TW201633373A - Imprint mold - Google Patents

Abstract

To provide an imprint mold used upon being wrapped around a roll, wherein a concavo-convex pattern formation region of an electroformed mold can be effectively utilized. An imprint mold (10), comprising a disc-shaped electroformed mold body (1) having a concavo-convex pattern (2) formed on the surface, and an extension part (3) integrated with the electroformed mold body (1) so as to extend around the electroformed mold body (1).

Description

Imprinting mold

The present invention relates to an imprint mold used for an imprint method for transferring a minute concavo-convex pattern to a photoresist applied to a substrate, and more particularly to a mold for imprint having flexibility.

Embossing refers to a technique in which a mold having a concavo-convex pattern (generally also referred to as a mold, a stamper, or a mold) is pressed against a photoresist coated on a substrate to be transferred to form a photoresist. The mechanical deformation or flow causes the minute pattern to be precisely transferred onto the photoresist film. As a minute uneven pattern, there is a pattern of about 10 nm to 100 μm. It is expected to be applied to various fields such as the semiconductor field, as long as the mold of the nano-scale is easily reversible, and it is economical, and it is a wasteful waste and a transfer technique with a small amount of discharged matter. .

Further, as an imprint method, a method of applying a roll processing technique such as a roll-to-roller has been proposed. For example, there has been proposed an imprinting method in which a discharge device that releases a flexible long strip (for example, a resin film or an inorganic substrate) to be processed and a winding device that winds the sheet are transported. A roll-shaped metal mold (also referred to as a mold roll or a press roll) having a fine uneven pattern on the surface is provided, and the sheet is conveyed from the discharge device to the winding device while bringing the roll-shaped mold into contact with the processed surface of the sheet. Thereby, the resin film can be embossed continuously or efficiently, or a pattern can be formed on the photoresist applied on the sheet.

For the above-described roll-shaped metal mold, for example, a manufacturing method is known in which a sheet-like thin metal mold (die) having a concavo-convex pattern is wound around a roll that serves as a rotating shaft, and opposite ends of the die that are wound around the roll Manufactured by welding each other.

The above-described mold sheet can be produced by using a master mold (original disc) having a minute uneven pattern on the surface of a nanometer or submicron scale, and the production of the master mold is time consuming and costly, so that it is difficult to increase the size of the mold itself. Therefore, as a method of producing a large-area mold from a main mold of a normal size, a technique of producing a plurality of replica molds from a master mold and connecting the replica molds to each other to form a large-area mold is known (for example, Patent Documents 1, 2, etc.) Patent Document 2 discloses that a film-shaped transfer material is transferred by a roll-to-roll method using a roll mold in which a resin-made large-area mold is wound around a roll main body.

In recent years, a technique for improving the brightness of an LED by providing a fine uneven shape on the surface of a sapphire substrate as a substrate of an LED (Leaser eliminate diode) has been developed as a method of producing the patterned sapphire substrate (PSS: Patterned Sapphire Substrate). Also concerned about imprinting.

Prior technical literature

Patent Document 1: Japanese Laid-Open Patent Publication No. 2012-118520 (Patent Document 2: JP-A-2014-80017)

In the case of using the roll-to-roll type imprint method in the production of the PSS described above, it is conceivable to use a nickel (Ni) electroformed metal mold having a small unevenness on a surface of a roll having a predetermined diameter (for example, a diameter of 300 mm). The member to be fixed by the belt was used as a roll-shaped metal mold, and a resin mold for PSS was produced from the roll-shaped metal mold by roll-to-roll type embossing. At this time, the thickness of the Ni electroforming mold is about several tens of μm to several hundreds of μm, and since the metal mold is adhered to the roll, a step is generated between the surface of the roll and the surface of the Ni electroforming mold. As the master of the Ni electroformed metal mold, a bismuth (Si) wafer which is a general circular member in which the size of the Ni electroformed metal mold is substantially the same as the size of the original disk is generally used.

In the production of the resin mold, in the case where the resin mold is produced in such a manner that the formation region of the concave-convex pattern of the resin mold is closer to the formation region of the concave-convex pattern of the Ni electroforming mold, it is more effective. The use of the concave and convex pattern of the Ni electroformed metal mold is economical.

However, when a resin mold is to be produced more efficiently by using an electroformed metal mold, there is a fear that the coating area spreads around the electroforming metal mold when the photoresist is applied. If the photoresist expands around the electroforming mold, the photoresist enters between the electroforming mold and the roller, and the photoresist of the step remains after the imprinting, which becomes unacceptable after the transfer. the reason. For example, in the case of using a UV (ultraviolet) curing type photoresist, the photoresist entering between the electroforming mold and the roller is hardened by UV irradiation, and remains like a burr, in the next imprinting, A defect that remains as a defect in the burr.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a mold for imprinting which can efficiently form a resin mold using a concavo-convex pattern region of an electroforming mold when a resin mold is produced.

Means for solving problems

The imprint mold of the present invention is wound around a roll and has a concave-convex pattern on the surface, comprising: a disk-shaped electroformed metal mold main body having a concave-convex pattern formed on the surface; and integral with the electroforming metal mold main body An expansion portion that extends around the body of the electroformed metal mold.

The imprint mold of the present invention may be configured such that the expansion portion includes a plate member and a thin plate, and the plate member has a center hole having a shape conforming to an outer peripheral shape of the electroforming mold main body, the thin plate having The outer shape of the electroformed metal mold main body is larger than the outer shape of the electroformed metal mold main body, and the electroformed metal mold main body is fitted into the center hole of the plate-shaped member. The plate-shaped member and the electroforming metal mold main body are bonded to the thin plate and integrated.

The die for imprint of the present invention may be configured such that the expanded portion is formed of a drilled-hole portion having a drill boring portion having a shape conforming to the outer peripheral shape of the electroformed metal mold main body. The electroformed metal mold main body and the expansion portion are integrated by inserting and bonding the electroformed metal mold main body to the drill string pit portion with the drill string hole thin plate.

Alternatively, the imprint mold of the present invention may be configured such that the expanded portion is formed of a plate-like member having a center hole having a shape conforming to the outer peripheral shape of the electroformed metal mold main body, and is embedded in the center hole of the plate-shaped member. The electroformed metal mold main body is formed by connecting the plate-shaped member and the electroforming mold main body to the periphery of the electroforming mold main body.

In addition, as the mold for imprint of the present invention, it is preferable that the step of the surface of the expanded portion and the surface of the electroforming mold main body is 10 μm or less.

Effect of the invention

The imprint mold of the present invention is an imprint mold which is wound around a roll and has a concavo-convex pattern on its surface, and has a flared portion extending around a disk-shaped electroformed metal mold body having a concavo-convex pattern formed on its surface. Therefore, even when it is wound on a roll and used as a roll-shaped metal mold, when all of the areas in which the uneven pattern is formed are coated with the photoresist liquid, the photoresist liquid can be left in the mold. Inside the surface. Thereby, it is possible to prevent the photoresist liquid from entering between the mold and the roller, and it is possible to suppress the transfer failure at the time of imprinting due to the roller-to-roll method.

Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. In addition, in order to make it easy to visually recognize, the scale of each component in the drawing, etc. are changed suitably with respect to actual conditions.

<Mold for Imprint of First Embodiment>

Fig. 1 is a plan view and a cross-sectional view schematically showing an imprint mold 10 according to a first embodiment of the present invention.

The imprint mold 10 is an imprint mold which is wound on a roll and has a concavo-convex pattern 2 on its surface, and includes a disk-shaped electroformed metal mold main body 1 having a concavo-convex pattern 2 formed on its surface, and an electroforming mold. The expanded portion 3 in which the metal mold main body 1 is integrated and extends around the electroforming metal mold main body 1.

In the present embodiment, the expansion portion 3 includes a plate-like member 4 and a thin plate 5, and the plate-like member 4 is provided with a center hole having a shape conforming to the outer peripheral shape of the electroforming mold main body 1, and the thin plate 5 has a specific electroforming mold main body 1. The shape of the outer shape is large, and the electroforming mold main body 1 is fitted into the center hole of the plate member 4, and the plate member 4 is bonded to the electroformed metal mold main body 1 to be integrated with the thin plate 5, thereby forming an imprint mold. 10.

The imprint mold 10 has flexibility to the extent that it can be wound around a roll, and the thickness is appropriately varied depending on the material. However, the thickness is preferably 20 to 300 μm, more preferably 50 to 200 μm.

The electroformed metal mold main body 1 is a disk having a diameter of φ ₁ and has a surface shape including a flat portion 2a on the outer circumference of a region in which the uneven pattern 2 is formed (hereinafter referred to as a pattern region). It should be noted that the thickness of the flat portion 2a of the outer circumference is defined as the thickness of the electroformed metal mold body 1. In this example, the pattern area is approximately a circular area of diameter φ ₂ .

In this example, the pattern of the line width and the space is provided as the uneven pattern 2, but the pattern shape is not particularly limited, and various patterns such as a hole pattern and a columnar pattern may be used. The height of the convex portion of the concave-convex pattern, the interval between the convex portions, and the like can be appropriately set depending on the application in the order of several tens of nm to several hundreds of μm.

The electroforming mold main body 1 is obtained by electroforming a master disk to be described later, and examples of the material include a metal containing at least one of nickel, cobalt, gold, silver, copper, and iron, and nickel is preferable. The thickness thereof is from 10 to 200 μm, more preferably from 50 to 100 μm.

The plate-like member 4 which is a part of the expansion portion 3 is provided with a center hole having a shape conforming to the outer circumferential shape of the electroforming mold main body 1 (here, a circular shape having a diameter φ ₁ ), and has a specific electroforming mold main body 1 Large shape (here is a circle with a diameter of φ ₃ ). Here, the shape of the center hole of the plate-like member 4 "consistent with the outer peripheral shape of the electroforming mold main body 1" means that the shape of the electroforming mold main body 1 can be accommodated, and it is preferably formed into a specific electric quantity for easy embedding. The diameter of the cast metal mold main body 1 is as large as about 0.1 to 0.2 mm, and on the other hand, the gap is preferably small, so the gap is not so good. In addition, in the case where a gap is generated, it is preferably filled with a landfill or the like.

The outer shape of the expanded portion 3 (the outer shape of the mold 10) is not limited to a circular shape as long as it can surround the electroformed metal mold main body 1, and may be a square, a rectangle, or any other shape. In order to use the uneven pattern 2 of the electroforming mold main body 1 to the maximum extent, it is necessary to have a shape having a length of a square having a diameter φ _{2 of the} pattern region as one side (=√2· φ ₂ ) The shape of the inner square of one side of the length. Therefore, when the expansion portion 3 is circular, it is preferable to have a diameter of √2·φ ₂ or more. More preferably, the outer shape of the expanded portion 3 is a shape in which a square having one side of a length of (√2·φ ₂ + 20) mm or more is enclosed.

For the plate member 4, it is preferable that the rigidity at the time of winding the roll is not significantly different from that of the electroformed metal mold main body 1. Therefore, it is preferable to use the Young's modulus of the electroformed metal mold main body 1 of about ±100 GPa. The material is particularly preferably equal to the Young's modulus. Therefore, it is preferably composed of the same material as that of the electroforming mold main body 1. For example, in the case where the electroformed metal mold main body 1 is made of nickel, it is preferable that the plate-like member 4 is also made of nickel. As the plate-like member 4, since the workability of a non-embroidered steel plate or the like is high and the cost is low, a stainless steel plate or the like is also suitable.

The thickness t ₄ of the plate-like member 4 is the thickness t ₁ ± 20 μm or less, preferably ± 10 μm or less, of the electroformed metal mold main body 1, and is preferably the same as the thickness of the electroforming mold main body 1. As long as the step is ±20 μm or less, it is possible to suppress the generation of residue at the step portion at the time of imprinting.

If the thickness of the electroformed metal mold main body 1 is the same, since the flat portion 2a of the electroforming mold main body 1 and the surface of the plate-like member 4 are flush with each other, no residue is generated at the joint portion during the imprinting, which is most effective. Suppressing poor transfer.

In the case where a step is generated, in particular, in order to use a transfer product made of a roll-shaped metal mold as a mold, it is preferable that the surface of the expanded portion is higher than the surface of the main body. This is because the pattern portion formed by the transfer is higher than the peripheral portion, and it is easy to transfer the other member using the mold.

The thin plate 5 may have a shape that supports the electroformed metal mold main body 1 and the plate-like member 4, and has at least a larger outer shape than the electroforming mold main body 1, and is preferably larger than the center hole of the plate-shaped member 4. Large diameter. More preferably, it has an outer shape equal to or higher than the outer shape of the plate member 4.

The material of the sheet 5 is preferably a sheet material such as a film or a metal sheet. Specifically, examples of the sheet material include PET (polyethylene terephthalate) and TAC (triacetate). Examples of the metal thin plate include nickel and non-embroidered steel. It is to be noted that it is also preferably formed of the same material as the electroformed metal mold main body 1 and the plate-shaped member 4.

In the case of a film material, the thickness t _{5 is} preferably 50 to 250 μm, and in the case of a metal thin plate, the thickness t _{5 is} preferably 20 to 150 μm.

In this example, the electroformed metal mold main body 1 and the plate-like member 4 are fixed to the thin plate 5 using the adhesive 8. As the adhesive 8, the electroformed metal mold main body 1 and the plate-like member 4 can be bonded to the thin plate 5, and for example, a double-sided adhesive sheet, an adhesive, or the like can be used. An example of the double-sided adhesive sheet is LA-50 manufactured by Nitto Denko Corporation. Moreover, as an example of an adhesive agent, the acryl rubber type adhesive agent is mentioned.

It should be noted that the electroformed metal mold main body 1 may be embedded in the center hole of the plate-like member 4, and the center hole and the shape of the electroformed metal mold main body 1 may be connected by solder, and the adhesive is fixed on the plate shape. On the member 4.

A method of manufacturing the imprint mold of the first embodiment shown in Fig. 1 will be described.

Fig. 2 schematically shows the manufacturing steps of the imprint mold 10 of the first embodiment.

As shown in FIG. 2, the imprint mold 10 is a peeling electroforming metal mold main body 1b which is produced by electroforming from a master (main mold) which will be described later, and is released from the master disc, and two sheets 4a and 5 production.

The state in which the peeling electroforming metal mold main body 1b is kept from the original disc is a substantially disk shape having a diameter of φ ₀ , but the peripheral edge is deformed and deformed. Therefore, a circular member which is cut into a circular shape and has a diameter of φ ₁ in order to straighten the periphery of the peeling electroforming mold main body 1b is used as the electroformed metal mold main body 1.

As the sheet 4a, having a concave-convex pattern prepared diameter φ 2 of the pattern area ₂ as the length of the diagonal side of the square of the diameter φ greater than the electroforming mold are formed in the body 1 of the sheet _3, is provided a metal electroforming The center hole 4b of the diameter φ ₄ having a diameter φ ₁ or more of the mold main body 1 is formed into a plate-like member 4.

Further, as the sheet 5, preparing a thin electroformed mold body than the diameter of the larger diameter φ 1 φ ₁ to _5. In FIGS. 1 and 2, the thin plate 5 and the plate-like member 4 are members having substantially the same diameter, but the diameters of the two may be different.

Then, the adhesive 8 is applied to the thin plate 5 not provided with the center hole, and the outer shape of the plate-like member 4 is aligned with the outer shape of the thin plate 5, and the center hole 4b of the plate-like member 4 is disposed at the center of the thin plate 5. The thin plates 5 are overlapped, and the electroformed metal mold main body 1 is further fitted into the center hole 4b of the plate-like member 4, and the three members are integrated to obtain the electroformed metal mold main body 1 and the expanded portion 3 including the plate-like member 4 and the thin plate 5. The stamping die 10 is constructed.

The size of the outer shape of the mold 10 and the size of the pattern region may be appropriately determined depending on the size of the processed product of the concave-convex pattern to be an imprinted article. For example, as a mold for producing a 6 inch (150 mm) diameter PSS, the diameter φ _{2 of the} pattern region is set to 170 mm, and the diameter φ _{1 of the} electroformed metal mold main body 1 is set to 180 mm, and the diameter of the plate member 4 is set. φ _{3 is} set to 300 mm, and the diameter φ _{5 of the} thin plate 5 is set to 300 mm. In the case where the electroforming metal mold main body 1 and the plate-like member 4 are formed of nickel, the thickness thereof is, for example, 70 μm.

Next, an imprint method using the imprint mold 10 of the present embodiment will be described.

FIG. 3 is a perspective view showing the roll-shaped mold 12 in which the imprint mold 10 is wound around the roll 11. As shown in FIG. 3, the roll-shaped metal mold 12 is constituted by winding and fixing one or two imprint molds 10 on the roll 11. The mold 10 is only required to adhere to the adhesive tape at its end portion and to be fixed to the roller 11.

Fig. 4 is a view showing a part of an apparatus for carrying out an imprint method based on a roll-to-roll method.

A die coater 16 for applying the photoresist liquid 15a to the mold 10 is disposed above the roll die 12, and is disposed at a position opposed to the die coater 16 with respect to the roll die 12 The ultraviolet light that cures the photoresist liquid 15a illuminates the light source 17. Further, a conveyance roller 13a and a conveyance roller 13b for conveying the film 14 discharged from a discharge device (not shown) and being pressed against the roll-shaped mold 12 are disposed on both sides of the roll-shaped mold 12 The conveyance roller 13b peels the film 14 from the roll-shaped metal mold 12, and conveys it to the winding apparatus not shown.

Here, the ultraviolet light source 17 is provided in order to use a photocurable photoresist which is cured by irradiation of ultraviolet rays, but in the case of using a thermosetting photoresist, it may be replaced by ultraviolet radiation. The light source is equipped with a heater.

The roll mold 12 is rotated in the direction of the arrow, and the photoresist liquid 15a is applied to the application region of the mold 10 by the die coater 16. The coating width of the die coater 16 is a length that extends outward by 5 mm or more from the maximum diameter (diameter φ ₂ ) of the pattern region of the mold 10, and preferably extends to the outside by a length of 10 mm or more. FIG. 5 is a view schematically showing a photoresist application region on the mold 10. In Fig. 5, a hatched area indicated by a broken line is a coating area of a photoresist liquid 15a coated with a width L. In this example, the photoresist coating area has a diameter φ larger than that of the electroformed metal mold body 1. ₁ The area of the square of the longer side of L.

By making the coating area larger than the pattern area, it is possible to perform imprinting using the entire area of the pattern area efficiently. At this time, since the photoresist liquid is applied at the same coating width as the diameter φ _{1 of the} electroforming mold main body 1, the photoresist liquid 15a spreads on the roller 11 in the absence of the expansion portion 3. However, due to the presence of the expansion portion 3, the expansion of the photoresist liquid 15a can be restricted to the mold 10.

Thereby, it is possible to suppress the photoresist liquid 15a generated by the expansion of the photoresist liquid 15a on the roller 11 from entering the gap between the roller 11 and the mold 10, or the photoresist remaining in the step portion of the roller 11 and the mold 10 after the imprinting. As a result of the problem, it is possible to suppress the transfer failure at the time of imprinting in the roll-to-roll method.

The mold 10 coated with the photoresist liquid 15a is pressed against the film 14 conveyed by the conveyance roller 13a via the photoresist liquid 15a, and is further conveyed to the ultraviolet light-emitting source 17 by the rotation of the roll-shaped metal mold 12. After the ultraviolet ray irradiation region is irradiated with ultraviolet rays, the photoresist liquid 15a is solidified, and the resin layer 15 on which the uneven pattern 2 of the mold 10 is transferred is formed. At this time, the resin layer 15 is fixed to the film 14, and the resin layer 15 is held and fixed to the film 14 in the conveyance roller 13b, and is peeled off from the roll-shaped metal mold 12, and is conveyed to the winding device together with the film 14.

By repeating the above operations, a plurality of resin layers 15 having concavo-convex patterns formed on the surface of the mold 10 are formed on the film 14. Then, by cutting out a region in which the resin layer 15 having a circular uneven pattern is cut out, a film-shaped mold 19 in which a resin layer 15 having a concave-convex pattern is laminated on the film 14 can be obtained (see FIG. 7).

Here, the steps from the master to the electroforming metal mold and the production of the concave-convex pattern processed product will be briefly described with reference to FIGS. 6 and 7. FIG. 6 is a view schematically showing a procedure from the formation of a roll-shaped metal mold from a Si master, and FIG. 7 is a view schematically showing a procedure of forming a textured product by using a film-shaped mold.

As shown in Fig. 6, first, an Si master 21 having a concave-convex pattern on its surface is prepared. The size of the Si master 21 is generally about 150 mm (6 inches) in diameter and about 200 mm (8 inches) in diameter.

The surface of the concave-convex pattern of the Si original disk was subjected to electroforming. In particular, it is preferable to form a conductive layer (metal film) having a thin film thickness of about several μm by electroless deposition, and then to tens several μm to several hundreds by electroplating (electroforming). The electroformed layer 1a having a thickness of about μm is formed into a film. The material forming the electroformed layer 1a is preferably nickel, but is not limited to nickel.

Then, the electroformed layer 1a is peeled off from the Si master 21 to obtain an electroformed metal mold body 1. The step of providing the expansion portion 3 on the electroforming mold main body 1 and producing the imprint mold 10 is as described with reference to Fig. 2 . Then, the imprint mold 10 is wound around the roll 11 to form a roll-shaped mold 12.

In the case where the electroformed metal mold main body 1 is obtained from the original disk, the electroformed metal mold main body 1 having the same area as that of the case where the expanded portion is provided is formed by electroforming as long as the area of the region surrounding the pattern region of the original disk is enlarged. It is not necessary to provide an expansion portion such as the present invention. However, in the case where it is desired to maintain the same pattern area, it is necessary to increase the size of the original disk itself, increase the cost caused by the increase of the original disk, and increase the cost caused by the electroforming tank at the time of electroforming. According to the method for producing an imprint mold of the present invention, it is possible to produce a mold suitable for a roll-shaped metal mold at a lower price without using an existing electroforming groove without increasing the cost of the original disk.

The step of producing the film-shaped mold 19 in which the resin layer 15 having the uneven pattern is laminated from the roll-shaped metal mold 12 to the film 14 is as described above with reference to FIG. 4 .

Further, a step of fabricating the PSS 24 used as the LED substrate will be described as an example of the processed product of the uneven pattern processed by the film-shaped mold 19 with reference to FIG.

First, a sapphire substrate (sapphire wafer) 24A is prepared. The sapphire substrate is generally a substrate having a size of about 2 to 6 inches, and is preferably equal to or smaller than the size of the pattern region of the mold, and the substrate having the largest possible size can effectively use the pattern region of the mold.

The sapphire substrate 24A is coated with, for example, an ultraviolet curable photoresist liquid 25A, and the film-shaped mold 19 is pressure-bonded to transfer the concave-convex pattern onto the photoresist liquid 25A, and the ultraviolet ray is applied to cure the photoresist liquid 25A. Thus, the resin layer 25 having the uneven pattern in which the uneven pattern of the film-shaped mold 19 is transferred is formed. The film-shaped mold 19 is peeled off from the resin layer 25, and reactive ion etching (RIE) is performed using the resin layer 25 as a mask, thereby forming a pattern matching the concave-convex pattern of the resin layer 25 on the surface of the sapphire substrate 24A. Concave-convex pattern to obtain PSS24.

As described above, by using the imprint mold 10, it is possible to prevent the photoresist liquid 15a from entering between the mold 10 and the roller 11 during the imprinting by the roll-to-roll method, and it is possible to suppress the transfer when the imprinting is repeated. bad.

<Mould for Imprinting of Second Embodiment>

FIG. 8 is a view schematically showing a manufacturing procedure of the imprint mold 30 according to the second embodiment of the present invention.

The imprint mold 30 of the present embodiment includes a disk-shaped electroformed metal mold main body 1 having a concavo-convex pattern 2 formed on its surface, and an electroformed metal mold main body 1 integrated with the electroforming mold main body 1. An expansion portion 33 extending around.

In the present embodiment, the expansion portion 33 is formed of a drill string hole thin plate having a drill string hole portion 35 having a shape conforming to the outer circumferential shape of the electroforming mold main body 1, and is passed through a drill string with a drill string hole plate. The pit portion 35 is fitted into the electroformed metal mold main body 1 so that the electroforming mold main body 1 and the expanded portion 33 are integrated, whereby the imprint mold 30 is formed.

The embossing mold 30 has flexibility to be wound around the roller, and the appropriate range of the thickness varies depending on the material. However, the thickness of the embossing die 30 is preferably 20 to 300 μm, more preferably 50 Å. 200 μm.

As the electroforming mold main body 1, the same member as the imprint mold 10 of the first embodiment can be used.

The expanded portion 33 is a thin plate having a thickness t _{33 and} is provided with a drill string hole portion 35 having a depth t ₃₅ that matches the outer peripheral shape of the electroformed metal mold main body 1 (here, a circular shape having a diameter of φ ₁ ), and has a ratio The large shape of the electroformed metal mold body 1 (here, a circle having a diameter of φ ₆ ). Here, the drill string hole portion 35 refers to a flat bottom portion that accommodates the shape of the electroforming mold main body 1. The shape of the drill string hole portion 35 "is identical to the outer peripheral shape of the electroforming mold main body 1" means that it can accommodate The shape of the electroformed metal mold main body 1 is preferably formed to be about 0.1 to 0.2 mm larger than the diameter φ _{1 of the} electroformed metal mold main body 1 in order to facilitate the embedding. On the other hand, since the gap is preferably small, So the gap is not great. In addition, in the case where a gap is generated, it is preferable to carry out landfill by using a landfill or the like.

The outer shape of the expanded portion 33 (the outer shape of the mold 30) is not limited to a circular shape as long as it surrounds the shape of the electroforming mold main body 1, and can be square, rectangular, or any other shape. In order to maximize efficient use of electroforming mold a concavo-convex pattern of the body 2, as required for such a shape, i.e., having a length to diameter φ ₂ as the pattern area side of the square of the diagonal (= √2 · φ ₂ ) The shape of the inner square of one side of the length. Therefore, when the expansion portion 33 is circular, it is preferable to have a diameter of √2·φ ₂ or more. More preferably, the outer shape of the expanded portion 33 is a shape in which a square having one side of a length of (√2·φ ₂ + 20) mm or more is enclosed.

It is preferable that the expansion portion 33 composed of the thin plate having the drill string is not significantly different from the electroformed metal mold main body 1 when wound up to the roller 11, and therefore, it is preferable to use the electroformed metal mold body 1 A material having a modulus of about ±100 GPa is particularly preferably the same as the Young's modulus. Therefore, it is preferable to use a member made of the same material as the electroformed metal mold main body 1. For example, when the electroformed metal mold main body 1 is made of nickel, it is preferable that the expanded portion 33 is also made of nickel.

The depth t ₃₅ of the drill string hole portion 35 of the expanded portion 33 is not less than the thickness t ₁ ± 20 μm of the electroformed metal mold main body 1, preferably ± 10 μm or less, and most preferably the thickness t _{1 of the} electroformed metal mold main body 1. the same. By setting the depth t _{35 of the} drill string hole portion 35 to the thickness t ₁ ± 20 μm or less of the electroforming mold main body 1, the step of the surface of the electroforming mold main body 1 and the expanded portion 33 can be suppressed to ±20 μm or less. It suppresses the occurrence of residue in the step portion at the time of imprinting. As long as the thickness t _{1 of the} electroformed metal mold body 1 is substantially the same as the depth t35 of the drill string hole portion 35, since the flat portion 2a of the electroformed metal mold main body 1 and the surface of the expanded portion 33 are in the same plane, the stamping does not occur. Residue is generated in the joint portion, and transfer failure can be most effectively suppressed.

In the case where a step is present, in particular, in order to use a transfer product produced by a roll-shaped metal mold as a mold, it is preferable that the surface of the expanded portion is higher than the surface of the main body. This is because the pattern portion formed by the transfer is higher than the peripheral portion, and it is easy to transfer the other member using the mold.

The electroformed metal mold main body 1 is fixed to the drill string hole portion 35 with the drill string hole sheet using the adhesive 38. As the adhesive 38, the electroformed metal mold main body 1 can be bonded to the drill string hole portion 35, and for example, an acrylic resin-based adhesive or the like can be used. Alternatively, the electroformed metal mold main body 1 may be adhered by adhering an adhesive tape to the bottom surface of the drill string hole portion 35.

In the case where a gap is formed between the surface of the electroformed metal mold main body 1 and the expanded portion 33, it is preferable to use the adhesive 38 or the like as a landfill so that they are on the same plane.

A method of manufacturing the imprint mold 30 of the present embodiment will be described. As shown in Fig. 8, the imprint mold 30 is produced by using a strip electroformed metal mold main body 1b which is produced by electroforming the original disc (main mold) and released from the original disc, and a thin plate 33a. .

The peeling electroforming metal mold main body 1b is kept in a state of being peeled off from the original disk, and a circular member cut into a circular diameter φ ₁ for the circumference of the peeling electroforming metal mold main body 1b is used as an electroforming metal mold main body. 1.

As the sheet 33a, preparing a sheet of a diameter φ _6, φ ₆ diameter ratio of the electroforming die main body 1 is formed with a pattern of concave-convex pattern area diameter [Phi] 2 _2, a greater length of the diagonal of the square side, A circular drill string hole portion 35 having a diameter φ ₇ or more of a diameter φ ₁ or more of the electroformed metal mold main body 1 is provided, and an expanded portion 33 composed of a thin plate having a drill string is formed.

The adhesive agent 38 is applied to the bottom surface of the drill string hole portion 35 of the expansion portion 33, and the electroforming mold main body 1 is fitted and fixed to the drill string hole portion 35, thereby obtaining the electroforming mold main body 1 and the expansion portion 33. Imprint mold 30.

In the mold 30 of the present embodiment, the outer shape and the size of the pattern region may be appropriately determined depending on the size of the textured product to be the embossed article. For example, as the mold 30 for producing a 6 inch (150 mm) diameter PSS, the diameter φ _{2 of the} pattern region is set to 170 mm, the diameter φ _{1 of the} electroformed metal mold body 1 is set to 180 mm, and the diameter of the expanded portion 33 is set. φ ₆ is set to 300mm. When the electroforming mold main body 1 and the expansion portion 33 are both formed of nickel, for example, the thickness t _{1 of the} electroforming mold main body 1 is set to 50 μm, and the thickness t _{33 of the} expanded portion 33 is set to 150 μm. The depth t _{35 of the} pillar portion 35 is set to 100 μm.

The imprint mold 30 of the second embodiment is used for the imprint method based on the roll-to-roll method in the same manner as the imprint mold 10 of the first embodiment, and it is possible to prevent the imprinting by the roll-to-roll method. The photoresist liquid 15a enters between the mold 30 and the roller 11, and it is possible to suppress transfer failure when the imprint is repeatedly performed.

<Mold for Imprint of Third Embodiment>

FIG. 9 is a view schematically showing a manufacturing procedure of the imprint mold 40 according to the third embodiment of the present invention.

The imprint mold 40 of the present embodiment includes a disk-shaped electroformed metal mold main body 1 having a concavo-convex pattern 2 formed on its surface, and an electroformed metal mold main body 1 integrated with the electroforming mold main body 1. An expansion portion 43 extending around.

In the present embodiment, the expansion portion 43 is formed of a plate-like member having a center hole 45 having a shape conforming to the outer circumferential shape of the electroforming mold main body 1, and is embedded in the center hole 45 of the plate-shaped member (expansion portion 43). The metal mold main body 1 is connected to the peripheral edge of the electroforming mold main body 1 by connecting the plate-like members, thereby forming the imprint mold 40.

The embossing mold 40 has a different degree of thickness depending on the material, and the thickness of the embossing mold 40 is preferably 20 to 300 μm, more preferably 50, depending on the material. ~200μm.

As the electroforming mold main body 1, the same member as the imprint mold 10 of the first embodiment can be used.

The expansion portion 43 is formed of a plate-like member having a center hole 45 having a shape that matches the outer circumferential shape of the electroforming mold main body 1 (here, a circle having a diameter of φ ₁ ), and has a larger size than the electroforming mold main body 1 . The shape (here is a square with the side of length a). Here, the shape of the center hole 45 of the expanded portion 43 "corresponding to the outer peripheral shape of the electroforming mold main body 1" means that the shape of the electroforming mold main body 1 can be accommodated, and it is preferably formed into a specific electric quantity for easy embedding. The diameter φ _{1 of the} cast metal mold main body 1 is as large as about 0.1 to 0.2 mm. On the other hand, since the gap is preferably small, the gap is not particularly good.

The outer shape of the expanded portion 43 (the outer shape of the mold 40) is not limited to a square as long as it surrounds the shape of the electroformed metal mold main body 1, and can be circular, rectangular, or any other shape. In order to use the uneven pattern 2 of the electroforming mold main body 1 to the maximum extent, in the case of a square as in the present embodiment, the length a of one side needs to be a diagonal of a square having the diameter φ _{2 of the} pattern area as one side. The length of the line (=√2·φ ₂ ) or longer. Thus, in the case where the outer shape of the expansion portion 43 is set circular, preferably having a diameter of a length √2 · φ ₂ or more. The outer shape of the expanded portion 43 is more preferably a shape in which a square having one side having a diameter (√2·φ ₂ + 20) mm or more is enclosed.

The expansion portion 43 composed of the plate member preferably has a rigidity that is not significantly different from that of the electroformed metal mold main body 1 when wound up to the roll. Therefore, it is preferable to use the Young's modulus of the electroformed metal mold main body 1 to be about ±100 GPa. The material is particularly preferably equal to the Young's modulus. Therefore, it is preferable to use a member made of the same material as the electroformed metal mold main body 1. For example, when the electroformed metal mold main body 1 is made of nickel, it is preferable that the expanded portion 43 is also made of nickel.

The thickness t _{43 of the} expanded portion 43 is not less than the thickness t ₁ ± 20 μm of the electroformed metal mold main body 1, preferably ± 10 μm or less, and is preferably the same as the thickness t _{1 of the} electroformed metal mold main body 1. When the step is ±20 μm or less, it is possible to suppress the occurrence of residue in the step portion at the time of imprinting. When the thickness t _{1 of the} electroformed metal mold main body 1 is the same, the flat portion 2a of the electroforming mold main body 1 and the surface of the expanded portion 43 are flush with each other. Therefore, no residue is generated at the joint portion during the imprinting, and the most The transfer failure is effectively suppressed.

In the case where a step is present, in particular, in order to use a transfer product produced by a roll-shaped metal mold as a mold, it is preferable that the surface of the expanded portion is higher than the surface of the main body. This is because the pattern portion formed by the transfer is higher than the peripheral portion, and it is easy to transfer the other member using the mold.

The connection of the expanded portion 43 to the electroformed metal mold body 1 can be performed using the solder 49. The electroformed metal mold main body 1 is fitted into the center hole 45 of the expanded portion 43, and the gap is filled with the solder 49 to connect the two. At this time, in the case where the solder 49 is formed to be raised on the surface, it is preferable to perform processing such as cutting, pressing, or the like so that the surfaces are in the same plane.

A method of manufacturing the imprint mold 40 of the present embodiment will be described. As shown in Fig. 9, the imprint mold 40 is formed by electroforming the original disc (main mold) and using the strip electroformed metal mold main body 1b after being released from the original disc, and a thin plate 43a. Production.

The peeling electroforming metal mold main body 1b is kept in a state of being peeled off from the original disk, and a circular member cut into a circular diameter φ ₁ for the circumference of the peeling electroforming metal mold main body 1b is used as an electroforming metal mold main body. 1.

As the thin plate 43a, a square thin plate having one side of the length a is prepared, and the length a is longer than the length of the diagonal of the square which is the diameter φ ₂ of the pattern region in which the concave-convex pattern 2 is formed in the electroforming mold main body 1 as one side. The circular center hole 45 having a diameter φ ₈ or more of the diameter φ ₁ or more of the electroformed metal mold main body 1 is provided on the thin plate to form the expanded portion 43.

The electroformed metal mold main body 1 is fitted into the center hole 45 of the expanded portion 43, the solder 49 is filled in the gap between the peripheral edge and the center hole, and the electroforming mold main body 1 and the expanded portion 43 are joined and integrated to obtain an imprint mold. 40.

In the mold 40 of the present embodiment, the outer shape and the size of the pattern region may be appropriately determined depending on the size of the processed product of the uneven pattern to be an imprinted article. For example, as the mold 40 for producing a 6-inch (150 mm) diameter PSS, the diameter φ _{2 of the} pattern region is set to 170 mm, and the diameter φ _{1 of the} electroforming mold main body 1 is set to 180 mm, and one side of the expanded portion 43 is used. The length a is set to 345 mm. In the case where the electroforming mold main body 1 and the expansion portion 43 are both formed of nickel, for example, the thickness t _{1 of the} electroforming mold main body 1 and the thickness t 43 of the expanded portion ₄₃ are both set to 150 μm.

The imprint mold 40 of the third embodiment is used for the imprint method based on the roll-to-roll method in the same manner as the imprint mold 10 of the first embodiment, and it is possible to prevent the imprinting by the roll-to-roll method. When the photoresist liquid 15a enters between the mold 40 and the roller 11, it is possible to suppress transfer failure when the imprint is repeatedly performed.

1‧‧‧Electroforming metal mold body
1a‧‧‧Electroforming layer
1b‧‧‧ peeling electroformed metal mold body
2‧‧‧ concave pattern
2a‧‧‧flat
3, 33, 43‧‧‧ expansion department
4‧‧‧ Plate-like members
4a, 33a, 43a‧‧‧thin
4b‧‧‧Center hole
5‧‧‧Sheet
8‧‧‧Adhesive
10, 30, 40‧ ‧ embossing mold
11‧‧‧ Roll
12‧‧‧ Roll metal mold
13a, 13b‧‧‧Transport roller
14‧‧‧ film
15‧‧‧ resin layer
15a‧‧‧ photoresist liquid
16‧‧‧Mold coating machine
17‧‧‧UV light source
19‧‧‧ Film mold
21‧‧‧Original
24‧‧‧ patterned sapphire substrate
24A‧‧‧Sapphire substrate
25‧‧‧ resin layer
25A‧‧‧ photoresist liquid
35‧‧‧Drilling pit
38‧‧‧Adhesive
45‧‧‧ center hole
49‧‧‧ solder
L‧‧‧ coating width
t ₁ , t ₃₃ , t ₄ , t ₄₃ , t ₅ ‧‧‧ thickness φ ₀ , φ ₁ , φ ₂ , φ ₃ , φ ₄ , φ ₅ , φ ₆ , φ ₇ , φ ₈ ‧‧‧ diameter

Fig. 1 is a plan view and a cross-sectional view of a stamping die of a first embodiment. Fig. 2 is a view schematically showing a manufacturing step of the imprint mold of the first embodiment. Fig. 3 is a perspective view showing an imprint mold wound on a roll. Fig. 4 is a view showing a part of an apparatus for carrying out an imprint method based on a roll-to-roll method. Fig. 5 is a view schematically showing a photoresist application region on a stamping die. Fig. 6 is a view schematically showing a step from the preparation of a roll-shaped metal mold from a master. Fig. 7 is a view schematically showing a procedure until a textured product is formed using a film mold. Fig. 8 is a view schematically showing a manufacturing step of the imprint mold of the second embodiment. Fig. 9 is a view schematically showing a manufacturing procedure of a stamping die of a third embodiment.

1‧‧‧Electroforming metal mold body

2‧‧‧ concave pattern

2a‧‧‧flat

3‧‧‧Expansion Department

4‧‧‧ Plate-like members

5‧‧‧Sheet

8‧‧‧Adhesive

10‧‧‧impression mold

φ ₁ , φ ₂ , φ ₃ ‧‧‧ diameter

t ₁ , t ₄ , t ₅ ‧‧‧ thickness

Claims (5)

An imprint mold for winding on a roll and having a concave-convex pattern on a surface, comprising: a disk-shaped electroformed metal mold body having the concave-convex pattern formed on the surface; and the electroforming An expanded portion in which the metal mold body is integrated and extends around the electroformed metal mold body. The mold for imprint according to claim 1, wherein the expansion portion includes a plate member and a thin plate, and the plate member has a center hole having a body with the electroformed metal mold a shape in which the outer peripheral shape is uniform, the thin plate has a larger outer shape than the outer shape of the electroforming metal mold main body, and the electroforming metal mold main body is embedded in the center hole of the plate-shaped member, the plate-shaped member and The electroformed metal mold body is bonded to the thin plate to be integrated. The mold for imprint according to claim 1, wherein the expansion portion is constituted by a drilled hole portion having a drill boring portion, wherein the drill pit portion is a shape in which the outer peripheral shape of the electroformed metal mold main body is uniform, and the electroforming mold main body is embedded and bonded to the drill string hole portion of the drill string hole thin plate, whereby the electroforming metal mold main body and The expansion portion is integrated. The mold for imprint according to claim 1, wherein the expansion portion is formed of a plate-like member having a center hole having a shape conforming to an outer peripheral shape of the electroforming mold main body. The electroformed metal mold main body is fitted into the center hole of the plate-shaped member, and the plate-shaped member and the electroforming mold main body are connected to each other at a peripheral edge of the electroforming mold main body. The imprint mold according to any one of claims 1 to 4, wherein a step of the surface of the expanded portion and a surface of the electroforming mold main body is 10 μm or less.