalline epoxy resin (trade name: YDC-1312, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., melting point: 138 to 145 ° C, epoxy equivalent: 176 g/eq).

‧結晶性環氧樹脂C:聯苯型結晶性環氧樹脂(三菱化學股份有限公司製造的商品名YX-4000,熔點105℃,環氧當量187g/eq)。 ‧ Crystalline Epoxy Resin C: Biphenyl type crystalline epoxy resin (trade name YX-4000, manufactured by Mitsubishi Chemical Corporation, melting point 105 ° C, epoxy equivalent: 187 g/eq).

‧結晶性環氧樹脂D:二苯基醚型結晶性環氧樹脂(新日鐵住金化學股份有限公司製造的商品名YSLV-80DE,熔點80~90℃,環氧當量163g/eq)。 ‧ Crystalline epoxy resin D: Diphenyl ether type crystalline epoxy resin (trade name: YSLV-80DE, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., melting point: 80 to 90 ° C, epoxy equivalent: 163 g/eq).

‧結晶性環氧樹脂E:雙酚型結晶性環氧樹脂(新日鐵住金化學股份有限公司製造的商品名YSLV-80XY,熔點75~85℃,環氧當量192g/eq)。 ‧ Crystalline Epoxy Resin E: Bisphenol type crystalline epoxy resin (trade name: YSLV-80XY, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., melting point: 75 to 85 ° C, epoxy equivalent: 192 g/eq).

‧非晶性環氧樹脂A的溶液:是以固體成分為80%的方式,將非晶性的聯苯酚醛清漆型環氧樹脂(日本化藥股份有限公司製造,商品型號NC-3000,軟化點53~63℃,環氧當量280g/eq,具有酚醛清漆結構與聯苯骨架之環氧樹脂)溶於二乙二醇單乙基醚乙酸酯而得的溶液(以固體成分80%來換算的環氧當量是350g/eq)。 ‧A solution of amorphous epoxy resin A: Amorphous biphenyl aldehyde varnish type epoxy resin (manufactured by Nippon Kayaku Co., Ltd., product model NC-3000, softened in a solid content of 80%) a solution of 53-63 ° C, an epoxy equivalent of 280 g / eq, an epoxy resin having a novolac structure and a biphenyl skeleton, dissolved in diethylene glycol monoethyl ether acetate (80% solid content) The converted epoxy equivalent is 350 g/eq).

‧非晶性環氧樹脂B的溶液:是以固體成分為90%的方式,將含長鏈碳鏈之雙酚A型環氧樹脂(DIC股份有限公司製造,商品型號EPICLON EXA-4816,液狀樹脂, 環氧當量410g/eq,結構單元(d1)包含雙酚A骨架,結構單元(d2)包含碳原子數6的直鏈狀烴)溶於二乙二醇單乙基醚乙酸酯而得的溶液(以固體成分90%來換算的環氧當量是455.56g/eq)。 ‧A solution of amorphous epoxy resin B: a bisphenol A type epoxy resin containing a long-chain carbon chain (manufactured by DIC Corporation, product type EPICLON EXA-4816, liquid) Resin, An epoxy equivalent of 410 g/eq, a structural unit (d1) comprising a bisphenol A skeleton, and a structural unit (d2) comprising a linear hydrocarbon having 6 carbon atoms) dissolved in diethylene glycol monoethyl ether acetate The solution (the epoxy equivalent in terms of 90% of the solid content was 455.56 g/eq).

‧非晶性環氧樹脂C的溶液:橡膠狀核殼聚合物液狀雙酚F型環氧樹脂(kaneka股份有限公司製造,商品型號MX-136,液狀樹脂,環氧當量220g/eq)。 ‧Solid epoxy resin C solution: rubbery core-shell polymer liquid bisphenol F-type epoxy resin (manufactured by Kaneka Co., Ltd., product type MX-136, liquid resin, epoxy equivalent 220g/eq) .

‧非晶性環氧樹脂D的溶液:是以固體成分為75%的方式,將甲酚酚醛清漆型環氧樹脂(DIC股份有限公司製造,商品型號EPICLON N-695,軟化點90~100℃,環氧當量214g/eq)溶於二乙二醇單乙基醚乙酸酯而得的溶液(以固體成分75%來換算的環氧當量是285g/eq)。 ‧ A solution of amorphous epoxy resin D: a cresol novolac type epoxy resin (manufactured by DIC Co., Ltd., product type EPICLON N-695, softening point 90 to 100 ° C, in a solid content of 75%) The epoxy equivalent (214 g/eq) was dissolved in diethylene glycol monoethyl ether acetate (the epoxy equivalent in terms of solid content of 75% was 285 g/eq).

‧非晶性環氧樹脂E的溶液:是以固體成分為85%的方式,將含長鏈碳鏈之雙酚A型環氧樹脂(DIC股份有限公司製造,商品型號EPICLON EXA-4822,液狀樹脂,環氧當量389g/eq,結構單元(d1)包含雙酚A骨架,結構單元(d2)包含聚乙二醇且醚氧原子數為4)溶於二乙二醇單乙基醚乙酸酯而得的溶液(以固體成分85%來換算的環氧當量是457.65g/eq)。 ‧Solid epoxy resin E solution: A bisphenol A type epoxy resin containing a long-chain carbon chain (manufactured by DIC Co., Ltd., product model EPICLON EXA-4822, a solid content of 85%) Resin, epoxy equivalent 389g / eq, structural unit (d1) contains bisphenol A skeleton, structural unit (d2) contains polyethylene glycol and ether oxygen atom number is 4) soluble in diethylene glycol monoethyl ether The solution obtained from the acid ester (the epoxy equivalent in terms of 85% of the solid content was 457.65 g/eq).

‧非晶性環氧樹脂F的溶液:是以固體成分為80%的方式,將非晶性的聯苯酚醛清漆型環氧樹脂(具有酚醛清漆結構與聯苯骨架之環氧樹脂)(日本化藥股份有限公司製造,商品型號NC-3000H,軟化點65~75℃,環氧當量 290g/eq)溶於二乙二醇單乙基醚乙酸酯而得的溶液(以固體成分80%來換算的環氧當量是362.5g/eq)。 ‧ A solution of amorphous epoxy resin F: an amorphous biphenyl aldehyde varnish type epoxy resin (epoxy resin having a novolac structure and a biphenyl skeleton) in a solid content of 80% (Japan) Manufactured by Chemical Pharmaceutical Co., Ltd., product type NC-3000H, softening point 65~75°C, epoxy equivalent 290 g/eq) A solution obtained by dissolving diethylene glycol monoethyl ether acetate (the epoxy equivalent in terms of 80% solid content was 362.5 g/eq).

‧三聚氰胺:日產化學工業股份有限公司製造,三聚氰胺微粉。 ‧ Melamine: Made by Nissan Chemical Industry Co., Ltd., melamine micropowder.

‧抗氧化劑:受阻酚系抗氧化劑(巴斯夫公司製造,商品型號IRGANOX 1010)。 ‧Antioxidant: A hindered phenolic antioxidant (manufactured by BASF, product model IRGANOX 1010).

‧藍色顏料:酞菁藍。 ‧ Blue pigment: Phthalocyanine blue.

‧黃色顏料:1,1’-[(6-苯基-1,3,5-三嗪-2,4-二基)雙(亞胺基)]雙(9,10-蒽二酮) ‧ yellow pigment: 1,1'-[(6-phenyl-1,3,5-triazine-2,4-diyl)bis(imino)]bis(9,10-nonanedione)

‧硫酸鋇:堺化學工業股份有限公司製造,商品型號BARIACE B31。 ‧ Barium sulfate: manufactured by 堺Chemical Industries Co., Ltd., product model BARIACE B31.

‧滑石:日本Talc公司製造,商品型號SG-2000。 ‧ Talc: Made by Talc, Japan, product model SG-2000.

‧膨潤土:REOX公司製造,商品型號Bentone SD-2。 ‧ Bentonite: manufactured by REOX, the product model Bentone SD-2.

‧消泡劑:信越Silicone股份有限公司製造,商品型號KS-66。 ‧ Defoamer: manufactured by Shin-Etsu Silicone Co., Ltd., product model KS-66.

‧界面活性劑:DIC股份有限公司製造,商品型號MEGAFACE F-477。 ‧Interactive surfactant: DIC Co., Ltd., product model MEGAFACE F-477.

‧流變調節劑:BYK Japan股份有限公司製造,商品型號BYK-430。 ‧ Rheology regulator: manufactured by BYK Japan Co., Ltd., product model BYK-430.

‧溶劑A:二乙二醇單乙基醚乙酸酯。 ‧ Solvent A: Diethylene glycol monoethyl ether acetate.

‧溶劑B:甲基乙基酮。 ‧ Solvent B: methyl ethyl ketone.

[使用了實施例X1~X22及比較例X1~X11的試驗片製作] [Production of test pieces using Examples X1 to X22 and Comparative Examples X1 to X11]

關於實施例X1~X16、實施例X18~X22、比較例X1~X11,以下述方式進行而製作試驗片。 With respect to Examples X1 to X16, Examples X18 to X22, and Comparative Examples X1 to X11, test pieces were produced in the following manner.

準備具備厚度35μm銅箔之玻璃環氧覆銅積層板(FR-4型)。在該玻璃環氧覆銅積層板上,以減成法來形成作為導體線路的梳型電極,藉此獲得芯材,該梳型電極的線寬/間距為50μm/50μm。在該芯材的其中一面的整個面上,以網版印刷法來塗佈感光性樹脂組成物,藉此形成濕潤塗膜。以80℃對該濕潤塗膜加熱40分鐘,來進行預備乾燥,藉此形成膜厚25μm的皮膜。在將具有非曝光部之負型光罩直接與該皮膜接觸的狀態下,以500mJ/cm2的條件對皮膜照射紫外線,該非曝光部具有包含直徑50μm的圓形形狀之圖案。對曝光後的皮膜實施顯影處理。在顯影處理時,以0.2MPa的噴射壓力對皮膜噴射30℃的1%碳酸鈉水溶液90秒。繼而,藉由以0.2MPa的噴射壓力對皮膜噴射純水90秒,來清洗皮膜。藉此,去除皮膜的未曝光部分,並形成孔。繼而,以1000mJ/cm2的條件來對皮膜照射紫外線後,以160℃加熱60分鐘。藉此,在芯材上形成由感光性樹脂組成物的硬化物所構成之層。藉此獲得試驗片。 A glass epoxy copper clad laminate (FR-4 type) having a thickness of 35 μm copper foil was prepared. On the glass epoxy-clad laminate, a comb-shaped electrode as a conductor line was formed by a subtractive method, thereby obtaining a core material having a line width/space of 50 μm /50 μm . A photosensitive resin composition is applied onto the entire surface of one side of the core material by a screen printing method to form a wet coating film. The wet coating film was heated at 80 ° C for 40 minutes to carry out preliminary drying to form a film having a film thickness of 25 μm . The film was irradiated with ultraviolet rays under conditions of 500 mJ/cm 2 in a state where the negative mask having the non-exposed portion was directly in contact with the film, and the non-exposed portion had a circular shape including a diameter of 50 μm . The developed film is subjected to development treatment. At the time of development processing, a 1% sodium carbonate aqueous solution of 30 ° C was sprayed on the film at an ejection pressure of 0.2 MPa for 90 seconds. Then, the film was washed by spraying pure water on the film at an ejection pressure of 0.2 MPa for 90 seconds. Thereby, the unexposed portion of the film is removed and a hole is formed. Then, the film was irradiated with ultraviolet rays under the conditions of 1000 mJ/cm 2 , and then heated at 160 ° C for 60 minutes. Thereby, a layer composed of a cured product of the photosensitive resin composition is formed on the core material. Thereby, a test piece was obtained.

關於實施例X17,以下述方式進行而製作試驗片。 With respect to Example X17, a test piece was produced in the following manner.

先以塗敷器(applicator)將該感光性樹脂組成物塗佈在聚對苯二甲酸乙二酯製的薄膜上,再藉由以95℃進行加熱25分鐘,來使其乾燥,藉此在薄膜上形成 厚度25μm的乾膜。又,藉由真空層合機,將乾膜加熱層合於與實施例X1~X16、實施例X18~X22、比較例X1~X11時相同的芯材的其中一面的整個面上。加熱層合,是並以0.5MPa、80℃、1分鐘的條件來實行。藉此,在芯材上形成由乾膜所構成之厚度25μm的皮膜。以與上述相同的條件,對該皮膜實施曝光、顯影及紫外線照射的處理。再者,曝光後,在顯影前將聚對苯二甲酸乙二酯的薄膜自乾膜(皮膜)剝離。藉此,在芯材上形成由感光性樹脂組成物的硬化物(亦稱為乾膜的硬化物)所構成之層。藉此獲得試驗片。 The photosensitive resin composition was applied onto a film made of polyethylene terephthalate by an applicator, and then dried by heating at 95 ° C for 25 minutes. A dry film having a thickness of 25 μm was formed on the film. Further, the dry film was heated and laminated on the entire surface of one of the core materials of the same manner as in the examples X1 to X16, the examples X18 to X22, and the comparative examples X1 to X11 by a vacuum laminator. The heating lamination was carried out under the conditions of 0.5 MPa, 80 ° C, and 1 minute. Thereby, a film having a thickness of 25 μm composed of a dry film was formed on the core material. The film was subjected to exposure, development, and ultraviolet irradiation treatment under the same conditions as above. Further, after the exposure, the film of polyethylene terephthalate was peeled off from the dry film (film) before development. Thereby, a layer composed of a cured product of a photosensitive resin composition (also referred to as a cured product of a dry film) is formed on the core material. Thereby, a test piece was obtained.

[使用了實施例Y1~Y19及比較例Y1~Y5、以及實施例Z1~Z21及比較例Z1~Z7的試驗片製作] [Preparation of test pieces using Examples Y1 to Y19 and Comparative Examples Y1 to Y5, and Examples Z1 to Z21 and Comparative Examples Z1 to Z7]

關於實施例Y1~Y18及比較例Y1~Y5、以及實施例Z1~Z20及比較例Z1~Z7,以下述方式進行而製作試驗片。 With respect to Examples Y1 to Y18 and Comparative Examples Y1 to Y5, and Examples Z1 to Z20 and Comparative Examples Z1 to Z7, test pieces were produced in the following manner.

與實施例X1~X22及比較例X1~X11同樣進行,而獲得芯材。以MEC股份有限公司製造的商品型號CZ-8100,來溶解並去除該印刷線路板的導體線路的厚度1μm左右的表層部分,藉此對導體線路進行粗糙化。然後,與實施例X1~X22及比較例X1~X11同樣進行,在芯材上形成由感光性樹脂組成物的硬化物所構成之層。藉此獲得試驗片。 The core materials were obtained in the same manner as in the examples X1 to X22 and the comparative examples X1 to X11. The conductor layer C5-8100 manufactured by MEC Co., Ltd. was used to dissolve and remove the surface layer portion of the conductor wiring of the printed wiring board having a thickness of about 1 μm , thereby roughening the conductor wiring. Then, in the same manner as in the examples X1 to X22 and the comparative examples X1 to X11, a layer composed of a cured product of a photosensitive resin composition was formed on the core material. Thereby, a test piece was obtained.

當使用實施例Y19及實施例Z21的感光性樹脂組成物時,以下述方式製作試驗片。與實施例X17同樣進行而形成乾膜。又,藉由真空層合機,將乾膜加熱層合於與實施例Y1~Y18及比較例Y1~Y5、以及實施例Z1~Z20及比較例Z1~Z7時相同的芯材的其中一面的整個面上。加熱層合,是並以與實施例X17相同的條件來實行。然後,與實施例X17相同的處理,而獲得試驗片。 When the photosensitive resin compositions of Example Y19 and Example Z21 were used, test pieces were produced in the following manner. A dry film was formed in the same manner as in Example X17. Further, the dry film was heated and laminated on one side of the same core material as in the examples Y1 to Y18 and the comparative examples Y1 to Y5, and the examples Z1 to Z20 and the comparative examples Z1 to Z7 by a vacuum laminator. The entire face. The heating lamination was carried out under the same conditions as in Example X17. Then, the same treatment as in Example X17 was carried out to obtain a test piece.

[評估試驗] [evaluation test]

(1)黏性 (1) Viscosity

對於除了實施例X17、實施例Y19、實施例Z21以外之實施例及比較例,在製作試驗片時,於皮膜曝光後自皮膜取下負型光罩時的皮膜的黏性程度,是以下述方式進行評估。 With respect to the examples and comparative examples other than Example X17, Example Y19, and Example Z21, when the test piece was produced, the degree of viscosity of the film when the negative mask was removed from the film after exposure of the film was as follows. Ways to evaluate.

A:在自皮膜取下負型光罩時沒有抗性的感覺,且在取下負型光罩後的皮膜上,未確認到黏貼的痕跡。 A: There was no feeling of resistance when the negative mask was removed from the film, and no trace of adhesion was observed on the film after the negative mask was removed.

B:在自皮膜取下負型光罩時有抗性的感覺,且在取下負型光罩後的皮膜上,確認到黏貼的痕跡。 B: A feeling of resistance was obtained when the negative mask was removed from the film, and a mark of adhesion was confirmed on the film after the negative mask was removed.

C:難以自皮膜取下負型光罩,且若強行取下負型光罩,則皮膜破損。 C: It is difficult to remove the negative mask from the film, and if the negative mask is forcibly removed, the film is broken.

再者,關於黏性評估為C之比較例X5、比較例X9及比較例X11,並未實行(2)~(8)的評估。又,關於黏性評估為C之比較例Y4、比較例Y5及比較例Z6,並未實行(3)~(8)的評估。又,關於實施例X17、實施例 Y19、實施例Z21,是自乾膜形成皮膜,因此未實行黏性的評估。 Further, regarding Comparative Example X5, Comparative Example X9, and Comparative Example X11 in which the viscosity evaluation was C, the evaluation of (2) to (8) was not performed. Further, regarding Comparative Example Y4, Comparative Example Y5, and Comparative Example Z6 in which the viscosity evaluation was C, the evaluations of (3) to (8) were not performed. Further, regarding the embodiment X17, the embodiment Y19 and Example Z21 were films formed from a dry film, and therefore no evaluation of stickiness was performed.

(2)顯影性 (2) developability

對於除了實施例X17、實施例Y19、實施例Z21以外之實施例及比較例,在印刷線路板的其中一面的整個面上,以網版印刷法來塗佈感光性樹脂組成物,藉此形成濕潤塗膜。以80℃對該濕潤塗膜加熱40分鐘、60分鐘,藉此形成膜厚25μm的皮膜。在不進行曝光的情形下對此皮膜實施顯影處理。在顯影處理時,以0.2MPa的噴射壓力對皮膜噴射30℃的1%碳酸鈉水溶液90秒後,以0.2MPa的噴射壓力對皮膜噴射純水90秒。觀察處理後的印刷線路板,並以下述方式評估其結果。 With respect to the examples and comparative examples other than Example X17, Example Y19, and Example Z21, the photosensitive resin composition was applied by screen printing on the entire surface of one side of the printed wiring board, thereby forming a photosensitive resin composition. Wet the film. The wet coating film was heated at 80 ° C for 40 minutes and 60 minutes to form a film having a film thickness of 25 μm . The film is subjected to development treatment without exposure. At the time of development processing, a 1% sodium carbonate aqueous solution of 30 ° C was sprayed on the film at an ejection pressure of 0.2 MPa for 90 seconds, and then pure water was sprayed onto the film at an ejection pressure of 0.2 MPa for 90 seconds. The treated printed wiring board was observed and the results were evaluated in the following manner.

A:當濕潤塗膜加熱時間為40分鐘、60分鐘的任一時間時,皮膜皆全部去除。 A: When the wet coating film was heated for any time of 40 minutes and 60 minutes, the film was completely removed.

B:當濕潤塗膜加熱時間為40分鐘時皮膜全部去除,但當濕潤塗膜加熱時間為60分鐘時有一部份的皮膜殘留在印刷線路板上。 B: When the wet coating film was heated for 40 minutes, the film was completely removed, but when the wet film was heated for 60 minutes, a part of the film remained on the printed wiring board.

C:濕潤塗膜加熱時間為40分鐘、60分鐘的任一時間時,皆有一部份的皮膜殘留在印刷線路板上。 C: When the wet coating film is heated for 40 minutes or 60 minutes, a part of the film remains on the printed wiring board.

再者,關於顯影性評估為C之比較例X4、比較例X7、比較例Y4及比較例Y5,並未實行(3)~(8)的評估。又,關於實施例X17、實施例Y19、實施例Z21,是自乾膜形成皮膜,因此未實行顯影性的評估。關於實施 例X17、實施例Y19、實施例Z21,在曝光後的顯影步驟中,能夠在不產生問題的情形下顯影。 Further, with respect to Comparative Example X4, Comparative Example X7, Comparative Example Y4, and Comparative Example Y5 in which developability was evaluated as C, evaluation of (3) to (8) was not performed. Further, in Example X17, Example Y19, and Example Z21, since the film was formed from the dry film, evaluation of developability was not performed. About implementation Example X17, Example Y19, and Example Z21, in the development step after exposure, can be developed without causing problems.

(3)解析度 (3) Resolution

觀察在實施例和比較例的試驗片中的由硬化物所構成之層上形成的孔,並以下述方式評估其結果。 The pores formed on the layer composed of the cured product in the test pieces of the examples and the comparative examples were observed, and the results were evaluated in the following manner.

A:孔的底部的直徑是40μm以上。 A: The diameter of the bottom of the hole is 40 μm or more.

B:孔的底部的直徑是25μm以上但小於40μm。 B: The diameter of the bottom of the hole is 25 μm or more but less than 40 μm .

C:孔的底部的直徑小於25μm、或未形成明確的孔。 C: The diameter of the bottom of the hole is less than 25 μm , or a clear hole is not formed.

(4)耐鍍覆性 (4) Plating resistance

先在實施例和比較例的試驗片的導體線路露出至外部的部分上,使用市售的無電解鍍鎳浴來形成鍍鎳層,再使用市售的無電解鍍金浴來形成鍍金層。藉此,形成由鍍鎳層和鍍金層所構成之金屬層。以目視觀察由硬化物所構成之層和金屬層。又,對於由硬化物所構成之層實行玻璃紙黏著膠帶剝離試驗。以下述方式評估其結果。 First, a nickel plating layer was formed using a commercially available electroless nickel plating bath on a portion where the conductor lines of the test pieces of the examples and the comparative examples were exposed to the outside, and a gold plating layer was formed using a commercially available electroless gold plating bath. Thereby, a metal layer composed of a nickel plating layer and a gold plating layer is formed. The layer composed of the cured material and the metal layer were visually observed. Further, a cellophane adhesive tape peeling test was carried out on the layer composed of the cured product. The results were evaluated in the following manner.

A:由硬化物所構成之層和金屬層的外觀未確認到異常,且沒有發生由於玻璃紙黏著膠帶剝離試驗導致由硬化物所構成之層剝離的情形。 A: The appearance of the layer composed of the cured product and the metal layer was not confirmed to be abnormal, and the layer composed of the cured product was not peeled off due to the cellophane adhesive tape peeling test.

B:在由硬化物所構成之層確認到變色,但是沒有發生由於玻璃紙黏著膠帶剝離試驗導致由硬化物所構成之層剝離的情形。 B: Discoloration was confirmed in the layer composed of the cured product, but the layer formed of the cured product was not peeled off due to the cellophane adhesive tape peeling test.

C:確認到由硬化物所構成之層浮起,且發生由於玻璃紙黏著膠帶剝離試驗導致由硬化物所構成之層剝離的情形。 C: It was confirmed that the layer composed of the cured product floated, and the layer composed of the cured product was peeled off due to the cellophane adhesive tape peeling test.

(5)線間絕緣性 (5) Insulation between wires

一面對實施例X1~X22、比較例X1~X11、實施例Y1~Y19、比較例Y1~Y5、實施例Z1~Z21、比較例Z1~Z7的試驗片中的導體線路(梳型電極)施加直流(DC)30V的偏電壓(bias voltage),一面將印刷線路板暴露在121℃、97%的相對濕度(relative humidity,R.H.)的試驗環境下150小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是200小時)。在該試驗環境下持續測定由硬化物所構成之層的梳型電極間的電阻值,並依據下述評估基準來評估其結果。 A conductor line (comb electrode) in the test pieces of the examples X1 to X22, the comparative examples X1 to X11, the examples Y1 to Y19, the comparative examples Y1 to Y5, the examples Z1 to Z21, and the comparative examples Z1 to Z7. A direct current (DC) bias voltage of 30 V was applied, and the printed wiring board was exposed to a test environment of 121 ° C and 97% relative humidity (RH) for 150 hours (Examples Z1 to Z21, Comparative Example). The test piece of Z1~Z7 is 200 hours). The resistance value between the comb-shaped electrodes of the layer composed of the cured product was continuously measured in this test environment, and the results were evaluated in accordance with the following evaluation criteria.

A:自試驗開始時至經過150小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是200小時)為止之間,電阻值一直維持在106Ω以上。 A: The resistance value was maintained at 10 6 Ω or more from the start of the test until 150 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 200 hours).

B:自試驗開始時至經過100小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是180小時)為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過150小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是200小時)前,電阻值小於106Ω。 B: The resistance value was maintained at 10 6 Ω or more from the start of the test to the lapse of 100 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 180 hours), but from the start of the test to the passage of the test The resistance value was less than 10 6 Ω before 150 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 200 hours).

C:自試驗開始時至經過100小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是180小時)前,電阻值小於106Ω。 C: The resistance value was less than 10 6 Ω from the start of the test to 100 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 180 hours).

(6)層間絕緣性 (6) interlayer insulation

在實施例X1~X22、比較例X1~X11、實施例Y1~Y19、比較例Y1~Y5、實施例Z1~Z21、比較例Z1~Z7的試驗片中的由硬化物所構成之層上,黏貼導電膠 帶。一面對該導電膠帶施加DC100V的偏電壓,一面將印刷線路板暴露在121℃、97%R.H.的試驗環境下60小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是80小時)。在該試驗環境下持續測定由硬化物所構成之層的導體線路與導電膠帶之間的電阻值,並依據下述評估基準來評估其結果。 On the layers composed of the cured materials in the test pieces of Examples X1 to X22, Comparative Examples X1 to X11, Examples Y1 to Y19, Comparative Examples Y1 to Y5, Examples Z1 to Z21, and Comparative Examples Z1 to Z7, Adhesive conductive adhesive band. While applying a bias voltage of DC 100 V to the conductive tape, the printed wiring board was exposed to a test environment of 121 ° C and 97% RH for 60 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 80 hours). . The resistance value between the conductor wiring of the layer composed of the cured product and the conductive tape was continuously measured in this test environment, and the results were evaluated in accordance with the following evaluation criteria.

A:自試驗開始時至經過60小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是80小時)為止之間,電阻值一直維持在106Ω以上。 A: The resistance value was maintained at 10 6 Ω or more from the start of the test to the lapse of 60 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 80 hours).

B:自試驗開始時至經過50小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是70小時)為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過60小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是80小時)前,電阻值小於106Ω。 B: The resistance value was maintained at 10 6 Ω or more from the start of the test to the lapse of 50 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 70 hours), but from the start of the test to the passage of the test The resistance value was less than 10 6 Ω before 60 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 80 hours).

C:自試驗開始時至經過50小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是70小時)前,電阻值小於106Ω。 C: The resistance value was less than 10 6 Ω from the start of the test to 50 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 70 hours).

(7)壓力鍋試驗(pressure cooker test,PCT) (7) Pressure cooker test (PCT)

將實施例X1~X22、比較例X1~X11、實施例Y1~Y19、比較例Y1~Y5、實施例Z1~Z21、比較例Z1~Z7的試驗片放置在121℃、100%R.H.的環境下100小時(實施例Z1~Z21、比較例Z1~Z7的試驗片是150小時),之後依據下述評估基準來評估由硬化物所構成之層的外觀。 The test pieces of Examples X1 to X22, Comparative Examples X1 to X11, Examples Y1 to Y19, Comparative Examples Y1 to Y5, Examples Z1 to Z21, and Comparative Examples Z1 to Z7 were placed in an environment of 121 ° C and 100% RH. 100 hours (the test pieces of Examples Z1 to Z21 and Comparative Examples Z1 to Z7 were 150 hours), and then the appearance of the layer composed of the cured product was evaluated in accordance with the following evaluation criteria.

A:在由硬化物所構成之層未觀察到異常。 A: No abnormality was observed in the layer composed of the cured product.

B:在由硬化物所構成之層觀察到變色。 B: Discoloration was observed in the layer composed of the cured product.

C:在由硬化物所構成之層觀察到大幅度變色,且發生一部份膨脹。 C: A large discoloration was observed in the layer composed of the cured product, and a part of the expansion occurred.

(8)冷熱循環 (8) Thermal cycle

對實施例X1~X22、比較例X1~X11、實施例Y1~Y19、比較例Y1~Y5、實施例Z1~Z21、比較例Z1~Z7的試驗片,重複進行在-65℃冷卻10分鐘後在150℃加熱10分鐘之處理1000次。在進行500次處理的時間點、及進行1000次處理的時間點,依據下述評估基準來評估試驗片中的由硬化物所構成之層的外觀。 The test pieces of Examples X1 to X22, Comparative Examples X1 to X11, Examples Y1 to Y19, Comparative Examples Y1 to Y5, Examples Z1 to Z21, and Comparative Examples Z1 to Z7 were repeatedly cooled at -65 ° C for 10 minutes. The treatment was carried out by heating at 150 ° C for 10 minutes for 1000 times. The appearance of the layer composed of the cured product in the test piece was evaluated based on the following evaluation criteria at the time of performing 500 treatments and at the time of performing 1000 treatments.

A:在進行500次處理及進行1000次處理時皆未發生龜裂。 A: No cracking occurred in 500 treatments and 1000 treatments.

B:在進行500次處理時未發生龜裂,但在進行1000次處理時發生龜裂。 B: No crack occurred at the time of 500 treatments, but cracking occurred at 1000 treatments.

C:在進行500次處理及進行1000次處理時皆發生龜裂。 C: Cracking occurred in 500 treatments and 1000 treatments.

上述本實施形態明顯可知,第1態樣的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);並且,前述含羧基樹脂(A)含有含羧基樹脂(A1),該含羧基樹脂(A1)是中間體與酸酐之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物;前述環氧化合物(a1)具有以上述式(1)來表示的雙酚茀骨架,且下述式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素;前述環氧化合物(D)含有結晶性環氧樹脂與非晶性環氧樹脂,而且,相對於前述含羧基樹脂(A)的1當量的羧基,前述結晶性環氧樹脂和前述非晶性環氧樹脂中包含的環氧基的當量的合計量在0.7~2.5的範圍內。 As is apparent from the above-described embodiment, the photosensitive resin composition of the first aspect contains: a carboxyl group-containing resin (A); and an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; a polymerization initiator (C); and an epoxy compound (D); and the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) which is a reaction product of an intermediate and an acid anhydride. The intermediate is a reaction product of an epoxy compound (a1) and an unsaturated group-containing carboxylic acid (a2); the epoxy compound (a1) has a bisphenol fluorene skeleton represented by the above formula (1), and has the following formula In (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen; and the epoxy compound (D) contains a crystalline epoxy resin and an amorphous epoxy resin, and The total amount of equivalents of the epoxy groups contained in the crystalline epoxy resin and the amorphous epoxy resin is in the range of 0.7 to 2.5 with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing resin (A).

此感光性樹脂組成物中,藉由含羧基樹脂(A1)具有源自環氧化合物(a1)之以式(1)來表示的雙酚茀骨架,能夠對含有含羧基樹脂(A1)的感光性樹脂組成物的硬化物賦予高耐熱性及絕緣可靠性。藉由環氧化合物(D)含有結晶性環氧樹脂,能夠使感光性樹脂組成物的顯影性提升。當環氧化合物(D)僅含有結晶性環氧樹脂時,感光性樹脂組成物的硬化物在包含溫度上升及溫度降低 的溫度變化反覆進行中容易發生龜裂。然而,本實施形態中,藉由環氧化合物(D)以上述規定比例含有結晶性環氧樹脂及非晶性環氧樹脂,能夠使感光性樹脂組成物的硬化物在溫度變化反覆進行中不容易發生龜裂。藉由相對於含羧基樹脂(A)中包含的1當量的羧基,結晶性環氧樹脂及非晶性環氧樹脂中包含的環氧基的當量的合計量是0.7以上,能夠提高包含感光性樹脂組成物的硬化物的層的絕緣可靠性,並且能夠提高硬化物在溫度變化反覆進行中的龜裂耐性。藉由相對於含羧基樹脂(A)中包含的1當量的羧基,結晶性環氧樹脂及非晶性環氧樹脂中包含的環氧基的當量的合計量是2.5以下,能夠提高顯影性。因此,即便本實施形態的感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得優異的顯影性,而且能夠使感光性樹脂組成物的硬化物在溫度變化反覆進行中不容易發生龜裂。 In the photosensitive resin composition, the carboxy group-containing resin (A1) has a bisphenol fluorene skeleton represented by the formula (1) derived from the epoxy compound (a1), and is capable of sensitizing the carboxyl group-containing resin (A1). The cured product of the resin composition imparts high heat resistance and insulation reliability. When the epoxy compound (D) contains a crystalline epoxy resin, the developability of the photosensitive resin composition can be improved. When the epoxy compound (D) contains only a crystalline epoxy resin, the cured product of the photosensitive resin composition contains a temperature rise and a temperature decrease. The temperature change is repeated and cracking is likely to occur. However, in the present embodiment, the epoxy resin (D) contains the crystalline epoxy resin and the amorphous epoxy resin in the predetermined ratio, and the cured product of the photosensitive resin composition can be prevented from being repeatedly changed in temperature. It is prone to cracking. The total amount of equivalents of the epoxy groups contained in the crystalline epoxy resin and the amorphous epoxy resin is 0.7 or more with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A), and the photosensitive property can be improved. The insulation reliability of the layer of the cured product of the resin composition can improve the crack resistance of the cured product in the repeated progress of the temperature change. The total amount of equivalents of the epoxy groups contained in the crystalline epoxy resin and the amorphous epoxy resin is 2.5 or less with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A), and the developability can be improved. Therefore, even if the photosensitive resin composition of the present embodiment contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, excellent developability can be obtained, and the cured product of the photosensitive resin composition can be prevented from being easily changed in temperature. Cracking occurred.

第2態樣的感光性樹脂組成物,較佳是相對於前述含羧基樹脂(A)的1當量的羧基,前述結晶性環氧樹脂的環氧基的當量在0.2~1.9的範圍內。 The photosensitive resin composition of the second aspect is preferably one equivalent of a carboxyl group with respect to the carboxyl group-containing resin (A), and the epoxy group of the crystalline epoxy resin has an equivalent weight of 0.2 to 1.9.

相較於前述結晶性環氧樹脂的環氧基的當量在0.2~1.9的範圍外的感光性樹脂組成物,此感光性樹脂組成物,能夠提高顯影性。 The photosensitive resin composition can improve the developability as compared with the photosensitive resin composition in which the equivalent of the epoxy group of the crystalline epoxy resin is in the range of 0.2 to 1.9.

第3態樣的感光性樹脂組成物,較佳是前述結晶性環氧樹脂,於一分子中具有2個環氧基。 The photosensitive resin composition of the third aspect is preferably a crystalline epoxy resin having two epoxy groups in one molecule.

此感光性樹脂組成物,能夠使感光性樹脂組成物的硬化物在溫度變化反覆進行中不容易發生龜裂。 In the photosensitive resin composition, the cured product of the photosensitive resin composition can be prevented from being cracked easily during the temperature change.

第4態樣的感光性樹脂組成物,較佳是前述非晶性環氧樹脂含有環氧樹脂(da),該環氧樹脂(da)具有雙酚型結構單元(d1)與結構單元(d2),該結構單元(d2)是碳原子數4以上且20以下的直鏈狀烴結構單元和醚氧原子數3以上且20以下的聚伸烷基醚結構單元中的至少一種。 In the photosensitive resin composition of the fourth aspect, preferably, the amorphous epoxy resin contains an epoxy resin (da) having a bisphenol structural unit (d1) and a structural unit (d2) The structural unit (d2) is at least one of a linear hydrocarbon structural unit having 4 or more and 20 or less carbon atoms and a polyalkylene ether structural unit having an ether oxygen number of 3 or more and 20 or less.

與不含環氧樹脂(da)的情形相比,此感光性樹脂組成物能夠提高硬化物的耐熱衝擊性。 This photosensitive resin composition can improve the thermal shock resistance of the cured product as compared with the case where the epoxy resin (da) is not contained.

第5態樣的感光性樹脂組成物,較佳是前述非晶性環氧樹脂含有環氧樹脂(db),該環氧樹脂(db)具有酚醛清漆結構與聯苯骨架。 In the photosensitive resin composition of the fifth aspect, it is preferable that the amorphous epoxy resin contains an epoxy resin (db) having a novolac structure and a biphenyl skeleton.

此感光性樹脂組成物,其硬化物的電絕緣性能提高。因此,感光性樹脂組成物特別適合作為用於印刷線路板的絕緣材料,該印刷線路板的絕緣材料需要線間絕緣性和層間遷移耐性等高可靠性。 This photosensitive resin composition has improved electrical insulating properties of the cured product. Therefore, the photosensitive resin composition is particularly suitable as an insulating material for a printed wiring board, and the insulating material of the printed wiring board requires high reliability such as inter-line insulation and interlayer migration resistance.

第6態樣的感光性樹脂組成物,較佳是前述酸酐含有酸二酐。 In the photosensitive resin composition of the sixth aspect, it is preferred that the acid anhydride contains acid dianhydride.

此時,含羧基樹脂(A1)藉由酸二酐(a3)來交聯,而調整分子量。因此,能夠獲得酸價及分子量經適度調整的含羧基樹脂(A1)。而且,藉由控制酸二酐(a3)的量,容易調整含羧基樹脂(A1)的分子量及酸價。 At this time, the carboxyl group-containing resin (A1) is crosslinked by the acid dianhydride (a3) to adjust the molecular weight. Therefore, a carboxyl group-containing resin (A1) having a moderately adjusted acid value and molecular weight can be obtained. Further, by controlling the amount of the acid dianhydride (a3), the molecular weight and the acid value of the carboxyl group-containing resin (A1) can be easily adjusted.

第7態樣的感光性樹脂組成物,較佳是前述酸二酐含有3,3’,4,4’-聯苯四甲酸二酐。 In the photosensitive resin composition of the seventh aspect, it is preferred that the acid dianhydride contains 3,3',4,4'-biphenyltetracarboxylic dianhydride.

此感光性樹脂組成物,一面確保良好的顯影性,一面容易獲得經抑制黏性的皮膜,並且容易獲得經提高絕緣可靠性及耐鍍覆性的硬化物。 The photosensitive resin composition can easily obtain a film having a suppressed viscosity while ensuring good developability, and a cured product having improved insulation reliability and plating resistance can be easily obtained.

第8態樣的感光性樹脂組成物,較佳是前述含羧基樹脂(A1)的重量平均分子量是在1000~5000的範圍內。 In the photosensitive resin composition of the eighth aspect, it is preferred that the weight average molecular weight of the carboxyl group-containing resin (A1) is in the range of 1,000 to 5,000.

此時,容易抑制由感光性樹脂組成物所形成的皮膜的黏性,並且容易提高由感光性樹脂組成物所形成的硬化物的絕緣可靠性及耐鍍覆性,並且容易提高感光性樹脂組成物的藉由鹼性水溶液之顯影性。 In this case, it is easy to suppress the viscosity of the film formed of the photosensitive resin composition, and it is easy to improve the insulation reliability and the plating resistance of the cured product formed of the photosensitive resin composition, and it is easy to improve the composition of the photosensitive resin. The developability of the substance by an aqueous alkaline solution.

第9態樣的感光性樹脂組成物,較佳是前述含羧基樹脂(A1)的固體成分酸價是在60~140mgKOH/g的範圍內。 In the photosensitive resin composition of the ninth aspect, the acid value of the solid content of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH/g.

此時,容易提高感光性樹脂組成物的顯影性。 At this time, the developability of the photosensitive resin composition is easily improved.

第10態樣的感光性樹脂組成物,較佳是前述酸酐含有1,2,3,6-四氫鄰苯二甲酸酐。 In the photosensitive resin composition of the tenth aspect, it is preferred that the acid anhydride contains 1,2,3,6-tetrahydrophthalic anhydride.

此時,容易抑制由感光性樹脂組成物所形成的皮膜的黏性,並且容易提高由感光性樹脂組成物所形成的硬化物的絕緣可靠性及耐鍍覆性。 At this time, it is easy to suppress the viscosity of the film formed of the photosensitive resin composition, and it is easy to improve the insulation reliability and the plating resistance of the cured product formed of the photosensitive resin composition.

第11態樣的乾膜,其特徵在於:其是上述感光性樹脂組成物的乾燥物。 A dry film according to the eleventh aspect, which is characterized in that it is a dried product of the above-mentioned photosensitive resin composition.

此時,即便乾膜含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得優異的顯影性,而且能夠使其硬化物在溫度變化反覆進行中不容易發生龜裂。 In this case, even if the dry film contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, excellent developability can be obtained, and the cured product can be prevented from being cracked easily during the temperature change.

第12態樣的印刷線路板,其特徵在於:具備抗焊劑層,該抗焊劑層包含上述感光性樹脂組成物的硬化物。 A printed wiring board according to a twelfth aspect, comprising: a solder resist layer comprising a cured product of the photosensitive resin composition.

此時,抗焊劑層在溫度變化反覆進行中不容易發生龜裂。 At this time, the solder resist layer is less prone to cracking during the temperature change.

第13態樣的印刷線路板,其特徵在於:具備層間絕緣層,該層間絕緣層包含上述感光性樹脂組成物的硬化物。 A printed wiring board according to a thirteenth aspect, comprising: an interlayer insulating layer comprising a cured product of the photosensitive resin composition.

此時,層間絕緣層在溫度變化反覆進行中不容易發生龜裂。 At this time, the interlayer insulating layer is less prone to cracking during the temperature change.

第14態樣的感光性樹脂組成物的製造方法,其特徵在於:包含下述步驟:使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,藉此獲得中間體,使該中間體與酸酐進行反應,來合成含羧基樹脂(A1),將含有前述含羧基樹脂(A1)之含羧基樹脂(A)、於一分子中具有至少一個乙烯性不飽和鍵之不飽和化合物(B)、光聚合起始劑(C)及環氧化合物(D)加以混合之步驟;並且,該環氧化合物(a1)具有以上述式(1)來表示的雙酚茀骨架,且式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素;前述環氧化合物(D)含有結晶性環氧樹脂與非晶性環氧樹脂,而且,相對於前述含羧基樹脂(A)的1當量 的羧基,前述結晶性環氧樹脂和前述非晶性環氧樹脂中包含的環氧基的當量的合計量在0.7~2.5的範圍內。 A method for producing a photosensitive resin composition according to a fourteenth aspect, comprising the steps of: reacting an epoxy compound (a1) with an unsaturated group-containing carboxylic acid (a2), thereby obtaining an intermediate; The intermediate is reacted with an acid anhydride to synthesize a carboxyl group-containing resin (A1), and the carboxyl group-containing resin (A) containing the carboxyl group-containing resin (A1) and an unsaturated compound having at least one ethylenically unsaturated bond in one molecule. (B) a step of mixing the photopolymerization initiator (C) and the epoxy compound (D); and the epoxy compound (a1) has a bisphenol fluorene skeleton represented by the above formula (1), and In (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen; and the epoxy compound (D) contains a crystalline epoxy resin and an amorphous epoxy resin, and The total amount of equivalents of the epoxy groups contained in the crystalline epoxy resin and the amorphous epoxy resin is in the range of 0.7 to 2.5 with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing resin (A).

由此製造方法獲得的感光性樹脂組成物中,藉由含羧基樹脂(A1)具有源自環氧化合物(a1)之以式(1)來表示的雙酚茀骨架,能夠對含有含羧基樹脂(A1)的感光性樹脂組成物的硬化物賦予高耐熱性及絕緣可靠性。藉由環氧化合物(D)含有結晶性環氧樹脂,能夠使感光性樹脂組成物的顯影性提升。當環氧化合物(D)僅含有結晶性環氧樹脂時,感光性樹脂組成物的硬化物在包含溫度上升及溫度降低的溫度變化反覆進行中容易發生龜裂。然而,本實施形態中,藉由環氧化合物(D)以上述規定比例含有結晶性環氧樹脂及非晶性環氧樹脂,能夠使感光性樹脂組成物的硬化物在溫度變化反覆進行中不容易發生龜裂。藉由相對於含羧基樹脂(A)中包含的1當量的羧基,結晶性環氧樹脂及非晶性環氧樹脂中包含的環氧基的當量的合計量是0.7以上,能夠提高包含感光性樹脂組成物的硬化物的層的絕緣可靠性,並且能夠提高硬化物在溫度變化反覆進行中的龜裂耐性。藉由相對於含羧基樹脂(A)中包含的1當量的羧基,結晶性環氧樹脂及非晶性環氧樹脂中包含的環氧基的當量的合計量是2.5以下,能夠提高顯影性。因此,即便本實施形態的感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得優異的顯影性,而且能夠使感光性樹脂組成物的硬化物在溫度變化反覆進行中不容易發生龜裂。 In the photosensitive resin composition obtained by the production method, the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton represented by the formula (1) derived from the epoxy compound (a1), and can contain a carboxyl group-containing resin. The cured product of the photosensitive resin composition of (A1) imparts high heat resistance and insulation reliability. When the epoxy compound (D) contains a crystalline epoxy resin, the developability of the photosensitive resin composition can be improved. When the epoxy compound (D) contains only the crystalline epoxy resin, the cured product of the photosensitive resin composition is likely to be cracked when the temperature change including temperature rise and temperature decrease is repeated. However, in the present embodiment, the epoxy resin (D) contains the crystalline epoxy resin and the amorphous epoxy resin in the predetermined ratio, and the cured product of the photosensitive resin composition can be prevented from being repeatedly changed in temperature. It is prone to cracking. The total amount of equivalents of the epoxy groups contained in the crystalline epoxy resin and the amorphous epoxy resin is 0.7 or more with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A), and the photosensitive property can be improved. The insulation reliability of the layer of the cured product of the resin composition can improve the crack resistance of the cured product in the repeated progress of the temperature change. The total amount of equivalents of the epoxy groups contained in the crystalline epoxy resin and the amorphous epoxy resin is 2.5 or less with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A), and the developability can be improved. Therefore, even if the photosensitive resin composition of the present embodiment contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, excellent developability can be obtained, and the cured product of the photosensitive resin composition can be prevented from being easily changed in temperature. Cracking occurred.

1‧‧‧芯材 1‧‧‧ core material

2‧‧‧絕緣層 2‧‧‧Insulation

3‧‧‧第一導體線路 3‧‧‧First conductor line

4‧‧‧皮膜 4‧‧ ‧ film

5‧‧‧未曝光部分 5‧‧‧Unexposed parts

6‧‧‧孔 6‧‧‧ hole

7‧‧‧層間絕緣層 7‧‧‧Interlayer insulation

8‧‧‧第二導體線路 8‧‧‧Second conductor line

9‧‧‧穿孔鍍覆 9‧‧‧Perforated plating

10‧‧‧貫穿孔 10‧‧‧through holes

11‧‧‧印刷線路板 11‧‧‧Printed circuit board

Claims (13)

一種感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);並且,前述含羧基樹脂(A)含有含羧基樹脂(A1),該含羧基樹脂(A1)是中間體與酸酐之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物;前述環氧化合物(a1)具有以下述式(1)來表示的雙酚茀骨架,且下述式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素;前述環氧化合物(D)含有結晶性環氧樹脂與非晶性環氧樹脂,而且,相對於前述含羧基樹脂(A)的1當量的羧基,前述結晶性環氧樹脂和前述非晶性環氧樹脂的環氧基的當量的合計量在0.7~2.5的範圍內, A photosensitive resin composition comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; a photopolymerization initiator (C); The oxygen-containing compound (D); and the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) which is a reactant of an intermediate and an acid anhydride, and the intermediate is an epoxy compound (a1) and The reactant containing the unsaturated carboxylic acid (a2); the epoxy compound (a1) has a bisphenol fluorene skeleton represented by the following formula (1), and in the following formula (1), each of R 1 to R 8 It is independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen; and the epoxy compound (D) contains a crystalline epoxy resin and an amorphous epoxy resin, and is further based on the carboxyl group-containing resin (A). 1 equivalent of a carboxyl group, and the total equivalent of the epoxy group of the crystalline epoxy resin and the amorphous epoxy resin is in the range of 0.7 to 2.5. 如請求項1所述之感光性樹脂組成物,其中,相對於前述含羧基樹脂(A)的1當量的羧基,前述結晶性環氧樹脂的環氧基的當量在0.2~1.9的範圍內。 The photosensitive resin composition according to claim 1, wherein the equivalent epoxy group of the crystalline epoxy resin is in the range of 0.2 to 1.9 with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing resin (A). 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述結晶性環氧樹脂,於一分子中具有2個環氧基。 The photosensitive resin composition according to claim 1 or 2, wherein the crystalline epoxy resin has two epoxy groups in one molecule. 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述非晶性環氧樹脂含有環氧樹脂(da),該環氧樹脂(da)具有雙酚型結構單元(d1)與結構單元(d2),該結構單元(d2)是碳原子數4以上且20以下的直鏈狀烴結構單元和醚氧原子數3以上且20以下的聚伸烷基醚結構單元中的至少一種。 The photosensitive resin composition according to claim 1 or claim 2, wherein the amorphous epoxy resin contains an epoxy resin (da) having a bisphenol structural unit (d1) And the structural unit (d2), wherein the structural unit (d2) is at least 4 or more and 20 or less linear hydrocarbon structural units and at least 3 or more and 20 or less polyalkylene ether structural units having an ether oxygen atom number; One. 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述非晶性環氧樹脂含有環氧樹脂(db),該環氧樹脂(db)具有酚醛清漆結構與聯苯骨架。 The photosensitive resin composition according to claim 1 or 2, wherein the amorphous epoxy resin contains an epoxy resin (db) having a novolac structure and a biphenyl skeleton. 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述酸酐含有酸二酐。 The photosensitive resin composition according to claim 1 or 2, wherein the acid anhydride contains an acid dianhydride. 如請求項6所述之感光性樹脂組成物,其中,前述酸二酐含有3,3’,4,4’-聯苯四甲酸二酐。 The photosensitive resin composition according to claim 6, wherein the acid dianhydride contains 3,3',4,4'-biphenyltetracarboxylic dianhydride. 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述含羧基樹脂(A1)的重量平均分子量是在1000~5000的範圍內。 The photosensitive resin composition according to claim 1 or 2, wherein the weight average molecular weight of the carboxyl group-containing resin (A1) is in the range of 1,000 to 5,000. 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述含羧基樹脂(A1)的固體成分酸價是在60~140mgKOH/g的範圍內。 The photosensitive resin composition according to claim 1 or 2, wherein the solid content of the carboxyl group-containing resin (A1) is in the range of 60 to 140 mgKOH/g. 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述酸酐含有1,2,3,6-四氫鄰苯二甲酸酐。 The photosensitive resin composition according to claim 1 or 2, wherein the acid anhydride contains 1,2,3,6-tetrahydrophthalic anhydride. 一種乾膜,其是如請求項1至請求項10中任一項所述之感光性樹脂組成物的乾燥物。 A dry film which is a dried product of the photosensitive resin composition according to any one of claims 1 to 10. 一種印刷線路板,其具備抗焊劑層,該抗焊劑層包含如請求項1至請求項10中任一項所述之感光性樹脂組成物的硬化物。 A printed wiring board comprising a solder resist layer, the solder resist layer comprising a cured product of the photosensitive resin composition according to any one of claims 1 to 10. 一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含如請求項1至請求項10中任一項所述之感光性樹脂組成物的硬化物。 A printed wiring board comprising an interlayer insulating layer, which comprises a cured product of the photosensitive resin composition according to any one of claims 1 to 10.
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