TW201705343A - Pellicle frame gripping device and pellicle frame gripping method - Google Patents

Abstract

The present invention enables a pellicle frame to be gripped without the intervention of an operator even when there is distortion in the pellicle frame, for example. Two bars 213, 214 held substantially horizontally with a predetermined separation are each provided with a plurality of pellicle gripping members, each of the pellicle gripping members having a measurement portion that continuously acquires the height of the pellicle gripping member and the height of a groove formed in a side surface of a pellicle 100. When a container body 11 is moved upward and the heights of the pellicle gripping members and the height of the groove substantially coincide, the pellicle gripping members are inserted into the groove and, once the pellicle gripping members have been inserted into the groove, the container body 11 is moved downward.

Description

Film frame holding device and film frame holding method

The present invention relates to a film frame holding device and a film frame holding method.

Patent Document 1 discloses a film frame removing method in which the position of the thin rod is aligned with the outer side of each of the two sides constituting the opposite side of the film frame after the outer peripheral portion of the substrate to which the film frame is adhered is held. The respective holes provided in the plurality of portions are inserted, thereby supporting the film frame, and applying a force perpendicular to the substrate to the thin rod in a direction in which the film frame is uniformly away from the substrate.

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Laid-Open Patent Publication No. 2013-125120

The film frame to which the film for film is adhered has a wide sheet shape, and thus distortion is likely to occur in a direction (height direction) orthogonal to the surface on which the film for film is adhered. However, in the invention described in Patent Document 1, distortion of the film frame is not considered.

Therefore, in the invention described in Patent Document 1, when the position of the hole provided in the film frame is deviated in the height direction due to the distortion of the film frame or the like, the thin rod may not be inserted into the hole provided in the film frame. Bad condition.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a film frame holding device and a film frame holding method that can hold a film frame without an operator even when distortion occurs in a film frame or the like.

In order to solve the problem, the film frame holding device of the present invention includes a film frame which is, for example, a film frame having a substantially hollow cylindrical shape, and a first end surface provided with a film for covering the hollow portion. a second end surface having a bonding member and substantially parallel to the first end surface; and a side surface on which the groove is formed; a protective sheet adhered to the bonding member; and the container body is substantially horizontally upward with the first end surface The second end surface is placed in a state in which the film frame is placed substantially horizontally downward, and one of the protective sheets is fixed; and the first driving unit is configured such that the container body is vertically aligned in a direction substantially perpendicular to the first surface. Moving the jig frame, which is disposed above the container body, and has two bars that are substantially horizontally held at predetermined intervals, and a plurality of film holding members for each of the two bars, and The film holding member is substantially horizontal between a first position at which the film holding member is inserted into the groove and a second position at which the film holding member is not inserted into the groove a second driving unit, wherein the second driving unit is provided for each of the plurality of film holding members; and the measuring unit has a plurality of ranging sensors, wherein the ranging sensors are for the plurality of the plurality of measuring sensors Each of the film holding members is provided one by one, and when the film holding member is located at the first position, the position of the film holding member in a substantially vertical direction, that is, the height, is continuously measured, and when the film holding member is located at the second position And continuously measuring the height of the first end surface; and the control unit determining the height of the film holding member and the groove based on the measurement result continuously measured by the measuring unit, and controlling the first driving unit and The second driving unit is configured to move the container body upward Moving, while the height of the film holding member substantially matches the height of the groove, moving the film holding member from the second position to the first position, and all of the film holding members are When the position is moved, the container body is moved downward.

According to the film frame holding device of the present invention, the film holding member and the height of the groove formed on the side of the film frame are continuously obtained. The container body is moved upward, and the film holding member is inserted into the groove according to the height of the film holding member and the groove, and the container body is moved downward when the film holding member is inserted into the groove. Thereby, even when the film frame or the like is distorted, the film frame can be held without passing through the operator. Further, by providing the distance measuring sensor for each of the film holding members, the holding of the film frame can be surely performed.

Here, when the film holding member has moved to the first position, the control unit may control the first driving unit such that the container body moves downward by a first distance and then stops the container body. Thereafter, when it is known from the measuring unit that the height of the first end surface has moved upward by the first distance, it is determined that the protective sheet and the adhesive member are peeled off. Thereby, it is possible to detect that the film frame has been peeled off from the container body even without passing through the operator.

Here, the container body has a substantially rectangular upper surface on which the film frame is placed, and the first driving unit includes a first actuator that moves the center of the first side of the upper surface and moves the same The second actuator and the third actuator that move closer to the end than the second side of the second side of the upper surface that is substantially parallel to the first side, and the control unit may respectively apply to the first actuator The second actuator and the third actuator are controlled. Thereby, the film frame can be moved in various forms.

Here, the control unit may also be used when the container body moves upward. The first actuator, the second actuator, and the third actuator are controlled such that the first ranging sensor of the plurality of ranging sensors included in the measuring unit is controlled The relative position of the film holding member and the groove obtained by the measurement result and the film holding force determined by the measurement result of the second distance measuring sensor different from the first distance measuring sensor The relative positions of the members and the grooves are substantially the same. Thereby, even when the film frame is distorted or the like, the heights of the grooves can be made substantially the same, so that the time required for inserting the film holding member into the groove can be shortened.

Here, the protective sheet may be located near the center of the first side and fixed to the upper surface, and when the container body is moved downward, the control unit may first drive the first actuator. Thereby, the protective sheet can be peeled off from the adhesive layer with a weak force.

Here, the jig frame may have a rotation shaft provided near the end portions of the two rods, and the two rods may be provided to be rotatable substantially 90 degrees around the rotation axis. Thereby, the film frame can be held by a film frame holding device, and the film frame can be adhered to a photomask or the like. Further, by providing the distance measuring sensor for each of the film holding members, it is possible to detect that the film frame is adhered to the photomask or the like even without passing through the operator.

Here, a positioning member may be provided, and when the two rods are arranged substantially horizontally, the end portions of the two rods on the side where the rotation shaft is not provided are orthogonal to the first end surface. Position the position. Thereby, the jig frame can be stably held at the peeling position.

Here, the jig frame may have the first rod and the second rod which are the two rods, and the third rod and the fourth rod which are substantially perpendicular to the first rod and the second rod, and the a rod, the second rod and the third rod are respectively arranged to be movable substantially orthogonal to the longitudinal direction direction. Thereby, it is possible to hold film frames of various sizes.

Here, the jig frame may have a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. Thereby, when a strong force in the direction orthogonal to the first end surface is applied to the film holding member, deformation, breakage, or the like of the film holding member can be prevented.

In order to solve the above problems, the film frame holding method of the present invention is characterized in that a plurality of film holding members are disposed in a first position in which the film holding members are inserted into the grooves, and the plurality of film holding members are directed to the jig The two rods of the frame which are substantially horizontally held at a predetermined interval are respectively provided in plurality, and the jig frame is disposed above the container body, and the container body is fixed with a part of the protective sheet adhered to the bonding member, the film frame The first end surface is placed horizontally upward and the second end surface is placed substantially horizontally downward, and the film frame has, for example, a substantially hollow cylindrical shape and has the first end surface provided with a film for covering the hollow portion. a second end surface that is substantially parallel to the first end surface and a side surface on which the groove is formed, and a distance measuring sensor that is provided for each of the plurality of film holding members As a result of the measurement, the height of the film holding member is determined, and the film holding member is moved from the first position to the second position where the film holding member is not inserted into the groove; The height of the groove is obtained based on the measurement result of the distance measuring sensor while moving the container body upward, and if the height of the groove is substantially equal to the height of the film holding member, The film holding member is moved from the second position to the first position, and when the film holding member is moved to the first position, the first driving unit is controlled to move the container body downward. Thereby, even when the film frame or the like is distorted, the film frame can be held without passing through the operator.

According to the present invention, even when distortion occurs in the film frame or the like, the film frame can be held without passing through the operator.

1, 2‧‧‧ film frame holding device

10‧‧‧Film storage container

11‧‧‧ container body

11a‧‧‧ upper surface

12‧‧‧ drive components

12a, 12b, 12c‧‧‧ actuators

20‧‧ ‧ fixture frame

21, 21A‧‧ ‧ fixture frame body

22‧‧‧Rotary axis

23‧‧‧Abutment components

24‧‧‧film holding mechanism

25‧‧‧Measurement Department

44‧‧‧ drive components

44a‧‧‧Body

44b‧‧‧Actuator

100, 100A, 100B, 100C, 100D, 100E‧‧‧ film

101‧‧‧ film frame

101a‧‧‧ upper surface

101b‧‧‧ lower surface

101c‧‧‧ side

101d‧‧‧ trench

101e‧‧‧ Hollow

102‧‧‧ Film for film

103‧‧‧ adhesive layer

104‧‧‧film liner

104a‧‧‧ lead board

104b‧‧‧ Root

105‧‧‧ Tape

151‧‧‧CPU

151a‧‧‧Control Department

152‧‧‧RAM

153‧‧‧ROM

154‧‧‧Input and output interface

155‧‧‧Communication interface

156‧‧‧Media interface

157‧‧‧Memory Media

211, 211A‧‧‧ stick

211a, 211b‧‧‧ boards

211c‧‧‧Axis

211d‧‧‧ ribs

212‧‧‧ stick

212a‧‧‧ great

212b‧‧‧ hole

212c‧‧‧Guide members

213, 213A‧‧‧ stick

214, 214A‧‧‧ stick

214a‧‧‧ board

214b‧‧‧ reinforcing plate

214c‧‧‧End board

214d‧‧‧ hole

214e‧‧‧Axis

215‧‧‧ box

216‧‧‧Wiring piping guide

216a, 216b‧‧‧ stick

217‧‧‧Mobile agencies

217a‧‧‧Rack

217b‧‧‧Actuator

217c‧‧‧ gear

218‧‧‧Actuator

241‧‧‧film holding member

242‧‧‧ Keeping Department

243‧‧‧Base

243a‧‧‧Base

251‧‧‧Ultrasonic Sensor

252‧‧‧reflector

Fig. 1 is a perspective view showing the outline of the film frame holding device 1 of the first embodiment.

FIG. 2 is a detailed perspective view showing the film storage container 10.

Figure 3 is a cross-sectional view taken along line A-A of Figure 2.

4 is a view showing details of the jig frame body 21 and the rotating shaft 22.

Fig. 5 is a view for explaining a mechanism for moving the rod 214 in the x direction.

Fig. 6 is a view for explaining a mechanism for moving the rod 212 in the y direction.

Fig. 7 is a view showing the details of the film holding mechanism 24a.

Fig. 8 is a view showing a state in which the film holding mechanism 24a does not hold the film frame 101.

Fig. 9 is a block diagram showing the electrical configuration of the film frame holding device 1.

Fig. 10 is a flow chart showing the flow of the film holding process by the film frame holding device 1.

Fig. 11 is a view showing how the height of the upper surface 101a changes with time.

Fig. 12 is a flow chart showing the flow of the film adhesion treatment by the film frame holding device 1.

Fig. 13 is a perspective view showing the outline of the jig frame main body 21A of the film frame holding device 2.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same elements are denoted by the same reference numerals, and the description of the overlapping parts will be omitted.

<First embodiment>

Fig. 1 is a perspective view showing the outline of the film frame holding device 1 of the first embodiment. The film frame holding device 1 mainly includes a film storage container 10 and a jig frame 20 provided above the film storage container 10 (+z direction).

The film storage container 10 mainly has a container body 11 and a film 100. The film 100 placed on the container body 11 is supported by the jig frame 20 and is detached from the container body 11.

FIG. 2 is a detailed perspective view showing the film storage container 10. Figure 3 is a cross-sectional view taken along line A-A of Figure 2.

The film 100 mainly has a film frame 101, a film film 102 laid on the film frame 101, and an adhesive layer 103 formed on the lower surface of the film frame 101 (see Fig. 3).

The film frame 101 has a frame shape (hollow cylindrical shape) having a substantially rectangular outer circumference, and is formed of a metal such as iron or aluminum. The size of the hollow portion 101e of the film frame 101 is the same as the size of the reticle (for example, about 520 mm × 800 mm to 1620 mm × 1780 mm). The frame-shaped portion of the film frame 101 has a width of about several tens of mm and a thickness of about 2 mm to 10 mm.

The film frame 101 has substantially parallel upper surface 101a and lower surface 101b. Further, a groove 101d is formed along the outer peripheral surface of the side surface 101c of the film frame 101 which is orthogonal to the upper surface 101a and the lower surface 101b. The height and depth of the groove 101d are about 2 mm. A film holding member 241 (described later in detail) provided in the jig frame 20 is inserted into the groove 101d.

The film for film 102 is a film having a submicron thickness. The film 102 for a film is laid on the upper surface 101a of the film frame 101 so as to cover the hollow portion 101e of the film frame 101. When the film frame 101 is adhered to the mask substrate, the pattern forming surface of the film for film 102 and the mask is provided at a predetermined interval.

The adhesive layer 103 is provided on the lower surface 101b of the film frame 101, that is, the side opposite to the container body 11. The adhesive layer 103 is formed in a frame shape over the entire circumference of the film frame 101. Further, the adhesive layer 103 is provided so as not to extend beyond the film frame 101. On the lower surface of the adhesive layer 103, a film liner 104 for protecting the adhesive layer 103 is provided.

The film liner 104 has a thickness of approximately 0.1 mm and a frame shape substantially the same as that of the film frame 101. The film liner 104 is formed on the surface of a substrate made of, for example, PET or the like by applying a release agent. The film liner 104 functions as a so-called release paper, and peels off when the film 100 is taken out from the container body 11.

When the film 100 is placed on the upper surface 101a of the container body 11, the film liner 104 abuts against the container body 11. Therefore, the adhesive layer 103 does not abut against the container body 11.

A tab 104a is formed at a portion near the center of the frame-like sides of the film liner 104, respectively. The tab 104a is formed to protrude from the outer periphery of the film frame 101. The tab 104a is for easy peeling of the film liner 104.

The tab 104a is fixed to the upper surface 101a of the container body 11 by, for example, an adhesive tape 105 or the like. Thereby, the tab 104a, that is, the film 100 is fixed to the container body 11. Furthermore, the tab 104a is not limited to being fixed to the upper surface 101a, and may be fixed to any of the container bodies 11.

As shown in Fig. 2, the film 100 thus constructed is placed on the upper side (+z side) of the upper surface 11a of the container body 11. A drive member 12 is provided on the lower side (-z side) of the upper surface 11a.

The driving member 12 moves the upper surface 11a of the container body 11 up and down (z direction). The drive member 12 mainly has three actuators 12a, an actuator 12b, and an actuator 12c. The actuator 12a, the actuator 12b, and the actuator 12c have a rod body (not shown) whose front end is movable in the z direction, and the front ends of the rod bodies are respectively provided on the lower side (-z side) of the upper surface 11a. Actuator 12a is provided at The long side 11b of the upper surface 11a is near the center of the long side 11b, and the actuator 12b and the actuator 12c are disposed near the long side 11c of the upper surface 11a and at the center of the longer side 11c. position. The actuator 12a, the actuator 12b, and the actuator 12c are provided to be separately driveable. Thereby, the film frame can be moved in various forms (to be described in detail below).

Return to the description of Figure 1. The jig frame 20 mainly has a jig frame body 21, a rotating shaft 22, an abutting member 23, and a film holding mechanism 24 (refer to FIG. 4, the film holding mechanism 24 includes film holding mechanisms 24a to 24n). In addition, in FIG. 1, the film holding mechanism 24 is abbreviate|omitted.

4 is a view showing details of the jig frame body 21 and the rotating shaft 22. Fig. 4 shows a state in which the jig frame body 21 and the rotating shaft 22 are viewed from the -z direction. The jig frame body 21 has four bars 211, 212, 213, and 214, and a frame 215 provided around the rods 212, 213, and 214. The rods 211, 212, 213, 214 and the frame 215 are formed of a metal such as iron or aluminum. The longitudinal directions of the two rods 211 and 212 are arranged in the x direction, and the longitudinal directions of the two rods 213 and 214 are arranged in the y direction. Thereby, the four rods 211, 212, 213, and 214 are combined into a frame shape.

A film holding mechanism 24 is provided on the bars 211, 212, 213, and 214, respectively. In the example shown in FIG. 4, three film holding mechanisms 24 (24a to 24c, 24h to 24j) are respectively provided on the bars 211 and 212, and four film holding mechanisms 24 (24d are respectively provided in the bars 213 and 214). 24g, 24k~24n).

The frame 215 is fixed at both ends to the rod 211. A frame-shaped member having a shape of a word (substantially U-shaped) is provided outside the rods 212, 213, and 214 which are combined into a frame shape. The bars 212, 213, 214 are arranged to be movable relative to the frame 215.

The rods 213, 214 are arranged to be movable in the longitudinal direction of the rods 211, 212, i.e., in the x direction. The rods 212 are arranged to be movable in the longitudinal direction of the rods 213, 214, i.e., in the y direction.

Fig. 5 is a view for explaining a mechanism for moving the rods 213 and 214 in the x direction. In FIG. 5, the rod 214 is taken as an example, and the rod 213 is also the same as the rod 214, and thus the description thereof is omitted.

The rod 214 is composed of a plate 214a whose maximum surface is substantially parallel to the xy plane, and a reinforcing plate 214b whose largest surface is substantially parallel to the yz plane, and is combined into a substantially L-shaped rod-shaped member, and end plates 214c are provided at both ends. . A hole 214d is formed in the end plate 214c.

The rod 211 mainly has a plate 211a whose largest surface is substantially parallel to the xy plane, a plate 211b whose maximum surface is substantially parallel to the xz plane, a substantially cylindrical shaft 211c whose longitudinal direction is substantially parallel to the plate 211a, and a shaft 211c for mounting. Rib 211d. Furthermore, the board 211b is not required.

The shaft 211c is inserted into the hole 214d, and the shaft 211c is rotated by the actuator 218 provided on the shaft 211c, whereby the rod 214 is moved along the axis 211c, that is, in the x direction. Although the illustration and the detailed description are omitted, various mechanisms known in the art can be used as a mechanism for moving the rod 214 along the shaft 211c.

The wiring pipe guide 216 has a rod 216a and a rod 216b. One end of the rod 216a and the rod 216b is coupled to be rotatable by a joint (joint). As the rod 214 moves in the x direction, the angle θ formed by the rod 216a and the rod 216b changes. Further, the wiring pipe guide 216 is not essential and may be omitted.

Fig. 6 is a view for explaining a mechanism for moving the rod 212 in the y direction. Bar 214 has a shaft 214e. The shaft 214e is provided on the end plate 214c (not shown in FIG. 6) so that the longitudinal direction thereof is substantially parallel to the y direction. Further, the shaft 214e is only shown in Fig. 6, and the shaft 214e is omitted in Fig. 5.

The rod 212 has a rod 212a and a guiding member 212c formed with a hole 212b into which the shaft 214e is inserted.

The moving mechanism 217 that moves the rod 212 has a rack 217a provided on the plate 214a, an actuator 217b provided on the guide member 212c, and a gear 217c provided on the output shaft of the actuator 217b. The guide member 212c, that is, the rod 212 is moved in the y direction along the rack 217a by rotating the output shaft of the actuator 217b as the drive member, that is, the gear 217c.

Further, it is not limited to the form in which the rods 213 and 214 are movable in the x direction, and the form in which the rods 212 are movable in the y direction, and various forms can be employed.

Return to the description of Figure 4. By thus moving the rods 212, 213, and 214 orthogonally to the longitudinal direction, the size of the frame formed by the four rods 211, 212, 213, and 214 is changed. By changing the size of the frame formed by the rods 211, 212, 213, and 214, the size of the frame formed by the rods 211, 212, 213, and 214 can be made to correspond to various sizes of the film 100 (100A, 100B, 100C). , 100D and 100E) size.

The film 100A is, for example, about 420 mm × 720 mm, the film 100B is, for example, about 700 mm × 800 mm, the film 100C is, for example, about 520 mm × 680 mm, the film 100D is, for example, about 750 mm × 1300 mm, and the film 100E is, for example, 1520 mm × The size of about 1680mm.

The film 100A, the film 100B, and the film 100C are held by the film holding mechanisms 24b, 24d, 24e, 24m, and 24n. The film holding device 24b, 24d, 24e, 24f, 24l, 24m, 24n is held by the film holding mechanism 100D. For the film 100E, all of the film holding mechanisms 24a to 24n are used for holding. Thus, by means of the respective rods 211, 212, 213, 214 is provided with a plurality of film holding mechanisms 24 capable of holding films 100 (100A, 100B, 100C, 100D and 100E) of various sizes.

FIG. 7 is a detailed view showing the film holding mechanism 24. In FIG. 7, the film holding mechanism 24a is described as an example. However, the configuration of the film holding mechanisms 24b to 24n is the same as that of the film holding mechanism 24a, and thus the description thereof is omitted. The state in which the film holding mechanism 24 holds the film frame 101 is illustrated in FIG. Further, the container body 11 is omitted in FIG.

The film holding mechanism 24a has a film holding member 241a inserted into the groove 101d, a holding portion 242a holding the film holding member 241a, and a base 243a for attaching the holding portion 242a to the rod 211.

The film holding member 241a is formed of a metal plate material. The film holding member 241a in the present embodiment is formed by bending a plate material twice, but the plate material may not be bent. Further, the film holding member 241a is not limited to a plate-shaped member, and may be formed using, for example, a rod-shaped member.

A drive member 44 is provided in the holding portion 242a. The drive member 44 has an actuator 44b including a rod body 44a whose front end is moved in a direction (y direction) substantially orthogonal to the longitudinal direction (x direction) of the rod 211 (see an arrow in Fig. 7). The film holding member 241a is coupled to the rod 44a. Thereby, the film holding member 241a is moved in the horizontal direction (along the xy plane) and in the direction orthogonal to the rod 211.

The film holding member 241a is inserted into the insertion position of the groove 101d by the film holding member 241a by the driving member 44, the groove 101d is not inserted into the film holding member 241a, and the film holding member 241a does not interfere with the film frame 101. The retracted position (see the broken line in Fig. 7) moves in the horizontal direction.

The front end of the film holding member 241a is made of a resin (for example, ultra high molecular weight) A sheet formed of polyethylene or the like is covered. Thereby, when the film holding member 241a has been inserted into the groove 101d, the film holding member 241 or the film frame 101 can be prevented from being cut to generate dust.

The heights of the rods 211, 212, 213, and 214 (the positions in the z direction, the same applies hereinafter) have a difference of several millimeters to several tens of millimeters. Therefore, it is preferable to make the heights of the front ends of the film holding members 241 (241a to 241n) substantially the same by changing the heights of the bases 243 (243a to 243n), respectively. Further, the method of making the heights of the front ends of the film holding members 241 (241a to 241n) substantially the same is not limited thereto, and the film holding members may be made, for example, by changing the heights of the holding portions 242 (242a to 242n), respectively. The height of the front end of 241 (241a~241n) is approximately the same.

The film holding mechanism 24 is provided with a corresponding measuring portion 25, respectively. One measuring unit 25 (25a to 25n) is provided for each of the film holding mechanisms 24 (24a to 24n). Specifically, the film holding mechanism 24a is provided with a measuring portion 25a, and similarly, the film holding mechanism 24b is provided with a measuring portion 25b. Further, a measuring portion 25n is provided in the film holding mechanism 24n. Since the configurations of the measuring units 25b to 25n are the same as those of the measuring unit 25a, description thereof will be omitted.

The measuring unit 25a mainly has an ultrasonic sensor 251a and a reflecting plate 252a.

The ultrasonic sensor 251a transmits a supersonic wave to a distance measuring sensor whose object receives its reflected wave and measures the distance from the target based on the time interval between the transmitted signal and the received reflected wave. In the present embodiment, the ultrasonic sensor 251a uses a resolution of about 0.2 μm. The ultrasonic sensor 251a is known, and detailed description thereof will be omitted.

The reflecting plate 252a reflects the ultrasonic waves transmitted from the ultrasonic sensor 251a. The ultrasonic sensor 251a transmits ultrasonic waves in a direction (+y direction) orthogonal to the longitudinal direction of the rod 211. Therefore, by setting the reflection plate 252a to be inclined by 45 degrees on the yz plane, the ultrasonic wave transmitted from the ultrasonic sensor 251a can be reflected downward (-z direction) (refer to FIG. 7). Two-point chain line).

Further, in the present embodiment, the ultrasonic sensor 251a and the reflection plate 252a are provided in the holding portion 242a, but the installation positions of the ultrasonic sensor 251a and the reflection plate 252a are not limited thereto. For example, the ultrasonic sensor 251a and the reflection plate 252a may be provided on the base 243a or may be provided on the rod 211.

The state in which the film holding mechanism 24 does not hold the film frame 101 is illustrated in FIG. In FIG. 8, the case where the film holding member 241 is located at the retracted position is indicated by a solid line, and the case where the film holding member 241 is located at the insertion position is indicated by a broken line. In addition, in FIG. 8, the container main body 11 is abbreviate|omitted similarly to FIG.

The film for film 102 (not shown in FIG. 8) is formed of a material that can reflect ultrasonic waves. Therefore, when the film holding member 241 is located at the retracted position (refer to the solid line in FIG. 8), the film holding member 241 does not interfere with the film frame 101 (the positions on the xy plane do not overlap), and thus the ultrasonic sensor is used. The ultrasonic wave transmitted by 251a is reflected by the film 102 for film in the +z direction, and is redirected in the -y direction by the reflecting plate 252a, and is received by the ultrasonic sensor 251a.

Since the film 102 for film is of a submicron thickness, the height of the film 102 for film is substantially the same as the height of the upper surface 101a of the film frame 101. Therefore, the ultrasonic sensor 251a can measure the distance between the ultrasonic sensor 251a and the upper surface 101a, that is, the height of the upper surface 101a.

On the other hand, as shown by the broken line in FIG. 8, when the film holding member 241 is at the insertion position, the ultrasonic wave transmitted from the ultrasonic sensor 251a is blocked by the film holding member 241 before reaching the film for film 102. As a result, the ultrasonic wave transmitted from the ultrasonic sensor 251a is reflected by the film holding member 241 in the +z direction, is redirected in the -y direction by the reflecting plate 252a, and is received by the ultrasonic sensor 251a. Thereby, the ultrasonic sensor 251a can measure the ultrasonic sensor 251a. The distance from the film holding member 241, that is, the height of the film holding member 241.

Further, in the present embodiment, in order to obtain the height of the upper surface 101a of the film frame 101 or the height of the film holding member 241, the measuring unit 25 has the ultrasonic sensor 251, but is used for sensing the distance. The device is not limited to the ultrasonic sensor 251. As the distance measuring sensor, the measuring unit 25 may be an optical sensor or a eddy current sensor that uses a light to obtain a distance. As the optical sensor, for example, a laser displacement sensor using a laser or a triangulation type optical sensor can be employed. However, since the film 102 for a film has a property of reflecting ultrasonic waves well, an ultrasonic sensor is preferably used as the distance measuring sensor.

Further, in the present embodiment, the reflecting plate 252 is provided, but the reflecting plate 252 may not be used. In this case, the ultrasonic sensor 251 may be provided at the position of the reflecting plate 252 to transmit the ultrasonic wave downward (-z direction).

Further, in addition to the present embodiment, a mechanism (reflector moving mechanism) for moving the reflecting plate 252 substantially along the xy plane (see the chain arrow in FIG. 8) may be added. The reflector moving mechanism can employ, for example, the same mechanism as the mechanism for moving the film holding member 241.

The reflecting plate moving mechanism is disposed in such a manner that the reflecting plate 252 can be moved to a position where the position on the xy plane does not overlap with the position on the xy plane of the film frame 101 (refer to the long broken line of FIG. 8). Thereby, the film 100 taken out from the container body 11 can be inspected by a laser beam or the like.

Further, when the ultrasonic sensor 251 is provided at the position of the reflecting plate 252, it is preferable to add a mechanism similar to that of the reflecting plate moving mechanism, that is, to move the ultrasonic sensor 251 to the xy plane of the film frame 101. The mechanism on the position where the position does not overlap.

Return to the description of Figure 4. On the rod 211, along the length of the rod 211 (x square The rotating shaft 22 is provided. The jig frame main body 21 can be substantially horizontal (the line which is formed by the rod 211 and the frame 215 as a center of the rotation axis 22) and is substantially horizontal (substantially parallel to the xy plane), and the surface formed by the rod 211 and the frame 215 becomes substantially lead. The splayed position (substantially parallel to the xz plane) is rotated approximately 90 degrees. Furthermore, FIG. 4 illustrates a state in which the jig frame body 21 is at the peeling position.

When the jig frame body 21 is at the peeling position, the bars 211, 212, 213, and 214 are each substantially horizontal, that is, the longitudinal direction is substantially horizontal. When the jig frame main body 21 is at the peeling position, the lower surface (surface on the -z side in FIG. 1) 215a (see FIG. 4) of the frame 215 abuts against the abutting member 23 (refer to FIG. 1). In this manner, by supporting the jig frame body 21 at a plurality of positions (the rotating shaft 22 and the abutting member 23) (fixed at both ends), the jig frame body 21 can be stably held at the peeling position.

Fig. 9 is a block diagram showing the electrical configuration of the film frame holding device 1. The film frame holding device 1 includes a CPU (Central Processing Unit) 151, a RAM (Random Access Memory) 152, a ROM (Read Only Memory) 153, an input/output interface (I/F) 154, and a communication interface (I/F) 155. And a media interface (I/F) 156 that is connected to the drive member 12, the drive member 44, the measurement unit 25, and the like.

The CPU 151 operates based on the programs stored in the RAM 152 and the ROM 153, and controls each unit. The signal is input to the CPU 151 by the measuring unit 25, the drive member 12, and the drive member 44. The signal output from the CPU 151 is input to the drive member 12 and the drive member 44.

RAM 152 is a volatile memory. The ROM 153 is a non-volatile memory in which various control programs and the like are stored. The CPU 151 operates in accordance with the programs stored in the RAM 152 and the ROM 153 to control the respective units. Further, the ROM 153 stores an activation program by the CPU 151 when the film frame holding device 1 is activated, or a hardware that depends on the film frame holding device 1. Programs, etc. Further, the RAM 152 stores programs executed by the CPU 151 and data used by the CPU 151.

The CPU 151 controls an input/output device 161 such as a keyboard or a mouse via an input/output interface 154. The communication interface 155 receives data from other machines via the network 162 and transmits the data to the CPU 151, and transmits the data generated by the CPU 151 to other machines via the network 162.

The media interface 156 reads the program or material stored in the memory medium 163 and stores it in the RAM 152. Furthermore, the memory medium 163 is, for example, an IC card, an SD card, a DVD, or the like.

Further, the program for realizing each function is, for example, read from the memory medium 163, and then attached to the film frame holding device 1 via the RAM 152, and executed by the CPU 151.

The CPU 151 has a function of controlling the control unit 151a of each part of the film frame holding device 1 in accordance with an input signal. The control unit 151a is constructed by executing a predetermined program read by the CPU 151. The control unit 151a controls the drive member 12 and the drive member 44 based on the signal obtained from the measurement unit 25. The processing performed by the control unit 151a will be described in detail below.

The configuration of the film frame holding device 1 shown in Fig. 9 has been described with reference to the main features of the present embodiment, and the configuration of the general information processing device is not excluded. In order to facilitate understanding of the configuration of the film frame holding device 1, the functional configuration shown in FIG. 9 is classified, and the classification or name of the constituent elements is not limited to the form described in FIG. The configuration of the film frame holding device 1 can be divided into more constituent elements depending on the processing content, and processing of a plurality of constituent elements can be performed by one constituent element.

The action of the film frame holding device 1 thus constructed will be described. Fig. 10 is a flow chart showing the flow of the film holding process by the film frame holding device 1. The following processing is mainly performed by the control unit 151a.

First, the control unit 151a confirms that the film storage container 10 is at the initial position (the position shown in FIG. 1), that is, the state in which the jig frame body 21 is positioned above the film 100 (initial state), based on the signal obtained from the measuring unit 25 (step S101).

In this initial state, the film holding member 241 is located at the retracted position. Therefore, the ultrasonic wave transmitted from the ultrasonic sensor 251a is reflected in the +z direction by the film for film film 102, is redirected in the -y direction by the reflecting plate 252a, and is received by the ultrasonic sensor 251a. Further, the height of the jig frame body 21, that is, the height of the film holding member 241 is substantially constant, and the information thereof is stored in the ROM 153 in advance. Therefore, the control unit 151a can determine that the height of the film 100 is lower than the height of the jig frame body 21, that is, the film storage container, based on the information obtained from the measurement unit 25 and the height of the film holding member 241 stored in the ROM 153. 10 is in the initial state.

In the present embodiment, the measuring unit 25 is 14 of the measuring units 25a to 25n. The control unit 151a sequentially transmits ultrasonic waves from the ultrasonic sensors 251a to 251n, and sequentially obtains measurement results from the ultrasonic sensors 251a to 251n. After obtaining the measurement results from all the ultrasonic sensors 251, the control unit 151a sequentially transmits the ultrasonic waves from the ultrasonic sensors 251a to 251n in sequence after a predetermined period of time elapses. The time required for the predetermined time period and the ultrasonic wave transmitted from the ultrasonic sensor 251, for example, after being reflected by the film frame 101 at the initial position until being received by the ultrasonic sensor 251 is substantially the same (including a slightly longer time) Case). Then, the time required to sequentially transmit the ultrasonic waves from the ultrasonic sensors 251a to 251n until the measurement results are sequentially obtained by the ultrasonic sensors 251a to 251n is approximately 20 milliseconds. Therefore, the control unit 151a can obtain the measured value from the measuring unit 25 almost instantaneously.

Then, in the initial state, the control unit 151a controls the driving member 44 to move the film holding member 241 to the insertion position, thereby confirming the actual position of the film holding member 241 (step Step S102).

The processing of step S102 will be described in detail. The control unit 151a drives the actuator 44b to move the rod body 44a in a direction orthogonal to the rods 211, 212, 213, and 214, whereby the film holding member 241 coupled to the rod body 44a is moved from the retracted position to the insertion position. mobile. At the current stage, the jig frame body 21 is located above the container body 11, so that if the film holding member 241 is moved to the insertion position, the ultrasonic wave transmitted from the ultrasonic sensor 251a is moved to the + by the film holding member 241. The z-direction reflection is redirected in the -y direction by the reflecting plate 252a and received by the ultrasonic sensor 251a. Thereby, the measuring unit 25 measures the height of the film holding member 241, and the height is obtained by the control unit 151a.

The distance between the ultrasonic sensor 251a and the reflecting plate 252a is known, and this value is set in advance and is stored in the ROM 153. Therefore, the control unit 151a obtains the height of the film holding member 241 based on the result of the height of the film holding member 241 measured by the measuring unit 25 and the distance between the ultrasonic sensor 251a and the reflecting plate 252a stored in the ROM 153.

After obtaining the height of the film holding member 241, the control unit 151a controls the driving member 44 to move the film holding member 241 from the insertion position to the retracted position. Thereby, the process of step S102 is completed.

After that, the control unit 151a controls the driving member 12 to move the container body 11 (the film storage container 10) upward (+z direction), and continuously determines the height of the groove 101d of the film 100 (step S103).

Since the measuring unit 25 continuously performs the detection, the measuring unit 25 continuously measures the height of the upper surface 101a of the film 100 in this state, and the control unit 151a continuously obtains the height.

The ROM 153 stores the upper surface 101a and the trench 101d of the film 100. The information of the height difference (here, for example, a value of 3 mm). The control unit 151a can calculate the distance between the height of the upper surface 101a and the groove 101d stored in the ROM 153 based on the signal obtained from the measuring unit 25, and the distance between the ultrasonic sensor 251a and the reflecting plate 252a stored in the ROM 153. The height of the groove 101d is obtained continuously (instant).

Further, when the container body 11 is moved upward (+z direction) in step S103, the control unit 151a may drive the actuator 12a, the actuator 12b, and the actuator 12c to measure the measuring portions 25a to 25n, respectively. The height of the upper surface 101a is substantially the same. For example, when the container body 11 or the film frame 101 is distorted, the height of the upper surface 101a is not fixed in the state of being placed on the container body 11, but by driving the actuator 12a, the actuator 12b, respectively The actuator 12c can substantially increase the height of the upper surface 101a, that is, the groove 101d, even when the film frame 101 is distorted. Thereby, the time required for the step of inserting the film holding member 241 into the groove 101d (step S105), which will be described later in detail, can be shortened, and the force and distortion of the film holding member 241 applied to the film frame can be suppressed. Furthermore, step S103 can also be performed simultaneously with step S101.

The control unit 151a determines whether or not the height of the groove 101d obtained in step S103 matches the height of the film holding member 241 obtained in step S102 (step S104). The control unit 151a performs the processing of step S104 for each of the film holding members 241.

When the height of the groove 101d does not coincide with the height of the film holding member 241 (NO in step S104), the control unit 151a returns to the process of step S103.

When the height of the groove 101d coincides with the height of the film holding member 241 (YES in step S104), the control portion 151a controls the driving member 44 to move the film holding member 241 from the retracted position to the insertion position, thereby holding the film grip The holding member 241 is inserted into the groove 101d (step S105). The control unit 151a performs the processing of step S105 for each of the film holding mechanisms 24. borrow Thereby, the film holding member 241 can be surely inserted into the groove 101d.

The control unit 151a determines whether or not all of the film holding members 241 have been inserted into the grooves 101d (step S106). When not all the film holding members 241 have been inserted into the grooves 101d (NO in step S106), the control portion 151a returns to the process of step S103.

When all the film holding members 241 have been inserted into the grooves 101d (YES in step S106), the control unit 151a controls the driving member 12 to move the container body 11 (the film storage container 10) downward (in the -z direction). The height of the upper surface 101a of the film 100 is continuously determined (step S107).

When the container body 11 is moved downward in step S107, the actuator 12b and the actuator 12c may be stopped first and only the actuator 12a may be driven to cause the upper surface 101a to be driven by the actuator 12a. The height of the moving region and its vicinity is lower than the height of the other portions of the upper surface 101a by a predetermined height.

As shown in FIGS. 2 and 3, the position on the xy plane of the actuator 12a is one of the four lead plates 104a of the four lead plates 104a, or the xy plane of the tape 105 for fixing the lead plate 104a to the container body 11. The positions on the top overlap. That is, the position on the xy plane of the upper surface 11a driven by the actuator 12a and the film holding member 241b of the film holding mechanism 24b are inserted into the groove 101d, that is, the film 100 measured by the measuring portion 25b. The positions of the heights of the surfaces 101a are substantially the same.

Therefore, the control unit 151a drives only the actuator 12a at the beginning of step S107 so that the height of the upper surface 101a measured by the measuring portion 25b is higher than the height measured by other measuring portions 25 such as the measuring portions 25e to 25m. The average value is lower than the established height.

As a result, the force can be concentrated on the surface 11a which is located opposite to the actuator 12a. The root portion 104b (see FIGS. 2 and 3) of the tab 104a at a position overlapping the position on the xy plane forms an opportunity to peel the film liner 104 from the adhesive layer 103. Therefore, the film liner 104 can be peeled off from the adhesive layer 103 with a weak force.

Then, the control unit 151a determines whether or not the film liner 104 adhered to the container body 11 has been peeled off from the container body 11 (step S108).

Fig. 11 is a view showing how the control unit 151a moves the container body 11 (the film storage container 10), that is, how the height of the upper surface 101a changes with time. In Fig. 11, the vertical axis represents the distance D between the reflecting plate 252 and the upper surface 101a (see Fig. 8), and the horizontal axis represents time t. Since the measuring unit 25 continuously performs the detection, the control unit 151a continuously obtains the distance D between the reflecting plate 252 and the upper surface 101a based on the signal obtained from the measuring unit 25.

When t=0, when the step S103 is started, the film storage container 10, that is, the film 100 is at the initial position, and the distance D between the reflection plate 252 and the upper surface 101a is i. The distance i is about 50mm.

When t=t1, when all the film holding members 241 have been inserted into the grooves 101d (YES in step S106), the distance D between the reflecting plate 252 and the upper surface 101a at this time is taken as a. In step S103, the container body 11 is moved upward, so that the distance a is smaller than the distance i. At this time, the weight of the film storage container 10 is entirely supported by the film holding member 241.

When t1 < t < t5, the control unit 151a performs a process of moving the container body 11 downward (step S107). Hereinafter, the relationship between the distance D of the reflecting plate 252 and the upper surface 101a and the time t in step S107 will be described in detail.

As shown in FIG. 3, a gap α exists between the position of the side surface 101c of the film 100 and the position of the tape 105. Therefore, even if the control unit 151a moves the container body 11 downward until the film pad 104 in the gap α is lifted up (t1) t T2), the distance D between the reflecting plate 252 and the upper surface 101a is constant and is maintained at a. Further, when t = t2, the film pad 104 in the gap α is finished up.

When the control unit 151a continuously moves the container body 11 downward (t2 < t < t3), the distance D between the reflecting plate 252 and the upper surface 101a gradually increases as the control unit 151a moves the container body 11 downward. .

When the distance D between the reflecting plate 252 and the upper surface 101a is a + Δa (t = t3), the control unit 151a stops the container body 11 from moving downward, and maintains the distance D between the reflecting plate 252 and the upper surface 101a at a + Δ. a. Δa is set to an arbitrary value in advance.

Information about Δa (here, a value) is stored in the ROM 153. The control unit 151a stops the container body 11 downward when the distance D between the reflecting plate 252 and the upper surface 101a reaches a position of a + Δa based on the signal obtained from the measuring unit 25 and the information about Δa stored in the ROM 153. Move.

At t3 During t<t4, the film liner 104 is gradually peeled off from the adhesive layer 103. When the film liner 104 is peeled off from the container body 11 (t = t4), the distance D between the reflecting plate 252 and the upper surface 101a returns from a + Δa to a (t = t5). Further, in Fig. 11, for convenience of explanation, t4 and t5 are slightly separated, but in actuality, the time is extremely short, and t4 and t5 may be substantially the same timing.

The control unit 151a continuously obtains a signal from the measuring unit 25, and continuously obtains the distance D between the reflecting plate 252 and the upper surface 101a. Therefore, when the distance D between the reflecting plate 252 and the upper surface 101a is not a from a + Δa (t < t5), it is determined that the film liner 104 adhered to the container body 11 is not peeled from the container body 11 as the control portion 151a. (No in step S108), when the reflecting plate 252 When the distance D from the upper surface 101a becomes a from a + Δa (t = t5), it is determined that the film liner 104 adhered to the container body 11 has been peeled off from the container body 11 (YES in step S108). By performing the processing according to the distance D between the reflecting plate 252 and the upper surface 101a in this manner, it is possible to determine whether or not the film spacer 104 has been peeled off from the adhesive layer 103 without passing through the operator.

Return to the description of FIG. When the film liner 104 adhered to the container body 11 is not peeled off from the adhesive layer 103 (NO in step S108), the control unit 151a returns to the process of step S107. When the film liner 104 adhered to the container body 11 has been peeled off from the adhesive layer 103 (YES in step S108), the control portion 151a ends the film holding process.

Fig. 12 is a flow chart showing the flow of the film adhesion treatment by the film frame holding device 1. The film adhesion treatment is performed after the film holding process. The following processing is mainly performed by the control unit 151a.

The control unit 151a drives a driving unit (not shown) to rotate the jig frame main body 21 by approximately 90 degrees around the rotation shaft 22, thereby moving the jig frame main body 21 from the peeling position to the adhesion position (step S201). The jig frame body 21 holds the film 100, so that the film 100 is also rotated by approximately 90 degrees together with the jig frame body 21.

Step S201 is t6 in FIG. t At the time of t7. When the jig frame body 21 is rotated from the peeling position, the angle between the direction of gravity and the direction orthogonal to the upper surface 101a of the film 100 starts to change. Therefore, the distance D between the reflecting plate 252 and the upper surface 101a is self-contained. a slightly reduced. Then, if the jig frame body 21 is at the adhesion position (t=t7), the direction of gravity is substantially parallel to the upper surface 101a of the film 100, so that the distance D between the reflection plate 252 and the upper surface 101a becomes b (b<a) .

Returning to the description of FIG. Then, the control unit 151a uses an inspection not shown. The film 100 held by the jig frame body 21 is inspected (step S202). The inspection unit has a transmitting unit that transmits a laser beam or the like, and inspects the film 100 by various methods known in the art. When the film frame holding device 1 has the reflecting plate moving mechanism, the control portion 151a moves the reflecting plate 252 to a position that does not overlap the film frame 101 in step S202.

When it is confirmed that there is no abnormality in the film 100 by the inspection process (step S202), the control unit 151a mounts the jig frame body 21 located at the adhesion position by a moving portion (not shown) by the air blower. The device having the photomask moves in parallel (step S203). Then, the mask and the film 100 are aligned (aligned) (step S204).

After the alignment (step S204), the control unit 151a adheres the film 100 to the photomask (step S205). Since the film liner 104 is peeled off from the film 100, the adhesive layer 103 provided on the lower surface 101b of the film frame 101 is exposed. Therefore, the film 100 is adhered to the reticle by the adhesive layer 103 by pressing the film 100 against the reticle.

In Figure 11, t8 t During t10, the control unit 151a performs the processing of step S205. First, the control unit 151a moves the jig frame main body 21 in parallel in the apparatus on which the photomask is placed by using a moving portion (not shown) to bring the film 100 close to the photomask. Thus, the film 100 abuts against the photomask (t=t9).

The control unit 151a moves the film 100 in the direction toward the mask as described above. However, since the film 100 is in contact with the reticle, the film 100 is pressed against the reticle, and the distance D between the reflecting plate 252 and the upper surface 101a gradually decreases slightly from b (t9 < t < t10).

Since the measuring unit 25 is provided in the jig frame main body 21, the control unit 151a continuously obtains the distance D between the reflecting plate 252 and the upper surface 101a based on the signal obtained from the measuring unit 25.

Then, when the distance D between the reflecting plate 252 and the upper surface 101a obtained from the signal obtained from the measuring unit 25 is smaller than b by Δb (t=t10), the control unit 151a stops thinning. The film 100 is adhered to the photomask (step S205).

Δb is set to an arbitrary value in advance. Information about Δb (here, value) is stored in the ROM 153. The control unit 151a stops the parallel movement of the film 100 when the distance D between the reflecting plate 252 and the upper surface 101a reaches the position of b-Δb based on the signal obtained from the measuring unit 25 and the information about Δb stored in the ROM 153. . Furthermore, the control unit 151a performs this processing for each measurement unit 25. Thereby, the film 100 can be adhered to the mask without passing through the operator.

According to the present embodiment, the film frame 101 can be gripped by peeling the film 100 from the container body 11 without passing through the operator. In particular, by providing the measuring portion 25 for each of the film holding mechanisms 24, the film frame 101 can be held by the film holding mechanism 24 without the operator even when the film 100 is deformed or the like.

Moreover, according to the present embodiment, since the measuring unit 25 continuously measures the height of the film frame 101, it can be determined that the film 100 can be peeled from the container body 11 without passing through the operator.

Further, in the present embodiment, the film holding member 241 can move between the retracted position and the insertion position, and can also move in the vertical direction (z direction). For example, an elastic member that can be elastically deformed in the z direction is provided at a joint portion between the film holding member 241 and the rod body 44a. When a force in the -z direction is applied to the film holding member 241, the elastic member is deformed. When the film holding member 241 is moved in the -z direction, when the force in the -z direction is released, the elastic member returns to the original shape, whereby the film holding member 241 moves in the +z direction. Thereby, when a strong force in the vertical direction is applied to the film holding member 241, deformation, breakage, and the like of the film holding member 241 can be prevented.

<Second embodiment>

In the first embodiment, by moving the rods 212, 213, and 214 in parallel, it is possible to correspond to a plurality of species. A film of the size, but not necessarily capable of corresponding to a plurality of films of various sizes.

The second embodiment makes the configuration simpler. Hereinafter, the film frame holding device 2 of the second embodiment will be described. Further, the difference between the film frame holding device 1 of the first embodiment and the film frame holding device 2 is only the jig frame body. Therefore, the film frame holding device 2 will be described only with respect to the jig frame body. In the description of the jig frame body of the film frame holding device 2, the same portions as those of the film frame holding device 1 will be denoted by the same reference numerals and will not be described.

Fig. 13 is a perspective view showing the outline of the jig frame main body 21A of the film frame holding device 2. The jig frame body 21A mainly has a rod 211A, a rod 213A, and a rod 214A. The rod 213A and the rod 214A are fixed to the rod 211A so as to protrude from the rod 211A. The longitudinal direction of the rod 213A and the rod 214A is substantially orthogonal to the longitudinal direction of the rod 211A. The rod 213A is provided with film holding mechanisms 24d and 24e and measuring portions 25d and 25e (not shown in FIG. 13), and the film holding mechanisms 24m and 24n and the measuring portions 25m and 25n are provided in the rod 214A (FIG. 13). Not shown).

According to the present embodiment, it is possible to provide a film frame holding device that grips the film frame 101 without peeling the film 100 from the container body 11 without passing through an operator with a simpler configuration.

The embodiments of the present invention have been described in detail above with reference to the drawings, but the specific configuration is not limited to the embodiments, and design changes and the like within the scope of the gist of the invention are also included. If you are a peer, you can change, add, replace, etc. the elements of the implementation.

Further, in the present invention, the concept of "substantially" includes not only strictly the same, but also errors or distortions that do not affect the degree of identity. For example, the concept of substantially parallel is not limited to being strictly parallel, but also includes errors of, for example, a few degrees. Further, for example, when it is simply expressed as parallel or orthogonal, it is considered to be not only in the strict sense of parallel or orthogonal, but also includes a large Parallel, roughly orthogonal, etc. Further, in the present invention, "nearby" means an area including a certain range (which can be arbitrarily set) in the vicinity of the reference position. For example, the vicinity of A refers to a region within a certain range near A, and the concept may include A or not A.

1‧‧‧Film frame holding device

10‧‧‧Film storage container

11‧‧‧ container body

20‧‧ ‧ fixture frame

21‧‧ ‧ fixture frame body

22‧‧‧Rotary axis

23‧‧‧Abutment components

211‧‧‧ great

212‧‧‧ stick

213‧‧‧ great

214‧‧‧ great

215‧‧‧ box

Claims (15)

A film frame holding device comprising: a film frame having a substantially hollow cylindrical shape; and a first end surface provided with a film for covering the hollow portion, and a bonding member and the first end surface a substantially parallel second end surface and a side surface on which the groove is formed; a protective sheet adhered to the adhesive member; and a container body having the first end surface substantially horizontally upward and the second end surface substantially horizontally downward a part of the protective sheet is fixed to the film frame; the first driving unit moves the container body in a direction perpendicular to the first surface, that is, in a vertical direction; and the jig frame is provided in the above a plurality of rods that are substantially horizontally held at predetermined intervals, a plurality of film holding members for each of the two rods, and a plurality of film holding members for holding the film holding member above the container body a member is inserted into a second driving unit that moves in a substantially horizontal direction between a first position of the groove and a second position where the film holding member is not inserted into the groove, and the second driving unit is for each The plurality of film holding members are provided; the measuring portion has a plurality of distance measuring sensors, and the distance measuring sensor is respectively provided for each of the plurality of film holding members, when the film holding When the member is located at the first position, the height of the film holding member in a substantially vertical direction is continuously measured, and when the film holding member is located at the second position, the height of the first end face is continuously measured; and the control unit The height of the film holding member and the groove is determined based on the measurement result continuously measured by the measuring unit, and the first driving unit and the second driving unit are controlled to move the container body upward. Moving, while the height and upper surface of the above film holding member When the heights of the grooves are substantially the same, the film holding member is moved from the second position to the first position, and when all of the film holding members are moved to the first position, the container body is moved downward. The film frame holding device according to claim 1, wherein the control unit moves the container body downward by a first distance when the film holding member has moved to the first position. When the first driving unit is controlled to control the first driving unit, the protective member and the adhesive member are separated from each other when the height of the first end surface has been moved upward from the measuring unit. The film frame holding device according to claim 1, wherein the container body has a substantially rectangular upper surface on which the film frame is placed, and the first driving portion has a center of the first side of the upper surface a first actuator that moves in the vicinity, and a second actuator and a third actuator that move closer to the end than the center of the second side that is substantially parallel to the first side of the upper surface, The control unit controls the first actuator, the second actuator, and the third actuator, respectively. The film frame holding device according to the third aspect of the invention, wherein the control unit moves the container body upward, the first actuator, the second actuator, and the third Controlling the relative position of the film holding member and the groove obtained by the measurement result of the first ranging sensor of the plurality of ranging sensors included in the measuring unit, The relative position of the film holding member and the groove determined by the measurement result of the second distance measuring sensor different from the first distance measuring sensor is substantially the same. The film frame holding device of claim 3, wherein the protective film is in the position The control unit drives the first actuator first when the container body is moved downward in the vicinity of the center of the first side and is fixed to the upper surface. The film frame holding device according to claim 4, wherein the protective sheet is located near the center of the first side and is fixed to the upper surface, and the control unit is configured to move the container body downward. The first actuator described above is driven first. The film frame holding device according to any one of claims 1 to 6, wherein the jig frame has a rotating shaft disposed near an end of the two rods, and the two rods are disposed to be The axis of rotation is rotated approximately 90 degrees from the center. The film frame holding device according to claim 7, comprising: a positioning member, wherein when the two rods are arranged substantially horizontally, the end portions of the two rods on which the side of the rotating shaft is not provided are Positioning is performed at a position in which the first end faces are orthogonal to each other. The film frame holding device according to any one of claims 1 to 6, wherein the jig frame has the first bar and the second bar, and the first bar and the second bar The third rod and the fourth rod are substantially orthogonal to each other, and the first rod, the second rod, and the third rod are respectively provided to be movable in a direction substantially perpendicular to the longitudinal direction. The film frame holding device according to claim 7, wherein the jig frame has the first bar and the second bar, and the first bar and the second bar are substantially orthogonal to each other 3 rods and 4th rods, wherein the first rod, the second rod, and the third rod are respectively arranged to be movable and lengthwise In the direction of roughly orthogonal. The film frame holding device of claim 8, wherein the jig frame has the first bar and the second bar, and the first bar and the second bar are substantially orthogonal to the first bar and the second bar The third rod and the fourth rod are provided so that the first rod, the second rod, and the third rod are movable in a direction substantially perpendicular to the longitudinal direction. The film frame holding device according to any one of claims 1 to 6, wherein the jig frame has a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. The film frame holding device according to claim 7, wherein the jig frame has a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. The film frame holding device according to claim 8, wherein the jig frame has a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. A film frame holding method is characterized in that a plurality of film holding members are disposed in a first position of the film holding member inserted into a groove, and the plurality of film holding members are disposed at a predetermined interval with respect to the jig frame Each of the two rods held substantially horizontally is provided with a plurality of rods, and the fixture frame is disposed above the container body, and the container body is fixed with a part of the protective sheet adhered to the bonding member, and the film frame is substantially horizontal with the first end surface The first end surface of the film frame is placed in a substantially hollow state, and the film frame is substantially hollow, and has a first end surface provided with a film for covering the hollow portion, and the adhesive member is provided. And the second end surface substantially parallel to the first end surface and the side surface on which the groove is formed are measured by one measuring sensor for each of the plurality of film holding members As a result, the height of the film holding member is determined, and the film holding member is moved from the first position to the second position where the film holding member is not inserted into the groove, and the container body is moved upward. Obtaining a height of the groove according to a measurement result of the distance measuring sensor, and if the height of the groove obtained is substantially the same as a height of the film holding member, the film holding member is made from the second The position moves to the first position, and when the film holding member moves to the first position, the first driving unit is controlled to move the container body downward.