TW201632271A - 塗佈系統及塗佈方法 - Google Patents
塗佈系統及塗佈方法 Download PDFInfo
- Publication number
- TW201632271A TW201632271A TW104142273A TW104142273A TW201632271A TW 201632271 A TW201632271 A TW 201632271A TW 104142273 A TW104142273 A TW 104142273A TW 104142273 A TW104142273 A TW 104142273A TW 201632271 A TW201632271 A TW 201632271A
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- liquid organic
- organic precursor
- curable liquid
- reservoir
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 227
- 239000011248 coating agent Substances 0.000 title claims abstract description 217
- 239000007788 liquid Substances 0.000 claims abstract description 160
- 239000002243 precursor Substances 0.000 claims abstract description 157
- 239000000758 substrate Substances 0.000 claims abstract description 70
- 238000000151 deposition Methods 0.000 claims abstract description 52
- 239000011247 coating layer Substances 0.000 claims abstract description 34
- 239000002904 solvent Substances 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 22
- 230000032258 transport Effects 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 11
- 238000003860 storage Methods 0.000 claims description 11
- 238000005086 pumping Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 24
- 238000007764 slot die coating Methods 0.000 description 9
- 239000012298 atmosphere Substances 0.000 description 8
- 239000011888 foil Substances 0.000 description 8
- 238000001723 curing Methods 0.000 description 7
- 239000012044 organic layer Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 5
- 238000007872 degassing Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000002572 peristaltic effect Effects 0.000 description 4
- 230000009102 absorption Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- -1 prepolymers (i.e. Substances 0.000 description 3
- 150000003254 radicals Chemical group 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000012432 intermediate storage Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000012705 liquid precursor Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000003847 radiation curing Methods 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 230000009103 reabsorption Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
- B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/50—Multilayers
- B05D7/52—Two layers
- B05D7/54—No clear coat specified
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2252/00—Sheets
- B05D2252/02—Sheets of indefinite length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
- B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14198615.8A EP3034182A1 (en) | 2014-12-17 | 2014-12-17 | Coating system and coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201632271A true TW201632271A (zh) | 2016-09-16 |
Family
ID=52133922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104142273A TW201632271A (zh) | 2014-12-17 | 2015-12-16 | 塗佈系統及塗佈方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20180015501A1 (en17) |
| EP (2) | EP3034182A1 (en17) |
| JP (1) | JP2018509279A (en17) |
| KR (1) | KR20170095996A (en17) |
| CN (1) | CN107107101A (en17) |
| TW (1) | TW201632271A (en17) |
| WO (1) | WO2016099262A1 (en17) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6417999B2 (ja) * | 2015-02-19 | 2018-11-07 | 東京エレクトロン株式会社 | 処理液供給装置、処理液供給方法及び記憶媒体 |
| KR20170130421A (ko) * | 2015-03-25 | 2017-11-28 | 린텍 가부시키가이샤 | 가스 배리어층을 갖는 성형물의 제조 장치 |
| CN110880550A (zh) * | 2018-09-05 | 2020-03-13 | 杭州纤纳光电科技有限公司 | 含有表面活性剂的前驱体溶液的涂布设备及其方法 |
| FR3104038B1 (fr) * | 2019-12-04 | 2022-11-25 | Metalizz | Procédé de traitement de surface d’un objet en trois dimensions |
| US20210381097A1 (en) | 2020-06-04 | 2021-12-09 | Applied Materials, Inc. | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber |
| PL243789B1 (pl) | 2022-01-27 | 2023-10-09 | Univ Jagiellonski | Sposób nanoszenia cieczy na obiekt w systemie próżniowym i system próżniowy do nanoszenia cieczy na obiekt |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4374081A (en) * | 1981-09-17 | 1983-02-15 | General Electric Co. | Cure of epoxy systems at reduced pressures |
| US4769795A (en) * | 1985-05-16 | 1988-09-06 | F. Massa | Method of making an underwater electroacoustic transducer with long-lasting high leakage resistance |
| US5019607A (en) * | 1989-11-01 | 1991-05-28 | Eastman Kodak Company | Modified epoxy resins and composites |
| JPH0629664U (ja) * | 1992-09-21 | 1994-04-19 | 石川島播磨重工業株式会社 | 塗工装置 |
| CN1093783C (zh) * | 1996-02-21 | 2002-11-06 | 松下电器产业株式会社 | 液体喷涂喷嘴和液体喷涂喷嘴的制造方法 |
| JPH11207237A (ja) * | 1998-01-23 | 1999-08-03 | Lintec Corp | 塗布装置 |
| US8900366B2 (en) * | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
| JP2004148167A (ja) * | 2002-10-29 | 2004-05-27 | Nordson Corp | 粘性流体材料の塗布方法及び装置 |
| US20040247794A1 (en) * | 2003-06-03 | 2004-12-09 | Fuji Photo Film Co., Ltd. | Coating method and coater |
| JP2005190598A (ja) * | 2003-12-26 | 2005-07-14 | Sony Corp | 磁気記録媒体の製造装置 |
| US7291362B2 (en) * | 2004-01-20 | 2007-11-06 | 3M Innovative Properties Company | Method and apparatus for controlling coating width |
| JP2007075677A (ja) * | 2005-09-12 | 2007-03-29 | Konica Minolta Photo Imaging Inc | 表面層のカーテンスプレー塗布方法、表面層塗布用のカーテンスプレー塗布装置、インクジェット記録用紙 |
| JP4954574B2 (ja) * | 2006-03-02 | 2012-06-20 | 日東電工株式会社 | 透明ガスバリア性フィルムの製造方法および透明ガスバリア性フィルムの製造装置 |
| JP4833720B2 (ja) * | 2006-04-19 | 2011-12-07 | 富士フイルム株式会社 | 塗布液の塗布方法及び装置 |
| JP5255856B2 (ja) * | 2008-01-31 | 2013-08-07 | 富士フイルム株式会社 | 機能性フィルムの製造方法 |
| EP2292339A1 (en) * | 2009-09-07 | 2011-03-09 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Coating method and coating apparatus |
| US8297221B2 (en) * | 2010-06-22 | 2012-10-30 | Ortho-Clinical Diagnostics, Inc. | Apparatus for slot die setup and control during coating |
| EP2445028A1 (en) | 2010-10-25 | 2012-04-25 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Opto-electric device and method of manufacturing an opto-electric device |
| US9044894B2 (en) * | 2011-06-07 | 2015-06-02 | 3M Innovative Properties Company | Slot die position adjustment and return to baseline |
| US9096923B2 (en) * | 2011-11-10 | 2015-08-04 | Corning Incorporated | Coating apparatus and method for forming a coating layer on monolith substrates |
| JP5988619B2 (ja) * | 2012-03-06 | 2016-09-07 | 株式会社アルバック | 成膜装置、成膜方法 |
| EP2799154A1 (en) * | 2013-05-03 | 2014-11-05 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Slot-die coating method, apparatus, and substrate |
| TWI619155B (zh) * | 2013-05-14 | 2018-03-21 | Shibaura Mechatronics Corp | Liquid supply device and substrate processing device |
-
2014
- 2014-12-17 EP EP14198615.8A patent/EP3034182A1/en not_active Withdrawn
-
2015
- 2015-12-16 EP EP15834725.2A patent/EP3233304A1/en not_active Withdrawn
- 2015-12-16 CN CN201580073661.XA patent/CN107107101A/zh active Pending
- 2015-12-16 KR KR1020177019666A patent/KR20170095996A/ko not_active Withdrawn
- 2015-12-16 WO PCT/NL2015/050868 patent/WO2016099262A1/en active Application Filing
- 2015-12-16 JP JP2017532893A patent/JP2018509279A/ja active Pending
- 2015-12-16 US US15/537,281 patent/US20180015501A1/en not_active Abandoned
- 2015-12-16 TW TW104142273A patent/TW201632271A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016099262A1 (en) | 2016-06-23 |
| JP2018509279A (ja) | 2018-04-05 |
| US20180015501A1 (en) | 2018-01-18 |
| EP3034182A1 (en) | 2016-06-22 |
| CN107107101A (zh) | 2017-08-29 |
| EP3233304A1 (en) | 2017-10-25 |
| KR20170095996A (ko) | 2017-08-23 |
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