KR20220020718A - Electrical test apparatus - Google Patents

Abstract

The present invention relates to an inspection device, which presses a device to be inspected toward an inspection substrate to perform an electrical inspection. The inspection device of the present invention comprises: a base body having an accommodating space in which a device to be inspected is accommodated, and having a latch groove around the accommodating space; a housing body mounted on an upper side of the base body; a pair of latches hinged to the housing body, and moved between a fixing position for fixing the housing body to the base body by being locked to the latch groove and a release position for separating the housing body from the base body by deviating from the latch groove; and a handle rotatably connected to the housing body, and positioned between the latches. When the handle is rotated in one direction, the latches are moved to the fixing position while pushing the latches.

Description

Test apparatus {Electrical test apparatus}

The present invention relates to an inspection apparatus, and more particularly, to an inspection apparatus in which a latch is not released even when a high pressing force is applied.

An inspection apparatus for electrically inspecting a device to be inspected such as a semiconductor chip presses a device to be inspected, such as a semiconductor chip manufactured in various shapes, such that the device to be inspected is electrically connected to an inspection substrate to which a predetermined signal is applied. It is an apparatus that allows an inspection for the presence or absence of an abnormality on an inspection device.

The conventional inspection apparatus, as shown in FIG. 1, is disposed on the upper side of the inspection apparatus, the device to be inspected is seated therein, the base body is provided with a latch groove, is mounted on the upper side of the base body and provided with latches on both sides and a housing body including a latch releasably secured to the latch groove in the base body.

At this time, the base body is provided with a pressing means for pressing the device under test, and the latch is elastically supported in a direction to be fixed to the base body by the spring reaction force.

When describing a method of performing an inspection using such a prior art inspection apparatus, first, as shown in FIG. 1 (a), after positioning the housing body on the upper side of the base body, Similarly, the housing body is mounted on the base body. At this time, the latch is fitted into the latch groove, and the fixed state is maintained by the spring reaction force. Thereafter, a predetermined electrical test is performed as shown in FIG. and the housing body is separated from the base body as shown in Fig. 1(e).

In recent years, as the density and integration of semiconductor chips progress, there is a need to increase the pressing force, and the reality is that the pressing force is also increased accordingly.

When a high pressing force is applied to the device to be inspected using a conventional inspection apparatus, the latch may be released without being able to withstand the load.

That is, the latch is maintained in a fixed state by the spring reaction force, and when a high pressing force is applied, the latch is easily released by the pressing force higher than the spring reaction force, which is a factor preventing a normal electrical inspection.

The present invention has been created to solve the above problems, and more particularly, it is a technical object of the present invention to provide an inspection device that allows a latch to maintain a fixed state even when a high pressing force is applied.

An inspection apparatus of the present invention for achieving the above-described technical object is an inspection apparatus for performing an electrical inspection by pressing a device to be inspected toward an inspection substrate,

a base body having an accommodating space in which the device to be inspected is accommodated and having a latch groove formed around the accommodating space;

a housing body mounted on an upper side of the base body;

A pair of latches that are hinged to the housing body and move between a fixed position for fixing the housing body to the base body by being caught in the latch groove and a release position for detaching the housing body from the base body away from the latch groove ; and

a handle rotatably connected to the housing body and positioned between the latches;

When the handle rotates in one direction, the latch may be moved to a fixed position while pushing the pair of latches.

In the inspection device,

A protrusion protruding from an outer circumferential surface of the handle is provided on one side, and the latch may move to a fixed position while the protrusion pushes the latch.

In the inspection device,

The handle rotates in one direction and comes into contact with the latch to pressurize it to move the latch to the fixed position, and the handle releases the pressing force to the latch while rotating in one direction and the opposite direction to move between the second position and spaced apart from the latch. can be rotated.

In the inspection device,

A stopper may be provided on the housing body to prevent additional one-way rotation of the handle from the fixed position.

in the inspection device;

An elastic biasing means for elastically biasing the latch from a fixed position to a release position may be provided between the latch and the housing body.

In the inspection device,

When the handle is rotated in one direction and the opposite direction to be spaced apart from the latch, the latch may be returned to the released position by the elastic biasing means.

In the inspection device,

When the handle is rotated in one direction, the pressing force of the pressing means to the device under test may be increased.

In the inspection device,

A pressing means for pressing the device to be tested downward may be provided inside the housing body.

In the inspection device,

The pressing means may include a pressing plate for pressing the device to be tested while rising or falling.

In the inspection device,

The pressure plate is

The device to be tested can be pressed while ascending and descending by a screw which rotates together with the handle and is screwedly connected to the housing body.

In the inspection device,

Between the screw and the pressure plate,

It may include an interposer elevating and descending in a predetermined range rotating together with the screw, and a pressure spring disposed between the interposer and the screw.

The inspection apparatus according to the present invention has an advantage in that a pair of latches are not released even when a high pressing force is applied because a rotating handle of the pair of latches is pushed while maintaining a fixed state.

In addition, the inspection apparatus according to the present invention has an advantage in that the latch can be released from the base body by providing an elastic biasing member that applies an elastic force in a direction in which the latch fixing force is released.

In addition, the inspection apparatus according to the present invention has an advantage in that the handle is provided with a stopper that stops the latch at the position where it is fixed, so that the operation is easy.

1 is an operation diagram showing an operation method of a conventional inspection apparatus.
Figure 2 is an exploded perspective view of the inspection device of the present invention.
Figure 3 is a combined perspective view of the inspection device of Figure 2;
Figure 4 is a perspective view showing a state in which the housing body is mounted on the base body in the inspection device of Figure 2;
5 is a V-V cross-sectional view of FIG.
6 is a plan view illustrating a process in which the handle is rotated in the inspection device of FIG. 2 .
7 is a cross-sectional view of VII-VII of FIG.
8 is a perspective view illustrating a state in which the handle is finally rotated in the inspection device of FIG. 2 .
9 is a cross-sectional view IX-IX of FIG.
Figure 10 is an exploded perspective view of the handle and the housing body in the inspection device of Figure 2;

This specification clarifies the scope of the present invention, explains the principles of the present invention, and discloses embodiments so that those of ordinary skill in the art to which the present invention pertains can practice the present invention. The disclosed embodiments may be implemented in various forms.

Expressions such as “includes” or “may include” that may be used in various embodiments of the present invention indicate the existence of a corresponding disclosed function, operation, or component, and may include one or more additional functions, operations, or Components, etc. are not limited. In addition, in various embodiments of the present invention, terms such as “comprise” or “have” are intended to designate that a feature, number, step, action, component, part, or combination thereof described in the specification is present, It should be understood that this does not preclude the possibility of addition or existence of one or more other features or numbers, steps, operations, components, parts, or combinations thereof.

When a component is referred to as being “connected to and coupled to” another component, the component may be directly connected or coupled to the other component, but between the component and the other component. It should be understood that there may be other new components in the On the other hand, when it is said that an element is "directly connected" or "coupled" to another element, it will be understood that no new element exists between the element and the other element. should be able to

In the present invention, "fixed position" means the position of the latch when the latch is caught in the periphery of the latch groove of the base body and the housing body and the base body are inseparably coupled to each other, and the "release position" means the latch It refers to the position of the latch when it is separated from the periphery of the latch groove of the main body and the housing body and the base body can be separated from each other.

Also, in the present invention, the term "first position" means the position of the handle when the handle located between the pair of latches moves the latch to the fixed position while pushing the pair of latches, and the "second position" refers to the position of the pair of latches. It refers to the position of the handle when the handle located between the latches of , rotates in the opposite direction to one direction and is spaced apart from the latch, and the latch moves to the release position.

Also, in the present invention, "one direction" means the direction in which the handle rotates to move the latch to the fixed position, and "one direction and the opposite direction" refers to the one direction and the opposite direction, in which the handle rotates to move the latch to the release position. means direction.

The inspection apparatus according to the present invention is an apparatus for pressing the inspected device toward the inspection substrate while the housing body is coupled to a base body disposed on the inspection substrate side to which a predetermined signal is applied and provided with the inspection target device therein. The main body is configured with a pressing means for pressing the device under test, and a latch for releasably fixing the housing body to the base body.

The inspection apparatus 100 according to the present invention includes a base body 110 , a housing body 120 , a latch 130 , a handle 140 , a pressing means 150 , and a stopper 160 .

In the base body 110 , an accommodation space 111 in which the device to be inspected 170 is accommodated is formed, and a latch groove 112 is provided around the accommodation space 111 . The base body 110 is formed in the form of a square plate, and an accommodating space 111 is provided in the center as an opening opened in the vertical direction. On the lower surface of the base body 110 , a conductive rubber sheet 113 for mediating an electrical connection between the device under test 170 and the test substrate is provided.

The latch groove 112 is a groove disposed around the receiving space 111 of the base body 110 , and the latch 130 may be inserted into the latch groove 112 . A step 1121 is formed on the inner surface of the latch groove 112 so that the latch 130 may be caught and fixed.

The housing body 120 is mounted on the upper side of the base body 110 and is provided with a pressing means 150 for pressing the device to be tested 170 downward therein. Specifically, the housing body 120 is made in the form of a box opened downward, and a central hole 121 is provided in the upper center, and a screw thread is formed on the inner surface of the central hole 121, so that the screw ( 151) is configured to be able to be screwed.

On both sides of the housing body 120 , a pair of support portions 122 to which the latch 130 can be hingedly are provided, respectively. After the latch 130 is inserted between the pair of support parts 122 , the support rod 131 is inserted so that the latch 130 can hinge.

The latch 130 is hingedly connected to the housing body 120 and is caught in the latch groove 112 so as to fix the housing body 120 to the base body 110 in a fixing position, and in the latch groove 112 . It is to move between the release positions that allow the housing body 120 to be detachable with respect to the base body 110 .

Specifically, the latch 130 is installed on both sides of the housing body 120, and the support rod 131 is fitted in the center to be hingedly connected to the housing body 120, and the locking jaw 132 protruding inward at the lower part. This will be provided.

The latch 130 hinges around the support rod 131 , and when the upper ends of the latches 130 move away from each other, the lower ends of the latches move to a fixed position while approaching each other. Also, when the upper ends of the latches 130 move in a direction adjacent to each other, the lower ends of the latches move away from each other to move to the release position. In the fixed position, the engaging jaw 132 of the lower end of the latch 130 is caught by the stepped 1121 of the latch groove 112, and in the released position, the engaging projection 132 of the latch 130 is the latch groove 112. It is out of step 1121.

An elastic biasing means 133 for elastically biasing the latch 130 from the fixed position to the release position is provided on the lower side of the support rod 131 in the latch 130 . Specifically, an elastic biasing means 133, that is, a spring, is provided between the latch 130 and the housing body 120 to provide a pressing force to the latch 130 in order to move the latch 130 from the fixed position to the release position. do.

The elastic biasing means 133 is installed in the lower portion of the latch around the locking jaw 132 in the support rod 131 so that the locking jaw 132 can be released from the latch groove 112 of the base body 110 . Provides elastic pressing force. When the necessary pressing force is removed from the fixed position, the latch 130 is automatically moved to the released position by the elastic biasing means so that the housing body 120 can be separated from the base body 110 .

The handle 140 is rotatably connected to the housing body 120 and is positioned between a pair of latches 130 . The handle 140 operates the pressing means 150 while rotating to apply a pressing force to the device to be inspected 170, as well as pushing the upper end of the pair of latches 130 and inserting the lower end of the latch 130 into the latch groove. (112) It performs the function of being caught. Specifically, the handle 140 is rotated in one direction in a first position for moving the latch 130 to a fixed position, and while rotating in one direction and the opposite direction, the pressing force on the latch 130 is released to release the pressure from the latch 130 . It rotates between the spaced apart second positions.

The handle 140 is fixedly installed on the screw 151 of the pressing means 150 so that the screw 151 is interlocked and rotated according to the rotation of the handle 140 .

The handle 140 is provided with a protrusion 141 capable of pushing the upper end of the latch 130 . The protrusion 141 is provided on one side of the circumference of the cylindrical handle 140 , and is configured to protrude from the outer circumferential surface of the handle 140 and extend along the circumferential direction of the handle 140 . A pair of these protrusions 141 are symmetrically arranged.

The protrusion 141 includes a fixed portion 1411 and an elastic portion 1412, and the fixing portion 1411 is a portion fixed to the handle 140 and protrudes from the outer circumferential surface of the handle 140, and an elastic portion ( 1412 is a portion extending along the circumferential direction of the handle 140 in a state of being spaced apart from the outer circumferential surface of the handle in the fixing portion 1411 and is configured to be elastically deformed so as to be close to the outer circumferential surface of the handle 140 .

When the handle 140 passes the fixing part 1411 of the protrusion 141 while rotating in one direction, the upper end of the latch 130 is pushed. Thereafter, when the handle 140 is additionally rotated, the latch 130 comes into contact with the elastic portion 1412 of the protrusion 141 . At this time, the elastic portion 1412 is elastically deformed to move toward the outer peripheral surface of the handle 140 .

Since the elastic part is pressed and has a concave shape than the fixed part, the handle 140 entering the elastic part 1412 rotates in one direction and the opposite direction to prevent the handle 140 from moving to the release position, so that the handle 140 is Allows latch 130 to be retained on resilient portion 1412 .

A guide groove 142 that is cut upward and has an arc shape is provided on a portion of the lower surface of the handle 140 that faces the housing body 120 . The stopper 160 is inserted into the guide groove 142 to guide the position of the handle 140 as well as to control the excessive rotation of the handle 140 .

The pressing means 150 is disposed in the housing body 120 and provides a pressing force to the device to be inspected 170 . The pressing means 150 includes a screw 151 , a pressing spring 152 , an interposer 153 , and a pressing plate 154 .

The screw 151 rotates together with the handle 140 and is screwedly connected to the housing body 120 to ascend and descend according to the rotation of the handle 140 . Specifically, the screw 151 has a screw thread formed on its outer circumferential surface and is screwed to the central hole 121 of the housing body 120 , and is connected to the handle 140 , and when the handle 140 rotates, the screw 151 is attached to the housing body 120 . It is configured to elevate with respect to.

The pressure spring 152 is disposed between the screw 151 and the interposer 153 to elastically bias the screw 151 and the interposer 153 in a direction away from each other, and the upper end of the screw 151 is the lower surface of the screw 151 . and the lower end is in contact with the upper end of the interposer 153 .

The interposer 153 is raised and lowered within a predetermined range while rotating together with the screw 151 . The interposer 153 is connected to the screw 151 by a bolt 1531 . The bolt head is inserted into the hole of the interposer 153 to support the position, and the bolt column is screwed to the screw 151 .

The pressing plate 154 is connected to the screw 151 in the axial direction by the screw 151 and the central bolt, and has the shape of a square plate. The lower surface of the pressure plate 154 is configured to be in contact with the device to be tested 170 to press the device to be tested 170 . The pressing plate 154 is configured to receive only the pressing force by the interposer 153 without rotating with the screw 151 . The central bolt 1541 has a head inserted into the hole of the screw 151 and a lower end fixed to the pressing plate 154 . As the head of the central bolt 1541 moves within the hole of the screw 151 , the distance between the pressure plate 154 and the screw 151 may be adjusted.

When the handle 140 rotates in one direction, the screw 151 descends while rotating together with the handle 140, and according to the descending of the screw 151, the pressure spring 152 is pressed downward, so that the interposer 153 is the pressure plate ( 154) is pressed.

The stopper 160 is to prevent additional rotation, ie, excessive one-way rotation, after the handle 140 is rotated to the first position. If the handle 140 is excessively rotated in one direction and deviated from the first position, the handle 140 cannot push the latch 130 and the fixing force of the latch may be released. To prevent this, a stopper 160 is provided. It allows the handle 140 to stop at the first position desired by the designer.

This stopper 160 protrudes upward from the housing body 120, is inserted into the guide groove of the handle 140, and when the handle 140 comes into contact with the end of the guide groove, the handle 140 is stopped to prevent additional rotation. is prevented One end of the guide groove designates a first position, and the other end designates a second position.

The inspection apparatus 100 according to the present invention has the following operational effects.

First, as shown in FIG. 3 , the housing body 120 is positioned on the upper side of the base body 110 . At this time, the latch 130 is elastically supported by the elastic bias means 133 and is placed in the released position, and the locking jaws 132 at the lower end of the latch 130 are spaced apart from each other.

Thereafter, the housing body 120 is coupled to the base body 110 as shown in FIGS. 4 and 5 . At this time, the latch 130 disposed on the housing body 120 is still in an open state, and is positioned in a released state without being caught on the step 1121 of the latch groove 112 of the base body 110 . That is, in FIG. 4 , the latch 130 is not fixed to the base body 110 .

Thereafter, as shown in FIGS. 6 and 7 , when the handle 140 is rotated in one direction by a predetermined angle (45 degrees in FIG. 6 ), the protrusion 141 rotates while the handle 140 rotates to form a pair of latches 130 . ) are pushed away from each other, and accordingly, the latch 130 moves from the released position to the fixed position. Specifically, the lower end of the latch 130 is caught by the step 1121 of the latch groove 112 and is fixed. At this time, as the screw 151 rotates together with the handle 140 , the screw 151 descends, and accordingly, the interposer 153 is pushed by the spring reaction force to press the pressure plate 154 . As the pressing plate 154 is pressed, the device to be inspected disposed under the pressing plate 154 is pressed toward the inspection substrate (not shown) to which a predetermined signal is applied.

Thereafter, as shown in FIGS. 8 and 9 , when the handle 140 is finally rotated to the first position (rotated by 90 degrees in FIG. 6 ), it passes through the fixing part of the protrusion 141 to the elastic part 1412 . While the latch 130 is in contact, the fixed state of the latch 130 is maintained as it is. While the elastic portion 1412 of the protrusion 141 is elastically deformed somewhat inward, rotation of the handle 140 in the opposite direction is suppressed. At this time, the screw 151 connected to the handle 140 also rotates additionally to further press the pressure plate 154 , and accordingly, the pressing force on the device 170 to be inspected is increased.

On the other hand, in FIG. 10 , the handle 140 and the stopper 160 are illustrated. The position of the handle 140 is regulated by the stopper 160 fitted in the guide groove 142 so that additional one-way rotation at the first position is possible. This does not occur and the latch 130 is not released.

The inspection device according to the present invention has a protrusion protruding around the handle, so that the protrusion pushes the latch while the handle rotates so that the lower part of the latch is fixed to the base body. There are advantages to not having this.

In addition, the present invention is provided with an elastic biasing means for elastically biasing the latch to the release position between the latch and the housing body, so that when the handle is rotated to the second position, the latch is released from the locking jaw of the base body and the coupling is released, so that the operation is easy. It has the advantage of being simple.

In addition, in the present invention, the protrusion is composed of a fixed part and an elastic part, so that the handle rotated from the fixed part to the elastic part does not rotate to the fixed part again, so that the fixed state can be maintained.

Also, in the present invention, the handle rotates in one direction and applies a pressing force to make the electrical inspection of the device under test more reliable, as well as pushing the latch so that even if the pressing force is increased, the latch is not loosened. There is an advantage. .

In the above-described embodiment, it is mentioned that a pressing means for pressing the device under test is provided on the housing body to the lower side, but the present invention is not limited thereto and a structure without the pressing means is also included in the scope of the present invention.

In addition, in the above-described embodiment, the pressing means 150, the screw 151, the pressure spring 152, the interposer 153 and the pressure plate 154 has been exemplified to include, but is not limited thereto, the pressing means Only the pressure plate 154 is referred to, and the screw 151 , the pressure spring 152 , and the interposer 153 may be interpreted as one configuration of the housing body 120 .

Although the technical spirit of the present disclosure has been described by examples shown in some embodiments and the accompanying drawings, it does not depart from the technical spirit and scope of the present disclosure that can be understood by those of ordinary skill in the art to which the present disclosure belongs It should be understood that various substitutions, modifications, and alterations within the scope may be made. Further, such substitutions, modifications, and alterations are intended to fall within the scope of the appended claims.

100...Inspection device 110...Base body
111...accommodating space 112...latch groove
1121...Step 113...Rubber seat
120...Housing body 121...Central hole
122...Support 130...Latch
131...support rod 132...jaw jaw
133...Elastic bias means 140...Handle
141...Protrusion 1411...Fixed
1412...Elastic part 142...Guide groove
150...pressurizing means 151...screw
152...Pressure spring 153...Interposer
154...Pressure plate 160...Stopper
170...test device

Claims (11)

An inspection apparatus for performing an electrical inspection by pressing a device to be inspected toward an inspection substrate, the inspection apparatus comprising:
a base body having an accommodating space in which the device to be inspected is accommodated and having a latch groove formed around the accommodating space;
a housing body mounted on an upper side of the base body;
A pair of latches that are hinged to the housing body and move between a fixed position for fixing the housing body to the base body by being caught in the latch groove and a release position for detaching the housing body from the base body away from the latch groove ; and
a handle rotatably connected to the housing body and positioned between the latches;
When the handle rotates in one direction, the pair of latches is pushed and the latches are moved to a fixed position. According to claim 1,
A protrusion protruding from an outer circumferential surface of the handle is provided on one side, and the protrusion pushes the latch to move the latch to a fixed position. According to claim 1,
The handle rotates in one direction and comes into contact with the latch to pressurize it to move the latch to the fixed position, and the handle releases the pressing force to the latch while rotating in one direction and the opposite direction to move between the second position and spaced apart from the latch. Inspection device, characterized in that the rotational movement. According to claim 1,
Inspection apparatus, characterized in that the housing body, the handle is provided with a stopper for preventing additional one-way rotation from the fixed position. According to claim 1,
An elastic biasing means for elastically biasing the latch from a fixed position to a release position is provided between the latch and the housing body. 6. The method of claim 5,
When the handle is rotated in one direction and the opposite direction to be separated from the latch, the latch is returned to the released position by the elastic biasing means. According to claim 1,
Inspection apparatus, characterized in that when the handle rotates in one direction, the pressing force on the device to be inspected by the pressing means is increased. 8. The method of claim 7,
An inspection apparatus, characterized in that a pressing means for pressing the device to be inspected downward is provided inside the housing body. 9. The method of claim 8,
The pressurizing means,
It may include a pressure plate for pressing the device to be tested while rising or falling. 10. The method of claim 9,
The pressure plate rotates together with the handle and is capable of pressing the device under test while ascending and descending by a screw threadedly connected to the housing body. 11. The method of claim 10,
Between the screw and the pressure plate,
Inspection apparatus comprising: an interposer elevating and descending in a predetermined range rotating together with the screw; and a pressure spring disposed between the interposer and the screw.

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