TW201640219A - Substrate container, seal member, door assembly and method of assembling the same for a reticle pod - Google Patents

Abstract

Mechanical venting arrangements for cracking the seal of a substrate container. In one substrate container, mechanical venting is provided by a rocker arm that is rotationally held in a configuration that seals a venting aperture when the door and cover of the substrate container are latched together. The rocker arm is biased, by gravity and/or by active biasing, to an open or vented configuration upon decoupling of the door and cover of the substrate container. In another substrate container, mechanical venting is provided by a sliding actuator valve assembly that is passively actuated by a latch of the substrate container. A sliding actuator drives a plunger assembly to close a venting aperture of the substrate container. Upon release of the latch, energy stored in a biasing element within the plunger assembly drives the sliding actuator into a retracted configuration, thereby opening the venting aperture.

Description

Mechanical through hole of the mask case [Priority statement]

The present application claims the right to file a US Provisional Patent Application No. 62/135,101, filed on March 18, 2015, and the US Provisional Patent Application No. 62/191,158, filed on July 10, 2015, The disclosure of the patent application is hereby incorporated by reference in its entirety herein.

The present invention relates generally to substrate carriers, and more particularly to seals and venting systems for substrate carriers.

Semiconductor substrates are typically shipped in substrate carriers that are assembled to interface with automated equipment such as load ports. For larger substrates (eg, 300 mm wafers and larger wafers), automation equipment typically includes mechanical interlocks that are used to secure the door to the automation equipment, or the quality of the vehicle door. Enough to enable reliable separation. However, for smaller substrate carriers (eg, 150 mm to 200 mm photomask boxes), the automated equipment does not include a mechanical interlock for the door. Applicants have discovered that in the absence of such mechanical interlocks, the substrate carrier door can sometimes be lifted away from the automated equipment when the door assembly is removed or attempted to remove the housing assembly. When the quality of the door is not enough to overcome the sealed container This situation occurs when the internal pressure that occurs when it is turned on changes. Such lifting of the substrate carrier may cause damage to the processing operation and may cause damage to the payload if the door assembly is hung upside down on the housing assembly.

A substrate carrier capable of repeatedly detaching the housing assembly from the door assembly without the aid of a mechanical interlocking device would be welcome.

Various embodiments of the present invention comprise a plurality of mechanical vents that are maintained in a closed configuration when a cover is coupled to a door of the substrate container, but are biased open after the cover is released from the door Become a form of ventilation.

The inventors have unexpectedly discovered that the seals of certain embodiments disclosed herein provide the sealing effect that the seal does not readily release or "crack" when attempting to open the substrate carrier. That is, the housing assembly is not separated from the door assembly substrate, but the entire carrier assembly can be lifted off or partially lifted off the loading port during the opening process, due to the tightness of the seal, the total cover The door and door assemblies are held together by suction. Mechanical ventilation of the substrate container allows the lid to seal easily between the doors, which does not lift the door away from the load port device and eliminates the need for an interlock.

Structurally, various embodiments of the present invention relate to a substrate container including a bottom door including a door frame and a door panel, the door frame defining a latching recess, the door panel defining a vent, one of the The upper housing includes a latch mechanism that engages the latch recess. a continuous sealing member extending from one of the bottom door and the upper housing to contact the other of the upper housing and the bottom door to define a continuous seal between the bottom door and the upper housing line. In an embodiment, a swing valve assembly is pivotally mounted to the bottom door and includes a bar a rod portion and a plug portion interfacing the latching recess, the plug portion for selectively closing the venting opening of the door panel. In some embodiments, the lever portion is configured to engage the latch mechanism, and when the latch mechanism is engaged in the latch recess, the swing valve assembly rotates the plug portion to enable the passage One of the closed positions of the stomata closure. The lever portion is configured to disengage the latch mechanism, and when the latch mechanism is disengaged from the latch recess, the swing valve assembly rotates the plug portion away from the vent to the vent Open one of the ventilation forms.

In some embodiments, the oscillating valve assembly includes a receptacle portion coupled to the lever portion and the plug portion is a ball disposed within the receptacle portion. When the plug portion is in the closed configuration, the balls may directly contact one of the vent holes. The ball and/or the door panel may be metal, and the periphery of the ball and the vent has a distance from 0.5×10 ^-6 inches to 8×10 ^-6 inches and contains 0.5×10 ^-6 inches. And a square root surface finish of one of the ranges of 8 x 10 ^-6 inches. In some embodiments, a compliant sealing member is configured to contact the plug portion and the door panel to seal the vent when the plug portion is in the closed configuration. In one embodiment, the compliant sealing member is an O-ring.

In some embodiments, the door frame is integral with the door panel. In other embodiments, the bottom door is a door assembly, the door frame and the door panel being detachable, the door frame including a continuous embedded flange portion for supporting the door panel. The continuous sealing member includes an inlaid flange portion that is captured between the door panel and the inlaid flange of the door frame. The continuous sealing member provides a continuous seal between the door panel and the mounting flange of the door frame.

In various embodiments of the present invention, a substrate container is disclosed having a bottom door including a door frame and a door panel defining a latching recess, the door panel defining a venting aperture. An upper housing includes a latch mechanism that engages the latch recess. a continuous sealing member extending from one of the bottom door and the upper housing to contact the other of the upper housing and the bottom door to define a continuous seal between the bottom door and the upper housing line. A sliding actuator is coupled to the bottom door and interfaces with the latching recess and includes a ramp. A plunger is configured to selectively close the vent and engage the ramp to actuate from a closed configuration to an open configuration. A biasing member is operatively coupled to the plunger to apply a biasing force on the plunger toward the open configuration. The slide actuator is configured to engage the latch mechanism, the ramp maintaining the plunger in the closed configuration when the latch mechanism is engaged in the latch recess, and the slide actuator is configured To disengage the latch mechanism, the biasing force acts on the ramp to translate the slide actuator in a direction away from one of the plungers and drive the plunger to the open configuration.

In some embodiments, the bevel defines an angle between 30 degrees and 60 degrees and including one of 30 degrees and 60 degrees with respect to the direction of coincidence. The sliding actuator can be made of a low friction material (e.g., a polyoxymethylene, or a polytetrafluoroethylene filled polymer).

In various embodiments of the present invention, a sealing member for a photomask cartridge is disclosed, comprising an axial portion continuously surrounding a central axis and substantially parallel to the central axis, the axial portion There is a first end and a second end. A continuous outwardly extending transverse portion extends from the first end of the lateral portion in a direction away from the central axis. A plurality of tab portions extend from the second end of the axial portion, the tab portions being substantially parallel to the central axis.

In various embodiments of the present invention, a sealing member for a photomask cartridge is disclosed, comprising an axial portion continuously surrounding a central axis and substantially parallel to the central axis, the axial portion There is a first end and a second end. A continuous outwardly extending transverse portion extends from the first end of the lateral portion in a direction away from the central axis. A continuous inwardly extending transverse portion extends from the second end of the transverse portion in a direction toward the central axis, the continuous inwardly extending transverse portion being substantially orthogonal to the axial portion. In some embodiments, the various sealing structures The article may be made of one of a fluoroelastomer and an ethylene-propylene-diene monomer.

In various embodiments of the present invention, a door assembly for a reticle housing includes a frame structure including an outer frame portion that continuously surrounds a central axis and has a shoulder portion. The shoulder defines an opening, an inner lattice portion bridges the outer frame portion and traverses the opening, the inner lattice portion defining a mounting surface defining a plane and opposite to the convex portion The shoulder is concave. A continuous inserting flange extends from the outer frame portion toward the central axis, the continuous inserting flange defining a flat alignment surface that is recessed relative to the mounting surface of the inner lattice portion. A door panel is disposed on the mounting surface of the inner lattice portion and extends over the flat alignment surface of the continuous embedded flange. A sealing member includes: an axial portion continuously surrounding a central axis and substantially parallel to the central axis; and a continuous inwardly extending lateral portion from which the axial portion is oriented toward one of the central axes and orthogonal Extending in the axial portion, the continuous inwardly extending transverse portion is substantially orthogonal to the axial portion. The continuous inwardly extending transverse portion is captured and compressed between the door panel and the flat alignment surface of the continuous embedded flange. In some embodiments, a continuous gap is defined between an outer perimeter of the door panel and the continuous outer frame portion. The axial portion of the sealing member extends through the continuous gap.

In various embodiments of the present invention, a door assembly for a reticle housing is disclosed, comprising a frame structure including an outer frame portion continuously surrounding a central axis and having a convex portion a shoulder defining an opening, an inner lattice bridging the outer frame portion and traversing the opening, the inner lattice defining a mounting surface defining a plane and opposite the shoulder Depression. A door panel is disposed on the mounting surface of the inner lattice portion, and the door panel cooperates with the outer frame portion to define a continuous gap therebetween. A sealing member includes: an axial portion continuously surrounding the central axis and substantially parallel to the central axis; and a plurality of tab portions extending from one end of the axial portion, the tab portions being substantially parallel to the Central axis. The secret A sealing member is disposed in the continuous gap, and the tab portions extend into the inner lattice portion. In some embodiments, the outer frame portion includes a plurality of barbs that contact the axial portion of the sealing member.

In various embodiments of the present invention, an assembly method for a door assembly of a reticle housing includes attaching a door panel to an inner frame of one of the frame structures for outer periphery of one of the door panels A gap is defined between the outer frame of one of the frame structures; a continuous sealing member is embedded in the gap to extend a plurality of tabs depending from the continuous sealing member into the inner lattice portion. In some embodiments, at least one of the tabs is grasped to draw the continuous seal into the continuous gap.

40‧‧‧Substrate container

40a‧‧‧Substrate container

40b‧‧‧Substrate container

42‧‧‧ bottom door

44‧‧‧Upper casing

45‧‧‧central axis

Room 46‧‧

48‧‧‧Substrate

52‧‧‧Frame structure

52a‧‧‧Frame structure

52b‧‧‧Frame structure

54‧‧‧door panel

56‧‧‧Internal

58‧‧‧External surface

62‧‧‧Edge periphery

64‧‧‧Ventinel

66‧‧‧ Around the hole

68‧‧‧through hole

72‧‧‧Filter housing

Around 82‧‧

84‧‧‧Latch groove

86‧‧‧Latch mechanism

88‧‧‧Latch

100‧‧‧Continuous sealing member

100a‧‧‧Continuous sealing member

100b‧‧‧Continuous sealing member

102‧‧‧Continuous sealing line

120‧‧‧swing valve assembly

120a‧‧‧Swing valve assembly

122‧‧‧Swing arm assembly

124‧‧‧ pivot

126‧‧‧Leverage

128‧‧‧ Plugging Department

130‧‧‧Closed form

131‧‧‧Open or ventilated form

132‧‧‧ 容座

133‧‧‧Spring components

134‧‧‧ sphere

135‧‧•Spring loaded cantilever

137‧‧ ‧ spring

150a‧‧‧ door assembly

150b‧‧‧ door assembly

152‧‧‧O-ring

152a‧‧‧washer

152b‧‧‧ hole ring

153‧‧‧Inlays

154‧‧‧ countersunk hole

156‧‧‧Flange

200‧‧‧Sliding actuator valve assembly

202‧‧‧Sliding actuator

204‧‧‧Plunger assembly

206‧‧‧ Ontology

208‧‧‧Inlay mat

212‧‧‧ center cam

214‧‧‧lateral cam

216‧‧‧Alignment surface

218‧‧‧Support

222‧‧‧Slim slot

224‧‧‧ main axis

226‧‧‧ actuation axis

232‧‧‧Bevel

234‧‧‧Bevel

236‧‧‧ actuation direction

238‧‧ ‧ hub

240‧‧‧fasteners

242‧‧‧ hollow cylindrical body

243‧‧‧fasteners

244‧‧‧Open end

246‧‧‧Installation end

248‧‧‧ cavity

252‧‧‧Plunger axis

254‧‧‧Cap

256‧‧‧ holes

258‧‧‧opposite arm

262‧‧‧lateral axis

264‧‧‧ Spring

266‧‧‧Plunger sphere

268‧‧‧Valve components

272‧‧‧Pushing valve

274‧‧‧ rod

276‧‧ dish or cup

278‧‧‧ bulbous end

282‧‧‧ collar

284‧‧‧End opening slot

286‧‧‧ retraction direction

302‧‧‧External Frame Department

304‧‧‧Neig Department

306‧‧‧ Shoulder

308‧‧‧ openings

312‧‧‧cross members

314‧‧‧ aperture

316‧‧‧Installation surface

End of 318‧‧‧

322‧‧‧door panel receptacle

324‧‧‧ fastener holder

326‧‧‧Contact edge

328‧‧‧Common plane

330‧‧‧Extended lateral section

332‧‧‧Axial section

334‧‧‧ radially inward

336‧‧‧ first end of the axial section

338‧‧‧Inward extension of the lateral section

340‧‧‧second end of the axial section

342‧‧‧Uplifted lips

344‧‧‧Axial thickness

346‧‧‧ embedded flange

348‧‧ ‧ flat alignment surface

352‧‧‧Recessed notch

354‧‧‧Recessed notch

360‧‧‧ fixture

362‧‧‧ hub

364‧‧‧ alignment pin

366‧‧‧Installation holes

368‧‧‧ Alignment holes

372‧‧‧Protruding

374‧‧‧ Barb

376‧‧‧radial inward

382‧‧‧Continuous slot

Fa‧‧‧ motivation

Fc‧‧‧compression

Fp‧‧‧ parallel force component

Fr‧‧‧ reaction

XXII-XXII‧‧‧ interception line

XXXIII-XXXIII‧‧‧ interception line

1 is a perspective view of an unassembled substrate container according to various embodiments of the present invention; and FIG. 2 is a perspective view of an unassembled substrate container according to an embodiment of the present invention; 2 is a bottom perspective view of an assembled substrate container according to an embodiment of the present invention; and FIG. 4 is an enlarged partial bottom perspective view of a swing valve assembly shown in FIG. 2 according to an embodiment of the present invention; Figure 5 is an independent perspective view of one of the swinging arms of the swing valve assembly shown in Figure 2, showing an optional spring-loaded cantilever; Figure 6 is a perspective view of the present invention. 2 is a partial cross-sectional view of the substrate container shown in FIG. 2, showing a swing valve assembly in a closed configuration; and FIG. 7 is a partial cross-sectional view showing a door assembly according to an embodiment of the present invention. , FIG. 8 is a partial cross-sectional view of the door assembly according to an embodiment of the present invention, wherein a swing valve assembly has a vent hole and a compliant valve. 9 and 10 are cross-sectional views of an alternative compliant sealing arrangement in accordance with various embodiments of the present invention; and FIG. 11 is a bottom perspective view of a substrate container in accordance with an embodiment of the present invention, the substrate The container has a sliding actuator actuator assembly arrangement for venting the substrate container; FIG. 12 is an enlarged partial bottom perspective view of the substrate container of FIG. 11; and FIG. 13 is an embodiment of the present invention, 11 is a perspective partial cross-sectional view of the slide actuator valve assembly; and FIG. 14 is a plan view of a slide actuator of a slide actuator valve assembly shown in FIG. 11 in an embodiment of the present invention. Fig. 15 is a bottom perspective view of the sliding actuator shown in Fig. 14; Fig. 16 is a view showing the sliding actuator valve assembly shown in Fig. 11 in an embodiment of the invention. Top view of a hollow cylindrical body of a plunger assembly Figure 17 is a bottom perspective view of the hollow cylindrical body shown in Figure 16 in an embodiment of the present invention; and Figure 18 is a view of the first embodiment of the present invention during actuation of a venting opening Figure 11 is a schematic view of the sliding actuator valve assembly; Figure 19 is a schematic view of the sliding actuator valve assembly shown in Figure 11 during release of the vent opening in an embodiment of the present invention; Figure 20 is a schematic representation of a sliding actuator valve assembly of Figure 11 in accordance with an embodiment of the present invention; and Figure 21 is an illustration of one embodiment of the present invention having an inwardly extending transverse portion An independent perspective view of the continuous sealing member; Fig. 22 is a partial cross-sectional view of the continuous sealing member taken along line XXII-XXII shown in Fig. 21 in an embodiment of the present invention; and Fig. 23 is a view of the present invention. In the embodiment, there is an independent perspective view of a frame structure of one of the embedded flange portions; and FIG. 24 is an exploded perspective view of the door assembly of the continuous sealing member shown in FIG. 21 according to an embodiment of the invention. Figure 25 is a perspective exploded view of the door assembly shown in Figure 24; and Figure 26 is an enlarged partial cross-sectional view of the assembled door assembly shown in Figure 24 in an embodiment of the present invention; Figure 27 is an independent perspective view of a continuous sealing member having a plurality of axially extending tab portions in an embodiment of the present invention; and Figure 28 is a continuous seal shown in Figure 27 in accordance with an embodiment of the present invention. One-dimensional exploded view of a door assembly of a component; 9 is an enlarged partial perspective view of a door frame shown in FIG. 28 having a plurality of barb elements in an embodiment of the present invention; and FIG. 30 is a perspective exploded view of the door assembly shown in FIG. Figure 31 is a view showing the door assembly of Figure 28 which is fully assembled in an embodiment of the present invention. Fig. 32 is an enlarged partial perspective view of the door assembly of Fig. 31 in an embodiment of the invention, wherein a tab portion protrudes into the door frame; and Fig. 33 is in the present In an embodiment of the invention, an enlarged partial cross-sectional view of the door assembly shown in Fig. 31 taken along line XXXIII-XXXIII of Fig. 32.

Referring to Figure 1, a substrate container 40 configured to be mechanically vented in accordance with various embodiments of the present invention is illustrated. The substrate container 40 includes a bottom door 42 and an upper housing 44 that are axially aligned with the upper housing 44 about a central axis 45 and cooperatively define a chamber 46 (Fig. 6) for use in the chamber 46 A substrate 48 is held inside. The bottom door 42 includes a frame structure 52 and a door panel 54 having an inner face 56, an outer face 58 (Fig. 2) and an edge perimeter 62 (Fig. 7). The edge periphery 62 bridges the inner face 56 with External face 58. The door panel 54 defines a venting aperture 64 that extends through the door panel 54 to define a bore perimeter 66. The door panel 54 can also define a plurality of through holes 68 that pass through the inner face 56 and the outer face 58 for mounting the filter housing 72 and/or other cleaning appurtenance.

The frame structure 52 includes a perimeter 82 that defines a plurality of latch recesses 84. The upper housing 44 includes a latch mechanism 86 having a plurality of latches 88 that engage the latch recesses 84. A continuous sealing member 100 extends from the bottom door 42 to contact the upper housing 44 when the upper housing 44 is assembled. Although the embodiment provided herein illustrates the sealing member 100 as being mounted to the bottom door 42 and extending from the bottom door 42, the present invention also encompasses a sealing member that is mounted to and extends from the upper housing 44. The sealing member 100 selectively provides a continuous seal line 102 (Fig. 6) between the bottom door 42 and the upper housing 44 to isolate the chamber 46 from the surrounding environment. An example for the sealing member 100 and The non-limiting material is a fluoroelastomer (e.g., VITON® available from Dupont Corporation), or a general purpose ethylene-propylene-diene monomer, or a similar elastomeric polymer.

Referring to Figures 2 through 7, there is shown a substrate container 40a having a swing valve assembly 120 for venting chamber 46 in accordance with an embodiment of the present invention. Substrate container 40a includes the same components and attributes as substrate container 40, and such components and attributes are indicated by the same reference numerals. The swing valve assembly 120 includes a swing arm assembly 122 that is mounted to the bottom door 42 about a pivot 124 that includes a lever portion 126 that extends to the latch recess 84 One of the latching recesses 84 is interfaced in one of the other ways. The lever portion 126 is configured to engage one of the latches 88 of the latch mechanism 86. The oscillating arm assembly 122 also includes a plug portion 128 that is configured to selectively close the venting opening 64 of the door panel 54.

In use, when the latch 88 of the latch mechanism 86 engages within the latch recess 84, the latch 88 actuates the lever portion 126 of the swing arm assembly 122 to rotate about the pivot 124 to cause the plug portion 128 is rotated to close one of the vents 64 of the door panel 54 to form 130 (Fig. 6). Upon disengagement of the latch mechanism 86, the latch 88 retracts from the latch recess 84, thereby releasing the lever portion 126 of the swing arm assembly 122 and enabling the lever portion 126 to rotate into the latch recess 84. This action rotates the plug portion 128 away from the venting opening 64 to an open or vented configuration 131, thereby providing the venting opening 64 to the surrounding environment (Fig. 7).

In various embodiments, the oscillating arm assembly 122 includes a receptacle 132 that is coupled to or integral with the lever portion 126 and that includes a ball 134 disposed in the receptacle 132. In some embodiments, the size of the ball 134 is smaller than the receptacle 132, and the ball 134 can move within the receptacle 132. Enabling the ball 134 to move within the receptacle 132 allows the ball 134 to self-align within the vent 64 when the swing valve assembly 120 is in the closed configuration 130.

The ball 134 can comprise a metallic material such as a stainless steel or other alloy. In certain embodiments, when in the closed configuration 130, the plug portion 128 or the ball 134 directly contacts the bore perimeter 66 of the vent 64. In some embodiments, the sphere 134 is metallic and coated with a substance (eg, a polymer) to provide a surface having a compliance to better seal the aperture when in the closed configuration 130. . In various embodiments, the plug portion 128 or the ball 134 is made of a resilient ball (eg, VITON®).

Functionally, the weight of the ball 134 (e.g., when a metal ball is used) can provide an imbalance around the pivot 124 of the oscillating arm assembly 122, which is biased toward the open configuration 131 by gravity. Offset. The present invention contemplates other biasing mechanisms for biasing the swing valve assembly 120 in the open configuration 131, such as a spring member 133 configured to bias the pivot 124 (shown in FIG. 7); Or a spring loaded cantilever 135 coupled to the receptacle 132 and having a spring 137 against the bottom door 42. The weight of the ball 134 also helps prevent the ball 134 from being clamped in the vent 64 due to suction when the pressure in the chamber 46 is below atmospheric pressure. The intermetallic contact between the ball 134 and the vent 64 eliminates the elastomer that may cause a contamination concern. In addition, the elastomer may become tacky under long-term compression contact. Therefore, an intermetallic seal can be more easily broken than one seal with an elastomer.

In various embodiments, the bottom door 42 is a door assembly 150 in which the door panel 54 is formed separately from and/or detachable from the frame structure 52. The door panel 54 can be a solid (homogeneous) metal or non-metallic material, or a composite (non-homogeneous) material, and can be a rectangular panel having a plurality of rounded corners. Door panel 54 can be a metallic material such as a stainless steel, aluminum or other alloy. Door panels of different materials and/or configurations may also be implemented.

For embodiments in which the ball 134 is metallic and is placed directly in the closed configuration 130 on the hole perimeter 66 of the vent 64, the ball 134 and the hole perimeter 66 are finished to provide one of the adequate seals in the closed configuration 130. Smoothness. In certain embodiments, the surfaces are refined to one of the root mean squares from 0.5 microinch (μin) to 16 microinch and contain 0.5 microinch and 16 microinch. (root-mean-squared; RMS) surface finish. In certain embodiments, the surfaces are refined to a range of 4 microinch to 16 microinch and comprise a root mean square surface finish of 4 microinch and 16 microinch. In certain embodiments, the surfaces are refined from 0.5 microinch to 8 microinch and comprise a root mean square surface finish of 0.5 microinch and 8 microinch. In this document, a range of "including" includes the endpoint values of the ranges and all values between the endpoint values. The 1 micro-inch system is ^10-6 inches.

Referring to Figure 8, there is shown an oscillating valve assembly 120a including a compliant seal in accordance with one embodiment of the present invention. The swing valve assembly 120a includes the same components and attributes as the swing valve assembly 120, and such components and attributes are indicated by the same reference numerals. The oscillating valve assembly 120a also includes a compliant sealing member 152 that is configured to contact the plug portion 128 and the door panel 54 thereby venting the venting arm assembly 122 in a closed configuration 130 64 provides an enhanced seal. In the illustrated embodiment, the compliant member 152 is an O-ring that is used to line the inner diameter of the vent 64. The O-ring 152 is captured between an insert 153 and a filter housing 72 formed at a lower end of the venting opening 64 and the filter housing 72 is secured to the interior face 56 of the door panel 54. The present invention also contemplates other compliant members and arrangements comprising: an outwardly facing washer 152a disposed within a counterbore 154 surrounding a venting opening 64 (Fig. 9); or a grommet 152b It is configured to extend through the vent 64 and has a plurality of flanges 156 that grip the inner face 56 and the outer face 58 of the door panel 54 (Fig. 10). The compliance of a compliant member can also be relatively soft (eg, rubber and elastomer, such as for O-rings) to relatively rigid (eg, polymers and fluoropolymers such as Teflon). Significantly changed. One non-limiting example of the hardness of the compliant member 152, 152a or 152b is from 60 Shore A The hardness is measured to 120 Rockwell R hardness and includes a range of 60 Shore A durometer hardness and 120 Rockwell R hardness.

Referring to Figures 11 through 17, there is shown a substrate container 40b for implementing a sliding actuator valve assembly 200 in accordance with one embodiment of the present invention. The sliding actuator valve assembly 200 includes a sliding actuator 202 that is mounted to the underside of the bottom door 42 and engages a plunger assembly 204. The plunger assembly 204 extends through the venting opening 64 in the bottom door 42.

In the illustrated embodiment, the sliding actuator 202 includes a body 206 having an engagement pad 208 on one end and a central cam 212 on an opposite end. A pair of lateral cams 214 extend from the body 206. In some embodiments, the lateral cam 214 is separated from the one of the alignment faces 216 of the body 206 by the abutment 218. In the illustrated embodiment, the body 206 defines an elongated slot 222 having a major axis 224 that coincides with the coincident axis 226 of the sliding actuator 202. The center cam 212 defines a ramp 232 that slopes away from the alignment surface 216 of the body 206. The transverse cam 214 also defines a plurality of ramps 234. The ramps 232 and 234 are inclined away from each other in a direction of coincidence 236 (deviation). In various embodiments, the ramps 232 and 234 define an angle from one of 30 degrees to 60 degrees and including one of 30 degrees and 60 degrees with respect to the actuation axis 226. The sliding actuator 202 can be mounted to a hub 238 defined by the frame structure 52 that extends substantially from the outer face 58 of the door panel 54. In various embodiments, the hub 238 is threaded to receive a fastener 240.

As shown in Figures 16-20, the plunger assembly 204 includes a hollow cylindrical body 242 defining an open end 244, a mounting end 246 and defining a cavity about a plunger axis 252. 248. In certain embodiments, the mounting end 246 includes a cap portion 254 that defines a bore 256 therethrough that concentrically surrounds the plunger axis 252. A pair of opposed arms 258 extend laterally from the cylindrical body 242 about a transverse axis 262 that is orthogonal to the plunger axis 252. The plunger assembly 204 includes a spring 264 and a plunger ball 266, a spring 264 is disposed within a hollow cylindrical body 242 that concentrically surrounds the plunger axis 252, the plunger ball 266 being aligned with the plunger axis 252 and proximate the open end 244 (Fig. 20). The plunger ball 266 is sized to facilitate translation within the hollow cylindrical body 242 along the plunger axis 252. A valve member 268 is mounted to the cap portion 254 of the cylindrical body 242. In the illustrated embodiment, the valve member 268 is a poppet valve 272 having a stem 274 and a disc or cup 276 that is sized and configured to selectively cover the vent 64. The stem 274 can include a bulbous end 278 (Fig. 13) that is configured to be pushed through the aperture 256 of the cap portion 254 (Fig. 16) and toward the lumen 248 of the hollow cylindrical body 242. The middle is expanded to fix the valve member 268 to the cap portion 254 (Fig. 13).

In the illustrated embodiment, the frame structure 52 includes a set of rings 282 on the outer face 58 of the door panel 54 that align with the vents 64 and surround the vents 64 (Fig. 12). Collar 282 defines a plurality of diametrically opposed end opening slots 284. The plunger assembly 204 is disposed within the collar 282 such that the opposing arms 258 of the plunger assembly 204 extend through the radially opposite end opening slots 284. The end opening slot 284 of the collar 282 and the opposing arm 258 of the plunger assembly 204 are sized to enable the opposing arm 258 to freely translate in one of the end opening slots 284 in a direction parallel to the plunger axis 252. . The collar 282 maintains the plunger assembly 204 in rotational orientation about the plunger axis 252, and the opposing arms 258 of the jaw assembly 204 are aligned to contact the lateral cams 214 of the sliding actuator 202.

Upon assembly, the spring 264 is inserted through the open end 244 of the hollow cylindrical body 242 into the cavity 248 and placed against the cap portion 254. In an uncompressed state, the spring 264 extends through the open end 244 of the cylindrical body 242 when aligned against the cap portion 254 of the cylindrical body 242. The cylindrical body 242 is embedded in the collar 282 and the vent 64 such that the opposing arm 258 is disposed within the opposing end opening slot 284 and the mounting end 246 extends through the vent 64 into the chamber 46 of the substrate container 40b. in. The poppet valve 272 is inserted into the bore 256 of the cap portion 254. The plunger ball 266 is aligned with the plunger axis 252 and contacts the spring 264. The slide actuator 202 is manipulated such that the center cam 212 will plunger the plunger 266 Push into the open end 244 of the cylindrical body 242 of the plunger assembly 204 and cause the lateral cam 214 to ride across the collar 282 and between the opposing arm 258 of the plunger and the outer face 58 of the door panel 54. Accordingly, the plunger ball 266 is captured within the cavity 248 of the hollow cylindrical body 242 by the central cam 212, and the spring 264 is compressed within the hollow cylindrical body 242.

The slide actuator 202 is configured such that the engagement pad 208 can extend into or interface with the latch recess 84. The elongated slot 222 is aligned with the hub 238 to which the fastener 240 is fastened. The fastener 240 passes through the elongated slot 222 and the alignment face 216 of the body 206 is in sliding contact with the hub 238. The "sliding contact" is affected by adjusting the fastener 240 such that the sliding actuator 202 is captured between the fastener 240 and the hub 238, but between the head of the fastener 240 and the hub 238 Sliding with little resistance. The elongated slot 222 is sized such that the fastener 240 acts as a stop for limiting retraction of the sliding actuator 202 such that the plunger ball 266 is always in contact with the central cam 212 and held in a cylindrical shape. Within the body 242. The present invention also contemplates other stops (not shown) for embedding into the elongated slot 222, such as a bushing or sleeve that concentrically surrounds the fastener 240, or the extension of the hub 238 to the elongated slot One of the 222 necks. The axial dimension of the bushing and the necked portion may be adapted to provide the dimensions required for sliding contact between the head of the fastener 240 and the hub 238 when the fastener 240 is fully tightened.

Referring to Figures 18 through 20, the operation of the sliding actuator valve assembly 200 is illustrated in accordance with an embodiment of the present invention. When the latch 88 is engaged within the latching recess 84, the latch 88 exerts a uniform power Fa on the mating pad 208 of the sliding actuator 202, thereby driving the sliding actuator 202 in the actuating direction 236 (Fig. 18) . The actuation causes the lateral cam 214 to slide in the actuation direction 236 between the outer face 58 of the door panel 54 and the opposing arm 258 of the plunger assembly 204, which causes the plunger assembly 204 to enter a closed configuration wherein the poppet valve 272 is placed over the vent 64. Thus, during actuation of the slide actuator valve assembly 200, the opposing arm 258 of the plunger assembly 204 acts as a cam follower. The actuation also The central cam 212 is caused to drive the plunger ball 266 further into the hollow cylindrical body 242 of the plunger assembly 204, thereby further compressing the spring 264 within the hollow cylindrical body 242 and increasing one of the compression forces Fc on the spring 264.

In the closed configuration, the compression force Fc of the spring 264 generates a reaction force Fr (Fig. 20) on the inclined faces 232 and 234 of the center cam 212 and the lateral cam 214 via the plunger ball 266 and the opposing arm 258. The reaction force Fr includes a parallel force component Fp that acts in one direction parallel to the outer face 58 of the door panel 54. The parallel force component Fp is counteracted by the actuation force Fa of the latch 88 to maintain the balance of the sliding actuator valve assembly 200.

When the latch 88 is withdrawn from the latching recess 84, the parallel force component Fp is no longer counteracted by the actuation force Fa, and the sliding actuator valve assembly 200 is driven in a retracting direction 286 opposite the actuation direction 236. . As the lateral cam 214 retracts, the compression force Fc of the spring 264 also drives the plunger assembly 204, thereby causing the opposing arm 258 of the plunger assembly 204 to slide over the ramp 232 of the lateral cam 214 and along the plunger axis 252. Translate and translate further into the vent 64. Further translation into the vent 64 causes the valve member 268 to be lifted away from the interior face 56 of the door panel, thereby allowing the chamber 46 to open to the surrounding environment via the vent 64.

In various embodiments, the body 206 of the sliding actuator 202 is formed from a self-lubricating or low-friction material, such as polyoxymethylene (POM) or a polycarbonate filled with polytetrafluoroethylene (PTFE). Ester or polymer based material. These materials exhibit advantageous wear characteristics while providing a low friction engagement surface for opposing arm 258 and plunger ball 266. The low friction between the ramps 232, 234 and the opposing arms 258 and the plunger ball 266 facilitates a more efficient translation of the sliding actuator 202 in the retracting direction 286. The low friction material for the sliding actuator 202 is also desirable for sliding the sliding actuator 202 along the outer face 58 of the panel 54 and for enhancing the sliding of the body 206 between the hub 238 and the head of the fastener 240. of.

Referring to Figures 21 through 26, a door assembly 150a of a continuous sealing member 100a, a door panel 54, and a frame structure 52a is implemented in an embodiment of the present invention. The frame structure 52a includes an outer frame portion 302 and an inner frame portion 304, and the outer frame portion 302 includes a shoulder 306 defining an opening 308. In various embodiments, the inner lattice portion 304 is integrally formed with the outer frame portion 302 by injection molding.

Herein, the disclosed door assemblies are generally referred to or collectively referred to as door assemblies 150, and are specifically referred to by numerical reference symbols 150 (eg, door assembly 150a) followed by a one-letter suffix. Likewise, the sealing member and frame structure are generally referred to or collectively referred to as sealing member 100 and frame structure 52, and in particular, by reference numerals 100 and 52 followed by a letter suffix (eg, sealing member 100a and frame structure 52a). ) to refer to.

The inner lattice portion 304 includes a plurality of cross members 312 that traverse the opening 308 to define a plurality of apertures 314. The inner lattice portion 304 defines a mounting surface 316 having a plurality of ends that are located on a common plane 328 that is recessed relative to one end 318 of the shoulder 306, thus defining a door panel receptacle 322. The inner lattice portion 304 also includes a plurality of fastener receptacles 324 configured to receive a plurality of fasteners 243 for securing the door panel 54 to the frame structure 52a and/or for securing the accessory to the door panel 54 The inner face 56. In various embodiments, the cross member 312 includes a plurality of contact edges 326 on a common plane 328 that contact the outer face 58 of the door panel 54 (Fig. 26). The contact edge 326 can be substantially flat (as shown) or can define a profile that reduces the contact area of the mounting surface 316 with the outer face 58 of the door panel 54. Examples of such contours include a rounded edge or a plurality of projections spaced along the length of the cross member 312 and spaced apart.

The continuous sealing member 100a includes an axial portion 332 (i.e., a portion extending parallel to the central axis 45) and an outwardly extending lateral portion 330, the outwardly extending transverse portion 330 being axially One of the first ends 336 of the portion 332 extends radially outward. As shown in Figures 22, 24, and 25, the continuous sealing member 100a also includes an inwardly extending lateral portion 338 that extends radially from the second end 340 of one of the axial portions 332. The interior extends to define a radially inward perimeter 334. In various embodiments, the inwardly extending lateral portion 338 includes a raised lip 342 that locally increases an axial thickness 344 of one of the inwardly extending lateral portions 338. The raised lip 342 can protrude toward the door panel 54 (as shown) or toward the frame structure 52a. In certain embodiments, the raised lip 342 is positioned proximate to the radially inward perimeter 334. The raised lip 342 can also follow the contour of the radially inwardly facing perimeter 334 to be continuous (Fig. 22). The present invention also encompasses a double raised lip (not shown) in which the opposing raised lips project from the inwardly extending transverse portion 338 in opposite axial directions.

The outer frame portion 302 also includes a radially inwardly extending (i.e., toward the central axis 45) one of the embedded flange portions 346 defining a flat alignment surface 348 for the sealing member 100a and configured to receive The inwardly extending lateral portion 338 of the continuous sealing member 100a. As shown in Fig. 26, the flat alignment surface 348 of the embedded flange portion 346 is recessed relative to the common plane 328, thereby leaving the axial thickness 344 of the embedded flange portion 346 of the sealing member 100a to a certain degree of compression. Out of space. The inlaid flange portion 346 can define a plurality of relief notches 352 for unattached mounting of the accessory (eg, the filter housing 72) to the door panel 54. In some embodiments, the inwardly extending transverse portion 338 of the continuous sealing member 100a includes a plurality of corresponding cutout recesses 354 that are aligned with the cutout recesses 352 of the embedded flange portions 346.

As shown in the embodiments shown in Figures 24 and 25, the plurality of clamps 360 each include a hub portion 362 and an alignment pin 364, and the hub portion 362 and the alignment pin 364 are pressed into the base door panel 54. Corresponding to holes 366 and 368. In an embodiment, one or more of the hubs 362 can be threaded and aligned with one of the fastener receptacles 324. In another embodiment (not shown), there is no hub; rather, the base of the clamp 360 includes a corresponding mounting hole 366 and a fastener receptacle. The 324 is aligned with a through hole, and all of the holes, the receptacle and the through hole are sized to provide a clearance fit with a fastener 243.

Upon assembly, as shown in Fig. 26, the continuous sealing member 100a is disposed within the frame structure 52a such that the inwardly extending transverse portion 338 contacts the flat alignment surface 348 of the flange portion 346. The door panel 54 is then disposed within the frame structure 52a such that the inwardly extending transverse portion 338 of the continuous sealing member 100a is interstitially captured between the door panel 54 and the embedded flange portion 346 of the outer frame portion 302. The clamp 360 is seated within the corresponding apertures 366, 368 and the fastener 243 is inserted through the fastener receptacle 324 of the frame structure 52a and tightened into the hub 362. In other embodiments (not shown), a fastener is fed through clamp 360, mounting aperture 366, and fastener receptacle 324, and one end of the fastener is terminated with a nut. The fastener 243 is tightened to bring the door panel 54 into firm contact with the cross member 312, thereby compressing the inwardly extending transverse portion 338 of the continuous sealing member 100a against the flat alignment of the door panel 54 and the inlaid flange portion 346. Between 348. The compression of the inwardly extending transverse portion 338 provides a seal between the door panel 54 and the frame structure 52a.

Referring to Figures 27 through 33, a door assembly 150b of a continuous sealing member 100b, a door panel 54 and a frame structure 52b is implemented in an embodiment of the present invention. In the illustrated embodiment, the door assembly 150b includes many of the same components and attributes as the door assembly 150a, and such components and attributes are indicated by the same reference numerals. The continuous sealing member 100b does not include an inwardly extending lateral portion extending from the second end 340, but includes a plurality of tab portions 372 that project axially from the second end 340 of the axial portion 332. The tab portion 372 is positioned along the second end 340 of the axial portion 332 to project into the aperture 314 or protrude through the aperture 314 such that the cross member 312 does not affect the placement of the continuous sealing member 100b. In certain embodiments, the outer frame portion 302 includes a plurality of barbs 374 that project radially inward from a radially inward facing surface 376 of the outer frame portion. The frame structure 52b does not include an inlaid flange portion.

For the door assembly 150b, the door panel 54 cooperates with the outer frame portion 302 to define a continuous slot 382 that runs from the inner face 56 of the door panel 54 to the outer face 58 (Fig. 33). In this embodiment, the axial portion 332 of the continuous sealing member 100b is captured within the groove 382 between the edge periphery 62 of the door panel 54 and the frame portion 302 outside the frame structure 52b. The axial portion 332 is sized to provide an interference fit within the slot 382 to retain the continuous sealing member 100a. In one embodiment, the second end 340 of the axial portion 332 faces the inner lattice portion 304 of the frame structure 52b and projects into the inner lattice portion 304. In an embodiment, the second end 340 can be substantially flush with the outer face 58 of the door panel 54.

When assembled, the door panel 54 is disposed within the frame structure 52b. In an embodiment, the fastener 243 is fed through one or more of the fastener receptacles 324 and tightened into the door panel 54. Alternatively, one or more of the clamps 360 can be placed in the corresponding holes 366, 368 and the fasteners can be tightened into the hub 362. In still other embodiments, a fastener is fed through the clamp 360, the mounting aperture 366, and the fastener receptacle 324, and one end of the fastener is terminated with a nut (not shown). The fastener 243 may first be only slightly tightened to provide a spaced fit between the door panel 54 and the frame structure 52b and to define a slot 382. The axial portion 332 of the continuous sealing member 100b can then be inserted into the slot 382 to assist in centering the door panel 54 within the opening 308 of the outer frame portion 302. The fastener 243 can then be fully tightened to secure the door panel 54 to the frame structure 52b and secure the continuous sealing member 100a within the slot 382.

Functionally, the tab portion 372 can be grasped by a person assembling the door assembly 150b to pull the axial portion 332 through the slot 382 and pull into contact with the cross member 308 of the frame structure 52b. The tab portion 372 also provides visual confirmation that the continuous sealing member 100b is seated within the slot 382. The hub 362 (or fastener 243 when there is no hub) laterally secures a predetermined clamp 360 to the interior face 56 of the door panel 54. The hub 362 is sized to provide a friction fit within the mounting aperture 366 and thereby prevent axial movement (i.e., movement parallel to the central axis 45). For the hub The portion 362 includes an embodiment of an internal thread that is attached to the fastener 243 to capture the clamp 360 to prevent axial movement. The alignment pins 364 disposed in the alignment holes 368 ensure proper alignment of the clamps 360 and also prevent the clamps 360 from rotating over time. The barbs 374 help retain the continuous sealing member 100b within the slot 382. The additional retention provided by the barbs 374 can be particularly beneficial during the washing of the frame structure 52b. In some embodiments, the barbs 374 are strategically arranged, for example, near the corners and/or proximate the tab portions 372 where the additional friction provided by the barbs 374 is more easily overcome.

The various aspects of the door assembly 150b help to enhance the drying process after the door is washed to facilitate faster and more thorough drying. For embodiments in which the door panel 54 is a homogeneous material (e.g., a solid metal or a solid polymer), there is no laminate that may trap moisture from the washing process. The aperture 312 in the frame structure 52b enables access to the area of contact between the frame structure 52b and the door panel 54 for drying. In some embodiments, the cover portion and the outer surface of the side wall have a cumulative total surface area, and the cover portion is secured at each hub or elsewhere to the contact area of the frame 204b and the contact area where the seat of the cover is engaged ( If any) has a total contact area.

Embodiments for reducing the area (eg, contact edge 326 having a plurality of rounded edges or having a plurality of spaced apart protrusions distributed along the length of cross member 308) can further enhance Accessibility of the contact area. The trough 382 (which is accessible from both the inner face 56 and the outer face 58 during the drying operation) also enhances drying due to the absence of a gland that retains moisture. Thus, after a washing process, the door assembly 150b can be easily dried without the need to disassemble the door assembly 150b. When replacing or washing, the seal can be removed if necessary.

Each of the additional figures and methods disclosed herein may be used alone or in combination with other features and methods to provide improved devices and their manufacture and use. law. Therefore, the combination of the features and methods disclosed herein may not be necessary to practice the invention in the broadest sense of the invention, and the disclosure of the features and methods is merely intended to specifically illustrate representative and preferred. Example.

Various modifications of the embodiments will be apparent to those skilled in the art after reading this disclosure. For example, those of ordinary skill in the art will recognize that the various features described in the various embodiments can be combined, split, and recombined with other features, either individually or in various combinations. Likewise, the various features described above are to be considered as illustrative and not restrictive.

Those of ordinary skill in the relevant art will recognize that various embodiments may include fewer features than those illustrated in any of the individual embodiments described above. The embodiments described herein are not intended to be exhaustive of the manner in which the various features can be combined. Thus, the embodiments are not intended to be a mutually exclusive combination of the plurality of features; rather, it is understood by those of ordinary skill in the art that the scope of the claims may include a combination of different individual features selected from different individual embodiments.

The following patent applications that are commonly owned by the applicants of the present application are hereby incorporated by reference in their entirety in their entirety in their entirety in their entirety in the the the the the the the the the International publications; and International Publication No. WO 2015/066484 of Tieben et al. Any incorporation of documents herein by reference is limited to the subject matter that is not inconsistent with the disclosure herein. Any incorporation of documents by reference herein is further limited such that the claims contained in such documents are not incorporated herein by reference. Any incorporation of documents herein by reference is further limited to the extent that any definitions provided in such documents are not hereby incorporated by reference.

The "(individual) embodiments", "exposed content", and "this" are included in this document. The invention, the "embodiment of the invention" and the "embodiment of the invention" refer to the specification of the present patent application (including the scope of the patent application and the drawings) which are not admitted to the prior art. .

In order to facilitate the interpretation of the scope of the patent application, unless the specific terms "components for" or "steps for" are described in the corresponding claims, it is expressly intended that the provisions of 35 USC 112(f) will not be invoked. .

40‧‧‧Substrate container

42‧‧‧ bottom door

44‧‧‧Upper casing

45‧‧‧central axis

48‧‧‧Substrate

52‧‧‧Frame structure

54‧‧‧door panel

56‧‧‧Internal

64‧‧‧Ventinel

66‧‧‧ Around the hole

68‧‧‧through hole

72‧‧‧Filter housing

Around 82‧‧

84‧‧‧Latch groove

86‧‧‧Latch mechanism

88‧‧‧Latch

100‧‧‧Continuous sealing member

Claims (22)

A substrate container comprising: a bottom door defining a latching recess and a venting aperture; an upper housing comprising a latching mechanism, the latching mechanism engaging the latching recess; a continuous sealing member from the bottom And extending one of the upper housing to the other of the upper housing and the bottom door to define a continuous sealing line between the bottom door and the upper housing; and a swing valve total a pivotally mounted to the bottom door and including a lever portion and a plug portion, the lever portion interfacing the latching recess, the plug portion for selectively closing the vent hole of the door panel Wherein the lever portion is configured to engage the latch mechanism, the swing valve assembly rotating the plug portion to close one of the vent opening when the latch mechanism is engaged in the latch recess Forming, and the lever portion is configured to disengage the latch mechanism, and when the latch mechanism is disengaged from the latch recess, the swing valve assembly rotates the plug portion away from the vent hole to enable The vent opens one of the venting configurations. The substrate container of claim 1, wherein the oscillating valve assembly comprises a accommodating portion coupled to the lever portion, and the plug portion is a ball disposed in the accommodating portion. The substrate container of claim 2, wherein the sphere directly contacts a periphery of the vent when the plug portion is in the closed configuration. The substrate container of claim 3, wherein the ball system is metallic. The substrate container of claim 4, wherein the vent hole is formed on a portion of the bottom door, the portion is metallic, and the periphery of the ball and the vent hole is from 0.5×10 ^-6 inches to inches and 8 × 10 ^-6 0.5 × 10 ^-6 inches comprises 8 × 10 ^-6 inches and the inner one one of the range of root mean square surface finish. The substrate container of claim 1, comprising a compliant sealing member configured to contact the plug portion and the bottom door to seal the pass when the plug portion is in the closed configuration Stomata. The substrate container of claim 6, wherein the compliant sealing member comprises at least one of the group consisting of an O-ring, a grommet, and a gasket. The substrate container of claim 1, wherein the bottom door comprises a door frame and a door panel, the door frame being integral with the door panel. The substrate container of claim 1, wherein: the bottom door is a door assembly, the door assembly comprises a door frame and a door panel, the door frame and the door panel are detachable, and the door frame comprises Forming a flange portion continuously for supporting one of the door panels; the continuous sealing member includes an embedded flange portion captured between the door panel and the mounting flange of the door frame And the continuous sealing member provides a continuous seal between the door panel and the mounting flange of the door frame. A substrate container comprising: a bottom door comprising a door frame and a door panel, the door frame defining a latching recess, the door panel defining a venting aperture; an upper housing comprising a latching mechanism, the latching mechanism engaging a latching recess; a continuous sealing member extending from one of the bottom door and the upper housing to contact the upper portion The other of the housing and the bottom door, further defining a continuous seal line between the bottom door and the upper housing; a sliding actuator coupled to the bottom door, the sliding actuator interfacing The latch recess includes a ramp; a plunger configured to selectively close the vent and engage the ramp to actuate from a closed configuration to an open configuration; and a biasing member operatively coupled to The plunger applies a biasing force on the plunger toward the open configuration, wherein the sliding actuator is configured to engage the latching mechanism when the latching mechanism engages the latching recess The ramp maintains the plunger in the closed configuration, and the sliding actuator is configured to disengage the latch mechanism, the biasing force acting on the ramp to move the sliding actuator away from the One of the plungers translates in direction and drives the plunger to the open configuration. The substrate container of claim 10, wherein the slope defines an angle between 30 degrees and 60 degrees and including one of 30 degrees and 60 degrees with respect to the direction of coincidence. The substrate container of claim 10, wherein the sliding actuator is made of a low friction material. The substrate container of claim 12, wherein the low friction material is one of a polyoxymethylene and a polytetrafluoroethylene filled polycarbonate. A sealing member for a photomask case, comprising: an axial portion continuously surrounding a central axis and substantially parallel to the central axis, the axial portion having a first end and a second end; Extending the lateral portion outwardly from the first end of the lateral portion away from the central axis Extending in one of the lines; and a plurality of tab portions extending from the second end of the axial portion, the tab portions being substantially parallel to the central axis. A sealing member for a photomask case, comprising: an axial portion continuously surrounding a central axis and substantially parallel to the central axis, the axial portion having a first end and a second end; Extending outwardly from the transverse portion, the first end extending from one of the transverse ends extending away from the central axis; and a continuous inwardly extending lateral portion from the second end of the axial portion toward the central axis Extending in one direction, the continuous inwardly extending transverse portion is substantially orthogonal to the axial portion. The sealing member according to claim 14 or 15, wherein the sealing is made of one of a fluoroelastomer and an ethylene-propylene-diene monomer. A door assembly for a reticle housing, comprising: a frame structure comprising an outer frame portion continuously surrounding a central axis and having a shoulder portion defining an opening, an inner portion An inner lattice portion bridging the outer frame portion and traversing the opening, the inner lattice portion defining a mounting surface defining a plane and recessed relative to the shoulder portion; a continuous embedded flange Extending from the outer frame portion toward the central axis, the continuous embedding flange defining a flat alignment surface, the flat alignment surface being recessed relative to the mounting surface of the inner lattice portion; a door panel disposed in the inner lattice structure The mounting surface of the portion extends over the flat alignment surface of the continuous embedded flange; A sealing member comprising: an axial portion continuously surrounding a central axis and substantially parallel to the central axis; and a continuous inwardly extending lateral portion from which the axial portion is oriented toward one of the central axes Extending into the axial portion, the continuous inwardly extending transverse portion being substantially orthogonal to the axial portion, wherein the continuous inwardly extending lateral portion is captured and compressed to the door panel and the continuous embedded flange Between the flat alignment faces. The door assembly of claim 17, wherein: a continuous gap is defined between an outer periphery of the door panel and the continuous outer frame portion; and the axial portion of the sealing member extends through the continuous gap. A door assembly for a reticle housing, comprising: a frame structure comprising an outer frame portion continuously surrounding a central axis and having a shoulder portion defining an opening, an inner portion The lattice portion bridges the outer frame portion and traverses the opening, the inner lattice portion defines a mounting surface, the mounting surface defines a plane and is recessed relative to the shoulder portion; a door panel is disposed at the inner lattice portion The mounting panel cooperates with the outer frame portion to define a continuous gap therebetween; and a sealing member comprising: an axial portion continuously surrounding the central axis and substantially parallel to the central axis; a plurality of tab portions extending from one end of the axial portion, the tab portions being substantially flat A central axis is defined, wherein the sealing member is disposed in the continuous gap, and the tab portions extend into the inner lattice portion. The door assembly of claim 19, wherein the outer frame portion includes a plurality of barbs in contact with the axial portion of the sealing member. A method for assembling a door assembly of a reticle housing, comprising: attaching a door panel to an inner frame of one of the frame structures to outer frame of one of the door panels and an outer frame of the frame structure A gap is defined therebetween; a continuous sealing member is embedded in the gap to extend a plurality of tabs depending from the continuous sealing member into the inner lattice portion. The method of claim 21, comprising grasping at least one of the tabs to pull the continuous seal into the continuous gap.