KR101770475B1 - Diaphragm-type ON/Off Valve - Google Patents

Diaphragm-type ON/Off Valve Download PDF

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Publication number
KR101770475B1
KR101770475B1 KR1020150156469A KR20150156469A KR101770475B1 KR 101770475 B1 KR101770475 B1 KR 101770475B1 KR 1020150156469 A KR1020150156469 A KR 1020150156469A KR 20150156469 A KR20150156469 A KR 20150156469A KR 101770475 B1 KR101770475 B1 KR 101770475B1
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KR
South Korea
Prior art keywords
stem
diaphragm
valve
pair
valve handle
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KR1020150156469A
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Korean (ko)
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KR20170053926A (en
Inventor
안규진
이정훈
이광주
Original Assignee
파카코리아 주식회사
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Priority to KR1020150156469A priority Critical patent/KR101770475B1/en
Publication of KR20170053926A publication Critical patent/KR20170053926A/en
Application granted granted Critical
Publication of KR101770475B1 publication Critical patent/KR101770475B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam

Abstract

The present invention relates to a diaphragm type on-off valve having an inlet port 11 and an outlet port 12 formed on both lower sides thereof and an inlet port 11 and an outlet port 12 between the inlet port 11 and the outlet port 12, A body 10 having a groove communicating with the body 10; A diaphragm 20 installed at an upper portion of the groove to open or shut off a flow passage formed in the groove of the body 10 by an elevating operation; A stem guide 30 formed on the upper portion of the diaphragm 20 and having a cylindrical shape with an open bottom, a through hole 31 formed at a center thereof, and a pair of cam surfaces 32 formed on an upper surface thereof; The stem 40 is inserted into the through hole 31 and resiliently supported by an elastic spring 41. The upper end of the stem 40 protrudes toward the upper side of the stem guide 30. The lower end of the stem 40 contacts the diaphragm 20, ; A roller member 50 mounted on an upper end of the stem 40 to move up and down the stem 40 while being moved along the pair of cam surfaces 32; And a valve handle 60 connected to an upper end of the stem 40 to rotate the stem 40 by a predetermined angle. A protrusion protruding outward is formed at a lower end of the stem guide 30, And an edge of the diaphragm 20 is fixed to the body 10 by being in contact with the contact surface 33. The contact surface 33 is formed with a concave shape.

Description

Diaphragm-type ON / OFF Valve < RTI ID = 0.0 >

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a diaphragm type on-off valve for supplying and shutting off a high-purity gas, and more particularly, to a diaphragm type on-off valve for generating and purifying a high purity gas by pressurizing and releasing a diaphragm, Off valve that can reliably supply and shut off the line to the line.

Silicon wafers and other semiconductor production lines are supplied with high purity gas to ensure high production yield and high quality. At this time, a diaphragm type on-off valve is used to ensure the accuracy of gas supply and shutoff operation The diaphragm type on-off valve generally comprises a handle, a spring, a diaphragm, a stem, and a seat. When the user rotates the valve handle, the valve stem, which is elastically supported by the spring, descends while the diaphragm is pressed against the seat, And when the valve handle is rotated in the opposite direction, the diaphragm is separated from the seat and opens the flow path to supply the working fluid.

However, since the valve stem of the diaphragm type on-off valve is generally resiliently biased by the spring, the valve can not be maintained open or closed due to minute vibrations, and is opened or closed little by little. In addition, unintended gas supply or interruption to the production line may be caused by the user opening or closing the valve due to the mistake of the user.

In order to prevent the unintended operation of the valve due to the mistake of the user or the operation of the spring, measures are taken such as providing a lock device such as a chain or a lock to the valve handle. It is inconvenient to release the valve every time the valve is operated. In addition, even when a chain or a lock is provided on the valve handle, the valve stem The accurate opening and closing performance is not guaranteed.

On the other hand, in order to achieve accurate control of gas supply to the semiconductor production line, as disclosed in Japanese Patent Publication No. 4074017 and US 5,551,477, a cam is provided on the valve to open and close the valve by operation of the cam Off valves can not be surely turned on and off because these cams are only partly formed on these valves, and the off-state can be easily released even if the roller comes off the cam face even for a minute external shock or vibration.

Accordingly, it is required to develop a diaphragm type on-off valve having a structure in which the opening and closing operation of the valve is precisely performed and the minute opening is prevented to thereby reliably maintain the opening and closing state.

JP 4074017 B2 KR 10-1266827 B1 US 5,551,477 A

DISCLOSURE Technical Problem Accordingly, the present invention has been made in order to solve the problems of the conventional gas supply on-off valve as described above, and it is an object of the present invention to provide a diaphragm type on-off valve having a structure in which an accurate opening / closing operation can be performed, The purpose is to do.

It is an object of the present invention to provide a diaphragm type on-off valve comprising: a body having an inlet and an outlet formed on both lower sides of a diaphragm, a body having an inlet and an outlet communicating with the outlet; A diaphragm installed at an upper portion of the groove to open or shut off a flow passage formed in a groove of the body by an elevating operation; A stem guide which is installed at an upper portion of the diaphragm and has a cylindrical shape with an open bottom, a through hole at the center, and a pair of cam surfaces on the upper surface; The stem is elastically supported by an elastic spring inserted into the through hole, the upper end of the stem is protruded toward the upper side of the stem guide, and the lower end of the stem is in contact with the diaphragm; A roller member installed at an upper end of the stem and lifting the stem while being moved along a pair of cam surfaces; And a valve handle which is connected to an upper end of the stem and rotates the stem by a predetermined angle. A projection protruding outward is formed at the lower end of the stem guide. A recessed contact surface is formed on the bottom surface of the projection, Is brought into contact with the contact surface to be fixed to the body.

The present invention is characterized in that a mounting hole is formed on one side of a valve handle and a fixing plate is formed at a lower portion of the valve handle at a position where mounting holes are formed and at the same position in a vertical direction, And a restricting member for restricting the rotation of the valve handle is provided in the installation hole, the lower end being selectively inserted into the pair of through holes.

Further, the present invention is characterized in that a pair of fixing holes are formed on the side surface of the valve handle so as to be in communication with the mounting holes, the fixing member having a fixing pin inserted in the mounting hole and elastically supported by an elastic spring provided on the outer peripheral surface, And a plurality of fixing protrusions formed on the side surface of the pin so as to have elasticity in the outward direction and selectively inserted into the pair of fixing holes.

Further, the present invention is characterized in that a pair of cam surfaces each have a step protruded upward.

In addition, the present invention is characterized in that a threaded portion is formed on the outer circumferential surface of the stem guide, and an unlocking nut is screwed on the threaded portion, thereby preventing the stem guide from being loosened.

Further, the present invention is characterized in that a cylindrical cam cap is provided at an upper portion of the stem guide and the bottom is opened.

Further, the present invention is characterized in that the close contact protrusion is formed so as to be in contact with the bottom face of the diaphragm so as to be brought into close contact with the upper face of the inlet, and a sealing groove is formed in the inside of the close contact protrusion, Another feature.

In addition, the present invention is characterized in that a pair of fixing holes are formed on the side surface of the valve handle at upper and lower intervals so as to communicate with the mounting holes, and the restraint member is composed of a toggle switch which is inserted into the mounting hole and is turned on or off by repetition of the pressing operation Another feature.

According to the present invention, a valve for supplying gas to a semiconductor production line or the like is constituted by a diaphragm type valve so that the flow path can be reliably opened and closed, and the valve is opened and closed by the cam surface formed on the valve stem, .

Further, since the valve operation of the valve handle is prevented by the finely designed pin, the opening and closing state of the valve is more accurately and firmly maintained.

In addition, since the step protrudes toward the upper portion at a position corresponding to the position where the opening and closing of the valve of the cam surface is completed, the movement of the roller member is surely prevented even if minute vibration or unintentional contact with other objects occurs .

In addition, according to the present invention, since the fixing protrusions of the restraint member are protruded to the side rather than the upper side of the valve handle, the fixing protrusions are not easily pressed because of the plurality of fixing protrusions, Even if it is pressed by contact with other objects.

1 is a sectional view showing an example of a conventional cam-driven valve used in a semiconductor production line,
FIG. 2 is a perspective view showing an example of a diaphragm-type on-off valve according to the present invention,
FIG. 3 is an exploded perspective view of FIG. 2,
4 is a cross-sectional view of Fig. 2,
FIG. 5 is an exploded perspective view illustrating an example of a body, a diaphragm, and a stem guide fixing member according to the present invention.
6 is a sectional view showing an example of a body according to the present invention,
FIG. 7 is a perspective view showing an example of a stem guide according to the present invention,
8 is a perspective view showing an example of a stem according to the present invention,
FIG. 9 is a cross-sectional view illustrating an example in which a stem guide, a stem, and a roller member according to the present invention are combined,
FIG. 10 is a usage state showing an example in which a roller member is installed and operated on a stem according to the present invention. FIG.
11 is an exploded view showing an example of releasing the restraint of the valve handle according to the present invention,
Figs. 12 and 13 are diagrams showing a use state of the diaphragm-type on-off valve according to the present invention,
FIG. 14 is a use state showing an example in which a valve handle is restrained by a restraining member according to the present invention;
15 is a state view showing another example in which the valve handle is restrained by the restraining member according to the present invention.

Hereinafter, the structure and operation of the present invention will be described in more detail with reference to the accompanying drawings, which show preferred embodiments.

The present invention provides a diaphragm-type on-off valve having a structure in which an accurate opening and closing operation can be performed and an open / closed state can be reliably maintained. To this end, the diaphragm- Includes a body 10, a diaphragm 20, a stem guide 30, a stem 40, a roller member 50, and a handle 60 as shown.

As shown in FIGS. 4 to 6, the inlet 10 and the outlet 12 are formed on both sides of the bottom of the body 10 so that fluid (gas) A groove having a predetermined depth is formed to communicate with the inlet port 11 and the outlet port 12 so that the stem 40 and the stem guide 30 can be seated and installed therein. And functions as a sheet 13.

As shown in FIG. 5, a screw thread (not shown) is formed on the vertical surface of the groove along the inner circumferential surface, and a stem guide fixing member 14 is screwed to the threads. By this structure, A stem guide 30 is inserted into the upper part of the diaphragm 20 while pressing the edge of the diaphragm 20 and the stem guide fixing member 14 is fixed to the outside of the stem guide 30, The diaphragm 20 and the stem guide 30 are firmly fixed to the body 10 and the leakage of fluid through the edge of the diaphragm 20 is prevented.

The upper end of the inlet port 11 communicating with the valve seat 13 is formed with a close contact protrusion 13A protruding upward so as to easily come into close contact with the bottom face of the diaphragm 20, A sealing ring 13B is formed in the inside of the sealing groove 13B and a sealing ring is inserted in the sealing groove 13B so that the diaphragm 20 is brought into close contact with the close contact protrusion 13A, Is reliably blocked.

As shown in FIGS. 3 and 4, the diaphragm 20, which is made of a flexible material and has elasticity and has a resilience, is fixed to the upper portion of the valve seat 13 by a stem guide 30, The flow path formed in the valve seat 13 is opened and closed.

As shown in FIG. 7, the stem guide 30, which is installed on the upper portion of the diaphragm 20 and fixes the edge of the diaphragm 20, has a hollow shape at the lower portion and a closed cylindrical shape at the upper portion A through hole 31 is formed at the center of the closed upper portion so as to vertically penetrate the through hole 31. A stem 40 to be described later is inserted into the through hole 31, do.

7, a pair of cam surfaces 32, which are bent in the vertical direction, serve as a cam, and are formed in the same shape along the upper surface of the stem guide 30 .

The protrusion (not shown) protruding outward is formed at the lower end of the stem guide 30. The bottom of the protrusion is formed along the edge of the diaphragm 20 so that it is as wide as the edge of the diaphragm 20 A contact surface 33 having a concave shape toward the upper side is formed as shown in FIGS.

A threaded portion 34 is formed on the outer peripheral surface of the cylindrical stem guide 30 at an intermediate height and the threaded portion 34 is threadedly coupled with an anti-loose nut N. The anti- The stem guide 30 is inserted into the stem guide 10 and the stem guide fixing member 14 is installed on the outer side of the stem guide 30 to prevent the stem guide 30 from being loosened when the stem guide 30 is fixed.

A cylindrical cam cap 35 having an open bottom is installed on the upper side of the stem guide 30 so as to surround the upper portion of the stem guide 30 by a fixing screw 35A, 30 is prevented from being introduced into the cam surface 32 formed on the upper surface.

As shown in Figs. 8 and 9, a stem 40 for opening and closing the flow passage is inserted into the through hole 31 of the stem guide 30 by pressing or releasing the diaphragm 20 by a lift-up operation, The elastic force of the resilient spring 41 makes it possible to firmly maintain the contact between the lower end of the stem 40 and the diaphragm 20.

An installation hole 42 and a fastening hole 43 that horizontally penetrate the stem 40 are formed at upper and lower portions of the stem 40 at predetermined intervals. The bolt B provided on the valve handle 60 is inserted and fixed to the fastening hole 43 so that the handle 60 and the stem 40 are inserted into the fastening hole 43. [ So that the rotational movement of the valve handle 60 is transmitted to the stem 40.

The pressing portion 44 is protruded outward at the lower end of the stem 40 so that the pressing portion 44 has a relatively larger diameter than the other portion of the stem 40. The pressing portion 44 is moved up and down in the diaphragm 20, The lower surface of the pressing portion 44 has a downwardly convex shape so that the bottom surface of the stem 40 is reliably in contact with the diaphragm 20. [

3 and 9, a roller member 50 is installed at an upper portion of the stem 40. The roller member 50 is rotatably supported by a fixing shaft 42, which is inserted through an installation hole 42 of the stem 40, And a roller 52 which is installed at both ends of the fixed shaft 51 and rolls along the cam surface 32 and is rotated by the rotation of the stem 40 as the valve handle 60 rotates. The stem 40 connected to the stem guide 30 is moved in close contact with the cam surface 32 formed on the upper surface of the stem guide 30 so that the stem 40 is moved up and down to press or release the diaphragm 20 installed on the lower side, At this time, a step (not shown) protruding upward is formed at a position corresponding to a position where the valve opening and closing is completed when the cam surface 32 is formed, so that the valve handle 60 is rotated by 90 degrees. Rolls due to slight vibration or unintended contact with other objects The movement of the valve member 50 is reliably prevented, and thus the valve open / closed state is maintained.

A valve handle 60 is connected to the stem 40 at an upper end of the stem 40. The valve handle 60 is formed with an insertion hole 61 at a lower portion thereof as shown in FIGS. And an upper portion of the stem guide 30 is inserted into the insertion hole 61 formed at the lower portion of the stem 40. The stem 60 is provided at one side of the valve handle 60 with an installation hole 62 of the stem 40, (Not shown) is formed so that the bolt B to be inserted and fastened can be inserted.

An installation hole 62 is formed at one side of the valve handle 60 so as to pass through the valve hole 60. A pair of fixing holes 62 are vertically spaced from each other so as to communicate with the installation hole 62 in a direction perpendicular to the installation hole 62, A pair of through holes 63 are formed in the side surface of the valve handle 60. A pair of through holes 62 are formed in the same position in the vertical direction from the position where the mounting hole 62 is formed between the valve handle 60 and the anti- 71 are formed at intervals of 180 degrees are provided with a disk-shaped fixing plate 70.

The restricting member 80 is installed on the outer circumferential surface of the mounting hole 62 while being inserted into the mounting hole 62. The restricting member 80 is installed in the mounting hole 62 formed in the valve handle 60, A fixing pin 81 which is elastically supported by an elastic spring 82 and a plurality of fixing pins 81 which are selectively inserted into a pair of fixing holes 63 formed to have elasticity in the outward direction on the side surface of the fixing pin 81 The restricting member 80 is inserted into the mounting hole 62 formed in the valve handle 60 by the structure of the valve handle 60, the fixing plate 70 and the restricting member 80 When the worker pushes the fixing protrusion 83 of the restricting member 80 protruding outward from the fixing hole 63 formed on the side surface of the valve handle 60 by the elasticity force toward the valve handle 60 in the state of being installed, The fixing pin 81 is lifted upward by the elastic force of the elastic spring 82, The lower end of the 81 out of the through hole 71 of the fixed plate 70 is released from the constraint of the valve handle 60.

12, when the user rotates the valve handle 60 by approximately 90 degrees in a state in which the restraint of the valve handle 60 is released by the above operation, the roller member 50 are moved along the curved cam surface 32 to be lifted to raise the stem 40 so that the contact state between the diaphragm 20 and the contact protruding portion 13A is released and a flow path is formed in the valve seat, (11) and the outlet (12) are communicated with each other to allow the gas to flow.

When the user presses the fixing protrusion 83 of the restricting member 80 projected on one side of the valve handle 60 in a state where the flow path is opened or blocked by the operation of the valve handle 60 as described above, The fixing pin 81 is lowered and the lower end of the fixing pin 81 is inserted into the through hole 71 of the fixing plate 70 so that the rotation operation of the valve handle 60 is restricted, It remains intact.

In the present invention, the through hole (71) is precisely formed in the installation hole (62) formed in the valve handle (60) and the same position in the vertical direction as the position where the installation hole (62) is formed, Since the rotation of the valve handle is prevented by inserting the fixing pin 81 through the through hole 62 and the through hole 71, even when minute vibration or the like is generated, in addition to the action of the step formed on the cam surface 32 described above, The state of opening and closing of the door is more accurately and firmly maintained.

The fixing protrusion 83 of the restricting member 80 protrudes laterally without protruding toward the upper side of the valve handle 60. Since the plurality of fixing protrusions 83 are formed, Can not be easily contacted with other objects, and even if one of the fixed protrusions 83 is pushed by a user's mistake or contact with another object, it is not easily operated.

The restricting member 80 is composed of the fixing pin 81 and the fixing protrusion 83 in the above description. However, unlike this example, as the restricting member 80, A toggle switch 81 'having a switch (not shown) and being turned on or off by repetition of a pressing operation may be used. The structure of the toggle switch 81' is already well known A detailed description thereof will be omitted.

As described above, according to the present invention, a valve for supplying gas to semiconductor production lines and the like is constituted by a diaphragm type valve, thereby making it possible to reliably open and close the flow path, and by opening and closing the valve by the cam surface formed on the valve stem, The opening and closing of the oil passage can be achieved and the operation of the valve handle can be prevented by the precisely designed fixing pin with its installation position being maintained more accurately and firmly.

10: Body 11: Inlet
12: exhaust port 13: valve seat
13A: contact projection 13B: sealing groove
14: stem guide fixing member 20: diaphragm
30: Stem guide 31: Through hole
32: cam surface 33: contact surface
34: threaded portion 35: cam cap
35A: set screw 40: stem
41: elastic spring 42: installation hole
43: fastening hole 44:
50: roller member 51: fixed shaft
52: roller 60: valve handle
61: insertion hole 62: installation hole
63: Fixing hole 70: Fixing plate
71: through hole 80: restraint member
81: Fixing pin 81 ': Toggle switch
82: Elastic spring 83: Fixed projection
B: Bolt N: Loosening nut

Claims (8)

A body 10 having an inlet 11 and an outlet 12 at both lower sides and a groove communicating with the inlet 11 and the outlet 12 between the inlet 11 and the outlet 12, Wow;
A diaphragm 20 installed at an upper portion of the groove to open or shut off a flow passage formed in the groove of the body 10 by an elevating operation;
A stem guide 30 formed on the upper portion of the diaphragm 20 and having a cylindrical shape with an open bottom, a through hole 31 formed at a center thereof, and a pair of cam surfaces 32 formed on an upper surface thereof;
The stem 40 is inserted into the through hole 31 and resiliently supported by an elastic spring 41. The upper end of the stem 40 protrudes toward the upper side of the stem guide 30. The lower end of the stem 40 contacts the diaphragm 20, ;
A roller member 50 mounted on an upper end of the stem 40 to move up and down the stem 40 while being moved along the pair of cam surfaces 32;
And a valve handle (60) connected to an upper end of the stem (40) to rotate the stem (40) by a predetermined angle,
A protruding portion protruding outward is formed at the lower end of the stem guide 30. A contact surface 33 having a concave shape is formed on the bottom surface of the protruding portion and an edge of the diaphragm 20 is connected to the contact surface 33 Is fixed to the body (10) by being brought into contact therewith,
An installation hole 62 is vertically formed at one side of the valve handle 60. A pair of through holes 62 are formed in the lower portion of the valve handle 60 at the same position in the vertical direction, And a lower end is selectively inserted into the pair of through holes 71 so that the rotation of the valve handle 60 A restraining member 80 for restraining the restraining member 80,
A pair of fixing holes 63 are formed on the side surface of the valve handle 60 so as to communicate with the mounting holes 62 and the fixing members 80 are inserted into the mounting holes 62 A fixing pin 81 that is elastically supported by an elastic spring 82 installed on an outer circumferential surface of the fixing pin 81 while being installed on the side of the fixing pin 81, And a plurality of fixed protrusions (83) selectively inserted.
delete delete The method according to claim 1,
Wherein the pair of cam surfaces (32) are each formed with a step protruding upwardly.
The method according to claim 1,
Wherein a stem portion is formed on an outer circumferential surface of the stem guide and the stem guide is prevented from being loosened by screwing a loosening prevention nut to the screw portion. On-off valve.
The method according to claim 1,
Wherein the stem guide (30) is provided with a cam cap (35) having a cylindrical shape with an open bottom.
The method according to claim 1,
The upper end of the inlet port 11 is formed with a close contact protrusion 13A protruding upward so as to be brought into close contact with the bottom surface of the diaphragm 20 and a ring- (13B) is formed in the sealing groove (13B), and a sealing ring is provided in the sealing groove (13B).
The method according to claim 1,
The fixing member 80 may include a plurality of fixing protrusions 83, And a toggle switch (81 ') inserted into the installation hole (62) and turned on or off by repetition of a pressing operation.
KR1020150156469A 2015-11-09 2015-11-09 Diaphragm-type ON/Off Valve KR101770475B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200054831A (en) * 2017-09-26 2020-05-20 가부시키가이샤 깃츠 에스시티 One-touch lock valve and raw material container

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Publication number Priority date Publication date Assignee Title
JP6991332B2 (en) * 2017-12-08 2022-01-12 エスゼット ディージェイアイ テクノロジー カンパニー リミテッド Nozzle assembly, nozzle device, and unmanned aerial vehicle
KR101965327B1 (en) * 2018-02-08 2019-04-04 엠비스텍 주식회사 Medical diaphragm pump device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015030706A1 (en) * 2013-08-26 2015-03-05 Parker-Hannifin Corporation High cycle and speed valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015030706A1 (en) * 2013-08-26 2015-03-05 Parker-Hannifin Corporation High cycle and speed valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200054831A (en) * 2017-09-26 2020-05-20 가부시키가이샤 깃츠 에스시티 One-touch lock valve and raw material container
KR102512198B1 (en) 2017-09-26 2023-03-21 가부시키가이샤 깃츠 에스시티 One-touch lock valve and raw material container

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