WO2016149517A1

WO2016149517A1 - Mechanical venting of a reticle pod

Info

Publication number: WO2016149517A1
Application number: PCT/US2016/022911
Authority: WO
Inventors: Barry Gregerson; Russ V. Raschke
Original assignee: Entegris, Inc.
Priority date: 2015-03-18
Filing date: 2016-03-17
Publication date: 2016-09-22
Also published as: TWI686665B; TW201640219A

Abstract

Mechanical venting arrangements for cracking the seal of a substrate container. In one substrate container, mechanical venting is provided by a rocker arm that is rotationally held in a configuration that seals a venting aperture when the door and cover of the substrate container are latched together. The rocker arm is biased, by gravity and/or by active biasing, to an open or vented configuration upon decoupling of the door and cover of the substrate container. In another substrate container, mechanical venting is provided by a sliding actuator valve assembly that is passively actuated by a latch of the substrate container. A sliding actuator drives a plunger assembly to close a venting aperture of the substrate container. Upon release of the latch, energy stored in a biasing element within the plunger assembly drives the sliding actuator into a retracted configuration, thereby opening the venting aperture.

Description

MECHANICAL VENTING OF A RETICLE POD

RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Patent Application No. 62/135,101, filed March 18, 2015 and U.S. Provisional Patent Application No. 62/191,158, filed July 10, 2015, the disclosures of which are hereby incorporated by reference herein in their entirety.

FIELD OF THE DISCLOSURE

The disclosure is directed generally to substrate carriers, and more specifically to a seals and vent systems for substrate carriers. BACKGROUND

Semiconductor substrates are typically transported in substrate carriers that are equipped to interface with automation equipment such as load ports. For larger substrate carriers (e.g., 300 mm wafers and larger), the automation equipment usually includes mechanical interlocks that secure the door to the automation or have sufficient mass to allow reliable separation of the carrier door. However, for smaller substrate carriers (e.g., 150-200mm reticle pods), automation equipment does not include a mechanical interlock to the pod door. Applicants have found that, without such mechanical interlocks, the substrate carrier door sometimes lifts away from the automation equipment when removing or attempting to remove the housing assembly from the door assembly. This occurs when the mass of the door is not sufficient to overcome change in internal pressure when the sealed container is opened. Such lifting away of the substrate carrier can cause disruption to processing operations and can also lead to damaging of the payload should the door assembly drop away from the housing assembly.

A substrate carrier that enables repeatable removal of the housing assembly away from the door assembly without the aid of mechanical interlocks would be welcomed.

SUMMARY

Various embodiments of the disclosure include mechanical vents that are maintained in a closed configuration when a cover is coupled to a door of the substrate container, but are biased to open into a vented configuration upon release of the cover from the door.

The inventors have discovered that, surprisingly, the seals of certain embodiments disclosed herein provide sealing with such efficacy that the seal does not readily release or "crack" when attempting to open the substrate carrier. That is, rather than the housing assembly separating cleanly from the door assembly, the entire carrier assembly may lift off or partially lift off the load port during the opening process, the cover and door assemblies being held together by suction because of the steadfastness of the seal. The mechanical venting of the substrate container enables the seal between the cover and the door to be readily cracked, without lifting the door away from load port equipment and without need for interlocks.

Structurally, various embodiments of the disclosure are directed to a substrate container that includes a bottom door including a door frame that defines a latch recess and a door panel that defines a venting aperture, with an upper housing including a latch mechanism that engages the latch recess. A continuous seal member extends from one of the bottom door and the upper housing to contact the other of the upper housing and the bottom door to define a continuous seal line between the bottom door and the upper housing. In one embodiment, a rocker valve assembly is pivotally mounted to the bottom door and includes a lever portion that interfaces the latch recess, and a plug portion for selective closure of the venting aperture of the door panel. In some embodiments, the lever portion is arranged to engage the latch mechanism so that the rocker valve assembly rotates the plug portion into a closed configuration that closes the venting aperture when the latch mechanism is engaged within the latch recess. The lever portion is arranged to disengage the latch mechanism so that the rocker valve assembly rotates the plug portion away from the venting aperture to a venting configuration that opens the venting aperture when the latch mechanism is disengaged from the latch recess.

In some embodiments, the rocker valve assembly includes a receptacle portion coupled to the lever portion and the plug portion is a sphere disposed within the receptacle portion. The spheres may be in direct contact with a perimeter of the venting aperture when the plug portion is in the closed configuration. The sphere and/or the door panel may be metallic, the sphere and the perimeter of the venting aperture having a root-mean- square surface finish in a range of 0.5 x 10^"6 to δ χ ΐθ^"6 inches inclusive. In some embodiments, a compliant seal member is configured to contact the plug portion and the door panel to seal the venting aperture when the plug portion is in the closed configuration. In one embodiment, the compliant seal member is an O-ring.

In some embodiments, the door frame and the door panel are unitary. In other embodiments, the bottom door is a door assembly, the door frame and the door panel being detachable, the door frame including a continuous inset flange portion that supports the door panel. The continuous seal member includes an inset flange portion that is captured between the door panel and the inset flange of the door frame. The continuous seal member provides a continuous seal between the door panel and the inset flange of the door frame.

In various embodiments of the disclosure, a substrate container is disclosed having a bottom door including a door frame that defines a latch recess and a door panel that defines a venting aperture. An upper housing including a latch mechanism engages the latch recess. A continuous seal member extends from one of the bottom door and the upper housing to contact the other of the upper housing and the bottom door to define a continuous seal line between the bottom door and the upper housing. A sliding actuator is coupled to the bottom door that interfaces with the latch recess and includes an inclined surface. A plunger is arranged to selectively close the venting aperture and engaged with the inclined surface for actuation from a closed configuration to an open configuration. A biasing element is operatively coupled to the plunger to exert a biasing force on the plunger toward the open configuration. The sliding actuator is arranged to engage the latch mechanism so that the inclined surface maintains the plunger in the closed configuration when the latch mechanism is engaged within the latch recess, and to disengage the latch mechanism so that the biasing force acts on the inclined surface to translate the sliding actuator in a direction away from the plunger and motivates the plunger into the open configuration.

In some embodiments, the inclined surface defines an angle in a range of 30 degrees to 60 degrees inclusive with respect to a direction of actuation. The sliding actuator may be made of a low friction material, such as a polyoxymethylene or a polytetrafluoroethylene-filled polymer. In various embodiments of the disclosure, a seal member for a reticle pod is disclosed, including an axial portion continuous about and substantially parallel to a central axis, the axial portion having a first end and a second end. A continuous outwardly-extending lateral portion extends from the first end of the lateral portion in a direction away from the central axis. A plurality of tab portions extend from the second end of the axial portion, the plurality of tab portions being substantially parallel to the central axis.

In various embodiments of the disclosure, a seal member for a reticle pod is disclosed, including an axial portion continuous about and substantially parallel to a central axis, the axial portion having a first end and a second end. A continuous outwardly-extending lateral portion that extends from the first end of the lateral portion in a direction away from the central axis. A continuous inwardly-extending lateral portion that extends from the second end of the lateral portion in a direction toward the central axis, the continuous inwardly-extending lateral portion being substantially orthogonal to the axial portion. In some embodiments, the various seal members may be made of one of a fluoroelastomer and an ethylenepropylenediene monomer.

In various embodiments of the disclosure, a door assembly for a reticle pod includes a framework including an outer frame portion continuous about a central axis and having a shoulder portion defining an opening, an inner lattice portion bridging the outer frame portion and traversing the opening, the inner lattice portion defining a mounting face that defines a plane and is recessed relative to the shoulder portion. A continuous inset flange extends from the outer frame portion and toward the central axis, the continuous inset flange defining a planar registration face that is recessed relative to the mounting face of the inner lattice portion. A door panel is disposed on the mounting face of the inner lattice portion and extends over the planar registration face of the continuous inset flange. A a seal member, includes an axial portion continuous about and substantially parallel to the central axis, and a continuous inwardly-extending lateral portion that extends from and orthogonal to the axial portion in a direction toward the central axis, the continuous inwardly-extending lateral portion being substantially orthogonal to the axial portion. The continuous inwardly-extending lateral portion is captured and compressed between the door panel and the planar registration face of the continuous inset flange. In some embodiments, a continuous gap is defined between an outer periphery of the door panel and the continuous outer frame portion. The axial portion of the seal member extends through the continuous gap.

In various embodiments of the disclosure, a door assembly for a reticle pod is disclosed having a framework including an outer frame portion continuous about a central axis and having a shoulder portion defining an opening, an inner lattice portion bridging the outer frame portion and traversing the opening, the inner lattice portion defining a mounting face that defines a plane and is recessed relative to the shoulder portion. A door panel is disposed on the mounting face of the inner lattice portion, the door panel and the outer frame portion cooperating to define a continuous gap therebetween. A seal member includes an axial portion continuous about and substantially parallel to the central axis, and a plurality of tab portions extending from one end of the axial portion, the tab portions being substantially parallel to the central axis. The seal member is disposed within the continuous gap, the tab portions extending into the inner lattice portion. In some embodiments, the outer frame portion includes a plurality of barbs that contact the axial portion of the seal member.

In various embodiments of the disclosure, a method of assembling a door assembly for a reticle pod includes attaching a door panel to an inner lattice portion of a framework to define a gap between an outer periphery of the door panel and an outer frame of the framework, and inserting a continuous seal member in the gap so that a plurality of tabs that depend from the continuous seal member extend into the inner lattice portion. In some embodiments, at least one of the plurality of tabs is grasped to pull the continuous seal portion into the continuous gap.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an upper perspective view of an unassembled substrate container according to embodiments of the disclosure.

FIG. 2 is a lower perspective view of an unassembled substrate container according to an embodiment of the disclosure.

FIG. 3 is a lower perspective view of an assembled substrate container of FIG. 2 according to an embodiment of the disclosure. FIG. 4 is an enlarged, partial lower perspective view of a rocker valve assembly of FIG. 2 according to an embodiment of the disclosure.

FIG. 5 is an isolated perspective view of a rocker arm of the rocker valve assembly of FIG. 2 with optional spring-loaded cantilever depicted according to an embodiment of the disclosure.

FIG. 6 is a partial sectional view of the substrate container of FIG. 2 depicting the rocker valve assembly in a closed configuration according to an embodiment of the disclosure.

FIG. 7 is a partial sectional view of a door assembly of FIG. 2 depicting the rocker valve assembly in a venting configuration according to an embodiment of the disclosure.

FIG. 8 is a partial sectional view of the door assembly of FIG. 2 with a rocker valve assembly having a venting aperture with a compliant seal according to an embodiment of the disclosure.

FIGS. 9 and 10 are sectional views of alternative compliant seal arrangements according to embodiments of the disclosure.

FIG. 11 is a bottom perspective view of a substrate container with a sliding actuator valve assembly arrangement for venting the substrate container according to an embodiment of the disclosure.

FIG. 12 is an enlarged, partial bottom perspective view of the substrate container of FIG. 1 1.

FIG. 13 is a perspective, partial sectional view of the sliding actuator valve assembly of FIG. 11 according to an embodiment of the disclosure.

FIG. 14 is a top perspective view of a sliding actuator for the sliding actuator valve assembly of FIG. 11 in an embodiment of the disclosure.

FIG. 15 is a bottom perspective view of the sliding actuator of FIG. 1 . FIG. 16 is a top perspective view of a hollow cylindrical body for a plunger assembly used in the sliding actuator valve assembly of FIG. 1 1 in an embodiment of the disclosure.

FIG. 17 is a bottom perspective view of the hollow cylindrical body of FIG. 16 in an embodiment of the disclosure.

FIG. 18 is a schematic of the sliding actuator valve assembly of FIG. 11 during actuation to close a vent in an embodiment of the disclosure.

FIG. 19 is a schematic of the sliding actuator valve assembly of FIG. 11 during release to open the vent in an embodiment of the disclosure. FIG. 20 is a schematic representation of the sliding actuator valve assembly of

FIG. 11 according to an embodiment of the disclosure.

FIG. 21 is an isolated, perspective view of a continuous seal member having an inwardly-extending lateral portion in an embodiment of the disclosure.

FIG. 22 is a partial sectional view of the continuous seal member of taken along line XXII-XXII of FIG. 21 in an embodiment of the disclosure.

FIG. 23 is an isolated, perspective view of a framework having an inset flange portion in an embodiment of the disclosure.

FIG. 24 is an upper perspective exploded view of a door assembly utilizing the continuous seal member of FIG. 21 according to an embodiment of the disclosure. FIG. 25 is a lower perspective exploded view of the door assembly of FIG. 24.

FIG. 26 is an enlarged, partial sectional view of the assembled door assembly of FIG. 24 in an embodiment of the disclosure.

FIG. 27 is an isolated, perspective view of a continuous seal member having axially extending tab portions in an embodiment of the disclosure. FIG. 28 is an upper perspective exploded view of a door assembly utilizing the continuous seal member of FIG. 27 according to an embodiment of the disclosure. FIG. 29 is an enlarged, partial perspective view of a door frame of FIG. 28 having barb elements in an embodiment of the disclosure.

FIG. 30 is a lower perspective exploded view of the door assembly of FIG. 28.

FIG. 31 is a lower perspective view of the door assembly of FIG. 28 in full assembly in an embodiment of the disclosure.

FIG. 32 is an enlarged, partial perspective view of the door assembly of a tab portion projecting into the door frame of FIG. 31 in an embodiment of the disclosure.

FIG. 33 is an enlarged, partial sectional view of the door assembly of FIG. 31 taken along line XXXIII-XXXIII of FIG. 32 in an embodiment of the disclosure. DETAILED DESCRIPTION OF THE DEPICTED EMBODIMENTS

Referring to FIG. 1, a substrate container 40 configured for mechanical venting is depicted according to embodiments of the disclosure. The substrate container 40 includes a bottom door 42 and an upper housing 44 that assemble axially aligned about a central axis 45 and cooperate to define a chamber 46 (FIG. 6) for retaining a substrate 48 within. The bottom door 42 includes a framework 52 and a door panel 54, the door panel 54 having an interior face 56, an exterior face 58 (FIG. 2), and an edge perimeter 62 (FIG. 7) that bridges the interior and exterior faces 56 and 58. The door panel 54 defines a venting aperture 64 that passes therethrough, defining an aperture perimeter 66. The door panel 54 may also define a plurality of through holes 68 that pass through the interior face 56 and exterior face 58 for mounting of filter housings 72 and/or other purging appurtenances.

The framework 52 includes a periphery 82 that defines a plurality of latch recesses 84. The upper housing 44 includes a latch mechanism 86 having latches 88 that engage the latch recesses 84. A continuous seal member 100 extends from the bottom door 42 to contact the upper housing 44 when assembled. While the embodiments presented herein depict the seal member 100 as mounted to and extending from the bottom door 42, seal members that are mounted to and extending from the upper housing 44 are also contemplated. The seal member 100 selectively provides a continuous seal line 102 (FIG. 6) between the bottom door 42 and the upper housing 44 for isolation of the chamber 46 from the ambient environment. An example and non-limiting material for the seal member 100 is a fluoroelastomer such as V1TON®, available from Dupont Corporation, or generic ethylenepropylenediene monomer or similar elastomeric polymers.

Referring to FIGS. 2 through 7, a substrate container 40a having a rocker valve assembly 120 for venting the chamber 46 is depicted according to an embodiment of the disclosure. The substrate container 40a includes the same components and attributes as the substrate container 40, which are indicated by same-numbered numerical references. The rocker valve assembly 120 includes a rocker arm assembly 122 mounted to the bottom door 42 about a pivot 124, the rocker arm assembly 122 including a lever portion 126 that extends into or otherwise interfaces one of the latch recess 84. The lever portion 126 is arranged to engage a corresponding one of the latches 88 of the latch mechanism 86. The rocker arm assembly 122 also includes a plug portion 128 configured to selectively close the venting aperture 64 of the door panel 54.

In operation, when the latch 88 of the latch mechanism 86 is engaged within the latch recess 84, the latch 88 actuates the lever portion 126 of the rocker arm assembly 122 to rotate about the pivot 124 so that the plug portion 128 rotates into a closed configuration 130 that closes the venting aperture 64 of the door panel 54 (FIG. 6). Upon disengagement of the latch mechanism 86, the latch 88 retracts from the latch recess 84, releasing the lever portion 126 of the rocker arm assembly 22 and enabling the lever portion 126 to rotate into the latch recess 84. This action rotates the plug portion 128 away from the venting aperture 64 into an open or venting configuration 131, opening the venting aperture 64 to the ambient environment (FIG. 7).

In various embodiments, the rocker arm assembly 122 includes a receptacle 132 coupled to or integral with the lever portion 126, and the plug portion 128 includes a sphere 134 disposed in the receptacle 132. In some embodiments, the sphere 134 is undersized relative to the receptacle 132, so that the sphere 134 can move within the receptacle 132. Allowing the sphere 134 to move within the receptacle 132 enables the sphere 134 to self-align within the venting aperture 64 when the rocker valve assembly 120 is in the closed configuration 130.

The sphere 134 may include a metallic material, such as a stainless steel or other alloy. In some embodiments, the plug portion 128 or sphere 134 is in direct contact with the aperture perimeter 66 of the venting aperture 64 when in the closed configuration 130. In some embodiments, the sphere 134 is metallic and coated with a substance, such as a polymer, providing a surface that has a degree of compliance for better sealing of the aperture when in the closed configuration 130. In various embodiments, the plug portion 128 or sphere 134is made of an elastomeric ball, such as VITON®. Functionally, the weight of the sphere 134 (for example, when a metallic sphere is used) may provide an imbalance about the pivot 124 of the rocker arm assembly 122 so that the rocker valve assembly 120 is gravitationally biased toward the open configuration 131. Other biasing mechanisms, such as a spring member 133 arranged to bias the pivot 124 (depicted in FIG. 7) or a spring loaded cantilever 135 coupled to the receptacle 132 with a spring 137 against the bottom door 42 are contemplated to bias the rocker valve assembly 120 in the open configuration 131. The weight of the sphere 134 also helps prevent the sphere 134 from becoming retained in the venting aperture 64 due to suction when the pressure in the chamber 46 is sub-atmospheric. Metal-to-metal contact between the sphere 134 and the venting aperture 64 eliminates elastomers, which can pose a contamination concern. Furthermore, elastomers can become adhering under extended, compressive contact. Accordingly, a metal-to-metal seal may be easier to break than a seal that utilizes an elastomer contact.

In various embodiments, the bottom door 42 is a door assembly 150, wherein the door panel 54 is formed separately and/or detachable from the framework 52. The door panel 54 can be of a solid (homogeneous) metallic or non-metallic material, or a composite (non-homogeneous) material, and may be a rectangular panel with rounded corners. The door panel 54 may be of a metallic material, such as a stainless steel, aluminum, or other alloy. Door panels of different materials and or configurations may also be implemented. For embodiments where the sphere 134 is metallic and seated directly on the aperture perimeter 66 of the venting aperture 64 in the closed configuration 130, the sphere 134 and the aperture perimeter 66 are finished to a smoothness that provides adequate sealing in the closed configuration 130. In some embodiments, these surfaces are finished to a surface finish in a range of 0.5 to 16 microinches (μίη) root-mean-squared (RMS) inclusive. In some embodiments, the surfaces are finished to a surface finish of 4 to 16 μίη RMS inclusive. In some embodiments, the surfaces are finished to a surface finish of 0.5 to 8 μίη RMS inclusive. Herein, a range is said to be "inclusive" includes the end point values of the stated range as well as all values between the end point values. A microinch is 10^"6 inches.

Referring to FIG. 8, a rocker valve assembly 120a including a compliant seal is depicted in an embodiment of the disclosure. The rocker valve assembly 120a includes the same components and attributes as the rocker valve assembly 120, which are indicated by same-numbered numerical references. The rocker valve assembly 120a also includes a compliant seal member 152 configured to contact the plug portion 128 and the door panel 54, thereby providing an enhanced seal of the venting aperture 64 when the rocker arm assembly 122 is in the closed configuration 130. In the depicted embodiment, the compliant member 152 is an O-ring that lines the internal diameter of the venting aperture 64. The O-ring 152 is captured between an inset 153 formed at a lower extremity of the venting aperture 64 and the filter housing 72 affixed to the interior face 56 of the door panel 54. Other compliant members and arrangements are contemplated, including an outward-facing gasket 152a seated within a counter-bore 154 that surrounds the venting aperture 64 (FIG. 9), or a grommet 152b that is configured to extend through the venting aperture 64 and with flanges 156 that grip the interior and exterior faces 56 and 58 of the door panel 54 (FIG. 10). The "compliance" of a compliant member may also vary substantially, from the relatively soft (e.g., rubbers and elastomers, such as for O-rings) to the relatively hard (e.g., polymers and fluoropolymers, such as polytetrafluoroethylene). A non-limiting example of the hardness of the compliant member 152, 152a, or 152b is in a range from 60 Shore A durometer hardness to 120 Rockwell R hardness inclusive.

Referring to FIGS. 11 through 17, a substrate container 40b implementing a sliding actuator valve assembly 200 is depicted in an embodiment of the disclosure. The sliding actuator valve assembly 200 includes a sliding actuator 202 that is mounted to the underside of the bottom door 42 and engages a plunger assembly 204. The plunger assembly 204 extends through the venting aperture 64 on the bottom door 42.

In the depicted embodiment, the sliding actuator 202 includes a body 206 having an engagement pad 208 on one end and defining a center cam 212 on an opposing end. A pair of lateral cams 214 extend from the body 206. In some embodiments, the lateral cams 214 are separated from a registration face 216 of the body 206 by standoffs 218. In the depicted embodiment, the body 206 defines an elongate slot 222 having a major axis 224 that is coincidental with an actuation axis 226 of the sliding actuator 202. The center cam 212 defines an inclined surface 232 that slopes away from the registration face 216 of the body 206. The lateral cams 214 also define inclined surfaces 234. The inclined surfaces 232 and 234 slope away from each other (diverge) in a direction of actuation 236. In various embodiments, the inclined surfaces 232 and 234 define an angle with respect to the actuation axis 226 that is in a range of 30 degrees to 60 degrees inclusive. The sliding actuator 202 may be mounted to a boss 238 defined by the framework 52, the boss 238 effectively extending from the exterior face 58 of the door panel 54. In various embodiments, the boss 238 is threaded to accept a fastener 240.

As depicted in FIGS. 16 through 20, the plunger assembly 204 includes a hollow cylindrical body 242 defining having an open end 244, a mounting end 246, and defining a cavity 248 about a plunger axis 252. In some embodiments, the mounting end 246 includes cap portion 254 defining an aperture 256 therethrough, the aperture 256 being concentric about the plunger axis 252. A pair of opposing arms 258 extend laterally from the cylindrical body 242 about a lateral axis 262 that is orthogonal to the plunger axis 252. The plunger assembly 204 includes a spring 264 disposed within the hollow cylindrical body 242 concentric about the plunger axis 252, and a plunger sphere 266 centered about the plunger axis 252 proximate the open end 244 (FIG. 20). The plunger sphere 266 is dimensioned to readily translate along the plunger axis 252 within the hollow cylindrical body 242. A valve member 268 is mounted to the cap portion 254 of the cylindrical body 242. In the depicted embodiment, the valve member 268 is a poppet 272 having a stem 274 and a disc or cup 276, the disc/cup 276 being dimensioned and arranged to selectively cover the venting aperture 64. The stem 274 may include a bulbous end 278 (FIG. 13) configured push through the aperture 256 of the cap portion 254 (FIG. 16) and expand into the cavity 248 of the hollow cylindrical body 242 to secure the valve member 268 to the cap portion 254 (FIG. 13).

In the depicted embodiment, the framework 52 includes a collar 282 that is aligned with and surrounds the venting aperture 64 on the exterior face 58 of the door panel 54

(FIG. 12). The collar 282 defines open ended slots 284 that are diametrically opposed.

The plunger assembly 204 is disposed within the collar 282, such that the opposing arms 258 of the plunger assembly 204 extend through the diametrically oppose open ended slots

284. The open ended slots 284 of the collar 282 and opposing arms 258 of plunger assembly 204 are dimensioned to enable the opposing arms 258 to translate freely within the open ended slots 284 in a direction parallel to the plunger axis 252. The collar 282 maintains the rotational orientation of the plunger assembly 204 about the plunger axis 252, so that the opposing arms 258 of the plunger assembly 204 are aligned for contact with the lateral cams 214 of the sliding actuator 202.

In assembly, the spring 264 is inserted into the cavity 248 through the open end 244 of the hollow cylindrical body 242 and seated against the cap portion 254. In an uncompressed state, the spring 264 extends through the open end 244 of the cylindrical body 242 when registered against the cap portion 254 of the cylindrical body 242. The cylindrical body 242 is inserted into the collar 282 and venting aperture 64, such that the opposing arms 258 are disposed within the opposing open ended slots 284 and the mounting end 246 passes through the venting aperture 64 into the chamber 46 of the substrate container 40b. The poppet 272 is inserted into the aperture 256 of the cap portion 254. The plunger sphere 266 is aligned with the plunger axis 252 and in contact with the spring 264. The sliding actuator 202 is manipulated so that the center cam 212 pushes the plunger sphere 266 into the open end 244 of the cylindrical body 242 of the plunger assembly 204, and so that the lateral cams 214 straddle the collar 282 and extend between the opposing arms 258 of the plunger and the exterior face 58 of the door panel 54. Accordingly, the plunger sphere 266 is captured within the cavity 248 of the hollow cylindrical body 242 by the center cam 212, and the spring 264 is in compression within the hollow cylindrical body 242. The sliding actuator 202 is arranged so that that the engagement pad 208 is extendible into or interfaces with the latch recess 84. The elongate slot 222 is aligned with the boss 238 fastened thereto with the fastener 240. The fastener 240 passes through the elongate slot 222, such that the registration face 216 of the body 206 is in sliding contact with the boss 238. "Sliding contact" is affected by adjusting fastener 240 so that the sliding actuator 202 is captured between fastener 240 and the boss 238, but can slide between the head of the fastener 240 and the boss 238 with little resistance. The elongate slot 222 is dimensioned so that the fastener 240 acts as a stop that limits the retraction of the sliding actuator 202 so that the plunger sphere 266 is always in contact with the center cam 212 and retained within the cylindrical body 242. Other stops (not depicted) are also contemplated for insertion into the elongate slot 222, such as a bushing or sleeve concentric about the fastener 240, or a reduced neck portion of the boss 238 that extends into the elongate slot 222. The bushing and reduced neck portion can be dimensioned axially so that fully tightening the fastener 240 thereto provides the desired dimension between the head of the fastener 240 and the boss 238 for sliding contact.

Referring to FIGS. 18 through 20, operation of the sliding actuator valve assembly 200 is depicted according to an embodiment of the disclosure. When the latch 88 is engaged within the latch recess 84, the latch 88 exerts an actuation force Fa on the engagement pad 208 of the sliding actuator 202, motivating the sliding actuator 202 in the direction of actuation 236 (FIG. 18). The actuation causes the lateral cams 214 to slide between the exterior face 58 of the door panel 54 and the opposing arms 258 of the plunger assembly 204 in the direction of actuation 236, which draws the plunger assembly 204 into a closed configuration, wherein the poppet 272 is seated over the venting aperture 64. Thus, during actuation of the sliding actuator valve assembly 200, the opposing arms 258 of the plunger assembly 204 act as cam followers. The actuation also causes the center cam 212 to drive the plunger sphere 266 further into the hollow cylindrical body 242 of the plunger assembly 204, further compressing and increasing a compressive force Fc on the spring 264 within the hollow cylindrical body 242.

In the closed configuration, the compressive force Fc of the spring 264 generates reactive forces Fr on the inclined surfaces 232 and 234 of the central and lateral cams 212 and 214 via the plunger sphere 266 and the opposing arms 258 (FIG. 20). The reactive forces Fr include parallel force components Fp that act in a direction parallel to the exterior face 58 of the door panel 54. The parallel force components Fp are opposed by the actuation force Fa of the latch 88 to hold the sliding actuator valve assembly 200 in equilibrium.

When the latch 88 is withdrawn from the latch recess 84, the parallel force components Fp are not opposed by the actuation force Fa, so that the sliding actuator valve assembly 200 is motivated in a direction of retraction 286 that is opposite the direction of actuation 236. The compressive force Fc of the spring 264 also motivates the plunger assembly 204, causing the opposing arms 258 of the plunger assembly 204 to slide on the inclined surfaces 232 of the lateral cams 214 and to translate along the plunger axis 252 and further into the venting aperture 64 as the lateral cams 214 retract. The translation further into the venting aperture 64 causes the valve member 268 to lift away from the interior face 56 of the door panel, thereby opening the chamber 46 to the ambient environment via the venting aperture 64. In various embodiments, the body 206 of the sliding actuator 202 is formed of a self-lubricating or low friction material, such as polyoxymethylene (POM) or a polycarbonate- or polymer- base material filled with polytetrafluoroethylene (PTFE). Such materials exhibit favorable wear characteristics while providing a low friction surface for engagement of the opposing arms 258 and the plunger sphere 266. Low friction between the inclined surfaces 232, 234 and the opposing arms 258 and the plunger sphere 266 is favored for more efficient translation of the sliding actuator 202 in the direction of retraction 286. Low friction materials for the sliding actuator 202 is also desirable for sliding of the sliding actuator 202 along the exterior face 58 of the panel 54, and to augment sliding of the body 206 between the boss 238 and the head of the fastener 240.

Referring to FIGS. 21 through 26, a door assembly 150a implementing a continuous seal member 100a, the door panel 54, and a framework 52a is depicted in an embodiment of the disclosure. The framework 52a includes an outer frame portion 302 and an inner lattice portion 304, the outer frame portion 302 including a shoulder 306 defining an opening 308. In various embodiments, the inner lattice portion 304 is integrally formed with the outer frame portion 302 by injection molding.

Herein, the disclosed door assemblies are referred to generically or collectively as door assembly 150, and specifically by the numerical reference 150 followed by a letter suffix (e.g., door assembly 150a). Likewise, seal members and frameworks are referred to generically or collectively as seal member 100 and framework 52, and specifically by the numerical references 100 and 52, respectively, followed by a letter suffix (e.g., seal member 100a and framework 52a).

The inner lattice portion 304 includes a plurality of cross members 312 that traverse the opening 308 to define a plurality of voids 314. The inner lattice portion 304 defines a mounting face 316 having extremities that lie on a common plane 328, the mounting face 316 being recessed relative to an extremity 318 of the shoulder 306, thus defining a door panel receptacle 322. The inner lattice portion 304 also includes a plurality of fastener receptacles 324 configured to accept fasteners 243 for securing the door panel 54 to the framework 52a and/or for securing appurtenances to the interior face 56 of the door panel 54. In various embodiments, the cross members 312 include contact edges 326 that contact the exterior face 58 of the door panel 54 on the common plane 328 (FIG. 26). The contact edges 326 can be substantially planar (as depicted), or can define a profile that reduces contact area of the mounting face 316 with the exterior face 58 of the door panel 54. Examples of such profiles include a radiused edge, or spaced protrusions distributed along the lengths of the cross members 312. The continuous seal member 100a includes an axial portion 332 (i.e., a portion extending parallel to the central axis 45) and an outwardly-extending lateral portion 330 extending radially outward from a first end 336 of the axial portion 332. As depicted in FIGS. 22, 24, and 25, the continuous seal member 100a also includes an inwardly- extending lateral portion 338 that extends radially inward from a second end 340 of the axial portion 332 to define a radially inward perimeter 334. In various embodiments, the inwardly-extending lateral portion 338 includes a raised lip portion 342 that locally increases an axial thickness 344 of the inwardly-extending lateral portion 338. The raised lip portion 342 may protrude toward the door panel 54 (as depicted) or toward the framework 52a. In some embodiments, the raised lip portion 342 is positioned proximate the radially inward perimeter 334. The raised lip portion 342 may also be continuous, following the outline of the radially inward perimeter 334 (FIG. 22). A dual raised lip portion (not depicted) is also contemplated, wherein opposing raised lip portions protrude in opposing axial directions from the inwardly-extending lateral portion 338.

The outer frame portion 302 also includes an inset flange portion 346 that extends radially inward (i.e., toward the central axis 45), the inset flange portion 346 defining a planar registration face 348 for the seal member 100a and being configured to accommodate the inwardly-extending lateral portion 338 of the continuous seal member 100a. As depicted in FIG. 26, the planar registration face 348 of the inset flange portion 346 is recessed from the common plane 328, allowing room for the axial thickness 344 of inset flange portion 346 of the seal member 100a with some degree of compression. The inset flange portion 346 may define relief notches 352 for unobstructed mounting of appurtenances (e.g., filter housings 72) to the door panel 54. In some embodiments, the inwardly-extending lateral portion 338 of the continuous seal member 100a includes corresponding relief notches 354 that align with the relief notches 352 of the inset flange portion 346.

As depicted in the embodiment of FIGS. 24 and 25, a plurality of fixtures 360 each including a boss portion 362 and an alignment pin 364 that are pressed into corresponding apertures 366 and 368 of the base door panel 54. In one embodiment, one or more of the boss portions 362 can be threaded and aligned with a corresponding one of the fastener receptacles 324. In another embodiment (not depicted), there is no boss portion; instead, the base of the fixture 360 includes a through hole that is aligned with a corresponding mounting aperture 366 and fastener receptacle 324, all sized for a clearance fit with a fastener 243.

In assembly, as depicted in FIG. 26, the continuous seal member 100a is disposed within the framework 52a so that the inwardly-extending lateral portion 338 is in contact with the planar registration face 348 of the flange portion 346. The door panel 54 is then disposed within the framework 52a, so that the inwardly-extending lateral portion 338 of the continuous seal member 100a is captured interstitially between the door panel 54 and the inset flange portion 346 of the outer frame portion 302. The fixtures 360 are seated within the corresponding apertures 366, 368 and the fasteners 243 inserted through the fastener receptacles 324 of the framework: 52a and threaded into the boss portions 362. In other embodiments (not depicted), a fastener is fed through the fixture 360, mounting aperture 366, and fastener receptacle 324 and terminated on one end with a nut. The fasteners 243 are tightened to draw the door panel 54 into firm contact with the cross members 312, thereby compressing the inwardly-extending lateral portion 338 of the continuous seal member 100a between the door panel 54 and the planar registration face 348 of the inset flange portion 346. Compression of the inwardly-extending lateral portion 338 provides a seal between the door panel 54 and the framework 52a.

Referring to FIGS. 27 through 33, a door assembly 150b implementing a continuous seal member 100b, the door panel 54, and a framework 52b is depicted in an embodiment of the disclosure. In the depicted embodiment, the door assembly 150b includes many of the same components and attributes as the door assembly 1 0a, which are indicated with same-numbered numerical references. The continuous seal member 100b does not include an inwardly-extending lateral portion that extends from the second end 340, but instead includes a plurality of tab portions 372 that project axially from the second end 340 of the axial portion 332. The tab portions 372 are positioned along the second end 340 of the axial portion 332 to project within or through the voids 314, so that the cross members 312 do not interfere with placement of the continuous seal member 100b. In some embodiments, the outer frame portion 302 includes a plurality of barbs 374 that project radially inward from a radial inward face 376 of the outer frame portion. The framework 52b does not include an inset flange portion.

For the door assembly 150b, the door panel 54 and the outer frame portion 302 cooperate to define a continuous groove 382 that passes from the interior face 56 to the exterior face 58 of the door panel 54 (FIG. 33). In this embodiment, the axial portion 332 of the continuous seal member 100b is captured within the groove 382 between the edge perimeter 62 of the door panel 54 and the outer frame portion 302 of the framework 52b. The axial portion 332 can be dimensioned to provide an interference fit within the groove 382 for retention of the continuous seal member 100a. In one embodiment, the second end 340 of the axial portion 332 faces and is exposed to the inner lattice portion 304 of the framework 52b. In one embodiment, the second end 340 can be substantially flush with exterior face 58 of the door panel 54.

In assembly, the door panel 54 is placed within the framework 52b. In one embodiment, fasteners 243 are fed through one or more of the fastener receptacles 324 and threaded into the door panel 54. Alternatively, one or more of the fixtures 360 are disposed in the corresponding apertures 366, 368 and the fasteners threaded into the boss portions 362. In still other embodiments, a fastener is fed through the fixture 360, mounting aperture 366, and fastener receptacle 324 and terminated on one end with a nut (not depicted). The fasteners 243 can be initially tightened only slightly to provide a spaced fit between the door panel 54 and the framework 52b and to define the groove 382. The axial portion 332 of the continuous seal member 100b can then be inserted into the groove 382 to aid in centering the door panel 54 within the opening 308 of the outer frame portion 302. The fasteners 243 can then be fully tightened to secure the door panel 54 to the framework 52b and to secure the continuous seal member 100a within the groove 382. Functionally, the tab portions 372 can be grasped by personnel assembling the door assembly 150b to pull the axial portion 332 through the groove 382 and into contact with the cross members 308 of the framework 52b. The tab portions 372 also provide visual confirmation that the continuous seal member 100b is seated within the groove 382. The boss portion 362 (or, in the absence of a boss, the fastener 243) laterally secures a given fixture 360 to the interior face 56 of the door panel 54. The boss portion 362 can be dimensioned to provide a friction fit within the mounting aperture 366 to also prevent axial movement (i.e., movement parallel to the central axis 45). For embodiments where the boss portion 362 includes internal threads, the accompanying fastener 243 captures the fixture 360 to prevent axial movement. The alignment pin 364 disposed in the alignment aperture 368 ensures proper alignment of the fixture 360, and also prevents rotation of the fixture 360 over time. The barbs 374 help retain the continuous seal member 100b within the groove 382. The additional retention provided by the barbs 374 may be particularly helpful during washing of the framework: 52b. In some embodiments, the barbs 374 are strategically placed, for example, proximate the corners and/or proximate the tab portions 372 where the additional friction provided by the barbs 374 are more readily overcome.

Various aspects of the door assembly 150b help to augment the drying process after the door is washed for faster and more thorough drying. For embodiments where the door panel 54 is of a homogeneous material (e.g., solid metal or solid polymer), there are no laminate layers which can entrap moisture from the washing process. The voids 312 within the framework 52b provide access to the contact areas between the framework 52b and the door panel 54 for drying purposes. In some embodiments, the exterior surface of the cover portion and side walls has a cumulative total surface area and the engagement contact area where the cover portion is secured to the frame 204b at bosses or otherwise, and the contact areas (if any) where there are standoffs engaging the cover portion has a total contact area.

For embodiments that implement reduced area structures (e.g., contact edges 326 having radiused edges or spaced protrusions distributed along the lengths of the cross members 308), access to the contact areas are further enhanced. The groove 382, being accessible from both the interior face 56 and the exterior face 58 during the drying operation, also enhances drying, as there is no gland for entrapment of moisture. Accordingly, the door assembly 150b can be readily dried after a washing process without need for disassembly of the door assembly 150b. The seal can be removed if desired for replacement or washing.

Each of the additional figures and methods disclosed herein can be used separately, or in conjunction with other features and methods, to provide improved devices and methods for making and using the same. Therefore, combinations of features and methods disclosed herein may not be necessary to practice the disclosure in its broadest sense and are instead disclosed merely to particularly describe representative and preferred embodiments. Various modifications to the embodiments may be apparent to one of skill in the art upon reading this disclosure. For example, persons of ordinary skill in the relevant arts will recognize that the various features described for the different embodiments can be suitably combined, un-combined, and re-combined with other features, alone, or in different combinations. Likewise, the various features described above should all be regarded as example embodiments, rather than limitations to the scope or spirit of the disclosure.

Persons of ordinary skill in the relevant arts will recognize that various embodiments can comprise fewer features than illustrated in any individual embodiment described above. The embodiments described herein are not meant to be an exhaustive presentation of the ways in which the various features may be combined. Accordingly, the embodiments are not mutually exclusive combinations of features; rather, the claims can comprise a combination of different individual features selected from different individual embodiments, as understood by persons of ordinary skill in the art. The following patent applications, commonly owned by the applicant of the present application, are incorporated by reference herein in their entirety except for express definitions and patent claims contained therein: International Publication No. WO 2015/095357 to Tieben et al.; and International Publication No. WO 2015/066484 to Tieben et al. Any incorporation by reference of documents above is limited such that no subject matter is incorporated that is contrary to the explicit disclosure herein. Any incorporation by reference of documents above is further limited such that no claims included in the documents are incorporated by reference herein. Any incorporation by reference of documents above is yet further limited such that any definitions provided in the documents are not incorporated by reference herein unless expressly included herein. References to "embodiment(s)", "disclosure", "present disclosure",

"embodiment(s) of the disclosure", "disclosed embodiment(s)", and the like contained herein refer to the specification (text, including the claims, and figures) of this patent application that are not admitted prior art.

For purposes of interpreting the claims, it is expressly intended that the provisions of 35 U.S.C. 112(f) are not to be invoked unless the specific terms "means for" or "step for" are recited in the respective claim.

Claims

CLAIMS What is claimed is:

1. A substrate container, comprising: a bottom door defining a latch recess and a venting aperture; an upper housing including a latch mechanism that engages the latch recess; a continuous seal member extending from one of the bottom door and the upper housing to contact the other of the upper housing and the bottom door to define a continuous seal line between the bottom door and the upper housing; and a rocker valve assembly pivotally mounted to the bottom door and including a lever portion that interfaces the latch recess and a plug portion for selective closure of the venting aperture of the door panel, wherein the lever portion is arranged to engage the latch mechanism so that the rocker valve assembly rotates the plug portion into a closed configuration that closes the venting aperture when the latch mechanism is engaged within the latch recess, and to disengage the latch mechanism so that the rocker valve assembly rotates the plug portion away from the venting aperture to a venting configuration that opens the venting aperture when the latch mechanism is disengaged from the latch recess.

2. The substrate container of claim 1, wherein the rocker valve assembly includes a receptacle portion coupled to the lever portion and the plug portion is a sphere disposed within the receptacle portion.

3. The substrate container of claim 2, wherein the sphere is in direct contact with a perimeter of the venting aperture when the plug portion is in the closed configuration.

4. The substrate container of claim 3, wherein the sphere is metallic.

5. The substrate container of claim 4, wherein the venting aperture is formed on a portion of the bottom door that is metallic, the sphere and the perimeter of the venting aperture having a root-mean-square surface finish in a range of 0.5 x 10^"6 to 8 x 10^"6 inches inclusive.

6. The substrate container of claim 1, comprising a compliant seal member configured to contact the plug portion and the bottom door to seal the venting aperture when the plug portion is in the closed configuration.

7. The substrate container of claim 6, wherein the compliant seal member comprises at least one from the group consisting of an O-ring, a grommet, and a gasket.

8. The substrate container of claim 1 , wherein the bottom door includes a door frame and a door panel that are unitary.

9. The substrate container of claim 1, wherein: the bottom door is a door assembly including a door frame and a door panel that are detachable, the door frame including a continuous inset flange portion that supports the door panel; the continuous seal member includes an inset flange portion that is captured between the door panel and the inset flange of the door frame; and the continuous seal member provides a continuous seal between the door panel and the inset flange of the door frame.

10. A substrate container, comprising: a bottom door including a door frame that defines a latch recess and a door panel that defines a venting aperture; an upper housing including a latch mechanism that engages the latch recess; a continuous seal member extending from one of the bottom door and the upper housing to contact the other of the upper housing and the bottom door to define a continuous seal line between the bottom door and the upper housing; a sliding actuator coupled to the bottom door that interfaces with the latch recess and includes an inclined surface; a plunger arranged to selectively close the venting aperture and engaged with the inclined surface for actuation from a closed configuration to an open configuration; and a biasing element operatively coupled to the plunger to exert a biasing force on the plunger toward the open configuration, wherein the sliding actuator is arranged to engage the latch mechanism so that the inclined surface maintains the plunger in the closed configuration when the latch mechanism is engaged within the latch recess, and to disengage the latch mechanism so that the biasing force acts on the inclined surface to translate the sliding actuator in a direction away from the plunger and motivates the plunger into the open configuration.

11. The substrate container of claim 10, wherein the inclined surface defines an angle in a range of 30 degrees to 60 degrees inclusive with respect to a direction of actuation.

12. The substrate container of claim 10, wherein the sliding actuator is made of a low friction material.

13. The substrate container of claim 12, wherein the low friction material is one of a polyoxymethylene and a polytetrafluoroethylene-filled polycarbonate.

14. A seal member for a reticle pod, comprising: an axial portion continuous about and substantially parallel to a central axis, the axial portion having a first end and a second end; a continuous outwardly-extending lateral portion that extends from the first end of the lateral portion in a direction away from the central axis; and a plurality of tab portions that extend from the second end of the axial portion, the plurality of tab portions being substantially parallel to the central axis.

15. A seal member for a reticle pod, comprising: an axial portion continuous about and substantially parallel to a central axis, the axial portion having a first end and a second end; a continuous outwardly-extending lateral portion that extends from the first end of the lateral portion in a direction away from the central axis; and a continuous inwardly-extending lateral portion that extends from the second end of the lateral portion in a direction toward the central axis, the continuous inwardly-extending lateral portion being substantially orthogonal to the axial portion.

16. The seal member of claim 14 or 15, wherein the seal is made of one of a fluoroelastomer and an ethylenepropylenediene monomer.

17. A door assembly for a reticle pod, comprising: a framework including an outer frame portion continuous about a central axis and having a shoulder portion defining an opening, an inner lattice portion bridging the outer frame portion and traversing the opening, the inner lattice portion defining a mounting face that defines a plane and is recessed relative to the shoulder portion; a continuous inset flange that extends from the outer frame portion and toward the central axis, the continuous inset flange defining a planar registration face that is recessed relative to the mounting face of the inner lattice portion; a door panel disposed on the mounting face of the inner lattice portion and extending over the planar registration face of the continuous inset flange; and a seal member, including: an axial portion continuous about and substantially parallel to the central axis; and a continuous inwardly-extending lateral portion that extends from and orthogonal to the axial portion in a direction toward the central axis, the continuous inwardly-extending lateral portion being substantially orthogonal to the axial portion, wherein the continuous inwardly-extending lateral portion is captured and compressed between the door panel and the planar registration face of the continuous inset flange.

18. The door assembly of claim 17, wherein: a continuous gap is defined between an outer periphery of the door panel and the continuous outer frame portion; and the axial portion of the seal member extends through the continuous gap.

19. A door assembly for a reticle pod, comprising: a framework including an outer frame portion continuous about a central axis and having a shoulder portion defining an opening, an inner lattice portion bridging the outer frame portion and traversing the opening, the inner lattice portion defining a mounting face that defines a plane and is recessed relative to the shoulder portion; a door panel disposed on the mounting face of the inner lattice portion, the door panel and the outer frame portion cooperating to define a continuous gap therebetween; and a seal member, including: an axial portion continuous about and substantially parallel to the central axis; and a plurality of tab portions extending from one end of the axial portion, the tab portions being substantially parallel to the central axis, wherein the seal member is disposed within the continuous gap, the tab portions extending into the inner lattice portion.

20. The door assembly of claim 19, wherein the outer frame portion includes a plurality of barbs that contact the axial portion of the seal member.

21. A method of assembling a door assembly for a reticle pod, comprising: attaching a door panel to an inner lattice portion of a framework to define a gap between an outer periphery of the door panel and an outer frame of the framework; inserting a continuous seal member in the gap so that a plurality of tabs that depend from the continuous seal member extend into the inner lattice portion.

22. The method of claim 21, comprising grasping at least one of the plurality of tabs to pull the continuous seal portion into the continuous gap.