KR20080062854A - Multi layer stamp and method for manufacturing the same, nano imprint system with multi layer stamp and method for nano imprinting on a display panel - Google Patents

Abstract

A multi layer stamp, a method for manufacturing the same, a nano imprint system with the multi layer stamp, and a nano-imprinting method on a display panel are provided to form a uniform pattern by employing the multi layer stamp having a hard stamping unit and a soft support unit having elasticity. A support unit(100) is made of a first material. A stamping unit(200) is formed on the support unit and made of a second material having hardness greater than that of the first material. An adhesive preventing coating layer is coated on the stamping unit. A plurality of vacuum suction holes(310) are exposed on a supporter(300). The vacuum suction holes vacuum-suck the support unit. A vacuum pump(400) is connected to the vacuum suction holes. A roller(600) pressurizes a stamping target. A light source(610) is mounted on the roller. A reflective plate is installed on the roller to prevent the outflow of light irradiated from the light source.

Description

 Multi-layer stamp and method for manufacturing the same, nano imprint system with multi layer stamp and method for nano imprinting on a display panel}

1A to 1C are cross-sectional views illustrating a method of forming a fine pattern using a nanoimprint technique according to the prior art.

2A and 2B are schematic cross-sectional views of a multilayer stamp in accordance with the present invention.

3A to 3E are schematic cross-sectional views for explaining the method for manufacturing a multilayer stamp according to the present invention.

Figure 4 is a cross-sectional view showing a state of performing a nano imprinting process using a multi-layer stamp in accordance with the present invention

5A through 5D are cross-sectional views illustrating a state in which a nanoimprinting process is performed on a display panel using a multilayer stamp according to the present invention.

6 is a cross-sectional view illustrating a state in which a nano-imprinting process is performed on a display panel with a flexible multilayer stamp according to the present invention.

<Description of the symbols for the main parts of the drawings>

100: support 110: adhesive

200: stamping part 210: coating film for preventing adhesion

300: support 310: vacuum suction hole

400: vacuum pump 500: curable material

600: roller 610: light source

700: display panel 710: curing film

711: Panel

The present invention relates to a multi-layer stamp, a method of manufacturing the same, a nano imprint system equipped with a multi-layer stamp, and a method of nano imprinting a display panel using a multi-layer stamp, and more particularly, to a multi-layer stamp capable of forming a uniform pattern. A manufacturing method thereof, a nano imprint system equipped with a multilayer stamp, and a method of nanoimprinting a display panel using the multilayer stamp.

Nano Imprint Lithography technology, proposed by Professor Stephen Y. Chou of Princeton University in the mid-1990s, is currently attracting attention as a replacement for low-productivity electron beam lithography and expensive optical lithography.

On the other hand, recent advances in IT technology require a finer pattern for high speed operation and low power consumption operation of devices implemented in IT technology.

Such micronized patterns are typically made using lithographic techniques, and as micronization progresses further, the devices required for those techniques become more expensive.

Therefore, various researches are currently being conducted on techniques for forming fine patterns at low cost.

For example, in order to manufacture a display panel, various functional films such as electrodes, barrier ribs, and insulating films must be formed in fine patterns, and techniques for forming the fine patterns at low cost have been attempted.

As such, one of technologies capable of forming fine patterns at low cost is nanoimprint technology.

1A to 1C are cross-sectional views illustrating a method of forming a fine pattern using a nanoimprint technique according to the prior art, wherein a resist film 12 is formed on a substrate 11 and a stamp is formed on the resist film 12. Position 10 (FIG. 1A).

A fine pattern 10a is formed on the stamp 10.

Subsequently, the stamp 10 is pressed against the resist film 12 (FIG. 1B).

Here, when the stamp 10 is pressed onto the resist film 12, the fine pattern is transferred to the resist film 12.

Thereafter, when the stamp 10 is moved upward and separated from the resist film 12, a fine pattern is formed on the resist film 12 (FIG. 1C).

These stamps are made using hard materials such as metal, silicon, and quartz.

However, when the nanoimprinting process is performed on a large-area substrate using such a conventional hard stamp, when the uniformity of the substrate to form the pattern does not secure nanoscale precision, it is difficult to form the pattern over the entire hard stamp. There was an impossible problem.

In order to solve the problems described above, the present invention implements a multi-layered stamp having a double structure of a hard stamping part and a soft support part having elasticity, thereby providing excellent flexibility and uneven state of the object. An object of the present invention is to provide a multi-layer stamp capable of forming a uniform pattern by correction, a method of manufacturing the same, a nano-imprint system equipped with a multi-layer stamp, and a method of nanoimprinting a display panel using the multi-layer stamp.

A first preferred aspect for achieving the above objects of the present invention is

A support made of a first material;

A stamping part formed on the support part and made of a second material having a greater hardness than the first material;

There is provided a multi-layer stamp composed of an anti-stick coating film coated on the stamping part.

A second preferred aspect for achieving the above objects of the present invention is

Preparing a support made of a first material;

Preparing a stamping part made of a second material having a hardness greater than that of the first material;

Coating an anti-stick material coated on the stamping part to form an anti-stick coating film;

Provided is a method of manufacturing a multilayer stamp comprising the step of adhering the stamping portion to the support portion using an adhesive.

A third preferred aspect for achieving the above objects of the present invention is

A multilayer stamp comprising a support part made of a first material, a stamping part formed of the second material and having a hardness greater than that of the first material, and an anti-stick coating film coated on the stamping part;

A support on which a plurality of vacuum suction holes for vacuum suction of the support of the multilayer stamp are exposed on the upper portion;

A vacuum pump connected to the plurality of vacuum suction holes;

There is provided a nano imprint system equipped with a multi-layer stamp, which is capable of pressing the object to be stamped and consists of a roller with a light source attached thereto.

A fourth preferred aspect for achieving the above objects of the present invention is

Preparing a display panel on which a curing film to be nanoimprinted is formed;

Preparing a multi-layer stamp comprising a support made of a first material, a stamping part formed of the second material and having a hardness greater than that of the first material, and an anti-stick coating film coated on the stamping part;

Pressing the multilayer stamp onto the curing film to form a pattern formed on the display panel;

Curing the pattern formed on the display panel;

There is provided a method of nanoimprinting a multi-layer stamp on a display panel using a multi-layer stamp, the step of separating the multi-layer stamp from a pattern formed on the display panel.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

2A and 2B are schematic cross-sectional views of a multilayer stamp according to the present invention, wherein the multilayer stamp of the present invention comprises a support 100 made of a first material, as shown in FIG. 2A; A stamping part 200 formed on the support part 100 and made of a second material having a greater hardness than the first material; It consists of a coating film 210 for preventing adhesion (粘着) coated on the stamping part 200.

And, more preferably, as shown in Figure 2b, the support 100 made of a first material; A stamping part 200 made of a second material adhered to the support part 100 by an adhesive 110 and having a greater hardness than the first material; It consists of an anti-stick coating film 210 coated on the stamping part 200.

That is, FIG. 2A shows a stamping part 200 formed on the support part 100, and FIG. 2B shows that the stamping part 200 is attached to the support part 100.

In addition, the first material is preferably a material having an elastic force, and the second material is preferably one of metal, silicon, and quartz.

In addition, the anti-stick coating film 210 is made of a self assembled monolayer (SAM).

When the anti-sticking coating film 210 is formed on the stamping part 200, the multilayer stamp subjected to the inprinting process to the stamping part 200 may be separated from the inprinted pattern.

This multi-layer stamp has a double structure of a thin stamped hard part and a soft support part having elasticity, so that it is excellent in flexibility to correct an uneven state of an object to form a uniform pattern. It is also possible to produce a stamp of the roll (Roll) type.

3A to 3E are schematic cross-sectional views for explaining a method of manufacturing a multilayer stamp according to the present invention. First, a support part 100 made of a first material is prepared (FIG. 3A).

Thereafter, a stamping part 200 made of a second material having a greater hardness than the first material is prepared (FIG. 3B).

The stamping part 200 may form a fine pattern on the stamping part 200 by a method by dry etching, a method by electroplating, or the like.

Next, the anti-sticking material coated on the stamping part 200 is coated to form an anti-sticking coating film 210 (FIG. 3C).

Subsequently, the stamping part 200 is adhered to the support part 100 using an adhesive 110 (FIGS. 3D and 3E).

The adhesive is preferably a thermosetting or ultraviolet curable adhesive.

In addition, the support part 100 is made of an elastic material.

That is, an anti-stick film is formed on the front surface of the manufactured hard stamping part, and a thermosetting or ultraviolet curable adhesive is applied on the back side, and then a rubber material having a solid elasticity is laminated thereon, or a liquid rubber material is adhesive After pouring on the upper part, the adhesive and the liquid rubber material can be hardened together to produce a multilayer stamp.

4 is a cross-sectional view illustrating a nano imprint system equipped with a multilayer stamp according to the present invention, wherein the nano imprint system equipped with a multilayer stamp is formed on a support 100 made of a first material and the support 100. A multi-layer stamp comprising a stamping part 200 made of a second material having a greater hardness than the first material, and an anti-stick coating film 210 coated on the stamping part 200; A support 300 to which a plurality of vacuum suction holes 310 for vacuum suctioning the support 100 of the multilayer stamp are exposed; A vacuum pump 400 connected to the plurality of vacuum suction holes 310; The object to be stamped can be pressurized, and is composed of a roller 600 to which a light source 610 is attached.

To perform the nano-inprint process with the nano-imprint system equipped with the multilayer stamp configured as described above, first, the support part 100 of the multilayer stamp described above is in close contact with the plurality of vacuum suction holes 310 exposed to the support 300. In addition, the pump is pumped by the vacuum pump 400, and the multilayer stamp is vacuum sucked from the plurality of vacuum suction holes 310 to be fixed to the support 300.

Thereafter, the curable material 500 is applied to the stamping part 200 of the multilayer stamp, the film to be stamped is placed on the stamping part 200 of the multilayer stamp, and the light source 610 is attached to the roller 600. Passes through the in-print process.

At this time, the light irradiated from the light source 610 to cure the curable material 500 in the area where the roller 600 has passed.

In addition, when the reflective plate 620 is installed in the roller 600, the light of the light source 610 may be prevented from being emitted to the outside.

5A to 5D are cross-sectional views illustrating a state in which a nanoimprinting process is performed on a display panel using a multilayer stamp according to the present invention, and prepares a display panel 700 in which a curing film 710 to be nanoimprinted is formed. (FIG. 5A)

Thereafter, the support 100 made of a first material; A stamping part 200 formed on the support part 100 and made of a second material having a greater hardness than the first material; A multi-layer stamp composed of an anti-stick coating film 210 coated on the stamping part 200 is prepared.

Then, the multilayer stamp is pressed onto the curing film 710 (FIG. 5B).

In this case, while the stamping part 200 of the multilayer stamp is in contact with the curing film 710, the stamping part 200 presses the curing film 710 by a pressurized pressure, the curing film The pattern of the stamping part 200 is transferred to 710, and a pattern 711 is formed on the display panel 700.

Subsequently, the pattern 711 formed on the display panel 700 is cured (FIG. 5C).

When the curing film 710 is formed of an ultraviolet curable material, as shown in FIG. 5C, ultraviolet light is irradiated to cure the pattern 711 formed on the display panel 700.

Finally, the multilayer stamp is separated from the pattern 711 formed on the display panel 700 (FIG. 5D).

Due to the departure of the multilayer stamp, only the pattern 711 remains on the display panel 700.

As such, the nano stamping process may be performed on the display panel using the multilayer stamp of the present invention.

FIG. 6 is a cross-sectional view illustrating a state in which a nano-imprinting process is performed on a display panel with a flexible multilayer stamp according to the present invention. In the above-described structure of the multilayer stamp, a stamping portion is formed to an extremely thin thickness, and a support portion is also illustrated. When made thin, the multilayer stamp is flexible.

As such, a nano imprinting process may be performed on the display panel 700 using a flexible multilayer stamp.

That is, the roller 600 with the curable material 500 applied to the display panel 700, the flexible multilayer stamp 800 placed on the curable material 500, and the light source 610 shown in FIG. 4 attached thereto. In press process may be performed while pressing the flexible multi-layer stamp (800).

In this case, when the light is irradiated from the light source 610, the curable material 500 of the region where the roller 600 passes is cured.

As described above, the present invention implements a multi-layered stamp having a double structure of a hard stamping part and a soft support part having elasticity, and has excellent flexibility to correct an uneven state of an object so as to be uniform. There is an effect that can form a pattern.

In addition, the present invention can apply a uniform pressure to a large area object with a multi-layer stamp, there is an effect that can form a uniform pattern.

In addition, since the support portion of the multilayer stamp is made of an elastic material to improve adhesion by vacuum, the present invention has an effect of performing a smooth patterning process.

Although the invention has been described in detail only with respect to specific examples, it will be apparent to those skilled in the art that various modifications and variations are possible within the spirit of the invention, and such modifications and variations belong to the appended claims.

Claims (11)

A support made of a first material; A stamping part formed on the support part and made of a second material having a greater hardness than the first material; A multilayer stamp composed of a coating film for preventing adhesion coated on the stamping part. The method of claim 1, The stamping unit, The multilayer stamp is bonded to the support using an adhesive. The method of claim 2, The adhesive, A multilayer stamp, characterized in that it is a thermosetting or ultraviolet curable adhesive. The method of claim 1, And said first material is a material having elasticity. Preparing a support made of a first material; Preparing a stamping part made of a second material having a hardness greater than that of the first material; Coating an anti-stick material coated on the stamping part to form an anti-stick coating film; Bonding the stamping part to the support part using an adhesive; The method of claim 5, wherein The anti-stick coating film, Method of producing a multilayer stamp, characterized in that the self assembled monolayer (Self assembled monolayer). The method of claim 5, wherein The first material is an elastic rubber, And wherein said second material is one of metal, silicon and quartz. A multilayer stamp comprising a support part made of a first material, a stamping part formed of the second material and having a hardness greater than that of the first material, and an anti-stick coating film coated on the stamping part; A support on which a plurality of vacuum suction holes for vacuum suction of the support of the multilayer stamp are exposed on the upper portion; A vacuum pump connected to the plurality of vacuum suction holes; The nano imprint system is equipped with a multi-layer stamp that can press the object to be stamped, consisting of a roller with a light source attached. The method of claim 8, On the roller, The nano imprint system equipped with a multi-layer stamp, characterized in that the reflector is further provided to prevent the light of the light source is emitted to the outside. Preparing a display panel on which a curing film to be nanoimprinted is formed; Preparing a multi-layer stamp comprising a support made of a first material, a stamping part formed of the second material and having a hardness greater than that of the first material, and an anti-stick coating film coated on the stamping part; Pressing the multilayer stamp onto the curing film to form a pattern formed on the display panel; Curing the pattern formed on the display panel; And nano-imprinting the multi-layer stamp on the display panel using the multi-layer stamp, wherein the multi-layer stamp is separated from the pattern formed on the display panel. The method of claim 10, The method of claim 1, wherein the multilayer stamp is flexible.

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